JP5316067B2 - Grinding method for annular workpiece - Google Patents

Grinding method for annular workpiece Download PDF

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JP5316067B2
JP5316067B2 JP2009038059A JP2009038059A JP5316067B2 JP 5316067 B2 JP5316067 B2 JP 5316067B2 JP 2009038059 A JP2009038059 A JP 2009038059A JP 2009038059 A JP2009038059 A JP 2009038059A JP 5316067 B2 JP5316067 B2 JP 5316067B2
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annular workpiece
workpiece
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剛士 大坂
イオリ 中原
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NSK Ltd
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Description

本発明は、電磁チャック機構により把持した環状工作物の外周面又は内周面を回転砥石で研削すると共に、研削部位には研削液を噴射供給して、センタレス研削方式で環状工作物の研削を行う環状工作物の研削加工方法に関する。 The present invention grinds the outer peripheral surface or inner peripheral surface of an annular workpiece gripped by an electromagnetic chuck mechanism with a rotating grindstone, and injects and supplies a grinding fluid to the grinding portion to grind the annular workpiece by a centerless grinding method. about the grinding how the annular workpiece to perform.

これまで、センタレス研削方式で環状工作物の外周面又は内周面の研削を行う環状工作物の研削加工において、真円度を向上させる対策として、回転砥石の回転数を監視し、回転砥石の回転数と工作物の回転数との比である回転数比が整数にならないように、工作物の回転数を制御する技術(下記特許文献1参照)や、工作物の外周面の支持箇所を4点に増やし、回転砥石及び調整車による2点支持との協働で研削加工時における工作物の剛性を向上させて、研削加工時における工作物の歪み変形を低減させる技術(下記特許文献2参照)が提案されている。   Until now, as a measure to improve the roundness in the grinding of an annular workpiece that grinds the outer peripheral surface or inner peripheral surface of the annular workpiece by the centerless grinding method, the rotational speed of the rotating grindstone is monitored, A technique for controlling the rotational speed of the workpiece (see Patent Document 1 below) and a supporting portion of the outer peripheral surface of the workpiece so that the rotational speed ratio, which is the ratio between the rotational speed and the rotational speed of the workpiece, does not become an integer. Technology that increases the rigidity of the workpiece during grinding by cooperation with the two-point support by the rotating grindstone and the adjustment wheel to reduce the distortion deformation of the workpiece during grinding (Patent Document 2 below) Have been proposed).

特開平4−256573号公報JP-A-4-256573 実用新案登録 第2584839号公報Utility Model Registration No. 2584839

ところが、上記特許文献1の技術では、フィードバック制御のために制御装置が繁雑化するという問題があり、また、特許文献2の技術では、工作物の支持箇所が増えるために、支持装置の構成が繁雑化するという問題があった。   However, the technique of Patent Document 1 has a problem that the control device becomes complicated due to feedback control, and the technique of Patent Document 2 has a configuration of the support device because the number of support points of the workpiece increases. There was a problem of complications.

一方、本願発明者は、各種の実験結果を解析した結果、研削サイクル中には、工作物支持手段から作用する把持力、工作物の研削部位に噴射供給される研削液の圧力等の各種の外力が工作物に作用しており、薄肉環状工作物の仕上げ工程の場合では、上記の各種の外力が工作物に歪み変形を生じさせる要因となっており、これが真円度の低下に大きく影響していることを知見した。   On the other hand, the inventor of the present application has analyzed various experimental results, and as a result, during the grinding cycle, the gripping force acting from the workpiece support means, the pressure of the grinding fluid sprayed and supplied to the grinding portion of the workpiece, etc. In the case of the finishing process of thin-walled annular workpieces, external forces are acting on the workpiece, and the various external forces mentioned above cause distortion deformation in the workpiece, which greatly affects the reduction in roundness. I found out that

本発明の目的は上記課題を解消することにあり、制御装置の繁雑化を招くフィードバック制御が不要であり、また、工作物を支持する支持装置の構成の繁雑化を招く工作物の支持箇所の増加も不要で、薄肉環状工作物の真円度を安価に向上させることができる環状工作物の研削加工方法を提供することにある。 An object of the present invention is to eliminate the above-described problems, and feedback control that causes complication of the control device is unnecessary, and the support portion of the work piece that causes complication of the configuration of the support device that supports the work piece. also increased unnecessary to provide a grinding how the annular workpiece can be inexpensively improved roundness of the thin annular workpiece.

上記目的は下記構成により達成される。
(1) 電磁チャック機構により把持した環状工作物の外周面又は内周面を、削部位に削液を噴射供給しながら、センタレス研削方式で回転砥石によって研削する環状工作物の研削加工方法であって、
研削サイクルの仕上げ工程では、マグネットコイルに流す電流の切り替え時に減衰脱磁を実施するとともに、前記電磁チャック機構に通電する電流を減少させて、前記環状工作物に外力として作用している着磁力による把持力を低減させることにより該環状工作物に作用する外力を低減させるとを特徴とする環状工作物の研削加工方法。
The above object is achieved by the following configuration.
(1) the outer or inner peripheral surface of the annular workpiece gripped by an electromagnetic chuck mechanism, while spraying supplied Ken Kezueki to Grinding site grinding method of cyclic Facilities to be ground by the grinding wheel at a centerless grinding method Because
In the finishing process of the grinding cycle , attenuation demagnetization is performed at the time of switching the current flowing through the magnet coil, and the current applied to the electromagnetic chuck mechanism is reduced to reduce the current applied to the annular workpiece by an applied magnetic force. grinding method of cyclic workpiece characterized that you reduce the external force acting on the annular workpiece by reducing the gripping force.

(2) 上記(1)において、 前記研削サイクルの仕上げ工程時は、前記研削部位に噴射される研削液量を減らして、前記環状工作物に作用する外力を低減させることを特徴とする環状工作物の研削加工方法。 In (2) above (1), at the time of finishing of the grinding cycle, annular reduce the grinding fluid amount injected to said grinding portion, and wherein reducing the external force acting on the annular workpiece Workpiece grinding method.

上記の環状工作物の研削加工方法では、研削サイクルの仕上げ工程において環状工作物に作用する外力を低減させることで、仕上げ工程中の前記外力による前記環状工作物の弾性変形量を低減させることができ、これにより、薄肉環状工作物の真円度を向上させることができる。
また、研削サイクルの仕上げ工程において環状工作物に作用する外力としては、例えば、研削部位に噴射供給される研削液の圧力、電磁チャック機構の着磁力による把持力、研削砥石から受ける研削力などがあるが、これらのいずれの外力を低減させる場合も、制御装置の繁雑化を招くフィードバック制御が不要であり、また、工作物を支持する支持装置の構成の繁雑化を招く工作物の支持箇所の増加も不要であるため、より安価に、薄肉環状工作物の真円度向上を図ることができる。特に、減衰脱磁を行うことにより、加工速度に応じた着磁力に切り替えることができ、また、加工終了後の減衰脱磁により工作物の残留磁力を確実に除去できる。
In the above-described grinding method of the annular workpiece, it is possible to reduce the amount of elastic deformation of the annular workpiece due to the external force during the finishing process by reducing the external force acting on the annular workpiece in the finishing process of the grinding cycle. This can improve the roundness of the thin annular workpiece.
The external force acting on the annular workpiece in the finishing process of the grinding cycle includes, for example, the pressure of the grinding fluid injected and supplied to the grinding site, the gripping force due to the magnetic force of the electromagnetic chuck mechanism, and the grinding force received from the grinding wheel. However, when any of these external forces is reduced, feedback control that causes the control device to become complicated is not necessary, and the structure of the support device that supports the workpiece becomes complicated. Since no increase is required, the roundness of the thin annular workpiece can be improved at a lower cost. In particular, by performing the demagnetization, it is possible to switch to the magnetizing force according to the machining speed, and it is possible to reliably remove the residual magnetic force of the workpiece by the demagnetization after the machining.

本発明に係る環状工作物の研削加工方法を実現する研削加工装置の第1の実施の形態の概略構成図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic block diagram of 1st Embodiment of the grinding apparatus which implement | achieves the grinding method of the annular workpiece which concerns on this invention. 図1に示した研削加工装置のA矢視図で、電磁チャック機構の概略構成図である。FIG. 2 is a schematic diagram of an electromagnetic chuck mechanism, as viewed from the A arrow of the grinding apparatus shown in FIG. 1. 図2に示した電磁チャック機構のマグネットコイルに給電するチャック電源の説明図である。It is explanatory drawing of the chuck | zipper power supply which supplies electric power to the magnet coil of the electromagnetic chuck mechanism shown in FIG. 図1に示した研削加工装置における研削サイクル中の動作制御を示すタイムチャートである。It is a time chart which shows the operation control in the grinding cycle in the grinding processing apparatus shown in FIG. 研削加工時の研削液流量と真円度との相関を示すグラフである。It is a graph which shows the correlation with the grinding fluid flow rate at the time of grinding, and roundness. 研削加工時のチャック電源電流と真円度との相関を示すグラフである。It is a graph which shows the correlation with the chuck | zipper power supply current at the time of grinding, and roundness. 本発明に係る環状工作物の研削加工方法を実現する研削加工装置の第2の実施の形態の概略構成図である。It is a schematic block diagram of 2nd Embodiment of the grinding-work apparatus which implement | achieves the grinding-work method of the annular workpiece which concerns on this invention. 本発明に係る環状工作物の研削加工方法を実現する研削加工装置の第3の実施の形態の概略構成図である。It is a schematic block diagram of 3rd Embodiment of the grinding device which implement | achieves the grinding method of the annular workpiece which concerns on this invention.

以下、本発明に係る環状工作物の研削加工方法及び装置の好適な実施の形態について、図面を参照して詳細に説明する。
図1は本発明に係る環状工作物の研削加工方法を実現する研削加工装置の第1の実施の形態の概略構成図、図2は図1に示した研削加工装置のA矢視図で、電磁チャック機構の概略構成図、図3は電磁チャック機構に給電するチャック電源の説明図である。
DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a method and an apparatus for grinding an annular workpiece according to the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic configuration diagram of a first embodiment of a grinding apparatus that realizes a grinding method for an annular workpiece according to the present invention, and FIG. 2 is a view as viewed from an arrow A of the grinding apparatus shown in FIG. FIG. 3 is an explanatory diagram of a chuck power supply for supplying power to the electromagnetic chuck mechanism.

この第1の実施の形態の環状工作物の研削加工装置100は、薄肉の転がり軸受用軌道輪やシリンダライナ等の環状工作物3を把持する電磁チャック機構21(図2参照)と、電磁チャック機構21に把持された環状工作物3の外周面に当接して環状工作物3の外周面の研削を行う回転砥石2と、研削部位に研削液(クーラント)23を噴射する研削液噴射ノズル1と、研削液噴射ノズル1に研削液23を供給する研削液供給手段25と、を備えていて、センタレス研削方式で環状工作物3の外周面の研削を行う。   An annular workpiece grinding apparatus 100 according to the first embodiment includes an electromagnetic chuck mechanism 21 (see FIG. 2) for holding an annular workpiece 3 such as a thin rolling bearing raceway or a cylinder liner, and an electromagnetic chuck. A rotating grindstone 2 that abuts on the outer peripheral surface of the annular workpiece 3 held by the mechanism 21 and grinds the outer peripheral surface of the annular workpiece 3, and a grinding fluid injection nozzle 1 that injects a grinding fluid (coolant) 23 onto the grinding part. And a grinding fluid supply means 25 for supplying the grinding fluid 23 to the grinding fluid spray nozzle 1, and the outer peripheral surface of the annular workpiece 3 is ground by a centerless grinding method.

電磁チャック機構21は、図2に示すように、環状工作物3の端部に当接するチャック軸8の周囲を囲み、隙間を介して配されるマグネットコイル7に通電することによって、チャック軸8に着磁力を発生させて環状工作物3の把持を行う。   As shown in FIG. 2, the electromagnetic chuck mechanism 21 encloses the periphery of the chuck shaft 8 that contacts the end of the annular workpiece 3, and energizes the magnet coil 7 disposed through a gap to thereby energize the chuck shaft 8. The annular work piece 3 is gripped by generating a magnetizing magnetic force.

本実施の形態の研削加工装置100の場合、電磁チャック機構21のマグネットコイル7は、図3に示すように、チャック電源9により通電される。チャック電源9は、マグネットコイル7に通電する電流を研削サイクル中に加減できるように構成されている。   In the case of the grinding apparatus 100 of the present embodiment, the magnet coil 7 of the electromagnetic chuck mechanism 21 is energized by a chuck power supply 9 as shown in FIG. The chuck power source 9 is configured so that the current supplied to the magnet coil 7 can be adjusted during the grinding cycle.

更に、本実施の形態の研削加工装置100の場合、電磁チャック機構21は、マグネットコイル7に流す電流の切り替え時に減衰脱磁を実施する。   Furthermore, in the case of the grinding apparatus 100 according to the present embodiment, the electromagnetic chuck mechanism 21 performs attenuation demagnetization when switching the current flowing through the magnet coil 7.

本実施の形態における研削液供給手段25は、研削液を圧送する研削液源27と研削液噴射ノズル1との間を2つの供給路31,32で接続している。それぞれの供給路31,32には、各供給路31,32における研削液23の流量を設定する流量調整弁4,5が設けられている。更に、一方の供給路32には、流量調整弁5の上流側に配置されて供給路32を開閉する電磁式の開閉弁6が装備されていて、研削サイクル中に電磁式の開閉弁6を開閉制御することによって研削液噴射ノズル1に供給する研削液量が加減できるようになっている。   In the present embodiment, the grinding fluid supply means 25 connects the grinding fluid source 27 for pumping the grinding fluid and the grinding fluid injection nozzle 1 by two supply paths 31 and 32. The supply passages 31 and 32 are respectively provided with flow rate adjusting valves 4 and 5 for setting the flow rate of the grinding fluid 23 in the supply passages 31 and 32. Furthermore, one supply path 32 is equipped with an electromagnetic on-off valve 6 that is disposed upstream of the flow rate adjusting valve 5 and opens and closes the supply path 32, and the electromagnetic on-off valve 6 is provided during the grinding cycle. By controlling the opening and closing, the amount of the grinding fluid supplied to the grinding fluid spray nozzle 1 can be adjusted.

以上に説明した研削液供給手段25において,2つの供給路31,32の流量調整弁4,5は、研削処理中は流路を開いた状態に維持される。また、供給路32に装備された電磁式の開閉弁6は、研削処理開始時には流路を開いた状態に制御されていて、粗加工工程が終了して仕上げ工程に入ると、供給路32の流路を閉じるように制御される。
即ち、本実施の形態の研削液供給手段25では、研削処理開始後、粗加工工程が終了するまでは、供給路31,32の双方から研削液23が研削液噴射ノズル1に供給されて、十分な量の研削液が研削部位に噴射される。しかし、仕上げ工程時には、供給路32からの供給が絶たれて、供給路31からの供給のみになるため、研削部位に噴射される研削液量を減らして、研削液の噴射により環状工作物に作用する外力を低減させる。
In the grinding fluid supply means 25 described above, the flow rate adjusting valves 4 and 5 of the two supply paths 31 and 32 are maintained in an open state during the grinding process. Further, the electromagnetic on-off valve 6 provided in the supply path 32 is controlled so that the flow path is opened at the start of the grinding process, and when the roughing process is completed and the finishing process is started, the supply path 32 It is controlled to close the flow path.
That is, in the grinding fluid supply means 25 of the present embodiment, the grinding fluid 23 is supplied from both the supply paths 31 and 32 to the grinding fluid injection nozzle 1 until the roughing process is completed after the grinding process is started. A sufficient amount of grinding fluid is sprayed onto the grinding site. However, during the finishing process, the supply from the supply path 32 is cut off, and only the supply from the supply path 31 is performed. Therefore, the amount of the grinding liquid injected to the grinding portion is reduced, and the grinding liquid is injected into the annular workpiece. Reduce the applied external force.

以上に説明した研削加工装置100では、研削サイクルの仕上げ工程時には、電磁式の開閉弁6により供給路32を閉じることによって、研削部位に噴射される研削液23量を減らして、環状工作物3に作用する外力を低減させる研削加工方法を実施する。   In the grinding device 100 described above, during the finishing process of the grinding cycle, the supply path 32 is closed by the electromagnetic on-off valve 6, thereby reducing the amount of the grinding liquid 23 injected to the grinding site, and the annular workpiece 3. Implement a grinding method that reduces external forces acting on the machine.

更に、研削加工装置100では、研削サイクルの仕上げ工程時には、電磁チャック機構21のマグネットコイル7に通電する電流を減少させて、電磁チャック機構21により環状工作物3に外力として作用している着磁力による把持力を低減させる研削加工方法を実施する。更に、電磁チャック機構21では、マグネットコイル7に流す電流の切り替え時に減衰脱磁を実施し、残留磁気の影響を無くす。そのため、仕上げ工程においてマグネットコイル7に通電する電流を減少させて電磁チャック機構21の着磁力を低減させるときには、確実に着磁力を低減させることができる。さらに、仕上げ工程終了時にも減衰脱磁を行うことにより、環状工作物3の残留磁力を確実に除去でき、後工程である超仕上げ工程での工作物の保持等を安定して行える。   Further, in the grinding apparatus 100, during the finishing process of the grinding cycle, the current applied to the magnet coil 7 of the electromagnetic chuck mechanism 21 is reduced, and the magnetized magnetic force acting as an external force on the annular workpiece 3 by the electromagnetic chuck mechanism 21. Implement a grinding method to reduce the gripping force caused by. Further, the electromagnetic chuck mechanism 21 performs attenuation demagnetization when switching the current flowing through the magnet coil 7 to eliminate the influence of residual magnetism. Therefore, when the current applied to the magnet coil 7 is reduced in the finishing step to reduce the magnetic force of the electromagnetic chuck mechanism 21, the magnetic force can be reliably reduced. Further, by performing the demagnetization at the end of the finishing process, the residual magnetic force of the annular workpiece 3 can be surely removed, and the workpiece can be stably held in the super-finishing process which is a subsequent process.

また、研削加工装置100では、研削サイクルの仕上げ工程時には、スパークアウトを実施して、研削部位に作用する研削力自体の低減も図る。
ここに、スパークアウトとは、加工の最終段階で回転砥石2の送り量を減少させたり、回転砥石2による切り込みを停止させたりすることで、仕上げ精度を向上させる作業を意味している。
Further, in the grinding apparatus 100, during the finishing process of the grinding cycle, sparking is performed to reduce the grinding force itself acting on the grinding part.
Here, the spark-out means an operation for improving the finishing accuracy by reducing the feed amount of the rotating grindstone 2 at the final stage of processing or stopping the cutting by the rotating grindstone 2.

図4は、以上の研削加工装置100において、研削サイクル中における研削液量、マグネットコイル7への通電電流、回転砥石2による研削力の変化を示すタイムチャートで、図の横軸がサイクル時間になっている。
図中の曲線f1はクロス動作の変化、曲線f2は研削液量の変化、曲線f3はマグネットコイル7への通電電流の変化、曲線f4は研削力の変化を示している。
図4に示すように、研削サイクルの仕上げ工程時には、研削液量、マグネットコイル7への通電電流、研削力のそれぞれが低減される。
FIG. 4 is a time chart showing the change in the grinding fluid amount, the energization current to the magnet coil 7 and the grinding force by the rotating grindstone 2 during the grinding cycle in the grinding apparatus 100 described above, and the horizontal axis of the figure is the cycle time. It has become.
In the figure, a curve f1 indicates a change in the cross operation, a curve f2 indicates a change in the amount of the grinding fluid, a curve f3 indicates a change in the energization current to the magnet coil 7, and a curve f4 indicates a change in the grinding force.
As shown in FIG. 4, during the finishing process of the grinding cycle, the amount of grinding fluid, the current applied to the magnet coil 7 and the grinding force are reduced.

以上に説明した研削加工装置100が実施する研削加工方法は、研削サイクルの仕上げ工程で環状工作物3に作用する外力を低減させるもので、具体的には、研削部位に噴射供給される研削液23の圧力、電磁チャック機構21の着磁力による把持力、回転砥石2から受ける研削力などの外力を、それぞれ低減させる。
その結果、仕上げ工程中の外力による環状工作物3の弾性変形量を低減させることができ、これにより、薄肉環状工作物3の真円度を向上させることができる。
The grinding method performed by the grinding device 100 described above is to reduce the external force acting on the annular workpiece 3 in the finishing process of the grinding cycle. Specifically, the grinding liquid sprayed and supplied to the grinding part The external force such as the pressure of 23, the gripping force due to the magnetizing force of the electromagnetic chuck mechanism 21, and the grinding force received from the rotating grindstone 2 are reduced.
As a result, the amount of elastic deformation of the annular workpiece 3 due to an external force during the finishing process can be reduced, and thereby the roundness of the thin annular workpiece 3 can be improved.

図5は、上記研削加工装置100による研削サイクルの仕上げ工程における研削液量と工作物の真円度との相関を示したもので、研削液量を低減させるほど、真円度が向上していて、仕上げ工程において研削液量を低減させることの有用性を確認することができた。   FIG. 5 shows the correlation between the amount of grinding fluid and the roundness of the workpiece in the finishing process of the grinding cycle by the grinding apparatus 100. The roundness is improved as the amount of grinding fluid is reduced. Thus, the usefulness of reducing the amount of grinding fluid in the finishing process could be confirmed.

図6は、上記研削加工装置100による研削サイクルの仕上げ工程におけるマグネットコイル7への通電電流と工作物の真円度との相関を示したもので、図中の曲線p1は減衰脱磁を実施したときの通電電流と真円度との相関を示し、図中の曲線p2は減衰脱磁を実施しなかったときの通電電流と真円度との相関を示している。
図6に示したように、マグネットコイル7への通電電流を低減させるほど、着磁力の低下で、環状工作物3の変形が軽減される結果、真円度が向上していることが分かる。また、減衰脱磁をした場合には減衰脱磁をしない場合よりも真円度が向上していて、仕上げ工程において減衰脱磁をしつつ、マグネットコイル7への通電電流を低減して、着磁力を減少させることの有用性を確認することができた。
FIG. 6 shows the correlation between the current applied to the magnet coil 7 and the roundness of the workpiece in the finishing process of the grinding cycle by the grinding apparatus 100, and the curve p1 in FIG. The curve p2 in the figure shows the correlation between the energization current and the roundness when the demagnetization is not performed.
As shown in FIG. 6, it can be seen that as the energization current to the magnet coil 7 is reduced, the circularity is improved as a result of the deformation of the annular workpiece 3 being reduced due to a decrease in the magnetizing force. In addition, when the demagnetization is performed, the roundness is improved as compared with the case where the demagnetization is not performed, and the current applied to the magnet coil 7 is reduced while the demagnetization is performed in the finishing process. The usefulness of reducing the magnetic force could be confirmed.

また、上記の研削液23の圧力、電磁チャック機構21の着磁力、回転砥石2からの研削力などの外力は、いずれの外力を低減させる場合も、制御装置の繁雑化を招くフィードバック制御が不要であり、また、工作物を支持する支持装置の構成の繁雑化を招く工作物の支持箇所の増加も不要であるため、本実施の形態の研削加工方法では、より安価に、薄肉環状工作物3の真円度向上を図ることができる。   Further, the external force such as the pressure of the grinding liquid 23, the magnetic force of the electromagnetic chuck mechanism 21 and the grinding force from the rotating grindstone 2 does not require feedback control that causes the control device to be complicated even when any external force is reduced. In addition, since it is not necessary to increase the number of supporting parts of the work piece that leads to the complexity of the structure of the support device that supports the work piece, the grinding method according to the present embodiment can reduce the thickness of the thin annular work piece. The roundness of 3 can be improved.

更に、研削サイクルの当初(例えば、粗加工工程)から研削部位に供給する研削液23量を減らした場合には、研削焼けや、サイクル時間の長大化等の不都合が生じる虞があるが、本実施の形態のように仕上げ工程から研削液23量を減らす場合にはそのような問題は発生せず、良好に研削処理を進めることができる。   Furthermore, if the amount of the grinding fluid 23 supplied to the grinding site is reduced from the beginning of the grinding cycle (for example, roughing process), there may be inconveniences such as grinding burns and lengthening of the cycle time. When the amount of the grinding liquid 23 is reduced from the finishing process as in the embodiment, such a problem does not occur, and the grinding process can be performed satisfactorily.

また、電磁チャック機構21のマグネットコイル7に通電する電流を減少させるだけでは、残留磁気の影響で着磁力が想定通りに低減せず、着磁力による把持力を想定通りに低減させることができなくなる虞がある。
しかし、本実施の形態の研削加工装置100が実施する研削加工方法では、電磁チャック機構21のマグネットコイル7に流す電流の切り替え時に減衰脱磁を実施するため、残留磁気の影響を無くして、確実に着磁力を低減させることができ、図6の曲線p1に示したように、チャック機構の把持力を確実に低減させて、真円度を確実に向上させることができる。
Further, simply reducing the current applied to the magnet coil 7 of the electromagnetic chuck mechanism 21 does not reduce the magnetizing force as expected due to the influence of residual magnetism, and the gripping force due to the magnetizing force cannot be reduced as expected. There is a fear.
However, in the grinding method performed by the grinding device 100 of the present embodiment, the demagnetization is performed when the current flowing through the magnet coil 7 of the electromagnetic chuck mechanism 21 is switched. As shown by the curve p1 in FIG. 6, the gripping force of the chuck mechanism can be reliably reduced, and the roundness can be reliably improved.

図7は、本発明に係る環状工作物の研削加工方法を実現する研削加工装置の第2の実施の形態の概略構成図である。
この第2の実施の形態の研削加工装置101は、第1の実施の形態の研削加工装置100の一部を改良したもので、研削液噴射ノズル1に研削液を供給する手段として、第1の実施の形態で使用した研削液供給手段25の代わりに、研削液供給手段26を使用したものである。
FIG. 7 is a schematic configuration diagram of a second embodiment of a grinding apparatus that realizes the method of grinding an annular workpiece according to the present invention.
The grinding apparatus 101 according to the second embodiment is an improvement of a part of the grinding apparatus 100 according to the first embodiment. Instead of the grinding fluid supply means 25 used in this embodiment, a grinding fluid supply means 26 is used.

第2の実施の形態の研削加工装置101は、研削液噴射ノズル1に研削液を供給する手段として、研削液供給手段26を採用した点以外の構成は、第1の実施の形態の構成と共通で良く、共通の構成については、同番号を付して説明を省略する。   The configuration of the grinding apparatus 101 of the second embodiment is the same as that of the first embodiment except that the grinding fluid supply means 26 is used as the means for supplying the grinding fluid to the grinding fluid injection nozzle 1. Common components may be common, and the same components are denoted by the same reference numerals and description thereof is omitted.

第2の実施の形態に示した研削液供給手段26は、研削液を圧送する研削液源27と研削液噴射ノズル1との間を連絡する供給路34の途中に、供給する電気信号に比例した流量制御が可能な電磁比例制御弁14を装備したもので、研削サイクルの仕上げ工程時には、電磁比例制御弁14に入力する電気信号を低減させることで、供給路34を絞って、研削液噴射ノズル1から研削部位に供給される研削液量を減らす。
そのため、研削サイクルの仕上げ工程時には、研削液の噴射により環状工作物に作用する外力を低減させる研削加工方法を実施して、環状工作物3の真円度を向上させることができる。
The grinding fluid supply means 26 shown in the second embodiment is proportional to the electrical signal supplied in the middle of the supply path 34 that communicates between the grinding fluid source 27 that pumps the grinding fluid and the grinding fluid injection nozzle 1. The electromagnetic proportional control valve 14 capable of controlling the flow rate is equipped, and in the finishing process of the grinding cycle, the electric signal input to the electromagnetic proportional control valve 14 is reduced, thereby narrowing the supply path 34 and injecting the grinding fluid. The amount of grinding fluid supplied from the nozzle 1 to the grinding site is reduced.
Therefore, at the time of the finishing process of the grinding cycle, the roundness of the annular workpiece 3 can be improved by implementing a grinding method that reduces the external force acting on the annular workpiece by spraying the grinding fluid.

図8は本発明に係る環状工作物の研削加工方法を実現する研削加工装置の第3の実施の形態の概略構成図である。
第3の実施の形態の研削加工装置102は、チャック軸8の着磁力により環状工作物3の把持を行う電磁チャック機構21(図2参照)と、チャック軸8に把持された環状工作物3の外周面に当接して環状工作物3の外周面の研削を行う回転砥石2と、回転砥石2による研削部位に研削液23を噴射する研削液噴射ノズル15と、研削液噴射ノズル15に研削液23を圧送する研削液源27と、を備えて、センタレス研削方式で環状工作物3の外周面の研削を行う環状工作物の研削加工装置である。
FIG. 8 is a schematic configuration diagram of a third embodiment of a grinding apparatus for realizing the method of grinding an annular workpiece according to the present invention.
The grinding device 102 according to the third embodiment includes an electromagnetic chuck mechanism 21 (see FIG. 2) that holds the annular workpiece 3 by the magnetic force of the chuck shaft 8, and the annular workpiece 3 that is held by the chuck shaft 8. The rotating grindstone 2 that abuts the outer circumferential surface of the annular workpiece 3, the grinding fluid spray nozzle 15 that sprays the grinding fluid 23 onto the grinding portion by the rotating grindstone 2, and the grinding fluid spray nozzle 15 is ground. And a grinding fluid source 27 that pumps the fluid 23, and is a grinding device for an annular workpiece for grinding the outer peripheral surface of the annular workpiece 3 by a centerless grinding method.

回転砥石2、環状工作物3、研削液23を圧送する研削液源27等は、第1の実施の形態の研削加工装置100と共通である。   The grinding wheel 2, the annular workpiece 3, the grinding fluid source 27 for pumping the grinding fluid 23, and the like are common to the grinding device 100 of the first embodiment.

第3の実施の形態の研削加工装置102では、図に矢印Bで示すように、研削液噴射ノズル15が例えば水平方向に移動可能に装備されていて、研削サイクル中に、研削液噴射ノズル15の移動により環状工作物3に噴射される研削液23量を加減できるようになっている。   In the grinding apparatus 102 according to the third embodiment, as indicated by an arrow B in the figure, the grinding liquid injection nozzle 15 is provided so as to be movable in the horizontal direction, for example, and during the grinding cycle, the grinding liquid injection nozzle 15 is provided. Thus, the amount of the grinding fluid 23 sprayed onto the annular workpiece 3 can be adjusted.

そして、この研削加工装置102では、研削サイクルの仕上げ工程時には、研削液噴射ノズル15を粗加工工程で設定されていた基準位置から移動させることで、研削部位に噴射される研削液23量を減らして、環状工作物3に作用する外力を低減させる研削加工方法を実施する。   In the grinding apparatus 102, during the finishing process of the grinding cycle, the grinding liquid injection nozzle 15 is moved from the reference position set in the roughing process, thereby reducing the amount of the grinding liquid 23 injected to the grinding part. Thus, a grinding method for reducing the external force acting on the annular workpiece 3 is carried out.

従って、この研削加工装置102の場合も、研削サイクルの仕上げ工程時には、研削液23の噴射により環状工作物3に作用する外力が低減するため、外力の影響による環状工作物3の変形が抑止されて、真円度を向上させることができる。   Therefore, in the case of this grinding apparatus 102 as well, during the finishing process of the grinding cycle, the external force acting on the annular workpiece 3 due to the injection of the grinding fluid 23 is reduced, so that deformation of the annular workpiece 3 due to the influence of the external force is suppressed. Thus, the roundness can be improved.

また、研削部位への研削液23の供給量を低減させるための研削液噴射ノズル15の移動操作には、制御装置の繁雑化を招くフィードバック制御が不要であり、また、工作物を支持する支持装置の構成の繁雑化を招く工作物の支持箇所の増加も不要であるため、より安価に、薄肉環状工作物の真円度向上を図ることができる。   Further, the moving operation of the grinding fluid injection nozzle 15 for reducing the supply amount of the grinding fluid 23 to the grinding site does not require feedback control that causes the control device to become complicated, and supports for supporting the workpiece. Since it is not necessary to increase the number of supporting parts of the workpiece that causes the configuration of the apparatus to be complicated, the roundness of the thin annular workpiece can be improved at a lower cost.

なお、上記の各実施形態では、環状工作物の外周面の研削を行う研削加工装置を示したが、本発明に係る環状工作物の研削加工方法及び装置は、環状工作物の内周面の研削を行う場合にも適用可能であることは言うまでもない。   In each of the above-described embodiments, the grinding device for grinding the outer peripheral surface of the annular workpiece has been shown. However, the grinding method and apparatus for the annular workpiece according to the present invention is applicable to the inner peripheral surface of the annular workpiece. Needless to say, the present invention is also applicable to grinding.

また、上記の実施形態では、研削サイクルの仕上げ工程では、研削部位に噴射供給される研削液の圧力、電磁チャック機構の着磁力による把持力、研削砥石から受ける研削力などの複数の外力を低減させたが、例えば研削液の圧力のみを低減させたり、あるいは、電磁チャック機構の着磁力のみを低下させたりすることで、真円度の向上を図るようにしても良い。
但し、上記の実施の形態で示したように、同時に複数の外力を低減させれば、それだけ環状工作物3の変形を抑止する効果が大きくなり、より真円度の高い研削加工が可能になる。
Further, in the above embodiment, in the finishing process of the grinding cycle, a plurality of external forces such as the pressure of the grinding liquid injected and supplied to the grinding site, the gripping force due to the magnetic force of the electromagnetic chuck mechanism, and the grinding force received from the grinding wheel are reduced. However, the roundness may be improved, for example, by reducing only the pressure of the grinding fluid or by reducing only the coercive force of the electromagnetic chuck mechanism.
However, as shown in the above-described embodiment, if a plurality of external forces are simultaneously reduced, the effect of suppressing the deformation of the annular workpiece 3 is increased, and grinding with higher roundness becomes possible. .

1 研削液噴射ノズル
2 回転砥石
3 環状工作物
4,5 流量調整弁
6 電磁式の開閉弁
7 マグネットコイル
8 チャック軸
14 電磁比例制御弁
15 研削液噴射ノズル
21 電磁チャック機構
23 研削液
25,26 研削液供給手段
27 研削液を圧送する研削液源
31,32,34 供給路
100,101,102 研削加工装置
DESCRIPTION OF SYMBOLS 1 Grinding liquid injection nozzle 2 Rotating grindstone 3 Annular workpieces 4, 5 Flow control valve 6 Electromagnetic on-off valve 7 Magnet coil 8 Chuck shaft 14 Electromagnetic proportional control valve 15 Grinding liquid injection nozzle 21 Electromagnetic chuck mechanism 23 Grinding liquid 25, 26 Grinding fluid supply means 27 Grinding fluid source 31, 32, 34 supply path 100, 101, 102 Grinding device for pumping the grinding fluid

Claims (2)

電磁チャック機構により把持した環状工作物の外周面又は内周面を、研削部位に研削液を噴射供給しながら、センタレス研削方式で回転砥石によって研削する環状工作物の研削加工方法であって、
研削サイクルの仕上げ工程では、マグネットコイルに流す電流の切り替え時に減衰脱磁を実施するとともに、前記電磁チャック機構に通電する電流を減少させて、前記環状工作物に外力として作用している着磁力による把持力を低減させることにより該環状工作物に作用する外力を低減させることを特徴とする環状工作物の研削加工方法。
A grinding method for an annular workpiece in which an outer peripheral surface or an inner peripheral surface of an annular workpiece gripped by an electromagnetic chuck mechanism is ground with a rotating grindstone in a centerless grinding method while supplying a grinding liquid to a grinding site.
In the finishing process of the grinding cycle, attenuation demagnetization is performed at the time of switching the current flowing through the magnet coil, and the current applied to the electromagnetic chuck mechanism is reduced to reduce the current applied to the annular workpiece by an applied magnetic force. A grinding method for an annular workpiece, wherein an external force acting on the annular workpiece is reduced by reducing a gripping force.
前記研削サイクルの仕上げ工程時では、前記研削部位に噴射される研削液量を減らして、前記環状工作物に作用する外力を低減させることを特徴とする請求項1に記載の環状工作物の研削加工方法 2. The grinding of the annular workpiece according to claim 1, wherein an external force acting on the annular workpiece is reduced by reducing an amount of a grinding fluid sprayed to the grinding portion at a finishing step of the grinding cycle. Processing method .
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