JP5305128B2 - Droplet optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To control, for example, a droplet shape by integrating a cooling means for forming a droplet by use of an MEMs (Micro Electro Mechanical System) that controls the temperature of a minute area, or a cooling pattern layer in a predetermined minute area, thereby controlling the cooling means or cooling pattern layer minutely. <P>SOLUTION: The droplet optical apparatus includes: the cooling means for cooling a droplet formation area where droplets are formed for flocculating a droplet material in atmosphere or sealed space; and a temperature control means for controlling the temperature of the cooling means. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

The present invention relates to a droplet optical equipment, to variably droplet optical device by controlling the temperature drop which is formed by aggregating the optical material or enclosed space atmosphere in detail.

  Conventionally, there are variable optical mechanisms for liquids that cause diaphragms, shutters, filters, transmission, reflection, refraction, diffraction, and interference. In a liquid optical device such as a variable focus droplet lens aiming at realization of a human eyeball function or a three-dimensional image, means for controlling a droplet shape by liquid transportation by a piezo actuator pump or electro wetting is used. With current variable focus droplet lenses, it is possible to obtain an image comparable to the image quality of a digital camera in combination with a high resolution imaging sensor. In addition, the variable focus droplet lens employs a mechanism that changes the interface between two types of liquids by electricity to adjust the focus of the lens. It is superior to conventional lenses in various aspects such as cost and durability. This liquid lens is a lens whose shape can be changed without mechanical operation, and plays the role of a lens by changing the shape of the boundary surface between two types of liquids having different refractive indexes. Moreover, electric power is used only for the focusing operation. In addition to mobile phones, such liquid lenses are expected to be used for various purposes such as personal computers, medical sites, security, and digital cameras. It can be applied to an optical device whose shape is variable and a micro integrated optical system. For example, variable focus lens, compound lens, prism, micro lens, micro lens array, reflective optical device, interference optical device, diffractive optical device, confocal optical device, scanning optical device, optical switch, optical shutter, liquid crystal optical device, imaging It can be applied to a device, a light source device, a three-dimensional imaging optical device, a condensing optical device for an infrared sensor, an integrated optical device in which a driving circuit is integrated on a substrate, and the like.

  However, these droplet formation techniques are in terms of shape and do not control all the optical properties of the droplet material. In particular, since the droplet material has not only the surface tension and viscosity (fluidity) but also the refractive index as well, the temperature compensation for the image formation or the temperature control for the droplet is required. As a droplet optical device, a droplet of an optical material is precisely formed in a predetermined amount and a predetermined shape to a predetermined location, and is held at a predetermined location to adjust the amount, change the shape, and move the holding location, If the number of types of droplet materials is as many as possible, the temperature of the droplets can be further controlled, and these functions can be efficiently controlled, it can be used for more variable optical devices.

Therefore, some proposals have been made conventionally. For example, according to Patent Document 1, alternating regions of hydrophilicity and hydrophobicity can be easily produced on a surface on a micro scale, and when such a surface is cooled in a place with water vapor under appropriate conditions, Selectively condense into regions of the hydrophobic surface. Such water droplets can act as converging or diverging microlenses. Also, by changing the distance between the SAM surfaces, the shape of the liquid lens and thus the optical properties can be changed. There are several other ways to change the shape and optical properties of the liquid lens. For example, the shape of the lens can be changed by changing the electrical potential between the lens and the surface. Also, the refractive index of the lens can be changed by using different liquid materials. The cohesion and adhesion of the liquid lens can be adjusted by changing the chemistry of the liquid material or by changing the surface chemistry. The three-dimensional characteristics of the surface can be changed.
Japanese National Patent Publication No. 11-513129 JP 2006-145807 A

  However, according to Patent Document 1, for example, since the distance between the SAM surfaces is controlled, the optical axis moves and needs to be controlled, and when viewed from the incident / exited light side, the droplet does not have the spherical shape of the optical axis target. This will be described in detail below with reference to the drawings. As shown in FIG. 39, hydrophobic regions 502 and hydrophilic regions 503 are alternately provided on the surface of the opposing substrate 501, and The liquid lens is varied by aggregating the droplets 504 between them and varying the substrate spacing A shown in FIG. 39B and the substrate spacing B shown in FIG.

  As described above, the distance adjustment error, the coefficient of thermal expansion of the member, the temperature dependency of the distance adjustment mechanism, and the like are added, and a new adjustment of the control portion not related to the optical member is required. Since the entire substrate is cooled and heated, the heat capacity is large, and the temperature cannot be changed quickly. Therefore, it is slow to obtain a predetermined water droplet size. In addition, energy is wasted because temperature control is performed to unnecessary portions. Furthermore, since the entire substrate is brought to the same temperature, it is difficult to control the individual water droplets to different water droplet amounts. For this reason, in order to form a droplet having a predetermined shape at a predetermined location, it is necessary to cool and heat only a very specific location. In order to change the temperature quickly, it is necessary to minimize the number of places to be cooled and heated.

The present invention has been made to solve these problems, integrated cooling means to form droplets using MEMs controlling the temperature minute region (Micro Electro Mechanical System) to a predetermined small portion by, and an object thereof is to provide a droplet optical equipment capable of controlling the shape of the minute control to droplets cooling hand stage.

In order to solve the above problems, the droplet optical apparatus of the present invention is a cooling means for aggregating optical materials in an atmosphere or in a sealed space to cool a droplet formation area that forms droplets as optical members. And a temperature control means for controlling the temperature of the cooling means. The temperature control means controls the temperature of the cooling means to agglomerate the droplet material in the droplet formation area to form droplets. It is characterized in that the optical characteristics of the droplet as an optical member are changed by changing the shape of the droplet . The droplet optical device of the present invention is a cooling unit that aggregates optical materials in an atmosphere or a sealed space to cool a droplet formation area that forms a droplet as an optical member, and controls the temperature of the cooling unit. Temperature control means for controlling the temperature of the cooling means of each stage by the temperature control means of each stage, and forming droplets by aggregating the droplet material in the droplet formation area. It is characterized in that the optical characteristics of the droplet as an optical member are changed by changing the position of the droplet. Therefore, when the droplet is applied to the optical liquid lens, the optical axis, focal length, and focal position can be changed. Further, by efficiently controlling the temperature of the liquid droplets, the shape of the liquid droplets can be controlled minutely, and can be used as more liquid droplet optical devices.

  The temperature control means controls the temperature of the cooling means to hold the droplets formed in the droplet formation area. Therefore, a predetermined droplet can be held without being affected by the temperature change of the atmosphere.

The supply of Jo Tokoro optical material during or enclosed space atmosphere, or discharging liquid droplets material during or enclosed space atmosphere, the by providing at least the droplet material supply and discharge passage to perform either droplets Can be reproduced and exchanged with another optical material , so that the reuse rate and versatility can be improved.

  Furthermore, the cooling means is preferably a thermoelectric converter or a heat pipe.

  Also, it has a heat ray irradiating means for irradiating only a predetermined portion of the droplet formation area with a heat ray, the whole droplet formation area is cooled by the cooling means, and the predetermined portion is irradiated by the heat ray irradiating means to thereby reduce the temperature difference To control the shape of the droplet. Therefore, the liquid droplets of the optical material can be accurately formed in a predetermined amount and in a predetermined shape at a predetermined location, held in the predetermined location, the amount can be adjusted, the shape can be changed, and these functions can be controlled efficiently. .

  Furthermore, a heat capacity member is provided at a predetermined location in the droplet formation area, and the shape of the droplet is controlled by causing a temperature difference so that the heat capacity other than the predetermined location in the droplet formation area is different. Therefore, the liquid droplets of the optical material can be accurately formed in a predetermined amount and in a predetermined shape at a predetermined location, held in the predetermined location, the amount can be adjusted, the shape can be changed, and these functions can be controlled efficiently. .

  In addition, by controlling the shape of the droplet formed at a predetermined location in the droplet formation area by changing the thickness or set area of the heat capacity member, it becomes possible to individually control the formed droplet, and the degree of freedom is increased. high.

  Further, by arranging and arranging the cooling means in the droplet forming area, the temperature can be quickly controlled, the shape of the droplet can be quickly set to a predetermined shape, and fine shape control can be performed.

  In addition, by individually disposing the cooling means at the positions where the droplets are formed, the formed droplets can be individually controlled and the degree of freedom is high.

  Furthermore, by arranging the cooling means in a flat shape, the meniscus can be made flat and a wide plane can be formed on the droplet surface.

  In addition, by arranging cooling means on a prismatic surface, a pyramid surface, a cylindrical surface, a conical surface, a bobbin-type surface, a medium-drawing surface, or a free-form surface, depending on the purpose such as the shape and size of the droplet In addition to forming droplets, the optical system can increase the aperture ratio with respect to the optical optical path.

  Further, a measuring device for measuring the temperature and density of the gas in the atmosphere or in the sealed space is provided, and the temperature control means is a cooling means based on the temperature and density of the gas in the atmosphere or in the sealed space measured by the measuring device. It is preferable to control the cooling temperature of the liquid, and it becomes possible to control the shape and the like of the liquid droplets minutely and with higher accuracy, so that it can be used for more liquid droplet optical devices.

When the atmospheric gas is aggregated into droplets, it must be controlled to a predetermined size as a shape necessary for an optical device such as the outer circumference of the meniscus of the droplet and the liquid surface outer shape forming a curved surface or a flat surface. In this case, it is necessary to efficiently form droplets with energy saving. This is shown in Patent Document 2 above. However, since the droplet has temperature dependency on optical characteristics, it is necessary to control the temperature of the droplet. In addition, by controlling the temperature of the droplets including the droplet support substrate, the droplet optical system can be controlled, and the effects of shrinkage and expansion of the droplet support substrate, which are different from the temperature dependence of the droplets, are also included. Highly efficient and accurate shape control is required with temperature control. Therefore, the droplet formation technology that combines the droplet formation technology and droplet temperature control, which performs the phase transition mechanism from gas to liquid by temperature control, including the temperature control for the temperature dependence of the optical material, directly the liquid Applies to optical members . Forming a droplet of the optical material, while maintaining, and in order to allow even temperature control of the droplet, and set the cooler to the local droplet locations, inside which collectively arranged, forming droplets and, Or it is set as the structure which hold | maintains a droplet. Thus, by integrating the cooling means to form droplets on predetermined minute locations using MEMs for temperature control a minute region, such as the shape of the minute control to droplets cooling hand stage it is possible to provide a droplet optical equipment which can be controlled.

  FIG. 1 is a diagram showing a configuration of a droplet optical device according to a first embodiment of the present invention. 1A is a cross-sectional view taken along line B-B ′ of FIG. 1B, and FIG. 1B is a cross-sectional view taken along line A-A ′ of FIG. According to the droplet optical device 1 of the present embodiment shown in the figure, a droplet formation tube 103 is provided on a glass substrate 101 so as to surround a droplet formation area 102, and further, a P-type semiconductor 104 and N The type semiconductors 105 are alternately arranged along the circumferential direction. Further, a radiator 106 is provided between one end of each P-type semiconductor 104 and one end of each N-type semiconductor 105, and between the other end of each P-type semiconductor 104 and the other end of each N-type semiconductor 105. Each is provided with a cooler 107. The P-type semiconductor 104, the N-type semiconductor 105, the radiator 106, and the cooler 107 are included in the thermoelectric exchanger 108. Further, a power supply line 109 for applying a voltage is provided between the P-type semiconductor 104 serving as the start end and the N-type semiconductor 105 serving as the end. As described above, the coolers 107 of the thermoelectric converter 108 are gathered around the droplet forming tube 103, and the radiators 106 are dispersedly arranged outside. The P-type semiconductor 104 and the N-type semiconductor 105 are made of a thermoelectric conversion material such as Bi-Te, and the radiator 106 and the cooler 107 are made of an electrode material such as Al, Au, Cu, and Ni.

  Next, how droplets are formed in the droplet optical apparatus of the present embodiment having the configuration as shown in FIG. 1 will be described below with reference to FIG. First, the type, temperature, and density of the surrounding gas to be agglomerated are measured, and the operation time of the cooler 107 is calculated in advance according to the dew point, the liquid amount of the droplets, and the growth time, and FIGS. ), The cooler 107 is operated for the calculated operation time, whereby the tube wall of the droplet forming tube 103 is cooled below the calculated dew point. Then, the nearby gas begins to aggregate on the tube wall of the droplet forming tube 103 and starts to become the droplet 120. As shown in (c) and (d) of the figure, the droplet 120 further grows over the entire droplet formation area 102 in the droplet formation tube 103 to form a droplet optical device. If necessary, the cooler 107 is operated to control the droplet temperature to control the droplet. As described above, as a droplet optical device, a droplet of an optical material can be accurately formed in a predetermined amount and in a predetermined shape at a predetermined location. In addition, hold in place, adjust the amount, change the shape, move the holding location, increase the number of types of droplet material as much as possible, and further control the temperature of the droplet, and these functions efficiently By controlling, it can be used for a wider variety of variable optical devices.

  Here, as a mechanism for forming atmospheric gas droplets, in using a phase change mechanism that aggregates atmospheric gas into droplets, the heat of liquid formation of the droplet support base material that forms and holds the droplets The physical characteristics need to be controlled. Therefore, according to the droplet optical device in the present embodiment, temperature control and heat capacity of the local thermal characteristics of the droplet support base material on which the droplet is formed and held are controlled. Hereinafter, it explains in detail using a drawing.

  FIG. 3 is a cross-sectional view showing a configuration of a droplet optical device according to the second embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components. In the droplet optical device 2 of the present embodiment shown in the same figure, thermoelectric converters 108 including a radiator 106 and a cooler 107 are arranged in an array on a droplet support base 121. A power supply line 109 for applying a voltage is provided between the P-type semiconductor 104 serving as the start end and the N-type semiconductor 105 serving as the end.

  Next, how droplets are formed in the droplet optical device 2 of the present embodiment having the configuration shown in FIG. 3 will be described below with reference to FIG. As shown in FIGS. 4A and 4B, the droplet support base 121 and the droplet optical device 2 of the present embodiment are connected. And as shown to (c) of the figure, a heat ray is irradiated to the area | regions other than the arbitrary droplet formation location in the droplet support base material 121 according to predetermined irradiation amount. Therefore, the irradiated region is heated to a predetermined temperature. As shown in (d) of the figure, when the entire droplet support substrate 121 is subsequently cooled by the cooler 107 of the droplet optical device 2, a temperature difference from the temperature in the heated region occurs, and the lower temperature Aggregation of droplets proceeds with priority in the region, and droplets 120 having a predetermined shape and size are formed. Next, as shown in (e) and (f) of the figure, the droplet optical device 2 of the present embodiment is separated from the droplet support base 121 and the liquid on the droplet support base 121 is separated. Drop formation is possible.

  In FIG. 4, the entire droplet support base material is cooled, and a portion where no droplet is formed is irradiated with heat rays to form a predetermined low temperature portion. FIG. 5 (a) to (c) As shown in the figure, by providing the thermoelectric converter 108 only at a location where a droplet is formed and lowering only that location, the droplet 120 having a predetermined shape and size can be formed at a predetermined location. Further, as shown in FIGS. 6A to 6C, a member 122 having a heat capacity difference is provided at a location on the back surface of the droplet support base 121 opposite to a location where droplets are formed in advance. By creating a portion having a different specific heat in the support base 121, a droplet 120 having a predetermined shape and size can be formed at the predetermined portion. Furthermore, as shown in FIG. 7, the size of the droplet 120 can be changed by changing the thickness of the member 122 having a difference in heat capacity. Further, as shown in FIGS. 8A to 8C, the members 122-1, 122-2 having a difference in heat capacity are reduced in area, and the member 122 having a difference in heat capacity at a location where the droplet 120 is formed. By providing the member 122-1 having a heat capacity difference larger than −2, the size of the droplet 120 can be reduced and the droplet 120 can be formed at a predetermined location. Therefore, the size in the horizontal direction and the size in the vertical direction of the droplet 120 can be adjusted by changing the area and thickness in which the member having the heat capacity difference is provided.

  In addition, a droplet material and a droplet support base material having predetermined optical transmission characteristics and reflection characteristics are applied. Furthermore, although the Peltier device which consists of a P-type semiconductor and an N-type semiconductor is shown as a thermoelectric converter, it can also be temperature-controlled by a heat pipe. Further, the cooling means shows a state where it is separated at the final stage, but when the shape of the droplet is further adjusted after formation, it is used for shape control in a connected state. Since the in-plane temperature distribution of the droplet support substrate quickly becomes uniform when the thermal conductivity is large, the thermal conductivity is required to be small so that the temperature distribution is not uniform. High-quality materials and porous structural materials containing a large amount of gas (space) are suitable. When droplets are formed at predetermined locations on the surface by imparting affinity or hydrophilicity to the droplet support substrate surface, the predetermined locations on the surface as in SAMs technology by micro stamping. However, it is possible to form droplets at predetermined locations on the surface even if hydrophilicity is imparted to the entire surface of the substrate by applying a surfactant or plasma modification. The formation efficiency can be increased.

Here, a thermoelectric conversion material, for example, one using BiTe as a main component (substitution / addition of Bi, Sb, In, Ga, Se, Te, etc.) is typical if the Peltier effect is used. N-type Si and P-type Si can also be used, and an SOI substrate can be used as an SOI substrate, and a thermoelectric conversion material BOX layer can be used as a droplet support layer. In order to find a high-performance material, a material having a high required performance index such as low thermal conductivity and good conductivity is preferable, but it is selected depending on suitability for process compatibility and stability performance. Next, a pattern of a metal material such as Al or Au that functions as an electrode, a cooler, and a radiator of the thermoelectric converter is formed. Then, it is covered with a passivation material such as SiO ₂ , Si ₃ N ₄ or Al ₂ O ₃ except for the external lead wiring electrode (bonding pad: not shown) region.

  FIG. 9 is a schematic sectional view showing a configuration of a droplet optical device according to the third embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components. In the droplet optical device 3 of the present embodiment shown in the figure, the droplet forming tube 103, the P-type semiconductor 104, the N-type semiconductor 105, and the like are different from the droplet optical device 1 of the first embodiment. The droplet forming area 102 is formed in a conical shape by making the thermoelectric exchanger 108 having the radiator 106 and the cooler 107 into a tapered shape and widening the opening. As shown in FIG. 5B, the droplet 120 can be formed more quickly by increasing the aperture ratio and narrowing the interval between the tube walls of the droplet forming tube 103. Note that the surface of the droplet forming tube 103 in contact with the cooler 107 is a prismatic surface, a pyramid surface, a cylindrical surface, a conical surface, a bobbin (barrel) mold surface, a medium aperture (reverse barrel) mold surface, or a free-form surface including an optical path. It may be to.

  FIG. 10 is a diagram showing a configuration of a droplet optical device according to the fourth embodiment of the present invention. 4A is a cross-sectional view taken along the line D-D ′ in FIG. 4B, and FIG. 4B is a cross-sectional view taken along the line C-C ′ in FIG. In the figure, the same reference numerals as those in FIG. 1 denote the same components. According to the droplet optical device 4 of the present embodiment shown in the figure, the cooler 107 is provided on the bottom surface of the droplet formation area 102 via the electric insulating layer 123, and heat is radiated to the outer peripheral side of the cooler 107. A membrane 206 is provided. Accordingly, the interval between the coolers 107 is narrowed to increase the cooling density, and the heat dissipating elements 106 are dispersed so as to spread to the outside and the heat dissipating efficiency is increased, so that the droplet formation efficiency is improved.

  FIG. 11 is a cross-sectional view showing a configuration of a droplet optical device according to the fifth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components. The droplet optical device 5 of the present embodiment shown in the figure is provided with, for example, the droplet optical device of the first embodiment described above in multiple stages (three stages in the present embodiment). In FIG. 9A, when cooling is started by the cooler of the second stage droplet optical device 124-2, the droplet 120 starts to form, and as shown in FIGS. A droplet 120 of the size and shape is formed. And as shown in (d) of the figure, if it cools only with the cooler of the droplet optical apparatus 124-3, the formed droplet 120 will move to the position of the droplet optical apparatus 124-3. In this way, by controlling each droplet optical device having a multi-stage structure, it is possible to perform droplet shape control and position movement.

  FIG. 12 is a cross-sectional view showing a configuration of a droplet optical device according to the sixth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components. In the droplet optical device 6 of the present embodiment shown in FIG. 6A, for example, the power supply line 109 in the droplet optical device of the first embodiment described above is connected to the P-type semiconductor 104 of the thermoelectric exchanger 108. Each of the N-type semiconductors 105 is provided. The droplet optical apparatus according to the present embodiment shown in FIG. 6B is obtained by providing the droplet optical apparatus according to the sixth embodiment in multiple stages (three stages in the present embodiment). Thus, by providing the power supply line 109 in each thermoelectric exchanger 108 and forming a multistage structure, it is possible to individually control the coolers of the thermoelectric exchanger arranged in an annular shape. Therefore, the optical axis of the formed droplet 120 can be tilted or the central axis position can be moved. (C) of the figure shows the droplet optical devices 125-1 to 125-6 of the sixth embodiment in multiple stages (here, six stages) along the bobbin (barrel) type surface of the droplet formation area. (D) of the figure is an example in which the droplet optical devices 125-1 to 125-3 of the sixth embodiment are arranged in multiple stages (here, three stages) along the conical surface of the droplet formation area. This is an example. In any of the examples shown in (c) and (d) of the figure, the optical axis of the formed droplet 120 can be tilted by individually controlling the coolers of the thermoelectric exchanger.

  FIG. 13 is a diagram showing a configuration of a droplet optical device according to the seventh embodiment of the present invention. 4A is a cross-sectional view taken along the line F-F ′ of FIG. 4B, and FIG. 4B is a cross-sectional view taken along the line E-E ′ of FIG. In the figure, the same reference numerals as those in FIG. 10 denote the same components. In the droplet optical device 7 according to the present embodiment shown in the figure, the droplet formation area 102 is closed by the transparent base material 127, and a droplet member supply / discharge path 126 communicating with the droplet formation area 12 is further provided. It has been. The droplet member supply / discharge path 126 is a supply / discharge path for introducing or discharging liquid or gas for forming droplets from the outside to the droplet forming area 102. According to the droplet optical device 7 of the seventh embodiment having such a configuration, liquid or gas is supplied to the droplet formation area 102 in order to form droplets via the droplet member supply / discharge passage 126. The liquid or gas is condensed by the cooler 107 of the thermoelectric exchanger 108 to form droplets, and the desired droplet 120 can be formed. When the liquid or gas is exchanged to form another droplet, the droplet is discharged from the droplet formation area 102 via the droplet member supply / discharge passage 126 to supply another liquid or gas. . Further, when the shape or size of the formed droplet 120 is changed, gas or liquid is further supplied to or discharged from the droplet formation area 102 via the droplet member supply / discharge path 126. In this way, the droplets once formed can be reused to form arbitrary droplets, and the utilization efficiency can be improved.

  FIG. 14 is a cross-sectional view showing the configuration of the droplet optical apparatus according to the eighth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 13 denote the same components. In the droplet optical device 8 of the present embodiment, as shown in FIG. 5A, the surface of the droplet 120 having a curved surface is irradiated with light and reflected, and the shape of the droplet 120 and the droplet 120 are also reflected. The reflected light path can be changed by controlling the liquid level position. Further, as shown in FIG. 5B, by providing a reflective film 128 on the bottom surface of the droplet formation area, the light irradiated into the curved droplet 120 is made to enter, and the incident light is liquid. The reflected light path can be changed by controlling the shape of the droplet 120 and the liquid surface position of the droplet 120 by being reflected by the reflective film 128 provided on the bottom surface of the droplet formation area. Further, as shown in FIG. 5C, in the droplet 120 formed by a member having a small surface tension, the droplet surface on which the meniscus forms a flat surface is irradiated with light and reflected, and the droplet 120 is also reflected. The reflected light path can be changed by controlling the liquid level position.

  FIG. 15 is a cross-sectional view showing the configuration of the droplet optical apparatus according to the ninth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 13 denote the same components. In the droplet optical device 9 according to the present embodiment shown in the figure, a piezoelectric film 129 is provided on a part of the wall surface constituting the droplet formation area 102. In the example shown in FIG. 5A, a piezoelectric film 129 is provided on the bottom surface of the droplet forming area 102, and a standing waveform is formed on the flat surface of the droplet 120 by the piezoelectric film 129. In the example shown in FIG. 5B, the piezoelectric film 129 is provided on the side surface of the droplet forming area 102, and the piezoelectric film 129 forms a standing waveform on the curved surface of the surface of the droplet 120. . The shape of the liquid surface of the droplet 120 of the droplet optical device created by the compression wave generated by the piezoelectric film 129 is mainly due to the surface tension or viscosity of the droplet, but these depend on the temperature, The temperature of the droplet 120 can be controlled by the cooler of the thermoelectric converter in the droplet optical apparatus of the present invention. As shown in the figure, the liquid droplet 120 resonates with the compression wave generated from the piezoelectric film 129 in contact with the liquid droplet 120 to form a standing wave. The standing wave shape of the droplet surface that resonates with the oscillation frequency of the piezoelectric film 129 can be obtained as a predetermined pattern that reflects light on the surface of the droplet 120 to cause light diffraction and interference. In addition, due to temperature changes of the droplet 120, the droplet surface tension, viscosity, and the like differ, and the standing wave shape changes. Furthermore, since not only the influence of the change of the droplet temperature due to the change of the ambient temperature but also the generation of heat due to the movement of the resonant droplet, the droplet 120 is controlled by a cooler that forms and holds the droplet. However, the compression wave generated from the piezoelectric film 129 in contact with the droplet 120 can resonate the shape of the liquid surface to form a predetermined standing wave.

  FIG. 16 is a cross-sectional view showing a configuration of a droplet optical device according to the tenth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 15 denote the same components. The droplet optical apparatus 10 of the present embodiment shown in the figure is a droplet shape control optical device by Electro Wetting, but includes a temperature control mechanism in which a control electrode 130 is disposed. In addition, such electrode patterns can be used to measure the physical properties of the formed droplets and control the temperature. In this way, using a droplet made of an electro wetting material, the shape of the droplet can be controlled by the electrode pattern. In this way, the shape of the droplet capacitance is electrostatically controlled by the electrode pattern. In addition, the infrared sensor which provided the function which detects infrared rays to an electrode pattern, integrated the droplet lens for infrared condensing, and the droplet 131 which consists of liquid crystal materials as shown in FIG. 133, a liquid crystal optical element provided with a drive electrode 134 or a transparent electrode pattern 135 and controlled by the drive electrode 134 or the transparent electrode pattern 135 can be used.

  FIG. 18 is a cross-sectional view showing the configuration of the droplet optical apparatus according to the eleventh embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 14 denote the same components. According to the droplet optical device 11 of the present embodiment shown in the figure, gas is aggregated and droplets are formed in the droplet formation area inside the cooler 107 arranged on the inclined surface of the inverted pyramid (inverted trapezoid). . Also, a prism image is generated by total reflection on the liquid and the cooler surface or reflection on the reflective film 128 provided on the cooling surface. The planar meniscus uses a planar region of a liquid having a low surface tension so that incident light is incident on a planar droplet. Therefore, droplet prism shape control and droplet temperature control can be performed.

  FIG. 19 is a cross-sectional view showing the configuration of the droplet optical apparatus according to the twelfth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 14 denote the same components. The droplet optical device 12 of the present embodiment shown in the figure is an example showing the thermal lens effect due to the temperature distribution inside the droplet 120. That is, the thermal lens effect can be greatly obtained by controlling the temperature of the cooler 107. Note that a droplet material that easily rises in temperature due to thermal energy caused by light passing through the droplet 120 and a droplet material that has a low thermal conductivity so that heat does not diffuse rapidly are preferable. As an application of a thermal lens, it is used for a thermal lens microscope or the like.

  FIG. 20 is a diagram showing a configuration of a droplet optical device according to the first embodiment of another invention. (A) of the figure is a plan view of the droplet optical device of the present embodiment, (b) of the figure is a plan view of the droplet optical device of the present embodiment after droplet formation, and (c) of FIG. ) Is a cross-sectional view taken along the line GG ′ of FIG. In the droplet optical device 100 of the present embodiment shown in the figure, a droplet support layer 203 is provided on a cavity 202 of a substrate 201 having a large specific heat, and a P-type semiconductor film 204, N is formed on the droplet support layer 203. A thermoelectric exchanger 208 configured to be integrated including a type semiconductor film 205, a heat dissipation film 206, and a cooling film 207 is arranged in an annular shape to form a thin film structure. Further, a power supply line 209 for applying a voltage is provided between the P-type semiconductor film 204 serving as the start end and the N-type semiconductor film 205 serving as the end. As described above, the cooling films 207 of the thermoelectric converter 208 are collectively arranged along the annular inner circle, so that the cooling density is high. Furthermore, the space between the PN members connecting the cooling film 207 and the heat dissipation film 106 of the thermoelectric exchanger 208 can be eliminated by the cavity 202, the heat capacity around the cooling film 207 can be reduced, and the heat conduction from the heat dissipation film 206 can be reduced. On the other hand, since the heat radiation film 206 is distributed along the annular outer circle and is in contact with the substrate 201 having a large specific heat, the heat radiation effect of the heat radiation film 206 is further enhanced. According to the droplet optical device 100 of the present embodiment having such a configuration, the droplet forming tube wall 210 surrounded by the cooling film 207 is cooled by the cooling film 207, and the nearby gas is dropped into the droplet forming tube wall. And a predetermined droplet can be formed. In addition, since temperature control can be performed quickly, the droplet 120 can be quickly formed into a predetermined shape, and fine shape control is also possible. The transparent support layer 203 can be set to be thin or thick depending on the light transmittance with a predetermined characteristic or the thickness with respect to the wavelength. In addition, the substrate 201 is etched from the pattern of the cavity portion 202 to the position reaching the droplet support layer 203 to form the cavity portion 202.

  FIG. 21 is a diagram showing a configuration of a droplet optical device according to the second embodiment of another invention. (A) of the figure is a plan view of the droplet optical device of the present embodiment, and (b) of the figure is a sectional view taken along the line H-H ′ of (b) of the same figure. In the figure, the same reference numerals as those in FIG. 20 denote the same components. The droplet optical device 200 according to the present embodiment shown in the same figure has the same configuration as that of the droplet optical device 100 according to the first embodiment shown in FIG. 20 in order to further detect liquid characteristics or control the liquid. The detection electrode 211 and the detection signal line 212 for extracting the detection signal from the detection electrode 211 are additionally arranged and integrated. The shape of the droplet 120 is not only controlled by the cooling film 207, but also the temperature and viscosity of the liquid film are detected by the detection electrode 211, and a liquid film made of, for example, an electrowetting material is used to charge the liquid film. The liquid film can be controlled. The detection electrode 211 is provided with a function of detecting infrared rays, and an infrared sensor in which an infrared condensing droplet lens is integrated, or a liquid crystal optical element controlled by the detection electrode 211 using droplets made of a liquid crystal material. You can also. Therefore, according to this embodiment, by providing an electrode layer or an electrode, more precise droplet control can be performed simultaneously with temperature control. As shown in FIG. 22, by integrating the detection signal line 214 for extracting the detection signal from the detector 213 and the detector 213 that monitors the type, temperature, density, and vapor pressure of the gas in the ambient atmosphere, the droplets are integrated. For measuring the type, temperature, density, and vapor pressure of the nearby gas, and setting the temperature of the cooler that condenses the gas (below the dew point) to increase the volume of the droplet according to the state change of the gas near the droplet By maintaining the cooling temperature and observing the degree of evaporation from the droplets, the cooling temperature necessary for holding the droplets can be set.

  FIG. 23 is a plan view showing a configuration of a droplet optical device according to a third embodiment of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. The droplet optical device 300 according to the present embodiment shown in the figure is configured such that the cooling films 207 are arranged to face each other in parallel, and the droplets 120 are formed in the droplet formation area in the facing gap. With such a pattern arrangement, the shape of the droplet can be formed efficiently, quickly and accurately.

  FIG. 24 is a diagram showing a configuration of a droplet optical device according to a fourth embodiment of another invention. (A) of the same figure is a top view of the droplet optical device of this Embodiment, (b) of the same figure is a J-J 'sectional view taken on the line (b) of the same figure. In the figure, the same reference numerals as those in FIG. 20 denote the same components. The droplet optical device 400 of the present embodiment shown in the figure is provided with a droplet member supply / discharge path 215 communicating with the droplet forming tube wall 210 surrounded by the cooling film 207. The droplet member supply / discharge path 215 is a supply / discharge path for introducing or discharging liquid or gas for forming droplets from the outside to the droplet forming tube wall 210. According to the droplet optical device of the fourth embodiment having such a configuration, liquid or gas is supplied to the droplet forming tube wall 210 to form droplets via the droplet member supply / discharge path 215. In order to form droplets, the liquid or gas is aggregated by the cooling film 207 of the thermoelectric exchanger 208, and the desired droplet 120 can be formed.

  FIG. 25 is a cross-sectional view showing a configuration of a droplet optical device according to a fifth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. In the droplet optical device 500 of the present embodiment shown in the figure, an elastic layer 216 using a thermal expansion / contraction member or a piezoelectric vibration member for moving the transparent support layer 203 up and down between the substrate 201 and the transparent support layer 203. Is provided. By uniformly moving the stretchable layer 216 up and down, the focal position of the lens of the droplet 120 formed by the droplet optical device 500 can be changed. In addition, the optical axis of the lens of the droplet 120 formed by the droplet optical device 500 can be tilted by tilting the stretchable width of the stretchable layer 216 unequally.

  FIG. 26 is a cross-sectional view showing a configuration of a droplet optical device according to a sixth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. In the droplet optical device 600 of the present embodiment shown in the same figure, an electrostatic electrode film 217 is provided so as to sandwich the substrate 201 and the transparent support layer 203. By varying the voltage value of the voltage applied between each of the electrostatic electrode films 217, (b) and (c) in the same figure are enlarged views of the portion surrounded by the dotted line in (a) of the same figure. As shown, the curvature of the formed droplet 120 is curved by the Coulomb force acting between the electrostatic electrode films 217, thereby changing the focal position of the lens of the droplet 120. Can do. As another mechanism for bending the transparent support layer 203, as shown in FIG. 27, the pressure in the cavity 202 is changed through the ventilation channel 219 communicating with the cavity 202 that is airtight with the transparent base material 218. However, the focal position of the lens of the droplet 120 can be changed by curving the curvature of the formed droplet 120.

  FIG. 28 is a diagram showing a configuration of a droplet optical device according to a seventh embodiment of another invention. (A) of the same figure is a top view of the example of application of the droplet optical device of this Embodiment, (b) of the figure is a K-K 'line sectional view of (b) of the same figure. In the figure, the same reference numerals as those in FIG. 23 denote the same components. The droplet optical device 700 of the present embodiment shown in the figure is an optical waveguide integrated with an optical path 220 set on the same plane as the droplet 120 in the opposing gap of the cooling film 207 that forms the droplet. is there. Therefore, since the influence of the temperature change of the droplet optical device in the optical waveguide can be controlled, it can be used stably and can be dealt with in the same substrate.

  FIG. 29 is a diagram showing a configuration of a droplet optical device according to an eighth embodiment of another invention. (A) of the same figure is a top view of the example of application of the droplet optical device of this Embodiment, (b) of the same figure is the L-L 'sectional view taken on the line of (b) of the same figure. In the figure, the same reference numerals as those in FIG. 22 denote the same components. In the droplet optical device 800 of the present embodiment shown in the figure, a plurality (three in this case) of the droplet optical devices 100 of the first embodiment are integrated on the same substrate and arranged in an array. Therefore, if a plurality of droplet optical devices according to this embodiment are arranged, a microlens array and a three-dimensional image device can be realized. However, in order to control a plurality of different shapes, it is also necessary to control different temperatures for each liquid lens. Therefore, when arranging a plurality, a mechanism for controlling the temperature of individual droplets is arranged to form an integrated droplet optical device. Note that a MEMS structure is suitable for stacking a plurality. In addition, in setting conditions for droplet formation, holding, and temperature control, a state detection mechanism such as ambient gas can be integrated.

  FIG. 30 is a cross-sectional view showing a configuration of a droplet optical device according to the ninth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 24 denote the same components. As shown in the figure, in the droplet optical device 900 of the present embodiment shown in the figure, different types (two types in the present embodiment) of the first droplet 120-1 and the second droplet 120 are used. -2 are laminated to form an optical system such as a compound lens. Specifically, the process of aggregating the gas is performed by controlling the temperature of the cooling film 207 in accordance with the properties of each type of gas. That is, different types of droplets are stacked and aggregated in descending order of the temperature of the cooling film 207 in descending order of the material having the high aggregation temperature. As described above, the droplet optical device according to the present embodiment shows a multi-component multilayer droplet. The first droplet is formed by aggregating the gas of the first droplet, and then the second droplet. Are condensed to form a second droplet on the first droplet. A structure other than the structure by MEMS as shown in FIG. Therefore, a droplet optical device capable of laminating many kinds of droplets widens the application range as an optical device.

  FIG. 31 is a cross-sectional view showing a configuration of a droplet optical device according to a tenth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. As shown in the figure, the droplet optical device 1000 according to the present embodiment shown in the figure is composed of two laminated lenses, each being integrated on a different substrate and bonded to each other. The example shown in (a) of the figure is a stack, (b) of the figure is a case where the back surfaces are joined together, and (c) of the figure is a case where the facing surfaces are joined, and the gas component in the cavity is defined as the outside. Can be set differently. In particular, the face-to-face junction type shown in FIG. 5C has a degree of freedom to manufacture two lenses from a short distance to a long distance regardless of the thickness of the substrate. As described above, by accumulating a plurality on the substrate, a wide variety of droplet optical systems can be realized with high accuracy.

  FIG. 32 is a cross-sectional view showing a configuration of a droplet optical device according to an eleventh embodiment of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. The droplet optical device 1100 according to the present embodiment shown in the same figure is controlled by controlling the temperature of the droplet 120 by the cooling film 207 when applied to a diaphragm mechanism for limiting the optical path to the variable shape by the variable shape opaque droplet 120. To do. An opaque droplet 120 is formed on the cooling film 207, and its shape and size are made variable by controlling the temperature of the cooling film 207, and the expansion, viscosity reduction, and surface tension of the droplet are caused by ambient temperature fluctuations and heat from light. Since the reduction occurs, the temperature is controlled with a cooler to obtain a predetermined shape. Thus, the present invention can be applied to a variable shape diaphragm by forming opaque droplets.

  FIG. 33 is a cross-sectional view showing a configuration of a droplet optical device according to a twelfth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. The droplet optical device 1200 of the present embodiment shown in the figure can be applied to a diffractive lens, variable shape diaphragm, shutter, and the like by forming opaque droplets 120.

  FIG. 34 is a cross-sectional view showing a configuration of a droplet optical device according to a thirteenth embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 31 denote the same components. The droplet optical device 1300 of this embodiment shown in the figure is a stack type device in which the back surfaces are joined to each other, and is applied to a diffraction lens, variable shape diaphragm, shutter, etc. by forming an opaque droplet 120. it can.

  FIG. 35 is a cross-sectional view showing a configuration of a droplet optical device according to a fourteenth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. The droplet optical device 1400 according to the present embodiment shown in the figure reflects on the surface of the droplet 120 and controls the shape of the droplet, thereby changing the light angle of light incident on the droplet 120 to change the reflection angle. It can be applied to changing Specifically, since the reflective film layer 221 is coated on the droplet support layer 203, the present invention can be applied to a scanning device that changes the shape of the droplet 120 and changes the reflected light path.

  FIG. 36 is a cross-sectional view showing the configuration of a droplet optical device according to a fifteenth embodiment of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. A droplet optical device 1500 according to the present embodiment shown in the figure is a MEMS in which a piezoelectric material layer 222 is combined. The standing wave shape can be changed not only as a means for obtaining a variable diffraction interference pattern with a variable oscillation frequency but also by changing the temperature to a predetermined temperature.

  FIG. 37 is a cross-sectional view showing a configuration of a droplet imaging device of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. The droplet imaging device 1600 of the present invention shown in the figure is configured by integrating the droplet optical device 100 of the first embodiment and the imaging device 230. Specifically, as shown in the figure, the patterns of the substrates are arranged and the substrates are bonded so that the droplet 120 of the droplet optical device 100 can be formed in the light receiving path of the image sensor 223. Although not shown, the control circuit can also be integrated on the same substrate. As described above, by integrating with high accuracy, variation in the thermal influence from the image sensor can be reduced, so that temperature control of the droplets can be accurately performed with little variation. Further, when integrated, not only the whole system is simplified, but also the control circuit can be integrated, so that it is simple and the reliability is improved.

  FIG. 38 is a cross-sectional view showing a configuration of a droplet light source device of another invention. In the figure, the same reference numerals as those in FIG. 20 denote the same components. The droplet light source device 1700 of the present invention shown in the figure is configured by integrating the droplet optical device 100 of the first embodiment and the radiation light source device 240. Specifically, as shown in FIG. 5A, the patterns of the substrates are arranged and the substrates are bonded so that the droplet 120 of the droplet optical device 100 can be formed in the light emission path of the light emitting diode 224. Although not shown, the control circuit can also be integrated on the same substrate. In this way, by integrating with high accuracy, the variation in the thermal effect from the radiation source can be reduced, so that the temperature control of the droplet can be accurately performed with little variation. Further, when integrated, not only the whole system is simplified, but also the control circuit can be integrated, so that it is simple and the reliability is improved.

  In addition, this invention is not limited to the said embodiment, It cannot be overemphasized that various deformation | transformation and substitution are possible if it is description in a claim.

It is a figure which shows the structure of the droplet optical apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing which shows a mode that a droplet is formed in the droplet optical apparatus of 1st Embodiment. It is sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 2nd Embodiment of this invention. It is sectional drawing which shows a mode that a droplet is formed in the droplet optical apparatus of 2nd Embodiment. It is sectional drawing which shows another structure of the droplet optical apparatus which concerns on the 2nd Embodiment of this invention. It is sectional drawing which shows another structure of the droplet optical apparatus which concerns on the 2nd Embodiment of this invention. It is sectional drawing which shows another structure of the droplet optical apparatus which concerns on the 2nd Embodiment of this invention. It is sectional drawing which shows another structure of the droplet optical apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 3rd Embodiment of this invention. It is a figure which shows the structure of the droplet optical apparatus which concerns on the 4th Embodiment of this invention. It is sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 5th Embodiment of this invention. It is sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 6th Embodiment of this invention. It is a figure which shows the structure of the droplet optical apparatus which concerns on the 7th Embodiment of this invention. It is sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 8th Embodiment of this invention. It is sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 9th Embodiment of this invention. It is sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 10th Embodiment of this invention. It is sectional drawing which shows another example of adaptation of the droplet optical apparatus which concerns on the 10th Embodiment of this invention. It is sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 11th Embodiment of this invention. It is sectional drawing which shows the structure of the droplet optical apparatus which concerns on the 12th Embodiment of this invention. It is a figure which shows the structure of the droplet optical device which concerns on 1st Embodiment of another invention. It is a figure which shows the structure of the droplet optical device which concerns on 2nd Embodiment of another invention. It is a figure which shows another structure of the droplet optical device which concerns on 2nd Embodiment of another invention. It is a top view which shows the structure of the droplet optical device which concerns on 3rd Embodiment of another invention. It is a figure which shows the structure of the droplet optical device which concerns on 4th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 5th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 6th Embodiment of another invention. It is sectional drawing which shows another structure of the droplet optical device which concerns on 6th Embodiment of another invention. It is a figure which shows the structure of the droplet optical device which concerns on 7th Embodiment of another invention. It is a figure which shows the structure of the droplet optical device which concerns on 8th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 9th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 10th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 11th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 12th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 13th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 14th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet optical device which concerns on 15th Embodiment of another invention. It is sectional drawing which shows the structure of the droplet imaging device of another invention. It is sectional drawing which shows the structure of the droplet light source device of another invention. It is sectional drawing which shows the structure of the conventional droplet optical apparatus. It is sectional drawing which shows another structure of the conventional droplet optical apparatus.

Explanation of symbols

1-12; droplet optical device,
100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300, 1400, 1500; droplet optical device, 101, 201; glass substrate,
102, 202; droplet formation area, 103, 203; droplet formation tube,
104, 204; P-type semiconductor, 105, 205; N-type semiconductor,
106,206; radiator, 107,207; cooler,
108, 208; thermoelectric exchanger, 109, 209; power supply line,
120; droplet, 210; droplet formation tube wall, 211; detection electrode,
212, 214; detection signal line, 213; detector,
215; droplet member supply / discharge path, 216; elastic layer, 217; electrostatic electrode film,
218; transparent substrate, 219; vent flow path, 220; optical path,
221; reflective film layer, 222; piezoelectric material layer, 223; image sensor,
224; light emitting diode, 1600; droplet imaging device,
1700; droplet light source device.

Claims (13)

A cooling means for aggregating the optical material in the atmosphere or the sealed space to cool a droplet formation area for forming droplets as optical members ;
Temperature control means for controlling the temperature of the cooling means ,
The temperature of the cooling means is controlled by the temperature control means to form liquid droplets by aggregating the liquid droplet material in the liquid droplet formation area, and the liquid shape as an optical member is changed by changing the shape of the liquid droplets. A droplet optical device characterized by changing the optical characteristics of the droplet. A cooling unit for aggregating optical materials in an atmosphere or a sealed space to cool a droplet formation area for forming droplets as an optical member, and a temperature control unit for controlling the temperature of the cooling unit are provided in multiple stages. ,
By controlling the temperature of the cooling means at each stage by the temperature control means at each stage, the droplet material is aggregated in the droplet formation area to form droplets, and the position of the droplets is changed. A droplet optical apparatus characterized in that the optical characteristics of the droplet as an optical member are changed. 3. The droplet optical device according to claim 1, wherein the temperature control unit controls the temperature of the cooling unit to hold the droplets formed in the droplet formation area . Claims, characterized supplied Jo Tokoro optical material during or enclosed space atmosphere, or discharging liquid droplets material during or enclosed space atmosphere of providing a droplet material supply discharge path for performing at least one The droplet optical device according to any one of 1 to 3 . The droplet optical apparatus according to claim 1, wherein the cooling unit is a thermoelectric converter or a heat pipe.   It has a heat ray irradiating means for irradiating only a predetermined portion of the droplet forming area with a heat ray, the whole of the droplet forming area is cooled by the cooling means, and the predetermined portion is irradiated by the heat ray irradiating means, thereby The droplet optical apparatus according to claim 1, wherein the shape of the droplet is controlled by causing a difference.   A heat capacity member is provided at a predetermined location in the droplet formation area, and the shape of the droplet is controlled by causing a temperature difference so that the heat capacity is different from the predetermined location in the droplet formation area. The droplet optical device according to claim 1. 8. The droplet optical device according to claim 7, wherein a shape of a droplet formed at a predetermined position of the droplet formation area is controlled by changing a thickness or a set area of the heat capacity member. Droplet optical device according to any one of claims 1-8, characterized in that the set placing said cooling means to said droplet formation area. Droplet optical device according to any one of claims 1-8, characterized in that arranged separately said cooling means at a position to form droplets. Droplet optical device according to any one of claims 1 to 10, wherein placing the cooling means flat. Said cooling means, prismatic surface, a pyramid surface, cylindrical surface, conical surface, any one of claims 1 to 10, characterized in that the set arranged on the bobbin-type surface, middle drawing die surface or a free curved surface on the surface The droplet optical device according to 1 . The measuring device for measuring the temperature and density of the gas in the atmosphere or in a closed space provided, based on the temperature and density of the gas during or enclosed space atmosphere was measured by the measuring device, the temperature control means the cooling The droplet optical device according to any one of claims 1 to 12 , wherein a cooling temperature of the means is controlled .

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