JP5360811B2 - Impedance matching device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an impedance matching device including a function of predicting service life of a mechanism part of a variable impedance element. <P>SOLUTION: The impedance matching device includes: a target value detecting means for detecting a numerical value, as a target value, including information on the minimum value of output torque of motors 7a and 7b, which is needed to keep a residual deviation present between a target position and the present position of operation shafts of variable impedance elements 3 and 4 within an allowable value; memories 31 and 32 for storing the number of accumulated days from a reference time to the day when the target value is detected together with the detected target value; and first and second service life estimating parts 34 and 35 using the target value and the number of accumulated days stored in the memories 31 and 32 to estimate the number of accumulated days from the reference time to the day when the mechanism part of the variable impedance elements reaches the end of the service life by a method of least squares. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to an impedance matching apparatus used for matching impedance between a high frequency power source and a load in a plasma processing apparatus or the like used in a semiconductor manufacturing apparatus.

  When power is supplied from a high-frequency power source to a load such as a plasma generator provided in the process chamber, for example, as disclosed in Patent Document 1, the reflection of power from the load is eliminated and the load is efficiently processed. In order to supply electric power, an impedance matching device is provided between the high-frequency power source and the load to match the output impedance of the power source and the impedance of the load.

  The impedance matching device is provided between the power source and the load and is operated when matching the impedance between the power source and the load, and the operation shaft of the variable impedance element is operated using the motor as a drive source. An operation mechanism that performs operation, a target position setting unit that sets a target position of the operation axis necessary for impedance matching, an operation axis position detection unit that detects a current position of the operation axis, and an operation axis of the variable impedance element A motor control unit that controls the motor so that the position matches the target position set by the target position setting unit, and operates the variable impedance element to achieve impedance matching between the high-frequency power source and the load. Control the axis. A variable capacitor or a variable inductor is used as the variable impedance element.

  For example, the impedance matching device disclosed in Patent Document 1 includes an input detection unit that detects an input voltage and an input current that are input from a high-frequency power source to a load, and a phase difference between the input voltage and the input current; A first variable capacitor connected in parallel to the output terminals of the high frequency power supply, a second variable capacitor connected between one output terminal of the high frequency power supply and one end of the load, and a first variable An operation for operating the operating shafts of the first variable capacitor and the second variable capacitor with the first and second motors provided for the capacitor and the second variable capacitor, respectively. Based on the mechanism and the value of the output impedance of the power source obtained from the input voltage and input current detected by the input detection unit, the position of the operating axis of the first variable capacitor is determined as the target position. The position of the operation shaft of the second variable capacitor is set as the target position based on the phase difference between the input voltage and the input current detected by the input detector and the motor controller that controls the first motor. A motor control unit for controlling the second motor. As shown in Patent Document 2 and Patent Document 3, as the first variable capacitor and the second variable capacitor, a vacuum variable capacitor in which a fixed electrode and a movable electrode are sealed in a vacuum container is often used. It is used.

  In a variable impedance element such as a vacuum variable capacitor used in an impedance matching device, a lubricant (such as grease) on an operation shaft is solidified with use, and a load torque applied to the motor from the operation shaft increases. Also, a displacement transmission mechanism that transmits mechanical wear of the contact part between the operating shaft and its bearing part and rotational displacement of the operating shaft to the movable part of the variable impedance element (movable electrode in the case of a variable capacitor) is configured. The load torque applied to the motor from the operation shaft also increases due to mechanical wear of the parts to be performed. In particular, in the case of a vacuum variable capacitor configured to convert the rotational displacement of the operation shaft into a linear displacement by a screw mechanism and transmit the linear displacement to a movable electrode disposed in the vacuum chamber, the screw of the screw constituting the screw mechanism Among them, one of the screws connected to the movable electrode arranged in the vacuum chamber is always subjected to a suction force from the vacuum chamber side, and a biased force is applied to the contact portions of the screws constituting the screw mechanism. The wear of the thread progresses in a relatively short period of time, and the torque necessary for operating the operating shaft increases.

  In the present specification, as described above, the lubricant of the operation shaft of the variable impedance element is solidified, or the components of the displacement transmission mechanism that transmits the rotational displacement of the operation shaft to the movable portion of the variable impedance element are worn out. Thus, the state in which the torque required to operate the variable impedance element increases is called deterioration of the mechanism portion of the variable impedance element.

  As described above, the load torque applied to the motor becomes excessive due to the deterioration of the mechanism portion of the variable impedance element, and the operating shaft cannot be rotated when the limit of the driving capability of the motor is exceeded. I can't do that.

  For example, when a pulse motor or a stepping motor is used as a motor for operating a variable impedance element, if the load torque applied to the motor increases, the drive pulse and the rotation of the motor may eventually be synchronized. An impossible step-out state occurs, and the motor cannot be rotated. Conventionally, the output torque of the motor has been set to a sufficiently large value (a constant value) so that it can be operated even when the deterioration of the mechanism of the variable impedance element has advanced to near the end of its life. .

  If the mechanism of the variable impedance element has deteriorated and the motor cannot operate the variable impedance element, maintenance such as exchanging the variable impedance element or parts of the mechanism There is a need to do. Further, it is necessary to readjust the impedance matching device during maintenance. When the variable impedance element can no longer be operated, the entire impedance matching device may be replaced. In this case as well, the impedance matching device needs to be readjusted, and this operation takes a long time.

JP 2001-16779 A JP 11-97293 A JP-A-10-106888

 As described above, when the load torque applied to the motor increases due to the deterioration of the mechanism portion of the variable impedance element, and the variable impedance element cannot be normally operated, impedance matching between the power source and the load cannot be performed. Therefore, it is necessary to perform maintenance work such as repair and replacement of the alignment device, which takes a long time.

  If the alignment operation, which is the original role of the alignment device, does not function, it will be necessary to interrupt the semiconductor manufacturing process, etc. However, if the process is interrupted, a large loss will occur, so avoid such a situation as much as possible. There is a need.

  In order to prevent a situation in which the function of the matching device is suddenly lost, it is possible to accurately determine the life of the mechanism of the variable impedance element, and based on the determination result, the maintenance of the variable impedance element is accurately performed. It is desirable to do this.

  Therefore, the applicant of the present application first in Japanese Patent Application No. 2008-117554, determines whether or not the lifetime of the mechanism portion of the variable impedance element is near from the magnitude of the torque required to drive the variable impedance element. An impedance matching device with means was proposed.

  In the life determination means provided in the previously proposed impedance matching device, the deviation between the target position of the operating axis of the variable impedance element and the current position is set to zero in the motor control unit that controls the motor that operates the variable impedance element. A value that includes information on the minimum value of the motor output torque required to keep the residual deviation existing between the current position of the operation axis and the target position below the allowable value when control is performed to approach The determination target value is obtained and compared with the determination reference value. When the determination target value is equal to or greater than the determination reference value, it is determined that the lifetime of the mechanism portion of the variable impedance element is near.

  In general, the torque required to operate the variable impedance element increases as the mechanism portion of the variable impedance element progresses and operates as the mechanism portion of the variable impedance element progresses. Therefore, the output torque of the motor necessary for this increases. Therefore, when the motor control unit is controlled to make the deviation between the target position of the operation axis of the variable impedance element and the current position close to zero, the distance between the current position of the operation axis of the variable impedance element and the target position. The minimum value of the output torque of the motor required to keep the residual deviation existing in the circuit below the allowable value increases as the mechanism portion of the variable impedance element progresses.

  Therefore, as in the previously proposed invention, information on the minimum value of the motor output torque necessary to keep the residual deviation existing between the current position of the operating shaft of the variable impedance element and the target position below the allowable value. If a numerical value including the value is determined as a determination target value and the calculated determination target value is compared with the determination reference value, the deterioration of the mechanism portion of the variable impedance element proceeds when the determination target value is equal to or greater than the determination reference value. Thus, it can be determined that the lifetime is approaching.

  Further, a numerical value including information on the maximum value of the output torque of the motor that causes a state in which the residual deviation existing between the current position and the target position of the operation axis of the variable impedance element exceeds the allowable value is obtained as a determination target value. By comparing this determination target value with the determination reference value, it is possible to determine that the mechanical part of the variable impedance element has been deteriorated and the life is approaching.

  According to the already proposed invention, it is possible to determine that the life of the mechanism portion of the variable impedance element is approaching, and to know the replacement timing of the variable impedance element. However, the method of comparing the determination target value with the determination reference value can determine whether or not the deterioration of the mechanism portion of the variable impedance element has progressed. From the time when the mechanism part of the variable impedance element is approaching the end of its life, until the mechanism part actually reaches the end of life, Only a short period remains. Therefore, according to the already proposed invention, even if it is possible to determine the lifetime of the mechanism portion of the variable impedance element, there is a possibility that procurement of a substitute for the variable impedance element is not in time.

  In order to be able to place an order for a substitute for a variable impedance element with a margin, the time when the mechanism part of the variable impedance element reaches the end of its life is considerably earlier than the time when the mechanism part actually reaches the end of its life. It is preferable to be able to predict with sufficient margin at the time.

  An object of the present invention is to provide an impedance matching device with a function of estimating with a margin when the variable impedance element reaches the end of its life.

  In the present application, the first to twelfth inventions are disclosed in order to solve the above-described problems. In any of the first to twelfth inventions disclosed in the present application, a variable impedance having an operation shaft that is provided between a power source and a load and is operated when matching impedance between the power source and the load is achieved. An element, an operation mechanism that operates the operation axis of the variable impedance element using a motor as a drive source, an operation axis position detection unit that detects a current position of the operation axis, and a target position of the operation axis are set and set A target position setting unit for calculating a driving amount of the motor necessary for making a deviation between the target position detected and the current position of the operation axis detected by the operation axis position detection unit zero, and an output torque of the motor An output torque setting unit that outputs a torque setting signal for setting the motor, and a motor drive having a function capable of adjusting the magnitude of the drive current that flows to the motor in accordance with the torque setting signal And a motor for controlling the motor drive unit to rotate the motor by the drive amount calculated by the target position setting unit in a state where the output torque of the motor is equal to the torque set by the torque setting signal. An impedance matching device including a control unit is a target.

  The above-described configuration which is the premise of the present invention is the same as that of the invention disclosed in Japanese Patent Application No. 2008-117554 filed earlier by the present applicant. In the present invention, there is provided a determination target value detecting means for detecting a “determination target value” used when estimating the lifetime of the mechanism portion of the variable impedance element, and the detected “determination target value” is used for determining the lifetime. Lifetime based on the relationship between the “determination target value / variable data storage unit” stored together with the “variable data” used and the determination target value stored in the “determination target value / variable data storage unit” and the value of the variable data A “lifetime estimation unit” that estimates The structure of the main part of the first to twelfth inventions will be described below together with the operation thereof.

(1) 1st invention In 1st invention, when making the motor control part perform control which makes the deviation between the target position of the operating shaft of a variable impedance element and the current position approach zero, the present of the operating shaft A numerical value that contains information on the minimum value of the output torque of the motor necessary to keep the residual deviation existing between the position and the target position below the allowable value, or a numerical value that evaluates the magnitude of the numerical value that contains the information on the minimum value Is used as a determination target value.

  Here, the “numerical value including the information on the minimum value of the output torque” may be the minimum value of the output torque itself, or any numerical value including the information on the minimum value of the output torque (for example, the output torque of the motor by the torque setting signal). In the case of setting, the magnitude of the torque setting signal that gives the minimum value of the output torque) may be used.

  As the mechanism of the variable impedance element used in the impedance matching device deteriorates, the torque required to operate the variable impedance element increases, and the motor output torque required to operate the variable impedance element increases. It will become. Therefore, the residual deviation existing between the current position of the operating shaft and the target position when the motor control unit is controlled to bring the deviation between the target position of the operating shaft of the variable impedance element and the current position close to zero. The minimum value of the output torque of the motor necessary for keeping the value below the allowable value increases as the mechanism of the variable impedance element deteriorates.

  Therefore, when a numerical value that includes information on the minimum value of the output torque of the motor necessary to keep the residual deviation below the allowable value or a numerical value that evaluates the magnitude of the numerical value that includes the information on the minimum value is set as the determination target value, The determination target value reflects the state of deterioration of the mechanism portion of the variable impedance element.

  The "numerical value that evaluates the size of the numerical value including the information on the minimum value" means how large the numerical value including the information on the minimum value of the motor output torque necessary to keep the residual deviation below the allowable value. It means a numerical value indicating whether it is in the range. For example, when the magnitude of the numerical value including the information on the minimum value of the motor output torque is evaluated in five levels, the numerical value including the information on the minimum value of the motor output torque is set to 1 to It is represented by any numerical value of 5. The larger the numerical value including the minimum value information, the larger the “evaluated numerical value” may be, and the larger the numerical value including the minimum value information, the smaller the “evaluated numerical value”. May be.

  Moreover, in order to predict the lifetime of the mechanism part of the variable impedance element, it is necessary to represent the lifetime by some variable. The variable representing the life is a variable whose value changes with a certain correlation with the life, for example, the cumulative number of days (elapsed days) or the cumulative time (elapsed time) from the reference time, the motor that operates the mechanism of the variable impedance element Cumulative value of drive amount from the reference time, the number of reciprocations of the motor (the operation from the end of rotation in one direction to the end of rotation in the other direction is one reciprocation operation) from the reference time The cumulative value, the cumulative value from the reference time of the time for supplying power from the high frequency power supply to the load (power supply time), and the like can be used. In the present invention, these variables are referred to as “variable data”, and the lifetime of the mechanism portion of the variable impedance element is represented by the variable data. As the reference time, for example, a date when the operation of the impedance matching device is started, a date when maintenance is performed, or the like can be used.

  In the first invention of the present application, a variable representing the lifetime of the mechanism portion of the variable impedance element is used as variable data, and a large number of determination target values and variable data values corresponding to the respective determination target values are accumulated. “Variable data estimated value at the end of life” that is estimated to be taken by the variable data when the target value reaches the judgment reference value, and the latest value of the variable data for life judgment from the estimated variable data at the end of the life From the relationship between the accumulated determination target value and the value of variable data, at least one of the “remaining life estimated value” obtained by subtracting the value, using a prediction method such as the least square method or the linear prediction method, Be able to ask regularly or from time to time.

Therefore, the impedance matching device according to the first invention of the present application has the following configuration in addition to the above-described configuration necessary for fulfilling the original function of the impedance matching device.
(1.1) Residual deviation existing between the target position and the current position by repeating the control to make the deviation between the target position of the operation axis and the current position close to zero while increasing the magnitude of the torque setting signal. Determination target value detection means for detecting, as a determination target value, a numerical value including information on the minimum value of the output torque of the motor necessary for suppressing the motor to be equal to or less than an allowable value, or a numerical value for evaluating the magnitude of the numerical value including the minimum value information It has.
(1.2) Each time the determination target value detection unit detects each determination target value, the determination target value is stored, and each variable to be used is a variable used to represent the life of the mechanism portion of the variable impedance element as variable data. A determination target value / variable data storage unit that stores the value of the variable data at the time when the value is obtained is provided.
(1.3) Using the value of the determination target value when the state of deterioration of the mechanism portion of the variable impedance element deviates from the normal state as a determination reference value, the variable data is stored when the determination target value reaches the determination reference value. Judge at least one of “variable estimated value at the end of life” estimated to be taken and “estimated remaining life” obtained by subtracting the latest value of variable data for life judgment from the estimated variable data at the end of life A life estimation unit is provided which is obtained from the relationship between the determination target value stored in the target value / variable data storage unit and the value of the variable data.

  As described above, the determination target value that reflects the state of deterioration of the mechanism portion of the variable impedance element and variable data that is a variable suitable for representing the lifetime of the mechanism portion of the variable impedance element are accumulated. From the relationship between the accumulated determination target value and the variable data, it is estimated that the variable data takes when the determination target value reaches the determination reference value, and the lifetime reaching variable data estimated value and the lifetime If at least one of the “remaining life estimated value” obtained by subtracting the latest value of variable data from the arrival variable data estimated value is calculated, the “life reached variable data estimated value” or “residual life estimated value” From the above, it is possible to estimate the time when the mechanism portion of the variable impedance element reaches the end of life, a time considerably before the time when the mechanism portion actually reaches the end of life.

  For example, the cumulative number of days (elapsed days) from the reference time is used as variable data. In this case, the lifetime estimation unit can obtain the cumulative number of days from the reference time to the date when the mechanism unit of the variable impedance element will reach the lifetime in the future as the “lifetime variable data estimation value”. Therefore, it is possible to estimate when the lifetime of the mechanism portion of the variable impedance element is exhausted. In addition, when the "remaining life estimation value" is obtained by subtracting the latest value of life-determining variable data (for example, the cumulative number of days from the reference time to the present) from the estimated variable data at the end of life, how much life is left after Can be estimated.

  Further, when the total driving amount (catalog value or design value) of the motor that is possible from the start of use of the motor that operates the mechanism unit of the variable impedance element to the end of its life is known, If the accumulated value from the reference time of the motor drive amount is used as variable data, the motor drive amount possible from the present time until the life of the mechanism unit of the variable impedance element is obtained by the life estimation unit. Since it can be obtained as the “remaining life estimated value”, it is possible to know how much life is left behind.

  The above life estimation can be performed at any time before the time when the judgment target value reaches the judgment reference value (at a time well before the life of the variable impedance element mechanism). Therefore, the life prediction of the mechanism portion of the variable impedance element can be performed with a margin, and the replacement of the variable impedance element or the replacement of the parts constituting the mechanism portion can be ordered with a margin.

  In the first aspect of the invention, the numerical value including information on the minimum value of the output torque of the motor necessary for suppressing the residual deviation existing between the current position and the target position of the operation axis of the variable impedance element to be equal to or less than the allowable value. Alternatively, the determination target value detection unit is configured to detect the determination target value using a numerical value that evaluates the magnitude of the numerical value including the minimum value information as the determination target value. It is not limited to the case where the detection means is configured in this way.

(2) Second Invention The second invention disclosed in the present application has the following configuration.
(2.1) Residual deviation existing between the target position and the current position by repeating the control to reduce the deviation between the target position of the operation axis and the current position to zero while decreasing the magnitude of the torque setting signal. A determination target value detecting means for detecting, as a determination target value, a numerical value that includes information on the maximum value of the output torque of the motor that causes a state that exceeds a permissible value, or a numerical value that evaluates the magnitude of the numerical value including the maximum value information ing.
(2.2) Each time the output torque setting unit detects the determination target value, the determination target value is stored, and a variable used to represent the life of the mechanism unit of the variable impedance element is used as variable data. A determination target value / variable data storage unit for storing the value of the variable data at the time when the value is obtained is provided.
(2.3) When the determination target value reaches the determination reference value with the value of the determination target value when the state of deterioration of the mechanism portion of the variable impedance element deviates from a normal state as a determination reference value The determination target is at least one of a life-time variable data estimated value estimated to be taken by the variable data and a remaining life estimation value obtained by subtracting the latest value of the variable data from the life-time variable data estimated value. A life estimation unit is provided which is obtained from the relationship between the determination target value stored in the value / variable data storage unit and the value of the variable data.

  The “numerical value including information on the maximum value of output torque” may be the maximum value of output torque itself, or any numerical value including information on the maximum value of output torque (for example, the output torque of the motor is set by a torque setting signal). In this case, the torque setting signal that gives the maximum value of the output torque) may be used.

  The above “numerical value for evaluating the magnitude of the numerical value including information on the maximum value” is the range of the numerical value including the information on the maximum value of the output torque of the motor that causes the residual deviation to exceed the allowable value. A numerical value indicating whether or not there is. For example, in the case of evaluating the magnitude of a numerical value including information on the maximum value of the output torque of the motor that leads to a state in which the residual deviation exceeds the allowable value, the numerical value including information on the maximum value of the motor output torque is Depending on the size, it is expressed by a numerical value of 1 to 5. The larger the numerical value including the maximum value information, the larger the “evaluated numerical value” may be, and the larger the numerical value including the maximum value information, the smaller the “evaluated numerical value”. May be.

  As the mechanism of the variable impedance element used in the impedance matching device deteriorates, the torque required to operate the variable impedance element increases, and the motor output torque required to operate the variable impedance element increases. Therefore, the maximum value of the output torque of the motor that causes the residual deviation to exceed the allowable value increases as the mechanism of the variable impedance element deteriorates. Therefore, when a numerical value that includes information on the maximum value of the output torque of the motor that causes the residual deviation to exceed the allowable value or a numerical value that evaluates the magnitude of the numerical value that includes the information on the maximum value is set as the determination target value, The value reflects the state of deterioration of the mechanism portion of the variable impedance element. Therefore, according to the present invention, the same effect as in the case of the first invention can be obtained.

(3) Third Invention The present invention has the following configuration.
(3.1) The output torque of the motor when performing control to bring the residual deviation existing between the actual position of the operating shaft of the variable impedance element and the target position close to zero while the mechanism of the variable impedance element is normal As the torque having the value selected from the values that can be taken as the torque at the time of inspection, the control is completed by causing the residual deviation to approach zero while fixing the output torque of the motor to the torque at the time of inspection. A numerical value that includes information on the magnitude of the residual deviation that exists between the actual position of the operating axis of the variable impedance element and the target position, or a numerical value that evaluates the magnitude of the numerical value that includes information on the magnitude of the residual deviation Is provided as a determination target value detecting means.
(3.2) Each time the output torque setting unit detects the determination target value, the determination target value is stored, and a variable used to represent the life of the mechanism unit of the variable impedance element is used as variable data, and each determination target value is stored. Is provided with a determination target value / variable data storage unit that stores the value of the variable data at the time when the value is obtained.
(3.3) Using the value of the determination target value when the state of deterioration of the mechanical portion of the variable impedance element deviates from the normal state as a determination reference value, the variable data is obtained when the determination target value reaches the determination reference value. At least one of the estimated lifetime variable data estimated value and the remaining lifetime estimated value obtained by subtracting the latest value of the variable data from the estimated lifetime variable data estimated value is a determination target value / variable data storage unit. Is provided with a life estimation unit that is obtained from the relationship between the determination target value stored in the table and the value of the variable data.

  The “numerical value including information on the magnitude of residual deviation” may be a numerical value indicating the magnitude of the difference between the current position of the operation axis and the target position itself, or the difference between the current position of the operation axis and the target position. For example, a numerical value representing a difference between the magnitudes of electrical signals indicating the current position and the target position of the operation axis may be used.

  Note that the “numerical value that evaluates the magnitude of the numerical value including the residual deviation information” is the value of the residual deviation that exists between the actual position of the operating axis and the target position when the position control is completed. It is a numerical value indicating the range of the numerical value including information. For example, when the numerical value including the information on the magnitude of the residual deviation is evaluated in five levels, the numerical value including the information on the magnitude of the residual deviation is represented by any one of 1 to 5. The larger the numerical value that contains the residual deviation information, the larger the “evaluated numerical value” may be. The larger the numerical value that contains the residual deviation information, the smaller the “evaluated numerical value”. May be.

  When the position control of the operating shaft of the variable impedance element is performed with the motor output torque fixed at a constant value, it exists between the actual position of the operating shaft and the target position when the position control is completed. The magnitude of the residual deviation increases as the mechanism portion of the variable impedance element progresses. For this reason, when the mechanism of the variable impedance element is in a normal state, the output torque of the motor is taken when the residual deviation existing between the actual position of the operation shaft of the variable impedance element and the target position is brought close to zero. The position control of the operating shaft of the variable impedance element is performed in a state where the torque having a value selected in advance from the obtained values is set as the torque at the time of inspection and the output torque of the motor is fixed to the torque at the time of inspection. A numerical value that includes information on the magnitude of the residual deviation that exists between the actual position of the operating axis and the target position when the operation is completed, or a numerical value that evaluates the numerical value that includes information on the magnitude of the residual deviation Is detected as the determination target value, the determination target value reflects the state of deterioration of the mechanism portion of the variable impedance element. Therefore, also in the case of the present invention, the same effect as in the case of the first invention can be obtained.

(4) Fourth Invention A fourth invention disclosed in the present application has the following configuration.
(4.1) Using the preset displacement range of the operation axis of the variable impedance element as the inspection target range, the target position and the current position of the operation axis are monitored in the inspection target range, and the control by the motor control unit is completed An abnormality determination unit is provided that performs abnormality determination when a residual deviation existing between the target position and the current position exceeds an allowable value at the time when the error is detected.
(4.2) By repeatedly controlling the deviation between the target position of the operating axis and the current position to be zero while increasing the magnitude of the torque setting signal, the abnormality determination unit is abnormal for the first time in the entire inspection target range. Determination target value detecting means for detecting, as a determination target value, a numerical value including information on the magnitude of the torque setting signal when no determination is made or a numerical value evaluating the numerical value including information on the magnitude of the torque setting signal It has.
(4.3) Each time the output torque setting unit detects the determination target value, the determination target value is stored, and a variable used to represent the life of the mechanism unit of the variable impedance element is used as variable data. Is provided with a determination target value / variable data storage unit that stores the value of the variable data at the time when the value is obtained.
(4.4) Using the value of the determination target value when the deterioration state of the mechanical part of the variable impedance element is out of the normal state as a determination reference value, the variable data is obtained when the determination target value reaches the determination reference value. At least one of the estimated lifetime variable data estimated value and the remaining lifetime estimated value obtained by subtracting the latest value of the variable data from the estimated lifetime variable data estimated value is a determination target value / variable data storage unit. Is provided with a life estimation unit that is obtained from the relationship between the determination target value stored in the table and the value of the variable data.

  The “numerical value including information on the magnitude of the torque setting signal” may be a numerical value itself indicating the magnitude of the torque setting signal, or any numerical value having a certain relationship with the magnitude of the torque setting signal, for example, a motor corresponding to the torque setting signal. It may be a numerical value representing the magnitude of the output torque.

  The “numerical value for evaluating the numerical value including the information on the magnitude of the torque setting signal” is a numerical value indicating the range of the numerical value including the information on the magnitude of the torque setting signal. For example, when a numerical value including information on the magnitude of the torque setting signal is evaluated in five stages, a numerical value including information on the magnitude of the torque setting signal is represented by any one of 1 to 5. The larger the numerical value including the torque setting signal magnitude information, the larger the “evaluated numerical value” may be, and the larger the numerical value including the torque setting signal magnitude information, the “evaluated numerical value”. It may be small.

  As described above, the target position and the current position of the operation axis are monitored, and an abnormality is determined when the residual deviation between the target position and the current position when the control by the motor control unit exceeds the allowable value If an abnormality determination unit is provided, when the abnormality determination unit performs abnormality determination, it can be known that there is an abnormality in the movable part of the variable impedance element, and the abnormality determination unit performs the first abnormality determination. You can know that the maintenance time is near.

  When the abnormality determination unit as described above is provided, the target position of the operation shaft while increasing the magnitude of the torque setting signal with the range of the preset displacement of the operation shaft of the variable impedance element as the inspection target range The magnitude of the torque setting signal when the abnormality determination unit does not perform abnormality determination in the entire inspection target range for the first time when the control for making the deviation between the current position and the current position close to zero is repeated is the variable impedance element As the mechanism of the deterioration progresses, it increases. Therefore, a numerical value including information on the magnitude of the torque setting signal when abnormality determination is not performed for the entire range of the inspection target range for the first time, or a numerical value for evaluating the magnitude of the numerical value including information on the magnitude of the torque setting signal Is a determination target value, the deterioration target value reflects the state of deterioration of the mechanism portion of the variable impedance element. Therefore, also in the case of the present invention, the same effect as in the case of the first invention can be obtained.

  In addition, “When the control to increase the deviation between the target position of the operating axis and the current position to zero is repeated while increasing the magnitude of the torque setting signal, the abnormality determination unit makes an abnormality determination for the entire inspection target range for the first time. "The magnitude of the torque setting signal when the control is not performed" is the "remaining deviation existing between the target position and the current position below the allowable value" detected by the determination target value detection means as the determination target value in the first invention. This corresponds to the “minimum value of the output torque of the motor necessary to suppress the noise to the minimum”.

(5) Fifth Invention The fifth invention disclosed in the present application has the following configuration.
(5.1) Using the preset displacement range of the operation axis of the variable impedance element as the inspection target range, the target position and the current position of the operation axis are monitored in the inspection target range, and the control by the motor control unit is completed An abnormality determination unit is provided that performs abnormality determination when a residual deviation existing between the target position and the current position exceeds an allowable value at the time when the error is detected.
(5.2) Torque when the abnormality determination unit makes an abnormality determination for the first time by repeatedly controlling the deviation between the target position of the operation shaft and the current position to zero while decreasing the magnitude of the torque setting signal. Judgment target value detection means is provided for detecting, as a judgment target value, a numerical value including the magnitude information of the setting signal or a numerical value for evaluating the magnitude of the numerical value including the magnitude information of the torque setting signal.
(5.3) Each time the output torque setting unit detects the determination target value, the determination target value is stored, and a variable used to represent the life of the mechanism unit of the variable impedance element is used as variable data. A determination target value / variable data storage unit that stores the value of the variable data at the time when the value is obtained is provided.
(5.4) Using the value of the determination target value when the state of deterioration of the mechanism portion of the variable impedance element deviates from the normal state as the determination reference value, the variable data is obtained when the determination target value reaches the determination reference value. At least one of the estimated lifetime variable data estimated value and the remaining lifetime estimated value obtained by subtracting the latest value of the variable data from the estimated lifetime variable data estimated value is a determination target value / variable data storage unit. Is provided with a life estimation unit that is obtained from the relationship between the determination target value stored in the table and the value of the variable data.

  Abnormality is determined when the residual deviation between the target position and the current position exceeds the allowable value when the target position and the current position of the operation axis are monitored and control by the motor control unit is performed. When the determination unit is provided, the abnormality determination unit makes an abnormality determination for the first time when the control for reducing the deviation between the target position of the operation shaft and the current position to zero is repeated while reducing the magnitude of the torque setting signal. The magnitude of the torque setting signal when performing is increased as the mechanism portion of the variable impedance element progresses. Therefore, when a numerical value including information on the magnitude of the torque setting signal when abnormality determination is performed for the first time or a numerical value evaluating the numerical value including information on the magnitude of the torque setting signal is set as the determination target value, The determination target value reflects the state of deterioration of the mechanism portion of the variable impedance element. Therefore, also in the case of the present invention, the same effect as in the case of the first invention can be obtained.

  The torque setting when the abnormality determination unit makes an abnormality determination for the first time when the control to reduce the deviation between the target position of the operating axis and the current position to zero is repeated while reducing the magnitude of the torque setting signal. “Signal magnitude” means “the output torque of the motor that causes the residual deviation between the target position and the current position to exceed the allowable value, which is detected by the determination target value detection means as the determination target value in the second invention. Corresponds to the “maximum value”.

(6) Sixth invention
The sixth invention disclosed in the present application further specifies the configuration of the life estimation unit used in any of the first to fifth inventions. In the sixth invention, the life estimation unit is a determination target value. Among the variable data values stored in the variable data storage unit, the latest N (N is an integer of 2 or more) variable data values and the determination corresponding to each of the N variable data values Using the target value, the variable data estimated value at the end of life or the estimated remaining life value is obtained.

(7) Seventh Invention The seventh invention disclosed in the present application further specifies the configuration of the life estimation unit used in the sixth invention, and in the sixth invention, the life estimation unit is a lifetime. When the variable data estimated value at the time of arrival or the estimated remaining life value cannot be obtained, the value of N is increased to obtain the variable data estimated value at the time of reaching life or the estimated remaining life value.

(8) Eighth Invention The eighth invention disclosed in the present application specifies variable data stored in a determination target value / variable data storage unit in any of the first to seventh inventions. In the invention, the value of the variable data stored in the determination target value / variable data storage unit is the cumulative number of days (elapsed days) or cumulative time (elapsed time) from the reference time, and the cumulative amount of motor drive from the reference time. The value of at least one variable data selected from a variable data group consisting of a value, a cumulative value from the reference time of the number of reciprocations of the motor, and a cumulative value from the reference time of the time for supplying power from the power source to the load. .

(9) Ninth Invention In the ninth invention disclosed in the present application, in any one of the first to eighth inventions, the latest value of the variable data used when the life estimation unit obtains the remaining life estimation value is specified. In the present invention, the latest value of the variable data used when the life estimation unit obtains the remaining life estimation value is the latest value of the variable data stored in the determination target value / variable data storage unit. Or a newly acquired value when the estimated remaining life is obtained.

(10) Tenth Invention In a tenth invention disclosed in the present application, in any one of the first to ninth inventions, the method used when the life estimation unit obtains a variable data estimate when the life is reached is specified. Is. In the present invention, the life estimation unit is configured to obtain the variable data estimated value when the life is reached using the least square method.

(11) Eleventh invention In the eleventh invention disclosed in the present application as well, in any one of the first to ninth inventions, the method used when the life estimation unit obtains the variable data estimated value when the life is reached is specified. Therefore, in the present invention, the life estimation unit is configured to obtain a variable data estimated value at the end of life using a linear prediction method.

(12) Twelfth Invention A twelfth invention disclosed in the present application is a preferred embodiment of the impedance matching apparatus according to the present invention. In the present invention, any one of the first to eleventh inventions is provided. In addition to the configuration, there is further provided a display unit for displaying at least one of the variable data estimated value at the end of life estimated by the life estimating unit and the estimated remaining life value.

  According to the impedance matching device of the present invention, the determination target value that reflects the state of deterioration of the mechanism portion of the variable impedance element and the variable data that is a variable suitable for representing the life of the mechanism portion of the variable impedance element are stored. From the relationship between the accumulated determination target value and the variable data, the variable data takes when the determination target value reaches the determination reference value from the accumulated value of the determination target value and the variable data. At least one of “estimated life expectancy data” and “estimated remaining life” obtained by subtracting the latest value of the life-determining variable data from the estimated life data variable is calculated. Therefore, when the mechanism part of the variable impedance element reaches the end of its life from the "variable data estimated value at the end of life" or "estimated remaining life", the mechanism part actually It can be determined well in advance of the time than the time to celebrate.

  Therefore, according to the present invention, the life prediction of the mechanism portion of the variable impedance element can be performed with a margin, and the order for a substitute of the variable impedance element or a component constituting the mechanism section can be ordered with a margin. It can be carried out.

It is the block diagram which showed the structure of one Embodiment of the impedance matching apparatus concerning this invention. It is the block diagram which showed the structural example of the circuit which provides a torque setting signal to a motor drive part in embodiment of this invention. FIG. 5 is a circuit diagram showing another configuration example of a circuit that provides a torque setting signal to a motor drive unit in the embodiment of the present invention. The abnormality determination unit, determination value detection means, and inspection result output unit of the embodiment of FIGS. 1 and 2 are configured, and a task algorithm to be executed by the microprocessor in order to estimate the lifetime of the mechanism unit of the variable impedance element. It is the flowchart which showed the 1st part of 1 example. The abnormality determination unit, determination value detection means, and inspection result output unit of the embodiment of FIGS. 1 and 2 are configured, and a task algorithm to be executed by the microprocessor in order to estimate the lifetime of the mechanism unit of the variable impedance element. It is the flowchart which showed the 2nd part of the example of 1. FIG. The abnormality determination unit, determination value detection means, and inspection result output unit of the embodiment of FIGS. 1 and 2 are configured, and a task algorithm to be executed by the microprocessor in order to estimate the lifetime of the mechanism unit of the variable impedance element. 3 is a flowchart showing a first part of an example of 2. The abnormality determination unit, determination value detection means, and inspection result output unit of the embodiment of FIGS. 1 and 2 are configured, and a task algorithm to be executed by the microprocessor in order to estimate the lifetime of the mechanism unit of the variable impedance element. 6 is a flowchart showing a second part of the example 2; In the embodiment of the present invention, the determination target value data collected for estimating the lifetime of the mechanism portion of the variable impedance element, and the accumulated days, drive amount, and round-trip number data as variable data in the form of a table. It is the data table shown collectively. 9 is a graph showing the relationship between the cumulative number of days and the determination target value by paying attention to the cumulative number of days in the variable data shown in FIG. FIG. 9 is a data table showing an example of a result of estimating the lifetime of the mechanism portion of the variable impedance element using the data shown in FIG. 8. FIG. 9 is a data table showing another example of a result of estimating the lifetime of the mechanism portion of the variable impedance element using the data shown in FIG. 8.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 shows the configuration of an impedance matching apparatus according to an embodiment of the present invention. The impedance matching device according to the present embodiment is a time when the variable impedance element reaches the end of its life, in addition to the configuration of the impedance matching device disclosed in the previous application (Japanese Patent Application No. 2008-117554) filed by the present applicant. The apparatus further includes a configuration for realizing a function for estimating.

  In FIG. 1, 1 is a high-frequency power source, and 2 is a process chamber of a semiconductor manufacturing apparatus or the like. A load of the high frequency power source 1 such as a plasma generator is accommodated in the process chamber 2. Reference numerals 3 and 4 denote first and second variable impedance elements provided between the high frequency power source 1 and the process chamber (load) 2, and the first variable impedance element 3 is parallel to the high frequency power source 1 and the load. The second variable impedance element 4 is connected to the high-frequency power source 1 and the process chamber 2 in series. In the present embodiment, the first variable impedance element 3 is composed of a first variable capacitor VC1, and the second variable impedance element 4 is composed of a second variable capacitor VC2. A vacuum variable capacitor is used as the first variable capacitor VC1 and the second variable capacitor VC2. In the illustrated example, an inductance 5 is inserted between the second variable capacitor VC2 and the process chamber.

  An input detection unit 6 that detects the voltage Vin input to the load, the current Iin, and the phase difference θin between the voltage Vin and the current Iin is provided between the high-frequency power source 1 and the second variable capacitor VC2. Is provided. Since the detection method of the voltage Vin, the current Iin, and the phase difference θin by the input detection unit 6 is well known, the description thereof is omitted.

  For the first variable capacitor VC1, there is provided a first operating mechanism for operating the operating shaft of the first variable capacitor VC1 using the first motor 7a as a drive source, and for the second variable capacitor VC2. Thus, a second operating mechanism is provided for operating the operating shaft of the second variable capacitor VC2 using the second motor 7b as a drive source. As a motor for operating the variable impedance element of the impedance matching device, a pulse motor or a step motor is often used. In this embodiment, step motors are used as the motors 7a and 7b for operating the first variable capacitor VC1 and the second variable capacitor VC2, respectively. Each operation mechanism can be configured by a mechanism that transmits the rotation of each motor to the operation shaft of each variable capacitor. For example, each operation mechanism can be configured by a mechanism using a coupling that connects the rotation shaft of each motor and the operation shaft of each variable capacitor. In some cases, each operation mechanism can be constituted by a mechanism that decelerates the rotation of each motor and transmits it to the operation shaft of each variable capacitor.

  Further, an operation provided with a first position detector 8a for detecting the position of the operating axis of the first variable capacitor VC1 and a second position detector 8b for detecting the position of the operating axis of the second variable capacitor VC2. The shaft position detector 8 is provided, and the output signals Spa and Spb of the first and second position detectors 8a and 8b are obtained from the input voltage detection signal Sv, the input current detection signal Si and the phase difference obtained from the input detector 6, respectively. It is input to the target position setting unit 9 together with the detection signal Sθ.

  The target position setting unit 9 uses the input voltage Vin and the input current Iin detected by the input detection unit 6 to calculate the impedance viewed from the input side of the impedance matching device (input end of the input detection unit 6). The target positions of the operation axes of the variable capacitors VC1 and VC2 necessary for impedance matching between the high frequency power source 1 and the process chamber (load) 2 are set as well as the set target position and the operation axis. The drive amounts of the motors 7a and 7b necessary to make the deviation from the current position of each operation axis of the variable capacitors VC1 and VC2 detected by the position detector 8 are calculated.

  That is, the target position setting unit 9 firstly has a power source side impedance (usually 50Ω) viewed from the input end of the impedance matching device via the transmission line, and a process chamber (load) from the input end of the impedance matching device. ) Calculate the positions of the operation axes of the variable capacitors VC1 and VC2 necessary for matching the load side impedance viewed from the second side, and calculate the calculated positions as the target positions of the operation axes of the variable capacitors VC1 and VC2. Set as.

  The target position setting unit 9 also sets the deviation between the calculated target position of the operation axis of the first variable capacitor VC1 and the current position of the operation axis of the variable capacitor VC1 detected by the first position detection unit 8a to zero. To calculate the drive amount of the step motor 7a (number of pulses to be applied to the step motor 7a) required to achieve the target position setting signal Sda indicating the calculated drive amount to the first motor drive unit 10a, Steps required to make the deviation between the calculated target position of the operation axis of the variable capacitor VC2 and the current position of the operation axis of the second variable capacitor VC2 detected by the second position detector 8b zero. The driving amount of the motor 7b (number of pulses applied to the step motor) is calculated, and a target position setting signal Sdb indicating the calculated driving amount is supplied to the second motor driving unit 10b. In the present embodiment, the motor driving unit 10 is configured by the first motor driving unit 10a and the second motor driving unit 10b.

  The calculation of the target position of each operation axis of the variable capacitors VC1 and VC2 is performed by, for example, means for calculating the reactance values of the variable capacitors VC1 and VC2 necessary for impedance matching as the target reactance value, and for each variable capacitor. Using the relationship between the rotation angle position of the operation axis determined in advance and the capacitance of each variable capacitor, the rotation angle position of the operation axis of each variable capacitor corresponding to each calculated target reactance value (target Position).

  The first and second position detectors 8a and 8b can be configured using, for example, an encoder that generates a position detection pulse each time the operation axes of the variable capacitors VC1 and VC2 rotate by a minute angle.

  Reference numeral 11 denotes an abnormality determination unit that determines whether or not there is an abnormality in the mechanism unit of the first variable capacitor VC1 and the mechanism unit of the second variable capacitor VC2. The abnormality determination unit 11 monitors the target position and current position of the operation axis of the first variable capacitor VC1, and the target position and current position of the operation axis of the second variable capacitor VC2, respectively. After the target position setting signals Sda and Sdb indicating the calculated driving amounts are given to the first motor driving unit 10a and the second motor driving unit 10b, respectively, at the time when the driving of the motors 7a and 7b is considered to be completed. When the residual deviation between the target position of the operating axis of the first variable capacitor VC1 and the current position exceeds the allowable value, the state of the mechanism portion of the first variable capacitor VC1 is abnormal (out of the normal range). )). Similarly, when the residual deviation between the target position of the operation axis of the second variable capacitor VC2 and the current position exceeds the allowable value, the abnormality determination that the state of the mechanism portion of the second variable capacitor VC2 is abnormal. I do.

  The “residual deviation” between the target position and the current position of the variable capacitor operation axis is determined when the motor drive unit 10 drives the motor by the drive amount calculated by the target position setting unit 9. This is a deviation existing between the target position and the current position. Here, “the time when the motor driving unit 10 drives the motor by the driving amount calculated by the target position setting unit 9” is usually considered that the motor is actually driven in consideration of a detection delay. Indicates the time.

  In other words, it is inevitable that the detection of the current position of the operating axis of the variable capacitor is delayed, and the target position data of the operating axis of the variable capacitor and the detection data of the current position corresponding to the target position are generated simultaneously. Therefore, some device is required to accurately detect the deviation existing between the target position of the operating axis of the variable capacitor and the current position when the motor is out of step. For example, when the target position data is output from the target position setting unit 9 to the abnormality determination unit 11, the process of delaying the timing of outputting the current position detection data in consideration of the detection delay is performed, so that the motor is removed. The deviation existing between the target position of the operation axis of the variable capacitor and the current position can be accurately detected when the adjustment state is reached. In addition, the abnormality determination unit 11 is provided with a memory that temporarily stores target position data and current position detection data, and the above deviation can be accurately detected by performing processing such as reading from the memory in consideration of the delay. be able to.

  By the way, when the operation axes of the variable capacitors VC1 and VC2 are respectively driven by the step motors 7a and 7b as in the present embodiment, the number of pulses necessary for moving each operation axis from the current position to the final target position is obtained. If the number of pulses is too large, the motor cannot respond even if the pulses are given from the motor drive units 10a and 10b to the motors 7a and 7b at a time. Therefore, the number of pulses given from the motor drive units 10a and 10b to the motors 7a and 7b Should be limited to the number of ranges that can respond normally.

  Therefore, the target position setting unit 9 actually calculates the drive amount required to move the operation axes of the first and second variable capacitors VC1 and VC2 from the current position to the final target position at a time, Rather than giving the target position setting signal indicating the drive amount to the motor drive units 10a and 10b, the drive amount within the range in which the motor can respond is calculated, and it should be reached when the motor is driven by that drive amount. The position of the operation axis is calculated as the temporary target position.

  The target position setting unit 9 gives target position setting signals Sda and Sdb indicating the calculated driving amount to the motor driving units 10a and 10b. The motor drive units 10a and 10b provide drive pulses to the motors 7a and 7b in accordance with the given target position setting signals Sda and Sdb, and provisionally determine the positions of the operation axes of the first and second variable capacitors VC1 and VC2. Displace to the target position.

  The target position setting unit 9 gives the calculated provisional target position to the abnormality determination unit 11. The abnormality determination unit 11 includes a residual deviation between the temporary target position of the operation axis of the first variable capacitor VC1 and the current position, and a residual between the temporary target position of the operation axis of the second variable capacitor VC2 and the current position. The deviation is monitored, and when the driving of the motor 7a is considered to be completed, the first deviation is detected when the residual deviation between the temporary target position of the operating shaft of the first variable capacitor VC1 and the current position exceeds the allowable value. When it is determined that the first variable capacitor is abnormal and it is considered that the driving of the motor 7b is completed, the residual deviation between the temporary target position of the operation axis of the second variable capacitor VC2 and the current position is an allowable value. Is exceeded, it is determined that the second variable capacitor is abnormal.

  The target position setting unit 9 calculates a new motor driving amount and a temporary target position corresponding to the driving amount when the positions of the operation axes of the variable capacitors VC1 and VC2 reach the temporary target position. The target position setting signals Sda and Sdb indicating the drive amount are given to the motor drive units 10a and 10b, and the provisional target position is given to the abnormality determination unit 11 to perform abnormality determination. The operation axis of the variable capacitor is moved toward the final target position while repeating these operations.

  That is, the operating axis of the variable capacitor is moved toward the final target position while setting the temporary target position as the target position at that time. It should be noted that when the impedance matching device performs its original operation, the final target is usually used even in the process of moving the variable capacitor operating axis to the final target position in order to quickly respond to the changing load state. When the position (target position for impedance matching) is calculated and a new final target position is calculated, the final target position is updated to the newly calculated position.

  In order to perform the process of driving the motors 7a and 7b so as to displace the operation axis of the variable capacitor to the temporary target position and the process of performing the abnormality determination process by the abnormality determination unit 11, a "predetermined processing time" is set. I need. If the time required for the motors 7a and 7b to move the operation axes of the variable capacitors VC1 and VC2 from the current position to the provisional target position is longer than the above processing time, even if the motor is rotating normally, The residual deviation between the position and the provisional target position exceeds the allowable value, and the abnormality determination unit 11 performs the abnormality determination. Therefore, in order to accurately determine whether or not the residual deviation exceeds the allowable value, the drive amount calculated by the target position setting unit 9 at a time is large enough to drive the motor within the processing time. It is necessary to calculate the provisional target position of the operation axis of the variable capacitor based on the calculated drive amount, with the following limitation.

  When the impedance matching device performs its original operation, the “predetermined processing time” is often set short in order to cope with the load state that changes from moment to moment. However, since it is not necessary to consider the state of the load when checking whether or not the state of the mechanism part is in a normal state, the “predetermined processing time” can be set longer. . Therefore, when checking whether the state of the mechanism is in a normal state, it is possible to make an abnormality determination without setting a provisional target position by lengthening the “predetermined processing time”. It becomes possible. In this case, the final target position is the only target position. Of course, when performing an inspection as to whether or not the state of the mechanical unit is normal, the provisional target position may be set in the same manner as when the impedance matching device performs its original operation.

  The abnormality determination unit 11 generates a first abnormality determination signal Saa when performing an abnormality determination that the mechanism unit of the first variable capacitor VC1 is abnormal, and the movable part of the second variable capacitor VC2 is abnormal. When the abnormality determination is made, the second abnormality determination signal Sab is generated. The first abnormality determination signal Saa and the second abnormality determination signal Sab output from the abnormality determination unit 11 are provided to the first output torque setting unit 12a and the second output torque setting unit 12b, respectively.

  The first output torque setting unit 12a and the second output torque setting unit 12b are portions for setting output torques of the first motor 7a and the second motor 7b at the time of impedance matching and inspection of the variable capacitors VC1 and VC2. It is. At the time of impedance matching, the first output torque setting unit 12a and the second output torque setting unit 12b set the output torques of the first motor 7a and the second motor 7b according to the determination result by the abnormality determination unit 11. When the variable capacitors VC1 and VC2 are inspected, the first output torque setting unit 12a and the second output torque setting unit 12b change the output torques of the motors 7a and 7b step by step while changing their values.

  The first output torque setting unit 12a used in the present embodiment sets the output torque of the motor 7a to the initial torque until the abnormality determination unit 11 performs the first abnormality determination on the first motor 7a during impedance matching. And after the abnormality determination part 11 performs the first abnormality determination, it is comprised so that the output torque of the motor 7a may be set to the torque after abnormality detection larger than the said initial torque.

  The second output torque setting unit 12b also sets the output torque of the motor 7b to the initial torque until the abnormality determination unit 11 performs the first abnormality determination during impedance matching. After the determination, the output torque of the motor 7b is set to a torque after abnormality detection that is larger than the initial torque.

  In the conventional impedance matching device, the output torque of the motor that operates the variable capacitor (variable impedance element) is targeted for the operating axis of the variable capacitor even when the mechanism of the variable capacitor has deteriorated to the extent that maintenance is required. The initial torque is set to a value smaller than the output torque of the motor set in the conventional impedance matching device. The torque after abnormality detection is set to a magnitude equivalent to the motor output torque set in the conventional impedance matching device. The method for setting the initial torque will be described in detail later.

  As will be described later, the first and second output torque setting units 12a and 12b also provide the maximum value of the output torque of the motor that causes the residual deviation to exceed the allowable value when the variable capacitors VC1 and VC2 are inspected. In order to obtain a numerical value including this information as a determination target value, the set value of the output torque of the motors 7a and 7b can be changed stepwise by changing the value from a large value to a small value. . The inspection of the variable capacitors VC1 and VC2 is performed when the production line is stopped.

  The first motor driving unit 10a applies driving pulses to the first motor 7a by the number of pulses set by the target position setting unit 9, and outputs the output torque of the first motor 7a to the first output torque setting unit 12a. The drive current passed through the first motor 7a is adjusted so as to be equal to the torque set by.

  The second motor drive unit 10b gives drive pulses to the second motor 7b by the number of pulses set by the target position setting unit 9, and outputs the output torque of the second motor 7b to the second output torque setting unit. The drive current passed through the second motor 7b is adjusted so as to be equal to the torque set by 12b.

  In the present embodiment, the output torques of the first motor 7a and the second motor 7b are set equal to the torques set by the first output torque setting unit 12a and the second output torque setting unit 12b, respectively. The drive currents that flow through the first motor 7a and the second motor 7b are adjusted, but it is desirable that the output torques of the motors 7a and 7b can be finely adjusted when a variable impedance element to be described later is inspected.

  Therefore, in this embodiment, as shown in FIG. 2, the motor driving units 10a and 10b are caused to flow through the motors 7a and 7b in accordance with the magnitudes of torque setting signal voltages (analog voltages) Vτa and Vτb applied to the control terminals. In addition to the driver IC having a function capable of adjusting the drive current, the DA converter 14a, between the output terminals of the output torque setting units 12a and 12b and the control terminals of the driver ICs constituting the motor drive units 10a and 10b, respectively. 14b is provided to convert the torque setting values (digital values) output from the output torque setting units 12a and 12b to torque setting signal voltages (analog voltages) Vτa and Vτb, respectively, and apply them to the motor driving units 10a and 10b. Yes.

  The output torque setting units 12a and 12b are connected to first and second memories 20a and 20b, respectively. The memories 20a and 20b store a large number of torque setting signal voltage values (digital values) and output torque setting signal voltages Vτa and Vτb, which are analog conversion values of the numerous torque setting signal voltage values, respectively, in the motor driving units 10a and 10b. The data table which gives the relationship between the output torque of the motor obtained when giving to the driver IC which comprises is stored. This data table shows the difference between the torque setting signal voltage value and the motor output torque so that the set motor output torque increases as the torque setting signal voltage value increases. The relationship is determined, and each torque setting signal voltage value (digital value) and the corresponding motor output torque are associated with each other in a one-to-one correspondence and are summarized in a table form.

  The output torque setting units 12a and 12b read the digital values of the torque setting signal voltages from the memories 20a and 20b in ascending order when the variable capacitors VC1 and VC2 are inspected, and the motor driving units 10a and 10b via the DA converters 14a and 14b. To give.

  In this embodiment, the output torque setting part 12 is comprised by the 1st output torque setting part 12a and the 2nd output torque setting part 12b. Further, the motor drive unit 10 and the output torque setting unit 12 make the positions of the operation axes of the variable capacitors (variable impedance elements) VC1 and VC2 coincide with the target position set by the target position setting unit 9 (the operation axis of the operation axis). A motor control unit 13 is configured to control the motors 7a and 7b (so that the deviation between the current position and the target position is zero), and the motor control unit 13 and the target position setting unit 9 match impedances. An “operation axis position control device” that controls the positions of the operation axes of the variable impedance elements 3 and 4 is configured.

  As described above, when the movable part of the first variable capacitor VC1 deteriorates due to solidification of grease or wear of the mechanical sliding part, the load torque applied to the first motor 7a from the operation shaft of the first variable capacitor VC1. Is getting bigger. When the load torque applied to the first motor 7a increases and exceeds a certain limit, the rotation of the motor 7a is not synchronized with the drive pulse (step-out state), and the motor 7a cannot be rotated. When such a state occurs, the operating shaft of the first variable capacitor VC1 cannot be rotated to the target position, and impedance matching between the high-frequency power source 1 and the load 2 cannot be achieved, and the motor The residual deviation between the current position of the operating shaft of the variable capacitor VC1 and the target position at the time when the drive unit 10a completes driving of the motor 7a becomes large.

  Similarly, when the movable part of the second variable capacitor VC2 deteriorates, the rotation of the motor 7b is not synchronized with the drive pulse (step-out state), and the motor 7b cannot be rotated normally. When such a state occurs, the operation axis of the second variable capacitor VC2 cannot be rotated to the target position, and impedance matching between the high frequency power source 1 and the load cannot be achieved, and the motor is driven. The residual deviation between the current position of the operating axis of the variable capacitor VC2 and the target position at the time when the unit 10b completes driving of the motor 7b increases.

  Accordingly, the abnormality determination unit 11 monitors the current position and the target position of the operation axis of each variable capacitor, and determines whether or not the residual deviation between both positions exceeds the allowable value, thereby determining each variable capacitor. It can be determined whether or not the movable part is abnormal.

  As described above, in this embodiment, during impedance matching, the output torque of the motors 7a and 7b is set to the initial torque until the abnormality determination is performed by the abnormality determination unit 11, and the abnormality determination unit 11 performs the abnormality determination. After being performed, the output torque of the motors 7a and 7b is set to a torque after abnormality detection equivalent to the output torque of the motor set in the conventional impedance matching device.

  In this embodiment, the magnitude of the initial torque is smaller than the torque after abnormality detection, and in a state before the variable capacitor mechanism part has deteriorated to such an extent that maintenance is required after a certain time, The operation axis of the variable capacitor can be operated, but when the mechanism of the variable capacitor has deteriorated to the extent that maintenance is required after a certain period of time, it is so large that the operation axis of the variable capacitor cannot be operated. Set to That is, when the mechanism of the variable capacitor has deteriorated to the extent that it can be said that maintenance is required after a certain period of time, the residual deviation between the target position of the operation axis of the variable capacitor and the current position exceeds the allowable value, and the abnormality determination unit The magnitude of the initial torque is set so as to perform abnormality determination.

  As in the present embodiment, when the abnormality determination unit 11 performs the first abnormality determination, the motor output torque is reset to a torque after abnormality detection that is larger than the initial torque, so that the first abnormality determination is performed. Or the output torque of the motor has been switched from the initial torque to the torque after abnormality detection, so that the mechanism of the variable capacitor needs to be maintained after a certain period of time (to the extent that maintenance can be said to be near To know that it has deteriorated. Accordingly, it is possible to prevent a situation in which the operation is continued and the production line needs to be stopped suddenly from being overlooked that maintenance is necessary. Further, by resetting the output torque of the motor to the torque after abnormality detection that is larger than the initial torque, it is possible to drive the motor again so that the residual deviation falls within the allowable value.

  In the above description, when the mechanism of the variable capacitor has deteriorated to the extent that maintenance can be said to be necessary after a certain period of time, the residual deviation between the target position of the variable capacitor operating shaft and the current position exceeds the allowable value and is abnormal. The magnitude of the initial torque of the motor is set so that the determination unit makes the first abnormality determination, and when the abnormality determination unit makes the first abnormality determination, it can be known that the maintenance time is near Alternatively, the initial torque of the motor may be set to be small, and the abnormality determination may be performed a plurality of times before the mechanism portion of the variable capacitor is deteriorated to the extent that maintenance is required after a certain time.

  That is, the motor control unit 13 sets the output torque of the motor to the initial torque until the abnormality determination unit 11 performs the first abnormality determination, and after the abnormality determination unit performs the first abnormality determination, The output torque is set by the output torque setting unit, and the output torque setting unit sets the output torque of the motor, which is larger than the initial torque and increases after detection of abnormality, and the output torque of the motor. And a motor drive unit that drives the motor so as to obtain a sufficient torque.

  When increasing the magnitude of torque after abnormality detection every time abnormality determination is performed as described above, the output torque setting unit 12 performs abnormality determination after the abnormality determination unit 11 performs the first abnormality determination. The increment of the torque after abnormality detection when increasing the value of the torque after abnormality detection every time can be configured to be a predetermined value (for example, a predetermined constant value).

  Further, when the magnitude of the torque after abnormality detection is increased every time abnormality determination is performed as described above, the output torque setting unit 12 performs the abnormality determination after the abnormality determination unit performs the first abnormality determination. The increment when increasing the value of the torque after abnormality detection every time can also be determined based on a predetermined relationship between the number of times the abnormality determination has been performed and the torque to be set. . For example, the output torque setting unit 12 can be configured to increase the increase in the value of the torque after abnormality detection as the number of times that abnormality determination is performed increases.

  When the production line is stopped, it is possible to inspect whether or not the state of the mechanical parts of the variable capacitors (variable impedance elements) VC1 and VC2 of the impedance matching device is in a normal range. In this embodiment, the state of deterioration of each mechanism part of the first variable capacitor VC1 and the second variable capacitor VC2 is reflected in order to make it possible to estimate the time of reaching the end of life with a sufficient margin. There are provided first and second determination target value detecting means for detecting the first and second determination target values.

  In order to perform the inspection of the operation mechanism of the variable capacitors VC1 and VC2 and the determination of the life, the motors 7a and 7b are controlled to collect the data at the time of data collection for the inspection and life estimation, and the position of the operation shaft is set. A control block dedicated to the inspection to be controlled may be provided in particular, but in this embodiment, the “operation axis position control device” configured by the target position setting unit 9 and the motor control unit 13 includes the first and second control blocks. A function for detecting the determination target value is provided.

  In other words, in the present embodiment, a program to be executed by the microprocessor to realize the functions of the target position setting unit 9 and the motor control unit 13 constituting the “operation axis position control device” is for detecting a determination target value. A first determination target value detection unit and a second determination target value detection unit that realize a function of detecting the first determination target value and the second determination target value, respectively, by providing a task execution part. These “first and second determination target value detection means” constitute “determination target value detection means”.

  In the present embodiment, the first determination target value detection means uses the preset displacement range of the operation axis of the first variable capacitor VC1 as the inspection target range when the production line is stopped. By repeating the control operation for controlling the motor 7a so that the position of the operation axis of the variable capacitor VC1 coincides with the target position while gradually increasing the size, the abnormality determination unit 11 determines whether or not there is an abnormality. The process is repeated, and the numerical value including the magnitude information of the torque setting signal or the magnitude information of the torque setting signal when the abnormality determination unit 11 does not perform the abnormality determination in the entire inspection target range for the first time is included. A numerical value for evaluating the magnitude of the numerical value is configured to be detected as the determination target value Vka.

  Similarly, the second determination target value detection means sets the magnitude of the torque setting signal Vτb when the production line is stopped, using the preset displacement range of the operation axis of the second variable capacitor VC2 as the inspection target range. By repeating the control operation for controlling the motor 7b so as to make the position of the operation axis of the variable capacitor VC2 coincide with the target position while increasing it stepwise, the process of determining whether or not the abnormality determination unit 11 is abnormal is repeated. Thus, the numerical value including the information on the magnitude of the torque setting signal or the numerical value including the information on the magnitude of the torque setting signal when the abnormality determination unit 11 does not perform the abnormality determination in the entire inspection target range for the first time. A numerical value for evaluating the height is detected as the determination target value Vkb.

  The above “numerical value for evaluating the magnitude of the numerical value including information on the magnitude of the torque setting signal” includes information on the magnitude of the torque setting signal when abnormality determination is no longer performed in the entire inspection target range for the first time. This is a numerical value indicating the range of the numerical value. In the present embodiment, the magnitude of a numerical value including information on the magnitude of the torque setting signal is evaluated in five stages, and the magnitude of the torque setting signal when the abnormality determination is no longer performed in the entire inspection target range for the first time. A numerical value including this information is represented by a numerical value of 1 to 5.

  In the present embodiment, the state that “abnormality determination is no longer performed in the entire inspection target range” means that the target position of the operation axis of the variable impedance elements 3 and 4 is in any position of the inspection target range. It means a state in which the abnormality determination unit does not perform abnormality determination when performing control to match the position of the operation axis with the target position. When detecting the determination target value by performing inspection over the entire inspection target range, for example, n torque setting signal voltage values (digital values giving the voltage value of the output torque setting signal) (n is 2 or more) The number of torque setting signals is increased step by step to control the operation axis from the initial position to the final position of the inspection target range with the final position of the inspection target range as the only target position. However, it may be repeated at most n times. Also, instead of setting the final position of the inspection target range as the only target position, at least one temporary target position is set between the initial position and the final position of the inspection target range, and the operation axis is set to the temporary target position. The control of moving from the initial position to the final position of the inspection target position through the above may be repeated at most n times while gradually increasing the magnitude of the torque setting signal.

  In order to accurately detect the degree of deterioration of the mechanism and accurately estimate the life, it is preferable to set n (number of torque setting signal voltage values) to a large value. A lot of time is required for detection. Therefore, the value of n is set to an appropriate value in consideration of the production line idle period and the like.

  In the above embodiment, while increasing the magnitudes of the output torque setting signal voltages Vτa and Vτb, the “operation axis position control device” configured by the target position setting unit 9 and the motor control unit 13 is set to the target position of the operation axis. It includes information on the magnitude of the torque setting signal when the abnormality determination unit 11 has not performed abnormality determination for the first time in the entire inspection target range by repeatedly performing control to bring the residual deviation from the current position close to zero. The determination target value detection unit is configured to detect a numerical value or a numerical value that evaluates a numerical value including information on the magnitude of the torque setting signal as a determination target value. In this case, the magnitude of the output torque of the motor given by the torque setting signal detected as the determination target value suppresses the residual deviation existing between the target position of the operating axis of the variable capacitor and the current position below the allowable value. Is equal to the minimum value of the motor output torque required.

  Accordingly, the first determination target value detecting means basically includes a residual existing between the current position and the target position of the operating axis of the variable capacitor VC1 while increasing the magnitude of the torque setting signal Vτa stepwise. A numerical value including information on the minimum value of the output torque of the motor 7a necessary for suppressing the residual deviation existing between the target position and the current position below the allowable value by repeating the control to bring the deviation close to zero, or the minimum value It is only necessary to be configured to detect a numerical value for evaluating the magnitude of the numerical value including the information as the determination target value.

  Similarly, the second determination target value detecting means basically exists between the current position and the target position of the operating axis of the variable capacitor VC2 while gradually increasing the magnitude of the torque setting signal Vτb. A numerical value including information on the minimum value of the output torque of the motor 7b necessary for suppressing the residual deviation existing between the target position and the current position to be equal to or less than the allowable value by repeating the control to bring the residual deviation close to zero or the minimum It is only necessary to be configured to detect a numerical value that evaluates the magnitude of a numerical value including value information as a determination target value.

  That is, the determination target value detection unit repeats control to make the deviation between the target position of the operating shaft of the variable impedance element and the current position close to zero while increasing the magnitude of the torque setting signal, and thereby the target position of the operating shaft. A numerical value that includes information on the minimum value of the output torque of the motor necessary to keep the residual deviation existing between the current position and the current position below the allowable value, or a numerical value that evaluates the magnitude of the numerical value that includes the information on the minimum value. As long as it is configured to detect as a determination target value, the deviation between the target position of the operation shaft and the current position is made close to zero while increasing the magnitude of the torque setting signal as in the above embodiment. By repeating the control, a numerical value including information on the magnitude of the torque setting signal or information on the magnitude of the torque setting signal when the abnormality determination unit does not perform abnormality determination in the entire inspection target range for the first time. Not limited to the case configured to detect a numerical value to evaluate the magnitude of the non-numbers as determination target value.

  For example, the motors 7a and 7b are controlled so that the deviation between the target position of the operation shaft and the current position is close to zero, and exists between the current position and the target position of the operation shaft when the control is completed. In order to keep the residual deviation between the target position of the operating shaft and the current position below the allowable value by repeatedly performing the process of calculating the residual deviation to increase the output torque of the motor. Search target for a numerical value (or a numerical value that evaluates the magnitude of the numerical value that includes the minimum value information) including information on the minimum value of the required motor output torque, and to determine the searched value as a determination target value Value detection means can also be configured. The “numerical value including information on the minimum value of the output torque” may be the minimum value of the output torque itself, or a numerical value corresponding to the minimum value of the output torque, for example, the magnitude of the torque setting signal that gives the minimum value of the output torque. Good.

  The above “numerical value for evaluating the numerical value including the information on the minimum value” is the size of the numerical value including the information on the minimum value of the motor output torque necessary to keep the residual deviation below the allowable value. It is a numerical value indicating whether it is in the range.

  The operation for moving the operation axes of the variable capacitors VC1 and VC2 toward the target position in order to obtain the determination target value when the production line is stopped may be the same as that during impedance matching. That is, when obtaining the determination target value, the target position setting unit 9 calculates a driving amount within a range in which the motor can respond, and outputs target position setting signals Sda and Sdb indicating the calculated driving amount to the motor driving unit 10a and 10b. The motor drive units 10a and 10b give drive pulses to the motors 7a and 7b in accordance with the given target position setting signals Sda and Sdb, and set the operation axes of the first and second variable capacitors VC1 and VC2 as temporary target positions. Displace up to. The target position setting unit 9 also calculates, as a temporary target position, the position of the operation shaft that is reached when the motor is driven by the calculated drive amount, and gives the calculated temporary target position to the abnormality determination unit 11. The abnormality determination unit 11 is made to determine whether or not the first and second variable capacitors are abnormal. While repeating a series of processes consisting of a process of driving the motors 7a and 7b so as to displace the operation axis of the variable capacitor to the temporary target position and a process of performing the abnormality determination process by the abnormality determination unit 11, the first and first processes are repeated. The operating axis of the variable capacitor 2 is displaced toward the final target position suitable for inspection.

  The final target position of the operation axes of the variable capacitors VC1 and VC2 set at the time of inspection and at the time of life estimation may be a predetermined fixed position or a position input from the outside when performing the inspection.

  The initial position of the operation axis at the time of inspection and life estimation can be set to an arbitrary position. That is, the initial position of the operation axis at the time of inspection and life estimation may be the current position at the start of inspection and life estimation, or may be a predetermined fixed position. When the initial position of the operation axis at the time of inspection and life estimation is set to the preset initial position, the variable capacitors VC1 and VC2 are set by the motors 7a and 7b before starting the collection of data for inspection and life estimation. The operation axis is moved to a preset initial position.

  In either case, the range from the initial position to the final target position is the inspection target range.

  As described above, the initial position of the operation axis when inspecting the variable capacitor and estimating the lifetime can be set to an arbitrary position, and the final target position of the operation axis can be set arbitrarily. Accordingly, it is possible to inspect whether or not the state of the mechanical parts of the variable capacitors VC1 and VC2 is in a normal state and to estimate the lifetime using an arbitrary rotation range of the operation shaft as an inspection target range. For example, if an inspection is performed using a frequently used range of the rotation range of the operating shaft, that is, a range where the degree of wear is likely to be high as the inspection target range, the inspection time can be shortened, so that the inspection can be performed efficiently. It becomes possible. Moreover, if the determination target value used for the life prediction is obtained with the range where the degree of wear is considered to be high as the inspection target range, the life prediction can be performed more accurately.

  In the present embodiment, the first determination target value Vka detected by the first determination target value detection means is compared with the first determination reference value set for the first variable capacitor VC1, and the first determination target value Vka is detected. A first test result output unit that outputs a test result indicating that the state of the mechanical unit of the first variable capacitor VC1 is out of the normal state when the determination target value Vka is equal to or greater than the first determination reference value. 15a and the second determination target value Vkb detected by the second determination target value detection means are compared with the second determination reference value set for the second variable capacitor VC2, and the second determination target value is compared. A second test result output unit 15b for outputting a test result indicating that the state of the mechanism of the second variable capacitor VC2 is out of the normal state when the value Vkb is equal to or greater than the second determination reference value; Is provided.

  The torque required to operate the variable capacitor increases as the mechanism of the variable capacitor deteriorates, and the motor required to operate the variable capacitor as the mechanism of the variable capacitor progresses. The output torque increases. Therefore, the residual deviation existing between the current position of the operating shaft and the target position when the motor control unit is controlled to make the deviation between the target position of the operating axis of the variable capacitor and the current position close to zero. The minimum value of the output torque of the motor necessary to keep the value below the allowable value increases as the mechanism of the variable capacitor deteriorates.

  Even if a new variable impedance element is used, when the mechanism is abnormal, the torque required to operate the variable capacitor is larger than when the mechanism is normal. The minimum value of the motor output torque necessary to keep the residual deviation below the allowable value is large.

  Therefore, as described above, a numerical value including information on the minimum value of the output torque of the motor necessary for keeping the residual deviation below the allowable value is obtained as the judgment target value, and the obtained judgment target value is set as the judgment reference value. If the comparison is made, whether the state of the mechanism part of the variable capacitor is out of the normal state (whether the maintenance time is near, whether the life is near, whether the mechanism part is abnormal, It is possible to determine whether or not a failure has occurred.

  In the example shown in FIG. 1, the first and second determination target value detection means provide the first and second determination target values Vka and Vkb to the first inspection result output units 15a and 15b, respectively, and externally. Is also output. As described above, if the determination target values Vka and Vkb can be output to the outside, the determination target value can be used for managing the maintenance of the variable impedance element. For example, the output determination target value can be stored together with the date and time of the inspection, and can be used as reference during the next maintenance.

  As described above, when the first and second determination target values Vka and Vkb output from the first and second determination target value detection means are compared with the determination reference values set for the respective determination target values, When the value is greater than or equal to the determination reference value, it can be determined that the state of the mechanical parts of the variable capacitors VC1 and VC2 is out of the normal state.

  The above-described configuration that enables determination of the state of the variable capacitor mechanism by comparing the determination target value with the determination reference value is also provided in the previously proposed impedance matching device described in Japanese Patent Application No. 2008-117554. It is a configuration. However, it is possible to determine the state of the variable capacitor mechanism by comparing the determination target value with the determination reference value when the wear of the variable capacitor VC1 and VC2 mechanism has advanced considerably and approached the end of its life. Therefore, as a result of comparing the determination target value with the determination reference value, it is determined by the first inspection result output units 15a and 15b that the state of the mechanism unit of the variable capacitors VC1 and VC2 is out of the normal state. At that time, even if you order a replacement for the variable capacitor, it may not be in time.

  Therefore, in the present invention, the impedance matching device is provided with a function of estimating the lifetime of the mechanism portion of the variable impedance element before the determination target value reaches the determination reference value. Therefore, in the present invention, in addition to the determination target value detection means, a determination target value / variable data storage that further stores the determination target value and variable data (e.g., the number of days elapsed from the reference time) representing the life. And a life estimation unit that estimates the life from the relationship between the determination target value stored in the determination target value / variable data storage unit and the variable data.

  In the present embodiment, a third memory 31 and a fourth memory 32 are provided to configure the determination target value / variable data storage unit, and a first life estimation unit 34 and a life estimation unit are provided. A second life estimation unit 35 is provided. A calendar unit 33 is provided for obtaining date and time data, and a display unit 36 provided with a monitor is provided for displaying the estimation result.

  Hereinafter, a configuration for realizing the function of estimating the lifetime of the mechanism portion of the variable impedance element, which is a feature of the present invention, will be described in detail.

  In the present embodiment, the first determination target value detection unit and the second determination target value detection unit perform the first determination target value detection unit when the impedance matching device pauses the matching operation in order to enable estimation of the lifetime. The determination target value and the second determination target value are detected, and the detected first determination target value Vka and the second determination target value Vkb are stored in the third memory 31 and the fourth memory 32, respectively.

  In order to estimate the lifetime of the mechanism portion of the variable impedance element, in addition to the determination target value reflecting the state of deterioration of the mechanism portion of the variable impedance element, some variable representing the lifetime is required. As a variable representing the life, a variable whose value changes with a certain correlation with the life can be used. For example, the cumulative number of days (elapsed days) or the cumulative time (elapsed time) from the reference time, the cumulative value from the reference time of the drive amount of the motor that operates the mechanism part of the variable impedance element, the reciprocation number of the motor from the reference time The cumulative value and the cumulative value from the reference time of the time for supplying power from the high frequency power source to the load (high frequency power supply time, hereinafter referred to as RF supply time) can be used as a variable (variable data) representing the life.

  The target position setting unit 9 stores a cumulative value of the driving amounts of the motors 7a and 7b, a cumulative value of the number of reciprocations of the motors 7a and 7b, and a cumulative value from the reference time of the RF supply time in a memory in association with the date and time. . Therefore, the cumulative value from the reference time of the motor drive amount, the cumulative value from the reference time of the motor reciprocation times, and the cumulative value from the reference time of the RF supply time are stored in the memory in the target position setting unit 9. It can be easily obtained from the contents. As the reference time, for example, a date when the operation of the impedance matching device is started, a date when maintenance is performed, or the like can be used.

  The “number of reciprocations” of the motor is a count of the number of rotations of the motor as a single reciprocating operation from the end of rotation of the motor in one direction to the end of rotation in the other direction. It doesn't matter what. For example, the motor rotates 1/1000 in one direction and then 1/1000 in the other direction, and the motor rotates 10/00 in one direction and then 20/1000 in the other direction. Treat as. In addition, reciprocating operation performed over different days, for example, 1/1000 rotation in the other direction at the start of the next day after the motor stops 1/1000 rotation in one direction just before stopping on one day If the motor stops 20/1000 rotations in one direction just before stopping on a certain day, and then starts rotating the next day, for example, 10/1000 rotations in the other direction, the reciprocating operation is also 1 reciprocating operation. And count.

  In operating the impedance matching apparatus according to the present invention, the line is stopped within a range that does not hinder the operation of the production line, and data used for estimating the lifetime of the mechanism portion of the variable impedance element is collected as needed. In the data collection process for collecting data used for life estimation, first, the first and second determination target value detection means perform a process for detecting determination target values for the variable impedance elements 3 and 4, The determination target values detected for the first variable impedance element 3 and the second variable impedance element 4 are stored in the third memory 31 and the fourth memory 32, respectively. The values of various variable data for the first and second variable impedance elements at the time when these determination target values are detected are stored in the memories 31 and 32. Processing for detecting the determination target value for the first and second variable impedance elements and storing the detected determination target value in the third memory 31 and the fourth memory 32 together with various variable data values is as follows. It may be performed regularly, such as once a week or once a month (not necessarily the same day every month), or at irregular intervals. It is not necessary to stop the line forcibly.

  Any of the above-mentioned variable data may be used as variable data used for life estimation, but in order to grasp the life intuitively, the cumulative number of days (elapsed days) from the reference time (reference date) is variable. It is easiest to use as data. Therefore, in this embodiment, every time each determination target value is detected, the cumulative number of days from the reference date at the time when each determination target value is detected is used as variable data used for life estimation, together with other variable data. 3 memory 31 and fourth memory 32.

  In the present invention, the cumulative time (elapsed time) from the reference time is not prevented from being used as variable data. However, when estimating the lifetime, it is sufficient to consider the cumulative number of days. In the embodiment, the cumulative number of days from the reference date is used as variable data used for life estimation.

  As described above, in the present embodiment, the cumulative number of days from the reference date is used as variable data to represent the lifetime of the mechanism unit of the variable impedance element using this variable data. In the fourth memories 31 and 32, it is sufficient to store the cumulative number of days from the reference date together with the determination target value as variable data. However, in this embodiment, the cumulative value of the motor drive amount from the reference time is stored. The accumulated value from the reference time of the number of reciprocations of the motor and the accumulated value from the reference time of the RF supply time are also stored in the memories 31 and 32 as variable data. In this embodiment, the cumulative value from the reference time of the motor drive amount, the cumulative value from the reference time of the number of reciprocations of the motor, and the cumulative value from the reference time of the RF supply time are not used for life estimation. If the variable data is stored in the memory and accumulated, it can be used as a reference when analyzing the state of wear of the mechanism portion of the variable impedance element.

  In the present invention, instead of the cumulative number of days from the reference date, the cumulative value from the reference time of the motor drive amount, the cumulative value from the reference time of the motor reciprocation number, and the cumulative value from the reference time of the RF supply time Any of the above can be used as variable data representing the lifetime of the mechanism portion of the variable impedance element. Therefore, the determination target value / variable data storage unit includes the cumulative number of days or cumulative time from the reference time, the cumulative value of the motor drive amount from the reference time, the cumulative value of the motor reciprocation times from the reference time, and the power source. What is necessary is just to be comprised so that the value of the at least 1 variable data selected from the variable data group which consists of the cumulative value from the said reference time of the time which supplies electric power to load may be memorize | stored.

  The calendar unit 33 has a function of outputting a daily date and a function of calculating the cumulative number of days from the reference time, and a determination target value and a second variable impedance for the operation mechanism of the first variable impedance element 3. On the day when the determination target value for the operation mechanism of the element 4 is written in the third memory 31 and the fourth memory 32, respectively, the date of the day is written in the third memory 31 and the fourth memory 32, and the reference The cumulative number of days from the time to the current day is written as variable data used for life estimation.

  In the present embodiment, the third memory 31 and the fourth memory 32 store the determination target value each time the determination target value detection unit obtains each determination target value, and the lifetime of the mechanism unit of the variable impedance element. A determination target value / variable data storage unit is configured to store variable data values at the time when each determination target value is obtained, using variables used for representing as variable data.

  The first life estimation unit 34 uses the determination target value Vka as the determination reference value when the deterioration state of the mechanism portion of the first variable impedance element 3 deviates from the normal state, and the determination target value Vka is the determination reference. The “variable data estimated value at the end of life” estimated to be taken by the variable data when the value reaches the value is stored in the third memory (determination target value / variable data before the determination target value Vka reaches the determination reference value. (Storage unit) 31 is obtained from the relationship between the determination target value stored in the variable data and the variable data, and by subtracting the latest value of the variable data from the “variable data estimated value at the end of life”, how much life is left after “Residual life estimated value” indicating whether or not

  The second life estimation unit 35 determines the determination target value Vkb using the determination target value when the deterioration state of the mechanism unit of the second variable impedance element 4 deviates from the normal state as a determination reference value. The “lifetime variable data estimated value” estimated to be taken by the variable data when reaching the reference value is stored in the fourth memory (determination target value / variable before the determination target value Vkb reaches the determination reference value. (Data storage unit) 32 is obtained from the relationship between the determination target value stored in the data 32 and the variable data (cumulative days), and by subtracting the latest value of the variable data from the "variable data estimated value at the end of life" "Estimated life" is obtained.

  In the present embodiment, the first and second life estimation units are configured to output both the “lifetime variable data estimation value” and the “remaining life estimation value”. May be configured to output only one of these.

  In this embodiment, the size of the determination target value (numerical value including information on the minimum value of the output torque of the motor necessary for keeping the residual deviation below the allowable value) is divided into five levels, and the determination target value detection means The value of the determination target value detected by 1 is indicated by a numerical value of 1 to 5, and the determination reference value is “5”. That is, the size of the determination target value is classified so that the determination target value reaches “5” when wear of the operation mechanism of the variable impedance element is advanced and the life is near.

  FIG. 8 collectively shows an example of results obtained by collecting data used for estimating the lifetime of the mechanism portion of the first variable capacitor VC1, with the day when the impedance matching device is started as the reference date (variable data = 0). The data table is shown.

  In FIG. 8, the “determination target value” is a numerical value of 1 to 5 indicating the magnitude of a numerical value including information on the minimum value of the motor output torque necessary for keeping the residual deviation below the allowable value. . In this example, the minimum output torque of the motor necessary to keep the residual deviation below the allowable value so that the determination target value reaches the determination reference value “5” when the operating mechanism of the variable impedance element approaches the life. Correspondence between a numerical value including value information and a numerical value of 1 to 5 is defined. The correspondence relationship between the numerical value including the information on the minimum value of the output torque and the numerical value of 1 to 5 may not be a proportional relationship.

  In the example shown in FIG. 8, “cumulative days” from the reference time, “drive amount” of the motor, and the number of reciprocations are collected as variable data. The “drive amount” is the drive amount of the step motor that drives the operating shaft of the variable impedance element, and the drive amount shown in the illustrated table is indicated by the number of pulses (number of motor drive steps) given to the motor. ing. “Number of reciprocations” indicates the number of times the motor is reciprocated.

  FIG. 9 is a graph showing the relationship between the determination target value and the cumulative number of days based on FIG. In this example, the determination target value is “2” in the initial stage after the use of the impedance matching device is started, but the determination target value becomes “1” when 150 days have elapsed from the reference time. Thus, the determination target value is smaller than in the initial stage. This is because the wear of the mechanism that moves the operating shaft of the variable impedance element (for example, the wear of the thread of the screw mechanism that linearly displaces the movable electrode of the variable capacitor) or the lubricant (grease) applied to the operating mechanism. This is because the variable impedance element can be operated with a smaller torque than in the initial stage due to the familiarity. When the portion A is passed, as the mechanism portion of the variable impedance element deteriorates, the magnitude of the numerical value including information on the minimum value of the torque necessary to keep the residual deviation within the allowable range as in the portion B. The numerical value (determination target value) for evaluating is gradually increased. In part B, the period required for the numerical value indicating the determination target value to increase by 1 tends to be gradually shortened.

  When a large number of determination target values and variable data values (cumulative days) at the time when each determination target value is detected are collected as described above, a prediction method such as a least square method or a linear prediction method is used. By using this, the value of the variable data that will be taken when the future determination target value reaches the determination reference value can be obtained as the variable data estimated value at the end of life. Further, by subtracting the latest value of the variable data (cumulative days) from the estimated value at the time of reaching the life, a remaining life estimated value that becomes a measure of how much life is left can be obtained.

  In general, as a method for estimating a future value based on past data, a method based on a regression line created using a least square method is often used. Also in the present embodiment, a regression line is obtained by applying the least square method to a plurality of judgment target values and the value of variable data (cumulative days) when each judgment target value is detected, and based on the obtained regression line Thus, the lifetime of the mechanism part of the variable impedance element is estimated.

  The method of calculating the regression line by the least square method is well known, and since the calculation can be easily performed by using a microprocessor, the regression line can be easily calculated if there is data of past judgment target values. Can be sought. However, as is clear from FIG. 9, the determination target value (minimum required torque value) has a portion that decreases as the cumulative number of days increases, such as portion A, and the like, for example, portion B. Since there are portions where the value does not increase at intervals, it is not necessary to simply use all of the past determination target value data.

  For example, when the cumulative number of days in the range A shown in FIG. 9 is 300 days, for example, when all of the past determination target value data is used, the slope of the regression line becomes a negative value. The remaining number of days until is calculated as a negative value, and the life cannot be estimated.

  In addition, since there is a portion where the value does not increase at regular intervals, such as the portion B in FIG. 9, in order to estimate the life as accurately as possible, the calculation is performed using the latest determination target value data. It is desirable to obtain the regression line in a form reflecting the current state of the variable impedance element. Therefore, it is necessary to devise when calculating the regression line.

  In the present invention, when the lifetime is estimated using the least square method, it is determined whether or not the latest stored data of the N determination target values are data that can be used for determining the lifetime. In this case, various ideas can be adopted.

  For example, when it is recognized that N determination target values as a whole show a positive slope with respect to the increase in the cumulative number of days (for example, 3 → 3 → 4 → 4 → 4 → 5) The N judgment target values can be used for life estimation, and the N judgment target values show a change in a negative change with respect to an increase in the cumulative number of days. If there is even one (for example, a change such as 2 → 3 → 4 → 2 → 3 → 4), all of the N judgment target value data are used for life estimation. Can be considered not to use.

  As described above, when changes such as 2 → 3 → 4 → 2 → 3 → 4 are shown, 2 and 3 that are temporarily reduced from 4 are not used for life estimation. 2 → 3 → 4 → 4 (number of data 4) may be regarded as changed, and assuming that no negative change is indicated, 2 → 3 → 4 → 4 → 4 → 4 (data number 6) ) And may have been changed.

  Further, even if some of the latest stored N determination target value data includes a negative slope with respect to the increase in the cumulative number of days, the N determination target value data as a whole If it is recognized that the judgment target value is changing with a positive slope with respect to the increase in the cumulative number of days (for example, showing a change such as 2 → 3 → 2 → 3 → 4 → 5) ) Can also be taken to use the data of the N determination target values for life estimation.

  As in the present embodiment, when an evaluation value (numerical value of 1 to 5) is used as a determination target value, the portion A in FIG. 9 generated at the initial stage after the operation of the impedance matching device is started is not used for the calculation. In order to do this, for example, data after the determination target value has become a value of “3” or more may be used. When all the determination target values are 2 or less, it may be determined that the lifetime is not reached for an equal period without performing the calculation for obtaining the regression line.

  In addition, when an evaluation value (numerical value of 1 to 5) is used as a determination target value as in this embodiment, since a minute change in the determination target value is not known, a plurality of determination targets detected on different days It is possible that the values show the same value. In the case of the least square method, if all the determination target values used in the calculation are the same (for example, a change such as 3 → 3 → 3 → 3 → 3 → 3), the slope of the regression line is 0 (zero) ) And the life cannot be estimated, so that an operation error occurs. Therefore, it is necessary to determine in advance how to deal with an operation error. For example, if the number of data is increased, calculation errors are less likely to occur. Therefore, when a calculation error occurs, the number of data temporarily used for calculation may be increased by a predetermined number. Increasing the number of data used for computation can avoid computation errors, but there is a tendency that the computation is performed in a direction in which the life is slightly increased. However, since the estimation of the life may be a rough one, even if the life is calculated to be slightly longer, no major problem will occur.

  FIG. 10 shows each of the items after March 2, 2007 when the determination target value shows a value of 3 or more when the data is stored in the memory like the table shown in FIG. It shows the result of estimating the life using the latest 6 (most recent) data as the variable data using the accumulated days for estimation on the date. In FIG. 10, the “estimated date” is the date estimated as the date when the variable impedance element reaches the end of its life, but the numerical value described in the “estimated date” column is the cumulative number of days from the reference date to the date when the end of the life is reached. That is, it is a value (variable data estimated value when the life is reached) estimated that the variable data takes on the day when the variable impedance element reaches the end of its life.

  For example, in the life estimation performed on March 2, 2007, among the data required up to that date, March 2, 2007, January 11, 2007, November 22, 2006, October 2006 On the 3rd, August 14, 2006 and June 25, 2006, the latest six (judgment value, cumulative number of days) values (3,700), (2,650), (2 , 600), (2,550), (2,500), and (2,450) are used to calculate a regression line by the least square method, and as a result, variable data (accumulated on the day when the future life is reached) The value (estimated life time variable data estimated value) taken as the number of days) is 1,000, and the remaining number of days from the current time to the life (estimated remaining life value) is 300 (= 1,000-700). ). Similarly, for the other dates, the life is estimated using the latest six values (determination target value, accumulated days). As the estimation date becomes new, the remaining number of days decreases, and it can be seen that estimation of the lifetime of the variable impedance element is performed in a manner consistent with the progress of deterioration of the variable impedance element.

  In the example shown in FIG. 10, a variable stored in the memory in the form of a data table in FIG. 8 is used for the calculation for calculating the remaining number of days (calculation of subtracting the latest value of variable data from the variable data estimated value at the end of life). The latest value of the data is used, but the cumulative number of days up to the date on which the life is estimated differs from the cumulative number of days stored in the memory (the latest value of the cumulative number of days stored is past data In some cases, it is preferable to use the cumulative number of days newly acquired from the calendar part on the day when the life is estimated as the latest value of the variable data when calculating the remaining days.

  In the above embodiment, the cumulative number of days from the reference time is variable data used for life estimation. However, life estimation can also be performed using other variable data. FIG. 11 shows a case where the determination target value shows a value of 3 or more and each date after March 2, 2007 when the data is stored in the memory in the form shown in FIG. The driving amount is used as variable data for estimation, and the life estimation is performed using the latest (most recent) six data. In FIG. 11, “estimated drive amount” is a value (variable data estimated value when the life is reached) that the variable data (motor drive amount) is expected to take when the mechanism of the variable impedance element reaches the end of its life. Show. The “remaining drive amount” is a value (estimated remaining life) obtained by subtracting the value of the latest variable data (drive amount) on the day of estimation from the estimated drive amount.

  In the above embodiment, a numerical value for evaluating the magnitude of the torque value is used as the determination target value. However, a numerical value including information on the torque value (for example, the minimum torque required to keep the residual deviation within the allowable range). Or the magnitude of the torque setting signal corresponding to the minimum value) may be used as the determination target value. When evaluation values are used as judgment target values, there is no particular problem because the correspondence between each evaluation value and torque value can be clearly understood if the torque difference between evaluation values is equal. If it is uniform, the correspondence between the evaluation value and the torque value is not known, so it is difficult to consider the magnitude of the torque when calculating the estimated life value. On the other hand, if the torque value is used as the determination target value, the estimation calculation can be performed in consideration of the torque value at the time of life estimation. It can be done accurately.

  In the embodiment shown in FIG. 1, the target position setting unit 9, the first output torque setting unit 12 a, the second output torque setting unit 12 b, the abnormality determination unit 11, and the determination for detecting the determination target value using them. The functions of the target value detection means and the first inspection result output unit 15a and the second inspection result output unit 15b are realized using a microprocessor. A calculation process for estimating the lifetime is also performed using a microprocessor. The first output torque setting unit 12a, the second output torque setting unit 12b, the abnormality determination unit 11, the determination target value detection means, the first inspection result output unit 15a and the second inspection result output unit 15b are configured, FIG. 4 and FIG. 5 are flowcharts showing examples of task algorithms executed by the microprocessor in order to estimate the lifetime of the variable impedance element.

  The tasks shown in FIGS. 4 and 5 are executed when an inspection command is given while the production line is stopped. First, in a step not shown, the operating axis of the variable capacitor is moved to the initial position of the inspection target range set in advance by the motor. Of course, this step is not necessary when the current position at that time is set as the initial position. Next, in the case of this algorithm, first, in step S101, the variable k (initial value 0) is incremented by 1, and in step S102, the torque setting signal voltage value vs. the torque setting signal voltage value (data table) ( Read digital value Vk. Next, in step S103, the read voltage value Vk is given to the motor drive unit, and in step S104, a torque setting completion signal is given to the target position setting unit. At this time, the target position setting unit sets the target position of the operating axis of the variable capacitor. When the target position of the operating axis of the variable capacitor is set, the motor driving unit 10 sends a driving current to the motors 7a and 7b to rotate the motor and displace the operating axis of the variable capacitor toward the target position.

  Note that when the variable k = 1, the voltage value of the torque setting signal read from the torque setting signal voltage value versus the torque table is the minimum value of the voltage values stored in the torque setting signal voltage value versus the torque table. . When the variable k is the maximum value (kmax), the voltage value of the torque setting signal read from the torque setting signal voltage value versus the torque table is the torque setting signal voltage value versus the voltage value stored in the torque table. It is the maximum value. Further, as the variable k increases by 1, the voltage value of the torque setting signal to be read increases.

  Note that when the motor output torque corresponding to the maximum voltage value of the torque setting signal is reached, the torque setting is performed so that the state of the mechanism of the variable capacitor to be inspected is determined to be out of the normal range. Set the voltage value of the signal.

  When the driving of the motor is completed, step S106 is executed to determine a residual deviation existing between the target position of the operating axis of the variable capacitor and the current position, and this residual deviation is compared with an allowable value. As a result, when the residual deviation exceeds the allowable value, the process proceeds to step S107. In step 107, it is determined whether k is equal to or greater than kmax. As a result of the determination, if k ≧ kmax is not satisfied, the process proceeds to step S108, the position of the operation axis is returned to the initial position, and then the process returns to step S101. In step S107, if k ≧ kmax, the process proceeds to step S109. In step S109, assuming that the state of the mechanism of the variable capacitor to be inspected is out of the normal range, a maintenance command is generated and this task is terminated. This is because it can be clearly determined that the maintenance is necessary because the residual deviation exceeds the allowable value even though the voltage value of the torque setting signal is maximized.

  When the operation axis position is returned to the initial position in step S108, the operation axis position detection unit 8 monitors the current position of the operation axis. Increase the voltage value of the setting signal (for example, the maximum value). If the voltage does not return to the initial position even though the voltage value of the torque setting signal is set to the maximum value, although not shown in the drawing, the process proceeds to step S109 at that time to generate a maintenance command and finish this task. To do. This is also because it can be determined that maintenance is clearly necessary, as in the case of returning the position of the operation shaft to the initial position.

  When it is determined in step S106 that the residual deviation is not greater than the allowable value, the process proceeds to step S110, where the voltage value Vk of the torque setting signal at that time is output as a determination value. In step S111, the motor corresponding to the voltage value Vk is output. The output torque value is read from the data table and output. In step S112, the motor output torque corresponding to the voltage value Vk is compared with a determination reference value. As a result, when it is determined that the output torque of the motor is less than the determination reference value, the process proceeds to step S113. When it is determined in step S112 that the output torque of the motor is equal to or greater than the determination reference value, a maintenance command is issued in step 109, assuming that the state of the variable capacitor mechanism to be inspected is out of the normal range. To finish this task. In step S113, it is determined whether or not the current position is the final target position (the final position of the inspection target range). If it is determined in step S113 that the current position is not the final target position, the process returns to step S105.

  If it is determined in step S113 that the current position is the final target position, step S114 and subsequent steps in FIG. 5 are executed to perform calculation processing for life estimation.

  Note that when it is determined in step S113 that the current position is the final position, a calculation process for estimating the life may not be performed. In that case, what is necessary is just to make it complete | finish a task after performing step S113.

  In step S114, the number N of determination target values used for the life estimation calculation is set as an initial value N1. The value of N1 is 6, for example. Next, the process proceeds to step S115 and the output torque value (evaluation value of the determination target value in the present embodiment), date and time, accumulated days from the reference time, drive amount, etc. are stored in the memories 31 and 32, and the determination target is determined in step S116. It is determined whether or not the latest value is a value that can be used for estimation. When it is determined in step S116 that the determination target value is a value that can be used for estimation (for example, in FIG. 9, when the portion A is not used for estimation of the lifetime, the evaluation value 3 is greater than or equal to) If it is determined), the process proceeds to step S117 to determine whether or not the number of data of the determination target value stored is N or more. If the number of determination target values stored as a result is N or more, whether or not the values of the N determination target values stored in step S118 are values that can be used for estimation ( It is determined whether or not estimation is possible. As a result, when it is determined that the values of the N determination target values cannot be used for life estimation (for example, all are the same value), the number of data N used for estimation is set to 1 in step S119. Is incremented by one and the process returns to step S117.

  As described above, when one of the N determination target values shows a negative change with respect to an increase in variable data such as the cumulative number of days (for example, 2 → 3 → 4 → 2). It can be considered that all the data of the N determination target values are not used for life estimation when a change such as → 3 → 4 is indicated. At this time, in the above example, 2 → 3 → 4 → 4 (data number 4) and 2 → 3 → 4 → 4 → 4 → 4 (data number 6) may be considered. Even in this case, the number N of the determination target values determined in step S117 is not changed. That is, in the above example, N = 6 is maintained, and it is determined whether or not estimation is possible in step S118.

  In step S117, when it is determined that the number of stored determination target value data is not N or more, the process proceeds to step S120, and the number of determination target value data currently stored in the memory is used for estimation. Let N be the number. Next, the process proceeds to step S121, where it is determined whether or not the number N of data of the determination target values stored is 2 or more. If it is 2 or more, the process proceeds to step S122 and N determinations are stored. It is determined whether the target value is a value that can be used for estimation (whether estimation is possible). As a result, when it is determined that the data value of the stored determination target value is a value that can be used for estimation (estimation is possible), the process proceeds to step S123 and the variable data estimated value at the end of life is reached. The operation for obtaining is performed and the result is output. Next, in step S124, the value of N is returned to the initial value, and this task ends. Even when it is determined that the data of the determination target value stored in step S118 is a value that can be used for the estimation calculation, the process proceeds to step S123 to perform calculation for obtaining the variable data estimated value at the end of life, The result is output. If it is determined in step S116 that the latest value of the determination target value cannot be used for life estimation, if it is determined in step S121 that the number of data N of the determination target value is less than 2, and stored in step S122. If it is determined that the determination target value data cannot be used for life estimation (for example, when it is determined that all the values are the same), the process proceeds to step S125 to monitor that the life cannot be estimated. This is finished by displaying on 36.

  In the case of the above algorithm, the abnormality determination unit 11 is configured by step 106, and the operation axes of the variable capacitors VC1 and VC2 are increased while increasing the magnitude of the torque setting signal by steps 101 to 106 and steps 110 to 113. Including information on the magnitude of the torque setting signal when the abnormality determination unit does not perform abnormality determination for the first time in the entire inspection target range by repeatedly controlling the deviation between the target position and the current position to zero. A determination target value detection unit configured to detect, as a determination target value, a numerical value that evaluates the numerical value or the magnitude of the numerical value including information on the magnitude of the torque setting signal. Further, in steps 112 and 109, the determination target value or the motor output torque obtained from the determination target value is compared with the determination reference value, and the determination target value or the motor output torque obtained from the determination target value is determined as the determination reference value. Test result output units 15a and 15b for outputting a test result indicating that the state of the mechanism unit of the variable impedance element is out of the normal state are configured.

  In the above embodiment, the “operation shaft position control device” composed of the target position setting unit 9 and the motor control unit 13 is subjected to the process of determining whether or not the abnormality determination unit performs abnormality determination when the motor is controlled. By repeatedly performing the setting signal while increasing the magnitude of the setting signal, a numerical value including information on the magnitude of the torque setting signal when the abnormality determination is not performed for the entire inspection target range for the first time is detected as the determination target value. Although the determination target value detection means is configured as described above, the present invention is not limited to the case where the determination target value detection means is configured in this way.

  For example, the process of determining whether or not the abnormality determination unit 11 performs an abnormality determination when the motors 7a and 7b are controlled by the target position setting unit 9 and the motor control unit 13 is the magnitude of the output torque setting signals Vτa and Vτb. A numerical value that includes information on the magnitude of the torque setting signal when the abnormality determination is made for the first time, or a numerical value that evaluates the magnitude of the numerical value that includes information on the magnitude of the torque setting signal. The first and second determination target value detection means may be configured so as to detect as a determination target value. In this case, the first and second inspection result output units 15a and 15b compare the detected determination target value or the output torque of the motors 7a and 7b obtained from the determination target value with the determination reference value, and determine the determination target value. A test result indicating that the state of the mechanical portion of the variable impedance elements 3 and 4 is out of the normal state when the output torque of the motors 7a and 7b obtained from the value or the determination target value is equal to or greater than the determination reference value. Configure to output.

  In this case, the determination target value / variable data storage unit that stores data used for life estimation stores the determination target value each time the determination target value detection unit detects each determination target value, and the variable impedance element. A variable used to represent the life of the mechanism unit is set as variable data, and the value of the variable data at the time when each determination target value is obtained is stored.

  In addition, the life estimation unit uses the value of the determination target value when the deterioration state of the mechanism unit of the variable impedance element deviates from the normal state as a determination reference value, and the variable data is obtained when the determination target value reaches the determination reference value. At least one of the estimated lifetime variable data estimated value and the remaining lifetime estimated value obtained by subtracting the latest variable data value from the estimated lifetime variable data estimate value is stored as a determination target value / variable data storage It is comprised so that it may obtain | require from the relationship between the determination object value memorize | stored in the part and the value of variable data.

  The process of determining whether or not the abnormality determination unit 11 performs abnormality determination when the motors 7a and 7b are controlled by the operation shaft position control device including the target position setting unit 9 and the motor control unit 13 is described below. When it is repeatedly performed while reducing the magnitude, the magnitude of the torque setting signal when the abnormality determination is made for the first time is the maximum value of the output torque of the motor that causes the residual deviation to exceed the allowable value.

  As the deterioration of the mechanism of the variable impedance element progresses, the motor output torque required to operate the variable capacitor increases, so the deviation between the target position of the variable capacitor operating shaft and the current position is reduced to zero. When the target position setting unit and the motor control unit are controlled to approach to the maximum value of the motor output torque that causes the residual deviation existing between the current position of the operation shaft and the target position to exceed the allowable value, As the mechanism portion of the variable capacitor deteriorates, it becomes larger. Even if a new variable capacitor is used, when the mechanism is abnormal, the torque required to operate the variable capacitor is larger than when the mechanism is normal. The maximum value of the output torque of the motor that causes the state where the deviation exceeds the allowable value is shown. Therefore, a numerical value including information on the maximum value of the output torque of the motor that causes the residual deviation to exceed the allowable value is obtained as the determination target value, and the obtained determination target value may be compared with the determination reference value. It is possible to accurately determine whether or not the state of the mechanism portion of the variable capacitor is out of the normal state.

  Therefore, the determination target value detection means used in the present invention is an “operation axis position detection device” comprising a target position setting unit 9 and a motor control unit 13 for controlling the deviation between the target position of the operation axis and the current position to be close to zero. Repeatedly performing the process of obtaining the residual deviation existing between the current position of the operating shaft and the target position while reducing the output torque of the motor 7a, thereby causing the residual deviation to exceed the allowable value. It may be configured to detect a numerical value that includes information on the maximum value of the output torque of the inviting motor 7a or a numerical value that evaluates the magnitude of the numerical value that includes the information on the maximum value as the determination target value. A method for obtaining a numerical value that includes information on the maximum value of torque or a numerical value that evaluates the magnitude of the numerical value that includes information on the maximum value as a determination target value is not limited to the method described in the above embodiment.

  Similarly, the determination target value detection unit causes the target position setting unit 9 and the motor control unit 13 to perform control to bring the deviation between the target position of the operation axis and the current position closer to zero, and the current position of the operation axis. By repeating the process of obtaining the residual deviation existing between the target position and the output torque of the motor 7b while reducing the output torque of the motor 7b, information on the maximum value of the output torque of the motor 7b that causes the residual deviation to exceed the allowable value is obtained. The numerical value including the information on the maximum value of the output torque of the motor 7b or the maximum value may be used as long as it is configured to detect the numerical value including the numerical value including or the numerical value including the information on the maximum value as the determination target value. A method for obtaining a numerical value that evaluates the magnitude of a numerical value including value information as a determination target value is not limited to the method described in the above embodiment.

  The above-mentioned “numerical value for evaluating the magnitude of the numerical value including the information on the maximum value” is a range in which the magnitude of the numerical value including the information on the maximum value of the output torque of the motor 7b in which the residual deviation exceeds the allowable value. It is a numerical value that indicates whether or not.

  As described above, the process of determining whether or not the abnormality determination unit 11 performs the abnormality determination when the target position setting unit 9 and the motor control unit 13 control the motors 7a and 7b is the magnitude of the torque setting signal Vk. A numerical value including information on the magnitude of the torque setting signal when the abnormality determination is made for the first time (information on the maximum value of the output torque of the motor that causes the residual deviation to exceed the allowable value) A program to be executed by the microprocessor when the determination target value detecting means is configured to obtain the determination target value as the determination target value and the lifetime of the mechanism portion of the variable impedance element is estimated using the detected determination target value. A flowchart showing the algorithm is shown in FIGS.

  When the variable k is the maximum value, the voltage value of the torque setting signal read from the torque setting signal voltage value vs. torque table is the maximum value of the voltage values stored in the torque setting signal voltage value vs. torque table. is there. Further, when the variable k is the minimum value (kmin = 1), the voltage value of the torque setting signal read from the torque setting signal voltage value versus the torque table is the voltage value stored in the torque setting signal voltage value versus the torque table. It is the minimum of them. Further, as the variable k is decreased by 1, the voltage value of the torque setting signal to be read is also decreased. If the motor output torque corresponds to the minimum voltage value of the torque setting signal and the residual deviation does not exceed the allowable value in the entire inspection target range, the variable capacitor to be inspected The minimum voltage value of the torque setting signal is set so that it can be determined that the state of the mechanism part is in the normal range.

  In the case of this algorithm, first, the variable k (initial value is the maximum value + 1) is decremented by 1 in step S201 of FIG. 6, and the torque setting signal voltage value vs. torque table (data table) is calculated from the torque setting signal voltage value in step S202. The voltage value (digital value) Vk is read. Next, in step S203, the read voltage value Vk is given to the motor drive unit, and in step S204, a torque setting completion signal is given to the target position setting unit. At this time, the target position setting unit sets the target position of the operating axis of the variable capacitor. When the target position of the operating axis of the variable capacitor is set, the motor driving unit 10 sends a driving current to the motors 7a and 7b to rotate the motor and displace the operating axis of the variable capacitor toward the target position.

  When the driving of the motor is completed, step S206 is executed to determine a residual deviation existing between the target position of the operating axis of the variable capacitor and the current position, and this residual deviation is compared with an allowable value. As a result, if the residual deviation does not exceed the allowable value, the process proceeds to step S207 to determine whether or not the current position of the operation axis is the final target position. If the residual deviation is not the final target position, the process returns to step S205. . When it is determined in step S207 that the current position is the final target position, the process proceeds to step S208, and it is determined whether k is equal to or less than kmin. As a result of the determination, if k ≦ kmin, this task is terminated. If k ≦ kmin is not satisfied, the process proceeds to step S209, the position of the operation axis is returned to the initial position, and the process returns to step S201. If k ≦ kmin in step S208, the numerical value including the information on the maximum value of the output torque of the motor that causes the residual deviation to exceed the allowable value is less than the determination reference value. Information indicating that the state is normal may be output.

  When it is determined in step S206 that the residual deviation is larger than the allowable value, the process proceeds to step S210, and the voltage value Vk of the torque setting signal at that time is output as a determination value. In step S211, the motor output corresponding to the voltage value Vk is output. The torque value is read from the data table and output. In step S212, the motor output torque corresponding to the voltage value Vk is compared with a determination reference value. As a result, when it is determined that the output torque of the motor is equal to or greater than the determination reference value, a maintenance command is generated in step S213, assuming that the state of the mechanism of the variable capacitor to be inspected is out of the normal range. To finish this task. If it is determined in step S212 that the motor output torque is less than the determination reference value, the process proceeds to step S214 in FIG. 7 to perform processing for estimating the lifetime of the mechanism portion of the variable impedance element. The flowchart shown in FIG. 7 is the same as the flowchart shown in FIG. 5 except that the step numbers assigned to the respective steps are different, so that the description thereof is omitted.

  In step S212 in FIG. 6, the state in which the torque value is determined to be less than the determination reference value indicates that the numerical value including information on the maximum value of the motor output torque that causes the residual deviation to exceed the allowable value is the determination reference value. Therefore, if it is determined in step S212 that the torque value is less than the determination reference value, the state of the mechanism portion of the variable capacitor is normal before proceeding to the process of estimating the life. You may output the information which shows that there exists.

  In addition, when it is determined in step S212 that the torque value is less than the determination reference value, a calculation process for estimating the life may not be performed. In this case, what is necessary is just to complete | finish a task after performing step S212.

  In the present invention, when the output control of the variable impedance elements 3 and 4 is performed with the output torques of the motors 7a and 7b being fixed to a constant value, the actual operation shaft is controlled when the control is completed. A variable impedance using a numerical value that includes information on the magnitude of the residual deviation existing between the position and the target position, or a numeric value that evaluates the magnitude of the numerical value that includes information on the magnitude of the residual deviation as a determination target value The lifetime of the mechanism part of the elements 3 and 4 can also be estimated.

  In this case, the first and second determination target value detection means detect the actual position of the operation axis of the variable impedance elements 3 and 4 by the motor control unit 13 while the mechanism unit of the variable impedance elements 3 and 4 is normal. When performing control to keep the residual deviation existing between the target position within the allowable range, the torque output having a value selected in advance from the values that can be taken by the output torque of the motors 7a and 7b is used as the inspection torque. While the torque is fixed to the torque at the time of inspection, the position control of the operation shaft of the variable impedance elements 3 and 4 is performed, and when the position control is completed, it exists between the actual position of the operation shaft and the target position. A numerical value including the residual deviation magnitude information or a numerical value for evaluating the numerical magnitude including the residual deviation magnitude information is detected as a determination target value.

  The determination target value / variable data storage unit configured by the memories 31 and 32 stores the determination target value each time the determination target value detection unit detects each determination target value, and the mechanism unit of the variable impedance element. The variable used to represent the lifetime of the data is configured as variable data, and the value of the variable data at the time when each determination target value is obtained is stored.

  Furthermore, the first and second lifetime estimation units 34 and 35 for estimating the lifetime of the mechanism portion of the variable impedance elements 3 and 4 are used when the deterioration state of the mechanism portion of the variable impedance elements 3 and 4 deviates from a normal state. Using the value of the determination target value as the determination reference value, from the life reached variable data estimated value estimated to be taken by the variable data when the determination target value reaches the determination reference value, and the life reached variable data estimated value It is configured to obtain at least one of the remaining life estimated value obtained by subtracting the latest value of the variable data from the relationship between the judgment target value and the value of the variable data stored in the judgment target value / variable data storage unit Is done.

  When the position control of the operation shafts of the variable impedance elements 3 and 4 is performed in a state where the output torque of the motors 7a and 7b is fixed to a constant value, when the position control is completed, the actual operation shafts of the variable impedance elements are The magnitude of the residual deviation that exists between the position and the target position increases as the mechanism of the variable impedance elements 3 and 4 deteriorates. Therefore, the residual deviation existing between the actual position of the operating shaft of the variable impedance elements 3 and 4 and the target position is set within the allowable range by the motor control unit 13 with the mechanism of the variable impedance elements 3 and 4 in a normal state. The torque having a value selected in advance from the values that can be taken by the output torque of the motor when performing the control to be stored is set as the torque at the time of inspection, and the variable output impedance element 3, with the motor output torque fixed to the torque at the time of inspection The numerical value including the information on the magnitude of the residual deviation existing between the actual position of the operating axis and the target position at the time when the position control of the operating axis is completed. If a numerical value that evaluates the magnitude of the numerical value including the magnitude information is detected as the determination target value, the deterioration state of the mechanism portion of the variable impedance element is counteracted with the determination target value. It is. Therefore, also in the case of this embodiment, it is possible to estimate the lifetime of the mechanism portion of the variable impedance elements 3 and 4.

  In the above description, the torque setting signal for setting the output torque of the motor is generated using the DA converter. However, a number of resistance voltage dividing circuits that divide a constant DC voltage and have different voltage dividing ratios are provided. A large number of torque setting signals having different voltage values may be generated by selectively outputting the output voltage of the resistance voltage dividing circuit with a switch. For example, as shown in FIG. 3, one end of a number of fixed resistors R1, R2,... Is connected to the other end of a resistor R0 whose one end is connected to a positive terminal of a DC power source that outputs a constant DC voltage Vcc. The other ends of the resistors R1, R2,... Are connected to the negative terminal (grounded in the illustrated example) of the DC power source through the switches SW1, SW2,. Alternatively, a voltage dividing circuit may be used in which torque setting signals Vτa and Vτb having different voltage values are generated by turning them on. As the voltage dividing circuit shown in FIG. 3, an IC can be obtained.

  In the above-described embodiment, the least-square method is used to obtain the lifetime reaching variable data estimated value and the remaining lifetime estimated value indicating the estimated lifetime of the mechanism portion of the variable impedance element. It is not limited to the case of using, for example, two determination target values selected from a plurality of determination target values detected in the past, and the value of variable data at the time when each determination target value is detected By performing a proportional calculation, it is also possible to obtain a life data variable estimated value using a linear prediction method for obtaining a slope of a straight line used for life prediction.

  In the above embodiment, the task for detecting the determination target value in the program executed by the microprocessor to realize the functions of the target position setting unit 9 and the motor control unit 13 constituting the “operation axis position control device”. The first determination target value detection unit and the second determination target value detection unit that realize the function of detecting the first determination target value and the second determination target value, respectively, are configured by providing a part for executing However, the present invention is not limited to such a configuration, and in order to perform the inspection of the operation mechanism of the variable impedance elements 3 and 4 and the determination of the life, the inspection and life estimation are performed. At the time of data collection, a control block dedicated to inspection and / or life estimation for controlling the position of the operation axis by controlling the motors 7a and 7b for data collection is provided. It may be provided with a function of detecting a decision target values in the block.

  In the present embodiment, both the inspection of the variable impedance elements 3 and 4 and the estimation of the life may be performed simultaneously or individually.

  In the above description, the embodiment has been described on the assumption that the variable impedance element is a variable capacitor. However, it goes without saying that the present invention can also be applied to inspection of a variable impedance element other than the variable capacitor and estimation of the lifetime.

DESCRIPTION OF SYMBOLS 1 High frequency power supply 2 Process chamber 3 1st variable capacitor 4 2nd variable capacitor 5 Inductance 6 Input detection part 7a 1st motor 7b 2nd motor 8 Position detection part 8a 1st position detection part 8b 2nd position Detection unit 9 Target position setting unit 10 Motor drive unit 11 Abnormality determination unit 12 Output torque setting unit 13 Motor control unit 15a First inspection result output unit 15b First inspection result output unit 20a First memory 20b Second memory 31 Third Memory 32 Fourth Memory 33 Calendar Unit 34 First Life Estimating Unit 35 Second Life Estimating Unit 36 Monitor

Claims (12)

A variable impedance element provided between a power source and a load and operated when matching impedance between the power source and the load, and the operation axis of the variable impedance element using a motor as a drive source An operation mechanism for operating the operation axis, an operation axis position detection unit for detecting a current position of the operation axis, a target position of the operation axis is set, and the set target position and the operation detected by the operation axis position detection unit A target position setting unit for calculating a driving amount of the motor necessary to make a deviation from the current position of the shaft zero; an output torque setting unit for outputting a torque setting signal for setting an output torque of the motor; and the torque A motor drive unit having a function of adjusting a magnitude of a drive current flowing to the motor in accordance with a setting signal, and outputting an output torque of the motor to the torque setting signal; A impedance matching device and a motor controller for controlling the motor driving unit to rotate by the driving amount calculated by the target position setting unit the motor at equal state to a torque set by,
The residual deviation existing between the target position and the current position is allowed by repeating the control to make the deviation between the target position of the operation shaft and the current position close to zero while increasing the magnitude of the torque setting signal. A determination target value detecting means for detecting, as a determination target value, a numerical value including information on the minimum value of the output torque of the motor necessary for suppressing the value to be equal to or less than a value, or a numerical value for evaluating the magnitude of the numerical value including the information on the minimum value; ,
Each time the output torque setting unit detects the determination target value, the determination target value is stored, and each determination target value is obtained by using, as variable data, a variable used to represent the life of the mechanism unit of the variable impedance element. A determination target value / variable data storage unit for storing the value of the variable data at a given time;
The value of the determination target value when the state of deterioration of the mechanism portion of the variable impedance element deviates from a normal state is set as a determination reference value, and the variable data is obtained when the determination target value reaches the determination reference value. At least one of a life-variable variable estimated value estimated to be taken and a remaining life estimated value obtained by subtracting the latest value of the variable data from the life-variable variable data estimated value is the determination target value / variable data. A life estimation unit determined from the relationship between the determination target value stored in the storage unit and the value of the variable data;
An impedance matching device comprising: A variable impedance element provided between a power source and a load and operated when matching impedance between the power source and the load, and the operation axis of the variable impedance element using a motor as a drive source An operation mechanism for operating the operation axis, an operation axis position detection unit for detecting a current position of the operation axis, a target position of the operation axis is set, and the set target position and the operation detected by the operation axis position detection unit A target position setting unit for calculating a driving amount of the motor necessary to make a deviation from the current position of the shaft zero; an output torque setting unit for outputting a torque setting signal for setting an output torque of the motor; and the torque A motor drive unit having a function of adjusting a magnitude of a drive current flowing to the motor in accordance with a setting signal, and outputting an output torque of the motor to the torque setting signal; A impedance matching device and a motor controller for controlling the motor driving unit to rotate by the driving amount calculated by the target position setting unit the motor at equal state to a torque set by,
While the magnitude of the torque setting signal is decreased, the control to make the deviation between the target position of the operating shaft and the current position close to zero is allowed to allow a residual deviation existing between the target position and the current position. A determination target value detecting means for detecting, as a determination target value, a numerical value that includes information on the maximum value of the output torque of the motor that causes a state exceeding the value or a numerical value that includes the maximum value information;
Each time the output torque setting unit detects the determination target value, the determination target value is stored, and each determination target value is obtained by using, as variable data, a variable used to represent the life of the mechanism unit of the variable impedance element. A determination target value / variable data storage unit for storing the value of the variable data at a given time;
The value of the determination target value when the state of deterioration of the mechanism portion of the variable impedance element deviates from a normal state is set as a determination reference value, and the variable data is obtained when the determination target value reaches the determination reference value. At least one of a life-variable variable estimated value estimated to be taken and a remaining life estimated value obtained by subtracting the latest value of the variable data from the life-variable variable data estimated value is the determination target value / variable data. A life estimation unit determined from the relationship between the determination target value stored in the storage unit and the value of the variable data;
An impedance matching device comprising: A variable impedance element provided between a power source and a load and operated when matching impedance between the power source and the load, and the operation axis of the variable impedance element using a motor as a drive source An operation mechanism for operating the operation axis, an operation axis position detection unit for detecting a current position of the operation axis, a target position of the operation axis is set, and the set target position and the operation detected by the operation axis position detection unit A target position setting unit for calculating a driving amount of the motor necessary to make a deviation from the current position of the shaft zero; an output torque setting unit for outputting a torque setting signal for setting an output torque of the motor; and the torque A motor drive unit having a function of adjusting a magnitude of a drive current flowing to the motor in accordance with a setting signal, and outputting an output torque of the motor to the torque setting signal; A impedance matching device and a motor controller for controlling the motor driving unit to rotate by the driving amount calculated by the target position setting unit the motor at equal state to a torque set by,
When the mechanism of the variable impedance element is in a normal state, the output torque of the motor is taken when the residual deviation existing between the actual position of the operation axis of the variable impedance element and the target position is brought close to zero. With the torque having a value selected from the obtained values as inspection torque, the control is completed by causing the residual deviation to approach zero while the output torque of the motor is fixed to the inspection torque. The numerical value including the information on the magnitude of the residual deviation existing between the actual position of the operation axis of the variable impedance element and the target position or the magnitude of the numerical value including the information on the magnitude of the residual deviation is evaluated. Determination target value detection means for detecting a numerical value to be determined as a determination target value;
Each time the output torque setting unit detects the determination target value, the determination target value is stored, and each determination target value is obtained by using, as variable data, a variable used to represent the life of the mechanism unit of the variable impedance element. A determination target value / variable data storage unit for storing the value of the variable data at a given time;
The value of the determination target value when the state of deterioration of the mechanism portion of the variable impedance element deviates from a normal state is set as a determination reference value, and the variable data is obtained when the determination target value reaches the determination reference value. At least one of a life-variable variable estimated value estimated to be taken and a remaining life estimated value obtained by subtracting the latest value of the variable data from the life-variable variable data estimated value is the determination target value / variable data. A life estimation unit determined from the relationship between the determination target value stored in the storage unit and the value of the variable data;
An impedance matching device comprising: A variable impedance element provided between a power source and a load and operated when matching impedance between the power source and the load, and the operation axis of the variable impedance element using a motor as a drive source An operation mechanism for operating the operation axis, an operation axis position detection unit for detecting a current position of the operation axis, a target position of the operation axis is set, and the set target position and the operation detected by the operation axis position detection unit A target position setting unit for calculating a driving amount of the motor necessary to make a deviation from the current position of the shaft zero; an output torque setting unit for outputting a torque setting signal for setting an output torque of the motor; and the torque A motor drive unit having a function of adjusting a magnitude of a drive current flowing to the motor in accordance with a setting signal, and outputting an output torque of the motor to the torque setting signal; A impedance matching device and a motor controller for controlling the motor driving unit to rotate by the driving amount calculated by the target position setting unit the motor at equal state to a torque set by,
When a preset displacement range of the operation axis of the variable impedance element is set as an inspection target range, a target position and a current position of the operation axis are monitored in the inspection target range, and control by the motor control unit is completed An abnormality determination unit that performs abnormality determination when a residual deviation existing between the target position and the current position exceeds an allowable value;
The abnormality determination unit for the first time makes an abnormality determination over the entire range of the inspection target range by repeatedly controlling the deviation between the target position of the operation axis and the current position to be zero while increasing the magnitude of the torque setting signal. Determination target value detection means for detecting, as a determination target value, a numerical value that includes information on the magnitude of the torque setting signal when it is not performed or a numerical value that evaluates the magnitude of the numerical value that includes information on the magnitude of the torque setting signal When,
Each time the output torque setting unit detects the determination target value, the determination target value is stored, and each determination target value is obtained by using, as variable data, a variable used to represent the life of the mechanism unit of the variable impedance element. A determination target value / variable data storage unit for storing the value of the variable data at a given time;
The value of the determination target value when the state of deterioration of the mechanism portion of the variable impedance element deviates from a normal state is set as a determination reference value, and the variable data is obtained when the determination target value reaches the determination reference value. At least one of a life-variable variable estimated value estimated to be taken and a remaining life estimated value obtained by subtracting the latest value of the variable data from the life-variable variable data estimated value is the determination target value / variable data. A life estimation unit determined from the relationship between the determination target value stored in the storage unit and the value of the variable data;
An impedance matching device further comprising: A variable impedance element provided between a power source and a load and operated when matching impedance between the power source and the load, and the operation axis of the variable impedance element using a motor as a drive source An operation mechanism for operating the operation axis, an operation axis position detection unit for detecting a current position of the operation axis, a target position of the operation axis is set, and the set target position and the operation detected by the operation axis position detection unit A target position setting unit for calculating a driving amount of the motor necessary to make a deviation from the current position of the shaft zero; an output torque setting unit for outputting a torque setting signal for setting an output torque of the motor; and the torque A motor drive unit having a function of adjusting a magnitude of a drive current flowing to the motor in accordance with a setting signal, and outputting an output torque of the motor to the torque setting signal; A impedance matching device and a motor controller for controlling the motor driving unit to rotate by the driving amount calculated by the target position setting unit the motor at equal state to a torque set by,
When a preset displacement range of the operation axis of the variable impedance element is set as an inspection target range, a target position and a current position of the operation axis are monitored in the inspection target range, and control by the motor control unit is completed An abnormality determination unit that performs abnormality determination when a residual deviation existing between the target position and the current position exceeds an allowable value;
The torque setting when the abnormality determination unit makes an abnormality determination for the first time by repeatedly controlling the deviation between the target position of the operation shaft and the current position to be close to zero while decreasing the magnitude of the torque setting signal. A determination target value detection means for detecting, as a determination target value, a numerical value that includes information on the magnitude of a signal or a numerical value that evaluates the magnitude of a numerical value that includes information on the magnitude of the torque setting signal;
Each time the output torque setting unit detects the determination target value, the determination target value is stored, and each determination target value is obtained by using, as variable data, a variable used to represent the life of the mechanism unit of the variable impedance element. A determination target value / variable data storage unit for storing the value of the variable data at a given time;
The value of the determination target value when the state of deterioration of the mechanism portion of the variable impedance element deviates from a normal state is set as a determination reference value, and the variable data is obtained when the determination target value reaches the determination reference value. At least one of a life-variable variable estimated value estimated to be taken and a remaining life estimated value obtained by subtracting the latest value of the variable data from the life-variable variable data estimated value is the determination target value / variable data. A life estimation unit determined from the relationship between the determination target value stored in the storage unit and the value of the variable data;
An impedance matching device further comprising:   The life estimation unit includes the latest N (N is an integer of 2 or more) variable data values among the variable data values stored in the determination target value / variable data storage unit, and the N data 6. The apparatus according to claim 1, wherein the variable data estimated value at the time of reaching the lifetime or the estimated remaining life value is obtained using a determination target value corresponding to each value of the variable data. Impedance matching device.   When the life estimation unit cannot obtain the lifetime variable data estimation value or the remaining lifetime estimation value, the life estimation section increases the value of N to increase the lifetime variable data estimation value or the remaining lifetime estimation value. The impedance matching device according to claim 6, wherein the impedance matching device is configured to obtain the following.   The value of the variable data stored in the determination target value / variable data storage unit includes the cumulative number of days or time from the reference time, the cumulative value of the motor drive amount from the reference time, and the number of reciprocating operations of the motor. 2. The value of at least one variable data selected from a variable data group consisting of a cumulative value from the reference time and a cumulative value from the reference time of a time for supplying power from the power source to the load. The impedance matching device according to any one of 1 to 7.   The latest value of the variable data used when the life estimation unit obtains the remaining life estimation value is the latest value of the variable data values stored in the determination target value / variable data storage unit or the remaining life estimation. 9. The impedance matching device according to claim 1, wherein the impedance matching device is a value newly acquired when the value is obtained.   The impedance matching apparatus according to any one of claims 1 to 9, wherein the life estimation unit is configured to obtain the life variable variable data estimated value using a least square method.   The impedance matching apparatus according to claim 1, wherein the life estimation unit is configured to obtain the variable data estimated value when the life is reached using a linear prediction method.   The impedance matching device according to any one of claims 1 to 11, further comprising a display unit that displays at least one of the variable data estimated value at the end of life estimated by the lifetime estimating unit and the estimated remaining lifetime value. .

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