JP5314000B2 - Production management system and production management method - Google Patents

Description

  The present invention relates to semiconductor light emitting devices such as light emitting diodes (LEDs) and semiconductor laser elements using at least one processing device including at least an off-line device in a redevelopment to a compound semiconductor factory of an LSI manufacturing factory or a manual factory. The present invention relates to a production management system for managing production when manufacturing a semiconductor element such as an element, and a production management method using the production management system.

  In a conventional LSI manufacturing factory or the like, Patent Document 1 discloses a function for calculating the time required for wafer processing from wafer processing conditions set in a semiconductor manufacturing apparatus, wafer transport time not set in a recipe, and stabilization of chamber processing conditions. A function that calculates time based on the statistics of actual values under the same conditions, a function that calculates the predicted end time of wafer processing from the time obtained by these two functions, and the predicted time is initially predicted due to problems with semiconductor manufacturing equipment A function of correcting the predicted time when deviating from the function, and a function of notifying the MES or MCS of a specific signal at a timing that is a predetermined time specified by the user of the semiconductor manufacturing apparatus from the predicted end time regardless of whether or not the correction is made Or a function of notifying the user by a change in the lighting state of the signal tower or the sound of a buzzer attached to the device.

  In order to manage offline devices online, conventionally, as shown in FIG. 5, a personal computer 102 that can be online to a host device 101 that performs process management is incorporated in the offline device 103, and the offline device is connected via the personal computer 102. A method of reading 103 device status information is used.

JP 2009-43950 A

  In the above-described conventional configuration, in order to incorporate an online device such as the personal computer 102 into the offline device 103, not only is it accompanied by modification of the device, but the development cost is high, and there are many parts that need to be developed for each device. Application to a production process with many 103 was difficult.

  When redeveloping an LSI factory into a compound semiconductor factory or using a manual factory, there is a need for a technology that realizes labor saving and prevention of work mistakes by managing offline manual processing with low investment and on-line management.

  The present invention solves the above-mentioned conventional problems by performing on-line management of the apparatus state on a production line having a manual transfer / offline apparatus, and performing a navigation function for apparatus management and labor saving with low investment. An object of the present invention is to provide a production management system and a production management method using the same, which can realize pseudo online management by a production management system even in a production line with an offline device.

The production management system of the present invention has a process flow progress management function for lots for one or a plurality of processing devices in a semiconductor manufacturing process for manufacturing a semiconductor element using one or a plurality of processing devices including at least an off-line device. Each of the offline devices that read the signal tower signal that informs the host device having the device operation status added to the offline device by lighting / non-lighting and transmits the device status information of the offline device to the host device . Each of the one or more processing devices including a management personal computer, and the host device responds based on device status information of the one or more processing devices including at least the offline device via the management personal computer of the processing device, including the off-line device Is intended to output the work instruction information for each lot of one or more processing devices, the objects can be achieved.

  Preferably, in the production management system of the present invention, when a signal that requires work is detected simultaneously from one or a plurality of processing devices including the at least offline device, the host device performs processing priority of lots, Production conditions such as the worker's current location are comprehensively determined, and work instruction information is output via each management personal computer of one or more processing devices including at least the offline device.

  Further preferably, in the production management system according to the present invention, the host device performs processing end time based on a processing start signal read from one or a plurality of processing devices including at least the off-line device and a pre-registered process time. The work reservation instruction information is output via each management personal computer of one or a plurality of processing apparatuses including at least the offline apparatus.

  Further preferably, in the production management system of the present invention, the management personal computer uploads the device status information to the host device, and based on the uploaded device status information, the host device uses the lot work instruction information to it. Download to the corresponding management personal computer.

  The production management method of the present invention is a production management method using the above-described production management system of the present invention, and reads a signal tower signal informing the device operating status added to the offline device by lighting / non-lighting, The management personal computer transfers the device status information of the offline device to the host device, and the host device instructs the work order for the lot of the offline device via the management personal computer based on the device status information of the offline device. Information is output, and thereby the above-mentioned object is achieved.

  With the above configuration, the operation of the present invention will be described below.

  In the present invention, a host device having a lot processing flow progress management function for one or a plurality of processing devices, and a signal tower signal that informs the operation status of the device attached to the offline device by lighting / not lighting are read. And a management personal computer that transmits the device status information of the offline device to the host device, and the host device is based on the device status information of at least one or more processing devices including the offline device. Work instruction information of each lot of one or a plurality of processing apparatuses including an off-line apparatus is output via the management personal computer.

  As a result, the signal tower signal (including the warning signal) of the offline device is read out, and the device status information is sent from the management personal computer to the host device for process management, and the host device including the offline device performs production management. Therefore, even on a production line with an off-line device, it is possible to realize pseudo online management by the production management system. Accordingly, it is possible to efficiently and reliably perform production management equivalent to online control in a small-scale line and a local distributed line with low investment.

  As described above, according to the present invention, the signal tower signal (including the warning signal) of the offline device is read, and the device status information is sent from the management personal computer to the host device that performs the process management, so that the offline device can be set up in the host device. In order to manage production including, even on production lines with offline equipment, it is possible to realize pseudo on-line management by production management system, low investment, small scale line, locally distributed line, Production management equivalent to online control can be performed efficiently and reliably.

It is a block diagram which shows the example of a principal part structure of the production management system in embodiment of this invention, and its operation | movement. It is a block diagram which shows the software structural example of the management personal computer and host apparatus in the production management system of FIG. It is a flowchart which shows the operation example of the production management system containing the operator's work process at the time of performing a production process using the production management system of FIG. FIG. 2 is a layout diagram of a plurality of processing devices, management personal computers, and host devices that are offline devices in the production management system of FIG. 1. It is explanatory drawing for demonstrating the case where pseudo | simulation online management is implement | achieved even if it is a production line with an offline apparatus in the conventional production management system.

  Embodiments of a production management system and a production management method using the same according to the present invention will be described below in detail with reference to the drawings.

  FIG. 1 is a block diagram illustrating a configuration example of a main part of a production management system and an operation thereof according to an embodiment of the present invention.

  In FIG. 1, the production management system 1 according to the present embodiment can exchange information with each management personal computer 2 in which a unique ID is assigned to each of a plurality of processing devices including offline devices, and with each management personal computer 2. The host device 3 and a data card (RF-ID) each having a unique ID and processing information (flow) attached to a plurality of production works (a plurality of production lots) are operated from a data card attaching device (not shown). And a card reader 4 that can read production information for each worker from the data card.

  The data card has an IC chip mounted with a memory called a tag chip and an antenna embedded therein, and "whether the production work of which stocker, which cassette (lot), is manually transported to which processing equipment for work" It is written on the card surface so that the operator can see it visually. The data card is registered in the IC chip so that input errors in the processing device can be avoided and can be easily and reliably read by the card reader 4, or the production conditions are indicated by a bar code and the bar code reader is used. It can be read easily and reliably. The registration data in the IC chip is data that indicates what kind of lot needs processing and what kind of processing is necessary.

  The work instruction information of the cassette (lot) as the production work is displayed on the display screen of the management personal computer 2 or the contents of the data card are rewritten by the data card attaching device connected to the management personal computer 2. Is displayed.

  For example, a management personal computer 2 provided in the vicinity of a processing device such as an offline device is connected to a host device 3 and a card reader 4. The management personal computer 2 uploads production information for each worker to the host device 3, and based on the uploaded production information, the host device 3 downloads work instruction information to the corresponding management personal computer 2. In short, the management personal computer 2 touches or brings close to the card reader 4 the data card of the worker in which the production lot information (lot ID / flow information) is written at the start / end of the process, and the contents of the data card. Is transmitted to the host device 3 via the management personal computer 2. Based on the contents (production lot information) of the transmitted data card, the host device 3 grasps the processing status (progress management, check of normal processing) of each lot, and the work instruction according to the lot progress status, An instruction to take out a cassette (lot), selection of a processing apparatus for the next process, and an instruction to carry it are displayed on the display screen of the management personal computer 3 and work history is automatically collected in the database of the host apparatus 3.

  FIG. 2 is a block diagram showing a software configuration example of the management personal computer 2 and the host device 3 in the production management system 1 of FIG.

  The management personal computer 2 in the production management system 1 of the present embodiment includes a CPU (Central Processing Unit) 21 as a control unit that performs overall control, a keyboard, a mouse, a touch panel, and an input command to the CPU 21. An input device 22 that receives and inputs via a pen input device or a communication network (for example, the Internet or an intranet), and a display that displays an initial screen, a selection scene, a control result screen by the CPU 21 and an operation input screen on the display screen. Unit 23, ROM 24 as a computer-readable readable recording medium in which the control program and its data are stored, and the control program and its data are read at startup, and the data is read and stored for each control by CPU 21. Work as working memory And a RAM25 serving as a storage unit.

  The host device 3 in the production management system 1 according to the present embodiment includes a CPU (Central Processing Unit) 31 as a control unit that performs overall control, and a computer-readable readable recording medium in which a control program and data thereof are stored. As a ROM, a control program and its data are read out at startup, and a RAM as a storage unit that functions as a work memory for reading and storing data for each control by the CPU 31, as well as a database for storing enormous production information 32.

  The ROM as a readable recording medium may be composed of a hard disk, a formable optical disk, a magneto-optical disk, a magnetic disk, an IC memory, and the like. This control program and its data are stored in the ROM, but this control program and its data may be downloaded to the ROM from another readable recording medium or via wireless, wired or the Internet.

  Based on the control program and its data, the CPU 21 in the management personal computer 2 has a lot ID read by the card reader 4 and data input means 211 for data input, and a lot ID input by the data input means 211. A flow collation unit 212 that collates whether or not the process content is correct as production information, and a collation result display control unit that displays the collation result performed by the flow collation unit 212 and the next processing content (processing recipe) on the display screen. If the collation result is correct as a work instruction 213, a recipe number issuing unit 214 that issues a recipe number corresponding to the lot ID, and a process end notification unit 215 that notifies the host device 3 that the process for the lot ID has been completed. After the processing history is written, the processing is performed on the host device 3. Processing history transfer means 216 for transferring the processing history data of the device, and the next process content display for controlling the display of the “cassette removal” message on the display screen and for displaying “entry stocker” or “next processing device” Control means 217.

  If the collation result is not correct as a work instruction, the collation result display control means 213 controls to display “warning” and its “conveyance destination” on the display screen.

  The CPU 31 in the host apparatus 3 receives a recipe number corresponding to the lot ID of the management personal computer 2 based on the control program and its data, and registers the recipe (process content) corresponding to the recipe number in the database 32. Recipe registration means 311 and processing start instruction means for instructing the processing apparatus to “start processing” via the management personal computer 2 after registration of the recipe contents (process contents) corresponding to the recipe number by the recipe registration means 311 312, processing history write instruction means 313 for instructing the management personal computer 2 of the processing device to write the processing history data of the processing device upon receipt of the processing end notification, and transfer from the management personal computer 2 Processing history data is received in the database 32 and the processing device A processing history registration unit 314 for registering a process history data, and a next step the content display instruction unit 315 in the management personal computer 2 performs a display instruction of the next process contents.

  An example in which an operator performs production processing using the production management system 1 of the present embodiment with the above configuration will be described.

  FIG. 3 is a flowchart showing an operation example of the production management system 1 including the worker's work process when the production process is performed using the production management system 1 of FIG.

  First, as shown in FIG. 3, in step S <b> 1, the operator operates the stocker management personal computer 51 constituting the data card giving apparatus 5 to select “card output information”. As the “card output information”, an operator is instructed which cassette (lot) is taken out from which stocker and to which processing apparatus is manually conveyed.

  Next, in step S 2, the operator operates the stocker management personal computer 51 to print out the data card 53 from the data card printer 52.

  Subsequently, in step S3, the worker issues the instructed cassette (lot) from the source stocker 54 in accordance with the contents of the data card 53 printed out.

  Thereafter, in step S4, the operator manually conveys the delivered cassette (lot) to a predetermined processing apparatus.

  Further, in step S5, the operator sets the cassette (lot) manually transported to the apparatus loader and reads the contents of the data card 53 by the card reader 4. That is, the operator sets a cassette (lot) in the processing apparatus as “cassette setting”. By making the data card approach the card reader 4 provided in the processing device, the “lot ID / process reading” is performed, and the lot ID to be processed by the processing device and the content of the process are accurately read without a mistake. The reader 4 can read.

  Steps S <b> 1 to S <b> 5 described above are the work of the worker who causes the card reader 4 to read the contents of the data card 53 while the worker executes an event instructed by the stocker management personal computer 51 and the data card 53.

  Next, in step S6, in the management personal computer 2, the data input means 211 inputs the lot ID and the process content to be processed by the processing apparatus read by the card reader 4, and the flow matching means 212 performs the processing. The flow collation for each apparatus is performed, “cassette verification, recipe check” is performed, and the collation result display control unit 213 displays the collation result and the next work content on the display unit 23. That is, the management personal computer 2 provided in the processing apparatus confirms whether the lot ID read by the card reader 4 and the process contents are correct as a work instruction. If the lot ID read by the card reader 4 and the process content (flow) are correct, the management personal computer 2 confirms the reception on the display screen with respect to the worker. That is, if the lot ID and the process contents are correct, the worker may instruct the processing apparatus to start processing as a confirmation of acceptance, and the recipe number issuing means 214 of the management personal computer 2 corresponds to the lot ID. In step S7, the host device 3 accepts the recipe number corresponding to the lot ID, and the recipe registration means 311 of the host device 3 registers the cassette (lot) and the recipe (process contents) in the database 32. To do.

  In step S <b> 8, after the recipe number corresponding to the lot ID is registered by the recipe registration unit 311 of the host device 3, the processing start instruction unit 312 automatically instructs “processing start” to the processing device.

  In step S6, if the lot ID and the process content are not correct as a result of the collation by the flow collating unit 212 (no), the collation result display control unit 213 displays “warning” and “conveyance destination” as its management personal computer. Display control on the second display screen.

  The above steps S6 to S8 are operations performed by the management personal computer 2 and the host device 3.

  Next, when a "warning" is issued on the display screen in step S9, the worker removes the cassette (lot) from the processing apparatus and processes the cassette (lot) as a regular transport destination. Manually transport to the equipment.

  Further, in step S8, the processing apparatus starts processing in response to the “processing start instruction” from the processing start instruction unit 312. After a predetermined time, the processing apparatus ends the processing. In step S <b> 10, the processing device notifies the host device 3 that the processing for the cassette (lot) has been completed, and the processing history writing instructing unit 313 of the host device 3. Upon receiving this processing end notification, in step S11, the management personal computer 2 of the processing device is instructed to write processing history data, and the processing history transfer means 216 of the management personal computer 2 sends the host device 3 to the processing history transfer data. The processing history data of the processing device is transferred to. In the host device 3, upon receiving the processing history data from the management personal computer 2, the processing history registration unit 314 of the host device 3 registers the processing history data of the processing device in the database 32.

  Further, in step S12, the host device 3 determines whether or not the processing has been completed for the cassette (lot). If the processing has been completed for the cassette (lot) (YES), the host device 3 In step S13, the next process content display instruction unit 315 instructs the management personal computer 2 to display the next process content, and the next process content display control unit 217 of the management personal computer 2 displays “ The display of the message “Remove cassette” is controlled, and “Receiving stocker” is displayed on the display screen of the management personal computer 2. In accordance with this instruction, the operator removes the cassette (lot) from the apparatus loader and transports it to a predetermined instruction stocker, and enters the cassette (lot) into the predetermined instruction stocker.

  If the processing for the cassette (lot) is not completed in step S12 (NO), the next process content display instruction means 315 of the host device 3 sends the next process content to the management personal computer 2 in step S14. The next process content display control means 217 of the management personal computer 2 displays a message “Remove cassette” on the display screen and also displays “Next process” on the display screen of the management personal computer 2. Is displayed. In accordance with this instruction, the operator removes the cassette (lot) from the apparatus loader and transports it to the processing apparatus for the next process. In step S5, the operator sets the cassette (lot) in the apparatus loader, and the data The card is read close to the card reader 4 and the card reader 4 reads the card information.

  The above steps S10 to S14 are operations performed by the management personal computer 2 and the host device 3.

  The worker performs other work during the processing of the processing apparatus, and if instructions of “take out cassette” and “convey to next process” are displayed on the display screen of the management personal computer 2, The cassette is taken out from the processing apparatus, and the cassette (lot) is manually conveyed to the next process.

  In short, in the management personal computer 2, the data input means 211 causes the data input means 211 to input the lot ID read by the card reader 4 and the process contents thereof, and the flow collating means 212 inputs the lot ID and the process contents thereof. The flow verification process for verifying whether the production information is correct, and the verification result display control unit 213 controls the display of the verification result and the next work content performed by the flow verification unit 212 on the display screen. If the process and the collation result are correct as the work instruction, the recipe number issuing unit 214 issues a recipe number corresponding to the lot ID, and the process end notifying unit 215 receives the lot ID from the processing apparatus. A processing end notification step for notifying the host device 3 that the processing has been completed; After the processing history is written, the processing history transfer means 216 transfers the processing history data of the processing apparatus to the host device 3 and the next process content display control means 217 displays “Cassette removal” on the display screen. And the next process content display control process for controlling the display of the “entry stocker” or the “processing apparatus for the next process”.

  In the host device 3, upon receipt of the recipe number, the recipe registration means 311 registers the recipe contents corresponding to the recipe number in the database, and after the recipe contents are registered, the processing start instruction means 312 performs processing. Upon receiving a process start instruction step for instructing the apparatus to “start processing” and a process end notification, the process history write instruction means 313 instructs the management personal computer 2 to write process history data. A history writing instruction step, a processing history registration means 314 that receives the transfer processing history data from the management personal computer 2 and registers the processing history data of the processing device in the database 32, and a next step content display instruction Means 315 for instructing the management personal computer 2 to display the contents of the next process; It has.

  The above has described the management personal computer 2 and the card reader 4 as work interfaces between the host device 3 and the worker. Next, even in a production line with an offline device as a processing device, the production management system 1 Another function of the management personal computer 2 that realizes the pseudo online management according to the above will be described in detail with reference to FIG.

  With the production management system 1 of the present embodiment described above, the operator, who is an operator, circulates a predetermined route by manual conveyance at a predetermined cycle, whereby the display screen of the management personal computer 3 or the data card (RF- According to the production information displayed on the work instruction screen of the ID tag), even if the processing device cannot receive the lot automatically by the offline device, it can reliably perform accurate work processing and lot transportation / next process processing. . As a result, it is possible to reliably realize work efficiency and prevention of work errors by performing navigation for work management and labor saving in a production line having a manual transport / offline device.

  FIG. 4 is a layout diagram of a plurality of processing devices, a management personal computer 2 and a host device 3 which are offline devices in the production management system of FIG.

  In FIG. 4, the offline device 6 is lit so that the processing device can be confirmed to be abnormal (alarm), operation / non-operation (maintenance (forced stop), processing possible, processing in progress, processing end, processing waiting), etc. A signal tower 61 is provided. The signal tower 61 of the offline device 6 is widely used for detecting the device state such as operation / non-operation, which is the original purpose. By reading a signal tower signal / warning signal (hereinafter, simply referred to as a signal tower signal) including the device status information, the offline device 6 can be pseudo-online and the device status of the offline device 6 can be obtained in real time. . A decoder device 63 that reads various signals is provided on the signal line 62 connected to the signal tower 61 and is read by an electronic device capable of online communication of the management personal computer 2, so that the device body of the offline device 6 is not modified. The device status information of the offline device 6 is transmitted from the management personal computer 2 to the host device 3 that performs process management.

  This production management system 1 includes a host device 3 having a lot process flow progress management function and one or more processing devices including at least one offline device 6 and devices added to the offline device 6. Read the signal tower signal (including alarm signal) that informs the operating status by lighting / non-lighting, and the device status information of the offline device 6 (abnormality (alarm) and operating / non-operating status information; whether the device is free) ) To the host device 3, and the host device 3 includes at least device status information (abnormality (alarm) and operation / operation) of one or a plurality of processing devices including the offline device 6. Non-operating state information (information on whether or not the device is free)) via each management personal computer 2 And outputs the work instruction information.

  In this case, when a signal that requires work is detected simultaneously from a plurality of offline devices 6 in the host device 3, the processing priority of lots, the worker's current location, etc. are comprehensively determined and managed for each offline device 6. The work instruction information is output to the personal computer 2. That is, when a signal requiring work is detected simultaneously from one or a plurality of processing devices including at least the off-line device 6, the host device 3 comprehensively determines the production conditions such as the processing priority of lots and the worker's current location. Thus, the work instruction information is output via each management personal computer 2 of at least one processing apparatus including the off-line apparatus 6. Further, the processing end time is predicted from the processing start signal included in the signal tower signal read from the offline device 6 and the process time of the offline device 6 registered in advance, and the work is reserved in the management personal computer 2 for each offline device 6. Output instructions. The host device 3 predicts the processing end time from the processing start signal read from one or a plurality of processing devices including at least the offline device 6 and the process time registered in advance, and includes at least one or more of the offline devices 6 Work reservation instruction information is output via each management personal computer 2 of each of the plurality of processing devices.

  The lot work instruction information via each management personal computer 2 is displayed and output on the display screen of the display unit 23 of each management personal computer 2 as text or a pattern, or by a buzzer or the like at the time of abnormality (alarm). It is possible to output a voice or output various instructions to the worker.

  As a production management method using this production management system 1, a signal tower signal (including an alarm signal) that informs the operation status of the device attached to the offline device 6 by lighting / non-lighting is read, and the device of the offline device 6 is read. The management personal computer 2 transfers the status information to the host device 3, and the host device 3 outputs work instruction information on the lot of the offline device via the management personal computer 2 based on the device status information of the offline device 6. That is, the production management method of the present embodiment reads a signal tower signal (including an alarm signal) that informs the operation status of the device added to the offline device 6 by lighting / non-lighting, and includes at least the offline device 6. Each management personal computer 2 transfers the device status information of a plurality of processing devices to the host device 3, and the host device 3 responds based on the device status information of one or more processing devices including at least the offline device 6. Through each management personal computer 2, work instruction information on lots of one or a plurality of processing apparatuses including at least the off-line apparatus 6 is output. In this case, the management personal computer 2 uploads the device status information to the host device 3, and based on the uploaded device status information, the host device 3 downloads the lot work instruction information to each management personal computer 2 corresponding thereto. .

  As described above, the host device 3 that performs process management by grasping the operation / non-operation state of the device in real time from the signal tower signal including the device state information (operation / non-operation state information) of the offline device 6 An in-process production work (lot) conveyance / processing instruction can be accurately displayed on the display screen of the management personal computer 2 every six. Further, it is possible to reliably notify the operator who is in a position where the signal tower 61 is not visible, by displaying on the display screen of the management personal computer 2 for each offline device 6. At the same time, when a signal necessary for the work is generated, the host device 3 that performs the process management determines the priority, and the work priority is determined by a display instruction on the display screen of the management personal computer 2 for each offline device 6. Can be managed. Furthermore, since the process end time can be predicted from the process start time, it is possible to improve the work efficiency of the worker (labor saving) by incorporating a function such as giving a prior (planned) work instruction to the worker. . Further, the host device 3 can automatically collect the device operation status data of the offline device 6, and the operation rate management which has been manually accumulated can be performed in real time and accurately, so that the process such as line balance can be performed. Improvement is possible.

  As mentioned above, although this invention has been illustrated using preferable embodiment of this invention, this invention should not be limited and limited to this embodiment. It is understood that the scope of the present invention should be construed only by the claims. It is understood that those skilled in the art can implement an equivalent range based on the description of the present invention and the common general technical knowledge from the description of specific preferred embodiments of the present invention. Patents, patent applications, and documents cited herein should be incorporated by reference in their entirety, as if the contents themselves were specifically described herein. Understood.

  Semiconductor devices such as light-emitting diodes (LEDs) and semiconductor light-emitting elements such as semiconductor laser elements are used in redevelopment of LSI manufacturing plants to compound semiconductor factories and manual factories using one or more processing devices including offline devices. In the field of production management system and production management method for managing production at the time of manufacturing, device status information is read from a management personal computer to a host device that performs process management by reading a signal tower signal (including a warning signal) of an offline device. The production management system including the offline device is managed by the host device, so even on a production line with an offline device, it is possible to realize a pseudo online management by the production management system. Production equivalent to on-line control in scale lines and locally distributed lines It is possible to carry out the management efficiently and reliably.

1 Production Management System 2 Management Personal Computer 21, 31 CPU (Central Processing Unit)
22 Input device 23 Display unit 24 ROM
25 RAM
32 Database 211 Data input means 212 Flow collation means 213 Collation result display control means 214 Recipe number issuing means 215 Process end notification means 216 Process history transfer means 217 Next process content display control means 3 Host device 311 Recipe registration means 312 Process start instruction means 313 Processing history write instruction means 314 Processing history registration means 315 Next process content display instruction means 4 Card reader 5 Data card giving device 51 Stocker management personal computer 52 Data card printer 53 Data card 54 Source stocker 6 Offline device 61 Signal tower 62 Signal Line 63 decoder device

Claims (5)

In a semiconductor manufacturing process for manufacturing semiconductor elements using a plurality of processing devices in which online devices and offline devices are mixed ,
Reading a host device having a processing flow progress management function of the lot with respect to said plurality of processing devices, a signal tower signal informing device operation status which is added to the off-line unit at the lighting and non-lighting, the off-line device have the device status information and respective management personal computer of the plurality of processing apparatus including a management personal computer of the offline device whenever transmitting to the host device, said host device, said online apparatus and offline apparatus coexist Production that outputs work instruction information for each lot of a plurality of processing devices in which the online device and the offline device are mixed , based on the device status information of the plurality of processing devices, via the management personal computer of the corresponding processing device Management system. When a signal requiring work is detected simultaneously from a plurality of processing devices in which the online device and the offline device are mixed , the host device comprehensively determines the production conditions such as the processing priority of the lot and the worker's current location. The production management system according to claim 1, wherein the operation instruction information is output through the management personal computer of each of the plurality of processing devices in which the online device and the offline device are mixed . The host device predicts a processing end time from a processing start signal read from each of a plurality of processing devices in which the online device and the offline device are mixed, and a pre-registered process time, and the online device and the offline device The production management system according to claim 1, wherein work reservation instruction information is output via each management personal computer of a plurality of mixed processing apparatuses.   2. The management personal computer uploads the device status information to the host device, and based on the uploaded device status information, the host device downloads lot work instruction information to a corresponding management personal computer. Production management system. A production management method using the production management system according to claim 1,
Reads the signal tower signal that informs the operation status of the device attached to the offline device by turning on / off, and the management personal computer transfers the device status information of the offline device to the host device. A production management method for outputting work instruction information of a lot of the offline device via the management personal computer based on the device status information of the offline device.