JP5410330B2 - Stylus observation device - Google Patents

Description

  The present invention relates to a stylus observation apparatus for observing a stylus used in a surface texture measuring machine.

2. Description of the Related Art Conventionally, there has been known a surface texture measuring machine that includes a rod-like stylus having a contact that contacts an object to be measured at one end, and measures the surface property of the object to be measured by bringing the contact into contact with the object to be measured ( For example, see Patent Document 1).
A coordinate measuring device (surface texture measuring device) described in Patent Document 1 includes a probe pin (stylus) having a probe ball (contact), and the surface of the workpiece is brought into contact with the workpiece (object to be measured). The properties are being measured.
Moreover, in the coordinate measuring apparatus described in Patent Document 1, a probe ball, a probe ball by using a video camera that captures an area in contact with a workpiece, and a monitor that displays an image captured by the video camera, and The area where the workpiece contacts can be visually confirmed. Therefore, the coordinate measuring apparatus described in Patent Literature 1 can appropriately measure even when measuring a workpiece using a minute probe pin.

By the way, in the surface texture measuring machine having such a fine stylus, the difference between the shaft diameter of the stylus and the size of the contact is small, so that the stylus is correct as in the case where the stylus is mounted with an inclination. When not attached in the posture, there is a problem that when the contact is brought into contact with the object to be measured, the shaft of the stylus comes into contact with the object to be measured and the stylus may be damaged.
For this reason, in such a surface texture measuring instrument equipped with such a fine stylus, the stylus posture is adjusted by using a stylus observation device that observes the stylus.

FIG. 3 is a schematic diagram illustrating an example of a surface texture measuring device and a stylus observation device.
As shown in FIG. 3A, the surface texture measuring machine 100 has a rod-like stylus 110 having a contact 110A at one end that contacts a measured object (not shown) and a constant for placing the measured object. A surface 120 of the object to be measured is measured by bringing the contactor 110A into contact with the object to be measured. In FIG. 3A, the axis in the vertical direction of the paper is the Z axis, and the two axes orthogonal to the Z axis are the X and Y axes.
The stylus observation apparatus 200 includes a disk-shaped table 210 fixed to the surface plate 120 and an imaging unit 220 that is fixed to the table 210 and images the stylus 110.

The table 210 is fixed to the surface plate 120 and configured to be rotatable around the Z axis (see arrow A in FIG. 3A). The table 210 is configured to lock the imaging unit 220 at two positions: a position on the + X-axis direction side and a position on the + Y-axis direction side (see the two-dot chain line in FIG. 3A). Has been. Therefore, the imaging unit 220 can image the stylus 110 from two directions of the X and Y axes by rotating the table 210.
As shown in FIG. 3B, two reference lines L1 and L2 are drawn in the vertical and horizontal directions in the image picked up by the image pickup means 220. The table 210 and the imaging means 220 are arranged on the surface plate 120 such that the vertical reference line L1 is perpendicular to the surface plate 120 and the horizontal reference line L2 is horizontal to the surface plate 120. It is fixed.

In order to adjust the posture of the stylus 110 by using such a stylus observation apparatus 200, first, the stylus 110 is imaged by the imaging unit 220 from the X-axis direction side, and the user images by the imaging unit 220. The stylus 110 is moved along the YZ plane so that the axis of the stylus 110 is parallel to the vertical reference line L1.
Next, the stylus 110 is imaged by the imaging unit 220 from the Y-axis direction side, and the user makes the axis of the stylus 110 in the image captured by the imaging unit 220 parallel to the vertical reference line L1. The stylus 110 is moved along the XZ plane so that
According to such adjustment, the attitude of the stylus 110 can be adjusted so that the axis of the stylus 110 is perpendicular to the surface plate 120.

JP 7-505958 A

  However, when the posture of the stylus 110 is adjusted by using the stylus observation device 200, the stylus 110 is imaged by the imaging unit 220 from the Y-axis direction side, and the axis of the stylus 110 in the image captured by the imaging unit 220 is When the stylus 110 is moved along the XZ plane so as to be parallel to the vertical reference line L1, there is a problem that the stylus 110 may move along the YZ plane.

That is, the stylus 110 is imaged by the imaging unit 220 from the X-axis direction side, and the stylus 110 is parallel to the vertical reference line L1 in the image captured by the imaging unit 220. There is a problem that the initial adjustment for moving the stylus 110 along the YZ plane is neglected, and there is a case where the posture of the stylus 110 cannot be adjusted appropriately.
Further, since the stylus observation apparatus 200 needs to include the table 210, there is a problem that the configuration becomes complicated. Furthermore, since the stylus observation apparatus 200 needs to rotate the table 210 when adjusting the posture of the stylus 110, there is a problem that adjustment takes time.

  The objective of this invention is providing the stylus observation apparatus which can adjust the attitude | position of a stylus easily and appropriately with a simple structure.

A stylus observation apparatus according to the present invention includes a rod-like stylus having a contact that contacts an object to be measured at one end, and measures the surface properties of the object to be measured by bringing the contact into contact with the object to be measured. A stylus observation device for observing the stylus used in a property measuring instrument, wherein the stylus observation device is arranged so that the optical axes are orthogonal to each other in a plane orthogonal to the axis of the stylus, and reflects light from the stylus. A mirror, a combining unit that combines the light reflected by each of the mirrors, an imaging unit that images the light combined by the combining unit, and a display unit that displays an image captured by the imaging unit A table for displaying an instruction line for instructing the posture of the stylus on the display means. Characterized in that it comprises a control unit.

  According to such a configuration, the light from the stylus is reflected by the two mirrors arranged so that the optical axes are orthogonal to each other in a plane orthogonal to the axis of the stylus, and is combined by the combining means. . The light combined by the combining means is picked up by the image pickup means, so that the stylus can be picked up simultaneously from two directions orthogonal to each other without moving the image pickup means. Therefore, according to the stylus observation apparatus of the present invention, the posture of the stylus can be easily and appropriately adjusted with a simple configuration.

In the present invention, as described above, the display unit displays an image captured by the imaging unit, the imaging unit, and a control unit that controls the display unit, and the control unit includes the stylus. characterized in that it comprises a display control unit for displaying the indication line for indicating orientation on the display means.

  According to such a configuration, since the instruction line for instructing the stylus posture is displayed on the display means, the user of the stylus observation apparatus can adjust the stylus posture in accordance with the instruction by the instruction line. it can. Therefore, depending on the angle of the instruction line displayed on the display means, the stylus posture can be adjusted so that the stylus is arbitrarily inclined.

The schematic diagram which shows the surface texture measuring machine and stylus observation apparatus which concern on 1st Embodiment of this invention. The schematic diagram which shows the surface property measuring machine and stylus observation apparatus which concern on 2nd Embodiment of this invention. The schematic diagram which shows an example of a surface property measuring machine and a stylus observation apparatus.

[First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment of the invention will be described with reference to the drawings.
FIG. 1 is a schematic diagram showing a surface texture measuring instrument 1 and a stylus observation device 2 according to a first embodiment of the present invention.
As shown in FIG. 1A, the surface texture measuring instrument 1 includes a rod-like stylus 11 having a contact 11A that contacts a measured object (not shown) at one end, and the contact 11A contacts the measured object. By doing so, the surface property of the object to be measured is measured. 1A is a view of the surface texture measuring instrument 1 and the stylus observation device 2 as viewed from the opposite side of the contact 11A along the axial direction of the stylus 11. FIG. In FIG. 1A, the axis of the stylus 11 in the axial direction is the Z axis, and two axes orthogonal to the Z axis are the X and Y axes.

  The stylus observation device 2 is arranged so that the optical axes thereof are orthogonal to each other in a plane orthogonal to the axis of the stylus 11, and reflects the light from the stylus 11, and the mirrors 21 and 22 respectively. Mirror 23 that synthesizes the reflected light, illumination means 24 that illuminates the stylus 11 via the half mirror 23, and the mirrors 21 and 22, and imaging means that images the light synthesized by the half mirror 23 25, a display unit 26 for displaying an image captured by the imaging unit 25, an imaging unit 25, and a control unit 27 for controlling the display unit 26. In addition, the display means 26 can be comprised with a liquid crystal monitor, for example.

The half mirror 23 reflects a part of the incident light and transmits the other, and is arranged so as to be parallel to the mirrors 21 and 22.
The illumination means 24 can be composed of, for example, a white light source, and is disposed on the optical axis of the mirror 22 and the half mirror 23.
The imaging unit 25 includes a lens 251 that is disposed on the optical axes of the mirror 21 and the half mirror 23 and collects incident light, and an imaging element 252 that captures the light collected by the lens 251. .

  The light emitted from the illumination unit 24 enters the half mirror 23, a part of the light incident on the half mirror 23 is reflected by the half mirror 23, and the other part passes through the half mirror 23. The light reflected by the half mirror 23 is reflected by the mirror 21 and illuminates the stylus 11 along the Y-axis direction. Then, the light from the stylus 11 is reflected again by the mirror 21 and enters the half mirror 23. Part of the light incident on the half mirror 23 passes through the half mirror 23 and enters the lens 251.

The light that passes through the half mirror 23 is reflected by the mirror 22 and illuminates the stylus 11 along the X-axis direction. Then, the light from the stylus 11 is reflected again by the mirror 22 and enters the half mirror 23. Part of the light incident on the half mirror 23 is reflected by the half mirror 23 and enters the lens 251.
That is, the half mirror 23 functions as a combining unit that combines the light reflected by the mirrors 21 and 22 and makes the light enter the lens 251. Then, the light incident on the lens 251 is collected by the lens 251 and imaged by the image sensor 252.

The control unit 27 includes, for example, a CPU (Central Processing Unit), a memory, and the like, and includes a display control unit 271 that controls the display unit 26.
As shown in FIG. 1B, the display control unit 271 displays an image picked up by the image pickup means 25 on the display means 26 and draws two reference lines L1 and L2 in the vertical and horizontal directions of the image. . Note that the imaging unit 25 is arranged such that the vertical reference line L1 is perpendicular to the XY plane and the horizontal reference line L2 is horizontal to the XY plane.

In order to adjust the attitude of the stylus 11 by using the stylus observation device 2, first, the stylus 11 is imaged by the imaging unit 25, and the user uses two styluses in the image captured by the imaging unit 25. 11, the stylus 11 is moved along the YZ plane so that one of the styluses 11 is parallel to the vertical reference line L1.
Next, the user moves the stylus 11 to the XZ so that one of the two styluses 11 in the image captured by the imaging unit 220 is parallel to the vertical reference line L1. Move along a plane.
According to such adjustment, the attitude of the stylus 11 can be adjusted so that the axial direction of the stylus 11 is perpendicular to the XY plane.

According to this embodiment, there are the following effects.
(1) According to the stylus observation device 2, the light from the stylus 11 is reflected by the two mirrors 21 and 22 arranged so that the optical axes are orthogonal to each other in a plane orthogonal to the axis of the stylus 11. Are synthesized by the half mirror 23. Since the light combined by the half mirror 23 is imaged by the imaging unit 25, the stylus 11 can be simultaneously imaged from two directions orthogonal to each other without moving the imaging unit 25. Therefore, according to the stylus observation device 2, the posture of the stylus 11 can be easily and appropriately adjusted with a simple configuration.

[Second Embodiment]
Hereinafter, a second embodiment of the present invention will be described with reference to the drawings. In the following description, parts that have already been described are assigned the same reference numerals and description thereof is omitted.
FIG. 2 is a schematic diagram showing a surface texture measuring instrument 1 and a stylus observation device 2A according to a second embodiment of the present invention.
In the first embodiment, the stylus observation apparatus 2 includes the control unit 27, and the control unit 27 includes the display control unit 271. On the other hand, in this embodiment, the stylus observation apparatus 2A is different in that the control unit 27A includes a display control unit 271A as shown in FIG. 2A.

As shown in FIG. 2B, the display control unit 271A displays the image captured by the imaging unit 25 on the display unit 26 and draws two reference lines L1 and L2 in the vertical and horizontal directions of the image. . Further, the display control unit 271A causes the display means 26 to display instruction lines I1 and I2 for instructing the posture of the stylus 11.
As indicated by a broken line in FIG. 2B, the instruction line I1 is drawn inclined with respect to the reference line L1, and indicates the angle of the stylus 11 in the YZ plane. In addition, the instruction line I2 is drawn inclined with respect to the reference line L1, as shown by a thick line in FIG. 2B, and indicates the angle of the stylus 11 in the XZ plane.

In order to adjust the posture of the stylus 11 by using the stylus observation device 2A, first, the stylus 11 is imaged by the imaging unit 25, and the user uses two styluses in the image captured by the imaging unit 25. 11, the stylus 11 is moved along the YZ plane so that any one of the stylus 11 is parallel to the instruction line I1.
Next, the user moves the stylus 11 along the XZ plane so that one of the two styluses 11 in the image captured by the imaging unit 220 is parallel to the instruction line I2. To move.
According to such adjustment, the attitude of the stylus 11 can be adjusted so that the stylus 11 is arbitrarily tilted.

In this embodiment as well, the same operations and effects as those of the first embodiment can be achieved, and the following operations and effects can be achieved.
(2) According to the stylus observation apparatus 2A, the display unit 26 displays the instruction lines I1 and I2 for instructing the posture of the stylus 11, so that the user of the stylus observation apparatus 2A can display the instruction lines I1 and I2. The posture of the stylus 11 can be adjusted according to the instruction by I2. Therefore, the attitude of the stylus 11 can be adjusted so that the stylus 11 is arbitrarily tilted depending on the angles of the instruction lines I1 and I2 displayed on the display means 26.

[Modification of Embodiment]
Note that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope in which the object of the present invention can be achieved are included in the present invention.
For example, in each of the above embodiments, the combining unit is configured by the half mirror 23, but may be configured by another optical element such as a dichroic mirror. In short, the combining means may be any means that can combine the light reflected by each mirror.

  In each of the embodiments described above, the stylus observation device 2 or 2A includes the display unit 26 and the control units 27 and 27A and adjusts the posture of the stylus 11 by allowing the user to visually recognize the posture of the stylus 11. The display means 26 and the control means 27 may not be provided. For example, the control unit may not be provided by drawing a reference line on the lens of the imaging unit and causing the display unit to directly display an image captured by the imaging unit. In addition, for example, an adjustment mechanism that adjusts the attitude of the stylus may be provided, and the adjustment mechanism may be controlled by the control means so that the attitude of the stylus is automatically adjusted, so that the display means is not provided.

  The present invention can be suitably used in a stylus observation apparatus that observes a stylus used in a surface texture measuring machine.

DESCRIPTION OF SYMBOLS 1 ... Surface texture measuring machine 2, 2A ... Stylus observation apparatus 11 ... Stylus 11A ... Contactor 21, 22 ... Mirror 23 ... Half mirror (combining means)
25 ... Imaging means 26 ... Display means 27, 27A ... Control means 271A ... Display control section

Claims (1)

A stylus having a rod-like stylus having one end in contact with an object to be measured, the surface stylus used for measuring the surface property of the object to be measured by bringing the contact into contact with the object to be measured. A stylus observation device for observing
Two mirrors arranged so that the optical axes are orthogonal to each other in a plane orthogonal to the axis of the stylus and reflecting light from the stylus;
Combining means for combining the light reflected by each of the mirrors;
Imaging means for imaging light synthesized by the synthesis means ;
Display means for displaying an image captured by the imaging means;
Control means for controlling the imaging means and the display means,
The control means includes
A stylus observation apparatus comprising: a display control unit configured to display an indication line for instructing the posture of the stylus on the display unit.

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