JP5297773B2 - Charged particle transport method, guide device, and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a guide device capable of simply and quickly transporting charged particles, a method for manufacturing the same, and a method for transporting the charged particles. <P>SOLUTION: The guide device 100 is used to generate an electric field for transporting charged particles by covered conductor wires which is covered with an insulator and includes a first covered conductor wire 11 spirally wound to provide a spiral section 10 the inside of which the charged particles pass through, a second covered conductor wire 12 spirally wound so as to be entangled mutually with the first covered conductor wire 11 in the spiral section 10, and a conductor 13 provided so as to wrap the spiral section 10. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a moving device, a method for manufacturing the same, and a charged particle transport method used to transport charged particles.

  In mass spectrometers, it is often necessary to direct ions from one location to another in a vacuum. For example, the example conveyed from an ion production | generation part to a mass spectrometry part is given. In order to carry such ions, ion guides using radio waves, quadrupole deflectors, ion lenses, and the like are used.

  A multipole ion guide is composed of a large number of cylinders and spirals. Patent Document 1 discloses an ion guide using a quadrupole cylinder. The opposite phase of the radio wave alternating current is applied to the parts of this set. The time-average potential acting on the ions is called the effective potential. In the effective potential, a linear minimum along the central axis of the multipole ion guide is generated and tends to increase as the electrode is approached. For this reason, the effective potential sequesters ions inside the multipole ion guide. By attaching a partition wall (perforated disk) to both ends (entrance / exit) of the multipole guide and applying an appropriate potential thereto, it also functions as a device for confining ions.

The rising shape of the effective potential radius is determined by the number of cylinder pairs. When the number of cylinder pairs is n and the radius is r, the effective potential in the radius direction is proportional to r ²ⁿ⁻² . The greater the number of cylinders, the closer the radial effective potential becomes to the well type. For this reason, ions with larger kinetic energy can be confined efficiently.

  A similar ion guide can also be made by creating a cylindrical device composed of annular electrodes. In this apparatus, radio wave alternating current (RF voltage) is applied so that adjacent annular electrodes have opposite phases.

  In the case of a pair of spiral electrodes, as shown in Patent Document 1, it is possible to change the effective potential in the radial direction by changing the slope of the spiral line, that is, the winding density. . As a result, the effective potential can be freely changed from a potential close to an ion guide made of an annular electrode to a potential close to a multipole ion guide.

Special table 2008-538646 gazette US Pat. No. 5,572,035

  In order to reduce the charging of the electrode due to ion collision, it is preferable to expose the conductor. That is, it is preferable to minimize the use of dielectrics. However, if an attempt is made to minimize the use of a dielectric, it will be difficult to produce an ion guide. As a result, it becomes difficult to reduce the cost. Moreover, in the structure which exposes a conductor, in order to prevent the short circuit of electrodes, it is necessary to make an ion guide into a rigid structure. In the case of a rigid structure, the transport direction is limited. That is, it becomes difficult to transport to a desired position while changing the transport direction.

  The present invention has been made to solve such problems, and a guide device capable of easily and efficiently transporting charged particles to a desired position, a method for manufacturing the same, and a method for transporting charged particles. The purpose is to provide.

  A guide device according to a first aspect of the present invention is a guide device that generates an electric field for transporting charged particles by means of a coated conductor coated with an insulator, and includes a spiral portion through which the charged particles pass. A first coated conductor wound in a spiral form, a second coated conductor wound in a spiral form to form a multiple spiral structure with the first coated conductor in the spiral section, and the spiral section And a conductive material provided so as to wrap the material. Thereby, the short circuit of a conducting wire can be prevented. Therefore, charged particles can be transported easily and efficiently to a desired position.

  The guide device according to the second aspect of the present invention is spirally formed to provide a spirally wound insulating tape and a spiral portion that is fixed to the insulating tape and through which charged particles pass. A first conductive wire, a second conductive wire fixed to the tape so as to form a spiral with a predetermined interval from the first conductive wire, and the insulating tape wound in a spiral are wrapped. And a conductive material provided. Thereby, the short circuit of a conducting wire can be prevented. Therefore, charged particles can be transported easily and efficiently to a desired position.

  The guide device according to the third aspect of the present invention includes an insulating hose and a first lead wire that is helically fixed to the hose in order to provide a spiral portion through which charged particles pass. A second conductive wire fixed to the hose and a conductive material provided so as to wrap the hose so as to form a spiral with a predetermined interval from the first conductive wire. Thereby, the short circuit of a conducting wire can be prevented. Therefore, charged particles can be transported easily and efficiently to a desired position.

  A guide device according to a fourth aspect of the present invention is the guide device described above, wherein the conductive material has a mesh shape. Thereby, evacuation can be performed easily.

  A guide device according to a fifth aspect of the present invention is the guide device described above, wherein a vacuum pipe for vacuum holding is used for the conductive material. Thereby, since components can be used in common, the configuration can be simplified.

  A guide device according to a sixth aspect of the present invention is the guide device described above, wherein the spiral portion is bent to change a transport direction of charged particles. Thereby, it can be transported by an arbitrary route.

  A guide device according to a seventh aspect of the present invention is the guide device described above, wherein the spiral portion is provided with a changing portion in which a spiral diameter changes. Thereby, the charged particle distribution can be spatially converged.

  A charged particle transport method according to an eighth aspect of the present invention is a charged particle transport method for transporting charged particles along the guide device, wherein an RF voltage is applied to the first coated conductor, An RF voltage is applied to the coated conductor in a phase different from the RF voltage of the first coated conductor, and a bias voltage is applied to the conductive material. Thereby, charged particles can be easily transported to a predetermined position.

  A charged particle transport method according to a ninth aspect of the present invention is a charged particle transport method for transporting charged particles along the guide device, wherein an RF voltage is applied to the first conductor, and the second An RF voltage is applied to the conductive wire at a phase different from the RF voltage of the first conductive wire, and a bias voltage is applied to the conductive material. Thereby, charged particles can be easily transported to a predetermined position.

  A charged particle transport method according to a tenth aspect of the present invention is the charged particle transport method described above, wherein the RF voltage is applied to the first and second covered conductors or the first and second conductors. A DC voltage is applied in a superimposed manner. Thereby, the potential can be adjusted.

  In the charged particle transport method according to the eleventh aspect of the present invention, the bias voltage is adjusted according to the charge amount of the first and second coated conductors, the insulating tape, or the hose. Thereby, it can be transported efficiently.

  A method for manufacturing a guide device according to a twelfth aspect of the present invention is a method for manufacturing a guide device that generates an electric field for transporting charged particles by means of a coated conductor covered with an insulator. The first and second coated conductors are wound in a spiral shape to form a spiral portion having a multiple spiral structure, and the spiral portion is wrapped with a conductive material. A high-performance guide device can be easily manufactured.

  A method for manufacturing a guide device according to a thirteenth aspect of the present invention is a method for manufacturing a guide device for generating an electric field for transporting charged particles by means of a coated conductor covered with an insulator, which is wound in a spiral shape. The first covered conductor and the second covered conductor are prepared, and the first covered conductor and the second covered conductor are combined to form a spiral portion having a multi-helical structure, and the spiral is formed by a conductive material. It wraps the part. Thereby, a high-performance guide device can be easily manufactured.

  According to a fourteenth aspect of the present invention, there is provided a manufacturing method of a guide device in which a first conductive wire is attached to an insulating tape, and the insulating tape is separated from the first conductive wire by a predetermined interval. Two conductive wires are attached, the insulating tape to which the first and second conductive wires are attached is spirally wound, and a conductive material is disposed so as to wrap the spiral portion of the insulating tape. Thereby, a high-performance guide device can be easily manufactured.

  According to a fifteenth aspect of the present invention, there is provided a guide device manufacturing method in which a first conductive wire is spirally embedded in a resin, and the second conductive wire in a state in which insulation is maintained with respect to the first conductive wire, A conductive material is embedded so as to wrap the resin hose by forming a resin hose having a spiral by embedding the resin and curing the resin in which the first and second conductive wires are embedded. Is to be placed.

  A guide device manufacturing method according to a sixteenth aspect of the present invention is the manufacturing method described above, wherein the spiral portion is bent according to a transport path of the charged particles. Thereby, it can be transported by an arbitrary route.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the guide apparatus which can convey a charged particle to a desired position simply and highly efficiently, its manufacturing method, and the transport method of a charged particle.

  The guide device according to the present invention is a guide device that transports charged particles using a coated conductor. That is, an electric field is generated by applying a voltage to the coated conductor. Charged particles such as ions travel in a desired direction by this electric field.

Embodiment 1 FIG.
A guide device according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a diagram schematically showing the configuration of the guide device 100. Here, description will be made assuming that the guide device 100 transports positive ions while guiding them. That is, description will be made assuming that the guide device 100 is an ion guide.

  As shown in FIG. 1, the guide device 100 includes a first covered conductor 11, a second covered conductor 12, a conductor 13, an RF power source 21, an RF power source 22, and a DC power source 23. The surroundings of the first covered conductor 11 and the second covered conductor 12 are covered with an insulating material. The first covered conductive wire 11 and the second covered conductive wire 12 are spirally wound. As a result, the spiral portion 10 is formed in the guide device 100. In the spiral portion 10, the first covered conducting wire 11 and the second covered conducting wire 12 constitute a double helix. That is, in the spiral portion 10, the first covered conducting wire 11 and the second covered conducting wire 12 are wound in a spiral shape so as to be intertwined with each other. In the spiral portion 10, a double spiral structure is formed by the first covered conductive wire 11 and the second covered conductive wire 12. In the spiral portion 10, the first covered conductive wires 11 and the second covered conductive wires 12 are alternately arranged in the ion traveling direction.

  The first covered conductive wire 11 and the second covered conductive wire 12 are provided with a lead portion 14 drawn out from the spiral portion 10. The lead portion 14 is provided on both sides of the spiral portion 10. By this lead-out portion 14, the first covered conductor 11 is drawn to the RF power source 21, and the second covered conductor 12 is drawn to the RF power source 22. Therefore, the RF voltage supplied by the RF power source 21 and the RF power source 22 is applied to the spiral portion 10 via the lead portion 14.

  Ions travel inside the spiral portion 10. That is, the central axis of the spiral provided in the spiral portion 10 becomes the central axis of the ion trajectory. For this reason, the spiral part 10 is arrange | positioned in a vacuum chamber, for example. Then, using a feedthrough (not shown) or the like, the drawer portion 14 is pulled out of the vacuum chamber. As a result, both ends of the first covered conductor 11 are drawn out of the vacuum chamber and connected to the RF power source 21. Similarly, both ends of the second coated conductor 12 are drawn out of the vacuum chamber and connected to the RF power source 22. In this way, the spiral portion 10 is connected to the RF power sources 21 and 22 via the lead portion 14. Therefore, a desired RF voltage can be supplied to the first covered conductor 11 and the second covered conductor 12 in the spiral portion 10. An electric field for transporting ions is formed in the spiral portion 10.

For example, radio frequency alternating current (RF) is applied to the RF power source 21 and the RF power source 22. Specifically, RF voltages with opposite phases are applied to the RF power source 21 and the RF power source 22. That is, an RF voltage having the same frequency and amplitude is applied to the first covered conductor 11 and the second covered conductor 12. The RF voltages applied to the first coated conductor 11 and the second coated conductor 12 differ only in phase. For example, if the RF voltage applied from the RF power source 21 to the first covered conductor 11 is A · cos (ωt), the RF voltage applied from the RF power source 22 to the second covered conductor 12 is A · cos (ωt + 180). °). A is amplitude, ω is angular frequency, and t is time. In the spiral portion 10, an RF electric field that varies with time is generated.
A linear minimum along the central axis of the helix is generated in the potential. Further, the potential tends to increase as the coated conductor is approached. When transporting ions are positive ions, the ions travel in the direction of lower potential in the RF electric field. For this reason, the effective potential isolates ions inside the spiral portion 10. Accordingly, the ions travel along the central axis of the spiral portion 10. For example, the frequency of the RF voltage can be several hundred kHz to several MHz. Of course, the frequency is not limited to the following range. Further, an RF voltage other than a sine wave may be used. Further, the RF amplitude, center potential, and the like can be determined according to the mass and energy of ions to be transported.

  A conductor 13 is attached to the outside of the spiral portion 10. The conductor 13 is fixed so as to wrap around the spiral portion 10. Therefore, the conductor 13 has a cylindrical shape that is substantially the same as or slightly larger than the outer diameter of the spiral portion 10. A cylindrical conductor 13 is arranged outside the spiral side. That is, the spiral portion 10 is included in the conductor 13. The conductor 13 is made of, for example, a net-like metal or a metal foil such as an aluminum foil. For example, the conductor 13 is preferably a metal net (mesh). By using the mesh-shaped conductor 13, the gas inside the spiral portion 10 can be easily exhausted. That is, when the vacuum chamber is exhausted, the gas in the spiral portion 10 is exhausted through the mesh. Thereby, exhaust time can be shortened. The conductor 13 is connected to the DC power source 23 via a feedthrough (not shown) or the like. The DC power source 23 applies a DC voltage as a bias voltage to the conductor 13. Therefore, the conductor 13 becomes an electrode to which a bias voltage is applied. The RF power source 21, the RF power source 22, and the DC power source 23 can be controlled independently.

  The configuration of the spiral portion 10 will be described in detail with reference to FIG. FIG. 2 is a side sectional view schematically showing the configuration of the spiral portion 10. In FIG. 2, description will be made assuming that the traveling direction of ions is in the direction of the arrow. That is, the inside of the spiral becomes the ion beam transport path.

  As shown in FIG. 2, the first covered conductor 11 is constituted by a conductor 11a and a covering portion 11b. As the conducting wire 11a, for example, a soft metal wire such as copper is preferably used. Thereby, a plastic guide can be produced. The covering portion 11b is made of an insulating material. The covering portion 11b covers a conductive wire 11a made of a conductive material. Enamel or polyimide can be used as the insulating material of the covering portion 11b. Of course, other insulating materials such as plastics and resins can be used. Also, commercially available coated conductors can be used as they are. Thereby, manufacturing cost can be reduced. Thus, the outer periphery of the conducting wire 11a is covered with the insulating material. Since the side surface of the conducting wire 11a is covered with an insulating material, the conducting wire 11a is protected by the covering portion 11b.

  The second covered conductor 12 has the same configuration as the first covered conductor 11. That is, the conducting wire 12a is covered with the covering portion 12b. Of course, it is preferable that the first covered conductor 11 and the second covered conductor 12 are made of the same material with the same diameter. Thus, by using the covered conductor, it is possible to prevent the conductor 11a of the first covered conductor 11 and the conductor 12a of the second covered conductor 12 from being short-circuited. Further, it is possible to prevent the conductor 11 a of the first covered conductor 11 and the conductor 12 a of the second covered conductor 12 from being short-circuited with the conductor 13.

  The diameters of the conducting wires 11a and 12a are determined by the mass of ions to be transported and the size of the guide device 100. That is, the diameter of the conducting wires 11a and 12a can be determined by the mass electrification ratio of ions to be transported and the transport distance.

  The first covered conductor 11 and the second covered conductor 12 are spirally wound with the same pitch and the same diameter. The first covered conducting wire 11 wound in a spiral and the second covered conducting wire 12 wound in a spiral are combined so as to form a double helix. Accordingly, the spiral formed by the first covered conductor 11 and the spiral formed by the second covered conductor 12 are intertwined. Thereby, as shown in FIG. 2, the first covered conductors 11 and the second covered conductors 12 are alternately arranged in the traveling direction of the ion beam. Between two adjacent windings of the first covered conductor 11, the winding of the second covered conductor 12 is arranged. Similarly, a winding of the first covered conductor 11 is arranged between two adjacent turns of the second covered conductor 12. Next to the first covered conductor 11, the second covered conductor 12 is arranged. The inner diameter and pitch of the helix can be determined by the mass and energy of ions to be transported.

  And the conductor 13 is arrange | positioned on the outer side of the spiral of the 1st covered conducting wire 11 and the 2nd covered conducting wire 12. FIG. The conductor 13 is connected to the DC power source 23 as described above. A bias voltage is applied from the DC power source 23 to compensate for potential changes due to charging of the covering portions 11b and 12b. Insulating coating portions 11 b and 12 b are provided on the surfaces of the first covered conductive wire 11 and the second covered conductive wire 12. Therefore, when the ions being transported collide with the covering portion 11b and the covering portion 12b, they are charged. That is, the ions attached to the insulating covering portions 11b and 12b cannot move and therefore remain on the surface. The potential inside the spiral changes depending on the charge amount of the covering portions 11b and 12b. That is, the effective potential generated by the RF voltage is affected by the charging of the covering portions 11b and 12b.

  Here, the covering portions 11b and 12b are almost uniformly charged. That is, the potential is high where the charge density is high. For this reason, ions collide while avoiding a portion having a high charge density. That is, the lower the charge density, the easier it is for new ions to collide. As a result, the covering portions 11b and 12b are relatively uniformly charged. Simply, the bias of the ion guide changes to another potential.

  Accordingly, a bias voltage is applied to the conductor 13 in order to compensate the potential generated by the uniform charging of the covering portions 11b and 12b. That is, the bias can be adjusted by applying a constant DC voltage to the conductor 13 by the DC power source 23. As a result, the potential generated by charging is canceled by the bias voltage in the central axis of the spiral portion 10. In other words, a bias voltage that compensates for a potential change due to charging is applied to the conductor 13. Thereby, the influence of charging can be reduced, and a desired effective potential can be obtained. Since the DC power source 23 can be controlled independently of the RF power sources 21 and 22, the voltage can be easily adjusted.

  An example of a specific adjustment method will be described. In a state where an appropriate voltage is applied to the first coated conductor 11, the first coated conductor 12, and the conductor 13, ions emitted from the guide device 100 are detected by an ion detector. Then, the DC power source 23 is adjusted while monitoring the current of ions detected by the ion detector. After a certain time has passed so that the charging is saturated, the bias voltage is adjusted so that the ion current becomes higher. As a result, the bias potential can be adjusted so as to cancel the potential change caused by charging in the central axis of the spiral. Therefore, ions can be efficiently transported by simple adjustment. While the bias voltage is adjusted, ions collide with the inside of the spiral, and the covering portions 11b and 12b are charged. Even if the bias potential is adjusted so as to cancel the potential due to charging on the central axis of the spiral, the potential change due to charging is larger than the bias potential in the vicinity of the surface of the covering portion 11b inside the spiral. That is, the distance from the conductor 13 to the surfaces of the covering portions 11b and 12b is larger than the distance from the charged portion to the surfaces of the covering portions 11b and 12b. For this reason, even if the potential change due to charging and the bias voltage are approximately the same on the central axis of the spiral, the surface of the conductor 13 is more affected by charging. As a result, the charging is saturated after a certain period of time. At this time, ions can be stably transported by adjusting the bias voltage so that the ion current becomes high. The conductor 13 can also be connected to the center potential of RF alternating current. That is, the voltage of the conductor 13 can be changed according to the offset voltage (center potential) of the RF voltage. Further, a DC voltage may be superimposed and applied to the conducting wire 11a and the conducting wire 12a. That is, an RF voltage on which the same DC voltage is superimposed can be applied to the conducting wire 11a and the conducting wire 12a.

  Further, by selecting a material having plasticity as the first covered conductive wire 11 and the second covered conductive wire 12, the ion guide can be formed into an arbitrary shape. That is, the ion transport path is bent as shown in FIG. In FIG. 3, the bending part 15 is provided in the middle of the guide apparatus 100, and the transport direction of ion is changed. Thereby, it can be simply transported to a desired position. That is, the direction of ions can be changed in an arbitrary direction even during transportation. Moreover, the spiral part 10 can be easily deform | transformed by setting it as a flexible structure. By using an elastic material for the coated conductor, the entire guide device 100 can be kept flexible. Accordingly, the position of the spiral can be easily fixed, and the ion transport path can be set to a desired position. Moreover, the conductor 13 which has plasticity is provided so that the spiral part 10 may be wrapped. Therefore, the conductor 13 is deformed in the same manner as the first covered conductor 11 and the first covered conductor 12. Thereby, even when the spiral portion 10 is bent to have a complicated shape, a desired potential can be generated accurately.

  Moreover, since the covered conductor is used, even if the bent portion 15 is formed, the first covered conductor 11 and the second covered conductor 12 are not short-circuited. An insulator or the like for maintaining insulation from the conducting wire 11a and the conducting wire 12a becomes unnecessary. The shape of the spiral portion 10 can be easily changed. Therefore, attachment to a vacuum chamber etc. can be performed easily. Of course, the spiral may be smoothly curved at the bent portion 15.

  It is also possible to configure the conductor 13 using a vacuum holding vacuum pipe. For example, the spiral portion 10 is wrapped using a cylindrical vacuum pipe. In addition, when the bending part 15 is provided, the bellows piping which can be bent is used. A vacuum pipe such as a metal pipe or a bellows pipe is used as the conductor 13. Thereby, the conductor 13 can be shared with the vacuum holding component. Therefore, the configuration can be simplified.

  It is also possible to change the inner diameter of the helix. For example, as shown in FIG. 3, the change part 16 is provided in the spiral part 10, and the internal diameter of a spiral is changed. As shown in FIG. 3, in the change part 16, an internal diameter becomes small gradually. Thus, by producing the conical spiral portion 10, the ion distribution can be spatially converged. A thing like an ion pen using this ion guide can also be manufactured. For example, an ion guide is manufactured with a highly elastic conductor such as a steel coil. Then, an ion focusing lens and an xy manipulator (remote controller) are attached to the tip. By manipulating this manipulator, it is possible to manipulate the convergence position of the ion beam.

  Next, a method for manufacturing the guide device 100 will be described. First, a pair of covered conductors to be the first covered conductor 11 and the second covered conductor 12 are prepared. Furthermore, a cylinder (pole) having an appropriate outer shape is prepared. Using this cylinder as a model, a pair of covered conductors are wound around the outer periphery of the cylinder. The wound coated conductor has a cylindrical shape as it is. That is, the shape of the cylinder prepared as a model is reflected. Thereby, the spiral part 10 of required internal diameter and length can be formed. When the coated conductor is wound around the cylinder, two coated conductors may be wound at the same time. Alternatively, two coated conductors may be alternately wound. Further, two coated conductors may be alternately wound one by one. In addition, the pole used as a model is not limited to a columnar shape, and may be a columnar shape. Moreover, what is necessary is just to change the outer diameter of a pole on the way when providing the change part 16 from which the diameter of a helix changes. Then, the conductor 13 is attached by wrapping the spiral portion with a metal net. Then, when the attachment of the conductor 13 is completed, the inner cylinder is removed. That is, the cylinder is pulled out from the spiral. Thereby, the guide apparatus 100 is completed.

  Another manufacturing method will be described. Here, two springs made of coated conductors are prepared. Combine them together and twist them together. Thereby, the spiral part 10 of a double spiral structure is formed. In this case, an ion guide with high elasticity can be produced. In addition, you may produce a spring by winding a covering conducting wire helically around a cylinder. Then, the spiral portion is wrapped with a metal net.

  Moreover, when forming the bending part 15 with respect to the guide apparatus manufactured using these manufacturing methods, force is applied to the spiral part 10 or its periphery, and an ion guide is deformed. That is, the spiral part 10 is bent and the spiral part 10 is deformed according to the ion transport direction. Thereby, the bent portion 15 is formed in the spiral portion 10. Therefore, the transportation route can be freely changed, and transportation to a desired position can be easily performed.

  In the above description, two coated conductors are combined, but three or more coated conductors may be combined. That is, it arrange | positions so that a some covering conducting wire may comprise a multiple helix, and applies the RF voltage of a different phase to each. For example, when three coated conductors are used, RF voltages are applied with phases different by 120 degrees. In this case, a triple helix structure is formed so as to be intertwined with the three covered conductors. Then, the three covered conductors are alternately arranged. In addition, when four coated conductors are used, the RF voltage is applied at a phase different by 90 degrees. In this case, a quadruple spiral structure is formed so as to be intertwined with the four covered conductors. And four covered conducting wires are arranged alternately. Even in the case of such a multi-helical structure, the same effect can be obtained. In the above description, an example of transporting positive ions has been described. However, charged particles other than positive ions can be transported in the same manner. The above ion guide is suitable for use in a mass spectrometer.

Embodiment 2. FIG.
A guide device according to the second embodiment will be described with reference to FIGS. In the present embodiment, a structure of a guide device formed without using a covered conductor and a manufacturing method thereof will be described. Note that description of portions common to Embodiment 1 is omitted. For example, the configuration of the lead portion and the power source and the applied voltage are the same as those in the first embodiment, and thus description thereof is omitted.

  First, as shown in FIG. 4, an insulating tape 33 is prepared. Then, the first conducting wire 31 and the second conducting wire 32 (hereinafter collectively referred to as conducting wires 31 and 32) are attached to the surface of the tape 33. The conducting wire 31 corresponds to the conducting wire 11 a of the first covered conducting wire 11 shown in the first embodiment, and the conducting wire 32 corresponds to the conducting wire 12 b of the first covered conducting wire 12. For example, the conducting wires 31 and 32 are adhered to the adhesive surface of the adhesive tape. Alternatively, the conducting wires 31 and 32 may be fixed by melting a part of the tape 33. Of course, an adhesive may be attached to the conducting wires 31 and 32 to fix the conducting wires 31 and 32 to the tape 33.

  The first conducting wire 31 and the second conducting wire 32 are bare copper wires that are not covered with an insulator. Here, two conducting wires 31 and 32 are arranged in parallel along the longitudinal direction of the tape 33. In addition, as long as the two conducting wires 31 and 32 have the predetermined space | interval, it does not need to be parallel. In other words, it is sufficient that the first conducting wire 31 is not short-circuited with the second conducting wire 32.

  Then, the tape 33 is spirally wound as shown in FIG. Thereby, the tape 33 becomes cylindrical and the conducting wires 31 and 32 become spiral. Here, the tape 33 is wound so that the conducting wires 31 and 32 are inside the cylinder. Then, as in the first embodiment, the spiral portion is wrapped with the conductor 13. Thereby, it becomes as shown in FIG. FIG. 6 is a side view showing a partial configuration of the guide device. Thus, the spiral part 10 by which the two conducting wires 31 and 32 were spirally wound is comprised. In the spiral portion 10, the tape 33 with the two conducting wires 31 and 32 constitutes an insulating cylindrical member. The outer side surface of the spiral portion 10 is covered with the conductor 13. Moreover, the conducting wires 31 and 32 are exposed inside the spiral portion 10, that is, inside the spiral tape 33. Therefore, only one side of the conducting wires 31 and 32 is covered with an insulator. Ions pass through the inside of the cylinder formed by the tape 33. The ions fly while being influenced by the electric field generated by the conducting wires 31 and 32.

  By using the conductors 31 and 32 having appropriate hardness, the shape of the cylindrical member is maintained. That is, the thicknesses and materials of the conducting wires 31 and 32 are selected so that they are held in a fixed shape during normal use and become hard enough to be deformed when a force is applied by the user. Moreover, since the conducting wire 31 and the conducting wire 32 are fixed, even if the guide direction is changed to an arbitrary direction, it does not conduct. For example, even if the bent portion 15 shown in FIG. Thereby, the effect similar to Embodiment 1 can be acquired. Of course, the changing portion 16 may be provided by changing the diameter of the spiral of the tape 33.

  Moreover, you may coat | cover both surfaces of the conducting wires 31 and 32 with an insulator. For example, two insulating tapes may be prepared and the conductors 31 and 32 may be sandwiched. That is, another tape is affixed on the tape 33 to which the conducting wires 31 and 32 are attached. Thereby, the conducting wires 31 and 32 are pinched | interposed into two tapes arrange | positioned facing each other. Thereby, the short circuit of conducting wire 31 and 32 can be prevented reliably. In the present embodiment, the bias voltage is adjusted according to the charge amount of the tape 33.

  By using the guide device according to this embodiment, charged particles can be easily transported to a desired position. In this embodiment, a triple or more spiral structure may be used. Further, a vacuum pipe for vacuum holding may be used for the conductor 13.

Embodiment 3 FIG.
A guide device according to the present embodiment will be described with reference to FIG. FIG. 7 is a diagram schematically illustrating the configuration of the guide device. In FIG. 7, the conductor 13 is omitted.

  In the present embodiment, the insulating cylindrical member is formed by a hollow hose 34. That is, although the insulating cylindrical member is formed by the tape 33 in the second embodiment, the insulating cylindrical member is formed by the hose 34 in the present embodiment. Note that the description common to the contents described in the first and second embodiments is omitted. For example, since the configuration other than the insulating cylindrical member is the same as that of the second embodiment, the description thereof is omitted.

  The hose 34 is made of an insulating resin. Then, spiral conductive wires 31 and 32 are embedded in a cylindrical hose 34. The conducting wires 31 and 32 are fixed to a thick portion of the hose 34 by a hose 34. The conducting wires 31 and 32 may be bare copper wires.

  A method for manufacturing the guide device according to the present embodiment will be described. First, a resin to be an insulating cylindrical member is prepared, and the conducting wires 31 and 32 are embedded in this resin. For example, a gel-like resin is prepared. That is, a highly viscous resin is prepared. This resin is a curable resin that exhibits a curing reaction by performing a predetermined treatment. For example, a thermosetting or photocurable resin may be used. Then, the two conducting wires 31 and 32 are embedded in the gel-like resin. Of course, the two conducting wires 31 and 32 are embedded while maintaining insulation. At this time, the resin may be in the form of a hose or another shape. For example, it may be cylindrical.

  After embedding the two conducting wires 31, 32, the resin is cured. Thereby, the resin becomes a hose shape, and the conducting wires 31 and 32 are fixed in the hose 34. That is, the resin hose 34 having the spiral portion 10 is formed. In this state, the first conducting wire 31 and the second conducting wire 32 are surrounded by the resin while the first conducting wire 31 and the second conducting wire 32 are kept insulated. The first conducting wire 31 and the second conducting wire 32 are embedded in the resin with a predetermined distance therebetween. In addition, after resin is hardened and a cylinder is formed, the resin hose may be formed by hollowing out the center.

  Thus, the helical part 10 which has a double helix structure is formed by performing a hardening process with respect to resin. Therefore, the same effect as in the first and second embodiments can be obtained. Moreover, since the conducting wires 31 and 32 are embedded and fixed in the hose 34 which consists of resin, the conducting wire of arbitrary hardness can be used. Further, a vacuum pipe for vacuum holding may be used for the conductor 13. In the present embodiment, the bias voltage is adjusted according to the charge amount of the hose 34.

  Ions pass through the hose 34. The ions fly while being influenced by the electric field generated by the conducting wires 31 and 32. By using the guide device according to this embodiment, charged particles can be easily transported to a desired position. In this embodiment, a triple or more spiral structure may be used.

It is a figure which shows typically the structure of the guide apparatus concerning Embodiment 1 of this invention. It is side surface sectional drawing which shows the structure of the spiral part of a guide apparatus. It is a figure which shows the modification of the guide apparatus which concerns on embodiment of this invention. It is a figure for demonstrating the structure and manufacturing method of a guide apparatus concerning Embodiment 2 of this invention. It is a figure for demonstrating the structure and manufacturing method of a guide apparatus concerning Embodiment 2 of this invention. It is a figure for demonstrating the structure and manufacturing method of a guide apparatus concerning Embodiment 2 of this invention. It is a figure for demonstrating the structure and manufacturing method of a guide apparatus concerning Embodiment 3 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Spiral part 11 1st covered conducting wire 11a Conducting wire 11b Covering part 12 1st covered conducting wire 12a Conducting wire 12b Covering part 13 Conductor 15 Bending part 16 Changing part 21 RF power supply 22 RF power supply 23 DC power supply 31 1st conducting wire 32 1st 2 conductors 33 tape 34 hose

Claims (16)

A guide device for generating an electric field for transporting charged particles by means of a coated conductor covered with an insulator,
A first coated conductor spirally wound to provide a spiral through which charged particles pass;
A second coated conductor spirally wound to form a multiple helical structure with the first coated conductor in the spiral portion;
And a conductive material provided so as to wrap around the spiral portion. A spirally wound insulating tape, and a first conductive wire fixed to the insulating tape and spiraled to provide a spiral portion through which charged particles pass;
A second conductor fixed to the insulating tape so as to be spiral with a predetermined distance from the first conductor;
And a conductive material provided to wrap the spirally wound insulating tape. In order to provide an insulative hose and a spiral portion through which charged particles pass, a first conductor wire that is helically fixed to the hose;
A second conductor fixed to the hose so as to be spiral with a predetermined distance from the first conductor;
And a conductive material provided to wrap the hose.   The guide device according to claim 1, wherein the conductive material has a mesh shape. Guide device according to any one of claims 1 to 3, characterized in that the vacuum pipe for vacuum retention is used for the conductive material.   The guide device according to claim 1, wherein the spiral portion is bent in order to change a transport direction of charged particles.   The guide device according to any one of claims 1 to 6, wherein the spiral portion is provided with a changing portion in which a spiral diameter changes. A charged particle transport method for transporting charged particles along the guide device according to claim 1,
Applying an RF voltage to the first coated conductor;
Applying an RF voltage to a second coated conductor in a phase different from the RF voltage of the first coated conductor;
A charged particle transport method in which a bias voltage is applied to the conductive material. A charged particle transport method for transporting charged particles along the guide device according to claim 2 or 3,
Applying an RF voltage to the first conductor;
Applying an RF voltage to the second conductor in a phase different from the RF voltage of the first conductor;
A charged particle transport method in which a bias voltage is applied to the conductive material.   10. The charge according to claim 8, wherein a DC voltage is applied to the first and second covered conductors or the first and second conductors so as to be superimposed on the RF voltage. Particle transport method.   11. The charged particle transport method according to claim 8, wherein the bias voltage is adjusted according to a charge amount of the first and second covered conductors, the insulating tape, or the hose. A method of manufacturing a guide device for generating an electric field for transporting charged particles by means of a coated conductor covered with an insulator,
The first and second coated conductors are spirally wound around the pole to form a spiral portion having a multiple spiral structure;
A method for manufacturing a guide device for wrapping the spiral portion with a conductive material. A method of manufacturing a guide device for generating an electric field for transporting charged particles by means of a coated conductor covered with an insulator,
Preparing a first coated conducting wire and a second coated conducting wire wound in a spiral;
Combining the first coated conductor and the second coated conductor to form a spiral portion having a multiple spiral structure;
A method for manufacturing a guide device for wrapping the spiral portion with a conductive material. A method of manufacturing a guide device for generating an electric field for transporting charged particles,
Attach the first conductor to the insulating tape,
A second conductive wire attached to the insulating tape at a predetermined interval from the first conductive wire;
Winding the insulating tape with the first and second conductors attached thereto in a spiral;
A method for manufacturing a guide device, wherein a conductive material is disposed so as to wrap around a spiral portion of the insulating tape. A method of manufacturing a guide device for generating an electric field for transporting charged particles,
Embed the first conductor in a spiral in the resin,
Burying the second conductive wire in a state of maintaining insulation with respect to the first conductive wire into the resin,
A curing process is performed on the resin in which the first and second conductive wires are embedded to form a resin hose having a spiral portion,
A method of manufacturing a guide device in which a conductive material is disposed so as to wrap the resin hose.   The guide device manufacturing method according to claim 12, wherein the spiral portion is bent in accordance with a transport path of the charged particles.

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