JP5329200B2 - Device container - Google Patents

Description

  The present invention relates to a device housing apparatus that houses a device in a device case, and more particularly to a device housing state detection mechanism of a device housing apparatus that can detect an abnormality in the device housing state of a device case that houses a device.

  A rectangular substrate such as a CSP (Chip Size Package) in which a plurality of integrated circuits such as IC and LSI are formed and packaged by a resin is divided into individual devices by a cutting device such as a dicing device and accommodated in a device case. In this state, it is transported to the electronic device assembly process. Each transferred device is mounted on various electronic devices in an assembly process.

  Generally, a dedicated device housing apparatus is used for housing a device in a device case. However, in Japanese Patent Laid-Open No. 2000-208445 or Japanese Patent Laid-Open No. 2006-156777, a rectangular shape in which a cutting apparatus and a device housing apparatus are integrated. A substrate dividing apparatus has been proposed.

In general, a device case in which these devices are accommodated has a plurality of meshes, and the pickup means of the device accommodating device sucks and holds the devices from the upper surface. In the cell case. The device cases in which the devices are accommodated in all the cells are stacked and temporarily stored, and are carried out to the next mounting process.
JP 2000-208445 A JP 2006-156777 A

  However, when the device is accommodated in the device case, another device is accommodated in such a manner that a part of the device rides on the square where the device is already accommodated due to the positioning error between the pickup means and the device case. Sometimes happened.

  If another device is housed in a form in which a part of the device rides on top of a cell that already houses the device, another device case is required when stacking and temporarily storing the device case There is a problem in that it may be pushed up to scatter the accommodated device.

  This invention is made | formed in view of such a point, The place made into the objective is providing the device accommodating apparatus which can prevent scattering the device accommodated in the device case.

According to the present invention, a plurality of first and second device casing capable of accommodating device during respective square has a square, a device to pick up the device in each square of the first and second device casing pickup means for receiving a first case frame to which the first device case is accommodated, and a second case frame second device casing is accommodated disposed on said first case frame slidably, A device housing apparatus comprising a first moving means for horizontally moving the first case frame and a second moving means for horizontally moving the second case frame , wherein one side portion of the second case frame fixedly provided on the outer side, a first light emitting part in which the optical path of the emitted light is positioned to pass through within a predetermined distance from the upper surface of the second case frame, the opposite to the first light emitting portion second fixedly to the outside of the other side of the case frame Vignetting, a first light receiving portion positioned to receive the emitted light of the first light emitting unit, the normal and abnormal accommodating state of the first is connected to the light receiving unit in said second device case of the device A first device housing state detection mechanism including a first determination unit for determining; and a lower side of one side of the second case frame, and an optical path of the emitted light is an upper surface of the first case frame A second light emitting part positioned so as to pass within a predetermined distance from the first light emitting part, and attached to a lower side of the other side part of the one end side of the second case frame so as to face the second light emitting part, A second light-receiving unit positioned to receive light emitted from the two light-emitting units, and a second determination for determining normality and abnormality of the housing state of the device connected to the second light-receiving unit in the first device case and parts, the second device receiving status detecting mechanism including, further comprising, said second transfer By the second case frame moves in the first case frame side by means, said first and second determination means for receiving state into the second device casing and the first device casing of the device abnormality A device accommodating apparatus is provided that outputs an abnormality signal when it is determined and determined to be abnormal.

  ADVANTAGE OF THE INVENTION According to this invention, the device accommodating apparatus which can prevent scattering the device accommodated in the device case is provided. That is, by moving the device case containing the device slightly below the light emitting unit and the light receiving unit disposed so as to face each other, a part of the device is placed on the cell already containing the device. When another device is accommodated in the raised form, the light emitted from the light emitting unit is blocked by the device that has climbed up and is not received by the light receiving unit, so that it is possible to detect an accommodation failure.

  Referring to FIG. 1, there is shown a perspective view of a rectangular substrate dividing apparatus 2 that cuts the dividing lines 6 formed in a lattice shape on a rectangular substrate 4 as shown in FIG. Yes. The rectangular substrate 4 shown in FIG. 2 is partitioned by the planned dividing lines 6 to form a plurality of devices.

  In the example shown in the figure, the device is constituted by a first device row D1 to an eighth device row D8, and each device row is constituted by three devices and two end members 8 at both ends. An unnecessary end (end material) 10 is formed on the outer peripheral side of the first device row D1 and the eighth device row D8. The end material 8 and the unnecessary end portion 10 are finally discarded.

  A protective tape T for device protection is attached to the back surface of the rectangular substrate 4. The rectangular substrate 4 can be divided into individual devices by cutting the division line 6 using the dividing apparatus 2 shown in FIG. Examples of the rectangular substrate 4 include a CSP and a glass substrate.

  Referring again to FIG. 1, the dividing apparatus 2 cuts the rectangular substrate 4 with the protective tape T attached to the back surface in a vertical and horizontal manner and divides the rectangular substrate 4 into individual devices, and the protective tape T from the rectangular substrate 4. It consists of a tape stripping area 14 to be stripped and a device housing section 16 for housing individual devices in a device case.

  In the cutting charge area 12, a cassette table 18 on which a cassette containing a plurality of rectangular substrates is placed, unloading means 20 for unloading the rectangular substrates from the cassette table 18, and fixed on the upper surface of the rotary base 21 are unloaded. A chuck table (holding table) 22 that holds and rotates a rectangular substrate, and a cutting blade 24 that cuts the rectangular substrate held on the chuck table 22 along the planned division line 6 and divides the rectangular substrate into individual devices. Means 26 and cleaning means 28 for cleaning the cut rectangular substrate are provided. In the cutting charge area 12, dicing by cutting the rectangular substrate and cleaning of the rectangular substrate after cutting are performed.

  The unloading means 20 is movable in the Y-axis direction, and unloads the rectangular substrate from the cassette C1 or C2 placed on the cassette table 18. The cassette table 18 can be moved up and down in the Z-axis direction together with a cassette positioning means 30 described later, and two cassettes C1 and C2 are detachably mounted thereon.

  Below the cassette table 18, cassette positioning means 30 capable of selectively positioning a rectangular substrate accommodated in any of the cassettes at a position where it can be unloaded by the unloading means 20, is provided. It is also configured to be movable in the direction. Thereby, the rectangular substrates stored in the respective cassettes C1 and C2 can be efficiently carried out one after another.

  As shown in FIG. 3, between the cassette table 18 and the unloading means 20 above the chuck table 22, a pair of opening / closing members 32 that are long in the Y-axis direction and have an L-shaped cross section face each other. Constituting posture correcting means 34 is provided.

  Each of the pair of opening / closing members 32 includes a bottom portion 32a and a side portion 32b, moves in a direction toward or away from each other, forms a closed state in the approached state, and forms a first open state in the separated state. A second open state is formed.

  When the rectangular substrate is unloaded from the cassette C1 or the cassette C2, the posture correcting means 34 is in the first open state, and the unloaded rectangular substrate is placed on the two bottom portions 32a. That is, the first open state is a state where the rectangular substrate is opened to such an extent that the rectangular substrate can be carried out, and is open to the extent that the rectangular substrate does not fall downward.

  On the other hand, the second open state is a state in which the rectangular substrate is opened to the extent that it can move between the pair of opening and closing members 32 in the vertical direction. When the pair of opening / closing members 32 approach each other and are in the closed state, the posture of the rectangular substrate is corrected, is aligned at a certain position, and faces a predetermined direction.

  When the cassette table 18 is positioned at a predetermined height, the carry-out means 20 moves in the + Y-axis direction, and the holding unit 36 holds the rectangular substrate accommodated in the cassette C1 or the cassette C2.

  Then, when the unloading means 20 moves in the −Y-axis direction in a state where the opening / closing member 32 is in the first open state, the bottom 32a of the opening / closing member 32 is together with the protective tape T attached to the back surface of the rectangular substrate 4. Slide up.

  When the rectangular substrate 4 is moved to a position just above the chuck table 22, the movement of the unloading means 20 is stopped and the gripping state by the gripping portion 36 is released, and the rectangular substrate 4 is placed on the two bottom portions 32a. To do. In this state, the pair of opening / closing members 32 approach each other to be in a closed state, and the posture of the rectangular substrate 4 is corrected.

  A first transport unit 38 is disposed directly above the chuck table 22. The first transport unit 38 includes a holding unit 40 in which a plurality of suction pads 40 a communicating with a suction source are fixed to the lower part, and when the rectangular substrate 4 is placed on the bottom 32 a of the opening / closing member 32, The holding part 40 descends and the surface of the rectangular substrate 4 is sucked by the suction pad 40a.

  Then, after the pair of opening / closing members 32 is in the first open state, the holding unit 40 is raised while the rectangular substrate 4 is attracted to lift the rectangular substrate 4, and then the pair of opening / closing members 32 is moved to the second state. When the rectangular substrate 4 is placed on the chuck table 22 by lowering the holding unit 40 in the open state and the suction by the suction pad 40 a is released, the protective tape T adhered to the back surface of the rectangular substrate 4 is sucked to the chuck table 22. The rectangular substrate 4 is also held by the chuck table 22.

  The chuck table 22 is configured to be rotatable and movable in the X-axis direction, and a division planned line 6 (see FIG. 2) formed on the rectangular substrate is detected above the movement path of the chuck table 22. An alignment means 42 is disposed.

  When the rectangular substrate 4 is held on the chuck table 22, the chuck table 22 moves in the + X axis direction, and the rectangular substrate 4 is positioned immediately below the alignment means 42. The alignment unit 42 includes an imaging unit 44, and the alignment unit 42 detects the scheduled division line 6 by pattern matching or the like between an image acquired while the imaging unit 44 moves in the Y-axis direction and an image stored in advance. .

  Referring to FIG. 1 again, on the + X axis direction side with respect to the alignment means 42, a cutting blade 26 that includes a cutting blade 24 that rotates at high speed and is movable in the Y axis direction and the Z axis direction is disposed.

  The cutting means 26 is configured integrally with the imaging unit 44, and the cutting blade 24 is positioned on the extended line of the imaging unit 44 in the + X axis direction. When the planned dividing line 6 is detected by the alignment means 42, the alignment of the planned dividing line 6 and the cutting blade 24 in the Y-axis direction is automatically achieved.

  In this way, when the Y axis direction alignment between the division line 6 to be cut and the cutting blade 24 is performed, the rectangular substrate 4 held by the chuck table 22 moves in the + X axis direction. At the same time, the cutting means 26 descends while the cutting blade 24 rotates at a high speed, and the cutting blade 24 that rotates at a high speed cuts into the detected division line 6, and the division division line 6 is cut.

  When the planned dividing lines 6 are sequentially cut while indexing and feeding the cutting blade 24 in the Y-axis direction by the pitch of the planned dividing lines, all the planned dividing lines 6 in the same direction are cut. Further, when the same cutting is performed after the chuck table 22 is rotated 90 degrees and the rectangular substrate 4 is rotated 90 degrees, all the division lines 6 are cut and divided into individual devices.

  The rectangular substrate 4 that has been divided is transported to the cleaning means 28 by the second transport means 46, where it is cleaned and spin-dried. For the detailed configuration of the cleaning means 28, the content disclosed in Patent Document 2 is incorporated as a reference in this specification, so refer to Patent Document 2.

  The rectangular substrate 4 that has been cleaned and spin-dried by the cleaning means 28 is transported to the tape peeling mechanism 51 disposed in the tape peeling responsible area 14 by the third transport means 48.

  As shown in FIG. 4, the tape peeling mechanism 51 is a temporary placement table 52 on which a rectangular substrate 4 that has been cleaned and dried after being divided into individual devices is temporarily placed, and a table on which the devices are placed and picked up. Device pick-up table 54 and device transfer means 56 for transferring a device from temporary placement table 52 to pick-up table 54 while peeling off protective tape T attached to the back surface of rectangular substrate 4 are provided.

  Above the temporary placement table 52, a pusher 58 for moving the cut rectangular substrate 4 with the protective tape T attached thereto in the + Y-axis direction is disposed. On the + Y-axis direction side of the pusher 58, a pressing roller 60 is provided that presses the rectangular substrate 4 placed on the temporary placement table 52 from above and sandwiches it with the temporary placement table 52.

  The pickup table 54 includes a first table 54a and a second table 54b. The first table 54a is disposed so as to be movable in the Y-axis direction in the area between the temporary placement table 52 and the second table 54b, and approaches the temporary placement table 52 or approaches the second table 54b. be able to.

  Above the pickup table 54, a device moving means 62 for moving a device placed on the first table 54a to the second table 54b is disposed. Further, below the second table 54b on the + Y-axis direction side, an end material storage portion 64 that stores the end materials 8 and 10 (see FIG. 2) on the outer periphery of the diced rectangular substrate 4 is disposed. ing. Further, below the temporary table 52, a protective tape housing portion 66 for housing the protective tape T to be discarded is disposed.

  The device moving unit 62 includes a horizontal moving unit 68 that horizontally moves in the Y-axis direction, a lifting unit 70 that is supported by the horizontal moving unit 68 so as to be able to move up and down in the Z-axis direction, and a first fixed unit that is fixed to the tip of the lifting unit 70. It is comprised from the extrusion part 72 which slides a device and an end material on the table 54a or the 2nd table 54b, and extrudes to + Y-axis direction.

  The extruding unit 72 includes a device extruding unit 72a that extrudes a device placed on the first table 54a in the + Y-axis direction and moves the device to the second table 54b, and an end material remaining on the second table 54b. The end material extruding portion 72b is disposed in the end material accommodating portion 64.

  In the tape peeling mechanism 51 configured as described above, the rectangular substrate 4 placed on the temporary placement table 52 is pushed in the + Y-axis direction by the pusher 58 of the device transfer means 56 while holding the rectangular substrate 4 at a gripping portion (not shown). By gripping the defective end portion 10 together with the protective tape T and pulling it downward, the protective tape T is peeled off from the rectangular substrate 4, and the first device row D1 is first placed on the first table 54a.

  Note that details of the tape peeling operation of the tape peeling mechanism 51 are described in detail in the above-mentioned Patent Document 2, and therefore, in order to address the contents as a reference in this specification, refer to Patent Document 2. I want.

  The first device row D1 on the first table 54a is pushed in the + Y-axis direction by the device pushing portion 72a of the pushing portion 72, and transferred from the first table 54a to the second table 54b as shown in FIG. The

  Referring to FIG. 5, the tape peeling mechanism 51 includes a support member 74 that is fixedly disposed above the pickup table 54. The support member 74 supports a pickup unit 76 that picks up the device D placed on the second table 54 b and conveys it to the device case 84.

  The pickup means 76 has a support part 78 and a suction part 80 fixed to the lower surface of the support member 74, and is movable in the X-axis direction and the Z-axis direction. An imaging means 82 composed of a CCD camera or the like is attached to the pickup means 76.

  A device case 84 for accommodating a non-defective product is accommodated in the first case frame (non-defective case frame) 86 so as to be able to be taken in and out, and a device case for accommodating a defective product in the second case frame (defective product case frame) 88. A frame 84 is accommodated in a removable manner.

  Next, the configuration of the device accommodating area 16 will be described with reference to FIG. A device case storage unit 90 is disposed in the device accommodation area 16. The device case storage unit 90 includes an empty device case storage unit 92 that stores an empty device case 84, a non-defective device case storage unit 94 that stores a non-defective device case 84a that stores non-defective devices, and a defective device. A defective device case storage unit 96 for storing the stored defective device case 84b is included.

  In the empty device case storage unit 92, the non-defective device case storage unit 94, and the defective device case storage unit 96, a plurality of device cases 84 can be stored in the vertical direction.

  Reference numeral 17 denotes a device storage device, which includes device case positioning means 98 for taking out the device case 84 from the empty device case storage 92 and positioning the device case at a device storage position where the device D picked up by the pickup means 76 can be stored. Yes.

  The device case positioning means 98 includes first moving means 106 that horizontally moves the first case frame 86 and second moving means 108 that horizontally moves the second case frame 88. The first case frame 86 and the second case frame 88 are arranged at different heights, and the second case frame 88 is configured to be slidable on the first case frame 86.

  Immediately under each of the empty device case storage unit 92, the non-defective device case storage unit 94, and the defective device case storage unit 96 are a first elevating plate 100, a second elevating plate 102, and a third elevating plate 104, respectively. It is arranged. Device cases 84 can be placed on the first lifting plate 100, the second lifting plate 102, and the third lifting plate 104, respectively.

  Of the plurality of device cases 84 stored in the empty device case storage unit 92, the lowermost device case 84 is supported by the projecting piece 92a so as not to fall, and thereby the upper side of the device case 84 is stored. A device case 84 is also supported. The protruding piece 92a can be moved in and out, and the support state of the device case 84 is released when the protruding piece 92a is immersed.

  The non-defective device case storage unit 94 and the defective device case storage unit 96 are also provided with protruding pieces 94a and 96a having the same function, and are supported by a plurality of non-defective device case 84a stacked by the protruding pieces 94a. A plurality of defective device cases 84b stacked by the protruding pieces 96a are supported.

  Reference numeral 110 denotes a device housing state detection mechanism, which includes a first detection mechanism 112 that is fixedly disposed, and a second detection mechanism 114 that is attached to the lower side of one end of the second case frame 88.

  Each of the first and second detection mechanisms 112 and 114 includes a light emitting element, a light receiving element disposed to face the light emitting element, and a determination unit that determines the accommodation state of the device connected to the light receiving element.

The first detection mechanism 112 is fixedly disposed on the outer side of one side of the second case frame 88, and the optical path of the emitted light is slightly higher than the upper surface of the second case frame 88 as shown in FIG. And a light receiving element that is fixedly disposed outside the other side portion of the second case frame 88 and receives light emitted from the light emitting element 112a.

The second detection mechanism 114 is attached to the lower side of one end of the second case frame 88 and is positioned so that the optical path of the emitted light is slightly higher than the upper surface of the first case frame 86 as shown in FIG. The light emitting element 114a and the light receiving element attached to the lower side of one end of the second case frame 88 so as to face the light emitting element 114a.

  Hereinafter, the operation of the above-described device accommodation state detection mechanism will be described with reference to FIG. It is assumed that the non-defective device D is accommodated in each cell of the first case frame 86 and the defective device D is accommodated in each cell of the second case frame 88.

  As shown in FIG. 7A, when the second case frame 88 is moved horizontally as indicated by the arrow A by the second moving means 108, the first detection mechanism 112 is fixedly disposed. In the case where a defective device is neatly accommodated in each cell of the device case 84 accommodated in the case frame 88, the light emitted from the light emitting element 112a can be received by the light receiving element. The connected determination part determines with it being a normal accommodation state.

  On the other hand, when another device is accommodated in a form in which a part of the device rides on the cell where the device is already accommodated, the emitted light from the light emitting element 112a is blocked by the device that has climbed, Since the light receiving element does not receive the light, the determination unit connected to the light receiving element can determine that the housing state is abnormal.

  As shown in FIG. 7B, when the second case frame 88 is further horizontally moved in the A direction, the second case frame 88 is moved horizontally while partially overlapping the first case frame 86. Therefore, when a non-defective device is neatly accommodated in each cell of the device case 84 accommodated in the first case frame 86, the light emitted from the light emitting element 114a of the second detection mechanism 114 is received by the light receiving element. Can be received, and it can be determined that the housing state is good.

  On the other hand, when another device is accommodated in a form in which a part of the device rides on the cell that already accommodates the device, the emitted light from the light emitting element 114a is blocked by the device that has climbed up. Since no light is received by the light receiving element, it is possible to detect an abnormality in the device accommodation state. When an abnormality is detected, an abnormality signal is output and a warning is issued with a buzzer or the like.

  In the embodiment described above, the first detection mechanism 112 and the second detection mechanism 114 are each composed of a light emitting element and a light receiving element, but the present invention is not limited to this. For example, the tip of the optical fiber optically connected to the light emitting element is disposed in place of the light emitting elements 112a and 114a, and the light is emitted from the light emitting side optical fiber at the tip of the optical fiber optically connected to the light receiving element. You may make it receive light.

  The process of housing the device case 84 in the first and second case frames 86 and 88, the storing operation of the non-defective device case 84a in the non-defective device case storage unit 94, and the defective product in the defective device case storage unit 96. The storing operation of the device case 84b is disclosed in detail in Patent Document 2 described above. Therefore, in this specification, since the disclosure of Patent Document 2 is incorporated into the specification as a reference, refer to Patent Document 2 for these operations.

1 is an external perspective view of a rectangular substrate dividing device according to an embodiment of the present invention. It is a perspective view which shows an example of a rectangular substrate. It is a perspective view which shows a part of cutting charge area | region. It is a perspective view which shows a tape peeling charge area | region. It is a perspective view which shows a mode that a non-defective device and a defective device are accommodated in the device case accommodated in the 1st device case frame and the 2nd device case frame, respectively. It is a disassembled perspective view of a device accommodating apparatus. It is explanatory drawing which shows operation | movement of a device accommodation state detection mechanism.

Explanation of symbols

2 Dividing device 4 Rectangular substrate 6 Planned dividing line 8 End material 10 Unnecessary end 12 Cutting area 14 Tape peeling area 16 Device accommodation area 17 Device accommodation apparatus 22 Chuck table 24 Cutting blade 26 Cutting means 28 Cleaning means 42 Alignment means 51 Tape peeling mechanism 52 Temporary placement table 54 Pickup table 54a First table 54b Second table 76 Pickup means 82 Imaging means 84 Device case 86 First case frame (good device case frame)
88 Second case frame (defective device case frame)
92 Empty device case storage unit 94 Non-defective device case storage unit 96 Defective device case storage unit 98 Device case positioning means 110 Device accommodation state detection mechanism 112 First detection mechanism 114 Second detection mechanism

Claims (1)

A plurality of first and second device casing capable of accommodating device during respective square has a square, a pickup means for accommodating the device to pick up the device in each square of the first and second device casing , wherein a first case frame first device case is accommodated, and a second case frame second device casing is accommodated disposed on said first case frame slidably, first case frame A device housing apparatus comprising a first moving means for horizontally moving the second moving means for horizontally moving the second case frame ,
Fixedly provided on the outside of one side of the second case frame, a first light emitting part in which the optical path of the emitted light is positioned to pass through within a predetermined distance from the upper surface of the second case frame,
Opposite the first light emitting portion fixedly provided on the outer side of the other side of the second case frame, a first light receiving portion positioned to receive the emitted light of the first light emitting portion,
A first determining means for determining the normality and abnormality of the receiving state to the first connected to the light receiving unit in said second device case of the device, the first device receiving status detecting mechanism including a
A second light emitting unit attached to the lower side of one side of one end of the second case frame and positioned so that the optical path of the emitted light passes within a predetermined distance from the upper surface of the first case frame;
A second light-receiving part that is attached to the lower side of the other side part of the one end side of the second case frame so as to face the second light-emitting part and is positioned so as to receive light emitted from the second light-emitting part When,
A second device housing state detection mechanism that includes a second determination unit that is connected to the second light receiving unit and determines normality and abnormality of the housing state of the device in the first device case ;
By the second case frame moves in the first case frame side by the second moving means, accommodated to the first and second judging means in the second device casing and the first device case of the device A device housing apparatus that judges an abnormality in a state and outputs an abnormality signal when it is judged as abnormal.

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