JP5297950B2 - Connecting device and manufacturing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a connecting device and a manufacturing apparatus that allow a power supply cable to be connected to a power supply terminal, without fail, and preventing coming-off of the power supply cable. <P>SOLUTION: A connecting device 1, connecting a power supply cable K to a power supply terminal 135, used for a manufacturing device 100 includes, as a pinching part 12, a first holding member 31 capable of pressurizing a connection part L of the power supply cable K by its one portion, and a moving means 32 for moving the first holding member 31, further includes a first holding means 30 for pressurizing a connection part L; a second holding member 51 for holding the connection part L; a terminal part 52 which is continuous from the power supply terminal; and a spring 56, which is a means for energizing the second holding member 51 by an elastic force, as well as, includes a second holding means 50 which hold the connection part L that is pressurized by the first holding means 30. The connection part L is pinched between the first holding means 30 and the second holding means 50. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a connection device and a manufacturing device for connecting a power cable to a power supply terminal.

  At present, in order to supply power to a semiconductor manufacturing apparatus or the like, a power supply cable connected to a power supply terminal of the manufacturing apparatus or the like via a connection device is known. As a connection device for connecting such a power cable, a cable fixing bracket having a cable holding portion that curves in a substantially semicircle along the outer periphery of the cable is fixed to a wall surface of the device or the like with a screw or the like (for example, Patent Documents) 1) is known. In addition, a cable is arranged between a cable bed and a bridge connected by an open type hinge, and the free end of the bridge is screwed into the cable bed with a holding screw so that the cable can be tightened so as to be releasable (for example, Patent Documents) 2) is also known. Furthermore, a method of winding a power cable around a power terminal and connecting with a connecting device having a holding portion such as a clip or a leaf spring is also known.

Japanese Utility Model Publication No. 64-35786 JP-A-60-2629

  The connection device described above has the following problems. That is, since the connection device for connecting the power cable to the power terminal by fastening screws or the like is used manually by an operator, there is a risk of forgetting or loosening the screws, and management of the fastening torque and the screw head and fastening portion. It is necessary to prevent forgetting of fastening and loosening by providing a matching mark on and. For this reason, there also exists a problem that an operation process increases. Further, when the manufacturing apparatus is used in a hot atmosphere, there is a risk that the screws may loosen due to the heat cycle.

  Further, in a connection device that holds a power cable by a holding portion such as a clip or a leaf spring, the cross-sectional shape of the power cable needs to be a flat knitted wire in order to stabilize the installation area with the power cable. However, the mainstream power cable is a round wire, and it is difficult to obtain a flat knitted wire, or the cost may increase. However, if the round wire is fixed with a connecting device such as a clip instead of the flat knitted wire, the contact between the power cable and the connecting device becomes unstable, and the power cable may be cut. For this reason, when fixing a round wire power cable with a holding | maintenance part, it is necessary to use the holding | maintenance part which has the cross-sectional shape along the cross-sectional shape of a power cable.

  However, even if such a holding part is used, since the contact surface of the connected member is flat, the contact between the round power cable and the contact surface of the connected member may not be a surface contact. There is also a risk that the contact made becomes difficult.

  Therefore, an object of the present invention is to provide a connection device and a manufacturing device that can reliably connect a power cable.

  In order to solve the above problems and achieve the object, the connecting device and the manufacturing device of the present invention are configured as follows.

  A connection device for electrically connecting a power cable to a power terminal, the first holding member for pressing the power cable and holding the power cable, and the first holding in the pressing direction of the power cable A first holding means having a moving means for moving the member; a second holding member for holding the power cable pressed by the first holding member; and a movement of the power cable pressed by the first holding member Accordingly, the second holding member having a spring member that elastically supports the second holding member, and the first holding member and the second holding member are provided between the first holding member and the second holding member. Two holding members provided between the first gap portion sandwiching the power cable by the mutually facing surfaces and the second holding member and the spring member, and connected to the power terminal or the power terminal. A second gap portion for holding the terminal portion, characterized in that it comprises a.

  A manufacturing apparatus for processing a semiconductor wafer, comprising: a power supply unit having a power supply cable capable of supplying power to the outside; and a power supply terminal connected to the power supply cable, wherein the semiconductor wafer is supplied with power supplied from the power supply unit A first holding member that presses the power cable and holds the power cable, and a moving means that moves the first holding member in the pressing direction of the power cable. A holding means, a second holding member that holds the power cable pressed by the first holding member, and the second holding member elastically as the power cable pressed by the first holding member moves. Provided between the first holding member and the second holding member, and the first holding member and the second holding portion. A first gap portion that holds the power cable by the mutually facing surfaces, and a terminal portion that is provided between the second holding member and the spring member and connected to the power terminal or the power terminal. A connection device comprising a power supply cable held in the first gap portion and a second gap portion for electrically connecting the power supply terminals by being held between the second holding member and the spring member; It is characterized by providing.

  According to the present invention, the power cable can be reliably connected to the power terminal, and the power cable can be prevented from being detached, and the reliability can be improved.

Explanatory drawing which shows typically the structure of the manufacturing apparatus using the connecting device which concerns on one embodiment of this invention. The perspective view which shows the structure of the connection apparatus which concerns on one embodiment of this invention. Sectional drawing which shows the structure of the connection apparatus. Sectional drawing which shows the structure of the connection apparatus. Sectional drawing which shows the structure of the connection apparatus. Sectional drawing which shows the structure of the connection apparatus. The side view which shows the structure of the connection apparatus which concerns on the 1st modification of this invention. The side view which shows the structure of the connection apparatus. The side view which shows the structure of the connection apparatus. Sectional drawing which shows the structure of the connection apparatus which concerns on the 2nd modification of this invention. Sectional drawing which shows the structure of the connection apparatus.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is an explanatory view schematically showing the configuration of a manufacturing apparatus 100 using a connection device 1 according to an embodiment of the present invention, FIG. 2 is a perspective view showing the configuration of the connection device 1, and FIG. FIG. 4 is a longitudinal sectional view showing the configuration of the side of the connection device 1, FIG. 5 is a longitudinal sectional view showing the operation and configuration of the connection device 1, and FIG. 2 is a longitudinal sectional view showing the operation and configuration of the device 1. FIG. 1 to 6, B indicates a screw, K indicates a power cable, L indicates a connection portion of the power cable K, and W indicates a semiconductor wafer (wafer).

  The manufacturing apparatus 100 is one of manufacturing apparatuses that process and manufacture a semiconductor wafer (hereinafter referred to as “wafer”) W, for example, and is, for example, a heat treatment apparatus that performs heat treatment on the wafer W (hereinafter, the manufacturing apparatus 100 is referred to as a heat treatment apparatus). Explanation as 100.) The heat treatment apparatus 100 includes a heat treatment chamber 101 that heat-treats the wafer W, and a heat treatment means (treatment means) 102 that heats the heat treatment chamber 101 and heat-treats the wafer W.

  The heat treatment chamber 101 includes a reaction tube 110, a manifold 111, a wafer board 112, a lid body 113, a heat insulating cylinder 114, a gas supply unit 115, and an exhaust unit 116.

  The reaction tube 110 is hermetically connected (airtight) to the manifold 111. The reaction tube 110 and the manifold 111 form a processing space 118 therein. The processing space 118 is a so-called processing chamber in which the wafer W is processed.

  The wafer board 112 is disposed in the processing space 118. The wafer board 112 is formed so that a plurality of, for example, about 150 wafers W can be held in a horizontal state and at a predetermined interval in the vertical direction.

  The lid 113 is connected to the other end surface of the manifold 111 that is connected to the reaction tube 110 so that the processing space 118 can be sealed. The heat insulating cylinder 114 is provided between the wafer board 112 and the lid body 113, and is formed so as to be able to hold the wafer board 112 and to be thermally insulated. That is, the wafer board 112 is supported by the lid body 113 via the heat insulating cylinder 114, so that the wafer board 112 is thermally insulated and fixed to the lid body 113.

  The lid body 113 includes a boat elevator 119. The boat elevator 119 is formed so that the lid 113 can be separated from and connected to the manifold 111. In other words, the boat elevator 119 is formed so as to be capable of so-called loading and unloading, in which the lid 113 is separated from and connected to the manifold 111 so that the wafer board 112 and the heat insulating cylinder 114 are accommodated in and separated from the processing space 118. ing.

  The gas supply means 115 includes a gas supply pipe 115 a inserted into the processing space 118 from the outer surface of the manifold 111, and a flow rate adjusting unit 115 b that can adjust the flow rate of processing gas or the like supplied to the processing space 118. ing. Such a gas supply means 115 is formed so that the processing gas whose gas flow rate is adjusted by the flow rate adjusting unit 115b can be supplied to the processing space 118 via the gas supply pipe 115a. Here, as the processing gas, for example, a processing gas such as dichlorosilane or ammonia or an inert gas such as nitrogen gas is supplied. A plurality of gas supply means 115 may be provided.

  The exhaust means 116 is connected to the exhaust pipe 116 a that extends from the processing space 118 to the outside of the manifold 111, and is connected to the exhaust pipe 116 a to adjust the exhaust amount for exhausting the atmosphere such as processing gas in the processing space 118. And an exhaust adjusting portion 116b formed so as to be capable of adjusting the pressure of the processing space 118 and the like.

  The heat treatment means 102 includes a heater unit 130, a power supply unit 131, and a temperature sensor 132. Further, the heat treatment means 102 includes a connection device 1 that electrically connects the heater unit 130 and the power supply unit 131. The heater unit 130 includes a plurality of heater wires 134 (five stages in FIG. 1) arranged along the longitudinal direction of the reaction tube 110, and a power supply terminal 135 for supplying electric power to the heater wires 134. ing.

  The power supply unit 131 is a power supply source capable of supplying power to the heater unit 130. The power supply unit 131 includes a power cable K that is connected to the outside, here the power supply terminal 135, and can supply power to the power supply terminal 135. The power supply unit 131 includes, for example, a plurality of power cables K so that power can be supplied to the plurality of heater wires 134, respectively. As shown in FIGS. 2 and 3, the power cable K has a circular cross section. The power cable K has a connection portion L connected to the connection device 1 at its end.

  The connection portion L has a circular cross-section similar to the other portion of the power cable K and is formed in a smaller diameter than the other portion of the power cable K. The connecting portion L has a predetermined strength (withstand load) with respect to its radial load, and is formed of a case, a covering material, or the like that can prevent deformation of its cross-sectional shape. The connection portion L is formed of a material that can supply power from the power cable K to the power terminal 135 via the connection device 1. That is, the connecting portion L is formed by covering the electric wire with a covering material having a high electrical conductivity. In addition, the connection part L can set the cross-sectional shape suitably, and a square cross-sectional shape may be sufficient according to the shape of the connection apparatus 1. FIG.

  The temperature sensor 132 is formed so as to be able to measure the temperature between the heater wire 134 and the reaction tube 110, that is, the processing temperature by the heater wire 134. For example, a thermocouple is used for the temperature sensor 132 and is provided for each heater wire 134. The temperature sensor 132 may be provided so that the temperature of the processing space 118 can be directly measured.

  The flow rate adjusting unit 115b, the exhaust gas adjusting unit 116b, the power supply unit 131, and the temperature sensor 132 described above are connected to a control unit (not shown), for example. The control unit is configured to be able to control the flow rate of the processing gas supplied by the gas supply unit 115, the exhaust amount exhausted by the exhaust unit 116, and the power supplied to the heater wire 134.

  The connection device 1 is formed so that a power cable K and a power terminal 135 provided in the heater unit 130 of the heat treatment apparatus 100 can be connected. As shown in FIGS. 2 to 6, the connection device 1 includes an outer enclosure part 11 and a holding part 12. Such a connection device 1 is formed of a material having electrical conductivity. In addition, the connection apparatus 1 should just be formed with the material in which the 2nd holding member 51 mentioned later at least has electrical conductivity.

  The surrounding part 11 is formed in a rectangular frame shape. The surrounding portion 11 includes a pair of side plates 15, a first end plate 20 provided on one end side of these side plates 15, and a second end plate provided on the other end side of the pair of side plates 15. 25.

  The side plate 15 has a through hole 16 formed in the main surface thereof through which the connection portion L can be inserted. The through-hole 16 is formed with a long length between the inner surfaces in the longitudinal direction of the side plate 15. Thereby, the through-hole 16 is formed to be able to move the inserted connection portion L in the longitudinal direction of the side plate 15. At both ends of the side plate 15, a notch 17 and a hole 18 are provided so as to sandwich the notch 17.

  The notch 17 is formed, for example, by cutting the side plate 15 into a trapezoidal shape whose short side is located at the end of the side plate 15. Moreover, the hole 18 is formed so that the screw B can be inserted, for example.

  The first end face plate 20 is formed so that one end side of the pair of side face plates 15 can be connected. For example, the first end plate 20 has a trapezoidal projection 21 that can be fitted to the notch 17 and a female screw into which the screw B is screwed when the notch 17 and the projection 21 are fitted to the pair of side surfaces. It has a hole. The first end face plate 20 has a first cylindrical portion 22 that is a cylindrical protrusion formed on one main surface thereof. The outer diameter of the first cylindrical portion 22 is formed to be smaller than the inner diameter of a spring 56 described later, so that the first cylindrical portion 22 can be inserted into the spring 56.

  The second end face plate 25 is formed so that the other end side of the pair of side face plates 15 can be connected. For example, the second end face plate 25 has a trapezoidal protrusion 26 that can be fitted to the notch 17 on its opposite side surface, and a female screw into which the screw B is screwed when the notch 17 and the protrusion 26 are fitted. It has a hole. The second end face plate 25 has an opening 27 on the center side of the main surface.

  The holding part 12 is formed so that the connection part L of the power cable K can be held. If it demonstrates in detail, the holding | grip part 12 is provided with the 1st holding means 30 which presses the connection part L, and the 2nd holding means 50 which hold | maintains the connection part L pressed by this 1st holding means 30. .

  The first holding means 30 has a block shape, and a first holding member 31 that can press the connection portion L of the power cable K by a part thereof, and the first holding member 31 is moved in the pressing direction of the connection portion L. Moving means 32. The 1st holding member 31 has the 1st holding part 33 formed in the upper surface so that the connection part L can be pressed and hold | maintained by a predetermined heavy pressure area. The first holding member 31 includes a storage space 34 that opens in a cylindrical shape in which a part of the moving means 32 can be stored, and a first that penetrates from the inner surface of the storage space 34 to the lower surface side of the first holding member 31. And an opening 35.

  The 1st holding | maintenance part 33 is formed so that the outer surface of the connection part L can be pressed with a surface, and can be hold | maintained, for example. Note that, for example, when the outer shape of the connection portion L is a circular shape or an arc shape, the surface shape of the first holding portion 33 that contacts the connection portion L is formed in an arc shape. That is, the first holding portion 33 can be appropriately set as long as the outer surface of the connection portion L can be pressed by a surface (predetermined area) and can be held.

  The moving means 32 is provided on a cylindrical rotary member 37 slidably stored in the storage space 34 and one end face of the rotary member 37, and is eccentric with respect to the central axis (axial center) of the rotary member 37. A crankshaft 38 whose rotational center is located at a position, and a holding shaft 39 concentric with the crankshaft 38 and provided on the other end surface of the rotating member 37 are provided. In other words, the central axis of the rotating member 37 is eccentric with respect to the central axis of the crankshaft 38, and the rotating member 37 rotates eccentrically by rotating the crankshaft 38 with the central axis of the crankshaft 38 as the rotational axis. The positional relationship between the rotating member 37 and the crankshaft 38 can be set as appropriate as long as the first holding member 31 can be moved by a predetermined moving distance.

  The rotating member 37 has a second opening 41 provided in a part of the outer peripheral surface thereof. The second opening 41 is formed in a cylindrical shape with a bottom. The rotating member 37 includes a pin 42 and an elastic member such as a spring that urges the pin 42 from the bottom surface side of the second opening 41 to the opening side, for example, a coil spring 43, inside the second opening 41. Have.

  The pin 42 is formed to have an outer diameter that can reciprocate inside the second opening 41, and has a seat surface 42 a of the coil spring 43. That is, the pin 42 is always urged (pressed) by the coil spring 43 from the bottom surface side of the second opening 41 to the outer surface side of the rotating member 37. Further, the pin 42 has the first opening 35 and the second opening 41 because the rotation member 37 rotates and the first opening 35 and the second opening 41 of the first holding member 31 are in the same position. It is possible to be located in.

  Further, a part of the pin 42 can be inserted into the first opening 35, and the other part is formed in a shape capable of restricting insertion into the first opening 35. Specifically, the pin 42 is formed with an insertion portion 42 b to be inserted into the first opening 35 by having a part of the tip side having a small diameter. Further, the pin 42 is given a clear color at least in part, for example. Specifically, the pin 42 is formed with a clear color such as red or yellow at the top (the tip of the insertion portion 42b). A clear color is formed by applying paint or the like.

  That is, the pin 42 functions as a so-called lock pin that prevents (rotates) the rotation member 37 from rotating by being positioned across both the first opening 35 and the second opening 41. It is possible to be formed.

  The second holding means 50 includes a second holding member 51, a terminal portion 52, a seat portion 53, and a spring (spring member) 56. The second holding member 51 is formed of a material having electrical conductivity. The second holding member 51 has a second holding portion 57 formed so that the connection portion L of the power cable K pressed by the first holding means 30 can be held on the surface. The second holding part 57 is formed so as to be able to press and hold the outer surface of the connection part L with a surface, for example. Note that, for example, when the outer shape of the connection portion L is a circle or an arc, the second holding portion 57 has a surface shape that contacts the connection portion L formed in an arc. That is, the second holding portion 57 can be appropriately set as long as the outer surface of the connection portion L can be pressed and held by a surface instead of a point and a line. In addition, between the 1st holding member 31 and the 2nd holding member 51, the connection part L is inserted and clamped by the mutually opposing surfaces of the 1st holding part 33 and the 2nd holding part 57. One gap portion 58 is formed. The connecting portion L is inserted into the first gap portion 58, and the connecting portion L is held by the moving means 32 and the spring 56 with a predetermined pressing force, so that the power cable K and the second holding member 51 are connected. It will be electrically connected.

  The terminal portion 52 is formed in a rectangular shape, and the width thereof is substantially the same as the inner width of the outer enclosure portion 11, and is dimensioned to be movable within the outer enclosure portion 11. The terminal portion 52 is provided on the side facing the connection portion L of the second holding member 51, and along the inner surface (side plate 15) of the outer enclosure portion 11 as the second holding member 51 moves. It is formed to be movable. The terminal part 52 is connected to the power supply terminal 135 of the heat treatment apparatus 100. The terminal unit 52 may be the power supply terminal 135. That is, the terminal portion 52 may be formed integrally with the power supply terminal 135 as long as the terminal portion 52 is electrically continuous with the power supply terminal 135.

  The seat portion 53 abuts on the terminal portion 52 and is movable along the movement of the second holding member 51 in the outer enclosure portion 11, and the main surface that abuts on the terminal portion 52 of the plate portion 54. A second cylindrical portion 55 that is a cylindrical protrusion provided on the main surface opposite to is formed. The outer diameter of the second cylindrical portion 55 is smaller than the inner diameter of the spring 56 so that the spring 56 can be inserted.

  The spring 56 is, for example, a coil spring. The first and second cylindrical portions 22 and 55 are inserted into both ends of the spring 56 and held by the first end face plate 20 and the seat portion 53. The spring 56 is formed so as to elastically support the second holding member 51 through the first end face plate 20 and the seat portion 53. More specifically, the spring 56 is moved when the second holding member 51 pressed by the connecting portion L is pressed and moved as the connecting portion L is pressed and moved by the first holding member 31. Become. At this time, when the second holding member 51 moves, the seat portion 53 also moves, so that the spring 56 is elastically deformed (compressed), and the seat portion 53 is supported by the restoring force of the spring 56, so that the second The holding member 51 is formed so that the connection portion L can be pressed. Thus, the spring 56 is formed so that the connection part L can be pinched by the 1st holding member 31 and the 2nd holding member 51 by supporting the 2nd holding member 51 elastically.

  A second gap portion 59 is formed between the second holding member 51 and the spring 56, specifically, between the second holding member 51 and the seat portion 53. The terminal portion 52 is inserted into the second gap portion 59 and is sandwiched between the second holding member 51 and the seat portion 53 so as to be electrically connected to the second holding member 51.

  The heat treatment apparatus 100 using the connection device 1 configured as described above repeatedly performs the heat treatment of the wafer W. Hereinafter, an example of the heat treatment of the wafer W by the heat treatment apparatus 100 will be described.

  First, as a wafer W loading process, a plurality of wafers W are loaded into the heat treatment chamber 101. Specifically, the boat elevator 119 brings the lid 113 into contact with the manifold 111 and seals the processing space 118, so that the wafer board 112 holding the wafer W and the heat retaining cylinder 114 are carried into the processing space 118. Loading is done.

  Next, as a pressure adjusting step, the exhaust unit 116 exhausts the processing space 118 to adjust the pressure in the processing space 118. After adjusting the pressure in the processing space 118, a heat treatment process is performed in which the temperature in the processing space 118 is raised to heat the wafer W. Specifically, each heater wire 134 connected to the power supply unit 131 by the connection device 1 heats the processing space 118 to a predetermined temperature while the temperature sensor 132 performs temperature management. After raising the temperature of the processing space 118 to a predetermined temperature, a predetermined processing gas is supplied into the processing space 118 by the flow rate adjusting unit 115b, and the wafer W is heat-treated. Examples of the heat treatment of the wafer W include a film treatment by a low pressure CVD method.

  Next, after the heat treatment of the wafer W, a temperature lowering process for lowering the temperature in the processing space 118 is performed. As this temperature lowering process, for example, power supply to the heater wire 134 by the power supply unit 131 is stopped, and an inert gas or the like is supplied into the processing space 118 by the flow rate adjusting unit 115b or the like. The temperature is lowered and the processing gas is replaced.

  Next, an unloading process for unloading the wafer board 112 from the processing space 118 is performed, and thus a series of processes for heat treatment of the wafer W is completed.

  After the unloading process is completed, the wafer board 112 in which the unprocessed wafer W is instructed is accommodated in the processing space 118, and a series of heat treatment processes are performed again. Such heat treatment of the wafer W is repeatedly performed.

  The connecting device 1 that connects the power supply unit 131 and the heater element wire 134 rotates the crankshaft 38 so that the rotating member 37 is centered on the axis of the crankshaft 38 as shown in FIGS. Eccentric rotation. Due to the eccentric rotation of the rotating member 37, the first holding member 31 is positioned at a position where the first holding member 31 of the connecting device 1 is closest to the second end face plate 25 (hereinafter referred to as “lowermost position”). The first holding member 31 moves between the two end face plates 25 and the most distant position (hereinafter referred to as “uppermost position”).

Hereinafter, a connection method between the connection device 1 and the power cable K will be described.
First, the crankshaft 38 is rotated (rotated) as necessary to position the first holding member 31 of the connecting device 1 at the lowest position as shown in FIG. 52 is inserted, and the terminal portion 52 is held by the second holding member 51 and the seat portion 53. When the first holding member 31 moves to the lowest position, the second holding means 50 also moves toward the second end face plate 25 due to the restoring force of the spring 56. For this reason, the 1st holding | maintenance part 33 and the 2nd holding | maintenance part 57 contact | abut, and the 1st clearance gap 58 will be formed of the opposing surface which mutually opposes.

  In addition, as shown in FIG. 4, the rotation angle of the crankshaft 38 when the 1st holding member 31 is located in the lowest position is demonstrated below as 0 degree. When the rotation angle of the crankshaft 38 is 0 °, the first holding member 31 is positioned at the lowest position, and the second opening 41 opens upward. For this reason, the pin 42 pressed by the restoring force of the coil spring 43 comes into contact with the inner surface of the storage space 34 of the first holding member 31.

  Next, the connecting portion L of the power cable K is inserted into the first gap 58 between the first holding portion 33 and the second holding portion 57, and the first holding portion 33 and the second holding portion 57 Hold it. In this state, the crankshaft 38 is rotated. By rotating the crankshaft 38, the first holding means 30 moves from the state of FIG. 4 to the uppermost position of FIG. 6 through the state of FIG.

  That is, as shown in FIG. 5, the rotating member 37 is also rotated by rotating the crankshaft 38. As the rotating member 37 rotates, the rotating member 37 and the storage space 34 (inner surface of the first holding member 31) slide, and the first holding member 31 is moved upward by the eccentric rotating member 37. Move while rotating. Accordingly, the first holding member 31 is inclined and moved in a direction away from the second end face plate 25.

  Note that the state of the first holding means 30 shown in FIG. 5 is a state in which the crankshaft 38 is rotated by approximately 90 °. By rotating the crankshaft 38 by 90 °, the rotating member 37 also rotates, so that the second opening 41 provided in the rotating member 37 also rotates by 90 °. For this reason, as shown in FIG. 3, the second opening 41 opens in the direction in which the axial direction rotates about 90 ° with respect to the position of the second opening 41 shown in FIG. 4. .

  Further, the rotating member 37 is further rotated by rotating the crankshaft 38. As the rotating member 37 rotates eccentrically, the first holding member 31 moves from the inclined state of FIG. 5 while rotating in a direction away from the second end face plate 25 as shown in FIG. Thereby, the side surface of the first holding member 31 is disposed at a position along the longitudinal direction of the outer enclosure portion 11. That is, the first holding member 31 is lifted from the state of FIG. 4 to the state of FIG. 6, thereby being positioned at the uppermost position and pressing the connecting portion L toward the first end face plate 20.

  When the connecting portion L pressed by the first holding member 31 is pressed toward the first end face plate 20 side, the second holding member 51 is also pressed. When the second holding member 51 is pressed, the spring 56 contracts (elastically deforms), and the spring stress (restoring force) increases. For this reason, the spring 56 presses the second holding member 51 by its restoring force. That is, the connection portion L is pinched (held) by the first holding member 31 and the second holding member 51 with high pressure. As a result, the connection portion L is electrically connected to the terminal portion 52 via the second holding member 51.

  The state of the first holding means 30 shown in FIG. 6 is a state in which the crankshaft 38 is rotated by approximately 180 °. That is, when the crankshaft 38 rotates by approximately 180 °, the rotating member 37 also rotates as the crankshaft 38 rotates. As a result, the second opening 41 provided in the rotating member 37 opens downward.

  The second opening 41 opens in a direction rotated by approximately 180 ° with respect to the position of the second opening 41 shown in FIG. Thereby, the 1st opening part 35 and the 2nd opening part 41 mutually oppose, and are continuous.

  When the first opening 35 and the second opening 41 are continuous, the pin 42 pressed by the restoring force of the coil spring 42 a is located across both the first opening 35 and the second opening 41. When the rotating member 37 tries to rotate (turn) with respect to the first holding member 31, the rotational movement of the rotating member 37 is stopped by the pin 42. Thus, the pin 42 can perform a so-called lock as a restricting means for restricting (preventing) the rotation of the rotating member 37.

  The pin 42 is formed so that the insertion portion 42b of the pin 42 can be inserted into the first opening portion 35 so as not to be detached from the second opening portion 41, and the outer diameter of the pin 42 continuous with the insertion portion 42b is It is formed larger than the inner diameter of the first opening 35. For this reason, the entire pin 42 is not inserted into the first opening 35.

  The pin 42 restricts the movement of the rotating member 37, and the connection portion L is held by the first holding member 31 and the second holding member 51. Further, the opening 27, the first opening 35, and the second opening 41 of the second end face plate 25 are positioned on the same extension of the axis, and the pin 42 is the opening of the second end face plate 25. It becomes visible from the part 27. In particular, since the top of the pin 42 has a clear color, whether or not the movement of the rotating member 37 is restricted by the pin 42 is determined by visually checking the opening 27 and whether the pin 42 is visible. It becomes possible.

  When the connecting portion L is detached from the connecting device 1, the crankshaft 38 may be rotated in the reverse rotation direction. Specifically, first, the pin 42 is unlocked. For example, the pin 42 is pressed from the opening 27 of the second end face plate 25 with a rod or the like having substantially the same diameter as the pin 42, and the pin 42 is positioned in the second opening 41. In this state, since the pin 42 is housed in the second opening 41, the rotating member 37 can be rotated. That is, the restriction on the rotation of the rotating member 37 by the pin 42 is released.

  After the restriction of the rotating member 37 by the pin 42 is released, the rotating shaft 37 is also rotated by rotating the crankshaft 38. From the uppermost position shown in FIG. 6, the state shown in FIG. In addition, the first holding member 31 can be positioned at the lowest position.

  By positioning the first holding member 31 at the lowest position shown in FIG. 4, the pressing force of the second holding member 51, that is, the elastic force by the spring 56 becomes the lowest, and the connecting portion L is narrowed by the holding portion 12. The power to hold decreases. For this reason, the connecting portion L can be detached from the holding between the first holding member 31 and the second holding member 51.

  As described above, according to the connecting device 1, the crankshaft 38 that is eccentric with the shaft center of the rotating member 37 is rotated, and the first holding member 31 that presses the connecting portion L is moved to the uppermost position. Is held at a predetermined pressure by the first holding member 31 and the second holding member 51.

  That is, the power cable K can be fixed (connected) to the connection device 1 by the first holding means 30 and the second holding means 50. Since the power cable K is fixed by the first holding means 30 and the second holding means 50 with a predetermined force by the elastic force (restoring force) of the spring 56, the crankshaft 38 is simply rotated. It's okay. For this reason, it is possible to easily connect the power cable K and the power terminal 135 continuous to the terminal portion 52.

  When the power cable K is fixed, the pin 42 is inserted into the first opening 35, and thus the rotation of the rotating member 37 is restricted. Therefore, the power cable K may be detached from the connection device 1. Absent. Furthermore, even if the connection apparatus 1 is exposed to an environment such as an operation of the manufacturing apparatus provided with the connection apparatus 1 or a thermal cycle of the manufacturing apparatus, the rotating member 37 does not rotate due to the influence of these environments. That is, since the rotation of the rotating member 37 is restricted by the pin 42, the connection device 1 always holds the power cable K with a predetermined pressure by the holding part 12, so that the power cable K is securely connected to the first. It can be held by the gap 58 and can be electrically connected to the power supply terminal 135.

  Further, in order to release the fixing of the power cable K, it is only necessary to rotate the crankshaft 38 while the pin 42 is housed in the second opening 41. For this reason, connection (fixation) and detachment of the power cable K are facilitated. That is, the power cable K can be reliably and easily fixed, and workability and reliability are improved.

  Whether or not the power cable K is securely fixed can be determined based on whether or not the pin 42 can be visually recognized from the opening 27. That is, if the pin 42 is visible from the opening 27, the power cable K is securely connected to the connection device 1, and therefore it is possible to prevent forgetting to fix.

  By connecting the power cable K and the power terminal 135 with the connecting device 1 in this way, the heat treatment apparatus 100 can reliably supply power from the power supply unit 131 to the heater unit 130, and the wafer W can be supplied to the heat treatment chamber. Heat treatment can be performed by 101 and the heat treatment means 102.

  More specifically, when the heat treatment apparatus 100 is used, the connection apparatus 1 is also heated to a high temperature. That is, the connection device 1 is also heated by the heat treatment of the wafer W by the heater unit 130. That is, the connection device 1 is exposed to a heat cycle environment because heat is applied every time the wafer W is heat-treated.

  However, as described above, even when the connection device 1 is exposed to an environment such as a thermal cycle, the rotation of the rotating member 37 is restricted and does not rotate. For this reason, the power cable K is pinched by the pinching portion 12, and the power cable K and the power terminal 135 are reliably connected.

  That is, even when the heat treatment apparatus 100 is exposed to a heat cycle due to heat treatment, the power supply unit 131 and the heater unit 130 are securely connected, so that power can be reliably supplied to the heater unit 130. Become. Thereby, it becomes possible to prevent the supply of power to the heater unit 130 from being stopped during the manufacturing process, and the heat treatment apparatus 100 can be reliably operated.

  As described above, according to the connection device 1 of the present invention, the power cable K is securely connected via the connection device 1 by holding the connection portion L between the first holding device 30 and the second holding device 50. Thus, it is possible to connect to the power supply terminal 135. For this reason, the power supply cable K and the power supply terminal 135 can be reliably connected by the connecting device 1, and the heat treatment apparatus 100 can be reliably operated, and the reliability of the heat treatment apparatus 100 can be improved.

  In addition, by restricting the rotation of the rotating member 37 by the pin 42, it is possible to prevent the rotating member 37 from rotating due to a thermal cycle due to the operation of the heat treatment apparatus 100 or a change in the environment around the connection apparatus 1. Thus, it is possible to prevent the connection portion L from being loosened. Further, the confirmation of whether or not the connecting portion L is held by the holding portion 12 is only to visually recognize the pin 42 from the opening 27, and forgetting to hold (fix) the connecting portion L by the holding portion 12. Can be easily prevented.

Next, a connection device 1A according to a first modification of the present invention will be described with reference to FIGS.
7 is a side view showing the configuration of the connection device 1A according to the first modification of the present invention, FIG. 8 is a side view showing the configuration of the connection device 1A, and FIG. 9 is a side view showing the configuration of the connection device 1A. It is. 7-9, the same code | symbol is attached | subjected to the structure and functional part similar to FIGS. 1-6, and the detailed description is abbreviate | omitted.

  Note that the connection device 1 </ b> A is used in the heat treatment apparatus 100 in the same manner as the connection device 1 described above. As illustrated in FIGS. 7 to 9, the connection device 1 </ b> A includes an outer enclosure portion 11 and a holding portion 12 </ b> A that holds the power cable K. In addition, the connection part L of the power cable K can set the cross-sectional shape suitably according to the shape of 12 A of clamping parts. For this reason, the connection part L of the power cable K connected to the connection apparatus 1A using the holding part 12A shown in FIGS. 7 to 9 is covered with a covering material having a square cross-sectional shape as an example. A description will be given by using a rectangular shape.

  In addition, although the surrounding part 11 differs in the detailed shape from the connection apparatus 1 which concerns on 1st Embodiment mentioned above, since the effect and function are the same, the detailed description is abbreviate | omitted.

  The sandwiching portion 12A is formed so that the connection portion L can be sandwiched. More specifically, the holding portion 12A includes a second holding unit 50A that holds the connection portion L pressed by the first holding unit 30A. The first holding member 31 of the first holding means 30A only needs to be formed so as to be able to press the connection portion L with a predetermined heavy pressure area, and the first holding member 31 of the connection device 1A according to the first modification example. Is, for example, a square shape, and a part with which the connecting portion L abuts is formed in a shape that is cut out into a substantially triangular shape.

  The first holding means 30 </ b> A includes a cylindrical rotating member 37 </ b> A stored in the storage space 34. The rotating member 37A is not provided with the second opening 41. In addition, the crankshaft 38 and the holding shaft 39 (not shown) are provided with the rotation center positioned at the rotation center and the eccentric position of the rotation member 37A. That is, the rotation member 37 </ b> A is formed so as not to have the pin 42 and the coil spring 43 provided on the rotation member 37.

  Further, the first holding means 30A is provided on one side plate 15, and one end thereof is fixed to the side surface of the side plate 15 and the continuous member 60 formed of a flexible metal or the like. And a spacer 61 fixed to the other end of the continuous member 60. The spacer 61 has a thickness that can be fitted between the second end face plate 25 and the first holding member 31 when the first holding member 31 is located at the uppermost position. The spacer 61 is a restricting means that restricts the movement of the first holding member 31 when fitted.

  The second holding means 50 </ b> A includes a terminal portion 52, a seat portion 53, and a spring 56. Note that the second holding means 50A is configured not to have the second holding member 51, and holds the connection portion L pressed by the first holding means 30A on the main surface of the terminal portion 52 facing the connection portion L. It is made possible. That is, the terminal portion 52 and the seat portion 53 are the second holding members, and the first gap portion 58 and the second gap portion 59 are formed by the seat portion 53 and the first holding portion 33. Note that the terminal portion 52 may be connected to the power supply terminal 135 or may be formed integrally with the power supply terminal 135.

  In the connecting device 1A configured as described above, as shown in FIGS. 7 to 9, the first holding member 31 is moved by rotating the crankshaft 38, and the connecting portion L is pinched. As shown in FIGS. 8 and 9, the spacer 61 is fitted between the first holding member 31 and the second end face plate 25 when the first holding member 31 moves to the uppermost position after inclining. Accordingly, as shown in FIG. 9, when the first holding member 31 is located at the uppermost position, the spacer 61 is located between the first holding member 31 and the second end face plate 25, and the first holding member 31 is Fixed. That is, the movement of the first holding member 31 is restricted by the spacer 61, and accordingly, the rotation of the rotating member 37A is also restricted. When the spacer 61 is detached, it may be removed by pressing the spacer 61 or pulling the continuous member 60 from the direction opposite to the insertion direction.

  Thus, since the rotation of the rotation member 37A is restricted by the spacer 61, the holding (fixing) of the connecting portion L by the holding portion 12A is not loosened, that is, the connecting portion L is held by the holding portion 12A. Thus, the terminal portion 52 can be reliably connected.

  As described above, according to the connecting device 1A of the present invention, the same effect as that of the connecting device 1 described above can be obtained, and the restriction of the rotating member 37A can prevent the spacer 61 between the first holding member 31 and the second end face plate 25. Just insert it in between. Further, when there is no need for regulation, the movement of the rotating member 37 </ b> A is not regulated unless the spacer 61 is fitted between the first holding member 31 and the second end face plate 25. That is, the user can select whether or not the rotation member 37A is restricted, and the versatility is improved.

Next, a connection device 1B according to a second modification of the present invention will be described with reference to FIGS.
FIG. 10 is a longitudinal sectional view showing the configuration of the connecting device 1B according to the second modification of the present invention, and FIG. 11 is a longitudinal sectional view showing the configuration of the connecting device 1B. 10 and 11, the same components and functional parts as those in FIGS. 2 to 9 are denoted by the same reference numerals, and detailed description thereof is omitted.

  The connection apparatus 1B is used for the heat treatment apparatus 100 in the same manner as the connection apparatuses 1 and 1A described above. As shown in FIGS. 10 and 11, the connection device 1 </ b> B includes an outer enclosure portion 11, a holding portion 12 </ b> B that holds the connection portion L of the power cable K, and a terminal portion 52. The terminal portion 52 is formed integrally with a seat portion 53 provided in the second holding means 50 of the holding portion 12B. Note that, similarly to the connection devices 1 and 1A described above, the seat portion 53 and the terminal portion 52 may be separate.

  The holding part 12B includes a first holding unit 30B and a second holding unit 50. The first holding unit 30B includes a first holding member 31B and a wedge member 70. The 1st holding member 31B is provided with the 1st holding part 33 and the recessed part 71 formed by the notch which inclines on the side surface. The concave portion 71 has a first inclined surface in which a surface facing the main surface of the second end surface plate 25 is inclined with respect to the main surface of the second end surface plate 25.

  The wedge member 70 can be inserted into the concave portion 71 of the first holding member 31 </ b> B, is formed in parallel with the first inclined surface of the concave portion 71, and has a substantially triangular shape having a second inclined surface that contacts the first inclined surface of the concave portion 71. It is formed into a thin plate having a shape. The first holding member 31B has a configuration that does not include the storage space 34, the rotating member 37, and the crankshaft 38 that are provided in the connection devices 1 and 1A described above. That is, the first holding means 30B is formed so that the wedge member 70 is moved with respect to the concave portion 71 so that the wedge member 70 can move the first holding member between the uppermost position and the lowermost position. Yes.

  As shown in FIG. 10, the connecting device 1 </ b> B configured as described above has the first holding member 31 </ b> B at the lowest position when the connecting portion L of the power cable K is inserted into the holding portion 12 </ b> B. The wedge member 70 is brought into contact with the recess 71 of the first holding member 31B.

  Next, after inserting the connection portion L into the holding portion 12B, as shown in FIG. 11, the wedge member 70 is pressed by a hammer or the like so that the first holding member 31B is positioned at the uppermost position, Push into the recess 71. As a result, the wedge member 70 is fitted into the recess 71 of the first holding member 31B, and the first holding member 31B moves to the uppermost position. Thereby, the movement to the lowest position of the 1st holding member 31B is controlled by the wedge member 70, and the connection part L is pinched by the pinching part 12B. In addition, what is necessary is just to press from the direction opposite to the insertion direction of the wedge member 70 in order to cancel | release restrictions of the movement of the 1st holding member 31B.

  According to the connection device 1B configured as described above, it is possible to obtain the same effects as those of the connection devices 1 and 1A described above. In addition, since it is only necessary to press the wedge member 70 instead of using the rotating member 37, a simple configuration can be achieved. The configuration may further include a so-called lock mechanism that restricts the movement of the wedge member 70.

  The present invention is not limited to the above embodiment. For example, in the example described above, the first opening 35 provided in the first holding member 31 of the connection device 1 is provided to face the opening 27 of the second end face plate 25, and the second opening 41 is the second. Although the pin 42 is positioned in the first and second openings 35 and 41 by facing the end face plate 25, the present invention is not limited to this. For example, the first opening 35 may be provided on the side surface of the first holding member 31. When the first opening 35 is provided on the side surface of the first holding member 31, when the first holding member 31 is located at the uppermost position, the second opening 41 faces the first opening 35. The second opening 41 may be provided in the rotating member 37. Thereby, the opening part 27 does not need to be provided in the second end face plate 25.

  In the above-described example, the pin 42, the coil spring 43, the continuous member 60, and the spacer 61 are used to restrict the rotation of the rotating member 37 (the movement of the first holding members 31, 31A). It is not limited. Moreover, although the example which uses the wedge member 70 was given in order to regulate the movement of the 1st holding member 31B, it is not limited to this. As long as the first holding members 31 to 31B are in the uppermost position, that is, the connection portion L of the power cable K can be reliably held by the holding portions 12 to 12B, that is, if the holding does not loosen, A configuration may be used.

  Furthermore, in the above-described example, the connection devices 1, 1 </ b> A, 1 </ b> B are used for the heat treatment device 100, but the present invention is not limited to this. That is, the connection devices 1, 1 </ b> A, 1 </ b> B may be manufacturing devices other than the heat treatment device 100. For example, the connection devices 1, 1 </ b> A, 1 </ b> B may connect a power supply terminal such as a manufacturing device or a vibration device to which vibration is applied and the power supply cable K. For example, since the rotation of the rotating member 37 is restricted by the pin 42 even in a vibration environment, the rotating member 37 does not rotate even when vibration is applied. For this reason, the connecting device 1 can securely hold the power cable K. Further, the connection devices 1, 1A, 1B may connect not only these devices but also the power supply cable of the motor, the terminal connected to the plasma electrode, and the power supply cable K. Of course, it is possible to connect these cables. In addition, various modifications can be made without departing from the scope of the present invention.

  DESCRIPTION OF SYMBOLS 1-1B ... Connection apparatus, 11 ... Outer part, 12-12B ... Nipping part, 15 ... Side plate, 16 ... Through-hole, 17 ... Notch part, 18 ... Hole part, 20 ... First end face plate, 21 ... Projection, 22 ... cylindrical part, 25 ... second end face plate, 26 ... projection, 27 ... opening, 30-30B ... first holding means, 31-31B ... first holding member, 32 ... moving means, 33 ... Pressing part, 34 ... storage space, 35 ... first opening part, 37, 37A ... rotating member, 38 ... crankshaft, 39 ... holding shaft, 41 ... second opening part, 42 ... pin (regulating means), 42a ... seat Surface, 42b ... Insertion part, 43 ... Coil spring (elastic member), 50, 50A ... Second holding means, 51 ... Second holding member, 52 ... Terminal part, 53 ... Seat part, 54 ... Plate part, 55 ... Cylindrical part 56 ... Spring (spring member), 60 ... Continuous member, 61 ... Spacer (regulating means), 70 ... Wedge member DESCRIPTION OF SYMBOLS 71 ... Recessed part, 100 ... Manufacturing apparatus (heat treatment apparatus), 101 ... Heat treatment chamber, 102 ... Heat treatment means, 110 ... Reaction tube, 111 ... Manifold, 112 ... Wafer board, 113 ... Cover body, 114 ... Insulation cylinder, 115 ... Gas Supply means, 115a ... gas supply pipe, 115b ... flow rate adjustment section, 116 ... exhaust means, 116a ... exhaust pipe, 116b ... exhaust adjustment section, 118 ... processing space, 119 ... boat elevator, 130 ... heater section, 131 ... power supply section , 132, temperature sensor, 134, heater wire, 135, power terminal, B, screw, K, power cable, L, connection portion, W, semiconductor wafer (wafer).

Claims (6)

A connection device for electrically connecting a power cable to a power terminal,
A first holding member that presses the power cable and holds the power cable; and a first holding unit that includes a moving unit that moves the first holding member in the pressing direction of the power cable;
A second holding member that holds the power cable pressed by the first holding member, and elastically supports the second holding member as the power cable pressed by the first holding member moves. Second holding means having a spring member;
A first gap provided between the first holding member and the second holding member, and sandwiching the power cable by the mutually facing surfaces of the first holding member and the second holding member;
A second gap portion provided between the second holding member and the spring member and sandwiching the power supply terminal or a terminal portion connected to the power supply terminal;
A connection device comprising: The first holding member has a cylindrical storage space therein,
The moving means includes a cylindrical rotating member that is rotatably provided in the storage space, and a crank shaft whose rotating shaft is eccentric with respect to the axis of the rotating member,
The first holding means moves the first holding member by rotating the crankshaft eccentrically about the rotation axis of the crankshaft by rotating the crankshaft, and the power cable is connected to the second holding member. The connecting device according to claim 1, wherein the power cable is held by the first gap portion by pressing.   The connection device according to claim 2, further comprising restriction means capable of restricting movement of the movement means. The regulating means is
A first opening provided in the first holding member and penetrating from the storage space to an outer surface of the first holding member;
A bottomed cylindrical second opening provided in a part of the outer peripheral surface of the rotating member;
An elastic member inserted into the second opening;
A pin elastically supported by the elastic member;
The rotation member rotates, and the first opening and the second opening are opposed to each other, so that the pin is positioned across the first opening and the second opening, and the rotation member The connection device according to claim 3, wherein the rotation of the connection device is restricted. The moving means is
A recess provided in a part of the first holding member and having a first inclined surface;
A wedge member having a second inclined surface in contact with the inclined surface of the recess,
2. The connection device according to claim 1, wherein pressing the wedge member causes the first inclined surface and the second inclined surface to slide, and the first holding member moves. A manufacturing apparatus for processing a semiconductor wafer,
A power supply unit having a power cable capable of supplying power to the outside;
A processing unit having a power terminal connected to the power cable, and processing the semiconductor wafer with power supplied from the power unit;
A first holding member that presses the power cable and holds the power cable; a first holding member that includes a moving unit that moves the first holding member in the pressing direction of the power cable; and A second holding member that holds the power cable pressed by the holding member; and a spring member that elastically supports the second holding member as the power cable pressed by the first holding member moves. A second holding means provided between the first holding member and the second holding member, and sandwiching the power cable by the mutually facing surfaces of the first holding member and the second holding member. 1 gap portion, and provided between the second holding member and the spring member, and the power supply terminal or a terminal portion connected to the power supply terminal is sandwiched between the second holding member and the spring member. In a connecting anda second gap part for electrically connecting the power supply terminal and the power cable which is sandwiched the first gap portion,
A manufacturing apparatus comprising:

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