JP5331740B2 - Functional film - Google Patents

Description

  The present invention relates to a functional film, and more particularly to a functional film in which an organic film and an inorganic film are formed on a support.

  Various functional films such as gas barrier films, protective films, optical films such as optical filters and antireflection films, etc. in various devices such as optical elements, display devices such as liquid crystal displays and organic EL displays, semiconductor devices, thin film solar cells, etc. Is being used.

  In order to produce functional films efficiently and with high productivity, the so-called roll-to-roll technology that continuously forms films on long supports has been adopted. ing.

  Patent Document 1 discloses that in a polarizing plate that is a protective film on both sides of a polarizing film, at least one of the double-sided protective films is heat-treated in a predetermined temperature range. Thereby, a polarizing plate excellent in dimensional stability over a long period of time is obtained. The protective film of patent document 1 is used in order to protect the completed product (polarizing plate).

JP 2009-86022 A

  The problem with thin functional films such as barrier films using roll-to-roll technology is that during film formation / transport processes, during storage / transport processes, during assembly processes, functional layers of functional films Is to protect.

  Regarding the characteristics of the laminate film to be used, when forming a functional layer by laminating a plurality of organic films and inorganic films on the support, the vertical support or folding of the support being transported, winding it on a film, inorganic film We must consider prevention of scratches. In addition, protection of the functional layer when the finished functional film is bonded to another product must be considered.

  This invention is made | formed in view of such a situation, and provides a functional film provided with the laminate film which can solve the problem in a film-forming / conveying process, a storage / transport process, and an assembly process.

According to one aspect of the present invention, there is provided a functional film, a support, wherein the placed organic film on one side of the support and an inorganic film formed on the organic film, respectively, at least A functional layer including one layer; a first laminated film disposed on the other surface of the support; and a second laminated film disposed on the uppermost layer of the functional layer, the second laminated film and the uppermost layer. adhesion between the rather smaller than the adhesive strength of the support and the first laminate film, adhesion between the top layer and the second laminate film 0.02~1.0 (N / 25mm) The adhesive strength between the first laminate film and the support is in the range of 0.03 to 1.5 (N / 25 mm) .

The first laminate film prevents vertical and folding of the support during the film forming / conveying process using roll-to-roll. The second laminate film protects the top layer of the functional layer during the storage / transport process. Further, since the second laminate film has a lower adhesive strength than the first laminate film, it can be easily peeled off when being attached to another product (during the assembly process).
By setting the adhesive strength of the second laminated film within the above range, it is possible to prevent peeling during the storage / transport process and to peel during the assembly process. By making the adhesive strength of the first laminate film within the above range, it is possible to achieve both prevention of peeling during the film forming / conveying process and prevention of folds and wrinkles when peeling off.

  According to another aspect of the present invention, preferably, the second laminate film has a Young's modulus smaller than that of the first laminate film. Since the Young's modulus of the second laminate film is small, when the second laminate film is peeled off first, the first laminate film will not be wrinkled under the tension of the second laminate film being peeled off. .

  In the step of peeling the second laminate film, the support and the first laminate film applied thereto are held (fixed) in some way. When the Young's modulus of the second laminate film is higher than the Young's modulus of the first laminate film stretched to obtain the self-supporting property of the support, the first laminate has a low Young's modulus. The film may be bent. Since the Young's modulus of the second laminate film is small, the first laminate film can be prevented from being broken.

  According to another aspect of the present invention, preferably, the second laminate film has a center line average roughness (Ra) of 5 to 50 nm, and the first laminate film has a center line average roughness of 5 to 80 nm ( Ra).

  By setting the center line average roughness (Ra) of the second laminated film within the above range, the second laminated film is prevented from being scratched on the uppermost layer of the functional layer during the storage / transport process. By setting the center line average roughness (Ra) of the first laminate film within the above range, when the support is wound around the film roll during the film forming / conveying process, the first laminate film is scratched on the inorganic film. Prevent sticking.

According to another aspect of the present invention, preferably, the inorganic film has a thickness of 5 nm to 200 nm or less.

  According to another aspect of the present invention, preferably, the inorganic film includes one selected from the group consisting of metal, metal oxide, metal nitride, metal carbide, metal fluoride, or a composite thereof.

  According to another aspect of the present invention, preferably, the organic film includes one of a radiation curable monomer and an oligomer.

  According to the present invention, it is possible to obtain a functional film having high quality during a film formation / conveyance process, a storage / transport process, and an assembly process.

The block diagram of a functional film. The block diagram of a functional film. The figure which shows an example of the apparatus which enforces the manufacturing method of a functional film. The figure which shows the state which peels a 2nd laminate film. The table | surface which shows the result of an Example.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The present invention will be described with reference to the following preferred embodiments, but can be modified in many ways without departing from the scope of the present invention, and other embodiments than the present embodiment can be used. be able to. Accordingly, all modifications within the scope of the present invention are included in the claims. In the present specification, a numerical range represented by using “to” means a range including numerical values described before and after “to”.

  FIG. 1 shows an example of a configuration diagram of the functional film of the first embodiment. The functional film 10 includes a support 12, an organic film 14 disposed on one surface of the support 12, an inorganic film 16 disposed on the organic film 14, and an organic film disposed on the inorganic film 16. It has a membrane 18. The organic film 14 / inorganic film 16 / organic film 18 functions as the functional layer 20. The uppermost organic film 18 also functions as a protective layer. A first laminate film 21 is disposed on the other surface of the support 12. A second laminate film 22 is disposed on the organic film 18 that is the uppermost layer of the functional layer 20.

  FIG. 2 shows an example of a configuration diagram of the functional film of the second embodiment. The functional film 10 includes a support 12, an organic film 14 disposed on one surface of the support 12, and an inorganic film 16 disposed on the organic film 14. An organic film 14 and an inorganic film 16 are further disposed in this order on the inorganic film 16. An organic film 18 is disposed on the inorganic film 16. The organic film 14 / inorganic film 16 / organic film 14 / inorganic film 16 / organic film 18 function as the functional layer 20. The uppermost organic film 18 also functions as a protective layer. A first laminate film 21 is disposed on the other surface of the support 12. A second laminate film 22 is disposed on the organic film 18 that is the uppermost layer of the functional layer 20.

  About the functional film of 1st Embodiment and the functional film of 2nd Embodiment, since the 1st laminate film 21 is arrange | positioned at the other surface of the support body 12, the support body 12 is provided with self-supporting property. The Here, self-supporting means the firmness (rigidity) of the film.

  Since the support 12 has a self-supporting property, no vertical wrinkles or creases occur during the film forming / conveying process using roll-to-roll. Thereby, it is possible to prevent the organic film and / or the inorganic film formed on the support 12 from being destroyed.

  The first laminate film 21 preferably has a center line average roughness (Ra) of 5 to 80 nm. During the film forming / conveying process using roll-to-roll, after the inorganic film 16 is formed, the support 12 is wound into a roll shape. At this time, the first laminate film 21 and the inorganic film 16 are in contact with each other. Since the first laminate film 21 has a center line average roughness (Ra) of 5 to 80 nm, the contact area between the first laminate film 21 and the inorganic film 16 can be reduced. As a result, the frictional resistance between them can be reduced, and the slipperiness can be improved. Furthermore, if the center line average roughness (Ra) roughness of the first laminate film 21 is larger than the thickness of the inorganic film 16, the inorganic film 16 may be penetrated and destroyed. Therefore, the centerline average roughness (Ra) of the preferable first laminate film 21 is 5 to 80 nm, which is smaller than the thickness of the inorganic film.

  As the first laminate film 21, a film made of polyethylene (PE), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), or the like can be used.

  For the functional film of the first embodiment and the functional film of the second embodiment, the second laminate film 22 is disposed on the uppermost layer of the functional layer 20, so that the second laminate during the storage / transport process. The uppermost layer of the functional layer 20 is protected by the film 22. When the functional layer 20 is formed on the support 12, the functional film 10 is completed. Then, the 2nd laminate film 22 is affixed on the uppermost layer of the functional layer 20, the functional film 10 is stored in the form of a roll or a sheet | seat, and is conveyed to another place. Meanwhile, since the functional layer 20 is protected from scratches and the like by the second laminate film 22, the functional layer 20 can exhibit a desired function.

  Moreover, since the uppermost layer of the functional layer 20 may be damaged when the center line average roughness (Ra) roughness of the second laminate film 22 is large, the preferred center line average roughness (Ra) of the second laminate film 22 is 5 to 50 nm.

  The adhesive force between the second laminate film 22 and the uppermost layer of the functional layer 20 is smaller than the adhesive force between the first laminate film 21 and the support 12. The functional film 10 is rarely used alone. The second laminate film 22 is peeled from the functional layer 20 of the functional film 10. In the assembly process, the functional layer 20 is attached to another product, for example, a substrate to which an organic EL element is applied. At this time, since the second laminate film 22 has a lower adhesive strength than the first laminate film 21, it can be easily peeled off. Further, since the adhesive strength of the second laminate film 22 is not large, the peeling of the second laminate film 22 does not damage the functional layer 20.

  Preferably, the second laminate film 22 has a Young's modulus smaller than that of the first laminate film 21. When the second laminate film is peeled first, the first laminate film is not wrinkled under the tension of the second laminate film being peeled.

  In the step of peeling the second laminate film, the support and the first laminate film applied thereto are held (fixed) in some way. When the Young's modulus of the second laminate film is higher than the Young's modulus of the first laminate film stretched to obtain the self-supporting property of the support, the first laminate has a low Young's modulus. The film may be bent. Since the Young's modulus of the second laminate film is small, the first laminate film can be prevented from being broken.

  As the second laminate film 22, a film made of polyethylene (PE), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), or the like can be used.

  Here, the centerline average roughness (Ra) is defined by the roughness of the surface of the laminate and the peak of the irregularities and the average value of the peaks. The surface roughness of the first laminate film 21 and the second laminate film 22 is the centerline average roughness (Ra) measured in the range of 10 μm using atomic force microscopy (AFM). Standard.

  The support 12 is not particularly limited as long as it can form the organic film 14 and the inorganic film 16 by vacuum film formation. Various supports used for functional films such as various resin films such as PET films and various metal sheets such as aluminum sheets can be used.

  For example, an anchor coat layer for improving adhesion, an oxide film formed by atmospheric pressure plasma, an inorganic film such as a thermosetting or ultraviolet curable organic film is formed on the organic film 14. All the films to be formed are included.

  The inorganic film 16 is preferably a material containing at least one of metal, metal oxide, metal nitride, metal carbide, metal fluoride, or a composite thereof.

  Hereinafter, a method for producing a functional film (film formation / conveyance process) will be described. The production apparatus for producing the functional film includes, for example, an organic film forming apparatus 23 that forms an organic film on the surface of the support 12, and a vacuum film forming apparatus 24 that forms an inorganic film on the organic film. Consists of.

  FIG. 3A conceptually shows an example of the organic film deposition apparatus 23. The organic film forming apparatus 23 includes a coating unit 26, a heating unit 28, and a UV irradiation device 30. This organic film forming apparatus 23 forms an organic film by roll-to-roll. First, the film roll 40 is loaded into the delivery machine 32. Next, the support 12 is conveyed from the film roll 40 in the longitudinal direction by the take-up roller 36. For example, a coating solution containing a radiation curable monomer or oligomer prepared in advance is coated on the support 12 by the coating means 26. The coating liquid is dried by the heating means 28, and the solvent is evaporated. The UV irradiation apparatus 30 irradiates the coating liquid after drying with ultraviolet rays to start the polymerization reaction. The organic film is hardened and formed on the support 12.

  In this Embodiment, the 1st laminated film is provided in the back surface, and the support body 12 which has a self-supporting property is wound up in roll shape, and is prepared as the film roll 40. FIG. When the first laminate film is affixed to the back side of the support, the first laminate film is not peeled off from the support until functional layers including the required number of organic films and inorganic films are laminated on the support. .

  As shown in FIG. 3B, the vacuum film forming apparatus 24 is an apparatus for forming an inorganic film by roll-to-roll, like the organic film forming apparatus 23. The vacuum film forming apparatus 24 includes a supply chamber 50, a film forming chamber 52, and a winding chamber 54. The support 12 is sent out from the film roll 42 by the feeder 56 in the supply chamber 50. An inorganic film is formed on the organic film of the support 12 in the film forming chamber 52 while transporting the support 12 in the longitudinal direction. The support 12 on which a laminate composed of an organic film and an inorganic film is formed is wound around a film roll 48 by a winder 58 in the winding chamber 54.

  Next, a method for forming an inorganic film will be described. The supply chamber 50 of the vacuum film forming apparatus 24 includes a delivery device 56, a guide roller 60, and a vacuum exhaust unit 61.

  The support 12 is delivered from the film roll 42 by the delivery device 56. The support 12 from which the organic film is exposed passes through a slit 74 a of the partition wall 74 through a predetermined path by the guide roller 60 and is conveyed to the film forming chamber 52. In the supply chamber 50, the delivery device 56 is rotated in the clockwise direction in the drawing by a drive source (not shown). Since the first laminate film is attached to the back side of the support 12, the support 12 has self-supporting properties.

  In the film forming chamber 52, an inorganic film is formed on the surface of the support 12, that is, the surface of the organic film. As shown in FIG. 3B, the film forming chamber 52 includes a drum 62, film forming means 64a, 64b, 64c, and 64d, guide rollers 68 and 70, and a vacuum exhaust means 72. In the case where the film formation chamber 52 performs film formation by sputtering, plasma CVD, or the like, the film formation chamber 52 is further provided with a high-frequency power source or the like.

  The drum 62 of the film forming chamber 52 rotates counterclockwise in the figure by a driving source (not shown) around the center line. The support 12 guided along the predetermined path by the guide roller 68 is hung around a predetermined area on the peripheral surface of the drum 62 and is transported through the predetermined transport path while being supported / guided by the drum 62 to form a film forming unit. An inorganic film is formed on the organic film by 64a to 64d. The inorganic film formed at this time preferably has a thickness of 5 nm to 200 nm.

  The film forming units 64a to 64d are apparatuses for forming an inorganic film on the surface of the support 12 by a vacuum film forming method. The film forming means is not limited, and any known vacuum film forming method (vapor phase deposition method) such as CVD, plasma CVD, sputtering, vacuum deposition, or ion plating can be used.

  Therefore, the film forming means 64a to 64d are configured by various members according to the vacuum film forming method to be performed. For example, if the film forming chamber 52 is to form an inorganic film by ICP-CVD (inductively coupled plasma CVD), the film forming means 64a to 64d include induction coils for forming an induction magnetic field, It has gas supply means for supplying a reaction gas to the film formation region.

  In addition, if the film forming chamber 52 is for depositing an inorganic film by the CCP-CVD method (capacitive coupling type plasma CVD), the film forming units 64 a to 64 d are hollow and face the drum 62. A high-frequency electrode having a large number of small holes and connected to a reaction gas supply source, a shower electrode acting as a reaction gas supply means, and the like are configured.

  Further, if the film formation chamber 52 is for depositing an inorganic film by vapor deposition by the CVD method, the film formation means 64a to 64d are configured to include a reaction gas introduction means and the like.

  Further, if the film forming chamber 52 is for depositing an inorganic film by sputtering, the film forming means 64a to 64d are configured to include a target holding means, a high-frequency electrode, a sputtering gas supply means, and the like. The

  The vacuum evacuation means 72 evacuates the film formation chamber 52 to a degree of vacuum corresponding to the formation of the inorganic film by the vacuum film formation method. The vacuum exhaust means 72 is not particularly limited, and vacuum pumps such as turbo pumps, mechanical booster pumps, rotary pumps and the like, further, auxiliary means such as a cryocoil, means for adjusting ultimate vacuum and exhaust amount, etc. are used. Various known (vacuum) exhaust means used in the film forming apparatus can be used.

  The support 12 on which the inorganic film is formed by the film forming means 64 a to 64 d is guided to the slit 75 a of the partition wall 75 by the guide rollers 70 and 78 and is conveyed to the winding chamber 54. A vacuum exhaust means 80 is provided in the winding chamber 54. The inside of the winding chamber 54 is depressurized by the evacuation means 80 so as to become a predetermined pressure. The support 12 is wound around the film roll 48 by a winder 58 provided in the winding chamber 54.

  In addition to the members shown in the figure, the supply chamber 50 includes a pair of transport rollers, a guide member that regulates the position of the support 12 in the width direction, and the like. May be installed.

  By giving a 1st laminate film to the back surface of the support body 12, the support body 12 in which an inorganic film is formed can be given moderate rigidity. When the vacuum film forming apparatus 24 is transported (or reciprocated a plurality of times), the support 12 can be transported without causing vertical wrinkles or folding.

  As shown in FIG. 3B, the support 12 on which the inorganic film is formed is wound around the film roll 48 in the winding chamber 54. Since the first laminate fill has a center line average roughness (Ra) of 5 to 80 nm, the contact area between the first laminate fill and the inorganic film can be reduced. As a result, the frictional resistance between them can be reduced, and the slipperiness can be improved.

  The film roll 48 is set as a film roll 40 in the delivery machine 32 of the organic film forming apparatus 23, and an organic film is formed on the inorganic film. The film forming / conveying process for forming the functional layer basically ends. The second laminate film 22 is sent out from the laminate film sending machine 81. The second laminate film 22 is attached to the surface of the organic film by the pair of nip rollers 38. 1, the support 12, the functional layer 20 including the organic film 14 / the inorganic film 16 / the organic film 18 disposed on one surface of the support 12, and the second layer disposed on the other surface of the support 12. The functional film 10 having the first laminated film 21 and the second laminated film 22 disposed on the uppermost layer of the functional layer 20 is completed.

  The vacuum film forming device 24 and the organic film forming device 23 can be passed without attaching the second laminate film 22. Thereby, the functional layer 20 including the organic film 14 / inorganic film 16 / organic film 14 / inorganic film 16 / organic film 18 shown in FIG. 2 is formed.

  Next, as shown in FIG. 3A, the second laminate film 22 is sent out from the laminate film feeder 81, and the second laminate film 22 is attached to the surface of the organic film by a pair of nip rollers 38. 2, the support 12, the functional layer 20 including the organic film 14 / inorganic film 16 / organic film 14 / inorganic film 16 / organic film 18 disposed on one surface of the support 12, and the support 12. The functional film 10 which has the 1st laminate film 21 arrange | positioned on the other surface of this and the 2nd laminate film 22 arrange | positioned on the uppermost layer of the functional layer 20 is completed.

  When the second laminate film 22 is attached and wound into a film, the process proceeds to a storage / transport process. As shown in FIGS. 1 and 2, the support 12 and the functional layer 20 are protected by the first laminate film 21 and the second laminate film 22.

  During the storage / transport process, the functional film 10 has the form of a roll or sheet. Here, the shape of the roll means that the functional film 10 is wound around a film roll as described above. The form of the sheet means an unrolled film roll, and includes a sheet that has been cut into a predetermined size.

  The functional film 10 in the form of a roll or sheet is transported to the assembly process. As shown in FIG. 4, in order to affix the functional film 10 and another product, the second laminate film 22 is peeled off. At this time, since the second laminate film 22 has a lower adhesive strength than the first laminate film 21, it can be easily peeled off. Further, since the adhesive strength of the second laminate film 22 is not large, the peeling of the second laminate film 22 does not damage the functional layer 20. Considering the assembly process, what is important is that the adhesive force of the second laminate film 22 is weaker than the adhesive force of the first laminate film 21.

  Furthermore, after bonding the other product and the functional layer 20 as needed, the 1st laminate film 21 is peeled.

  As an organic film material, for example, an anchor coat layer for improving adhesion, an oxide film formed by atmospheric pressure plasma, a thermosetting or ultraviolet curable organic film is used before forming an inorganic film. Anything is possible.

  For example, specifically, the monomer or oligomer used is preferably a monomer or oligomer that has two or more ethylenically unsaturated double bonds and undergoes addition polymerization upon irradiation with light.

  For example, strength and surface smoothness can be improved by applying an ultraviolet curable resin as the organic film. Examples of UV curable resins include: Kyoeisha Chemical Polymerizable Monomer, BEPGA 15 g, Osaka Organic Chemical Industry Co., Ltd., Polymeric Monomer V-3PA 5 g, UV polymerization initiator (Lamberti, trade name: Esacure KTO- 46) A mixed solution of 1.5 g and 2-butanone 190 g can be applied to a support to form an organic film.

  Moreover, it can replace with BEPGA and V-3PA, and can also use acrylic monomer: Kayarad DPHA (made by Nippon Kayaku Co., Ltd.) and KAYARAD TMPTA (made by Nippon Explosives Co., Ltd.).

  For example, the adhesiveness can be improved by applying a thermosetting resin as the organic film. As an example of a thermosetting resin, a thermosetting resin (Epiclon 840-S (bisphenol A type liquid) manufactured by Epoxy Resin DIC) is diluted with methyl ethyl ketone and adjusted to a solid content concentration of 5%. It can be applied to form an organic film. In addition, a polyester resin [byron 200 manufactured by Toyobo Co., Ltd.] can be used.

  Examples of the method for forming the organic film include a normal solution coating method and a vacuum film forming method. Examples of the solution coating method include a dip coating method, an air knife coating method, a curtain coating method, a roller coating method, a wire bar coating method, a gravure coating method, a slide coating method, or a hopper described in US Pat. No. 2,681,294. It can apply | coat by the extrusion-coating method which uses-.

  For example, when producing a gas barrier film (water vapor barrier film) as the functional film, it is preferable to form a silicon nitride film, an aluminum oxide film, a silicon oxide film, or the like as the inorganic film.

  When producing protective films for various devices and devices such as organic EL displays and display devices such as liquid crystal displays as functional films, it is preferable to form a silicon oxide film or the like as the inorganic film.

  Furthermore, when manufacturing a functional film such as a light reflection preventing film, a light reflection film, and various filters, a film made of a material having or exhibiting a desired optical characteristic is formed as an inorganic film. Is preferred.

  As mentioned above, although the manufacturing method of the functional film of this invention was demonstrated in detail, this invention is not limited to the said embodiment, Even if various improvements and changes are performed in the range which does not deviate from the summary of this invention. Good.

[Example]
Hereinafter, the present invention will be described in more detail with reference to specific examples of the present invention. However, it is not limited to these.

A PET base having a width of 1000 mm and a thickness of 100 μm was used as the support. A plurality of types of first laminated films having different adhesiveness and Young's modulus were prepared.
The acrylate monomer and the photopolymerization initiator were dissolved in an organic solvent and coated on the support with a die coater. The coating film was dried, and the coating film was further cured by ultraviolet curing to form an organic film on the support. A film roll was prepared while controlling the winding tension to be constant according to the winding diameter. The amount of liquid fed to the support was controlled, and the thickness of the organic film was 1 μm in a completely cured state. A film roll having an organic film formed under various conditions was set in a delivery part of a vacuum film forming apparatus. After the vacuum film forming apparatus was evacuated, an alumina film was formed to a thickness of 80 nm using reactive sputtering, and wound around a film roll.

  The performance of the produced functional film was evaluated by using water vapor permeability. The degree of winding wrinkles after the inorganic film was formed was also confirmed by visual evaluation. Then, the organic film used as a protective layer was formed on the inorganic film through the process of a coating film, drying, and ultraviolet curing. Second laminate films having different adhesive forces were prepared. The second laminate film was sandwiched between nip rolls on the organic surface side and attached to the organic film as the uppermost layer of the functional layer by the self-adhesiveness and the surface pressure between the support and the roll.

  A functional film having a first laminate film and a second laminate film was fed out in a roll-to-roll manner. While peeling the second laminate film, the moisture permeability was measured and the value was measured. Thereafter, the first laminated film on the back surface was peeled off.

  The performance of the functional film thus produced was evaluated by using water vapor permeability. The water vapor permeability was determined according to the criteria in Table 1.

＜評価＞
図５の表は試験１〜１６に関して、第１ラミネートフィルム、第２ラミネートフィルムの条件と評価結果をまとめたものである。条件１〜３について、第１ラミネートフィルム、第２ラミネートフィルムの粘着力が第１ラミネートフィルムの粘着力より小さいので△以上の結果が得られた。条件４〜５について、第２ラミネートフィルムの粗さ（Ｒａ）を５〜５０ｎｍの範囲にしたので、△以上の結果が得られた。条件６〜８について、第１ラミネートフィルムの粗さ（Ｒａ）を５〜８０ｎｍの範囲にしたので、△以上の結果が得られた。無機膜の厚み以下にすることで良好な結果が得られることが理解できる。

<Evaluation>
The table of FIG. 5 summarizes the conditions and evaluation results of the first laminate film and the second laminate film for tests 1 to 16. Regarding conditions 1 to 3, since the adhesive strength of the first laminate film and the second laminate film was smaller than the adhesive strength of the first laminate film, a result of Δ or more was obtained. Regarding conditions 4 to 5, the roughness (Ra) of the second laminate film was set to a range of 5 to 50 nm, and thus a result of Δ or more was obtained. About conditions 6-8, since the roughness (Ra) of the 1st laminate film was made into the range of 5-80 nm, the result more than (triangle | delta) was obtained. It can be understood that good results can be obtained when the thickness is equal to or less than the thickness of the inorganic film.

  Regarding conditions 9 to 11, when the second laminate film is peeled off first, it is not wrinkled by the tension of the second laminate film being peeled off, and it can be peeled off while applying a uniform force. Therefore, a result of Δ or more was obtained.

  About Example 12, when the adhesive force of the second laminate film was 1.0 (N / 25 mm), it was the limit at which the barrier film (functional layer) was peeled off. For this reason, the barrier property is reduced. Evaluation was (triangle | delta).

  About Example 13, when it was set as the adhesive force of the 1st laminate film, it did not peel from a support body but it began to bend in the whole when peeling. For this reason, the barrier property is reduced. Evaluation was (triangle | delta).

  DESCRIPTION OF SYMBOLS 10 ... Functional film, 12 ... Support body, 14 ... Organic film, 16 ... Inorganic film, 18 ... Organic film, 20 ... Functional layer, 21 ... 1st laminate film, 22 ... 2nd laminate film, 23 ... Organic film formation Film device, 24 ... Vacuum film forming device, 26 ... Coating means, 28 ... Heating means, 30 ... UV irradiation device, 34 ... Winding machine, 36 ... Take-off roller, 38 ... Nip roller, 50 ... Supply chamber, 52 ... Film formation Chamber 54 ... winding chamber 60, 68, 70, 78 ... guide roller 61, 72, 80 ... vacuum exhaust means, 64a, 64b, 64c, 64d ... film forming means

Claims (6)

A functional film,
A support;
And an inorganic film formed on the placed organic layer and the organic layer on one surface of the support, and the functional layer respectively, comprising at least one layer,
A first laminate film disposed on the other surface of the support;
A second laminated film disposed on the uppermost layer of the functional layer;
Adhesion between the top layer and the second laminate film, rather less than the adhesive strength of the support and the first laminate film,
The adhesive force between the second laminate film and the uppermost layer is in the range of 0.02 to 1.0 (N / 25 mm), and the adhesive force between the first laminate film and the support is 0.03. A functional film in a range of ˜1.5 (N / 25 mm) .   The functional film according to claim 1, wherein the second laminate film has a Young's modulus smaller than that of the first laminate film. 3. The functional film according to claim 1, wherein the second laminate film has a center line average roughness (Ra) of 5 to 50 nm, and the first laminate film has a center line average roughness of 5 to 80 nm. A functional film having a thickness (Ra). A functional film according to any one of claims 1-3, wherein the inorganic film has functional film having a thickness of less 5 nm to 200 nm. One a functional film according to any one of claims 1-4, wherein the inorganic film is a metal, metal oxide, metal nitride, metal carbide, metal fluoride, or selected from the group consisting of the composite Functional film containing A functional film according to any one of claims 1 to 5, the functional film wherein the organic layer comprises radiation-curable monomer, and a single oligomer.

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