JP5336996B2 - X-ray inspection equipment - Google Patents

Description

  The present invention relates to an X-ray inspection apparatus that irradiates an article with X-rays and detects foreign matter in the article.

  Conventionally, an X-ray inspection apparatus or the like has been used to detect foreign matter in an article. R & D is being conducted daily on these X-ray inspection apparatuses.

  For example, Patent Literature 1 discloses an image correction method and an image correction device. This image correction apparatus includes means for adjusting the contrast and brightness of an image, and image processing means for performing image processing on the acquired image.

  The image processing means combines the images so that at least two acquired images have a tone conversion function with different tone characteristics and the signal strength of the tone-converted at least two images is continuous within the tone range. A function for obtaining a ratio, and a function for performing proportional distribution to combine the signal intensities of at least two images subjected to gradation conversion based on the combination ratio.

  In such a configuration, a bright image and a dark image are acquired with respect to the original image acquired with a predetermined contrast or brightness, the dark portion is extracted from the bright image, and the bright portion is extracted from the dark image, and extracted. Image correction is performed so that an appropriate gradation can be obtained by synthesizing the dark portion image and the bright portion image.

JP 2004-208044 A

  However, the conventional image correction apparatus performs image correction for combining the extracted dark portion image and the bright portion image, and it is necessary to perform combining processing after processing each image, so that the processing is complicated. It becomes. Further, the conventional image correction apparatus does not convert the image data from a high gradation to a low gradation while maintaining the reliability of the image data.

  An object of the present invention is to provide an X-ray inspection apparatus that can ensure the reliability of converted luminance data even when the luminance data is converted from a high gradation to a low gradation.

(1) An X-ray inspection apparatus according to one aspect detects X-rays that are irradiated from an X-ray source and irradiated from the X-ray source and transmitted through the inspection object to detect data. An X-ray inspection apparatus having a brightness-by-brightness data acquisition unit that acquires brightness-by-brightness data based on a detection value from the detector, the brightness in the brightness-by-brightness data from the brightness-by-brightness data acquisition unit A weight changing unit that changes the weight of the data for each luminance by changing the thinning rate of information is provided. The weight change unit generates a plurality of converted luminance data having different weights from the luminance data from the luminance data acquisition unit. Further, the weight changing unit selects a histogram having a large variance value from the histograms of the plurality of converted luminance data.

  In the X-ray inspection apparatus according to one aspect, X-rays that have passed through the inspection object are detected by a detector, and detection data is generated by the detector. The brightness data is acquired by the brightness data acquisition unit based on the detection value from the detector. Then, the weighting change unit changes the luminance information thinning rate in the luminance data from the luminance data acquisition unit, thereby changing the weighting of the luminance data.

  In this way, as a result of changing the luminance information thinning rate in the luminance data, the luminance information thinning rate for each luminance region is prevented from being the same by changing the weighting of the luminance data. Specifically, when the data for each luminance is 4096 gradations (12 bits) and the data for each luminance is converted into, for example, 256 gradations (8 bits) due to the function of the image processing apparatus, Similarly, it is possible to prevent thinning out data for each luminance in the luminance region.

  That is, even when converting from a high gradation to a low gradation as described above by performing a thinning process excluding a luminance region where it is estimated that there is data for each luminance indicating the contents included in the inspection object. Therefore, it is possible to perform the inspection of the presence / absence of the contents included in the inspection object with high reliability. Conventionally, if the thickness or material of the inspection object is different, it is necessary to change the inspection setting such as the voltage. However, in the present invention, it is necessary to change the inspection setting based on the thickness or material of the inspection object. Since there is no, there is no need for work. Furthermore, even when an object to be inspected having a substantially uniform shape, such as a book or a mail, is inspected by the X-ray inspection apparatus according to the present invention, the presence or absence of the contents in the object can be reliably grasped.

  In addition, an image obtained by imaging with a camera or a diagnostic apparatus generally needs to be processed so that the entire image can be clearly recognized. In an inspection apparatus such as the X-ray inspection apparatus according to the present invention, It is important to recognize whether or not the contents are contained in the inspection object, and it is necessary to perform processing so that the contents can be clearly recognized rather than the entire image. As a result, the decimation rate of the luminance information in each luminance data can be changed by the weight changing unit.

(2) The weight change unit may change the thinning rate based on the frequency of the luminance data from the luminance data acquisition unit.

  In this case, since the thinning rate is changed by the weighting change unit based on the frequency of the luminance data from the luminance data acquisition unit, the luminance region thinning rate that needs to be changed in the luminance data is appropriately set. Can change.

(3) The X-ray inspection apparatus may include a recording unit that records a plurality of luminance regions, and the weighting change unit may change the thinning rate for each luminance region recorded in the recording unit.

  In this case, a plurality of luminance areas are recorded in the recording unit. Then, since the thinning rate is changed for each of the luminance areas by the weight changing unit, the luminance area necessary for inspecting the presence / absence of contents in the inspection object and the luminance area having a low necessity are roughly known. In this case, the decimation rate of these luminance regions can be changed appropriately.

(4) The recording unit may record a thinning rate corresponding to a plurality of luminance areas. In this case, the weight changing unit can obtain an appropriate thinning rate corresponding to each of the plurality of luminance regions, and can perform thinning processing.

(5) The weight changing unit may determine a luminance region in which the thinning rate is changed based on the thickness of the inspection object and / or the material of the inspection object. In this case, when the position of the contents in the inspection object is known to some extent, the luminance region for changing the thinning rate can be easily determined based on the thickness and / or material of the inspection object.

(6) The X-ray inspection apparatus may include a display unit that displays post-processing data from the weight change unit. For example, when a plurality of images related to post-processing data from the weight changing unit are displayed on the display unit in a selection format, the operator can select a desired image. Therefore, it is possible to suppress the influence of the visual ability and the determination skill of the worker as much as possible when determining the image.

  The X-ray inspection apparatus according to the present invention can ensure the reliability of the converted luminance data even when the luminance data is converted from a high gradation to a low gradation.

1 is a schematic external view showing an example of an X-ray inspection apparatus according to the present embodiment. It is a schematic diagram which shows an example of the internal structure of the X-ray inspection apparatus which concerns on this embodiment. It is a block diagram which shows the structure part in connection with an image process in an X-ray inspection apparatus. It is a histogram which shows the data for every brightness | luminance after the process by a summation part. It is explanatory drawing which shows the example of the image before a thinning process, and the image after a thinning process. It is a figure which shows the example of an image when the dark part of a brightness | luminance area | region is thinned out with a high thinning-out rate by the X-ray inspection apparatus, and the example of an image when the bright part of a brightness | luminance area is thinned out with a high thinning-out rate. It is a block diagram which shows the modification of the structure part in connection with an image process.

  Hereinafter, an X-ray inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. The X-ray inspection apparatus according to the present embodiment inspects the presence / absence of contents contained in an inspection object.

  FIG. 1 is a schematic external view showing an example of the X-ray inspection apparatus 100 according to the present embodiment, and FIG. 2 is a schematic view showing an example of the internal structure of the X-ray inspection apparatus 100 according to the present embodiment.

  As shown in FIG. 1, the X-ray inspection apparatus 100 has an X-ray inspection chamber 300 formed therein. An X-ray irradiation apparatus 200 is built in the X-ray examination room 300. A belt conveyor 800 is provided so as to penetrate the X-ray examination room 300.

  An X-ray leakage prevention curtain 500 that prevents X-ray leakage from the opening of the X-ray examination room 300 is provided. In addition, the X-ray inspection apparatus 100 is provided with a touch panel type input display unit MT for an operator to operate. The operator drives the X-ray inspection apparatus 100 by operating the input display unit MT.

  The operator places the inspection object 900 (FIG. 2) on the belt conveyor 800. Then, the inspection object 900 placed on the belt conveyor 800 is inspected for the presence of the contents. Hereinafter, the internal structure of the X-ray examination room 300 will be described.

  As shown in FIG. 2, the X-ray examination room 300 mainly includes an X-ray irradiation apparatus 200, a line sensor 220, an X-ray leakage prevention curtain 500, and a belt conveyor 800. The X-ray leakage prevention curtain 500 includes an X-ray leakage prevention curtain device 510 on the entrance side of the X-ray examination room 300 and an X-ray leakage prevention curtain device 520 on the exit side.

  The belt conveyor 800 is configured by winding an endless belt around a pair of rollers. A line sensor 220 that includes a scintillator and a photodiode element and detects X-rays is provided inside the belt conveyor 800. The line sensor 220 includes a plurality of detection elements that detect X-rays.

  In FIG. 2, the inspection object 900 is placed on the belt conveyor 800. When the belt conveyor 800 is driven, the inspection object 900 is conveyed along the direction of the arrow d1. The inspection object 900 being transported first passes through the X-ray leakage prevention curtain 510 and moves into the X-ray inspection room 300.

  Next, X-rays 210 are irradiated from the X-ray irradiation apparatus 200 to the inspection object 900 being conveyed. Then, the X-ray 210 that has passed through the inspection object 900 enters the line sensor 220.

  The line sensor 220 generates detection data based on the incident X-ray 210. Based on the detection data generated by the line sensor 220, an inspection is performed as to whether or not the contents are included in the inspection object 900. A detailed method of the inspection will be described later.

  Then, the inspection object 900 that has been subjected to the X-ray inspection is continuously conveyed by the belt conveyor 800, and thus moves outside the X-ray inspection chamber 300 after passing through the X-ray leakage prevention curtain 520. Thereafter, the inspection object 900 is conveyed to the next process.

  FIG. 3 is a block diagram showing components related to image processing in the X-ray inspection apparatus 100.

  As illustrated in FIG. 3, the X-ray inspection apparatus 100 according to the present embodiment includes the above-described line sensor 220, A / D converter 230, detection function processing unit FS, and post-processing data storage unit as components related to image processing. 261, a conversion curve storage unit 270, and the input display unit MT described above.

  The detection function processing unit FS includes a luminance data acquisition unit 240, a summation unit 250, a weight change unit 260, an operation parameter recording unit 280, a foreign matter determination processing unit 290, and a display data creation unit 291.

  Each component of the detection function processing unit FS is functionally realized by a CPU (Central Processing Unit) executing a processing program stored in a RAM (Random Access Memory) or a ROM (Read-Only Memory). Is done. Such a processing program can be installed from a recording medium such as a CD-ROM or DVD-ROM in which the processing program is recorded, or can be downloaded from a server via a network. Further, the conversion curve storage unit 270 and the post-processing data storage unit 261 are composed of a hard disk or the like.

  First, X-rays 210 that have passed through the inspection object 900 are incident on the line sensor 220, and the line sensor 220 generates detection data KDa that is analog data based on the X-rays 210. This detection data KDa is, for example, data of 4096 gradations (12 bits). Thereafter, the detection data KDa is converted into detection data KDd which is digital data by the A / D converter 230.

  The luminance data LD1 is acquired by the luminance data acquisition unit 240 based on the detection value from the detection data KDd. Note that the luminance data LD1 corresponds to one line of the image. Then, the luminance data LD2 corresponding to all lines of the image is generated by adding the plurality of luminance data LD1 by the adding unit 250.

  Next, the thinning process by the detection function processing unit FS will be described. FIG. 4 is a histogram showing the luminance data LD2 after processing by the summing unit 250. Note that the vertical axis of the histogram of FIG. 4 indicates frequency, and the horizontal axis indicates “tone” on the right side of the drawing and “bright” on the left side of the drawing, and indicates gradation.

  Here, as shown in FIG. 4, the luminance data LD2 includes the frequency (appearance frequency) corresponding to each gradation (each luminance). Note that the luminance value (cd / m2) is represented as a gradation when digitally converted.

  The weight changing unit 260 (FIG. 3) performs the thinning process by changing the thinning rate MR between the luminance region KRT and the luminance region KR excluding the luminance region KRT based on the luminance data LD2. Specifically, the weight change unit 260 does not perform the thinning process on the luminance information of the luminance area KRT or performs the thinning process at a low thinning rate, and the high thinning rate on the luminance information of the luminance area KR. The thinning process is performed with.

  The thinning rate MR is determined based on conversion curves fa to fe described later. As an example, in the luminance region KR, for example, frequencies for 20 gradations are converted into frequencies for one gradation. In this case, the thinning rate MR is 20/1 = 20, which is a high thinning rate. On the other hand, in the luminance region KRT, for example, the frequency for five gradations is converted into the frequency for one gradation. In this case, the thinning rate MR is 5/1 = 5, which is a low thinning rate.

  The operating parameter recording unit 280, based on the conversion curves fa to fe stored in the conversion curve storage unit 270, does not perform the thinning process or performs the thinning process at a low thinning rate and the corresponding thinning rate. MR, a luminance region KR that performs thinning processing at a high thinning rate, and a thinning rate MR corresponding thereto are obtained. The weight change unit 260 changes the weight of each brightness data LD2 by performing a thinning process using the luminance regions KRT and KR and the thinning rate MR.

  When the thinning process is performed by the weight change unit 260, the following conversion curve is used.

  FIG. 5 is an explanatory diagram illustrating an example of an image before the thinning process and an image after the thinning process. As shown in FIG. 5, the conversion curve storage unit 270 (FIG. 3) stores in advance a plurality of conversion curves fa to fe for converting 4096 gradation luminance data LD2 into 256 gradation luminance data LA. To do.

  Although omitted for simplification, the horizontal axis of each graph of the conversion curves fa to fe shown in FIGS. 5B1, 5C1, D1, E1, and F1 is 4096 gradations (12 Bit) light and dark (origin side: bright, reverse side: dark), and the vertical axis represents 256 gradations (8 bits) of light and dark (origin side: bright, reverse side: dark). Also, the horizontal axis of each graph of the histograms H1 to H5 shown in FIGS. 5B3, C3, D3, E3, and F3 is the brightness level (origin side: bright, reverse side: dark). The vertical axis indicates the frequency of appearance.

  For example, when there is an image G1 related to the luminance data LD2 as shown in FIG. 5A, the weight change unit 260 (FIG. 3) uses the conversion curve fa of FIG. Is converted into data for each luminance LA of 256 gradations.

  As a result, the brightness of the image G2 related to the converted luminance data LA is significantly higher than that of the image G1, as shown in FIG. 5 (b2). In this case, since the conversion curve fa greatly thins out the dark area, the histogram H1 of the image G2 related to the luminance data LA is as shown in FIG. 5 (b3). The average value of the histogram H1 is “large” compared to that described later, and the variance value is “small” compared to that described later. As is well known, the average value is the central value of luminance, and the variance value is the sum of squares of the difference (distance) from the average value of each value.

  Accordingly, the weight changing unit 260 converts the luminance data LD2 into luminance data LA of 256 gradations using the conversion curve fb in FIG. 5C1.

  As a result, the brightness of the image G3 related to the converted luminance data LA is slightly higher than that of the image G1, as shown in FIG. 5 (c2). In this case, since the conversion curve fb thins out the dark area relatively large, the histogram H2 of the image G3 related to the luminance data LA is as shown in FIG. 5 (c3). The average value of the histogram H2 is “medium (slightly greater than the average)” compared to the other, and the variance is “medium (average)” compared to the other.

  Accordingly, the weight changing unit 260 converts the luminance data LD2 into 256-level luminance data LA using the conversion curve fc of FIG. 5 (d1).

  As a result, the image G4 related to the converted luminance data LA is almost the same as the brightness of the image G1, as shown in FIG. 5 (d2). In this case, since the conversion curve fc averages the bright area and the dark area, the histogram H3 of the image G4 related to the luminance data LA is as shown in FIG. 5 (d3). The average value of the histogram H3 is “medium” compared to the other ones, and the variance value is “large” compared to the other ones.

  Accordingly, the weight changing unit 260 converts the luminance data LD2 into 256-level luminance data LA using the conversion curve fd shown in FIG.

  As a result, the image G5 related to the converted luminance data LA is slightly darker than the image G1, as shown in FIG. 5 (e2). In this case, since the conversion curve fd thins out the bright area relatively large, the histogram H4 of the image G5 related to the luminance data LA is as shown in FIG. 5 (e3). The average value of the histogram H4 is “small and medium (slightly smaller than the average)” compared to the other values, and the variance value is “medium” compared to the other values.

  Further, along with these, the weight changing unit 260 converts the luminance data LD2 into the luminance data LA of 256 gradations using the conversion curve fe of FIG.

  As a result, as shown in FIG. 5 (f2), the image G6 related to the luminance data LA after the conversion is significantly darker than the image G1. In this case, since the conversion curve fe greatly thins out the bright area, the histogram H5 of the image G6 related to the luminance data LA is as shown in FIG. 5 (f3). The average value of the histogram H5 is “small” compared to the other values, and the variance value is “small” compared to the other values.

  Here, when the position of the contents in the inspection object 900 is approximately known, in other words, the luminance region KRT (FIG. 4) and necessity necessary for inspecting the presence or absence of the contents in the inspection object 900 When the low brightness area KR (FIG. 4) is known to some extent, the weight change unit 260 (FIG. 3) performs the thinning process using the brightness areas KRT and KR and the thinning rate MR recorded in advance on a hard disk or the like. It can be carried out.

  Returning to FIG. 3, the luminance data LA generated by the weight change unit 260 is stored in the post-processing data storage unit 261 as post-processing data and is given to the foreign matter determination processing unit 290.

  The foreign matter determination processing unit 290 performs processing such as determination as to whether or not contents are included in the inspection object 900 based on the luminance data LA. Depending on the determination result, a warning sound is emitted by a warning device (not shown).

  Further, display data for display on the input display unit MT is created by the display data creation unit 291 based on the luminance data LA. In this case, after the histograms H1 to H5 are acquired by the weight changing unit 260, an image having the most suitable contrast for viewing is selected from the images G2 to G6 based on the histogram. Then, the display data related to the image selected by the weight changing unit 260 is given to the input display unit MT. An image related to the display data is displayed on the input display section MT.

  FIG. 6 is a diagram illustrating an example of an image when the X-ray inspection apparatus 100 thins out a dark part of a luminance region with a high thinning rate and an example of an image when the bright part of a luminance region is thinned out with a high thinning rate. In addition, the vertical axis | shaft of Fig.6 (a), (b) shows the position of the detection element which comprises the line sensor 220, and a horizontal axis shows the brightness contrast. FIGS. 6A and 6B show examples when the background is masked.

  The change trajectory HK1 before conversion in FIG. 6A is similar to the case of converting the brightness data LD2 in FIG. 5A to the brightness data LA in FIG. Based on the conversion curve fa, the dark portion of the luminance region is greatly thinned out, resulting in a converted change locus HK2. Thereby, the difference C1 in the bright part is emphasized to the difference C2.

  Further, the change locus HK3 before the conversion in FIG. 6B is similar to the case where the brightness data LD2 in FIG. 5A is converted into the brightness data LA in FIG. ), The bright part of the luminance region is greatly thinned out to obtain a transformed change locus HK4. Thereby, the difference C3 in the dark part is emphasized to the difference C4.

  As described above, when inspecting the contents in the inspection object 900, the specific luminance area can be emphasized by greatly thinning out the luminance area excluding the specific luminance area. Even when the conversion is performed, it is possible to prevent the reliability of the inspection from being impaired.

<Effect in this embodiment>
Usually, in the X-ray inspection apparatus, it is necessary to adjust the X-ray intensity and contrast according to the thickness or material of the inspection object. For example, the X-ray tube voltage is set low for an inspected object that is thin and easily transmits X-rays, and a bright region is set to be emphasized in contrast adjustment. That is, it is difficult to image a thin inspection object and a thick inspection object with the same inspection setting.

  The gradation of the image data relating to the image displayed on the image processing apparatus or personal computer is 256 gradations (8 bits), but the gradation of the detection data generated by the line sensor is 4096 gradations (12 bits). is there. Therefore, it is necessary to perform data conversion from 12 bits to 8 bits by erasing the lower 4 bits of detection data. By such data conversion, the contrast of the image can be maintained, and the appearance of the image can be maintained.

  However, X-ray images are often too dark or too bright, and data conversion is usually performed while performing contrast adjustment such as a known gamma correction process. In this case, a predetermined conversion function is used, but the image may be too bright or too dark depending on the thickness of the inspection object.

  Although it is possible to correct the luminance after converting the detection data from 12 bits to 8 bits, in this case, since the detection data is thinned out on average, the continuity of the luminance change is lost. When the contrast is extremely emphasized, gradation discontinuity stands out, and the display gradation decreases, resulting in an unnatural image.

  On the other hand, in this embodiment, the thinning-out rate is changed between the luminance region KRT and the luminance region KR excluding the luminance region KRT, and the thinning process is performed. Thereby, even when data conversion from high gradation to low gradation is performed, it is possible to suppress the thinning process in the luminance region KRT necessary for inspecting the presence or absence of the contents. Reliability can be reliably ensured.

  In the present embodiment, by using a plurality of conversion curves fa to fe in the thinning-out process, an appropriate image is selected for inspecting the presence / absence of contents included in the inspection object 900. Therefore, the reliability of inspection can be improved.

  Conventionally, when the thickness or material of the inspection object 900 is different, it is necessary to change the inspection setting such as voltage. However, in the X-ray inspection apparatus 100 according to the present embodiment, the thickness or the inspection object 900 is changed. There is no need to change the inspection setting based on the material and the like, saving labor.

  In addition, an image obtained by being captured by a camera or a diagnostic apparatus generally needs to be processed so that the entire image can be clearly recognized, but in an inspection apparatus such as the X-ray inspection apparatus 100 according to the present embodiment, Therefore, it is important to recognize whether or not the contents are included in the inspection object 900, and it is necessary to perform processing so that the contents can be clearly recognized rather than the entire image. As a result, the foreign matter determination process can be performed by changing the thinning rate MR in the luminance data LD2.

  Further, in the above-described conventional image correction apparatus, it is necessary to process two images of a bright portion image and a dark portion image and combine them, and the processing is very complicated. In the line inspection apparatus 100, since it is only necessary to process the luminance data LD2 which is one data, it is possible to avoid complicated processing.

<Correspondence between each component of claims and each part of the embodiment>
In the above embodiment, the X-ray inspection apparatus 100 corresponds to the X-ray inspection apparatus, the X-ray irradiation apparatus 200 corresponds to the X-ray source, the inspection object 900 corresponds to the inspection object, and the X-ray 210 corresponds to the X-ray. It corresponds to a line, detection data KDa corresponds to detection data, luminance data LD1 and LD2 correspond to luminance data, luminance data acquisition unit 240 corresponds to luminance data acquisition unit, and line sensor 220 detects The thinning rate MR corresponds to the thinning rate, the weight change unit 260 corresponds to the weight change unit, the operation parameter recording unit 280 corresponds to the recording unit, and the luminance regions KRT and KR correspond to the luminance region. The brightness data LA corresponds to the post-processing data, and the input display unit MT corresponds to the display unit.

<Modification>
In the above embodiment, the image selected by the weight changing unit 260 among the images G2 to G6 related to the luminance data LA in FIG. 5 is displayed on the input display unit MT. However, the present invention is not limited to this. Not all of the images G2 to G6 may be displayed, and the operator may select an image from the displayed images G2 to G6. Further, an image switching button is provided on the input display unit MT, a representative image first selected by the weight changing unit 260 is displayed, and the operator operates the image switching button to display other remaining images. You may switch and display.

  Further, in the above embodiment, after the histograms H1 to H5 are acquired by the weight changing unit 260, an image having the most suitable contrast for viewing is selected based on the histogram. However, the present invention is limited to this. For example, an image having an average value of the histogram closest to the desired luminance may be selected, or an image having the largest variance value of the histogram may be selected.

  Moreover, in the said embodiment, although the conversion curves fa-fe are memorize | stored in the conversion curve memory | storage part 270, it is not limited to these conversion curves, The conversion curve which changes with kinds of to-be-inspected object 900 is suitably used. May be used.

  Further, as shown in FIG. 7, the luminance information of the detection data KDa from the line sensor 220 may be amplified in an analog manner by the amplifying unit 700 according to the luminance. Even in this case, the same effect as described above can be obtained, and it becomes easy to grasp the presence or absence of the contents included in the inspection object 900. The operations of the A / D converter 230 and the input display unit MT in FIG. 7 are as described above, and the processing unit 710 performs processing such as acquisition and addition of data for each luminance, foreign matter determination processing, and display data creation.

  In the above embodiment, one luminance region KRT in which thinning processing is not performed or thinning processing is performed at a low thinning rate is used. However, the present invention is not limited to this, and the content included in the inspection object 900 Two or more luminance regions KRT may be set according to the type of the image and the importance of the inspection. In this case, the thinning process is performed at a high thinning rate for one luminance region KRT, and the thinning process is performed at a low thinning rate for the other luminance region KRT.

  Furthermore, although one preferable embodiment of the present invention is as described above, the present invention is not limited thereto. It will be understood that various other embodiments may be made without departing from the spirit and scope of the invention. Furthermore, in this embodiment, although the effect | action and effect by the structure of this invention are described, these effect | actions and effects are examples and do not limit this invention.

DESCRIPTION OF SYMBOLS 100 X-ray inspection apparatus 200 X-ray irradiation apparatus 210 X-ray 220 Line sensor 240 Brightness data acquisition part 260 Weight change part 280 Operation parameter recording part 900 Inspected object KDa detection data KR, KRT Brightness area LD1, LD2 Brightness data MR Decimation rate MT input display

Claims (6)

An X-ray source for irradiating the object to be inspected with X-rays;
A detector that generates detection data by detecting X-rays irradiated from the X-ray source and transmitted through the inspection object;
An X-ray inspection apparatus having a luminance data acquisition unit that acquires luminance data based on detection values from the detector,
A weighting changing unit that changes the weighting of the luminance data by changing the thinning rate of luminance information in the luminance data from the luminance data acquisition unit ;
With
The weight change unit generates a plurality of converted luminance data with different weights from the luminance data from the luminance data acquisition unit,
The weight change unit selects a histogram having a large variance value from the histograms of the plurality of converted luminance data,
X-ray inspection equipment.   The X-ray inspection apparatus according to claim 1, wherein the weighting change unit changes the thinning rate based on the frequency of the luminance data from the luminance data acquisition unit. Including a recording unit for recording a plurality of luminance areas;
The X-ray inspection apparatus according to claim 1, wherein the weight change unit changes the thinning rate for each luminance region recorded in the recording unit.   The X-ray inspection apparatus according to claim 3, wherein the recording unit records the thinning rate corresponding to a plurality of areas of the luminance area.   5. The weighting change unit determines a luminance region in which the thinning rate is changed based on a thickness of the inspection object and / or a material of the inspection object. 6. X-ray inspection apparatus described in 1.   The X-ray inspection apparatus according to claim 1, further comprising a display unit that displays post-processing data from the weight change unit.