JP5346576B2 - Metal fine particle production equipment - Google Patents

Description

  The present invention relates to a metal fine particle production apparatus, and more particularly to a metal fine particle production apparatus that produces metal fine particles using metal foil pieces or metal particles as starting materials.

Conventionally, a method for producing metal fine particles having a size of several nanometers to several hundred nanometers has been proposed. For example, Patent Document 1 describes a method for producing metal fine particles by irradiating a metal foil piece with laser light. Specifically, the method described in Patent Document 1 stores, for example, a ketone, more specifically, a dispersion solution in which metal foil pieces are dispersed in an acetone solvent, in a beaker, and the metal foil from the side of the beaker. Laser light is irradiated to the piece. The metal foil piece irradiated with the laser light absorbs the laser light on its surface and causes explosive splitting from the inside due to thermal stress. Then, by repeating such splitting, metal fine particles (nanoparticles) are generated.
International Publication No. 2006/030605 Pamphlet

  However, the method described in Patent Document 1 has a problem that the glass container is broken during laser light irradiation, and the solution leaks out of the glass container. The breakage of the glass container is due to the following reasons. That is, the metal foil pieces in the solution are heated by laser light irradiation, and nanoparticles or particles until they become nanoparticles (submicron particles) are generated. The produced nanoparticles or submicron particles may adhere to the inner wall of the glass container. When the adhered particles are irradiated with laser light, heat is generated and accumulated. Thereby, a glass container is damaged by the accumulated heat of a glass inner wall, and the temperature difference of a glass container exterior.

  Therefore, an object of the present invention is to provide a metal fine particle production apparatus capable of producing metal fine particles safely and efficiently.

  The present invention employs the following configuration in order to solve the above problems. Note that the reference numerals in parentheses, supplementary explanations, and the like are examples of the correspondence with the embodiments described later in order to help understanding of the present invention, and do not limit the present invention.

  1st invention is a metal microparticle manufacturing apparatus which manufactures a metal microparticle from the metal foil piece or metal particle (metal foil piece 21) as a starting material. The metal fine particle manufacturing apparatus includes a first container (container 3) and a first lid (lid 4). A 1st container has an opening part in the upper part, and stores the solution (solution 2) which disperse | distributed the said metal foil piece or metal particle. The first lid has a hole and closes the opening of the first container. The hole of the first lid allows laser light to be applied to the metal foil piece or metal particle from above the first container. Then, a space between the solution interface in the first container and the first lid is filled with an inert gas. Here, the “metal foil piece” is a foil piece-like metal piece having a thickness of about 1 μm or less, and the “metal particle” is a fine particle-like metal of about several μm to 10 μm.

  According to the first invention, the first container storing the solution is damaged by directly irradiating the solution in which the metal foil pieces or metal particles are dispersed through the hole of the first lid from above. Metal fine particles can be produced without any problem. Moreover, since the opening part of the said 1st container is obstruct | occluded with the cover body, it can prevent that a solution jumps out when a laser beam is irradiated to a solution interface, and a solution leaks out of the 1st container. it can. Furthermore, ignition can be prevented by filling the inside of the first container with an inert gas. Thereby, the safety | security of an apparatus can be improved.

  In 2nd invention, you may further provide the stirring part (6, 7, 8, 14, 15) which stirs the said solution in a said 1st container.

  According to 2nd invention, it can prevent that the metal foil piece or metal particle in a solution aggregates or precipitates. Thereby, metal microparticles can be produced efficiently.

  In 3rd invention, the said stirring part may also contain a 2nd container (6), a stirring blade (7), and a supply part (8). The second container stores the solution extracted from the first container via an extraction port provided in the first container. The stirring blade stirs the solution stored in the second container by rotating in the second container. The supply unit extracts the solution from the second container and supplies the solution to the first container through a supply port provided in the first container or the first lid.

  According to the third invention, the solution can be stirred. Thereby, the density | concentration of a metal foil piece or a metal particle can be controlled, and a metal microparticle can be manufactured efficiently.

  In 4th invention, you may further provide a gas supply part (9). The gas supply unit supplies the inert gas to a space between the solution interface in the first container and the first lid.

  According to the fourth invention, the inside of the first container can be continuously filled with the inert gas. Thereby, ignition can be prevented.

  In the fifth invention, a gas exhaust part (17) may be further provided. The gas exhaust unit exhausts the gas present in the space between the solution interface in the first container and the first lid.

  According to the fifth invention, by removing the gas existing in the space between the first container and the first lid, the vapor of the solvent of the solution generated by the laser light irradiation is removed. Can do. Thereby, the obstruction factor of laser beam irradiation can be removed, and metal fine particles can be produced efficiently.

  In the sixth invention, the laser beam may be irradiated obliquely with respect to the solution interface.

  According to the sixth invention, by irradiating the laser beam obliquely with respect to the solution interface, the distance between the position where the laser beam is irradiated at the interface and the hole is longer than that when the laser beam is irradiated vertically. Become. Moreover, the laser beam is obliquely irradiated, so that the direction in which the solution jumps out of the hole. Thereby, it is possible to prevent the solution from leaking out of the first container due to the solution jumping.

  In a seventh aspect of the present invention, the apparatus may further include a second lid (lid 42) that is disposed closer to the solution interface than the first lid and has a hole. The laser light is irradiated through the hole of the first lid and the hole of the second lid.

  According to the seventh aspect, the safety of the apparatus can be further improved by further including the second lid. That is, even when the solution jumps by irradiating the laser beam to the solution interface and passes through the hole of the first lid, the second lid prevents the solution from leaking out of the first container. be able to.

  In the eighth invention, the hole of the first lid (lid 4) and the hole of the second lid (lid 42) are projected in a direction perpendicular to the solution interface. , They may be projected onto different positions of the solution interface.

  According to the eighth invention, since the laser light is irradiated obliquely with respect to the solution interface, even when the solution jumps, the possibility of the solution leaking out of the first container can be further reduced. it can.

  In the ninth invention, the third lid body (lid body 43), which is disposed closer to the solution interface than the second lid body and has a hole, a gas supply section (9), and a gas exhaust section (17). And may further be provided. The gas supply unit supplies the inert gas into the first container between the first lid and the first lid and into the first container between the third lid and the solution interface. Supply. The gas exhaust unit exhausts the gas present in the first container between the second lid body and the third lid body. And the said laser beam is irradiated through the hole of the said 1st cover body, the said 2nd cover body, and the said 3rd cover body. The holes of the first lid, the second lid, and the third lid are projected at different positions on the solution interface when projected in a direction perpendicular to the solution interface. .

  According to the ninth invention, it is possible to prevent the solution from leaking out of the first container by further including the third lid and irradiating the laser beam obliquely. In addition, an inert gas is supplied to the space surrounded by the first lid and the second lid and the space between the third lid and the solution interface, and the space between the second lid and the third lid. By exhausting the gas from the solution, the solvent vapor of the solution can be efficiently removed. Furthermore, since the inside of the first container can be easily filled with an inert gas, oxygen can be prevented from flowing into the first container. Thereby, ignition can be prevented.

  A tenth aspect of the invention is a metal fine particle production apparatus for producing metal fine particles using a metal foil piece or metal particles as a starting material, and includes a third container. The third container has a hole in the closed upper portion and stores a solution in which the metal foil pieces or metal particles are dispersed. The hole of the third container allows laser light to be irradiated to the metal foil piece or metal particle from above. Then, the space in the third container is filled with an inert gas.

  According to the tenth aspect of the invention, the solution in which the metal foil pieces or the metal particles are dispersed is directly irradiated with laser light through the hole of the third container from above without damaging the third container storing the solution. Metal fine particles can be produced. Moreover, since the upper part of the third container is closed, it is possible to prevent the solution from jumping out by irradiating the solution interface with the laser beam and leaking out of the third container.

  According to the present invention, metal fine particles can be produced without damaging the container storing the solution by directly irradiating the solution in which the metal foil pieces or metal particles are dispersed with laser light from above through the solution interface. it can.

(First embodiment)
With reference to the drawings, a metal fine particle production apparatus according to a first embodiment of the present invention will be described. First, with reference to FIG.1 and FIG.2, each part of the metal microparticle manufacturing apparatus which concerns on 1st Embodiment is demonstrated. Drawing 1 is a front view which looked at the whole metal particulate manufacture device concerning a 1st embodiment from the front. FIG. 2 is a side view of the entire metal fine particle manufacturing apparatus according to the first embodiment as viewed from the side.

(Description of each part of the metal fine particle production equipment)
As shown in FIGS. 1 and 2, the metal fine particle manufacturing apparatus 1 includes a container 3 for storing the solution 2, a lid body 4, a stirring container 6, a stirring propeller 7, and a pump 8. Provided (FIG. 1), and further provided with an inert gas supply unit 9 (FIG. 9). A laser generator 5 is attached to the metal fine particle manufacturing apparatus 1. The metal fine particle manufacturing apparatus 1 includes a beam diameter adjusting lens 11, a reflector 12, a power meter 13, an electromagnetic valve 14, a flow meter 15, and a float sensor 16. Hereinafter, each part will be described.

  Solution 2 is a dispersion solution in which metal foil pieces are dispersed in a dispersion (solvent). FIG. 3 is a view showing a state in which the metal foil pieces 21 are uniformly dispersed in the dispersion 20. As shown in FIG. 3, a metal foil piece (a flake-like metal piece having a thickness of about 1 μm or less and an average particle diameter of about several μm to several tens of μm) 21 is dispersed in the dispersion 20. . For the dispersion 20, ketones such as acetone are used. Specifically, the metal foil piece 21 may be gold, silver, copper, nickel, copper-zinc alloy (brass), or other metal foil pieces.

  The container 3 is for storing the solution 2 and is open at the top. The container 3 may be anything as long as it is resistant to the dispersion, but for example, a glass container, a plastic container, a metal container, or the like is used. As will be described later, metal particles are generated by irradiating the solution 2 stored in the container 3 with laser light. The opening of the container 3 is closed by the lid 4. Further, the container 3 is provided with an extraction port for extracting the solution 2 into the stirring vessel 6 and an injection port for injecting the solution 2. The stirring container 6 temporarily stores the solution 2 extracted from the extraction port of the container 3. The stirring propeller 7 stirs the solution 2 stored in the stirring container 6. The pump 8 sucks up the solution 2 stored in the stirring container 6 and injects the solution 2 into the container 3 through the inlet of the container 3. The electromagnetic valve 14 is for adjusting the flow rate of the solution 2 extracted from the container 3, and is controlled so that the liquid level of the solution 2 in the container 3 falls within a predetermined range. The float sensor 16 detects whether or not the liquid level is within a predetermined range. The flow meter 15 measures the flow rate of the solution 2 sucked up by the pump 8 and injected into the container 3 again.

  The lid 4 has a hole for allowing laser light to pass therethrough. The lid 4 is provided with a gas supply hole for supplying an inert gas. Thereby, the inside of the container 3 is filled with the inert gas. As the inert gas, any gas may be used. For example, nitrogen gas or argon gas is used.

  The laser generator 5 generates a laser pulse. As the laser light, a YAG laser, an excimer laser, a semiconductor laser, a dye laser, or the like can be used. The energy density of the laser light needs to be at least the energy density Eth1 (J / cm2) necessary for at least the metal foil piece 21 to reach the vicinity of the melting point. Furthermore, the energy density of the laser light may be equal to or higher than the energy density Eth2 (J / cm2) necessary for at least the metal foil piece 21 to reach the boiling point. The pulse width is set to about 10 nsec, for example. The laser generator 5 is fixed by a horizontal base 10. The beam diameter adjusting lens 11 adjusts the beam diameter of the laser light. The beam diameter of the laser light is set smaller than the diameter of the hole of the lid 4. The reflector 12 reflects the laser light. The laser beam reflected by the reflecting plate 12 is directly irradiated vertically from above on the interface of the solution 2 stored in the container 3 through the hole of the lid 4.

  The inert gas supply unit 9 is connected to a gas supply hole provided in the lid body 4 and supplies an inert gas to the space inside the container 3. The inert gas supply unit 9 keeps supplying the inert gas into the space inside the container 3 while the metal fine particle manufacturing apparatus 1 is operating, and fills the space inside the container 3 with the inert gas. The inert gas supplied to the inside of the container 3 passes through a gas exhaust hole provided on the side surface of the container 3 together with vapor generated by irradiating the interface of the solution 2 with laser light (vapor of the dispersion 20). The container 3 is evacuated. This mixed gas (mixed gas of the inert gas and the vapor of the dispersion 20) is exhausted through the exhaust device 17. In this way, the interior of the container 3 is always filled with the inert gas.

  The power meter 13 measures the power of part of the laser light emitted from the laser generator 5. Thereby, the power of the laser beam irradiated to the solution 2 can be measured and controlled.

(Description of operation of metal fine particle manufacturing apparatus 1)
Next, the operation of the metal fine particle manufacturing apparatus 1 will be described. The laser beam emitted from the laser generator 5 has its beam diameter adjusted by the beam diameter adjusting lens 11 and reflected by the reflecting plate 12. The laser beam reflected by the reflecting plate 12 directly reaches the interface of the solution 2 stored in the container 3 through the hole of the lid 4. Hereinafter, the principle of generating metal fine particles will be described, and the operation of this apparatus will be described.

  The laser light that has reached the interface of the solution 2 passes through the interface and is irradiated onto the metal foil piece 21 in the solution 2. The metal foil piece 21 absorbs the irradiated laser light at the surface layer portion. Thereby, the temperature of the surface layer part of the metal foil piece 21 rises rapidly and reaches the vicinity of the melting point of the metal foil piece 21. However, since the metal foil piece 21 has a high thermal conductivity, thermal diffusion occurs in the entire metal foil piece 21 in a very short time. As a result, the metal foil piece 21 is in a high temperature state as a whole. On the other hand, since the surface layer portion of the metal foil piece 21 is surrounded by the dispersion liquid 20, heat is taken away and the temperature decreases. Accordingly, the inside of the metal foil piece 21 is in a high temperature state, and the surface layer portion of the metal foil piece 21 is at a low temperature. Thermal stress is generated by this temperature difference, and explosive splitting occurs from the inside of the metal foil piece 21. In this way, the metal foil piece 21 is divided into a large number of fine particles (submicron particles of the order of several hundred nm). Further, by irradiation with laser light, nanoparticles (particle size on the order of about several tens of nanometers, for example, about 20 nm) are generated from submicron particles based on the same principle. As described above, metal fine particles are generated.

  On the other hand, when the metal foil piece 21 is irradiated with laser light near the interface of the solution 2, the solution 2 jumps because the metal foil piece 21 is explosively divided. The lid 4 prevents the splashed solution 2 from flowing out of the container 3.

  Further, at the interface of the solution 2, a part of the laser light is absorbed, whereby the temperature of the dispersion 20 at the interface rises and the dispersion 20 evaporates. However, since the inside of the container 3 is filled with the inert gas supplied from the inert gas supply unit 9, the vapor of the dispersion 20 does not ignite. As shown in FIG. 2, the inert gas supplied from the inert gas supply unit 9 is always supplied to the inside of the container 3 through the gas supply hole provided in the lid 4. On the other hand, a mixed gas containing the vapor of the dispersion 20 (mixed gas of the vapor of the dispersion 20 and an inert gas) is exhausted from the gas exhaust hole of the container 3 to the outside of the container 3 through the exhaust device 17, Or it is cooled with acetone or the like. The vapor of the cooled dispersion 20 is liquefied again. In this case, the amount of the inert gas supplied is made larger than the amount of the mixed gas flowing out. Thereby, the inside of the container 3 is always easily filled with the inert gas. Therefore, oxygen can be prevented from flowing into the container 3 through the hole of the lid body 4, and a fire can be prevented. Further, when the container 3 is filled with the vapor of the dispersion liquid 20, there may be a problem that the laser foil is impeded from irradiating the metal foil pieces 21 in the solution 2. However, such a problem can be prevented by providing a mechanism for exhausting the vapor of the dispersion liquid 20.

  Further, as shown in FIG. 1, the solution 2 is stored in the stirring container 6 through the electromagnetic valve 14. The solution 2 stored in the stirring vessel 6 is stirred by the stirring propeller 7. Then, the solution 2 stored in the stirring container 6 is sucked up by the pump 8 and injected into the container 3 again. With such a stirring mechanism, the metal foil pieces 21 in the solution 2 are dispersed substantially uniformly in the dispersion 20. When the metal foil pieces 21 in the solution 2 are aggregated or precipitated, the generation of metal fine particles may not be performed efficiently. Therefore, by providing a stirring mechanism for stirring the solution 2 in this way, the reaction is efficiently performed without the metal foil pieces 21 being aggregated or precipitated.

  Further, as shown in FIG. 1, the solution 2 stored in the stirring vessel 6 is sucked up by the pump 8 on the side wall and near the bottom of the stirring vessel 6 through a pipe connected to the pump 8. The pipe connected to the pump 8 is disposed at a position where it does not come into contact with the stirring propeller 7 when it rotates. In the stirring container 6, centrifugal force acts in the direction toward the side wall of the stirring container 6 on the metal foil piece 21 in the solution 2 as the stirring propeller 7 rotates. Due to this centrifugal force, the metal foil piece 21 moves in the direction of the side wall of the stirring vessel 6, and the concentration of the metal foil piece 21 becomes relatively high in the vicinity of the side wall of the stirring vessel 6. That is, since the metal foil piece 21 is larger in mass than the generated metal fine particles, it is strongly influenced by the centrifugal force. For this reason, the concentration of the metal foil pieces 21 is relatively high in the vicinity of the side wall of the stirring vessel 6. Furthermore, since the metal foil piece 21 is affected by gravity, the concentration of the metal foil piece 21 is higher in the vicinity of the bottom of the stirring container 6 than in the upper part of the stirring container 6. Therefore, the solution 2 on the side wall and near the bottom of the stirring vessel 6 is sucked up using the pump 8, and the sucked solution 2 is refluxed to the vessel 3. Thereby, in the container 3, the density | concentration of the metal foil piece 21 becomes higher, and it can be made to react efficiently. In addition, the solution 2 near the side wall and bottom of the stirring container 6 may be sucked up from a discharge port provided on the side wall and near the bottom of the stirring container 6. On the other hand, since the metal fine particles generated in the container 3 are smaller in mass than the metal foil pieces 21, they are not easily affected by centrifugal force. For this reason, in the vicinity of the center of the stirring vessel 6, the concentration of the metal fine particles is higher than that of the metal foil pieces 21. Therefore, by removing the solution 2 from the portion where the concentration of the metal fine particles is high, the generated metal fine particles can be efficiently extracted. For example, by providing a discharge port for collecting metal fine particles near the center of the bottom of the stirring vessel 6 and taking out the solution 2 from the discharge port, the solution 2 having a relatively high concentration of metal fine particles can be taken out. . Accordingly, the fine metal particles generated efficiently can be taken out.

  As described above, the metal particles are generated without damaging the container 3 by directly irradiating the interface of the solution 2 with laser light through the hole of the lid 4 from above without passing through the side surface of the container 3. Can do. Further, by providing the lid 4, the solution 2 can be prevented from jumping out at the interface of the solution 2 and leaking out of the container 3, and the inside of the container 3 can be filled with an inert gas. In addition, by filling the inside of the container 3 with an inert gas, it is possible to prevent the occurrence of a fire. Moreover, by providing the stirring mechanism as described above, the concentration of the solution 2 in the container 3 can be controlled, and the reaction can be performed efficiently.

  In addition, the said structure shows one Embodiment of this invention, and does not necessarily need to be the said structure. That is, any configuration may be used as long as the laser beam is directly irradiated onto the interface of the solution 2. For example, by directing the laser generator 5 toward the interface of the solution 2, the laser beam may be directly irradiated to the interface of the solution 2 without using the reflector 12.

  Further, the stirring vessel 6, the stirring propeller 7, the pump 8, and the mechanism for connecting these and circulating the solution 2 may be any as long as the solution 2 is stirred. For example, the stirring propeller 7 may be disposed inside the container 3 and the solution 2 stored in the container 3 may be stirred. Alternatively, the solution 3 may be stirred by vibrating the container 3 by applying vibration from the outside. Furthermore, it is not necessary to provide such a stirring mechanism as long as the metal foil pieces 21 are dispersed substantially uniformly in the dispersion 20 during the production of the metal fine particles.

  Further, in this embodiment, the solution 2 is stored in the container 3 opened at the top, and the container 3 is closed with the lid 4 having a hole. However, in other embodiments, the container 3 has a hole at the top (upper part). The solution 2 may be stored in a container (not open) and irradiated with laser light through the hole. That is, in another embodiment, a single container in which the container 3 and the lid 4 are integrated may be used. FIG. 4 is a view showing a container in which the container 3 and the lid 4 are integrated. As shown in FIG. 4, the container 33 is closed at the top and has a hole. In this embodiment, the laser beam is irradiated perpendicularly to the interface of the solution 2, but the laser beam may be irradiated obliquely with respect to the interface. By irradiating the laser beam obliquely with respect to the interface, the distance between the position where the laser beam is irradiated at the interface and the hole portion becomes longer than in the case where the laser beam is irradiated vertically. Moreover, the laser beam is irradiated obliquely, so that the direction in which the solution 2 jumps out of the hole. Thereby, it can prevent that the solution 2 leaks out of the container 3 when the solution 2 jumps.

  In this embodiment, a metal foil piece is used as a starting material. However, in other embodiments, minute metal particles (about several μm to 10 μm) may be used.

  Moreover, the dispersion liquid 20 is not limited to acetone, and any dispersion liquid 20 may be used as long as the metal foil pieces 21 are dispersed. For example, the dispersion liquid may be any of water, alcohols, and a solvent composed of hexane, a linear or cyclic ketone containing a small amount of long-chain alkylamine.

(Second Embodiment)
Next, a metal fine particle manufacturing apparatus according to a second embodiment of the present invention will be described with reference to FIG. In the second embodiment, there are a plurality of lids 4 of the metal fine particle manufacturing apparatus 1 according to the first embodiment, and the other parts have the same configuration as in the first embodiment. For this reason, about the same part, the code | symbol same as 1st Embodiment is attached | subjected and description is abbreviate | omitted.

  FIG. 5 is a view showing a part of the metal fine particle manufacturing apparatus according to the second embodiment. As shown in FIG. 5, in the second embodiment, the container 3 is closed by the lid body 4, the lid body 42, and the lid body 43. That is, the interior of the container 3 includes a space (first space) surrounded by the lid body 4 and the lid body 42, a space (second space) surrounded by the lid body 42 and the lid body 43, and the lid body. 43 and the space surrounded by the interface of the solution 2 (third space). And the cover body 4, the cover body 42, and the cover body 43 each have a hole similarly to 1st Embodiment. The laser light emitted from the laser generator 5 is directly applied to the interface of the solution 2 from above through each hole.

  Here, the holes of the lid body 4, the lid body 42, and the lid body 43 are provided at different positions of the lid bodies. That is, the holes of the lids are provided at positions that are projected at different positions on the interface when projected in a direction perpendicular to the interface of the solution 2. More specifically, the center of each hole is located on one straight line, and the straight line connecting the holes has a predetermined inclination with respect to the interface of the solution 2. Therefore, the laser light passing through each hole is irradiated obliquely with respect to the interface of the solution 2. In addition, each hole does not necessarily need to be located on one straight line, and a laser beam may pass through each hole by disposing a mirror in each space (first or second space). Good.

  In this way, by closing the container 3 with a plurality of lids, it is possible to prevent the solution 2 from leaking out of the container 3 when the solution 2 jumps. In addition, by irradiating the laser beam obliquely with respect to the interface (by providing the holes in each lid so that the straight line connecting the centers of the holes becomes oblique), the solution 2 jumps up. Even when it passes through the hole of the lid 43, the lid 42 can prevent the solution 2 from leaking out of the container 3.

  On the other hand, as shown in FIG. 5, a gas supply hole for supplying an inert gas to a space (first space) between the lid 4 and the lid 42 inside the container 3 is provided on the side surface of the container 3. 44, and a similar gas supply hole 45 is provided between the lid 43 and the interface of the solution 2. Further, similarly to the first embodiment, a gas exhaust hole for exhausting the inert gas and the vapor of the dispersion liquid 20 is provided on the side surface of the container 3 between the lid body 42 and the lid body 43. . An inert gas is supplied to the two gas supply holes by the inert gas supply unit 9. By providing two gas supply holes and one gas exhaust hole in this manner, the following gas flow occurs inside the container 3. That is, the inert gas supplied through the gas supply hole 45 fills the space (third space) between the interface of the solution 2 and the lid 43, and through the hole of the lid 43 together with the vapor of the dispersion 20. The liquid flows into a space (second space) between the lid 42 and the lid 43 inside the container 3. The inert gas supplied through the gas supply hole 44 fills the space (first space) between the lid body 4 and the lid body 42 inside the container 3 and passes through the hole of the lid body 4. It flows to the outside and flows into the space (second space) between the lid 42 and the lid 43 inside the container 3 through the hole of the lid 42. Then, the inert gas and the vapor of the dispersion liquid 20 filled in the space (second space) between the lid body 42 and the lid body 43 inside the container 3 are exhausted to the outside of the container 3 through the gas exhaust holes. When such a gas flow occurs, the inflow of oxygen into the container 3 can be prevented, and the ignition of the dispersion 20 to the vapor can be prevented.

  The holes of the lids may be provided at the same position, and the laser beam may be irradiated perpendicularly to the interface of the solution 2. Even in this case, even if the solution 2 jumps and passes through the hole of the lid body 43, the lid body 42 can prevent the solution 2 from leaking out of the container 3.

  Moreover, in this embodiment, although the container 3 was obstruct | occluded with three cover bodies, it cannot be overemphasized that the container 3 may be obstruct | occluded with two cover bodies. Further, the number of lids may be three or more.

  As described above, in the present invention, metal fine particles can be produced safely and efficiently, and can be used, for example, as a metal fine particle production apparatus.

The front view which looked at the whole metal microparticle manufacturing apparatus which concerns on 1st Embodiment from the front The side view which looked at the whole metal microparticle manufacturing apparatus which concerns on 1st Embodiment from the side The figure which showed a mode that the metal foil piece 21 was disperse | distributed uniformly to the dispersion liquid 20. The figure which showed the container with which the container 3 and the cover body 4 were united The figure which showed a part of metal fine particle manufacturing apparatus which concerns on 2nd Embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Metal fine particle manufacturing apparatus 2 Solution 3, 33 Container 4, 42, 43 Cover body 5 Laser generator 6 Stirring container 7 Stirring propeller 8 Pump 9 Inert gas supply part 10 Horizontal stand 11 Beam diameter adjustment lens 12 Reflector 13 Power meter 14 Solenoid valve 15 Flow meter 16 Float sensor 17 Exhaust device 20 Dispersion liquid 21 Metal foil pieces 44, 45 Gas supply hole

Claims (10)

A metal fine particle production apparatus for producing metal fine particles using a metal foil piece or metal particles as a starting material,
A first container having an opening at the top and storing a solution in which the metal foil pieces or metal particles are dispersed;
A hole that allows laser light to be applied to the metal foil piece or metal particles from above the first container, and a first lid that closes the opening of the first container;
The space between the solution interface in the first container and the first lid is filled with an inert gas, and the laser beam that has passed through the hole is directly irradiated onto the solution interface. , Metal fine particle production equipment.   The apparatus for producing fine metal particles according to claim 1, further comprising a stirring unit that stirs the solution in the first container. The stirring unit is
A second container for storing the solution extracted from the first container through an extraction port provided in the first container;
A stirring blade for stirring the solution stored in the second container by rotating in the second container;
And a supply unit for extracting the solution from the second container and supplying the solution to the first container through a supply port provided in the first container or the first lid. The metal fine particle manufacturing apparatus according to claim 2.   2. The metal fine particle production according to claim 1, further comprising a gas supply unit that supplies the inert gas to a space between the solution interface in the first container and the first lid. apparatus.   5. The apparatus for producing metal fine particles according to claim 4, further comprising a gas exhaust unit that exhausts a gas existing in a space between the solution interface in the first container and the first lid. .   The apparatus for producing fine metal particles according to claim 1, wherein the laser beam is irradiated obliquely with respect to the solution interface. A second lid that is disposed closer to the solution interface than the first lid and has a hole;
2. The apparatus for producing metal fine particles according to claim 1, wherein the laser light is irradiated through the hole of the first lid and the hole of the second lid.   The hole of the first lid and the hole of the second lid are projected at different positions on the solution interface when projected in a direction perpendicular to the solution interface. The apparatus for producing fine metal particles according to claim 7. A third lid that is disposed closer to the solution interface than the second lid and has a hole;
A gas supply unit for supplying the inert gas into the first container between the first lid and the second lid and into the first container between the third lid and the solution interface. When,
A gas exhaust part for exhausting the gas existing in the first container between the second lid and the third lid;
The laser light is irradiated through the holes of the first lid, the second lid, and the third lid,
The holes of the first lid, the second lid, and the third lid are projected at different positions on the solution interface when projected in a direction perpendicular to the solution interface. The apparatus for producing fine metal particles according to claim 7, characterized in that it is characterized in that: A metal fine particle production apparatus for producing metal fine particles using a metal foil piece or metal particles as a starting material,
A third container for storing a solution in which the metal foil pieces or metal particles are dispersed, having a hole through which laser light irradiated to the metal foil pieces or metal particles from above is passed on the closed top;
An apparatus for producing fine metal particles , wherein the space in the third container is filled with an inert gas, and laser light that has passed through the hole is directly irradiated onto the solution interface .

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