JP5360530B2 - Liquid film optics - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid film optical apparatus capable of rapidly and precisely controlling shape or the like of a liquid film having a boundary with gas by finely controlling a temperature variable means for varying the temperature of a liquid film forming area where the liquid film is formed or a temperature variable pattern layer by integrating the temperature variable means or the temperature variable pattern layer at a predetermined minute spot by using an MEMs (Mirco Electro Mechanical System) that controls the temperature of a minute area, and a liquid film optical device, a liquid film imaging device and a liquid film light source device. <P>SOLUTION: The liquid film optical apparatus 1 includes the temperature variable means for varying the temperature of the liquid film forming area 102 where the liquid film having the boundary with gas is formed in order to flocculate liquid film material in atmosphere or sealed space, and a temperature control means for controlling the temperature of the temperature variable means. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

The present invention relates to a liquid film optical equipment, in particular formed in the region by controlling the temperature of the realm that form a liquid film by condensing coagulation optical material or enclosed space atmosphere liquid film The present invention relates to a liquid film optical device capable of changing the optical characteristics of the liquid film.

  Conventionally, there are variable optical mechanisms for liquids that cause diaphragms, shutters, filters, transmission, reflection, refraction, diffraction, and interference. In a liquid optical device such as a variable focus liquid film lens aiming at realization of a human eyeball function or a three-dimensional image, means for controlling a droplet shape by liquid transportation by a piezo actuator pump or electro wetting is used. With current variable focus droplet lenses, it is possible to obtain an image comparable to the image quality of a digital camera in combination with a high resolution imaging sensor. In addition, the variable focus droplet lens employs a mechanism that changes the interface between two types of liquids by electricity to adjust the focus of the lens. It is superior to conventional lenses in various aspects such as cost and durability. This liquid lens is a lens whose shape can be changed without mechanical operation, and plays the role of a lens by changing the shape of the boundary surface between two types of liquids having different refractive indexes. Moreover, electric power is used only for the focusing operation. In addition to mobile phones, such liquid lenses are expected to be used for various purposes such as personal computers, medical sites, security, and digital cameras. It can be applied to an optical device whose shape is variable and a micro integrated optical system. For example, variable focus lens, compound lens, prism, micro lens, micro lens array, reflective optical device, interference optical device, diffractive optical device, confocal optical device, scanning optical device, optical switch, optical shutter, liquid crystal optical device, imaging It can be applied to a device, a light source device, a three-dimensional imaging optical device, a condensing optical device for an infrared sensor, an integrated optical device in which a driving circuit is integrated on a substrate, and the like.

  However, these droplet formation techniques are in terms of shape and do not control all the optical properties of the droplet material. In particular, since the droplet material has not only the surface tension and viscosity (fluidity), but also the refractive index, it has a temperature dependency, so that temperature compensation for image formation or temperature control for the liquid film is required. As a droplet optical device, a droplet of an optical material is precisely formed in a predetermined amount and a predetermined shape to a predetermined location, and is held at a predetermined location to adjust the amount, change the shape, and move the holding location, It is possible to control the temperature of the droplet and control these functions efficiently as many types of droplet materials as possible. Furthermore, the droplets can be controlled quickly and precisely, and the microscopic If an optical system having not only a size but also a large aperture area can be formed, it can be used for more variable optical devices.

Therefore, some proposals have been made conventionally. For example, according to Patent Document 1, alternating regions of hydrophilicity and hydrophobicity can be easily produced on a surface on a micro scale, and when such a surface is cooled in a place with water vapor under appropriate conditions, Selectively condense into regions of the hydrophobic surface. Such water droplets can act as converging or diverging microlenses. Also, by changing the distance between the SAM surfaces, the shape of the liquid lens and thus the optical properties can be changed. There are several other ways to change the shape and optical properties of the liquid lens. For example, the shape of the lens can be changed by changing the electrical potential between the lens and the surface. Also, the refractive index of the lens can be changed by using different liquid materials. The cohesion and adhesion of the liquid lens can be adjusted by changing the chemistry of the liquid material or by changing the surface chemistry. The three-dimensional characteristics of the surface can be changed.
Japanese National Patent Publication No. 11-513129 JP 2006-145807 A

  However, according to Patent Document 1, for example, since the distance between the SAM surfaces is controlled, the optical axis moves and needs to be controlled, and when viewed from the incident / exited light side, the droplet does not have the spherical shape of the optical axis target. This will be described in detail below with reference to the drawings. As shown in FIG. 26, hydrophobic regions 302 and hydrophilic regions 303 are alternately provided on the surface of the opposing substrate 301, and each of the opposing substrates 501. The liquid lens is varied by aggregating the droplets 504 between them and varying the substrate interval A shown in FIG. 26B and the substrate interval B shown in FIG.

  As described above, the distance adjustment error, the coefficient of thermal expansion of the member, the temperature dependency of the distance adjustment mechanism, and the like are added, and a new adjustment of the control portion not related to the optical member is required. Since the entire substrate is cooled and heated, the heat capacity is large, and the temperature cannot be changed quickly. Therefore, it is slow to obtain a predetermined water droplet size. In addition, energy is wasted because temperature control is performed to unnecessary portions. Furthermore, since the entire substrate is brought to the same temperature, it is difficult to control the individual water droplets to different water droplet amounts. For this reason, in order to form a droplet having a predetermined shape at a predetermined location, it is necessary to cool and heat only a very specific location. In order to change the temperature quickly, it is necessary to minimize the number of places to be cooled and heated. Furthermore, the above-mentioned Patent Document 1 is not a mechanism for forming a liquid film in order to form liquid droplets with a very small mass and control the shape and the like quickly and precisely.

  The present invention is for solving these problems, and temperature variable means or temperature variable for forming a liquid film having an interface with a gas using MEMs (Micro Electro Mechanical System) for controlling the temperature of a minute region. Liquid film optical device, liquid that can quickly and precisely control the shape of the liquid film by finely controlling the temperature variable means or the temperature variable pattern layer by integrating the pattern layer at a predetermined minute position An object is to provide a film optical device, a liquid film imaging device, and a liquid film light source device.

In order to solve the above problems, the liquid film optical device of the present invention, the optical material during or enclosed space atmosphere is agglutination, has an interface with the gas, and film thickness distribution becomes substantially uniform temperature changing means for changing the temperature of the liquid film forming area with air sinus portion liquid film Ru is formed as an optical member is a temperature control means for controlling the temperature of the temperature changing means, the optical material liquid film A liquid film material supply / discharge passage that supplies the liquid material to the cavity of the formation area or discharges the optical material from the cavity of the liquid film formation area, and controls the temperature of the temperature changing means by the temperature control means. It is characterized in that the optical material is aggregated in the cavity of the formation area to form a liquid film, and the shape of the liquid film is changed to change the optical characteristics of the liquid film as an optical member. Therefore, the shape of the liquid film can be controlled quickly and precisely.

The liquid film optical device of the present invention, the optical material during or enclosed space atmosphere by agglutination, has an interface with a gas and a liquid as an optical member which film thickness distribution is made substantially uniform comprising a temperature varying means for varying the temperature of the liquid film forming area with air sinus portion film Ru is formed, and a temperature control means for controlling the temperature of the temperature changing means in multiple stages, the optical material of the liquid film forming area It has a liquid film material supply / discharge path for supplying to the cavity or discharging the optical material from the cavity in the liquid film formation area, and controlling the temperature of the temperature change means at each stage by the temperature control means at each stage. The liquid film is formed by aggregating the optical material in the cavity of the liquid film formation area, and the optical characteristics of the liquid film as an optical member are changed by changing the position of the liquid film. Therefore, the position of the liquid film can be controlled quickly and precisely.

Further, since the optical material is an ionic liquid material, a fine liquid film can be formed with high accuracy. By controlling the temperature of the temperature changing means by the temperature control means and holding the liquid film formed in the cavity of the liquid film forming area , it is possible to hold a predetermined liquid film without being affected by the temperature conversion of the atmosphere. .

Furthermore, the temperature changing means is preferably a thermoelectric converter or a heat pipe.

Further, by arranging the temperature changing means in the liquid film forming area, the temperature can be quickly controlled, the shape of the liquid film can be quickly changed to a predetermined shape, and the fine shape control can be performed.

Furthermore, by arranging the temperature changing means individually at the position where the liquid film is formed, the liquid film to be formed can be individually controlled, and the degree of freedom is high.

Further, by arranging the temperature changing means in a flat shape, the meniscus can be made flat and a wide plane can be formed on the liquid film surface.

Furthermore, by arranging temperature changing means on a prismatic surface, a pyramid surface, a cylindrical surface, a conical surface, a bobbin-type surface, a medium-drawing surface, or a free-form surface, depending on the purpose such as the shape and size of the liquid film. Thus, a liquid film can be formed, and in the case of an optical system, the aperture ratio can be increased with respect to the optical optical path.

Furthermore, a measuring device for measuring the temperature and density of the gas in the atmosphere or in the enclosed space is provided, and the temperature control means changes the temperature based on the temperature and density of the gas in the atmosphere or in the enclosed space measured by the measuring device. It is preferable to control the temperature of the means, and the shape of the liquid film can be controlled minutely and with higher accuracy, and can be used for more liquid film optical devices.

Further, a measuring device for measuring the temperature and density of the ionic liquid material is provided, and the temperature control means controls the temperature of the temperature changing means based on the temperature and density of the gas of the ionic liquid material measured by the measuring device. The shape of the liquid film can be finely controlled with higher accuracy, and can be used for more liquid film optical devices.

  When the atmospheric gas is aggregated into a liquid film, it must be controlled to a predetermined size as a shape necessary for an optical device such as the outer periphery of the meniscus of the liquid film and the liquid surface outer shape forming a curved surface or a flat surface. In this case, it is necessary to efficiently form a liquid film with energy saving. This is shown in Patent Document 2 above. However, since the liquid film has temperature dependency on optical characteristics, it is necessary to control the temperature of the liquid film. In addition, by controlling the temperature of the liquid film including the liquid film supporting substrate, the liquid film optical system can be controlled, and the influence of shrinkage and expansion of the liquid film supporting substrate, which is different from the temperature dependence of the liquid film, is also included. Highly efficient and accurate shape control is required with temperature control. Therefore, liquid film formation technology that combines liquid film formation technology and liquid film temperature control and performs a phase transition from gas to liquid by temperature control, including temperature control for temperature dependence of liquid film material, Applies to optical devices. In order to be able to control the temperature of the liquid film while forming and holding the optical material liquid film, the cooler is gathered locally at the liquid film location, and the liquid film is formed on the inner side of the gathered arrangement, and / or The liquid film is held. As described above, the temperature variable means or the temperature variable pattern layer is formed by integrating the temperature variable means or the temperature variable pattern layer for forming the liquid film using the MEMs for controlling the temperature of the minute area at a predetermined minute position. It is possible to provide a liquid film optical device, a liquid film optical device, a liquid film imaging device, and a liquid film light source device that can be controlled minutely to control the shape of the liquid film.

  FIG. 1 is a diagram showing a configuration of a liquid film optical apparatus according to the first embodiment of the present invention. 1A is a cross-sectional view taken along line B-B ′ of FIG. 1B, and FIG. 1B is a cross-sectional view taken along line A-A ′ of FIG. According to the liquid film optical device 1 of the present embodiment shown in the figure, a liquid film forming tube 103 is provided on a glass substrate 101 so as to surround a liquid film forming area 102, and further, a P-type semiconductor 104 and N The type semiconductors 105 are alternately arranged along the circumferential direction. Further, a radiator 106 is provided between one end of each P-type semiconductor 104 and one end of each N-type semiconductor 105, and between the other end of each P-type semiconductor 104 and the other end of each N-type semiconductor 105. Each is provided with a cooler 107. The P-type semiconductor 104, the N-type semiconductor 105, the radiator 106, and the cooler 107 are included in the thermoelectric exchanger 108. Further, a power supply line 109 for applying a voltage is provided between the P-type semiconductor 104 serving as the start end and the N-type semiconductor 105 serving as the end. As described above, around the liquid film forming tube 103, the coolers 107 of the thermoelectric converter 108 are gathered as temperature variable means, and the radiators 106 are dispersedly arranged outside. The P-type semiconductor 104 and the N-type semiconductor 105 are made of a thermoelectric conversion material such as Bi-Te, and the radiator 106 and the cooler 107 are made of an electrode material such as Al, Au, Cu, and Ni.

  Next, in the liquid film optical device of the present embodiment having the configuration as shown in FIG. 1, a description will be given below with reference to FIG. Here, the liquid film is defined as a liquid having an interface with a gas and having a substantially uniform film thickness distribution. First, the type, temperature, and density of the surrounding gas to be aggregated are measured, and the operation time of the cooler 107 is calculated in advance according to the dew point, the liquid amount of the liquid film, and the growth time. ), The cooler 107 is operated for the calculated operation time to cool the tube wall of the liquid film forming tube 103 to the calculated dew point or less. Then, the nearby gas begins to aggregate on the tube wall of the liquid film forming tube 103 and then starts to become the liquid film 120. As shown in FIG. 5C, the liquid film 120 further grows over the entire liquid film forming area 102 in the liquid film forming tube 103, and a liquid film optical device is formed. The liquid film is controlled by operating the cooler 107 as needed to control the liquid film temperature. Thus, as a liquid film optical device, a liquid film of an optical material can be accurately formed in a predetermined amount and a predetermined shape at a predetermined location. Also, hold it in place, adjust the amount, change the shape, move the holding part, make as many kinds of liquid film materials as possible, and further control the temperature of the liquid film, and these functions efficiently By controlling, it can be used for a wider variety of variable optical devices.

  In addition, a liquid film material and a liquid film supporting substrate having predetermined optical transmission characteristics and reflection characteristics are applied. Furthermore, although the Peltier device which consists of a P-type semiconductor and an N-type semiconductor is shown as a thermoelectric converter, it can also be temperature-controlled by a heat pipe. Moreover, although the cooling means has shown the state isolate | separated in the final stage, when adjusting the shape of a liquid film after forming, it uses for the shape control in the connected state. Since the in-plane temperature distribution quickly becomes uniform when the thermal conductivity is large, the liquid film support substrate needs to have a low thermal conductivity so that the temperature distribution is not uniform. High-quality materials and porous structural materials containing a large amount of gas (space) are suitable. Thus, in order to agglomerate gas only in the location where the liquid film is formed, the temperature of the location where the liquid film is formed is selectively controlled. In addition, when a liquid film is formed at a predetermined position on the surface by imparting affinity or hydrophilicity to the liquid film on the surface of the liquid film support substrate, the surface is predetermined as in the SAMs technique by micro stamping. There is no need for a patterning process for limiting the area to the above, and a liquid film is formed on the entire surface of the base material at a predetermined position on the surface even if hydrophilicity is imparted by applying a surfactant or plasma modification. In addition, the formation efficiency of the liquid film can be increased.

  Here, a thermoelectric conversion material, for example, one using BiTe as a main component (substitution / addition of Bi, Sb, In, Ga, Se, Te, etc.) is typical if the Peltier effect is used. N-type Si and P-type Si can also be used, and in order to find a high-performance material, a material having a high required performance index such as low thermal conductivity and good conductivity is preferable. And is selected according to the appropriateness of stability.

  FIG. 3 is a schematic cross-sectional view showing the configuration of the liquid film optical device according to the second embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components. In the liquid film optical device 2 of the present embodiment shown in the figure, the liquid film forming tube 103, the P-type semiconductor 104, the N-type semiconductor 105, and the like are different from the liquid film optical device 1 of the first embodiment. The liquid film forming area 102 is formed in a conical shape by making the thermoelectric exchanger 108 having the radiator 106 and the cooler 107 into a tapered shape and widening the opening. As shown in the figure, the liquid film 120 can be formed more quickly by increasing the aperture ratio and narrowing the interval between the tube walls of the liquid film forming tube 103. Note that the surface of the liquid film forming tube 103 in contact with the cooler 107 is a prismatic surface, a pyramidal surface, a cylindrical surface, a conical surface, a bobbin (barrel) type surface, a medium aperture (reverse barrel) type surface, or a free-form surface including an optical path. It may be to.

  FIG. 4 is a diagram showing a configuration of a liquid film optical device according to the third embodiment of the present invention. 4A is a cross-sectional view taken along the line D-D ′ in FIG. 4B, and FIG. 4B is a cross-sectional view taken along the line C-C ′ in FIG. In the figure, the same reference numerals as those in FIG. 1 denote the same components. According to the liquid film optical device 3 of the present embodiment shown in the figure, the cooler 107 is provided on the bottom surface of the liquid film forming area 102 via the electric insulating layer 110, and heat is radiated to the outer peripheral side of the cooler 107. A membrane 206 is provided. Accordingly, the intervals between the coolers 107 are narrowed to increase the cooling density, and the heat dissipators 106 are dispersed so as to spread to the outside to increase the heat dissipation efficiency, thereby improving the formation efficiency of the liquid film.

  FIG. 5 is a cross-sectional view showing a configuration of a liquid film optical apparatus according to the fourth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components. The liquid film optical device 4 according to the present embodiment shown in the figure is provided with, for example, the liquid film optical device according to the first embodiment described above in multiple stages (three stages in the present embodiment). In FIG. 6A, when cooling is started by the cooler of the second-stage liquid film optical device 111-2, the liquid film 120 starts to be formed, and as shown in FIG. The liquid film 120 is formed. And as shown in (c) of the figure, the temperature of the cooler of the third-stage liquid film optical device 111-3 is lowered from the cooler of the second-stage liquid film optical device 111-2, The formed liquid film 120 moves to the position of the liquid film optical device 111-3. Thus, by controlling the temperature of the cooler of each liquid film optical device having a multistage structure, it is possible to control the shape of the liquid film and move the position.

  FIG. 6 is a cross-sectional view showing a configuration of a liquid film optical device according to the fifth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components. In the liquid film optical device 5 of the present embodiment shown in FIG. 6A, for example, the power supply line 109 in the liquid film optical device of the first embodiment described above is connected to the P-type semiconductor 104 of the thermoelectric exchanger 108. Each of the N-type semiconductors 105 is provided. And (b) of the figure shows the liquid film optical devices 112-1 to 112-6 of the sixth embodiment in multiple stages (here, 6 stages) along the bobbin (barrel) type surface of the liquid film formation area. (C) of the figure is an example of providing the liquid film optical devices 112-1 to 112-3 of the first embodiment in multiple stages (here, three stages) along the conical surface of the liquid film formation area. This is an example. In any of the examples shown in (b) and (c) of the same figure, the optical axis of the formed liquid film 120 can be tilted by individually controlling the temperature of the cooler of the thermoelectric exchanger.

  FIG. 7 is a diagram showing a configuration of a liquid film optical apparatus according to the sixth embodiment of the present invention. (A), (c) of the same figure is the F-F 'sectional view taken on the line of (b) of the same figure, (b) of the figure is the E-E' sectional view taken on the line (a) of the same figure. In the figure, the same reference numerals as those in FIG. 4 denote the same components. In the liquid film optical device 6 of the present embodiment shown in the same figure, the liquid film formation area 102 is closed by the transparent base material 114, and a liquid film member supply / discharge passage 113 communicating with the liquid film formation area 102 is further provided. It has been. The liquid film member supply / discharge path 113 is a supply / discharge path through which liquid or gas for forming a liquid film is introduced into or discharged from the liquid film forming area 102 from the outside. According to the liquid film optical device 6 of the sixth embodiment having such a configuration, liquid or gas is supplied to the liquid film formation area 102 in order to form a liquid film via the liquid film member supply / discharge path 113. In order to form a liquid film, the liquid or gas is aggregated by the cooler 107 of the thermoelectric exchanger 108, and a desired liquid film 120 can be formed. When the liquid or gas is exchanged to form another liquid film, the liquid film is discharged from the liquid film forming area 102 via the liquid film member supply / discharge passage 113 to supply another liquid or gas. . Further, when the shape or size of the formed liquid film 120 is changed, gas or liquid is further supplied to or discharged from the liquid film forming area 102 via the liquid film member supply / discharge path 113. Thus, the liquid film once formed can be reused to form an arbitrary liquid film, and the utilization efficiency can be improved. Further, as shown in FIG. 5A, the gas A is supplied through the liquid film member supply / discharge passage 113 to form the liquid film 120 of the gas A in the liquid film formation area 102 in an airtight state. Then, the gas B is supplied through the liquid film member supply / discharge passage 113 with the liquid film 120 of the gas A interposed therebetween. Further, as shown in FIG. 5C, the gas A is supplied through the liquid film member supply / discharge passage 113 to form the liquid film 120-A of the gas A in the liquid film formation area 102 in an airtight state. To do. Thereafter, the gas B is supplied through the liquid film member supply / discharge passage 113 to form the liquid film 120-B of the gas B. And gas C is supplied. That is, the gas B is supplied via the liquid film member supply / discharge path 113, and the gas B is supplied via the liquid film 120 -A. Therefore, the path of the incoming and outgoing light can be refracted by the shape of the liquid film and the refractive index of each gas being different. Further, as shown in FIG. 8, the reflected light path is changed by irradiating and reflecting light on the surface of the liquid film 120 having a curved surface, and controlling the shape of the liquid film 120 and the liquid surface position of the liquid film 120. Can do. In addition, as a method of changing the liquid level position of the liquid film 120, there is a method using a differential pressure of the gas across the liquid film by changing the gas supply pressure. Further, since the liquid film has a small mass, a film having a large opening area supported by the surface tension than the droplet can be formed. However, the volume of each gas separated by the liquid film becomes large, and it is difficult to obtain a uniform temperature distribution, so that density unevenness occurs in the gas, and the liquid film is deformed due to the refractive index distribution and gas convection pressure. As described above, when it is necessary to quickly obtain a uniform temperature distribution and control the density distribution to be uniform, hydrogen or helium is mixed into the gas on at least one side. Hydrogen and helium are small in molecular size and easy to permeate the liquid film, and have a much higher thermal conductivity than other gases, so by mixing hydrogen or helium with the gas on at least one side, Each gas separated by the liquid film can be rapidly made into a uniform temperature distribution.

In addition, since it is a liquid film material in contact with the gas phase, a liquid film material that does not evaporate is useful, and ionic liquid can be used, but on the other hand, gas cannot be aggregated, so even in that case, in the liquid film formation area Liquid can be supplied and temperature can be controlled. Examples of the ionic liquid include cationic imidazolium-based, pyridium-based, alicyclic amine-based, aliphatic amine-based, aliphatic phosphonium-based, anion-based inorganic ion-based BF ₄ ⁻ , PF ₆ ^{−, and the} like. It is a room temperature molten salt composed of various structures such as combinations with fluorine-based anions such as CF ₃ SO ₂ ⁻ , (CF ₃ SO ₂ ) ₂ N ⁻ and CF ₃ CO ₂ ^— .

  FIG. 9 is a cross-sectional view showing the configuration of the liquid film optical apparatus according to the seventh embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 6 denote the same components. According to the liquid film optical device 7 of the present embodiment shown in the figure, the gas is aggregated in the liquid film formation area 102 inside the cooler 107 arranged on the inclined surface of the inverted pyramid (reverse trapezoid), and the liquid film 120 is formed. Let it form. Also, a prism image is generated by total reflection on the liquid and the cooler surface or reflection on the reflective film 115 provided on the cooling surface. The planar meniscus uses a planar region of a liquid having a low surface tension so that incident light enters the planar liquid film 120. Therefore, liquid film prism shape control and liquid film temperature control can be performed.

  FIG. 10 is a cross-sectional view showing the configuration of the liquid film optical apparatus according to the eighth embodiment of the present invention. In the liquid film optical device 8 according to the present embodiment shown in the figure, the gas in the liquid container 116 is supplied to the tip of the nozzle 119 via the supply path 118 by the pump 117. Then, the gas supplied by the cooler 121 provided in the nozzle 119 is cooled below the dew point temperature, and the liquid film 120 is aggregated and formed at the tip of the nozzle 119 and supported. Furthermore, a predetermined amount of gas is supplied and the liquid film 120 changes to a desired size as indicated by a solid line in the figure. In this manner, the shape of the liquid film can be controlled by increasing or decreasing the gas supply amount or changing the cooling temperature at the tip of the nozzle to change the expansion and contraction of the gas and the amount of aggregation. Furthermore, as shown in FIG. 11, a voltage is applied to the electrostatic electrode 122 provided in the liquid film formation area 102 to apply static electricity to the liquid film 120, and the liquid film 120 is changed by changing the static electricity. Can be controlled. Specifically, the broken line in FIG. 11 is an inclined shape, and the dotted line is a flat shape. In order to control the liquid film 120 to be flat, the same voltage is applied to the electrostatic electrodes 122-1 and 122-2 to attract the liquid film 120 downward. In addition, in order to control the liquid film 120 to be inclined, a voltage is applied to the electrostatic electrode 122-4 to attract the liquid film 120 toward the electrostatic electrode 122-4. By controlling the shape of the liquid film 120 in this way, the optical path of light passing through the liquid film 120 can be controlled. Since the liquid film 120 has an extremely small mass as a film and the influence of gravity is small to the limit, the liquid film can be formed and the shape can be controlled and moved at high speed.

  FIG. 12 is a diagram showing a configuration of a liquid film optical device according to the first embodiment of another invention. (A) of the same figure is a top view of the liquid film optical device of this Embodiment, (b) of the same figure is a top view of the liquid film optical device of this Embodiment after liquid film formation, (c) of the figure ) Is a cross-sectional view taken along the line GG ′ of FIG. In the liquid film optical device 100 of the present embodiment shown in the same figure, a liquid film support layer 203 is provided on a cavity 202 of a substrate 201 having a large specific heat, and a P-type semiconductor film 204, N on the liquid film support layer 203 is provided. A thermoelectric exchanger 208 configured to be integrated including a type semiconductor film 205, a heat dissipation film 206, and a cooling film 207 is arranged in an annular shape to form a thin film structure. Further, a power supply line 209 for applying a voltage is provided between the P-type semiconductor film 204 serving as the start end and the N-type semiconductor film 205 serving as the end. As described above, the cooling films 207 of the thermoelectric converter 208 are collectively arranged along the annular inner circle, so that the cooling density is high. Furthermore, the space between the PN members connecting the cooling film 207 and the heat dissipation film 106 of the thermoelectric exchanger 208 can be eliminated by the cavity 202, the heat capacity around the cooling film 207 can be reduced, and the heat conduction from the heat dissipation film 206 can be reduced. On the other hand, since the heat radiation film 206 is distributed along the annular outer circle and is in contact with the substrate 201 having a large specific heat, the heat radiation effect of the heat radiation film 206 is further enhanced. According to the liquid film optical device 100 of the present embodiment having such a configuration, the liquid film forming tube wall 210 surrounded by the cooling film 207 is cooled by the cooling film 207, and the nearby gas is liquid film forming tube wall. And a predetermined liquid film can be formed. In addition, since the temperature can be controlled quickly, the liquid film 120 can be quickly formed into a predetermined shape, and fine shape control is also possible. In addition, the substrate 201 is etched from the pattern of the cavity 202 to the position reaching the liquid film support layer 203 to form the cavity 202.

  FIG. 13 is a diagram showing a configuration of a liquid film optical device according to the second embodiment of another invention. (A) of the same figure is a top view of the liquid film optical device of this Embodiment, (b) of the same figure is the H-H 'sectional view taken on the line (b) of the same figure. In the figure, the same reference numerals as those in FIG. 12 denote the same components. The liquid film optical device 200 according to the present embodiment shown in the figure is further configured to detect liquid characteristics or control the liquid in the configuration of the liquid film optical device 100 according to the first embodiment shown in FIG. The detection electrode 211 and the detection signal line 212 for extracting the detection signal from the detection electrode 211 are additionally arranged and integrated. In addition to controlling the shape of the liquid film 120 by the cooling film 207, the detection electrode 211 detects the heat capacity, temperature, thermal conductivity, viscosity, and the like of the liquid film 120, and uses, for example, a liquid film made of an electro wetting material. The liquid film can be controlled by applying an electric charge to the liquid film 120. In addition, the function to detect infrared rays is given to the electrode 211 for a detection, and the liquid crystal optics controlled by the electrode 211 for a detection using the infrared sensor which integrated the liquid-film lens for infrared condensing, and the liquid film 120 which consists of liquid crystal materials. Can also be an element. Further, if an LED or a photodiode is formed in the electrode pattern, it can be applied to a light emitting element or a light receiving element. Therefore, according to the present embodiment, by providing an electrode layer or an electrode, more accurate liquid film control can be performed simultaneously with temperature control. As shown in FIG. 14, by integrating the detection signal line 214 for extracting the detection signal from the detector 213 and the detector 213 for monitoring the type, temperature, density and vapor pressure of the gas in the ambient atmosphere, the liquid film To measure the type, temperature, density, and vapor pressure of the nearby gas, set the temperature of the cooler that condenses the gas (below the dew point), and increase the amount of the liquid film 120 according to the state change of the gas near the liquid film The cooling temperature necessary for maintaining the liquid film can be set by observing the degree of evaporation of the liquid film 120 and the degree of evaporation from the liquid film 120.

  FIG. 15 is a plan view showing a configuration of a liquid film optical device according to a third embodiment of another invention. In the figure, the same reference numerals as those in FIG. 12 denote the same components. In the liquid film optical device 300 of the present embodiment shown in the figure, the cooling film 207 is disposed so as to face each other in parallel, and the liquid film 120 is formed in the liquid film formation area in the facing gap. With such a pattern arrangement, the shape of the liquid film can be formed efficiently, quickly and accurately.

  FIG. 16 is a diagram showing a configuration of a liquid film optical device according to a fourth embodiment of another invention. (A) of the same figure is a top view of the liquid film optical device of this Embodiment, (b) of the figure is a J-J 'sectional view taken on the line (b) of the same figure. In the figure, the same reference numerals as those in FIG. 12 denote the same components. The liquid film optical device 400 of the present embodiment shown in the figure is provided with a liquid film member supply / discharge path 215 communicating with the liquid film forming tube wall 210 surrounded by the cooling film 207. The liquid film member supply / discharge path 215 is a supply / discharge path for introducing or discharging liquid or gas for forming a liquid film from the outside to the liquid film forming tube wall 210. According to the liquid film optical device of the fourth embodiment having such a configuration, liquid or gas is supplied to the liquid film forming tube wall 210 in order to form the liquid film 120 via the liquid film member supply / discharge path 215. In order to form the liquid film 120, the liquid or gas is aggregated by the cooling film 207 of the thermoelectric exchanger 208, and the desired liquid film 120 can be formed.

In addition, since it is a liquid film material in contact with the gas phase, a liquid film material that does not evaporate is useful, and ionic liquid can be used, but on the other hand, gas cannot be aggregated, so even in that case, in the liquid film formation area Liquid can be supplied and temperature can be controlled. Examples of the ionic liquid include cationic imidazolium-based, pyridium-based, alicyclic amine-based, aliphatic amine-based, aliphatic phosphonium-based, anion-based inorganic ion-based BF ₄ ⁻ , PF ₆ ^{−, and the} like. It is a room temperature molten salt composed of various structures such as combinations with fluorine-based anions such as CF ₃ SO ₂ ⁻ , (CF ₃ SO ₂ ) ₂ N ⁻ and CF ₃ CO ₂ ^— .

  FIG. 17 is a cross-sectional view showing a configuration of a liquid film optical device according to a fifth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 12 denote the same components. The liquid film optical device 500 of the present embodiment shown in the same figure is extended and contracted using a thermal expansion / contraction member or a piezoelectric vibration member for moving the liquid film support layer 203 up and down between the substrate 201 and the liquid film support layer 203. A layer 216 is provided. The focal position of the lens of the liquid film 120 formed by the liquid film optical device 500 can be changed by moving the stretchable layer 216 up and down uniformly. In addition, the optical axis of the lens of the liquid film 120 formed by the liquid film optical device 500 can be tilted by tilting the stretchable width of the stretchable layer 216 in an uneven manner.

  FIG. 18 is a cross-sectional view showing a configuration of a liquid film optical device according to a sixth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 12 denote the same components. In the liquid film optical device 600 of the present embodiment shown in the same figure, an electrostatic electrode film 217 is provided so as to sandwich the substrate 201 and the liquid film support layer 203. By changing the voltage value of the voltage applied between the electrostatic electrode films 217, the liquid film support layer 203 is curved by the Coulomb force acting between the electrostatic electrode films 217, thereby forming the liquid film The curvature of 120 is curved, and the focal position of the lens of the liquid film 120 can be changed. As another mechanism for bending the liquid film support layer 203, a liquid passage optical device 700 such as that shown in FIG. The liquid film 120 formed by changing the pressure in the cavity 202 by raising and lowering the pressure of the ventilation channel 220 by the piezoelectric film pump 221 provided on the base material forming the ventilation channel 220. The focal position of the lens of the liquid film 120 can be changed by curving the curvature.

  FIG. 20 is a diagram showing a configuration of a liquid film optical device according to a seventh embodiment of another invention. (A) of the same figure is a top view of the example of application of the liquid film optical device of this Embodiment, (b) of the same figure is a K-K 'sectional view taken on the line (b) of the same figure. In the figure, the same reference numerals as those in FIG. 14 denote the same components. In the liquid film optical device 800 of the present embodiment shown in the figure, a plurality (three in this case) of the liquid film optical devices 200 of the second embodiment are integrated and arranged in an array. Therefore, if a plurality of the liquid film optical devices according to the present embodiment are arranged, a microlens array and a three-dimensional image device can be realized. However, in order to control a plurality of different shapes, it is also necessary to control different temperatures for each liquid lens. Therefore, when arranging a plurality, a mechanism for controlling the temperature of each liquid film is arranged to form an integrated liquid film optical device. Note that a MEMS structure is suitable for stacking a plurality. In addition, when setting conditions for liquid film formation, holding, and temperature control, a state detection mechanism such as ambient gas can be integrated.

  FIG. 21 is a cross-sectional view showing a configuration of a liquid film optical device according to an eighth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 16 denote the same components. As shown in the figure, in the liquid film optical device 900 of the present embodiment shown in the figure, different types (two types in the present embodiment) of the first liquid film 120-1 and the second liquid film 120 are used. -2 are laminated to form an optical system such as a compound lens. Specifically, the process of aggregating the gas is performed by controlling the temperature of the cooling film 207 in accordance with the properties of each type of gas. That is, different types of liquid films are laminated and aggregated by decreasing the temperature of the cooling film 207 in order from the material with the highest aggregation temperature. As described above, the liquid film optical device of the present embodiment shows a multi-component multilayer liquid film, and after the gas of the first liquid film is aggregated to form the first liquid film, the second liquid film is formed. Are condensed to form a second liquid film on the first liquid film. A structure other than the structure by MEMS as shown in FIG. Therefore, a liquid film optical device capable of laminating many types of liquid films broadens the application range as an optical device.

  FIG. 22 is a cross-sectional view showing the configuration of the liquid film optical device according to the ninth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 12 denote the same components. As shown in the figure, the liquid film optical device 1000 of the present embodiment shown in the figure is composed of two laminated lenses, each of which is integrated on a different substrate and bonded to each other. The example shown in (a) of the figure is a stack, (b) of the figure is a case where the back surfaces are joined together, and (c) of the figure is a case where the facing surfaces are joined, and the gas component in the cavity is defined as the outside. Can be set differently. In particular, the face-to-face junction type shown in FIG. 5C has a degree of freedom to manufacture two lenses from a short distance to a long distance regardless of the thickness of the substrate. In this way, by accumulating a plurality on the substrate, a wide variety of liquid film optical systems can be realized with high accuracy.

  FIG. 23 is a diagram showing a configuration of a liquid film optical device according to the tenth embodiment of another invention. (A) of the figure is a perspective view, (b) of the figure is a plan view, and (c) of the figure is a sectional view taken along line L-L 'of (b) of the figure. In the liquid film optical device 1100 of the present embodiment shown in the figure, the cooling film 211 is formed in a posture in which the surfaces of the support base and the support layer are raised. As described above, the liquid film forming portion is not combined with the support base material or the support layer as described above, but by forming a posture standing on the surface in the process of manufacturing the substrate, a high height necessary for the optical system is formed. Accurate shape and size can be obtained. In the present embodiment, a radiation light source such as a laser diode 222 is mounted, and an image forming device or an optical scanning device including a condensing system or a diffusion system can be configured. If an image sensor is mounted, an imaging device including an imaging system is obtained.

  FIG. 24 is a cross-sectional view showing a configuration of a liquid film imaging device of another invention. In the figure, the same reference numerals as those in FIG. 12 denote the same components. The liquid film imaging device 1200 of the present invention shown in the figure is configured by integrating the liquid film optical device 100 of the first embodiment and the imaging device 230. Specifically, as shown in the figure, the patterns of the substrates are arranged and the substrates are bonded so that the liquid film 120 of the liquid film optical device 100 can be formed in the light receiving path of the image sensor 223. Although not shown, the control circuit can also be integrated on the same substrate. As described above, by integrating with high accuracy, the variation in the thermal influence from the image sensor can be reduced, so that the temperature control of the liquid film can be accurately performed with little variation. Further, when integrated, not only the whole system is simplified, but also the control circuit can be integrated, so that it is simple and the reliability is improved.

  FIG. 25 is a cross-sectional view showing a configuration of a liquid film light source device of another invention. In the figure, the same reference numerals as those in FIG. 12 denote the same components. The liquid film light source device 1300 of the present invention shown in the figure is configured by integrating the liquid film optical device 100 of the first embodiment and the radiation light source device 240. Specifically, as shown in the figure, the patterns of the substrates are arranged and the substrates are bonded so that the liquid film 120 of the liquid film optical device 100 can be formed in the light emission path of the light emitting diode 224. Although not shown, the control circuit can also be integrated on the same substrate. As described above, by integrating with high accuracy, the variation in the thermal influence from the radiation source can be reduced, so that the temperature control of the liquid film can be accurately performed with little variation. Further, when integrated, not only the whole system is simplified, but also the control circuit can be integrated, so that it is simple and the reliability is improved.

  In addition, this invention is not limited to the said embodiment, It cannot be overemphasized that various deformation | transformation and substitution are possible if it is description in a claim.

It is a figure which shows the structure of the liquid film optical apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing which shows a mode that the liquid film in the liquid film optical apparatus which concerns on 1st Embodiment is formed. It is a schematic sectional drawing which shows the structure of the liquid film optical apparatus based on the 2nd Embodiment of this invention. It is a figure which shows the structure of the liquid film optical apparatus based on the 3rd Embodiment of this invention. It is sectional drawing which shows the structure of the liquid film optical apparatus based on the 4th Embodiment of this invention. It is sectional drawing which shows the structure of the liquid film optical apparatus which concerns on the 5th Embodiment of this invention. It is a figure which shows the structure of the liquid film optical apparatus based on the 6th Embodiment of this invention. It is sectional drawing which shows a mode that the liquid level position of the liquid film in the liquid film optical apparatus which concerns on 6th Embodiment is changed. It is sectional drawing which shows the structure of the liquid film optical apparatus based on the 7th Embodiment of this invention. It is sectional drawing which shows the structure of the liquid film optical apparatus which concerns on the 8th Embodiment of this invention. It is sectional drawing which shows the example of a change of the liquid film shape in the liquid film optical apparatus based on 8th Embodiment. It is a figure which shows the structure of the liquid film optical device which concerns on 1st Embodiment of another invention. It is a figure which shows the structure of the liquid film optical device which concerns on 2nd Embodiment of another invention. It is a figure which shows another structure of the liquid film optical device which concerns on 2nd Embodiment. It is a top view which shows the structure of the liquid film optical device which concerns on 3rd Embodiment of another invention. It is a figure which shows the structure of the liquid film optical device which concerns on 4th Embodiment of another invention. It is sectional drawing which shows the structure of the liquid film optical device which concerns on 5th Embodiment of another invention. It is sectional drawing which shows the structure of the liquid film optical device which concerns on 6th Embodiment of another invention. It is sectional drawing which shows another structure of the liquid film optical device which concerns on 6th Embodiment. It is a figure which shows the structure of the liquid film optical device which concerns on 7th Embodiment of another invention. It is sectional drawing which shows the structure of the liquid film optical device which concerns on 8th Embodiment of another invention. It is sectional drawing which shows the structure of the liquid film optical device which concerns on 9th Embodiment of another invention. It is a figure which shows the structure of the liquid film optical device which concerns on 10th Embodiment of another invention. It is sectional drawing which shows the structure of the liquid film imaging device of another invention. It is sectional drawing which shows the structure of the liquid film light source device of another invention. It is sectional drawing which shows the structure of the conventional droplet optical apparatus. It is sectional drawing which shows another structure of the conventional droplet optical apparatus.

Explanation of symbols

1-8; liquid film optical device,
100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1100; liquid film optical device,
101; glass substrate, 102, 202; liquid film formation area,
103; liquid film forming tube; 104; P-type semiconductor; 105; N-type semiconductor;
106; radiator, 107; cooler, 108, 208; thermoelectric exchanger,
109, 209; power supply line, 120; liquid film, 201; substrate,
202; cavity, 203; liquid film support layer, 204; P-type semiconductor film,
205; N-type semiconductor film; 206; Heat dissipation film; 207; Cooling film;
210; liquid film forming tube wall; 211; detection electrode;
212, 214; detection signal line, 213; detector,
215; liquid film member supply / discharge path, 216; elastic layer, 217; electrostatic electrode film,
219; transparent substrate; 220; vent flow path; 221; piezoelectric membrane pump;
222; laser diode, 223; image sensor,
224; light emitting diode, 1200; liquid film imaging device,
1300: Liquid film light source device.

Claims (11)

The optical material during or enclosed space atmosphere by agglutination, has an interface with a gas and a liquid having an air sinus portion liquid film Ru is formed as an optical member having the film thickness distribution becomes substantially uniform Temperature changing means for changing the temperature of the film forming area;
Temperature control means for controlling the temperature of the temperature change means;
An optical material is supplied to the cavity of the liquid film formation area, or a liquid film material supply / discharge path for discharging the optical material from the cavity of the liquid film formation area, and
The temperature of the temperature changing means is controlled by the temperature control means to form the liquid film by aggregating the optical material in the cavity of the liquid film forming area, and the shape of the liquid film is changed to change the optical member. A liquid film optical device characterized in that the optical characteristics of the liquid film are changed. The optical material during or enclosed space atmosphere by agglutination, has an interface with a gas and a liquid having an air sinus portion liquid film Ru is formed as an optical member having the film thickness distribution becomes substantially uniform A temperature changing means for changing the temperature of the film forming area and a temperature control means for controlling the temperature of the temperature changing means are provided in multiple stages,
Supplying the optical material to the cavity of the liquid film formation area, or having a liquid film material supply discharge path for discharging the optical material from the cavity of the liquid film formation area,
The temperature control means at each stage controls the temperature of the temperature changing means at each stage to form a liquid film by agglomerating optical materials in the cavity of the liquid film formation area, and the position of the liquid film A liquid film optical device characterized by changing the optical characteristics of the liquid film as an optical member by changing the above.   The liquid film optical device according to claim 1, wherein the optical material is an ionic liquid material.   3. The liquid film optical apparatus according to claim 1, wherein the temperature control means controls the temperature of the temperature change means to hold the liquid film formed in the cavity of the liquid film formation area.   The liquid film optical device according to claim 1, wherein the temperature changing unit is a thermoelectric converter or a heat pipe.   The liquid film optical apparatus according to claim 1, wherein the temperature changing means are collectively arranged in the liquid film forming area.   The liquid film optical device according to claim 1, wherein the temperature change means is individually arranged at a position where the liquid film is formed.   The liquid film optical device according to claim 1, wherein the temperature changing unit is arranged in a flat shape.   The temperature changing means is arranged in a collective manner on a prismatic surface, a pyramid surface, a cylindrical surface, a conical surface, a bobbin-type surface, a medium-drawing surface, or a free-form surface. The liquid film optical device according to Item.   A measuring device for measuring the temperature and density of the gas in the atmosphere or the enclosed space is provided, and the temperature control means is configured to change the temperature based on the temperature and density of the gas in the atmosphere or the enclosed space measured by the measuring device. 10. The liquid film optical device according to claim 1, wherein the temperature of the means is controlled. A measuring device for measuring the temperature and density of the ionic liquid material is provided, and the temperature control means controls the temperature of the temperature changing means based on the temperature and density of the gas of the ionic liquid material measured by the measuring device. The liquid film optical device according to claim 3 .

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