JP5323800B2 - Array type optical element - Google Patents

Description

  The present invention relates to an array type optical element.

  An array type optical element such as an optical fiber array and a rod lens array is an optical element such as a plurality of optical fibers or rod lenses formed on a V-groove substrate formed by forming a plurality of V-grooves on a glass substrate or a silicon substrate. Are two-dimensionally arranged, and two V-groove substrates are fixed with an optical adhesive or the like so as to sandwich a plurality of aligned optical fibers or rod lenses. Such an array type optical element is used for light input / output to / from other array type elements and an optical processing apparatus of a spatial optical system. As a method of arranging optical fibers or rod lenses two-dimensionally, as shown in Patent Document 1, there has already been reported a method in which a pair of V-groove substrates in which optical fibers are aligned and arranged are opposed to each other. In the optical fiber array shown in Patent Document 1, an optical fiber is arranged for each of a plurality of V grooves formed in two V groove substrates, and the optical fibers arranged in the plurality of V grooves are formed by two V groove substrates. It has a sandwiched configuration.

  However, in the conventional method for arranging the optical fibers or rod lenses in the two-dimensional manner as described above, the distance between the optical fibers arranged on one V-groove substrate is accurately maintained by the V-groove. There is no means for accurately maintaining the mutual positional relationship between the two V-groove substrates facing each other, and the mutual positional accuracy between the optical fibers arranged on the two paired V-groove substrates is not high.

  Further, in the conventional method for arranging the optical fiber array or the rod lens two-dimensionally, a manufacturing error of the V groove occurs for each V groove substrate, and therefore the distance between the optical fiber or the rod lens for each V groove substrate. Variation occurs.

JP 2009-025322 A

  As described above, in the conventional two-dimensional optical fiber array and rod lens array structure, there is no means for accurately maintaining the mutual positional relationship between the two opposing V-groove substrates. There is a problem that it is difficult to keep the mutual positional accuracy between the optical fiber or the rod lens highly accurate.

  Further, in the conventional manufacturing method of the two-dimensional optical fiber array and the rod lens array, a V-groove manufacturing error or the like occurs for each V-groove substrate, so that the distance between the optical fiber or the rod lens varies for each V-groove substrate. There was a problem.

The present invention has been made in view of the above disadvantages, and includes a first substrate having a plurality of first V grooves formed in a V shape and a plurality of second V grooves formed in a V shape. A plurality of first optical element groups disposed in the plurality of first V grooves, and a plurality of second optical element groups disposed in the plurality of second V grooves. The first V-groove and the plurality of second V-grooves are opposed to each other, and the first optical element group and the second optical element group are sandwiched between the first substrate and the second substrate. An array type optical element configured, wherein one of the plurality of first V-grooves is a third V-groove for positioning the first substrate and the second substrate, One of the second V-grooves is a fourth V-groove for positioning the first substrate and the second substrate; The third V-groove and the fourth V-groove are positioned so as to face each other, and a support member that supports the first substrate and the second substrate in the third V-groove and the fourth V-groove And the support member contacts the two surfaces forming the third V-groove and the two surfaces forming the fourth V-groove, thereby allowing the first substrate and the second substrate to contact each other. The plurality of first V-grooves, the plurality of second V-grooves, the third V-groove, and the fourth V-groove have an opening angle of 60 degrees, and the first substrate and the first V-groove The distance between the first substrate and the second substrate in a state in which the first optical element group and the second optical element group are sandwiched by two substrates is 2a, and the first optical element group and the second optical element group When the radius of each optical element of the optical element group is r, the plurality of first V grooves and the plurality of first elements The depth of the V groove is 3r-a, the depth of the third V-shaped groove and said fourth V-groove is to provide an array type optical element which is a 2r-a .

  According to a second aspect of the present invention, in the array-type optical element according to the first aspect, the first substrate and the second substrate are a plurality of first V-grooves or fourth V-grooves. A V-groove substrate having a V-groove forming portion formed with a V-groove, wherein the substrate is divided by cutting the V-groove forming portion perpendicularly to the longitudinal direction of the plurality of V-grooves. .

  According to a third aspect of the present invention, in the array-type optical element according to the second aspect, a position where the first V-groove is formed on the first substrate and the second V-groove on the second substrate. Is formed when the first substrate and the second substrate are opposed to each other, the V-groove in which the first optical element group is disposed and the second optical element group are disposed. It is a position where the V-groove and the mirror image are combined.

  According to a fourth aspect of the present invention, in the array-type optical element according to the second aspect, a position where the first V-groove is formed in the first substrate and the second V-groove in the second substrate. Is formed when the first substrate and the second substrate are arranged in the same direction, the V-groove in which the first optical element group is arranged and the second optical element group are arranged. It is the position which overlap | superposed and synthesize | combined with the V groove | channel to be formed.

According to a fifth aspect of the present invention, in the array type optical element according to any one of the first to fourth aspects, a spacer is disposed between the first optical element group and the second optical element group. It is characterized by that.

The invention described in claim 6 is the array-type optical element according to any one of claims 1 to 5 , wherein the third V-groove and the fourth V-groove are the first V-groove and the fourth V-groove. It is characterized by being formed with the same shape and dimensions as the second V-groove.

The invention described in claim 7 is the array type optical element according to any one of claims 1 to 6 , wherein the first optical element group and the second optical element group are not arranged. A dummy fiber is arranged in the V-groove and the second V-groove.

The invention described in claim 8, in an array type optical element according to any one of claims 1 to 7, wherein the first optical element group and the second optical component group is either a plurality of fiber optic It is characterized by comprising. The invention described in claim 9 is the array-type optical element according to any one of claims 1 to 7, wherein the first optical element group and the second optical element group are a plurality of rod lenses. It is characterized by comprising.

  The array type optical element according to the present invention can provide an array type optical element in which optical fibers or rod lenses are arranged with high accuracy.

It is a figure for demonstrating the optical fiber array which concerns on Example 1 of this invention. It is a figure for demonstrating the optical fiber array which concerns on Example 2 of this invention. It is a figure for demonstrating the optical fiber array which concerns on Example 3 of this invention. It is a figure for demonstrating the optical fiber array which concerns on Example 4 of this invention. It is an enlarged view of the gap between optical fibers. It is a figure for demonstrating the optical fiber array which concerns on Example 5 of this invention. It is a figure for demonstrating the optical fiber array which concerns on Example 6 of this invention. It is a figure for demonstrating the optical fiber array which concerns on Example 7 of this invention. It is a figure for demonstrating the optical fiber array which concerns on Example 8 of this invention. It is a figure for demonstrating the optical fiber array which concerns on Example 9 of this invention.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a diagram for explaining an optical fiber array according to Embodiment 1 of the present invention. FIG. 1A is a diagram of the optical fiber array according to the first embodiment of the present invention as viewed from the light emitting end face. As shown in FIG. 1A, an optical fiber array 100 includes a first substrate 1, a second substrate 2, an 8-core tape optical fiber 3, an 8-core tape optical fiber 4, and a single-core optical fiber. A cylindrical positioning member 5 and an ultraviolet curable adhesive 6. An optical fiber alignment V-groove 11 and a substrate positioning V-groove 12 are formed on the first substrate 1, and an optical fiber alignment V-groove 21 and a substrate positioning V-groove 22 are formed on the second substrate 2. Has been. The first substrate 1 and the second substrate 2 are made of, for example, glass or silicon. The 8-fiber ribbon optical fiber 3 and the 8-fiber ribbon optical fiber 4 are formed by integrally covering eight optical fiber wires with a coating.

  The optical fiber alignment V-groove 11 and the optical fiber alignment V-groove 21 are eight V-grooves formed at intervals of 250 microns. That is, the optical fiber alignment V-groove 11 can accommodate the eight optical fiber core wires of the eight-fiber tape optical fiber 3, and the optical fiber alignment V-groove 21 is the eight fiber core optical fiber 4. Can be accommodated. Hereinafter, the direction in which the first substrate 1, the 8-fiber ribbon optical fiber 3, the 8-fiber ribbon optical fiber 4, and the second substrate 2 are laminated in this order is referred to as a lamination direction, and the 8-fiber ribbon optical fiber 3 or the 8-fiber ribbon light. The direction in which the optical fibers of the fiber 4 are arranged in the optical fiber alignment V-groove 11 or the optical fiber alignment V-groove 21 is referred to as a V-groove arrangement direction.

  In the present invention, the substrate positioning V-groove 12 is provided in the first substrate 1, the substrate positioning V-groove 22 is provided in the second substrate 2, and the columnar positioning is provided in the substrate positioning V-groove 12 and the substrate positioning V-groove 22. The member 5 is arranged and the cylindrical positioning member 5 is sandwiched. With this configuration, the first substrate 1 and the second substrate 2 are supported by the cylindrical positioning member 5, and the first substrate 1 and the second substrate 2 are positioned. Specifically, the cylindrical positioning member 5 comes into contact with the two surfaces that form the substrate positioning V-groove 12 and the two surfaces that form the substrate positioning V-groove 22, whereby the first substrate 1 and the first substrate 1. Two substrates 2 can be supported. For this reason, the gap between the first substrate 1 and the second substrate 2 is reduced, and the mutual positional relationship of the optical fibers between the two V-groove substrates facing each other can be accurately maintained.

  FIG. 1B is a diagram for explaining a method of manufacturing the optical fiber array according to the first embodiment of the present invention. FIG. 1B shows a first substrate 1, a second substrate 2, an 8-core tape optical fiber 3, an 8-core tape optical fiber 4, and a cylindrical positioning member 5. An optical fiber alignment V-groove 11 and a substrate positioning V-groove 12 are formed on the substrate 1, and an optical fiber alignment V-groove 21 and a substrate positioning V-groove 22 are formed on the second substrate 2. Yes.

  As shown in FIG. 1B, the coatings of the 8-core tape optical fibers 3 and 4 and the columnar positioning member 5 in the portion sandwiched between the first substrate 1 and the second substrate 2 are removed, and the eight optical fibers are removed. The optical fiber core wire of the eight-fiber tape optical fiber 3 is aligned on the optical fiber alignment V-groove 11 of the first substrate 1, and the optical fiber core wire of the 8-fiber tape optical fiber 3 is aligned on the optical fiber alignment V-groove 11 of the second substrate 2. The optical fiber core wires of the 8-fiber ribbon optical fiber 4 are aligned and the columnar positioning member 5 is disposed in the substrate positioning V-groove 12 or 22. Next, the cylindrical positioning member 5 and the 8-core tape optical fibers 3 and 4 are sandwiched between the first substrate 1 and the second substrate 2. Positioning between the first substrate 1 and the second substrate 2 is performed by the substrate positioning V grooves 12 and 22 and the columnar positioning member 5, and positioning of the optical fiber core wires of the eight-core tape optical fibers 3 and 4. Is also done. In the state in which such positioning is performed, as shown in FIG. 1A, the ultraviolet curable adhesive 6 is permeated into the gap between the first substrate 1 and the second substrate 2 and irradiated with ultraviolet rays. Then, the ultraviolet curable adhesive 6 is fixed by curing. Thereafter, the end face is polished to complete the optical fiber array.

  Here, the opening angles of the optical fiber alignment V-grooves 11 and 21 and the substrate positioning V-grooves 12 and 22 are set to 60 degrees, and the optical fiber core wire is sandwiched between the first substrate 1 and the second substrate 2. And the depth of the optical fiber alignment V-grooves 11 and 21 is 3r-a, where r is the distance between the optical fibers and the radius of the optical fiber cores of the 8-fiber ribbon optical fiber 3 and the 8-fiber ribbon optical fiber 4 is The depth of the substrate positioning V grooves 12 and 22 is designed to be 2r-a. When the depths of the optical fiber alignment V grooves 11 and 21 and the substrate positioning V grooves 12 and 22 are set as described above, the optical fiber cores of the 8-fiber ribbon optical fiber 3 and the 8-fiber ribbon optical fiber 4 are manufactured. A cylindrical positioning member 5 having the same radius as the radius can be used.

  Specifically, when the distance a is 10 microns and the radius r of the optical fiber core wire is 62.5 microns, the depth of the optical fiber alignment V-grooves 11 and 21 is 177.5 microns. The depth of the grooves 12 and 22 is 115 microns, and the diameter of the cylindrical positioning member 5 can be 125 microns, which is exactly the same diameter as the optical fiber core wire. For this reason, there is an advantage that an optical fiber core wire with high processing accuracy can be used as the cylindrical positioning member 5.

  In the optical fiber array manufactured as described above, the distance in the V-groove arrangement direction between the centers of the optical fiber core wires in contact with each other in the first substrate 1 and the second substrate 2 was measured. The error was within ± 1 micron, and it was confirmed that the optical fibers were aligned with extremely high accuracy. As described above, by configuring the optical fiber array as in the first embodiment, the optical fiber array accuracy is improved, and an extremely high accuracy optical fiber array can be provided.

  FIG. 2 is a diagram for explaining a method of manufacturing an optical fiber array according to Embodiment 2 of the present invention. FIG. 2 shows a V-groove substrate 50 having a V-groove forming portion 55. The V-groove forming portion 55 includes an optical fiber alignment V-groove 11, a substrate positioning V-groove 12, and an optical fiber alignment V-groove. 21 and a V-groove serving as a substrate positioning V-groove 22. As shown in FIG. 2, the V-groove substrate 50 has a structure in which a terrace portion 40 is provided in order to install an optical fiber whose coating is not removed on both sides of the V-groove forming portion.

  In order to ensure the positional accuracy between the optical fibers, the distance between the optical fiber alignment V-groove 11 and the substrate positioning V-groove 12 and the distance between the optical fiber alignment V-groove 21 and the substrate positioning V-groove 22 are set. It is important to form equally.

  Normally, precision machining technology is used when forming V-grooves on a substrate, but since there is a limit to the machining accuracy, it is normal for V-groove substrates to vary in V-groove machining position and shape. . Therefore, when the optical fiber array according to the first embodiment is formed using a V-groove substrate prepared using a conventional precision machining technique, substrate positioning V-grooves are formed at different positions for each V-groove substrate. Therefore, the distance between the centers of the optical fiber core wires that are in contact with each other in the first substrate 1 and the second substrate 2 varies.

  The present embodiment is for solving the above-described problem. By forming the first substrate 1 and the second substrate 2 by dividing one V-groove substrate into two, both have the same shape and The greatest feature is that the first substrate 1 and the second substrate 2 having dimensions can be used.

  In the method for manufacturing an optical fiber array according to the second embodiment, the first substrate 1 and the second substrate 2 have the V groove forming portion 55 of the V groove substrate 50 perpendicular to the longitudinal direction of the V groove (shown in FIG. 2). AA ′ direction), that is, perpendicular to the optical axis of the optical fiber when the optical fiber is arranged in the V groove forming portion 55 of the V groove substrate 50 (AA shown in FIG. 2). Manufactured by cutting in the 'direction). In the V-groove forming portion 55, the depth of the V-groove to be the optical fiber alignment V-grooves 11 and 21 is 177.5 microns, and the depth of the V-groove to be the substrate positioning V-grooves 12 and 22 is 115 microns. Designed to be Thereafter, the 8-core tape optical fibers 3 and 4 and the cylindrical positioning member 5 are disposed and sandwiched in the V-grooves of the first substrate 1 and the second substrate 2 manufactured by cutting the V-groove forming portion 55, respectively. Thus, an optical fiber array was manufactured.

  The optical fiber alignment V-groove 11 and the substrate positioning V-groove 12 in the first substrate 1 manufactured in this way are the same as the optical fiber alignment V-groove 21 and the substrate positioning V-groove 22 in the second substrate 2. And the distance between the optical fiber alignment V-groove 11 and the substrate positioning V-groove 12 and the distance between the optical fiber alignment V-groove 21 and the substrate positioning V-groove 22 in the first substrate 1 and the second substrate. Clearly the distances are equal.

  In the optical fiber array manufactured by the method according to Example 2, when the pitches of the optical fiber cores of the first substrate 1 and the second substrate 2 were measured, the center of each optical fiber arranged on the first substrate 1 and The variation in the position in the V-groove arrangement direction between the centers of the optical fibers arranged on the second substrate 2 was less than 0.1 microns, and extremely high accuracy was obtained. Thus, it is apparent that the optical fiber array manufacturing method of this embodiment is effective for manufacturing a high-precision optical fiber array.

  FIG. 3 is a diagram for explaining a method of manufacturing an optical fiber array according to Embodiment 3 of the present invention. The optical fiber array 100 according to the third embodiment includes a first substrate 1 and a second substrate 2 in which the optical fiber alignment V-groove 11 and the optical fiber alignment V-groove 21 are formed, and the substrate positioning V-groove 12. The substrate positioning V-grooves 12 and 22 are removed by cutting between the portions where the portions 22 and 22 are formed. As shown in FIG. 3, in the optical fiber array 100 according to the third embodiment, a portion where the substrate positioning V-grooves 12 and 22 are formed is cut off at the B-B ′ cross section. Thus, by cutting away the portion where the substrate positioning V-grooves 12 and 22 are formed, a smaller optical fiber array 100 can be manufactured.

  FIG. 4 shows an optical fiber array according to Embodiment 4 of the present invention. As shown in FIG. 4, the optical fiber array 100 includes a first substrate 1, a second substrate 2, an 8-core tape optical fiber 3, an 8-core tape optical fiber 4, a columnar positioning member 5, and an ultraviolet ray. It is composed of a curable adhesive 6 and a spacer 30. An optical fiber alignment V-groove 11 and a substrate positioning V-groove 12 are formed on the first substrate 1, and an optical fiber alignment V-groove 21 and a substrate positioning V-groove 22 are formed on the second substrate 2. Has been.

  The configuration according to the fourth embodiment of the present invention is to solve the occurrence of a positional error in the stacking direction for each optical fiber due to a gap generated between the 8-fiber ribbon optical fiber 3 and the 8-fiber ribbon optical fiber 4. belongs to. In the fourth embodiment, as shown in FIG. 4, the spacer 30 is disposed between the first substrate 1 and the second substrate 2 to prevent a position error from occurring.

  FIG. 5 is an enlarged view of a gap between optical fibers. FIG. 5A shows an enlarged view of the gap between the optical fibers when the spacer 30 is not sandwiched. The gap between the above-described 8-fiber ribbon optical fiber 3 and the 8-fiber ribbon optical fiber 4 is, for example, deeper than the flat portion where the V groove is not formed in the V groove forming portion of the V groove substrate. Occurs when formed. As shown in FIG. 5A, a straight line connecting the centers of the cores of the 8-core tape optical fiber 3 installed in the optical fiber alignment V-groove 11 and the 8 installed in the optical fiber alignment V-groove 21. The distance from the straight line connecting the centers of the cores of the optical fiber core 4 is d, and the radius of the optical fiber is r. The gap between the 8-fiber ribbon optical fiber 3 and the 8-fiber ribbon optical fiber 4 when the 8-fiber ribbon optical fibers 3, 4 are placed in close contact with the optical fiber alignment V-grooves 11, 21, respectively, is defined as g. Then, the gap g = d−2r. When the adhesion between the optical fiber and the V-groove is insufficient, a position error corresponding to the gap g may occur.

  FIG. 5B shows an enlarged view when the spacer 30 is sandwiched between the V-groove substrates. When the 8-fiber ribbon optical fibers 3 and 4 are arranged in close contact with the optical fiber alignment V-grooves 11 and 21, respectively, the positional error due to the gap g is not a problem, but the optical fiber alignment V-groove 11 and If the contact to 21 is insufficient, a position error corresponding to the gap g will occur. Therefore, if the allowable position error is δ, spacers having a thickness of t = g−δ are arranged on the eight-fiber ribbon optical fiber 3 and the second substrate 2 arranged on the first substrate 1 as shown in FIG. If it is arranged between the aligned 8-fiber ribbon optical fibers 4, the positional error in the stacking direction between the 8-fiber ribbon optical fibers 3 and the 8-fiber ribbon optical fibers 4 can be suppressed to δ or less. The distance in the stacking direction can be accurately maintained.

  In the example of FIG. 4, the optical fibers having a diameter of 125 microns of the 8-fiber ribbon optical fiber 3 and the 8-fiber ribbon optical fiber 4 are arranged at intervals of 250 microns in the V-groove arrangement direction and at intervals of 200 microns in the stacking direction. Yes. When the spacer 30 is not sandwiched, the distance error in the stacking direction is 75 microns, whereas in the present configuration with the spacer 30 sandwiched, the distance error δ in the stacking direction is improved to 5 microns. Is clearly effective for high-precision optical fiber arrays.

  A method for manufacturing an optical fiber array according to Embodiment 5 of the present invention will be described with reference to FIG. FIG. 6 shows an optical fiber array according to the fifth embodiment. As illustrated in FIG. 6, the optical fiber array according to the fifth embodiment includes a first substrate 1, a second substrate 2, an 8-core tape optical fiber 3, an 8-core tape optical fiber 4, and a cylindrical positioning member. 5, an ultraviolet curable adhesive 6, and a spacer 30. An optical fiber alignment V-groove 11 and a substrate positioning V-groove 12 are formed on the first substrate 1, and an optical fiber alignment V-groove 21 and a substrate positioning V-groove 22 are formed on the second substrate 2. Has been.

  The optical fiber alignment V-grooves 11 and 21 are formed in the same shape and size as the substrate positioning V-grooves 12 and 22. For this reason, when processing the V-groove on each substrate, it is not necessary to change the V-groove processing depth, and the V-groove processing is completed only by the substrate feeding operation in the V-groove arrangement direction. Thus, since the operation of the machining apparatus is simple, the mechanical error is small and high V-groove machining accuracy can be obtained.

  When the pitches of the optical fiber cores of the first substrate 1 and the second substrate 2 of the optical fiber array thus manufactured were measured, the center of each optical fiber arranged on the first substrate 1 and the second substrate 2 were measured. The variation in the position in the V-groove arrangement direction between the centers of the optical fibers arranged in the optical fiber was extremely high accuracy of less than 0.5 microns. Thus, the optical fiber array manufacturing method according to Example 6 is effective for manufacturing a highly accurate optical fiber array.

  FIG. 7 shows an optical fiber array according to Embodiment 6 of the present invention. As shown in FIG. 7, the optical fiber array 100 includes a first substrate 1, a second substrate 2, an 8-core tape optical fiber 3, an 8-core tape optical fiber 4, a columnar positioning member 5, and an ultraviolet ray. It is composed of a curable adhesive 6 and a spacer 30. An optical fiber alignment V-groove 11 and a substrate positioning V-groove 12 are formed on the first substrate 1, and an optical fiber alignment V-groove 21 and a substrate positioning V-groove 22 are formed on the second substrate 2. Has been.

  In the optical fiber array 100 according to the first to fifth embodiments, each V-groove opening in the optical fiber alignment V-groove 11 of the first substrate 1 is formed of each V-groove in the optical fiber alignment V-groove 21 of the second substrate 2. There are eight pairs of V-grooves facing one of the openings and facing each other.

  In the optical fiber array 100 shown in FIG. 7, the position of the V-groove formed on the first substrate 1 is not the same as the position of the V-groove formed on the first substrate 2. That is, in the optical fiber array 100 shown in FIG. 7, the optical fiber alignment V-groove 11 of the first substrate 1 and the optical fiber alignment V-groove 21 of the second substrate 2 are formed at asymmetric positions with respect to the spacer 30. The opening of each V-groove in the optical fiber alignment V-groove 11 of the first substrate 1 does not face any of the openings of each V-groove in the optical fiber alignment V-groove 21 of the second substrate 2. There are also things.

  As shown in FIG. 7, in the optical fiber array 100, V-grooves may be formed at asymmetric positions between the first substrate 1 and the second substrate 2, and optical fibers may be arranged in the respective V-grooves. However, the optical fiber array 100 as shown in FIG. 7 is different from the position of the V-groove formed in the first substrate 1 and the position of the V-groove formed in the first substrate 2. A high-precision optical fiber array manufacturing method cannot be applied. Therefore, since the accuracy of the V-groove forming positions of the first substrate 1 and the second substrate 2 is limited by the mechanical accuracy of the V-groove processing apparatus, there is a limit to the production of a high-precision optical fiber array. Furthermore, when manufacturing an optical fiber array, it is necessary to prepare two types of substrates, which is disadvantageous in terms of parts inventory management and manufacturing management.

  FIG. 8 is a diagram for explaining a method of manufacturing an optical fiber array according to Embodiment 7 of the present invention. FIG. 8C shows a V-groove substrate having a V-groove machining shape in which the V-groove machining position of the first substrate 1 and the V-groove machining position of the second substrate 2 are mirror images. Here, a method for producing a “V-groove substrate having a V-groove processed shape which is a mirror image synthesized” will be described with reference to FIGS.

  FIG. 8A shows an optical fiber array 100 in which the position of the V-groove formed on the first substrate 1 is different from the position of the V-groove formed on the second substrate 2. Assuming a first axis perpendicular to the longitudinal direction of the V-groove and parallel to the substrate surface, the second substrate 2 is rotated 180 degrees with respect to the first axis as shown by the arrow in FIG. As shown in FIG. 8B, the V-grooves of the first substrate 1 and the V-groove of the second substrate 2 are in the same direction, and the position of the substrate positioning V-groove 12 and the substrate positioning V-groove 22 are the same. The case where the 1st board | substrate 1 and the 2nd board | substrate 2 are arranged so that it may become the same position is assumed. Here, the substrate surface refers to a surface on the first substrate 1 and the second substrate 2 on which a V-groove is formed, excluding a surface on which a V-shape of the V-groove is formed.

  The position where the V-groove is formed in the first substrate 1 when it is assumed that the formation positions of the V-grooves of the first substrate 1 and the second substrate 2 are overlapped as shown in FIG. Further, the V-groove substrate in which the V-groove is formed at the position where the V-groove is formed in the second substrate 2 is a “V-groove substrate having a mirror image synthesized V-groove processing shape” shown in FIG. is there. In the optical fiber array 100 according to the seventh embodiment, V-groove substrates designed as shown in FIG. 8C are used as the first substrate 1 and the second substrate 2.

  By making the first substrate 1 and the second substrate 2 V-groove substrates having a V-groove machining shape as shown in FIG. 8C, the V-groove machining shapes of the first substrate 1 and the second substrate 2 are the same. Therefore, the manufacturing method according to the second embodiment can be applied.

  An end view of an optical fiber array manufactured using the V-groove substrate shown in FIG. 8C is shown in FIG. As shown in FIG. 8D, it can be seen that the V-groove formation position is the same between the first substrate 1 and the second substrate 2, and the arrangement of the optical fibers is the same as the arrangement shown in FIG.

  When the pitches of the optical fiber core wires of the first substrate 1 and the second substrate 2 of the optical fiber array manufactured by the method according to Example 7 were measured, the center of each optical fiber arranged on the first substrate 1 and the first The variation in the position in the V-groove arrangement direction between the centers of the optical fibers arranged on the two substrates 2 was less than 0.1 microns, and extremely high accuracy was obtained. Thus, the optical fiber array manufacturing method according to Example 7 is effective for manufacturing a high-precision optical fiber array. Furthermore, since only one type of V-groove substrate is required, there is an advantage that the labor of parts inventory management and manufacturing management can be saved.

  FIG. 9 is a view for explaining a method of manufacturing an optical fiber array according to Embodiment 8 of the present invention. FIG. 9C shows a V-groove substrate having a V-groove machining shape in which the V-groove machining position of the first substrate 1 and the V-groove machining position of the second substrate 2 are combined in the same direction. Here, a method for producing “a V-groove substrate having a V-groove processed shape arranged side by side in the same direction” will be described with reference to FIGS.

  FIG. 9A shows an optical fiber array 100 in which the position of the V-groove formed on the first substrate 1 is different from the position of the V-groove formed on the second substrate 2. Assuming a second axis parallel to the longitudinal direction of the V-groove and parallel to the substrate surface, the second substrate 2 is rotated 180 degrees with respect to the second axis as shown by the arrow in FIG. As shown in FIG. 9B, the first substrate 1 and the second substrate 2 are arranged so that the V-grooves of the first substrate 1 and the V-grooves of the second substrate 2 are in the same direction. Suppose. The position where the V-groove is formed on the first substrate 1 when it is assumed that the formation positions of the V-grooves of the first substrate 1 and the second substrate 2 are overlapped as shown in FIG. The V-groove substrate in which the V-groove is formed at the position where the V-groove is formed on the second substrate 2 is shown in FIG. 9C. Substrate ". In the optical fiber array 100 according to the eighth embodiment, V-groove substrates designed as shown in FIG. 9C are used as the first substrate 1 and the second substrate 2.

  By making the first substrate 1 and the second substrate 2 V-groove substrates having a V-groove machining shape as shown in FIG. 9C, the V-groove machining shapes of the first substrate 1 and the second substrate 2 are the same. It becomes.

  An end view of the optical fiber array manufactured using the V-groove substrate shown in FIG. 9C is shown in FIG. As shown in FIG. 9D, it can be seen that the V-groove formation position is the same between the first substrate 1 and the second substrate 2, and the arrangement of the optical fibers is the same as the arrangement shown in FIG. The optical fiber array manufactured by the method according to the eighth embodiment has an advantage that the labor for parts inventory management and manufacturing management can be saved because only one type of V-groove substrate is required.

  FIG. 10 is a diagram for explaining a method of manufacturing an optical fiber array according to Embodiment 9 of the present invention. FIG. 10A shows an example of an optical fiber array in which an empty V-groove in which no optical fiber is installed is generated. In the example shown in FIG. 10A, the optical fiber is 250 microns in the V-groove arrangement direction in each of the optical fiber arrangement V-groove 11 of the first substrate 1 and the optical fiber arrangement V-groove 21 of the second substrate 2. The first substrate 1 and the second substrate 2 are arranged at an interval and shifted by 125 microns in the V-groove arrangement direction.

  In the arrangement of the optical fiber as shown in FIG. 10A, an empty V-groove in which no optical fiber is installed is generated. Such an empty V-groove is likely to cause an assembly error in that the optical fiber is erroneously arranged at a position that should be an empty V-groove when the optical fiber is aligned on the V-groove.

  FIG. 10B shows an optical fiber array in which dummy fibers 7 are arranged at empty V-groove positions. As shown in FIG. 10B, by arranging the dummy fiber 7 at the position of the empty V-groove, there is an advantage that the assembly yield is improved because the assembly error that occurs when the optical fiber is disposed does not occur.

  Although the embodiment using the optical fiber has been described, a rod lens array can be manufactured in the same manner when a rod lens is used.

DESCRIPTION OF SYMBOLS 1 1st board | substrate 2 2nd board | substrate 3, 4 8 core tape optical fiber 5 Cylindrical positioning member 6 UV curable adhesive 7 Dummy fiber 11, 21 Optical fiber alignment V groove 12, 22 Substrate positioning V groove 30 Spacer 40 Terrace 50 V-groove substrate 100 Optical fiber array

Claims (9)

A first substrate having a plurality of first V grooves formed in a V shape;
A second substrate having a plurality of second V-grooves formed in a V-shape;
A first optical element group disposed in the plurality of first V-grooves;
A second optical element group disposed in the plurality of second V grooves,
The plurality of first V grooves and the plurality of second V grooves are opposed to each other, and the first optical element group and the second optical element group are sandwiched between the first substrate and the second substrate. An array type optical element constituted by:
One of the plurality of first V grooves is a third V groove for positioning the first substrate and the second substrate, and one of the plurality of second V grooves. Is a fourth V-groove for positioning the first substrate and the second substrate, the third V-groove and the fourth V-groove are positioned so as to face each other, and A support member that supports the first substrate and the second substrate is disposed in a V groove and the fourth V groove, and the support member includes two surfaces that form the third V groove and the fourth surface. Supporting the first substrate and the second substrate by contacting two surfaces forming a V-groove ;
The opening angles of the plurality of first V grooves, the plurality of second V grooves, the third V groove, and the fourth V groove are 60 degrees,
The distance between the first substrate and the second substrate in the state where the first optical element group and the second optical element group are sandwiched between the first substrate and the second substrate is 2a, and the first substrate When the radius of each optical element of the optical element group and the second optical element group is r, the depths of the plurality of first V grooves and the plurality of second V grooves are 3r-a, The depth of each of the third V-groove and the fourth V-groove is 2r-a .   The first substrate and the second substrate may have a V groove forming portion in which a plurality of V grooves serving as the first V groove to the fourth V groove are formed. 2. The array type optical element according to claim 1, wherein the array type optical element is a substrate divided by cutting perpendicularly to a longitudinal direction of the plurality of V grooves.   The position where the first V-groove is formed on the first substrate and the position where the second V-groove is formed on the second substrate are the first substrate and the second substrate facing each other. In this case, the V-groove in which the first optical element group is arranged and the V-groove in which the second optical element group is arranged are combined in a mirror image relationship. Array type optical element.   The position at which the first V-groove is formed on the first substrate and the position at which the second V-groove is formed on the second substrate are set so that the first substrate and the second substrate are in the same direction. 3. When arranged, the V-groove in which the first optical element group is arranged and the V-groove in which the second optical element group is arranged are superposed and synthesized. The array type optical element according to 1. The array type optical element according to any one of claims 1 to 4 , wherein a spacer is disposed between the first optical element group and the second optical element group. The third V-shaped groove and said fourth V groove, of claims 1 to 5, characterized in that it is formed by the first V-groove and the same shape and size and the second V-groove The array type optical element according to any one of the above. Claims 1 to characterized in that a dummy fiber to the first said optical element group and said second optical component group is not disposed in the first V-groove and the second V grooves 6 The array type optical element according to any one of the above. It said first optical element group and the second optical element group, array type optical element according to any one of claims 1 to 7, wherein the plurality of fiber-optic or Ranaru. The array type optical element according to claim 1, wherein the first optical element group and the second optical element group include a plurality of rod lenses.

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