JP5456113B2 - Resin sealed package - Google Patents

Resin sealed package Download PDF

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JP5456113B2
JP5456113B2 JP2012179403A JP2012179403A JP5456113B2 JP 5456113 B2 JP5456113 B2 JP 5456113B2 JP 2012179403 A JP2012179403 A JP 2012179403A JP 2012179403 A JP2012179403 A JP 2012179403A JP 5456113 B2 JP5456113 B2 JP 5456113B2
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resin
electronic component
terminal
support
package
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JP2012216878A (en
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裕治 国本
昭彦 立岩
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Shinko Electric Industries Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/568—Temporary substrate used as encapsulation process aid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/19—Manufacturing methods of high density interconnect preforms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
    • H01L2224/241—Disposition
    • H01L2224/24135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/24137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
    • H01L2224/241—Disposition
    • H01L2224/24151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/24153—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate
    • H01L2224/24195—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being a discrete passive component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73267—Layer and HDI connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/35—Mechanical effects
    • H01L2924/351—Thermal stress
    • H01L2924/3511—Warping

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

本発明は半導体パッケージに関し、特に、半導体集積回路の全般のパッケージとして使用可能な樹脂封止パッケージに関する。   The present invention relates to a semiconductor package, and more particularly to a resin-sealed package that can be used as a general package of a semiconductor integrated circuit.

通常、樹脂封止パッケージにおいては、単体又は複数の能動素子又は受動素子等の電子部品が封止樹脂等によって固定されている。そして個々の能動素子又は受動素子上には、配線層と絶縁樹脂層が積層されている。   Usually, in a resin-sealed package, an electronic component such as a single active element or a plurality of active elements or passive elements is fixed by a sealing resin or the like. A wiring layer and an insulating resin layer are laminated on each active element or passive element.

このような、単体又は複数の能動素子又は受動素子を搭載した樹脂封止パッケージを製造する場合において、支持体を用い、この支持体上に接着剤層を介して各素子を搭載し、樹脂で各素子を封止した後、配線層と絶縁樹脂層とを積層し、しかる後に、支持体を除去して、樹脂封止パッケージを完成させる製造方法がある。   When manufacturing such a resin-sealed package having a single active element or a plurality of active elements or passive elements, a support is used, and each element is mounted on the support via an adhesive layer. There is a manufacturing method in which a wiring layer and an insulating resin layer are laminated after each element is sealed, and then the support is removed to complete a resin-sealed package.

上記のように支持体を用いた樹脂封止パッケージの製造方法において、複数の能動素子又は受動素子を支持体に搭載する場合に、各素子の端子面を同一面に揃えて封止することが必要となる場合がある。かかる場合において、従来の一般的な樹脂封止パッケージの製造方法を次に説明する。   In the method for manufacturing a resin-sealed package using a support as described above, when a plurality of active elements or passive elements are mounted on the support, the terminal surfaces of the elements can be sealed on the same surface. It may be necessary. In such a case, a conventional method for manufacturing a general resin-sealed package will be described next.

図１（ａ）〜図１（ｆ）は、複数の能動素子又は受動素子等の電子部品を支持体に搭載し、樹脂封止して、パッケージに組み込む場合の従来技術であって、各能動素子又は受動素子の端子面側を基準として同一面に揃える場合の例である。   FIG. 1A to FIG. 1F are prior arts in the case where electronic parts such as a plurality of active elements or passive elements are mounted on a support, sealed with resin, and incorporated in a package. It is an example in the case of aligning on the same surface with reference to the terminal surface side of the element or passive element.

まず、図１（ａ）において、支持体１０上に接着剤２０を介して受動素子１２、能動素子１４、１６等を搭載する。受動素子１２、能動素子１４、１６の端子１２ａ、１４ａ、１６ａは、支持体の上面で位置合わせされる。   First, in FIG. 1A, the passive element 12, the active elements 14 and 16, etc. are mounted on the support 10 via the adhesive 20. The terminals 12a, 14a and 16a of the passive element 12 and the active elements 14 and 16 are aligned on the upper surface of the support.

次に、図１（ｂ）において、支持体１０上の受動素子１２、能動素子１４、１６等の部品は、樹脂２２で封止する。樹脂２２の注入時の圧力により、部品が位置ずれを起こしたり、樹脂２２が混入することにより端子１２ａ、１４ａ、１６ａが汚染されたりする虞がある。   Next, in FIG. 1B, components such as the passive element 12 and the active elements 14 and 16 on the support 10 are sealed with a resin 22. There is a possibility that the components may be displaced due to the pressure when the resin 22 is injected, or that the terminals 12a, 14a, and 16a may be contaminated when the resin 22 is mixed.

次に、図１（ｃ）において、樹脂２２が硬化収縮して後、支持体１０が剥離される。封止樹脂の硬化により収縮により、正面に凹凸が発生したり、支持体１０の剥離による樹脂表面の反りが生じたりする虞がある。   Next, in FIG. 1C, after the resin 22 is cured and contracted, the support 10 is peeled off. Due to the shrinkage due to the curing of the sealing resin, there is a possibility that irregularities are generated on the front surface or the resin surface is warped due to peeling of the support 10.

次に、図１（ｄ）において、樹脂層２４にビア２６を形成し、樹脂層２４上には、ビア２６に接続する配線パターン（配線層）２８を形成する。そして、図１（ｅ）に示すように、樹脂層２４及び配線層２８を交互に積層し、パッケージを多層に形成する。   Next, in FIG. 1D, a via 26 is formed in the resin layer 24, and a wiring pattern (wiring layer) 28 connected to the via 26 is formed on the resin layer 24. And as shown in FIG.1 (e), the resin layer 24 and the wiring layer 28 are laminated | stacked alternately, and a package is formed in a multilayer.

図１（ｅ）において、パッケージの最表面は、ソルダレジスト３０等を形成し、外部接続用の外部端子３２を形成し、パッケージを完成する。   In FIG. 1E, a solder resist 30 or the like is formed on the outermost surface of the package, and external terminals 32 for external connection are formed to complete the package.

完成された樹脂封止パッケージを示す図１（ｅ）において、各受動素子１２、能動素子１４、１６の端子１２ａ、１４ａ、１６ａの表面は、支持体１０により規定される所定の面に整合されることとなる。なお、受動素子１２、能動素子１４、１６の中に放熱部品が含まれる場合は、このような放熱性のある電子部品は、その背面における封止樹脂２２を剥離し、部品の背面を露出させる。封止樹脂を剥離した部品の背面には必要によりヒートシンク（図示せず）等を接続する。   In FIG. 1E showing the completed resin-sealed package, the surfaces of the terminals 12a, 14a and 16a of the passive elements 12 and the active elements 14 and 16 are aligned with a predetermined surface defined by the support 10. The Rukoto. In addition, when the heat dissipation component is included in the passive element 12 and the active elements 14 and 16, such a heat dissipation electronic component peels off the sealing resin 22 on the back surface to expose the back surface of the component. . If necessary, a heat sink (not shown) or the like is connected to the back surface of the part from which the sealing resin has been peeled off.

上記のような従来の樹脂封止パッケージの製造方法において、一般に次のような問題がある。
支持体と素子との間の仮接着を、後の工程で支持体を素子を含むパッケージから剥離する必要があることを考慮して、予め弱くしておくと、素子を支持体に仮接着した後樹脂封止する際に、端子と支持体との間に樹脂が混入して端子が汚染されたり、樹脂の注入時の圧力によって素子の位置が支持体に対して所定の位置からずれることがある。 The conventional method for manufacturing a resin-sealed package as described above generally has the following problems.
Considering that it is necessary to peel the support from the package containing the element in a later step, the temporary attachment between the support and the element is temporarily bonded to the support. When post-resin sealing is performed, the resin may be mixed between the terminal and the support to contaminate the terminal, or the position of the element may deviate from a predetermined position with respect to the support due to the pressure during resin injection. is there.

逆に支持体と素子との間の仮接着を強くすると、接着剤そのものが端子に付着する。封止樹脂の硬化収縮等により端子面に凹凸が発生し、端子面が平坦にならない。支持体を剥離するため、パッケージに反りが発生し、端子面が平坦にならない。素子の背面に放熱部品を付加する場合は、当該背面における封止樹脂を研磨等により除去して素子の背面をあらためて露出させる必要がある。   On the contrary, when the temporary adhesion between the support and the element is strengthened, the adhesive itself adheres to the terminal. Unevenness occurs on the terminal surface due to hardening shrinkage of the sealing resin, and the terminal surface does not become flat. Since the support is peeled off, the package is warped and the terminal surface is not flat. When a heat dissipation component is added to the back surface of the element, it is necessary to remove the sealing resin on the back surface by polishing or the like to expose the back surface of the element again.

本発明に関連する先行技術として、米国特許第６，５８３，８３６号明細書（特許文献１）がある。これによると、樹脂封止パッケージの製造方法において、少なくとも樹脂封止された微細電子部品を具備し、能動面とその背面を有する第１の封止構造体と、同様の構造を有する第２の封止構造体とを、互いに背面同士を接着剤を用いて互いに接合し、各封止構造体の能動面側に絶縁層と配線層から成る積層体をビルドアップ方式で同時に形成する。そして、必要があれば、その後、第１の封止構造体と第２の封止構造体とを分離する。この方法によれば、第１の封止構造体と第２の封止構造体とが背面同士で互いに接合された状態で、それらの能動面側にて絶縁層と配線層から成る積層体がビルドアップ方式で形成されるため、積層体の形成工程で、反りやひずみ等を生ずることなく、パッケージが安定して保持される。   As prior art related to the present invention, there is US Pat. No. 6,583,836 (Patent Document 1). According to this, in the method for manufacturing the resin-sealed package, the second sealed structure having the same structure as the first sealed structure having at least the resin-sealed fine electronic component and having the active surface and the back surface thereof. The back surfaces of the sealing structures are bonded to each other using an adhesive, and a laminated body including an insulating layer and a wiring layer is simultaneously formed on the active surface side of each sealing structure by a build-up method. And if necessary, after that, the first sealing structure and the second sealing structure are separated. According to this method, in a state where the first sealing structure and the second sealing structure are bonded to each other at the back surfaces, a laminate including an insulating layer and a wiring layer is formed on the active surface side. Since it is formed by the build-up method, the package is stably held without causing warpage or distortion in the formation process of the laminate.

米国特許第６，５８３，８３６号明細書US Pat. No. 6,583,836

上記のように、従来の樹脂封止パッケージの製造方法によると、支持体と素子との間の仮接着を、後の工程で支持体を素子を含むパッケージから剥離する必要があることを考慮して、予め弱くしておくと、素子を支持体に仮接着した後樹脂封止する際に、端子と支持体との間に樹脂が混入して端子が汚染されたり、樹脂の注入時の圧力によって素子の位置が支持体に対して所定の位置からずれることがある。   As described above, according to the conventional method for manufacturing a resin-sealed package, it is considered that the temporary bonding between the support and the element needs to be peeled off from the package including the element in a later step. If the element is weakened in advance, when the resin is sealed after the element is temporarily bonded to the support, the resin is mixed between the terminal and the support and the terminal is contaminated, or the pressure when the resin is injected As a result, the position of the element may deviate from a predetermined position with respect to the support.

逆に支持体と素子との間の仮接着を強くすると、接着剤そのものが端子に付着する。封止樹脂の硬化収縮等により端子面に凹凸が発生し、端子面が平坦にならない。支持体を剥離するため、パッケージに反りが発生し、端子面が平坦にならない、等の問題がある。   On the contrary, when the temporary adhesion between the support and the element is strengthened, the adhesive itself adheres to the terminal. Unevenness occurs on the terminal surface due to hardening shrinkage of the sealing resin, and the terminal surface does not become flat. Since the support is peeled off, there is a problem that the package is warped and the terminal surface is not flat.

また、従来の樹脂封止パッケージの製造方法では、支持体の構造が上下対称な構造となっていないため、パッケージに反りが発生する。そして、反りは支持体を剥離した後においても、樹脂内に残留応力が存在することにより、反りが解消されない、という問題がある。
また、従来の封止樹脂パッケージの製造方法によると、樹脂の凹凸や反りによって後に形成される絶縁樹脂を平坦に形成できず、精度の良い配線形成が困難となり、配線のファインピッチ化が妨げられる、という問題がある。 Further, in the conventional method for manufacturing a resin-sealed package, the structure of the support is not a vertically symmetrical structure, so that the package is warped. Further, even after the support is peeled off, there is a problem that the warp is not eliminated due to the presence of residual stress in the resin.
In addition, according to the conventional method for manufacturing a sealing resin package, the insulating resin to be formed later cannot be formed flat due to the unevenness or warpage of the resin, making it difficult to form an accurate wiring and hindering the fine pitch of the wiring. There is a problem.

そこで、本発明は上記のような問題を解決するもので、パッケージを構成する複数の電子部品の端子面を均一な高さに設定すると共に、各電子部品を上下から支持体で挟んだ状態で固定して、樹脂封止することにより、封止樹脂の反りやひずみの発生をなくし或いは低減して、各電子部品の位置ずれ、ひずみ等を解消した樹脂封止パッケージを提供することを課題とする。   Accordingly, the present invention solves the above-described problems, and sets the terminal surfaces of a plurality of electronic components constituting the package to a uniform height and sandwiches each electronic component from above and below with a support. It is an object of the present invention to provide a resin-sealed package that eliminates or reduces the occurrence of warping and distortion of the sealing resin by fixing and resin-sealing, and eliminates displacement, distortion, etc. of each electronic component. To do.

上記の課題を達成するために、本発明の樹脂封止パッケージは、電子部品は、複数の端子を有する第一面と、該第一面とは反対側の第二面と、該第一面及び該第二面間を連接する側面と、からなり、高さの異なる複数の前記電子部品を備え、複数の前記電子部品の端子の表面を所定の平面上に揃えるように、前記電子部品の端子の表面を露出し、且つ表面が前記電子部品の端子の表面と同一面となるように形成され、前記電子部品の側面の一部及び前記第二面を露出して封止する封止樹脂と、前記電子部品及び前記封止樹脂上に形成され、絶縁樹脂層と前記電子部品の端子に電気的に接続する配線層とからなる積層構造体と、前記積層構造体と前記封止樹脂の間において、前記封止樹脂に埋め込まれ、前記積層体の対向面が、前記電子部品の端子の表面及び前記封止樹脂の表面と同一面となり、且つ複数の前記電子部品の間に配置された補強部材と、を有することを特徴とする。 In order to achieve the above object, in the resin-sealed package of the present invention, the electronic component includes a first surface having a plurality of terminals, a second surface opposite to the first surface, and the first surface. and a side surface which connects between said second surface consists, comprises a height different plurality of said electronic components, so as to align the surface of the plurality of electronic component terminals on a predetermined plane, said electronic component A sealing resin that exposes and seals a part of the side surface of the electronic component and the second surface, wherein the surface of the terminal is exposed and the surface is flush with the surface of the terminal of the electronic component When the formed on the electronic component and on the sealing resin, the insulating resin layer and the electrons to parts of the terminal consisting of a wiring layer for electrically connecting the laminated structure of the sealing resin and the layered structure In between, it is embedded in the sealing resin, and the facing surface of the laminate is It becomes surface and flush with the surface of the sealing resin of the child, and is characterized by having a reinforcing member disposed between the plurality of the electronic components.

本発明では、複数の電子部品の端子側を第１の接着剤層により第１の支持体の表面に仮固定し、電子部品の背面側を第２の接着剤層を有する第２の支持体で固定し、これら第１及び第２の支持体間で電子部品を挟むようにして樹脂に注入を行うので、各部品が上下対称構造に近くなり、比較的反りの少ないパッケージを得ることができる。パッケージの反りが少ないため、電子部品の端子面を平坦化しやすく、微細の配線層を形成することができる。また、電子部品の背面が封止樹脂から露出された構造であるので、ヒートシンク等の放熱部品を設置することが可能である。また、本発明では、厚さの異なる電子部品の背面を露出した状態であっても、第２の支持体により平坦が確保され、良好な封止樹脂の形成が可能となる。   In the present invention, the terminal side of the plurality of electronic components is temporarily fixed to the surface of the first support by the first adhesive layer, and the second support having the second adhesive layer on the back side of the electronic component. And the resin is injected so that the electronic component is sandwiched between the first and second supports, so that each component is close to a vertically symmetric structure and a package with relatively little warpage can be obtained. Since the package is less warped, the terminal surface of the electronic component can be easily flattened, and a fine wiring layer can be formed. In addition, since the back surface of the electronic component is exposed from the sealing resin, it is possible to install a heat dissipation component such as a heat sink. Further, in the present invention, even when the back surfaces of electronic components having different thicknesses are exposed, flatness is ensured by the second support, and favorable sealing resin can be formed.

従来の樹脂封止パッケージの製造方法を示す工程図である。It is process drawing which shows the manufacturing method of the conventional resin sealing package. 本発明の樹脂封止パッケージの製造方法を示す工程図である。It is process drawing which shows the manufacturing method of the resin sealing package of this invention. 本発明の樹脂封止パッケージの製造方法であって、図２に示す工程に続く工程を示す。It is a manufacturing method of the resin sealing package of this invention, Comprising: The process following the process shown in FIG. 2 is shown.

以下、添付図面を参照して本発明の実施の形態について詳細に説明する。
図２（ａ）〜図２（ｄ）及び図３（ａ）〜図３（ｃ）は、本発明の樹脂封止パッケージの製造方法の実施形態を示す。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
2 (a) to 2 (d) and FIGS. 3 (a) to 3 (c) show an embodiment of a method for producing a resin-sealed package of the present invention.

これらの図において、各受動素子１２や能動素子１４、１６等の電子部品は、それぞれ、平坦な一方の面（第一の面）に複数の電極端子１２ａ、１４ａ、１６ａを有し、背面である他方の面（第二の面）も第一の面と平行な平坦面に形成されている。各電子部品の電極端子１２ａ、１４ａ、１６ａの表面も部品毎に一定の平面上に位置するように形成されている。   In these drawings, each of the electronic components such as the passive elements 12 and the active elements 14 and 16 has a plurality of electrode terminals 12a, 14a, and 16a on one flat surface (first surface), respectively, The other surface (second surface) is also formed as a flat surface parallel to the first surface. The surfaces of the electrode terminals 12a, 14a, and 16a of each electronic component are also formed so as to be positioned on a certain plane for each component.

図２（ａ）において、第１の支持体１０上に接着剤層２０を介して受動素子１２、能動素子１４、１６等を搭載する。受動素子１２、能動素子１４、１６の電極端子１２ａ、１４ａ、１６ａは、支持体１０の上面の平坦な面において位置合わせされる。接着剤層２０は、各電子部品の電極端子１２ａ、１４ａ、１６ａの表面位置を揃えるために、極力薄いもの（例えば、数μｍ〜数十μｍ程度）であり、且つ硬いものであることが好適である。また、接着剤層２０の接着強度としては、やや強く、且つ電極端子１２ａ、１４ａ、１６ａの表面を汚染しない材質であるのが好ましい。このような接着剤層２０として、例えば、日東電工株式会社製のＴＲＭテープ、又は同社製のリバアルファ（登録商標）等を使用することができる。   In FIG. 2A, the passive element 12, the active elements 14, 16, etc. are mounted on the first support 10 via the adhesive layer 20. The electrode terminals 12 a, 14 a and 16 a of the passive element 12 and the active elements 14 and 16 are aligned on the flat surface of the upper surface of the support 10. The adhesive layer 20 is preferably as thin as possible (for example, about several μm to several tens of μm) and hard to align the surface positions of the electrode terminals 12a, 14a, and 16a of each electronic component. It is. Further, the adhesive strength of the adhesive layer 20 is preferably a material that is slightly strong and does not contaminate the surfaces of the electrode terminals 12a, 14a, and 16a. As such an adhesive layer 20, for example, a TRM tape manufactured by Nitto Denko Corporation or Riva Alpha (registered trademark) manufactured by the same company can be used.

次に、図２（ｂ）において、一方の面に接着剤層４２を有する第２の支持体４０を、接着剤層４２が第１の支持体１０上の電子部品の電極端子１２ａ、１４ａ、１６ａの反対側である電子部品の背面に圧着するように配置する。ここで接着剤層４２は、各受動素子１２や能動素子１４、１６等の電子部品の厚さ、即ち電子部品の背面の高さの差異を吸収するために、ある程度厚いものが好ましい（例えば厚さが数十μｍ〜数百μｍ程度）。接着剤層４０はまた、部品に圧着する時点では、半液化状（常温又は加熱して）で接着力はや強いものが好ましい。また、紫外線（ＵＶ）の適用又は加熱等によりで剥離可能なものを使用する。   Next, in FIG. 2B, the second support 40 having the adhesive layer 42 on one surface is connected to the electrode terminals 12a, 14a of the electronic components on the first support 10 with the adhesive layer 42. It arrange | positions so that it may crimp | bond to the back surface of the electronic component which is the other side of 16a. Here, the adhesive layer 42 is preferably thick to some extent in order to absorb the difference in the thickness of the electronic components such as the passive elements 12 and the active elements 14 and 16, that is, the height of the back surface of the electronic components (for example, the thickness). Is about several tens of micrometers to several hundreds of micrometers). The adhesive layer 40 is preferably semi-liquefied (normal temperature or heated) and has a slightly strong adhesive force when it is pressure-bonded to the part. Moreover, what can be peeled off by application of ultraviolet rays (UV) or heating is used.

次に、図２（ｃ）において、第１の支持体１０の接着剤層２０及び第２の支持体３０の接着剤層４間の間隙に樹脂２２を注入して、受動素子１２、能動素子１４、１６等の電子部品を封止する。封止に使用する樹脂２２は、液状樹脂で充填性の良好なものを使用する。また、部品間や端子間も樹脂２２で充填できるモールド材、又はアンダーフィル材等を用いる。また、封止に使用する樹脂２２は、硬化収縮性、熱膨張率が小さく、封止力が強いものが好ましい。   Next, in FIG. 2C, a resin 22 is injected into the gap between the adhesive layer 20 of the first support 10 and the adhesive layer 4 of the second support 30 to form the passive element 12 and the active element. Electronic components such as 14, 16 are sealed. As the resin 22 used for sealing, a liquid resin having a good filling property is used. Further, a mold material or an underfill material that can be filled with resin 22 between parts and between terminals is used. In addition, the resin 22 used for sealing is preferably a resin having a low shrinkage and thermal expansion coefficient and a strong sealing force.

なお、必要により、図２（ｃ）の工程において、電子部品が配置されていない第１の支持体１０上の箇所に、予め、接着剤層２０を介して導体補強層や補強板４４を接合しておいて、樹脂２２を注入して封止する際に、封止樹脂２２に一体化する。これにより、封止樹脂２２による受動素子１２、能動素子１４、１６等の電子部品の保持をより強固なものとすることができる。   If necessary, in the step of FIG. 2 (c), a conductor reinforcing layer or a reinforcing plate 44 is bonded in advance to the location on the first support 10 where no electronic component is disposed via the adhesive layer 20. In addition, when the resin 22 is injected and sealed, it is integrated with the sealing resin 22. Thereby, holding | maintenance of electronic components, such as the passive element 12 and the active elements 14 and 16, by the sealing resin 22, can be made stronger.

次に、図２（ｄ）において、封止樹脂２２が硬化した後、第１の支持体１０及び第２の支持体４０を電子部品や封止樹脂２２からなるパッケージから剥離する。この場合において、第１の支持体１０上の接着剤層２０及び第２の支持体４０上の接着剤層４２も同時に剥離する。   Next, in FIG. 2D, after the sealing resin 22 is cured, the first support body 10 and the second support body 40 are peeled off from the electronic component or the package made of the sealing resin 22. In this case, the adhesive layer 20 on the first support 10 and the adhesive layer 42 on the second support 40 are also peeled simultaneously.

これにより、受動素子１２、能動素子１４、１６等の電子部品の電極端子１２ａ、１４ａ、１６ａは封止樹脂２２の一方に面において露出し、各電子部品の背面は封止樹脂２２の他方の面から露出した構造となる。また、各電子部品の電極端子１２ａ、１４ａ、１６ａの表面は、封止樹脂２２の一方に面上に同一面に整然と揃えられた構造となる。   As a result, the electrode terminals 12a, 14a, 16a of the electronic components such as the passive element 12 and the active elements 14, 16 are exposed on one side of the sealing resin 22, and the back surface of each electronic component is the other side of the sealing resin 22. The structure is exposed from the surface. Further, the surfaces of the electrode terminals 12 a, 14 a, and 16 a of each electronic component have a structure that is regularly arranged on one surface of the sealing resin 22 on the same surface.

次に、図３（ａ）において、電子部品の電極端子１２ａ、１４ａ、１６ａの側に樹脂層２４を形成すると共に、この樹脂層２４にビア２６を形成し、更に、樹脂層２４及び配線層２８を交互に積層し、パッケージを多層に形成する。   Next, in FIG. 3A, a resin layer 24 is formed on the side of the electrode terminals 12a, 14a, 16a of the electronic component, a via 26 is formed in the resin layer 24, and the resin layer 24 and the wiring layer are further formed. 28 are alternately stacked to form a multilayer package.

図３（ｂ）において、パッケージの最表面は、ソルダレジスト層３０等を形成する。また、ソルダレジスト層３０を貫通する外部接続用の端子３２を形成し、パッケージを完成する。なお、必要により、封止樹脂２２を補強する導体補強層又は補強板４４を設けてもよい。このような導体補強層又は補強板４４は、図２（ｃ）の樹脂封止時の樹脂注入工程で挿入することにより形成することができる。   In FIG. 3B, a solder resist layer 30 and the like are formed on the outermost surface of the package. Further, the external connection terminal 32 penetrating the solder resist layer 30 is formed to complete the package. If necessary, a conductor reinforcing layer or reinforcing plate 44 that reinforces the sealing resin 22 may be provided. Such a conductor reinforcing layer or reinforcing plate 44 can be formed by being inserted in the resin injection step at the time of resin sealing in FIG.

受動素子１２、能動素子１４、１６等の電子部品の中に放熱部品が含まれる場合は、必要により、図３（ｃ）に示すように、露出している発熱部品（この場合、能動素子１４、１６）の背面に接着剤層５４を介してヒートシンク５２等を接続する。これにより、このパッケージに搭載されている発熱部品の放熱性が良好なものとなる。   When the heat dissipating part is included in the electronic parts such as the passive element 12 and the active elements 14 and 16, as shown in FIG. 3C, the exposed heat generating part (in this case, the active element 14 in this case). 16) is connected to the back surface of the heat sink 52 or the like via an adhesive layer 54. Thereby, the heat dissipation of the heat-generating component mounted in this package becomes favorable.

以上添付図面を参照して本発明の実施形態について説明したが、本発明は上記の実施形態に限定されるものではなく、本発明の精神ないし範囲内において種々の形態、変形、修正等が可能である。   Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above-described embodiments, and various forms, modifications, corrections, and the like are possible within the spirit and scope of the present invention. It is.

例えば、上記の実施形態においては、パッケージに受動素子１２、能動素子１４、１６等の複数の電子部品が搭載される場合について説明したが、本発明においては、受動素子１２又は能動素子１４、１６のいずれか１個の電子部品で構成することも可能である。   For example, in the above embodiment, the case where a plurality of electronic components such as the passive element 12 and the active elements 14 and 16 are mounted on the package has been described. However, in the present invention, the passive element 12 or the active elements 14 and 16 are mounted. It is also possible to comprise any one of these electronic components.

以上に説明したように、本発明は微細配線パッケージは、複数の能動素子又は受動素子を有するあらゆる半導体パッケージに応用することができ、電子部品におけるファインピッチ化を達成することができる。   As described above, the fine wiring package of the present invention can be applied to any semiconductor package having a plurality of active elements or passive elements, and can achieve a fine pitch in electronic components.

１０ 第１の支持体
１２、１４、１６ 電子部品
１２ａ、１４ａ、１６ａ 端子
２０ 第１の接着剤層
２２ 封止樹脂
２４ 絶縁樹脂層
２６ ビア
２８ 配線層
３０ ソルダレジスト
３２ 外部端子
４０ 第２の支持体
４２ 第２の接着剤層 DESCRIPTION OF SYMBOLS 10 1st support body 12, 14, 16 Electronic component 12a, 14a, 16a Terminal 20 1st adhesive layer 22 Sealing resin 24 Insulating resin layer 26 Via 28 Wiring layer 30 Solder resist 32 External terminal 40 2nd support Body 42 second adhesive layer

Claims (4)

電子部品は、複数の端子を有する第一面と、該第一面とは反対側の第二面と、該第一面及び該第二面間を連接する側面と、からなり、高さの異なる複数の前記電子部品を備え、
複数の前記電子部品の端子の表面を所定の平面上に揃えるように、前記電子部品の端子の表面を露出し、且つ表面が前記電子部品の端子の表面と同一面となるように形成され、前記電子部品の側面の一部及び前記第二面を露出して封止する封止樹脂と、
前記電子部品及び前記封止樹脂上に形成され、絶縁樹脂層と前記電子部品の端子に電気的に接続する配線層とからなる積層構造体と、
前記積層構造体と前記封止樹脂の間において、前記封止樹脂に埋め込まれ、前記積層体の対向面が、前記電子部品の端子の表面及び前記封止樹脂の表面と同一面となり、且つ複数の前記電子部品の間に配置された補強部材と、
を有することを特徴とする樹脂封止パッケージ。 The electronic component comprises a first surface having a plurality of terminals, a second surface opposite to the first surface, and a side surface connecting the first surface and the second surface , comprising a plurality of different electronic components,
To align the surfaces of the plurality of the electronic components of the terminal on a predetermined plane, the exposed surfaces of the electronic components of the terminal, is formed so as and the surface becomes flush with the surface of the electronic component of the terminal, A sealing resin that exposes and seals part of the side surface of the electronic component and the second surface ;
A laminated structure formed on the electronic component and the sealing resin and including an insulating resin layer and a wiring layer electrically connected to a terminal of the electronic component;
Between the laminated structure and the sealing resin, embedded in the sealing resin, the facing surface of the laminated body is flush with the surface of the terminal of the electronic component and the surface of the sealing resin, and a plurality of A reinforcing member disposed between the electronic components of
Resin sealed package, characterized in that it comprises a. 前記補強部材は補強板であることを特徴とする請求項１に記載の樹脂封止パッケージ。The resin-sealed package according to claim 1, wherein the reinforcing member is a reinforcing plate. 前記補強部材は、導電性補強層であることを特徴とする請求項１又は２に記載の樹脂封止パッケージ。The resin-sealed package according to claim 1, wherein the reinforcing member is a conductive reinforcing layer. 封止樹脂から露出している電子部品の第二面に接着剤を介してヒートシンクが接続され、該ヒートシンクの電子部品の第二面に対向する面と前記各電子部品の第二面との間の距離は、各電子部品ごとに異なることを特徴とする請求項１〜３のいずれか１項に記載の樹脂封止パッケージ。 A heat sink is connected to the second surface of the electronic component exposed from the sealing resin via an adhesive, and between the surface of the heat sink that faces the second surface of the electronic component and the second surface of each electronic component. The resin-sealed package according to any one of claims 1 to 3 , wherein the distance is different for each electronic component .
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