JP2011047697A - Visual inspection device - Google Patents

Visual inspection device Download PDF

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JP2011047697A
JP2011047697A JP2009194495A JP2009194495A JP2011047697A JP 2011047697 A JP2011047697 A JP 2011047697A JP 2009194495 A JP2009194495 A JP 2009194495A JP 2009194495 A JP2009194495 A JP 2009194495A JP 2011047697 A JP2011047697 A JP 2011047697A
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inspection
image
inspection object
defective
pixels
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Nobuyuki Tone
伸行 刀根
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Panasonic Electric Works Co Ltd
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Panasonic Electric Works Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a visual inspection device capable of rapidly detecting problems by transmitting defect information such as the number of occurred defects in an easily understood manner. <P>SOLUTION: The visual inspection device includes a camera 2 for photographing an inspection target surface of an inspection target 10, and an image processing device 1 which is connected to the camera 2 and determines the quality of the inspection target 10 based on a picture signal from the camera 2. The image processing device 1 detects defect pixels by performing image processing on image data, performs quality determination based on an inspection condition C1, and stores positional information of the defect pixels, image data and the result of quality determination. The image processing device 1 includes a device body 1b and a monitor 1a. The device body 1b calculates the frequency of defect occurrence based on the positional information of the stored defects, changes at least one of the density and hue of pixels in a pixel region of a designated defect occurrence frequency, and displays it overlaid on an image of the inspection target 10. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、検査対象物を撮像した被検査画像に基づいて、対象物の外観における不良項目を検査する外観検査装置に関するものである。   The present invention relates to an appearance inspection apparatus that inspects a defective item in the appearance of an object based on an inspection image obtained by imaging the inspection object.

従来から検査対象を撮像して得た画像データに画像処理を施すことによって、検査対象物の外観上の欠陥の有無を検出し、検査対象物の良否判定を行う外観検査装置がある(例えば、特許文献1)。   2. Description of the Related Art Conventionally, there is an appearance inspection apparatus that detects the presence or absence of defects on the appearance of an inspection object by performing image processing on image data obtained by imaging the inspection object and determines whether the inspection object is good (for example, Patent Document 1).

特許文献1に記載の欠陥検査装置は、光源からの照明光を検査対象物に対して斜めから照射し、照明光の照射方向とは異なる方向の光軸を有したCCDカメラのような撮像装置によって検査対象を撮像する。撮像装置によって撮像された画像は、A/D変換部によってデジタル信号に変換され、微分演算などの画像演算処理によってノイズを除去するとともに、欠陥部分との一致度が高い画素群を欠陥候補ランドとして抽出する。この欠陥候補ランドに含まれる画素数を、所定の閾値と比較することで欠陥の有無を判定し、検査対象物の良否判定を行う。   The defect inspection apparatus described in Patent Document 1 irradiates illumination light from a light source obliquely onto an inspection object, and an imaging apparatus such as a CCD camera having an optical axis in a direction different from the irradiation direction of the illumination light. To image the inspection object. An image captured by the imaging device is converted into a digital signal by an A / D converter, and noise is removed by image calculation processing such as differential calculation, and a pixel group having a high degree of coincidence with a defective portion is defined as a defect candidate land. Extract. The number of pixels included in the defect candidate land is compared with a predetermined threshold value to determine the presence / absence of a defect, and the quality of the inspection object is determined.

特開2000−339462号公報JP 2000-339462 A

ところで、上述のような欠陥検査装置においては、良否判定の判定結果を使用者が確認する目的として、液晶ディスプレイなどの表示手段が接続されている。表示手段には、検査を行った検査対象物の総数、良品と不良品の割合、検査対象物における欠陥発生数、及び、検査対象物を複数のエリアに分割してそれぞれのエリア毎の欠陥発生数・発生頻度といった欠陥情報が表示されている。使用者は、これらの欠陥情報に基づいて、欠陥の原因や生産ライン上の問題点を把握し、生産ラインを構成する各種装置の調整や、良否判定に用いる検査条件の変更といった対応を行う。   By the way, in the defect inspection apparatus as described above, a display unit such as a liquid crystal display is connected for the purpose of the user confirming the determination result of pass / fail determination. The display means includes the total number of inspection objects that have been inspected, the ratio of non-defective products and defective products, the number of defects generated in the inspection objects, and the occurrence of defects in each area by dividing the inspection object into a plurality of areas. Defect information such as number and frequency of occurrence is displayed. Based on the defect information, the user grasps the cause of the defect and problems on the production line, and takes measures such as adjusting various devices constituting the production line and changing inspection conditions used for pass / fail judgment.

しかしながら、従来の欠陥検査装置では、このような各エリアの欠陥発生数といった欠陥情報は、主に文字情報で表示されており、文字情報から問題点を検知して対応するには深い知識と経験が必要とされ、結果として、対応が遅れて製品が無駄になるなどの問題点があった。   However, in the conventional defect inspection apparatus, defect information such as the number of occurrences of defects in each area is mainly displayed as character information, and deep knowledge and experience are required to detect and respond to problems from character information. As a result, there was a problem that the response was delayed and the product was wasted.

本発明は、上記事由に鑑みて為されたものであり、その目的とするところは、欠陥の発生数などの欠陥情報を分かり易く伝えることで、問題点の検知を迅速に行うことができる外観検査装置を提供することにある。   The present invention has been made in view of the above-mentioned reasons, and the purpose of the present invention is to provide an appearance that can quickly detect a problem by easily transmitting defect information such as the number of occurrences of defects. It is to provide an inspection device.

上記目的を達成するために、請求項1の発明では、検査対象物を撮像する撮像手段と、前記撮像手段により前記検査対象物を撮像して得られた画像データを用いて、前記対象物に存在する欠陥画素の数及び位置を検出する欠陥箇所検出部と、前記欠陥箇所検出部が検出した欠陥画素の数及び位置を記憶する記憶部と、前記記憶部に記憶された複数の検査対象物における欠陥画素の数及び位置に基づいて、所定数の画素を含む画素領域ごとに欠陥の発生頻度を算出する演算部と、前記演算部の演算結果に基づいて、指定された発生頻度の画素領域を画素の濃淡又は色相の少なくとも何れか一方を変化させ、検査対象物の映像に重ねて表示する表示手段とを備えることを特徴とする。   In order to achieve the above object, according to the first aspect of the present invention, an imaging means for imaging an inspection object, and image data obtained by imaging the inspection object by the imaging means are used for the object. A defect location detection unit that detects the number and position of defective pixels that exist, a storage unit that stores the number and position of defective pixels detected by the defect location detection unit, and a plurality of inspection objects stored in the storage unit A calculation unit that calculates a defect occurrence frequency for each pixel region including a predetermined number of pixels based on the number and position of defective pixels in the pixel region, and a pixel region having a specified occurrence frequency based on a calculation result of the calculation unit And a display means for displaying at least one of the shading and the hue of the pixel so as to overlap the image of the inspection object.

請求項2の発明では、請求項1記載の発明において、前記表示部は、同一の画素領域における欠陥の連続発生数が、指定された連続発生数に一致する画素領域を、画素の濃淡もしくは色相の少なくとも何れかを変化させ、検査対象物の映像に重ねて表示することを特徴とする。   According to a second aspect of the present invention, in the first aspect of the present invention, the display unit displays a pixel region in which the number of consecutive occurrences of defects in the same pixel region matches the designated number of consecutive occurrences. It is characterized in that at least one of the above is changed and displayed on the image of the inspection object.

請求項3の発明では、請求項1または2の何れかに記載の発明において、欠陥箇所の数及び位置に関する検査条件が複数設定され、各検査条件に基づいて検査対象物の良否判定を行う検査部を備え、前記表示手段は、前記複数の検査条件に基づく良否判定の判定結果が異なった場合に、欠陥の発生頻度を検査対象物の映像に重ねて表示することを特徴とする。   According to a third aspect of the present invention, in the invention according to the first or second aspect, a plurality of inspection conditions relating to the number and position of defective portions are set, and an inspection for determining whether the inspection object is good or not based on each inspection condition And the display means displays the defect occurrence frequency so as to overlap the image of the inspection object when the determination results of the quality determination based on the plurality of inspection conditions differ.

請求項4の発明では、請求項1〜3の何れか一項に記載の発明において、前記表示部は、前記記憶部に記憶された複数の検査対象物における欠陥画素の数及び位置に基づいて算出した発生頻度が、所定の度数以上の画素領域を含む画像データを表示することを特徴とする。   In invention of Claim 4, in the invention as described in any one of Claims 1-3, the said display part is based on the number and position of the defective pixel in the some test object memorize | stored in the said memory | storage part. Image data including a pixel region having a calculated occurrence frequency equal to or higher than a predetermined frequency is displayed.

請求項1の発明によれば、検査対象物を撮像した画像に重ねて、欠陥の発生頻度が指定された発生頻度となる画素領域を、画素の濃淡又は色相を変化させて表示されることで、指定した発生頻度の欠陥の位置及び頻度を使用者に分かりやすく伝えることができ、原因を迅速に特定して生産ラインの調整や検査条件の変更といった対応を早期に行うことができる。   According to the first aspect of the present invention, the pixel area having the specified occurrence frequency of the defect is displayed on the image obtained by imaging the inspection object while changing the shade or the hue of the pixel. Thus, the position and frequency of the specified occurrence frequency defect can be communicated to the user in an easy-to-understand manner, and the cause can be quickly identified and measures such as production line adjustment and inspection condition change can be performed at an early stage.

請求項2の発明によれば、連続して良否判定が行われた検査対象物において、同じ画素領域に連続して発生した欠陥を早期に検知することができ、また、その原因を特定することが容易になる。   According to the invention of claim 2, in the inspection object that has been continuously judged to be good or bad, it is possible to early detect a defect that has continuously occurred in the same pixel region, and to identify the cause Becomes easier.

請求項3の発明によれば、複数の検査条件によって良否判定を行った判定結果が異なる場合のみ欠陥の発生頻度を表示することで、検査条件を変更する際の基準値が決めやすくなり、より効率の良い検査条件を設定することができる。   According to the invention of claim 3, it is easier to determine the reference value when changing the inspection condition by displaying the occurrence frequency of the defect only when the determination result of the pass / fail determination is different depending on a plurality of inspection conditions. Efficient inspection conditions can be set.

請求項4の発明によれば、頻度の高い欠陥箇所を含む画像データを表示することで、欠陥を含む可能性の高い検査対象物を実際に確認して、問題の有無をより正確に把握することができる。   According to the invention of claim 4, by displaying image data including a defective portion having a high frequency, an inspection object having a high possibility of including a defect is actually confirmed, and the presence or absence of a problem is more accurately grasped. be able to.

本発明の実施の形態にかかる外観検査装置の概略構成図である。1 is a schematic configuration diagram of an appearance inspection apparatus according to an embodiment of the present invention. 同検査装置における表示内容を示し、(a)は検査対象物の基準画像であり、(b)〜(f)は同欠陥画像の例である。The display contents in the inspection apparatus are shown, in which (a) is a reference image of an inspection object, and (b) to (f) are examples of the defect image.

以下に本発明の実施の形態を図1及び図2に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

図1に示すように、本発明にかかる外観検査装置は、検査対象物10を撮像するカメラ2と、カメラ2に接続され、カメラ2からの映像信号に基づいて検査対象物10の良否判定を行う画像処理装置1とを備える。   As shown in FIG. 1, an appearance inspection apparatus according to the present invention is connected to a camera 2 that images an inspection object 10 and the camera 2, and determines whether the inspection object 10 is good or bad based on a video signal from the camera 2. The image processing apparatus 1 is provided.

この外観検査装置は、例えばベルトコンベアを含む他の生産装置(図示せず)とともに検査対象物10の生産ラインを構成している。検査対象物10は、例えばベルトコンベアによって一定方向に運搬され、外観検査装置の所定位置において、検査対象物10の検査面がカメラ2側となるように設定されている。外観検査装置は、検査対象物10の欠陥箇所を検出し、欠陥箇所の数や位置などに基づいて良否判定を行い、生産装置を制御する設備制御装置に良否判定の判定結果を出力することで、検査対象物10を良品と不良品に仕分けする。   This appearance inspection apparatus constitutes a production line for the inspection object 10 together with other production apparatuses (not shown) including, for example, a belt conveyor. The inspection object 10 is transported in a certain direction by, for example, a belt conveyor, and is set so that the inspection surface of the inspection object 10 is on the camera 2 side at a predetermined position of the appearance inspection apparatus. The appearance inspection apparatus detects a defective portion of the inspection object 10, performs a pass / fail determination based on the number and positions of the defective portions, and outputs a determination result of the pass / fail determination to an equipment control device that controls the production apparatus. The inspection object 10 is classified into a non-defective product and a defective product.

カメラ2は、例えばCCDカメラなどであり、検査対象物10の検査面に対して光軸が垂直となるように設置され、検査面を真上方向から撮像している。カメラ2が撮像した検査対象物10の検査面を含む映像信号は、接続ケーブル4を介して画像処理装置1に出力されている。また、カメラ2の近傍には、検査対象物10の検査面に斜め上方向から照明用の光を照射するライト3が設置されており、検査面に存在するチリ、キズなどの欠陥がカメラ2によって撮像されやすいように設定されている。   The camera 2 is a CCD camera, for example, and is installed so that the optical axis is perpendicular to the inspection surface of the inspection object 10, and images the inspection surface from directly above. A video signal including the inspection surface of the inspection object 10 captured by the camera 2 is output to the image processing apparatus 1 via the connection cable 4. Further, in the vicinity of the camera 2, a light 3 for irradiating light for illumination on the inspection surface of the inspection object 10 from an obliquely upward direction is installed, and the camera 2 has defects such as dust and scratches existing on the inspection surface. Is set so as to be easily imaged.

画像処理装置1は、例えば液晶ディスプレイからなるモニタ1aと、検査対象物10の製造ラインを制御する設備制御装置(図示せず)に接続された装置本体1bと、装置本体1bに接続されたキーボード1c及びマウス1dとを備える。また画像処理装置1は、例えば商用電源(図示せず)に接続され、商用電源からの供給電力を動作電力として動作している。   The image processing apparatus 1 includes, for example, a monitor 1a formed of a liquid crystal display, an apparatus main body 1b connected to an equipment control apparatus (not shown) that controls a production line of the inspection object 10, and a keyboard connected to the apparatus main body 1b. 1c and mouse 1d. The image processing apparatus 1 is connected to, for example, a commercial power source (not shown), and operates with power supplied from the commercial power source as operating power.

装置本体1bは、カメラで撮像された映像信号を画像データに変換するキャプチャボード、画像データを演算することで良否判定を行うCPU(Central Processing Unit)、RAM(Random Access Memory)、画像データ及び良否判定結果を記憶するHDD(Hard Disk Drive)、及び、商用電源に接続され、動作電力を供給する電源ユニットなどを組み合わせて構成されている。   The apparatus main body 1b includes a capture board that converts a video signal captured by a camera into image data, a CPU (Central Processing Unit) that performs image quality calculation, RAM (Random Access Memory), image data, and pass / fail. A hard disk drive (HDD) that stores the determination result and a power supply unit that is connected to a commercial power supply and supplies operating power are combined.

また装置本体1bは、検査対象物10の検査面に欠陥が存在しない状態の基準画像(図2(a)を参照)と、欠陥画素数及び欠陥画素の位置に応じて良否を判定するための複数の検査条件C1…Cnが予め設定されている。なお外観検査装置は、検査条件C1を主検査条件として、検査条件C1に基づく良否判定の結果に応じて良品・不良品の判定及び仕分けを行っており、検査条件C2…Cnに基づく良否判定の判定結果は、後に使用者が検査条件を変更する際の基準情報として利用される。   Further, the apparatus main body 1b is used for determining pass / fail according to a reference image (see FIG. 2A) in which no defect exists on the inspection surface of the inspection object 10, the number of defective pixels, and the position of the defective pixels. A plurality of inspection conditions C1... Cn are set in advance. The appearance inspection apparatus uses the inspection condition C1 as a main inspection condition to determine and classify non-defective / defective products according to the result of the quality determination based on the inspection condition C1, and the quality determination based on the inspection conditions C2 ... Cn. The determination result is used as reference information when the user later changes the inspection condition.

キーボード1c及びマウス1dは、使用者により操作されると、操作信号を装置本体1bに出力し、装置本体1bが保持する発生頻度などの諸情報、及び、検査条件C1…Cnの設定が変更される。   When the keyboard 1c and the mouse 1d are operated by the user, the operation signal is output to the apparatus main body 1b, and various information such as the occurrence frequency held by the apparatus main body 1b and the setting of the inspection conditions C1... Cn are changed. The

ここで、検査対象物10を良否判定を行う方法及び、その手順について説明を行う。   Here, a method and a procedure for determining pass / fail of the inspection object 10 will be described.

まず、装置本体1bのキャプチャボードなどによって、カメラ2から入力された映像信号を、カメラ2及びキャプチャボードの解像度に基づいて複数の画素からなる画像データに変換する。次に、この画像データを、例えば微分処理を施して微分画像を作成し、この微分画像の微分値が大きな画素を中心として非線形演算行いエッジ検出を行う。その後、検出したエッジ情報に基づいて基準画像との位置及び映像の方向を合わせるとともに、画像データから基準画像を減算し、減算後の画素が所定の範囲内に収まっていない場合には、欠陥画素として検出する。検出された欠陥画素の位置情報は、検査対象物10を撮像した映像とともに、装置本体1bが装置本体1bのHDDに記憶する。   First, the video signal input from the camera 2 is converted into image data composed of a plurality of pixels based on the resolution of the camera 2 and the capture board by the capture board of the apparatus main body 1b. Next, differential processing is performed on the image data, for example, to generate a differential image, and edge detection is performed by performing a non-linear calculation centering on a pixel having a large differential value of the differential image. After that, based on the detected edge information, the position of the reference image and the direction of the video are matched, and the reference image is subtracted from the image data. If the pixel after the subtraction is not within the predetermined range, the defective pixel Detect as. The position information of the detected defective pixels is stored in the HDD of the apparatus main body 1b by the apparatus main body 1b together with the video image of the inspection object 10.

次に、検出された欠陥画素の位置及び数を検査条件C1と比較し、検査対象物10の良否判定を行う。例えば、欠陥画素数が20画素未満であれば良品として判定し、欠陥画素数が20画素以上であれば不良品として、装置本体1bが良否判定の判定結果を設備制御装置に出力し、設備制御装置がこの判定結果に基づいて良品と不良品を仕分けされるよう、各生産装置を制御する。また同時に、検出された欠陥画素の位置及び数を検査条件C2…Cnと比較してそれぞれの検査条件による良否判定を行う。これらの検査条件C1〜Cnに基づく判定結果は、上述した欠陥画素の位置情報及び検査対象物10の映像とともに、装置本体1bのHDDに記憶される。   Next, the position and number of the detected defective pixels are compared with the inspection condition C1, and the quality of the inspection object 10 is determined. For example, if the number of defective pixels is less than 20 pixels, it is determined as a non-defective product, and if the number of defective pixels is 20 pixels or more, the device main body 1b outputs a determination result of pass / fail determination to the equipment control device, and equipment control Each production apparatus is controlled so that the apparatus can sort non-defective products and defective products based on the determination result. At the same time, the position and number of detected defective pixels are compared with the inspection conditions C2. The determination results based on these inspection conditions C1 to Cn are stored in the HDD of the apparatus main body 1b together with the position information of the defective pixels and the video of the inspection object 10 described above.

このようにして、画像処理装置1は、生産ラインに流れる全ての検査対象物10に対して良否判定を行い、良否判定の判定結果に応じて設備制御装置が各生産装置を制御することで、良品・不良品の仕分けを行っている。   In this way, the image processing apparatus 1 performs pass / fail determination for all the inspection objects 10 flowing on the production line, and the facility control apparatus controls each production apparatus according to the determination result of pass / fail determination, We sort good and defective products.

次に、モニタ1aに表示される表示内容について説明する。モニタ1aの表示内容は、使用者がキーボード1c又はマウス1dの何れかを操作することで表示が切り替わり、後述する第1〜第3の表示内容を表示する。まず、第1の表示内容として、上述の良否判定において装置本体1bのHDDに保存された欠陥画素の位置情報から算出した出現頻度に応じて、各画素の濃淡又は色相の少なくとも何れか一方を変化させ、検査対象物10の映像に重ねて表示する(図2(b)〜(f)を参照)。なお、図2(b)は、傷(傷11)がある場合の表示例であり、図2(c)は、吸着パッドの跡(吸着パッド跡12)が残っている場合の表示例であり、図2(d)は、ほこり(ほこり13)が付着している場合の表示例である。また、図2(e)は、吸着パッドの跡とほこり、図2(f)は、傷とほこりがそれぞれ組み合わさった場合の表示例である。   Next, display contents displayed on the monitor 1a will be described. The display contents of the monitor 1a are switched when the user operates either the keyboard 1c or the mouse 1d, and first to third display contents to be described later are displayed. First, as the first display content, at least one of shading or hue of each pixel is changed according to the appearance frequency calculated from the position information of the defective pixel stored in the HDD of the apparatus main body 1b in the above-described pass / fail determination. And superimposed on the image of the inspection object 10 (see FIGS. 2B to 2F). 2B is a display example when there is a scratch (scratch 11), and FIG. 2C is a display example when a suction pad trace (suction pad trace 12) remains. FIG. 2D shows a display example when dust (dust 13) is attached. Further, FIG. 2E is a display example when the marks and dust of the suction pad are combined, and FIG. 2F is a display example when scratches and dust are combined.

ここで、出現頻度の算出方法としては、例えば画像全体を4×4画素の画素領域に分割し、各画素領域内に欠陥画素が1つでも存在する場合に発生度数を加算して発生頻度を算出する。算出した発生頻度と、使用者がキーボード1cを用いて指定した発生頻度の値とを比較し、指定された発生頻度と等しい画素領域の画素を、例えば半透明の赤色で塗りつぶして表示する。このようにすることで、例えばほこりが付着するなどして発生した、発生頻度の低い欠陥を表示させないようにすることができる。   Here, as a method of calculating the appearance frequency, for example, the entire image is divided into pixel areas of 4 × 4 pixels, and when even one defective pixel exists in each pixel area, the occurrence frequency is added to determine the occurrence frequency. calculate. The calculated occurrence frequency is compared with the occurrence frequency value designated by the user using the keyboard 1c, and the pixels in the pixel area equal to the designated occurrence frequency are displayed in a semi-transparent red color, for example. By doing so, it is possible to prevent the display of defects with a low frequency of occurrence, for example, caused by dust adhering.

なお、表示する検査対象物10の画像は、良否判定に用いた基準画像を表示してもよく、良否判定においてHDD内に保存された検査対象物10の画像でもよい。また、使用者が指定する発生頻度は、上限と下限のうち少なくとも何れか一方を設定することで、発生頻度が特定の範囲内の画素領域のみ表示することができる。   Note that the image of the inspection object 10 to be displayed may be a reference image used for the quality determination, or may be an image of the inspection object 10 stored in the HDD for the quality determination. In addition, the occurrence frequency designated by the user can be displayed only in a pixel region where the occurrence frequency is within a specific range by setting at least one of an upper limit and a lower limit.

第2の表示内容として、同一の画素領域における欠陥の連続発生数が、使用者がキーボード1cを用いて指定した連続発生数に一致する画素領域を、画素の濃淡もしくは色相の少なくとも何れかを変化させて、検査対象物10の映像に重ねて表示する。より具体的には、使用者が連続数として「8個」を設定すると、連続して良否判定された検査対象物の欠陥画素の位置をそれぞれ走査し、同じ画素領域について欠陥画素が含まれる検査対象物10が8個連続した場合に、対応する画素領域を、画素の濃淡及び色相を変化させて表示する。なお、発生頻度の算出方法及び、画素の濃淡及び色相の変化方法については、第1の表示内容における方法と同様の方法を用いる。   As a second display content, a pixel area in which the number of consecutive occurrences of defects in the same pixel area matches the number of consecutive occurrences designated by the user using the keyboard 1c is changed in at least one of lightness and shade of pixels. Thus, the image of the inspection object 10 is displayed in an overlapping manner. More specifically, when the user sets “8” as the continuous number, the positions of the defective pixels of the inspection object that have been continuously determined to pass or fail are respectively scanned, and the inspection includes defective pixels in the same pixel region. When eight objects 10 are continuous, the corresponding pixel region is displayed with the pixel shade and hue changed. Note that a method similar to the method in the first display content is used for the generation frequency calculation method and the pixel shading and hue change method.

第3の表示内容としては、上述の良否判定において装置本体1bのHDDに保存された欠陥画素の位置情報から算出した出現頻度が所定の度数以上の欠陥画素を含む検査対象物10の画像を表示する。なお、発生頻度の算出方法は第1及び第2の表示内容における方法と同様の方法を用いる。   As the third display content, an image of the inspection object 10 including the defective pixels having the appearance frequency calculated from the position information of the defective pixels stored in the HDD of the apparatus main body 1b in the above-described pass / fail determination is displayed. To do. Note that the calculation method of the occurrence frequency uses the same method as the method in the first and second display contents.

このようにして、正確な欠陥の位置及び頻度を使用者に分かりやすく伝えることができ、原因を迅速に特定して生産ラインの調整や、検査条件の変更などの対応を早期に行うことができる。   In this way, the exact position and frequency of defects can be communicated to the user in an easy-to-understand manner, the cause can be quickly identified and production lines can be adjusted and inspection conditions can be changed at an early stage. .

なお、第1〜第3の表示内容は、検査条件C1〜Cnに基づく良否判定の判定結異なった場合に、欠陥の発生頻度を検査対象物10の映像に重ねて表示するようにしてもよい。このようにすることで、検査条件C1〜Cnを基準として、新たな検査条件を選定して、設定を変更することができる。   Note that the first to third display contents may be displayed in such a manner that the frequency of occurrence of defects is superimposed on the image of the inspection object 10 when the quality determination based on the inspection conditions C1 to Cn is different. . By doing in this way, a new inspection condition can be selected and a setting can be changed on the basis of inspection conditions C1-Cn.

1 画像処理装置
1a モニタ(表示部)
1b 装置本体(欠陥箇所検出部、記憶部、演算部)
1c キーボード
1d マウス
2 カメラ(撮像手段)
3 ランプ
4 接続用ケーブル
10 検査対象物
1 Image processing device 1a Monitor (display unit)
1b Device body (defect location detection unit, storage unit, calculation unit)
1c keyboard 1d mouse 2 camera (imaging means)
3 Lamp 4 Connection cable 10 Object to be inspected

Claims (4)

検査対象物を撮像する撮像手段と、
前記撮像手段により前記検査対象物を撮像して得られた画像データを用いて、前記対象物に存在する欠陥画素の数及び位置を検出する欠陥箇所検出部と、
前記欠陥箇所検出部が検出した欠陥画素の数及び位置を記憶する記憶部と、
前記記憶部に記憶された複数の検査対象物における欠陥画素の数及び位置に基づいて、所定数の画素を含む画素領域ごとに欠陥の発生頻度を算出する演算部と、
前記演算部の演算結果に基づいて、指定された発生頻度の画素領域を画素の濃淡又は色相の少なくとも何れか一方を変化させ、検査対象物の映像に重ねて表示する表示手段とを備えることを特徴とする外観検査装置。
An imaging means for imaging an inspection object;
Using the image data obtained by imaging the inspection object by the imaging means, a defect location detector that detects the number and position of defective pixels present in the object;
A storage unit for storing the number and position of defective pixels detected by the defective part detection unit;
A calculation unit that calculates the occurrence frequency of defects for each pixel region including a predetermined number of pixels based on the number and position of defective pixels in a plurality of inspection objects stored in the storage unit;
Display means for displaying a pixel region having a specified occurrence frequency based on a calculation result of the calculation unit, by changing at least one of the shading and the hue of the pixel and superimposing the image on the image of the inspection object. Feature visual inspection device.
前記表示部は、同一の画素領域における欠陥の連続発生数が、指定された連続発生数に一致する画素領域を、画素の濃淡もしくは色相の少なくとも何れかを変化させ、検査対象物の映像に重ねて表示することを特徴とする請求項1に記載の外観検査装置。   The display unit superimposes a pixel region in which the number of consecutive defects in the same pixel region matches the designated number of consecutive occurrences on the image of the inspection object by changing at least one of pixel shading and hue. The visual inspection device according to claim 1, wherein the visual inspection device is displayed. 欠陥箇所の数及び位置に関する検査条件が複数設定され、各検査条件に基づいて検査対象物の良否判定を行う検査部を備え、前記表示手段は、前記複数の検査条件に基づく良否判定の判定結果が異なった場合に、欠陥の発生頻度を検査対象物の映像に重ねて表示することを特徴とする請求項1または2の何れかに記載の外観検査装置。   A plurality of inspection conditions relating to the number and position of defective portions are set, and an inspection unit that determines the quality of an inspection object based on each inspection condition is provided, and the display unit determines the result of the quality determination based on the plurality of inspection conditions 3. The appearance inspection apparatus according to claim 1, wherein the frequency of occurrence of defects is displayed so as to be superimposed on the image of the inspection object. 前記表示部は、前記記憶部に記憶された複数の検査対象物における欠陥画素の数及び位置に基づいて算出した発生頻度が、所定の度数以上の画素領域を含む画像データを表示することを特徴とする請求項1〜3の何れか一項に記載の外観検査装置。   The display unit displays image data including a pixel region whose occurrence frequency calculated based on the number and position of defective pixels in a plurality of inspection objects stored in the storage unit is a predetermined frequency or more. The appearance inspection apparatus according to any one of claims 1 to 3.
JP2009194495A 2009-08-25 2009-08-25 Visual inspection device Pending JP2011047697A (en)

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