JP5303444B2 - Temperature estimation value presentation device, temperature drop required time prediction value presentation device and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To compensate a deterioration of reliability when the reliability of temperature measurement in a low temperature region deteriorates when decreasing a temperature from a high temperature to a low temperature. <P>SOLUTION: A temperature estimated value display device has: a measured value obtaining part 1 for obtaining temperature measured values of three points in decreasing the temperature of an object from a temperature measuring means; a time constant calculating part 2 for calculating a time constant of temperature change of the object in decreasing the temperature from the temperature measured value; a converging value calculating part 3 for calculating a converging value of the temperature of the object in decreasing the temperature from the temperature measured value; an estimating calculating part 4 for calculating the temperature estimated value of the object in decreasing the temperature from the time constant and the converging value; and a temperature estimated value displaying part 5 for displaying the temperature estimated value for an operator. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a temperature estimated value presentation device that calculates and presents a temperature estimated value at the time of temperature drop of a control target, and a temperature drop that calculates and presents a predicted value of a required temperature drop time required for temperature decrease to a desired temperature of the control target. The present invention relates to a required time predicted value presentation device.

General-purpose temperature control devices such as temperature controllers are based on the premise that an unspecified heating / cooling system is to be controlled in principle, and temperature measurement is performed by a temperature sensor such as a thermocouple.
In addition, heating targets such as a wafer in a semiconductor manufacturing apparatus, a glass substrate in a flat panel display (FPD) manufacturing apparatus, and a metal piece in a carburizing furnace are all objects whose temperatures should be controlled and managed in the heat treatment process. In either case, it is difficult to measure the temperature during the actual operation of the heat treatment process. Therefore, a technique has been proposed in which the temperature near the heating object is measured by a temperature sensor instead of the heating object that cannot be measured, and the temperature of the actual surface of the heating object is estimated from the measurement result of the temperature sensor. (See Patent Document 1).

  Also, as a technique for determining the state of the control system, a heat treatment abnormality detection method for detecting a heat treatment abnormality based on an actual temperature measurement value in a temperature control loop and a temperature prediction value predicted using a model has been proposed. (See Patent Document 2). If the technique disclosed in Patent Document 2 is applied, the temperature of the heating target can be estimated.

JP 2006-329869 A JP 2004-258975 A

[Problem 1]
In temperature measurement using a B thermocouple used in a heat treatment process at a high temperature exceeding 1500 ° C. or temperature measurement using a radiation thermometer for measuring high temperature around 600 ° C., a low temperature (for example, B If it is about 70 ° C. or less in the case of a thermocouple), the reliability of the temperature measurement value cannot be ensured.
In the high temperature heat treatment process as described above, the temperature in the low temperature range is not usually important, and it is not necessary to measure the low temperature with high accuracy and high reliability.

However, from the above temperature measurement range, even if it is in a low temperature range, if it exceeds 50 ° C, it is a sufficiently hot temperature for humans. There are cases where high-quality measurements are required. For example, when the temperature is lowered from a high temperature to a low temperature, the temperature is changing, so the necessity is increased.
If it is necessary to present the temperature in the low temperature range even if it is an estimated value, if the technique disclosed in Patent Document 1 is applied, another temperature sensor for measuring the low temperature is prepared, and this It is necessary to theoretically obtain a temperature estimation formula for estimating the actual temperature from the measurement result of the temperature sensor.

Further, if temperature estimation is performed by applying the technique disclosed in Patent Document 2, it is necessary to obtain in advance a model formula (corresponding to a temperature estimation formula) that can be used at least in a low temperature range.
Therefore, in temperature measurement using a B thermocouple or a radiation thermometer, it is necessary to prepare a temperature estimation formula in advance if it is desired to ensure the reliability of temperature measurement in the low temperature range. However, even when such a temperature estimation formula is used, if the state of the apparatus changes, the reliability of the temperature estimation is lowered, so that it is not always practical.

[Problem 2]
If it takes a long time to cool down from a high temperature to a low temperature, if you can predict the time required to cool down sufficiently, an estimate of the time that can be taken for other work to be done during the temperature reduction will be established. Become.
Therefore, the predicted value of the required time becomes effective information for improving work efficiency.

  However, when the state of the apparatus changes, the required time also changes. In particular, in the temperature measurement using the B thermocouple and the radiation thermometer as described above, since the reliability of the temperature measurement value cannot be ensured at a low temperature, it is difficult to predict the required time by the operator's intuition.

The first object of the present invention is particularly when the reliability of temperature measurement is lowered in a low temperature range (a region where the measurement value by the temperature measurement means is substantially invalid) when the temperature is lowered from a high temperature to a low temperature. In view of operator safety, it is an object to provide a temperature estimation value presentation device and method that can compensate for a decrease in reliability.
The second object of the present invention is to provide a predicted temperature decrease time value that can present a predicted value of the required temperature decrease time, particularly in consideration of improvement of the work efficiency of the operator, when the temperature decrease time is long. A presentation device and method is provided.

  The temperature estimated value presentation device of the present invention includes a measurement value acquisition unit that acquires three temperature measurement values at the time of temperature drop of a control target from the temperature measurement unit, and a temperature measurement value acquired by the measurement value acquisition unit at the time of temperature decrease. A time constant calculating means for calculating a time constant of a temperature change of the control object; a convergence value calculating means for calculating a convergence value of the temperature of the control object at the time of temperature decrease from the temperature measurement value acquired by the measurement value acquisition means; An estimation calculation unit that calculates a temperature estimation value of the control target when the temperature is lowered from the time constant and the convergence value, and a temperature estimation value presentation unit that presents the temperature estimation value to an operator. To do.

  Further, the predicted temperature decrease required value presentation device of the present invention includes a measurement value acquisition unit that acquires three temperature measurement values at the time of temperature decrease of the control target from the temperature measurement unit, and a temperature measurement value acquired by the measurement value acquisition unit A time constant calculating means for calculating a time constant of a temperature change of the controlled object when the temperature is lowered from, and a convergence value for calculating a convergence value of the temperature of the controlled object when the temperature is lowered from the temperature measurement value obtained by the measured value obtaining means A calculating means, a required time predicting means for calculating a predicted value of the required temperature decrease required for the temperature to be controlled from the time constant and the convergence value to the desired temperature, and the predicted temperature decrease required value for the operator; The present invention is characterized by comprising a predicted temperature decrease required value presentation means for presenting.

  In addition, according to one configuration example of the temperature estimated value presentation device of the present invention, the temporary time constant storage unit that stores the time constant repeatedly calculated by the time constant calculation unit, and the convergence value calculation unit that repeatedly calculates the time constant. Temporary convergence value storage means for storing a convergence value; low temperature range threshold storage means for preliminarily storing a low temperature range threshold value for designating a temperature for presenting the estimated temperature value; and a temperature measurement value obtained from the temperature measurement means. Obtained from the temperature measurement means, a time constant determination means for determining a final value of the time constant with reference to a plurality of time constants stored in the temporary time constant storage means when the low temperature range threshold is reached. Convergence value determining means for determining a final value of the convergence value with reference to a plurality of convergence values stored in the temporary convergence value storage means when the measured temperature value reaches the low temperature range threshold. The measurement value acquisition means includes: The time constant calculation means and the convergence value calculation means repeatedly acquire the three temperature measurement values, and the time constant calculation means and the convergence value calculation means calculate the time constant and the convergence value each time the three temperature measurement values are acquired. The estimation calculation means calculates the temperature estimation value from the final value of the time constant and the final value of the convergence value.

  In addition, one configuration example of the temperature estimated value presenting device of the present invention further includes a low temperature range threshold storing means for preliminarily storing a low temperature range threshold designating a temperature for presenting the temperature estimated value, and the temperature measuring means. A first temperature storage means for preliminarily storing a first temperature, which is a first temperature for obtaining a temperature measurement value, and a second temperature from the time when the measurement value acquisition means obtains the first temperature measurement value; A required time measuring unit that measures a required time until the measurement value is acquired, and the measured value acquiring unit is configured such that when the temperature measured value obtained from the temperature measuring unit reaches the first temperature, A temperature measurement value is acquired as a first temperature measurement value, a second temperature measurement value is acquired at an arbitrary temperature between the first temperature and the low temperature range threshold, and a second temperature After the measurement value is acquired, the required time has passed. It is characterized in obtaining a temperature measurement value of the third point in time.

Further, in one configuration example of the temperature estimated value presenting device of the present invention, the estimated calculating means calculates the temperature estimated value by simulation based on a mathematical expression that sequentially calculates a temperature change for each fixed time. Is.
Further, in one configuration example of the predicted temperature decrease required value presentation device of the present invention, the required time predicting means calculates the predicted temperature decrease required time value by simulation based on a mathematical expression for sequentially calculating a temperature change for each fixed time. It is characterized by this.

  Moreover, the temperature estimated value presentation method of the present invention includes a measurement value acquisition procedure for acquiring three temperature measurement values at the time of temperature decrease of the controlled object from the temperature measurement means, and a temperature decrease from the temperature measurement value acquired by this measurement value acquisition procedure. A time constant calculation procedure for calculating a time constant of a temperature change of the control target at the time, and a convergence value calculation procedure for calculating a convergence value of the temperature of the control target at the time of cooling from the temperature measurement value acquired by the measurement value acquisition procedure And an estimated calculation procedure for calculating an estimated temperature value of the controlled object at the time of cooling from the time constant and the convergence value, and a estimated temperature value presentation procedure for presenting the estimated temperature value to an operator. It is a feature.

  Moreover, the temperature fall required time predicted value presentation method of the present invention includes a measurement value acquisition procedure for obtaining three temperature measurement values at the time of temperature fall of the controlled object from the temperature measurement means, and a temperature measurement value obtained by this measurement value acquisition procedure. The time constant calculation procedure for calculating the time constant of the temperature change of the control target when the temperature is decreased from the temperature, and the convergence value for calculating the convergence value of the temperature of the control target when the temperature is decreased from the temperature measurement value acquired in the measurement value acquisition procedure A calculation procedure, a required time prediction procedure for calculating a predicted value of a required temperature decrease time required for the temperature to be controlled to be lowered from the time constant and the convergence value, and the predicted temperature decrease time value to the operator. And a predicted temperature decrease required time presentation procedure to be presented.

  In addition, one configuration example of the temperature estimated value presentation method of the present invention further includes a temporary time constant storing procedure for storing the time constant repeatedly calculated in the time constant calculating procedure, and the calculation of the convergence value repeatedly in the convergence value calculating procedure. A provisional convergence value storage procedure for storing a convergence value, and a plurality of time constants stored in the provisional time constant storage procedure when a temperature measurement value obtained from the temperature measurement means reaches a predetermined low temperature range threshold value; The time constant determination procedure for determining the final value of the time constant with reference to the above, and when the temperature measurement value obtained from the temperature measurement means has reached the low temperature range threshold, stored in the temporary convergence value storage procedure A convergence value determination procedure for determining a final value of the convergence value with reference to a plurality of convergence values, wherein the measurement value acquisition procedure repeatedly acquires the three temperature measurement values, and the time constant calculation procedure And the convergence value calculation procedure, Each time the three temperature measurement values are acquired, the time constant and the convergence value are calculated, and the estimation calculation procedure includes calculating the temperature from the final value of the time constant and the final value of the convergence value. An estimated value is calculated.

  In addition, one configuration example of the temperature estimated value presentation method of the present invention further requires a period from the time when the first temperature measurement value is acquired to the time when the second temperature measurement value is acquired in the measurement value acquisition procedure. A time measurement procedure for measuring time, and when the temperature measurement value obtained from the temperature measurement means reaches a predetermined first temperature, the temperature measurement value is obtained as a first point. Is obtained as a temperature measurement value of the first temperature, and a second temperature measurement value is obtained at an arbitrary temperature between the first temperature and a predetermined low temperature range threshold, and a second temperature measurement value is obtained. Then, a third temperature measurement value is acquired when the required time has passed.

  According to the present invention, the time constant of the temperature change of the controlled object at the time of temperature decrease is calculated from the three temperature measured values acquired by the measured value acquiring means, and the convergence value of the temperature of the controlled object is calculated. By calculating the temperature estimated value of the controlled object at the time of temperature drop from the value and the convergence value and presenting it to the operator, the reliability of temperature measurement by the temperature measuring means in the low temperature range can be reduced when the temperature is lowered from the high temperature to the low temperature. Even in the case of a decrease, temperature presentation that compensates for the decrease in reliability can be performed.

  Further, in the present invention, by calculating the predicted temperature decrease time required value and presenting it to the operator, the operator can estimate the time that can be taken for other work to be performed during the temperature decrease, thereby improving the operator's work efficiency. be able to.

  In the present invention, the measurement value acquisition unit repeatedly acquires three temperature measurement values, and the time constant calculation unit and the convergence value calculation unit acquire the time constant and the convergence value each time three temperature measurement values are acquired. When the measured temperature value reaches the low temperature range threshold, the time constant determining means refers to a plurality of time constants stored in the temporary time constant storage means and determines the final value of the time constant. The convergence value determining means determines the final value of the convergence value by referring to the plurality of convergence values stored in the temporary convergence value storage means, and the estimation calculation means determines the temperature from the final value of the time constant and the final value of the convergence value. By calculating the estimated value, the calculation accuracy of the time constant and the convergence value can be improved, and the temperature estimation accuracy can be improved.

  In the present invention, when the temperature measurement value reaches the first temperature, the measurement value acquisition means acquires this temperature measurement value as the first temperature measurement value, and the first temperature, the low temperature range threshold value, The second temperature measurement value is acquired at any temperature between the two points, and the third temperature measurement value is acquired when the required time has elapsed after the second temperature measurement value is acquired. Thus, the calculation accuracy of the time constant and the convergence value can be improved, and the temperature estimation accuracy can be improved.

  Further, in the present invention, the temperature estimated value is calculated by a simple mathematical formula without using a complicated model mathematical formula, by calculating the temperature estimated value by simulation based on the mathematical formula for sequentially calculating the temperature change per fixed time. be able to.

  Further, in the present invention, the temperature decrease required time prediction value is calculated by a simulation based on a mathematical expression that sequentially calculates a temperature change for every fixed time, so that the temperature decrease required time prediction can be performed with a simple mathematical expression without using a complicated model expression. A value can be calculated.

It is a block diagram which shows the structure of the temperature estimated value presentation apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart which shows operation | movement of the temperature estimated value presentation apparatus which concerns on the 1st Embodiment of this invention. It is a figure which shows the acquisition point of the temperature measurement value by the measurement value acquisition part which concerns on the 1st Embodiment of this invention. It is a figure which shows one example of the change of the temperature estimated value calculated in the 1st Embodiment of this invention. It is a block diagram which shows the structure of the temperature fall required time estimated value presentation apparatus which concerns on the 2nd Embodiment of this invention. It is a flowchart which shows operation | movement of the temperature fall required time estimated value presentation apparatus which concerns on the 2nd Embodiment of this invention. It is a block diagram which shows the structure of the temperature estimated value presentation apparatus which concerns on the 3rd Embodiment of this invention. It is a flowchart which shows operation | movement of the temperature estimated value presentation apparatus which concerns on the 3rd Embodiment of this invention. It is a figure which shows the acquisition point of the temperature measurement value by the measurement value acquisition part which concerns on the 3rd Embodiment of this invention. It is a block diagram which shows the structure of the temperature estimated value presentation apparatus which concerns on the 4th Embodiment of this invention. It is a flowchart which shows operation | movement of the temperature estimated value presentation apparatus which concerns on the 4th Embodiment of this invention. It is a figure which shows the acquisition point of the temperature measurement value by the measurement value acquisition part which concerns on the 4th Embodiment of this invention.

[Principle of the Invention]
When the output of the heater or the like is turned off after the high temperature heat treatment process is finished, or when the temperature is lowered to a sufficiently low constant value, for example, when the temperature falls below 70 ° C., there is no measurement reliability. A method of displaying “70 ° C.” whenever it can be regarded as 70 ° C. or less impairs the safety of the operator. The temperature lowering characteristics often depend on the heat capacity and heat holding state of the entire heat treatment process apparatus, and even if the temperature is decreased from the same temperature in the same apparatus, the temperature decreasing speed is not always the same. For example, even if the inside of the chamber where the heat treatment is performed is at the same temperature, if the entire device (such as the periphery of the chamber) is warm, the heat dissipation is poor and the temperature drop is slow. If the entire device is cold, the heat dissipation is good. As a result, the temperature drops faster. That is, the temperature drop state at a temperature of 70 ° C. or lower is not always the same.

  If the temperature is being lowered for reasons such as setup change, the chamber door should be opened as soon as possible in order to improve work efficiency. Therefore, (1) work efficiency can be improved if the temperature measurement value or the estimated temperature value is as reliable as possible without being precise. Alternatively, (2) work efficiency can be improved if the predicted value of the required temperature drop time can be known at an early stage even if it is not precise.

  Thus, the inventor has focused on the significance, value, and effect of estimating the temperature in the low temperature range when the temperature is lowered and presenting the temperature. In addition, we focused on the significance, value, and effect of predicting the required time for cooling and presenting the required temperature at an early stage after the start of cooling. If the output of the heater is turned off or set to a sufficiently low constant value, the temperature drop curve will be approximately exponential, so the temperature will change based on the temperature change up to the low temperature range. It is thought that it is useful to estimate the temperature drop state of the area.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a temperature estimated value presentation device according to the first embodiment of the present invention. This embodiment corresponds to Problem 1 to be solved.
The temperature estimated value presentation device of the present embodiment includes a measured value acquisition unit 1 that acquires three temperature measurement values at the time of temperature drop of the object from the temperature measurement means, and a temperature change of the object at the time of temperature drop from the temperature measurement value. A time constant calculation unit 2 for calculating the time constant of the target, a convergence value calculation unit 3 for calculating a convergence value of the temperature of the object at the time of temperature decrease from the temperature measurement value, and an object at the time of temperature decrease from the time constant and the convergence value An estimation calculation unit 4 that calculates a temperature estimation value and a temperature estimation value presentation unit 5 that presents the temperature estimation value to an operator are provided.

  In the following embodiments, a heat treatment process in which an object is heated with a heater is assumed. In this heat treatment process, the temperature of the object is controlled by a general-purpose temperature control device such as a temperature controller that outputs an operation amount to the heater.

FIG. 2 is a flowchart showing the operation of the temperature estimated value presentation device of the present embodiment. When the output of a heater (not shown) for heating the object is turned off or becomes a low constant value and the temperature of the object starts to be lowered from a high temperature to a low temperature, the measurement value acquisition unit 1 measures the temperature (not shown). A temperature measurement value is acquired from the means (step S100 in FIG. 2). At this time, the measurement value acquisition unit 1 acquires three temperature measurement values PV _j−2 , PV _j−1 , and PV _j at a constant measurement interval time dt as shown in FIG. 3. 3 in FIG. 3 indicates the temperature of the heating target that decreases exponentially.

In the present embodiment, for example, it is assumed that temperature measurement means having high temperature measurement reliability in a high temperature range higher than 70 ° C. and low temperature measurement reliability in a low temperature range of 70 ° C. or lower is used. As such temperature measuring means, there are a B thermocouple and a radiation thermometer as described above. The specific setting of the timing for obtaining the temperature measurement values PV _j-2 , PV _j-1 , PV _j is not an essential requirement. However, after the temperature drop from the high temperature to the low temperature is started, while the temperature of the object is in the temperature range where the temperature measurement means is highly reliable (effective), the temperature measurement values PV _j-2 and PV _{j -1} , PV _j needs to be acquired.

When the time constant of the temperature change of the object that converges exponentially is T and the temperature convergence value is X, the following relationship holds.
PV _j-1 = (PV _j-2 T + dtX) / (T + dt) (1)
PV _j = (PV _j-1 T + dtX) / (T + dt) (2)

From the equations (1) and (2), the time constant T and the convergence value X are obtained as follows.
_{T = - (PV j -PV j} -1) dt / (PV j -2PV j-1 + PV j-2) ··· (3)
X = {PV _j (T + dt) −PV _j−1 T} / dt
_{= PV j - {(PV j} -PV j-1) 2 / (PV j -2PV j-1 + PV j-2)}
... (4)

The time constant calculation unit 2 calculates the time constant T from the equation (3) (step S101 in FIG. 2), and the convergence value calculation unit 3 calculates the convergence value X from the equation (4) (step S102).
As described above, the time constant T and the convergence value X can be obtained by a simple mathematical formula using only four arithmetic operations, and the temperature estimated values PV _{j + 1} and PV _{j + 2 for} each fixed time period dt after the temperature measurement value PV _j are obtained. ... can be calculated sequentially as in the following equation.
PV _{j + 1} = (PV _j T + dtX) / (T + dt) (5)
PV _{j + 2} = (PV _{j + 1} T + dtX) / (T + dt) (6)

The estimation calculation unit 4 calculates the temperature estimation values PV _{j + 1} and PV _{j + 2} from the equations (5) and (6) (step S103 in FIG. 2). Needless to say, the estimated temperature values after PV _{j + 3} can also be calculated sequentially.
Then, the estimated temperature value presentation unit 5 presents the estimated temperature values PV _{j + 1} , PV _{j + 2} ... Calculated by the estimation calculation unit 4 to the operator of the heat treatment process (step S104).

  As described above, in the present embodiment, if at least three temperatures can be measured in the reliable (effective) temperature range of the temperature measuring means, the low-reliable (invalid) temperature range ( It is possible to estimate and present the temperature in the low temperature range. As a result, in this embodiment, when the temperature is lowered from a high temperature to a low temperature, even if the reliability of the temperature measurement by the temperature measurement means is lowered in the low temperature range, the temperature presentation that compensates for the decrease in the reliability is realized. can do.

Next, numerical examples of temperature estimated value calculation will be described. Here, the three measured temperature values PV _j−2 = 130.00 ° C., PV _j−1 = 128.00 ° C., and PV _j = 126.04 ° C. are the constant measurement interval time dt = 2.0 seconds. Suppose that it was obtained. At this time, the time constant T of the temperature change of the object that converges exponentially and the temperature convergence value X are obtained as follows.
T = − (126.04−128.00) × 2.0 / (126.004−128.00 + 130.00) = 98.0 [seconds] (7)
X = {126.04 (98.0 + 2.0) −128.00 × 98.0} /2.0
= 100.0 [° C] (8)

And in principle, after measuring the temperature of PV _j = 126.04 ° C., the temperature estimated values PV _{j + 1} , PV _{j + 2} ... (Sequence of 0 second). Since the equations (9) and (10) are estimation equations only for simple four arithmetic operations, the present invention can be implemented even with a temperature control device such as a temperature controller with restrictions on the operation function.
_{PV j + 1 = (98.0PV j} + 2.0 × 100.0) / (98.0 + 2.0)
= 0.98 PV _j +2.0 (9)
PV _{j + 2} = (98.0 PV _{j + 1} + 2.0 × 100.0) / (98.0 + 2.0)
= 0.98 PV _{j + 1} +2.0 (10)

  The sequential calculation results are shown in Tables 1 and 2, and the change in the estimated temperature value is shown in FIG. In Tables 1, 2, and 4, the temperatures at times 0, 2, and 4 are measured temperature values, and the temperatures after time 6 are estimated temperature values.

Incidentally, the formula (5), the equation (6), equation (9), equation (10), but to calculate the temperature estimate per time period dt, the time when the temperature measured value PV _j is obtained t If = 0, the estimated temperature PVe (t) after an arbitrary time t has been obtained as follows.
PVe (t) = PV _j + (X−PV _j ) {1-exp (−t / T)} (11)

  Therefore, the estimation calculation unit 4 uses the equation (11) instead of the equation (5), the equation (6), the equation (9), and the equation (10) to calculate the temperature estimated value PVe ( t) may be calculated. However, expression (11) requires exponential function calculation.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. FIG. 5 is a block diagram showing a configuration of a predicted temperature decrease required value presentation device according to the second exemplary embodiment of the present invention. The same components as those in FIG. 1 are denoted by the same reference numerals. This embodiment corresponds to Problem 2 to be solved.
The predicted temperature decrease required value presentation device of the present embodiment includes a desired temperature of an object from a measured value acquisition unit 1, a time constant calculation unit 2, a convergence value calculation unit 3, a time constant T, and a convergence value X. The required time prediction unit 6 that calculates the predicted value of the required temperature decrease time required for the temperature decrease up to and the predicted required temperature decrease value presentation unit 7 that presents the predicted required temperature decrease value to the operator.

  FIG. 6 is a flowchart showing the operation of the predicted temperature decrease required value presentation device of the present embodiment. The operations of the measurement value acquisition unit 1, the time constant calculation unit 2, and the convergence value calculation unit 3 are the same as those in the first embodiment (steps S100 to S102 in FIG. 6).

Since the sequential calculation described in the first embodiment calculates an estimated temperature value for each constant time period dt, it is possible to easily obtain a predicted value of the required temperature decrease time required for the temperature decrease of the object to the desired temperature PVe. It is clear that For example, if the desired temperature and PVe = PV j + _100, the predicted value of the temperature drop required time from the time t = 0 the temperature measurement value PV _j is obtained until the temperature of the object becomes PVe = PV j + ₁₀₀ Is 100 × dt. In this way, the required time prediction unit 6 can calculate the predicted temperature decrease required time (step S105 in FIG. 6).
The predicted temperature decrease required value presentation unit 7 presents the predicted required temperature decrease value calculated by the required time prediction unit 6 to the operator (step S106).

  As described above, in the present embodiment, the operator can estimate the time that can be taken for another work to be performed during the temperature decrease by calculating the temperature decrease required time predicted value and presenting it to the operator. Work efficiency can be improved.

Next, a numerical example of the predicted temperature decrease required value will be shown. Here, the control cycle of the temperature controller for controlling the temperature of the object is dc = 0.5 seconds, the temperature estimation value calculation cycle (= the above-mentioned cycle dt) is dt = 2.0 seconds, and the end point of the required temperature drop time Is set to PVe = 40.0 ° C. Further, it is assumed that three points of temperature measurement values PV _j−2 = 130.00 ° C., PV _j−1 = 128.00 ° C., and PV _j = 126.04 ° C. are obtained.

The time constant calculation unit 2 and the convergence value calculation unit 3 calculate the time constant T and the convergence value X, and the required time prediction unit 6 executes the sequential calculation of the estimated temperature value in a simulation, and PVe = 40.0 ° C. or less. Find the point in time.
Since the calculation results shown in Tables 1 and 2 are obtained, assuming that the time point at which the temperature measurement value PV _j = 126.04 ° C. is obtained is 0 seconds, 224 seconds is a predicted value of the required time.

In the present embodiment, since it is meaningful to present the predicted temperature decrease required value at an early stage, whether or not the predicted temperature decrease required value is updated every time a temperature measurement value is obtained is determined as necessary. You only have to respond.
Further, in the above description, sequential calculation is necessary to calculate the predicted temperature decrease required time. However, when the temperature measurement value PV _j is obtained, t = 0, and the temperature of the object becomes the desired temperature PVe. It is also possible to calculate the predicted value τ of the required temperature drop time until
τ = −Tln {1- (PVe−PV _j ) / (X−PV _j )} (12)

  Accordingly, the required time predicting unit 6 may calculate the predicted temperature decrease required time using the equation (12) instead of performing the sequential calculation. However, in the equation (12), logarithmic function calculation is required.

[Third Embodiment]
Next, a third embodiment of the present invention will be described. FIG. 7 is a block diagram showing the configuration of the temperature estimated value presentation device according to the third embodiment of the present invention. The present embodiment corresponds to Problem 1 to be solved, and describes a practical example when the estimated temperature value presentation device is mounted on a temperature controller.

  The temperature estimated value presentation device of the present embodiment includes a measured value acquisition unit 1a, a time constant calculation unit 2a, a convergence value calculation unit 3a, an estimation calculation unit 4a, a temperature estimation value presentation unit 5, and a time constant calculation. Temporary time constant storage unit 8 that stores the time constant T that is repeatedly calculated by the unit 2a, temporary convergence value storage unit 9 that stores the convergence value X that is repeatedly calculated by the convergence value calculation unit 3a, and the temperature that provides the temperature estimation value Stored in the temporary time constant storage unit 8 when the temperature measurement value obtained from the temperature measuring means reaches the low temperature region threshold value. A time constant determination unit 11 that determines a final value of the time constant T with reference to a plurality of time constants T, and a temporary convergence value storage unit when the temperature measurement value obtained from the temperature measurement means reaches a low temperature range threshold. The final value of the convergence value X is determined with reference to the plurality of convergence values X stored in FIG. That and a convergent value determination section 12.

  FIG. 8 is a flowchart showing the operation of the temperature estimated value presentation device of the present embodiment. Here, the control cycle of the temperature controller that controls the temperature of the object is dc = 0.5 seconds, the temperature estimation value calculation cycle (= the above-mentioned cycle dt) is dt = 2.0 seconds, and the temperature estimation value is presented. The low temperature range threshold to be set is R = 70.0 ° C. The reason why the temperature measurement cycle for estimating the temperature (time interval of the temperature estimate value) is set to 2.0 seconds longer than the control cycle of 0.5 seconds is that the time constant T is converged as the temperature measurement cycle is shorter. This is because the accuracy of calculation of the value X is deteriorated.

The measurement value acquisition unit 1a acquires three temperature measurement values in the same manner as the measurement value acquisition unit 1 of the first embodiment (step S200 in FIG. 8).
The low temperature range threshold storage unit 10 stores in advance a low temperature range threshold R = 70.0 ° C. that designates a temperature range for presenting the estimated temperature value. The time constant determination unit 11 and the convergence value determination unit 12 determine whether at least one of the three temperature measurement values acquired by the measurement value acquisition unit 1a in step S200 has reached the low temperature range threshold R = 70.0 ° C. Is determined (step S201). When the temperature measurement value does not reach the low temperature range threshold R = 70.0 ° C., the process proceeds to step S202.

The time constant calculating unit 2a calculates the time constant T in the same manner as the time constant calculating unit 2 of the first embodiment (step S202 in FIG. 8), and the convergence value calculating unit 3a is the convergence of the first embodiment. The convergence value X is calculated in the same manner as the value calculation unit 3 (step S203).
The temporary time constant storage unit 8 stores the time constant T calculated by the time constant calculation unit 2a as a temporary value (step S204), and the temporary convergence value storage unit 9 stores the convergence value X calculated by the convergence value calculation unit 3a. Is stored as a provisional value (step S205).

Next, the measurement value acquisition unit 1a acquires three temperature measurement values again (step S200). In this way, the process of steps S200 to S205 is repeated until at least one of the three temperature measurement values reaches the low temperature range threshold R = 70.0 ° C.
When the measured temperature value reaches the low temperature range threshold R = 70.0 ° C. (YES in step S201), the time constant determination unit 11 averages the plurality of time constants T stored in the temporary time constant storage unit 8. The value is determined as the final value of the time constant T (step S206), and the convergence value determination unit 12 determines the average value of the plurality of convergence values X stored in the temporary convergence value storage unit 9 as the final value of the convergence value X. (Step S207).

The estimation calculation unit 4a uses the time constant T and the convergence value X determined by the time constant determination unit 11 and the convergence value determination unit 12 to calculate the temperature estimation value in the same manner as the estimation calculation unit 4 of the first embodiment. (Step S208).
The estimated temperature value presentation unit 5 presents the estimated temperature value calculated by the estimation calculation unit 4a to the operator (step S104).

  As described above, the accuracy of calculation of the time constant T and the convergence value X is not deteriorated by making the temperature measurement cycle for temperature estimation as long as 2.0 seconds with respect to the control cycle of 0.5 seconds. I am considering. However, it is preferable to further consider that a measurement error due to noise or the like occurs in the temperature measurement value. When an operation for maintaining the heater output at zero is performed and, for example, a temperature drop from 150 ° C. is started, temperature measurement values are repeatedly acquired from, for example, around 130 ° C. (FIG. 9). Each time three temperature measurement values are acquired, the time constant T and the convergence value X are calculated by the time constant calculation unit 2a and the convergence value calculation unit 3a, respectively. It is stored in the constant storage unit 8 and the temporary convergence value storage unit 9. When the temperature measurement value reaches the low temperature range threshold R = 70.0 ° C., the average value of the plurality of time constants T is determined as the final value of the time constant T, and the average value of the plurality of convergence values X is determined. The final value of the convergence value X is determined.

  Thus, in the present embodiment, the calculation accuracy of the time constant T and the convergence value X can be improved as compared with the first embodiment, and the temperature estimation accuracy can be improved. Note that it is not necessary to adopt a simple average value as the final value of the time constant T and the convergence value X, and a weighted average value or the like may be appropriately adopted.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described. FIG. 10 is a block diagram showing a configuration of a temperature estimated value presentation apparatus according to the fourth embodiment of the present invention. The present embodiment corresponds to Problem 1 to be solved, and describes a practical example when the estimated temperature value presentation device is mounted on a temperature controller.

  The estimated temperature value presentation device of the present embodiment includes a measured value acquisition unit 1b, a time constant calculation unit 2b, a convergence value calculation unit 3b, an estimation calculation unit 4b, a temperature estimation value presentation unit 5, and a low temperature range. The threshold value storage unit 10, the first temperature storage unit 13 that stores in advance a first temperature that is a first temperature for acquiring a temperature measurement value from the temperature measurement means, and the measurement value acquisition unit 1 b that measures the first temperature And a required time measuring unit 14 for measuring a required time from the time when the value is acquired to the time when the second temperature measurement value is acquired.

FIG. 11 is a flowchart showing the operation of the temperature estimated value presentation device of the present embodiment. Here, the control cycle of the temperature controller for controlling the temperature of the object is dc = 0.5 seconds, the low temperature range threshold is R = 70.0 ° C., and the first temperature is F = 130.0 ° C. (F> R ).
In the first temperature storage unit 13, the first temperature F = 130.0 ° C. is stored in advance. When the measured temperature value reaches the first temperature F = 130.0 ° C. (YES in step S300 in FIG. 11), the measured value acquisition unit 1b uses the measured temperature value 130.0 ° C. as the first measured temperature value. Obtained as PV _j-2 (step S301).

Subsequently, the measurement value acquisition unit 1b performs the second temperature measurement value PV _j-1 at an arbitrary temperature between the first temperature F = 130.0 ° C. and the low temperature range threshold R = 70.0 ° C. Is acquired (step S302).
The required time measurement unit 14 determines the required time dt ′ from the time when the measurement value acquisition unit 1b acquires the first temperature measurement value PV _j-2 to the time when the second temperature measurement value PV _j-1 is acquired. Is measured (step S303).

Next, the measured value acquisition unit 1b acquires the second temperature measurement value PV _j-1 and when the required time dt ′ has elapsed (YES in step S304), the third temperature measurement. The value PV _j is acquired (step S305). In this way, three temperature measurement values PV _j-2 , PV _j-1 , PV _j are acquired as shown in FIG.

After acquiring the three temperature measurement values PV _j-2 , PV _j-1 , PV _j , the time constant calculation unit 2b calculates the time constant T by the following equation (13) (step S306), and calculates the convergence value. The unit 3b calculates the convergence value X according to the equation (14) (step S307).
T = − (PV _j −PV _j−1 ) dt ′ / (PV _j −2PV _j−1 + PV _j−2 ) (13)
_{X = PV j - {(PV} j -PV j-1) 2 / (PV j -2PV j-1 + PV j-2)}
(14)

The estimation calculation unit 4b uses the following formulas (15) and (16) to estimate temperature values PV _{j + 1} and PV _{j + 2 for} each fixed time period dt (dt ≦ dt ′, for example, 2.0 seconds). Is calculated (step S308). If the time constant T and the convergence value X are calculated, the temperature estimation value calculation period does not have to be the same as the required time dt ′. Needless to say, the estimated temperature values after PV _{j + 3} can also be calculated sequentially.
PV _{j + 1} = (PV _j T + dtX) / (T + dt) (15)
PV _{j + 2} = (PV _{j + 1} T + dtX) / (T + dt) (16)
The estimated temperature value presentation unit 5 presents the estimated temperature values PV _{j + 1} , PV _{j + 2} ... Calculated by the estimation calculation unit 4b to the operator (step S309).

In the present embodiment, as the time interval between the three temperature measurement values acquired by the measurement value acquisition unit 1b is longer, the accuracy of calculating the time constant T and the convergence value X is improved. Therefore, when an operation for maintaining the heater output at zero is performed, for example, when a temperature drop from 150 ° C. is started, first, the first temperature measurement value PV _j−2 is set at the first temperature F = 130.0 ° C. get. Next, a second temperature measurement value PV _j-1 is acquired at an arbitrary temperature between the first temperature F = 130.0 ° C. and the low temperature range threshold R = 70.0 ° C. For example, a second temperature measurement value PV _j-1 is acquired at an intermediate 100 ° C. At this time, the required time dt ′ from 130.0 ° C. to 100 ° C. is measured by the required time measuring unit 14.

Then, when the required time dt ′ further elapses from 100 ° C., a third temperature measurement value PV _j is acquired. The three temperature measurement values PV _j−2 , PV _j−1 , and PV _j obtained in this way are longer in principle as shown in FIG. The calculation accuracy of the time constant T and the convergence value X can be improved by the same effect as taking the average value.

  In addition, the temperature estimated value presentation device and the temperature decrease required time predicted value presentation device of the first to fourth embodiments are respectively a computer having a CPU, a storage device, and an interface, and a program for controlling these hardware resources. Can be realized. The CPU executes the processes described in the first to fourth embodiments in accordance with a program stored in the storage device.

  The present invention is applied to a technique for calculating and presenting a temperature estimated value when the temperature of a controlled object is lowered, or a technique for calculating and presenting a predicted value of a required temperature drop time required for the temperature to be lowered to a desired temperature of the controlled object. Can do.

  DESCRIPTION OF SYMBOLS 1,1a, 1b ... Measurement value acquisition part, 2, 2a, 2b ... Time constant calculation part, 3, 3a, 3b ... Convergence value calculation part, 4, 4a, 4b ... Estimation calculation part, 5 ... Temperature estimated value presentation part , 6 ... required time prediction unit, 7 ... predicted temperature decrease required time presentation unit, 8 ... temporary time constant storage unit, 9 ... temporary convergence value storage unit, 10 ... low temperature range threshold storage unit, 11 ... time constant determination unit, 12 ... convergence value determination unit, 13 ... first temperature storage unit, 14 ... required time measurement unit.

Claims (10)

Measurement value acquisition means for acquiring three temperature measurement values at the time of temperature drop of the control target from the temperature measurement means;
A time constant calculating means for calculating a time constant of a temperature change of the control target at the time of cooling from the temperature measurement value acquired by the measurement value acquiring means;
Convergence value calculation means for calculating a convergence value of the temperature of the control target when the temperature is lowered from the temperature measurement value acquired by the measurement value acquisition means;
An estimation calculation means for calculating an estimated temperature value of the controlled object at the time of cooling from the time constant and the convergence value;
A temperature estimated value presenting device comprising temperature estimated value presenting means for presenting the temperature estimated value to an operator. Measurement value acquisition means for acquiring three temperature measurement values at the time of temperature drop of the control target from the temperature measurement means;
A time constant calculating means for calculating a time constant of a temperature change of the control target at the time of cooling from the temperature measurement value acquired by the measurement value acquiring means;
Convergence value calculation means for calculating a convergence value of the temperature of the control target when the temperature is lowered from the temperature measurement value acquired by the measurement value acquisition means;
A required time predicting means for calculating a predicted value of a required temperature decrease time required for temperature decrease from the time constant and the convergence value to a desired temperature of the control target;
A temperature reduction required time predicted value presentation device comprising: a temperature decrease required time predicted value presentation means for presenting the temperature reduction required time predicted value to an operator. In the temperature estimated value presentation apparatus according to claim 1,
Furthermore, temporary time constant storage means for storing the time constant repeatedly calculated by the time constant calculation means,
Temporary convergence value storage means for storing the convergence value repeatedly calculated by the convergence value calculation means;
Low temperature range threshold storage means for preliminarily storing a low temperature range threshold for designating a temperature for presenting the temperature estimated value;
When the temperature measurement value obtained from the temperature measurement means reaches the low temperature range threshold, the final value of the time constant is determined with reference to a plurality of time constants stored in the temporary time constant storage means Constant determination means;
Convergence for determining a final value of the convergence value with reference to a plurality of convergence values stored in the temporary convergence value storage means when a temperature measurement value obtained from the temperature measurement means reaches the low temperature range threshold value A value determining means,
The measurement value acquisition unit repeatedly acquires the three temperature measurement values,
The time constant calculating means and the convergence value calculating means calculate the time constant and the convergence value each time the three temperature measurement values are acquired,
The temperature estimation value presentation device, wherein the estimation calculation means calculates the temperature estimation value from a final value of the time constant and a final value of the convergence value. In the temperature estimated value presentation apparatus according to claim 1,
Furthermore, a low temperature range threshold value storage means for preliminarily storing a low temperature range threshold value designating a temperature for presenting the temperature estimated value,
First temperature storage means for preliminarily storing a first temperature which is a first temperature for obtaining a temperature measurement value from the temperature measurement means;
A required time measuring means for measuring a required time from the time when the measured value acquisition means acquires the first temperature measurement value to the time when the second temperature measurement value is acquired;
When the temperature measurement value obtained from the temperature measurement unit reaches the first temperature, the measurement value acquisition unit acquires the temperature measurement value as a first temperature measurement value, and the first temperature and the temperature The temperature at the second point is acquired at an arbitrary temperature between the low temperature range threshold value, and the temperature at the third point when the required time has passed since the second temperature measurement value was acquired. A temperature estimated value presentation device characterized by acquiring a measured value. In the temperature estimated value presentation apparatus according to any one of claims 1, 3, and 4,
The said estimated calculation means calculates the said temperature estimated value by simulation based on the numerical formula which calculates the temperature change for every fixed time sequentially, The temperature estimated value presentation apparatus characterized by the above-mentioned. In the temperature fall required time predicted value presentation device according to claim 2,
The required time predicting means calculates the predicted temperature decrease required value by simulation based on a mathematical expression that sequentially calculates a temperature change per fixed time. A measurement value acquisition procedure for acquiring three temperature measurement values at the time of temperature drop of the control target from the temperature measurement means;
A time constant calculation procedure for calculating a time constant of the temperature change of the control target at the time of temperature drop from the temperature measurement value acquired in this measurement value acquisition procedure;
A convergence value calculation procedure for calculating a convergence value of the temperature of the control target at the time of cooling from the temperature measurement value acquired in the measurement value acquisition procedure;
An estimation calculation procedure for calculating a temperature estimation value of the controlled object at the time of cooling from the time constant and the convergence value;
A temperature estimated value presenting method comprising: a temperature estimated value presenting procedure for presenting the temperature estimated value to an operator. A measurement value acquisition procedure for acquiring three temperature measurement values at the time of temperature drop of the control target from the temperature measurement means;
A time constant calculation procedure for calculating a time constant of the temperature change of the control target at the time of temperature drop from the temperature measurement value acquired in this measurement value acquisition procedure;
A convergence value calculation procedure for calculating a convergence value of the temperature of the control target at the time of cooling from the temperature measurement value acquired in the measurement value acquisition procedure;
A required time prediction procedure for calculating a predicted value of a required temperature decrease time required for temperature decrease from the time constant and the convergence value to a desired temperature of the control target;
A temperature decrease required time predicted value presentation method comprising: a temperature decrease required time predicted value presentation procedure for presenting the temperature decrease required time predicted value to an operator. In the temperature estimated value presentation method according to claim 7,
Furthermore, a temporary time constant storage procedure for storing the time constant repeatedly calculated in the time constant calculation procedure,
A temporary convergence value storage procedure for storing the convergence value repeatedly calculated in the convergence value calculation procedure;
When the temperature measurement value obtained from the temperature measurement means reaches a predetermined low temperature range threshold, the final value of the time constant is determined with reference to a plurality of time constants stored in the temporary time constant storage procedure. Time constant determination procedure to
A convergence value for determining a final value of the convergence value with reference to a plurality of convergence values stored in the provisional convergence value storage procedure when the temperature measurement value obtained from the temperature measurement means reaches the low temperature range threshold. A decision procedure,
The measurement value acquisition procedure repeats acquisition of the three temperature measurement values,
The time constant calculation procedure and the convergence value calculation procedure calculate the time constant and the convergence value each time the three temperature measurement values are acquired,
The temperature estimation value presenting method, wherein the estimation calculation procedure calculates the temperature estimation value from a final value of the time constant and a final value of the convergence value. In the temperature estimated value presentation method according to claim 7,
Furthermore, it comprises a required time measurement procedure for measuring a required time from the time when the first temperature measurement value is acquired in the measurement value acquisition procedure to the time when the second temperature measurement value is acquired,
In the measurement value acquisition procedure, when the temperature measurement value obtained from the temperature measurement means reaches a predetermined first temperature, the temperature measurement value is acquired as a first temperature measurement value, and the first temperature measurement value is obtained. When a second temperature measurement value is acquired at an arbitrary temperature between the temperature and a predetermined low temperature range threshold, and the required time has elapsed since the second temperature measurement value is acquired. The temperature estimated value presentation method characterized by acquiring the temperature measurement value of the 3rd point by.

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