JP5385039B2 - Powder for shot peening imparting slidability and surface compressive residual stress at the same time, and method for producing slidable member using the same - Google Patents

Powder for shot peening imparting slidability and surface compressive residual stress at the same time, and method for producing slidable member using the same Download PDF

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JP5385039B2
JP5385039B2 JP2009173034A JP2009173034A JP5385039B2 JP 5385039 B2 JP5385039 B2 JP 5385039B2 JP 2009173034 A JP2009173034 A JP 2009173034A JP 2009173034 A JP2009173034 A JP 2009173034A JP 5385039 B2 JP5385039 B2 JP 5385039B2
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powder
shot peening
residual stress
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慶明 松原
勝 柳本
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Sanyo Special Steel Co Ltd
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本発明は、摺動性と表面圧縮残留応力を同時に付与するショットピーニング用粉末およびその粉末をショットピーニングしてなる摺動性部材の製造方法に関するものである。   The present invention relates to a powder for shot peening that simultaneously imparts slidability and surface compressive residual stress, and a method for producing a slidable member formed by shot peening the powder.

一般に軟質金属相は、摺動部の潤滑は油などの液体潤滑剤を使用して行われることが多いが、設計上の理由により液体潤滑剤を使用することができない場合や、真空中において使用されるなどのように使用環境における制約がある場合、固体潤滑剤が用いられる。また、近年、エネルギー問題への社会的要請が高まるにつれて、自動車用のエンジンやトランスミッションに使用される摺動部材のさらなる摩擦低減が求められている。   Generally, in the soft metal phase, sliding parts are often lubricated using liquid lubricants such as oil. However, liquid lubricants cannot be used for design reasons or are used in vacuum. If there is a restriction in the environment of use, such as being used, a solid lubricant is used. In recent years, as the social demand for energy problems increases, further reduction of friction of sliding members used in automobile engines and transmissions has been demanded.

そのため摺動部に使用される液体潤滑材の摩擦抵抗を低減するために粘性の低いものが使用される傾向にあり、摺動部における潤滑材の厚みが薄くなり、摺動部材同士が接触する可能性のある境界潤滑環境で使用される軸受が増加しているため、境界潤滑環境下でも高い摺動性を持った、剥離寿命の長い部材の開発が必要とされており、固体潤滑剤で摺動部を被覆することが行われている。   Therefore, in order to reduce the frictional resistance of the liquid lubricant used in the sliding part, a material having low viscosity tends to be used, and the thickness of the lubricant in the sliding part becomes thin, and the sliding members come into contact with each other. As the number of bearings used in possible boundary lubrication environments is increasing, it is necessary to develop members with high slidability and long stripping life even in boundary lubrication environments. The sliding part is covered.

この摺動部材への固体潤滑剤の被覆方法として、例えば特開2002−161371号公報(特許文献1)や特開2007−10059号公報(特許文献2)にあげられるように、亜鉛や錫などの軟質金属粉末と二硫化モリブデンといった固体潤滑剤粉末の混合粉末や、軟質金属粉末もしくは固体潤滑剤粉末単体をショットピーニングする成膜技術が開示されている。   As a method of coating the sliding member with the solid lubricant, for example, as disclosed in JP 2002-161371 A (Patent Document 1) and JP 2007-10059 A (Patent Document 2), zinc, tin, etc. A film forming technique for shot peening a mixed powder of a soft metal powder and a solid lubricant powder such as molybdenum disulfide, or a soft metal powder or a solid lubricant powder alone is disclosed.

特許文献1においては、二硫化モリブデンなどの固体潤滑剤粉末が軟質金属中に分散した被膜を形成することで、従来、密着強度が低かった固体潤滑剤単体の被膜の密着性を改善しているため、固体潤滑剤の潤滑性を保ったまま、耐久性の高い被膜を形成できるとしている。また、特許文献2においては、摺動面に形成する被膜の被覆面積、厚み、表面粗さを制御することで摩擦係数が小さく、優れた摺動性能を有する摺動部材ができるとしている。   In patent document 1, the adhesiveness of the coating film of a single solid lubricant having a low adhesion strength is improved by forming a coating film in which a solid lubricant powder such as molybdenum disulfide is dispersed in a soft metal. Therefore, a highly durable coating can be formed while maintaining the lubricity of the solid lubricant. In Patent Document 2, a sliding member having a small friction coefficient and excellent sliding performance can be obtained by controlling the coating area, thickness, and surface roughness of a coating formed on the sliding surface.

また、[(トライボロジー会議 2007年春 予稿集 第123〜124頁「固体潤滑剤ショットコーティングによる転がり軸受の長寿命化)](非特許文献1)にあげられるように、錫もしくは亜鉛の軟質金属粉末を摺動部材にショットピーニングし、軟質金属被膜を形成することで摺動部材の摩擦係数を低減させる技術が開示されている。   In addition, as described in [(Tribology Conference Spring 2007 Proceedings, pages 123-124, “Longer Life of Rolling Bearing by Solid Lubricant Shot Coating)” (Non-Patent Document 1), a soft metal powder of tin or zinc is used. A technique for reducing the coefficient of friction of a sliding member by shot peening on the sliding member to form a soft metal film is disclosed.

さらに、硬質相に関しては、境界潤滑環境下での剥離寿命を向上させる別の手法として、特開2000−230544号公報(特許文献3)のように硬質な金属(ハイス鋼など)をショットピーニングすることにより、表面に圧縮残留応力を付与する手法がある。これらに用いられる粉末は、一般的に軸受鋼などショットピーニング対象の基材よりも硬い粉末が用いられている。
特開2002−161371号公報 特開2007−10059号公報 特開2000−230544号公報 [トライボロジー会議 2007年春 予稿集 第123〜124頁「固体潤滑剤ショットコーティングによる転がり軸受の長寿命化」]
Furthermore, regarding the hard phase, as another method for improving the peeling life under the boundary lubrication environment, shot peening is performed on a hard metal (such as high-speed steel) as disclosed in JP 2000-230544 A (Patent Document 3). Thus, there is a method of applying compressive residual stress to the surface. The powder used for these is generally harder than the base material to be shot peened, such as bearing steel.
JP 2002-161371 A JP 2007-10059 A JP 2000-230544 A [Tribology Conference Spring 2007, Proceedings, pages 123-124 "Extending the life of rolling bearings by shot coating with solid lubricant"]

上述した軟質金属相や硬質相である、これら両方を同時に付与することができる粉末がないため、両者を併用するためには硬質粉末と軟質粉末の2種類の粉末を別々にショットピーニングする必要があるが、ショットピーニングは基本的にバッチ処理のため、工程が複雑でコストがかかるという問題がある。   Since there is no powder that can be applied to both the soft metal phase and the hard phase described above at the same time, it is necessary to perform shot peening separately on the two types of hard powder and soft powder in order to use both. However, since shot peening is basically a batch process, there is a problem that the process is complicated and expensive.

上述した問題を解消するために発明者らは鋭意開発を進めた結果、軟質金属相中に硬質相が含まれる粉末をショットピーニングすることにより、軟質金属相により表面が被覆されつつ、硬質相により表面に圧縮残留応力を付与することができることを発明した。硬質相の硬さは一般的な軸受鋼の硬さよりも軟らかいHv300以上で残留応力を付与することが可能である。そこで、境界潤滑状態などの過酷な潤滑環境下の転がり軸受の摺動面に、摩擦係数を低減する軟質金属膜と、表面圧縮残留応力を同時に付与することができるショットピーニング用の粉末、およびそれを用いた摺動性部材の製造方法を提供する。   In order to solve the above-mentioned problems, the inventors have intensively developed and, as a result, shot peening powder containing a hard phase in the soft metal phase, while the surface is covered with the soft metal phase, Invented that compressive residual stress can be applied to the surface. The hardness of the hard phase is softer than that of general bearing steel, and it is possible to apply residual stress at Hv 300 or higher. Therefore, a soft metal film that reduces the coefficient of friction and a shot peening powder that can simultaneously apply surface compressive residual stress to the sliding surface of a rolling bearing in a harsh lubricating environment such as boundary lubrication, and the Provided is a method for producing a slidable member using

その発明の要旨とするところは、
(1)粉末としてビッカース硬度がHV100以下の軟質金属相がSn、HV100を超える硬さをもつ硬質相がCu 6 Sn 5 および/またはCu 3 SnであるSn−Cu合金粉末であることを特徴とする摺動性と表面圧縮残留応力を同時に付与するショットピーニング用粉末。
The gist of the invention is that
(1) The powder is characterized in that the soft metal phase having a Vickers hardness of HV100 or less is Sn, and the hard phase having a hardness exceeding HV100 is Sn—Cu alloy powder having Cu 6 Sn 5 and / or Cu 3 Sn. A shot peening powder that simultaneously imparts slidability and surface compressive residual stress.

)素材から摺動部材を製造する際に、前記(1)に記載の粉末を用いてショットピーニングして製造することを特徴とする摺動性部材の製造方法。
)前記()に記載の摺動性部材の表面圧縮残留応力が600〜1500MPaであることを特徴とする摺動性部材の製造方法にある。
( 2 ) When manufacturing a sliding member from a raw material, it manufactures by carrying out shot peening using the powder as described in said (1 ), The manufacturing method of the sliding member characterized by the above-mentioned.
( 3 ) The slidable member manufacturing method according to ( 2 ), wherein the slidable member has a surface compressive residual stress of 600 to 1500 MPa.

以上述べたように、本発明による軟質金属を高速で相手材に衝突させると、その衝突時に粉末表面が相手材と凝着を起こし、移着することにより、皮膜が形成され、表面に軟質金属皮膜を有するショット粉末でショットピーニングを行うと核となる粉末により表面に圧縮残留応力が付与されると同時に表面の軟質金属が相手材を被覆し潤滑材として働き効果を奏するものである。   As described above, when the soft metal according to the present invention is collided with the counterpart material at a high speed, the powder surface adheres to the counterpart material at the time of the collision, and is transferred to form a film, and the soft metal is formed on the surface When shot peening is performed with a shot powder having a coating, a compressive residual stress is applied to the surface by the core powder, and at the same time, a soft metal on the surface covers the mating material and acts as a lubricant.

以下、本発明の実施の形態について本発明の一例であるSn−Cu系合金を基にして詳細に説明する。図1は、Sn−Cu2元状態図である。この図1より軟質金属であるSn相とその軟質金属とCuとの合金Cu6Sn5およびCu3Snからなる相の2相組成はSnが61質量%以上でえられるが、このうち摺動被膜としてはSn:65〜95質量%であることが望ましい。したがって、Cuは5〜35質量%なる成分組成となる。 Hereinafter, embodiments of the present invention will be described in detail based on an Sn-Cu alloy that is an example of the present invention. FIG. 1 is a Sn-Cu binary phase diagram. From FIG. 1, the two-phase composition of the Sn phase, which is a soft metal, and the alloy composed of the soft metal and Cu, Cu 6 Sn 5 and Cu 3 Sn, can be obtained when Sn is 61% by mass or more. The film is desirably Sn: 65 to 95% by mass. Therefore, Cu has a component composition of 5 to 35% by mass.

粉末はCu量に応じて軟質金属Sn相と硬質相Cu6Sn5及びCu3Sn相の割合が変化するため、Sn:61〜65質量%未満では軟質なSnの被膜が充分に形成されず、逆に、Sn:95超え〜100質量%では表面圧縮残留応力の増加が見られない。上述した組成の合金粉末の形成方法としては、例えば鋳造材の粉砕、ガスや水などによるアトマイズ、水中紡糸法による線材の切断や粉砕、液体急冷による薄帯の粉砕などがあげられる。これらは必要な粒度、形状によって使い分けることが可能である。 In the powder, the ratio of the soft metal Sn phase, the hard phase Cu 6 Sn 5 and the Cu 3 Sn phase changes depending on the amount of Cu. Therefore, if Sn is less than 61 to 65% by mass, a soft Sn film is not sufficiently formed. On the other hand, when Sn exceeds 95 to 100% by mass, no increase in surface compressive residual stress is observed. Examples of the method for forming the alloy powder having the above-described composition include pulverization of a cast material, atomization with gas or water, cutting and pulverization of a wire by an underwater spinning method, and pulverization of a ribbon by liquid quenching. These can be properly used depending on the required particle size and shape.

また、軟質金属としてのビッカース硬さHVは100以下とし、また硬質相の硬さは一般的な軸受鋼の硬さよりも軟らかいHv300以上とすることが望ましい。例えば軟質金属としてのビッカース硬さHVは100以下とし、その軟質金属中にビッカース硬さHV200以上の硬質相が分散している粉末をショットピーニングを行うと、軟質金属は衝突時に軟質金属のみが変形し、表面に付着するが、硬質相と相手表面両方が変形することで、表面に圧縮残留応力が付与する。   Further, it is desirable that the Vickers hardness HV as a soft metal is 100 or less, and the hardness of the hard phase is Hv 300 or more, which is softer than the hardness of general bearing steel. For example, when Vickers hardness HV as a soft metal is set to 100 or less and a powder in which a hard phase having a Vickers hardness HV of 200 or more is dispersed in the soft metal, only the soft metal is deformed at the time of collision. Although it adheres to the surface, compressive residual stress is imparted to the surface by deforming both the hard phase and the mating surface.

また、硬質相が摺動時に相手材もしくは被覆材を研磨する等悪影響を及ぼす可能性がある場合、粉末を熱処理し、硬質相を粗大化させることで軟質金属Sn相のみを被覆することができる。熱処理は160〜415℃の温度範囲で1時間以上行うことで、微細に分散していた硬質相が粗大化する。   In addition, when there is a possibility of adverse effects such as polishing the mating material or coating material when the hard phase slides, it is possible to coat only the soft metal Sn phase by heat-treating the powder and coarsening the hard phase. . When the heat treatment is performed at a temperature range of 160 to 415 ° C. for 1 hour or longer, the finely dispersed hard phase becomes coarse.

上記合金粉末を、ショットピーニング法により摺動部材表面に成膜する。その形成した被膜の平均膜厚は、0.5〜2.5μmとする。平均膜厚が0.5μm未満では潤滑効果が十分でなく、摺動部材同士の接触する可能性のある境界潤滑環境で使用される軸受としての摩擦係数の低減が十分に得ることが出来ない。また、2.5μmを超えるとその効果は飽和することから、その範囲を0.5〜2.5μmとした。   The alloy powder is formed on the surface of the sliding member by a shot peening method. The average film thickness of the formed film is 0.5 to 2.5 μm. If the average film thickness is less than 0.5 μm, the lubrication effect is not sufficient, and the friction coefficient as a bearing used in a boundary lubrication environment in which sliding members may come into contact with each other cannot be sufficiently obtained. Moreover, since the effect will be saturated when it exceeds 2.5 micrometers, the range was 0.5-2.5 micrometers.

ショットピーニング法は、粉末を高速で摺動部材に衝突させることで被膜を形成するため、短時間で密着性が高い得ることができ、また摺動部材を加熱する必要がないため、摺動性被膜を形成する方法として好適である。ショットピーニングの条件としては圧力0.4〜0.8MPaの圧縮空気を用いて1〜20分粉末を噴射する。このとき、粉末中に硬質相があることで、摺動部材表面に圧縮応力が付与される。   The shot peening method forms a film by causing the powder to collide with the sliding member at a high speed, so that high adhesion can be obtained in a short time, and it is not necessary to heat the sliding member, so that the sliding property It is suitable as a method for forming a film. As conditions for shot peening, powder is injected for 1 to 20 minutes using compressed air having a pressure of 0.4 to 0.8 MPa. At this time, a compressive stress is given to the sliding member surface because there is a hard phase in the powder.

摺動部材表面に形成する圧縮応力は600〜1500MPaの範囲とする。この範囲とする理由は摺動の際に軟質金属であるSnが摩擦抵抗を下げる働きを行うものであり、その効果を得るためには600MPa以上必要であり、また、1500MPaを超えると部材の寿命に影響を及ぼすことから、その範囲を600〜1500MPaとした。好ましくは600〜1200MPaとする。   The compressive stress formed on the surface of the sliding member is in the range of 600 to 1500 MPa. The reason for this range is that Sn, which is a soft metal, acts to lower the frictional resistance during sliding, and 600 MPa or more is necessary to obtain the effect, and if it exceeds 1500 MPa, the life of the member The range was set to 600 to 1500 MPa. Preferably, the pressure is 600 to 1200 MPa.

本発明において、摺動部材とは、相手部材と相対的にすべり接触する摺動面を有する部材を言う。このように摺動部材の具体例としては、円筒面、球面、平面等において接触運動を行う機械部品であって、例えば、自動車のエンジンを構成するカムおよびカムフォロア、ピストンリング、燃料噴射装置、フリクションプレート、クラック部品やすべり軸受を構成するすべり部材や転がり軸受やすべり軸受用のリテーナ等が上げられる。   In the present invention, the sliding member refers to a member having a sliding surface that is in sliding contact with the counterpart member. Specific examples of the sliding member are mechanical parts that perform contact movement on a cylindrical surface, a spherical surface, a flat surface, and the like. For example, a cam and a cam follower, a piston ring, a fuel injection device, and a friction that constitute an automobile engine. Plates, crack parts, slide members constituting slide bearings, rolling bearings, retainers for slide bearings, and the like can be raised.

さらに、摺動部材をなす素材としては、例えば、SUJ2等の高炭素クロム軸受鋼等の軸受鋼やSCM420、SCr420等の肌焼鋼やSUS440等のステンレス鋼に、焼入れおよび焼戻し処理を施したものや、浸炭処理または浸炭窒化処理と焼入れおよび焼戻し処理とを施したもの等が挙げられる。   Furthermore, as a material forming the sliding member, for example, bearing steel such as high carbon chrome bearing steel such as SUJ2, case hardening steel such as SCM420 and SCr420, and stainless steel such as SUS440 is subjected to quenching and tempering treatment. And those subjected to carburizing treatment or carbonitriding treatment and quenching and tempering treatment.

以下、本発明について実施例によって具体的に説明する。
表1に示す各種組成のSn−Cu合金粉末をガスアトマイズで製造した。製造した粉末が、金属間化合物が微細に分散した組織となったことを走査電子顕微鏡にて確認した後、作製した粉末を粒度105〜38μmに分級し、分級後の粉末を用いて摺動部材の摺動表面に噴射圧力が0.4MPa、噴射時間が5分の条件下でショットピーニングすることにより、潤滑性被膜を形成した。一方、摺動部材として、一般的な軸受に使用されるJIS記号がSUJ2である軸受鋼を、HRC60の硬さに焼き入れて、これを用いた。
Hereinafter, the present invention will be specifically described with reference to examples.
Sn-Cu alloy powders having various compositions shown in Table 1 were produced by gas atomization. After confirming with a scanning electron microscope that the produced powder had a structure in which the intermetallic compound was finely dispersed, the produced powder was classified to a particle size of 105 to 38 μm, and the sliding member was classified using the classified powder. A lubricious coating was formed by shot peening on the sliding surface under the conditions of an injection pressure of 0.4 MPa and an injection time of 5 minutes. On the other hand, as a sliding member, bearing steel whose JIS symbol used for a general bearing is SUJ2 was quenched to the hardness of HRC60 and used.

形成した被膜の平均膜厚は、試験片の摺動面に相当する部位を切断し、その断面をバフ研磨で鏡面仕上げした後、走査電子顕微鏡にて観察を行った。観察はEPMA(電子プローブマイクロアナライザ)での1000倍で5視野分行い、その平均を求めた。そのときのCuの濃度は最大で3%以下で殆ど検出されなかった。また、表面圧縮残留応力はX線を用いて測定した。さらに、摺動部材は直径26mmで長さが28mmの小ローラーとし、これを用いてローラーピッチング試験を実施し、軟質膜単体のL50寿命(50%が破損する寿命)と比較した。軟質膜単体のL50寿命に対して、2倍以上:◎、1倍以上2倍未満:○、1倍未満0.5倍以上:△、0.5倍未満:×とした。 The average film thickness of the formed film was observed by a scanning electron microscope after cutting a portion corresponding to the sliding surface of the test piece and mirror-finishing its cross section by buffing. Observation was carried out for 5 fields at 1000 times with EPMA (Electron Probe Microanalyzer), and the average was obtained. At that time, the concentration of Cu was 3% or less at the maximum and was hardly detected. The surface compressive residual stress was measured using X-rays. Further, the sliding member has a length in the diameter 26mm and small roller of 28mm, and carried a roller pitting test using this soft film single L 50 life was compared (50% of life damage) and. For flexible film single L 50 life, at least twice: ◎, less than two times or more 1-fold: ○, 0.5 times or more than 1 time: △, less than 0.5 times: was ×.

Figure 0005385039
表1に示すように、No.1〜6は本発明例であり、No.7〜10は比較例である。
Figure 0005385039
As shown in Table 1, no. Nos. 1 to 6 are examples of the present invention. 7 to 10 are comparative examples.

比較例No.7はSnが100%、すなわち、軟質膜単体の場合であり、表面圧縮残留応力が小さい。この場合をローラーピッチング試験(L50)の基準とした。比較例No.8は軟質相が少なく、硬質相が多いために表面圧縮残留応力が大き過ぎ、摺動部材の寿命に影響を及ぼし摺動部材の寿命が短くなる。比較例No.9は比較例No.8よりさらに軟質相が少なく、硬質相が多く、かつ平均膜厚が薄いために表面圧縮残留応力がより大くなり、摺動部材の寿命をより短縮させる。 Comparative Example No. 7 is a case where Sn is 100%, that is, a soft film alone, and the surface compressive residual stress is small. This case was used as a reference for the roller pitching test (L 50 ). Comparative Example No. No. 8 has a small soft phase and a large hard phase, so the surface compressive residual stress is too large, which affects the life of the sliding member and shortens the life of the sliding member. Comparative Example No. 9 is Comparative Example No. Since the soft phase is smaller than 8, the hard phase is large, and the average film thickness is thin, the surface compressive residual stress is increased, and the life of the sliding member is further shortened.

比較例No.10は処理しない場合であり、その時の表面圧縮応力は小さく、摺動部材の寿命が短い。これに対し、本発明例であるNo.1〜6はいずれも本発明の条件を満たしていることから、その摺動部材の寿命が軟質金属単独の場合に比較して2倍以上延びることが分かる。   Comparative Example No. Reference numeral 10 denotes a case where no treatment is performed. At that time, the surface compressive stress is small, and the life of the sliding member is short. On the other hand, No. which is an example of the present invention. Since 1-6 satisfy | fill all the conditions of this invention, it turns out that the lifetime of the sliding member is extended 2 times or more compared with the case where a soft metal is single.

以上のように、Snの軟質金属とそれ以上の硬さをもつCu 6 Sn 5 および/またはCu 3 SnであるSn−Cu合金粉末の硬質金属との合金または金属間化合物とからなる膜をショットピーニング等を用いて形成させることにより、軟質金属は衝突時に軟質金属のみが変形し、表面に付着するが、硬質相は硬質相と相手の摺動部材の両方が変形することで、表面に圧縮残留応力が付与される、この形成された膜には軟質金属より硬く、基材となる軸受などの摺動部材より柔らかい金属間化合物が含まれ、この形成された膜においては軟質金属が潤滑性、初期なじみ性を狙い、金属化合物が耐摩耗性を狙うことで摺動性能が高く、耐久性がある被膜ができ、摺動部材の寿命の向上を図ることができる。 As described above, a film made of an alloy or intermetallic compound of hard metal Sn-Cu alloy powder is Cu 6 Sn 5 and / or Cu 3 Sn with soft metal and more hardness of S n By forming it using shot peening, etc., only the soft metal deforms and adheres to the surface at the time of collision, but the hard phase deforms on both the hard phase and the mating sliding member, This formed film to which compressive residual stress is applied contains an intermetallic compound that is harder than soft metal and softer than sliding members such as bearings as a base material. In this formed film, the soft metal is lubricated. When the metal compound is aimed for wearability and initial wearability, a sliding film with high sliding performance and durability can be formed, and the life of the sliding member can be improved.

Sn−Cu2元状態図である。It is a Sn-Cu binary state diagram.

Claims (3)

粉末としてビッカース硬度がHV100以下の軟質金属相がSn、HV100を超える硬さをもつ硬質相がCu 6 Sn 5 および/またはCu 3 SnであるSn−Cu合金粉末であることを特徴とする摺動性と表面圧縮残留応力を同時に付与するショットピーニング用粉末。 Sliding the Vickers hardness as a powder is characterized in that the Sn-Cu alloy powder hard phase is Cu 6 Sn 5 and / or Cu 3 Sn with hardness HV100 following soft metal phase exceeds Sn, HV100 For shot peening that simultaneously imparts surface properties and surface compressive residual stress. 素材から摺動部材を製造する際に、請求項1に記載の粉末を用いてショットピーニングして製造することを特徴とする摺動性部材の製造方法。 When manufacturing a sliding member from a raw material, it manufactures by carrying out shot peening using the powder of Claim 1, The manufacturing method of the sliding member characterized by the above-mentioned. 請求項に記載の摺動性部材の表面圧縮残留応力が600〜1500MPaであることを特徴とする摺動性部材の製造方法。 The method for producing a slidable member according to claim 2 , wherein the surface compressive residual stress of the slidable member is 600 to 1500 MPa.
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