JP5369037B2 - Diaphragm - Google Patents

Diaphragm Download PDF

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Publication number
JP5369037B2
JP5369037B2 JP2010074546A JP2010074546A JP5369037B2 JP 5369037 B2 JP5369037 B2 JP 5369037B2 JP 2010074546 A JP2010074546 A JP 2010074546A JP 2010074546 A JP2010074546 A JP 2010074546A JP 5369037 B2 JP5369037 B2 JP 5369037B2
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Japan
Prior art keywords
housing
outer peripheral
diaphragm
peripheral flange
thickness direction
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JP2010074546A
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Japanese (ja)
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JP2011208675A (en
JP2011208675A5 (en
Inventor
修二 竹下
一真 繁田
広治 青葉
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Nok Corp
Advics Co Ltd
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Nok Corp
Advics Co Ltd
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Priority to JP2010074546A priority Critical patent/JP5369037B2/en
Priority to US13/637,877 priority patent/US20130014639A1/en
Priority to PCT/JP2011/057082 priority patent/WO2011122424A1/en
Priority to CN201180016086.1A priority patent/CN102822573B/en
Publication of JP2011208675A publication Critical patent/JP2011208675A/en
Publication of JP2011208675A5 publication Critical patent/JP2011208675A5/ja
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Publication of JP5369037B2 publication Critical patent/JP5369037B2/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J3/00Diaphragms; Bellows; Bellows pistons
    • F16J3/02Diaphragms
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B1/00Installations or systems with accumulators; Supply reservoir or sump assemblies
    • F15B1/02Installations or systems with accumulators
    • F15B1/04Accumulators
    • F15B1/08Accumulators using a gas cushion; Gas charging devices; Indicators or floats therefor
    • F15B1/10Accumulators using a gas cushion; Gas charging devices; Indicators or floats therefor with flexible separating means
    • F15B1/12Accumulators using a gas cushion; Gas charging devices; Indicators or floats therefor with flexible separating means attached at their periphery
    • F15B1/125Accumulators using a gas cushion; Gas charging devices; Indicators or floats therefor with flexible separating means attached at their periphery characterised by the attachment means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2201/00Accumulators
    • F15B2201/20Accumulator cushioning means
    • F15B2201/205Accumulator cushioning means using gas
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2201/00Accumulators
    • F15B2201/30Accumulator separating means
    • F15B2201/315Accumulator separating means having flexible separating means
    • F15B2201/3151Accumulator separating means having flexible separating means the flexible separating means being diaphragms or membranes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2201/00Accumulators
    • F15B2201/30Accumulator separating means
    • F15B2201/315Accumulator separating means having flexible separating means
    • F15B2201/3156Accumulator separating means having flexible separating means characterised by their attachment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2201/00Accumulators
    • F15B2201/60Assembling or methods for making accumulators
    • F15B2201/61Assembling or methods for making separating means therefor

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Diaphragms And Bellows (AREA)
  • Braking Systems And Boosters (AREA)
  • Fluid-Damping Devices (AREA)

Abstract

Disclosed is a diaphragm having a flexible film portion and an outer peripheral flange portion integrally provided on the peripheral edge of the film portion, said outer peripheral flange portion being provided between and held by a first housing and a second housing, wherein the film portion is prevented from rising upward when the diaphragm is attached to the housings. The outer peripheral flange portion has a first pressed surface which is one surface of the diaphragm in the thickness direction and which is in close contact with the first housing, and a three-dimensional shape composed of a projected portion or a recessed portion, on the first pressed surface. When the outer peripheral flange portion is attached to the first housing and the second housing while being compressed and deformed therebetween, the three-dimensional shape defines voids in the thickness direction between the outer peripheral flange portion and the first housing.

Description

本発明は、ダイアフラムに係り、更に詳しくは、車両用液圧制御装置のアキュムレータなどに用いられるのに好適なダイアフラムに関する。   The present invention relates to a diaphragm, and more particularly to a diaphragm suitable for use in an accumulator or the like of a vehicle hydraulic pressure control device.

従来から図5に示すように、可撓変形する膜部2と、この膜部2の周縁部に一体に設けられた外周フランジ部3とを有するゴム状弾性体製のダイアフラム1が知られており、このダイアフラム1は例えば車両用液圧制御装置のアキュムレータに用いられてハウジング31内の圧力室32に装着され、圧力の作用に伴って膜部2が可撓変形し、圧力室32の容積を変化させるとともに、通気孔33を開閉する。   Conventionally, as shown in FIG. 5, a diaphragm 1 made of a rubber-like elastic body having a membrane portion 2 that is flexibly deformed and an outer peripheral flange portion 3 that is integrally provided at the peripheral portion of the membrane portion 2 is known. The diaphragm 1 is used, for example, in an accumulator of a vehicle hydraulic pressure control device and is attached to a pressure chamber 32 in a housing 31. The membrane portion 2 is flexibly deformed by the action of pressure, and the volume of the pressure chamber 32 is increased. And the air vent 33 is opened and closed.

上記概要のダイアフラム1において昨今、図6(A)に示すように膜部2の厚み方向の一面2aと外周フランジ部3の厚み方向の一端面3aとが同一平面上に配置されたタイプのダイアフラムが開発されており、このダイアフラム1は図6(B)に示すように外周フランジ部3が上下一対のハウジング31A,31B間に挟まれることによって装着され、このとき膜部2は初動姿勢としてその一面2aが、上記通気孔33を設けた図上下側のハウジング31Aの平面部35に接触する状態とされる。   In the diaphragm 1 having the above outline, as shown in FIG. 6A, a diaphragm of the type in which one surface 2a in the thickness direction of the film portion 2 and one end surface 3a in the thickness direction of the outer peripheral flange portion 3 are arranged on the same plane. As shown in FIG. 6B, the diaphragm 1 is mounted by sandwiching the outer peripheral flange portion 3 between a pair of upper and lower housings 31A and 31B. At this time, the membrane portion 2 is in its initial motion posture. One surface 2a is brought into contact with the flat surface portion 35 of the housing 31A on the upper and lower sides of the figure in which the vent hole 33 is provided.

しかしながらこの図6(A)(B)のダイアフラム1によると、上記外周フランジ部3が一対のハウジング31A,31B間に装着されたときに大きく圧縮変形せしめられることから、その影響を受けて図6(C)に示すように膜部2の一面2aが下側のハウジング31Aの平面部35から離れて浮き上がってしまうことがあり、このような場合には膜部2の浮き上がりを抑制して正確な初動姿勢を確保する必要がある。   However, according to the diaphragm 1 shown in FIGS. 6A and 6B, the outer peripheral flange portion 3 is greatly compressed and deformed when mounted between the pair of housings 31A and 31B. As shown in (C), one surface 2a of the film part 2 may float away from the flat part 35 of the lower housing 31A. In such a case, the film part 2 is prevented from being lifted accurately. It is necessary to secure the initial movement posture.

特開2007−269298号公報(図18)Japanese Patent Laying-Open No. 2007-269298 (FIG. 18)

本発明は以上の点に鑑みて、ダイアフラムをハウジングに装着したときに膜部に浮き上がり現象が発生するのを抑制することができるダイアフラムを提供することを目的とする。   In view of the above, an object of the present invention is to provide a diaphragm capable of suppressing the occurrence of a floating phenomenon in a film portion when the diaphragm is mounted on a housing.

上記目的を達成するため、本発明の請求項1によるダイアフラムは、可撓変形する膜部と、該膜部の周縁部に一体に設けられた外周フランジ部とを有するダイアフラムであって、前記膜部の厚み方向一方の面の少なくとも一部および前記外周フランジ部の厚み方向一方の端面の少なくとも一部は同一平面上に配置されて面一状の平面を有しており、前記外周フランジ部の厚み方向他方の端面は前記膜部の厚み方向他方の面よりも厚み方向に突出しており、当該ダイアフラムが一対の第1ハウジングおよび第2ハウジング間に装着されたときに、前記外周フランジ部は前記一対の第1ハウジングおよび第2ハウジング間で厚み方向に圧縮された状態とされ、前記膜部はその厚み方向一方の面が略全面に亙って前記第1ハウジングに接触した状態とされるダイアフラムにおいて、前記外周フランジ部は、その厚み方向一方の端面であるとともに前記第1ハウジングに押圧される面である第1被押圧面を有し、前記第1被押圧面に凸部または凹部よりなる立体形状が設けられ、前記外周フランジ部が前記一対の第1ハウジングおよび第2ハウジング間厚み方向に圧縮された状態で前記立体形状は前記外周フランジ部および前記第1ハウジング間に厚み方向空隙を形成し、前記厚み方向空隙により前記外周フランジ部の圧縮変形を吸収することで該圧縮変形の影響が前記膜部に及びにくくなり、前記膜部の前記第1ハウジングからの浮き上がりを抑制することを特徴とする。 To achieve the above object, a diaphragm according to claim 1 of the present invention is a diaphragm having a film unit for flexible deformation, and an outer peripheral flange portion provided integrally with the periphery of the membrane portion, said membrane At least a portion of one surface in the thickness direction of the portion and at least a portion of one end surface in the thickness direction of the outer peripheral flange portion are disposed on the same plane and have a flat surface, The other end surface in the thickness direction protrudes in the thickness direction from the other surface in the thickness direction of the film portion, and when the diaphragm is mounted between a pair of the first housing and the second housing, the outer peripheral flange portion is A state in which the film portion is compressed in the thickness direction between a pair of the first housing and the second housing, and one side in the thickness direction of the film portion is in contact with the first housing over substantially the entire surface. In the diaphragm is, the outer peripheral flange portion has a first pressed surface is a surface to be pressed against the first housing with an end in the thickness direction while the convex portion on the first pressed surface or provided three-dimensional shape consisting of the concave portion, wherein the three-dimensional shape in a state where the outer peripheral flange portion is compressed in the thickness direction between the pair of first housing and second Haujin grayed between the outer peripheral flange portion and said first Haujin grayed Forming a gap in the thickness direction and absorbing the compressive deformation of the outer peripheral flange portion by the gap in the thickness direction so that the influence of the compressive deformation does not easily reach the film portion, and the film portion is lifted from the first housing. It is characterized by suppressing .

本発明のダイアフラムは、可撓変形する膜部と、この膜部の周縁部に一体に設けられた外周フランジ部とを有し、外周フランジ部が一対の第1ハウジングと第2ハウジングとの間に挟持されて装着され、例えば、車両用液圧制御装置のアキュムレータなどで使用される場合には、膜部が第1ハウジングに着座した状態を初動姿勢とし、第1ハウジングとダイアフラムとの間の空間と、ダイアフラムと第2ハウジングとの間の空間と、の間に差圧が生じると、膜部が第1ハウジングから離れるように作動するものであり、請求項1の構成によれば、第1被押圧面に立体形状を持たせるだけで容易に外周フランジ部と第1ハウジングとの間に厚み方向空隙を形成することができ、厚み方向空隙により外周フランジ部の第1ハウジングおよび第2ハウジングからの圧縮による変形を吸収することで、ダイアフラムが第1ハウジングと第2ハウジングとの間に装着された状態、すなわち上記の差圧が生じていない初動姿勢において、上記変形の影響による膜部の第1ハウジングからの浮き上がりを抑制することができる。   The diaphragm of the present invention has a membrane portion that is flexibly deformed, and an outer peripheral flange portion that is integrally provided on a peripheral portion of the membrane portion, and the outer peripheral flange portion is between the pair of first housing and second housing. For example, when used in an accumulator of a hydraulic control device for a vehicle, the state in which the membrane portion is seated on the first housing is the initial motion posture, and the space between the first housing and the diaphragm When a differential pressure is generated between the space and the space between the diaphragm and the second housing, the membrane portion operates so as to be separated from the first housing. The thickness direction gap can be easily formed between the outer peripheral flange portion and the first housing simply by giving the pressed surface a three-dimensional shape, and the first housing and the second half of the outer peripheral flange portion are formed by the thickness direction gap. By absorbing deformation due to compression from the ging, in a state in which the diaphragm is mounted between the first housing and the second housing, that is, in an initial motion posture in which the above-described differential pressure is not generated, the film portion due to the influence of the deformation The floating from the first housing can be suppressed.

また、本発明の請求項2によるダイアフラムは、上記した請求項1に記載のダイアフラムにおいて、前記立体形状は、前記第1被押圧面の径方向中央部に設けられた環状突起であり、前記外周フランジ部が前記第1ハウジングと第2ハウジングとの間で圧縮変形されて装着された状態で、前記厚み方向空隙を前記第1被押圧面の前記環状突起より径方向外側に形成することを特徴とする。   The diaphragm according to claim 2 of the present invention is the diaphragm according to claim 1, wherein the three-dimensional shape is an annular protrusion provided at a radially central portion of the first pressed surface, and the outer periphery. The thickness direction gap is formed radially outward from the annular protrusion of the first pressed surface in a state where the flange portion is compressed and deformed between the first housing and the second housing. And

請求項2の構成によれば、環状突起により、厚み方向空隙を第1被押圧面の環状突起より径方向外側に形成することで、厚み方向空隙の容積を充分に確保することができ、外周フランジ部の第1ハウジングおよび第2ハウジングからの圧縮による変形をより容易に吸収することができる。   According to the configuration of the second aspect, by forming the thickness direction gap radially outside the annular protrusion of the first pressed surface by the annular protrusion, the volume of the thickness direction gap can be sufficiently secured, and the outer periphery The deformation due to compression of the flange portion from the first housing and the second housing can be absorbed more easily.

また、本発明の請求項3によるダイアフラムは、上記した請求項1または2に記載のダイアフラムにおいて、前記外周フランジ部は、前記第1ハウジングと第2ハウジングとの間に装着された状態で、当該外周フランジ部の外周面と前記第1および第2ハウジングの少なくとも一つとの間に前記ダイアフラムの径方向において径方向空隙を形成可能な外径寸法に設定されていることを特徴とする。   The diaphragm according to claim 3 of the present invention is the diaphragm according to claim 1 or 2, wherein the outer peripheral flange portion is mounted between the first housing and the second housing. The outer diameter dimension is set so that a radial gap can be formed in the radial direction of the diaphragm between the outer peripheral surface of the outer peripheral flange portion and at least one of the first and second housings.

請求項3の構成によれば、径方向空隙により、外周フランジ部の第1ハウジングおよび第2ハウジングからの圧縮による変形の吸収がより容易となる。   According to the configuration of the third aspect, the radial gap makes it easier to absorb deformation due to compression of the outer peripheral flange portion from the first housing and the second housing.

また、本発明の請求項4によるダイアフラムは、上記した請求項1ないし3の何れかに記載のダイアフラムにおいて、前記外周フランジ部は、前記ダイアフラムの厚み方向における他方の面であり前記第2ハウジングに押圧される第2被押圧面と、該第2被押圧面に凸部または凹部からなる立体形状とを有することを特徴とする。   A diaphragm according to a fourth aspect of the present invention is the diaphragm according to any one of the first to third aspects, wherein the outer peripheral flange portion is the other surface in the thickness direction of the diaphragm, and the second housing. It has the 2nd to-be-pressed surface pressed, and the solid shape which consists of a convex part or a recessed part in this 2nd to-be-pressed surface.

請求項4の構成によれば、第2被押圧面に立体形状を持たせるだけで容易に外周フランジ部と第2ハウジングとの間に厚み方向空隙を形成することができ、厚み方向空隙により外周フランジ部の第1および第2ハウジングからの圧縮による変形の吸収がより容易となる。   According to the configuration of claim 4, it is possible to easily form a thickness direction gap between the outer peripheral flange portion and the second housing simply by giving the second pressed surface a three-dimensional shape. Absorption of deformation due to compression from the first and second housings of the flange portion becomes easier.

更にまた、本発明の請求項5によるダイアフラム支持構造は、第1ハウジングと第2ハウジングとでダイアフラムを挟持してなるダイアフラム支持構造であって、前記ダイアフラムとして請求項1ないし4の何れかに記載のダイアフラムを備えたことを特徴とする。   Furthermore, the diaphragm support structure according to claim 5 of the present invention is a diaphragm support structure in which a diaphragm is sandwiched between a first housing and a second housing, and the diaphragm is any one of claims 1 to 4. It is characterized by having a diaphragm.

請求項5の構成によれば、ダイアフラム支持構造において、請求項1ないし4の何れかに記載のダイアフラムにより、第1ハウジングからの膜部の浮き上がりを抑制することができる。   According to the configuration of the fifth aspect, in the diaphragm support structure, the diaphragm according to any one of the first to fourth aspects can suppress the rising of the film portion from the first housing.

本発明は、以下の効果を奏する。   The present invention has the following effects.

すなわち、本発明においては上記したように、外周フランジ部の廻りに厚み方向や径方向の空隙が設定されてフランジ変形時のゴム状弾性体の逃げ場が確保されるため、外周フランジ部の変形がこの逃げ場に吸収されて変形の影響がその内周側の膜部にまで及びにくくなる。したがって、膜部に浮き上がり現象が発生するのを抑制し、その正確な初動姿勢を確保することができる。   That is, in the present invention, as described above, since a gap in the thickness direction and the radial direction is set around the outer peripheral flange portion to secure a clearance for the rubber-like elastic body when the flange is deformed, the outer peripheral flange portion is not deformed. It is absorbed by this escape place, and the influence of deformation does not easily reach the inner peripheral side film portion. Therefore, it is possible to suppress the occurrence of the floating phenomenon in the film portion and to ensure the accurate initial movement posture.

本発明の実施例に係るダイアフラムを示す図で、(A)はその装着前状態における半裁断面図、(B)は(A)の要部拡大図It is a figure which shows the diaphragm which concerns on the Example of this invention, (A) is a half-cut sectional view in the state before the mounting | wearing, (B) is a principal part enlarged view of (A). 同ダイアフラムを示す図で、(A)はその装着状態における半裁断面図、(B)は(A)の要部拡大図It is a figure which shows the same diaphragm, (A) is a half cut sectional view in the mounting state, (B) is a principal part enlarged view of (A). 本発明の他の実施例に係るダイアフラムを示す図で、(A)はその装着前状態における半裁断面図、(B)は(A)の要部拡大図It is a figure which shows the diaphragm which concerns on the other Example of this invention, (A) is a half-cut sectional view in the state before the mounting | wearing, (B) is a principal part enlarged view of (A). 同ダイアフラムを示す図で、(A)はその装着状態における半裁断面図、(B)は(A)の要部拡大図It is a figure which shows the same diaphragm, (A) is a half cut sectional view in the mounting state, (B) is a principal part enlarged view of (A). 従来例に係るダイアフラムの装着状態を示す断面図Sectional drawing which shows the mounting state of the diaphragm which concerns on a prior art example 比較例に係るダイアフラムを示す図で、(A)はその装着前状態における半裁断面図、(B)はその装着状態における半裁断面図、(C)は不具合発生状態における半裁断面図It is a figure which shows the diaphragm which concerns on a comparative example, (A) is a half cut sectional view in the state before the mounting | wearing, (B) is a half cut sectional view in the mounting state, (C) is a half cut sectional view in the malfunction occurrence state

つぎに本発明の実施例を図面にしたがって説明する。   Next, embodiments of the present invention will be described with reference to the drawings.

図1および図2に示すように、当該実施例に係るダイアフラム1は、所定のゴム状弾性体によって円盤状に成形され、可撓変形可能な膜部2と、この膜部2の周縁部に設けられた環状の外周フランジ部(外周取付部)3とを一体に有している。また当該実施例に係るダイアフラム1は、ABS制御、ESC制御などを行なう車両用液圧制御装置のアキュムレータに用いられるものであって、外周フランジ部3が図上上下一対のハウジング31A,31B間に挟まれることによってハウジング31A,31B内の圧力室32(図2参照)に装着される。図1中の下側のハウジング31Aには通気孔33が設けられ、上側のハウジング31Bには、例えば車両用液圧装置の作動液の流路と連通する連通孔39が設けられている。   As shown in FIGS. 1 and 2, the diaphragm 1 according to this embodiment is formed into a disk shape by a predetermined rubber-like elastic body, and is flexibly deformable with a film part 2 and a peripheral part of the film part 2. An annular outer peripheral flange portion (outer peripheral attachment portion) 3 is integrally provided. The diaphragm 1 according to this embodiment is used for an accumulator of a vehicle hydraulic pressure control device that performs ABS control, ESC control, etc., and an outer peripheral flange portion 3 is located between a pair of upper and lower housings 31A and 31B in the figure. By being sandwiched, the pressure chambers 32 (see FIG. 2) in the housings 31A and 31B are mounted. The lower housing 31A in FIG. 1 is provided with a vent hole 33, and the upper housing 31B is provided with a communication hole 39 that communicates with, for example, a hydraulic fluid passage of the vehicle hydraulic device.

ダイアフラム1の詳細構造として、膜部2は、全面に亙って均一な厚みを有する平板状に成形され(ただし後記する厚肉部4を設ける場合はこれを除く)、通気孔33を設けた一方のハウジング(第1ハウジング)31Aに面する一方の面2aと、反対側の他方の面2bとを有している。外周フランジ部3は、膜部2よりも大きな厚みに設定され、断面略矩形状に成形され、その厚み方向の一方の端面を上記通気孔33を設けた一方のハウジング31Aに対する被押圧面(第1被押圧面)3aとされ、他方の端面を他方のハウジング(第2ハウジング)31Bによって押圧される被押圧面(第2被押圧面)3bとされている。第1被押圧面3aと膜部2の一方の面2aは同一平面上に配置されて面一状の平面をなしている。第2被押圧面3bは膜部2の他方の面2bよりも厚み方向に突出している。   As a detailed structure of the diaphragm 1, the film part 2 is formed into a flat plate shape having a uniform thickness over the entire surface (except for the case where a thick part 4 described later is provided), and provided with a vent hole 33. It has one surface 2a facing one housing (first housing) 31A and the other surface 2b on the opposite side. The outer peripheral flange portion 3 is set to have a thickness larger than that of the membrane portion 2 and is formed in a substantially rectangular cross section. One end surface in the thickness direction is a pressed surface (first surface) with respect to one housing 31A provided with the vent hole 33. 1 pressed surface) 3a, and the other end surface is a pressed surface (second pressed surface) 3b pressed by the other housing (second housing) 31B. The first pressed surface 3a and the one surface 2a of the film part 2 are arranged on the same plane to form a flat surface. The second pressed surface 3b protrudes in the thickness direction from the other surface 2b of the film part 2.

尚、ダイアフラム1の作動時に膜部2が通気孔33と干渉する(膜部2が通気孔33に食い込む)のを抑制するため、膜部2の平面中央には、先端面4aに凹み5を設けた厚肉部4が一体成形され、これに対応して一方のハウジング31Aにおける通気孔33の開口周縁部には、厚肉部4が嵌まり込む凹部34が設けられているが、これらの厚肉部4や凹部34は必須の構成ではないため、設けられなくても良い。   In order to prevent the membrane portion 2 from interfering with the vent hole 33 when the diaphragm 1 is operated (the membrane portion 2 bites into the vent hole 33), a dent 5 is formed in the distal end surface 4a at the center of the plane of the membrane portion 2. The thick portion 4 provided is integrally molded, and a recess 34 into which the thick portion 4 is fitted is provided on the peripheral edge portion of the vent hole 33 in one housing 31A. Since the thick part 4 and the recessed part 34 are not essential structures, they do not need to be provided.

上記通気孔33を設けた一方のハウジング31Aには、膜部2の一方の面2aが略全面に亙って接触する平面部35が設けられている。一対のハウジング31A,31B間には、ダイアフラム1の外周フランジ部3を装着するための環状の装着部36(図2参照)が設けられ、このため、一方のハウジング31Aには環状の段差部37が設けられて装着部36の外周壁36aが形成されるとともに他方のハウジング31Bには突起状を呈する環状のストッパ部38が設けられて装着部36の内周壁36bが形成されている。   One housing 31A provided with the vent hole 33 is provided with a flat portion 35 on which one surface 2a of the membrane portion 2 is in contact with substantially the entire surface. An annular mounting portion 36 (see FIG. 2) for mounting the outer peripheral flange portion 3 of the diaphragm 1 is provided between the pair of housings 31A and 31B. For this reason, one housing 31A has an annular stepped portion 37. Is provided to form an outer peripheral wall 36a of the mounting portion 36, and the other housing 31B is provided with an annular stopper portion 38 having a protruding shape to form an inner peripheral wall 36b of the mounting portion 36.

装着部36の厚み方向の寸法c(図2参照)は、外周フランジ部3の自由状態における厚み方向の寸法d(図1参照)よりも小さく設定され(c<d)、これに対して、装着部36の幅方向(径方向)の寸法φe(図2参照)は、外周フランジ部3の自由状態における幅方向の寸法φf(図1参照)よりも大きく設定されている(φe>φf)。また一方のハウジング31Aの平面部35と他方のハウジング31Bのストッパ部38との間隔g(図2参照)は、膜部2の厚み寸法h(図1参照)と同じか、または膜部2の厚み寸法hよりも少々大きく設定されている(g≧h)。   The dimension c in the thickness direction of the mounting portion 36 (see FIG. 2) is set smaller than the dimension d in the thickness direction in the free state of the outer peripheral flange portion 3 (see FIG. 1) (c <d). A dimension φe (see FIG. 2) in the width direction (radial direction) of the mounting portion 36 is set to be larger than a dimension φf (see FIG. 1) in the width direction in the free state of the outer peripheral flange portion 3 (φe> φf). . The distance g (see FIG. 2) between the flat surface portion 35 of one housing 31A and the stopper portion 38 of the other housing 31B is the same as the thickness dimension h (see FIG. 1) of the membrane portion 2, or It is set slightly larger than the thickness dimension h (g ≧ h).

以上の事項を前提として、当該ダイアフラム1を一対のハウジング31A,31B間に装着すると、図2に示すように膜部2がその一方の面2aをもって一方のハウジング31Aの平面部35に接触した状態が初動姿勢となり、この初動姿勢のダイアフラム1に圧力が作用することにより膜部2がハウジング31Aの平面部35から離れる。外周フランジ部3は、図1から図2へと示すようにハウジング31A,31B間に装着されたときに圧縮変形せしめられるが、このように外周フランジ部3が圧縮変形せしめられても膜部2はハウジング31Aの平面部35に接触した状態を保つのが本来のあるべき姿とされる。しかしながら上記したようにダイアフラム1の断面形状の如何によっては、図6(C)に示したように外周フランジ部3をハウジング31A,31Bに装着したのみの初動姿勢において既に膜部2がハウジング31Aの平面部35から離れて浮き上がってしまうことがあり、このような場合にはこれに対策する必要がある。   When the diaphragm 1 is mounted between the pair of housings 31A and 31B on the assumption of the above matters, the membrane portion 2 is in contact with the flat portion 35 of one housing 31A with its one surface 2a as shown in FIG. Becomes the initial motion posture, and when the pressure is applied to the diaphragm 1 in the initial motion posture, the membrane portion 2 is separated from the flat portion 35 of the housing 31A. As shown in FIGS. 1 to 2, the outer peripheral flange portion 3 is compressed and deformed when mounted between the housings 31A and 31B. Even if the outer peripheral flange portion 3 is compressed and deformed in this way, the film portion 2 is compressed. Is supposed to be in a state where it should be kept in contact with the flat portion 35 of the housing 31A. However, as described above, depending on the cross-sectional shape of the diaphragm 1, as shown in FIG. 6C, the membrane portion 2 is already in the housing 31A in the initial motion posture in which only the outer peripheral flange portion 3 is attached to the housings 31A and 31B. In some cases, it may be necessary to take measures against this situation.

そこで、本願発明者らは、本願発明をなすに至ったもので、これに伴って以下の実施例を提案する。   Therefore, the inventors of the present application have come to make the present invention, and accordingly, the following embodiments are proposed.

すなわち図1に示すように、当該実施例に係るダイアフラム1においては、外周フランジ部3の第1被押圧面3aに平面上一部の立体形状7が設けられ、この立体形状7が図2に示すように、外周フランジ部3がハウジング31A,31B間に装着されて圧縮変形せしめられたときにこの外周フランジ部3の変形により膜部2に浮き上がり現象が発生するのを抑制すべく外周フランジ部3と一方のハウジング31Aとの間にフランジ変形時の逃げ空間となる厚み方向空隙8(図2に示す)を設定するものとされている。   That is, as shown in FIG. 1, in the diaphragm 1 according to this embodiment, a part of the solid shape 7 on the plane is provided on the first pressed surface 3a of the outer peripheral flange portion 3, and this solid shape 7 is shown in FIG. As shown in the drawing, when the outer peripheral flange portion 3 is mounted between the housings 31A and 31B and is compressed and deformed, the outer peripheral flange portion is prevented from being lifted up in the film portion 2 due to the deformation of the outer peripheral flange portion 3. A thickness direction gap 8 (shown in FIG. 2) is set between 3 and one housing 31A as a clearance space when the flange is deformed.

立体形状7は具体的には、第1被押圧面3aの径方向中央部に設けられた突起9として設けられ、このような突起9が設けられることにより装着状態において突起9の外周側であって外周フランジ部3の第1被押圧面3aとハウジング装着部36の底面36cとの間に厚み方向空隙8が設定される。突起9は、図1に示すダイアフラム1の中心軸を含む平面で切った断面において円弧形に形成され、図1の下方から見た平面視では第1被押圧面3aの全周に亙って環状に形成されているが、その平面視形状は環状に限定するものではなく、またシール性に問題を生じなければ、環状でなく複数の突起を第1被押圧面3a上の周方向に並べる配置であっても良い。   Specifically, the three-dimensional shape 7 is provided as a protrusion 9 provided in the central portion in the radial direction of the first pressed surface 3a. By providing such a protrusion 9, the three-dimensional shape 7 is provided on the outer peripheral side of the protrusion 9 in the mounted state. Thus, a thickness direction gap 8 is set between the first pressed surface 3 a of the outer peripheral flange portion 3 and the bottom surface 36 c of the housing mounting portion 36. The protrusion 9 is formed in an arc shape in a cross section taken along a plane including the central axis of the diaphragm 1 shown in FIG. 1, and extends over the entire circumference of the first pressed surface 3a in a plan view seen from below in FIG. However, the shape in plan view is not limited to an annular shape, and if there is no problem in sealing performance, a plurality of protrusions are not annular but a plurality of protrusions are arranged in the circumferential direction on the first pressed surface 3a. It may be arranged side by side.

また、外周フランジ部3は、当該外周フランジ部3がハウジング31A,31B間に装着されたときに当該外周フランジ部3の外周面3cとハウジング装着部36の外周壁36aとの間に径方向空隙10(図2に示す)を形成可能な外径寸法に設定されている。外周フランジ部3の外周面3cにはその一部に突起(図示せず)が設けられてこの突起がハウジング装着部36の外周壁36aに接するものであっても良い。   The outer peripheral flange portion 3 has a radial gap between the outer peripheral surface 3c of the outer peripheral flange portion 3 and the outer peripheral wall 36a of the housing mounting portion 36 when the outer peripheral flange portion 3 is mounted between the housings 31A and 31B. 10 (shown in FIG. 2) is set to an outer diameter dimension capable of forming. A protrusion (not shown) may be provided on a part of the outer peripheral surface 3 c of the outer peripheral flange portion 3, and the protrusion may be in contact with the outer peripheral wall 36 a of the housing mounting portion 36.

また、外周フランジ部3の第2被押圧面3bは平坦面であっても良いが、当該実施例ではこの第2被押圧面3bにも平面上一部の立体形状11が設けられており、この立体形状11は具体的には、第2被押圧面3bの径方向中央部に突起12として設けられ、このような突起12が設けられることにより装着状態において図2に示すように、突起12の外周側であって外周フランジ部3の第2被押圧面3bとハウジング装着部36の反対側の底面36dとの間に厚み方向空隙13が設定される。突起12は前記突起9と同様、図1に示すダイアフラム1の中心軸を含む平面で切った断面において円弧形に形成され、図1の上方下方から見た平面視では第2被押圧面3bの全周に亙って環状に形成されているが、その平面視形状は環状に限定するものではなく、またシール性に問題を生じなければ、環状でなく複数の突起を円周上に並べる構造であっても良い。   Further, the second pressed surface 3b of the outer peripheral flange portion 3 may be a flat surface, but in this embodiment, the second pressed surface 3b is also provided with a part of the three-dimensional shape 11 on the plane. Specifically, the three-dimensional shape 11 is provided as a projection 12 at the radial center of the second pressed surface 3b, and by providing such a projection 12, as shown in FIG. The thickness direction gap 13 is set between the second pressed surface 3 b of the outer peripheral flange portion 3 and the bottom surface 36 d on the opposite side of the housing mounting portion 36. The protrusion 12 is formed in an arc shape in a cross section cut by a plane including the central axis of the diaphragm 1 shown in FIG. 1 like the protrusion 9, and the second pressed surface 3b in a plan view seen from above and below in FIG. The shape in plan view is not limited to an annular shape, and a plurality of protrusions are arranged on the circumference instead of being annular if there is no problem in sealing performance. It may be a structure.

上記構成のダイアフラム1によれば、外周フランジ部3の第1被押圧面3aに平面上一部の立体形状7すなわち突起9が設けられ、これにより突起9の外周側であって外周フランジ部3の第1被押圧面3aとハウジング装着部36の底面36cとの間に厚み方向空隙8が形成されている。この厚み方向空隙8は、ダイアフラム1が第1ハウジング31Aおよび第2ハウジング31Bの間に装着された際に図1、2に示す上下方向の圧縮による外周フランジ部3の弾性変形を吸収する大きさとなっている。したがって外周フランジ部3が圧縮変形してもその影響が膜部2に及びにくくなるために、膜部2に図6(C)のような浮き上がり現象が発生するのを抑制することができる。尚、厚み方向空隙8は突起9の外周側のみでなく内周側にも設けられることがある。   According to the diaphragm 1 having the above-described configuration, a part of the three-dimensional shape 7 on the plane, that is, the protrusion 9 is provided on the first pressed surface 3 a of the outer peripheral flange portion 3, whereby the outer peripheral flange portion 3 is on the outer peripheral side of the protrusion 9. A thickness direction gap 8 is formed between the first pressed surface 3 a and the bottom surface 36 c of the housing mounting portion 36. The thickness direction gap 8 has a size that absorbs elastic deformation of the outer peripheral flange portion 3 due to compression in the vertical direction shown in FIGS. 1 and 2 when the diaphragm 1 is mounted between the first housing 31A and the second housing 31B. It has become. Therefore, even if the outer peripheral flange portion 3 is compressed and deformed, the influence of the outer peripheral flange portion 3 does not easily reach the film portion 2, so that the floating phenomenon as shown in FIG. The thickness direction gap 8 may be provided not only on the outer peripheral side of the protrusion 9 but also on the inner peripheral side.

また、当該実施例では併せて、外周フランジ部3の外周面3cとハウジング装着部36の外周壁36aとの間に径方向空隙10が形成されている。この径方向空隙10は、ダイアフラム1が第1ハウジング31Aおよび第2ハウジング31Bの間に装着された際に図1、2に示す上下方向の圧縮による外周フランジ部3の弾性変形の一部を吸収している。厚み方向空隙8と併せると、外周フランジ部3の弾性変形を吸収する空隙を一層拡大することができ、膜部2の浮き上がりの発生をより容易に抑制することができる。   In the embodiment, the radial gap 10 is formed between the outer peripheral surface 3 c of the outer peripheral flange portion 3 and the outer peripheral wall 36 a of the housing mounting portion 36. The radial gap 10 absorbs part of the elastic deformation of the outer peripheral flange portion 3 due to the vertical compression shown in FIGS. 1 and 2 when the diaphragm 1 is mounted between the first housing 31A and the second housing 31B. doing. When combined with the thickness direction gap 8, the gap that absorbs elastic deformation of the outer peripheral flange portion 3 can be further expanded, and the occurrence of lifting of the film portion 2 can be more easily suppressed.

さらに、当該実施例では併せて、外周フランジ部3の第2被押圧面3bにも立体形状11すなわち突起12が設けられることで、突起12の外周側において第2被押圧面3bとハウジング装着部36の底面36dとの間に厚み方向空隙13が形成される。この厚み方向空隙13も、ダイアフラム1が第1ハウジング31Aおよび第2ハウジング31Bの間に装着された際に図1、2に示す上下方向の圧縮による外周フランジ部3の弾性変形の一部を吸収している。厚み方向空隙8および径方向空隙10と併せて、外周フランジ部3の弾性変形を吸収する空隙をより一層拡大することができ、膜部2の浮き上がりの発生をさらに容易に抑制することができる。尚、厚み方向空隙13は突起12の外周側のみでなく内周側に形成されても良い。   Furthermore, in this embodiment, the second pressed surface 3b of the outer peripheral flange portion 3 is also provided with the three-dimensional shape 11, that is, the protrusion 12, so that the second pressed surface 3b and the housing mounting portion are provided on the outer peripheral side of the protrusion 12. A gap 13 in the thickness direction is formed between the bottom surface 36 d of 36. The gap 13 in the thickness direction also absorbs a part of the elastic deformation of the outer peripheral flange portion 3 due to the vertical compression shown in FIGS. 1 and 2 when the diaphragm 1 is mounted between the first housing 31A and the second housing 31B. doing. Together with the thickness direction gap 8 and the radial direction gap 10, the gap that absorbs elastic deformation of the outer peripheral flange portion 3 can be further expanded, and the occurrence of the lifting of the film portion 2 can be further easily suppressed. The thickness direction gap 13 may be formed not only on the outer peripheral side of the protrusion 12 but also on the inner peripheral side.

また、前記立体形状7,11である突起9,12などの凸部は外周フランジ部3の第1被押圧面3aまたは第2被押圧面3bにそれぞれ複数が平行に設けられる場合もあり、この場合には、突起9,12同士の間にゴム状弾性体の逃げ場となる厚み方向空隙8,13が設定される。   Further, a plurality of convex portions such as the projections 9 and 12 that are the three-dimensional shapes 7 and 11 may be provided in parallel on the first pressed surface 3a or the second pressed surface 3b of the outer peripheral flange portion 3, respectively. In this case, gaps 8 and 13 in the thickness direction are set between the protrusions 9 and 12 to serve as a refuge for the rubber-like elastic body.

また、立体形状7,11は突起9,12などの凸部の代わりに凹部であっても良く、この場合には、外周フランジ部3の第1被押圧面3aまたは第2被押圧面3bがハウジング装着部36の底面36c,36dに直接接触し圧接せしめられた状態で外周フランジ部3とハウジング装着部36の底面36c,36dとの間にゴム状弾性体の逃げ場となる空隙8,13が設定される。凹部はこれも複数が平行に設けられる場合がある。他の実施例として示す図3および図4では、上下の立体形状7,11のうち第2被押圧面3bに設けられる図上上側の立体形状11が溝状の凹部14によって形成されている。   The three-dimensional shapes 7 and 11 may be concave portions instead of the convex portions such as the protrusions 9 and 12, and in this case, the first pressed surface 3a or the second pressed surface 3b of the outer peripheral flange portion 3 is provided. There are gaps 8 and 13 between the outer peripheral flange portion 3 and the bottom surfaces 36c and 36d of the housing mounting portion 36 as a refuge for the rubber-like elastic body in a state in which the bottom surfaces 36c and 36d of the housing mounting portion 36 are in direct contact and pressure contact. Is set. A plurality of recesses may also be provided in parallel. In FIG. 3 and FIG. 4 shown as another embodiment, the upper three-dimensional shape 11 provided on the second pressed surface 3 b of the upper and lower three-dimensional shapes 7, 11 is formed by the groove-shaped recess 14.

尚、上記各空隙8,10,13は、外周フランジ部3がハウジング31A,31B間に挟まれて圧縮変形せしめられたときにゴム状弾性体の逃げ場として作用するものであるため、装着に伴う圧縮変形が完了した状態(装着作業が完了した状態)では、その一部または全部が消失(ゴム状弾性体で満たされて空間として存在しなくなる)することもある。   Each of the gaps 8, 10, and 13 functions as a refuge for the rubber-like elastic body when the outer peripheral flange portion 3 is sandwiched between the housings 31 </ b> A and 31 </ b> B and is compressed and deformed. In a state where the compression deformation is completed (a state where the mounting operation is completed), a part or all of it may disappear (filled with a rubber-like elastic body and no longer exist as a space).

1 ダイアフラム
2 膜部
2a 一方の面
2b 他方の面
3 外周フランジ部
3a 第1被押圧面
3b 第2被押圧面
3c 外周面
4 厚肉部
4a 先端面
5 凹み
7,11 立体形状
8,13 厚み方向空隙
9,12 突起
10 径方向空隙
14,34 凹部
31,31A,31B ハウジング
32 圧力室
33 通気孔
35 平面部
36 装着部
36a 外周壁
36b 内周壁
36c,36d 底面
37 段差部
38 ストッパ部
39 連通孔
DESCRIPTION OF SYMBOLS 1 Diaphragm 2 Film | membrane part 2a One surface 2b The other surface 3 Outer peripheral flange part 3a 1st pressed surface 3b 2nd pressed surface 3c Outer peripheral surface 4 Thick part 4a Front end surface 5 Depression 7,11 Three-dimensional shape 8,13 Thickness Directional gap 9, 12 Protrusion 10 Radial gap 14, 34 Recess 31, 31A, 31B Housing 32 Pressure chamber 33 Vent hole 35 Planar portion 36 Mounting portion 36a Outer peripheral wall 36b Inner peripheral wall 36c, 36d Bottom surface 37 Stepped portion 38 Stopper portion 39 Communication Hole

Claims (5)

可撓変形する膜部と、該膜部の周縁部に一体に設けられた外周フランジ部とを有するダイアフラムであって、
前記膜部の厚み方向一方の面の少なくとも一部および前記外周フランジ部の厚み方向一方の端面の少なくとも一部は同一平面上に配置されて面一状の平面を有しており、
前記外周フランジ部の厚み方向他方の端面は前記膜部の厚み方向他方の面よりも厚み方向に突出しており、
当該ダイアフラムが一対の第1ハウジングおよび第2ハウジング間に装着されたときに、前記外周フランジ部は前記一対の第1ハウジングおよび第2ハウジング間で厚み方向に圧縮された状態とされ、前記膜部はその厚み方向一方の面が略全面に亙って前記第1ハウジングに接触した状態とされるダイアフラムにおいて、
前記外周フランジ部は、その厚み方向一方の端面であるとともに前記第1ハウジングに押圧される面である第1被押圧面を有し、前記第1被押圧面に凸部または凹部よりなる立体形状が設けられ、
前記外周フランジ部が前記一対の第1ハウジングおよび第2ハウジング間厚み方向に圧縮された状態で前記立体形状は前記外周フランジ部および前記第1ハウジング間に厚み方向空隙を形成し、
前記厚み方向空隙により前記外周フランジ部の圧縮変形を吸収することで該圧縮変形の影響が前記膜部に及びにくくなり、前記膜部の前記第1ハウジングからの浮き上がりを抑制することを特徴とするダイアフラム。
A diaphragm having a membrane portion that is flexibly deformed and an outer peripheral flange portion that is integrally provided on a peripheral portion of the membrane portion ,
At least a part of one surface in the thickness direction of the film part and at least a part of one end surface in the thickness direction of the outer peripheral flange part are arranged on the same plane and have a flush plane.
The other end surface in the thickness direction of the outer peripheral flange portion protrudes in the thickness direction from the other surface in the thickness direction of the film portion,
When the diaphragm is mounted between a pair of first housing and second housing, the outer peripheral flange portion is compressed between the pair of first housing and second housing in the thickness direction, and the membrane portion Is a diaphragm in which one surface in the thickness direction is in contact with the first housing over substantially the entire surface ,
The outer peripheral flange portion has a first pressed surface that is one end surface in the thickness direction and is pressed by the first housing, and the first pressed surface is a three-dimensional shape including a convex portion or a concave portion. Is provided,
The three-dimensional shape in a state in which the outer peripheral flange portion is compressed in the thickness direction between the pair of first housing and the second Haujin grayed has a thickness direction gap formed between the outer peripheral flange portion and said first Haujin grayed,
The compressive deformation of the outer peripheral flange portion is absorbed by the gap in the thickness direction so that the influence of the compressive deformation does not easily reach the film portion, and the film portion is prevented from being lifted from the first housing. Diaphragm.
前記立体形状は、前記第1被押圧面の径方向中央部に設けられた環状突起であり、前記外周フランジ部が前記第1ハウジングと第2ハウジングとの間で圧縮変形されて装着された状態で、前記厚み方向空隙を前記第1被押圧面の前記環状突起より径方向外側に形成することを特徴とする請求項1に記載のダイアフラム。   The three-dimensional shape is an annular protrusion provided at a radial center portion of the first pressed surface, and the outer peripheral flange portion is mounted by being compressed and deformed between the first housing and the second housing. The diaphragm according to claim 1, wherein the gap in the thickness direction is formed radially outward from the annular protrusion of the first pressed surface. 前記外周フランジ部は、前記第1ハウジングと第2ハウジングとの間に装着された状態で、当該外周フランジ部の外周面と前記第1および第2ハウジングの少なくとも一つとの間に前記ダイアフラムの径方向において径方向空隙を形成可能な外径寸法に設定されていることを特徴とする請求項1または2に記載のダイアフラム。   The outer peripheral flange portion is mounted between the first housing and the second housing, and the diameter of the diaphragm is between the outer peripheral surface of the outer peripheral flange portion and at least one of the first and second housings. The diaphragm according to claim 1, wherein the diaphragm is set to an outer diameter dimension capable of forming a radial gap in a direction. 前記外周フランジ部は、前記ダイアフラムの厚み方向における他方の面であり前記第2ハウジングに押圧される第2被押圧面と、該第2被押圧面に凸部または凹部からなる立体形状とを有することを特徴とする請求項1ないし3の何れかに記載のダイアフラム。   The outer peripheral flange portion has a second pressed surface that is the other surface in the thickness direction of the diaphragm and is pressed by the second housing, and a three-dimensional shape including a convex portion or a concave portion on the second pressed surface. The diaphragm according to any one of claims 1 to 3, wherein 第1ハウジングと第2ハウジングとでダイアフラムを挟持してなるダイアフラム支持構造であって、前記ダイアフラムとして請求項1ないし4の何れかに記載のダイアフラムを備えたことを特徴とするダイアフラム支持構造。   A diaphragm support structure comprising a diaphragm sandwiched between a first housing and a second housing, wherein the diaphragm according to any one of claims 1 to 4 is provided as the diaphragm.
JP2010074546A 2010-03-29 2010-03-29 Diaphragm Active JP5369037B2 (en)

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US11156219B2 (en) * 2015-11-10 2021-10-26 Repligen Corporation Disposable alternating tangential flow filtration units
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DE102017011607A1 (en) * 2017-12-15 2019-06-19 Wabco Europe Bvba Diaphragm valve arrangement for a compressed air brake system
US20190323625A1 (en) 2018-04-23 2019-10-24 Rain Bird Corporation Valve With Reinforcement Ports And Manually Removable Scrubber

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