JP5268109B2 - Seismic isolation / vibration isolation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a seismic isolation/vibration control device in the horizontal direction using superconductors. <P>SOLUTION: A three-layer structured lowermost layer of the seismic isolation/vibration control device is configured having permanent magnet rows 212A, 212B disposed on steel plates 210A, 210B vertically installed on supporting bases 214A, 214B. The superconductors 222A, 222B are disposed inside a low-temperature container 220 opposing the permanent magnet rows 212A, 212B. Further, on the upper surface of the low-temperature container, a permanent magnet row 226 is disposed on a steel sheet 224. This is the structure of an intermediate layer of the seismic isolation/vibration control device including the structure of the interior and the upper surface of the low-temperature container. A superconductor 232 is disposed in the low-temperature container 230 on the intermediate layer opposing the permanent magnet row 226. This is the structure of an uppermost layer. Surfaces of the permanent magnet rows and the superconductors facing with each other on a lowermost layer to the intermediate layer are disposed in the vertical direction, and opposed in the horizontal direction (radial type). A levitation force is designed to be obtained from magnetic stiffness between the facing permanent magnet rows and the superconductors. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a seismic isolation / vibration isolation device for a building or a device, which utilizes a magnetic levitation phenomenon caused by a superconductor and a permanent magnet for eliminating vibration transmission (vibration-free).

The use of superconductor magnetic levitation for seismic isolation and vibration isolation has been practiced in the past. The inventors also have a three-layer structure composed of a permanent magnet and a superconductor, and the horizontal direction that should be called an “axial type” that realizes stable levitation by facing the permanent magnet and the superconductor in the vertical direction. A vibration isolator was proposed (see Patent Document 1).
A schematic configuration of the “axial type” vibration isolator will be described with reference to FIG. The axial type vibration isolator 100 causes the magnetic levitation in the vertical direction by causing the permanent magnet row 112 and the superconductor 122 and the permanent magnet row 126 and the superconductor 132 to face each other in the vertical direction (vertical direction) between the layers. It has a three-layer structure.
As shown in FIG. 1, permanent magnets 112 </ b> A and 112 </ b> B (lowermost layer) on the iron plate 110, which is a magnetic material, and superconductors 122 </ b> A and 122 </ b> B (intermediate layer) in the cryogenic vessel 120 cause magnetic levitation. It constitutes a combination of rows and superconductors. Further, a combination of a permanent magnet array and a superconductor in which magnetic levitation is generated by the iron plate 124, the permanent magnet array 126 (intermediate layer), and the superconductor 132 (uppermost layer) in the low temperature container 130, which are magnetic bodies on the low temperature container 120. Is configured. Superconductors 122 and 132 are cooled by liquid nitrogen 128 and 134. The coolant used for cooling is selected according to the superconductor to be used.

As shown in FIGS. 1A and 1B, the permanent magnet rows 112A and 112B and the permanent magnet row 126 have a configuration in which a plurality of permanent magnets are arranged in a rail shape, and are displaced in the rail direction (longitudinal direction). On the other hand, it is necessary to arrange so as to generate a uniform magnetic field so that the empirical magnetic field of the superconductor does not change. Further, the permanent magnet rows 112A and 112B and the permanent magnet row 126 are arranged at right angles to each other as shown in FIGS. 1A and 1B as viewed from above. Are arranged as follows.
With this structure, the uppermost layer is isolated from the horizontal vibration of the lowermost layer.
In the above-mentioned “axial type” vibration isolator, the levitation force is inversely proportional to the gap between the superconductor and the permanent magnet array. Therefore, in order to obtain a large levitation force, it is desirable to make the gap as small as possible.
However, in an actual system, it is necessary to cool the superconductor, which requires the cryogenic containers 120 and 130 having a heat insulating layer. For this reason, the gap between the surface of the cryocontainer and the permanent magnet row is further reduced, and there is a problem that it is very difficult to secure the gap if a large levitation force is to be obtained. In addition, the layers may collide against vertical vibration.

JP 2008-38972 A

  An object of the present invention is to provide a horizontal seismic isolation / vibration isolation device that solves the problems of the horizontal vibration isolation device using the so-called “axial” superconductor.

In order to achieve the above-described object, the present invention is a seismic isolation / vibration isolation device using magnetic levitation, which has at least a three-layer structure, between the lowermost layer and the intermediate layer, and the intermediate layer. And the uppermost layer face each other without contact due to magnetic levitation between the magnet array and the superconductor, and the magnet arrays installed in the two layers have a uniform magnetic field direction with respect to each other. Arranged so as to be orthogonal to each other, the magnet array and the superconductor are arranged in a vertical direction between at least one layer of the three-layer structure. It is characterized by facing each other.
All of the superconductors can be installed in the intermediate layer. This configuration simplifies the configuration for cooling the superconductor.
Further, there are a plurality of magnet arrays and superconductors arranged so that the facing surfaces of the magnet array and the superconductor are in the vertical direction, and the magnet arrays and the superconductor can be alternately arranged in the horizontal direction. . If it does in this way, the magnetic force line from both surfaces of a magnet can be used effectively.
Furthermore, in addition to the facing of the magnet array and the superconductor, a configuration in which the same magnetic poles of the magnets face each other in the vertical direction can be provided between at least one layer. Thereby, the repulsive force of magnets can be utilized for the levitation | floating force of a perpendicular direction.
In one aspect of the seismic isolation / vibration isolation device of the present invention, a first layer having a first side surface extending in a vertical plane, and a second layer having a second side surface extending in a vertical plane facing the first side surface, , A magnet provided on one of the first side surface or the second side surface with a substantially uniform magnetic field in the horizontal direction, and a superconductor provided on the other side of the first side surface or the second side surface facing the magnet. The first side surface and the second side surface are maintained in a non-contact state by magnetic levitation between the magnet and the superconductor.
The first side surface and the second side surface extend in the vertical plane, but this does not strictly mean a plane including a vertical line, and both are in a non-contact state even when there is a vertical displacement. In this case, an inclination of a degree that can be secured is allowed. In addition, the horizontal direction in the expression that the magnetic field is made substantially uniform in the horizontal direction means a direction in which the difference in gravitational potential can be ignored to such an extent that seismic isolation or vibration isolation is possible in this direction. Furthermore, “substantially uniform” in this expression refers to a degree that can be regarded as uniform after allowing spatial fluctuation of the magnetic field based on mounting circumstances.
In the example of FIG. 2 described later, the combination of the first layer and the second layer can be considered to correspond to the combination of the lowermost layer and the intermediate layer, or the combination of the lowermost layer, the intermediate layer, and the uppermost layer. Further, the seismic isolation / vibration isolation device has a configuration for performing seismic isolation or vibration isolation with respect to the displacement in the facing direction between the first side surface and the second side surface. Can be provided. This structure is, for example, provided by further providing a layer structure in the first layer or the second layer, that is, as a total of three or more layers, a seismic isolation using magnetic levitation between those layers.・ It can be realized by providing a vibration isolation structure.
In the seismic isolation / vibration isolation device according to the present invention, the magnet may be constituted by a permanent magnet or an electromagnet. Moreover, the structure which makes a magnetic field uniform may be implement | achieved by the shape of a magnet, and may be implement | achieved by the magnet row | line | column which arranged the several magnet. Furthermore, in the seismic isolation / vibration isolation device according to the present invention, a mechanical vibration absorber such as a spring, rubber, or hydraulic pressure is used in combination to enhance the effect of isolation or vibration isolation against horizontal or vertical displacement. be able to.

Although the present invention has a three-layer structure like the axial type vibration isolator previously proposed by the inventors, the magnet array between at least one layer and the surface facing the superconductor are arranged in the vertical direction, and the magnet The array and the superconductor face each other in the horizontal direction (radial type), and the levitation force is obtained from the magnetic rigidity between the permanent magnet array and the superconductor facing each other.
For this reason, it is possible to simultaneously ensure a large vertical gap and a large levitation force while keeping the gap between the magnet array and the superconductor small. In addition, the vertical gap can be set freely.
Furthermore, in the radial type seismic isolation / vibration isolation device of the present invention, for example, since the surface on which the magnet array is arranged is in the vertical direction in the lowermost layer, it becomes a wall and there is no risk of deviation of the structure of the second layer or higher .

It is a figure which shows schematic structure of the conventional vibration isolator. (A) The bottom layer is seen from above (b) The middle layer is seen from above It is a figure which shows the outline of a structure of the seismic isolation and vibration isolator of this invention. (A) View from above, from the right or left, from the lowermost support stand (b) View from above the intermediate layer It is a figure which shows the other structure of the seismic isolation and vibration isolator of this invention. (A) Top view of the top layer It is a figure which shows the outline of another structure of the seismic isolation and vibration isolator of this invention.

Embodiments of the present invention will be described in detail with reference to the drawings.
As described above, in the conventional axial type seismic isolation / vibration isolation device, for example, a vertical gap between a superconductor and a permanent magnet array in which a plurality of permanent magnets in the lowermost layer and an intermediate layer are arranged cannot be secured. There is a possibility that stable continuous operation (stable continuous levitation) may become difficult due to contact between the permanent magnet array and the superconducting cryogenic container due to vertical vibration.
Also, since the superconductor is installed in the cryocontainer, it is difficult to secure a gap between the surface of the cryocontainer and the permanent magnet array if the distance between the permanent magnet array and the superconductor is made small in order to obtain a large levitation force. And there is a risk of collision with vertical vibration. For this reason, it becomes difficult to realize continuous stable levitation, which is indispensable for continuous operation of the seismic isolation / vibration isolation device. Conversely, if an attempt is made to secure a gap between the surface of the cryocontainer and the permanent magnet array (an attempt to increase the gap), the gap between the permanent magnet array and the superconductor becomes large, and a large levitation force cannot be obtained.

FIG. 2 is a view showing a schematic configuration of a three-layer structure seismic isolation / vibration isolation device that should be a “radial type” of the present invention, compared to a conventional “axial type” seismic isolation / isolation isolation device.
In FIG. 2, permanent magnet rows 212A and 212B are arranged on the iron plates 210A and B supported by the support bases 214A and 214B and installed in the vertical direction, and the lowest layer structure of the three-layer structure of the present invention is configured. Has been. A superconductor 222A and a superconductor 222B are installed in the cryogenic vessel 220 so as to face the horizontal direction of the permanent magnet row 212A and the permanent magnet row 212B. Further, a permanent magnet row 226 is disposed on the iron plate 224 on the upper surface of the cryogenic container. The structure of the intermediate layer of the seismic isolation / vibration isolation device of the present invention, including the configuration of these cryogenic containers and the upper surface, is shown. Note that the superconductor 222A and the superconductor 222B are immersed in liquid nitrogen 228 or the like for cooling.
A superconductor 232 is arranged in the cryogenic vessel 230 so as to face the permanent magnet row 226 and above (in the vertical direction). This is the top layer structure. Superconductor 232 is also immersed in liquid nitrogen 234 or the like for cooling.

  The permanent magnet arrays 212A and 212B form a uniform magnetic field in the depth direction (longitudinal direction) in FIG. 2, and the magnetic field changes in the vertical direction (vertical direction) to obtain a holding force for the superconductors 222A and 222B. In this way, a plurality of permanent magnets are arranged. In the permanent magnet row 226, permanent magnets are arranged so as to form a uniform magnetic field in the right-left direction (longitudinal direction) in FIG. The permanent magnet rows 212A and 212B and the permanent magnet row 226 are arranged so as to form a uniform magnetic field in each direction (that is, depth and left and right in FIG. 2) that are perpendicular to each other on the horizontal plane.

  2A is a view of the permanent magnet rows 212A and 212B as viewed from the left and right, and FIG. 2B is an example of the permanent magnet row when the permanent magnet row 226 is viewed from above. In the illustrated example, the longitudinal direction of each of the permanent magnet rows 212A, 212B, and 226 is arranged in four rows so that the N poles and the S poles of the permanent magnets are arranged, and the direction in which magnets of the same polarity are arranged ( The magnetic field is uniform with respect to the longitudinal direction. However, the magnetic poles are changed to N, S, N, and S in the direction in which the permanent magnets are arranged in four rows (the direction crossing the longitudinal direction).

For this reason, even if vibration occurs, the empirical magnetic field of the superconductor does not change in the direction of the uniform magnetic field, so the superconductor does not transmit vibration in that direction. Therefore, as with the conventional three-layer vibration isolator, the vibration isolation and vibration isolation are performed with respect to the horizontal vibration.
Magnetic levitation occurs in the horizontal direction in the lowermost permanent magnet row 212A and permanent magnet row 212B and the superconductor 222A and superconductor 222B in the intermediate layer. Since they face each other in the horizontal direction, there is no need to consider a gap for vertical vibration.
Since such a three-layer seismic isolation / vibration isolation device is used, a large levitation force obtained by reducing the horizontal gap between the lowermost permanent magnet arrays 212A and 212B and the intermediate superconductors 222A and 222B A large vertical gap between the lowermost layer and the intermediate layer can be secured at the same time.
Further, the gap in the vertical direction can be arbitrarily set, and collision between the intermediate layer and the lowermost layer can be avoided.
Furthermore, since there is a permanent magnet array configured in the vertical direction with respect to large horizontal vibrations, the intermediate layer does not deviate from the lowest layer.

In addition, the structure of the seismic isolation / vibration isolator shown in FIG. 2 is not restricted to this. The permanent magnet row and the superconductor between the lowermost layer and the intermediate layer are shown as a pair on the left and right. For example, a plurality of superconductors may be provided corresponding to the left and right permanent magnet rows. A plurality of combinations of the left and right permanent magnet arrays and superconductors may be provided.
Further, a plurality of permanent magnet arrays and superconductors between the intermediate layer and the uppermost layer may be provided.
In FIG. 2, the surface on which the permanent magnet array and the superconductor are installed is opposed in the horizontal direction between the lowermost layer and the intermediate layer, but this configuration may be used between any one of the layers, Both layers may have this configuration.
A cooling device or the like may be used to cool the superconductor.

  The seismic isolation / vibration isolation device with such a structure is a walking vibration / traffic vibration / machine that is a problem in semiconductor device manufacturing systems and ultra-small area measurement systems, etc., whose accuracy and performance are rapidly increasing in recent years. It is suitable for removing horizontal vibrations such as vibrations that are always fine.

[Other Embodiments]
FIG. 3 shows a seismic isolation / vibration isolation device having another configuration. In FIG. 3, a connection hose 352 connecting the refrigerator 350 and the cold stage 354 is explicitly shown. Further, in the seismic isolation / vibration isolation device shown in FIG. 3, the relationship between the middle layer permanent magnet row 226 and the uppermost superconductor 232 in FIG. Arranged as body 322C. This is because the superconductor 322A, the superconductor 322B, and the superconductor 322C that need to be arranged in the low temperature container are collected in the low temperature container 320 of one intermediate layer. The superconductor 322A, the superconductor 322B, and the superconductor 322C are cooled by the refrigerator 350 through the cold stage 354 so as to maintain a superconducting state.

In addition, as shown in FIG. 3, the vertical direction (vertical direction) of the lowermost permanent magnet rows 312A and 312B is a Halbach array in which the magnetization direction changes by 90 degrees, and the magnetic field in the depth direction is one. It is like. The reason why the vertical direction (vertical direction) is the Halbach array is to increase the holding power of the superconductor. Note that the uppermost permanent magnet row 332 may also have a Halbach array in the depth direction as shown in the view from the bottom of FIG. The magnetic field in the left-right direction (longitudinal direction) of the uppermost permanent magnet row needs to be uniform.
Other configurations are the same as those of the three-layer seismic isolation / vibration isolation device shown in FIG.
In this seismic isolation / vibration isolation device, since superconductors are collected in the intermediate layer, the cooling may be performed only on the intermediate layer, and the configuration can be simplified.
In addition, although the refrigerator 350 is installed in the lowest layer in FIG. 3, if it installs in an intermediate | middle layer, the connection hose 352 with the cryogenic container 320 will become difficult to remove | deviate.

[Another embodiment]
FIG. 4 shows the structure of another seismic isolation / vibration isolation device 400 as seen from the side. This seismic isolation / vibration isolation device has a plurality of vertically arranged permanent magnet rows 414 on the bottom surface 412 of the lowermost layer structure 410 and an intermediate layer between the plurality of permanent magnet rows 414. A structure having a plurality of superconductors 421 and 422 in a support 423 is installed in the vertical direction 420 (see FIGS. 4A, 4B, and 4C).
A permanent magnet row 427 is arranged on the iron plate 426 on the upper part of the intermediate layer 420, and superconductors 434A and 434B of the uppermost layer 430 are arranged opposite to the permanent magnet row 427.
As shown in the figure, the lowermost permanent magnet array and the intermediate superconductor are alternately combined in the left-right direction (horizontal direction). By effectively utilizing the magnetic field lines, the superconductor of the intermediate layer can be magnetically levitated.

The permanent magnet row 414 has a uniform magnetic field in the depth direction, and the vertical direction is, for example, a Halbach array, similar to the lowermost permanent magnet row 312 in FIG. A structure having a plurality of superconductors may be installed in the depth direction of the intermediate layer 420.
The permanent magnet row 427 of the intermediate layer 420 also has a Halbach array in the depth direction and a uniform magnetic field in the left-right direction.
Furthermore, a permanent magnet 424 is disposed at the lowermost part of the intermediate layer 420, and the permanent magnet 424 opposes the magnetic poles so as to repel the uppermost part of the permanent magnet row 414 of the lowermost layer 410. Thereby, the vertical levitation force between the lowermost layer 410 and the intermediate layer 420 is obtained.
The uppermost layer 430 is provided with permanent magnets 436A, 436B, and 436C on the lower surface. The permanent magnets 436A, 436B, and 436C are permanent magnets opposed to the permanent magnet row 427 of the intermediate layer. Are arranged so that the same magnetic poles face each other. Thus, a vertical levitation force between the intermediate layer 420 and the uppermost layer 430 is obtained.
In this way, with the configuration where the same poles of the permanent magnets face each other in the vertical direction, the vertical levitation force is obtained, and combined with the horizontal seismic isolation and vibration isolation by the configuration in which the permanent magnet and the superconductor face each other. (Hybrid type).
Note that the same orientation of the permanent magnets in the vertical direction can be provided between any layers, and can be applied to, for example, the seismic isolation / vibration isolation device shown in FIGS.

100: Conventional vibration isolator 110: Iron plates 112A, 112B: Permanent magnet row 120: Low temperature vessel 122A, 122B: Superconductor 124: Iron plate 126: Permanent magnet row 128: Liquid nitrogen 130: Low temperature vessel 132: Superconductor 134: Liquid nitrogen

200: Seismic isolation / vibration isolation device 210A, 210B of the present application: Iron plates 212A, 212B: Permanent magnet rows 214A, 214B: Support base 220: Low temperature vessel 222A, 222B: Superconductor 224: Iron plate 226: Permanent magnet rows 228A, 228B: Liquid nitrogen 230: Low temperature vessel 232: Superconductor 234: Liquid nitrogen

300: Other seismic isolation / vibration isolation devices 310A, 310B: Iron plates 312A, 312B: Permanent magnet rows 314A, 314B: Support base 320: Cryogenic containers 322A, 322B, 322C: Superconductor 332: Permanent magnet row 334: Iron plate 336: Upper plate 350: Refrigerator 352: Connection hose 354: Cold stage

400: Another seismic isolation / vibration isolation device 410: Lowermost layer structure 412: Iron plate 414: Permanent magnet row 420: Intermediate layer structure 421, 422: Superconductor 423: Support base 424: Permanent magnet 425: Support plate 426: Iron plate 427 : Permanent magnet row 430: Top layer structure 432: Support plates 434A, 434B: Superconductors 436A, 436B, 436C: Permanent magnets

Claims (4)

A seismic isolation / vibration isolation device using magnetic levitation,
Has at least a three-layer structure,
The bottom layer and the middle layer, and the middle layer and the top layer face each other without contact due to magnetic levitation between the magnet array and the superconductor,
The magnet rows installed in two layers are arranged such that the uniform directions of the magnetic fields are orthogonal to each other,
Between the at least one layer of the three-layer structure, the facing surfaces of the magnet array and the superconductor are arranged in a vertical direction,
A horizontal seismic isolation / vibration isolation device characterized in that the magnet array between the layers and the superconductor face each other in the horizontal direction. In the seismic isolation / vibration isolation device according to claim 1 ,
A seismic isolation / vibration isolation device, wherein all the superconductors are installed in the intermediate layer. In the seismic isolation / vibration isolation device according to claim 1 ,
There are a plurality of magnet arrays and superconductors arranged such that the facing surfaces of the magnet array and the superconductor are in the vertical direction, and the magnet arrays and the superconductor are alternately arranged in the horizontal direction. Seismic isolation and vibration isolation equipment. In the seismic isolation / vibration isolation device according to any one of claims 1 to 3 ,
A seismic isolation / vibration isolation device comprising a configuration in which the same magnetic poles of magnets face each other in the vertical direction between at least one layer in addition to facing the magnet array and the superconductor.

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