JP5352537B2 - Deposition equipment - Google Patents

Description

The present invention relates to a film forming apparatus using sputtering, and more particularly to a sputtering apparatus capable of forming a film at a high speed with little damage to an organic film such as an organic EL film.

  In recent years, organic EL elements have attracted attention as display elements or illumination elements. As shown in FIG. 10, the device structure of the organic EL element typically has a lower electrode directly on a substrate 1 made of glass or the like, or on a substrate 1 on which a TFT element for active matrix driving is formed and passivated. 2, a hole injection layer 3, a hole transport layer 4, a light emitting layer 5, an electron transport layer 6, an electron injection layer 7 and an upper electrode 8 are stacked. In addition, there is a top anode type in which a lower electrode 2, an electron injection layer 7, an electron transport layer 6, a light emitting layer 5, a hole transport layer 4, a hole injection layer 3 and an upper electrode 8 are laminated as shown in FIG.

  As another classification method, because of the difference in the direction of extracting light (arrow), a transparent lower electrode 2-1 is used for the lower electrode 2 and a reflective upper electrode 8-1 such as Al is used for the upper electrode 8 as shown in FIG. A bottom emission type, and a top emission type using a reflective lower electrode 2-2 such as Al for the lower electrode 2 and a transparent upper electrode 8-2 for the upper electrode. The hole transport layer 4, the light emitting layer 5, and the electron transport layer 6 are organic films 9, and the hole injection layer 3 and the electron injection layer 7 are made of an organic film doped with metal or the like, or an inorganic film.

  In the case of the bottom emission type of FIG. 12, a normal vapor deposition method is used for forming the electron injection layer 7 and the upper reflective electrode 8-1 on the organic film 9. Specifically, there are many examples in which a deposited film of LiF is used for the electron injection layer 7 and a deposited film of Al, Ag, or the like is used for the upper electrode 8-1. In the case of the top emission type of FIG. 13, the transparent upper electrode 8-2 is usually formed by sputtering, but the electron injection layer 7 is formed by vapor deposition.

  Specifically, it is often the case that the electron injection layer 7 is a thin and translucent deposited film such as Mg-Ag alloy, and the transparent upper electrode 8-2 is a sputtered film of IZO or ITO. As described above, both the bottom emission type and the top emission type employ the vapor deposition method for forming the film on the organic film 9. The reason why the vapor deposition method is employed for the film formation on the organic film 9 is that the damage to the organic film 9 is small because the vapor deposition particles are neutral and low energy particles.

  On the other hand, the sputtering method generates high-energy ions, particles, and secondary electron beams. Therefore, if the film is formed directly on the organic film 9 by the sputtering method, the organic film 9 is damaged, and the normal light emission of the organic EL Can no longer be obtained. Therefore, when the sputtering method is employed, an electron injection layer 7 such as Mg-Ag formed by the vapor deposition method is used as a buffer layer (buffer), or a sputtering device that is specially devised to suppress damage is used. Must be used.

  Various sputtering apparatuses that suppress damage to the organic film 9 have been proposed. For example, Patent Document 1 uses a pair of opposed targets and magnetic field generating means, and an opposed target sputtering apparatus that arranges a substrate at a position facing a space between the targets. Patent Document 2 proposes an apparatus in which a grit electrode having a ground potential or a positive potential or an aperture having an opening smaller than the target is provided between the target and the substrate. By using these methods, it is possible to eliminate or reduce the influence of high energy ions and particles and secondary electron beams generated by the sputtering method.

  However, these methods have a problem that the film formation rate is inferior to that of a normal sputtering method. Therefore, as described in Patent Document 3, after passing the substrate through the side of the opposed target type sputtering unit composed of the first and second targets and forming the film with little damage, the parallel plate type composed of the third target Passing through a position facing the sputter unit and laminating a thin film at a high deposition rate, or providing a grit electrode movable between the target and the substrate as described in Patent Document 4, the grid electrode is connected to the target and the substrate. After a thin film is formed for a certain period of time between the target and the substrate, the thin film is further formed without a grid electrode interposed between the target and the substrate, thereby achieving both low damage and high speed film formation.

JP 10-255987 A JP 10-158821 JP2007-39712 JP2007-46124

  The substrate size at the time of manufacturing the organic EL display device has been increased year by year, and high-speed film formation on a large-area substrate has been demanded for sputtering apparatuses. On the other hand, it is necessary to reduce the size of the equipment as much as possible in order to reduce the scale of capital investment. Although it is considered that the method of Patent Document 3 can cope with high-speed film formation on a large-area substrate, since two sputtering methods are used in combination, an increase in the size of the apparatus is inevitable. In the method of Patent Document 4, too, the grit electrode is taken in and out, so the size of the apparatus cannot be avoided.

  An object of the present invention is to provide a sputtering apparatus that can achieve both low damage and high-speed film formation with the same apparatus dimensions as conventional ones, and to improve productivity.

  The present invention is a film forming apparatus for solving the above-described problems, and is based on the first sputtering that does not damage the organic film or the like by first using the movable shield electrode on the organic EL film or the like. Film formation is performed, and then film formation by second sputtering is performed, which enables high-speed film formation without using a movable shield electrode. Further, as another aspect of the apparatus, in the apparatus that can perform sputtering on two substrates with one apparatus, the first sputtering and the second sputtering are alternately performed by using one movable shield electrode. Then, two substrates are formed in parallel. The configuration of a typical apparatus is as follows.

  In the first means, a target electrode in which a target material is disposed on a first surface in a vacuum chamber and a substrate electrode in which a substrate is disposed on a first surface are disposed opposite to each other and disposed on a second surface of the target electrode. A magnetron is generated on a part of the target material by a magnetron, and the target electrode material is sputtered by scanning the magnetron on the second surface of the target electrode, and the target material is formed on the substrate. In the oscillating magnetron sputtering apparatus, a movable shield electrode for confining the magnetron plasma is disposed between the target material, and the movable shield electrode has an opening on the target material side and the substrate side in a closed surface. Having a slit through which sputtered particles from a magnetron plasma pass, First, the magnetron and the movable shield electrode are synchronized to form a film on the plate, and then the movable shield electrode is placed outside the target area, and the magnetron is scanned to perform the sputtering film formation. The film forming apparatus is characterized in that it performs.

  In the second means, the first and second target electrodes having the target material disposed on the first surface in the vacuum chamber and the first and second substrate electrodes having the substrate disposed on the first surface are opposed to each other. A magnetron plasma is generated in a part of the first and second target electrodes by the first and second magnetrons disposed on the second surfaces of the first and second target electrodes, and the magnetron is The first target and the second target material are sputtered by scanning the back surfaces of the first and second target electrodes, and the first target is applied to the first substrate disposed on the first substrate electrode. In the oscillating magnetron sputtering apparatus for depositing a material and depositing the second target material on the second substrate disposed on the second substrate electrode, the first or second plate A movable shield electrode for confining the magnetron plasma with the get material is disposed, and the movable shield electrode is open on the first or second target material side and closed on the first or second substrate side. The first target material is scanned in synchronization with the first magnetron and the movable shield electrode, and a first sputtering film is formed by having a slit through which sputtered particles from the magnetron plasma pass in the plane. In this case, the second target is scanned with the second magnetron without using the movable shield electrode, and a second sputtering film is formed. Subsequently, the movable shield electrode is moved to the second target. The second target material is synchronized with the second magnetron and the movable shield electrode. And scanning the first magnetron without using the movable shield electrode to perform the second sputtering film formation. Is a film forming apparatus characterized by

  By the first means, it is possible to realize a sputtering apparatus capable of achieving both suppression of damage to the sample and high-speed film formation without increasing the size of the film formation apparatus. By the second means, a sputtering apparatus with higher throughput can be realized.

It is a cross-sectional structure of the sputtering apparatus of this invention. It is the top view which looked at the target surface side inside the vacuum chamber of the sputtering device of this invention. It is the top view which looked at the rocking | fluctuation magnetron side outside the vacuum chamber of the sputtering device of this invention. It is drawing explaining the sputtering method with little damage with respect to the film | membrane in the 1st Example of this invention. It is drawing explaining the sputtering method of the high-speed film-forming in 1st Example of this invention. It is the top view which looked at the target surface side inside a vacuum chamber in the 1st process of the sputtering device of the 2nd Example of this invention. It is the top view which looked at the rocking | fluctuation magnetron side outside the vacuum chamber in the 1st process of the sputtering device of the 2nd Example of this invention. It is the top view which looked at the target surface side inside a vacuum chamber in the 2nd process of the sputtering device of the 2nd Example of this invention. It is the top view which looked at the rocking | fluctuation magnetron side outside the vacuum chamber in the 2nd process of the sputtering device of the 2nd Example of this invention. It is an example of a top cathode type organic EL element structure. It is an example of a top anode type organic EL element structure. It is an example of a bottom emission type organic EL element structure. It is an example of a top emission type organic EL element structure.

  Hereinafter, embodiments of the present invention will be described in detail based on examples.

  The first embodiment is an oscillating magnetron sputtering apparatus having one sputtering target and a movable shield electrode. The forward path when scanning the magnetron is a low-damage sputtering film formation by synchronizing the magnetron and the movable shield electrode. The return path relates to an apparatus for performing normal parallel plate type sputtering film formation without synchronizing the magnetron and the movable shield electrode.

  FIG. 1 shows a cross-sectional structure of the basic configuration of the sputtering apparatus of the present invention. In the vacuum chamber 10, a target 11, a target electrode 12, a movable shield electrode 13, a fixed shield electrode 14 around the target 11, a sample substrate 15, and a substrate electrode 16 are arranged. Although not shown, a transport mechanism for taking in and out the substrate is provided. On the other hand, outside the vacuum chamber 10, an oscillating magnetron 17 is disposed on the back surface of the target electrode 12 exposed to the atmosphere side, and a local magnetron plasma 20 is generated on the target. The movable shield electrode 13 has a structure in which the surface of the target 11 is fully opened and a narrow slit is formed on the substrate electrode 16 side, and the magnetron plasma 20 is confined.

  FIG. 2 is a plan view of the target 11 surface side inside the vacuum chamber 10. The movable shield electrode 13 has a rectangular shape in which a thin slit is formed, and can scan the surface of the target 11 from end to end. FIG. 3 is a plan view seen from the oscillating magnetron 17 side outside the vacuum chamber 10. The oscillating magnetron 17 has an S-pole magnet group 18 and an N-pole magnet group 19 arranged in a rectangular shape, and generates a magnetic field along the oscillating direction. The swing (scanning) range is from end to end of the target 11. By swinging up and down, the entire surface of the target can be sputtered uniformly and can be scanned synchronously with the movable shield electrode 13. ing.

  This drawing illustrates a method using a target 11 and a substrate electrode 16 installed vertically in a vertical vacuum chamber, but a sputtering up method in which the target 11 is below and the substrate electrode 16 is above, The basic configuration is the same in the sputter down system in which the target 11 is on the top and the substrate electrode 16 is on the bottom.

  FIG. 4 shows a first stage film formation process (outward path) after a sample substrate (not shown) is carried into the vacuum vessel 1. First, the movable shield electrode 13 and the oscillating magnetron 17 work together to start film formation from the upper end side of the target 11. The magnetron plasma 20 closed by the magnetron magnetic field is confined in the movable shield electrode 13, traps ions and secondary electrons, and suppresses damage to the sample substrate (not shown). The movable shield electrode 13 and the oscillating magnetron 17 are scanned synchronously along the front and back of the target electrode 12 and reach the lower end of the target 11 to complete the first stage film formation. The film formation speed in the first stage is slow because the magnetron plasma 20 is covered by the movable shield electrode 13 and is formed only from a thin slit. However, it is only necessary to form a film thickness of about 10 nm here. Next, as shown in FIG. 5, this time, only the oscillating magnetron 17 is scanned upward, the movable shield electrode 13 is kept on standby and sputtering is performed at a normal high deposition rate, and the remaining required film thickness is set. Film formation (return path). By performing this two-stage film formation, it is possible to achieve both suppression of damage to the sample and high-speed film formation. In addition, the movable shield electrode 13 returns to the initial position while the sample substrate (not shown) is replaced after the film formation is completed, and thus the above-described two-stage film formation can be performed repeatedly.

  The second embodiment relates to an oscillating magnetron sputtering apparatus having two sputtering targets, one movable shield electrode, and two oscillating magnetrons in one vacuum chamber.

  First, as shown in FIGS. 6 and 7, the first target electrode 21 is scanned in synchronization with the oscillating magnetron 17 and the movable shield electrode 13 to perform the first stage sputtering film formation with low damage. During this time, the second target electrode 22 is carried into the vacuum chamber 10 one before and a sample substrate (not shown) that has already undergone the first stage of film formation is scanned only for the magnetron 17 to form a high film. Sputter deposition at high speed.

  Subsequently, the sample substrate (not shown) on which the second stage of film formation has been completed is taken out from the vacuum chamber 10 and a new sample substrate (not shown) is carried in. To the target electrode 22 side. In addition, since the board | substrate is taken in / out to a vacuum tank through a preliminary tank (conveyance tank), sputtering can be performed without breaking the vacuum of a vacuum tank.

  Then, as shown in FIGS. 8 and 9, only the oscillating magnetron 17 is scanned on the first target electrode 21 to perform the second stage sputtering film formation at a high film formation speed, and the second target electrode 22 is oscillated. The magnetron 17 and the movable shield electrode 13 are scanned synchronously to form a film with low damage. When the film formation is completed, the sample substrate (not shown) is taken in and out, and the movable shield electrode 13 returns to the first target electrode 21 side and returns to the initial position.

  In this way, the first target electrode 21 and the second target electrode 22 are alternately subjected to low-damage, two-stage film formation of low-speed film formation and high-speed film formation, thereby suppressing damage to the sample and high-speed film formation. It is possible to realize a sputtering apparatus that achieves both.

  The present invention is a sputtering apparatus capable of forming a film at high speed with low damage on an organic layer such as an organic EL.

DESCRIPTION OF SYMBOLS 1 ... Substrate 2 ... Lower electrode 2-1 ... Transparent lower electrode 2-2 ... Reflective lower electrode 3 ... Hole injection layer 4 ... Hole transport layer 5 ... Light emitting layer 6 ... Electron transport layer 7 ... Electron injection layer 8 ... Upper electrode 8 -1 ... reflective upper electrode 8-2 ... transparent upper electrode 10 ... vacuum chamber 11 ... target 12 ... target electrode 13 ... movable shield electrode 14 ... fixed shield electrode 15 ... sample substrate 16 ... substrate electrode 17 ... oscillating magnetron 18 ... S pole magnet group 19 ... N pole magnet group 20 ... magnetron plasma 21 ... first target 22 ... second target.

Claims (3)

A target electrode in which a target material is disposed on a first surface in a vacuum chamber and a substrate electrode in which a substrate is disposed on a first surface are opposed to each other, and the target is formed by a magnetron disposed on a second surface of the target electrode. Oscillating magnetron sputtering in which a magnetron plasma is generated in a part of the material, the target electrode material is sputtered by scanning the magnetron on the second surface of the target electrode, and the target material is formed on the substrate. In the device
A movable shield electrode for confining the magnetron plasma between the target material and the target material;
The movable shield electrode has an opening on the target material side and a slit on the substrate side for allowing sputtering particles from magnetron plasma to pass through in a closed surface;
First, the film formation on the substrate is performed by performing the sputtering film formation in synchronization with the magnetron and the movable shield electrode, and then the movable shield electrode is made to stand by outside the target area, and the magnetron is scanned to perform the sputtering film formation. A film forming apparatus characterized by performing: A first and second target electrode having a target material disposed on a first surface and a first and second substrate electrode having a substrate disposed on a first surface are disposed opposite to each other in a vacuum chamber. Magnetron plasma is generated in a part of the first and second target electrodes by the first and second magnetrons disposed on the second surface of the two target electrodes, and the first and second magnetrons are The first target and the second target material are sputtered by scanning the back surfaces of the first and second target electrodes, and the first target is applied to the first substrate disposed on the first substrate electrode. In an oscillating magnetron sputtering apparatus that deposits a material and deposits the second target material on the second substrate disposed on the second substrate electrode,
A movable shield electrode for confining the magnetron plasma between the first and second target materials;
The movable shield electrode has an opening on the first or second target material side and a slit on the first or second substrate side for allowing sputtering particles from magnetron plasma to pass in a closed surface;
When the first target material is scanned in synchronism with the first magnetron and the movable shield electrode and the first sputtering film is formed, the second target is moved to the movable shield electrode. The second sputtering film is formed by scanning with the second magnetron without using
Subsequently, the movable shield electrode is moved to the second target electrode side, the second target material is scanned in synchronization with the second magnetron and the movable shield electrode, and the first sputtering process is performed. A film forming apparatus characterized in that when the film is formed, the first target material is scanned with the first magnetron without using the movable shield electrode to perform the second sputtering film formation.   The film formation apparatus according to claim 1, wherein the second sputtering film formation is performed at a higher speed than the first sputtering film formation.

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