JP5309930B2 - Drawing data creation program, drawing data creation method, drawing data creation device, drawing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a program, method and device for creating drawing data, improving throughput by reducing the data volume of drawing data and a creation time and a drawing time of the drawing data, and a drawing system. <P>SOLUTION: A pattern figure Z of design data Da is decomposed into figure units of drawing units; with respect to each line segment of a closed figure defined by a plurality of line segments and a plurality of vertexes, width provision having a predetermined width in the vertical direction to the line segment is carried out outside or inside the closed figure; a region inside the region of the width provision is set as an inner part or a first pattern region; whether each line segment of the closed figure is an overlapping line segment overlapping another adjacent closed figure or non-overlapping line segment without overlapping it is determined; and an outline part or a second pattern region is set by attaching information related to whether the width provision is carried out in the vertical direction of the line segment depending on whether the line segment is the overlapping one or the non-overlapping one. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a drawing data creation program, a drawing data creation method, a drawing data creation device, and a drawing system used for forming a fine pattern.

2. Description of the Related Art Conventionally, in a drawing apparatus that is used for forming a fine pattern such as a semiconductor element or MEMS (Micro Electro Mechanical Systems) and performs electron beam drawing or laser drawing, the outline of a pattern figure is mainly divided into line segments and vertices on drawing data. It is defined so that the start point and end point of the line segment must match. Then, a pattern drawing method is mainly used with the inside surrounded by the line segment as one drawing region.
In order to obtain such drawing data, generally, logical operation processing for creating mask layer data by using design data such as GDSII output after pattern design is completed, and wafer processing, It is necessary to perform many graphic data processing such as OPC pattern and dummy pattern generation processing required for the process, and sizing processing for mask creation, and the processing load is increasing. .
Moreover, high integration and miniaturization of pattern sizes of semiconductor elements and the like are progressing day by day, and the amount of data for drawing itself has become very large.

In recent years, depending on the type of mask, it may be necessary to perform multiple drawing and multiple processes in order to create a single mask in order to increase the complexity of the structure and improve the drawing throughput. The processing load, the complexity of data handling, and the like are increasing, such as the need for processing such as pattern separation and division, and separate drawing data for drawing a plurality of times as a result.
For this reason, various drawing methods for maintaining high productivity without reducing drawing accuracy have been proposed (see, for example, Patent Documents 1 to 3).
In any of the drawing methods described in Patent Documents 1 to 3, the pattern contour portion and the inner portion thereof are regarded as different separate areas, the pattern drawing data of the contour portion only, and the pattern of the inner portion only. The drawing data is created, and each pattern is drawn separately. For example, a pattern only in the contour part of the drawing data is drawn by a high-precision drawing apparatus excellent in electron beam drawing of a minute spot, and a pattern only in the inner part is a variable shaped electron beam drawing apparatus or laser drawing apparatus with high throughput. The drawing accuracy is increased and the throughput is achieved by drawing with a larger shot hit size.
Japanese Patent Laid-Open No. 10-209000 Japanese Patent No. 2854674 JP 2003-195511 A

  However, the conventional methods described in Patent Documents 1 to 3 capture the contour pattern and the inner pattern as separate patterns, are created as separate drawing data, and perform drawing separately. . For this reason, there is a problem that the creation time of drawing data is increased, the work load is increased, the amount of drawing data is increased, the drawing time is increased, and the productivity is lowered.

  An object of the present invention is to reduce a data amount of drawing data for drawing using an electron beam or a laser, reduce a drawing data creation time or drawing time, and improve a throughput, a drawing data creation program, To provide a drawing data creation method, a drawing data creation device, and a drawing system.

The present invention solves the above problems by the following means. In addition, in order to make an understanding easy, although the code | symbol corresponding to embodiment of this invention is attached | subjected and demonstrated, it is not limited to this.
A first invention is a drawing data creation program for creating drawing data from design data of a drawing apparatus that performs drawing using an electron beam or a laser based on drawing data, the computer (30) including the design data (Da) pattern figure (Z) is decomposed into a plurality of drawing unit figures, and a closed figure defining means for defining the outer circumference of the drawing unit figure as a closed figure expressed by a plurality of line segments and a plurality of vertices ( 131, S202 to S204), width information accepting means (132, S205) for accepting input of width information for performing a width of a predetermined dimension to the inside of the closed figure, and the width to the inside of the closed figure A first drawing area that performs widthing in the vertical direction based on the information and assigns information for setting an area inside the area to be widened as a first drawing area to the line segment Report giving means (333, S206, S214) and overlapping line segment determining means (334, 34) for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment. S215, S216) and information for setting the width to the inside of the closed figure based on the width information and setting the area to be widened as the second drawing area for the overlapping line segment The second drawing area information assigning means (334, S217, S219) is associated with each line segment and the information set as the first drawing area assigned to each line segment, and each overlapping line segment and each overlapping line are associated with each other. min in association with information to be set as the applied second drawing area, wherein the drawing data output means for be included in the drawing data output (15, S221), to function as a drawing de Is a data creation program.
The second invention is the drawing data creation program of the first invention, the in the second drawing area information adding means (334), wherein for non-overlapping segments, not performed width with the inside of the closed figures Is a drawing data creation program characterized by giving the information (S218).

A third invention is a drawing data creation program for creating drawing data from design data of a drawing apparatus that performs drawing using an electron beam or a laser based on drawing data, the computer (10, 30), A closed figure definition that decomposes the pattern figure (Z) of the design data (Da) into a plurality of drawing unit figures and defines the outer periphery of the drawing unit figure as a closed figure expressed by a plurality of line segments and a plurality of vertices. Means (131, S102 to S104, S202 to S204), width information accepting means (132, S105, 332, S205) for accepting input of width information for width outward of the closed figure, and outside of the closed figure to perform a wide with the vertical direction of the line segment on the basis of the width with information, the information for setting a region inside the region to be the width with a first drawing area First drawing area information assigning means (132, S106, 333, S206, S208) assigned to the line segment, and the line segment is an overlapping line segment overlapping with another adjacent closed figure, or a non-overlapping line Overlapping line segment determination means (133, 134, S107, S108, 334, S209, S210) for determining whether the line is a minute, and the non-overlapping line segment to the outside of the closed figure based on the width information. A second drawing area information giving means (134, S110, 334, S212, S213) for giving a width and giving information for setting the widened area as a second drawing area; and each line segment and each line segment and information that is set as the first drawing area assigned to the information to be set as the non-overlapping segments, and wherein the second drawing area assigned to non-overlapping segments, the drawing data (Db, D Drawing data output means (15) included in the outputs, S113, S221) and a drawing data creation program for causing to function as.
A fourth invention, the drawing data creation program of the third aspect of the present invention, in the second drawing area information providing means (134,334), with respect to the overlapping line, perform the width with the outside of the closed figures This is a drawing data creation program characterized by giving information that there is no information (S109, S211).
A fifth invention, in the drawing data creation program of the second or fourth invention, the in the second drawing area information providing means (133,134,334), information to be attached width is applied to the non-overlapping segments Is a drawing data creation program characterized in that it is prioritized over the information to be given to the overlapping line segments.

A sixth invention is a drawing data creation program for creating drawing data from design data of a drawing apparatus that performs drawing using an electron beam or a laser based on drawing data, the computer (30) comprising the design data (Da) pattern figure (Z) is decomposed into a plurality of drawing unit figures, and a closed figure defining means for defining the outer circumference of the drawing unit figure as a closed figure expressed by a plurality of line segments and a plurality of vertices ( 131, S202 to S204), width information accepting means (332, S205) for accepting the input of width information for performing the inside or outside of the closed figure, and the width information to the inside of the closed figure. In the case of the input of the width information, the inner processing means is used, and in the case where the information input to the receiving means is the input of the width information to the outside, it functions as the outer processing means. The inner processing means performs a width in the vertical direction of the line segment on the inner side of the closed figure based on the width information, and sets an area inside the area to be widened as a first drawing area. First drawing area information adding means (333, S206, S214) for assigning information to the line segment, and whether the line segment is an overlapping line segment that overlaps with another adjacent closed figure, or a non-overlapping line segment The overlapping line segment determining means (334, S215, 216) for determining whether or not the overlapping line segment is subjected to a width to the inside of the closed figure based on the width information and the width is increased. a second drawing area information providing means for providing the information for setting the area as a second drawing area (334, S217, S219), and information to be set as a first drawing area assigned to the line segment and the line segment Association, each said duplicate Min and in association with the information to be set as the second drawing area assigned to each overlapping segment, to function as the drawing data output means for outputting be included in the drawing data (15, S221), said outer processing means To the outside of the closed figure in the vertical direction based on the width information, and set the area inside the area to be widened as a first drawing area , First drawing area information assigning means (333, S206, S208) to be given to the minute and whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment is determined. Overlapping line segment determination means (334, S209, S210) and the non-overlapping line segment are subjected to a width to the outside of the closed figure based on the width information, and the region to be widened is second Information to set as drawing area Second non-overlapping line segments that associate the second drawing area information assigning means (334, S212, S213) for giving information with each line segment and the information set as the first drawing area given to each line segment. And the drawing data output means (15, S221) for associating with the information set as the second drawing area given to each of the non-overlapping line segments and outputting it in the drawing data. Is a drawing data creation program.

A seventh aspect of the drawing data creation program of the invention of any one of the first to sixth, a width dimension of the width with information is drawing data creation program characterized, is variable.
An eighth aspect of the invention, the drawing data creation program of the invention of any one of the first to seventh, wherein the closed figure definition means (131), two of said drawing basic figures adjacent the pattern shape of the design data A drawing data creation program characterized by decomposing so that overlapping sides have equal lengths.

A ninth invention is a drawing data creation method for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data, wherein the pattern data of the design data (Da) (Z) is divided into a plurality of drawing unit graphics, and a closed figure defining step (S202 to S204) for defining the outer periphery of the drawing unit figure as a closed figure expressed by a plurality of line segments and a plurality of vertices; Based on the width information receiving step (S205) for receiving the input of the width information for width inward of the closed graphic defined in the closed graphic defining step, and the width information input in the width information receiving step , Information is added to the line segment to set the area inside the closed figure in the vertical direction of the line segment and to set the area inside the area to be widened as the first drawing area First drawing area information providing step (S206, S214), and overlapping line segment determination step for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment (S215, S216) and information for setting the width of the overlapped line segment to the inside of the closed figure based on the width information and setting the area to be widened as a second drawing area The second drawing area information assigning step (S217, S219) to be performed, the line segments and the information set as the first drawing area assigned to the line segments, and the overlapping line segments and the overlapping line segments. A drawing data output step (S221) for associating with the information to be set as the second drawing area assigned to the image and outputting it in the drawing data (Dc). so That.

A tenth aspect of the present invention is a drawing data creation method for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data, the pattern data of the design data (Da) (Z) is decomposed into a plurality of drawing unit graphics, and a closed figure defining step (S102 to S104, S202 to S202) is defined as a closed figure expressed by a plurality of line segments and a plurality of vertices. S204), a width information receiving step (S205) for receiving an input of width information to be extended outside the closed graphic defined in the closed graphic defining step, and the width input inputted in the width information receiving step Based on the information, a width is applied to the outside of the closed figure in the vertical direction of the line segment, and an area inside the area to be widened is set as a first drawing area. A first drawing area information adding step (S106, S206, S208) for giving information to the line segment, and whether the line segment is an overlapping line segment overlapping with another adjacent closed figure, or a non-overlapping line segment The overlapping line segment determination step (S107, S108, S209, S210) for determining whether or not the non-overlapping line segment is subjected to a width to the outside of the closed figure based on the width information, and the width second drawing area information providing step of imparting information to set a region to be attached as the second drawing area (S110, S212, S213) and, set as the granted to each line segment and the line segment of the first drawing area A drawing data output step (S113) in which the non-overlapping line segment and the information set as the second drawing region assigned to the non-overlapping line segment are included in the drawing data (Db, Dc) and output. , And 221), a drawing data creation method characterized in that it comprises a.

An eleventh aspect of the present invention is a drawing data creation method for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data, the pattern data of the design data (Da) (Z) is divided into a plurality of drawing unit graphics, and a closed figure defining step (S202 to S204) for defining the outer periphery of the drawing unit figure as a closed figure expressed by a plurality of line segments and a plurality of vertices; A width information receiving step (S205) for receiving an input of width information for setting a width to the inside or outside of the closed graphic defined in the closed graphic defining step, and the width input inputted in the width information receiving step When the information is input of width information to the inside of the closed figure, it is an inner processing step, and the information input to the receiving means is the input of width information to the outside. A width direction determination step (S207) as an outer processing step, and the inner processing step widths the inside of the closed figure in the vertical direction of the line segment based on the width information. A first drawing area information providing step (S206, S214) for giving information for setting a range inside the area to be widened as the first drawing area to the line segment, and the line segment is adjacent An overlapping line segment determining step (S215, S216) for determining whether it is an overlapping line segment overlapping with another closed figure to be performed or a non-overlapping line segment, and the inside of the closed figure for each overlapping line segment A second drawing area information adding step (S217, S219) for assigning information for setting the widened area as a second drawing area to the overlapping line segments, and each line segment and The first drawing assigned to the line segment Associating the information to be set as a range, the associating information to be set as each overlapping segment and the second drawing area assigned to each overlapping segment, and outputs the included in the drawing data (Db) A drawing data output step (S221), wherein the outside processing step performs a width in the vertical direction of the line segment based on the width information to the outside of the closed figure; A first drawing area information adding step (S206, S208) for assigning information for setting an inner area as a first drawing area to the line segment, and an overlapping line in which the line segment overlaps with another adjacent closed figure Overlapping line segment determination step (S209, S210) for determining whether the segment is a non-overlapping line segment or a non-overlapping line segment, and the non-overlapping line segment is widened to the outside of the closed figure based on the width information. And the area to be widened A second drawing area information adding step (S212, S213) for giving information for setting a region as a second drawing area is associated with each line segment and information set as the first drawing area given to each line segment. A drawing data output step of associating each non-overlapping line segment and the information set as the second drawing area assigned to each non-overlapping line segment in the drawing data (Dc) for output (S221) The drawing data creation method is characterized by having

A twelfth aspect of the present invention is a drawing data creation device for creating the drawing data of a drawing device that performs drawing using an electron beam or a laser based on the drawing data from the design data, wherein the design data (Da) is input. data input unit (11), a storage unit for storing the drawing data creation program of the invention of any one of the first to eighth (14), the control unit for executing the drawing data creation program and (13, 33) A drawing data creation device (10), comprising: an operation input unit (12) for inputting an instruction necessary for executing the drawing data creation program; and a drawing data output unit (15) for outputting drawing data. , 30).
A thirteenth invention, the storage unit for storing the drawing data creation program of the invention of any one of the first to eighth (14), the control unit for executing the drawing data creation program and (13, 33), wherein A drawing unit (20) having a function of drawing the first drawing area and the second drawing area on the substrate using an electron beam or a laser based on the drawing data (Db, Dc) created by the drawing data creation program; , A drawing system comprising:
The fourteenth invention is based on the drawing data creation device (10, 30) of the twelfth invention and the drawing data (Db, Dc), and the first drawing region and the first drawing on the substrate using an electron beam or a laser. And a drawing apparatus (20) including a drawing unit having a function of drawing two drawing areas.

Fifteenth aspect based on the thirteenth or fourteenth drawing system of the present invention, the drawing data (Db, Dc) a first drawing unit having a function to draw the first drawing area based on, on the drawing data And a second drawing unit having a function of drawing the second drawing area based on the drawing system.
A sixteenth invention is the drawing system of any one of the thirteenth to fifteenth, the irradiation area of the electron beam or laser drawing the second drawing area is an electron beam to draw the first drawing area Or it is a drawing system characterized by being smaller than the irradiation area of the laser.

According to the present invention, the following effects can be obtained.
(1) The drawing data creation program according to the present invention performs the widthing of the computer in the vertical direction of the line segment based on the width information to the inside of the closed figure, and sets the area inside the area to be widened. First drawing area information providing means for assigning information set as one drawing area to a line segment, and whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment The overlapping line segment determination means for determining, and the overlapping line segment are provided with information for performing the width inward of the closed figure based on the width information and setting the area to be widened as the second drawing area Since it functions as the two drawing area information adding means, two drawing areas of the first drawing area and the second drawing area can be set on the drawing data. Therefore, there is no need to create different drawing data for each drawing area, and the load on the computer for drawing data creation can be reduced.

(2) The drawing data creation program according to the present invention causes the computer to width outside the closed figure in the vertical direction of the line segment based on the width information, and to create an area inside the area to be widened. First drawing area information providing means for assigning information to be a first drawing area to a line segment, and whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment The overlapping line segment determining means for determining and the non-overlapping line segment are provided with information for performing a width outside the closed figure based on the width information and setting the area to be widened as the second drawing area. Since it functions as the second drawing area information giving means, two drawing areas, the first drawing area and the second drawing area, can be set on the drawing data. Therefore, there is no need to create different drawing data for each drawing area, and the load on the computer for drawing data creation can be reduced.

(3) When performing the width in the vertical direction of the line segment based on the width information to the inside of the closed figure, the second drawing area setting means allows the computer to The information regarding the width of the non-overlapping line segment is given priority over the information regarding the width of the overlapping line segment. The disconnection of the pattern caused by not being drawn by information can be prevented.
(4) When performing the width in the vertical direction of the line segment based on the width information to the outside of the closed figure, the second drawing area information providing means allows the computer to outside the closed figure with respect to the overlapping line segment. Information on non-overlapping line segments is given priority over information on overlapping line segment widths, so it is possible to eliminate overlapping drawing areas and improve throughput. Further, it is possible to prevent the deformation of the drawing pattern due to multiple exposure.

(5) When the width information input by the width information receiving means is information for performing width inward of the closed figure, the computer is used as an inner processing means, and the information input to the receiving means is closed. In the case of the information for performing the width expansion to the outside of the figure, it is made to function as the outside processing means, so that even if undersizing or oversizing is performed, drawing data can be created efficiently.

(6) Since the width dimension of the width information is variable, it is easy to change the width dimension, and the width can be easily set as desired.
(7) Since the closed graphic definition means disassembles the pattern figure of the design data so that the lengths of overlapping sides of two adjacent drawing unit figures are equal, the pattern figure of the design data has a complicated shape. However, it can be easily performed without complicating the width increasing process.

(8) The drawing data creation method according to the present invention includes a first drawing area information providing step for assigning information for setting a first drawing area to a line segment, and each line segment of a closed figure overlaps with another adjacent closed figure. The overlapping line segment determination step to determine whether it is an overlapping line segment or a non-overlapping non-overlapping line segment, and for the overlapping line segment, width is applied to the inside of the closed figure based on the width information, and the width And a second drawing area information adding step for giving information for setting the attached area as the second drawing area, so that two drawing areas of the first drawing area and the second drawing area can be set on the drawing data. . Therefore, there is no need to create different drawing data for each drawing area, and the load on the computer for drawing data creation can be reduced.

(9) The drawing data creation method according to the present invention includes a first drawing area information adding step for assigning information for setting a first drawing area to a line segment, and each line segment of a closed graphic overlaps with another adjacent closed graphic The overlapping line segment determining step for determining whether the overlapping line segment is a non-overlapping non-overlapping line segment, and for non-overlapping line segment, based on the width information, width is spread outside the closed figure, Since there is provided a second drawing area information adding step for giving information for setting the area to be widened as the second drawing area, two drawing areas of the first drawing area and the second drawing area are set on the drawing data. it can. Therefore, there is no need to create different drawing data for each drawing area, and the load on the computer for drawing data creation can be reduced.

(10) In the drawing data creation method according to the present invention, when the width information input in the receiving step is the width information to the inside of the closed graphic, the information is input to the receiving means as the inner processing step. However, in the case of the outward width information, a width direction determination step as an outer processing step is provided, so that when performing oversizing and undersizing, the width direction can be easily selected as appropriate. .

(11) A drawing data creation apparatus according to the present invention inputs a storage unit that stores a drawing data creation program according to the present invention, a control unit that executes the drawing data creation program, and an instruction necessary for executing the drawing data creation program. Since the operation input unit and the drawing data output unit for outputting the drawing data are provided, the drawing data can be easily created.

(12) A drawing system according to the present invention includes a storage unit that stores a drawing data creation program according to the present invention, a control unit that executes the drawing data creation program, and electronic data based on the drawing data created by the drawing data creation program. And a drawing unit having a function of drawing a predetermined pattern on a substrate using a line or a laser, drawing data can be easily created, and drawing can be performed with high accuracy and high throughput. it can.
(13) A drawing system according to the present invention includes a drawing data creation device according to the present invention and a drawing device having a drawing unit having a function of drawing a predetermined pattern on a substrate using an electron beam or a laser based on the drawing data. Therefore, drawing data can be easily created, and drawing with high throughput can be performed with high accuracy.

(14) Since the first drawing unit having a function of drawing the first drawing region based on the drawing data and the second drawing unit having a function of drawing the second drawing region based on the drawing data are provided, the drawing region The irradiation area and intensity of the electron beam or laser to be drawn every time can be properly used, and the throughput can be improved.
(15) Since the irradiation area of the electron beam or laser that draws the second drawing area is smaller than the irradiation area of the electron beam or laser that draws the first drawing area, the second drawing area serving as the contour portion is made highly precise. Drawing and drawing can be performed such that the first drawing area inside the contour portion is drawn with low definition, and throughput can be improved while drawing with high accuracy.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Each figure shown below including FIG. 1 is a diagram schematically shown, and the size and shape of each part are appropriately exaggerated for easy understanding.

(First embodiment)
FIG. 1 is a block diagram illustrating a drawing system according to the first embodiment.
FIG. 2 is a diagram for explaining the flow of drawing data in the first embodiment.
The drawing system of this embodiment includes an electronic computer 10 and a drawing device 20. In the drawing system of the present embodiment, as shown in FIG. 2, the electronic computer 10 creates drawing data Db from the design data Da, and the drawing apparatus 20 performs high definition based on the information of the drawing data Db. Recognize the respective patterns of the region to be drawn with and the region to be drawn with low definition, and draw each region with an electron beam or a laser having a different irradiation area.
As shown in FIG. 1, the electronic computer 10 is a drawing data creation device that creates drawing data Db from design data Da. The electronic computer 10 includes a design data input unit 11, an operation input unit 12, a control unit 13, a storage unit 14, a drawing data output unit 15, and the like.
The computer in the present invention refers to an information processing apparatus including a storage device, a control unit, and the like. The electronic computer 10 is an information processing apparatus including a storage unit 14, a control unit 13, and the like, and the computer of the present invention. Included in the concept.

The design data input unit 11 inputs design data Da, which is a basis for creating the drawing data Db, to the electronic computer 10. The design data input unit 11 of the present embodiment reads and inputs information (design data) from the hard disk, but is not limited to this, for example, information (design data) from an external information storage medium such as a CD-ROM or DVD. ) May be readable.
The operation input unit 12 is a part for inputting instructions of various processes accompanying creation of the drawing data Db, necessary numerical values, and the like. The operation input unit 12 is, for example, a keyboard.
The control unit 13 includes a CPU and the like, and performs various operations and processes for creating the drawing data Db based on the input of the operation input unit 12 and the design data Da input from the design data input unit 11. Do. The control unit 13 includes a closed figure definition unit 131, an outline setting unit 132, an overlapping line segment extraction unit 133, a width information setting unit 134, a format conversion unit 135, and the like.

The closed figure defining unit 131 decomposes the polygon pattern figure of the design data into triangular or quadrangular drawing basic figures, and defines each drawing basic figure as a closed figure composed of vertices and line segments.
The contour setting unit 132 defines a contour having a predetermined width in a direction perpendicular to the line segment of each closed figure based on the width information input by the operation input unit 12.
The overlapping line segment extracting unit 133 determines, for each line segment of the closed graphic, whether or not the line segment overlaps the line segment of the adjacent closed graphic, and extracts the overlapping line segment.
The width information setting unit 134 assigns information about the presence / absence of width to each line segment in accordance with whether or not each line segment of the closed graphic is an overlapping line segment.
The format conversion unit 135 converts the format of the drawing data including the various definitions and information described above into a format that can be recognized by the drawing apparatus.

The storage unit 14 is a memory that stores a drawing data creation program for creating the drawing data Db based on the design data Da, and sequentially stores data generated by the processing performed by the control unit 13.
The drawing data output unit 15 is a part that outputs the drawing data created by the control unit. The drawing data output unit 15 outputs information (drawing data) to the hard disk. The drawing data output unit 15 may output drawing information to an external information recording medium such as a CD-ROM or DVD.

Next, the drawing device 20 is a device (drawing unit) having a function of drawing a predetermined pattern by irradiating an electron beam or a laser on a substrate (not shown) based on the inputted drawing data Db. It is used for pattern formation of elements and the like. The drawing apparatus 20 of this embodiment is a variable shaped electron beam drawing apparatus including a drawing data input unit 21, a drawing operation input unit 22, a drawing control unit 23, a drawing storage unit 24, and a light emitting unit 25.
The drawing data input unit 21 is a part that inputs the drawing data Db created by the electronic computer 10 to the drawing device 20. For example, the drawing data input unit 21 reads and inputs information (drawing data) from a hard disk. The drawing data input unit 21 may be capable of reading information from an external information recording medium such as a CD-ROM or DVD.
The drawing operation input unit 22 is a part for inputting various processing instructions accompanying the operation of the drawing apparatus 20 and necessary numerical values. For example, a keyboard or the like can be used.
The drawing control unit 23 is a part that recognizes a drawing part based on the inputted drawing data Db and controls light emission and driving of the light emitting unit 25.
The drawing storage unit 24 is a memory that temporarily stores the drawing data Db and stores a program related to drawing by the drawing control unit 23.
The light emitting unit 25 is a part that irradiates the substrate with an electron beam or a laser, a head (not shown) that irradiates the electron beam or laser, and a driving unit (not shown) that drives the head to draw a predetermined pattern. It has. The light emitting unit 25 of the present embodiment can appropriately adjust the beam diameter of the electron beam to be irradiated according to an instruction from the drawing control unit 23.

FIG. 3 is a flowchart illustrating a drawing data creation method and a drawing method according to the first embodiment. FIG. 4 is a diagram for explaining a drawing data creation method according to the first embodiment.
A method for creating drawing data according to the first embodiment will be described. In the present embodiment, with respect to the pattern figure Z of the design data Da, the outline part having a predetermined width along the outer periphery of the pattern figure Z and the inner part (the same as the pattern figure Z) that is the area inside the outline part. Are defined as drawing regions, and drawing data for drawing the contour portion with high definition and drawing the inner portion with lower definition than the contour portion is created. That is, in the present embodiment, a description will be given by taking as an example a method for creating drawing data in the case where drawing is performed separately between the vicinity of the contour and the inner region while oversizing.

The drawing data creation method of this embodiment includes steps (hereinafter simply referred to as S) 101 to S113, and the drawing method includes S114 to S116.
First, the drawing data creation method of this embodiment will be described.
In S101, design data Da is input to the design data input unit 11 of the electronic computer 10 by a user operation.
The photomask design data Da is generally GDSII data in which layout data is expressed in polygons in many cases, but other data formats may be used.
In order to facilitate understanding, the pattern figure Z to be drawn expressed in the design data Da of this embodiment will be described as a rectangle (see FIG. 4A).

Next, in S102, the closed figure defining unit 131 determines whether or not a polygon exists in the pattern figure of the input design data Da. If a polygon exists, the process proceeds to S103, and if not, the process proceeds to S104.
In S103, the polygon in the pattern figure of the design data Da is decomposed into a figure (drawing basic figure) in a drawing unit of a triangle or a quadrangle. In this embodiment, it is disassembled into two adjacent squares (see FIG. 4B).
In S104, the closed figure defining unit 131 defines the outer periphery of each drawing basic figure as a closed figure expressed by line segments and points. In the present embodiment, the pattern figure of the design data Da includes eight line segments (ab, bc, cd, da, ef, fg, gh, he) indicated by broken lines and six points ((Xa , Ya) to (Xd, Yd), (Xe, Ye) to (Xh, Yh)).

In S <b> 105, the control unit 13 inputs width information such as numerical values of the width dimensions of contour portions A <b> 1 and A <b> 2 defined in S <b> 106 to be described later in accordance with the operation of the operation input unit 12. Here, the width information refers to the width dimension, whether the width is inwardly formed with respect to the closed figure based on the line segment, or the contour portion is formed by extending the width outward, etc. Information. In the present embodiment, the width is W1, and the outline is formed by extending the width outward from the closed figure with reference to each line segment. The width W1 is a dimension perpendicular to the line segment.
In S <b> 106, the contour setting unit 132 sets the strip-shaped contours A <b> 1 and A <b> 2 having the width W <b> 1 with reference to each line segment constituting the closed figure (see FIG. 4D). Moreover, the area | region inside the outline part A1, A2 is set as inner part B1, B2 (refer FIG.4 (e)).
In the present embodiment, since the closed figures are adjacent to each other, the areas O1 and O2 where the contour portions A1 and A2 overlap, and the areas P1 and P2 that are not the outer periphery of the pattern figure Z of the original design data are also included. A contour portion is defined (see FIG. 5C).
In S107, the overlapping line segment extraction unit 133 extracts, for each line segment of each closed figure, a line segment that overlaps with the line segment of the adjacent closed figure. In the present embodiment, the line segment bc and the line segment he correspond to the overlapping line segments and are extracted.

In S108, the width information setting unit 134 determines whether each line segment constituting the closed figure is a line segment that overlaps (hereinafter referred to as an overlap line segment) or a line segment that does not overlap (hereinafter referred to as a non-overlapping line segment). Whether it is an overlapping line segment). If the line segment overlaps, the process proceeds to S109, and if the line segment does not overlap, the process proceeds to S110.
In S <b> 109, the width information setting unit 134 assigns information indicating that no width is given in the vertical direction to the line segment determined to be an overlapping line segment. In the present embodiment, since the line segments bc and he are overlapping line segments (S108: Yes), information indicating that no width is added is given to the line segments bc and he (S109). Accordingly, information that no width is given in the vertical direction of the line segments bc and he is given, and areas C1 and C2 (areas that are widened in the vertical direction of the line segments bc and he, see FIG. 4F). Is not set as a contour.
In the present embodiment, information regarding the presence / absence of the width of the line segment is given as a flag. When the flag “flag = 0” is set, no width is set in the vertical direction of the line segment.

In S <b> 110, the width information setting unit 134 gives information indicating that the line segment determined to be a non-overlapping line segment is to be width-oriented in the vertical direction.
In the present embodiment, since the line segments ab, cd, da, ef, fg, and gh are non-overlapping line segments (S108: No), for the line segments ab, cd, da, ef, fg, and gh, Giving information that the width is set in the vertical direction. In the present embodiment, the information regarding the presence / absence of the width of the line segment is given as a flag, and when the flag “flag = 1” is set, the width is assumed to be vertical in the line segment. Therefore, the non-overlapping line segments ab, cd, da, ef, fg, and gh are maintained in the width (contour) defined by the contour setting unit 132.
In this embodiment, in S108 to S110, the information given to each line segment for setting the contour is the width information given to the non-overlapping line segments, and the width information given to the non-overlapping line segments. Priority is given to information. Therefore, the information that the width is given has priority over the information that the width is not given.

In S111, the width information setting unit 134 determines whether the processing for setting the width information for all the line segments has been completed. If the setting of the width information is completed for all the line segments, the process proceeds to S112. If not completed, the process proceeds to S108, and the processes after S108 are performed for the line segment for which no width information is set.
By performing S108 to S111 described above, the contour portion D (D1, D2) (see FIG. 4D) is set.
In S112, the format conversion unit 135 converts the drawing data including information and definitions based on the above-described processing into a format that can be recognized by the drawing apparatus 20, and sets the drawing data Db. At this time, the drawing data Db includes the definition of the closed figure, information for setting each line segment and the inner portion attached thereto, each overlapping line segment, each non-overlapping line segment, and each overlapping line segment provided thereto, Information for setting the contour portion assigned to the overlapping line segment is included in an associated state. As a result, the drawing apparatus 20 uses, from one drawing data Db, a contour portion D (see FIG. 4G) and an inner portion B (B1, B2) that is a region inside the contour portion (FIG. 4E). 2) can be recognized.
In S113, the created drawing data Db is output from the drawing data output unit 15 by the operation of the operation input unit 12 or the like. At this time, the drawing data Db may be output to a hard disk, may be output and written to various storage media such as a CD-R, and the electronic computer 10 and the drawing device 20 are connected to a line such as a signal or an electric cable. And may be output directly to the drawing apparatus 20 without passing through an information storage medium or the like.

In S <b> 114, the drawing data Db created by the electronic computer 10 is input to the drawing data input unit 21 of the drawing device 20 by a user operation.
In S115, in accordance with an instruction from the drawing operation input unit 22, the drawing control unit 23 recognizes two areas to be drawn based on the input drawing data Db. In the present embodiment, either the contour portion D (see FIG. 4G) or the inner portion B (see FIG. 4E) is recognized in accordance with an instruction from the drawing operation input unit 22.
In S116, the light emitting unit 25 draws the area recognized by the drawing control unit 23. At this time, in response to an input from the drawing operation input unit 22, the drawing control unit 23 draws the contour portion D with a small beam diameter with high accuracy, and the inner portion B draws with a larger beam diameter than the contour portion D. Thus, the light emitting unit 25 is instructed to control the light emission intensity of the head of the light emitting unit 25 and the like. In response to an instruction from the drawing control unit 23, the light emitting unit 25 draws the contour portion D with a small beam diameter with high accuracy, and draws the inner portion B with a larger beam diameter than the contour portion D.

  Therefore, according to the present embodiment, by giving information on the presence / absence of width for each line segment of the closed figure, the drawing apparatus 20 can generate the contour portion D, the inner portion B, and the one drawing data Db. These two areas can be recognized. Therefore, it is not necessary to create drawing data for each drawing area, and the load on the electronic computer regarding data processing for drawing data creation can be reduced.

Here, let us consider a case where no width information is set for each line segment of a closed figure.
FIG. 5 is a diagram for explaining a problem that occurs when width information is not set for a line segment.
As shown in FIG. 5, when drawing basic figures are adjacent to each other, there are overlapping line segments bc and he in two closed figures (see FIG. 5A).
Therefore, if each line segment is uniformly widened outside the closed figure and defined as contour parts A12, A22, the inner part B12, which does not correspond to the outline part in the original pattern figure of the design data Da, Areas P1 and P2, which are B22, and areas O1 and O2 in which the outlines overlap are generated.
The areas P1 and P2 are areas inside the outer periphery of the pattern figure Z in the pattern figure of the design data Da, and do not need to be drawn with high accuracy. However, when drawing is performed by the drawing apparatus as it is, the drawing apparatus 20 recognizes the regions P1 and P2 as the outline portions and draws with high accuracy, resulting in a decrease in throughput. The regions P1 and P2 overlap with the inner portions B12 and B22 (see FIG. 5B), and the regions O1 and O2 are regions where the contour portions overlap. That is, since these areas have overlapping drawing areas, they are subjected to multiple exposure, and in addition to a decrease in throughput, deformation of a drawing pattern due to multiple exposure occurs.

On the other hand, according to the present embodiment, the inside of a closed figure that does not need to be drawn with high accuracy is not subjected to a contour portion, so that the width of the portion is shown by the width information (shown in FIG. 4F). Regions C1 and C2) can be omitted, and throughput can be improved, working time can be shortened, and power consumption can be reduced.
In addition, according to the present embodiment, since there are no overlapping drawing regions, there is no region for multiple exposure, and in addition to improvement of throughput, reduction of work time, reduction of power consumption, etc., multiple exposure is performed. Deformation of the drawing pattern can be prevented.

(Second Embodiment)
The drawing system of the second embodiment is different from the first embodiment in that oversizing or undersizing is not performed, but the outline part and the inner part are not separately drawn. And substantially the same form. Therefore, parts having the same functions as those in the first embodiment described above are denoted by the same reference numerals or the same reference numerals at the end, and repeated description is appropriately omitted.
FIG. 6 is a block diagram illustrating a drawing system according to the second embodiment. FIG. 7 is a diagram for explaining the flow of drawing data in the drawing system of the second embodiment.
The drawing system according to the second embodiment includes an electronic computer 30 and a drawing device 20. In the drawing system of the second embodiment, oversizing or undersizing is performed, and a pattern figure obtained by making the pattern figure thicker (enlarged) or made thinner (reduced) than the pattern figure of the design data Da. Drawing data Dc to be recognized by the drawing apparatus 20 is created by the electronic computer 30, and based on the drawing data Dc, the drawing apparatus 20 draws a pattern figure that is fattened on a substrate (not shown).

The electronic computer 30 includes a design data input unit 11, an operation input unit 12, a control unit 33, a storage unit 14, and a drawing data output unit 15.
The control unit 33 includes a closed figure definition unit 131, a sizing region setting unit 332, a first pattern region setting unit 333, a second pattern region setting unit 334, a format conversion unit 135, and the like, and performs various calculations for creating drawing data. And do some processing.
The sizing area setting unit 332 defines a sizing area for each closed figure based on the sizing information input from the operation input unit 12. The sizing information of the present embodiment is information on how thick or thin the pattern figure of the design data Da is, that is, the amount of oversizing or undersizing (that is, the size to be thickened or thinned). ) And the direction (that is, the width to the outside or the inside of the closed figure).

The first pattern area setting unit 333 sets a first pattern area that becomes a drawing area. The first pattern area is a first drawing area defined as an area inside the sizing area defined by the sizing area setting unit 332 (an area F shown in FIG. 9E and an area J shown in FIG. 10E). Reference).
The second pattern region setting unit 334 includes an overlapping line segment extraction unit 335 and a width information setting unit 336, and sets a second pattern region that becomes a drawing region. The second pattern region is a second drawing region (region H shown in FIG. 9G), which is set by information given to each line segment by an overlapping line segment extraction unit 335 and a width information setting unit 336, which will be described later. 10 (g), see region L).
The overlapping line segment extraction unit 335 extracts a line segment that overlaps the line segment of the adjacent closed graphic from the individual line segments of the closed graphic.
The width information setting unit 336 determines whether each line segment is an overlapping line segment or a non-overlapping line segment, and gives information about the width to the line segment according to the result. To do.

(Oversizing)
FIG. 8 is a flowchart illustrating a drawing data creation method and a drawing method according to the second embodiment. FIG. 9 is a diagram illustrating a drawing data creation method (oversizing) according to the second embodiment.
First, a case where oversizing is performed in the present embodiment will be described. The drawing data creation method for performing oversizing includes S201 to S213, S220, and S221.
S201 to S204 perform the same processing as S101 to S104 shown in the first embodiment (see FIGS. 9A to 9C).
In S205, sizing information is input from the operation input unit 12. Here, in order to obtain an oversized drawing area by thickening the pattern figure Z of the design data Da by the dimension W2, each line segment is widened outward by the width dimension W2 to form a sizing area. Is input from the operation input unit 12.

In S206, the sizing area setting unit 332 defines a sizing area for each closed figure. Here, since oversizing is performed, the sizing area setting unit 332 sets sizing areas E1 and E2 that are widened to the outside by the width dimension W2 for each line segment (see FIG. 9D).
In S207, the sizing area setting unit 332 determines whether to perform oversizing or undersizing from the input sizing information. If oversizing, the process proceeds to S208, and if undersizing, the process proceeds to S214. Since oversizing is performed here, the process proceeds to S208. The case of undersizing will be described later.

In S208, the first pattern region setting unit 333 sets the inside of the sizing regions E1, E2 as the first pattern region F (F1, F2). Here, since oversizing is performed, the area (drawing basic figure) defined by each closed figure is set as the first pattern area F (F1, F2) which is the drawing area (see FIG. 9E). )
In S209, the overlapping line segment extraction unit 335 extracts, in each closed graphic, an overlapping line segment that overlaps the line segment of the adjacent closed graphic. In the present embodiment, the line segments bc and he correspond and are extracted.
In S210, the width information setting unit 336 determines whether each line segment is an overlapping line segment. If it is an overlapping line segment, the process proceeds to S211. If it is a non-overlapping line segment, the process proceeds to S212.
In S211, the width information setting unit 336 gives information that the overlapping line segment is not width-oriented in the vertical direction, and the process proceeds to S213. In the present embodiment, information indicating that no width is given to the line segments bc and he using a flag (flag = 0) or the like.
In S212, the width information setting unit 336 gives information indicating that the non-overlapping line segment is to be widthwise in the vertical direction, and the process proceeds to S213. In the present embodiment, the information indicating the width is given to the line segments ab, cd, da, ef, fg, and gh using a flag (flag = 1) or the like.
Note that in S210 to S212, the information given to each line segment for setting the second pattern region is that the width information given to the non-overlapping line segments is more than the width information given to the overlapping line segments. have priority. Therefore, the information indicating that the width is set (flag = 1) is given priority over the information indicating that the width is not set (flag = 0).

In S213, the width information setting unit 336 determines whether the width information has been set for all the line segments. If it has been completed, the process proceeds to S220. If it has not been completed, the process proceeds to S210, and the processes after S210 are performed on the line segment to which no width information is assigned.
By performing the processing of S209 to S213, when oversizing is performed with uniform widths, the widths of the regions G1 and G2 (see FIG. 9F) that do not need to be widened are deleted. Can do. Then, the second pattern area H (H1, H2), which is a drawing area newly set by oversizing, can be defined (see FIG. 9G).
In S220, the format conversion unit 135 converts the drawing data including the information and the definition given by the above processing into a format that can be recognized by the drawing apparatus 20. At this time, the drawing data Dc includes information for setting each line segment and the first pattern area assigned thereto, each overlapping line segment, each non-overlapping line segment, each overlapping line segment provided thereto, and each non-overlapping line segment. And the information for setting the second pattern area assigned to is included in an associated state.
In S221, the drawing data output unit 15 outputs the drawing data Dc.

(Undersizing)
FIG. 10 is a diagram for explaining a drawing data creation method (undersizing) according to the second embodiment.
The drawing data creation method for performing undersizing includes S201 to S207, S214 to S219, S220, and S221. Even when undersizing is performed, as in the case of oversizing, S201 to S204 perform the same processing as S101 to S104 shown in the first embodiment (see FIGS. 10A to 10C). ).
In S205 shown in FIG. 8, sizing information is input from the operation input unit 12. In the case of undersizing, in order to obtain an undersized drawing area by thinning the pattern figure of the design data Da by the dimension W3, the line segment is widened inward by the dimension W3. Information indicating the sizing area is input from the operation input unit 12.
In S206, the sizing area setting unit 332 sets a sizing area for each closed figure. In the present embodiment, the band-shaped sizing regions I1 and I2 (see FIG. 10D) are set by adding the width dimension W3 to the inside of each line segment of the closed figure. When undersizing is performed, the sizing areas I1 and I2 are non-drawing areas.

In S207, the sizing area setting unit 332 determines whether to perform undersizing or oversizing from the input sizing information. Since undersizing is performed here, the process proceeds to S214.
In S214, the first pattern region setting unit 333 defines a region inside the sizing region set by the sizing region setting unit 332 as the first pattern region. Here, since undersizing is performed, the regions J1 and J2 (see FIG. 10E) inside the sizing regions I1 and I2 (see FIG. 10D) are defined as the first pattern region J.

In S215, the overlapping line segment extraction unit 335 of the second pattern region setting unit 334 extracts the overlapping line segment that overlaps with the line segment of the adjacent closed graphic among the individual line segments of the closed graphic. In the present embodiment, the line segments bc and he correspond to overlapping line segments and are extracted.
In S216, the width information setting unit 336 of the second pattern region setting unit 334 determines whether or not each line segment is an overlapping line segment. If it is determined that it is an overlapping line segment, the process proceeds to S217. If it is determined that it is not a non-overlapping line segment, the process proceeds to S218.
In S <b> 217, the width information setting unit 336 gives information that a line segment determined to be an overlapping line segment is to be expanded in the vertical direction of the line segment. In the present embodiment, information indicating that the line segments bc and he have a width in the vertical direction is set by a flag (flag = 1) or the like.

In S <b> 218, the width information setting unit 336 gives information that the line segment determined to be a non-overlapping line segment is not to be given a width in the vertical direction of the line segment. In this embodiment, the line segments ab, cd, da, ef, fg, and gh are determined as non-overlapping line segments, and information indicating that no width is given to these line segments is set with a flag (flag = 0) or the like. Use to set.
In S219, the width information setting unit 336 determines whether or not width information has been assigned to all line segments. If width information is given to all line segments, the process proceeds to S220. If there is a line segment that has not been given, the process proceeds to S216, and the processes after S216 are performed on the line segment.
In this embodiment, the width information given to each line segment in order to set the second pattern area in S216 to S218 is the same as the width information given to the non-overlapping line segment. Overrides the width information. Therefore, the information that the width is not set (flag = 0) is given priority over the information that the width is set (flag = 1).

By performing the above-described S215 to S219, the second pattern region L (L1, L2) is defined (see (g) of FIG. 10).
Here, if a sizing area that is uniformly widened to the inside of the closed figure with respect to the line segment of the closed figure is defined and undersizing is performed, between the individual first pattern areas J1 and J2, A gap (slit) K may occur (see FIG. 10F). If the first pattern area J is drawn by the drawing device 20 in this state, the gap K portion is not drawn, so that the pattern figure is drawn in a disconnected state. Since the second pattern area L is defined as a drawing area in the area that becomes the gap K between the first pattern areas J (J1, J2) by giving the width information, disconnection of such a pattern. Can be prevented.

In S220, the format conversion unit 135 converts the drawing data including the information and the definition given by the above processing into a format that can be recognized by the drawing apparatus 20. At this time, the drawing data Dc includes information for setting each line segment and the first pattern area assigned thereto, each overlapping line segment, each non-overlapping line segment, each overlapping line segment provided thereto, and each non-overlapping line segment. And the information for setting the second pattern area assigned to is included in an associated state.
In S221, the drawing data output unit 15 outputs the drawing data Dc.

(Drawing method)
Next, a drawing method will be described. The drawing method of the present embodiment includes S222 to S224.
In S <b> 222, the drawing data input unit 21 of the drawing device 20 inputs the created drawing data Dc to the drawing control unit 23 by a user operation or the like.
In S223, the drawing control unit 23 recognizes the first pattern region and the second pattern region based on the drawing data Dc. In the present embodiment, when oversizing is performed, the drawing control unit 23 recognizes the first pattern region F (see FIG. 9E) and the second pattern region H (see FIG. 9G) as the drawing region. To do. On the other hand, when performing undersizing, the drawing control unit 23 recognizes the first pattern region J (see FIG. 10E) and the second pattern region L (see FIG. 10G) as the drawing region.

In step S <b> 221, the light emitting unit 25 draws a drawing area including the first pattern area and the second pattern area based on an instruction from the drawing control unit 23.
In the present embodiment, the light emitting unit 25 draws a drawing area composed of the first pattern area F and the second pattern area H when performing oversizing, and the first pattern area J and the second pattern when performing undersizing. A drawing area composed of the area L is drawn. At this time, the beam diameter of the irradiated electron beam is appropriately adjusted according to the instruction input from the drawing operation input unit 22. Further, the light emitting unit 25 may draw a region (region F, H or region J, L) composed of the first pattern region and the second pattern region at a time, or the first pattern region (region F, J). And the second pattern region (regions H and L) may be drawn separately.

According to the present embodiment, it is possible to cause the drawing apparatus 20 to recognize two drawing areas of the first pattern area and the second pattern area from one drawing data Dc. Therefore, it is not necessary to create each drawing data for each of the first pattern areas F and J and the second pattern areas H and L, which are drawing areas, and the load of creating the drawing data Dc applied to the electronic computer 30 can be reduced.
In addition, when oversizing is performed, overlapping drawing regions do not occur, so that deformation due to multiple exposure can be prevented and throughput can be improved.
Further, when undersizing is performed, it is possible to prevent a slit (gap K) generated when undersizing is performed by setting a non-drawing area uniformly inside the basic figure, and it is possible to prevent disconnection of the pattern figure.

(Deformation)
The present invention is not limited to the embodiment described above, and various modifications and changes are possible, and these are also within the scope of the present invention.
(1) In the first embodiment, as the drawing apparatus 20, a variable shaped electron beam drawing apparatus including one head capable of appropriately adjusting the beam diameter has been described as an example. The outline portion D may be drawn with high accuracy and the inner portion B may be drawn more roughly than the outline portion D by a single drawing apparatus including two heads having different irradiation areas. In addition, for example, the contour portion D is drawn by a drawing device that irradiates an electron beam of a small spot having a small irradiation area, and the inner portion B is drawn by a drawing device that irradiates a laser having a large irradiation area. The drawing may be performed using two drawing apparatuses having different values.
The drawing apparatus 20 shown in each embodiment is not particularly limited as long as it is a lithography drawing apparatus. For example, a spot beam electron beam drawing apparatus, a variable shaped electron beam drawing apparatus, a multi-beam electron beam drawing apparatus, A laser drawing apparatus or the like may be used.

(2) In each embodiment, the example in which the width dimension is the predetermined values W1, W2, and W3 is shown, but the present invention is not limited thereto, and the width dimension may be variable. In this case, for example, in the input width information, the width dimension may be represented by a variable x, and may be appropriately set with a value input from the operation input unit of the drawing apparatus. With such a configuration, it is easy to change the width dimension. For example, when performing sizing or drawing of high-definition drawing and low-definition drawing separately, after confirming the drawing state at the time of prototyping, sizing A process of changing the size of the region and the contour and redrawing can be easily performed without going through a complicated process.

(3) In each of the embodiments, a drawing data creation program, a drawing data creation method, a drawing data creation device, and a drawing system in photolithography mask production using a photomask have been described. The present invention can also be applied to other lithography techniques such as drawing with an electron beam or a laser beam.

(4) In each embodiment, the length of the side where the adjacent drawing basic figure touches is the same (the length of the overlapping line segment bc and the line segment he of the closed graphic is equal). However, there is a possibility that a basic figure (closed figure) having different lengths of adjacent sides (overlapping line segments) may be generated.
FIG. 11 is a diagram illustrating a modified drawing data creation method.
In the pattern figure Z1 of the design pattern as shown in FIG. 11A, when the drawing data creation program is decomposed into the drawing basic figure, as shown in FIG. 11B, the adjacent drawing basic figure comes into contact. The length of the sides may be different.
At this time, as one method, a process of further decomposing into a drawing basic graphic and defining a closed graphic (see FIG. 11C) is performed until such a side no longer occurs. By doing so, the processes shown in the first and second embodiments described above can be performed thereafter.

As another method, a closed figure is defined while the lengths of adjacent sides of adjacent drawing basic figures are different (see FIG. 11D), and sizing areas or contour portions M1 and M2 are defined. Later, a width boundary point is provided outside or inside from the end of the shorter line segment. In FIG. 11, a case where oversizing is performed will be described as an example. As shown in FIG. 11E, a width boundary point q is provided, and the line segment hc is changed into a line segment hq and a line segment qc. Decompose.
Then, width information is given to each line segment. In the example illustrated in FIG. 11, information indicating that no width is given is given to a line segment hq connecting a point h (Xh, Yh) corresponding to the intersection of two sides and a boundary point q. For other line segments, as shown in the second embodiment, information indicating that the line segment is not widened is given if it is an overlapping line segment, and information that the line width is given if it is a non-overlapping line segment is given. Thus, the second pattern region N (N1, N2) is set.
In this way, by newly providing a boundary point on the line segment, by newly defining the line segment by the boundary point, and adding width information to the line segment, an overlapping drawing area can be obtained. It is possible to prevent the occurrence, and effects such as improvement of throughput and prevention of deformation due to multiple exposure can be obtained.

(5) In each embodiment, although the computer 10 and 30 showed the example which is a different body from the drawing apparatus 20, it is not restricted to this, For example, the electronic computer may be provided in the drawing apparatus. .

(6) In the first embodiment, an example is shown in which the outline is set outside the closed figure by using the line segment as a reference. An outline may be defined. In this case, processing such as providing information on the presence or absence of width depending on whether or not there is an overlapping line segment is not performed, and the width is uniformly applied to each line segment, and the contour portion and the inner portion are separated. May be defined.

(7) In the second embodiment, in S208, the control unit 33 determines whether to perform oversizing, undersizing, or undersizing from the sizing information, and performs processing according to each case. However, the present invention is not limited to this. For example, such determination may not be performed, and only undersizing may be performed, or only undersizing may be performed.
In addition, although this embodiment and modification can also be used in combination as appropriate, detailed description is abbreviate | omitted. Further, the present invention is not limited by the embodiments described above.

It is a block diagram which shows the drawing system of 1st Embodiment. It is a figure explaining the flow of the drawing data in the drawing system of 1st Embodiment. It is a flowchart explaining the drawing data creation method and drawing method of 1st Embodiment. It is a figure explaining the drawing data creation method of 1st Embodiment. It is a figure explaining the problem when not setting widthing information with respect to a line segment. It is a block diagram which shows the drawing system of 2nd Embodiment. It is a figure explaining the flow of the drawing data in the drawing system of 2nd Embodiment. It is a flowchart which shows the drawing data creation method and drawing method of 2nd Embodiment. It is a figure explaining the drawing data creation method (oversizing) of 2nd Embodiment. It is a figure explaining the drawing data creation method (undersizing) of 2nd Embodiment. It is a figure explaining the drawing data creation method of a deformation | transformation form.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,30 Computer 11 Design data input part 12 Operation input part 13,33 Control part 131 Closed figure definition part 132 Contour part setting part 133,335 Overlapping line segment extraction part 134,336 Width information setting part 333 1st pattern area | region Setting unit 334 Second pattern area setting unit 14 Storage unit 15 Drawing data output unit 20 Drawing device

Claims (16)

A drawing data creation program for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data,
Computer
A closed figure defining means for decomposing the pattern figure of the design data into a plurality of drawing unit figures and defining the outer periphery of the drawing unit figure as a closed figure represented by a plurality of line segments and a plurality of vertices;
Width information receiving means for receiving input of width information for performing width of a predetermined dimension inside the closed figure;
Information on the inside of the closed figure is given a width in the vertical direction of the line segment based on the width information and the area inside the area to be widened is set as a first drawing area. First drawing area information giving means for giving to
An overlapping line segment determining means for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment;
The second drawing area information is added to the overlapping line segment to give information for setting the area to be widened as a second drawing area by applying a width to the inside of the closed figure based on the width information. Means,
Associating each line segment with information set as the first drawing area given to each line segment, and setting each overlapping line segment and information set as the second drawing area given to each overlapping line segment A drawing data output means for associating and outputting the drawing data included in the drawing data;
A drawing data creation program characterized by functioning as In the drawing data creation program according to claim 1,
In the second drawing area information providing unit, the non-overlapping line segment is provided with information that no width is given to the inside of the closed figure,
A drawing data creation program characterized by A drawing data creation program for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data,
Computer
A closed figure defining means for decomposing the pattern figure of the design data into a plurality of drawing unit figures and defining the outer periphery of the drawing unit figure as a closed figure represented by a plurality of line segments and a plurality of vertices;
Width information receiving means for receiving an input of width information for width outward of the closed figure;
Information on the outside of the closed figure in the vertical direction based on the width information in the vertical direction of the line segment and the area inside the area to be widened as a first drawing area is the line segment. First drawing area information giving means for giving to
An overlapping line segment determining means for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment;
Second drawing area information that gives information for setting a width of the non-overlapping line segment as a second drawing area by applying a width to the outside of the closed figure based on the width information. Granting means;
Information that sets each line segment and the information set as the first drawing area given to each line segment, and sets the second drawing area given to each non-overlapping line segment and each non-overlapping line segment And drawing data output means for including the drawing data for output.
A drawing data creation program characterized by functioning as In the drawing data creation program according to claim 3,
In the second drawing area information giving means, giving information that the overlapping line segment is not widened outside the closed figure,
A drawing data creation program characterized by In the drawing data creation program according to claim 2 or claim 4,
In the second drawing area information providing means, information with width is applied to the non-overlapping line segment, it is preferred over information with width is applied to the overlapping line segment,
A drawing data creation program characterized by A drawing data creation program for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data,
Computer
A closed figure defining means for decomposing the pattern figure of the design data into a plurality of drawing unit figures and defining the outer periphery of the drawing unit figure as a closed figure represented by a plurality of line segments and a plurality of vertices;
Width information receiving means for receiving input of width information for performing width to the inside or outside of the closed figure;
When the width information is input of width information inside the closed figure, it is an inner processing means, and when the information input to the reception means is input of width information outside, , Function as an outer processing means,
The inner processing means;
Information on the inside of the closed figure is given a width in the vertical direction of the line segment based on the width information and the area inside the area to be widened is set as a first drawing area. First drawing area information giving means for giving to
An overlapping line segment determining means for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment;
The second drawing area information is added to the overlapping line segment to give information for setting the area to be widened as a second drawing area by applying a width to the inside of the closed figure based on the width information. Means,
The line segments are associated with the information assigned to the line segments and set as the first drawing area , and the overlapping line segments and the information set as the second drawing area assigned to the overlapping line segments are associated with each other. And functioning as a drawing data output means for outputting in the drawing data.
The outer processing means;
Based on the width information, a width is applied to the outside of the closed figure in the vertical direction of the line segment. First drawing area information giving means for giving,
An overlapping line segment determining means for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment;
Second drawing area information that gives information for setting a width of the non-overlapping line segment as a second drawing area by applying a width to the outside of the closed figure based on the width information. Granting means;
Information set as the second drawing area assigned to each non-overlapping line segment and each non-overlapping line segment in association with each line segment and information set as the first drawing area given to each line segment And functioning as a drawing data output means for outputting by including in the drawing data,
A drawing data creation program characterized by In the drawing data creation program according to any one of claims 1 to 6,
The width dimension of the width information is variable.
A drawing data creation program characterized by In the drawing data creation program according to any one of claims 1 to 7,
In the closed figure defining means, the pattern figure of the design data is decomposed so that the lengths of overlapping sides of two adjacent drawing unit figures are equal.
A drawing data creation program characterized by A drawing data creation method for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data,
A closed figure defining step of decomposing the pattern figure of the design data into a plurality of drawing unit figures and defining the outer periphery of the drawing unit figure as a closed figure expressed by a plurality of line segments and a plurality of vertices;
A width information receiving step for receiving an input of width information to width the inside of the closed graphic defined in the closed graphic defining step;
Based on the width information input in the width information receiving step, a width is applied to the inside of the closed figure in the vertical direction of the line segment, and an area inside the area to be widened is a first drawing area. A first drawing area information giving step for giving information to be set as the line segment,
An overlapping line segment determination step for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment;
The second drawing area information is added to the overlapping line segment to give information for setting the area to be widened as a second drawing area by applying a width to the inside of the closed figure based on the width information. Process,
Associating each line segment with the information set as the first drawing area given to each line segment, and setting the second drawing area given to each overlapping line segment and each overlapping line segment. A drawing data output step of associating and outputting the drawing data included in the drawing data;
A drawing data creation method comprising: A drawing data creation method for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data,
A closed figure defining step of decomposing the pattern figure of the design data into a plurality of drawing unit figures and defining the outer periphery of the drawing unit figure as a closed figure expressed by a plurality of line segments and a plurality of vertices;
A width information receiving step for receiving an input of width information to be widened outside the closed graphic defined in the closed graphic defining step;
Based on the width information input in the width information receiving step, a width is formed in the vertical direction of the line segment to the outside of the closed figure, and an area inside the area to be widened is a first drawing area. A first drawing area information giving step for giving information to be set as the line segment,
An overlapping line segment determination step for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment;
Second drawing area information that gives information for setting a width of the non-overlapping line segment as a second drawing area by applying a width to the outside of the closed figure based on the width information. Granting process;
Information set as the second drawing area assigned to each non-overlapping line segment and each non-overlapping line segment in association with each line segment and information set as the first drawing area given to each line segment And a drawing data output step for outputting the image data by including it in the drawing data;
A drawing data creation method comprising: A drawing data creation method for creating the drawing data of a drawing apparatus that performs drawing using an electron beam or a laser based on the drawing data from design data,
A closed figure defining step of decomposing the pattern figure of the design data into a plurality of drawing unit figures and defining the outer periphery of the drawing unit figure as a closed figure expressed by a plurality of line segments and a plurality of vertices;
A width information receiving step for receiving an input of width information for setting width to the inside or outside of the closed figure defined in the closed figure defining step;
When the width information input in the width information receiving step is an input of width information to the inside of the closed figure, it is an inner processing step, and the information input to the receiving means In the case of the input of width information, it comprises a width direction determination step as an outer processing step,
The inner processing step includes
Information for setting a range inside the closed figure as a first drawing area by performing a width in the vertical direction of the line segment based on the width information and setting the range inside the area to be widened as the first drawing area. A first drawing area information providing step to be applied to
An overlapping line segment determination step for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment;
A second drawing area for giving information to the overlapping line segment to give information for setting the width of the overlapping line segment as a second drawing area for the overlapping line segment. Information provision process;
Information associated with each line segment and the information set as the first drawing area assigned to each line segment, and information set as the second drawing area assigned to each overlapping line segment and each overlapping line segment. A drawing data output step for associating and outputting the drawing data included in the drawing data;
The outer processing step includes
Information that sets the area inside the area to be widened as the first drawing area by performing the width in the vertical direction of the line segment on the outside of the closed figure based on the width information. A first drawing area information providing step to be applied to
An overlapping line segment determination step for determining whether the line segment is an overlapping line segment overlapping with another adjacent closed figure or a non-overlapping line segment;
Second drawing area information that gives information for setting a width of the non-overlapping line segment as a second drawing area by applying a width to the outside of the closed figure based on the width information. Granting process;
Information set as the second drawing area assigned to each non-overlapping line segment and each non-overlapping line segment in association with each line segment and information set as the first drawing area given to each line segment And having a drawing data output step of outputting the drawing data included in the drawing data,
Drawing data creation method characterized by the above. A drawing data creation device for creating the drawing data of a drawing device that performs drawing using an electron beam or a laser based on the drawing data from design data,
A design data input unit for inputting design data;
A storage unit that stores the drawing data creation program according to any one of claims 1 to 8,
A control unit that executes the drawing data creation program;
An operation input unit for inputting instructions necessary for executing the drawing data creation program;
A drawing data output unit for outputting drawing data;
A drawing data creating apparatus comprising: A storage unit that stores the drawing data creation program according to any one of claims 1 to 8,
A control unit that executes the drawing data creation program;
A drawing unit having a function of drawing the first drawing region and the second drawing region on a substrate using an electron beam or a laser based on the drawing data created by the drawing data creation program;
A drawing system comprising: The drawing data creation device according to claim 12,
A drawing apparatus comprising a drawing unit having a function of drawing the first drawing area and the second drawing area on a substrate using an electron beam or a laser based on the drawing data;
A drawing system comprising: The drawing system according to claim 13 or 14,
A first drawing unit having a function of drawing the first drawing region based on the drawing data, and a second drawing unit having a function of drawing the second drawing region based on the drawing data;
A drawing system characterized by The drawing system according to any one of claims 13 to 15,
The electron beam or laser irradiation area for drawing the second drawing region is smaller than the electron beam or laser irradiation area for drawing the first drawing region;
A drawing system characterized by

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