JP5339940B2 - Double-sided adhesive tape for fixing abrasive cloth - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure-sensitive adhesive which is excellent in acid and alkali resistances, does not cause peeling in polishing, and can be peeled without substantially producing any adhesive deposit, and to provide a pressure-sensitive adhesive double coated tape for the fixation of abrasive cloth obtained using the pressure-sensitive adhesive. <P>SOLUTION: The pressure-sensitive adhesive includes a (meth)acrylic ester copolymer and a crosslinking agent, wherein the (meth)acrylic ester copolymer is a copolymer obtained by copolymerizing a monomer mixture including a (meth)acrylic ester monomer having an aliphatic ring skeleton, a (meth)acrylic ester monomer having a 6-14C chain skeleton, and a monomer having a carboxyl group. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

The present invention relates to a pressure-sensitive adhesive that has excellent resistance to acids and alkalis and can be peeled off without causing peeling during polishing and hardly causing adhesive residue. The present invention also relates to a double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth using the pressure-sensitive adhesive.

In the step of polishing the semiconductor wafer to a predetermined thickness, polishing is performed using a polishing cloth fixed to a surface plate of a polishing machine. In order to fix the polishing cloth to the surface plate of the polishing machine, a double-sided tape is usually used. This double-sided pressure-sensitive adhesive tape for fixing a polishing cloth is required to have sufficient adhesive strength so that the polishing cloth does not peel off during polishing, and when the used polishing cloth is replaced, it can be peeled off without any adhesive residue from the surface plate. I came.

Patent Document 1 discloses a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth in which a pressure-sensitive adhesive layer made of a nitrile rubber-based pressure-sensitive adhesive is provided on one surface of a plastic film and a removable pressure-sensitive adhesive layer is provided on the other surface. Has been. The double-sided pressure-sensitive adhesive tape for fixing a polishing cloth disclosed in Patent Document 1 has a pressure-sensitive adhesive layer side made of a nitrile rubber-based pressure-sensitive adhesive bonded to the polishing cloth and a removable pressure-sensitive adhesive layer side bonded to a surface plate. use. In the Example of patent document 1, the copolymer formed by copolymerizing acrylic acid, butyl acrylate, and vinyl acetate is used as an adhesive which comprises a releasable adhesive layer. The double-sided pressure-sensitive adhesive tape for fixing a polishing cloth disclosed in Patent Document 1 has higher adhesive strength after being immersed in a 20% solution of fine cerium oxide powder at 50 ° C. for 5 days than when both sides are made of an acrylic pressure-sensitive adhesive. Can be maintained.

Patent Document 2 discloses a layer in which a pressure-sensitive adhesive layer mainly composed of an acrylic polymer is laminated on one surface of a plastic film support and a heat-active pressure-sensitive adhesive layer made of polyester or polyurethane is laminated on the pressure-sensitive adhesive layer. There is disclosed a double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth, in which a detachable pressure-sensitive adhesive layer is provided on the other surface. The double-sided pressure-sensitive adhesive tape for fixing a polishing cloth disclosed in Patent Document 2 is used with a thermally active pressure-sensitive adhesive layer adhered to an abrasive. The double-sided pressure-sensitive adhesive tape for fixing abrasive cloth disclosed in Patent Document 2 is compared with the case where an acrylic pressure-sensitive adhesive layer is used on both sides, when immersed in a 50 ° C. aqueous solution adjusted to pH 10 with potassium hydroxide for 5 days. Can maintain high adhesive strength.

However, in recent years, since a strongly acidic or strongly alkaline slurry is used when polishing a semiconductor wafer or the like, the double-sided pressure-sensitive adhesive tape for fixing a polishing cloth disclosed in Patent Documents 1 and 2 has a pressure-sensitive adhesive on the surface plate side. There was a problem that the layer easily deteriorates due to the influence of acid or alkali and sometimes peeled off during polishing. In addition, if the pressure-sensitive adhesive layer on the polishing cloth fixing side described in Patent Documents 1 and 2 is also used on the surface plate side, resistance to acid and alkali is excellent, but when replacing the used polishing cloth It was not possible to easily peel from the surface plate.

As pressure-sensitive adhesives having excellent alkali resistance, for example, Patent Document 3 discloses styrene, (meth) acrylic acid ester having a cyclic structure, (meth) acrylic acid alkyl ester having a chain structure, A pressure-sensitive adhesive mainly comprising a polymer copolymerized with a carboxylic acid having a heavy bond is disclosed. The pressure-sensitive adhesive disclosed in Patent Document 3 does not dissolve even when immersed in a 2.38% by mass TMAH aqueous solution. However, when the adhesive excellent in alkali resistance disclosed in Patent Document 3 is used for the pressure-sensitive adhesive layer for fixing the surface plate of the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth, it adheres when the used polishing cloth is replaced. A stripping solution was required to dissolve and remove the layer, and could not be easily stripped again.

JP-A-6-145611 JP-A-6-172721 JP 2008-066341 A

An object of the present invention is to provide a pressure-sensitive adhesive that has excellent resistance to acids and alkalis and can be peeled off without causing peeling during polishing and hardly causing adhesive residue. Another object of the present invention is to provide a double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth using the pressure-sensitive adhesive.

The present invention is a pressure-sensitive adhesive containing a (meth) acrylic acid ester copolymer and a cross-linking agent, wherein the (meth) acrylic acid ester copolymer has a (meth) acrylic acid having an aliphatic ring skeleton. The pressure-sensitive adhesive is a copolymer obtained by copolymerizing a monomer mixture containing an ester monomer, a (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms, and a monomer having a carboxyl group. .
The present invention is described in detail below.

By using a (meth) acrylic acid ester copolymer having a specific structure, the present inventors have excellent resistance to acids and alkalis, so that no peeling occurs during polishing and almost no adhesive residue is left. It has been found that an adhesive that can be peeled off without being produced is obtained, and the present invention has been completed.

The pressure-sensitive adhesive of the present invention contains a (meth) acrylic acid ester copolymer.
The (meth) acrylic acid ester copolymer is obtained by copolymerizing a monomer mixture.
The monomer mixture contains a (meth) acrylic acid ester monomer having an aliphatic ring skeleton.
When the monomer mixture contains the (meth) acrylic acid ester monomer having the aliphatic ring skeleton, the pressure-sensitive adhesive of the present invention is excellent in shear resistance. In addition, the (meth) acrylic acid ester monomer having an aliphatic ring skeleton does not affect the polarity of the obtained (meth) acrylic acid ester copolymer and has a rigid skeleton. The agent is difficult to hydrolyze and is excellent in acid resistance and alkali resistance.

Although the (meth) acrylic acid ester monomer which has the said aliphatic ring skeleton is not specifically limited, The (meth) acrylic acid ester represented by following General formula (1) is suitable.

In General Formula (1), R ¹ represents a hydrogen atom or a methyl group, and R ² represents an organic group having 5 to 15 carbon atoms having an aliphatic ring skeleton.

The (meth) acrylic acid ester represented by the general formula (1) is not particularly limited, and examples thereof include cyclohexyl (meth) acrylate, 2-methylcyclohexyl (meth) acrylate, and 3-methylcyclohexyl (meth) acrylate. , (Meth) acrylic acid 4-ethylcyclohexyl, (meth) acrylic acid isobornyl and the like. These (meth) acrylic acid ester monomers may be used alone or in combination of two or more. Among them, cyclohexyl (meth) acrylate is preferable because it has low permeability of an aqueous alkali solution and is not easily subjected to ester hydrolysis.

The content of the (meth) acrylic acid ester monomer having an aliphatic ring skeleton in the monomer mixture is not particularly limited, but a preferred lower limit is 5% by weight and a preferred upper limit is 25% by weight. When the content of the (meth) acrylic acid ester monomer having an aliphatic ring skeleton is less than 5% by weight, the cohesiveness of the obtained pressure-sensitive adhesive is lowered, and when used for a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth, polishing is performed. Occasionally, the polishing cloth may not be able to withstand the shearing force applied to the pressure-sensitive adhesive, and the adhesive residue may be generated due to cohesive failure when re-peeling to replace the used polishing cloth. When the content of the (meth) acrylic acid ester monomer having an aliphatic ring skeleton exceeds 25% by weight, the resulting adhesive has low adhesiveness, and when used for a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth, The abrasive cloth may peel off.
The minimum with more preferable content of the (meth) acrylic acid ester monomer which has the said aliphatic ring skeleton is 7 weight%, and a more preferable upper limit is 23 weight%.

The monomer mixture contains a (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms.
When the monomer mixture contains the (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms, the hydrophobicity of the resulting (meth) acrylic acid ester copolymer is increased, and an acidic aqueous solution is obtained. In addition, the pressure-sensitive adhesive of the present invention is excellent in acid resistance and alkali resistance because the penetration of the alkaline aqueous solution into the pressure-sensitive adhesive is suppressed and is less susceptible to hydrolysis. Moreover, the glass transition temperature (Tg) of the (meth) acrylic acid ester copolymer obtained becomes low by using the said (meth) acrylic acid ester monomer which has a C6-C14 chain | strand-type frame | skeleton, and this invention The adhesive is excellent in adhesion.

When the chain skeleton has 5 or less carbon atoms, the resulting (meth) acrylic acid ester copolymer is less hydrophobic, so that an acidic aqueous solution or an alkaline aqueous solution easily penetrates into the copolymer. The permeated acid or alkali acts as a catalyst to cause a hydrolysis reaction of the ester site of the (meth) acrylic acid ester copolymer, and chemical deterioration of the (meth) acrylic acid ester copolymer occurs. When the chain skeleton has 15 or more carbon atoms, the Tg of the resulting (meth) acrylic acid ester copolymer is increased, so that the fluidity of the resulting pressure-sensitive adhesive is lowered and the adhesion is deteriorated.
The preferable lower limit of the carbon number of the chain skeleton is 7, and the preferable upper limit is 12.

The (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms is not particularly limited, but a (meth) acrylic acid alkyl ester represented by the following general formula (2) is preferable.

In General Formula (2), R ³ represents a hydrogen atom or a methyl group, and R ⁴ represents an alkyl group having 6 to 14 carbon atoms.

The (meth) acrylic acid alkyl ester represented by the general formula (2) is not particularly limited. For example, 2-ethylhexyl (meth) acrylate, octyl (meth) acrylate, 2-ethyloctyl (meth) acrylate , Nonyl (meth) acrylate, isononyl (meth) acrylate, decyl (meth) acrylate, isodecyl (meth) acrylate, lauryl (meth) acrylate, isotetradecyl (meth) acrylate, and the like. These (meth) acrylic acid alkyl esters may be used alone or in combination of two or more. Among them, 2-ethylhexyl (meth) acrylate is preferable because it has low penetration of an aqueous solution and is not easily subjected to ester hydrolysis.

The content of the (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms in the monomer mixture is not particularly limited, but a preferable lower limit is 65% by weight and a preferable upper limit is 92% by weight. When the content of the (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms is less than 65% by weight, the pressure-sensitive adhesive obtained has low adhesiveness, and the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth is used. When used, the polishing cloth may be peeled off during polishing. When the content of the (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms exceeds 92% by weight, the cohesiveness of the obtained adhesive becomes low, and the double-sided adhesive tape for fixing the polishing cloth is used. In such a case, the polishing cloth may not be able to withstand the shearing force applied to the pressure-sensitive adhesive during polishing, or the adhesive residue may be generated due to cohesive failure when re-peeling to replace the used polishing cloth.
The more preferable lower limit of the content of the (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms is 70% by weight, and the more preferable upper limit is 90% by weight.

The monomer mixture contains a monomer having a carboxyl group.
When the monomer mixture contains the monomer having the carboxyl group, the pressure-sensitive adhesive of the present invention has excellent cohesiveness and high interfacial adhesive strength. Therefore, when the pressure-sensitive adhesive of the present invention is used for a double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth, it is possible to prevent the occurrence of adhesive residue when re-peeling, and to the adhesive surface as a moment in the rotational direction during polishing. Generation | occurrence | production of the void by the adhesive layer or the adhesion interface by the applied force can be suppressed, and peeling of the polishing cloth due to the acid or alkali slurry liquid penetrating into the void and reducing the adhesion area can be effectively prevented.

The monomer having a carboxyl group is not particularly limited, and examples thereof include an unsaturated carboxylic acid having a (meth) acryloyl group and an unsaturated carboxylic acid having an ethylenic double bond.
The unsaturated carboxylic acid having the (meth) acryloyl group is not particularly limited. For example, (meth) acrylic acid, (meth) acryloyl acetic acid, (meth) acryloylpropionic acid, (meth) acryloylbutyric acid, (meth) acryloylpentane An acid etc. are mentioned.
The unsaturated carboxylic acid having an ethylenic double bond is not particularly limited, and examples thereof include unsaturated monocarboxylic acids such as crotonic acid, unsaturated dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid. And anhydrides of these unsaturated carboxylic acids. These monomers having a carboxyl group may be used alone or in combination of two or more.

Although content of the monomer which has the said carboxyl group in the said monomer mixture is not specifically limited, A preferable minimum is 2 weight% and a preferable upper limit is 10 weight%. If the content of the monomer having a carboxyl group is less than 2% by weight, the cohesiveness and interfacial adhesive force of the pressure-sensitive adhesive are lowered, and when used for a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth, the used polishing cloth is replaced. For this reason, cohesive failure may occur when re-peeling, and adhesive residue may be generated, or the polishing cloth may be peeled off during polishing. If the content of the monomer having a carboxyl group exceeds 10% by weight, the tackiness of the pressure-sensitive adhesive is lowered, initial adhesiveness is deteriorated, and the polishing cloth may be peeled off.
The minimum with more preferable content of the monomer which has the said carboxyl group is 2.5 weight%, and a more preferable upper limit is 9 weight%.

The monomer mixture preferably contains a monomer having an amino group and / or an amide group.
When the monomer mixture contains a monomer having the amino group and / or amide group, the pressure-sensitive adhesive of the present invention has high cohesiveness. This is presumably because the monomer having a carboxyl group and the monomer having an amino group and / or an amide group are pseudo-crosslinked by forming an ionic bond or a hydrogen bond. Therefore, when the pressure-sensitive adhesive of the present invention is used for a double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth, it is possible to prevent the occurrence of adhesive residue when re-peeling, and to the adhesive surface as a moment in the rotational direction during polishing. Generation | occurrence | production of the void by the adhesive layer or the adhesion interface by the applied force can be suppressed, and peeling of the polishing cloth due to the acid or alkali slurry liquid penetrating into the void and reducing the adhesion area can be effectively prevented.

The monomer having the amino group and / or amide group is not particularly limited, and examples thereof include acrylamide, methacrylamide, aminoethyl (meth) acrylate, dimethylaminoethyl (meth) acrylate, diethylaminoethyl (meth) acrylate, and the like. Can be mentioned. These monomers having an amino group and / or an amide group may be used alone or in combination of two or more. Especially, it is hard to receive hydrolysis, and the (meth) acrylic acid ester monomer having the above aliphatic ring skeleton, the above (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms, and / or the above carboxyl. Acrylamide is preferred because it is easily copolymerized with a monomer having a group.

The content of the monomer having an amino group and / or amide group in the monomer mixture is not particularly limited, but a preferable lower limit is 0.1% by weight and a preferable upper limit is 2% by weight. When the content of the monomer having an amino group and / or amide group is less than 0.1% by weight, the cohesiveness of the pressure-sensitive adhesive is lowered, and when used for a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth, the used polishing cloth When re-peeling to replace the adhesive, there may be a cohesive failure resulting in adhesive residue, or the polishing cloth may be peeled off during polishing. When the content of the monomer having an amino group and / or amide group exceeds 2% by weight, the tackiness of the pressure-sensitive adhesive is lowered, initial adhesiveness is deteriorated, and the polishing cloth may be peeled off. In addition, when the content of the monomer having an amino group and / or amide group exceeds 2% by weight, the water-absorbing property of the resulting (meth) acrylic acid ester copolymer increases. Or an alkaline aqueous solution may easily penetrate. The permeated acid or alkali acts as a catalyst to cause a hydrolysis reaction of the ester site of the (meth) acrylic acid ester copolymer, and chemical deterioration of the (meth) acrylic acid ester copolymer may occur.
The more preferable lower limit of the content of the monomer having an amino group and / or amide group is 0.2% by weight, and the more preferable upper limit is 1.5% by weight.

The monomer mixture may be combined with the (meth) acrylic acid ester monomer having an aliphatic ring skeleton, the (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms, or the monomer having a carboxyl group. It may contain other polymerizable monomers. Furthermore, when the monomer having the amino group and / or amide group is contained, the monomer mixture includes the (meth) acrylic acid ester monomer having the aliphatic ring skeleton, and the chain skeleton having 6 to 14 carbon atoms. A (meth) acrylic acid ester monomer having a monomer, a monomer having the carboxyl group, or another monomer copolymerizable with the monomer having the amino group and / or amide group may be contained. In the present specification, such a monomer is also simply referred to as “other monomer”.
By containing the other monomer, the pressure-sensitive adhesive of the present invention can obtain a high cohesive force by increasing the intermolecular interaction of the obtained (meth) acrylic acid ester copolymer. Further, when the other monomer has a polar group, the pressure-sensitive adhesive of the present invention can obtain a high interfacial adhesive force by causing the polar group to interact with the surface of an adherend such as a polishing cloth. .

The other monomer is not particularly limited, and examples thereof include a nitrile derivative containing an ethylenic double bond, an alcohol derivative containing an ethylenic double bond, and an ether derivative containing an ethylenic double bond.

Although content of the said other monomer in the said monomer mixture is not specifically limited, A preferable upper limit is 15 weight%. When the content of the other monomer exceeds 15% by weight, the pressure-sensitive adhesive obtained has low adhesiveness, and when used for a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth, the polishing cloth may be peeled off during polishing.
A more preferable upper limit of the content of the other monomer is 12% by weight.

Although the weight average molecular weight of the said (meth) acrylic acid ester copolymer is not specifically limited, A preferable minimum is 200,000 and a preferable upper limit is 1 million. When the weight average molecular weight of the (meth) acrylic acid ester copolymer is less than 200,000, the cohesiveness of the resulting pressure-sensitive adhesive is lowered, and cohesive failure occurs when re-peeling to replace the used polishing cloth. Adhesive residue may occur. When the weight average molecular weight of the (meth) acrylic acid ester copolymer exceeds 1,000,000, the adhesive strength is lowered, and when the obtained pressure-sensitive adhesive is used for a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth, the polishing cloth is peeled off during polishing. Sometimes.
In addition, in this specification, the said weight average molecular weight means the value measured in polystyrene conversion by the gel permeation chromatography (GPC) method. Specifically, for example, the diluted solution obtained by diluting the (meth) acrylic acid ester copolymer 100 times with tetrahydrofuran (THF) is filtered through a filter, and the obtained filtrate is filtered with a column (for example, Water It can be measured by the GPC method using a trade name “2690 Separations Model” manufactured by the company.

The method for producing the (meth) acrylic acid ester copolymer is not particularly limited. For example, the (meth) acrylic acid ester monomer having the aliphatic ring skeleton, the chain skeleton having 6 to 14 carbon atoms ( Examples thereof include a polymerization method in which a monomer mixture containing a (meth) acrylic acid ester monomer and the above-mentioned monomer having a carboxyl group and another monomer to be blended as necessary is subjected to a radical reaction in the presence of a polymerization initiator. It is done.
The said polymerization method is not specifically limited, For example, conventionally well-known polymerization methods, such as solution polymerization, emulsion polymerization, suspension polymerization, and block polymerization, can be used.

The solvent used for the solution polymerization is not particularly limited, and examples thereof include ethyl acetate, tetrahydrofuran, acetone, cyclohexane, benzene, toluene, cyclohexyl acetate, dimethyl sulfoxide and the like.

Although the compounding quantity of the solvent used for the said solution polymerization is not specifically limited, A preferable minimum is 25 weight part and a preferable upper limit is 300 weight part with respect to 100 weight part of said monomer mixtures. When the blending amount of the solvent is less than 25 parts by weight, the molecular weight distribution of the resulting (meth) acrylic acid ester copolymer is widened, and the pressure-sensitive adhesive and cohesiveness of the pressure-sensitive adhesive are lowered. When used for tape, the polishing cloth may not be able to withstand the shearing force applied to the adhesive during polishing, or the adhesive residue may be caused by cohesive failure when re-peeling to replace the used polishing cloth. There is. If the amount of the solvent exceeds 300 parts by weight, it may be difficult to make the thickness of the adhesive layer uniform when preparing a double-sided adhesive tape for fixing an abrasive cloth, or it may be necessary to remove the solvent. There are things to do.

The polymerization initiator is not particularly limited. For example, 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane, t-hexylperoxypivalate, t-butylperoxypivalate, Lauroyl peroxide, 2,5-dimethyl-2,5-bis (2-ethylhexanoylperoxy) hexane, t-hexylperoxy-2-ethylhexanoate, t-butylperoxy-2-ethylhexanoate And t-butyl peroxyisobutyrate, t-butyl peroxy-3,5,5-trimethylhexanoate, t-butyl peroxylaurate and the like. These polymerization initiators may be used alone or in combination of two or more. Of these, 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane and t-hexylperoxypivalate are preferable.

Although the compounding quantity of the said polymerization initiator is not specifically limited, A preferable minimum is 0.02 weight part with respect to 100 weight part of said monomer mixtures, A preferable upper limit is 0.5 weight part. When the blending amount of the polymerization initiator is less than 0.02 parts by weight, the polymerization reaction may be insufficient, or the polymerization reaction may take a long time. If the amount of the polymerization initiator exceeds 0.5 parts by weight, the weight average molecular weight of the resulting (meth) acrylic acid ester copolymer may be too low, or the molecular weight distribution may be too wide. As a result, when the obtained adhesive is used for double-sided adhesive tape for fixing abrasive cloth, the abrasive cloth peels off without being able to withstand the shearing force applied to the adhesive during polishing, or re-detached to replace the used abrasive cloth When doing so, it may cause cohesive failure and adhesive residue.

The pressure-sensitive adhesive of the present invention contains a crosslinking agent.
By containing the crosslinking agent, a crosslinked structure can be formed in the (meth) acrylic acid ester copolymer. Moreover, it becomes easy to adjust the gel fraction of the adhesive of this invention by adjusting suitably the kind and quantity of the said crosslinking agent.

The said crosslinking agent is not specifically limited, For example, an isocyanate type crosslinking agent, an aziridine type crosslinking agent, an epoxy-type crosslinking agent, a metal chelate type crosslinking agent etc. are mentioned. Among these, an isocyanate-based crosslinking agent is preferable because it easily exhibits performance such as heat resistance and durability.

Although the compounding quantity of the said crosslinking agent is not specifically limited, A preferable minimum is 0.1 weight part and a preferable upper limit is 4 weight part with respect to 100 weight part of said (meth) acrylic acid ester copolymers. When the amount of the crosslinking agent is less than 0.1 parts by weight, the (meth) acrylic acid ester copolymer is insufficiently crosslinked, and the resulting adhesive is used for a double-sided adhesive tape for fixing an abrasive cloth. When re-peeling to replace the used polishing cloth, cohesive failure may occur and adhesive residue may be generated. When the amount of the crosslinking agent exceeds 4 parts by weight, the adhesive strength and tack of the resulting adhesive may be reduced.
A more preferred lower limit of the amount of the crosslinking agent is 0.2 parts by weight, and a more preferred upper limit is 2.5 parts by weight.

The pressure-sensitive adhesive of the present invention may further contain a tackifier resin.
The tackifying resin is not particularly limited, and examples thereof include a xylene resin, a phenol resin, a rosin resin, and a terpene resin. These tackifier resins may be used alone or in combination of two or more. Among these, a xylene resin is preferable, and an alkylphenol reaction product of the xylene resin is more preferable.

The pressure-sensitive adhesive of the present invention may further contain conventionally known additives such as a colorant, a filler and an anti-aging agent as necessary.

A double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth, in which the pressure-sensitive adhesive layer containing the pressure-sensitive adhesive of the present invention is laminated and integrated on at least one surface of the substrate, is also one aspect of the present invention.

The said base material is not specifically limited, For example, the synthetic resin film which consists of polyester resin, a polypropylene resin, etc., the foamed sheet etc. which consist of polyolefin resin, such as a polyurethane resin and a polypropylene resin, etc. are mentioned. Among them, a synthetic resin film made of a polyester resin is preferable because it is flat, has little thickness fluctuation, and has a certain strength.

The thickness of the substrate is not particularly limited, but when it is a non-foamed material, the preferred lower limit is 15 μm and the preferred upper limit is 300 μm. When the thickness of the non-foam base material is less than 15 μm, the base material breaks when the resulting double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth is peeled off from the surface plate of the polishing machine, and cannot be peeled cleanly. Sometimes. When the thickness of the non-foamed substrate exceeds 300 μm, it is difficult to adjust the pressure when the polishing cloth and the resulting double-sided pressure-sensitive adhesive tape for fixing the polishing cloth are pressure-bonded. The adhesive strength with the tape may be reduced. The minimum with more preferable thickness of the base material which is the said non-foaming body is 20 micrometers, and a more preferable upper limit is 200 micrometers.

When the said base material is a foam, the preferable minimum of the thickness of the said base material is 50 micrometers, and a preferable upper limit is 3000 micrometers. When the thickness of the base material that is the foam is less than 50 μm, the base material breaks when the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth obtained is peeled off from the surface plate of the polishing machine, and cannot be peeled cleanly. There is. When the thickness of the base material which is the foam exceeds 3000 μm, the base material is pushed in and deformed by the pressure during polishing, and the polishing accuracy of the polished article may be lowered. The minimum with more preferable thickness of the base material which is the said foam is 100 micrometers, and a more preferable upper limit is 2000 micrometers.

Although the thickness of the said adhesive layer is not specifically limited, A preferable minimum is 20 micrometers and a preferable upper limit is 100 micrometers. When the thickness of the pressure-sensitive adhesive layer is less than 20 μm, the adhesive strength becomes insufficient, and the polishing cloth may be peeled off during polishing. When the thickness of the pressure-sensitive adhesive layer exceeds 100 μm, the cohesiveness of the pressure-sensitive adhesive layer is lowered, and when the used polishing cloth is replaced, it may be cohesively broken to leave a paste residue. The more preferable lower limit of the thickness of the pressure-sensitive adhesive layer is 25 μm, the more preferable upper limit is 80 μm, the still more preferable lower limit is 30 μm, and the still more preferable upper limit is 60 μm.

The manufacturing method of the double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth of the present invention is not particularly limited, and examples thereof include the following methods.

First, a solvent is added to the pressure-sensitive adhesive of the present invention to prepare a pressure-sensitive adhesive solution, and the resulting pressure-sensitive adhesive solution is applied to the surface of the substrate, and the solvent in the pressure-sensitive adhesive solution is completely removed by drying. Form. Next, a release film or release paper is overlaid on the formed pressure-sensitive adhesive layer so that the release treatment surface faces the pressure-sensitive adhesive layer.

The said solvent is not specifically limited, For example, ethyl acetate, tetrahydrofuran, acetone, cyclohexane, benzene, toluene etc. are mentioned.

Next, a pressure-sensitive adhesive solution (the pressure-sensitive adhesive of the present invention or a pressure-sensitive adhesive different from the pressure-sensitive adhesive of the present invention) may be applied to the release treatment surface of the newly prepared release film, and the solvent in the pressure-sensitive adhesive solution Is completely removed by drying to produce a laminated film in which a pressure-sensitive adhesive layer is formed on the surface of the release film.

A laminated body is produced by superposing the obtained laminated film so that the pressure-sensitive adhesive layer of the laminated film faces the surface opposite to the side on which the pressure-sensitive adhesive layer is formed.
By pressing the resulting laminate using a rubber roller or the like, the adhesive layer is laminated and integrated on both surfaces of the substrate, and the release film or release paper is peeled on the surface of the adhesive layer. Thus, a double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth can be obtained.

Also, in the same manner, two sets of laminated films having a pressure-sensitive adhesive layer formed on the surface of the release film or release paper were prepared, and the two sets of laminated films thus obtained were formed on both sides of the substrate, and the pressure-sensitive adhesive of the laminated film. A layered product is produced by superimposing the layers so as to face the substrate, and the resulting layered product is pressed using a rubber roller or the like, so that the adhesive layer is laminated on both sides of the substrate. And a double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth, in which a release film or release paper is releasably laminated on the surface of the pressure-sensitive adhesive layer.

In the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth of the present invention, the hydrolysis rate of the pressure-sensitive adhesive layer after being immersed in a 0.1 mol / L aqueous sodium hydroxide solution or 0.1 mol / L hydrochloric acid for 1 week at 80 ° C. Although not particularly limited, it is preferably less than 1%. If the hydrolysis rate is 1% or more, the end of the pressure-sensitive adhesive layer that comes into contact with the acid or alkali slurry may deteriorate, and the polishing cloth may be peeled off during polishing.

In the double-sided pressure-sensitive adhesive tape for fixing abrasive cloth of the present invention, the gel fraction of the pressure-sensitive adhesive layer is not particularly limited, but a preferred lower limit is 30% by weight and a preferred upper limit is 80% by weight. When the gel fraction is less than 30% by weight, a paste residue may occur due to cohesive failure when re-peeling to replace the used polishing cloth. When the said gel fraction exceeds 80 weight%, the adhesive force and tack of an adhesive may fall.
A more preferable lower limit of the gel fraction is 45% by weight, and a more preferable upper limit is 75% by weight.

The gel fraction can be measured by the following method.
The double-sided pressure-sensitive adhesive tape for fixing the polishing cloth of the present invention is cut into a flat rectangular shape of 50 mm × 25 mm to produce a test piece. After immersing the obtained test piece in ethyl acetate at 23 ° C. for 24 hours, the test piece is taken out from ethyl acetate through a 200-mesh stainless steel mesh and dried at 110 ° C. for 1 hour. And the weight of the test piece after drying is measured, and a gel fraction is computed using following formula (3). In addition, the release film or release paper is not laminated | stacked on the double-sided adhesive tape for abrasive cloth fixation used for a test piece.
Gel fraction (% by weight) = 100 × (W ₂ −W ₀ ) / (W ₁ −W ₀ ) (3)
In Formula (3), W ₀ represents the weight of the substrate, W ₁ represents the weight of the test piece before dipping, and W ₂ represents the weight of the test piece after dipping and drying.

In the double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth of the present invention, the 180 ° peel-off adhesive strength to a stainless steel plate (SUS) measured according to JIS Z0237 is not particularly limited, but a preferred lower limit is 10 N / 25 mm. If the 180 ° peeling adhesion is less than 10 N / 25 mm, the polishing cloth may be peeled off during polishing. A more preferable lower limit of the 180 ° peeling adhesive strength is 15 N / 25 mm.

In the double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth of the present invention, peeling when a holding force test according to JIS Z0237 is performed under conditions of 60 ° C., 1 kgf, and 1 hour using a flat square test piece having a side of 20 mm. The length is not particularly limited, but a preferred upper limit is 0.5 mm. When the peeling length exceeds 0.5 mm, the cohesive force of the adhesive is too small, the stress against the shearing force applied during polishing is weak, and the adhesive surface of the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth is displaced, and the polishing cloth is flat. In some cases, the polishing accuracy may be reduced due to a decrease in the performance. Moreover, if polishing is continued in a state where the adhesive surface of the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth is displaced, the polishing cloth may be peeled off.

In the double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth of the present invention, the weight increase rate of the pressure-sensitive adhesive layer after being immersed in a 0.1 mol / L sodium hydroxide aqueous solution or 0.1 mol / L hydrochloric acid at 30 ° C. for 170 hours. Is not particularly limited, but is preferably less than 10%. When the weight increase rate is 10% or more, the pressure-sensitive adhesive layer is likely to be soaked with acid or alkali slurry liquid, causing chemical decomposition of the pressure-sensitive adhesive, and the polishing cloth may be peeled off during polishing. The weight increase rate is more preferably less than 5%.
In addition, the said weight increase rate can be calculated | required using following formula (4).
Weight increase rate (%) = 100 × (W ₄ −W ₃ ) / (W ₃ −W ₀ ) (4)
In Formula (4), W ₀ represents the weight of the substrate, W ₃ represents the weight of the test piece before immersion, and W ₄ represents the weight of the test piece after immersion.

In the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth of the present invention, using a 100 mm × 25 mm test piece, after being immersed in a 0.1 mol / L sodium hydroxide aqueous solution or 0.1 mol / L hydrochloric acid at 30 ° C. for 24 hours, The 180 ° peel adhesion to SUS, measured according to JIS Z0237, is not particularly limited, but the preferred lower limit is 10 N / 25 mm and the preferred upper limit is 25 N / 25 mm. If the 180 ° peeling adhesion is less than 10 N / 25 mm, the polishing cloth may be peeled off during polishing. If the 180 ° peeling adhesive strength exceeds 25 N / 25 mm, it may be difficult to remove again when the used polishing cloth is replaced. The more preferable lower limit of the 180 ° peeling adhesive strength is 15 N / 25 mm, and the more preferable upper limit is 23 N / 25 mm.

The double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth of the present invention is cut to a size of 100 mm × 25 mm, an adhesive layer is attached to a glass plate, and a holding power test according to JIS Z0237 is performed at 23 ° C. and 0.1 mol / L. It is preferable that the peeling rate is 8 mm / min or less in the case of using a 156 g weight in an aqueous solution of sodium hydroxide or in hydrochloric acid at 23 ° C. and 0.1 mol / L. When the peeling speed exceeds 8 mm / min, the polishing cloth may be peeled off during polishing.
In addition, the polishing cloth fixing double-sided tape may be measured by peeling 15 mm from the end and dropping a load of 156 g on the end.

The double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth of the present invention preferably has a time until peeling of 3 minutes or more in a torsional shear test measured by the following method.
First, using a double-sided pressure-sensitive adhesive tape for fixing a polishing cloth cut to a size of 10 mm × 10 mm, a glass plate having a size of 100 mm × 50 mm × 1.8 mm and an acrylic plate having a size of 50 mm × 15 mm × 2 mm, The position of 20 mm from the end of the short side of the glass plate and 20 mm from the end of the long side is the center of the adhesive layer, 7.5 mm from the end of the short side of the acrylic plate and 7.5 mm from the end of the long side Bonding is performed so that the position is the center of the other pressure-sensitive adhesive layer.
Next, a 200 g weight is suspended at a position 30 mm away from the center of the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth on the acrylic plate, and the solution is placed in a 23 ° C., 0.1 mol / L sodium hydroxide aqueous solution or at 23 ° C., 0.1 mol. / L Soak in hydrochloric acid.
From the start of immersion in an aqueous sodium hydroxide solution or hydrochloric acid, the peeling time taken from the glass plate to the peeling of the acrylic plate together with the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth is measured. FIG. 1 is a schematic diagram showing the measurement method of the torsional shear test.
If the time until the peeling is less than 3 minutes, the polishing cloth may be peeled off during polishing.

ADVANTAGE OF THE INVENTION According to this invention, the adhesive which is excellent in the tolerance to an acid and an alkali, can be peeled without producing peeling during grinding | polishing, and producing almost no adhesive residue can be provided. Moreover, according to this invention, the double-sided adhesive tape for polishing cloth fixation which uses this adhesive can be provided.

It is a schematic diagram showing the measuring method of a torsional shear test.

Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples.

( Examples 1-5, 8 , Reference Examples 6, 7 and Comparative Examples 1-8)
(1) Production of (meth) acrylic acid ester copolymer Thermometer, stirrer, reactor equipped with cooling tube, after adding each monomer of the blending amount shown in Table 1 and ethyl acetate as a solvent, The reactor was heated to initiate reflux. Subsequently, 0.1 part by weight of t-hexyl peroxypivalate was added as a polymerization initiator in the reactor. Thereafter, the mixture was refluxed at 70 ° C. for 5 hours to obtain a (meth) acrylic acid ester copolymer solution.
About the obtained (meth) acrylic acid ester copolymer, the weight average molecular weight by polystyrene conversion was measured by GPC method using "2690 Separations Model" made from Water as a column. The results are shown in Table 1.

(2) Production of double-sided pressure-sensitive adhesive tape for fixing abrasive cloth 125 parts by weight of ethyl acetate (Fuji Chemical Co., Ltd.) and 100 parts by weight of (meth) acrylic acid ester copolymer obtained are shown in Table 2. A blending amount of an isocyanate-based cross-linking agent (Sekisui Fuller, “Curing Agent UA”) was added and stirred to obtain an adhesive solution.

The obtained pressure-sensitive adhesive solution is applied to the surface of a polyethylene terephthalate (PET) base film having a thickness of 23 μm, and the ethyl acetate in the pressure-sensitive adhesive solution is removed by drying at 100 ° C. for 5 minutes, resulting in a pressure-sensitive adhesive having a thickness of 30 μm. A layer was formed. On the formed pressure-sensitive adhesive layer, a release film-treated PET release film having a thickness of 38 μm is superposed so that the release treatment surface faces the pressure-sensitive adhesive layer, and a film having a pressure-sensitive adhesive layer for fixing the platen ( A) was obtained.
On the other hand, by preparing a PET release film having a thickness of 50 μm subjected to a release treatment, applying the obtained adhesive solution to the release treatment surface of this PET release film, and drying at 100 ° C. for 5 minutes. A film (B) having an adhesive layer for polishing cloth having a thickness of 50 μm was obtained.
A laminate is prepared by superimposing films (A) and (B) so that the pressure-sensitive adhesive layer of film (B) faces the surface opposite to the side where the pressure-sensitive adhesive layer of film (A) is formed. did. Polishing with the adhesive layer laminated on both sides of the PET base film by reciprocating a 2 kg rubber roller once at a speed of 300 mm / min on the resulting laminate, followed by curing at 23 ° C. for 7 days A double-sided adhesive tape for fixing cloth was obtained.

<Evaluation>
The following evaluation was performed about the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth obtained in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8. The results are shown in Table 2.

(1) Hydrolysis rate The obtained double-sided pressure-sensitive adhesive tape for fixing a polishing cloth was cut into a flat square test piece of 50 mm length x 50 mm width, and a PET release film provided on the pressure-sensitive adhesive layer ( Examples 9 to 9 to be described later) In Examples 13 and 16 and Reference Examples 14 and 15 , both the release paper and the PET release film were peeled. This test piece was immersed in an aqueous 0.1 mol / L sodium hydroxide solution at 80 ° C. for 1 week. Then, nuclear magnetic resonance (NMR) measurement was performed about each solution, the amount of alcohol produced | generated by hydrolysis was quantified, and the hydrolysis rate was calculated | required using following formula (5).
Hydrolysis rate (%) = 100 × A ₁ / A ₂ (5)
In formula (5), A ₁ represents the number of moles of the produced alcohol, and A ₂ represents the number of moles of the pressure-sensitive adhesive in terms of monomer. In addition, the monomer conversion mol number of an adhesive can be calculated | required using following formula (6).
Number of moles of monomer of pressure-sensitive adhesive = Σ (B × r _i / M _i ) (6)
In formula (6), B represents the pressure-sensitive adhesive weight of the pressure-sensitive adhesive layer for fixing the surface plate of the test piece, r _i represents the blending ratio of the monomer i component in the pressure-sensitive adhesive, and M _i represents the molecular weight of the monomer of the i component. Represents. Moreover, the pressure-sensitive adhesive weight of the pressure-sensitive adhesive layer for fixing the platen of the test piece can be obtained using the following formula (7).
Adhesive weight = W ₆ −W ₅ (7)
In formula (7), W ₅ represents the weight of the substrate, and W ₆ represents the weight of the test piece before immersion.
The same evaluation was performed using 0.1 mol / L hydrochloric acid instead of the 0.1 mol / L sodium hydroxide aqueous solution.

(2) Gel fraction The obtained double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth was cut into a flat rectangular shape of 50 mm × 25 mm to prepare a test piece, and the weight W ₁ was measured. After immersing the test piece in ethyl acetate at 23 ° C. for 24 hours, the test piece was taken out from ethyl acetate through a 200-mesh stainless steel mesh and dried at 110 ° C. for 1 hour. The weight W ₂ after drying the test piece was measured. Using the weight W ₀ of the PET film used as the substrate, the gel fraction was calculated by the above formula (3).

(3) 180 ° peel adhesive strength obtained Double-sided pressure-sensitive adhesive tape for polishing cloth fixing was coated with a 38 μm thick PET film on the pressure-sensitive adhesive layer for polishing cloth, and then a 100 mm long by 25 mm flat rectangular test piece. Was cut out. The pressure-sensitive adhesive layer for fixing the platen of this test piece was placed on a stainless steel plate and pressed with a 2 kg roller, and the test piece was stuck on the stainless steel plate. After being left for 30 minutes in an atmosphere of a temperature of 23 ° C. and a relative humidity of 50%, a 180 ° peel adhesive strength (relative to SUS) was measured using a tensile tester in accordance with JIS Z0237.
Moreover, 180 degree peeling adhesive force (vs. glass) was measured by the same method.

(4) Holding power A PET film having a thickness of 38 μm was lined on the adhesive layer for polishing cloth of the obtained double-sided pressure-sensitive adhesive tape for fixing polishing cloth, and a plane square test piece having a side of 20 mm was cut out. The cut test piece was pressed with a 2 kg roller, and the pressure-sensitive adhesive layer for fixing the platen of this test piece was stuck on a stainless steel plate, and then cured at 40 ° C. for 60 minutes.
Next, the test piece is placed on the lower surface of the PET film so that the test piece is positioned horizontally, and at 60 ° C., a 1 kgf load is applied to the end of the test piece in the longitudinal direction in the vertical direction, The peel length 1 hour after applying the load was measured using a magnifying glass.

(5) Weight increase rate after immersion in chemical solution The obtained double-sided pressure-sensitive adhesive tape for fixing polishing cloth was cut into a test piece of 50 mm length x 50 mm width, and then a PET release film ( Example 9 to be described later) provided on the pressure-sensitive adhesive surface. In -13 and 16 and Reference Examples 14 and 15 , the release paper and the PET release film) were peeled off on both sides, and the weight of the double-sided pressure-sensitive adhesive tape for fixing the abrasive cloth before immersion was measured. Then, it was immersed in an aqueous solution of sodium hydroxide at 30 ° C. and 0.1 mol / L so that the adhesive surface did not touch the container and left for 170 hours. After a predetermined time had elapsed, the double-sided pressure-sensitive adhesive tape for fixing the polishing pad was taken out from the aqueous sodium hydroxide solution, water attached to the surface was removed with compressed air, and the weight of the double-sided pressure-sensitive adhesive tape for fixing the polishing pad after immersion was measured. Thereafter, the pressure-sensitive adhesive on both sides was completely removed using ethyl acetate, the weight of the substrate was measured, and the weight increase rate was calculated from Equation (4).
Further, the same evaluation was performed using 30 mol C and 0.1 mol / L hydrochloric acid instead of 30 mol C and 0.1 mol / L sodium hydroxide aqueous solution.

(6) 180 ° peel-off adhesive strength after immersion in chemical solution A PET film having a thickness of 38 μm is lined on the adhesive layer for polishing cloth of the double-sided adhesive tape for fixing polishing cloth obtained, and is a flat rectangular shape with a length of 100 mm × width 25 mm. The test piece was cut out. The cut test piece was pressed with a 2 kg roller, and the pressure-sensitive adhesive layer for fixing the platen of this test piece was attached on the stainless steel plate, and then left for 30 minutes in an atmosphere at a temperature of 23 ° C. and a relative humidity of 50%. . Next, the stainless steel plate to which the test piece was attached was immersed in a 0.1 mol / L sodium hydroxide aqueous solution at 30 ° C. and left for 24 hours. Thereafter, the stainless steel plate was taken out and lightly washed with water, then the water adhering to the compressed air was removed, and the adhesive strength was measured by peeling it 180 ° according to JIS Z0237 using a tensile tester.
Further, the same evaluation was performed using 30 mol C and 0.1 mol / L hydrochloric acid instead of 30 mol C and 0.1 mol / L sodium hydroxide aqueous solution.

(7) Retention force in chemical solution A PET film having a thickness of 38 μm is lined on the adhesive layer for polishing cloth of the obtained double-sided pressure-sensitive adhesive tape for fixing polishing cloth, and a flat rectangular test piece of 100 mm length × 25 mm width is provided. Cut out. The cut out test piece was pressed with a 2 kg roller, and the pressure-sensitive adhesive layer for fixing the platen of this test piece was attached on a glass plate, and then left for 30 minutes in an atmosphere at a temperature of 23 ° C. and a relative humidity of 50%. . 20 mm was peeled from the end of the test piece, and a 156 g weight was attached. With the weight attached, it was immersed in a 0.1 mol / L sodium hydroxide aqueous solution at 23 ° C., and the time until peeling progressed by 40 mm was measured to calculate the speed.
Further, the same evaluation was performed using 23 ° C. and 0.1 mol / L hydrochloric acid instead of 23 ° C. and 0.1 mol / L sodium hydroxide aqueous solution.

(8) Torsional shear test The obtained double-sided pressure-sensitive adhesive tape for fixing a polishing cloth was cut into a size of 10 mm x 10 mm, a glass plate of 100 mm x 50 mm x 1.8 mm and a size of 50 mm x 15 mm x 2 mm. The center of the adhesive plate side for fixing the surface of the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth is positioned 20 mm from the short side edge of the glass plate and 20 mm from the long side edge of the acrylic plate, The two sides of the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth were bonded so that the center of the double-sided pressure-sensitive adhesive layer for fixing the polishing cloth was at a position 7.5 mm from the end of the short side and 7.5 mm from the end of the long side. Next, a 200 g weight was suspended at a position 30 mm from the center of the double-sided pressure-sensitive adhesive tape for fixing the abrasive cloth on the acrylic plate. It was immersed in a 0.1 mol / L sodium hydroxide aqueous solution at 23 ° C. with the weight suspended. From the start of the immersion, the peeling time required for the acrylic plate to peel from the glass plate together with the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth was measured.
Further, the same evaluation was performed using 23 ° C. and 0.1 mol / L hydrochloric acid instead of 23 ° C. and 0.1 mol / L sodium hydroxide aqueous solution.

(9) Presence or absence of peeling during polishing The obtained double-sided pressure-sensitive adhesive tape for fixing a polishing cloth was attached to the polishing cloth using a rubber roll. Next, the polishing cloth was fixed to the surface plate of the polishing apparatus by pressing a rubber roll from the polishing cloth side.
Using a glass plate as a specimen to be polished, polishing was performed for 5 minutes at a polishing pressure of 49.0 kPa and a rotation speed of 100 rpm using a polishing slurry (manufactured by Cabot Microelectronics, “SS25” or “W2000”). Then, the peeling state was observed visually about the interface of the double-sided adhesive tape for polishing cloth fixation, and a surface plate. Similarly, when 10 times of polishing and observation were performed, “○” indicates that no peeling occurred once in 10 times, and no occurrence of peeling once in 10 times, but floating occurred Was evaluated as “X” when “Δ” was observed and peeling occurred 10 times or more in 10 times.

(10) Removability After evaluating the presence or absence of peeling during polishing described in (9), the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth was peeled off from the surface plate, and it was confirmed whether or not the pressure-sensitive adhesive remained on the surface plate. The case where no adhesive residue was observed was evaluated as “◯”, and the case where an adhesive residue was observed was evaluated as “x”.

( Examples 9 to 13, 16 and Reference Examples 14, 15 )
(1) Production of (meth) acrylic acid ester copolymer Same as Examples 1-5, 8 , Reference Examples 6, 7, and Comparative Examples 1-8 , except that the respective monomer amounts shown in Table 3 were used. Thus, a (meth) acrylic acid ester copolymer solution was obtained.
About the obtained (meth) acrylic acid ester copolymer, it carried out similarly to Examples 1-5, 8 , Reference Examples 6, 7, and Comparative Examples 1-8, and measured the weight average molecular weight by polystyrene conversion by GPC method. . The results are shown in Table 3.

(2) Production of double-sided pressure-sensitive adhesive tape for fixing abrasive cloth 125 parts by weight of ethyl acetate (Fuji Chemical Co., Ltd.) and 100 parts by weight of (meth) acrylic acid ester copolymer obtained are shown in Table 4. A blending amount of an isocyanate-based cross-linking agent (Sekisui Fuller, “Curing Agent UA”) was added and stirred to obtain an adhesive solution.

The obtained pressure-sensitive adhesive solution is applied to the surface of a polyethylene terephthalate (PET) base film having a thickness of 23 μm, and the ethyl acetate in the pressure-sensitive adhesive solution is removed by drying at 100 ° C. for 5 minutes, resulting in a pressure-sensitive adhesive having a thickness of 30 μm. A layer was formed. On the formed pressure-sensitive adhesive layer, release paper was superposed so that the release treatment surface was opposed to the pressure-sensitive adhesive layer, and a film (A) having a pressure-sensitive adhesive layer for fixing the platen was obtained.
On the other hand, by preparing a PET release film having a thickness of 50 μm subjected to a release treatment, applying the obtained adhesive solution to the release treatment surface of this PET release film, and drying at 100 ° C. for 5 minutes. A film (B) having an adhesive layer for polishing cloth having a thickness of 50 μm was obtained.
A laminate is prepared by superimposing films (A) and (B) so that the pressure-sensitive adhesive layer of film (B) faces the surface opposite to the side where the pressure-sensitive adhesive layer of film (A) is formed. did. Polishing with the adhesive layer laminated on both sides of the PET base film by reciprocating a 2 kg rubber roller once at a speed of 300 mm / min on the resulting laminate, followed by curing at 23 ° C. for 7 days A double-sided adhesive tape for fixing cloth was obtained.

<Evaluation>
The following evaluation was performed on the double-sided pressure-sensitive adhesive tapes for fixing the polishing cloth obtained in Examples 9 to 13 and 16 and Reference Examples 14 and 15 . The results are shown in Table 4.

(1) Hydrolysis rate
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(2) Gel fraction
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(3) 180 degree peeling adhesion
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(4) Holding power
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(5) Rate of weight increase after chemical immersion
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(6) 180 degree peeling adhesion after chemical immersion
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(7) Holding power in chemicals
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(8) Torsional shear test
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(9) Presence or absence of peeling during polishing
Evaluation was performed in the same manner as in Examples 1 to 5, 8 and Reference Examples 6 and 7 and Comparative Examples 1 to 8.

(10) Re-peelability After evaluating the presence or absence of peeling during polishing as described in (9), after leaving for another 24 hours and sufficient adhesion, the double-sided pressure-sensitive adhesive tape for fixing the polishing cloth is peeled off from the surface plate. It was confirmed whether the adhesive remained on the board. The case where no adhesive residue was observed was evaluated as “◯”, the case where some adhesive residue was observed as “Δ”, and the case where adhesive residue was observed on the entire surface was evaluated as “x”.

ADVANTAGE OF THE INVENTION According to this invention, the adhesive which is excellent in the tolerance to an acid and an alkali, can be peeled without producing peeling during grinding | polishing, and producing almost no adhesive residue can be provided. Moreover, according to this invention, the double-sided adhesive tape for polishing cloth fixation which uses this adhesive can be provided.

1 Glass plate 2 Double-sided adhesive tape 3 Acrylic plate 4 Weight

Claims (6)

The adhesive layer containing a pressure-sensitive Chakuzai, a polishing cloth fixed double-sided pressure-sensitive adhesive tape formed by integrally laminating at least one side of the substrate,
The pressure-sensitive adhesive contains a (meth) acrylic acid ester copolymer and a crosslinking agent,
The (meth) acrylic acid ester copolymer is 5 to 25% by weight of cyclohexyl (meth) acrylate, 65 to 92% by weight of 2-ethylhexyl (meth) acrylate, and 2 to 10% by weight of (meth) acrylic acid. A double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth, wherein the double-sided adhesive tape is a copolymer obtained by copolymerizing a monomer mixture containing 2% by weight . The double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth according to claim 1, wherein the monomer mixture further contains 0.1 to 2% by weight of a monomer having an amino group and / or an amide group. The monomer mixture further includes a (meth) acrylic acid ester monomer having an aliphatic ring skeleton, a (meth) acrylic acid ester monomer having a chain skeleton having 6 to 14 carbon atoms, a monomer having a carboxyl group, or an amino group and 3. The double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth according to claim 2, further comprising 15% by weight or less of another monomer copolymerizable with a monomer having an amide group. The pressure-sensitive adhesive layer, a hydrochloric acid 0.1 mol / L aqueous sodium hydroxide solution or 0.1 mol / L, at 30 ° C., 170 hour immersion the weight increase rate after is equal to or less than 10% according Item 2. A double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth according to item 1, 2 or 3 . A peeling length when a holding force test in accordance with JIS Z0237 is performed under conditions of 60 ° C., 1 kgf, and 1 hour using a plane square test piece having a side of 20 mm is 0.5 mm or less. The double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth according to claim 1, 2, 3, or 4 . Using a test piece of 100 mm × 25 mm, after immersing in a 0.1 mol / L aqueous sodium hydroxide solution or 0.1 mol / L hydrochloric acid at 30 ° C. for 24 hours, 180 measured against SUS measured according to JIS Z0237 The double-sided pressure-sensitive adhesive tape for fixing an abrasive cloth according to claim 1 , wherein the peel-off adhesive strength is 10 to 25 N / 25 mm.

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