JP5327594B2 - Object surface desorbing substance amount measuring apparatus and image forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To use a method for controlling a temperature of a minute area, the so-called MEMS (micro-electromechanical system), based on an integrated circuit fine processing technology, to control the steam density quickly and accurately, and to measure the amount of a substance to be adsorbed by/desorbed from the surface of an object by detecting the steam density in the atmosphere. <P>SOLUTION: An apparatus for detecting the substance to be adsorbed by/desorbed from the surface of the object includes a steam density adjustment means for changing the steam density in the atmosphere near the surface of the object; a steam density measurement means for measuring the steam density in the atmosphere at a plurality of predetermined positions separated from the surface of the object; and a steam density value detection means for detecting each steam density distribution in the atmosphere, based on the respective steam densities measured by the steam density measurement means and detecting the steam density value of the substance which is to be adsorbed by/desorbed from the surface of the object, based on each detected steam density distribution. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

The present invention relates to an object surface desorption substance measuring apparatus and an image forming apparatus, and more particularly a technique for measuring the amount of material desorbed on the object surface to be measured by non-contact.

  The paper naturally evaporates or absorbs moisture due to changes in the surrounding environment, and the moisture may affect the image quality of the image formed on the paper, maintaining stable image quality. Therefore, it is required to measure the amount of desorbed water. In this case, it is necessary to discriminate and measure only the amount of desorbed moisture due to changes in the surrounding environment, other than chemically bound water that is not related to changes in the surrounding environment, among the moisture content of the paper. By detecting and measuring only the amount of desorbed moisture, an effective utilization state corresponding to the characteristics of the amount of desorbed moisture and the amount of desorbed moisture can be obtained. Specifically, the present invention can be applied to control for forming an image on paper with high image quality and the optimum control of the image forming apparatus without the influence of the environment. In addition, the vapor substance desorbed on the object can be applied not only to moisture but also to a solvent, and the object to be desorbed can be applied not only to paper and the surface of the apparatus, but also to an organic material object such as an organic material object or a cell.

  Therefore, conventionally, when a substance adsorbed on the object surface, such as water vapor or organic solvent vapor, is present as vapor in the ambient atmosphere of the object, the state of being adsorbed on the object surface is the state existing as vapor in the ambient atmosphere. It is non-equilibrium. In this case, it is known that vapor is transported between the object surface and the ambient atmosphere, and if this is captured by a humidity sensor or a flow rate sensor, the state adsorbed on the object surface can be measured.

  Furthermore, even if the state of being adsorbed on the surface of the object is in equilibrium with the state existing as vapor in the surrounding atmosphere, that is, in any state, the vapor density is adjusted to be non-equilibrium. In particular, the vapor in the vicinity of the surface of the object is condensed to thereby release the vapor from the surface of the object. Therefore, a technique for measuring the state of adsorbing on the object surface by detecting the vapor density is considered. In addition, image formation equipped with this measuring device is used to measure the water vapor adsorbed on the surface of an image forming medium such as paper and the surface of the image forming device, and to control the formation of a high-quality image independent of the influence of water vapor. Applied to equipment.

  Conventionally, several proposals have been made as techniques for measuring the amount of moisture adsorbed on the object surface. As one of them, Patent Document 1 proposes a moisture content measuring method called a so-called absolutely dry method in which at least an inner surface of a sample dish is a hydrophilic surface to promote heat drying. Specifically, as a method of measuring the moisture content of hygroscopic materials such as paper, the moisture content is measured by the absolute dry method (gravimetric method) in which the paper is heated to measure the evaporated moisture content, or the Karl Fischer moisture measurement method. In a heat-drying type moisture meter that heat-drys the sample in the sample pan from above, it accelerates the drying of the sample, shortens the time required to measure the water content, and also provides measurement accuracy and reproducibility It is intended to improve. In this method, the moisture content of the substance can be weighed when it reaches dryness.

  Patent Document 2 proposes a reflection type optical fiber type infrared moisture meter. Since the infrared moisture meter can optically detect moisture by reflection of infrared rays, it can measure moisture at high speed without contact. Can be done. In addition, because it uses an optical fiber, it can be used in places where the measurement location is narrow and where the temperature changes rapidly. Furthermore, moisture has the property of absorbing a specific wavelength of light (near infrared), and the amount of absorbed light energy (specific wavelength) increases as the amount of water contained in the substance increases. In addition, by irradiating the specimen with a specific wavelength absorbed by moisture and reference light that does not affect moisture, measuring the reflected light, and determining the ratio of these, changes in measurement distance, color, surface condition, disturbance Remove the effects of. In addition, it is necessary to perform a sample test in advance and use the correlation between the moisture content and the moisture meter output value corresponding to the moisture content as a reference. A calibration curve representing the correlation with the absolute value of moisture measured by the absolutely dry method (gravimetric method) or the Karl Fischer method is used.

  Further, in Patent Document 3, two sets of temperature / humidity sensors are provided at predetermined intervals with respect to the measurement surface, the difference between the absolute humidity obtained by the first arithmetic circuit, and both temperature / humidity sensors. There has been proposed a moisture evaporation measuring device that obtains an absolute humidity gradient from the distance difference and displays the evaporation amount. That is, in measuring the amount of water evaporated from the surface of the object, this is an apparatus and method for measuring using the detected amount of moisture in the air with respect to the distance from the object.

  According to Patent Document 4, since the moisture state on the object surface affects the atmosphere around the object surface and appears as a water vapor state in the ambient atmosphere, a change in the density of water vapor is observed in the surrounding atmosphere space. By doing so, the state of condensation in which moisture is transported to the object surface is measured. That is, Patent Document 4 proposes a method for detecting a change in the water vapor density in the atmosphere in the vicinity of the object when the surface of the object is condensed, and an apparatus that can be manufactured by the MEMS technology and can be accurately measured. Specifically, a temperature / humidity sensor is arranged along the transport of gas accompanying adsorption / aggregation on the object surface, and the object surface is measured by measuring the temperature gradient and humidity gradient of the ambient atmosphere with respect to the object surface and changes in the flow state. It is possible to detect the dew condensation behavior and the transpiration behavior of the object surface at a location away from Also, depending on the mechanism of gas transport, the atmospheric state may change with a gentle gradient depending on the transport speed. In such a case, measurement becomes difficult, but the gas transport friction resistance against the surface of the object By providing such a wall surface, a steep gradient can be given to the atmosphere state. Specifically, a slight temperature, for example, about 0.1 ° C. rises in the minute range at the edge of the paper, and the moisture in the minute range evaporates. By measuring the behavior of this transpiration with a temperature / humidity sensor and a flow sensor, the amount of transpiration and temperature can be measured. In this way, the amount of water transpiration from the paper is measured by applying heat to the paper.

Further, Patent Document 5 proposes a method for detecting the amount of moisture adsorbed on the surface of a photoreceptor of an image forming apparatus.
Japanese Patent Application Laid-Open No. 08-043287 Japanese Patent Laid-Open No. 03-010146 Japanese Patent Application Laid-Open No. 06-249796 Japanese Patent Laid-Open No. 2007-086054 JP 2008-185755 A

  However, according to the above-mentioned Patent Document 1, the moisture content of a substance cannot be observed unless waiting until the time of reaching dryness. In addition, when the moisture is evaporated at a high temperature, the moisture is different from the moisture adsorption / desorption under the use temperature, and in some cases, the moisture is bonded to the structure. Furthermore, in order to accurately measure the amount of water adsorbed on the substance, it is necessary not to change the substance temperature. Therefore, since it is heated, it is not suitable for destructive measurement for measuring the moisture content of organic materials and biological substances having a low heat-resistant temperature. Moreover, since it is altered by heating, it is a one-time destructive inspection. In-situ measurement is not possible and in-process measurement is not possible. Therefore, it is required to measure the amount of water adsorbed on the substance at the operating temperature at high speed and with high frequency during the process.

  Further, according to Patent Document 2, the moisture meter that detects moisture using electromagnetic waves similarly using an infrared moisture meter, microwaves, NMR, α-rays, and γ-rays can perform in-situ measurement quickly. However, it is a means for detecting all the water contained in the specimen, and it is not possible to discriminate and measure only the amount of water adsorbed on the substance, excluding chemically bonded water. Therefore, it is required to measure the amount of water adsorbed on the substance.

  Furthermore, according to the above-mentioned Patent Document 3, it is an apparatus for measuring the amount of water evaporation, and in the state where it does not evaporate, the water present on the surface of the object cannot be measured. For example, due to the action of the sheet adsorbing moisture, the moisture density in the surrounding atmosphere may show a constant and stable value regardless of the moisture density adsorbed on the substance. Therefore, even when the water vapor density in the space between the object surface and the object is in an equilibrium condition, it is required to measure the moisture adsorbed on the object.

  According to Patent Document 4, when the transport speed is 0 and the atmosphere state is not inclined, it is difficult to detect the dew behavior (distribution state) and transpiration behavior of the object surface with this method. The amount of adsorbed moisture on the surface of the object without changing the surface temperature and other conditions without adding other heat or other energy to the surface of the object installed in the operating environment. It is desirable to be able to measure the amount of adsorbed substances such as In addition, even if the water vapor density in the space between the object surface and the vicinity of the object is under an equilibrium condition, it is required to measure the moisture adsorbed on the object.

  Further, according to Patent Document 5, the behavior (distribution state) in which the adsorbed moisture of the photosensitive body is evaporated to the nearby space or the behavior of adsorbing the moisture in the nearby space is indicated by the humidity distribution gradient or transient of the nearby atmosphere. The amount of adsorbed moisture on the surface of the photoconductor is measured by measuring the state of the atmosphere that is transported to the surface of the photoconductor without contacting the surface of the photoconductor using a mechanism that measures according to characteristics. In this case, it is desirable that measurement is possible even when the state of the atmosphere transported to the surface of the object is in an equilibrium state and is not transported. Further, since substances adsorbed on the surface of the photosensitive member are contained not only in moisture but also in a nearby atmosphere, it is necessary to discriminate and measure them. Furthermore, there is a problem of a method for measuring the amount of surface adsorption that is affected by slight fluctuations in atmospheric conditions. Therefore, it is necessary to control the atmosphere so as not to cause a change in the atmosphere state.

The present invention has been made to solve these problems, and a method for controlling the temperature of a minute region and a so-called MEMS (Micro Electro Mechanical System) technology using an integrated circuit microfabrication technology are used to quickly and accurately produce steam. An object of the present invention is to provide an object surface desorbing substance amount measuring apparatus and an image forming apparatus capable of measuring the amount of a substance to be desorbed on the object surface by controlling the density and detecting the vapor density of the atmosphere.

In order to solve the above problems, the object surface desorbing substance amount measuring apparatus of the present invention measures the amount of substance adsorbed on the object surface and the amount of substance adsorbed on the object surface. The object surface desorbing substance amount measuring apparatus according to the present invention includes a vapor density adjusting unit that adjusts the vapor density of the atmosphere in the vicinity of the object surface, and the vapor density in the atmosphere at a plurality of predetermined locations separated from the object surface to the atmosphere. a vapor density measuring means for measuring, based on the distance from the object surface of each vapor density and the vapor density measuring means as determined by respective vapor density measuring means, vapor density distribution of the atmosphere in the vicinity portion of the object surface a vapor density distribution calculating means for calculating a, that and a vapor density calculating means for calculating a vapor density of substances to be desorbed to the object surface based on the vapor density distribution calculated by the vapor density distribution calculating means There is a feature. Therefore, by adjusting the vapor density of the atmosphere in the vicinity of the vapor density adjusting means, it is possible to quickly desorb the object surface without changing the temperature state of the object surface, and the vapor density in the atmosphere between the object surfaces The amount of desorbed substance on the object surface can be measured by detecting the distribution of.

  Further, the vapor density adjusting means, the vapor density measuring means, and the vapor density amount detecting means are integrated and mounted in one element, so that a minute area can be integrated at a predetermined minute position using MEMs for temperature control and detection. And can be easily manufactured by mass production with high accuracy.

Further, since the vapor density adjusting means and the vapor density distribution calculating means are arranged through a space-separated portion, a highly accurate measurement value is obtained by not giving a temperature change to the vapor density distribution calculating means. Is obtained.

Further, by providing a gas component selective permeable membrane that discriminates only a specific gas component in at least one of the vapor density adjusting means and the vapor density measuring means, the measurement accuracy for the specific adsorbed substance is increased.

Furthermore, the object surface desorbing substance amount measuring apparatus of the present invention includes vapor density adjusting means for adjusting the vapor density of the atmosphere in the vicinity of the object surface, and vapor in the atmosphere at a predetermined plurality of locations spaced from the object surface to the atmosphere. Vapor density measuring means for measuring the density, each vapor density measured by each of the vapor density measuring means, and each distance from the object surface of each vapor density measuring means, in the vicinity of the object surface when there is an object The first vapor density distribution calculating means for calculating the first vapor density distribution of the atmosphere in the atmosphere, the vapor density of the atmosphere without the object and the separation distance measured by the vapor density measuring means , a second vapor density distribution calculating means for calculating a second vapor density distribution, the surface of the object when there is an object on the basis of the first vapor density distribution and the second vapor density distribution ; And a vapor density calculating means for calculating a vapor density of desorption substances. Therefore, by changing the vapor density of the atmosphere near the vapor density adjusting means, the object surface can be quickly desorbed without changing the temperature state of the object surface, and the vapor density in the atmosphere between the object surfaces By detecting the distribution, the amount of desorbed substance on the object surface can be measured.

The object surface desorbing substance amount measuring apparatus according to the present invention includes a vapor density adjusting means for adjusting the vapor density of the atmosphere at a location near the object surface, and a vapor in the atmosphere at a predetermined plurality of locations spaced from the object surface to the atmosphere. Based on first vapor density measuring means for measuring density, each vapor density measured by each first vapor density measuring means, and each separation distance from the object surface of each first vapor density measuring means, First vapor density distribution calculating means for calculating a first vapor density distribution of the atmosphere at a location near the surface, and a second vapor density for measuring the vapor density in the atmosphere at a plurality of predetermined locations separated from the reference object surface a measuring unit, based on the distance from the object surface of each of the second respective vapor density and the second vapor density measuring means as measured by vapor density measuring means, of the reference object surface near A second vapor density distribution calculating means for calculating a second vapor density distribution of the atmosphere at a location, vapor density of substances to be desorbed to the object surface based on the first vapor density distribution and the second vapor density distribution ; and a vapor density calculating means for calculating a. Therefore, the accuracy is improved by reducing the influence of the disturbance on the atmosphere near the object surface and the flow of the atmosphere near the object surface. Further, the influence of the flow of the atmosphere can be eliminated by subtracting the characteristic value of the vapor density for the reference object surface from the characteristic value of the vapor density for the object surface. Furthermore, the characteristic value of the vapor density for the object surface and the characteristic value of the vapor density for the reference object surface can be obtained simultaneously.

Further, the vapor density adjusting means, the first and second vapor density distribution calculating means, and the vapor density amount calculating means are integrated and mounted in one element, so that a predetermined region is determined using MEMs that control and detect a minute region. And can be easily manufactured by mass production with high accuracy.

In addition, the vapor density adjusting means and the first and second vapor density distribution calculating means are arranged via a space-separated portion so that the first and second vapor density distribution calculating means have a temperature. By giving no change, a highly accurate measurement value can be obtained.

Furthermore, by providing a gas component selective permeable membrane that discriminates only a specific gas component in at least one of the vapor density adjusting means and the first and second vapor density distribution calculating means, the measurement accuracy for a specific adsorbed substance is improved. Rise.

Further, since the vapor density adjusting means is at least one mechanism of temperature control and gas desorption control, rapid temperature control can be performed at a fine location, so that a quick and highly accurate measurement value can be obtained. Further, as the vapor density adjusting means, means for controlling the temperature up and down by a micro-Peltier element or a thin film heater is used, utilizing the temperature dependence of the vapor substance density. Furthermore, when a micro Peltier device is used, the heating and cooling can be made cyclic, so that the vapor density is periodically controlled to achieve more reliable measurement. In addition, efficiency can be increased by adding a film to which an affinity material is added or a microporous structure film having a large desorption area.

Furthermore, an image forming apparatus as another invention is characterized in that it is provided in an optical mechanism, an image transfer medium or an image forming mechanism, and further mounted with the above-described object surface desorbing substance amount measuring apparatus. The object surface desorbing substance amount measuring device measures the moisture adsorption amount on the surface of the image forming mechanism or the image transfer medium. Therefore, the imaging process such as adjusting the imaging conditions is controlled by measuring the amount of substance adsorbed on the surface of the imaging mechanism, regardless of the state of the surrounding environment of the imaging mechanism. Image quality can be maintained over a wide range of ambient conditions.

  According to the present invention, in an atmospheric location near the object surface, the vapor density of the atmospheric location in the vicinity of the object surface is rapidly changed, thereby minimizing the temperature change of the object and including any equilibrium state. Even under the condition of atmospheric density, the amount of substance desorbed on the object surface can be measured quickly. In addition, the accuracy is improved by reducing the influence of the disturbance exerted on the atmosphere in the vicinity of the object surface.

  First, the principle of the object surface desorbed substance detection method of the present invention will be outlined. FIG. 1 is a diagram showing the state of vapor molecule distribution on the object surface and in the vicinity of the atmosphere. Specifically, the vapor molecule distribution state in the case where the vapor molecule density in the space is uniform and the vapor molecule density on the object surface is different in an equilibrium state. The state of is shown. 3A shows a case where the trapping force of vapor molecules on the object surface is large, and FIG. 3B shows a case where the trapping force of vapor molecules on the object surface is small.

  As shown in FIG. 1, since the vapor molecules 2 trapped on the surface 1 of the object S are subjected to a different action from the vapor molecules 3 existing in the space, the vapor density on the surface 1 of the object S The vapor density in the space may be different even if the temperature state is the same. In addition, the vapor density distribution in the vicinity of the surface 1 of the object S may be the same or uniform. Even if the vapor density in the space in the vicinity of the object S is measured as it is, the vapor density of the surface 1 of the object S is not known.

  However, as shown in FIG. 2 which is a principle diagram of the object surface desorbing substance detection method of the present invention, if the vapor density in the atmosphere in the vicinity of the object is not uniform, there is desorption behavior on the object surface, and its influence. Appears in the vapor density of the atmosphere near the object. In that case, the desorption behavior of the object surface can be determined by observing the vapor density distribution in the atmosphere in the vicinity of the object. More specifically, as shown in FIG. 2 which is a principle diagram of the object surface desorbing substance detection method of the present invention, the aggregator P for making the vapor density non-uniform is placed in the atmosphere at a distance wp from the surface 1 of the object S. The detectors N and M are installed in an atmosphere at distances wn and wm from the surface 1 of the object S, and the vapor density at each position is detected.

First, when the vapor density of the atmosphere is uniform and in an equilibrium state, and there is no surface 1 of the object S, before operating the condenser P at a distance wp from the surface 1 of the object S, the position is equivalent to the surface of the object S. The vapor density is s0, n0 at the detector N position, m0 at the detector M position, and p0 at the peripheral position of the condenser P. s0 = n0 = m0 = p0. Next, in the case where the surface 1 of the object S is not present, after the condenser P is operated, S2 at a position corresponding to the surface 1 of the object S, n2 at the detector N position, m2 at the detector M position, condensation The vapor density of py is shown around the vessel P. When the agglomerator P is not operated without the surface 1 of the object S, the water vapor density is s0 [g / m ³ ], and when the agglomerator P is operated without the surface 1 of the object S, s2 [ g / m ³ ] is obtained as a pre-calibrated value, and the relationship between s0 and s2 is stored in a storage device as a lookup table or a relational expression. On the other hand, when the surface 1 of the object S is present, when the condenser P is operated so that the vapor density is py at the condenser peripheral position as in the case where the surface 1 of the object S is not present, The vapor density of s1 at the position, n1 at the detector N position, m1 at the detector M position, and py around the condenser P is shown.

First, before operating the condenser P, if the vapor density is expressed as sx at the position of the surface 1 of the object S, the condenser P is operated and condensed when the atmosphere around the condenser P has a vapor density of p0. By adjusting the vapor density from p0 to py at the position around the vessel P, the vapor density of sx to s1 is obtained at the position of the surface 1 of the object S. The change from sx to s2 at the position of the surface 1 of the object S indicates that the vapor density of s1-s2 is adsorbed at the position of the surface 1 of the object S. From this, before operating the condenser P, the vapor density sx at the position of the surface 1 of the object S is
sx = s0 + (s1-s2) (1)
It becomes. In addition, the periphery of the condenser P peripheral position indicates a distance of about 100 vapor molecules from the condenser P surface.

  This indicates the amount of vapor substance that evaporates on the surface 1 of the object S when n0 (= m0) in which the vapor density of the ambient atmosphere is uniform and in an equilibrium state is changed to n1 and m1. Incidentally, this relationship holds even if the vapor density is initially uniform and not in equilibrium.

  In this way, an element in which a micro-sized detector and an aggregator are integrated can operate and detect quickly, and the density change behavior related to the atmosphere in the vicinity of the object and the desorption of the object surface is performed at high speed. Since a predetermined stable state is obtained in time, this calculation method is possible.

Here, since the distance from the surface 1 of the object S to the detectors N and M and the condenser P surface is set to a very small size by the MEMS structure, the transport distance of vapor molecules is very small and transports in a short time. The distribution characteristics can be approximated by a linear relationship. The vapor densities s1 and s2 are as follows, assuming that the detection values of the detectors N and M are n1 and m1, and the distance between the surface 1 of the object S and the detector is wn and wm. S1 = n1-{(n1-m1) / (wn-wm)} wn
s2 = n2-{(n2-m2) / (wn-wm)} wn
... (2)
The vapor density sx in the equation (1) is obtained from the detection values of the detectors N and M in the equation (2) and the distance between the object surface and the detector.

  The distribution characteristics of the vapor density shown in FIG. 2 have a linear relationship with the distance, but it is also possible to obtain the vapor densities s1 and s2 with high accuracy by increasing the number of detectors and with a secondary or higher relationship. . Thus, even if the detectors N and M all have the same detection value, the amount of vapor of the desorbed substance that is desorbed on the object surface can be known. Further, as a method using a pre-calibrated value, it is possible to measure the vapor amount of a desorbed substance that is desorbed on the object surface by using and comparing an object surface having a certain desorption characteristic as a reference.

  FIG. 3 is a diagram showing the configuration of the object surface desorbed substance detection device according to the first embodiment of the present invention. 3A is a perspective plan view, FIG. 3B is a cross-sectional view taken along the line AA ′ of FIG. 3A, and FIG. 3C is B of FIG. FIG. FIG. 3 is a diagram in which the object surface desorbing substance detection device according to the present embodiment is installed in the vicinity of the object surface. The object surface desorbing substance detection apparatus 10 according to the present embodiment includes detectors 11 and 12 that detect detection of vapor density at two locations on the surface 1 of the object S, and an atmosphere at a location near the surface 1 of the object S. From the detectors 11 and 12 of the vapor density detection adjusting element 14 and the vapor density detection adjusting element 14 including the Peltier element 13 comprising the cooler 13-1 and the radiator 13-2 for changing the vapor density of A signal processing / control circuit element 15 for processing the detection signal and controlling the Peltier element 13, and an electric wiring cable or connector for connecting the signal processing / control circuit element 15 to an external device (not shown) In this structure, the connecting portion 16 including the above is mounted on the mount substrate 17 and connected to the wiring. Specifically, for controlling the signal processing / control circuit element 15 to the wiring of the mounting substrate 17 and further by the electric wiring cable, or by the electric wiring cable through the coupling portion 16 attached to the mounting substrate 17, or for the signal Connected to an external device. In order to avoid turbulent flow of the steam between the surface 1 of the object S and the vapor density detection adjusting element 14, a disturbance is avoided and rectified by the atmosphere above the vapor density detection adjusting element 14, and the apparatus is protected. A rectifying plate 18 is installed as a cover for this purpose. The surface of the signal processing / control circuit element 15 is covered with a protective film 19. Further, a guide 20 is integrally provided to avoid contact with the vapor density detection adjusting element 14 and maintain a predetermined distance. The guide 20 is in contact with the surface 1 of the object S while avoiding the location of the surface 1 of the object S for measuring the amount of the substance adsorbed on the surface 1 of the object S and the location where the function of the surface 1 of the object S is hindered. The location is set. FIG. 3 shows a case where guides 20 are attached to both sides of the vapor density detection adjusting element 14. Furthermore, the guide 20 for maintaining the object surface 1 and the object surface desorbing substance detection device 10 of the present embodiment at a predetermined distance is made of a fluororesin material having a small sliding friction, and the friction at the contact point is small. Thus, the angle in contact with the object is reduced, and the object 1 contacts the surface 1 of the object S and moves smoothly. Although the moving direction of the object is an arbitrary direction, it is indicated by an arrow direction in FIG. In order to prevent desorption between the surface 1 of the object S and the atmosphere, it is necessary to reduce the cross-sectional area of the measuring device facing the surface 1 of the object S, and to design a small and thin rectifier plate, guide, etc. Is suitable.

  According to the object surface desorbing substance detection device of the first embodiment having such a configuration, the vapor density of the atmosphere in the vicinity of the object surface is changed by the Peltier element 13 of the vapor density detection adjusting element 14, Causes a gradient in the density of the vapor component between the object surface 1 and the detectors 11, 12. Depending on the density gradient state, vapor is adsorbed on the object surface 1 or vapor is desorbed from the object surface 1 at the same time. Therefore, the object surface 1 and the Peltier reflecting the vapor density state of the object surface 1 are reflected. By measuring the state of the density gradient between the elements 13 by the detectors 11 and 12 in the vapor transport path of the desorbed substance, the vapor density of the object surface 1 can be estimated. For example, when the nearby vapor density is lowered by the Peltier element 13, the adsorbed substance on the object surface 1 is released as vapor. This state is detected as the vapor density in the detectors 11 and 12 by the vapor density detectors 11 and 12 between the Peltier element 13 and the object surface 1 which are vapor transport paths.

The numerical values and units shown in FIG. 2 indicate an example of measurement of water vapor desorbed on the paper surface using an element in which a micro-sized detector and an aggregator are integrated. The closest detector N (corresponding to the detector 11 in FIG. 3) is 1.3 mm away from the sheet surface S and in a non-contact position with the sheet, and on the element is an aggregator P (Peltier element 13 in FIG. 3). A pair of detectors N and M are arranged at positions 1.0 mm and 1.7 mm away from each other. The water vapor density in the vicinity of the paper surface is uniform everywhere and shows a value of 29 [g / m ³ ]. The water vapor density adsorbed on the paper surface is not clear. The value of the water vapor density 28 [g / m ³ ] on the paper surface on which the aggregator P is applied is calculated using the values detected by the detectors N and M by operating the aggregator P for 0.05 sec. When the water vapor density is uniform everywhere without an object surface and is 29 [g / m ³ ], a value of 15 [g / m ³ ] calibrated in advance is used as a value obtained by operating the aggregator P for 0.05 sec. This value refers to data stored in the storage device as a lookup table or a relational expression. The water vapor density adsorbed on the paper surface is obtained as 29+ (28−15) = 42 [g / m ³ ].

In this embodiment, the distance from the object surface, the arrangement of the vapor density detection adjustment element and the vapor density detection adjustment element need to be set precisely, and the element in which the detector and the aggregator are integrated is quickly Since it is necessary to be able to operate and detect, a microsystem device by microfabrication using MEMS technology is suitable. As an element in which a micro structure detector and an aggregator having a MEMS structure as shown in FIG. 3 are integrated, an element for detecting and adjusting a vapor density is formed, and used in a semiconductor processing process, such as Si or glass. A substrate and a support layer made of an electrically insulating material such as SiO ₂ , Si ₃ N ₄ or Al ₂ O ₃ are provided on the substrate. In the Peltier element 13, P-type semiconductors and N-type semiconductors are alternately arranged on a support layer. Further, a radiator 13-2 is provided between one end of each P-type semiconductor and one end of each N-type semiconductor, and a cooler 13-1 is provided between the other ends. These P-type semiconductor, N-type semiconductor, radiator and cooler constitute a thermoelectric exchanger. In addition, a power supply electrode for applying a voltage is provided between the P-type semiconductor at the start and the N-type semiconductor at the end. The P-type semiconductor and the N-type semiconductor are made of a thermoelectric conversion material such as Bi-Te, and the radiator and the cooler are made of an electrode material such as Al, Au, Cu, and Ni.

  Here, a thermoelectric conversion material, for example, one using BiTe as a main component (substitution / addition of Bi, Sb, In, Ga, Se, Te, etc.) is typical if the Peltier effect is used. N-type Si and P-type Si can also be used, and an SOI substrate can be used as an SOI substrate, and a thermoelectric conversion material BOX layer can be used as a droplet support layer. In order to find a high-performance material, a material having a high required performance index such as low thermal conductivity and good conductivity is preferable, but it is selected depending on suitability for process compatibility and stability performance.

Next, a pattern of a metal material such as Al or Au that functions as an electrode, a cooler, and a radiator of the thermoelectric converter is formed. Then, it is covered with a passivation material such as SiO ₂ , Si ₃ N ₄ or Al ₂ O ₃ except for the external lead wiring electrode (bonding pad) region. Regarding the operation of the vapor density detection adjusting element 14, when a voltage is applied and the electrode of the cooler is cooled below the dew point of the gas, the gas aggregates on the electrode of the cooler and lowers the vapor density of the surrounding atmosphere. If the current applied to the cooler and the radiator is reversed, the cooler and the radiator can be reversed to evaporate the agglomerated gas on the electrode of the cooler and increase the vapor density of the surrounding atmosphere. it can.

In FIG. 2, the details of the method for increasing the amount of vapor adsorbed on the object surface are omitted, but the amount of vapor adsorbed on the object surface is measured by increasing the amount of vapor adsorbed on the object surface in this way. You can also. Vapor density detectors have a support layer on which a sensitive part made of an organic polymer material, a metal oxide semiconductor material, or an electrical resistance material that detects electrical resistance, capacitance, etc. by desorbing the atmosphere. Located at the top. It is a functional material that can selectively detect a specific vapor substance in the atmosphere, for example, only water vapor or only hydrocarbon gas. Moreover, it has a thermal conductivity detection function for measuring the heat capacity of the atmospheric gas, and the density of the atmosphere can be directly detected. Further, the sensitive part is provided with a power supply electrode for applying a voltage. Further, it is covered with a passivation material such as SiO ₂ , Si ₃ N _4, or Al ₂ O ₃ except for the sensitive portion and the external lead wiring electrode (bonding pad) region. A thermal conductivity sensor and a gas sensor are configured including these sensitive parts and power supply electrodes.

  As shown in FIG. 3B, the detectors 11 and 12 and the Peltier element 13 are arranged on a thin membrane of the support layer, and the thin membrane is on a cavity opened on the lower surface of the substrate. Has been placed. The substrate in the region where the cooler and vapor density detectors N and M are arranged is etched away from the opposite surface of the support layer to form a cavity. As for the operation of the Peltier element 13, when a voltage is applied and the electrode of the cooler is cooled below the dew point of the gas, the gas aggregates on the electrode of the cooler, and the electrode of the cooler is not on the substrate region but in the cavity. Since it is above, the heat capacity is small, and the vapor density of the surrounding atmosphere can be lowered quickly and with small energy. On the other hand, since the electrodes of the radiator are arranged on the substrate region having a high thermal conductivity, the heat dissipation efficiency is high. As a result, the temperature can be quickly controlled, so that the vapor density of the ambient atmosphere can be quickly adjusted. Further, by arranging the detectors 11 and 12 on the cavity, it is difficult to be affected by the temperature of the substrate, and the ambient atmosphere can be detected quickly and with high sensitivity. The heat separation wall is a heat sink using a substrate having a large heat capacity for isolation so that the thermal influence of the vapor density detection adjusting element 14 does not reach the vapor density detection adjusting element 14 through the membrane of the substrate or the support layer. It is.

  FIG. 4 is a diagram showing a configuration of an object surface desorbed substance detection device according to the second embodiment of the present invention. 4A is a plan perspective view, and FIG. 4B is a cross-sectional view taken along line C-C ′ in FIG. In the figure, the same reference numerals as those in FIG. 3 denote the same components. The object surface desorbing substance detection device 30 of the present embodiment shown in the figure is different from the object surface desorbing substance detection device 10 of the first embodiment as detectors 11 and 12 and a Peltier element 13. A selectively permeable membrane 21 is provided so as to cover the vapor density detection adjusting element 14 including As a result, when the specific component has a small difference in detecting characteristics as compared with the other components, high-precision detection can be performed by allowing the specific component to pass through the permselective membrane 21 that separates the specific component. In addition, since the selective permeable membrane 21 and the detectors 11 and 12 are close to each other, the component can be quickly detected even if the component has a small amount of transmission or the differential pressure inside and outside the filter is small. Furthermore, since it can detect rapidly, highly accurate discrimination performance is obtained by installing the permselective membrane 21 in multiple layers.

  FIG. 5 is a perspective plan view showing the configuration of the object surface desorbed substance detection device according to the third embodiment of the present invention. The object surface desorbing substance detection device 40 of the present embodiment shown in the figure is a Peltier that forms the vapor density detection adjusting element 14 in the object surface desorbing substance detection devices 10 and 30 of the first and second embodiments. A heating element 22 is provided in place of the element 13. Therefore, the amount of desorbed vapor substance on the object surface can be measured by increasing the amount of vapor adsorbed on the object surface.

Next, a structure for reducing the thermal effect will be described.
FIG. 6 is a plan perspective view showing the configuration of the object surface desorbed substance detection device according to the fourth embodiment of the present invention. According to the object surface desorbing substance detection device 50 of the present embodiment shown in the figure, the vapor density detection adjusting element 14 is disposed on the thin membrane of the support layer, and the thin membrane opens to the upper surface of the substrate. It is arranged on the cavity. The substrate in the region where the detectors 11 and 12 and the Peltier element 13 are disposed in the vapor density detection adjusting element 14 is etched away from the surface of the support layer through the pores 23 provided in the support layer, so that a cavity is formed. . The thermal separation wall prevents interference with the vapor density detection adjusting element by inducing heat conducted through the support layer toward the substrate.

  FIG. 7 is a plan perspective view showing the configuration of the object surface desorbed substance detection device according to the fifth embodiment of the present invention. According to the object surface desorbing substance detection device 60 of the present embodiment shown in the figure, the vapor density detection adjusting element 14 is disposed on the thin layer bridge of the support layer, and the thin layer bridge opens on the upper surface of the substrate. It is arranged on the cavity. The substrate in the region where the detectors 11 and 12 and the Peltier element 13 are disposed in the vapor density detection adjusting element 14 is etched away from the surface of the support layer through the opening 24 provided in the support layer, thereby forming a cavity. .

  Next, the principle of the object surface desorbed substance detection device according to the sixth embodiment of the present invention will be outlined with reference to FIG. The detectors N and M detect the vapor density of the atmosphere at a distance wn and wm from the surface 1 of the object S facing the surface 1 of the object S, and the detectors Q and R are distances wn from the surface 1 of the object S, The vapor density of wq and wr corresponding to wm is detected. First, when the vapor density of the atmosphere is constant and in an equilibrium state, the agglomerator P is operated, and when the vapor substance is aggregated in the agglomerator P, the vapor substance present in the space is adsorbed and the surface 1 of the object S When there is no surface 1 of the object S at the position of s0, it is s0 to s2. This is the same amount of change as changing to the vapor density s0 to v2 of the space V. When the surface 1 of the object S and the desorption material are present at the position of the surface 1 of the object S and the vapor density has s0, the vapor density of the surface 1 of the object S is s0 to s1. Therefore, in the above equation (1), this indicates the amount of vapor substance that evaporates on the surface 1 of the object S when the vapor density of the nearby atmosphere changes from n0 (= m0) in the equilibrium state to n1 and m1. It is. By the way, this relationship holds even if it is not in equilibrium at first. The MEMS-structured micro-sized detector and aggregator integrated element can quickly operate and detect, and the density change behavior regarding the atmosphere in the vicinity of the object and the desorption of the object surface can be performed at high speed. Since a predetermined stable state is obtained, this calculation method is sufficient.

  Here, as means for obtaining the vapor densities s1, s2, the detection values of the detectors N, M and Q, R are n1, m1, q2, r2, and the distance between the object surface and the detector is wm, wn. And the above equation (2). Here, n2 = r2 and m2 = q2.

  Thus, when the detectors N, M, Q, and R all have the same detection value, the amount of vapor of the desorbed substance that is desorbed on the object surface is known.

  The numerical value and unit indicate an example of measurement of water vapor desorbed on the paper surface using an element in which a micro structure detector and aggregator having a MEMS structure are integrated. There is a detector N closest to the paper surface S at a position 1.3 mm away from the paper surface and not in contact with the paper. On the element, the aggregator P is centered, and the relative distances from the agglomerator P are 1.0 mm and 1.7 mm. Two sets of detectors N, M and Q, R are arranged at the position.

The water vapor density in the vicinity of the paper surface is uniform everywhere and shows a value of 29 [g / m ³ ]. The water vapor density adsorbed on the paper surface is not clear. The value of the water vapor density 28 [g / m ³ ] on the paper surface on which the aggregator P is operated is calculated using the values detected by the detectors N and M by operating the aggregator P for 0.05 sec, and the detector Q The value of the water vapor density 15 [g / m ³ ] of the atmosphere in which the aggregator P is operated is calculated using the value detected by R. From this, the water vapor density adsorbed on the paper surface is obtained as 29+ (28-15) = 42 [g / m ³ ].

  FIG. 9 is a plan perspective view showing the configuration of the object surface desorbed substance detection device according to the sixth embodiment of the present invention. According to the object surface desorbing substance detection device 70 of the present embodiment shown in the figure, the device embodies the above-described principle, wherein the vapor density detection adjusting element 27 is formed on a thin bridge of the support layer. The detectors 11 and 12, the Peltier element 13, and the detectors 25 and 26 are arranged. That is, the vapor density detectors 11 and 12 and the Peltier element 13 are arranged in the vapor material transport path between the object surface 1 and the Peltier element 13 as a vapor density regulator, and there is no object surface. Detectors 25 and 26 are also provided on the transport side of the vapor substance between the atmosphere side and the Peltier element 13 as a vapor density regulator. Vapor density detectors 11, 12, 25, and 26 including two sets of thermal conductivity sensors and gas sensors are integrated with a Peltier element 13 disposed in the center. The support layer at these installation locations is a thin-layer membrane disposed on a cavity opened on the lower surface of the substrate. In this way, by making the respective transport paths face each other, the Peltier element 13 as a regulator of both vapor densities is a common regulator of the vapor density, and rather than simply providing two, High accuracy with no variation and improved efficiency.

  Here, the heat conduction of the support layer mainly propagates through a thin support layer with a small heat capacity, so if the support layer is continuous, the heat conducted through the support layer interferes with the vapor density detector. To do. When the temperature state of the vapor density detector changes, the detected density detection value changes. Therefore, as shown in FIG. 9B, if the support layer has a discontinuous structure, heat conducted through the support layer hardly interferes with the vapor density detector.

  The function of this element is to change the density of the vapor component in the vicinity of the Peltier element 13 by the Peltier element 13 as a vapor density adjuster, and thereby to the density of the vapor component between the object surface S and the Peltier element 13. In addition, a gradient is generated in the density of the vapor component between the atmosphere having no object surface and the Peltier element 13, and the vapor densities of both are measured by the detectors 11, 12, 25, and 26. With this structure and material, the thermal conductivity is small, the specific heat and the heat capacity are small, so that the vapor density regulator and the vapor density detector can be operated quickly with small electric power.

  FIG. 10 is a plan perspective view showing the configuration of the object surface desorbed substance detection device according to the seventh embodiment of the present invention. According to the object surface desorbing substance detection device 80 of the present embodiment shown in the figure, two vapor density detection adjusting elements for detecting and adjusting the vapor density are arranged in parallel on a plane, or one substrate. Two elements for detecting and adjusting the vapor density are arranged in parallel. The vapor density detection adjustment element 28 faces the object surface 1, and the vapor density detection adjustment element 29 faces the reference surface 31. Then, the measurement value of the vapor density detection adjustment element 29 opposed to the reference surface 31 is subtracted from the measurement value of the vapor density detection adjustment element 28 opposed to the object surface 1. This is a mechanism in which the case where there is no object surface is replaced with the case where there is a reference surface, as described above with reference to FIG. In particular, the vapor density detection adjustment element 28 and the vapor density detection adjustment element 29 are oriented in the same direction on the object surface, are substantially the same distance from the object surface, and there is a temperature gradient between the object surface and the vapor density detection adjustment element. In this case, the vapor density detection adjusting element 28 and the vapor density detection adjusting element 29 are under the influence of the same temperature gradient as compared with the case where the vapor density detection adjusting element 29 does not face the object surface in the same direction. By subtracting the measured value of the vapor density detection adjusting element 29 opposed to the surface, a result with higher accuracy can be obtained.

  The reference surface is made of fluorocarbon materials that are difficult to adsorb vapor substances, and molecular sieves that have specific desorption performance for specific components. Even under desorption conditions, certain measurements with selectivity can be obtained.

  FIG. 11 is a cross-sectional view showing a configuration of an object surface desorbed substance detection device according to the eighth embodiment of the present invention. According to the object surface desorbing substance detection device 90 of the present embodiment shown in the figure, two vapor density detection adjustment elements for detecting and adjusting the vapor density are stacked in parallel, and the vapor density detection adjustment element 32 is an object. The vapor density detection adjusting element 33 is opposed to the reference surface 34 while facing the surface. The object surface desorbing substance detection device 90 according to the present embodiment includes a vapor density detection adjustment element 32 and a structure that faces the object surface 1, and a structure that includes the vapor density detection adjustment element 33 and faces the reference surface 34. have.

  FIG. 12 is a cross-sectional view showing a configuration of an object surface desorbed substance detection device according to the ninth embodiment of the present invention. FIG. 13 is a perspective view of the object surface desorbed substance detection device of the present embodiment. According to the object surface desorbing substance detection device 100 of the present embodiment shown in both figures, the vapor density detection adjusting element 35 that detects and adjusts one vapor density has an opening window 36 and a gap between the object surface and the object surface. It is installed in a rotating frame having rotating mechanisms 38 in which the shielding windows 37 are alternately arranged. When facing the object surface, the object surface is opposed to the object surface through the opening window 36. When facing the object surface, the object surface is opposed to the shielding window 37 on which the reference surface is formed. Deduct. The object surface desorbing substance detection device 100 according to the present embodiment has a structure that is opposed to an object surface that is composed of two vapor density detection adjustment elements and a structure that is opposed to a reference surface as in the eighth embodiment. Only one vapor density detection adjusting element has a structure facing the object surface and a structure facing the reference surface. In the object surface desorbing substance detection device 100 according to the present embodiment, when facing the object surface, the device fixing support portion of the element for detecting and adjusting the vapor density is assembled to the base, and the shielding window and the opening window are arranged. The rotation axis of the rotated frame is assembled to the pedestal. In this structure, the distance between the rotating frame and the element for detecting and adjusting the vapor density is constant, so that the distance from the object is fixed by the rotating frame. The rotating frame serves as a guide for keeping the distance from the object constant.

Next, an example in which the above-described object surface desorbing substance detection device of the present invention is installed in an image forming apparatus will be outlined.
FIG. 14 is a schematic cross-sectional view showing the configuration of the image forming apparatus according to the first embodiment of another invention. In the image forming apparatus 200 of the present embodiment shown in the same figure, a pre-exposure device 202, a charging device 203, a writing device 204, a developing device 205, a transfer device 206, and a cleaning device 207 are disposed around a photosensitive member 201. ing. Further, a fixing device 209 for fixing the toner image on the recording paper 208 onto which the toner image formed on the photosensitive member 201 is transferred by the transfer device 206 is provided. Further, in the image forming apparatus 200, the position S 1 between the cleaning device 207 and the pre-exposure device 202, the position S 2 between the writing position of the laser beam by the charging device 203 and the writing device 204, and the laser by the writing device 204. Surface moisture amount detection means 210 for detecting the surface deterioration of the photosensitive drum 201 is disposed at any position S3 between the beam writing position and the developing device 205. This surface moisture content detection means 210 has the configuration of the object surface desorbed substance detection device of the present invention described above.

  FIG. 15 is a schematic cross-sectional view showing a configuration of an image forming apparatus according to a second embodiment of another invention. In the figure, the same reference numerals as those in FIG. 14 denote the same components. In the image forming apparatus 300 according to the present embodiment shown in the figure, a position sensor 301 and a measuring unit are provided on the paper transport path upstream of the transfer device 206 in the paper transport path in order to detect the transpiration behavior of the recording paper 208. 302, a position sensor 303 and a measurement unit 304 are provided on the downstream side of the transfer device 206 in the paper conveyance path, and a measurement unit 305 is provided in the fixing device 209. Further, the position sensor 301 and the measuring means 302 are arranged at substantially the same position, and the position sensor 303 and the measuring means 304 are also arranged at substantially the same position. For example, the measurement means 302 and the measurement means 304 are suitable for the object surface desorbed substance detection apparatus 100 according to the ninth embodiment described above. By heating a specified part of the paper and increasing the water vapor to the surrounding space and measuring the amount of increase, the moisture content of the paper can be estimated, but the moisture is quickly removed from the paper, but the heat capacity of the paper is large. It takes time to raise the temperature, and eventually it takes time to generate water vapor from the paper by heating the paper. Therefore, by using the measuring means to which the object surface desorbing substance detection device of the present invention is applied as in the present embodiment, it is possible to detect accurately by being able to be quick by agglomerating or diluting the atmosphere.

  According to the image forming apparatus of the present invention having such a configuration, for example, in an image forming medium such as paper used in the image forming apparatus, depending on the amount of moisture adsorbed on the paper, the charge amount at the time of transfer may affect the image defect or at the time of conveyance. Paper deformation may occur, leading to jams and image misalignment. It is important to measure and deal with the amount of substance adsorbed on the surface of these photoconductors and image forming media, and there is a need for measuring means corresponding to the target object surface. As a condition for this, it must be possible to measure the surface of the photoreceptor and the image forming medium in a non-contact manner so as not to hinder the image forming process. Since the detection unit of the measuring means is installed at a location away from the surface of the photosensitive member or the image forming medium, it must be able to be measured by discriminating from the influence of environmental fluctuations. In addition, if the distance from the surface of the photoconductor or image forming medium to the detection unit is redundant, the influence of environmental fluctuations will increase and the accuracy will be reduced, and the flexibility in installation will also be reduced. Need to be. Furthermore, it is useful not to design the photoconductor and image forming medium of a specific image forming apparatus but to increase versatility.

  In addition, this invention is not limited to the said embodiment, It cannot be overemphasized that various deformation | transformation and substitution are possible if it is description in a claim.

It is a figure which shows the mode of the vapor | steam molecule distribution state of an object surface and the vicinity atmosphere. It is a principle figure of the object surface desorption substance detection method of the present invention. It is a figure which shows the structure of the object surface desorption substance detection apparatus which concerns on the 1st Embodiment of this invention. It is a figure which shows the structure of the object surface desorption substance detection apparatus which concerns on the 2nd Embodiment of this invention. It is a plane perspective view which shows the structure of the object surface desorption substance detection apparatus which concerns on the 3rd Embodiment of this invention. It is a plane perspective view which shows the structure of the object surface desorption substance detection apparatus which concerns on the 4th Embodiment of this invention. It is a plane perspective view which shows the structure of the object surface desorption substance detection apparatus which concerns on the 5th Embodiment of this invention. It is a principle figure of the object surface desorption substance detection apparatus which concerns on the 6th Embodiment of this invention. It is a plane perspective view which shows the structure of the object surface desorption substance detection apparatus which concerns on the 6th Embodiment of this invention. It is a plane perspective view which shows the structure of the object surface desorption substance detection apparatus which concerns on the 7th Embodiment of this invention. It is sectional drawing which shows the structure of the object surface desorption substance detection apparatus which concerns on the 8th Embodiment of this invention. It is sectional drawing which shows the structure of the object surface desorption substance detection apparatus which concerns on the 9th Embodiment of this invention. It is a see-through | perspective perspective view of the object surface desorption substance detection apparatus of the 9th Embodiment of this invention. It is a schematic sectional drawing which shows the structure of the image forming apparatus which concerns on 1st Embodiment of another invention. It is a schematic sectional drawing which shows the structure of the image forming apparatus which concerns on 2nd Embodiment of another invention.

Explanation of symbols

10, 30, 40, 50, 60, 70, 80, 90, 100; object surface desorbing substance detection device,
11, 12, 25, 26; detector, 13; Peltier element,
13-1; Cooler, 13-2;
14, 27, 28, 29, 32, 33, 35; vapor density detection adjusting element,
15; signal processing / control circuit element, 16; junction, 17; mount substrate,
18; current plate, 19; protective film, 20; guide, 21; permselective membrane,
22; heating element, 23; pore, 24; opening, 31, 34; reference surface,
36; opening window, 37; shielding window, 38; rotating mechanism,
200, 300; image forming apparatus, 201; photoconductor,
202; Pre-exposure device; 203; Charging device; 204; Writing device;
205; developing device; 206; transfer device; 207; cleaning device;
208; recording paper; 209; fixing device; 210; surface moisture content detection means;
301, 303; position sensors, 302, 304, 305; measuring means.

Claims (13)

In the object surface desorbing substance amount measuring device for measuring the amount of substance adsorbed on the object surface and the amount of substance adsorbed on the object surface,
Vapor density adjusting means for adjusting the vapor density of the atmosphere in the vicinity of the object surface;
Vapor density measuring means for measuring the vapor density in the atmosphere at a plurality of predetermined locations spaced from the object surface to the atmosphere;
Vapor density distribution calculating means for calculating the vapor density distribution of the atmosphere in the vicinity of the object surface based on each vapor density measured by each vapor density measuring means and each distance from the object surface of each vapor density measuring means. When,
Vapor density amount calculating means for calculating a vapor density amount of a substance to be desorbed on the object surface based on the vapor density distribution calculated by the vapor density distribution calculating means, apparatus. The vapor density adjusting means and the vapor density measuring means and the vapor density calculating means and the object surface de adsorbate quantity measuring apparatus according to claim 1, wherein the integrated mounted on a single element.   3. The object surface desorbed substance amount measuring apparatus according to claim 1, wherein the vapor density adjusting unit and the vapor density distribution calculating unit are arranged via a space-separated portion.   4. The gas permeable selectively permeable membrane for discriminating only a specific gas component is provided in at least one of the vapor density adjusting means and the vapor density measuring means. 5. An object surface desorption substance amount measuring device. In the object surface desorbing substance amount measuring device for measuring the amount of substance adsorbed on the object surface and the amount of substance adsorbed on the object surface,
Vapor density adjusting means for adjusting the vapor density of the atmosphere in the vicinity of the object surface;
Vapor density measuring means for measuring the vapor density in the atmosphere at a plurality of predetermined locations spaced from the object surface to the atmosphere;
The first vapor density distribution of the atmosphere in the vicinity of the object surface when there is an object, based on the respective vapor densities measured by the respective vapor density measurement means and the distances from the object surface of the respective vapor density measurement means First vapor density distribution calculating means for calculating
Second vapor density distribution calculating means for calculating a second vapor density distribution of the atmosphere without an object based on the vapor density of the atmosphere without the object measured by the vapor density measuring means and the respective separation distances;
Vapor density amount calculating means for calculating a vapor density amount of a substance to be desorbed on the object surface when there is an object based on the first vapor density distribution and the second vapor density distribution. To measure the amount of desorbed material on the object surface. In the object surface desorbing substance amount measuring device for measuring the amount of substance adsorbed on the object surface and the amount of substance adsorbed on the object surface,
Vapor density adjusting means for adjusting the vapor density of the atmosphere in the vicinity of the object surface;
First vapor density measuring means for measuring vapor density in the atmosphere at a plurality of predetermined locations spaced from the object surface to the atmosphere;
Based on each vapor density measured by each first vapor density measuring means and each distance from each object surface of the first vapor density measuring means, the first vapor density of the atmosphere in the vicinity of the object surface First vapor density distribution calculating means for calculating the distribution;
Second vapor density measuring means for measuring the vapor density in the atmosphere at a plurality of predetermined locations spaced from the reference object surface to the atmosphere;
Based on the respective vapor densities measured by the respective second vapor density measuring means and the respective distances from the object surface of the respective second vapor density measuring means, the second vapor in the atmosphere in the vicinity of the reference object surface A second vapor density distribution calculating means for calculating a density distribution;
A vapor density amount calculating means for calculating a vapor density amount of a substance to be desorbed on the object surface based on the first vapor density distribution and the second vapor density distribution. Substance amount measuring device.   The object surface removal according to claim 5 or 6, wherein the vapor density adjusting means, the first and second vapor density distribution calculating means, and the vapor density amount calculating means are integrated and mounted in one element. Adsorbed substance amount measuring device.   The vapor density adjusting means and the first and second vapor density distribution calculating means are arranged via a space-separated portion from each other. The object surface desorbing substance amount measuring apparatus as described. 9. The gas component selective permeable membrane for discriminating only a specific gas component is provided in at least one of the vapor density adjusting unit and the first and second vapor density distribution calculating units. The object surface desorption substance amount measuring apparatus according to any one of the preceding claims.   The object surface desorbing substance amount measuring apparatus according to claim 1, wherein the vapor density adjusting means is at least one mechanism of temperature control and gas desorption control.   An image forming apparatus provided in an optical mechanism, an image transfer medium, or an image forming mechanism, wherein the object surface desorbing substance amount measuring device according to any one of claims 1 to 10 is mounted. Forming equipment.   The image forming apparatus according to claim 11, wherein the object surface desorbing substance amount measuring device measures a moisture adsorption amount on a surface of the image forming mechanism.   12. The image forming apparatus according to claim 11, wherein the object surface desorbing substance amount measuring device measures a moisture adsorption amount on the surface of the image transfer medium.

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