JP2012231622A - Method of manufacturing oscillation body of oscillatory wave motor, oscillation body, and oscillatory wave motor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing an oscillation body of an oscillatory wave motor in which an oscillation body which can be constituted such that the height of a projection part coming into contact with a body to be driven is larger than the thickness of a base can be manufactured at low cost with stable processing precision.SOLUTION: There is provided the method of manufacturing the oscillation body of the oscillatory wave motor which includes an oscillator having an oscillation body having a projection part extended in one direction and an electromechanical conversion element, and drives a body to be driven which comes into contact with the projection part through elliptic motion of the oscillator. The method of manufacturing the oscillation body includes a first process of manufacturing a deformed material having a structure having a sectional shape corresponding to the sectional shape of the oscillation body including the projection part of the oscillation body in a direction orthogonal to an extension direction of the projection part, the corresponding sectional shape being formed uniformly in a length direction; and a second process of cutting a part of the deformed material while matching the deformed material with the width of the projection part of the oscillation body in the extension direction from a direction orthogonal to the length direction of the deformed material.

Description

  The present invention relates to a method of manufacturing a vibrating body in a vibration wave motor, a vibrating body, and a vibration wave motor. is there.

2. Description of the Related Art Conventionally, a vibration wave motor (ultrasonic motor) that drives a moving body by vibration generated in the vibration body is known.
In this vibration wave motor, a plurality of vibration modes are excited by a vibrator composed of an electro-mechanical energy conversion element (for example, a piezoelectric element) and a vibration body (an elastic body mainly made of metal) joined thereto. . (In the present invention, a structure including a vibrating body and an electromechanical energy conversion element is referred to as a vibrator.)
Then, by synthesizing the plurality of vibrations, an elliptical motion is generated on the surface of the vibrator, and the driven body that is in contact with the contact portion of the vibrator constituting a part of the vibrator is relatively driven. .
Various types of vibration wave motors have been proposed. For example, for a vibration wave motor that rotationally drives a lens barrel such as a camera, a ring-shaped vibration wave motor or a rod-shaped rotary vibration is provided. Wave motors have been proposed.
Furthermore, a vibration wave motor configured as a rotary actuator by arranging a plurality of chip-shaped vibrators (hereinafter referred to as chip-type vibrators) whose vibration parts are composed of thin flat plate parts and protrusions on the circumference. Many proposals have been made on the motor configuration, form, etc., and some have been put into practical use.
Many linear-type vibration wave motors have also been proposed in which the above-described chip-type vibrating body is brought into contact with a linear slider and driven linearly.

Here, an outline of the vibration wave motor configured by the chip-type vibrating body will be described with reference to an example disclosed in Patent Document 1.
The vibration wave motor includes a vibrator and a slider (also referred to as a moving body or a contacted body) that contacts the vibrator. In this vibrator, an electro-mechanical energy conversion element (for example, a piezoelectric element) is bonded to a chip-type vibrating body formed of a rectangular diaphragm having two protrusions that are in contact with a slider on one surface. Has been configured. When alternating electric fields having different phases are applied to the piezoelectric element, two out-of-plane bending vibrations are excited in the vibrator, and an elliptical motion is generated at the tips of the two protrusions.
As a result, the slider that comes into contact with the protrusion receives a frictional driving force and is driven in one direction.

The protrusions in this chip-type vibrator have a function of limiting the contact portion with the slider and efficiently transmitting a driving force and a function of expanding a velocity component in the feed direction generated in the vibrator.
For this reason, in order to increase the speed of the motor, it is necessary to make the protrusions high. When manufacturing these vibrators, the protrusions can be manufactured by machining from a metal block or by pressing the diaphragm. A processing method such as forming a part was used.
Further, Patent Document 2 discloses an example in which a portion other than the projection (contact portion) is removed from the plate by etching when a relatively high projection is not required to form a diaphragm.
Patent Document 3 discloses a processing method in which a block of protrusions and a diaphragm are processed separately and joined.

Japanese Patent Laid-Open No. 2004-304877 JP 2005-354787 A JP 2006-174549 A

However, the manufacturing method disclosed in Patent Document 1 has the following problems in forming the protrusions high.
That is, since the protrusions are squeezed out from the diaphragm by press working, there is a restriction in taking a large ratio of the height to the base thickness of the diaphragm. In addition, if the height is to be increased, it is necessary to increase the region of the protruding portion to ensure the amount of meat to be squeezed out, which will adversely affect the vibration mode of the vibrator.
Further, the processing method by etching disclosed in Patent Document 2 is also a processing method unsuitable for forming a high protrusion.
Further, the method of Patent Document 3 increases costs due to an increase in the number of parts and an increase in the number of processing steps. Moreover, it is not necessarily preferable for ensuring the reliability of the joint.

In view of the above problems, the present invention provides a vibrating body that can be configured such that the height of the protruding portion that comes into contact with the driven body is larger than the thickness of the base of the vibrating body.
It is an object of the present invention to provide a method of manufacturing a vibration body, a vibration body, and a vibration wave motor in a vibration wave motor that can be manufactured at low cost with stable machining accuracy.

A method of manufacturing a vibrating body in a vibration wave motor according to the present invention includes a vibrator having a protruding portion extending in one direction and an electro-mechanical energy conversion element, and the elliptical motion of the vibrator A method of manufacturing a vibrating body in a vibration wave motor that drives a driven body that contacts a protrusion,
A structure having a cross-sectional shape corresponding to the cross-sectional shape of the vibrating body including the protruding portion in a direction orthogonal to the extending direction of the protruding portion of the vibrating body, and the corresponding cross-sectional shape is uniformly formed in the longitudinal direction. A first step of producing a profile having
A part of the deformed material manufactured in the first step is made to correspond to the width dimension in the extending direction of the protrusion in the vibrating body from a direction orthogonal to the longitudinal direction of the deformed material. A second step of cutting,
It is characterized by having.
Further, the vibrating body in the vibration wave motor of the present invention includes a vibrator having a protruding portion extending in one direction and an electromechanical energy conversion element, and the protrusion by the elliptical motion of the vibrator. A vibration body in a vibration wave motor that drives a driven body in contact with a portion,
The vibrator has a cross-sectional shape corresponding to a cross-sectional shape of the vibrator including the protrusion in a direction orthogonal to the extending direction of the protrusion of the vibrator, and the corresponding cross-sectional shape is uniform in the longitudinal direction. It is comprised by the member which cut | disconnected a part of deformed material which has the formed structure, It is characterized by the above-mentioned.
The vibration wave motor of the present invention is a vibration wave motor that includes a vibrator having a vibrator and an electromechanical energy conversion element, and that drives a driven body that comes into contact with the protrusion by the elliptical motion of the vibrator. There,
The vibrating body is constituted by a vibrating body in the above-described vibration wave motor.

According to the present invention, a vibrating body that can be configured such that the height of the protrusion contacting the driven body is larger than the thickness of the base of the vibrating body,
A vibration body manufacturing method, a vibration body, and a vibration wave motor in a vibration wave motor that can be manufactured at low cost with stable processing accuracy can be realized.

The perspective view which shows the 1st process in Example 1 of this invention. The perspective view which shows the 2nd process in Example 1 of this invention. FIG. 3 is a perspective view of a vibrator according to the first embodiment of the present invention. The top view and vibration mode figure of a vibrator | oscillator in Example 1 of this invention. 1 is a perspective view of a vibration wave motor in Embodiment 1 of the present invention. The perspective view which shows the 2nd process in Example 2 of this invention. The perspective view of the vibrator | oscillator in Example 2 of this invention. The top view and vibration mode figure of a vibrator | oscillator in Example 2 of this invention. The perspective view which shows the 1st process in Example 3 of this invention. The perspective view which shows the 2nd, 3rd process in Example 3 of this invention. The perspective view of the vibrator | oscillator in Example 3 of this invention. The top view and vibration mode figure of a vibrator | oscillator in Example 3 of this invention. The top view and vibration mode figure of a vibrator | oscillator in Example 4 of this invention. FIG. 11 is a vibration characteristic diagram in Example 4 of the present invention. The top view and vibration mode figure of a vibrator | oscillator in Example 5 of this invention. (A) is a perspective view of a vibrator unit in Example 6 of the present invention. (B) is a block diagram of the vibration wave motor in Example 6. FIG.

  The mode for carrying out the present invention will be described with reference to the following examples.

[Example 1]
As Example 1, a method of manufacturing a vibrating body, a vibrating body, and a vibration wave in a vibration wave motor using a deformed material having a cross-sectional shape of a plate material serving as a material corresponding to a diaphragm (vibrating body) provided with a protrusion A configuration example of the motor will be described with reference to FIGS.
The vibration wave motor according to the present embodiment includes a vibrator having a projecting portion extending in one direction and an electro-mechanical energy conversion element, and is in contact with the projecting portion by an elliptical motion of the vibrator. It is comprised so that a to-be-driven body may be driven.
In the present embodiment, the vibrating body in such a vibration wave motor is manufactured by the following manufacturing method.
First, in the first step, a cross-sectional shape corresponding to the cross-sectional shape of the vibrating body including the protruding portion in a direction orthogonal to the extending direction of the protruding portion of the vibrating body is provided, and the corresponding cross-sectional shape is in the longitudinal direction. A profile having a uniformly formed structure is produced. In the present invention, the term “perpendicular” means “substantially orthogonal”. “Substantially orthogonal” means that, for example, due to processing error, intentional design, etc., even if it is not strictly orthogonal, it is in a state of producing the same effect as when orthogonally intersecting. . For example, even if there is a deviation of ± 3 ° from orthogonal (90 °), when the effect of the present invention is exerted, it can be regarded as substantially orthogonal.
In that case, the part corresponding to the protrusion in the deformed material is constituted by a rail-like thick part.
Specifically, the profile shown in FIG. 1 is manufactured by rolling or the like (including hot or cold extrusion, drawing, etc.).
Here, it is important to set the cross-sectional shape so that the number of post-processing steps is reduced as much as possible in view of the final shape of the diaphragm (vibrating body).
In other words, the width B1 of the deformed material shown in FIG. 1 is set to be substantially equal to the length L1 of the diaphragm 2 of the vibrator 4 shown in FIG.
Further, the protrusions 1-1 and 1-2 by the rail-shaped thick part can be used as the protrusions 2-1 and 2-2 of the diaphragm 2 as they are, so that their height (round numeral 1) and width (round numeral) 2) and the distance between the protrusions (circle numeral 3) are set to be equal to h1, t1, and P1, respectively.
Next, in the second step, the deformed material manufactured in the first step is cut into a predetermined dimension (shape) as shown in FIG.
In this embodiment, the profile 1 is cut by the cutter 10 so that the width is B2.
A diaphragm (vibrating body) 2 having a protrusion as shown in FIG. 3 is manufactured by the member cut in this way.
Next, in the third step, the vibrator 4 is manufactured by bonding (adhering) the piezoelectric element 3 that is an electro-mechanical energy conversion element to the diaphragm cut in the second step.
In the fourth step, a power feeding member such as an FPC (flexible printed circuit board) is joined to the piezoelectric element.

When an AC electric field is applied to the piezoelectric element 3 from a power supply member (not shown) (FPC or the like), the vibrator 4 has a first vibration mode (mode 1) and a second vibration mode (mode 2) as shown in FIG. And are excited.
This mode 1 has two nodal lines (linear portions serving as vibration nodes) l1 and l2 in a direction orthogonal to the short direction in FIG. 4, and the central part thereof is a vibration antinode. This is a primary out-of-plane bending vibration mode in the short direction of the vibrator 4.
On the other hand, mode 2 has three nodal lines (l3, l4, and l5) orthogonal to the two nodal lines l1 and l2 in FIG. Mode.
As shown in the figure, since the protrusions 2-1 and 2-2 are set so as to substantially coincide with the positions of l4 and l5, when the mode 2 is excited, the protrusions 2-1 and 2- At the tip (upper surface) of 2, the vibration amplitude in the Z direction is almost zero, and only the vibration amplitude in the X direction is generated.
In addition, when mode 1 is excited, both the protrusions 2-1 and 2-2 are deformed in the same manner as in mode 1. Therefore, the vibration amplitude in the X direction is about 2-1C and 2-2C near the center of the protrusion. Nearly zero, the vibration amplitude in the Z direction is maximized.
Therefore, when these two vibration modes are excited at the same time, and the phase of vibration is appropriately adjusted and synthesized, the vicinity of the central portions of the protrusions 2-1 and 2-2 formed on the diaphragm 2 are 2-1C and 2- Elliptical motion is generated in 2C.
Therefore, when the driven body 5 as shown in FIG. 5 is brought into contact with the protrusion, the driven body (slider) is driven in the direction of arrow A by the frictional force due to the elliptical motion.

As described above, in the method for manufacturing a vibrating body according to the present embodiment, as a process of processing the vibrating plate (vibrating body) 2, first, a vibrating plate (vibrating body) having a cross-sectional shape including the protrusions 2-1 and 2-2. ) A deformed material having a shape corresponding to 2 is manufactured.
Next, by removing the unnecessary parts of the deformed material and finishing the diaphragm that forms the projection and the base of the vibrating body into a predetermined shape, the number of processing steps and the processing distortion are minimized. A suppressed vibrating body (high processing accuracy) can be manufactured at low cost.

[Example 2]
As a second embodiment, a method of manufacturing a vibrating body in a vibration wave motor having a different form from the first embodiment will be described with reference to FIGS.
In the vibrator of Example 1 (FIG. 3), the protrusions 2-1 and 2-2 were formed up to the short-side end of the diaphragm, but in this example, as shown in FIG. 3 and 2-4 are formed only in the central part (width: W3) of the diaphragm.
Therefore, in the processing step in this example, first, in the first step, the deformed material shown in FIG. 1 is manufactured by rolling or the like (including hot or cold extrusion processing, drawing processing, etc.) as in Example 1. To do.
Next, in the second step, as shown in FIG. 6, the rail-shaped protrusions (1-1 and 1-2) are cut using a cutter 11 (width: W1) so that the processing pitch is W2. Then, it is processed into a shape in which a part of the protrusion remains intermittently.
Further, in the third processing step, the processed deformed material 1 is cut using a cutter 10 similar to that shown in FIG. 2 so that the pitch becomes W2, and the diaphragm 2 as shown in FIG. 7 is manufactured.
Here, the pitch of the cutting process is set to the pitch W2 in consideration of the machining allowance at the time of cutting so that the width of the diaphragm after cutting becomes L4.
In the fourth and fifth steps, the same steps as in the third and fourth steps in the first embodiment are used, and the piezoelectric element and the FPC are bonded to manufacture the vibrator 4 shown in FIG.
Thus, the bending rigidity in the mode 1 shown in FIG. Therefore, the Z amplitude can be easily increased.
Moreover, since the contact part of a protrusion part and a to-be-driven body can be limited, an efficient drive is attained.

[Example 3]
As a third embodiment, a method of manufacturing a vibrating body in a vibration wave motor having a different form from the above embodiments will be described with reference to FIGS.
In this embodiment, as shown in FIG. 11, the vibrating body is configured by integrally forming support portions 22-3 and 22-4 and fixing portions 22-5 and 22-6.
Also in the present embodiment, the shape of the deformed material as the material is devised so that the processing for finishing the shape of the diaphragm is minimized.
First, in the first step, a deformed material as shown in FIG. 9 is manufactured by rolling.
As shown in FIG. 9, the deformed material plate 21 has rail-like thick portions 21-1 and 21-2 and thin portions 21-3 and 21-4 on the outside thereof, and further has the same thickness as the central portion on the outside thereof. Portions 21-5 and 21-6 are formed.
Next, in the second step, as shown in FIG. 10A, a part of the rail-shaped protrusion is cut using a cutter 12 having a width W5, and the thick portions 21-11, 21-21 are cut. Cutting is performed so that a part thereof remains intermittently at a length W4 (B5-W5) and a pitch B5.
Next, in the third step, as shown in FIG. 10B, the diaphragm 22 shown in FIG. 11 is manufactured by cutting along the outline indicated by the dotted line 25.
In this cutting process, a press die along the outer shape is manufactured, and a punching process is performed with this press die to shorten the processing time.
In the fourth and fifth steps, the piezoelectric element and the FPC are joined using the same steps as in the first and second embodiments.
The vibrator of the present embodiment has fixing portions 22-5 and 22-6, and the vibrator 22 is supported by joining and fixing a part thereof to a fixing member (not shown).
At that time, the support portions 22-3 and 22-4 are provided so as not to hinder the vibration of the vibration portion joining the piezoelectric elements, and this portion has a bending rigidity smaller than other portions. The width and thickness are narrow and set thin (FIG. 12).
Further, the thin portions are set as thin portions 21-3 and 21-4 of the deformed material 21 as shown in FIG. 9, and the cross-sectional shape is set in advance so as to minimize the subsequent processing steps. doing.
In the outer shape processing of the present embodiment, punching by press is adopted, but the processing method is not limited to this, and other machining (for example, wire cutting) may be used.
Further, through the above-described Examples 1 to 3, the step of smoothing the piezoelectric element joint surface of the diaphragm was omitted in the step of joining the piezoelectric element to the diaphragm.
However, when the joining surface formed in the first step does not have a predetermined planar shape (flatness, surface roughness), finish processing such as surface grinding or polishing may be performed.

[Example 4]
As a fourth embodiment, a method of manufacturing a vibrating body in a vibration wave motor having a different form from the above embodiments will be described with reference to FIG.
Even when the vibrating body is manufactured by the process as described in the first to third embodiments, the resonance frequency of the mode 1 and the mode 2 may be deviated from a predetermined value due to the following factors.
For example,
(1) Production accuracy of cross-sectional dimensions when producing a deformed material in the first step,
(2) Processing accuracy when cutting,
(3) Factors such as thickness unevenness caused by post-processing such as grinding when the warpage of the bonding surface of the piezoelectric element is large are conceivable.
These error factors need to be reduced as much as possible by the management at the time of processing, but there is a limit in production.
Therefore, in this embodiment, the resonance frequency is adjusted after the vibrator is manufactured, and the resonance frequencies of mode 1 and mode 2 are set to predetermined values.
As described in the first embodiment, the mode 1 is the first-order out-of-plane bending vibration mode of the vibrator 4 in the short direction.
That is, it is an out-of-plane bending vibration of a plate that is displaced in the Z direction (perpendicular to the paper surface), and two vibration nodes (node lines) 11 and 12 are formed, and vibration in which the Z amplitude is maximized at the center. This is a vibration mode in which an antinode is formed.
Since the protrusions 24-1 and 24-2 are located in the antinode portions of the mode 1, these portions are the portions having the highest contribution rate to the bending rigidity of the mode 1.
On the other hand, in mode 2, three lines (l3, l4, l5) are formed so that the nodal line is perpendicular to mode 1, and as shown in the figure, the center portion of the vibrator and the positions of the projections 24-1 and 24-2 are formed. Are vibration modes that each become a vibration node. For this reason, the protrusions 24-1 and 24-2 do not vibrate in the Z direction even when the mode 2 is excited, and the influence on the vibration mode is small.
Therefore, by manipulating the shape of the protrusions 24-1, 24-2, only the resonance frequency of mode 1 can be changed without affecting the mode 2.

Therefore, as a method of adjusting the resonance frequency, first, after the vibrator is manufactured, a step of measuring the vibration characteristics (admittance characteristics) of the vibrator is provided, and a part of the protrusion of the vibrator is formed based on the result. A step of removing and reducing the resonance frequency of mode 1 to a predetermined value is provided.
FIG. 14 shows the admittance of mode 1 and mode 2 measured here.
In FIG. 14, the horizontal axis represents frequency, and the vertical axis represents admittance.
As shown in FIG. 14, mode 1 and mode 2 have characteristics having peaks at frequencies f1 and f2, and it is well known that this frequency substantially coincides with the resonance frequency of each vibration mode.
In order to drive the motor, it is necessary to excite these two vibration modes at the same time to generate elliptical motions at the two protrusions of the vibrator.
Therefore, it is necessary to make the resonance frequencies (f1, f2) of these two vibration modes close to some extent and to set ΔF (f1-f2) in the figure within a predetermined range.
In this embodiment, since f2 <f1 and f1 exceeds the ΔF allowable range, both end portions 24-3 of the projecting portions 24-1 and 24-2 are shaved.
As a result, the bending rigidity with respect to the mode 1 is decreased, and the frequency can be adjusted so that f1 falls to f1 ′ and f1 ′ falls within the allowable range of ΔF.

[Example 5]
As a fifth embodiment, a method of manufacturing a vibrating body in a vibration wave motor having a different form from the above embodiments will be described with reference to FIG.
In the present embodiment, as in the fourth embodiment, the ΔF is adjusted by lowering the resonance frequency of the mode 1, but the position where the protrusion is shaved to reduce the bending rigidity of the mode 1 is set to the central portion 26 of the protrusion. -3. That is, a groove is formed at the center of the protrusion.
As shown in FIG. 15, since the antinode of mode 1 vibration is located almost at the center in the width direction of the vibrator, this portion has the highest contribution to rigidity, and the resonance frequency adjustment of the same mode can be performed with less processing. Is possible.

In Examples 4 and 5 described above, the bending rigidity contributing to mode 1 was adjusted by cutting (removing) the width direction (Y direction) of the protrusion, but the thickness in the X direction of the protrusion was adjusted. However, it is possible to change the bending rigidity of mode 1.
Further, in the above embodiment, the portion to be cut is processed so as to be symmetric with each protrusion, and the balance (symmetry) of the vibration mode is maintained. The frequency may be adjusted by processing only one of the protrusions or only one end of the protrusion.

[Example 6]
As a sixth embodiment, a configuration example of a vibration wave motor configured using the vibrator manufactured in the first to fifth embodiments will be described with reference to FIGS.
FIG. 16A shows a vibrator support portion (27-5, 27-6) composed of a diaphragm 26 and a piezoelectric element 27 joined to the vibrator holding ring 6 by means such as welding. It is a figure which shows the example which comprised the unit.
As shown in FIG. 16 (b), the rotor 7 is set so that the sliding surfaces are in contact with the protrusions 26-1 and 26-2 provided on the three vibrators of the vibrator unit. An appropriate pressurizing force is applied by a pressurizing mechanism (not shown) to constitute a motor.
When an alternating voltage is applied to these three vibrators from a power source (not shown), elliptical motion is excited at the tips of the protrusions of the vibrators, and the rotor 7 rotates in the direction of the arrow due to frictional force.

Here, it is preferable that the upper surface (contact surface with the rotor) of each of the protrusions (six locations) of the vibrator bonded to the vibrator unit is formed in the same plane. For this reason, after joining each vibrator | oscillator to a holding ring, the said protrusion part is smoothed with a polish board etc. FIG.
In this embodiment, an example in which the vibrator and the holding ring are joined by welding has been described. However, the present invention is not limited to this, and means such as adhesion or brazing may be used.
A vibrator having a large vibration expansion ratio, that is, a diaphragm having a projection height that expands vibration with a large height relative to the thickness of other vibration parts can be manufactured with stable machining accuracy and at low cost. .
In addition, by providing means that can easily adjust the resonance frequency of the vibrator, the yield of the vibrator can be improved, and an inexpensive and high-performance ultrasonic motor can be provided.

1: Profile material 1-1, 1-2: Rail-shaped projection 2: Diaphragm 2-1, 2-2: Projection 3: Piezoelectric element 4: Vibrator

Claims (9)

A vibration wave motor including a vibrator having a protrusion extending in one direction and an electro-mechanical energy conversion element, and driving a driven body that contacts the protrusion by an elliptical motion of the vibrator A method of manufacturing a vibrating body in
A structure having a cross-sectional shape corresponding to the cross-sectional shape of the vibrating body including the protruding portion in a direction orthogonal to the extending direction of the protruding portion of the vibrating body, and the corresponding cross-sectional shape is uniformly formed in the longitudinal direction. A first step of producing a profile having
A part of the deformed material manufactured in the first step is made to correspond to the width dimension in the extending direction of the protrusion in the vibrating body from a direction orthogonal to the longitudinal direction of the deformed material. A second step of cutting,
A method of manufacturing a vibrating body in a vibration wave motor, comprising:   The method for manufacturing a vibrating body in a vibration wave motor according to claim 1, wherein the deformed material is manufactured by any one of a rolling process, an extrusion process, and a drawing process. The part corresponding to the protrusion in the deformed material is composed of a rail-like thick part,
In the second step, a part of the rail-like thick part is cut to process the protrusion into a predetermined shape, and a diaphragm constituting the base of the vibrator is processed into a predetermined shape. The manufacturing method of the vibrating body in the vibration wave motor of Claim 1 or Claim 2 including a process. The elliptical motion of the vibrator includes a first vibration mode caused by a primary out-of-plane bending vibration in the transverse direction of the vibrator and a second vibration caused by a secondary out-of-plane bending vibration in the longitudinal direction of the vibrator. An elliptical motion generated by combining and combining modes,
Measuring the resonance frequency of the first vibration mode and the resonance frequency of the second vibration mode;
Based on the resonance frequency measured in the step of measuring the resonance frequency, the protrusion is processed so that a difference between the resonance frequency of the first vibration mode and the resonance frequency of the second vibration mode becomes a predetermined frequency. And a process of
The manufacturing method of the vibrating body in the vibration wave motor of Claim 1 or Claim 2 characterized by the above-mentioned.   5. The method for manufacturing a vibrating body in a vibration wave motor according to claim 4, wherein the step of processing the protrusion is a step of reducing the bending rigidity of the protrusion with respect to the first vibration mode.   6. The bending rigidity of the protrusion is reduced by adjusting a width or thickness of the protrusion in the step of reducing the bending rigidity of the protrusion with respect to the first vibration mode. A method for manufacturing a vibrating body in the vibration wave motor according to claim 1.   The bending rigidity of the protrusion is reduced by forming a groove in the protrusion in the step of reducing the bending rigidity of the protrusion with respect to the first vibration mode. A method of manufacturing a vibrating body in a vibration wave motor. A vibration wave motor including a vibrator having a protrusion extending in one direction and an electro-mechanical energy conversion element, and driving a driven body that contacts the protrusion by an elliptical motion of the vibrator A vibrating body in which
The vibrator has a cross-sectional shape corresponding to a cross-sectional shape of the vibrator including the protrusion in a direction orthogonal to the extending direction of the protrusion of the vibrator, and the corresponding cross-sectional shape is uniform in the longitudinal direction. A vibrating body in a vibration wave motor, comprising a member obtained by cutting a part of a deformed material having a formed structure. A vibration wave motor comprising a vibrator having a vibrator and an electro-mechanical energy conversion element, and driving a driven body that is in contact with the protrusion by the elliptical motion of the vibrator,
A vibration wave motor, wherein the vibration body is constituted by a vibration body in the vibration wave motor according to claim 8.

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