JP5348408B2 - Physical quantity detection device, physical quantity detection device abnormality diagnosis system, and physical quantity detection device abnormality diagnosis method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a physical quantity detector for performing reliable abnormality diagnosis/output, an abnormality diagnosis system of the physical quantity detector, and an abnormality diagnostic method of the physical quantity detector. <P>SOLUTION: An angular velocity detector 1 (an example of the physical quantity detector) includes a gyro sensor element 100, a detection circuit 30 for generating a detection signal according to angular velocity based on an output signal of the gyro sensor element 100, an abnormality flag generation section that detects the existence of an abnormality of one or more monitoring object signals 50 to be monitored and generates an abnormality flag signal showing whether there is an abnormality in at least a part of the monitoring object signal 50, and an abnormality determination output section for generating and outputting, based on the abnormality flag signal, an abnormality determination signal 82 showing whether there is an abnormality in operation of the angular velocity detector. Based on the abnormality flag signal for a predetermined time or longer after the abnormality flag signal varies from a value showing the abnormality to a value showing the normality, the abnormality determination output section changes the abnormality determination signal 82 from the value showing the abnormality to the value showing the normality and outputs it. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a physical quantity detection device, an abnormality diagnosis system for a physical quantity detection device, an abnormality diagnosis method for a physical quantity detection device, and the like.

  Conventionally, physical quantity detection devices that detect various physical quantities are known. For example, an angular velocity detection device that detects an angular velocity as a physical quantity is known, and various electronic devices and systems that are equipped with the angular velocity detection device and perform predetermined control based on the angular velocity detected by the angular velocity detection device are widely used. ing. For example, in a vehicle traveling control system for an automobile, traveling control for preventing a side slip of the automobile is performed based on an angular velocity detected by an angular velocity detector.

  In these electronic devices and systems, erroneous control is performed when the physical quantity detection device breaks down. Therefore, measures such as turning on a warning lamp are taken when there is a failure. Various techniques for performing failure diagnosis of the physical quantity detection device have been proposed. For example, Patent Document 1 describes a sensor circuit including an abnormality detection circuit that detects an abnormality of an offset voltage.

JP 2007-57262 A

  The abnormality detection circuit described in Patent Document 1 outputs an abnormality determination signal that indicates abnormality immediately when the offset voltage becomes abnormal temporarily, and outputs an abnormality determination signal that indicates normality immediately when the offset voltage returns to normal. It is configured as follows.

  On the other hand, a signal delay occurs in a detection circuit serving as a path for outputting a detection signal to the outside of the physical quantity detection device (sensor device) based on a signal from the physical quantity detection device (sensor element). For example, in a detection circuit that converts an alternating current signal output from a vibrator into a direct current through a low-pass filter or the like and outputs it, a delay of about several milliseconds may occur.

  Therefore, in the abnormality detection circuit described in Patent Document 1, the abnormality detection circuit is configured even though the output from the detection circuit of the physical quantity detection device (sensor device) shows an abnormal value due to the signal delay in the detection circuit. There is a possibility of outputting an abnormality determination signal indicating normality. The occurrence of such a phenomenon may cause a problem in applications that require high reliability.

  The present invention has been made in view of the above problems, and according to some aspects of the present invention, a physical quantity detection device capable of more reliable abnormality determination output and an abnormality of the physical quantity detection device An abnormality diagnosis method for a diagnosis system and a physical quantity detection device can be provided.

(1) A physical quantity detection device according to the present invention includes:
A physical quantity detecting device for detecting a physical quantity and outputs a signal corresponding to the magnitude of the detected said physical quantity,
A detection circuit that generates a detection signal corresponding to the physical quantity based on an output signal of the physical quantity detection element;
The circuit included in the physical quantity detection device detects the presence or absence of abnormality of one or more monitoring target signals to be monitored, and generates an abnormality flag signal indicating whether or not at least a part of the monitoring target signal is abnormal An abnormal flag generator to
An abnormality determination output unit that generates and outputs an abnormality determination signal indicating the presence or absence of an abnormality of the physical quantity detection device based on the abnormality flag signal;
The abnormality determination output unit converts the abnormality determination signal from a value indicating abnormality based on the abnormality flag signal over a predetermined time after the abnormality flag signal changes from a value indicating abnormality to a value indicating normality. The output is changed to a value representing normality.

  The predetermined physical quantity is, for example, angular velocity, acceleration, geomagnetism, pressure or the like.

  According to the present invention, after the abnormality flag signal has changed from a value representing abnormality to a value representing normality, the abnormality determination signal is represented as normal from the value representing abnormality based on the abnormality flag signal over a predetermined time. Therefore, even if the abnormality flag signal changes to a value indicating normality, the abnormality determination signal does not change to a value indicating normality for at least a predetermined time. Therefore, the possibility that an abnormality determination signal indicating normality will be output is reduced even though the detection signal output from the detection circuit indicates an abnormal value. Therefore, it is possible to realize a physical quantity detection device that can output an abnormality determination output with higher reliability.

(2) This physical quantity detection device
The abnormality determination output unit, after the abnormality flag signal has changed from a value indicating abnormality to a value indicating normality, after the value indicating normality continues for the predetermined time or longer, the abnormality determination signal is a value indicating abnormality. The value may be changed to a value indicating normal and output.

  According to the present invention, after the abnormality flag signal has changed from a value representing abnormality to a value representing normality, and after the value representing normality has continued for a predetermined time or longer, the abnormality determination signal is represented from the value representing abnormality to normal. Since the value is output after being changed to a value, even if the abnormality flag signal changes to a value indicating normality, the abnormality determination signal does not change to a value indicating normality for at least a predetermined time. In addition, the abnormality determination signal does not change to a value indicating normality even if the abnormality flag signal has a value indicating normality for a time that is less than the predetermined time. Therefore, the possibility that an abnormality determination signal indicating normality will be output is reduced even though the detection signal output from the detection circuit indicates an abnormal value. Therefore, it is possible to realize a physical quantity detection device that can output an abnormality determination output with higher reliability.

(3) This physical quantity detection device
The detection circuit generates a detection signal corresponding to the physical quantity through a low-pass filter,
The predetermined time may be equal to or longer than a minimum group delay time in a frequency band from a direct current to a cutoff frequency of the low-pass filter.

  According to the present invention, since the predetermined time is equal to or longer than the minimum group delay time in the frequency band from the direct current of the low-pass filter to the cutoff frequency, the detection signal output from the detection circuit shows an abnormal value. The possibility of outputting an abnormality determination signal indicating normality is further reduced. Therefore, it is possible to realize a physical quantity detection device that can output an abnormality determination output with higher reliability.

(4) This physical quantity detection device
The detection circuit generates a detection signal corresponding to the physical quantity through a low-pass filter,
The predetermined time may be longer than the maximum group delay time of the low-pass filter.

  According to the present invention, since the predetermined time is equal to or longer than the maximum group delay time of the low-pass filter, an abnormality determination signal indicating normality is output even though the detection signal output from the detection circuit indicates an abnormal value. The possibility of being lost becomes extremely small. Therefore, it is possible to realize a physical quantity detection device that can output an abnormality determination output with higher reliability.

(5) This physical quantity detection device
The abnormality determination output unit may be configured to vary the predetermined time.

  According to the present invention, since the predetermined time is variably configured, the predetermined time can be changed according to the required reliability.

(6) An abnormality diagnosis system for a physical quantity detection device according to the present invention includes:
A physical quantity detecting device for detecting a physical quantity and outputs a signal corresponding to the magnitude of the detected said physical quantity,
A detection circuit that generates a detection signal corresponding to the physical quantity based on an output signal of the physical quantity detection element;
The circuit included in the physical quantity detection device detects the presence or absence of abnormality of one or more monitoring target signals to be monitored, and generates an abnormality flag signal indicating whether or not at least a part of the monitoring target signal is abnormal A physical quantity detection device including an abnormality flag generation unit to perform,
An abnormality diagnosis device that determines whether or not there is an abnormality in the operation of the physical quantity detection device based on the abnormality flag signal;
When the abnormality flag signal is changed from a value indicating abnormality to a value indicating normality, the abnormality diagnosis apparatus is configured so that the abnormality flag signal changes from a value indicating abnormality to a value indicating normality for a predetermined period or more. A determination change from abnormality to normal is performed on the basis of the abnormality flag signal.

  According to the present invention, when the abnormality flag signal changes from a value indicating abnormality to a value indicating normality, the abnormality over a predetermined period after the abnormality flag signal changes from a value indicating abnormality to a value indicating normality Since the determination change from abnormality to normal is performed based on the flag signal, even if the abnormality flag signal changes to a value indicating normality, the determination result in the abnormality diagnosis device is not changed to normal at least for a predetermined time. . Therefore, the possibility that the operation of the physical quantity detection device is determined to be normal despite the detection signal output from the detection circuit indicating an abnormal value is reduced. Therefore, it is possible to realize an abnormality diagnosis system for a physical quantity detection device capable of performing abnormality diagnosis with higher reliability.

(7) An abnormality diagnosis method for a physical quantity detection device according to the present invention includes:
A detection step of detecting whether or not there is an abnormality in one or more monitoring target signals to be monitored in a circuit included in the physical quantity detection device, and determining whether or not there is an abnormality in at least a part of the monitoring target signal;
A determination step of determining whether or not there is an abnormality in the operation of the physical quantity detection device based on the determination result in the detection step,
In the determination step, when the detection result in the detection step changes from abnormality to normal, based on the detection result in the detection step over a predetermined period after the detection result in the detection step changes from abnormality to normal. The determination result is changed from abnormal to normal.

  According to the present invention, when the detection result in the detection process changes from abnormality to normal, based on the detection result in the detection process over a predetermined period after the detection result in the detection process changes from abnormality to normal, Since the determination result is changed from abnormal to normal, even if the detection result in the detection process changes from abnormal to normal, the determination result in the determination process is not changed to normal for at least a predetermined time. Therefore, the possibility that the operation of the physical quantity detection device is determined to be normal despite the detection signal output from the detection circuit indicating an abnormal value is reduced. Therefore, it is possible to realize an abnormality diagnosis method for a physical quantity detection device capable of performing abnormality diagnosis with higher reliability.

The figure for demonstrating the structure of the angular velocity detection apparatus of 1st Embodiment. The top view of the vibration piece of a gyro sensor element. The figure for demonstrating operation | movement of a gyro sensor element. The figure for demonstrating operation | movement of a gyro sensor element. The figure which shows an example of the signal waveform when an angular velocity detection apparatus is stationary. The figure which shows an example of the signal waveform when the angular velocity is added to the angular velocity detection apparatus. It is a figure for demonstrating the structure of the abnormality diagnosis circuit of 1st Embodiment. 6 is a timing chart of an abnormality flag signal, an abnormality determination signal, and a detection signal when an abnormality occurs. The graph which shows an example of the relationship between the group delay time and frequency of a low-pass filter. The figure for demonstrating the structure of the angular velocity detection apparatus of 2nd Embodiment. The figure for demonstrating the structure of the abnormality diagnosis circuit of 2nd Embodiment. The figure which shows an example of a structure of the abnormality diagnosis system of an angular velocity detection apparatus The figure for demonstrating the structure of a power supply voltage monitoring circuit, a monitoring circuit, and an abnormality diagnosis circuit. The figure which shows an example of the flowchart which shows the abnormality diagnosis method of an angular velocity detection apparatus. The figure which shows the other example of the flowchart which shows the abnormality diagnosis method of an angular velocity detection apparatus.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The embodiments described below do not unduly limit the contents of the present invention described in the claims. Also, not all of the configurations described below are essential constituent requirements of the present invention.

1. Physical quantity detection device In the following, a physical quantity detection device (angular velocity detection device) that detects an angular velocity as a physical quantity will be described as an example. It is applicable to a device that can

[First Embodiment]
FIG. 1 is a diagram for explaining the configuration of the angular velocity detection device of the first embodiment.

  The angular velocity detection device 1 of the first embodiment includes a gyro sensor element 100 and an angular velocity detection IC 10.

  The gyro sensor element 100 (an example of a physical quantity detection element in the present invention) is configured by sealing a vibrating piece in which a drive electrode and a detection electrode are arranged in a package (not shown). Generally, hermeticity in the package is secured in order to reduce the impedance of the resonator element as much as possible to increase the oscillation efficiency.

The vibrating piece of the gyro sensor element 100 is, for example, a piezoelectric single crystal such as quartz (SiO ₂ ), lithium tantalate (LiTaO ₃ ), lithium niobate (LiNbO ₃ ), or piezoelectric ceramics such as lead zirconate titanate (PZT). A piezoelectric material such as zinc oxide (ZnO) or aluminum nitride (AlN) sandwiched between drive electrodes is arranged on a part of the surface of the silicon semiconductor. There may be.

  Further, this vibrating piece may be, for example, a so-called double T type having two T type driving vibrating arms, a tuning fork type, a triangular prism, a quadrangular prism, a cylindrical shape, or the like. A sound piece type may be used.

  In the present embodiment, the gyro sensor element 100 is configured by a double T-type vibrating piece made of quartz.

  FIG. 2 is a plan view of the resonator element of the gyro sensor element 100 of the present embodiment.

  The gyro sensor element 100 of the present embodiment has a double T-type vibrating piece formed of a Z-cut quartz substrate. The resonator element made of quartz is advantageous in that the detection accuracy of the angular velocity can be increased because the variation of the resonance frequency with respect to the temperature change is extremely small. Note that the X, Y, and Z axes in FIG. 2 indicate crystal axes.

  As shown in FIG. 2, in the vibrating piece of the gyro sensor element 100, the driving vibrating arms 101a and 101b extend in the + Y axis direction and the −Y axis direction from the two driving bases 104a and 104b, respectively. Drive electrodes 112 and 113 are formed on the side surface and the upper surface of the drive vibration arm 101a, respectively, and drive electrodes 113 and 112 are formed on the side surface and the upper surface of the drive vibration arm 101b, respectively. The drive electrodes 112 and 113 are connected to the drive circuit 20 via the external output terminal 11 and the external input terminal 12 of the angular velocity detection IC 10 shown in FIG.

  The drive bases 104a and 104b are connected to a rectangular detection base 107 via connecting arms 105a and 105b extending in the −X axis direction and the + X axis direction, respectively.

  The detection vibrating arm 102 extends from the detection base 107 in the + Y axis direction and the −Y axis direction. Detection electrodes 114 and 115 are formed on the upper surface of the detection vibrating arm 102, and a common electrode 116 is formed on the side surface of the detection vibrating arm 102. The detection electrodes 114 and 115 are connected to the detection circuit 30 via the external input terminals 13 and 14 of the angular velocity detection IC 10 shown in FIG. The common electrode 116 is grounded.

  When an AC voltage is applied as a drive signal between the drive electrode 112 and the drive electrode 113 of the drive vibration arms 101a and 101b, the drive vibration arms 101a and 101b are as shown by an arrow B due to the inverse piezoelectric effect as shown in FIG. In addition, bending vibration (excitation vibration) in which the tips of the two drive vibration arms 101a and 101b repeat approach and separation from each other is performed.

  In the present application, when the bending vibration (excitation vibration) described above is performed with no angular velocity applied to the gyro sensor element, the magnitude of the vibration energy or the magnitude of the vibration in each drive vibration arm is two. When the drive vibration arms are equal, the vibration energy of the drive vibration arms is balanced.

  Here, when an angular velocity with the Z axis as the rotation axis is applied to the vibrating piece of the gyro sensor element 100, the drive vibrating arms 101a and 101b are coriolis in a direction perpendicular to both the direction of the bending vibration of the arrow B and the Z axis. Gain power. As a result, the connecting arms 105a and 105b vibrate as indicated by an arrow C as shown in FIG. The detection vibrating arm 102 bends and vibrates as indicated by an arrow D in conjunction with the vibrations of the connecting arms 105a and 105b (arrow C).

  In addition, the excitation vibration of the drive vibration arms 101a and 101b causes leakage vibration in the detection vibration arm 102 when the balance of vibration energy of the drive vibration arm is lost due to manufacturing variations of the gyro sensor element. This leakage vibration is a bending vibration indicated by an arrow D as in the vibration based on the Coriolis force, but is in phase with the drive signal. Note that the vibration accompanying the Coriolis force has a phase shifted by 90 ° from the driving vibration.

  Then, AC charges based on these bending vibrations are generated in the detection electrodes 114 and 115 of the detection vibration arm 102 by the piezoelectric effect. Here, the AC charge generated based on the Coriolis force changes according to the magnitude of the Coriolis force (in other words, the magnitude of the angular velocity applied to the gyro sensor element 100). On the other hand, the AC charge generated based on the leakage vibration is not related to the magnitude of the angular velocity applied to the gyro sensor element 100.

  In the configuration of FIG. 2, in order to improve the balance of the resonator element, the detection base 107 is arranged at the center, and the detection vibration arm 102 is extended from the detection base 107 in both the + Y axis and the −Y axis. ing. Further, the connecting arms 105a and 105b are extended from the detection base 107 in both the + X-axis and −X-axis directions, and the drive vibrating arms 101a and 101b are extended in both the + Y-axis and −Y-axis directions from the connecting arms 105a and 105b. Is extended.

  Further, a rectangular weight portion 103 having a width wider than that of the drive vibrating arms 101a and 101b is formed at the tips of the drive vibrating arms 101a and 101b. By forming the weight portion 103 at the tips of the drive vibrating arms 101a and 101b, the Coriolis force can be increased and a desired resonance frequency can be obtained with a relatively short vibrating arm. Similarly, a weight portion 106 wider than the detection vibrating arm 102 is formed at the tip of the detection vibrating arm 102. By forming the weight portion 106 at the tip of the detection vibrating arm 102, the AC charge generated in the detection electrodes 114 and 115 can be increased.

  As described above, the gyro sensor element 100 uses the Z-axis as a detection axis to generate AC charge (that is, a detection signal) based on Coriolis force and AC charge (that is, a leakage signal) based on leakage vibration of excitation vibration. Output through the detection electrodes 114 and 115.

  Returning to FIG. 1, the angular velocity detection IC 10 includes a drive circuit 20, a detection circuit 30, and a reference power supply circuit 40.

  The drive circuit 20 includes an I / V conversion circuit (current / voltage conversion circuit) 210, an AC amplification circuit 220, and an amplitude adjustment circuit 230.

  The drive current that has flowed through the resonator element of the gyro sensor element 100 is converted into an AC voltage signal by the I / V conversion circuit 210.

  The AC voltage signal output from the I / V conversion circuit 210 is input to the AC amplifier circuit 220 and the amplitude adjustment circuit 230. The AC amplifier circuit 220 amplifies the input AC voltage signal, clips it with a predetermined voltage value, and outputs the square wave voltage signal 22. The amplitude adjustment circuit 230 changes the amplitude of the square wave voltage signal 22 in accordance with the level of the AC voltage signal output from the I / V conversion circuit 210, and controls the AC amplification circuit 220 so that the drive current is kept constant. To do.

  The square wave voltage signal 22 is supplied to the drive electrode 112 of the vibrating piece of the gyro sensor element 100 via the external output terminal 11. In this way, the gyro sensor element 100 continuously excites predetermined driving vibration as shown in FIG. Further, by keeping the drive current constant, the drive vibrating arms 101a and 101b of the gyro sensor element 100 can obtain a constant vibration speed. For this reason, the vibration speed that generates the Coriolis force is constant, and the sensitivity can be further stabilized.

  The detection circuit 30 includes charge amplifier circuits 310 and 320, a differential amplification circuit 330, an AC amplification circuit 340, a synchronous detection circuit 350, a smoothing circuit 360, a variable amplification circuit 370, and a low-pass filter 380.

  An AC charge including a detection signal and a leakage signal is input to the charge amplifier circuit 310 from the detection electrode 114 of the vibrating piece of the gyro sensor element 100 via the external input terminal 13.

  Similarly, AC charge including a detection signal and a leakage signal is input to the charge amplifier circuit 320 from the detection electrode 115 of the vibrating piece of the gyro sensor element 100 via the external input terminal 14.

The charge amplifier circuits 310 and 320 convert the input AC charges into AC voltage signals based on the reference voltage _Vref . The reference voltage V _ref is generated by the reference power supply circuit 40 based on the external power supply input from the power supply input terminal 15.

  The differential amplifier circuit 330 differentially amplifies the output signal of the charge amplifier circuit 310 and the output signal of the charge amplifier circuit 320. The differential amplifier circuit 330 is for erasing in-phase components and adding and amplifying anti-phase components.

  The AC amplifier circuit 340 amplifies the output signal of the differential amplifier circuit 330 and outputs the detected signal 36 to the synchronous detection circuit 350.

The synchronous detection circuit 350 performs synchronous detection on the detected signal 36 using the square wave voltage signal 22. For example, when the voltage level of the detection signal 34 is higher than the reference voltage V _ref , the synchronous detection circuit 350 selects the output signal of the AC amplification circuit 340 and when the voltage level of the detection signal 34 is lower than the reference voltage V _ref. Can be configured as a switch circuit that selects a signal obtained by inverting the output signal of the AC amplifier circuit 340 with respect to the reference voltage V _ref .

  The output signal of the synchronous detection circuit 350 is smoothed into a DC voltage signal by the smoothing circuit 360 and then input to the variable amplification circuit 370.

  The variable amplifier circuit 370 amplifies (or attenuates) the output signal (DC voltage signal) of the smoothing circuit 360 with a set amplification factor (or attenuation factor) to adjust the detection sensitivity. The signal amplified (or attenuated) by the variable amplifier circuit 370 is input to the low pass filter 380.

  The low-pass filter 380 is a circuit that limits the output signal of the variable amplifier circuit 370 to a frequency band suitable for use, and generates the angular velocity detection signal 32. The angular velocity detection signal 32 is output to the outside through the external output terminal 17.

  Next, an example of signal waveforms at points A to G in FIG. 1 will be shown to describe the angular velocity detection operation of the angular velocity detection device 1 of the first embodiment more specifically.

  FIG. 5 is a diagram illustrating an example of a signal waveform when the angular velocity detection device 1 is stationary. In FIG. 5, the horizontal axis represents time, and the vertical axis represents voltage.

  In a state where the vibrating piece of the gyro sensor element 100 is vibrating, the current fed back from the drive electrode 113 of the vibrating piece of the gyro sensor element 100 is converted into the output (point A) of the I / V conversion circuit 210. An AC voltage with a constant frequency is generated. That is, a sine wave voltage signal having a constant frequency is generated at the output (point A) of the I / V conversion circuit 210.

Then, the output of the AC amplifier circuit 220 (B point), the output signal of the I / V conversion circuit 210 (signal point A) is amplified, the amplitude square wave voltage signal having a constant value V _c is generated.

  When the angular velocity is not applied to the gyro sensor element 100, the angular velocity detection signal is not generated at the detection electrodes 114 and 115 of the vibrating piece of the gyro sensor element 100, but the leakage signal is generated.

  Leakage signals (AC charges) generated at the detection electrodes 114 and 115 of the gyro sensor element 100 are converted into AC voltage signals by the charge amplifier circuits 310 and 320, respectively. Here, the AC voltage signals output from the charge amplifier circuits 310 and 320 are assumed to be in reverse phase. As a result, a sine wave voltage signal having the same frequency as the output signal of the AC amplifier circuit 220 (point B signal) is generated at the outputs (points C and D) of the charge amplifier circuits 310 and 320. Here, the phase of the output signal (point C signal) of the charge amplifier circuit 310 is shifted by 90 ° with respect to the output signal (point B signal) of the AC amplifier circuit 220. The phase of the output signal (point D signal) of the charge amplifier circuit 320 is opposite to that of the output signal (point C signal) of the charge amplifier circuit 310 (shifted by 180 °).

  The output signals of the charge amplifier circuits 310 and 320 (the signal at the point C and the signal at the point D) are differentially amplified by the differential amplifier circuit 330, and the output (point E) of the AC amplifier circuit 340 is output from the charge amplifier circuit 310. A sine wave voltage signal having the same frequency and the same phase as the sine wave voltage signal generated at the output (point C) is generated. This sine wave voltage signal generated at the output (point E) of the AC amplifier circuit 340 is a signal corresponding to a leakage signal generated at the detection electrodes 114 and 115 of the vibration piece of the gyro sensor element 100.

  The output signal (point E signal) of the AC amplifier circuit 340 is synchronously detected by the synchronous detection circuit 350 based on the square wave voltage signal 22 (point B signal) output from the AC amplifier circuit 220.

Here, since the output signal (point E signal) of the AC amplifier circuit 340 and the square wave voltage signal 22 (point B signal) are out of phase by 90 °, the output signal of the synchronous detection circuit 350 (point F) in signal), the integral amount of integration quantity and the reference voltage V lower voltage than _ref voltage higher than the reference voltage V _ref is equal. As a result, the leakage signal is canceled and a DC voltage signal of the reference voltage V _ref indicating that the angular velocity is 0 is generated at the output (point G) of the low-pass filter 380.

  FIG. 6 is a diagram illustrating an example of a signal waveform when an angular velocity is applied to the angular velocity detection device 1. In FIG. 6, the horizontal axis represents time, and the vertical axis represents voltage.

  The signal waveforms at points A and B are the same as those in FIG.

  When an angular velocity is applied to the gyro sensor element 100, a detection signal and a leak signal are generated at the detection electrodes 114 and 115 of the vibrating piece of the gyro sensor element 100. The level of this detection signal changes according to the magnitude of the Coriolis force. On the other hand, the leakage signal has the same signal waveform as in FIG. For this reason, FIG. 6 shows a signal waveform focused on only the detection signal, and in the following description, description will be focused on only the detection signal.

  Detection signals (AC charges) generated at the detection electrodes 114 and 115 of the vibrating piece of the gyro sensor element 100 are converted into AC voltage signals by the charge amplifier circuits 310 and 320, respectively. As a result, a sine wave voltage signal having the same frequency as the output signal of the AC amplifier circuit 220 (point B signal) is generated at the outputs (points C and D) of the charge amplifier circuits 310 and 320. Here, the phase of the output signal of the charge amplifier circuit 310 (point C signal) is the same as that of the output signal of the AC amplifier circuit 220 (point B signal). The phase of the output signal (point D signal) of the charge amplifier circuit 320 is opposite to that of the output signal (point C signal) of the charge amplifier circuit 310 (shifted by 180 °).

  The output signals of the charge amplifier circuits 310 and 320 (the signal at the point C and the signal at the point D) are differentially amplified by the differential amplifier circuit 330, and the output (point E) of the AC amplifier circuit 340 is output from the charge amplifier circuit 310. A sine wave voltage signal having the same frequency and the same phase as the sine wave voltage signal generated at the output (point C) is generated. This sine wave voltage signal generated at the output (point E) of the AC amplifier circuit 340 is a signal corresponding to the detection signals generated at the detection electrodes 114 and 115 of the gyro sensor element 100.

The output signal (point E signal) of the AC amplifier circuit 340 is synchronously detected by the synchronous detection circuit 350 based on the square wave voltage signal 22 (point B signal) output from the AC amplifier circuit 220. Here, since the output signal (point E signal) of the AC amplifier circuit 340 and the square wave voltage signal 22 (point B signal) are in phase, the output signal (point F signal) of the synchronous detection circuit 350 is The output signal of the AC amplifier circuit 340 (the signal at point E) is a full-wave rectified signal. As a result, a DC voltage signal having a voltage value V ₁ corresponding to the magnitude of the angular velocity (that is, the angular velocity detection signal 32) is generated at the output (point G) of the low-pass filter 380.

When an angular velocity in the direction opposite to that in FIG. 6 is applied to the angular velocity detector 1, both the output signal of the charge amplifier circuit 310 (point C signal) and the output signal of the charge amplifier circuit 320 (point D signal) are both. The waveform is inverted around the reference voltage _Vref . As a result, the angular velocity detection signal 32 becomes a signal having a voltage lower than the reference voltage V _ref, contrary to FIG.

  In this way, the angular velocity detection device 1 can detect the angular velocity. The voltage value of the angular velocity detection signal 32 is proportional to the magnitude of the Coriolis force (angular velocity magnitude), and its polarity is determined by the rotation direction. Therefore, the angular velocity detection signal 32 is added to the angular velocity detection device 1 based on the angular velocity detection signal 32. The calculated angular velocity can be calculated.

  Returning to FIG. 1, the angular velocity detection IC 10 includes an abnormality diagnosis circuit 60.

  FIG. 7 is a diagram for explaining the configuration of the abnormality diagnosis circuit 60 of the first embodiment. In the example illustrated in FIG. 7, the abnormality diagnosis circuit 60 includes a power supply voltage monitoring determination circuit 610 and a delay circuit 620.

  The abnormality diagnosis circuit 60 detects the power supply voltage input from the power input terminal 15 as the monitoring target signal 50, and generates an abnormality determination signal 62 indicating whether or not the power supply voltage (monitoring target signal 50) is abnormal. The abnormality determination signal 62 is output to the outside via the external output terminal 16.

  The power supply voltage monitoring determination circuit 610 monitors the power supply voltage (monitoring target signal 50), determines whether the power supply voltage (monitoring target signal 50) is abnormal, and determines whether the power supply voltage (monitoring target signal 50) is abnormal. An abnormal flag signal 82 is output.

  Based on the abnormality flag signal 82, the delay circuit 620 generates and outputs an abnormality determination signal 62 that indicates whether or not the operation of the angular velocity detection device 1 is abnormal. The delay circuit 620 may be configured using, for example, a shift register, and may generate the abnormality determination signal 62 by delaying the timing of the abnormality flag signal 82 by a predetermined time. The delay circuit 620 may be configured by using, for example, a combination of an integrator and a comparator, and may generate the abnormality determination signal 62 by delaying the abnormality flag signal 82 by a predetermined time.

  In the example shown in FIG. 7, the power supply voltage monitoring determination circuit 610 corresponds to the abnormality flag generation unit in the present invention, and the delay circuit 620 corresponds to the abnormality determination output unit in the present invention.

  The delay circuit 620 in this embodiment indicates an abnormality determination signal 62 based on the abnormality flag signal 82 over a predetermined time after the abnormality flag signal 82 changes from a value indicating abnormality to a value indicating normality. Change the value from normal to normal and output.

  FIG. 8 is a timing chart of the abnormality flag signal 82, the abnormality determination signal 62, and the angular velocity detection signal 32 when an abnormality occurs. In the example illustrated in FIG. 8, the abnormality flag signal 82 and the abnormality determination signal 62 are voltage signals having a value indicating normality at a low level (L) and a value indicating abnormality at a high level (H).

  Hereinafter, for example, when the power supply voltage supplied from the power input terminal 15 temporarily drops below the reference value, the power supply voltage monitoring determination circuit 610 determines that an abnormality has occurred in the power supply voltage, and an abnormality flag signal An example in which 82 is changed from a low level to a high level for output will be described.

  When an abnormality occurs in the power supply voltage (monitoring target signal 50) at time t1, the power supply voltage monitoring determination circuit 610 changes the abnormality flag signal 82 from the low level to the high level and outputs it. When the abnormality that occurred at time t1 returns to normal at time t3, power supply voltage monitoring determination circuit 610 changes abnormality flag signal 82 from high level to low level and outputs it.

  On the other hand, since the angular velocity detection signal 32 is output through the detection circuit 30, the angular velocity detection signal 32 affected by the abnormality that occurred at time t1 is output at time t2 with a delay of the delay time Td. When the abnormality that occurred at time t1 continues until time t3, the angular velocity detection signal 32 affected by the abnormality continues until time t4 that is delayed by the delay time Td.

  In other words, an abnormality occurrence section in which an abnormality occurs and the abnormality flag signal 82 is output is from time t1 to time t3, but an abnormal output in which the angular velocity detection signal 32 affected by the generated abnormality is output. The section is from time t2 to time t4 delayed by the delay time Td. Therefore, during the period from time t3 to time t4, the angular velocity detection signal 32 is a signal affected by the abnormality even though the abnormality flag signal 82 represents normal. Therefore, if the abnormality flag signal 82 is used as it is as an abnormality determination signal, there is a possibility that it may become a problem in applications that require high reliability.

  In the present embodiment, the delay circuit 620 includes an abnormality flag signal for a predetermined time T or more after the abnormality flag signal 82 changes from a high level (value indicating abnormality) to a low level (value indicating normality) at time t3. 82, at time t5, the abnormality determination signal 62 is changed from a high level (value indicating abnormality) to a low level (value indicating normality) and output. For example, the delay circuit 620 outputs the abnormality determination signal 62 after a predetermined time T has elapsed since the abnormality flag signal 82 changed from a high level (value indicating abnormality) to a low level (value indicating normality) at time t3. The output is changed from the high level (value indicating abnormality) to the low level (value indicating normality).

  As described above, according to the angular velocity detection device 1 according to the first embodiment, the abnormality flag signal 82 is changed based on the abnormality flag signal 82 over a predetermined time T after the abnormality flag signal 82 changes from a value representing abnormality to a value representing normality. Since the abnormality determination signal 62 is output after changing from a value indicating abnormality to a value indicating normality, even if the abnormality flag signal 82 changes to a value indicating normality, the abnormality determination signal 62 is abnormal for at least a predetermined time T. The determination signal 62 does not change to a value indicating normality. Therefore, although the angular velocity detection signal 32 shows an abnormal value, the possibility of outputting the abnormality determination signal 62 indicating normality is reduced. Therefore, it is possible to realize an angular velocity detection device that can output an abnormality determination output with higher reliability.

  Further, the delay circuit 620 changes the abnormality determination signal 82 to a value indicating abnormality after the value indicating normality continues for a predetermined time T or more after the abnormality flag signal 82 changes from a value indicating abnormality to a value indicating normality. The value may be changed to a value indicating normal and output. That is, after the abnormality flag signal 82 changes from the high level (value indicating abnormality) to the low level (value indicating normality) at time t3, the delay circuit 620 causes the abnormality flag signal 82 of low level to exceed the predetermined time T. After the continuation, the abnormality determination signal 62 may be changed from a high level (a value indicating abnormality) to a low level (a value indicating normality) and output.

  With this configuration, after the abnormality flag signal 82 changes from a value indicating abnormality to a value indicating normality, the value indicating normality continues for a predetermined time T or longer, and then the abnormality determination signal 62 indicates abnormality. Since the value is changed to a value indicating normality and output, the abnormality determination signal 62 does not change to a value indicating normality for at least a predetermined time T even if the abnormality flag signal 82 changes to a value indicating normality. . In addition, even if the abnormality flag signal 82 becomes a value representing normality for a time that is less than the predetermined time T, the abnormality determination signal 62 does not change to a value representing normality. Therefore, although the angular velocity detection signal 32 shows an abnormal value, the possibility of outputting the abnormality determination signal 62 indicating normality is reduced. Therefore, it is possible to realize an angular velocity detection device that can output an abnormality determination output with higher reliability.

  FIG. 9 is a graph showing an example of the relationship between the group delay time of the low-pass filter 380 and the frequency. The horizontal axis represents frequency (logarithm), and the vertical axis represents group delay time.

  In the present embodiment, the predetermined time T may be equal to or longer than the minimum group delay time τ1 in the frequency band (pass band) from the direct current (0 Hz) of the low-pass filter 380 to the cutoff frequency fc.

  When the angular velocity detection signal 32 is generated via the low-pass filter 380 as in the detection circuit 30 described with reference to FIG. 1, the delay time in the low-pass filter 380 is several orders of magnitude compared to the delay times in other circuit blocks. Usually it is about as large. That is, the delay time in the low-pass filter 380 is usually approximately the signal delay time Td in the detection circuit 30.

  Therefore, by setting the predetermined time T to be equal to or longer than the minimum group delay time τ1 in the frequency band (pass band) from the direct current (0 Hz) of the low-pass filter 380 to the cutoff frequency fc, the angular velocity detection signal 32 exhibits an abnormal value. Nevertheless, the possibility of outputting the abnormality determination signal 62 indicating normality is further reduced. Therefore, it is possible to realize an angular velocity detection device that can output an abnormality determination output with higher reliability.

  In the present embodiment, the predetermined time T may be longer than the maximum group delay time τ2 of the low-pass filter 380.

  By setting the predetermined time T to be equal to or longer than the maximum group delay time τ2 of the low-pass filter 380, there is a possibility that the abnormality determination signal 62 indicating normality is output even though the angular velocity detection signal 32 shows an abnormal value. Extremely small. Therefore, it is possible to realize a physical quantity detection device that can output an abnormality determination output with higher reliability.

  Furthermore, the delay circuit 620 may be configured to vary the predetermined time T. For example, when the delay circuit 620 uses a shift register to count the delay time, the count value can be variably configured based on the set value stored in the memory, or the clock signal frequency dividing ratio can be variably configured. May be. For example, when the delay circuit 620 delays a signal using an integrator, the capacitance of the time constant capacitor of the integrator may be configured to be variable.

  By making the predetermined time T variable, the predetermined time T can be changed according to the required reliability.

[Second Embodiment]
In the first embodiment, the case where the power supply voltage supplied from the power input terminal 15 is temporarily abnormal has been described as an example. However, when the angular velocity detection signal 32 temporarily has an abnormal value, this is used. Not limited. As another example, there is a case where a strong impact is temporarily applied to the angular velocity detection device and the output is saturated in a part of the circuit such as the detection circuit 30. In the second embodiment, a case where one or a plurality of monitoring target signals is monitored in addition to the power supply voltage will be described.

  FIG. 10 is a diagram for explaining the configuration of the angular velocity detection device of the second embodiment. The same components as those in the angular velocity detection device 1 described with reference to FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

  An angular velocity detection device 1A according to the second embodiment includes a gyro sensor element 100 and an angular velocity detection IC 10A. The angular velocity detection IC 10A includes an abnormality diagnosis circuit 60A instead of the abnormality diagnosis circuit 60 of the angular velocity detection IC 10 described with reference to FIG.

  In the example shown in FIG. 10, the abnormality diagnosis circuit 60A uses the power supply voltage from the power input terminal 15 as the monitoring target signal 50, the output signal of the I / V conversion circuit 210 as the monitoring target signal 50-1, and the AC amplification circuit 220. The output signal is the monitoring target signal 50-2, the output signal of the charge amplifier circuit 310 is the monitoring target signal 50-3, the output signal of the low-pass filter 380 is the monitoring target signal 50-4, and the output signal of the reference power supply circuit 40 is Monitoring is performed as the monitoring target signal 50-5.

  Note that the monitoring target signal illustrated in FIG. 10 is an example. For example, the monitoring target signal may be selected from the output signals of other circuit blocks illustrated in FIG. 10 as necessary. Further, the number of monitoring circuits may be increased or decreased as necessary.

  The abnormality diagnosis circuit 60A generates an abnormality determination signal 62 that indicates whether or not at least a part of the monitoring target signals 50 and 50-1 to 50-5 is abnormal. The abnormality determination signal 62 is output to the outside via the external output terminal 16.

  FIG. 11 is a diagram for explaining the configuration of the abnormality diagnosis circuit 60A.

  In the example shown in FIG. 11, the abnormality diagnosis circuit 60A includes a power supply voltage monitoring determination circuit 610, monitoring determination circuits 610-1 to 610-5, an OR circuit 630, and a delay circuit 620.

  The power supply voltage monitoring determination circuit 610 monitors the monitoring target signal 50 (power supply voltage), determines whether or not the monitoring target signal 50 (power supply voltage) is abnormal, and determines whether or not the monitoring target signal 50 (power supply voltage) is abnormal. A determination signal 61 indicating that is output. Similarly, the monitoring determination circuits 610-1 to 610-5 monitor the monitoring target signals 50-1 to 50-5 respectively, determine whether the monitoring target signals 50-1 to 50-5 are abnormal, and monitor the monitoring target signals 50-1 to 50-5. Determination signals 61-1 to 61-5 indicating whether or not the signals 50-1 to 50-5 are abnormal are output.

  The logical sum circuit 630 receives the determination signals 61 and 61-1 to 61-5, and generates a logical sum as the abnormality flag signal 82A.

  Based on the abnormality flag signal 82A, the delay circuit 620 generates and outputs an abnormality determination signal 62A indicating whether or not the operation of the angular velocity detection device 1A is abnormal. The delay circuit 620 may be configured using a shift register, for example, and may generate the abnormality determination signal 62A by delaying the timing of the abnormality flag signal 82 by a predetermined time. The delay circuit 620 may be configured by using, for example, a combination of an integrator and a comparator, and may generate the abnormality determination signal 62A by delaying the abnormality flag signal 82 by a predetermined time.

  In the example shown in FIG. 11, the power supply voltage monitoring determination circuit 610, the monitoring determination circuits 610-1 to 610-5, and the OR circuit 630 correspond to the abnormality flag generation unit 800A in the present invention.

  In the present embodiment, the determination signals 61 and 61-1 to 61-5, the abnormality flag signal 82 </ b> A, and the abnormality determination signal 62 </ b> A have values indicating normality at a low level (L) and values indicating abnormality at a high level (H). Is a voltage signal. Therefore, the OR circuit 630 outputs the abnormality flag signal 82A that is at a high level during a period in which any one of the monitoring target signals 50 and 50-1 to 50-5 is abnormal and is at a low level during the other period. .

  In the present embodiment, the delay circuit 620 determines that the abnormality determination signal 62A is abnormal based on the abnormality flag signal 82A over a predetermined time T after the abnormality flag signal 82A changes from a value indicating abnormality to a value indicating normality. The value to be output is changed from the value to be normal to the value indicating normality.

  The relationship among the abnormality flag signal 82A, the abnormality determination signal 62A, and the angular velocity detection signal 32 is the same as in the first embodiment described with reference to the timing chart shown in FIG.

  As described above, according to the angular velocity detection device 1A according to the second embodiment, the abnormality flag signal 82A is changed from the value indicating abnormality to the value indicating normality, and then based on the abnormality flag signal 82A for a predetermined time T or more. Since the abnormality determination signal 62A is output after being changed from a value indicating abnormality to a value indicating normality, even if the abnormality flag signal 82A changes to a value indicating normality, the abnormality determination signal 62A is abnormal for at least a predetermined time T. The determination signal 62A does not change to a value indicating normality. Therefore, although the angular velocity detection signal 32 indicates an abnormal value, the possibility of outputting the abnormality determination signal 62A indicating normality is reduced. Therefore, it is possible to realize an angular velocity detection device that can output an abnormality determination output with higher reliability.

  The delay circuit 620 changes the abnormality determination signal 82A to a value indicating abnormality after the value indicating normality continues for a predetermined time T or more after the abnormality flag signal 82A changes from a value indicating abnormality to a value indicating normality. The value may be changed to a value indicating normal and output.

  With this configuration, after the abnormality flag signal 82A changes from a value indicating abnormality to a value indicating normality, the value indicating normality continues for a predetermined time T or longer, and then the abnormality determination signal 62A indicates abnormality. Since the value is changed to a value indicating normality and output, even if the abnormality flag signal 82A changes to a value indicating normality, the abnormality determination signal 62A does not change to a value indicating normality for at least the predetermined time T. . In addition, even if the abnormality flag signal 82A becomes a value indicating normality for a time less than the predetermined time T, the abnormality determination signal 62A does not change to a value indicating normality. Therefore, although the angular velocity detection signal 32 indicates an abnormal value, the possibility of outputting the abnormality determination signal 62A indicating normality is reduced. Therefore, it is possible to realize an angular velocity detection device that can output an abnormality determination output with higher reliability.

  In the present embodiment, the predetermined time T may be equal to or longer than the minimum group delay time τ1 in the frequency band (pass band) from the direct current (0 Hz) of the low-pass filter 380 to the cutoff frequency fc.

  By setting the predetermined time T to be equal to or longer than the minimum group delay time τ1 in the frequency band (pass band) from the direct current (0 Hz) to the cutoff frequency fc of the low-pass filter 380, the angular velocity detection signal 32 exhibits an abnormal value. Regardless, the possibility of outputting the abnormality determination signal 62A indicating normality is further reduced. Therefore, it is possible to realize an angular velocity detection device that can output an abnormality determination output with higher reliability.

  In the present embodiment, the predetermined time T may be longer than the maximum group delay time τ2 of the low-pass filter 380.

  By setting the predetermined time T to be equal to or longer than the maximum group delay time τ2 of the low-pass filter 380, there is a possibility that the abnormality determination signal 62A indicating normality may be output although the angular velocity detection signal 32 shows an abnormal value. Extremely small. Therefore, it is possible to realize a physical quantity detection device that can output an abnormality determination output with higher reliability.

  Furthermore, the delay circuit 620 may be configured to vary the predetermined time T. For example, when the delay circuit 620 uses a shift register to count the delay time, the count value can be variably configured based on the set value stored in the memory, or the clock signal frequency dividing ratio can be variably configured. May be. For example, when the delay circuit 620 delays a signal using an integrator, the capacitance of the time constant capacitor of the integrator may be configured to be variable.

  By making the predetermined time T variable, the predetermined time T can be changed according to the required reliability.

  In the second embodiment, in addition to these effects, it is possible to realize an angular velocity detection device capable of monitoring a plurality of monitoring target signals and performing a more reliable abnormality determination output.

2. Abnormality Diagnosis System and Abnormality Diagnosis Method of Physical Quantity Detection Device Hereinafter, an abnormality diagnosis system and an abnormality diagnosis method of a physical quantity detection device (angular velocity detection device) that detects an angular velocity as a physical quantity will be described as an example. The present invention can be applied to an abnormality diagnosis system and an abnormality diagnosis method for an apparatus that can detect any of various physical quantities such as geomagnetism and pressure.

  FIG. 12 is a diagram illustrating an example of the configuration of the abnormality diagnosis system for the angular velocity detection device according to the present embodiment.

  As shown in FIG. 12, the abnormality diagnosis system 1000 includes an angular velocity detection device 1B and a microcomputer 2.

  The angular velocity detection device 1B includes a gyro sensor element 100 and an angular velocity detection IC 10B. The angular velocity detection IC 10B includes an abnormality diagnosis circuit 60B instead of the abnormality diagnosis circuit 60 of the angular velocity detection IC 10A described with reference to FIG.

  FIG. 13 is a diagram for explaining the configuration of the abnormality diagnosis circuit 60B.

  In the example illustrated in FIG. 13, the abnormality diagnosis circuit 60 </ b> B includes a power supply voltage monitoring determination circuit 610, monitoring determination circuits 610-1 to 610-5, and an OR circuit 630.

  The power supply voltage monitoring determination circuit 610 monitors the monitoring target signal 50 (power supply voltage), determines whether the monitoring target signal 50 is abnormal, and outputs a determination signal 61 indicating whether the monitoring target signal 50 is abnormal. To do. Similarly, the monitoring determination circuits 50-1 to 50-5 monitor the monitoring target signals 50-1 to 50-5, respectively, determine whether the monitoring target signals 50-1 to 50-5 are abnormal, and monitor the monitoring target signals 50-1 to 50-5. Determination signals 61-1 to 61-5 indicating whether or not the signals 50-1 to 50-5 are abnormal are output.

  The logical sum circuit 630 receives the determination signals 61 and 61-1 to 61-5, and generates a logical sum as the abnormality flag signal 82B. The abnormality flag signal 82B is output via the external output terminal 16.

  In the example shown in FIG. 13, the abnormality diagnosis circuit 60B corresponds to the abnormality flag generator in the present invention.

  In the present embodiment, the determination signals 61 and 61-1 to 61-5 and the abnormality flag signal 82 </ b> A are voltage signals in which a value indicating normality is a low level (L) and a value indicating abnormality is a high level (H). is there. Therefore, the logical sum circuit 630 outputs an abnormal flag signal 82B that is at a high level during a period in which an abnormality has occurred in any one of the monitoring target signals 50 and 50-1 to 50-5, and is at a low level in other periods. .

  The microcomputer 2 receives the abnormality flag signal 82B output from the external output terminal 16, and determines whether or not the operation of the angular velocity detection device 1B is abnormal based on the abnormality flag signal 82B. That is, the microcomputer 2 functions as an abnormality diagnosis device in the present invention. The microcomputer 2 may output the abnormality determination signal 4 based on the determination result of the presence or absence of abnormality. The abnormality determination signal 4 is input, for example, to a display device (not shown), and a warning is displayed if the angular velocity detection device 1B is abnormal.

  FIG. 14 is a diagram showing an example of a flowchart showing an abnormality diagnosis method of the angular velocity detection device by the abnormality diagnosis system 1000 shown in FIG.

  First, the abnormality diagnosis circuit 60B detects whether or not the monitoring target signals 50 and 50-1 to 50-5 are abnormal, and whether or not at least some of the monitoring target signals 50 and 50-1 to 50-5 are abnormal. Is determined (step S100). In the abnormality diagnosis system 1000, the abnormality diagnosis circuit 60B outputs the detection result to the microcomputer 2 as an abnormality flag signal 82B.

  Next, when the detection result in step S100 changes from abnormality to normal, the determination result is based on the detection result in step S100 over a predetermined period T after the detection result in step S100 changes from abnormality to normal. Is changed from abnormal to normal (step S110). In the abnormality diagnosis system 1000, the microcomputer 2 changes from abnormality to normal based on the abnormality flag signal 82B over a predetermined period T after the abnormality flag signal 82B changes from a value indicating abnormality to a value indicating normality. Change the judgment.

  According to the present embodiment, when the abnormality flag signal 82B changes from a value indicating abnormality to a value indicating normality, a predetermined period T is elapsed after the abnormality flag signal 82B changes from a value indicating abnormality to a value indicating normality. Since the determination change from abnormality to normal is performed based on the abnormality flag signal 82B over the above, even if the abnormality flag signal 82B changes to a value indicating normality, at least for a predetermined time T, in the microcomputer 2 The judgment result is not changed to normal. Therefore, although the angular velocity detection signal 32 indicates an abnormal value, the possibility that the operation of the angular velocity detection device 1B is determined to be normal is reduced. Therefore, it is possible to realize an abnormality diagnosis system and an abnormality diagnosis method for an angular velocity detection device capable of performing abnormality diagnosis with higher reliability.

  FIG. 15 is a diagram showing another example of a flowchart showing an abnormality diagnosis method of the angular velocity detection device by the abnormality diagnosis system 1000 shown in FIG.

  First, the abnormality diagnosis circuit 60B detects whether or not the monitoring target signals 50 and 50-1 to 50-5 are abnormal, and whether or not at least some of the monitoring target signals 50 and 50-1 to 50-5 are abnormal. Is determined (step S100). In the abnormality diagnosis system 1000, the abnormality diagnosis circuit 60B outputs the detection result to the microcomputer 2 as an abnormality flag signal 82B.

  Next, when the detection result in step S100 changes from abnormal to normal, the detection result in step S100 changes from abnormal to normal, and after the detection result indicating normality continues for a predetermined period T or more, the determination result Is changed from abnormal to normal (step S120). In the abnormality diagnosis system 1000, after the microcomputer 2 changes from a value indicating abnormality to a value indicating normality after the abnormality flag signal 82B has changed from a value indicating normality to a value indicating normality, the value indicating normality continues for a predetermined period T or more. Change the judgment.

  According to the present embodiment, when the abnormality flag signal 82B changes from a value representing abnormality to a value representing normality, the abnormality flag signal 82B changes from a value representing abnormality to a value representing normality, and then the normality is changed. The determination value is changed from abnormality to normal after the value to be expressed continues for a predetermined period T or more. Therefore, even if the abnormality flag signal 82B changes to a value indicating normal, the microcomputer 2 does not change for at least the predetermined time T. The judgment result is not changed to normal. In addition, the determination result in the microcomputer 2 is not changed to normal even if the abnormality flag signal 82B becomes a value indicating normal for a time that is less than the predetermined time T. Therefore, although the angular velocity detection signal 32 indicates an abnormal value, the possibility that the operation of the angular velocity detection device 1B is determined to be normal is reduced. Therefore, it is possible to realize an abnormality diagnosis system and an abnormality diagnosis method for an angular velocity detection device capable of performing abnormality diagnosis with higher reliability.

  In these forms, the predetermined time T may be equal to or longer than the minimum group delay time τ1 in the frequency band (pass band) from the direct current (0 Hz) of the low-pass filter 380 to the cutoff frequency fc.

  By setting the predetermined time T to be equal to or longer than the minimum group delay time τ1 in the frequency band (pass band) from the direct current (0 Hz) to the cutoff frequency fc of the low-pass filter 380, the angular velocity detection signal 32 exhibits an abnormal value. Regardless, the possibility that the operation of the angular velocity detection device 1B is determined to be normal is further reduced. Therefore, it is possible to realize an abnormality diagnosis system and abnormality diagnosis method for an angular velocity detection device that can output an abnormality determination output with higher reliability.

  In these forms, the predetermined time T may be equal to or longer than the maximum group delay time τ2 of the low-pass filter 380.

  By setting the predetermined time T to be equal to or longer than the maximum group delay time τ2 of the low-pass filter 380, there is a possibility that the operation of the angular velocity detection device 1B is determined to be normal even though the angular velocity detection signal 32 shows an abnormal value. Becomes extremely small. Therefore, it is possible to realize an abnormality diagnosis system and abnormality diagnosis method for an angular velocity detection device that can output an abnormality determination output with higher reliability.

  In addition, this invention is not limited to this embodiment, A various deformation | transformation implementation is possible within the range of the summary of this invention.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

1, 1A, 1B Angular velocity detection device, 2 Microcomputer, 4 Abnormality determination signal, 10, 10A Angular velocity detection IC, 11 External output terminal, 12-14 External input terminal, 15 Power input terminal, 16, 17 External output terminal, 20 drive circuit, 22 square wave voltage signal, 30 detection circuit, 32 angular velocity detection signal, 36 detected signal, 40 reference power supply circuit, 50, 50-1 to 50-5 monitored signal, 60, 60A, 60B abnormality diagnosis circuit 61, 61-1 to 61-5 determination signal, 62, 62A abnormality determination signal, 82, 82A abnormality flag signal, 100 gyro sensor element, 101a to 101b driving vibration arm, 102 detection vibration arm, 103 weight section, 104a to 104b driving base, 105a to 105b connecting arm, 106 weight, 107 detecting base, 112 to 13 drive electrode, 114 to 115 detection electrode, 116 common electrode, 210 I / V conversion circuit (current voltage conversion circuit), 220 AC amplification circuit, 230 amplitude adjustment circuit, 310 charge amplifier circuit, 320 charge amplifier circuit, 330 differential Amplification circuit, 340 AC amplification circuit, 350 synchronous detection circuit, 360 smoothing circuit, 370 variable amplification circuit, 380 low-pass filter, 610 power supply voltage monitoring determination circuit, 610-1 to 610-5 monitoring determination circuit, 620 delay circuit, 630 logic Sum circuit, 800A, 800B abnormality flag generator, 1000 abnormality diagnosis system

Claims (8)

A physical quantity detection device comprising:
A physical quantity detecting device for detecting a physical quantity and outputs a signal corresponding to the magnitude of the detected said physical quantity,
A detection circuit that generates a detection signal corresponding to the physical quantity based on an output signal of the physical quantity detection element;
The circuit included in the physical quantity detection device detects the presence or absence of abnormality of one or more monitoring target signals to be monitored, and generates an abnormality flag signal indicating whether or not at least a part of the monitoring target signal is abnormal An abnormal flag generator to
Based on the abnormality flag signal, anda abnormality determination output unit for generating and outputting an abnormality determination signal indicating whether or not there is an abnormality in the operation of the physical quantity detecting device,
The detection circuit generates the detection signal through a low-pass filter,
The abnormality determination output unit,
Based on the abnormality flag signal over a predetermined time after the abnormality flag signal has changed from a value representing abnormality to a value representing normality, the abnormality determination signal is changed from a value representing abnormality to a value representing normality. Output ,
The physical quantity detection device according to claim 1, wherein the predetermined time is equal to or longer than a minimum group delay time in a frequency band from a direct current to a cutoff frequency of the low-pass filter . A physical quantity detection device comprising:
A physical quantity detecting device for detecting a physical quantity and outputs a signal corresponding to the magnitude of the detected said physical quantity,
A detection circuit that generates a detection signal corresponding to the physical quantity based on an output signal of the physical quantity detection element;
The circuit included in the physical quantity detection device detects the presence or absence of abnormality of one or more monitoring target signals to be monitored, and generates an abnormality flag signal indicating whether or not at least a part of the monitoring target signal is abnormal An abnormal flag generator to
Based on the abnormality flag signal, anda abnormality determination output unit for generating and outputting an abnormality determination signal indicating whether or not there is an abnormality in the operation of the physical quantity detecting device,
The detection circuit generates the detection signal through a low-pass filter,
The abnormality determination output unit,
Based on the abnormality flag signal over a predetermined time after the abnormality flag signal has changed from a value representing abnormality to a value representing normality, the abnormality determination signal is changed from a value representing abnormality to a value representing normality. Output ,
The physical quantity detection device according to claim 1, wherein the predetermined time is equal to or longer than a maximum group delay time of the low-pass filter . In the physical quantity detection device according to claim 1 or 2 ,
The abnormality determination output unit, after the abnormality flag signal has changed from a value indicating abnormality to a value indicating normality, after the value indicating normality continues for the predetermined time or longer, the abnormality determination signal is a value indicating abnormality. A physical quantity detection device characterized in that the output is changed to a value representing normality and output. The physical quantity detection device according to any one of claims 1 to 3 ,
The physical quantity detection device, wherein the abnormality determination output unit is configured to vary the predetermined time. A physical quantity detection device;
An abnormality diagnosis device;
Including
The physical quantity detection device is:
A physical quantity detecting device for detecting a physical quantity and outputs a signal corresponding to the magnitude of the detected said physical quantity,
A detection circuit that generates a detection signal corresponding to the physical quantity based on an output signal of the physical quantity detection element;
The circuit included in the physical quantity detection device detects the presence or absence of abnormality of one or more monitoring target signals to be monitored, and generates an abnormality flag signal indicating whether or not at least a part of the monitoring target signal is abnormal look including an abnormality flag generation unit that,
The detection circuit generates the detection signal through a low-pass filter,
The abnormality diagnosis device includes:
Based on the abnormality flag signal, determine whether there is an abnormality in the operation of the physical quantity detection device , and
Based on the abnormality flag signal over a predetermined time after changing to a value representing a normal from the value representing the abnormality flag signal is abnormal, have rows determination changes to normal from abnormal,
The abnormality diagnosis system for a physical quantity detection device, wherein the predetermined time is equal to or longer than a minimum group delay time in a frequency band from a direct current to a cutoff frequency of the low-pass filter . A physical quantity detection device;
An abnormality diagnosis device;
Including
The physical quantity detection device is:
A physical quantity detecting device for detecting a physical quantity and outputs a signal corresponding to the magnitude of the detected said physical quantity,
A detection circuit that generates a detection signal corresponding to the physical quantity based on an output signal of the physical quantity detection element;
The circuit included in the physical quantity detection device detects the presence or absence of abnormality of one or more monitoring target signals to be monitored, and generates an abnormality flag signal indicating whether or not at least a part of the monitoring target signal is abnormal look including an abnormality flag generation unit that,
The detection circuit generates the detection signal through a low-pass filter,
The abnormality diagnosis device includes:
Based on the abnormality flag signal, determine whether there is an abnormality in the operation of the physical quantity detection device , and
Based on the abnormality flag signal over a predetermined time after changing to a value representing a normal from the value representing the abnormality flag signal is abnormal, have rows determination changes to normal from abnormal,
The abnormality diagnosis system for a physical quantity detection device, wherein the predetermined time is equal to or longer than a maximum group delay time of the low-pass filter . At least a part of the monitoring target signal is detected by detecting the presence or absence of abnormality of one or more monitoring target signals to be monitored in a circuit included in the physical quantity detection device that generates a detection signal corresponding to the physical quantity via a low-pass filter. A detection step of determining whether or not there is an abnormality,
Based on the determination result in the detection step includes a determination step of determining whether or not there is an abnormality in the operation of the physical quantity detecting device,
In the determination step, when the detection result in the detection step changes from abnormality to normal, based on the detection result in the detection step over a predetermined period after the detection result in the detection step changes from abnormality to normal. Change the judgment result from abnormal to normal ,
The abnormality diagnosis method for a physical quantity detection device, wherein the predetermined time is equal to or longer than a minimum group delay time in a frequency band from a direct current to a cutoff frequency of the low-pass filter . At least a part of the monitoring target signal is detected by detecting the presence or absence of abnormality of one or more monitoring target signals to be monitored in a circuit included in the physical quantity detection device that generates a detection signal corresponding to the physical quantity via a low-pass filter. A detection step of determining whether or not there is an abnormality,
Based on the determination result in the detection step includes a determination step of determining whether or not there is an abnormality in the operation of the physical quantity detecting device,
In the determination step, when the detection result in the detection step changes from abnormality to normal, based on the detection result in the detection step over a predetermined period after the detection result in the detection step changes from abnormality to normal. Change the judgment result from abnormal to normal ,
The abnormality diagnosis method for a physical quantity detection device, wherein the predetermined time is equal to or longer than a minimum group delay time of the low-pass filter .

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