JP5320663B2 - Substrate processing system - Google Patents

Description

  The present invention relates to a mask verification method and a mask verification system that can prevent a mistake in setting a mask and a mistake in processing substrates in a color filter exposure process.

  Conventionally, for example, in a color filter manufacturing process, a mask is used to transfer a desired pattern onto a substrate.

  In the exposure step, first, an exposure mask having a predetermined light-shielding pattern that has been instructed to use is set in an exposure machine, and pattern exposure is performed on the substrate.

  Whether the set mask is the same as the one instructed to use is checked by the operator by visual confirmation, thereby preventing erroneous work in the exposure process.

  However, since the confirmation is a visual operation by an operator, a confirmation error may occur, and the confirmation may be forgotten, and as a result, the production starts with a difference from the production instruction. was there.

  Manufacturing with a mask different from the mask instructed to use naturally produces a defective product, which causes a great waste of time and materials. As a result, the manufacturing cost was increased.

  On the other hand, with regard to the processing substrate to which the mask pattern is transferred, the substrate may be mistaken in the manual operation of the operator or different types of substrates may be mixed in the lot, which is naturally a cause of defective manufacturing. .

  Visual confirmation of each processed substrate is difficult in terms of operation, and an automatic substrate check method for confirming mixed loading has been desired. Furthermore, there is a need for a method for checking whether the combination of a mask instructed to use, a mask that is actually set, and a processing substrate is in accordance with the manufacturing instructions.

  On the other hand, in recent years, high-mix low-volume production and short delivery have progressed, and there is an increasing need for promptly reflecting customer order information in production. For this reason, it is necessary to create a production schedule in a department closer to the sales department rather than in the production factory.

  Accordingly, it is desired to respond to a mechanism in which information related to the production schedule is input at a location away from the production factory, and the production factory appropriately selects materials related to production based on the information and performs production. At the same time, there is an increasing need to know the operation status of the factory and information on the production items more directly in the department away from the production factory.

  Patent Document 1 proposes a photomask in which a barcode is provided on a photomask and the barcode is read to prevent an erroneous operation in which the photomask is mistaken. However, the work is merely to prevent mistakes in the process, and it is not shown that the information is shared with other related departments.

JP-A-5-313350

  The present invention has been made to solve the above-described problems. Mask information based on manufacturing instruction information is communicated via a communication network, and the mask information is assigned to the mask when the mask is set in the apparatus. A mask identification code such as a two-dimensional code is read, the two are automatically verified, and a mask used for the processing substrate is read by reading a substrate identification code such as a two-dimensional code attached to the processing substrate. In addition to reducing the number of man-hours required by the operator, the operator can avoid mistakes in setting the mask and prevent mistakes in the setting of the board. At the same time, the mask information actually used is directly transmitted via the communication network. An object of the present invention is to provide a mask collation method and a collation system that can be grasped automatically.

  Further, in the present invention, when the collation is not obtained, the operator is notified, so that the start of manufacturing is prohibited, and erroneous work different from the manufacturing instruction can be prevented more reliably.

  In order to achieve the above object, the present invention takes the following measures.

That is, a first aspect of the invention, there is provided a substrate processing system using by the color filter manufacturing exposure step,
1) a step of mask information remembers that used on the basis of production instruction information,
2) a step of obtaining the identification code information of the mask that was set in an exposure apparatus by the identification code reader,
3) Before Symbol collates mask information and the mask identification code information, if there is an abnormality in checking result, and performing a matching abnormality notification to the operator without promoting step,
4) If not abnormal, obtaining an identification code of the substrate set on the exposure machine by the identification code reader ;
5) Collating the identification code of the substrate with the identification code information of the mask , and if there is an abnormality in the collation result, notifying the worker of the collation abnormality without proceeding with the process;
6) If not abnormal, and performing exposure by the exposure device,
When 7) before Symbol verification result is generated, the contents from time to time, transmitted to the information storage medium, the step of storing a substrate processing system, characterized in that it comprises a processing device executing.

According to the substrate processing system of the present invention, mask information used for production is provided to the production department via communication, and information on whether the mask is used correctly can be confirmed even in other departments remote from the production department. it can. In addition, an identification code for storing management information on the mask and the processing substrate is provided, and the management information is automatically read out so that the combination of the mask and the substrate to be used can be verified. For this reason, it becomes possible to prevent the manufacture of defective products due to insufficient visual confirmation.

  On the other hand, when the collation result is abnormal, the worker can receive an abnormality notification. As a result, the operator can prevent the progress of defective manufacturing due to a visual confirmation error.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 is a conceptual diagram showing a network configuration to which a mask matching system to which a mask matching method according to the present invention is applied is applied.

  That is, a mask verification system to which the mask verification method according to the present invention is applied is connected to the manufacturing instruction information management database 1 and the mask verification processing device 2 via a communication network 10 such as the Internet, for example, and the identification code reading device 5 is connected. I have.

  2 and 3, each of the mask 20 and the processing substrate 22 includes a mask identification code 21 or a substrate identification code 23 such as a two-dimensional code.

An example of a case where a work instruction is issued in the exposure process, a mask is set in the exposure machine, and manufacturing starts will be described with reference to a flowchart shown in FIG.

  When manufacturing instruction information for a predetermined color filter is selected, a mask to be used in the exposure process is determined, and based on the used mask instruction (S1), the used mask information is selected and output from the manufacturing instruction information management database 1. Then, it is transmitted to the mask collation processing device 2 (S2).

  Next, when an operator sets a mask on the exposure machine (S3), the mask identification code 21 given to the mask is read using the reading device 5 (S4), and mask identification code information is detected. Then, the mask identification code information is transmitted to the mask verification processing device 2 (S5).

  Next, in the mask verification processing device 2, the mask identification code information and the used mask information are verified. And as a result of collation, when collation is not abnormal (S7: No), manufacture is permitted (S8), and when it is judged abnormal (S7: Yes), manufacture is not permitted and the operator is not permitted. An abnormality report is made (S9), and the process returns to S3.

  The operation after the mask setting is completed will be described with reference to the flowchart of FIG.

  In the exposure processing stage, the processing substrate advances to before the exposure process (S11). When the processing substrate is set in the exposure machine (S12), the substrate identification code given to the processing substrate is read using the reading device 5 ( S13), substrate identification code information is detected. Then, the board identification code information is transmitted to the mask verification processing device 2 (S14).

  Next, in the mask verification processing device 2, the substrate identification code information and the used mask information are verified. And as a result of collation, when collation is not abnormal (S16: No), exposure processing is started (S17), and when it is judged abnormal (S16: Yes), manufacture is not permitted, and the operator An abnormality report is made (S18), and reconfirmation and resetting of the processed substrate are prompted.

The verification result of the mask and the processed substrate can be transferred to the manufacturing instruction information management database 1 via the communication network 10 as necessary. In this case, the information can be referred from the computer terminal 6 or the like, and the information on the mask and the processing substrate used in the actual process and the progress of the manufacturing can be confirmed from a remote location.

The conceptual diagram which shows the network system structural example to which the mask collation method of this invention is applied. The perspective view which shows the mask 20 with which the mask identification code 21 was provided. The perspective view which shows the process board | substrate 22 with which the board | substrate identification code 23 was provided. 6 is a flowchart showing a flow from when a manufacturing instruction is issued until mask setting is completed. The flowchart which shows the flow until a process board | substrate is thrown in and an exposure process is started.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Manufacturing instruction information management database 2 ... Collation processing apparatus 5 ... Identification code reader 6 ... Computer terminal 10, 11 ... Communication network 20 ... Mask 21 ... Mask identification code 22 ... Substrate 23 ... Substrate identification code

Claims (1)

The substrate processing system used in the color filter manufacturing exposure step,
1) a step of mask information remembers that used on the basis of production instruction information,
2) a step of obtaining the identification code information of the mask that was set in an exposure apparatus by the identification code reader,
3) Before Symbol collates mask information and the mask identification code information, if there is an abnormality in checking result, and performing a matching abnormality notification to the operator without promoting step,
4) If not abnormal, obtaining an identification code of the substrate set on the exposure machine by the identification code reader ;
5) Collating the identification code of the substrate with the identification code information of the mask , and if there is an abnormality in the collation result, notifying the worker of the collation abnormality without proceeding with the process;
6) If not abnormal, and performing exposure by the exposure device,
When 7) before Symbol verification result is generated, the substrate processing system, characterized in that it comprises the contents from time to time, transmitted to the information storage medium, the step of storing, the processing device executing.

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