JP5343318B2 - Ultra-thin fan filter unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To unify the wind velocity distribution of air blown out of a filter in an ultrathin fan filter unit connecting a fan motor unit blowing opening with a filter unit sucking opening. <P>SOLUTION: The blowing opening of a fan motor unit 4 and the sucking opening of a filter unit 6 are connected, an inducing part 7 inducing wind blown out of the fan motor unit 4 to the upstream side of the filter unit 6 in the side of the fan motor unit 4 of the connected part and/or the filter unit 6, and a rectifying mechanism 13 is installed in the upstream side of the filter unit 6. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

  The present invention relates to an ultra-thin fan filter unit equipped with several types of fans and used in an environment that requires clean air in a manufacturing apparatus for manufacturing a semiconductor, a flat panel display, or the like or an inspection apparatus thereof. .

  Conventionally, fan filter units attached to semiconductor manufacturing equipment and the like are required to save installation space and the like as the manufacturing equipment becomes larger, and the fan filter unit itself is required to be thin in order to reduce the installation space. It is coming. The ultra-thin fan filter unit is characterized by connecting a fan unit with a blower inside the casing and a filter unit with a filter inside the casing into one unit. Is known. (For example, refer to Patent Document 1).

  The fan filter unit will be described below with reference to FIG. As shown in FIG. 6, a blower outlet 105 is opened in one flat surface of the casing 101a, and a filter unit 102 having a main filter 106 inside the casing behind it, and a suction port 104 in one flat surface of the casing 101b. And a fan unit 103 in which a pre-filter 107 is provided at the suction port and a blower 108 is provided in the casing behind it, and the inside of the casing is connected to the joint end surface of the filter unit 102 and the fan unit 103. A communication port 109 for communicating with each other was opened and connected by a detachable connecting means so as to be integrated.

JP 2000-342921 A

  In order to reduce the thickness of such a conventional fan filter unit, the fan unit and the filter unit are connected to each other. However, the air blown from the fan unit is supplied to the filter unit via the air path. However, since the air passage is narrowed to reduce the thickness and no rectifying mechanism is provided, there is a problem that air cannot be uniformly supplied to the upstream side of the filter. By supplying air, it is required to make the purified air blown from the downstream side of the filter uniform.

  In this type of fan filter unit, it is required to efficiently supply the air blown from the fan to the filter side by providing a member that can be easily manufactured.

  The present invention solves such a conventional problem, the fan motor unit and the filter are arranged in parallel in the chamber, a rectification mechanism is provided on the upstream side of the filter, and the fan motor unit and the filter are An object of the present invention is to provide an ultra-thin fan filter unit in which a wind speed distribution of air blown from a filter can be made uniform by disposing a guide portion therebetween.

In order to achieve the above object, an ultra-thin fan filter unit according to the present invention includes a fan motor unit including a fan, a motor, and a box-shaped chamber for storing them, and a box-shaped chamber. It is composed of a filter unit provided with a filter. The fan motor unit is provided with a suction port by opening the top surface, and is provided with a blower outlet by opening a side surface, and the filter unit is provided with a suction port by opening a side surface. In addition, the bottom surface is opened to provide an air outlet, and the fan is a turbo fan with the inlet port facing the top surface of the fan motor unit, and the fan motor unit outlet port and the filter unit inlet port The openings are connected to face each other and the fan motor unit side and / or the filter unit side of the connecting part is connected to the fan. The guide portion guides the air blown out of the down motor unit to the filter unit top provided, the ventilation surface of the guide portion, the guide plate is provided across the central portion of the air passage, flanked by this guide plate ventilation The path is narrowed from the fan motor unit side toward the filter unit side, and the ventilation path on the side surface side from the guide plate is widened from the fan motor unit side toward the filter unit side. .

  By this means, a fan filter unit capable of blowing the air blown from the fan motor unit to the upper part of the filter unit and blowing the purified air from the filter by passing through the guiding portion is obtained. .

  In addition, when the turbo fan requires a high external static pressure, it is possible to obtain a high static pressure and to obtain an ultra-thin fan filter unit capable of securing a necessary air volume.

Further, an ultra-thin fan filter unit in which the wind blown from the fan is uniformly supplied to the upstream side of the filter unit by the guide plate is obtained.

  Another means is that a guide portion is provided around the fan motor unit, and a guide portion that smoothly guides the air blown around the fan motor unit to the upper part of the filter without leakage is provided. is there.

  By this means, an ultra-thin fan filter unit that can be efficiently supplied to the upstream side of the filter unit without losing the wind blown from the fan is obtained.

Further, the other means is provided with a flat plate rectifying mechanism on the top surface side of the filter unit,
The rectifying mechanism is mounted on the upstream side of the filter provided inside the filter unit so as to face the fan motor unit.

  By this means, the air blown from the fan motor unit is guided to the upper part of the filter unit by the induction unit, so that the guided wind is rectified by the rectifying mechanism and the air blown from the fan motor unit is uniformly upstream. An ultra-thin fan filter unit can be obtained.

  Also, the wind supplied to the upstream side of the filter unit is changed in the direction of the wind by the rectification mechanism, and is supplied smoothly to the upstream side of the filter, and an ultra-thin fan filter unit with uniform wind speed blown from the filter is obtained. It is done.

  Another means is that the rectifying mechanism is a plurality of flat plate-like plates, and increases the area of the flat plate plate as the distance from the air outlet side of the fan motor unit increases. Is.

  By this means, the wind supplied to the upstream side of the filter unit is supplied to the filter side in order from the front side when viewed from the air outlet side of the fan motor unit by the rectifying mechanism, and the wind speed of the wind blown from the filter is increased. A uniform ultra-thin fan filter unit can be obtained.

  Further, the other means is that the rectifying mechanism is a plurality of plate-like plates, and a plurality of plate-like plates are attached to the inside of the filter unit, and as the distance from the air outlet side of the fan motor unit increases, It is characterized by changing height.

  By this means, the wind supplied to the upstream side of the filter unit is supplied to the filter side in order from the front side when viewed from the air outlet side of the fan motor unit by the rectifying mechanism, and the wind speed of the wind blown from the filter is increased. A uniform ultra-thin fan filter unit can be obtained.

  Further, another means is characterized in that a rectifying plate of a punching plate is provided on the top surface side of the filter unit, and the rectifying plate has an upstream opening ratio larger than a downstream opening ratio. is there.

  By this means, the wind supplied to the upstream side of the filter unit is supplied to the filter side in order from the front side when viewed from the air outlet side of the fan motor unit by the rectifying mechanism, and the wind speed of the wind blown from the filter is increased. A uniform ultra-thin fan filter unit can be obtained.

  In addition, since air is supplied to the upstream side of the filter via a plurality of holes provided in the punching plate, an ultra-thin fan filter unit with a uniform wind speed of the air blown from the filter can be obtained.

  Another means is that the rectifying plate is attached such that the upstream air passage becomes narrower as the distance from the fan motor unit side increases.

By this means, air is supplied to the upstream side of the filter via a plurality of holes provided in the punching plate in order from the front side when viewed from the air outlet side of the fan motor unit. An ultra-thin fan filter unit with uniform wind speed can be obtained.

  According to the present invention, even when space saving of the installation space of the fan filter unit is required, the fan motor unit is connected to the outlet of the fan motor unit and the suction port of the filter unit to achieve ultra-thinness. It is possible to provide an ultra-thin fan filter unit that can effectively supply the air blown from the fan to the upstream side of the filter.

  Further, it is possible to provide an ultra-thin fan filter unit that can efficiently supply air blown from the fan motor unit to the upstream side of the filter unit.

  In addition, since the fan used is a turbo fan, an ultra-thin fan filter unit that can obtain a high static pressure and secure the necessary air volume when high external static pressure is required is provided. it can.

  In addition, the ventilation part of the air blown from the fan motor unit is narrowed from the fan motor unit side to the filter unit side, and both side parts spread from the fan motor unit side to the filter unit side. By providing the guide plate as described above, it is possible to provide an ultra-thin fan filter unit in which the wind blown from the fan is uniformly supplied to the upstream side of the filter unit by the guide plate.

  In addition, it is possible to provide an ultra-thin fan filter unit in which the air blown around the fan motor unit by the guide portion moves along the side surface of the guide portion and can be smoothly guided to the upper portion of the filter without leakage.

  In addition, the shape of the rectifying mechanism is a flat plate, and it is installed inside the filter unit and attached to the upstream side of the filter. It is possible to provide an ultra-thin fan filter unit that is smoothly supplied to the side and has a uniform wind speed blown from the filter.

  Further, the flat plate rectifying mechanism is arranged with the height of the flat plate changed as it moves away from the blower outlet side of the fan motor unit. In turn, it is possible to provide an ultra-thin fan filter unit in which the wind speed of the wind supplied to the filter side and blown from the filter is uniform.

  Moreover, since the shape of the rectifying mechanism is a punching plate provided with a plurality of holes, air is supplied to the upstream side of the filter via the plurality of holes provided in the punching plate, so that the air is blown out of the filter. An ultra-thin fan filter unit with uniform wind speed can be provided.

  In addition, as the punching plate is moved away from the fan motor unit side, the upstream ventilation path is narrowed, so that it is supplied to the filter side sequentially from the front side when viewed from the blower outlet side of the fan motor unit. It is possible to provide an ultra-thin fan filter unit with a uniform wind speed.

The figure which shows the ultra-thin fan filter unit of Embodiment 1 of this invention ((a) same top view, (b) same sectional view) Sectional drawing seen from the plane side of the ultra-thin fan filter unit of Embodiment 1 Sectional view seen from the plane side of the ultra-thin fan filter unit of Reference Example 1 Sectional view seen from the front side of the ultra-thin fan filter unit of Reference Example 2 Sectional drawing seen from the plane side of the ultra-thin fan filter unit of Embodiment 2 Front center sectional view of a conventional ultra-thin fan filter unit

The invention according to claim 1 of the present invention includes a fan motor unit including a fan, a motor, and a box-shaped chamber for storing them, and a filter unit in which a filter is provided in the box-shaped chamber. The fan motor unit opens the top surface to provide a suction port, and the side surface opens to provide an air outlet. The filter unit opens the side surface to provide a suction port, and the bottom surface to open the air outlet. The fan is a turbo fan with the suction port facing the top surface of the fan motor unit, and the opening of the fan motor unit outlet and the opening of the filter unit suction port are opposed to each other. The air blown from the fan motor unit is forwarded to the fan motor unit side and / or the filter unit side of the connecting part. The guiding portion for guiding the filter unit top provided, the ventilation surface of the guide portion, the guide plate across the central portion of the air passage is provided, the filter unit side air passage sandwiched by the guide plate from the fan motor unit side The air passage on the side surface side from the guide plate is widened from the fan motor unit side toward the filter unit side . The fan motor unit outlet and the filter unit By connecting to the suction port, an ultra-thin shape is achieved, and the wind blown from the fan can be efficiently and uniformly supplied to the upstream side of the filter.

  In addition, the use of the turbofan has an effect that a high static pressure can be obtained and a necessary air volume can be ensured when a high external static pressure is required.

  In addition, a guide plate is provided so that the central portion of the guide portion is narrowed from the fan motor unit side to the filter unit side, and both side portions are spread from the fan motor unit side toward the filter unit side. It has the effect of being uniformly supplied to the upstream side of the filter unit.

  In addition, the guide part is arranged around the fan motor unit, and the air blown around the fan motor unit by the guide part moves along the side surface of the guide part and is smoothly filtered without leakage. It has the effect that it can be guided to the upper part.

  The ultra-thin fan filter unit according to any one of claims 1 to 7, characterized in that a rectifying mechanism is provided in the filter unit, and the wind guided to the upper part of the filter by the guiding portion is rectified. By the mechanism, it has the effect | action that it can supply to a filter upstream side smoothly.

  Further, a flat plate rectifying mechanism is provided on the top surface side of the filter unit, and the rectifying mechanism is attached to the fan motor unit facing the fan motor unit upstream of the filter provided inside the filter unit. The wind supplied to the upstream side of the filter unit is changed in the direction of the wind by the rectifying mechanism, smoothly supplied to the upstream side of the filter, and has the effect that the wind speed of the wind blown from the filter can be made uniform. .

  The rectifying mechanism is a plurality of flat plates, and increases the area of the flat plate as the distance from the air outlet of the fan motor unit increases. The wind supplied to the unit has the action of changing the wind direction by the rectifying mechanism, adjusting the amount of air supplied to the upstream and downstream sides of the filter unit, and uniforming the wind speed of the wind blown from the filter .

  Further, the rectifying mechanism is a plurality of plate-like plates, and a plurality of the plate-like plates are attached inside the filter unit, and the height of the plate-like plate changes as the distance from the air outlet side of the fan motor unit increases. The wind supplied to the filter unit is changed in the direction of the wind by the rectifying mechanism, the amount of air supplied to the upstream and downstream sides of the filter unit is adjusted, and the wind blown from the filter It has the effect of making the wind speed uniform.

  In addition, a rectifying plate of a punching plate is provided on the top surface side of the filter unit, and the rectifying plate is characterized in that the opening ratio on the upstream side is larger than the opening ratio on the downstream side. The supplied wind has an effect that the direction of the wind is changed by the rectifying mechanism, the amount of air supplied to the upstream and downstream sides of the filter unit is adjusted, and the wind speed of the wind blown from the filter can be made uniform.

  In addition, by using the punching plate as the rectifying mechanism, it is possible to uniformly supply the wind to the upstream side of the filter and to uniformize the wind speed of the wind blown from the filter.

  Further, the rectifying plate is attached so that the upstream air passage becomes narrower as it is farther from the fan motor unit side, and it is arranged in order from the front side when viewed from the air outlet side of the fan motor unit to the filter side. It has the effect | action that the wind speed of the wind supplied and blown off from a filter can be made uniform.

(Embodiment 1)
As shown in FIGS. 1 and 2, the fan motor unit 4 is composed of a turbo fan 1, a motor 2, and a box-shaped chamber 3A for housing them, and has a suction port on the top surface and an air outlet on the side surface. Is provided. The filter unit 6 has a filter 5 in a box-shaped chamber 3B, and has a suction port on a side surface and a blower port on a bottom surface. The outlet of the fan motor unit 4 and the suction port of the filter unit 6 are connected, and the fan motor unit 4 is blown out to the connected fan motor unit 4 side and / or the filter unit 6 side. A guide portion 7 for guiding the wind to the upstream side of the filter unit 6 is attached. Further, a guide portion 10 is provided around the turbofan 1, a guide plate 9 is erected on the guide portion 7, and a flat plate-like rectifying mechanism 13 is provided on the upstream side of the filter. The guide plate 9 is attached so that the downstream side of the central ventilation portion of the guide portion 10 becomes narrow.

  With the above configuration, when the fan motor unit 4 is operated, as indicated by the arrow in FIG. 1B, air is sucked from the suction port on the top surface of the fan motor unit 4 and sent into the chamber 3A. The air is fed into the chamber 3 </ b> B from the side surface of the fan motor unit 4 through the induction unit 7 and supplied to the upstream side of the filter unit 6. At this time, the wind blown out from the turbofan 1 can be efficiently spread to the upstream side of the filter unit 6 by the guide portion 7 and flow into the filter 5.

  As shown in FIG. 2, the wind blown from the fan 1 along the side surface of the guide portion 10 provided around the turbo fan 1 is guided to the guide portion 7. The air blown out from the turbofan 1 has a high air volume at the peripheral portion (the upper end portion and the lower end portion of the guide portion 7 in FIG. 1) in the guide portion 7. Therefore, the guide plate 9 is disposed so as to collect the air at the peripheral edge at the center. As a result, it is possible to reach the upper surface of the filter 5 evenly.

Rectifying mechanism 13 serves to deflect the sequential filter -5 face the inflowing air into the filter unit 6 performs equalization of air blown from the filter -5. This rectifying mechanism 13 is shown in FIG.
As shown in, the upstream height by lower than that of the downstream height, it is possible to uniformly supply air to the filter over five surfaces. Even at the same height, the same effect can be obtained by using the straightening mechanism 13 as a punching plate and making the upstream opening ratio larger than the downstream opening ratio.

( Reference Example 1 )
As shown in FIG. 3, the fan is a sirocco fan 11. The description of the same configuration as in FIGS.

  According to the above configuration, the use of the sirocco fan 11 can reduce noise when a large amount of airflow is not required. Air blown from the sirocco fan 11 is blown out along the tangential direction of the outer periphery of the fan. Therefore, the guide plate 9 is disposed so as to collect the air blown from the sirocco fan at the center. As a result, it is possible to evenly reach the upper surface of the filter 5.

( Reference Example 2 )
As shown in FIG. 4, the fan is a cross flow fan 12. The description of the same configuration as that shown in FIGS.

  According to the above configuration, by using the cross flow fan 12, the rectified air can be easily supplied to the upstream side of the filter 5 without providing the guide plate 9 in the guide portion 7.

(Embodiment 2 )
As shown in FIG. 5, the punching plate 14 is installed on the upstream side of the filter 5.

  In the above configuration, the air can be uniformly supplied to the upstream side of the filter 5 through the holes of the punching plate 14, and the wind speed of the air blown from the filter unit 6 can be made uniform.

  Note that the hole provided in the punching plate 14 has a higher rectifying effect when the opening area on the downstream side is increased.

  Moreover, the punching board 14 can enhance a rectification effect by attaching so that an upstream ventilation path may become narrow as it distances from the fan motor unit side.

  The ultra-thin fan filter unit according to the present invention aims to reduce the thickness by connecting the fan motor unit outlet and the filter unit suction port, and at the same time to make the air velocity distribution of the air blown from the filter uniform. Useful as a filter unit.

DESCRIPTION OF SYMBOLS 1 Turbofan 2 Motor 3A Chamber 3B Chamber 4 Fan motor unit 5 Filter 6 Filter unit 7 Guide part 9 Guide plate 10 Guide part 11 Sirocco fan 12 Cross flow fan 13 Rectification mechanism 14 Punching board

Claims (7)

A fan motor unit including a fan, a motor, and a box-shaped chamber for storing them;
Consists of a filter unit with a filter in a box-shaped chamber,
The fan motor unit opens the top surface to provide a suction port, and opens the side surface to provide a blowout port.
The filter unit has a side opening to provide a suction opening, a bottom opening to provide a blow outlet,
The fan is a turbo fan with a suction port facing the top surface of the fan motor unit, and the opening of the blower outlet of the fan motor unit and the opening of the suction port of the filter unit are opposed to each other,
An induction part for guiding the wind blown from the fan motor unit to the upper part of the filter unit is provided on the fan motor unit side and / or the filter unit side of the connecting part ,
On the ventilation surface of the guide portion, a guide plate is provided across the central portion of the ventilation path,
The ventilation path sandwiched between the guide plates is narrowed from the fan motor unit side toward the filter unit side, and the ventilation path on the side surface side from the guide plate is expanded from the fan motor unit side toward the filter unit side. This is an ultra-thin fan filter unit. The fan guide portion around the motor unit is provided, blown ultra thin fan filter unit according to claim 1, wherein the directing wind smoothly filter top without omission. A flat plate rectifying mechanism is provided on the top surface side of the filter unit,
The rectifying mechanism, ultra-thin fan filter unit according to claim 1 or 2, characterized in that mounted directly opposite to the fan motor unit to the filter upstream provided in the filter unit. 4. The ultrathin plate according to claim 3 , wherein the rectifying mechanism is a plurality of flat plates, and increases the area of the flat plate as the distance from the air outlet side of the fan motor unit increases. Type fan filter unit. The rectifying mechanism is a plurality of flat plates, and a plurality of the straight plates are attached to the inside of the filter unit, and the height of the flat plate changes as the distance from the blower outlet side of the fan motor unit increases. The ultra-thin fan filter unit according to claim 4 . On the top surface side of the filter unit, a punching plate current plate is provided,
The ultra-thin fan filter unit according to any one of claims 1 to 5 , wherein the rectifying plate has an upstream opening ratio larger than a downstream opening ratio. The ultra-thin fan filter unit according to claim 6 , wherein the rectifying plate is attached so that the upstream air passage becomes narrower as the distance from the fan motor unit side increases.

Images