JP5401374B2 - Laser processing equipment - Google Patents

Description

  The present invention relates to a laser processing apparatus that irradiates a workpiece with laser light and performs processing on the workpiece.

  As the above-described laser processing apparatus, for example, as disclosed in Patent Documents 1 and 2, a laser oscillator that oscillates laser light, and the laser light oscillated from the laser oscillator is reflected to change the course of the laser light. A thing provided with a mirror member, a lens member which adjusts the beam diameter of a laser beam, and a processing head which irradiates a laser beam to a work is provided.

In such a laser processing apparatus, it is necessary to transmit laser light from a laser oscillator to a processing head. Therefore, in order to perform laser processing stably, it is necessary to adjust the positions of the mirror member, the lens member, and the like so that the optical axis of the laser light is in an appropriate position in the laser path through which the laser light passes. .
Conventionally, when checking the optical axis position of laser light, gypsum board or refractory brick is arranged in the laser path through which the laser light passes, and this gypsum board or refractory brick is irradiated with laser light and seized. The combustion and red hot positions were confirmed. In this way, the optical axis position of the laser beam is confirmed, and if there is a deviation in the optical axis position, the position of the mirror member or lens member is adjusted, and the optical axis position is again measured using a plaster board or fire brick. Was confirmed.

Japanese Unexamined Patent Publication No. 07-256477 Japanese Patent Laid-Open No. 02-150085

  However, as described above, the operation of confirming the optical axis position using a gypsum board, a refractory brick, or the like can be performed only in a state where laser processing is stopped. For this reason, it was impossible to cope with fluctuations in the optical axis position that occurred during laser processing, and the fluctuations in the optical axis position could not be detected until after a defect occurred on the workpiece. . Therefore, it has been difficult to stably process the workpiece for a long time.

In addition, after adjusting the position of the mirror member and lens member, the optical axis position is checked again with a gypsum board, fire brick, etc., so much labor is required for the adjustment and confirmation work of the optical axis position. Is required. Further, since the adjustment work and confirmation work of the optical axis position are complicated, there is a problem that only an engineer who has acquired specialized knowledge can perform it.
Furthermore, irradiating laser light to gypsum board, firebrick, etc., and confirming the seizure, combustion and red heat position, mist, dust, smoke, etc. will be generated in the laser processing equipment. The smoke or the like may adhere to the lens member, the mirror member, etc., and the lens member or the mirror member may be deteriorated.

  The present invention has been made in view of the above circumstances, and provides a laser processing apparatus capable of measuring the optical axis position of laser light even during processing and capable of stably performing processing with laser light. For the purpose.

In order to solve the above-described problems, a laser processing apparatus according to the present invention is a laser processing apparatus that processes a workpiece by irradiating a laser beam, and includes a laser oscillator that oscillates the laser beam, and the laser beam. A mirror member that reflects and changes the traveling direction of the laser light, a lens member that adjusts the beam diameter of the laser light, a laser light control unit that changes the traveling direction of the passing laser light, and the laser light passes therethrough. The optical axis position of the laser beam in the laser path is detected from the temperature measurement unit composed of a plurality of temperature sensors arranged around the laser path and the measured values of the plurality of temperature sensors provided in the temperature measurement unit. and a optical axis position detecting means for the temperature measuring unit, the inlet and outlet of the laser light of the laser beam controller, is disposed, respectively And detecting the optical axis position of the laser beam by the temperature measuring units provided at the laser beam entrance and exit of the laser beam control unit, and detecting the laser beam from the laser beam entrance and exit optical axis positions. And a laser beam traveling direction adjusting means for adjusting the traveling direction of the laser beam by moving the mirror member and the laser beam control unit .

  According to the laser processing apparatus of this configuration, the temperature measurement unit in which a plurality of temperature sensors are arranged around the laser path through which the laser light passes, and the measurement values of the plurality of temperature sensors provided in the temperature measurement unit And an optical axis position detecting means for detecting the optical axis position of the laser beam in the laser path, so that the optical axis position of the laser beam can be detected even when laser processing is performed. . In other words, when the optical axis position of the laser beam changes in the laser path where the temperature measuring unit is arranged, the temperature rises at a position where the optical axis of the laser beam is close, and the optical axis of the laser beam is separated. Then the temperature will drop. Therefore, it is possible to detect a change in the optical axis position of the laser light by analyzing temperature changes of the plurality of temperature sensors. Further, in this temperature measuring unit, since a plurality of temperature sensors are arranged around the laser path, the progress of the laser beam is not hindered and the laser processing is not affected.

Here, the temperature measuring units are respectively disposed at the laser light entrance and the exit of the laser light control unit .
The laser beam control unit controls whether or not the laser beam is transmitted to the processing head side by changing the traveling direction of the laser beam. If the optical axis position fluctuates when the laser light is incident on the laser light control unit, the above control cannot be performed with high accuracy. In addition, since whether or not to transmit the laser beam to the processing head side is controlled by the direction of the laser beam emitted from the laser beam control unit, confirm that the laser beam is deflected in the proper direction. Is important. Therefore, by providing temperature measuring units at the laser light inlet and outlet of the laser light control unit, it becomes possible to control the laser light with high accuracy and to perform laser processing stably.
Further, by detecting the optical axis positions at the entrance and exit of the laser beam, the traveling direction of the laser beam with respect to the laser beam control unit can be confirmed.
Furthermore, the optical axis positions of the laser light are detected by the temperature measuring units provided at the laser light entrance and exit of the laser light control unit, and laser light is detected from the optical axis positions of the laser light entrance and exit. And a laser beam traveling direction adjusting means for adjusting the traveling direction of the laser beam by moving the mirror member and the laser beam control unit. In this case, the laser beam traveling direction adjustment means adjusts the laser beam traveling direction with respect to the laser beam control unit, so the laser beam control unit can accurately control the laser beam and greatly improve the processing quality. Can be made.

It is preferable that the temperature measuring unit is disposed on at least one of the mirror member and the lens member.
In this case, a change in the optical axis position can be detected even in a mirror member that reflects laser light or a lens member that transmits laser light. For example, even if the distance from the laser oscillator to the processing head is long, It becomes possible to stably irradiate the workpiece with laser light, and the processing quality can be further improved.
Moreover, it is preferable to provide an optical axis position adjusting means for adjusting the optical axis position by moving the mirror member based on the optical axis position of the laser beam detected by the optical axis position detecting means.
When the variation of the optical axis position of the laser beam is confirmed by the optical axis position detecting means, the position and angle of the mirror member on the front stage side (laser oscillator side) of the laser path are adjusted to adjust the laser beam position. It becomes possible to correct the optical axis position to a predetermined position. Therefore, by providing the optical axis position adjusting means, not only the detection of the optical axis position but also the adjustment of the optical axis position can be performed during laser processing, and laser processing can be performed more stably. .

Further, in the temperature measuring unit, it is preferable that the temperature sensors are respectively disposed on the upper, lower, left and right sides of the laser path.
In this case, the fluctuation of the optical axis position of the laser light can be detected in the vertical direction and the horizontal direction. Therefore, it is possible to easily and accurately detect the fluctuation of the optical axis position.

Furthermore, it is preferable that the member to which the temperature measuring unit is attached among the mirror member, the lens member, and the laser light control unit is temperature adjusted to a constant temperature by a temperature adjusting device.
This is due to the feature that the energy density of the laser beam is high and local. When the beam is close to the temperature sensor, the energy of the beam is strong, and the temperature extremely increases due to the energy of the beam. On the other hand, when the beam is at a position far from the temperature sensor, the temperature measurement data is hardly affected and the temperature is stabilized at the adjusted temperature.
It is desirable that the temperature range for temperature adjustment is in the range of T = 10 to 50 ° C. If T is too low, a large amount of energy is required, which is not economical, and there is a concern about adverse effects such as condensation on the temperature control section. If T is too high, it is also economically disadvantageous, and the temperature difference between the case where the laser incident position approaches and the distance from the temperature sensor becomes small, and the accuracy of laser position identification decreases.
The temperature adjustment method is not particularly limited, and for example, a method using a liquid such as water or oil or a fluid such as a gas, or a method using an electric method may be used.

Moreover, it is preferable that a beam diameter detecting unit that detects a beam diameter of the laser light from measured values of a plurality of temperature sensors provided in the temperature measuring unit is provided.
When the beam diameter of the laser beam becomes large, the laser beam will be close to all the temperature sensors arranged around the laser path, and temperature rise will be observed at all temperature sensors. become. On the other hand, when the beam diameter of the laser beam is reduced, the laser beam is separated from all the temperature sensors arranged around the laser path, and a temperature drop is observed in all the temperature sensors. Will be. In this manner, the beam diameter of the laser light can be detected by the temperature measuring unit.

Furthermore, it is preferable to include a beam diameter adjusting unit that controls the lens member and adjusts the beam diameter based on the beam diameter of the laser beam detected by the beam diameter detecting unit.
In this case, the beam diameter can be adjusted by controlling the lens member. Further, during laser processing, not only detection of the beam diameter but also adjustment of the beam diameter can be performed, and laser processing can be performed more stably.

Moreover, it is preferable to provide a life determination means for determining the replacement time of the member on which the temperature measuring unit is arranged based on the measured value of the temperature measuring unit.
When the laser light control unit, the mirror member, the lens member, etc. deteriorate, the temperature of the member itself rises. Therefore, when the temperature data by the temperature measuring unit exceeds a certain threshold value, it can be determined that the member has deteriorated. Thus, by judging the replacement time of the member by the life judging means, sudden failure can be prevented and laser processing can be performed more stably.

  ADVANTAGE OF THE INVENTION According to this invention, the laser beam processing apparatus which can measure the optical axis position of a laser beam even during a process, and can perform the process by a laser beam stably can be provided.

It is explanatory drawing of the laser processing apparatus which is one Embodiment of this invention. It is explanatory drawing of a temperature measurement unit. It is explanatory drawing which shows the detection method of the optical axis position by the temperature measuring unit shown in FIG. It is a flowchart which shows an example of the adjustment operation | work of the optical axis position and laser beam advancing direction by a controller. It is an isometric view explanatory drawing of the laser control part used in the Example. It is explanatory drawing of the temperature measurement unit in an Example. FIG. 3 is a diagram illustrating an optical axis position (measurement point) of Example 1. 3 is a graph showing a temperature measurement result of Example 1. FIG. 6 is a diagram illustrating an optical axis position (measurement point) of Example 2. It is a graph which shows the temperature measurement result of Example 2.

Embodiments of the present invention will be described below with reference to the accompanying drawings.
The laser processing apparatus 10 according to the present embodiment is used, for example, when a relief printing plate is formed on the outer peripheral surface of a cylindrical sleeve printing plate.
A laser processing apparatus 10 shown in FIG. 1 includes a laser oscillator 11 that oscillates laser light having a wavelength in the infrared region, a shutter unit 12 that blocks the laser light oscillated from the laser oscillator 11, and a laser that reflects the laser light. A first mirror member 21 that changes the path of the light, a compounder 15 that reduces the beam diameter of the laser light, and a second mirror member 22 that reflects the laser light whose beam diameter has been reduced and changes the path of the laser light. And a laser beam control unit 30 that changes the traveling direction of the laser beam that passes by changing the refractive index, and a third mirror member that reflects the laser beam that has passed through the laser beam control unit 30 and changes the path of the laser beam. 23, an expander 17 for enlarging the beam diameter of the laser beam, and reflecting the laser beam whose beam diameter has been expanded, A fourth mirror member 24 further includes a processing head 18 for irradiating a laser beam to the work is W, the.

  The laser oscillator 11 includes an optical resonator filled with carbon dioxide, and is configured to oscillate laser light by amplifying light in the optical resonator by stimulated emission in the carbon dioxide. From the laser oscillator 11 using the carbon dioxide gas, laser light in the infrared region having a wavelength of about 10.6 μm is oscillated. The laser oscillator 11 is always in a state of emitting laser light in order to stably oscillate laser light.

  The shutter member 12 is movable so as to block the laser light oscillated from the laser oscillator 11. When the shutter member 12 is moved on the path of the laser beam, the laser beam is reflected by the shutter member 12 and irradiated to the beam absorber 13. The beam absorber 13 converts the energy of the irradiated laser light into heat and absorbs it by cooling.

The first mirror member 21 reflects the laser light oscillated from the laser oscillator 11 and transmits the laser light to the compounder 15. The first mirror member 21 is provided with a drive unit 21a for adjusting the position and angle.
The compounder 15 is disposed so that a plurality of lenses are stacked in the traveling direction of the laser beam, and reduces the beam diameter of the laser beam. In this embodiment, the beam diameter of about 20 mm is reduced to about 5 mm.
The second mirror member 22 reflects the laser light that has passed through the compounder 15 and transmits the laser light to the laser light control unit 30. The second mirror member 22 is provided with a drive unit 22a for adjusting the position and angle.

The laser light control unit 30 can change the traveling direction of the laser light passing therethrough by changing the refractive index by an acoustic wave, and can modulate the intensity of the laser light (Acosto-Optic Modulator: AOM). / Acosto-Optic Defector (AOD).
The laser light control unit 30 performs ON / OFF control of processing by laser light by deflecting the traveling direction of the laser light. Further, the processing depth of the workpiece W by the laser light is adjusted by modulating the intensity of the laser light.
Further, the laser light control unit 30 includes a rotation drive table 31 that can be rotated and moved. Further, a water channel (not shown) is provided inside the laser light control unit 30, and a temperature adjusting device 32 is provided for maintaining the temperature of water passing through the water channel at a predetermined temperature (for example, 21 ° C.). Yes.

  The third mirror member 23 reflects the laser light that has passed through the laser light control unit 30. Here, when the laser beam is deflected in the laser beam control unit 30, the laser beam reflected by the third mirror member 23 is irradiated to the beam absorber 16, as indicated by a dotted line in FIG. It is configured. On the other hand, when the laser light is not deflected by the laser light control unit 30, the laser light is transmitted to the explorer 17 as indicated by a solid line in FIG. 1. The third mirror member 23 is provided with a drive unit 23a for adjusting the position and angle.

The expander 17 is disposed so that a plurality of lenses are laminated in the traveling direction of the laser light, and expands the beam diameter of the laser light. In this embodiment, the beam diameter of about 5 mm is increased to about 20 mm.
The fourth mirror member 24 reflects the laser light that has passed through the expander 17 and transmits the laser light to the processing head 18. The fourth mirror member 24 is provided with a drive unit 24a for adjusting the position and angle.
The processing head 18 processes the workpiece W by irradiating the workpiece W with laser light.

  In the present embodiment, the temperature measuring units 40 (40A, 40B) are disposed at the laser light inlet and outlet of the laser light control unit 30, respectively. As shown in FIG. 2, the temperature measuring unit 40 (40A, 40B) includes a first temperature sensor 41 (41A, 41B) at the upper part of the laser light inlet (outlet) of the laser light control unit 30 and a first part at the lower part. 2 temperature sensors 42 (42A, 42B), a third temperature sensor 43 (43A, 43B) on the right side, and a fourth temperature sensor 44 (44A, 44B) on the left side. Here, a pair of temperature sensors (first temperature sensor 41, second temperature sensor 42) are provided above and below the reference position where the optical axis of the laser beam should be positioned, and a pair of temperature sensors (first A third temperature sensor 43 and a fourth temperature sensor 44) are provided.

  The temperature measuring units 40A and 40B include a detection unit 51 that detects the optical axis position and the beam diameter of the laser beam, and the positions and angles of the first mirror member 21 and the second mirror member 22 based on the detection result. And the controller 50 provided with the adjustment part 52 which adjusts the compounder 15 is connected. The adjustment unit 52 is configured to control the rotation drive table 31 provided in the laser light control unit 30.

Here, in the temperature measurement unit 40 according to the present embodiment, the optical axis position of the laser light is detected by four temperature sensors, that is, the first temperature sensor 41, the second temperature sensor 42, the third temperature sensor 43, and the fourth temperature sensor 44. Will be detected.
For example, in FIG. 3, when the optical axis fluctuates from the reference position (center O) to the position of (+ X, + Y), measurement is performed by the first temperature sensor 41 and the third temperature sensor 43 that are close to the optical axis of the laser beam. As a result, the temperature measured by the second temperature sensor 42 and the fourth temperature sensor 44 at which the optical axis of the laser beam is separated decreases.
When the optical axis fluctuates from the reference position (center O) to the position of (+ X, −Y), the temperature measured by the second temperature sensor 42 and the third temperature sensor 43 that are close to the optical axis of the laser light rises. Then, the temperature measured by the first temperature sensor 41 and the fourth temperature sensor 44 where the optical axes of the laser beams are separated from each other falls.
When the optical axis fluctuates from the reference position (center O) to the position (−X, −Y), the temperature measured by the second temperature sensor 42 and the fourth temperature sensor 44 that are close to the optical axis of the laser light. The temperature measured by the first temperature sensor 41 and the third temperature sensor 43 rising and separating the optical axis of the laser light will drop.
When the optical axis changes from the reference position (center O) to the position (−X, + Y), the temperature measured by the first temperature sensor 41 and the fourth temperature sensor 44 close to the optical axis of the laser light increases. As a result, the temperature measured by the second temperature sensor 42 and the third temperature sensor 43 at which the optical axes of the laser beams are separated decreases.

Furthermore, it is possible to grasp the optical axis position from the degree of temperature rise and temperature drop of each temperature sensor (first temperature sensor 41, second temperature sensor 42, third temperature sensor 43, and fourth temperature sensor 44). It becomes.
Here, in the present embodiment, the temperature adjustment device 32 for holding the temperature at a predetermined temperature (for example, 21 ° C.) is provided in the laser light control unit 30, so that the temperature sensor that separates the optical axis of the laser light is provided. The temperature measured by (1) converges to a predetermined temperature (for example, 21 ° C.) held by the temperature adjustment device 32. Therefore, the optical axis position is accurately grasped from the temperature rise degree of the temperature sensors (the first temperature sensor 41, the second temperature sensor 42, the third temperature sensor 43, and the fourth temperature sensor 44) on the basis of the predetermined temperature. It can be done.

  In this way, when the temperature measuring units 40A and 40B and the detection unit 51 detect that the optical axis position has deviated from the reference position, the adjustment unit 52 drives the second mirror member 22 and the first mirror member 21. Control signals are transmitted to the portions 22a and 21a, and the positions and angles of the second mirror member 22 and the first mirror member 21 are changed to adjust the optical axis position.

  Furthermore, in this embodiment, since the temperature measuring units 40A and 40B are respectively disposed at the laser light inlet and outlet of the laser light control unit 30, the optical axes detected by the respective temperature measuring units 40A and 40B. From the position, the traveling direction of the laser light with respect to the laser light control unit 30 can be calculated. If there is a deviation in the traveling direction of the laser beam, a control signal is transmitted from the adjustment unit 52 to the second mirror member 22, the drive units 22 a and 21 a of the first mirror member 21, and the rotation drive table 31. Then, the position and angle of the second mirror member 22 and the first mirror member 21 and the angle of the laser light control unit 30 are adjusted, and the traveling direction of the laser light with respect to the laser light control unit 30 is adjusted.

Here, the adjustment operation of the optical axis position of the laser beam and the traveling direction of the laser beam performed by the adjustment unit 52 will be described using the flowchart of FIG.
The optical axis position is detected by the temperature measuring unit 40A on the laser beam entrance side of the laser beam control unit 30 (S1). Here, when the optical axis position is deviated from the predetermined position, a control signal is transmitted to the drive unit 22a of the second mirror member 22, and the position and angle of the second mirror member 22 are changed to change the optical axis. The position is adjusted (S2). Then, the optical axis position is detected again by the temperature measuring unit 40A (S1). When it is confirmed that the optical axis position detected by the temperature measuring unit 40A has been adjusted to a predetermined position, the optical axis position is detected by the temperature measuring unit 40B on the exit side of the laser beam (S3). When the optical axis position is displaced, a control signal is transmitted to the rotation drive table 31, and the laser light control unit 30 is rotated (S4). Then, the optical axis position is detected again by the temperature measuring unit 40A on the laser beam entrance side (S1). By repeating these operations, the traveling direction and the optical axis position of the laser light with respect to the laser light control unit 30 are adjusted.

Further, when the beam diameter is expanded in a state where the optical axis position is adjusted to the reference position, the temperature measurement of the first temperature sensor 41, the second temperature sensor 42, the third temperature sensor 43, and the fourth temperature sensor 44 is performed. All data will rise. On the other hand, when the beam diameter is reduced, the temperature measurement data of the first temperature sensor 41, the second temperature sensor 42, the third temperature sensor 43, and the fourth temperature sensor 44 all drop. In this way, the beam diameter of the laser light can be detected.
Then, when the beam diameter is detected and the beam diameter varies from the reference value, the compounder 15 is adjusted to adjust the beam diameter.

  Further, when the temperature measurement data of the first temperature sensor 41, the second temperature sensor 42, the third temperature sensor 43, and the fourth temperature sensor 44 rise to exceed a certain threshold, the temperature measurement unit 40 is arranged. It is determined that the provided laser beam control unit 30 has deteriorated. That is, in the detection unit 51 described above, it is possible to determine the lifetime of the laser light control unit 30.

  In addition, the partial reflection plate 61 that reflects part of the laser light and transmits the remaining laser light and the partial reflection plate 61 are reflected on the front side (laser oscillator 11 side) of the laser light control unit 30. An intensity measuring unit 62 that measures the intensity of the reflected light is provided. The intensity measurement unit 62 is connected to the detection unit 51 of the controller 50 and is configured to transmit a control signal for adjusting the laser output from the adjustment unit 52 to the laser oscillator 11.

  According to the laser processing apparatus 10 of the present embodiment configured as described above, a plurality of temperature sensors (first temperature sensor 41, second temperature sensor 42, A temperature measuring unit 40 provided with a third temperature sensor 43 and a fourth temperature sensor 44), and a detection unit 51 for detecting the optical axis position of the laser beam in the laser path from the measured value of the temperature measuring unit 40. Since it is provided, the position of the optical axis of the laser beam can be detected even when laser processing is performed without hindering the progress of the laser beam.

  Further, since the temperature measuring unit 40 is disposed at each of the laser light entrance and the exit of the laser light control unit 30, the optical axis position of the laser light with respect to the laser light control unit 30 is stabilized, Further, it is possible to detect and adjust the traveling direction of the laser light with respect to the laser light control unit 30. Therefore, laser beam control (deflection / modulation) in the laser beam control unit 30 can be performed with high accuracy, and the workpiece W can be processed stably.

Further, in the temperature measuring unit 40, the first temperature sensor 41 is arranged at the upper part of the laser path, the second temperature sensor 42 is arranged at the lower part, the third temperature sensor 43 is arranged on the right side, and the fourth temperature sensor 44 is arranged on the left side. Since it is provided and configured, the optical axis position of the laser beam can be expressed on orthogonal coordinates.
In addition, an adjustment unit 52 that adjusts the optical axis position by changing the position and angle of the second mirror member 22 and the first mirror member 21 based on the optical axis position of the laser light detected by the detection unit 51 is provided. Therefore, not only the detection of the optical axis position but also the adjustment of the optical axis position can be performed during the laser processing, and the laser processing can be performed more stably.

Further, in the detection unit 51, the laser light is detected from the measured values of the plurality of temperature sensors (the first temperature sensor 41, the second temperature sensor 42, the third temperature sensor 43, and the fourth temperature sensor 44) of the temperature measuring unit 40. The beam diameter can be detected.
In addition, since the adjustment unit 52 that adjusts the beam diameter by controlling the compounder 15 based on the beam diameter of the laser light detected by the detection unit 51 is provided, the beam diameter fluctuates during laser processing. However, the beam diameter can be controlled, and laser processing can be performed more stably.

  Further, in the detection unit 51, the temperature measurement unit is determined based on the measurement values of the plurality of temperature sensors (first temperature sensor 41, second temperature sensor 42, third temperature sensor 43, and fourth temperature sensor 44) of the temperature measurement unit 40. Since it is configured to be able to determine the deterioration of the member (laser light control unit 30 in the present embodiment) in which 40 is disposed, sudden failure during processing can be prevented, and the laser Processing can be performed stably.

  Further, in the present embodiment, a partial reflection plate 61 that reflects part of the laser light and transmits the remaining laser light to the upstream side (laser oscillator 11 side) of the laser light control unit 30, and this partial reflection plate 61. Since the intensity measuring unit 62 for measuring the intensity of the reflected light reflected at is provided, the intensity of the laser beam can be measured even during the processing of the workpiece W. Further, since the output of the laser oscillator 11 is adjusted based on the measured intensity of the laser beam, the intensity of the laser beam incident on the laser beam control unit 30 can be stabilized, and the workpiece can be stabilized. Processing of W can be performed stably.

  Further, in the present embodiment, since the temperature adjustment device 32 for maintaining the temperature of the laser light control unit at a predetermined value (for example, 21 ° C.) is provided, the temperature measuring unit 40 is located at a position where the laser light is separated. The measured value of the temperature sensor converges to a predetermined value (for example, 21 ° C.). For this reason, the optical axis position can be accurately calculated from the temperature measurement data of the temperature sensor.

As mentioned above, although embodiment of this invention was described, this invention is not limited to this, It can change suitably in the range which does not deviate from the technical idea of the invention.
For example, in the present embodiment, the temperature measurement unit is provided in the laser light control unit. However, the present invention is not limited to this, and a mirror member or a lens member such as a compounder or an expander is used for measurement. A temperature unit may be provided. In this case, a change in the optical axis position can be detected even in a mirror member that reflects laser light or a lens member that transmits laser light. For example, even if the distance from the laser oscillator to the processing head is long, It becomes possible to stably irradiate the workpiece with laser light, and the processing quality can be further improved.

Furthermore, on the front side (laser oscillator side) of the laser light control unit, the partial reflection plate that reflects a part of the laser light and transmits the remaining laser light, and the intensity of the reflected light reflected by this partial reflection plate Although it demonstrated as having the intensity | strength measurement part to measure, these partial reflectors and the intensity | strength measurement part do not need to be provided.
Further, the number of mirror members, the number of lens members, the arrangement of laser oscillators, and the like are not limited to this embodiment, and can be appropriately changed in design.

  In the present embodiment, the temperature measuring unit 40 is disposed in the laser light control unit 30, and the first mirror member 21, the second mirror member 22, the rotary drive table 31, and the compounder are adjusted by the adjustment unit 52 of the controller 50. However, the present invention is not limited to this, and the temperature measuring unit 40 is disposed in another location, and for example, the third mirror member 23, It is good also as what controls the 4 mirror member 24, the expander 17, etc. FIG.

Hereinafter, a method for detecting the optical axis position of the laser beam by the laser processing apparatus of the present invention will be specifically described.
In this embodiment, a temperature measuring unit 140 is disposed on the entrance side of the laser light control unit 130 (AOM) shown in FIG. 5, and the optical axis position of the laser light is detected using the temperature measuring unit 140. .

  As shown in FIG. 5, the laser light control unit 130 has a box shape with a width W of 50 mm, a depth L of 70 mm, and a height H of 30 mm. Further, since the laser light control unit 130 needs to detect the position of the laser light with higher accuracy, a water channel 133 is provided inside, and by supplying cooling water to the water channel 133, The temperature can be adjusted to a range of 21 ± 0.5 ° C.

  A temperature measuring unit 140 provided with a rectangular incident window 145 having a width W2 of 30 mm and a height H2 of 10 mm was disposed on the laser beam entrance side of the laser beam controller 130. Here, as shown in FIG. 6, the measurement unit 140 includes a first temperature sensor 141 positioned above the center position O of the incident window 145, a second temperature sensor 142 positioned below the center position O, A third temperature sensor 143 located on one side in the width direction of the center position O (right side in FIG. 6) and a fourth temperature sensor 144 located on the other side in the width direction of the center position O (left side in FIG. 6) are arranged. did. In the present embodiment, the first, second, third, and fourth temperature sensors 141, 142, 143, and 144 are disposed at positions 5 mm apart from the periphery of the incident window portion 145, respectively.

  As Example 1, the first, second, third, and fourth temperature sensors 141, 142, and 143 are changed by changing the optical axis position of the laser beam in the width direction along the center position O as shown in FIG. 144 temperature measurement data were collected. The temperature measurement results are shown in Table 1 and FIG. In Table 1, with the center position O as the center, the width direction is the X direction (+ on the one side in the width direction and-on the other side), and the Y direction (the up direction is +, the down direction is-). The measurement points are represented by orthogonal coordinates.

As shown in Table 1, the temperature data of the first temperature sensor 141 and the second temperature sensor 142 were the same at all measurement points. This is because the optical axis position of the laser beam moves in the width direction along the center position O, and therefore, at each measurement point, the distance between the optical axis position and the first temperature sensor 141, and the optical axis position. This is because the distance is the same as that of the second temperature sensor 142.
On the other hand, about the 3rd temperature sensor 143 and the 4th temperature sensor 144, when the optical axis of the laser beam adjoined, it changed for every measurement point so that temperature might rise rapidly.

  Next, as Example 2, as shown in FIG. 9, the optical axis position of the laser light is changed in the width direction along the position above the center position O, and the first, second, third, and fourth. Temperature measurement data of the temperature sensors 141, 142, 143, and 144 were collected. The temperature measurement results are shown in Table 2 and FIG. In Table 2, with the center position O as the center, the width direction is the X direction (+ on the one side in the width direction and-on the other side), and the Y direction (the up direction is +, the down direction is-). The measurement points are represented by orthogonal coordinates.

As shown in Table 2, the second temperature sensor 142 that was separated from the optical axis at all measurement points was constant at 21 ° C. On the other hand, in the first temperature sensor 141 that was close to the optical axis, the temperature measurement data changed greatly by moving in the width direction.
In addition, the third temperature sensor 143 and the fourth temperature sensor 144 arranged in the width direction changed at each measurement point so that the temperature rapidly increased when the optical axis of the laser beam was close.

From the temperature measurement results of Examples 1 and 2, the optical axis position of the laser beam can be estimated from the temperature measurement data of the first, second, third, and fourth temperature sensors 141, 142, 143, and 144. confirmed.
When used in an actual machine, the laser light passage holes are partitioned in a lattice pattern, and the coordinate data of the optical axis position and the first, second, third, and fourth temperature sensors 141, 142, 143, and 144 are used. By making a database of the relationship with the temperature measurement data in advance, it becomes possible to accurately estimate the optical axis position of the laser light even during continuous operation.

  When the ambient temperature of the temperature measurement unit 140 changes, the relationship between the coordinate data of the optical axis position and the temperature measurement data of the first, second, third, and fourth temperature sensors 141, 142, 143, and 144 changes. Therefore, it is necessary to accurately control the temperature of the laser light control unit 130 and the like. Alternatively, a plurality of databases may be prepared in advance so as to correspond to the ambient temperature of the temperature measuring unit 140.

10 Laser processing device 11 Laser oscillator 15 Compounder (lens member)
17 Expounder (Lens)
21 First mirror member (mirror member)
22 Second mirror member (mirror member)
23 Third mirror member (mirror member)
24 Fourth mirror member (mirror member)
30, 130 Laser light control unit 31 Rotation drive table 40, 40A, 40B, 140 Temperature measuring unit 41, 41A, 41B, 141 First temperature sensor (temperature sensor)
42, 42A, 42B, 142 Second temperature sensor (temperature sensor)
43, 43A, 43B, 143 Third temperature sensor (temperature sensor)
44, 44A, 44B, 144 Fourth temperature sensor (temperature sensor)
51 Detection unit (optical axis position detection means / beam diameter detection means / lifetime determination means)
52 adjuster (optical axis position adjusting means / beam diameter adjusting means / laser beam traveling direction adjusting means)

Claims (8)

A laser processing apparatus for processing a workpiece by irradiating a laser beam,
A laser oscillator for oscillating the laser beam;
A mirror member that reflects the laser beam and changes the traveling direction of the laser beam;
A lens member for adjusting the beam diameter of the laser beam;
A laser light control unit for changing the traveling direction of the laser light passing therethrough,
A temperature measuring unit comprising a plurality of temperature sensors disposed around a laser path through which the laser beam passes;
An optical axis position detecting means for detecting an optical axis position of the laser beam in the laser path from measured values of a plurality of temperature sensors provided in the temperature measuring unit ;
The temperature measuring units are respectively disposed at the laser light inlet and the outlet of the laser light control unit,
The temperature measuring units provided at the laser light entrance and exit of the laser light control unit detect the optical axis positions of the laser light, and the laser light travels from the optical axis positions of the laser light entrance and exit. A laser processing apparatus comprising: a laser beam traveling direction adjusting unit that calculates a direction and moves the mirror member and the laser beam control unit to adjust a traveling direction of the laser beam . The laser processing apparatus according to claim 1 , wherein the temperature measuring unit is disposed on at least one of the mirror member and the lens member. Claims based on the position of the optical axis of the detected the laser beam by the optical axis position detecting means, moving the mirror member, characterized in that it comprises an optical axis position adjusting means for adjusting the optical axis position Item 2. The laser processing apparatus according to Item 1 .   The laser processing apparatus according to any one of claims 1 to 3, wherein in the temperature measuring unit, the temperature sensors are respectively disposed on the upper, lower, left, and right sides of the laser path.   5. The member to which the temperature measuring unit is attached among the mirror member, the lens member, and the laser light control unit is temperature-adjusted to a constant temperature by a temperature adjusting device. The laser processing apparatus as described in any one of. 6. The apparatus according to claim 1 , further comprising beam diameter detecting means for detecting a beam diameter of the laser light from measured values of a plurality of temperature sensors provided in the temperature measuring unit. The laser processing apparatus according to item . 7. The apparatus according to claim 6 , further comprising beam diameter adjusting means for controlling the lens member and adjusting the beam diameter based on the beam diameter of the laser light detected by the beam diameter detecting means. Laser processing equipment. 8. The apparatus according to claim 1 , further comprising a life determination unit that determines a replacement time of a member in which the measurement unit is disposed based on a measurement value of the temperature measurement unit. The laser processing apparatus described in 1.

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