JP5331115B2 - Optical scanning actuator, optical scanning sensor, and object detection device - Google Patents

Abstract

Provided are an actuator for optical scanning capable of achieving high layout flexibility and excellent driving efficiency, an optical scanning sensor, and an object detection device.  The actuator for optical scanning is provided with a base member fixed to a mounting subject, a first holding member for holding a light projecting means, a first supporting means for coupling the base member and the first holding member and supporting the first holding member displaceably with respect to the base member, a first driving means for driving the first holding member in a predetermined direction with respect to the base member, an optical element for light projection for transmitting, refracting, or reflecting the light projected by the light projecting means, which is located on the side on which the light projected by the light projecting means travels, a second holding member for holding the optical element for light projection, a second driving means for driving the second holding member in a direction different from the direction in which the first driving means drives the first holding member, and a second supporting means for coupling the base member and the second holding member and supporting the second holding member displaceably with respect to the base member.

Description

  The present invention relates to an optical scanning actuator that scans a predetermined range with light, an optical scanning sensor, and an object detection device.

  2. Description of the Related Art Conventionally, an optical scanning device that scans a predetermined range with light such as laser light has been used in various fields such as a radar, a scanner, a printer, and a print marker. As such an optical scanning device, a lens holder that holds a lens through which scanning light is passed is cantilevered so as to be displaceable in the vertical and horizontal directions with respect to a fixed base fixed to an attachment target, thereby two-dimensionally using scanning light. An optical scanning actuator that scans a specific area is known (see, for example, Patent Document 1). This optical scanning actuator has four left and right direction displacement leaf springs each having one end portion coupled to each of the four upper, lower, left and right positions of the lens holder, and the other end portion of each left and right direction displacement leaf spring is coupled. A support portion; four vertical displacement plate springs that connect the four portions of the movable support portion in the vertical and horizontal directions to the fixed base; and drive means for two-dimensionally driving the lens holder in the vertical and horizontal directions. Yes.

Japanese Patent No. 3853204

  However, in the conventional optical scanning actuator described above, the movable support portion has a configuration in which the lens holder is suspended via the lateral displacement plate spring. Therefore, the configuration is complicated, the number of parts is large, and the layout is free. The degree was low. Further, since not only the movable support portion but also the lens holder is driven in the vertical direction, a driving force larger than that in the horizontal direction must be generated in the vertical direction, and driving efficiency is good. It was hard to say.

  The present invention has been made in view of the above, and provides an optical scanning actuator, an optical scanning sensor, and an object detection device that have a high degree of freedom in layout and can realize good driving efficiency. With the goal.

  In order to solve the above-described problems and achieve the object, an optical scanning actuator according to the present invention is an optical scanning actuator that scans a predetermined range with light projected by a light projecting unit, and is to be attached. A base member fixed to the base, a first holding member for holding the light projecting means, the base member and the first holding member are connected, and the first holding member can be displaced with respect to the base member. A first supporting means for supporting; a first driving means for driving the first holding member in a predetermined direction with respect to the base member; and a side where light emitted by the light projecting means travels, A light projecting optical element that transmits, refracts, or reflects light projected by the light projecting means, a second holding member that holds the light projecting optical element, and the first driving means drives the first holding member. In a direction different from the direction Second driving means for driving a holding member; and second support means for connecting the base member and the second holding member and supporting the second holding member so as to be displaceable with respect to the base member. It is characterized by that.

  In the optical scanning actuator according to the present invention, in the above invention, when the first holding member is displaced, the plane through which the center of gravity of the first holding member passes and the second holding member are displaced when the first holding member is displaced. 2 The holding member is characterized by being orthogonal to a plane through which the center of gravity passes.

  In the optical scanning actuator according to the present invention as set forth in the invention described above, the first and second support means each include a leaf spring.

  In the optical scanning actuator according to the present invention as set forth in the invention described above, the first support means includes a plurality of plate springs, and at least a part of the plurality of plate springs is the light projecting means or the first drive. It is electrically connected with the means.

  In the above invention, the optical scanning actuator according to the present invention is held side by side with the light projecting optical element by the second holding member, and the light emitted from the first optical element is reflected outside and returned. It further comprises a condensing optical element that condenses and transmits, refracts or reflects the reflected light.

  In the optical scanning actuator according to the present invention as set forth in the invention described above, the first and second support means each include a leaf spring.

  In the optical scanning actuator according to the present invention as set forth in the invention described above, the first holding member holds a light receiving means for receiving the reflected light emitted from the condensing optical element.

  In the optical scanning actuator according to the present invention, in the above invention, the first support means includes a plurality of plate springs, and at least a part of the plurality of plate springs includes the light projecting means, the light receiving means, or the light receiving means. It is electrically connected to the first driving means.

  In the optical scanning actuator according to the present invention as set forth in the invention described above, the second support means includes a leaf spring.

  In the optical scanning actuator according to the present invention as set forth in the invention described above, the surface area of the condensing optical element is larger than the surface area of the light projecting optical element.

  In the optical scanning actuator according to the present invention as set forth in the invention described above, the condensing optical element is a lens.

  In the optical scanning actuator according to the present invention as set forth in the invention described above, the light projecting optical element is a lens.

  Further, an optical scanning sensor according to the present invention includes the optical scanning actuator described in the above invention, the light projecting unit, and the light receiving unit.

  Further, an object detection apparatus according to the present invention is based on the optical scanning sensor described in the above invention, a control unit that controls driving of the first and second driving units, and reflected light received by the light receiving unit. And detecting means for detecting an object.

  According to the present invention, the light projecting means for projecting the scanning light is directly displaced, and the light projecting optical element for emitting the light projected by the light projecting means to the outside as the scanning light is different from the light projecting means. Since it is configured to be displaced independently in the direction, the configuration is simple, the number of parts is small, and the degree of freedom in layout is high. In addition, since the first holding member that holds the light projecting unit and the second holding member that holds the light projecting optical element can be driven independently of each other, the one holding member has a large drive for structural reasons. There is no need to generate force. Therefore, good driving efficiency can be realized.

FIG. 1 is a perspective view showing a configuration of an optical scanning actuator according to Embodiment 1 of the present invention. 2 is a partial cross-sectional view taken along line AA in FIG. FIG. 3 is a partial cross-sectional view taken along line BB in FIG. FIG. 4 is a diagram schematically showing a displacement mode of the light projecting element holder. FIG. 5 is a diagram schematically illustrating the manner of displacement of the lens holder. FIG. 6 is a perspective view showing a configuration of an optical scanning actuator according to a modification of the first embodiment of the present invention. FIG. 7 is a perspective view showing the configuration of the optical scanning actuator according to the second embodiment of the present invention. FIG. 8 is a partial cross-sectional view taken along the line EE of FIG. FIG. 9 is a diagram illustrating a functional configuration of the object detection device according to the second embodiment of the present invention.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described with reference to the accompanying drawings.

(Embodiment 1)
FIG. 1 is a perspective view showing a configuration of an optical scanning actuator according to Embodiment 1 of the present invention. 2 is a partial cross-sectional view taken along line AA in FIG. FIG. 3 is a partial cross-sectional view taken along line BB in FIG. 1 to 3 includes a light projecting element holder 3 (first holding member) that holds a light projecting element 2 (light projecting means) such as a laser diode that projects laser light as scanning light. , A light projecting lens 4 (light projecting optical element) that emits to the outside by transmitting or refracting the laser light projected by the light projecting element 2, and a lens holder 5 (second holding) that holds the light projecting lens 4 Member). In the following description, the light beam direction of the laser light projected by the light projecting element 2 is assumed to be the front. Further, the vertical direction and the horizontal direction are determined as shown in FIG. 1 with reference to the front viewed from the light projecting element 2.

  End portions of a plurality of leaf springs 6 extending in the front-rear direction are respectively attached to the light projecting element holder 3 and supported in a cantilever state by the leaf springs 6. The other end of the leaf spring 6 is fixed to a base plate 8 made of a printed circuit board (PWB) via a leaf spring holder 7. The plate spring 6 can be bent in the vertical direction with respect to the base plate 8 because the normal direction of the main surface is parallel to the vertical direction in a state where the plate spring 6 is not bent (the state shown in FIG. 1). Therefore, the light projecting element holder 3 is supported by the plurality of plate springs 6 so as to be displaceable in the vertical direction with respect to the base plate 8. A plurality of leaf springs having different widths may be used instead of the plurality of leaf springs 6.

  Of the end portions of the leaf spring 6, the end portion held by the leaf spring holder 7 is provided with a protruding portion 6 a that protrudes along the extending direction of the leaf spring 6. The protrusion 6 a is inserted through a hole (not shown) formed through the thickness direction of the base plate 8 and protrudes rearward of the base plate 8.

  End portions of a leaf spring 10 extending in the front-rear direction are respectively attached to the left and right ends of the lens holder 5 via a fixing member 9 and supported by the leaf spring 10 in a cantilever state. The other end of the leaf spring 10 is attached to the support member 11. The support member 11 is positioned at the left end of the left arm 11b, the left arm 11b extending leftward from the body 11a, the block-shaped body 11a fixed to the base plate 8, and the left end of the lens holder 5. One end of the leaf spring 10 attached to the left arm 11c attached via the fixing member 9, the right arm 11d extending rightward from the body 11a, and the right end of the right arm 11d are positioned at the lens holder. One end of a leaf spring 10 attached to the right end of 5 is attached to a right shaft portion 11e attached via a fixing member 9, and a plurality of boss portions 11f for fixing the left shaft portion 11c and the right shaft portion 11e to the base plate 8 respectively. Have. The support member 11 constitutes a base member that is fixed to the attachment target of the optical scanning actuator 1 together with the base plate 8. The “attachment target” here is, for example, a housing portion of a scanning laser radar apparatus including the optical scanning actuator 1 as a component.

  The leaf spring 10 can bend in the left-right direction with respect to the support member 11 because the normal direction of the main surface is parallel to the left-right direction in the unbent state (the state shown in FIG. 1). Therefore, the lens holder 5 is supported by the two leaf springs 10 so as to be displaceable in the left-right direction with respect to the support member 11. Note that the lens holder 5 and the support member 11 may be coupled using a plurality of leaf springs instead of the two leaf springs 10.

  The leaf springs 6 and 10 are made of a thin leaf spring material such as beryllium copper, phosphor bronze, or stainless steel, and are formed by stamping or etching by pressing. A material such as a polymer sheet having viscoelasticity may be attached to the surfaces of the leaf springs 6 and 10. By sticking such a material, the leaf springs 6 and 10 can be appropriately damped.

  The leaf spring 6 constitutes first support means for connecting the base member and the light projecting element holder 3 and supporting the light projecting element holder 3 so as to be displaceable with respect to the base member. The leaf spring 10 constitutes second support means that connects the base member and the lens holder 5 and supports the lens holder 5 so as to be displaceable with respect to the base member.

  A yoke 12 made of a soft magnetic material such as iron is attached to the body portion 11a. The yoke 12 includes a main yoke 12a having a U-shaped cross section with an opening at the front, and a flat back yoke 12b fitted into the opening portion of the main yoke 12a, and has a closed shape having a hollow portion. There is no.

  A part of the holder driving member 13 that transmits a driving force to the light projecting element holder 3 passes through the hollow portion of the yoke 12. The holder driving member 13 has a penetrating portion 13 a that has a substantially flat plate shape and penetrates the yoke 12, and a fixing portion 13 b that extends rearward from the back surface of the penetrating portion 13 a and is fixed to the light projecting element holder 3. A coil 14 having an opening surface parallel to the vertical direction and the horizontal direction is provided on the front surface of the penetrating portion 13a. The vertical height of the penetrating portion 13 a is set to a size that prevents the light projecting element holder 3 and the coil 14 from contacting the yoke 12 even when the leaf spring 6 is displaced.

  A plate-like magnet 15 is attached at a position facing the coil 14 on the back surface of the back yoke 12b. The magnetic poles of the magnet 15 are arranged so that a vertical force acts on the holder driving member 13 and the light projecting element holder 3 through the current when a current is passed through the coil 14.

  The yoke 12 and the magnet 15 form a closed magnetic circuit, and together with the holder driving member 13 and the coil 14 constitute a first driving means for driving the light projecting element holder 3 with respect to the base member in a predetermined direction.

  A coil 16 having an opening surface parallel to the vertical direction and the horizontal direction is provided on the back surface of the central portion of the lens holder 5. Around the coil 16, a yoke 17 formed using the same material as the yoke 12 is provided. The yoke 17 has a main yoke 17a having a U-shaped cross section with an opening at the front, and a flat back yoke 17b fitted into the opening of the main yoke 17a, and has a closed shape. The lens holder 5 passes through the hollow portion of the yoke 17. A plate-like magnet 18 is attached at a position facing the coil 16 on the inner peripheral surface of the main yoke 17a. The magnetic poles of the magnet 18 are arranged so that a force in the left-right direction acts on the lens holder 5 through the current when a current is passed through the coil 16.

  The yoke 17 and the magnet 18 form a closed magnetic circuit, and constitute a second driving means for driving the lens holder 5 with respect to the base plate 8 together with the coil 16. The direction in which the second driving means drives the lens holder 5 is different from the direction in which the first driving means drives the light projecting element holder 3.

  Between the back surface of the back yoke 12b and the front surface of the main yoke 17a, a flat plate-like connecting member 19 is provided for fixing and connecting the two.

  The light projecting element holder 3, the lens holder 5, the support member 11, the holder driving member 13, and the connecting member 19 are formed using a synthetic resin such as polycarbonate having excellent impact strength, for example. When forming the light projecting element holder 3 and the lens holder 5, a leaf spring, a coil, and a lens may be insert-molded. By performing such insert molding, the optical scanning actuator 1 can be easily assembled with high accuracy.

  In the optical scanning actuator 1 having the above configuration, at least a part of the plurality of leaf springs 6 has a function of an electrical joining member. That is, the plurality of leaf springs 6 form part of the wiring that connects the light projecting circuit that drives the light projecting element 2 and the light projecting element 2, or the control circuit that causes the coil 14 to pass current and the coil 14 That form part of the wiring that connects the two. For this reason, it is not necessary to use FPC or tape wiring as power supply wiring to the light projecting element 2 or the coil 14. In this manner, by causing at least a part of the plurality of leaf springs 6 to function as an electrical connection member for power feeding, it is possible to reduce the number of parts and reduce the cost. The light projecting circuit and the control circuit described above can be mounted on the base plate 8. Further, the light projecting circuit may be mounted on the light projecting element holder 3.

  FIG. 4 is a diagram schematically showing a displacement mode of the light projecting element 2 and the light projecting element holder 3, and is a view seen from the direction C of the arrow in FIG. In FIG. 4, the positions of the light projecting element 2, the light projecting element holder 3, and the leaf spring 6 in the state described one above via a downward arrow are indicated by a one-dot chain line. When a current from the control circuit flows through the coil 14, the light projecting element 2 and the light projecting element holder 3 are displaced in the vertical direction by an electromagnetic force generated according to the current. As shown in FIG. 4, the light projecting element 2 and the light projecting element holder 3 are slightly displaced not only in the vertical direction but also in the front-rear direction depending on the deflection of the leaf spring 6, but not in the horizontal direction. Therefore, the center of gravity of the light projecting element 2 and the light projecting element holder 3 always passes through the same plane (a plane parallel to the plane of FIG. 4) when displaced. Therefore, the distance between the light projecting element holder 3 and the base plate 8 changes during the displacement of the light projecting element holder 3, but the direction in which the light projecting element 2 projects light is always constant (in the case of FIG. 4). Is forward).

  FIG. 5 is a diagram schematically showing a displacement mode of the lens holder 5, and is a view seen from the direction of arrow D in FIG. Also in FIG. 5, the positions of the lens holder 5 and the leaf spring 10 in the state described above by a downward arrow are indicated by a one-dot chain line. When a current from the control circuit flows through the coil 16, the lens holder 5 is displaced in the left-right direction by an electromagnetic force generated according to the current. As shown in FIG. 5, the lens holder 5 is slightly displaced not only in the left-right direction but also in the front-rear direction according to the deflection of the leaf spring 10, but not in the vertical direction. Therefore, the center of gravity of the lens holder 5 always passes through the same plane (a plane parallel to the plane of FIG. 5) when displaced. For this reason, the distance between the lens holder 5 and the support member 11 changes during the displacement of the lens holder 5, but the two leaf springs 10 are attached to the left and right ends of the lens holder 5. The front surface (and the back surface) is always kept orthogonal to the front-rear direction. As apparent from FIGS. 4 and 5, the plane through which the center of gravity passes when the lens holder 5 is displaced is orthogonal to the plane through which the center of gravity passes when the light projecting element holder 3 is displaced.

  The laser light projected by the light projecting element 2 held by the light projecting element holder 3 is emitted to the outside when the light projecting lens 4 held by the lens holder 5 is transmitted or refracted. At this time, since the light projecting element holder 3 and the lens holder 5 are independently displaced, the laser light scans the two-dimensional region. This two-dimensional region can be appropriately set by adjusting the maximum displacement amount (corresponding to the amplitude of vibration) of the light projecting element holder 3 and the lens holder 5. For example, when the optical scanning actuator 1 is mounted on a vehicle such as an automobile and an obstacle existing in the traveling direction of the vehicle is detected using reflected light of the emitted laser light, the maximum displacement amount in the vertical direction is exceeded. It is preferable to set the maximum displacement in the left-right direction to be larger. Further, in the case where a vehicle passing through an intersection from an pedestrian bridge or the like is detected by using the optical scanning actuator 1, it is installed obliquely downward so that the front is directed to the center of the intersection, and the maximum in the vertical direction is set. It is preferable to set so that the displacement amount and the maximum displacement amount in the left-right direction are substantially equal.

  According to the first embodiment of the present invention described above, since the light projecting element 2 is directly displaced and the light projecting lens 4 is independently displaced in a different direction from the light projecting element 2, the structure is simple. However, the number of parts is small, and the degree of freedom in layout is high. Moreover, since the light projecting element holder 3 and the lens holder 5 can be driven independently, it is not necessary to generate a large driving force for any one of the holders for structural reasons. Therefore, good driving efficiency can be realized.

  Further, according to the first embodiment, since the light projecting element 2 is attached to the light projecting element holder 3 and directly displaced, the distance between the light projecting element 2 and the light projecting lens 4 can be reduced. it can. As a result, the maximum displacement during operation of the light projecting element 2 and the light projecting element holder 3 can be reduced, and the optical scanning actuator 1 can be reduced in size and power can be saved.

  Further, according to the first embodiment, the plane through which the center of gravity passes when the light projecting element holder 3 is displaced is orthogonal to the plane through which the center of gravity passes when the lens holder 5 is displaced. It is possible to uniformly scan a two-dimensional region with laser light.

  Further, according to the first embodiment, at least a part of the plurality of leaf springs 6 functions as an electrical connection member for power supply, thereby reducing the number of parts required for power supply to the light projecting element 2 and the coil 14. Thus, cost reduction can be realized.

  Further, according to the first embodiment, since the light projecting element holder 3 and the lens holder 5 can be assembled independently, the assembly is easy as compared with the prior art described in Patent Document 1, and High-precision alignment is possible.

  FIG. 6 is a perspective view showing a configuration of an optical scanning actuator according to a modification of the first embodiment of the present invention. The optical scanning actuator 20 shown in FIG. 5 returns to the laser light (scanning light) emitted from the light projecting lens 4 being reflected by an external object in addition to the configuration of the optical scanning actuator 1 described above. A condensing lens 21 (condensing optical element) that condenses the reflected light and transmits or refracts the collected reflected light is provided. The condensing lens 21 is held by the lens holder 5 side by side with the light projecting lens 4. The normal direction of the center of the surface of the projection lens 4 and the normal direction of the center of the surface of the condensing lens 21 are substantially parallel. As shown in FIG. 6, it is more preferable that the surface area of the condensing lens 21 is larger than the surface area of the light projecting lens 4 because the reflected light can be more reliably condensed.

  The reflected light that is transmitted or refracted by the condensing lens 21 and emitted backward is received by a light receiving element such as a photodiode. The installation position of the light receiving element may be appropriately determined according to the position of the condensing lens 21.

  According to the modification of the first embodiment of the present invention described above, the lens holder 5 holds the light projecting lens 4 and the condensing lens 21 side by side in the vicinity of each other. The condensing lens 21 can collect the reflected light of the emitted scanning light with high accuracy.

(Embodiment 2)
FIG. 7 is a perspective view showing the configuration of the optical scanning sensor according to Embodiment 2 of the present invention. FIG. 8 is a partial cross-sectional view taken along the line EE of FIG. The optical scanning sensor 31 shown in these drawings emits a light projecting element 2 (light projecting means) such as a laser diode that projects laser light and the laser light projected by the light projecting element 2 to the outside as scanning light. And a light receiving element 33 (light receiving means) such as a photodiode for receiving the reflected light that is reflected by the external object and returned by the scanning light emitted from the optical scanning actuator 32. In the following description, the light beam direction of the laser light projected by the light projecting element 2 is assumed to be the front. Further, the vertical direction and the horizontal direction are determined as shown in FIG. 7 with reference to the front viewed from the light projecting element 2. 7 and 8, the same components as those of the optical scanning actuator 1 according to the first embodiment are denoted by the same reference numerals as those in FIGS. 1 and 2.

  The optical scanning actuator 32 includes a light projecting / receiving element holder 34 (first holding member) that holds the light projecting element 2 and the light receiving element 33, and a light projecting lens that transmits or refracts the laser light projected by the light projecting element 2. 4 (light projecting optical element) and a lens holder 5 are held side by side with the light projecting lens 4, and the reflected light of the laser light emitted from the light projecting lens 4 is collected, and this collected reflected light is collected. And a condensing lens 21 (condensing optical element) that transmits or refracts light.

  One end of two leaf springs 35, 36 extending in the front-rear direction is attached to the light projecting / receiving element holder 34, and is supported in a cantilever manner by the leaf springs 35, 36. The leaf spring 35 is located behind the light projecting element 2, while the leaf spring 36 is located behind the light receiving element 33. The other end of the leaf spring 35 is fixed to a base plate 38 made of a printed circuit board (PWB) via a leaf spring holder 37. The other end of the leaf spring 36 is fixed to the base plate 38 via a leaf spring holder 39. The plate springs 35 and 36 can be bent in the vertical direction with respect to the base plate 38 because the normal direction of the main surface is parallel to the vertical direction in a state where the plate springs 35 and 36 are not bent (as shown in FIG. 7). Therefore, the light projecting / receiving element holder 34 is supported by the plate springs 35, 36 so as to be vertically displaceable with respect to the base plate 38. The leaf springs 35, 36 connect a base member composed of a base plate 38 and a support member 40 described later and the light projecting / receiving element holder 34, and first support for supporting the light projecting / receiving element holder 34 so as to be displaceable relative to the base member. Configure the means.

  End portions of a leaf spring 10 extending in the front-rear direction are attached to the left and right ends of the lens holder 5 via fixing members 9, respectively. The other end of the leaf spring 10 is attached to the support member 40. The support member 40 is positioned at the left end of the left arm 40b, the left arm 40b extending leftward from the body 40a, the block-shaped body 40a fixed to the base plate 38, and the left end of the lens holder 5. One end of the leaf spring 10 attached to the left arm 40c is attached via the fixing member 9, the right arm 40d extends rightward from the body 40a, and the right arm 40d is positioned at the right end of the lens holder. A right shaft portion 40e to which one end of the leaf spring 10 attached to the right end of 5 is attached via the fixing member 9, and a plurality of boss portions 40f for attaching the left shaft portion 40c and the right shaft portion 40e to the base plate 38, respectively. Have

  The leaf spring 10 can bend in the left-right direction with respect to the base plate 38 because the normal direction of the main surface is parallel to the left-right direction in the unbent state (the state shown in FIG. 7). Therefore, the lens holder 5 is supported by the two leaf springs 10 so as to be displaceable in the left-right direction with respect to the base plate 38.

  A yoke 12 is attached to the body 40a. A part of the holder driving member 41 that transmits a driving force to the light projecting / receiving element holder 34 passes through the hollow portion of the yoke 12. The holder driving member 41 has a substantially flat plate-like through portion 41 a that penetrates the yoke 12, and two fixing portions 41 b that extend backward from the back surface of the through portion 41 a and are fixed to the light projecting / receiving element holder 34. And have. A coil 14 having opening surfaces parallel to the vertical direction and the horizontal direction is provided on the front surface of the penetrating portion 41a. The vertical height of the penetrating portion 41 a is set to a size that prevents the light projecting / receiving element holder 34 and the coil 14 from contacting the yoke 12 even when the plate springs 35, 36 are displaced.

  The magnetic poles of the magnet 15 attached to the back surface of the back yoke 12b are arranged so that a vertical force is applied to the holder driving member 41 and the light projecting / receiving element holder 34 through the current when a current is passed through the coil 14. Yes.

  The yoke 12, the coil 14, the magnet 15, and the holder driving member 41 constitute first driving means for driving the light emitting / receiving element holder 34 in a predetermined direction with respect to the base member constituted by the base plate 38 and the support member 40. To do.

  The light projecting / receiving element holder 34, the support member 40, and the holder driving member 41 are formed using a synthetic resin in the same manner as the lens holder 5.

  FIG. 9 is a diagram schematically illustrating a functional configuration of an object detection apparatus that includes the optical scanning sensor 31 having the above-described configuration and detects an object within a predetermined range. In addition to the optical scanning sensor 31, the object detection apparatus 200 shown in the figure photoelectrically converts the reflected light received by the light projecting circuit 201 and the light receiving element 33 that drive the light projecting element 2 to emit laser light. A light receiving circuit 202 to output, a detection unit 203 (detection means) for detecting an object using a signal based on reflected light received by the light receiving element 33, an input unit 204 to which information is input, and information including an object detection result is output. An output unit 205, a storage unit 206 that stores information such as an object detection result and detection conditions, and a control circuit 207 (control means) that controls the operation of the object detection device 200 are provided. The light projecting circuit 201, the light receiving circuit 202, and the control circuit 207 can be mounted on the base plate 38.

  The control circuit 207 forms a circuit individually with each of the coils 14 and 16 and has a function of flowing different currents to the coils 14 and 16. When current flows from the control circuit 207 to the coils 14 and 16, respectively, the light projecting / receiving element holder 34 is displaced in the vertical direction and the lens holder 5 is displaced in the left and right direction by electromagnetic force generated according to the flowed current.

  When the leaf springs 35 and 36 have the same shape and physical properties, the mode of displacement of the light projecting / receiving element holder 34 is the same as the mode of displacement of the light projecting element holder 3 in the first embodiment described above ( (See FIG. 4). In this case, the light projecting element 2 and the light receiving element 33 are always directed in a certain direction. Further, the displacement mode of the lens holder 5 is the same as that of the first embodiment described above (see FIG. 5). The leaf springs 35 and 36 may have different shapes and physical properties.

  In the second embodiment, the maximum displacement amounts of the light projecting / receiving element holder 34 and the lens holder 5 can be appropriately set according to the application of the object detection device 200.

  According to the second embodiment of the present invention described above, since the light projecting element 2 is directly displaced and the light projecting lens 4 is independently displaced in a direction different from that of the light projecting element 2, the structure is simple. However, the number of parts is small, and the degree of freedom in layout is high. Further, since the light projecting / receiving element holder 34 and the lens holder 5 can be driven independently, it is not necessary to generate a large driving force for any one of the holders for structural reasons. Therefore, good driving efficiency can be realized.

  According to the second embodiment, the plane through which the center of gravity passes when the light projecting / receiving element holder 34 is displaced is orthogonal to the plane through which the center of gravity passes when the lens holder 5 is displaced. It is possible to uniformly scan a two-dimensional region with laser light.

  According to the second embodiment, the light projecting / receiving element holder 34 holds the light projecting element 2 and the light receiving element 33, while the lens holder 5 holds the light projecting lens 4 and the condensing lens 21. Therefore, it is possible to realize an optical scanning sensor with a small number of parts.

  Further, according to the second embodiment, since the light projecting element 2 and the light receiving element 33 are attached to the light projecting / receiving element holder 34 and directly displaced, the distance between the light projecting element 2 and the light projecting lens 4 and The distance between the light receiving element 33 and the condensing lens 21 can be reduced. As a result, the maximum displacement during operation of the light projecting element 2, the light receiving element 33, and the light projecting / receiving element holder 34 can be reduced, and the optical scanning actuator 32 can be reduced in size and power can be saved.

  Further, according to the second embodiment, the light projecting / receiving element holder 34 and the lens holder 5 can be assembled independently, so that the assembly is easier than the conventional technique described in Patent Document 1, and High-precision alignment is possible.

  In the second embodiment, the first and second support means are configured by using a plurality of plate springs 6 instead of the plate springs 35 and 36, and a plurality of plates are formed as in the first embodiment. At least a part of the spring 6 may function as an electrical joining member for power feeding. In this case, the light projecting circuit 201 and the light receiving circuit 202 may be mounted on the light projecting / receiving element holder 34.

  The best mode for carrying out the present invention has been described so far, but the present invention should not be limited only by the above-described two embodiments. For example, the plane through which the center of gravity passes when the first holding member is displaced may be different from the plane through which the center of gravity passes when the second holding member is displaced, and may not be orthogonal.

  Further, a mirror may be applied as the light projecting means instead of the lens. In this case, the light projecting means may be provided obliquely above the front of the mirror.

  Moreover, you may implement | achieve a 1st support means and a 2nd support means with elastic members (for example, wire spring) other than a leaf | plate spring.

  In addition, light other than laser light can be used as scanning light.

  Thus, the present invention can include various embodiments and the like not described herein, and various design changes and the like can be made without departing from the technical idea specified by the claims. It is possible to apply.

  The present invention is useful for a scanning laser radar device, a laser scanner, a laser printer, a laser marker, an object monitoring device, and the like, and is particularly suitable for an on-vehicle scanning laser radar device.

DESCRIPTION OF SYMBOLS 1, 20, 32 Optical scanning actuator 2 Light projecting element 3 Light projecting element holder 4 Light projecting lens 5 Lens holder 6, 10, 35, 36 Leaf spring 6a Protrusion 7, 37, 39 Leaf spring holder 8, 38 Base plate 9 Fixing member 11, 40 Support member 11a, 40a Body portion 11b, 40b Left arm 11c, 40c Left shaft portion 11d, 40d Right arm 11e, 40e Right shaft portion 11f, 40f Boss portion 12, 17 Yoke 12a, 17a Main yoke 12b , 17b Back yoke 13, 41 Holder drive member 13a, 41a Through part 13b, 41b Fixed part 14, 16 Coil 15, 18 Magnet 19 Connecting member 21 Condensing lens 31 Optical scanning sensor 33 Light receiving element 34 Light emitting / receiving element holder 200 Object detection device 201 Light projection circuit 202 Light reception circuit 203 Detection unit 20 Input unit 205 output unit 206 storage unit 207 control circuit

Claims (14)

An optical scanning actuator that scans a predetermined range with light projected by a light projecting means,
A base member fixed to an attachment target;
A first holding member for holding the light projecting means;
First support means for connecting the base member and the first holding member, and supporting the first holding member displaceably with respect to the base member;
First driving means for driving the first holding member in a predetermined direction with respect to the base member;
A light projecting optical element that is located on a side where the light projected by the light projecting unit travels, and that transmits, refracts, or reflects the light projected by the light projecting unit;
A second holding member for holding the light projecting optical element;
Second driving means for driving the second holding member in a direction different from a direction in which the first driving means drives the first holding member;
A second support means for connecting the base member and the second holding member and supporting the second holding member displaceably with respect to the base member;
An optical scanning actuator comprising:   The plane through which the center of gravity of the first holding member passes when the first holding member is displaced is perpendicular to the plane through which the center of gravity of the second holding member passes when the second holding member is displaced. The optical scanning actuator according to claim 1.   3. The optical scanning actuator according to claim 1, wherein each of the first and second support means includes a leaf spring.   The first support means includes a plurality of plate springs, and at least a part of the plurality of plate springs is electrically connected to the light projecting means or the first drive means. 3. The optical scanning actuator according to 3.   Condensing light that is held by the second holding member side by side with the light projecting optical element, and that reflects the light reflected from the outside and returned from the outside, and transmits, refracts, or reflects the light. The optical scanning actuator according to claim 1, further comprising: an optical element.   6. The optical scanning actuator according to claim 5, wherein each of the first and second support means includes a leaf spring. The first holding member is
6. The optical scanning actuator according to claim 5, further comprising a light receiving means for receiving reflected light emitted from the condensing optical element.   The first support means includes a plurality of plate springs, and at least a part of the plurality of plate springs is electrically connected to the light projecting means, the light receiving means, or the first drive means. The optical scanning actuator according to claim 7.   9. The optical scanning actuator according to claim 8, wherein the second support means includes a leaf spring.   10. The optical scanning actuator according to claim 5, wherein a surface area of the condensing optical element is larger than a surface area of the light projecting optical element. 11.   11. The optical scanning actuator according to claim 5, wherein the condensing optical element is a lens.   The optical scanning actuator according to claim 1, wherein the light projecting optical element is a lens. An optical scanning actuator according to any one of claims 7 to 9,
The light projecting means;
The light receiving means;
An optical scanning sensor comprising: An optical scanning sensor according to claim 13,
Control means for controlling the driving of the first and second driving means;
Detecting means for detecting an object based on reflected light received by the light receiving means;
An object detection apparatus comprising:

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