JP5386830B2 - Fan filter unit - Google Patents

Description

The present invention relates to a blowout surface temperature distribution of a fan filter unit installed in a clean room, a clean conveyance path, a semiconductor manufacturing apparatus, and an FPD manufacturing apparatus that manage cleanliness in a semiconductor or FPD (flat panel display) manufacturing factory.

  2. Description of the Related Art Conventionally, in order to improve the blowout surface temperature distribution of this type of fan filter unit, it is known to exhaust heat generated by a motor using cooling air (see, for example, Patent Document 1).

  The fan filter unit will be described below with reference to FIG.

  As shown in the figure, the motor 103 in the fan filter unit 101 composed of the fan 102, the motor 103, the chamber 104, and the filter 107 is housed in the storage case 106, and is completely cut off from the air flow path of the fan unit. In addition, the storage case is provided with a cooling pipe 105 for flowing cooling air and an exhaust fan unit 108 for discharging the cooled air.

JP 2001-153416 A

  As described above, the conventional fan filter unit requires a large number of devices such as cooling air, an air supply device, air piping, a heat exchange mechanism for motor heat generation and exhaust heat, and an air discharge device. There is a problem that the cost increases and the cost is high, and improvement of temperature distribution unevenness on the blow-out surface is required with a simple device.

  An object of the present invention is to solve such a conventional problem, and an object of the present invention is to provide a fan filter unit in which the temperature distribution on the blowout surface is improved by attaching a simple member to the fan filter unit.

In order to achieve the above object, the fan filter unit of the present invention provides
In a fan filter unit having a suction part at the top of a box-shaped chamber and a blowout part at the bottom, a fan unit consisting of a fan and a motor is built in the chamber, and a filter is attached to the outlet side of this fan unit.
A perforated plate is attached so as to partition the chamber and the filter, and this perforated plate has a structure in which a blocking portion that is larger than the projected area of the motor and is not provided with a hole is provided immediately below the motor. . By this means, it is possible to suppress the temperature rise only at the central portion on the blowout side due to the heat generated by the motor being shielded by the shield and being diffused on the porous plate.

  Another means is that the blocking portion of the perforated plate has a structure that rises upside down. By this means, it is possible to suppress the temperature rise only at the central portion on the blowout side due to the heat generated by the motor being shielded by the shield and being diffused on the porous plate.

  Another means is a structure in which a space is provided between the porous plate and the filter medium and between the porous plate and the top plate of the chamber. By this means, it is possible to prevent the heat generated from the motor from diffusing on the perforated plate and diffusing in the space in the filter and increasing the temperature only at the central portion on the blowout side.

  Another means is that a plurality of fixtures are provided on the inner wall surface of the chamber, and the perforated plate is smaller in area than the blowout port of the chamber, and is fixed between the chamber inner wall surface and the chamber by the fixture. It is attached with a gap. By this means, it is possible to suppress the heat generation from the motor from being diffused on the perforated plate and the temperature rise only at the blowout side central portion.

  ADVANTAGE OF THE INVENTION According to this invention, the fan filter unit which has the effect of suppressing that a temperature rises only in the center part by the side of blowing can be provided because the heat_generation | fever from a motor is interrupted | blocked by the interruption | blocking part.

  Moreover, the fan filter unit which has the effect of suppressing that only the center part by the side of a blowout raises temperature can be provided because the heat_generation | fever from a motor is spread | diffused in a perforated plate.

  Further, it is possible to provide a fan filter unit in which the heat generated from the motor can have a heat shielding and diffusing effect with a single member, and the temperature rise can be suppressed only at the central portion on the blowout side.

Sectional drawing which shows the fan filter unit of the reference example 1 of this invention Sectional view of fan filter unit using heat shield plate with bent end Cross section of fan filter unit using heat shield with heat insulation Sectional drawing of the fan filter unit of Embodiment 1 of this invention (A) The same plane sectional view of the fan filter unit which provided the crevice around the perforated panel, (b) Sectional view The graph showing the relationship between the distance between the perforated plate and the filter medium and the temperature distribution Sectional drawing of the fan filter unit of Embodiment 1 of this invention (A) The same plane sectional view of the fan filter unit which provided the interruption | blocking part in the perforated plate, (b) Sectional drawing (A) The same plane sectional view of the fan filter unit which provided the reverse bowl-shaped part in the perforated board, (b) Sectional drawing Sectional drawing of the fan filter unit of Embodiment 2 of this invention Diagram showing a conventional fan filter unit

  The invention according to claim 1 of the present invention has a suction part at the upper part of the box-shaped chamber and a blowing part at the lower part, and a fan unit comprising a fan and a motor is built in the chamber, on the outlet side of the fan unit. In a fan filter unit with a filter attached, a perforated plate is attached so as to partition the chamber and the filter, and this perforated plate does not open a hole in a circle larger than the projected area of the motor in a portion immediately below the motor. By providing the blocking unit, the blocking unit can shield the heat generated from the motor body when the heat generated from the motor body moves to the blower side of the fan unit due to the airflow in the chamber. The effect that heat is diffused to the peripheral part along the plane of the plate is enhanced, and the action of suppressing the temperature rise in the central part on the blowing side There.

  Further, since the blocking portion of the perforated plate swells upside down, the blocking portion enhances the effect of blocking heat generation, and heats up to the peripheral portion along the plane of the metal porous plate. Has an effect of suppressing the temperature rise in the blowout side central portion.

Another means is a structure in which a space is provided between the perforated plate attached to the upper part of the filter and the filter medium and between the perforated plate and the top plate of the chamber. By this means, when the heat generated from the motor body moves to the blower side of the fan unit by the airflow in the chamber, the heat is diffused to the peripheral part along the plane of the metal porous plate, so that the blower side central part Only has the effect of suppressing the temperature rise. Moreover, it has the effect | action that thermal diffusion further increases with space between a perforated plate and a filter medium.

  Another means is that a plurality of fixtures are provided on the inner wall surface of the chamber, and the perforated plate is smaller in area than the blowout port of the chamber, and is fixed between the chamber inner wall surface and the chamber by the fixture. It is attached with a gap. That is, the outer shape of the perforated plate is made smaller than the opening on the blowout side of the chamber, and a gap between the chamber blowout side opening is provided between the peripheral portion of the chamber and the metal porous plate.

  According to such a structure, when the heat generated from the motor main body moves to the blowout side of the fan unit due to the airflow in the chamber, the airflow to the peripheral portion having a low static pressure is generated due to the gap in the opening on the chamber blowout side. By being promoted, the effect that heat is diffused to the peripheral portion along the plane of the metal porous plate is greatly enhanced, and it has an effect of suppressing the temperature rise only at the blowout side central portion.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Reference Example 1)
As shown in FIG. 1, the fan filter unit according to this reference example has a suction part 1 at the top of a box-shaped chamber 5, and a fan unit 4 comprising a fan 2 and a motor 3 is built in the chamber 5. A filter 6 is attached to the outlet side of the fan unit 4. The motor 3 is fixed to the chamber by a motor support 7, and a metal flat heat shield plate 8 is attached to the motor support 7 so as to cover the bottom of the motor.

  The operation of the above configuration will be described. When the motor 3 is driven, air is sucked from the suction portion 1 by the rotation of the fan 2. The sucked air spreads into the chamber 5 and then passes through the filter 6 and blows out from the fan filter unit. At this time, the heat generated from the motor 3 body moves to the periphery of the chamber 5 by the heat shield 8 when the airflow in the chamber 5 moves to the blowout side of the fan unit 4. Temperature rise can be suppressed. Further, the heat shield plate 8 has an effect of dividing the bottom of the motor 3 from the blowing side and preventing the radiant heat from reaching the blowing side.

  Moreover, what is shown in FIG. 2 is the end portion of the heat shield plate 8 bent to the suction side (bent end portion 9).

  According to such a structure, in addition to shielding heat generated from the motor 3 main body, the heat conducted to the heat shield plate 8 promotes heat transfer to the blowout side peripheral portion by the bent end portion 9, It is possible to suppress the temperature rise only at the center.

  Moreover, as shown in FIG. 3, it is good also as a structure which affixed the heat insulating material 10 to the motor 3 bottom part side and the filter 6 side of the said heat shield board 8. FIG.

  According to such a structure, it is possible to enhance the heat shielding effect of the heat generated from the motor 3 main body by the heat insulating material 10 and to suppress the temperature rise only at the central portion by gradually conducting heat.

(Embodiment 1)
As shown in FIG. 4 or FIG. 7, the fan filter unit according to the first embodiment of the present invention has a suction part 1 at the top of a box-shaped chamber 5 and is composed of a fan 2 and a motor 3. 4 is built in the chamber 5, and a filter 6 is attached to the blowing side of the fan unit 4. Between the box-shaped chamber 5 and the filter 6, it attaches so that the metal porous plate 11 may be inserted | pinched.

  According to such a configuration, heat is diffused to the periphery along the plane of the porous plate 11 when the heat generated from the motor 3 main body moves to the blowing side of the fan unit 4 by the airflow in the chamber 5. It is possible to suppress the temperature rise at the blowout side center.

  Further, according to the experiment, the material of the porous plate 11 made of aluminum (thermal conductivity 237 W / mk) having a higher thermal conductivity than iron (thermal conductivity 84 W / mk) has an effect of improving the temperature distribution and is more effective. . Further, copper (thermal conductivity 390 W / mk) having higher thermal conductivity than aluminum may be used.

  Moreover, as shown in FIG. 4, the thermal diffusion effect can be further enhanced by providing a space h between the perforated plate 11 attached to the upper part of the filter 6 and the filter medium 6a.

  In FIG. 5, a plurality of L-shaped angles 12 are provided on the inner wall surface of the chamber 5, and the porous plate 11 is fixed by the L-shaped angles 12. The outer shape of the perforated plate 11 is made smaller than the outlet side opening of the chamber 5. The L-shaped angle 12 is provided only at the center of each side of the chamber 5, and gaps 5 a with the chamber 5 are provided at the four corners.

  According to such a configuration, when the heat generated from the main body of the motor 3 moves to the blowing side of the fan unit 4 due to the airflow in the chamber 5, there is a gap 5 a provided around the perforated plate 11, so that static pressure is generated. The air flow to the lower peripheral portion is promoted. For this reason, the effect that heat is diffused to the peripheral portion along the plane of the porous plate 11 is greatly enhanced, and it is possible to suppress the temperature rise only at the blow-out side central portion.

  Further, in FIG. 6, the distance (d) between the upper surface of the filter 6 and the porous plate 11 and the temperature difference (Δt) between the peripheral portion and the central portion are measured, and the results are shown. As can be seen from this graph, the fixed position of the L-shaped angle 12, that is, the distance between the upper surface of the filter 6 and the porous plate 11 has a small temperature unevenness at a position of 0 to 15 mm. The 10 mm position was found to be most effective.

  Further, as shown in FIG. 8, the porous plate 11 may be provided with a portion (blocking portion 11 a) that is larger than the projected area of the bottom of the motor 3 and does not have a hole in a circular shape in a portion immediately below the motor 3.

  According to such a structure, the blocking unit 11a shields the heat generated from the motor 3 body when the heat generated from the motor 3 body moves to the blowing side of the fan unit 4 due to the airflow in the chamber 5. The effect that heat is diffused to the periphery along the plane of the perforated plate 11 is enhanced, and the temperature rise at the blowout side central portion can be suppressed. Moreover, the effect of heat insulation and thermal diffusion can be obtained with one member.

  The perforated plate 11 shown in FIG. 9 is provided with a shape (reverse saddle-shaped portion 11b) that is raised in a reverse bowl shape without opening a hole in a circle in a portion immediately below the motor 3.

According to such a structure, when the heat generated from the main body of the motor 3 moves to the blowing side of the fan unit 4 due to the air flow in the chamber 5, the reverse saddle-shaped portion 11b is disposed near the bottom surface of the motor 3 so that the heat is blocked. In addition to enhancing the effect, the effect that heat is diffused to the peripheral part along the plane of the metal porous plate 11 is enhanced, and the temperature rise only at the blowout side central part can be suppressed. Moreover, the effect of heat insulation and thermal diffusion can be obtained with one member.

(Embodiment 2)
As shown in FIG. 10, the fan filter unit according to the second embodiment of the present invention has a suction portion 1 at the top of a box-shaped chamber 5, and the fan unit 4 including the fan 2 and the motor 3 is placed in the chamber 5. And a filter 6 is attached to the outlet side of the fan unit 4. The motor 3 is fixed to the chamber by a motor support 7, and a metal flat heat shield 8 is attached to the motor support 7 so as to cover the bottom of the motor 3. A perforated plate 11 is mounted between the box-shaped chamber 5 and the filter 6. By adopting a structure in which the heat shield plate 8 and the perforated plate 11 are separated from each other, heat generated from the motor 3 main body is generated by the heat shield plate 8 when the airflow in the chamber 5 moves to the blowout side of the fan unit. And is diffused in a space between the heat shield plate 8 and the perforated plate 11 to further enhance the heat diffusing effect of the perforated plate, and it is possible to suppress the temperature rise only at the blowout side central portion. .

  Moreover, it is good also as a structure which affixed the heat insulating material 10 on the motor 3 bottom part side and the filter 6 side of the heat shield board 8 and the structure which bent the edge part of the said heat shield board 8 to the suction side.

  The perforated plate 11 may have any structure such as a structure fixed to an L-shaped angle attached to the inner wall surface of the chamber 5, a structure sandwiched between the chamber 5 and the filter 6, and a structure attached to the upper part of the filter 6.

  The present invention relates to a fan filter unit installed in a clean room, a clean conveyance path, and a related apparatus in which cleanliness management is required in a semiconductor manufacturing factory, an FPD manufacturing factory, a solar cell manufacturing factory, and a production site such as food and medicine. Things about are useful.

DESCRIPTION OF SYMBOLS 1 Suction part 2 Fan 3 Motor 4 Fan unit 5 Chamber 5a Crevice 6 Filter 6a Filter filter medium 7 Motor support 8 Heat shield plate 9 Bending edge 10 Heat insulating material 11 Porous plate 11a Blocking part 11b Reverse hook-shaped part 12 L-shaped angle

Claims (4)

In a fan filter unit having a suction part at the top of a box-shaped chamber and a blowout part at the bottom, a fan unit consisting of a fan and a motor is built in the chamber, and a filter is attached to the outlet side of this fan unit.
A perforated plate is attached to partition the chamber and the filter,
This perforated plate is a fan filter unit in which a blocking portion that is larger than the projected area of the motor is not provided in a portion immediately below the motor. 2. The fan filter unit according to claim 1, wherein the blocking portion of the perforated plate swells toward the motor in an inverted bowl shape. The fan filter unit according to claim 1 or 2, wherein spaces are provided between the porous plate and the filter medium, and between the porous plate and the top plate of the chamber. A plurality of fixtures are provided on the inner wall surface of the chamber, and the perforated plate has a smaller area than the outlet of the chamber and is attached to the chamber with a gap between the chamber inner wall surface and the fixture. The fan filter unit according to claim 3.

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