JP5331563B2 - Electromechanical transducer use device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten the overall length of a device and to reliably join an electromechanical transducer to a weight together. <P>SOLUTION: The weight 30 includes a base 31, a first vertical wall forming part 32a, and a second vertical wall forming part 32b. The base 31 is joined with the electromechanical transducer 20 by an adhesive filled between a topside 31a and a bottom 22. The first vertical wall forming part 32a is erected from the topside 31a of the base 31 so as to form a first vertical wall 32a1 which faces a first flank 23a of an element 20, and is joined with the element 20 by an adhesive being filled between the first flank 23a and the first vertical wall 32a1. The second vertical wall forming part 32b is erected from the topside 31a of the base 31 so as to form a second vertical wall 32b1 which faces a second flank 23b of an element 20, and is joined with the element 20 by an adhesive filled between the second flank 23b and the second vertical wall 32b1. Two side flanks except the first flank 23a and the second flank 23b of the element 20 are exposed to the outside. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to an electromechanical transducer use apparatus having an electromechanical transducer that expands and contracts according to an applied voltage, and a weight that is joined to the electromechanical transducer.

  Conventionally, various devices using electromechanical transducer elements such as “piezoelectric elements and electrostrictive elements” that expand and contract when a voltage is applied as driving sources (that is, electromechanical transducer using apparatuses) are known. . The electromechanical transducer use device is used as, for example, an ultrasonic motor, a ringing vibration device for incoming calls of a mobile phone, and a tactile feedback device. In the present specification and the appended claims, “piezoelectric” and “electrostrictive” are expressed as “piezoelectric” for convenience. Accordingly, the piezoelectric element includes both “an element having a piezoelectric effect and an element having an electrostrictive effect”.

As shown in FIG. 26, one of such electromechanical transducer use apparatuses is a piezoelectric element (electromechanical transducer) 100 such as PZT, a weight 110 joined to the piezoelectric element 100, and a vibration member. A certain rod 120. The moving body 130 connected to the camera lens or the like is frictionally coupled to the rod 120. For example, when the moving body 130 is moved in the right direction on the paper surface with respect to the weight 110, this device operates as follows.
(1) The piezoelectric element 100 is extended at a relatively low speed in the right direction on the paper surface so that the moving body 130 does not move relative to the rod 120. As a result, the moving body 130 moves away from the weight 110.
(2) Next, the piezoelectric element 100 is moved at a relatively high speed leftward in the drawing so that the moving body 130 stays in place by inertia, that is, the moving body 130 moves relative to the rod 120. Shrink.

  This electromechanical transducer use apparatus is an actuator of SIDM (Smooth Impact Drive Mechanism) system. In this apparatus, the weight 110 functions as a support for the “piezoelectric element 100 and the rod 120”. For example, the piezoelectric element 100 and the weight 110 are bonded with appropriate adhesive strength so that the piezoelectric element 100 and the weight 110 are not separated even when an external impact is applied to the electromechanical transducer use apparatus. Need to be.

  Patent Document 1 discloses an ultrasonic motor that employs the SIDM system. As shown in FIG. 27, the ultrasonic motor disclosed in Patent Document 1 includes a cylindrical weight (stationary member) 200, an electromechanical transducer (piezoelectric element) 210, a rod (drive shaft) 220, and the like. . A recess 205 is formed at the center of the weight 200. The shape of the opening of the recess 205 is a rectangle corresponding to the outer shape of the electromechanical transducer 210. The electromechanical transducer 210 is inserted into the recess 205 and is fixed to the weight 200 with an adhesive filled in the recess 205.

  Patent Document 2 discloses an electromechanical transducer use apparatus similar to the apparatus described in Patent Document 1. As shown in FIG. 28, the device described in Patent Document 2 includes a columnar weight (support base) 300, an electromechanical transducer (piezoelectric element) 310, and a rod 320. A recess 305 is formed at the center of the weight 300. The electromechanical conversion element 310 is inserted into the recess 305. One end (bottom surface) of the electromechanical conversion element 310 is fixed to the bottom surface of the recess 305. Thereby, the total length of the apparatus can be shortened while maintaining the weight of the weight at a predetermined weight. Further, the recess 305 is formed so that a slight clearance is secured between the peripheral wall of the recess 305 and the electromechanical conversion element 310. Thereby, the electromechanical conversion element can be expanded and contracted smoothly.

JP-A-8-286093 Japanese Patent Laid-Open No. 2002-119074

  By the way, in order to firmly bond the weight and the electromechanical conversion element, the bottom surface of the electromechanical conversion element and the bottom surface of the recess formed in the weight (upper surface in the recess of the weight) are bonded with an adhesive. In addition, it is preferable to adhere the side surface of the electromechanical conversion element and the peripheral wall surface of the concave portion of the weight with an adhesive. Further, in order to bond the weight and the electromechanical transducer more firmly, the adhesion area is increased by increasing the depth of the concave portion of the weight, and the side surface of the electromechanical transducer and the peripheral wall surface of the concave portion are increased. It is preferable to make the adhesive layer thinner by narrowing the gap.

  However, if the gap between the peripheral wall of the recess and the side surface of the electromechanical conversion element is too narrow (that is, if the thickness of the adhesive layer in this part is too small), the adhesive strength becomes excessive, and therefore the expansion and contraction of the electromechanical conversion element The force that hinders the operation (that is, the binding force of the electromechanical transducer) is excessive. As a result, there is a problem that the amount of vibration displacement of the electromechanical transducer is reduced.

  Accordingly, one of the objects of the present invention is that the entire length of the entire apparatus is short, the electromechanical conversion element and the weight are securely joined, and the electromechanical conversion element has a structure in which the amount of expansion / contraction displacement does not become excessively small. An object of the present invention is to provide a device using a mechanical conversion element. Furthermore, the other object of this invention is to provide the manufacturing method which can manufacture such an electromechanical transducer use apparatus easily.

  More specifically, the electromechanical transducer use apparatus of the present invention has a quadrangular prism shape and expands and contracts in the axial direction in response to an applied voltage, and the electromechanical transducer A weight to be joined.

Further, the weight includes a base, a first standing wall forming part, and a second standing wall forming part.
(A) The base is joined to the electromechanical transducer by being filled with an adhesive between the upper surface of the base and the bottom of the electromechanical transducer.

(B) The first standing wall surface forming portion forms the first standing wall surface facing the first side surface which is “one side surface of the pair of facing side surfaces of the electromechanical transducer”. Standing up from the upper surface of the base, and “a gap formed between the first side surface and the first standing wall surface”, “a region from the upper surface of the base to a predetermined position on the first standing wall surface” ”Is filled with an adhesive to be joined to the electromechanical conversion element.

  In this case, the first standing wall surface forming portion may be configured to have an uppermost portion at a position lower than the upper surface of the electromechanical transducer, and an uppermost portion at a position higher than the upper surface of the electromechanical transducer. It may be comprised so that it may have, and it may be comprised so that it may have the uppermost part in the same position as the upper surface of the said electromechanical transducer.

(C) Similarly, the second standing wall surface forming portion forms a second standing wall surface facing the second side surface which is “the other one side surface of the pair of facing side surfaces of the electromechanical transducer”. And a “gap formed between the second side surface and the second standing wall surface”, and “a predetermined distance on the second standing wall surface from the top surface of the base portion”. By filling the region up to the position “with the adhesive”, the electromechanical conversion element is joined.

  Also in this case, the second standing wall surface forming portion may be configured to have an uppermost portion at a position lower than the upper surface of the electromechanical transducer, and at a position higher than the upper surface of the electromechanical transducer. It may be configured to have a top portion, and may be configured to have a top portion at the same position as the top surface of the electromechanical transducer. Furthermore, the uppermost part of the second standing wall surface forming part and the uppermost part of the first standing wall surface forming part may have the same height or different heights.

(D) And this electromechanical transducer use apparatus is different from “a pair of opposing side surfaces of the electromechanical transducer (ie, the first side surface and the second side surface)”. The “opposite side surfaces” are exposed to the outside.

  That is, the weight includes a groove (a groove in which both ends in the axial direction in which the groove extends are open) having a width slightly larger than the length of one side of the rectangular bottom surface of the electromechanical transducer. The electromechanical conversion element is disposed in the groove so that the bottom surface of the electromechanical conversion element faces the bottom surface of the groove (that is, the upper surface of the base). And the bottom face of a groove | channel and the bottom face of an electromechanical conversion element are joined by an adhesive agent.

  Furthermore, “the first side surface that is one of the side surfaces of the electromechanical transducer” and “the first standing wall surface that is one of the side wall surfaces of the groove” are joined together by an adhesive. However, the adhesive does not have to exist over the entire region of the gap formed between the first side surface and the first standing wall surface, and the region (gap) where the first side surface and the first standing wall surface face each other. From “the upper surface of the base (the lowest part of the first standing wall surface)” to “a predetermined position on the first standing wall surface (position that is the same as or lower than the uppermost part of the first standing wall surface)” It only has to exist in the area.

  Similarly, “the second side surface that is the other side surface of the electromechanical conversion element and faces the first side surface” and “the other side surface of the groove that faces the first standing wall surface” The second standing wall surface ”is joined with an adhesive. Even in this case, the adhesive does not have to exist over the entire region of the gap formed between the second side surface and the second standing wall surface, and the region where the second side surface and the second standing wall surface face each other. From “the upper surface of the base (the lowest part of the second standing wall surface)” to “a predetermined position on the second standing wall surface (a position that is the same as or lower than the uppermost part of the second standing wall surface)” As long as it exists in the area up to.

  In addition, the first standing wall surface forming portion and the second standing wall surface forming portion do not exist on the side facing “the other pair of side surfaces facing each other”. Thereby, “the other pair of opposite side surfaces of the electromechanical conversion element” is exposed to the outside. In other words, the weight rises along the “two opposite side surfaces (first side surface and second side surface) of the electromechanical transducer element” from “the upper surface of the weight to which the bottom surface of the electromechanical transducer element is bonded”, and It has “an upright wall surface forming portion (a first upright wall surface forming portion and a second upright wall surface)” that is not swung up in a region facing the “other two opposite side surfaces of the electromechanical transducer”.

  As a result, in the electromechanical transducer, “all of its bottom surface” and “all or part of a pair of opposing side surfaces” are bonded to the weight by the adhesive. Therefore, the adhesive strength between the electromechanical transducer and the weight is improved as compared with the case where only the bottom surface of the electromechanical transducer is bonded to the weight. As a result, a highly reliable electromechanical transducer use device is provided for impacts and temperature changes.

  On the other hand, the adhesive present on the side surface of the electromechanical conversion element can be slightly deformed by the force of expansion and contraction of the electromechanical conversion element, but all the side surfaces (four surfaces) of the electromechanical conversion element are affected by the adhesive. If it is joined to the weight, the expansion and contraction motion of the electromechanical conversion element may be excessively hindered. On the other hand, in the electromechanical transducer use apparatus of the present invention, the “other pair of opposing side surfaces (side surfaces other than the first side surface and the second side surface) of the electromechanical transducer element” are exposed to the outside, and the weight Not joined with. As a result, it is possible to avoid that the amount of expansion / contraction displacement of the electromechanical transducer is too small.

  The adhesive between the top surface of the base and the bottom surface of the electromechanical transducer, the adhesive between the first side surface and the first standing wall surface, the second side surface and the second standing wall surface. May be the same adhesive or different adhesives. Therefore, for example, the adhesive between the first side surface and the first standing wall surface and the adhesive between the second side surface and the second standing wall surface are the same adhesive, and An adhesive different from the adhesive between the top surface of the base and the bottom surface of the electromechanical transducer may be used.

Furthermore, in the electromechanical transducer use apparatus of the present invention,
The first standing wall forming part is
The distance between the first side surface and the first standing wall surface increases as the distance from the upper surface of the base portion increases along the axis of the electromechanical conversion element (that is, approaches the uppermost portion of the first standing wall surface forming portion). Composed of
The second standing wall forming part is
The distance between the second side surface and the second standing wall surface increases as the distance from the upper surface of the base portion increases along the axis of the electromechanical transducer (that is, the distance from the uppermost portion of the second standing wall surface forming portion) increases. Ru is configured.

  In other words, it is preferable that the width of the groove portion becomes narrower as it approaches the bottom of the groove portion, and becomes larger as it approaches the tip of the electromechanical transducer. However, the width of the groove does not need to increase continuously as it approaches the tip of the electromechanical transducer. That is, even if the width does not change even when approaching the tip of the electromechanical transducer use apparatus, or a portion where the width increases stepwise (closely) when approaching the tip of the electromechanical transducer is included. Good.

  According to this, the side surface adhesive layer (first side surface adhesive layer) formed between the first side surface of the electromechanical conversion element and the first vertical wall surface of the first vertical wall surface forming portion, and the electromechanical conversion The side adhesive layer (second side adhesive layer) formed between the second side surface of the element and the second vertical wall surface of the second vertical wall surface forming portion is the thinnest near the bottom surface of the electromechanical transducer, The closer to the tip of the mechanical transducer, the thicker it becomes.

  By the way, the side adhesive layer can be slightly deformed when a force is applied. Therefore, as the side adhesive layer becomes thicker, the force (electromechanical conversion element) tends to hinder the expansion and contraction motion of the electromechanical conversion element. (Restraint force) becomes smaller. Therefore, as the side surface adhesive layer becomes thicker, the amount of expansion / contraction displacement of the electromechanical conversion element increases. On the other hand, the thinner the side adhesive layer, the greater the adhesive force by the side adhesive layer. Thus, the amount of expansion / contraction displacement and the adhesive force are generally in a contradictory relationship with respect to the thickness of the side surface adhesive layer.

  On the other hand, the expansion / contraction displacement amount of the electromechanical conversion element is accumulated in the expansion / contraction direction of the electromechanical conversion element. That is, the displacement amount of the electromechanical conversion element is the smallest near the bottom surface of the electromechanical conversion element, and increases as it approaches the tip. For this reason, even if the side surface of the electromechanical conversion element is firmly bonded to the weight in the vicinity of the bottom surface of the electromechanical conversion element, the expansion and contraction motion of the electromechanical conversion element is not so hindered.

  Therefore, if the first side surface adhesive layer and the second side surface adhesive layer are thinnest in the vicinity of the bottom surface of the electromechanical transducer and thicker toward the tip of the electromechanical transducer as in the above configuration, the electric machine Since the expansion / contraction operation of the conversion element is not strongly hindered, the electromechanical conversion element and the weight are more firmly bonded in the vicinity of the bottom surface of the electromechanical conversion element without significantly reducing the amount of expansion / contraction displacement of the electromechanical conversion element. be able to.

Furthermore, in the electromechanical transducer use apparatus according to the present invention,
The first standing wall forming part is
It exists in the same plane as the third side surface, which is one of the other pair of opposing side surfaces of the electromechanical transducer exposed to the outside, and at least “from the top surface of the base portion to the first side surface”. A first side wall surface extending to the top of one wall surface forming part;
It exists in the same plane as the fourth side surface which is the other one of the other pair of opposing side surfaces of the electromechanical conversion element exposed to the outside, and at least “from the top surface of the base portion” A second side wall surface extending to the “uppermost part of the first wall surface forming part”;
Have
The second standing wall forming part is
A third lateral wall surface that exists in the same plane as the third side surface and extends at least from the upper surface of the base portion to the uppermost portion of the second vertical wall surface forming portion;
A fourth lateral wall surface that exists in the same plane as the fourth side surface and extends at least from the upper surface of the base portion to the uppermost portion of the second vertical wall surface forming portion;
It is preferable to have

  According to this, since the 3rd side surface, the 1st side standing wall surface, and the 3rd side standing wall surface exist in the same plane, it is necessary to attach a lead wire to the electrode formed in the 3rd side surface. In this case, the lead wire can be easily attached. Similarly, since the fourth side surface, the second side standing wall surface, and the fourth side standing wall surface exist in the same plane, when it is necessary to attach a lead wire to the electrode formed on the fourth side surface, The lead wire can be easily attached.

Furthermore, in this case
The first side wall surface and the second side wall surface extend from the lowermost part of the weight to the uppermost part of the first wall surface forming part,
The third side wall surface and the fourth side wall surface extend from the lowermost part of the weight to the uppermost part of the second wall surface forming part.
It is desirable.

  According to this, the electromechanical transducer use apparatus which can attach the said lead wire more easily is provided.

In these electromechanical transducer use devices,
When the axis of the electromechanical transducer is the Z-axis, and the two axes perpendicular to the Z-axis and perpendicular to each other are the X-axis and the Y-axis (and, for example, the first standing wall and the second standing wall are When arranged parallel to the Y axis or the X axis), the electromechanical transducer and the weight have a shape when cut in an arbitrary plane parallel to the plane formed by the X axis and the Y axis, It is preferable that the configuration is line-symmetric with respect to the X-axis and line-symmetric with respect to the Y-axis.

  According to this, since the direction of vibration generated along with the expansion and contraction of the electromechanical conversion element occurs in the axial direction of the electromechanical conversion element, when using the electromechanical conversion element using device as a vibration generating device, the direction of the vibration is changed. Can be stabilized.

A method for manufacturing an electromechanical transducer use apparatus according to the present invention includes:
A bar member preparation step of preparing a rectangular parallelepiped bar member made of a material constituting the electromechanical conversion element and having a longitudinal axis;
A weight constituting member preparing step for preparing a weight constituting member comprising a material for constituting the weight and having a groove for accommodating the bar member;
The bar member is arranged with respect to the weight constituting member so that the longitudinal axis of the bar member is along the axis of the groove of the weight constituting member and at least the lower part of the bar member is accommodated in the groove. In addition, the bottom surface of the bar member is bonded to the bottom surface of the groove with an adhesive, and all or a part of the side surface of the bar member facing the side wall surface of the groove is bonded to the side wall surface of the groove. A joined body creating step of creating a joined body by joining with an agent;
A cutting step of simultaneously creating a plurality of individual electromechanical transducer use devices by cutting the joined body along a plane intersecting the longitudinal direction of the bar member;
including.

When this manufacturing method is used, the first side wall surface and the second side wall surface have the first side wall surface, and they extend from the lowest part of the weight to the uppermost part of the first wall surface forming part, and ,
A device using an electromechanical transducer that has the third side wall surface and the fourth side wall surface and that extends from the lowermost part of the weight to the uppermost part of the second wall surface forming part. And many can be manufactured efficiently.

  In addition, after joining the “bar member to be an electromechanical conversion element” and the “weight constituting member to be a weight”, individual electromechanical conversion element using devices are manufactured by cutting them together. Therefore, the positional deviation between the electromechanical conversion element and the weight can be reduced. Therefore, when the electromechanical transducer use apparatus manufactured by this manufacturing method is used as a vibration generator, an electromechanical transducer use apparatus with a stable direction of vibration can be produced. Also in this manufacturing method, the “adhesive for joining all the bottom surfaces of the bar members and the bottom surfaces of the grooves” and “all or a part of the side surfaces of the bar members facing the side wall surfaces of the grooves are the same. The “adhesive to be bonded to the side wall surface of the groove” may be the same or different.

FIG. 1 is a perspective view showing an external appearance of an electromechanical transducer use apparatus (first apparatus) according to a first embodiment of the present invention. FIG. 2 is a plan view (top view) of the first device. FIG. 3 is a front view of the first device. FIG. 4 is a front view of an electromechanical transducer use apparatus (second apparatus) according to a second embodiment of the present invention. FIG. 5 is a front view of an electromechanical transducer use apparatus according to a first modification of the second apparatus. FIG. 6 is a front view of an electromechanical transducer use apparatus according to a second modification of the second apparatus. FIG. 7 is a plan view of an electromechanical transducer use apparatus (third apparatus) according to a third embodiment of the present invention. FIG. 8 is a front view of the third device. FIG. 9 is a side view of the third device. FIG. 10 is a perspective view showing an appearance of an electromechanical transducer use apparatus (fourth apparatus) according to the fourth embodiment of the present invention. FIG. 11 is a plan view of the fourth device. FIG. 12 is a front view of the fourth device. FIG. 13 is a side view of the fourth device. FIG. 14 is a process diagram of a method for manufacturing an electromechanical transducer use apparatus according to the present invention (process example 1). FIG. 15 is a diagram for explaining a method of manufacturing an electromechanical transducer use apparatus according to the present invention. FIG. 16 is a process diagram of the method for manufacturing an electromechanical transducer use apparatus according to the present invention (process example 2). FIG. 17 is a process diagram of the method for manufacturing an electromechanical transducer use apparatus according to the present invention (process example 3). 18 is a three-side view of a specific example of the electromechanical transducer use apparatus according to the present invention, in which (A) is a plan view (top view), (B) is a front view thereof, and (C) is a side view thereof. FIG. FIG. 19 is an exploded perspective view showing the structure of a conventionally known electromechanical transducer use apparatus. FIG. 20 is a schematic diagram illustrating an example of a method for measuring the displacement amount of the electromechanical transducer. FIG. 21 is a block diagram illustrating an example of a measurement system for measuring the displacement amount of the electromechanical transducer. FIG. 22 is a diagram for explaining a method of evaluating the impact strength of the electromechanical transducer. FIG. 23 is a diagram for explaining a method for evaluating the impact strength of the electromechanical transducer. FIG. 24 is a three-side view of a specific example of the electromechanical transducer-using apparatus conceived in the process leading to the present invention, where (A) is a plan view (top view), (B) is a front view thereof, C) is a side view thereof. FIG. 25 is a view for explaining a method of manufacturing the electromechanical transducer use apparatus shown in FIG. FIG. 26 is a front view of a conventional electromechanical transducer use apparatus. FIG. 27 is an exploded perspective view of another conventional electromechanical transducer use apparatus. FIG. 28 is a front view of still another conventional electromechanical transducer use apparatus.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not construed as being limited to these embodiments, and various changes, modifications, and improvements can be made based on the knowledge of those skilled in the art without departing from the scope of the present invention. is there. In the following, an electromechanical transducer use apparatus using an electromechanical transducer is also simply referred to as “apparatus”.

<First Embodiment>
As shown in FIGS. 1 to 3, the electromechanical transducer use apparatus (hereinafter also referred to as “first device”) 10 according to the first embodiment of the present invention includes an electromechanical transducer 20 and a weight. 30. For convenience of explanation, each figure shows “orthogonal coordinates having X, Y, and Z axes orthogonal to each other”.

  The electromechanical transducer 20 has a quadrangular prism shape (cuboid shape) having an axis CL extending in the Z-axis direction. The shape of the upper surface 21 and the bottom surface (lower surface) 22 of the electromechanical transducer 20 is a rectangle composed of a side parallel to the X axis and a side parallel to the Y axis.

  As shown in FIG. 2, the length of the side parallel to the X axis of this rectangle is Lx, and the length of the side parallel to the Y axis is Ly. That is, each of the pair of opposing side surfaces 23a and 23b of the electromechanical transducer 20 is arranged to be parallel to the YZ plane, and each width is a length Ly. For convenience of explanation, the side surface 23a is referred to as a first side surface 23a, and the side surface 23b is referred to as a second side surface 23b. In addition, each of the other pair of opposite side surfaces 24a and 24b facing the electromechanical transducer 20 is arranged to be parallel to the XZ plane, and each width is a length Lx. For convenience of explanation, the side surface 24a is referred to as a third side surface 24a, and the side surface 24b is referred to as a fourth side surface 24b.

  In this example, the length Lx and the length Ly are equal. That is, the shape of the upper surface 21 and the bottom surface 22 of the electromechanical transducer 20 is square, and the electromechanical transducer 20 has a regular quadrangular prism shape having the axis CL as a longitudinal axis. However, the length Lx and the length Ly may be different.

  The electromechanical transducer 20 is configured to expand and contract in the axis CL direction (Z-axis direction) in response to a voltage applied using an electrode (not shown). The material of the electromechanical transducer 20 is not particularly limited. For example, a material mainly composed of a piezoelectric material such as lead zirconate titanate and barium titanate is used. The electromechanical transducer 20 may be an electrostrictive element.

  As the electrode structure provided in the electromechanical transducer 20, a well-known structure can be adopted. In particular, it is preferable that the electromechanical transducer 20 is a so-called “laminated piezoelectric element” in which piezoelectric materials and electrode materials are alternately laminated because a large displacement can be obtained at a low voltage. In that case, the stacking direction may be parallel to or perpendicular to the direction of the axis CL of the electromechanical transducer 20 depending on the application.

The weight 30 is an integrated body including a base portion 31, a first standing wall surface forming portion 32a, and a second standing wall surface forming portion 32b. However, the weight 30 may be obtained by joining these portions to each other. The material of the weight 30 may be a material having a specific gravity larger than that of the electromechanical transducer 20, and for example, conventionally known materials as described below can be used.
A so-called “heavy metal” “tungsten alloy” in which metallic tungsten powder is baked and hardened with “metals such as nickel, iron, copper and molybdenum”.
A so-called “metal carbide or boride” such as “tungsten carbide and tungsten boride” is baked and hardened with “metal such as cobalt, chromium and nickel, or metal oxide such as thallium oxide and bismuth oxide”. Cemented carbide ".

  The base 31 has a cylindrical shape. The upper surface 31a of the base 31 is also referred to as the upper surface of the weight 30 for convenience. The electromechanical transducer 20 has a base 31 so that its axis CL coincides with the axis of the base 31 and a pair of opposing “first side surface 23a and second side surface 23b” are parallel to the YZ plane. Is disposed on the upper surface 31a. Therefore, the bottom surface 22 of the electromechanical transducer 20 faces the top surface 31a of the base 31 (see FIG. 3).

  The first standing wall forming portion 32a is a cylinder having the same diameter as that of the base 31 and is a plane parallel to the axis (plane perpendicular to the upper and lower surfaces of the cylinder) and does not include the axis (parallel to the YZ plane). A first plane which is a flat plane). The height (the length in the axial direction) of the first standing wall forming portion 32 a is smaller than the height of the electromechanical transducer 20. Therefore, the upper surface 32 a 2 of the first standing wall surface forming portion 32 a is lower than the upper surface 21 of the electromechanical transducer 20 disposed on the upper surface 31 a of the base portion 31. Note that the height of the first standing wall surface forming portion 32 a may be the same as the height of the upper surface 21 of the electromechanical transducer 20 or higher than the height of the upper surface 21. This point is similarly applied in the “positional relationship between the upper surface of the standing wall surface forming portion and the upper surface of the electromechanical transducer element disposed on the upper surface of the base portion” in the present embodiment and other embodiments.

  For convenience, the wall surface of the first standing wall surface forming portion 32a exposed at the portion cut by the first plane is referred to as a first standing wall surface 32a1. Of the side surfaces of the first standing wall surface forming portion 32a, the peripheral surface (curved surface) excluding the first standing wall surface 32a1 coincides with the peripheral surface of the base portion 31 in plan view.

  The second standing wall surface forming portion 32b has the same shape as the first standing wall surface forming portion 32a. That is, the second standing wall surface forming portion 32b is a cylinder having the same diameter as that of the base portion 31 on a plane that is parallel to the axis and does not include the axis (second plane that is parallel to the YZ plane). And has a cut shape. The height (axial direction length) of the second standing wall surface forming portion 32 b is smaller than the height of the electromechanical transducer 20. Accordingly, the upper surface 32 b 2 of the second standing wall surface forming portion 32 b is lower than the upper surface 21 of the electromechanical transducer 20 disposed on the upper surface 31 a of the base portion 31. Note that, as described above, the height of the second standing wall surface forming portion 32 b may be the same as the height of the upper surface 21 of the electromechanical transducer 20 or higher than the height of the upper surface 21.

  The wall surface of the second standing wall surface forming portion 32b exposed to the portion cut by the second plane is referred to as a second standing wall surface 32b1 for convenience. The peripheral surface (curved surface) of the second standing wall surface forming portion 32b excluding the second standing wall surface 32b1 is coincident with the peripheral surface of the base portion 31 in plan view.

  The first standing wall surface forming portion 32a and the second standing wall surface forming portion 32b (a pair of standing wall surface forming portions 32a and 32b) have the first standing wall surface 32a1 and the second standing wall surface 32b1 facing each other with a distance W therebetween, and The first standing wall surface 32a1 and the second standing wall surface 32b1 are erected from the upper surface 31a of the base portion 31 so as to be parallel to the YZ plane. The distance W is slightly larger than the width Lx of the third side surface 24a or the fourth side surface 24b of the electromechanical transducer 20. As a result, a gap of a distance (W−Lx) / 2 is formed between the first standing wall surface 32a1 and the first side surface 23a, and a distance (W) between the second standing wall surface 32b1 and the second side surface 23b. -Lx) / 2 gaps are formed.

  A gap formed between the upper surface 31a of the base 31 and the bottom surface 22 of the electromechanical transducer 20 is filled with an adhesive S (first adhesive). That is, a bottom adhesive layer is formed between the top surface 31a and the bottom surface 22, and the top surface 31a and the bottom surface 22 are bonded to each other.

  Further, the gap formed between the first standing wall surface 32a1 and the first side surface 23a is also filled with the adhesive S (second adhesive), and between the second standing wall surface 32b1 and the second side surface 23b. The formed gap is also filled with the adhesive S (third adhesive). That is, a first side surface adhesive layer is formed between the first standing wall surface 32a1 and the first side surface 23a, and a second side surface adhesive layer is formed between the second standing wall surface 32b1 and the second side surface 23b. Yes. The first side surface adhesive layer and the second side surface adhesive layer are also collectively referred to as “side surface adhesive layer”.

  The first side surface adhesive layer is a gap formed between the first side surface 23a and the first standing wall surface 32a1, and is a predetermined position (first position) on the first standing wall surface 32a1 from the upper surface 31a of the base 31. It exists in the area up to P1. Thereby, a part of 1st standing wall surface 32a1 and a part of 1st side surface 23a are adhere | attached. The first position P1 may be a position where the upper surface 32a2 of the first standing wall surface forming portion 32a and the first standing wall surface 32a1 intersect.

  The second side surface adhesive layer is a gap formed between the second side surface 23b and the second standing wall surface 32b1, and is a predetermined position (second position) on the second standing wall surface 32b1 from the upper surface 31a of the base 31. It exists in the area up to P2. Thereby, a part of 2nd standing wall surface 32b1 and a part of 2nd side surface 23b are adhere | attached. The second position P2 may be a position where the upper surface 32b2 of the second standing wall forming portion 32b and the second standing wall 32b1 intersect. In this example, the distance between the upper surface 31a and the first position P1 is equal to the distance between the upper surface 31a and the second position P2, but is different from the distance between the upper surface 31a and the second position P2. Also good.

  The material of the adhesive S is “resin adhesive such as epoxy resin, polyimide resin and urethane resin”, “inorganic adhesive such as cyanoacrylate, metal alkoxide and water glass”, and “molten metal such as solder and silver solder”. And the like may be conventionally known. However, it is preferable to use a resin adhesive for the “side adhesive layer” because a force (restraint force) that prevents the electromechanical conversion element 20 from being stretched and deformed is reduced. Further, different adhesives may be used for the “bottom adhesive layer” and the “side adhesive layer”. For example, silver solder may be used for the “bottom adhesive layer”, and epoxy resin may be used for the “side adhesive layer”. This point is similarly applied not only to this embodiment but also to other embodiments.

  The thickness of the “bottom adhesive layer” described above is not particularly limited. However, the bottom adhesive layer is preferably a thin adhesive layer of about 20 μm or less. This is because if the bottom adhesive layer is thick, the bottom adhesive layer elastically deforms when the electromechanical conversion element 20 expands or contracts (deforms), and the vibration (displacement) generated by the electromechanical conversion element 20 is absorbed. As a result, the reaction force that the electromechanical transducer 20 receives from the weight 30 is reduced, so that vibration (displacement) generated at the tip of the electromechanical transducer 20 is reduced.

  The thickness of the “side surface adhesive layer” is not particularly limited. However, the thickness of the side surface adhesive layer is preferably in the range of about 10 to 100 μm.

  When the side surface adhesive layer is thin, the restraining force that the electromechanical conversion element 20 receives from the first standing wall surface 32a1 and the second standing wall surface 32b1 becomes strong, and therefore vibration (displacement amount) generated at the tip of the electromechanical conversion element 20. Becomes smaller. On the other hand, if the side surface adhesive layer is thick, the holding force for holding the electromechanical transducer 20 by the first standing wall 32a1 and the second standing wall 32b1 is weakened, so that the electromechanical transducer use device 10 is dropped on the floor or the like. The strength will be weakened. Therefore, if the electromechanical transducer use apparatus 10 is accidentally dropped during use, there is a high possibility that the electromechanical transducer use apparatus 10 will be damaged. Therefore, the thicknesses of the first side surface adhesive layer and the second side surface adhesive layer are determined in consideration of the displacement amount and the restraining force of the electromechanical transducer 20.

  As described above, the first device 10 includes the electromechanical transducer 20 and the weight 30, and the weight 30 further includes the base 31, the first standing wall forming portion 32a, and the second standing wall forming. Part 32b.

(1) The base 31 is joined to the electromechanical conversion element 20 by filling an adhesive (first adhesive) between the upper surface 31 a of the base 31 and the bottom 22 of the electromechanical conversion element 20. .

(2) The first standing wall surface forming portion 32a forms the first standing wall surface 32a1 facing the first side surface 23a which is “one side surface of the pair of facing side surfaces” of the electromechanical transducer 20. It is configured to stand from the upper surface 31a of the base portion 31 and is a “gap formed between the first side surface 23a and the first standing wall surface 32a1,” which is “the first standing wall surface from the upper surface 31a of the base portion 31”. The electromechanical conversion element 20 is joined by filling an “region up to a predetermined position P1 on 32a1” with an adhesive (a second adhesive that is the same as or different from the first adhesive).

(3) The second standing wall surface forming portion 32b forms the second standing wall surface 32b1 facing the second side surface 23b which is “the other one side surface of the pair of facing side surfaces” of the electromechanical transducer 20. Thus, it is configured so as to stand upright from the upper surface 31a of the base portion 31 and is “a gap formed between the second side surface 23b and the second standing wall surface 32b1”. An adhesive (a third adhesive that is the same as or different from the first adhesive and the second adhesive, preferably the same as the second adhesive) in the “region up to a predetermined position P2 on the standing wall 32b1” ) Is filled with the electromechanical conversion element 20.

Furthermore, the electromechanical transducer use apparatus 10 is:
(4) “Other pair of opposing side surfaces (third side surface 24a and fourth side surface) different from the pair of opposing side surfaces (first side surface 23a and second side surface 23b) of the electromechanical conversion element 20 24b) "is exposed to the outside.

  That is, the weight 30 includes a groove having a width W slightly larger than the length Lx of one side of the rectangular bottom surface 22 of the electromechanical transducer 20. The electromechanical conversion element 20 is disposed in the groove so that the bottom surface 22 of the electromechanical conversion element 20 faces the bottom surface of the groove (that is, the upper surface 31a of the base 31). Then, the bottom surface of the groove (the upper surface 31a of the base portion 31) and the bottom surface 22 of the electromechanical transducer 20 are joined by an adhesive.

  In addition, the first standing wall surface forming portion 32a and the second standing wall surface forming portion 32b exist only on the side facing each of the “pair of side surfaces 23a, 23b facing the electromechanical transducer 20”. It does not exist on the side facing the other pair of side surfaces 24a, 24b "of the conversion element 20 facing each other. Thereby, “the other pair of opposing side surfaces 24 a and 24 b (that is, the third side surface 24 a and the fourth side surface 24 b)” of the electromechanical conversion element 20 are exposed to the outside.

  In other words, the weight 30 is pushed up along the “two opposite side surfaces 23a and 23b of the electromechanical transducer 20” from the “upper surface 31a of the base 31 to which the bottom 22 of the electromechanical transducer 20 is bonded”, and “Standing wall surface forming portions 32 a and 32 b” that are not pushed up in a region facing “the other two opposite side surfaces 24 a and 24 b” of the electromechanical transducer 20 are provided. And between “the upper surface 31a of the base 31” and “the bottom surface 22 of the electromechanical transducer 20”, between “the first standing wall surface 32a1” and “the first side surface 23a”, and “the second standing wall surface 32b1”. "And the" second side surface 23b "are filled with an adhesive.

  As a result, “all the bottom 22”, “all or part of the first side surface 23a”, and “all or part of the second side surface 23b” are bonded (joined) to the weight 30 by the adhesive. Therefore, compared with the case where only the bottom surface 22 of the electromechanical transducer 20 is bonded to the weight 30 (see FIG. 24), the adhesive strength between the electromechanical transducer 20 and the weight 30 is improved. Therefore, the electromechanical transducer use apparatus 10 is a highly reliable apparatus against external impacts and temperature changes.

  In addition, the side surface adhesive layer can be slightly deformed when the electromechanical conversion element 20 expands and contracts. However, if all the side surfaces (four surfaces) of the electromechanical transducer 20 are bonded to the weight 30 with an adhesive, the expansion and contraction motion of the electromechanical transducer 20 may be excessively hindered. On the other hand, in the first device 10, the other pair of opposing side surfaces (the third side surface 24 a and the fourth side surface 24 b) of the electromechanical conversion element 20 are exposed to the outside and are not joined to the weight 30. . As a result, it is possible to avoid the amount of expansion / contraction displacement of the electromechanical conversion element 20 from becoming too small.

Second Embodiment
The electromechanical transducer use apparatus (hereinafter also referred to as “second apparatus”) according to the second embodiment of the present invention shown in FIG. 4 is that the weight 30 of the first apparatus 10 is replaced with the weight 40. Only in the first device 10. Therefore, hereinafter, this difference will be mainly described.

  The weight 40 includes a base 41, a first standing wall surface forming part 42 a, and a second standing wall surface forming part 42 b, and is an integral body made of the same material as the weight 30. The base 41 is the same as the base 31. The upper surface 41a of the base 41 is also referred to as the upper surface 41a of the weight 40 for convenience. The electromechanical transducer 20 has a base 41 so that its axis CL coincides with the axis of the base 41 and the pair of opposing side surfaces 23a, 23b of the electromechanical transducer 20 are parallel to the YZ plane. Arranged on the upper surface 41a. Accordingly, the bottom surface 22 of the electromechanical transducer 20 faces the top surface 41 a of the base 41.

  The first standing wall forming portion 42a is a plane in which a cylinder having the same diameter as that of the base 41 is inclined with respect to its axis (a first inclined surface that is a plane that forms a predetermined angle with respect to the upper and lower surfaces of the cylinder). It has a cut shape. For convenience, the wall surface of the first standing wall surface forming portion 42a exposed at the portion cut by the inclined plane (first inclined surface) is referred to as a first standing wall surface 42a1. The first standing wall 42a1 is a slope that is farther away from the axis of the base 41 (accordingly, the axis CL of the electromechanical transducer 20) as the distance from the upper surface 41a of the base 41 increases. The peripheral surface (curved surface) of the first standing wall surface forming portion 42a excluding the first standing wall surface 42a1 coincides with the peripheral surface of the base portion 41 in plan view. The height (the length in the axial direction, the groove depth L1) of the first standing wall forming portion 42a is smaller than the height of the electromechanical transducer 20. Accordingly, the upper surface 42a2 of the first standing wall surface forming portion 42a is lower than the upper surface 21 of the electromechanical transducer 20 disposed on the upper surface 41a of the base 41. However, as described above, the upper surface 42a2 of the first standing wall surface forming portion 42a may be the same height as the upper surface 21 of the electromechanical transducer 20 disposed on the upper surface 41a of the base 41 or higher than the upper surface 21. .

  The second standing wall forming portion 42b is a plane (a plane that forms a predetermined angle with respect to the upper surface and the lower surface of the cylinder) of a cylinder having the same diameter as the base 41 with respect to its axis, and the axis of the base 41 ( The YZ plane passing through the axis line CL) of the electromechanical transducer 20 has a shape cut along a plane (second inclined plane) symmetrical to the first inclined plane. For convenience, the wall surface of the second standing wall surface forming part 42b exposed at the portion cut by the inclined plane (second inclined surface) is referred to as a second standing wall surface 42b1. The second standing wall surface 42b1 is a slope that is farther away from the axis of the base 41 (thus, the axis CL of the electromechanical transducer 20) as it is farther from the upper surface 41a of the base 41. The peripheral surface (curved surface) of the second standing wall surface forming portion 42b excluding the second standing wall surface 42b1 is coincident with the peripheral surface of the base portion 41 in plan view. The height (the length in the axial direction, the groove depth L1) of the second standing wall forming portion 42b is smaller than the height of the electromechanical transducer 20. Therefore, the upper surface 42b2 of the second standing wall surface forming portion 42b is lower than the upper surface 21 of the electromechanical transducer 20 disposed on the upper surface 41a of the base 41. However, as described above, the upper surface 42b2 of the second standing wall forming portion 42b may be the same height as the upper surface 21 of the electromechanical transducer 20 disposed on the upper surface 41a of the base 41 or higher than the upper surface 21. .

  As a result, a groove having a reverse trapezoidal cross-sectional shape is formed in the weight 40. Accordingly, the width of the upper end of the groove (width of the groove opening) W1 is larger than the width of the bottom of the groove (width of the groove bottom) W2. That is, the width of the groove becomes narrower as it approaches the bottom of the groove.

  A gap formed between the upper surface 41a of the base 41 and the bottom surface 22 of the electromechanical transducer 20 is filled with an adhesive S (first adhesive). That is, a bottom adhesive layer is formed between the top surface 41a and the bottom surface 22, and the top surface 41a and the bottom surface 22 are bonded to each other.

  Further, the gap formed between the first standing wall 42a1 and the first side surface 23a is also filled with the adhesive S (second adhesive), and the gap between the second standing wall 42b1 and the second side surface 23b is filled. The gap formed is also filled with the adhesive S (third adhesive). That is, a first side surface adhesive layer is formed between the first standing wall surface 42a1 and the first side surface 23a, and a second side surface adhesive layer is formed between the second standing wall surface 42b1 and the second side surface 23b. Yes. The first side surface adhesive layer and the second side surface adhesive layer are also collectively referred to as “side surface adhesive layer”.

  The first side surface adhesive layer is a gap formed between the first side surface 23a and the first standing wall surface 42a1, and is a predetermined position (first position) on the first standing wall surface 42a1 from the upper surface 41a of the base 41. It exists in the area up to P1. Thereby, a part of 1st standing wall surface 42a1 and a part of 1st side surface 23a are adhere | attached. The first position P1 may be a position where the upper surface 42a2 of the first standing wall surface forming portion 42a and the first standing wall surface 42a1 intersect.

  The second side surface adhesive layer is a gap formed between the second side surface 23b and the second standing wall surface 42b1, and is a predetermined position (second position) on the second standing wall surface 42b1 from the upper surface 41a of the base 41. It exists in the area up to P2. Thereby, a part of 2nd standing wall surface 42b1 and a part of 2nd side surface 23b are adhere | attached. The second position P2 may be a position where the upper surface 42b2 of the second standing wall forming part 42b and the second standing wall 42b1 intersect.

  As described above, the second device includes the electromechanical conversion element 20 and the weight 40, and the weight 40 further includes the base 41, the first standing wall surface forming portion 42 a, and the second standing wall surface forming portion. 42b.

(1) The base 41 is joined to the electromechanical transducer 20 by filling an adhesive (first adhesive) between the upper surface 41 a of the base 41 and the bottom 22 of the electromechanical transducer 20. .

(2) The first standing wall surface forming portion 42a forms the first standing wall surface 42a1 facing the first side surface 23a which is “one side surface of the pair of facing side surfaces” of the electromechanical transducer 20. It is configured to stand from the upper surface 41a of the base portion 41, and is “a gap formed between the first side surface 23a and the first standing wall surface 42a1,” which is “the first standing wall surface from the upper surface 41a of the base portion 41”. The region up to a predetermined position P1 on 42a1 is filled with an adhesive (a second adhesive that is the same as or different from the first adhesive), thereby being joined to the electromechanical conversion element 20.

(3) The second standing wall surface forming portion 42b forms the second standing wall surface 42b1 facing the second side surface 23b which is “the other one side surface of the pair of facing side surfaces” of the electromechanical transducer 20. Thus, it is configured to stand upright from the upper surface 41a of the base portion 41, and is “a gap formed between the second side surface 23b and the second standing wall surface 42b1”, which is “second from the upper surface 41a of the base portion 41”. Adhesive (a third adhesive that is the same as or different from the first adhesive and the second adhesive, preferably the same as the second adhesive, in the region up to a predetermined position P2 on the standing wall 42b1) ) Is filled with the electromechanical conversion element 20.

Furthermore, the second device is
(4) “Other pair of opposing side surfaces (third side surface 24a and fourth side surface) different from the pair of opposing side surfaces (first side surface 23a and second side surface 23b) of the electromechanical conversion element 20 24b) "is exposed to the outside.

  Therefore, the second device has the effect of the first device that “the securing of the amount of expansion / contraction displacement of the electromechanical transducer 20 and the securing of the adhesive force between the electromechanical transducer 20 and the weight 40 can be made compatible”. The same effect can be achieved.

Further, in the second device, the first standing wall surface forming portion 42a is separated from the upper surface 41a of the base portion 41 along the axis CL of the electromechanical transducer 20 (ie, the distance between the first side surface 23a and the first standing wall surface 42a1). , And is configured to increase along the axis CL as it approaches the upper surface 42a2 of the first standing wall forming portion 42a,
As the distance between the second side wall surface 23b and the second standing wall surface 42b1 increases from the upper surface 41a of the base portion 41 along the axis line CL of the electromechanical transducer 20 (that is, along the axis line CL), It is comprised so that it may become large (as it approaches the upper surface 42b2 of the 2nd standing wall surface formation part 42b).

  Therefore, the side surface adhesive layers (the first side surface adhesive layer and the second side surface adhesive layer) are the thinnest (for example, 20 μm) in the vicinity of the bottom surface 22 of the electromechanical transducer 20, and the upper surface 21 (tip) of the electromechanical transducer 20. (For example, the thickness of the side surface adhesive layer at the position P1 and the position P2 is 100 μm).

  By the way, the side adhesive layer can be slightly deformed when a force is applied. Therefore, as the side adhesive layer becomes thicker, the force (electromechanical conversion element) tends to hinder the expansion and contraction motion of the electromechanical conversion element. 20 restraining force) becomes smaller. Therefore, the amount of expansion / contraction displacement of the electromechanical transducer 20 increases as the side surface adhesive layer becomes thicker. On the other hand, the thinner the side adhesive layer, the greater the adhesive force by the side adhesive layer. Thus, the amount of expansion / contraction displacement and the adhesive force are generally in a contradictory relationship with respect to the thickness of the side surface adhesive layer.

  On the other hand, the expansion / contraction displacement amount of the electromechanical conversion element 20 is accumulated in the expansion / contraction direction (axis CL direction, Z-axis direction) of the electromechanical conversion element 20. That is, the displacement amount of the electromechanical transducer 20 is the smallest in the vicinity of the bottom surface 22 of the electromechanical transducer 20 and increases as it approaches the tip (upper surface 21). Therefore, even if the side surfaces (first side surface 23 a and second side surface 23 b) of the electromechanical conversion element 20 are firmly bonded to the weight 40 in the vicinity of the bottom surface 22 of the electromechanical conversion element 20, Telescopic movement is not so hindered.

  Therefore, in the second device, as described above, the side surface adhesive layers (the first side surface adhesive layer and the second side surface adhesive layer) become thicker as they approach the upper surface 21 from the bottom surface 22 of the electromechanical transducer 20. . Therefore, the second device can further reduce the force that restrains the expansion / contraction displacement of the electromechanical transducer 20 while firmly bonding the electromechanical transducer 20 and the weight 40 to the first device 10. . As a result, the second device can firmly join the electromechanical transducer 20 and the weight 40 while avoiding a decrease in the amount of expansion / contraction displacement of the electromechanical transducer 20.

<First Modification of Second Embodiment>
FIG. 5 is a front view of an electromechanical transducer use apparatus according to a first modification of the second apparatus. This first modification differs from the second device only in that the weight 40 of the second device 10 is replaced with a weight 40A. The weight 40A is different from the weight 40 only in the shape of the standing wall surface.

  More specifically, the weight 40A includes a base 41, a first standing wall surface forming portion 43a, and a second standing wall surface forming portion 43b. The first standing wall surface 43a1 of the first standing wall surface forming portion 43a is such that “the distance between the first standing wall surface 43a1 and the first side surface 23a of the electromechanical transducer 20 facing it” approaches the upper surface 41a of the base 41. The curved surface becomes smaller. Similarly, the second standing wall surface 43b1 of the second standing wall surface forming portion 43b has a “distance between the second standing wall surface 43b1 and the second side surface 23b of the electromechanical transducer 20 facing it” the upper surface 41a of the base 41. The curved surface becomes smaller as it gets closer to.

  Note that the electromechanical transducer 20 shown in FIG. 5 is the above-described laminated piezoelectric element. The electromechanical transducer 20 includes a plurality of internal electrodes 22a, piezoelectric element layers 22b, side electrodes 22c, a first insulating coating layer 22d, and a second insulating coating layer 22e. The first insulating coating layer 22d and the second insulating coating layer 22e constitute a first side surface 23a and a second side surface 23b, respectively.

<Second Modification of Second Embodiment>
FIG. 6 is a front view of an electromechanical transducer use apparatus according to a second modification of the second apparatus. This second modification differs from the second device only in that the weight 40 of the second device 10 is replaced with a weight 40B. The weight 40B is different from the weight 40 only in the shape of the standing wall surface.

  More specifically, the weight 40B includes a base portion 41, a first standing wall surface forming portion 44a, and a second standing wall surface forming portion 44b. The first standing wall surface 44a1 of the first standing wall surface forming portion 44a is, in the cross section, formed in order from the upper surface 41a of the base portion 41 toward the upper surface 44a2 of the first standing wall surface forming portion 44a. And a straight portion Str ”. The distance between the curved portion Cur of the first standing wall 44a1 and the first side surface 23a of the electromechanical transducer 20 is greater than the distance between the straight portion Str of the first standing wall 44a1 and the first side 23a of the electromechanical transducer 20. It is getting smaller. Therefore, also in this second modification, the “distance between the first standing wall surface 44 a 1 and the first side surface 23 a of the electromechanical transducer 20 facing it” becomes smaller as it approaches the upper surface 41 a of the base 41. The second standing wall surface forming portion 44b has the same shape as the first standing wall surface forming portion 44a. Therefore, the “distance between the second standing wall surface 44 b 1 and the second side surface 23 b of the electromechanical conversion element 20 facing the second standing wall surface 44 b 1” becomes smaller as it approaches the upper surface 41 a of the base 41.

  As apparent from the above, in the first and second modified examples of the second device, similarly to the second device, the electromechanical conversion element 20 is firmly bonded to the electromechanical conversion element 20 and the weight 40A or the weight 40B. It is possible to avoid a decrease in the amount of expansion / contraction displacement.

<Third Embodiment>
The electromechanical transducer use device (hereinafter also referred to as “third device”) according to the third embodiment of the present invention shown in FIGS. 7 to 9 replaces the weight 30 of the first device 10 with the weight 50. It is different from the 1st apparatus 10 only in the point which did. Therefore, hereinafter, this difference will be mainly described.

  The weight 50 is composed of a base 51, a first standing wall surface forming part 52 a, and a second standing wall surface forming part 52 b, and is an integral body made of the same material as the weight 30. The base 51 is the same as the base 31. For convenience, the upper surface 51a of the base 51 is also referred to as the upper surface 51a of the weight 50. The electromechanical transducer 20 has a base 51 so that its axis CL coincides with the axis of the base 51 and the pair of opposing side surfaces 23a, 23b of the electromechanical transducer 20 are parallel to the YZ plane. Arranged on the upper surface 51a. Therefore, the bottom surface 22 of the electromechanical transducer 20 faces the top surface 51 a of the weight 50.

  The first standing wall forming portion 52a cuts a cylinder having the same diameter as the base 51 along a plane parallel to its axis (a first plane which is a plane parallel to the YZ plane) and is orthogonal to the first plane. And a shape cut by a pair of planes ("third plane and fourth plane" which are planes parallel to the XZ plane).

  For convenience, the wall surface of the first standing wall surface forming portion 52a exposed to the portion cut by the first plane is referred to as a first standing wall surface 52a1. For convenience, the wall surface of the first standing wall surface forming portion 52a exposed to the portion cut by the third plane is referred to as a first side wall surface 52a3. For convenience, the wall surface of the first standing wall surface forming portion 52a exposed at the portion cut by the fourth plane is referred to as a second side wall surface 52a4. The distance between the first lateral wall surface 52a3 and the second lateral wall surface 52a4 is the same length as the width Ly (see FIG. 2) along the Y axis of the electromechanical transducer 20. The first side wall surface 52a3 is in the same plane as the third side surface 24a of the electromechanical transducer 20. The second lateral wall surface 52a4 exists in the same plane as the fourth side surface 24b of the electromechanical transducer 20.

  The second standing wall surface forming portion 52b has the same shape as the first standing wall surface forming portion 52a. That is, the second standing wall forming portion 52b cuts a cylinder having the same diameter as the base 51 along a plane parallel to the axis (a second plane which is a plane parallel to the YZ plane) and the second plane. And a shape cut by a pair of planes (the “third plane and the fourth plane” which are planes parallel to the XZ plane).

  For convenience, the wall surface of the second standing wall surface forming portion 52b exposed at the portion cut by the second plane is referred to as a second standing wall surface 52b1. For convenience, the wall surface of the second standing wall surface forming portion 52b exposed to the portion cut by the third plane is referred to as a third side wall surface 52b3. The wall surface of the second standing wall surface forming portion 52b exposed to the portion cut by the fourth plane is referred to as a fourth side wall surface 52b4 for convenience. The distance between the third lateral wall surface 52b3 and the fourth lateral wall surface 52b4 is the same length as the width Ly (see FIG. 2) along the Y axis of the electromechanical transducer 20. The third lateral wall surface 52b3 exists in the same plane as the third side surface 24a of the electromechanical transducer 20. The fourth lateral wall surface 52b4 exists in the same plane as the fourth side surface 24b of the electromechanical transducer 20.

  As a result, on the third side surface 24a side of the electromechanical conversion element 20, the “upper surface 51a of the base 51 having a shape surrounded by the string and the arc in plan view” is exposed, and the fourth side surface of the electromechanical conversion element 20 is exposed. Also on the 24b side, "the upper surface 51a of the base 51 having a shape surrounded by a string and an arc in a plan view" is exposed.

  An adhesive S (first adhesive) is filled between the upper surface 51 a of the base 51 and the bottom surface 22 of the electromechanical transducer 20. Thus, the upper surface 51a and the bottom surface 22 are bonded. Further, the gap formed between the first standing wall surface 52a1 and the first side surface 23a is also filled with the adhesive S (second adhesive), and the gap between the second standing wall surface 52b1 and the second side surface 23b is filled. The gap formed is also filled with the adhesive S (third adhesive). The adhesive S (second adhesive) is a gap formed between the first standing wall surface 52a1 and the first side surface 23a, and a predetermined position on the first standing wall surface 52a1 from the upper surface 51a of the base 51 ( 1st position) It exists in the area | region to P1. The adhesive S (third adhesive) is a gap formed between the second standing wall surface 52b1 and the second side surface 23b, and a predetermined position on the second standing wall surface 52b1 from the upper surface 51a of the base 51 ( The second position) exists in the area up to P2. Thereby, a part (or all) of the first standing wall surface 52a1 and a part (or all) of the first side surface 23a are bonded, and a part (or all) of the second standing wall surface 52b1 and the second side surface 23b are bonded. Part (or all) is bonded.

  As described above, the third device includes the electromechanical transducer 20 and the weight 50, and the weight 50 further includes the base 51, the first standing wall forming portion 52a, and the second standing wall forming portion. 52b.

(1) The base 51 is joined to the electromechanical conversion element 20 by filling an adhesive (first adhesive) between the upper surface 51 a of the base 51 and the bottom 22 of the electromechanical conversion element 20. .

(2) The first standing wall surface forming portion 52a forms the first standing wall surface 52a1 facing the first side surface 23a which is “one side surface of the pair of facing side surfaces” of the electromechanical transducer 20. It is configured to stand from the upper surface 51a of the base 51, and is “a gap formed between the first side surface 23a and the first standing wall 52a1”, and “the first standing wall from the upper surface 51a of the base 51”. The region up to a predetermined position P1 on 52a1 ”is filled with an adhesive (second adhesive that is the same as or different from the first adhesive), thereby being joined to the electromechanical conversion element 20.

(3) The second standing wall surface forming portion 52b forms the second standing wall surface 52b1 facing the second side surface 23b which is “the other one side surface of the pair of facing side surfaces” of the electromechanical transducer 20. Thus, it is configured to stand upright from the upper surface 51a of the base portion 51, and is “a gap formed between the second side surface 23b and the second standing wall surface 52b1”, which is “second from the upper surface 51a of the base portion 51a. Adhesive (a third adhesive that is the same as or different from the first adhesive and the second adhesive, preferably the same as the second adhesive, in the region up to a predetermined position P2 on the standing wall 52b1) ) Is filled with the electromechanical conversion element 20.

Furthermore, the third device
(4) “Other pair of opposing side surfaces (third side surface 24a and fourth side surface) different from the pair of opposing side surfaces (first side surface 23a and second side surface 23b) of the electromechanical conversion element 20 24b) "is exposed to the outside.

  Therefore, the third device has the effect of the first device that “the securing of the expansion / contraction displacement amount of the electromechanical transducer 20 and the securing of the adhesive force between the electromechanical transducer 20 and the weight 50 can be achieved at the same time”. The same effect can be achieved.

Furthermore, in the third device, the first standing wall forming portion 52a is
It exists in the same plane as the third side surface 24a which is “one side surface of the other pair of opposing side surfaces exposed to the outside”, and at least from the upper surface 51a of the base portion 51 to the first side surface. A first side wall surface 52a3 extending to the uppermost part (upper surface 52a2) of the wall surface forming part 52a;
It exists in the same plane as the fourth side surface 24b which is “the other one side surface of the other pair of opposing side surfaces exposed to the outside”, and at least from the upper surface 51a of the base 51. A second lateral wall surface 52a4 extending to the uppermost part (upper surface 52a2) of the first wall surface forming part 52a;
Have

Similarly, in the third device, the second standing wall surface forming portion 52b is
A third lateral wall surface 52b3 that exists in the same plane as the third side surface 24a and extends at least from the upper surface 51a of the base 51 to the uppermost part (upper surface 52b2) of the second vertical wall surface forming part 52b;
A fourth lateral wall surface 52b4 that exists in the same plane as the fourth side surface 24b and extends at least from the upper surface 51a of the base portion 51 to the uppermost portion (upper surface 52b2) of the second vertical wall surface forming portion 52b;
Have

According to this, since the 3rd side surface 24a, the 1st side standing wall surface 52a3, and the 3rd side standing wall surface 52b3 exist in the same plane, a lead wire is attached to the electrode formed in the 3rd side surface 24a. Easy to install. Similarly, since the fourth side surface 24b, the second side standing wall surface 52a4, and the fourth side standing wall surface 52b4 exist in the same plane, a lead wire can be easily attached to the electrode formed on the fourth side surface 24b. Can be attached.
In the third device, it is not essential to form electrodes on the third side surface 24a and the fourth side surface 24b, and to attach lead wires LD there, but to form electrodes on the first side surface 23a and the second side surface 23b, You may attach lead wire LD there.
Further, instead of attaching the lead wire LD, a lead terminal made of a metal spring material or the like may be pressed.

<Fourth embodiment>
In the electromechanical transducer use device (hereinafter also referred to as “fourth device”) according to the fourth embodiment of the present invention shown in FIGS. 10 to 13, the weight 30 of the first device is replaced with the weight 60. It is different from the first device only in the point. Therefore, hereinafter, this difference will be mainly described.

  The weight 60 is composed of a base portion 61, a first standing wall surface forming portion 62 a, and a second standing wall surface forming portion 62 b, and is an integral body made of the same material as the weight 30. The base 61 has a rectangular parallelepiped shape. The length along the Y-axis of the base 61 is the same as the width along the Y-axis of the electromechanical transducer 20 (length Ly shown in FIG. 3). The length along the X axis of the base 61 is longer than the width along the X axis of the electromechanical transducer 20 (length Lx shown in FIG. 3). The upper surface 61a of the base 61 is also referred to as the upper surface 61a of the weight 60 for convenience. The electromechanical transducer 20 has its axis CL aligned with the axis of the base 61 (the axis in the short direction), and the pair of opposing side surfaces 23a and 23b of the electromechanical transducer 20 are parallel to the YZ plane. In this way, it is disposed on the upper surface 61 a of the base 61. Accordingly, as shown in FIG. 12, the bottom surface 22 of the electromechanical transducer 20 faces the top surface 61 a of the weight 60.

  One of the pair of planes (first base side surface) 61b parallel to the XZ plane of the base 61 exists in the same plane as the third side surface 24a of the electromechanical transducer 20. Another one (second base side surface) 61c of the pair of planes parallel to the XZ plane of the base portion 61 exists in the same plane as the fourth side surface 24b of the electromechanical transducer 20.

  The first standing wall forming part 62a has a rectangular parallelepiped shape. The length along the Y axis of the first standing wall forming portion 62a is the same as the width along the Y axis of the electromechanical transducer 20 (length Ly shown in FIG. 3).

  The first standing wall surface forming portion 62a is erected from the base 61 so as to have a first standing wall surface 62a1, an upper surface 62a2, a first side standing wall surface 62a3, and a second side standing wall surface 62a4.

The first standing wall surface 62a1 is opposed to the first side surface 23a of the electromechanical transducer 20 with a slight distance (W-Lx) / 2.
The upper surface 62a2 is located in a region lower than the upper surface 21 of the electromechanical transducer 20 placed on the upper surface 61a of the base 61. However, as described above, the upper surface 62a2 may be the same height as the upper surface 21 of the electromechanical transducer 20 disposed on the upper surface 61a of the base 61 or higher than the upper surface 21.

The first lateral wall surface 62a3 exists in the same plane as the third side surface 24a of the electromechanical transducer 20 and the first base side surface 61b of the base 61.
The second lateral wall surface 62a4 exists in the same plane as the fourth side surface 24b of the electromechanical transducer 20 and the second base side surface 61c of the base 61.
The end surface in the X-axis positive direction of the first standing wall surface forming portion 62a (the surface parallel to the YZ plane) exists in the same plane as the end surface of the base 61 in the X-axis positive direction.

  The second standing wall surface forming portion 62b is erected from the base portion 61 so as to have a second standing wall surface 62b1, an upper surface 62b2, a third side standing wall surface 62b3, and a fourth side standing wall surface 62b4.

The second standing wall surface 62b1 faces the second side surface 23b of the electromechanical transducer 20 with a slight distance (W-Lx) / 2.
The upper surface 62b2 is located in a region lower than the upper surface 21 of the electromechanical transducer 20 placed on the upper surface 61a of the base 61. However, as described above, the upper surface 62b2 may be the same height as the upper surface 21 of the electromechanical transducer 20 disposed on the upper surface 61a of the base 61 or higher than the upper surface 21.

The third lateral wall surface 62b3 exists in the same plane as the third side surface 24a of the electromechanical transducer 20 and the first base side surface 61b of the base 61.
The fourth lateral wall surface 62b4 exists in the same plane as the fourth side surface 24b of the electromechanical transducer 20 and the second base side surface 61c of the base 61.
The end surface in the X-axis negative direction (surface parallel to the YZ plane) of the second standing wall forming portion 62b exists in the same plane as the end surface of the base 61 in the X-axis negative direction.

  An adhesive S (first adhesive) is filled between the upper surface 61 a of the weight 60 and the bottom surface 22 of the electromechanical transducer 20. Thus, the upper surface 61a and the bottom surface 22 are bonded. Furthermore, the gap formed between the first standing wall surface 62a1 and the first side surface 23a is also filled with the adhesive S (second adhesive), and the gap between the second standing wall surface 62b1 and the second side surface 23b is filled. The formed gap is also filled with the adhesive S (third adhesive). The adhesive S (second adhesive) is a gap formed between the first standing wall surface 62a1 and the first side surface 23a, and a predetermined position on the first standing wall surface 62a1 from the upper surface 61a of the base 61 ( 1st position) It exists in the area | region to P1. The adhesive S (third adhesive) is a gap formed between the second standing wall surface 62b1 and the second side surface 23b, and is a predetermined position on the second standing wall surface 62b1 from the upper surface 61a of the base 61 ( The second position) exists in the area up to P2. Thereby, a part (or all) of the first standing wall surface 62a1 and a part (or all) of the first side surface 23a are bonded, and a part (or all) of the second standing wall surface 62b1 and the second side surface 23b are bonded. Part (or all) is bonded.

  Thus, the weight 60 of the fourth device has a rectangular parallelepiped shape having the same width as the width Ly along the Y axis of the electromechanical transducer 20. Further, a groove having a width W slightly larger than the width Lx along the X axis of the electromechanical transducer 20 is formed in the weight 60. The electromechanical transducer 20 is disposed on the bottom surface of the groove, the bottom surface 22 is joined to the bottom surface of the groove by an adhesive S (first adhesive), and the first side surface 23a is joined to the peripheral wall of the groove and the adhesive S. The second side surface 23b is bonded to the peripheral wall of the groove by the adhesive S (third adhesive).

  As described above, the fourth device includes the electromechanical conversion element 20 and the weight 60, and the weight 60 further includes the base portion 61, the first standing wall surface forming portion 62 a, and the second standing wall surface forming portion. 62b.

(1) The base 61 is joined to the electromechanical conversion element 20 by filling an adhesive (first adhesive) between the upper surface 61 a of the base 61 and the bottom 22 of the electromechanical conversion element 20. .

(2) The first standing wall surface forming portion 62a forms the first standing wall surface 62a1 facing the first side surface 23a which is “one side surface of the pair of facing side surfaces” of the electromechanical transducer 20. It is configured to stand from the upper surface 61a of the base 61, and is “a gap formed between the first side surface 23a and the first standing wall 62a1”, and “the first standing wall from the upper surface 61a of the base 61”. The region up to a predetermined position P1 on 62a1 "is filled with an adhesive (a second adhesive that is the same as or different from the first adhesive), thereby being joined to the electromechanical conversion element 20.

(3) The second standing wall surface forming portion 62b forms the second standing wall surface 62b1 facing the second side surface 23b which is “the other one side surface of the pair of facing side surfaces” of the electromechanical transducer 20. Thus, it is configured to stand upright from the upper surface 61a of the base portion 61, and is “a gap formed between the second side surface 23b and the second standing wall surface 62b1”. An adhesive (a third adhesive that is the same as or different from the first adhesive and the second adhesive, preferably the same as the second adhesive) in the “region up to a predetermined position P2 on the standing wall 62b1” ) Is filled with the electromechanical conversion element 20.

Furthermore, the fourth device is
(4) “Other pair of opposing side surfaces (third side surface 24a and fourth side surface) different from the pair of opposing side surfaces (first side surface 23a and second side surface 23b) of the electromechanical conversion element 20 24b) "is exposed to the outside.

  Therefore, the fourth device has the effect of the first device that “the securing of the expansion / contraction displacement amount of the electromechanical transducer 20 and the securing of the adhesive force between the electromechanical transducer 20 and the weight 60 can be made compatible”. The same effect can be achieved.

Furthermore, in the fourth device:
When the wall surface composed of the first side wall surface 62a3 and the first base side surface 61b is collectively referred to as the first side wall surface, the first side wall surface is first from the lowermost portion of the weight 60 (the lower surface of the base portion 61). It extends to the uppermost part (upper surface 62a2) of the standing wall forming part 62a.
When the side surface including the second side wall surface 62a4 and the second base side surface 61c is collectively referred to as a second side wall surface, the second side wall surface is first from the lowermost part of the weight 60 (the lower surface of the base 61). It extends to the uppermost part (upper surface 62a2) of the standing wall forming part 62a.
When the side surface composed of the third side wall surface 62b3 and the first base side surface 61b is collectively referred to as the third side wall surface, the third side wall surface is the second from the bottom of the weight 60 (the lower surface of the base 61). It extends to the uppermost part (upper surface 62b2) of the standing wall forming part 62b.
When the side surface composed of the fourth side wall surface 62b4 and the second base side surface 61c is collectively referred to as the fourth side wall surface, the fourth side wall surface is second from the bottom of the weight 60 (the lower surface of the base 61). It extends to the uppermost part (upper surface 62b2) of the standing wall forming part 62b.

According to this, as shown in FIG. 10, similarly to the third device, the lead wire LD can be easily attached to the electrode formed on the third side surface 24a and the electrode formed on the fourth side surface 24b.
In the fourth device, it is not essential to form electrodes on the third side surface 24a and the fourth side surface 24b, and to attach lead wires LD thereto, and to form electrodes on the first side surface 23a and the second side surface 23b, You may attach lead wire LD there.
Further, instead of attaching the lead wire LD, a lead terminal made of a metal spring material or the like may be pressed.

<Manufacturing method>
Next, a manufacturing method for manufacturing the fourth device will be described with reference to FIGS.

Step 1: Bar member preparation step S10
First, a bar member 70 made of a material (electromechanical conversion material) constituting the electromechanical conversion element 20 is prepared. As shown in FIG. 15, the bar member 70 has a rectangular parallelepiped shape having a longitudinal axis. More specifically, the bar member 70 has the same configuration as that in which a plurality of the electromechanical transducer elements 20 described above are continuously arranged in the Y-axis direction.

  The bar member 70 can be manufactured, for example, by any one of conventionally known methods.

(Method 1) A bar-shaped press-molded body is produced by press-molding the material powder of the electromechanical conversion element 20, and then the bar-shaped member 70 is produced by firing the press-molded body.
(Method 2) A plate-shaped molded body is produced by “a sheet molding method such as a powder press molding method and a doctor blade method”, and then the produced plate-shaped molded body is fired to obtain a “plate-shaped electric machine”. The bar member 70 is manufactured by cutting the “plate-shaped electromechanical conversion element material” using a diamond saw, a green carbon wheel, a diamond wheel, or the like.
(Method 3) A laminated flat plate in which an electromechanical transducer element material and an electrode material are alternately laminated is manufactured and cut to produce a “bar member 70 including a plurality of stacked electromechanical transducer elements”. (See the bar member preparation step S10 in FIGS. 16 and 17).

Step 2: Weight component member preparation step S20
In parallel with the bar member preparation step S10, the weight constituting member preparation step S20 is performed. As shown in FIG. 15, the weight constituting member preparing step S20 is made of the material (weight material) constituting the weight 60 described above, and the weight constituting member 80 provided with the groove 81 for accommodating the bar member 70. Is a step of preparing

  More specifically, the weight-constituting member 80 can be produced, for example, by any conventionally known technique as follows.

(Procedure 1) “Plate-shaped molded body having grooves 81” is produced by press-molding the powder of the weight material, and thereafter, the weight-constituting member 80 is produced by firing the flat-shaped molded body. . In this case, the shape of the groove 81 (the shape of the peripheral wall of the groove 81) can be changed to various shapes such as a straight shape, a tapered shape, and a stepped shape by changing the shape of the press die used for press molding. .

(Method 2) “Plate-shaped molded product having a single thickness without groove 81” is produced by press-molding the powder of the weight material, and then the plate-shaped molded product is fired to obtain a flat plate Then, the weight-constituting member 80 is formed by forming the groove 81 by cutting the “surface of the flat plate-like fired body” using a cutting wheel of green carbon or diamond. In this case, the groove 81 having a desired shape can be obtained by setting the cross section of the cutting wheel to a shape corresponding to the desired groove shape or by cutting the cut wheel in a plurality of times.

Step 3: joined body creation step S30
Next, the longitudinal axis (axis along the Y-axis direction) of the bar member 70 is along the axis of the groove 81 of the weight constituting member 80, and the lower part of the bar member 70 is accommodated in the groove 81. The bar member 70 is disposed with respect to the weight constituting member 80. At this time, “the entire bottom surface of the bar member 70” is joined to the “bottom surface of the groove 81” by the adhesive S (first adhesive), and “the side wall (peripheral wall) of the groove 81 among the side surfaces of the bar member 70”. “All or part of the portion facing the surface” is joined to the “side wall surface of the groove 81” by the adhesive S (second and third adhesives). Thereby, the joined body 90 shown in FIG. 15 is produced. In this case, the “first adhesive” and the “second and third adhesives” may be the same adhesive or different adhesives. Furthermore, the second and third adhesives may be the same as or different from each other.

  More specifically, in this joined body creating step S30, the bar member 70 and the weight constituting member 80 can be joined by a conventional joining method. For example, a thermosetting resin adhesive such as an epoxy resin and a polyimide resin is applied in advance to the “joining portion between the bar member 70 and the groove 81 of the weight constituting member 80”, and the bar member 70 and the weight constituting member are applied. The bar member 70 and the weight constituting member 80 can be joined by heating to a predetermined temperature while pressing the members 80 together. Similarly, even when other adhesives are used, after the adhesive is applied to the joint, the adhesive is placed under a predetermined curing condition, so that the bar member 70 and the weight constituting member 80 are Can be joined.

Step 4: Cutting step S40
Next, the joined body 90 is divided into “a plane parallel to the longitudinal axis direction of the bar member 70 (that is, a plane parallel to the YZ plane) and a plane intersecting the longitudinal axis direction of the bar member 70 (that is, the XZ plane). Along a plane parallel to ”. As a result, a plurality of pieces to be used as individual electromechanical transducer use devices 95 (fourth device) are created simultaneously. For cutting the bonded body 90, a conventional cutting method using a diamond saw, a green carbon wheel, a diamond wheel, or the like can be applied.

Step 5: Rod bonding step S50
Thereafter, a rod similar to the rod RD shown in FIG. 18 is bonded to the electromechanical transducer 20 using an adhesive.
Step 6: Polarization process S60
Then, the polarization process of the electromechanical transducer 20 is performed according to a known method.

  When an external auxiliary film such as “insulating coating and external electrode (side electrode)” is required on the side surface of the electromechanical transducer, as shown in the bar member preparation step S10 in FIG. Prior to S30, an insulating coating may be applied to the side surface of the bar member 70, and the side electrode may be formed in the side electrode formation step S42 after the joined body creation step S30 and the cutting step S40. Alternatively, as shown in the bar member preparation step S10 in FIG. 17, side electrodes are formed on the side surfaces of the bar member 70 prior to the joined body creating step S30, and the insulating coating after the joined body creating step S30 and the cutting step S40 is performed. In the formation step S44, an insulating coating may be applied.

  For forming the insulating coating layer, conventionally known methods such as a screen printing method, a transfer method, and a potting method can be used. A metal such as AgPd, Cu and Ni can be used for the external electrode (side electrode). The external electrode can be formed by a conventionally known method. For example, the external electrode is formed by forming a “metal paste or resin paste” containing the above metal into a film shape on the side surface of the electromechanical conversion element by screen printing, and then performing heat treatment or thermosetting. obtain. Furthermore, the external electrode can also be formed by a method such as plating and sputtering.

  FIG. 18 shows a specific example of an electromechanical transducer use apparatus manufactured by such a manufacturing method. This apparatus includes a laminated piezoelectric element 20A, a weight 40 (see FIG. 4), and a drive rod RD.

  The stacked piezoelectric element 20A has the same structure as the piezoelectric element shown in FIGS. That is, the multilayer piezoelectric element 20A includes a pair of side electrodes 20A1 and 20A2 and a pair of insulating coatings 20B1 and 20B2. The lower surface of the rod RD is joined to the upper surface of the piezoelectric element 20A. The joining relationship between the electromechanical transducer 20A and the weight 40 is as described with reference to FIG.

<Example>
The electromechanical transducer use apparatus according to the nine types of embodiments adopting the present invention and the electromechanical transducer use apparatus according to the two types of comparative examples not adopting the present invention are each created in five pieces, Their displacement characteristics and impact fracture strength were evaluated. Table 1 shows the average of the five evaluation results. Each length in Table 1 is shown in FIG.

(1) Configuration of Examples and Comparative Examples The electromechanical conversion element includes a piezoelectric material mainly composed of lead zirconate titanate and an electrode material mainly composed of a component containing 70% Ag and 30% Pd. Layered piezoelectric elements stacked alternately were used. The outer shape of the electromechanical conversion element was a rectangular parallelepiped shape having a square with a side of 1 mm on the bottom surface and a height (length in the axial direction) of 1.5 mm. An insulating coating made of an epoxy resin is applied to two opposing side surfaces (the first side surface and the second side surface) of the electromechanical transducer, and the electrode is applied to the other two opposing side surfaces (the third side surface and the fourth side surface). A side electrode made of the same material as the material was formed.

  The material of the weight was “tungsten alloy mainly composed of metallic tungsten” or “super hard alloy mainly composed of tungsten carbide”. The form of the weight is as shown in Table 1. In Comparative Examples 1 and 2, it is assumed that all four side surfaces of the electromechanical transducer are joined to the weight.

  An epoxy resin adhesive was used as the adhesive. The thickness of the above-mentioned bottom adhesive layer (adhesive layer at the bottom of the weight groove) was about 10 μm. The length L3 of the side adhesive layer (adhesive layer on the side surface in the groove groove) is as shown in Table 1.

  A rod was bonded to the upper surface of the electromechanical transducer. The rod was made of FRP and had a cylindrical shape with a bottom diameter of 0.8 mm and a length of 4 mm.

(2) Evaluation of Vibration Displacement As shown in FIGS. 20 and 21, measurement of vibration displacement is performed using probes Pr1 and Pr2 on side electrodes EM1 and EM2 of electromechanical transducer EM joined to weight WT. An alternating voltage was applied, and the displacement (vibration displacement) of the tip of the drive rod DR was measured by a laser Doppler displacement meter LV. The magnitude of the applied voltage Vin1 was 6 Vpp and the frequency was 10 kHz.

(3) Evaluation of impact strength After measuring the vibration displacement, as shown in FIGS. 22 and 23, the mechanical impact is applied to the mechanical rod by causing the swing hammer HM to collide with the drive rod DR. The impact fracture strength was evaluated. By changing the swing height HT of the hammer HM, the impact force applied to the electromechanical conversion element using device is gradually increased, and the “hammer HM swinging height at the time when the electromechanical conversion device using device is destroyed Was obtained as the breaking impact height. It is noted that the impact force is applied from the direction in which the weight WT approaches as shown in FIG. 22 (from the side where the standing wall forming portion exists), and then from the notch direction of the weight WT as shown in FIG. Applied from the side where the wall forming portion does not exist), and then the swing-up height was increased by a predetermined amount, and then the impact force was applied in a different direction as well.

(4) Effect (evaluation)
As shown in Table 1, Examples 1 to 9 had larger vibration displacement amounts than Comparative Examples 1 and 2 using electromechanical transducers having the same characteristics. Further, Examples 1 to 4 and Examples 7 to 9 had break impact strength equal to or greater than that of Comparative Examples 1 and 2.

  The reason why the vibration displacement amounts of Examples 1 to 9 are large is that in Comparative Examples 1 and 2, the four side surfaces of the electromechanical transducer are constrained by a weight and an adhesive, whereas in Examples 1 to 9, This is considered to be because the force that hinders the expansion and contraction movement of the electromechanical transducer is weakened because the two side surfaces are open. Moreover, the reason that the fracture impact strength of Examples 1 to 9 (except Examples 5 and 6) is equal to or greater than that of Comparative Examples 1 and 2 is that the two side surfaces of the electromechanical transducer are the inner side surfaces (first This is considered to be held by the first standing wall and the second standing wall.

  In particular, when Examples 3 and 4 or Examples 8 and 9 are compared, the inner bottom width W2 of the weight groove portion is made smaller than the opening width W1 even though the weight size and weight are substantially the same ( That is, in the case where the width of the groove becomes narrower as it approaches the bottom of the groove, see FIG. 4), it can be seen that the vibration displacement increases and the fracture impact strength increases.

  This is because the expansion / contraction displacement of the electromechanical transducer is accumulated from the bottom surface toward the tip, and the accumulated displacement is small in the vicinity of the bottom surface and increases as it approaches the tip. This is considered to be because the adhesive strength could be increased while keeping the increase in the restraining force with respect to.

  In addition, when Examples 4, 5, and 6 are compared, it can be seen that as the length L3 of the side surface adhesive layer becomes shorter, the vibration displacement becomes larger and the fracture impact strength becomes smaller. Therefore, when the electromechanical conversion element using device is a device used in “an application or usage environment in which the fracture impact strength is not so important”, the vibration displacement is increased by shortening the length L3 of the side surface adhesive layer. can do.

  As described above, in the electromechanical transducer use apparatus according to the embodiment and the modification of the present invention, the “bottom surface” and “a part of the two side surfaces” of the electromechanical transducer are joined to the weight in the groove of the weight. Therefore, the overall length of the entire apparatus is short, the electromechanical conversion element and the weight are reliably joined, and the expansion / contraction displacement amount of the electromechanical conversion element is not excessively small.

  Furthermore, in the electromechanical transducer use apparatus according to the embodiment and the modification of the present invention, the axis CL of the electromechanical transducer 20 is made to coincide with the Z axis, and two axes perpendicular to the Z axis and perpendicular to each other are set. For example, when the first and second standing wall surfaces are arranged in parallel to the Y axis or the X axis, the electromechanical transducer 20 and the weight (30, 40, 50, 60, etc.) Is configured such that the shape when cut along an arbitrary plane parallel to the plane formed by the X axis and the Y axis is “axisymmetric with respect to the X axis and symmetric with respect to the Y axis”. Has been.

  Therefore, since the direction of vibration generated along with the expansion and contraction of the electromechanical transducer 20 occurs in the direction of the axis CL of the electromechanical transducer 20, when using the electromechanical transducer use apparatus as a vibration generator, the direction of the vibration is determined. Can be stabilized. Further, in the third and fourth devices, the shape of the standing wall surface may be configured similarly to the shape of the standing wall surface of the second device.

  DESCRIPTION OF SYMBOLS 10 ... Electromechanical transducer use apparatus, 20 ... Electromechanical transducer, 21 ... Upper surface, 22 ... Bottom, 23a ... First side, 23b ... Second side, 24a ... Third side, 24b ... Fourth side, 30, 40, 40A, 40B, 50, 60 ... weight, 31, 41, 51, 61 ... base, 31a, 41a, 51a, 61a ... upper surface, 32a, 42a, 52a, 62a ... first standing wall surface forming portion, 32a1, 42a1 , 52a1, 62a1 ... first standing wall surface, 32b, 42b, 52b, 62b ... second standing wall surface forming portion, 32b1, 42b1, 52b1, 62b1 ... second standing wall surface, 52a3, 62a3 ... first lateral wall surface, 52a4 , 62a4: second side wall surface, 52b3, 62b3 ... third side wall surface, 52b4, 62b4 ... fourth side wall surface, 70 ... bar member, 80 ... weight component member, 81 ... groove, 90 ... Contact Body.

Claims (5)

An electromechanical transducer (20) having a quadrangular prism shape and expanding and contracting in the axial direction in response to an applied voltage, and a laminated type in which piezoelectric element layers (22b) and internal electrodes (22a) are alternately laminated. In an electromechanical transducer use apparatus having an electromechanical transducer which is a piezoelectric element and a weight bonded to the electromechanical transducer,
The weight includes a base, a first standing wall forming part, and a second standing wall forming part,
The base is
Bonded with the adhesive between the upper surface of the base and the bottom surface of the electromechanical transducer, and joined to the electromechanical transducer,
The first standing wall forming part is
The electromechanical conversion element is configured to stand upright from the upper surface of the base so as to form a first standing wall surface that faces a first side surface that is one side surface of a pair of facing side surfaces, and A gap formed between the first side surface and the first standing wall surface, which extends from the upper surface of the base to a predetermined position on the first standing wall surface so as to cover a plurality of layers of the piezoelectric element layer. Is bonded to the electromechanical conversion element by being filled with an adhesive,
The second standing wall forming part is
The electromechanical conversion element is configured to stand upright from the upper surface of the base so as to form a second standing wall surface facing a second side surface which is the other one of the pair of facing side surfaces; and , A gap formed between the second side surface and the second standing wall surface, in a region from the upper surface of the base portion to a predetermined position on the second standing wall surface, for a plurality of layers of the piezoelectric element layer adhesive is joined to the electromechanical transducer by being filled to span,
Furthermore,
The other pair of opposite side surfaces of the electromechanical conversion element different from the pair of opposite side surfaces of the electromechanical conversion element are configured to be exposed to the outside.
The first standing wall forming part is
The distance between the first side surface and the first standing wall surface is configured to increase as the distance from the upper surface of the base portion increases along the axis of the electromechanical transducer,
The second standing wall forming part is
The electromechanical transducer use apparatus configured such that the distance between the second side surface and the second standing wall surface increases as the distance from the upper surface of the base portion increases along the axis of the electromechanical transducer.   In the electromechanical transducer use apparatus according to claim 1,
  The first standing wall forming part is
  Forming the first standing wall surface from the upper surface of at least the base portion and existing in the same plane as the third side surface which is one of the other pair of opposing side surfaces of the electromechanical conversion element exposed to the outside A first lateral wall extending to the top of the section;
  The first upright is present from the upper surface of the base at least in the same plane as the fourth side surface, which is the other side surface of the other pair of opposite side surfaces of the electromechanical conversion element exposed to the outside. A second lateral wall extending to the top of the wall forming portion;
  Have
  The second standing wall forming part is
  A third lateral wall surface that exists in the same plane as the third side surface and extends at least from the upper surface of the base part to the uppermost part of the second vertical wall surface forming part;
  A fourth lateral wall surface that exists in the same plane as the fourth side surface and extends at least from the upper surface of the base part to the uppermost part of the second vertical wall surface forming part;
  Having
  Electromechanical transducer use device.   In the electromechanical transducer use apparatus according to claim 2,
  The first side wall surface and the second side wall surface extend from the lowermost part of the weight to the uppermost part of the first wall surface forming part,
  The third side wall surface and the fourth side wall surface extend from the lowermost part of the weight to the uppermost part of the second wall surface forming part.
  Electromechanical transducer use device.   In the electromechanical transducer use apparatus according to any one of claims 1 to 3,
  When the axis of the electromechanical conversion element is a Z axis and two axes orthogonal to the Z axis and orthogonal to each other are an X axis and a Y axis, the electromechanical conversion element and the weight have the same X axis and the same weight. Electromechanical transducer use apparatus configured such that the shape when cut along an arbitrary plane parallel to the plane formed by the Y axis is line symmetric about the X axis and line symmetric about the Y axis .   It is a manufacturing method of the electromechanical transducer use apparatus according to claim 3,
  A bar member preparation step of preparing a rectangular parallelepiped bar member made of a material constituting the electromechanical conversion element and having a longitudinal axis;
  A weight constituting member preparing step for preparing a weight constituting member comprising a material for constituting the weight and having a groove for accommodating the bar member;
  The bar member is arranged with respect to the weight constituting member so that the longitudinal axis of the bar member is along the axis of the groove of the weight constituting member and at least the lower part of the bar member is accommodated in the groove. In addition, the bottom surface of the bar member is bonded to the bottom surface of the groove with an adhesive, and all or a part of the side surface of the bar member facing the side wall surface of the groove is bonded to the side wall surface of the groove. A joined body creating step of creating a joined body by joining with an agent;
  A cutting step of simultaneously creating a plurality of individual electromechanical transducer use devices by cutting the joined body along a plane intersecting the longitudinal direction of the bar member;
  Manufacturing method.

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