JP5266739B2 - Laser radar equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser radar apparatus that allows detection of the periphery of the apparatus and also allows three-dimensional detection. <P>SOLUTION: This laser radar apparatus 1 includes a laser diode 10 for generating a laser beam, a photodiode 20 for detecting reflected light of the laser beam that has been reflected by a detecting object when the laser beam is generated from the laser diode 10, a deflecting section 41 constituted turnably about a predetermined center axis 42a, a turn deflecting mechanism 40 for deflecting the laser beam toward a space with the deflecting means 41 and deflecting the reflected light toward the photodiode 20, and a motor 50 for rotating and driving the rotation deflecting mechanism 40. The laser radar apparatus further comprises a rocking mirror 31 for changing the direction of the laser beam from the deflecting means 41 with respect to the direction of the center axis 42a by relatively changing the incidence direction of the laser beam to the deflecting section 41, and a controlling means for controlling the rocking mirror 31. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to a laser radar device.

Conventionally, for example, an apparatus as disclosed in Patent Document 1 is provided as a technique for detecting the distance and direction to a detection object using a laser beam. In the apparatus of Patent Document 1, an optical isolator that transmits laser light and reflects reflected light from a detection object toward the detection means is provided on the optical axis of the laser light from the laser light generation means. Furthermore, a concave mirror that rotates about the central axis in the optical axis direction is provided on the optical axis of the laser light that passes through the optical isolator. The concave mirror reflects the laser light toward the space and reflects it from the detection object. Reflecting light toward the optical isolator enables 360 ° horizontal scanning.
Japanese Patent No. 2789741

  By the way, in the technique of Patent Document 1, 360 ° horizontal scanning is possible by rotating the concave mirror, and the detection area (area where scanning with laser light is performed) is expanded to the entire periphery of the apparatus. There is a problem that the detection area is limited to a plane. That is, since the laser beam reflected from the concave mirror toward the space is scanned within a predetermined plane (scanning plane), it is impossible to detect a region outside the scanning plane. Therefore, a detected object that deviates from the scanning plane cannot be detected, and even if the detected object exists in the scanning plane, the detected object cannot be grasped in three dimensions.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a laser radar apparatus that can detect the surroundings of the apparatus and can also perform three-dimensional detection.

In order to achieve the above object, a first aspect of the present invention provides a laser radar device, wherein a laser beam generating means for generating laser light, and when the laser light is generated from the laser light generating means, are reflected by a detection object. A light detecting means for detecting reflected light of the laser light and one or a plurality of deflecting means configured to be rotatable about a predetermined central axis, and directing the laser light to the space by the deflecting means. And rotating the deflection means for deflecting the reflected light toward the light detection means, the drive means for rotating the rotation deflection means, and the incident direction of the laser light relative to the deflection means relative to each other. By changing the direction of the laser beam from the deflecting means with respect to the direction of the central axis, and a control means for controlling the direction changing means. Wherein the is provided.
Further, the direction changing means comprises laser light deflecting means configured to deflect the laser light from the laser light generating means toward the rotation deflecting means and configured to be swingable, and the control The means comprises swing control means for controlling the swing of the laser beam deflecting means. The laser beam deflecting means swings the deflecting member for deflecting the laser light and swingingly supports the deflecting member. A mechanism and an actuator that drives the deflection member supported by the swing mechanism, and the swing control means is configured to control a driving state of the deflection member by the actuator, and the actuator includes: It comprises one or a plurality of piezo actuators that change the position of a specific part of the deflecting member, and the swing control means controls the piezo actuators, The deflection mechanism is configured to control the attitude of the deflection member with respect to a laser beam, and the swing mechanism includes a ball joint that connects the deflection member and a holding portion that holds the deflection member with a spherical pair structure, and the deflection unit Is a mirror having a surface that is inclined with respect to the central axis and reflects the laser beam, wherein the direction of the central axis is a Y-axis direction, and a predetermined direction orthogonal to the Y-axis direction is an X-axis direction. When the direction perpendicular to the X-axis direction and the Y-axis direction is the Z-axis direction, the laser light from the laser light generating means enters the deflection member from one side in the X-axis direction, and the deflection member Accordingly, the deflection control unit is deflected toward the deflection unit disposed on one side in the Y-axis direction with respect to the deflection member. Movement If not, the deflection member is rotated about the first axis to change the direction of the laser beam from the deflection member toward the deflection means along the XY plane, and the deflection means is rotated. When the position is within a predetermined rotation range, the deflection member is rotated about the second axis, and the direction of the laser beam from the deflection member toward the deflection means is along a plane intersecting the XY plane. The swing control of the laser beam deflecting means is changed based on the rotational position of the deflecting means so that the predetermined rotational range is an imaginary straight line parallel to the X-axis direction. The angle between the plane reflecting the laser beam and the virtual plane parallel to the deflecting means is within a predetermined threshold value or less.

The invention according to claim 2 is characterized in that a deflection area for deflecting the reflected light in the deflection means is configured to be larger than a deflection area for deflecting the laser light in the laser light deflection means.

According to a third aspect of the present invention, a condensing unit that condenses the reflected light toward the light detecting unit is provided on an optical path of the reflected light from the rotation deflecting unit to the light detecting unit. It is characterized by being.

According to a fourth aspect of the present invention, there is provided a light selecting unit that transmits the reflected light and removes light other than the reflected light on an optical path of the reflected light from the rotation deflecting unit to the light detecting unit. It is provided.

  According to the first aspect of the present invention, the deflecting means for deflecting the laser light toward the space and deflecting the reflected light from the detection target toward the light detecting means is rotatable about a predetermined central axis. Therefore, the detection over the periphery of the device is possible. In addition, since there is provided a direction changing means for changing the direction of the laser light from the deflecting means with respect to the direction of the central axis, the direction of the laser light is changed not only in the plane direction orthogonal to the central axis but also in the direction of the central axis. Therefore, detection can be performed three-dimensionally.

In addition, a configuration capable of changing the direction of the laser beam from the deflection unit with respect to the direction of the central axis can be suitably realized by the laser beam deflection unit.

Further, the deflection member supported by the swing mechanism is configured to be driven by an actuator, and the drive state of the deflection member by the actuator is controlled by the swing control means. In this way, it is possible to satisfactorily control the oscillation of the part that deflects the laser beam.

Further, the position of the specific part of the deflection member is changed by controlling one or a plurality of piezo actuators, thereby controlling the attitude of the deflection member with respect to the laser beam. In this way, a configuration that can swing control the deflection member can be realized with a simple and small configuration.

Further, a ball joint is provided for connecting the deflection member and the holding portion for holding the deflection member with a spherical pair structure. In this way, the deflection member can be stably held in the apparatus and can be smoothly swung.

In addition, the swing control of the laser beam deflecting unit can be performed appropriately according to the rotation position of the deflecting unit.

According to the second aspect of the present invention, the deflection area for deflecting the reflected light in the deflecting means is larger than the deflection area for deflecting the laser light in the laser light deflecting means. It can be used for detection, and the detection accuracy can be effectively increased.

In the invention of claim 3 , since the light collecting means for collecting the reflected light toward the detecting means is provided on the optical path of the reflected light from the rotation deflecting means to the light detecting means, the detecting means is A wide range of reflected light can be used for detection without increasing the size.

According to the fourth aspect of the present invention, there is provided a light selecting means for transmitting the reflected light and removing light other than the reflected light on the optical path of the reflected light from the rotation deflecting means to the light detecting means. , Noise light can be suitably removed.

[ Reference Example 1 ]
Hereinafter, Reference Example 1 will be described with reference to the drawings. FIG. 1 is a cross-sectional view schematically illustrating a laser radar device 1 according to Reference Example 1 .

  As shown in FIG. 1, the laser radar device 1 includes a laser diode 10 and a photodiode 20 that receives reflected light L2 from a detection object, and is configured as a device that detects the distance and direction to the detection object. Yes. The laser diode 10 corresponds to an example of laser light generation means, and is supplied with a pulse current from a drive circuit (not shown) and projects pulsed laser light (laser light L1). The photodiode 20 corresponds to an example of a detection unit, and when the laser light L1 is generated from the laser diode 10, the reflected light L2 of the laser light L1 reflected by the detection object is detected and converted into an electric signal. It has a configuration. The reflected light from the detection object is configured to be captured in a predetermined region. In the example of FIG. 1, when the laser light L1 passes through the path indicated by the solid line, Reflected light in the area between the lines is taken in.

  A lens 60 is provided on the optical axis of the laser beam L1. The lens 60 is configured as a collimating lens and has a function of converting the laser light L1 from the laser diode 10 into parallel light.

  On the optical path of the laser beam L1 that has passed through the lens 60, an oscillating mirror 31 is disposed as a laser beam deflecting unit. The oscillating mirror 31 corresponds to an example of “direction changing means”, and is configured to deflect the laser light L1 from the laser diode 10 toward the rotation deflection mechanism 40 and is configured to be oscillated. ing. The oscillating mirror 31 functions to change the direction of the laser beam from the deflection unit 41 with respect to the direction of the central axis 42a by relatively changing the incident direction of the laser beam with respect to the deflection unit 41.

  In addition, a mirror driving unit that drives the oscillating mirror 31 with multiple degrees of freedom is provided. Since the technique for driving the mirror with multiple degrees of freedom is well known in the field of galvano mirrors and the like, details thereof will be omitted, but for the mirror driving unit, for example, the oscillating mirror 31 is supported by a gimbal, a pivot bearing or the like. Thereby, it can be set as the structure made to rotationally move to two directions. In FIG. 2, as an example, a displacement mechanism 33 that displaces the oscillating mirror 31 is illustrated. The displacement mechanism 33 is a frame (not shown) disposed at a predetermined position in the case 3, and rotates on the frame. And a mirror support frame 34 that can be held. The swing mirror 31 is supported by a first shaft 33a and a second shaft 33b (the second shaft 33b is a first shaft 33a). It is configured to perform a rotational movement in two directions centered on (orthogonal to). With this configuration, the three-dimensional positional relationship of the reflecting surface 31a of the oscillating mirror 31 is determined. In FIG. 1, the emission direction of the laser light L1 from the laser diode 10 is the X-axis direction, the direction of the central axis 42a of the rotation changing mechanism 40 is the Y-axis direction, and the directions orthogonal to the X-axis direction and the Y-axis direction are It is described as the Z-axis direction. In such a definition, when the angle between the reflecting surface 31a and the XY plane is α, the angle between the reflecting surface 31a and the YZ plane is β, and the angle between the reflecting surface 31a and the XZ plane is γ, the control circuit By controlling the actuator 36 by 70, the values of α, β, and γ are freely determined.

The displacement mechanism 33 is driven by an actuator 36 schematically shown in FIG. The actuator 36 includes a first actuator such as a motor that sets the relative position of the mirror support frame 34 with respect to the apparatus main body, and a second actuator such as a motor that sets the relative position of the swing mirror 31 with respect to the mirror support frame 34. Based on the control amount from the control circuit 70, the first actuator (motor or the like) sets the position of the mirror support frame 34, and the second actuator (motor or the like) sets the position of the oscillating mirror 31 relative to the mirror support frame 34. Thus, the tilt of the oscillating mirror 31 with respect to the laser beam L1 is set. The control circuit 70 is constituted by a microcomputer equipped with a CPU. In the first reference example , the control circuit 70 corresponds to an example of “control means”.

  A rotation deflection mechanism 40 is provided on the optical axis of the laser beam L1 reflected by the oscillating mirror 31. The rotation deflection mechanism 40 corresponds to an example of a rotation deflection unit. The deflection unit 41 includes a mirror having a flat reflecting surface 41a, a support base 43 that supports the deflection unit 41, and the support. A shaft portion 42 connected to the base 43 and a bearing (not shown) that rotatably supports the shaft portion 42 are provided. The deflecting portion 41 deflects the laser light toward the space, and reflects the reflected light to the photodiode. It functions to deflect towards 20. The deflection unit 41 constituting a part of the rotation deflection mechanism 40 is rotatable about the central axis 42a, and corresponds to an example of a deflection unit.

In the laser radar device 1 according to the first reference example , the deflection region for deflecting the reflected light in the deflection unit 41 (the region of the reflection surface 41a in the deflection unit 41) is the deflection region for deflecting the laser light in the oscillating mirror 31. It is configured to be larger than (region of the reflecting surface 31a in the oscillating mirror 31).

Further, a motor 50 is provided so as to rotationally drive the rotation deflection mechanism 40. The motor 50 corresponds to an example of a driving unit, and is configured to rotate and drive the deflection unit 41 connected to the shaft unit 42 by rotating the shaft unit 42. Here, the motor 50 is constituted by a step motor. Various step motors can be used. If a step motor having a small angle for each step is used, precise rotation is possible. Further, driving means other than the step motor may be used as the motor 50. For example, a servo motor or the like may be used, or a motor that rotates regularly and a pulse laser beam is output in synchronization with the timing when the deflecting unit 41 faces the direction to be measured, thereby enabling detection of a desired direction. Also good. In the first reference example , as shown in FIG. 1, a rotation angle position sensor 52 that detects the rotation angle position of the shaft portion 42 of the motor 50 (that is, the rotation angle position of the deflection unit 41) is provided. The rotation angle position sensor 52 can be of various types as long as it can detect the rotation angle position of the shaft portion 42 such as a rotary encoder, and the type of the motor 50 to be detected is not particularly limited. It can be applied to various types.

  A condensing lens 62 that condenses the reflected light toward the photodiode 20 is provided on the optical path of the reflected light from the rotation deflection mechanism 40 to the photodiode 20. A filter 64 is provided between the diodes 20. The condensing lens 62 condenses the reflected light from the deflection unit 41 and guides it to the photodiode 20 and corresponds to an example of a condensing unit. The filter 64 transmits reflected light and removes light other than reflected light on the optical path of reflected light from the rotation deflection mechanism 40 to the photodiode 20 and corresponds to an example of a light selection unit. doing. Specifically, it can be configured by a wavelength selection filter that transmits only light with a specific wavelength corresponding to the reflected light L2 (for example, light with a wavelength in a certain region) and blocks other light.

In the first reference example , the laser diode 10, the photodiode 20, the laser light deflection unit 30, the lens 60, the rotation deflection mechanism 40, the motor 50, and the like are housed in the case 3, and dust and impact protection are achieved. Yes. Around the deflection unit 41 in the case 3, a light guide unit 4 that allows the laser light L <b> 1 and the reflected light L <b> 2 to pass is formed so as to surround the deflection unit 41. The light guide 4 is formed in an annular shape centering on the optical axis of the laser beam L1 incident on the deflecting unit 41 and is substantially 360 °, and the glass plate is closed in the form of closing the light guide 4. A laser light transmission plate 5 made of a material such as the like is arranged to prevent dust. The laser beam transmitting plate 5 is configured to be inclined over the entire circumference with respect to a virtual plane orthogonal to the optical axis of the laser beam L1 entering the deflection unit 41. That is, the plate surface is inclined with respect to the laser beam L1 from the deflection unit 41 toward the space. Therefore, even if the laser beam L1 traveling from the deflection unit 41 to the space is reflected by the laser beam transmitting plate 5, it is difficult to become noise light.

  Next, the operation of the laser radar device 1 will be described. In the laser radar device 1 shown in FIG. 1, when a pulse current is supplied to the laser diode 10, the laser diode 10 outputs a pulse laser beam (laser beam L1) at a time interval corresponding to the pulse width of the pulse current. The The laser light L1 is projected as diffused light having a certain spread angle, and is converted into parallel light by passing through the lens 60. The laser beam L1 that has passed through the lens 60 is reflected by the oscillating mirror 31 provided in the laser beam deflecting unit 30, enters the deflecting unit 41, is reflected by the deflecting unit 41, and is irradiated toward the space.

  The laser beam L1 reflected by the deflecting unit 41 is reflected by the detection object, and a part of the reflected light (see the reflected light L2) is incident on the deflecting unit 41 again. The deflecting unit 41 reflects the reflected light L2 toward the photodiode 20 side. The reflected light L <b> 2 reflected by the deflecting unit 41 is collected by the condenser lens 62, passes through the filter 64, and enters the photodiode 20.

  The photodiode 20 outputs an electrical signal corresponding to the received reflected light L2 (for example, a voltage value corresponding to the received reflected light L2). In this configuration, the distance to the detection object can be obtained by measuring the time from when the laser light L1 is output by the laser diode 10 until the reflected light L2 is detected by the photodiode 20. Further, the azimuth can be obtained from the displacement of the oscillating mirror 31 and the displacement of the deflecting unit 41 at that time. That is, the angle α formed between the reflecting surface 31a of the oscillating mirror 31 and the XY plane, the angle β formed between the reflecting surface 31a and the YZ plane, and the angle γ formed between the reflecting surface 31a and the XZ plane are determined, and the rotation of the deflection unit 41 is determined. When the position is determined, the direction in which the laser beam L1 travels from the deflecting unit 41 is determined as one azimuth, so that the azimuth of the detected object can be accurately grasped.

  The path change of the laser light accompanying the displacement of the oscillating mirror 31 is as follows. FIG. 1 shows an example in which the rotation deflection mechanism 40 is in a predetermined rotation state. When the swing mirror 31 is in the swing state of FIG. L1 passes through the path indicated by the solid line, and the reflected light in the region between the two lines indicated by reference numeral L2 is captured. On the other hand, when the oscillating state of the oscillating mirror 31 is changed, the incident angle of the laser beam L1 with respect to the deflecting unit 41 is relatively changed as indicated by a broken line L1 ′. That is, when the oscillating mirror 31 is displaced, the reflection angle of the laser beam on the oscillating mirror 31 changes, and the path shown by the solid line changes to the path shown by the broken line L1 ′. Thereby, the laser beam which goes to the space from the deflection | deviation part 41 will change to the direction of the central axis 42a. In this case, the path of the reflected light also changes as indicated by the broken line L2 ′, and after being reflected by the deflecting unit 41, is taken into the photodiode 20 via the condenser lens 62 and the filter 64.

As described above, according to the laser radar device 1 according to the first reference example, the deflection unit 41 that deflects the laser light L1 toward the space and deflects the reflected light L2 from the detection target toward the photodiode 20. Can be rotated about a predetermined central axis, so that detection can be performed over the periphery of the apparatus. In addition, since the oscillating mirror 31 that can change the direction of the laser light L1 from the deflection unit 41 with respect to the direction of the central axis 42a is provided, the direction of the laser light L1 is a planar direction orthogonal to the central axis 42a ( Since it can be changed not only in the XZ plane direction) but also in the direction of the central axis 42a (Y direction), detection can be performed three-dimensionally.

  In addition, a configuration capable of changing the direction of the laser light L1 from the deflection unit 41 with respect to the direction of the central axis 42a can be suitably realized by the oscillating mirror 31 without using a complicated configuration.

  In addition, since the deflection area for deflecting the reflected light L2 in the deflecting unit 41 is configured to be larger than the deflection area for deflecting the laser light L1 in the oscillating mirror 31, the reflected light in a relatively wide area can be detected. It can be used, and the detection accuracy can be effectively increased.

  Further, since the condensing lens 62 that condenses the reflected light L2 toward the photodiode 20 is provided on the optical path of the reflected light L2 from the rotation deflection mechanism 40 to the photodiode 20, the photodiode 20 is provided. It becomes possible to use a wide range of reflected light for detection without increasing the size.

  In addition, since the filter 64 that transmits the reflected light L2 and removes light other than the reflected light is provided on the optical path of the reflected light L2 from the rotation deflection mechanism 40 to the photodiode 20, noise light is provided. Can be suitably removed.

[ Reference Example 2 ]
Next, Reference Example 2 will be described. FIG. 3 is a cross-sectional view schematically illustrating a laser radar device 100 according to Reference Example 2 . The laser radar device 100 according to the second reference example uses parts similar to those in the first reference example, and parts having the same configuration are denoted by the same reference numerals as those in the first reference example , and detailed description thereof will be omitted. It will be omitted. In FIG. 3, the direction of the central axis 42a of the rotation deflection mechanism 40 is the X-axis direction, the direction in which light in the X-axis direction is reflected by the mirror 130 (the direction of light reception by the photodiode 20) is the Y-axis direction, and the X-axis. The direction orthogonal to the direction and the Y-axis direction is taken as the Z-axis direction.

Also in the laser radar device 100 according to the second reference example , when the laser light L1 is generated from the laser diode 10 (laser light generating means) that generates the laser light L1 and the laser diode 10 as in the first reference example , A photodiode 20 (light detection means) that detects the reflected light L2 of the laser light L1 reflected by the detection object, and a deflecting unit 41 that is configured to be rotatable about a predetermined central axis 42a are provided. A rotation deflection mechanism 40 that deflects the laser light L1 toward the space by the unit 41 and deflects the reflected light L2 toward the photodiode 20 and a motor 50 that rotationally drives the rotation deflection mechanism 40 are provided. Yes.

  On the other hand, the laser radar device 100 is provided with an emission direction changing unit 110 that changes the emission direction of the laser light L1 by displacing the laser diode 10, and the emission direction changing unit 110 is a direction changing unit and changes the emission direction. This corresponds to an example of the means. The emission direction changing unit 110 functions to change the direction of the laser light L1 from the deflection unit 41 with respect to the direction of the central axis 42a by relatively changing the incident direction of the laser light L1 with respect to the deflection unit 41. To do.

  As the emission direction changing unit 110, various actuators that can change the direction of the laser diode 10 can be adopted. For example, the laser diode 10 may be mounted on vibration means such as a vibrator, and the laser diode 10 is mounted on a displacement device that is displaced with multiple degrees of freedom, such as the displacement mechanism 33 and the actuator 36 of FIG. The mounting surface may be rotated in two directions. In this case, the displacement amount of the vibration means or the displacement device can be controlled by the control circuit 70, and the control circuit 70 corresponds to an example of the “displacement control means”.

In the laser radar device 100 according to the reference example 2 , the laser light L1 projected in a predetermined direction from the laser diode 10 is converted into parallel light by passing through the lens 60, and the laser light L1 that has passed through the lens 60 is left as it is. The light enters the deflecting unit 41, is reflected by the deflecting unit 41, and is irradiated toward the space. The laser beam L1 reflected by the deflecting unit 41 is reflected by the detection object, and a part of the reflected light (see the reflected light L2) is incident on the deflecting unit 41 again. The deflecting unit 41 reflects the reflected light L <b> 2 toward the mirror 130 and directs it toward the photodiode 20 through the mirror 130. The mirror 130 is disposed in an inclined manner in the space between the laser diode 10 and the rotation deflection mechanism 40 and has a through hole 131 through which the laser light L1 from the laser diode 10 passes. The opening area of the through hole 131 is set to be sufficiently smaller than the area of the reflecting surface of the mirror 130, and the reflected light L <b> 2 reflected by the deflecting unit 41 is an area other than the opening area of the through hole 131 in the mirror 130. The light is reflected toward the photodiode 20 in the region where the reflection surface is formed. When the direction of the laser diode 10 is changed from the state in which the paths of the laser light L1 and the reflected light L2 are configured in this way, the laser light passes through the path shown by the broken line L1 ′, for example, and the reflected light is broken by the broken line. The light enters the photodiode 20 through a path indicated by L2 ′.

In the second reference example , a condensing lens 62 that condenses the reflected light L2 toward the photodiode 20 is provided on the optical path of the reflected light L2 from the rotation deflection mechanism 40 to the photodiode 20. Yes. A filter 64 that transmits the reflected light L2 and removes light other than the reflected light is provided on the optical path of the reflected light L2 from the rotation deflection mechanism 40 to the photodiode 20.

According to the configuration of the present reference example 2, a configuration in which the direction of the laser light L1 from the deflecting unit 41 can be changed with respect to the direction of the central axis 42a by appropriately configuring the components near the laser diode 10 is preferable. realizable.

[ Reference Example 3 ]
Next, Reference Example 3 will be described. FIG. 4 is a cross-sectional view schematically illustrating a laser radar device 200 according to Reference Example 3 . The laser radar device 200 of the present reference example 3 also uses parts similar to those of the reference example 1, and parts having the same configuration are denoted by the same reference numerals as those of the reference example 1, and detailed description thereof is omitted. It will be omitted. In FIG. 4, the projecting direction of the laser light L1 from the laser diode 10 is the X-axis direction, the direction of the central axis 242a of the rotation deflection mechanism 240 is the Y-axis direction, the direction orthogonal to the X-axis direction and the Y-axis direction. Is the Z-axis direction.

Similarly to the reference example 1 , the laser radar device 200 according to the reference example 3 also detects a laser diode 10 (laser light generation unit) that generates the laser light L1 and a detected object when the laser light L1 is generated from the laser diode 10. And a photodiode 20 (light detecting means) for detecting the reflected light L2 of the laser light L1 reflected by the light.

On the other hand, the laser radar device 200 according to Reference Example 3 is slightly different from the laser laser device 1 of Reference Example 1 in the configuration of the rotation deflection mechanism 240. The deflection unit 241 of the rotation deflection mechanism 240 is configured as a mirror and is configured to be rotatable about a predetermined center axis 242a, while being rotatable about an axis 241a orthogonal to the center axis 242a. Has been. More specifically, the support base 243 is supported so as to be rotatable about an axis 241a along the XZ plane so that the relative rotation angle with respect to the support base 243 can be driven and controlled by an actuator 210 such as a motor. It has become. The displacement of the actuator 210 is controlled by the control circuit 70. Further, a shaft portion 242 is connected to the support base 243, and the shaft portion 242 is driven and controlled by the same motor 50 (driving means) as in the first embodiment .

  In the laser radar device 200 configured as described above, the deflecting unit 241 performs “a function of deflecting the laser light L1 toward the space and deflecting the reflected light L2 toward the photodiode 20”. On the other hand, the actuator 210 tilts the entire deflecting unit 241 about the axis 241a in the direction intersecting with the central axis 242a, thereby changing the incident direction of the laser beam L1 relative to the deflecting unit 241 relatively. “The function of changing the direction of the laser beam L1 from the direction 241 with respect to the direction of the central axis 242a”. In this example, the actuator 210 that tilts the deflection unit 241 corresponds to an example of a direction changing unit and a tilting unit, and the control circuit 70 corresponds to an example of a control unit and a tilt control unit.

In the third reference example , a condensing lens 62 that condenses the reflected light L2 toward the photodiode 20 is provided on the optical path of the reflected light L2 from the rotation deflection mechanism 240 to the photodiode 20. Yes. A filter 64 that transmits the reflected light L2 and removes light other than the reflected light is provided on the optical path of the reflected light L2 from the rotation deflection mechanism 40 to the photodiode 20.

According to the configuration of the third reference example, a configuration in which the direction of the laser light L1 can be changed with respect to the direction of the central axis 242a (the Y-axis direction) can be suitably realized without complicating other than the deflection unit.

[ Reference Example 4 ]
Next, Reference Example 4 will be described. FIG. 5 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 4 . The laser radar device 300 of the reference example 4 also uses parts similar to those of the reference example 1, and parts having the same configuration are denoted by the same reference numerals as those of the reference example 1, and detailed description thereof will be omitted. It will be omitted. In FIG. 5, the direction of the central axis 342a of the rotation deflection mechanism 340 is the Y-axis direction, and the predetermined direction orthogonal to the Y-axis direction is the X-axis direction.

Also in the laser radar device 300 according to the reference example 4 , similarly to the reference example 1 , the laser diode 10 (laser light generation means) that generates the laser light L1 and the detection when the laser light L1 is generated from the laser diode 10 are detected. And a photodiode 20 (light detection means) for detecting the reflected light L2 of the laser light L1 reflected by the object.

On the other hand, the laser radar device 300 according to Reference Example 4 is also slightly different from the laser radar device 1 of Reference Example 1 in the configuration of the rotation deflection mechanism 340. The deflection means of the rotation deflection mechanism 340 is configured as a mirror and deflects the laser light L1 from the laser diode 10 (the first deflection section 343 corresponds to an example of the first deflection means). And a second deflecting unit 341 that is also configured as a mirror and deflects the reflected light L2 from the detection object (the second deflecting unit 341 corresponds to a second deflecting unit). The second deflecting portion 341 is fixed to the cylindrical shaft 342 in an inclined state, and the first deflecting portion 343 is supported on the cylindrical shaft 342 so as to be tiltable. A cylindrical shaft 342 to which the second deflecting portion 341 is fixed and the first deflecting portion 343 is rotatably supported rotates around a central shaft 342a. The cylindrical shaft 342 is the same as that of the reference example 1 . The first deflecting unit 343 and the second deflecting unit 341 are rotated about the central axis 342a by being rotationally driven by the motor 50 (driving means).

  The first deflecting portion 343 can be tilted independently of the second deflecting portion 341. Specifically, the first deflecting portion 343 is supported by a bearing (not shown) provided on the cylindrical shaft 342 and has a central axis. Displacement in the rotational direction about an axis 343b orthogonal to 342a is possible. The first deflection unit 343 is driven by an actuator 310 schematically shown in FIG. The type of the actuator 310 is not limited as long as it can tilt the first deflection unit 343. For example, the configuration may be such that rotation is controlled by a motor or the like, and the angle of the first deflection unit 343 is set. In addition, a part of the first deflecting unit 343 is made of a magnetic material, and a coil is provided outside the cylindrical shaft 342, and the displacement of the first deflecting unit 343 is controlled by an electromagnetic force corresponding to the energization amount of the coil. May be.

  In the laser radar device 300 configured as described above, the first deflecting unit 343 that constitutes a part of the deflecting unit performs the “function of deflecting the laser light L1 toward the space”, and also a part of the deflecting unit is used. The second deflecting unit 341 constituting the “function to deflect the reflected light L <b> 2 toward the photodiode 20” is performed.

  On the other hand, the actuator 310 operates so as to tilt the first deflecting portion 343 about the axis 343b in the direction intersecting the central axis 342a, thereby “relative to the incident direction of the laser light L1 with respect to the first deflecting portion 343”. And the function of changing the direction of the laser beam L1 from the first deflection unit 343 with respect to the direction of the central axis 342a ”is achieved. In this example, the actuator 310 that tilts the first deflection unit 343 corresponds to an example of direction changing means and tilting means, and the control circuit 70 corresponds to an example of control means and tilting control means.

In the fourth reference example , the deflection region (the region of the reflection surface 341a) that deflects the reflected light L2 in the second deflection unit 341 is the deflection region (the region of the reflection surface 343a) that deflects the laser light L1 in the first deflection unit 343. Area).

  Further, the laser diode 10 and the photodiode 20 are disposed on the central axis 342 a of the rotation deflection mechanism 340 so as to face each other with the first deflection unit 343 interposed therebetween. In the case of this configuration, the laser light L1 generated inside the cylindrical shaft 342 is reflected by the first deflection unit 343 and travels toward the space. The reflected light L2 from the detection object is reflected by the second deflecting unit 341 and travels toward the photodiode 20 side. On the other hand, when the first deflecting unit 343 is displaced from the state in which the paths of the laser light L1 and the reflected light L2 are configured in this way, the laser light travels toward the space side along the path shown by a broken line L1 ′, for example, and the reflected light Enters the second deflecting unit 341 through a path indicated by a broken line L2 ′.

In the fourth reference example , a condensing lens 62 that condenses the reflected light L2 toward the photodiode 20 is provided on the optical path of the reflected light L2 from the rotation deflection mechanism 340 to the photodiode 20. Yes. Further, a filter 64 that transmits the reflected light L2 and removes light other than the reflected light is provided on the optical path of the reflected light L2 from the rotation deflection mechanism 340 to the photodiode 20.

As described above, according to the configuration of the present reference example 4 , the configuration in which the incident direction of the laser light is relatively changed can be suitably realized only by selectively displacing a part of the deflection unit.

  In addition, since the deflection region for deflecting the reflected light in the second deflection unit 341 is configured to be larger than the deflection region for deflecting the laser light in the first deflection unit 343, the reflected light in a relatively wide range is detected. The detection accuracy can be effectively increased.

  On the central axis 342a of the rotation deflection mechanism 340, the laser diode 10 and the photodiode 20 are arranged to face each other with the first deflection unit 343 interposed therebetween, so that the arrangement efficiency can be improved and the space can be saved. It can be used effectively.

[ First embodiment]
Next, the first embodiment will be described.
FIG. 6 is a cross-sectional view schematically illustrating the laser radar device according to the first embodiment of the invention. FIG. 7 is an explanatory diagram conceptually illustrating a swing mechanism, an actuator, and the like used in the laser radar apparatus of FIG. FIG. 8 is an explanatory view for conceptually explaining a mirror to which a piezo actuator is attached from the back side (opposite side of the reflecting surface), and FIG. 8 (b) is a conceptual view of the mirror to which the piezo actuator is attached. It is a perspective view shown in FIG. FIG. 9 is a flowchart illustrating a detection process in the laser radar apparatus of FIG.

As shown in FIG. 6, the laser radar device 400 of the present embodiment also uses parts similar to those of the reference example 1 for a part thereof. That is, the case 3, the light guide 4, the laser light transmission plate 5, the laser diode 10, the lens 60, the photodiode 20, the filter 64, the condenser lens 62, the rotation deflection mechanism 40, the motor 50, the rotation angle position sensor 52, for such a control circuit 70 has the same functions as and reference example 1 the same configuration as in reference example 1. Therefore, for the parts constituting the same configuration as in Reference Example 1 are denoted by the same reference numerals as in Reference Example 1, detailed description thereof will be omitted. In the present embodiment, the direction of the central axis 42a of the rotation deflection mechanism 40 is the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction. Is the Z-axis direction. In the present embodiment, the emission direction of the laser light from the laser diode 10 is the X-axis direction.

  Also in the present embodiment, when the laser beam L1 is generated from the laser diode 10 (laser beam generation unit), the reflected light of the laser beam L1 reflected by the detection object is detected by the photodiode 20 (light detection unit). There is no. Further, the rotation deflection mechanism 40 includes a deflection unit 41 (deflection means) configured to be rotatable about a central axis 42a, and deflects the laser light L1 toward the space by the deflection unit 41, and The configuration is such that reflected light from the detection object is deflected toward the photodiode 20. Furthermore, the rotation deflection mechanism 40 is configured to be driven by a motor 50 (drive means).

  The laser beam deflecting unit 430 (the laser beam deflecting unit 430 corresponds to an example of “direction deflecting unit” or “laser beam deflecting unit”) deflects the laser beam from the laser diode 10 toward the rotating deflection mechanism 40. It has a configuration and is configured to be swingable. Then, the function of changing the incident direction of the laser light L1 relative to the deflecting unit 41 and changing the direction of the laser light from the deflecting unit 41 with respect to the direction of the central axis 42a (that is, the vertical direction (Y-axis direction)). have.

  As shown in FIGS. 7, 8A, and 8B, the laser beam deflection unit 430 includes a mirror 431 that reflects the laser beam, a swing mechanism 435 that supports the mirror 431 so as to be swingable, and a swing mechanism. Piezo actuators 432a, 432b, 432c, and 432d that drive a mirror 431 supported by 435 are provided. The mirror 431 corresponds to an example of a “deflection member” that deflects laser light. The piezo actuators 432a, 432b, 432c, and 432d correspond to an example of an “actuator”.

  Each of the four piezo actuators 432a, 432b, 432c, and 432d is configured as a known piezo actuator that expands and contracts in accordance with an applied voltage, and each corner of the rectangular mirror 431 is opposite to the reflecting surface 431a. One end is attached in the vicinity (the vicinity of the corner of the mirror 431 corresponds to an example of a “specific part”), and the other end is fixed to the holding portion 438. The holding portion 438 is fixed to the case 3 and positioned at a predetermined position in the case 3. The piezoelectric actuators 432 a, 432 b, 432 c, and 432 d fixed to the holding portion 438 correspond to the applied voltage. By extending and contracting, the holder 438 is displaced relative to the holding portion 438 (that is, displaced relative to the case 3). The position in the vicinity of the part can be changed.

  The control circuit 70 (the control circuit 70 corresponds to an example of “control means” and “swing control means”) controls the driving state of the mirror 431 by the piezoelectric actuators 432a, 432b, 432c, and 432d, thereby deflecting the laser beam. The swing of the part 430 is controlled. Piezo actuator drive circuits (hereinafter also referred to as drive circuits) 436a, 436b, 436c, and 436d are electrically connected to the piezoelectric actuators 432a, 432b, 432c, and 432d, respectively. Each of these drive circuits 436a, 436b, 436c, 436d is configured to receive a control amount command from the control circuit 70, and from each drive circuit 436a, 436b, 436c, 436d, each piezoelectric actuator 432a, 432b, 432c, A voltage corresponding to the control amount from the control circuit 70 is output to 432d. In this way, the control circuit 70 controls the expansion and contraction of the piezoelectric actuators 432a, 432b, 432c, and 432d, and controls the attitude of the mirror 431 with respect to the laser light L1.

  The swing mechanism 435 is configured by a ball joint that connects the mirror 431 and the holding portion 438 that holds the mirror 431 in a spherical pair structure, and the ball portion 434 that is connected to the mirror 431 and the holding portion 438 are connected to each other. And a spherical shell portion 433 to be connected. In this configuration, the center 434a of the sphere portion 434 is always set at one position, and the sphere portion 434 can rotate in multiple directions while being accommodated in the spherical shell portion 433. The swing mechanism 435 configured as described above is adapted to the laser beam L1 while keeping the distance between the reflecting surface 431a and the center 434a of the ball portion 434 constant according to the expansion and contraction of the piezoelectric actuators 432a, 432b, 432c, and 432d. The tilt state of the mirror 431 is changed.

Next, detection processing in the laser radar device 400 will be described.
The detection process in FIG. 9 is started, for example, when the power is turned on or a predetermined operation is performed. First, the mirror 431 and the deflecting unit 41 are set to initial positions (S1). In the present embodiment, the position indicated by the solid line in FIGS. 6 and 7 is the initial position, and the motor 50 and the piezoelectric actuators 432a, 432b, 432c, and 432d are controlled so that the mirror 431 is at the position. Note that the deflecting unit 41 and the mirror 431 can be set to the initial positions in the standby state before the detection process. In such a configuration, the process of S1 can be omitted.

  Next, an object detection process is performed in the current setting state (a state where the initial position is set immediately after the start of the detection process) (S2). Specifically, the control circuit 70 controls the laser diode 10 to emit laser light, and the control circuit 70 reads an electric signal output from the photodiode 20 to read the current piezoelectric actuators 432a, 432b, 432c, and 432d. Whether there is an object to be detected in the direction corresponding to the setting (that is, the current setting of the mirror 431). When an electrical signal of a certain level or more is output from the photodiode 20, the distance to the detection object is calculated based on the time from the laser light projection by the laser diode 10 to the reception of the reflected light by the photodiode 20. . Further, based on the current setting of the piezo actuators 432a, 432b, 432c, and 432d, the direction in which the laser beam L1 is directed from the deflection unit 41 is calculated. Note that the calculated distance and direction can be output to a display unit (not shown).

  Thereafter, it is determined whether the mirror 431 has rotated by a predetermined range (S3). In the present embodiment, the motor 50 is configured to rotate the deflecting unit 41 by a predetermined angle (1 ° in the example of the present embodiment) by the control of the control circuit 70, and the deflecting unit 41 is constant. As the mirror 431 rotates over a “predetermined range” each time the angle (1 °) is rotated, the direction of the central axis (along the central axis 42a) is set at every constant angle (1 °) of the motor 50. (Vertical direction) scanning is performed. In the process of S3, it is determined whether or not the mirror 431 has been rotated by the “predetermined range” in the current setting state of the deflection unit 41. If the rotation has been completed, the current deflection unit is determined. Since the scanning in the vertical direction (that is, the direction of the central axis 42a) in the setting state 41 is completed, the process proceeds to Yes in S3.

  On the other hand, if the mirror 431 has not been rotated by the “predetermined range” in the current setting state of the deflection unit 41, the process proceeds to No in S3, and the deflection unit 41 is set to the “predetermined rotation range”. It is judged whether it is in. In this embodiment, an angle α formed by an imaginary straight line parallel to the laser beam emission direction from the laser diode 10 and an imaginary plane parallel to the reflecting surface 41a of the deflecting unit 41 is less than a predetermined threshold value. If the moving range is used as an example of the “predetermined rotating range” and the deflection unit 41 corresponds to the rotating range having such a relationship, the process proceeds to Yes in S4. On the other hand, if the deflection unit 41 does not fall within the predetermined rotation range, the process proceeds to No in S4.

  The control circuit 70 that performs the swing control changes the swing control of the laser beam deflecting unit 430 based on the rotation position of the deflecting unit 41. That is, when the deflection unit 41 does not fall within the “predetermined rotation range” (a virtual straight line parallel to the emission direction of the laser light L1 from the laser diode 10 and a virtual plane parallel to the reflection surface 41a of the deflection unit 41) When the angle α formed by exceeds a predetermined threshold value (for example, 10 °), the process proceeds to No in S4, and the mirror 431 is fixed around the rotation axis (first axis 437a) in the Z-axis direction. The expansion and contraction of the piezoelectric actuators 432a, 432b, 432c, and 432d is controlled so as to rotate at an angle. More specifically, when the deflection unit 41 does not correspond to the “predetermined rotation range”, the mirror 431 is rotated in the Z-axis direction (first axis 437a) with the reflecting surface 431a orthogonal to the XY plane. , And the direction of the laser beam L1 from the mirror 431 toward the deflecting unit 41 is changed along the XY plane. In FIG. 7, the position of the mirror 431 rotated around the first axis 437a from the solid line position is indicated by a two-dot chain line. Further, the path of the laser beam at that time is indicated by a broken line L1 ′ (see FIGS. 6 and 7).

  In order to perform the control to rotate the mirror 431 around the first axis 437a, for example, the expansion / contraction amount of the piezoelectric actuators 432a and 432c is made the same, and the expansion / contraction amount of the piezoelectric actuators 432b and 432d is made the same, and the piezoelectric actuator 432a. Control may be performed such that the piezo actuators 432b and 432d are contracted by an amount corresponding to the extension of 432c, or the piezo actuators 432a and 432c are contracted by an amount corresponding to the extension of the piezo actuators 432b and 432d.

  On the other hand, when the deflection unit 41 is in the “predetermined rotation range” (the virtual straight line parallel to the laser beam emission direction from the laser diode 10 and the virtual plane parallel to the reflection surface 41a of the deflection unit 41). If the angle α is equal to or smaller than a predetermined threshold value), the process proceeds to Yes in S4, and the piezo actuator is rotated so that the mirror 431 rotates by a certain angle around the second axis 437b (axis intersecting the first axis 437a). The expansion and contraction of 432a, 432b, 432c, and 432d is controlled. The second axis 437b is an axis that intersects any of the XY plane, the YZ plane, and the ZX plane. In the present embodiment, the second axis 437b is set along the diagonal line of the mirror 431. By rotating around the second axis 437b as described above, the direction of the laser beam from the mirror 431 toward the deflecting unit 41 is changed along a plane intersecting the XY plane.

  When the mirror 431 is rotated about the first axis 437a extending in the Z-axis direction, a virtual straight line parallel to the laser beam emission direction (X-axis direction) from the laser diode 10 and the reflecting surface 41a of the deflecting unit 41 are parallel. The smaller the angle α formed with the virtual plane, the smaller the change in the direction (vertical direction) of the central axis 42a of the laser light from the deflecting unit 41 toward the space. Therefore, in the present embodiment, when the deflection unit 41 is in the “predetermined rotation range”, the mirror 431 is not rotated around the first axis 437a, but the second axis along the diagonal line of the mirror 431. The mirror 431 is rotated around 437b, so that the laser beam changes greatly in the direction of the central axis 42a (vertical direction) even when the angle α is small. In order to perform such control, for example, the amount of expansion and contraction of the piezo actuators 432bc and 432c is the same, and the piezo actuator 432a is contracted by the amount that the piezo actuator 432a is expanded, or the amount that the piezo actuator 432d is expanded. Control may be performed so that the piezoelectric actuator 432a is contracted.

  Returning to FIG. 9, when the process proceeds to Yes in S3, the control of the control circuit 70 drives the motor 50 to further rotate the deflection unit 41 by a certain angle (1 °) (S7). The process after S2 is repeated in the setting state of the subsequent deflection unit 41. That is, the scanning in the vertical direction is performed again in a state where the deflection unit 41 is set to a new position. In the above example, “1 °” is illustrated as an example of the “constant angle”. However, the “constant angle” that is the rotation step of the deflection unit 41 may be a smaller angle or a larger angle. There may be.

  In the present embodiment, the mirror 431 supported by the swing mechanism 435 is driven by the piezoelectric actuators 432a, 432b, 432c, and 432d, and the driving state of the mirror 431 by the piezoelectric actuators 432a, 432b, 432c, and 432d is Control is performed by the control circuit 70. In this way, the part that deflects the laser light can be controlled to be swinging with high accuracy. Further, the entire laser beam deflecting unit 430 can be reduced in size.

  Further, by controlling the four piezo actuators 432a, 432b, 432c, and 432d, the position of the vicinity of the corner (specific part) of the mirror 431 is changed, and the attitude of the mirror 431 with respect to the laser light is controlled. In this way, a configuration capable of controlling the swing of the mirror 431 can be realized with a simple and small configuration.

  Further, a ball joint is provided for connecting the mirror 431 and the holding portion 438 for holding the mirror 431 in a spherical pair structure. In this way, the mirror 431 can be stably held in the apparatus and can be smoothly swung.

  Further, the swing control of the laser beam deflection unit 430 is changed based on the rotation position of the deflection unit 41. In this way, the swing control of the laser beam deflecting unit 430 can be controlled appropriately according to the rotational position of the deflecting unit 41.

  In addition, a condensing lens 62 (condensing means) that condenses the reflected light toward the photodiode 20 is provided on the optical path of the reflected light from the rotation deflection mechanism 40 to the photodiode 20. A wide range of reflected light can be used for detection without increasing the size of the detection means.

  Also, a filter 64 (light selection means) that transmits the reflected light and removes light other than the reflected light is provided on the optical path of the reflected light from the rotation deflection mechanism 40 to the photodiode 20. , Noise light can be suitably removed.

[ Reference Example 5 ]
Next, Reference Example 5 will be described.
FIG. 10 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 5 . FIG. 11A is an explanatory diagram conceptually showing a mirror unit and a displacement mechanism used in the laser radar apparatus of FIG. 10 from the side, and FIG. 11B conceptually shows the mirror unit from below. It is explanatory drawing. FIG. 12 is a flowchart illustrating a detection process in the laser radar apparatus of FIG.

As shown in FIG. 10, for a part also laser radar apparatus 500 of Example 5 is used the same components as in Reference Example 1. That is, the case 3, the light guide 4, the laser light transmission plate 5, the laser diode 10, the lens 60, the photodiode 20, the filter 64, the condenser lens 62, the rotation deflection mechanism 40, the motor 50, the rotation angle position sensor 52, for such a control circuit 70 has the same functions as and reference example 1 the same configuration as in reference example 1. Therefore, for the parts constituting the same configuration as in Reference Example 1 are denoted by the same reference numerals as in Reference Example 1, detailed description thereof will be omitted. In Reference Example 5 , the direction of the central axis 42a of the rotation deflection mechanism 40 is defined as the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is defined as the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction. Is the Z-axis direction. In Reference Example 5 , the emission direction of the laser light from the laser diode 10 is the X-axis direction.

In the reference example 5 , when the laser light L1 is generated from the laser diode 10 (laser light generation means), the reflected light of the laser light L1 reflected by the detection object is detected by the photodiode 20 (light detection means). There is no. Further, the rotation deflection mechanism 40 includes a deflection unit 41 (deflection means) configured to be rotatable about a central axis 42a, and deflects the laser light L1 toward the space by the deflection unit 41, and The configuration is such that reflected light from the detection object is deflected toward the photodiode 20. Furthermore, the rotation deflection mechanism 40 is configured to be driven by a motor 50 (drive means).

  The laser beam deflecting unit 530 (the laser beam deflecting unit 530 corresponds to an example of “direction deflecting unit” and “laser beam deflecting unit”), as shown in FIG. 11, the mirror unit 531 and the mirror unit 531 are displaced. Rotating mechanism 533 (rotating mechanism 533 corresponds to an example of a “displacement mechanism”). The mirror unit 531 is integrally provided with a plurality of mirrors 531a, 531b, 531c, 531d, 531e, 531f, 531g, and 531h, and has a rotation axis 532 in the Y-axis direction parallel to the central axis 42a of the rotation deflection mechanism 40. It is configured to be rotatable as a center. Each of the plurality of mirrors 531a to 531h includes flat reflecting surfaces 537a to 537h, and is arranged in a ring around the rotation shaft 532. The angles of the reflection surfaces 537a to 537h of the mirrors 531a to 531h with respect to the rotation shaft 532 are configured to be different from each other.

  The rotation mechanism 533 rotates the mirror unit 531 about the rotation shaft 532, and includes a motor 534 and a shaft portion 535 that connects the motor 534 and the mirror unit 531. As the motor 534, various motors such as a step motor can be used as long as the rotational position can be controlled. The rotation mechanism 533 is configured to displace the mirror unit 531 so that the plurality of mirrors 531a to 531h are sequentially arranged at positions where the laser light L1 from the laser diode 10 is incident, and the mirror unit 531 rotates. The angles of the reflecting surfaces 537a to 537h of the respective mirrors 531a to 531h when the laser beam L1 is disposed by the mechanism 533 are configured to be different from each other.

  The control circuit 70 (the control circuit 70 corresponds to an example of a control unit) controls the rotation mechanism 533 so that the mirrors 531a to 531h are arranged in order at positions where the laser light L1 from the laser diode 10 is irradiated. More specifically, the mirrors 531a to 531h are positioned in order so that the reflecting surfaces 537a to 537h are orthogonal to the XY plane at the incident position of the laser beam L1.

The inclination of each reflection surface 537a-537h can be set variously. In the example of the reference example 5 , when the laser beam L1 is reflected by the mirror 531a, the mirror 531a is set so that the reflection surface 537a is orthogonal to the XY plane at the incident position of the laser beam L1. The mirror 531a is configured such that an angle β1 formed by the laser beam L1 and the reflecting surface 537a at that time is 45 °. Similarly, when the laser beam L1 is reflected by the mirror 531b, the mirror 531b is set so that the reflecting surface 537b is orthogonal to the XY plane at the incident position of the laser beam L1, and the laser beam L1 and the reflecting surface at that time are set. The mirror 531b is configured such that an angle β2 formed with 537b is an angle (47 °) larger than the angle β1. Further, when the laser beam L1 is reflected by the mirror 531c, the mirror 531c is set so that the reflecting surface 537c is orthogonal to the XY plane at the incident position of the laser beam L1, and the laser beam L1 and the reflecting surface 537c at that time are set. The mirror 531c is configured so that the angle β3 formed by the above becomes an angle (49 °) larger than the angle β2. As described above, when the mirrors 531a to 531h are set so that the reflecting surfaces 537a to 537h are orthogonal to the XY plane at the incident position of the laser beam L1, the reflecting surfaces 537a to 537h and the laser beam L1 The angle formed by is different for each reflecting surface.

  The laser radar device 500 relatively changes the incident direction of the laser light L1 with respect to the deflecting unit 41 under such control of the control circuit 70, and changes the direction of the laser light L1 from the deflecting unit 41 with respect to the direction of the central axis 42a. Let In FIGS. 10 and 11A, the state in which the laser beam L1 is reflected by the mirror 531a is indicated by a solid line. The mirror unit 531 is rotated from that position, and a mirror (mirror 531d) different from the mirror 531a is shown. ) Is indicated by a broken line L1 ′.

Next, control of the laser radar device 500 will be described.
FIG. 12 is a flowchart illustrating the flow of detection processing in the laser radar device 500 of FIG. The detection process is started, for example, when the power is turned on or a predetermined operation is performed. First, the mirror unit 531 and the deflecting unit 41 are set to initial positions (S10). In Reference Example 5 , the position indicated by the solid line in FIGS. 10 and 11A is the initial position, and the motor 534 and the motor 50 are rotationally driven so that the mirror unit 531 and the deflecting unit 41 are at the positions. . Note that the mirror unit 531 and the deflecting unit 41 can be set to the initial positions in the standby state before the detection process. In such a configuration, the process of S10 can be omitted.

  Next, an object detection process is performed in the current setting state (a state where the initial position is set immediately after the start of the detection process) (S20). Specifically, the control circuit 70 controls the laser diode 10 to emit laser light, and the control circuit 70 reads the electrical signal output from the photodiode 20 to set the current set position and deflection unit of the mirror unit 531. It is confirmed whether or not there is an object to be detected in the direction corresponding to the current set position 41. When an electrical signal of a certain level or more is output from the photodiode 20, the distance to the detection object is calculated based on the time from the laser light projection by the laser diode 10 to the reception of the reflected light by the photodiode 20. . Further, the laser light L1 is directed from the deflection unit 41 based on the current setting position of the mirror unit 531 (that is, the angle of the current mirror disposed at the incident position of the laser light L1) and the current setting position of the deflection unit 41. Calculate the bearing. Note that the calculated distance and direction can be output to a display unit (not shown).

Thereafter, it is determined whether the mirror unit 531 has made one rotation (S30). In the reference example 5 , the control of the control circuit 70 causes the motor 50 to rotate the deflecting unit 41 by a predetermined angle (1 ° in the example of the reference example 5 ) by a predetermined angle, and the deflecting unit 41 has a fixed angle (1 °). ) The mirror unit 531 is rotated once every time it is rotated. That is, each time the deflection unit 41 rotates by a certain angle, the mirrors are switched so that all of the plurality of mirrors 531a to 531h are sequentially arranged at the laser beam incident positions, and the direction of the reflected light from the mirror unit 531 Are switched in stages. In this way, scanning in the direction of the central axis (longitudinal direction along the central axis 42a) is performed at every constant angle (1 °) of the motor 50, so that the mirror unit 531 has completed one rotation. In this case, the scanning in the vertical direction (that is, the direction of the central axis 42a) in the current setting state of the deflection unit 41 is completed. Accordingly, in this case, the process proceeds to Yes in S30. On the other hand, if the mirror unit 531 has not completed one rotation in the current setting state of the deflection unit 41, the process proceeds to No in S30, and the mirror unit is arranged so that the next mirror is arranged at the incident position of the laser beam. 531 is rotated by a certain angle (45 ° in Reference Example 5 ) (S40), and the detection process of S20 is repeated in the state of the mirror unit 531 after the rotation by the certain angle.

  When the process proceeds to Yes in S30, the control unit 70 controls the motor 50 to further rotate the deflecting unit 41 by a certain angle (1 °) (S50). In the set state, the processes after S20 are repeated. That is, the scanning in the vertical direction is performed again in a state where the deflection unit 41 is set to a new position.

  In the above example, “1 °” is illustrated as an example of the “constant angle”. However, the “constant angle” that is the rotation step of the deflection unit 41 may be a smaller angle or a larger angle. There may be. In the above example, the mirror unit 531 having eight mirrors is illustrated, but the number of mirrors may be larger or smaller.

In Reference Example 5 , the mirror unit 531 is controlled so that the plurality of mirrors 531a to 531h are sequentially arranged at the positions where the laser light L1 from the laser diode 10 is incident, and the incident direction of the laser light with respect to the deflecting unit 41 is set to be relative. Is changing. In this way, the “direction changing unit” does not have a complicated configuration or a large configuration. Further, by controlling the mirror unit 531 so that the plurality of mirrors 531a to 531h are arranged in order, the incident direction of the laser light with respect to the deflecting unit 41 can be changed relatively, so that complicated control is not used. The direction of the laser beam from the deflection unit 41 can be changed with respect to the direction of the central axis.

  In addition, since the mirror disposed at the incident position of the laser beam L1 can be switched by controlling the rotation of the mirror unit 531, the mirror can be easily switched quickly and accurately.

  Further, the motor 50 is configured to rotate the deflecting unit 41 by a certain angle, and every time the deflecting unit 41 rotates by a certain angle, all of the plurality of mirrors 531a to 531h are brought to the incident position of the laser beam L1. The mirrors are switched so that they are arranged in order, and scanning in the direction (vertical direction) of the central axis 42a is performed at every fixed angle at which the deflection unit 41 rotates. If it does in this way, it will become possible to perform a three-dimensional detection, without rotating the deflection | deviation part 41 large at once, and the load of the rotation deflection | deviation mechanism 40 and the motor 50 can be suppressed.

[ Reference Example 6 ]
Next, Reference Example 6 will be described.
FIG. 13 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 6 . FIG. 14A is an explanatory diagram for explaining a main part of the tilting means used in the laser radar apparatus of FIG. 13, and FIG. 14B describes a part of the tilting means different from FIG. 14A. It is explanatory drawing. FIG. 15A is an explanatory diagram conceptually illustrating a tilting mechanism, a rotation deflection mechanism, and the like used in the laser radar device of FIG. 13, and FIG. 15B conceptually illustrates the configuration of the shaft portion. It is explanatory drawing to do. FIG. 16 is a flowchart illustrating the flow of detection processing in the laser radar apparatus of FIG.

As shown in FIG. 13, for a part also laser radar apparatus 600 of Example 6 is used the same parts as in Reference Example 1. That is, the case 3, the light guide 4, the laser light transmitting plate 5, the laser diode 10, the lens 60, the photodiode 20, the filter 64, the condensing lens 62, the rotation angle position sensor 52, the control circuit 70, and the like are reference examples. 1 and the same function as in Reference Example 1 . Therefore, for the parts constituting the same configuration as in Reference Example 1 are denoted by the same reference numerals as in Reference Example 1, detailed description thereof will be omitted. Further, the motor 650 differs from the shaft portion 42 of the reference example 1 in the configuration of the shaft portion 642 and is substantially the same as the reference example 1 except for the shaft portion. Therefore, the portion of the shaft portion 642 will be described with emphasis, and descriptions other than the shaft portion will be omitted.

In Reference Example 6 , the direction of the central axis 642a of the rotation deflection mechanism 640 is the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction is Z Axial direction. In Reference Example 6 , the emission direction of the laser light from the laser diode 10 is the X-axis direction. In FIGS. 13, 14A, and 15A, the central axis 642a is conceptually indicated by a one-dot chain line.

Also in the laser radar apparatus 600 of Reference Example 6 , when the laser light L1 is generated from the laser diode 10 (laser light generating means), the reflected light (see reference numeral L2) of the laser light L1 reflected by the detection object is used as the photodiode 20. It is configured to detect by (light detection means). The laser beam L1 from the laser diode 10 is reflected at a substantially right angle by the mirror 630, and enters the vicinity of the center of the deflection unit 641 provided in the rotation deflection mechanism 640. The rotation deflection mechanism 640 includes a deflection unit 641 (deflection means) configured to be rotatable about a central axis 642a, deflects the laser light L1 toward the space by the deflection unit 641, and detects a detection object. The reflected light from the light is deflected toward the photodiode 20. Further, the rotation deflection mechanism 640 is configured to be driven by a motor 650. In the reference example 6 , the motor 650 and the control circuit 70 constitute “driving means”.

The laser radar device 600 of the reference example 6 is greatly different from the laser laser device 1 (FIG. 1) of the reference example 1 in the configuration of the rotation deflection mechanism 640. The deflection unit 641 of the rotation deflection mechanism 640 is configured as a plate-like mirror and is configured to be rotatable about a predetermined center axis 642a, while also rotating around an axis 641a orthogonal to the center axis 642a. It is possible. More specifically, a shaft portion 642 configured as a part of the rotor of the motor 650 extends in the Y-axis direction, and the deflecting portion 641 is centered on a shaft 641a along the XZ plane at the tip portion of the shaft portion 642. It is supported so that it can rotate as. 13 and 15, the axis 641a that is the rotation center of the deflecting unit 641 is conceptually indicated by a point, and in FIG. 14A, the axis 641a is conceptually indicated by a one-dot chain line.

  Various configurations can be adopted as the configuration in which the deflecting portion 641 is rotatably supported by the shaft portion 642. For example, as shown in FIG. In FIG. 14A, a pair of bearings 645 and 645 are provided on a support frame 643 fixed to the tip end shaft portion 642 b of the shaft portion 642, and the bearings 645 and 645 protrude from the side of the deflection portion 641. The convex portions 644 and 644 are rotatably supported. The shaft portion 642 and the support frame 643 that supports the deflecting portion 41 so as to be rotatable correspond to an example of a “tilting mechanism”, and support the deflecting portion 641 so as to be tiltable about the shaft 641a. In addition, in FIG. 13 etc., the structure of such a tilting mechanism is simplified and conceptually shown.

Further, the laser radar device 600 of Reference Example 6 includes a cam 681 that rotates while contacting a predetermined portion of the deflecting unit 641 (specifically, near the end of the deflecting unit 641), and a shaft that connects the cam 681 to the motor 682. And the cam 681 and the shaft 683 constitute a cam mechanism 680. The cam mechanism 680 is configured to give a linear motion to a predetermined location (near the end of the deflecting portion 641) by the rotational motion of the cam 681. Further, a motor 682 for rotationally driving the cam mechanism 680 is provided, and the motor 682 corresponds to an example of “cam mechanism driving means”. The cam mechanism 680 and the motor 682 correspond to an example of “vibration means”.

  Further, the vibration means (cam mechanism 680 and motor 682) and the tilt mechanism (the shaft portion 642 and the support frame 643) described above constitute “direction changing means” and “tilt means”, and the entire deflection portion 641 is centered. It functions to tilt around an axis in a direction intersecting the axis 642a (that is, the axis 641a). The rotation of the motor 682 is controlled by the control circuit 70. The control circuit 70 corresponds to an example of “control means” and “tilt control means”, and controls the motor 682 (cam mechanism driving means). As a result, the vibration at a predetermined location (near the end) of the deflecting portion 641 is controlled.

Further, in Reference Example 6 , a cam mechanism 680 and a motor 682 corresponding to “vibrating means” are fixed to a frame 685 attached to the shaft portion 642 and rotate integrally with the deflecting portion 641. In addition, the motor 682 is configured to receive power supply from an external power source (such as a commercial power source 687 provided outside the laser radar device 600 in the example of FIG. 15) that does not rotate integrally with the deflecting unit 641. More specifically, as shown in FIGS. 15A and 15B, the shaft portion 642 includes a hollow cylindrical shaft portion 642c and a distal end shaft portion 642b continuous to the distal end side of the cylindrical shaft portion 642c. Thus, the power supply line 686 for supplying power to the motor 682 is configured to pass from the deflection portion 641 side of the cylindrical shaft portion 642c to the lower side of the motor 650 through the inside of the cylindrical shaft portion 642c. Yes. The power supply line 686 is electrically connected to the commercial power supply 687. In FIG. 15A, various circuits (such as a power supply circuit) interposed between the commercial power supply 687 and the motor 682 are omitted. Further, in FIG. 15A, the rotor parts and stator parts other than the shaft portion 642 in the motor 650 are omitted, but various known motors can be used as long as the motor can control the rotational position, such as a stepping motor. Can be adopted.

  In the rotation deflection mechanism 640, when the shaft portion 642 rotates, the power supply line 686 relatively moves in the shaft portion 682 as indicated by a two-dot chain line in FIG. . FIG. 15B conceptually shows a state in which the configuration of the shaft portion 642 is cut at the AA position.

Next, control of the laser radar device 600 will be described.
FIG. 16 is a flowchart illustrating the flow of detection processing in the laser radar device 600. This detection process is started, for example, when the power is turned on or a predetermined operation is performed. First, the cam 681 and the deflection unit 641 are set to initial positions (S100). In Reference Example 6 , the position indicated by the solid line in FIG. 13 and FIG. 15A is the initial position, and the motor 682 and the motor 650 are rotationally driven so that the cam 681 and the deflection unit 641 are at the positions. Note that the cam 681 and the deflecting unit 641 can be set to the initial positions in the standby state before the detection process. In such a configuration, the process of S100 can be omitted.

  Next, an object detection process is performed in the current setting state (a state where the initial position is set immediately after the start of the detection process) (S110). Specifically, the control circuit 70 controls the laser diode 10 to emit laser light, and the control circuit 70 reads the electrical signal output from the photodiode 20, and the current tilt and rotation position of the deflecting unit 641. It is confirmed whether or not there is an object to be detected in the direction corresponding to (that is, the direction corresponding to the current rotation angle of the motor 682 and the motor 650). When an electrical signal of a certain level or more is output from the photodiode 20, the distance to the detection object is calculated based on the time from the laser light projection by the laser diode 10 to the reception of the reflected light by the photodiode 20. . Further, based on the current inclination and rotation position of the deflecting unit 641 (that is, based on the current rotation angle of the motor 682 and the motor 650), the direction in which the laser light L1 travels from the deflecting unit 641 is calculated.

As shown in FIG. 14B, the cam 681 used in Reference Example 6 is configured to support the deflection unit 641 at a plurality of positions P1 to P8, and at which position the cam 681 supports the deflection unit 641. Thus, the inclination angle of the deflecting portion 641 is determined. Each of the positions P1 to P8 has a different distance from the rotation center 681a of the cam 681. As the support position of the deflection unit 641 by the cam 681 changes to P1, P2, P3,. The portion 641 is gradually moved away so that the inclination changes. The outer peripheral surface of the cam 681 (the surface in contact with the deflecting portion 641) is a curved surface over almost the entire periphery, and the radii of curvature at the positions P1 to P8 are different from each other. The outer peripheral surface of the cam 681 is configured such that the radius of curvature gradually increases as it proceeds from P1 to P2, and further, the radius of curvature gradually increases as it proceeds from P2, P3, P4, P5, P6, P7, and P8. It is configured. The cam mechanism 680 is configured such that the cam 681 is rotated in the direction of the arrow F1 by the motor 682. The cam 681 slides while abutting against the deflection unit 641, and the abutting position is changed from P1 to P2, P3, Change in order with P4. After the contact position becomes P8, it further rotates, and the contact position is set to P1 again.

  According to such a cam mechanism 680, when the rotational position of the cam 681 by the motor 682 is determined, the contact position between the cam 681 and the deflection unit 641 is determined, and the inclination angle of the deflection unit 641 is determined to be one angle. It becomes. The control circuit 70 calculates the azimuth from which the laser beam L1 travels from the deflecting unit 641 based on the rotational position of the motor 682 and the rotational position of the motor 650. Note that the calculated distance and direction can be output to a display unit (not shown).

Returning to FIG. 16 and continuing the description, it is determined whether or not the cam 681 has made one rotation after the detection process of S110 is completed (S120). In the reference example 6 , the motor 650 rotates the deflection unit 641 by a predetermined angle (1 ° in the example of the reference example 6 ) by the control circuit 70 and the deflection unit 641 is rotated by a certain angle (1 °). ) The cam 681 is rotated once for each rotation. That is, every time the deflecting unit 641 rotates by a fixed angle about the central axis 642a, scanning in the direction (vertical direction) of the central axis 642a is performed. When it is determined in S120 that the cam 681 has completed one rotation, the scanning in the vertical direction at the current rotational position of the motor 650 (that is, the current rotational position of the deflection unit 641 around the central axis 642a). Has ended. Accordingly, in this case, the process proceeds to Yes in S120. On the other hand, if the cam 681 has not completed one rotation at the current rotational position of the motor 650, the process proceeds to No in S120, and the cam 681 is rotated by a certain angle (45 ° in Reference Example 6 ) (S130). The detection process of S110 is repeated while the deflection unit 641 is tilted after being rotated by a certain angle.

When the process proceeds to Yes in S120, it is determined whether the rotation setting of the motor 650 is normal rotation or reverse rotation (S140). In Reference Example 6 , clockwise rotation as viewed from above is normal rotation, and counterclockwise rotation is reverse rotation. When the forward rotation is set, the process proceeds to Yes in S140, and the deflection unit 641 is rotated forward by a certain angle (here, 1 °) (S150). On the other hand, if it is set to inversion, the process proceeds to No in S140, and the deflection unit 641 is inverted by a certain angle (here, 1 °) (S160). Note that the rotation setting of the motor 650 is set to normal rotation by default, and the setting is changed by a setting switching process (S180) described later.

After the process of S150 or S160 is completed, it is determined whether the deflecting unit 641 has rotated a certain rotation range (180 ° in this case) (S170). That is, when the current setting is the forward rotation setting, it is determined whether the motor 650 has rotated forward in a certain rotation range (180 °) in the forward rotation setting, and when the current setting is the reverse setting, In the reversal setting, it is determined whether or not the motor 650 is reversed within a certain rotation range (180 °). If it is determined that the deflection unit 641 has rotated a predetermined rotation range about the central axis 642a, the process proceeds to Yes in S170, and setting switching processing is performed (S180). The setting switching process is a process of changing the setting to the reverse setting when the current setting is the normal setting, and changing to the normal setting when the current setting is the reverse setting. Such normal rotation setting or reverse setting information is stored in a memory (not shown) or the like and used in the determination process of S140. Thus, in the reference example 6, and controls the motor 650 by the control circuit 70, the deflection member 641 rotationally drives the rotating deflection mechanism 640 for reciprocating rotation at a constant rotational range.

  After the process of S180 is completed or when the process proceeds to No in S170, the process after S110 is repeated by the deflecting unit 641 after the rotation in S150 or S160. That is, the scanning in the vertical direction is performed again with the deflection unit 641 set to a new position.

  In the above example, “1 °” is illustrated as an example of the “constant angle” in S150 and S160. However, the “constant angle” that is the rotation step of the deflecting unit 641 may be an angle smaller than this. A large angle may be used. In the above example, the rotation step of the cam 681 is set to 45 °. However, the angle may be smaller or larger.

In Reference Example 6 , the deflecting unit 641 is tiltably supported by the tilting mechanism, a predetermined portion of the deflecting unit 641 is vibrated by the cam mechanism 680 and the motor 682, and the vibration is controlled by the control circuit 70. In this way, the deflection unit 641 can be stably held, and the tilting of the deflection unit 641 can be suitably controlled.

  Further, the cam mechanism 680 and the motor 682 constitute vibration means, and these are controlled by the control circuit 70. Therefore, the deflection unit 641 can be vibrated satisfactorily with a simple and small configuration.

  Further, the cam mechanism 680 and the motor 682 corresponding to the vibration means and the deflecting unit 641 rotate integrally, and are configured to receive power supply from an external power source that does not rotate integrally with the deflecting unit 641. Yes. Therefore, the structure of the rotation part including the deflection part 641 can be simplified. In addition, since the motor 682 and the external power source are electrically connected by the power supply line 686 and the deflecting unit 641 reciprocates within a certain rotation range, the vibration means (the cam mechanism 680 and the motor 682). The power can be satisfactorily supplied from the external power source to the vibration means while the structure is rotated.

[ Reference Example 7 ]
Next, Reference Example 7 will be described. FIG. 17 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 7 . 18A is an explanatory diagram for explaining a main part of the tilting means used in the laser radar device of FIG. 17, and FIG. 18B is an explanatory diagram showing a tilt state different from FIG. 18A. is there.

As shown in FIG. 17, for a part also laser radar apparatus 700 of Example 7 is used the same parts as in Reference Example 1. That is, the case 3, the light guide 4, the laser light transmitting plate 5, the laser diode 10, the lens 60, the photodiode 20, the filter 64, the condensing lens 62, the rotation angle position sensor 52, the control circuit 70, and the like are reference examples. 1 and the same function as in Reference Example 1 . Therefore, for the parts constituting the same configuration as in Reference Example 1 are denoted by the same reference numerals as in Reference Example 1, detailed description thereof will be omitted. Further, the mirror 630, the deflecting unit 641, the motor 650, and the shaft unit 642 have the same configuration as that of the reference example 6 and have the same function. Further, the tilting mechanism has the same configuration as that of the reference example 6 (that is, the configuration of FIG. 14A).

Also in Reference Example 7 , the direction of the central axis 642a of the rotation deflection mechanism 640 is the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction is Z Axial direction. Also in Reference Example 7 , the emission direction of the laser light from the laser diode 10 is the X-axis direction. In FIG. 17, the central axis 642a is conceptually indicated by a one-dot chain line. Further, as in Reference Example 6 , the axis 641a that is the center of tilting by the tilting mechanism is conceptually indicated by dots.

Also in the laser radar device 700 of Reference Example 7 , when the laser light L1 is generated from the laser diode 10 (laser light generation means), the reflected light of the laser light L1 reflected by the detection object (see reference symbol L2) is applied to the photodiode 20. It is configured to detect by (light detection means). The laser beam L1 from the laser diode 10 is reflected at a substantially right angle by the mirror 630, and enters the vicinity of the center of the deflecting unit 641. The rotation deflection mechanism 740 includes a deflection unit 641 (deflection means) configured to be rotatable about a central axis 642a, deflects the laser light L1 toward the space by the deflection unit 641, and detects a detection object. The reflected light from the light is deflected toward the photodiode 20. Further, the rotation deflection mechanism 740 has a configuration in which a deflection unit 641 constituting a part thereof is driven by a motor 650.

The rotation deflection mechanism 740 of the reference example 7 is different from the reference example 6 in the configuration of the vibration unit and the frame 742 that holds the vibration unit, and the other configuration is the same as that of the rotation deflection mechanism 640 in the reference example 6 . That is, similarly to the reference example 6 , the deflecting unit 641 is configured as a plate-like mirror and configured to be rotatable about the central axis 642a. Further, the deflecting portion 641 can be rotated around an axis 641a orthogonal to the central axis 642a.

In Reference Example 7 , as shown in FIG. 18A, a vibration device 780 (vibration device 780 is an example of “vibration means”) by a rotation member 781 and a motor 782 that rotates the rotation member 781 via a shaft 783. Corresponding). The rotating member 781 is configured to be rotatable about a shaft 782a that is the rotation center of the motor 782, and has an upper position support portion 781a in which the distance from the outer peripheral portion to the shaft 782a is increased, and from the outer peripheral portion to the shaft 782a. And a lower position support portion 781b that is closer in distance. The upper position support portion 781a is a portion that pushes up and supports the end of the deflection portion 641 as shown in FIG. 18A, and the lower position support portion 781b is deflected as shown in FIG. 18B. It is a part which lowers and supports the edge part of the part 641 below. The vibration device 780 configured as described above has a state in which the deflection portion 641 is supported by the upper position support portion 781a as shown in FIG. 18A and a lower position as shown in FIG. Switching to a state in which the deflecting unit 641 is supported by the support unit 781b causes a predetermined portion (near the end) of the deflecting unit 641 to vibrate. In Reference Example 7 , such a vibrating means and the tilting mechanism similar to that shown in FIG. 14A constitute “direction changing means” and “tilting means”, and the entire deflection unit 641 is orthogonal to the central axis 642a. It functions to tilt around the direction axis (ie, axis 641a). The rotation of the motor 782 is controlled by the control circuit 70, and this control circuit 70 corresponds to an example of “control means” and “tilt control means”. By controlling the motor 782, the deflection unit The vibration of a predetermined portion 641 (near the end) is controlled. The motor 782 can be configured by various motors such as a stepping motor and a DC motor.

  As shown in FIG. 18B, the deflecting portion 641 is formed with an extending portion 742 extending downward, and the extending portion 742 is guided by a guide portion 744 fixed to the frame 743. It is designed to be displaced. Specifically, a protrusion 742 a is formed at the end of the extension part 742, and the protrusion 742 a moves in the guide groove 744 a along the guide groove 744 a of the guide part 744. The extending part 742 and the guide part 744 restrict the predetermined portion of the deflecting part 641 from vibrating beyond a certain vibration range, and corresponds to an example of “regulating means”. In FIG. 17 and FIG. 18A, the extending portion 742 and the guide portion 744 are omitted.

Furthermore, in Reference Example 7 , a sensor 745 for detecting the inclination of the deflecting unit 641 is provided. The sensor 745 is a known position sensor that detects the position of the protrusion 742a. That is, when the position of the protrusion 742a is determined, the deflection unit 641 is determined to have a single inclination. Therefore, the sensor 745 detects the inclination of the deflection unit 641 by detecting the position of the protrusion 742a.

Also in the reference example 7 , the deflecting unit 641 is rotated at a constant angle (for example, 1 °) about the central axis 642a, and scanning in the direction (vertical direction) of the central axis 642a is performed at every constant angle. It is like that. The vertical scanning is performed by vibrating the deflection unit 641 by the vibration device 780. That is, when the deflection unit 641 is vibrated by the vibration device 780, the inclination of the deflection unit 641 changes from the solid line position in FIG. When light is detected by the photodiode 20 in the process of changing the inclination, the inclination of the deflection unit 641 can be grasped by reading the value of the sensor 745 at the time of detection by the control circuit 70. Since the control circuit 70 can grasp the rotational position of the motor 650 at that time (when light is detected by the photodiode 20), the detection object is detected based on the value of the sensor 745 and the rotational position of the motor 650 when light is detected by the photodiode 20. Can be calculated. Further, the distance to the detection object can be calculated based on the time from the laser light projection by the laser diode 10 to the light reception by the photodiode 20 as in the other reference examples .

Also in Reference Example 7 , the vibration device 780 (vibration means) rotates integrally with the deflecting unit 641 and supplies power from an external power source (commercial power supply 687) that does not rotate integrally with the deflecting unit 641. The vibration receiving device 780 and the external power source are electrically connected by a power supply line 686. The configuration in which the power supply line 686 is arranged is the same as that shown in FIG. 15A. The power supply line 686 is arranged inside the cylindrical shaft portion 642c of the shaft portion 642 from the vibration device 780 and extends downward from the motor 650. The commercial power supply 687 is connected. Similarly to the reference example 6 , the motor 650 and the control circuit 70 corresponding to the “driving means” rotate the rotation deflection mechanism 740 so as to reciprocate the deflection unit 640 within a certain rotation range (for example, 180 °). To drive.

In Reference Example 7 , the deflecting unit 641 is tiltably supported by the tilting mechanism, a predetermined portion of the deflecting unit 641 is vibrated by the vibration device 780, and the vibration is controlled by the control circuit 70. In this way, the deflection unit 641 can be stably held, and the tilting of the deflection unit 641 can be suitably controlled.

  Further, the restricting means restricts the predetermined portion of the deflecting portion 641 from vibrating beyond a certain vibration range. In this way, it is not necessary to change the incident direction of the laser beam to the deflecting unit 641 more than necessary, and the direction of the laser beam from the deflecting unit 641 is within an appropriate range with respect to the direction (vertical direction) of the central axis 642a. Can be changed.

  The vibration device 780 is configured to receive power from an external power source that rotates integrally with the deflecting unit 641 and that does not rotate integrally with the deflecting unit 641. Therefore, the structure of the rotation part including the deflection part 641 can be simplified. In addition, since the vibration device 780 and the external power source are electrically connected by the power supply line 686 and the deflecting unit 641 reciprocates within a certain rotation range, the vibration device 780 is configured to rotate. However, power can be supplied satisfactorily from an external power source.

[ Reference Example 8 ]
Next, Reference Example 8 will be described. FIG. 20 is a cross-sectional view schematically illustrating a laser radar apparatus according to Reference Example 8 . FIG. 21 is a partial cross-sectional schematic diagram illustrating a rotation deflection mechanism in the laser radar apparatus of FIG. 20, and FIG. 22 is a diagram of the deflection unit and the holding base of the rotation deflection mechanism of FIG. It is. Reference Example 8 is different from Reference Examples 6 and 7 in the configuration of the rotation deflecting means and the vibration means, and is otherwise the same as Reference Examples 6 and 7 . Therefore, different parts will be described mainly, and detailed description of similar parts will be omitted.

As shown in FIG. 20, also the laser radar apparatus 800 of Example 8, for some uses the same parts as in Reference Example 1. That is, the case 3, the light guide 4, the laser light transmitting plate 5, the laser diode 10, the lens 60, the photodiode 20, the filter 64, the condensing lens 62, the rotation angle position sensor 52, and the like are the same as those in the reference example 1 . A configuration is used. Accordingly, parts having the same configuration as that of the first embodiment are denoted by the same reference numerals as those of the reference example 1, and detailed description thereof is omitted. Note that the motor 850 is substantially the same as the first embodiment except for the shaft portion, unlike the shaft portion 42 of the reference example 1 in the configuration of the shaft portion 842. The control circuit 70 has the same device configuration as that of the reference example 1 (that is, a microcomputer equipped with a CPU), and only the control target and the control method are different from those of the reference example 1 .

In Reference Example 8 , the direction of the central axis 842a of the rotation deflection mechanism 840 is the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction is Z Axial direction. In Reference Example 8 , the emission direction of the laser light from the laser diode 10 is the X-axis direction. 20 and 21, the central axis 842a is conceptually indicated by a one-dot chain line.

Also in the laser radar device 800 of Reference Example 8 , when the laser light L1 is generated from the laser diode 10 (laser light generating means), the reflected light of the laser light L1 reflected by the detection object (see reference symbol L2) is used as the photodiode 20. It is configured to detect by (light detection means). The laser light L1 emitted from the laser diode 10 in the X-axis direction is reflected at a substantially right angle by the mirror 830, and enters the vicinity of the center of the deflection unit 841 provided in the rotation deflection mechanism 840. The rotation deflection mechanism 840 includes a deflection unit 841 (deflection means) configured to be rotatable about a central axis 842a, deflects the laser light L1 toward the space by the deflection unit 841, and detects a detection object. The reflected light from the light is deflected toward the photodiode 20. Further, the rotation deflection mechanism 840 is configured to be driven by a motor 850. In the reference example 8 , the motor 850 and the control circuit 70 function as “driving means”, and these rotationally drive the deflection unit 841 of the rotation deflection mechanism 840.

Further, the laser radar device 800 of Reference Example 8 is greatly different from the laser laser device 1 (FIG. 1) of Reference Example 1 in the configuration of the rotation deflection mechanism 840. As shown in FIGS. 21 and 22, the rotation deflection mechanism 840 includes a deflection unit 841 made of a mirror, a holding table 843 that holds the deflection unit 841, and a cylindrical shaft member 842 that is connected to the holding table 843. It has. The deflecting unit 841 includes a reflecting surface 841a that is inclined with respect to the central axis 842a that is the rotation center of the deflecting unit 841, and can be rotated to the holding table 843 with a position shifted from the central axis 842a as a rotation center. Is held in.

  The cylindrical shaft member 842 is configured as a rotation shaft of the motor 850, is configured in a cylindrical shape, and a holding base 843 is connected to one end side. The holding base 843 includes a plate-like member 844 configured in a rectangular shape, and bearings 845 and 845 provided in pairs on both sides in the width direction on one end side of the plate-like member 844. 844 is arranged such that its plate surface is orthogonal to the central axis 842a. A hole 844a communicating with the hole 842b of the cylindrical shaft member 842 is formed at a position connected to the cylindrical shaft member 842 in the plate-shaped member 844, and a plate-like shape is formed from the inside of the hole 842b of the cylindrical shaft member 842. A piezo actuator 801 to be described later is arranged in a form extending inside the hole 844a of the member 844.

  On both sides in the width direction of the deflecting portion 841, convex portions 841b and 841b configured integrally with the deflecting portion 841 are provided in a form protruding to the side of the deflecting portion 841, and the bearings 845 and 845 are By holding these convex portions 841b and 841b, the deflection portion 841 is rotatably supported around the rotation shaft 845a. The rotation mechanism 846 composed of the bearings 845, 845 and the convex portions 841b, 841b corresponds to an example of a “tilting mechanism”, and is deflected so as to be tiltable about an axis (rotating shaft 845a). The part 841 is supported. The deflection unit 841 and the holding base 843 that are connected via such a rotation mechanism 846 rotate integrally with the cylindrical shaft member 842 that is rotationally driven by the motor 850.

  The piezo actuator 801 is configured as a known piezo actuator that expands and contracts in accordance with an applied voltage, and includes a piezo element 801a that functions as the drive section, and a drive circuit 801b that drives the piezo element 801a. It has a configuration. The drive circuit 801b is electrically connected to the control circuit 70 via a signal line, and is configured to apply a voltage to the piezo element 801a based on a signal from the control circuit 70. Specifically, a control amount is given from the control circuit 70 to the drive circuit 801b, and a voltage corresponding to the control amount is output from the drive circuit 801b to the piezo element 801a.

  In the example of FIG. 21, the piezo element 801a corresponds to an example of “vibrating means” and “expandable member”, is configured to be disposed in the cylinder of the cylindrical shaft member 842, and expands and contracts according to the applied voltage, and the deflecting unit 841. The structure which press-acts with respect to is comprised. The drive circuit 801b corresponds to an example of “extensible member driving means”, and functions to expand or contract the piezo element 801a by applying a voltage to the piezo element 801a. The control circuit 70 corresponds to an example of a “tilt control unit” and controls vibration of a “predetermined portion” (that is, a portion pushed by the piezo element 801a) of the deflection unit 841 by controlling the drive circuit 801b. doing. The rotation mechanism 846 and the piezo element 801 correspond to examples of “direction changing means” and “tilting means”, and the drive circuit 801b and the control circuit 70 correspond to examples of “control means” and “tilt control means”. .

  In the rotation deflection mechanism 840 configured as described above, the amount of control applied to the drive circuit 801b from the control circuit 70 is adjusted, so that the piezo element 801 with respect to the deflection unit 841 rotatably held by the rotation mechanism 846b. The degree of extrusion (that is, the degree of expansion / contraction) is adjusted, and the deflecting portion 841 is tilted about the axis (that is, the rotation axis 845a) that is orthogonal to the center axis 842b. Due to this tilting, the incident direction of the laser beam L1 with respect to the reflecting surface 841a of the deflecting unit 841 changes relatively, and the direction of the laser beam from the deflecting unit 841 changes with respect to the direction of the central axis 842a (ie, the vertical direction). It becomes. In the example of FIG. 20, when the deflecting unit 841 is at the solid line position, the laser light travels to the space along the path indicated by the solid line, and the region between the reference symbol L2 is captured by the deflecting unit 841 as the reflected light from the detection object. It will be. When the piezo element 801 is controlled to change to the position indicated by the broken line, the laser beam travels to the space along the path indicated by the symbol L1 ′, and in this case, the reflected light in the region between the symbols L2 ′ is taken into the deflecting unit 1241. Will be.

In this configuration, since the inclination of the deflection unit 841 is determined according to the length of the piezo element 801, the control circuit 70 that controls the length (ie, the degree of expansion / contraction) of the piezo element 801 is based on the control amount given to the drive circuit 801b. Thus, the inclination of the deflection unit 841 can be calculated with high accuracy. Further, since the control circuit 70 controls the motor 850, the rotation position of the cylindrical shaft member 842 can also be calculated. As a result, the control circuit 70 determines the three-dimensional direction of the laser light from the deflection unit 841 toward the space. It can be calculated. The distance detection method is the same as in Reference Example 1 .

In the reference example 8 , the deflecting unit 841 is configured to rotate independently of the piezo element 801a, and the piezo element 801a vibrates with respect to the deflecting unit 841 at a fixed position in the laser radar device 800. It is configured to operate. Specifically, the piezo element 801 a is fixed to the case 3 directly or via another member via the holding member 803 inside the cylindrical shaft member 842, and the cylindrical shaft member 842 is around the piezo element 801. It is the structure which rotates in.

In the configuration of Reference Example 8 exemplified above, a piezo element 801a (expandable member) that transmits force to the deflecting unit 841 is provided, and this piezo element 801a is expanded or contracted by a drive circuit 801b (expandable member driving means). Yes. In this way, a configuration capable of driving a part of the deflection unit 841 can be suitably realized. In addition, since the drive circuit 801b is controlled by the control circuit 70 (tilt control means), thereby controlling the vibration at a predetermined location, the tilt of the deflecting portion 841 can be controlled with high accuracy, and as a result, the three-dimensional detection can be accurately performed. High and good.

  Further, since the expansion / contraction means is composed of the piezo element 801a, it is not necessary to enlarge the expansion / contraction means, and vibration control can be performed with higher accuracy.

Next, another example 1 of the reference example 8 will be described.
FIG. 23 shows a first modification of FIG. 21, in which the expansion / contraction member is changed to a piezo element 801a to form a size variable unit 811a, and the expansion / contraction member driving means is changed to a drive circuit 801b to change the air amount adjustment unit 811b. This is different from FIG. Other than that, the configuration is the same as that shown in FIGS. Even in this configuration, the control circuit 70 corresponds to an example of “control means” and “tilt control means”, and controls the air amount adjustment unit 811b, thereby allowing the “predetermined portion” (that is, the size variable unit 811a) of the deflection unit 841. The vibration of the part pushed by the is controlled. Further, the rotation mechanism 846, the size variable unit 811a, and the air amount adjustment unit 811b correspond to examples of “direction changing unit” and “tilting unit”.

  23 also includes a deflection unit 841, a cylindrical shaft member 842, and a holding table 843 similar to those in FIG. 21, and the deflection unit 841 and the holding table 843 have the same rotation mechanism as in FIG. 846 are connected. And these deflection | deviation part 841, the holding stand 843, and the cylindrical shaft member 842 are comprised so that it may receive the driving force of the motor 850, and may rotate integrally.

  The size variable portion 811a is arranged so as to straddle the hole portion 842b of the cylindrical shaft member 842 and the hole portion 844a of the plate-like member 844, and accommodates air inside and has an outer size according to the air accommodation amount. The amount of protrusion from the plate-like member 844 is changed and is changed. The size variable portion 811 has an outer shape configured to have a bellows shape, a supply port 812 that supplies air from the air amount adjusting unit 811b to one end side, and a discharge port that discharges internal air to the air amount adjusting unit 811b side. 813. The control circuit 70 is configured to give a supply air amount or a discharge air amount to the air amount adjustment unit 811b, and when the supply air amount is given, the air amount adjustment unit 811b to the size variable unit 811a. When air is supplied and a discharge air amount is given, it functions to discharge air from the size variable portion 811a.

The air amount adjustment unit 811b corresponds to an example of a “gas amount adjustment unit”. For example, a flow rate sensor (supply amount detection) that detects a flow rate supplied into the size variable unit 811a via the supply port 812. Sensor), a flow rate sensor (discharge amount detection sensor) for detecting a flow rate discharged through the discharge port 813, an air delivery means (pump, compressor, etc.) for sending air to the size variable portion 811a, and a supply path Or a solenoid valve that opens or shuts off the discharge path. In this configuration, since the inclination of the deflection unit 841 is determined according to the amount of air in the size variable unit 811a, the control circuit 70 that controls the amount of air in the size variable unit 811a is based on the control amount given to the air amount adjustment unit 811b. Thus, the inclination of the deflection unit 841 can be calculated with high accuracy. Further, since the control circuit 70 controls the motor 850, the rotation position of the cylindrical shaft member 842 can also be calculated. As a result, the control circuit 70 determines the three-dimensional direction of the laser light from the deflection unit 841 toward the space. It can be calculated. The distance detection method is the same as in Reference Example 1 .
23, the deflection unit 841 is configured to rotate independently of the size variable unit 811a, and the size variable unit 811a vibrates with respect to the deflection unit 841 at a fixed position in the apparatus. It is configured to operate. Specifically, the size variable portion 811a is fixed to the case 3 directly or via another member via the holding member 803 similar to FIG. 21 inside the cylindrical shaft member 842, and the cylindrical shaft member 842 is The size variable portion 811a is configured to rotate around.

  The configuration of FIG. 23 exemplified above has the same effect as FIG. In addition, in the configuration of FIG. 23, a size variable unit 811a that accommodates gas inside and whose outer size changes according to the amount of gas accommodated is provided, and the amount of gas in the size variable unit 811a is changed to the air amount adjustment unit 811b ( The predetermined portion of the deflecting portion 841 is vibrated by adjusting with the gas amount adjusting means. If it does in this way, it will become easy to ensure the amount of expansion and contraction more easily by simple composition.

Next, another example 2 of the reference example 8 will be described.
FIG. 24 shows a second modification of FIG. The configuration of FIG. 24 is different from that of FIG. 21 in the configuration of “vibration means” and the configuration of “tilt control means”, and the other configurations are the same as those in FIG. In FIG. 24, a transmission member 821 that transmits force to the deflecting unit 841, a reciprocation mechanism 822 that reciprocates the transmission member 821, and a motor 823 that drives the reciprocation mechanism 822 (the motor 823 is “reciprocation mechanism”). Corresponding to an example of “driving means”), and the deflecting portion 841 tilts in accordance with the reciprocating motion of the transmission member 821.

  24 also includes a deflecting portion 841, a cylindrical shaft member 842, and a holding base 843 similar to those in FIG. 21, and the deflecting portion 841 and the holding base 843 are similar to the rotating mechanism in FIG. 846 are connected. And these deflection | deviation part 841, the holding stand 843, and the cylindrical shaft member 842 are comprised so that it may receive the driving force of the motor 850, and may rotate integrally.

  The transmission member 821 is configured to fit with the cylindrical shaft member 842 and move up and down inside the cylindrical shaft member 842. An arm 822a is rotatably connected to the transmission member 821, and an arm 822b is rotatably connected to the arm 822a. The arm 822b is configured to be rotationally driven by a motor 823, and the arms (822a, 822b), the transmission member 821, and the cylindrical shaft member 842 constitute a mechanism (crank piston mechanism) that converts rotational motion into linear motion. ing. The transmission member 821 moves up and down according to the rotation of the motor 823, and the amount of protrusion from the plate-like member 844 changes.

  In the example of FIG. 24, the rotation mechanism 846, the transmission member 821, the reciprocating mechanism 822, and the motor 823 correspond to examples of “direction changing means” and “tilting means”, and the deflection unit 841 is arranged in a direction intersecting the central axis 842a. By tilting about the axis, the incident direction of the laser beam with respect to the deflecting unit 841 is relatively changed, and the direction of the laser beam from the deflecting unit 841 is changed with respect to the direction of the central axis 842a.

  Similarly to FIG. 21, the rotation mechanism 846 including the bearings 845 and 845 and the convex portions 841b and 841b corresponds to an example of the “tilting mechanism”, and can be tilted about the shaft (rotating shaft 845a). The deflection unit 841 is supported so as to be. Further, the transmission member 821, the reciprocating mechanism 822, and the motor 823 correspond to an example of “vibrating means”, and a predetermined portion (a portion connected to the transmission member 821) of the deflection unit 841 supported by the rotation mechanism 846. It is configured to vibrate.

  The control circuit 70 corresponds to an example of “control means” and “tilt control means”, and is controlled by the motor 823 (reciprocating mechanism driving means), so that the control circuit 70 is pushed by a predetermined portion (the transmission member 821) of the deflection unit 841. Is controlled.

  Also in the example of FIG. 24, the deflecting portion 841 is configured to rotate independently of the vibration means (that is, the transmission member 821, the reciprocating mechanism 822, and the motor 823). A vibration operation is performed on the deflection unit 841 at a fixed position.

  The configuration of FIG. 24 exemplified above has the same effect as FIG. In the configuration of FIG. 24, the transmission member 821 that transmits force to the deflecting portion 841 is reciprocated by the reciprocating mechanism 822, and the reciprocating mechanism 822 is driven by the motor 823 (reciprocating mechanism driving means). The deflection unit 841 is vibrated. In this way, a configuration capable of driving a part of the deflection unit 841 can be suitably realized. Furthermore, since the motor 823 is controlled by the control circuit 70 (tilt control means) and the vibration at a predetermined location is thereby controlled, the tilt of the deflection unit 841 can be controlled with high accuracy, and as a result, three-dimensional detection can be performed with high accuracy. It can be done well.

[ Reference Example 9 ]
Next, Reference Example 9 will be described. FIG. 25 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 9 . FIG. 26 is a partial cross-sectional schematic diagram for explaining a rotation deflection mechanism in the laser radar apparatus of FIG. 25, where (a) is a state in which the reflection surface of the deflection unit is inclined at a first angle with respect to the central axis. (B) is a figure which shows the state which inclined the reflective surface of the deflection | deviation part by the 2nd angle different from a 1st angle. 27A and 27B are explanatory views for explaining a coupling mechanism that couples the shaft member and the flange portion. FIG. 27A is a diagram of the coupling mechanism as viewed from the front, and FIG. 27B is a cross-sectional view taken along line AA in FIG. FIG. FIG. 28 is a view of the deflection portion, the flange portion, and the like of the turning deflection mechanism of FIG. 26 as viewed from above, and FIG. 28 (a) is a view showing a case where the deflection portion is at one turning position. (B) is a figure which shows the case where a deflection | deviation part exists in the rotation position different from (a). Note that the laser radar device 900 of Reference Example 9 is the same as Reference Examples 6 to 8 except for the configuration of the rotation deflecting unit and the vibrating unit from Reference Examples 6 to 8 . Therefore, different parts will be described with emphasis, and similar parts will be denoted by the same reference numerals as those in Reference Examples 6 to 8, and detailed description thereof will be omitted.

As shown in FIG. 25, also the laser radar apparatus 900 of Example 9, for some uses the same parts as in Reference Example 1. That is, the case 3, the light guide 4, the laser light transmitting plate 5, the laser diode 10, the lens 60, the photodiode 20, the filter 64, the condensing lens 62, the rotation angle position sensor 52, and the like are the same as those in the reference example 1 . A configuration is used. Therefore, the same reference numerals as in Reference Example 1 for the part constituting the same configuration as in Reference Example 1. The motor 950 differs from the shaft portion 42 of the reference example 1 in the configuration of the shaft member 942 and is substantially the same as the reference example 1 except for the shaft portion. The control circuit 70 has the same device configuration as that of the reference example 1 (that is, a microcomputer equipped with a CPU), and only the control target and the control method are different from those of the reference example 1 .

In Reference Example 9 , the direction of the central axis 942a of the rotation deflection mechanism 940 is the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction is Z Axial direction. In the example of FIG. 25, the emission direction of the laser light from the laser diode 10 is the X-axis direction. In FIGS. 25 and 26, the central axis 942a is conceptually shown by a one-dot chain line.

The laser radar device 900 of the reference example 9 is greatly different from the laser laser device 1 (FIG. 1) of the reference example 1 in the configuration of the rotation deflection mechanism 940. The rotation deflection mechanism 940 is integrally formed with a deflection unit 941 (deflection means) composed of a mirror configured to be rotatable about a central axis 942a, a shaft member 942 rotated by the motor 50, and the deflection unit 941. The configuration includes a flange portion 943 that is configured in general, and a connecting mechanism 944 that connects the shaft member 942 and the flange portion 943.

The deflecting unit 941 is provided with a reflecting surface 941a at a position where the laser light L1 is incident, deflects the laser light L1 toward the space, and deflects the reflected light from the detection object toward the photodiode 20. To work. The reflection surface 941a is configured to be flat and inclined with respect to the central axis 942a, and is configured to change the inclination angle in accordance with vibrations of vibration means described later. Further, the deflection unit 941 is configured to be rotationally driven by a motor 950 about the central axis 942a. In Reference Example 9 , the motor 950 and the control circuit 70 correspond to an example of “driving means”.

  The flange portion 943 corresponds to an example of an “integral swing portion”. As shown in FIGS. 26 and 28, the outer edge portion of the flange portion 943 is arranged so as to protrude outward from the outer edge of the deflecting portion 941, and the outer shape is configured in a substantially circular shape. Further, the flange portion 943 is configured in a bowl shape as a whole, and is integrally connected to the lower end portion of the deflecting portion 941 and rotates integrally with the deflecting portion 941, and will be described later. It is connected to the shaft member 942 by a connecting mechanism 944.

  The shaft member 942 is configured as a drive shaft of the motor 950, and a part of the coupling mechanism 944 is provided at the distal end portion. As shown in FIGS. 26 and 27, the coupling mechanism 944 is configured as a ball joint, and a spherical portion 944 a provided at the distal end portion of the shaft member 942 and a spherical shell portion coupled to the lower surface of the flange portion 943. 944b, and the spherical portion 944a and the spherical shell portion 944b form a spherical pair structure. The spherical shell portion 944b that accommodates the spherical portion 944a has a configuration in which the spherical portion moves relative to the 944a with multiple degrees of freedom. The flange portion 943 and the connecting mechanism 944 correspond to an example of a “tilting mechanism” and are configured to support the deflecting portion 941 so as to be tiltable.

  In addition, as shown in FIG. 27, the shaft member 942 receives the rotational force of the shaft member 942 as a part of the spherical shell portion 944b of the coupling mechanism 944 (specifically, a protrusion formed on the spherical shell portion 944b). 946) is provided with a projection 945 for transmission. The convex portion 945 is configured to rotate around the spherical shell portion 944 b according to the rotation of the shaft member 942. Note that the example of FIG. 27 is merely an example, and other configurations may be adopted as long as the structure can transmit the rotational force of the shaft member 942 to the flange portion 943 while holding the flange portion 943 swingably. Good. For example, the flange portion 943 and the shaft member 942 may be connected by a universal joint or the like.

  25, 26, and 28, outer edge vibration devices 961 and 965 that vibrate the outer edge portion of the flange portion 943 (the outer edge vibration devices 991 and 965 are “vibration means” “outer edge vibration means”. Is equivalent to an example of "." One outer edge vibration device 961 drives a transmission member 962 that transmits force to the deflection unit 941 via the flange portion 943, a reciprocation mechanism 963 that reciprocates the transmission member 962, and a reciprocation mechanism 963. The motor 964 (the motor 964 corresponds to an example of a reciprocating mechanism driving unit) and vibrates the outer edge portion of the flange portion 943 at the first position in the laser radar device 900, whereby the central portion of the deflecting portion 941. It functions to vibrate other parts.

  As shown in FIGS. 26 and 28, the transmission member 962 is a guide portion 963c (conceptually indicated by a one-dot chain line in FIG. 26) provided to extend along the direction of the central axis 942a at a fixed position in the laser radar device 900. And is vertically guided and guided by the guide portion 963c. An arm 963a is rotatably connected to the transmission member 962, and an arm 963b is rotatably connected to the arm 963a. 25 and 26 schematically show the arms 963a and 963b.

  The arm 963b is configured to be rotationally driven by a motor 964, and the arms 963a and 963b and the guide portion 963c constitute a reciprocating mechanism 963. The reciprocating mechanism 963 is configured as a mechanism (crank piston mechanism) that converts the rotational motion of the motor 964 into the linear motion of the transmission member 962. The transmission member 962 is provided with a notch 962a for holding the outer edge portion of the flange portion 943. The flange portion 943 can drive the motor 950 with a portion of the outer edge portion disposed in the notch portion 962. It is configured to rotate accordingly. According to such a configuration, by setting the motor 964 to a certain rotational position, the reflecting surface 941a of the deflecting unit 941 can be inclined as shown in FIG. 26A, and the rotational position of the motor 964 is changed. Then, it becomes possible to change to the inclined state as shown in FIG. An urging means such as a spring urging in the direction of arrow F2 may be provided on the opposite side of the center shaft 942a with respect to the holding position of the outer edge portion by the transmission member 962, and in this way, the deflecting portion 941 is provided. Can be positioned more stably.

The other outer edge vibration device 965 has the same configuration as that of the outer edge vibration device 961 although the position of the other outer edge vibration device 965 is different from that of the outer edge vibration device 965 as shown in FIG. The outer edge vibration device 965 also includes a transmission member 966 that transmits a force to the deflecting unit 941 via the flange portion 943, a reciprocating mechanism (not shown) that reciprocates the transmitting member 966, and a reciprocating mechanism 967. A driving motor (reciprocating mechanism driving means: not shown), and vibrates the outer edge portion of the flange portion 943 at a second position (a position away from the outer edge vibration device 961) in the laser radar device 900. Thus, the deflecting portion 941 functions to vibrate portions other than the central portion. In Reference Example 9 , a plane including the central axis 942a and passing through the central portion of the transmission member 962 is a virtual plane M1, and a plane including the central axis 942a and passing through the central portion of the transmission member 966 is a virtual plane M2. The transmission members 962 and 966 are arranged so that the virtual planes M1 and M2 are orthogonal to each other.

  In the laser radar device 900 configured as described above, when the deflection unit 941 is at a predetermined rotation position, the outer edge vibration device 965 (second vibration means) performs a vibration operation so that the deflection unit 961 rotates at a predetermined rotation. When outside the position, the control circuit 70 controls the motor 964 and the motor (not shown) of the outer edge vibration device 965 so that the outer edge vibration device 961 (first vibration means) performs a vibration operation. Specifically, when a plane including the central axis 942a and orthogonal to the reflecting surface 941a is defined as a virtual plane M3, an angle formed by the virtual plane M3 and the virtual plane M1 is equal to or greater than a predetermined threshold (for example, 45 ° or greater). ) Is set as a predetermined rotation position. In this case, the outer edge vibration device 965 (second vibration means) performs a vibration operation, and the angle formed by the virtual planes M1 and M3 is less than a threshold (for example, 45 °). Less than), the outer edge vibration device 961 (first vibration means) is caused to perform a vibration operation. FIG. 28A shows an example in which the deflection unit 941 is other than the predetermined rotation position, and FIG. 28B shows an example when the deflection unit 941 is in the predetermined rotation position.

  FIG. 25 is an example when the angle formed by the virtual planes M1 and M3 is less than a threshold value (for example, less than 45 °). In this case, when the deflecting unit 941 is at the solid line position, the laser beam is on a path indicated by the solid line. Then, the area between the reference signs L2 of reflected light from the detection object is taken into the deflecting unit 941. When the outer edge vibration device 961 is controlled and the deflecting unit 941 changes to the position indicated by the broken line, the laser beam travels to the space along the path indicated by the symbol L1 ′, and in this case, the reflected light in the region between the symbols L2 ′. Is taken into the deflecting unit 1241.

In Reference Example 9 , the coupling mechanism 934 and the outer edge vibration devices 961 and 965 correspond to an example of “direction changing means” and “tilting means”, and the laser beam is incident on the deflecting portion 941 by tilting the deflecting portion 941. It functions to change the direction relatively and change the direction of the laser beam from the deflecting unit 941 with respect to the direction of the central axis 942a.
The control circuit 70 corresponds to an example of “control means” and “tilt control means”, and controls the outer edge vibration devices 961 and 965 to thereby vibrate a predetermined portion (a portion other than the vicinity of the center) of the deflecting portion 941. Function to control.

In the configuration of the reference example 9 , the deflection unit (deflection unit 941) is configured to rotate independently of the vibration unit (the first vibration device 961 and the second vibration device 965), and the first corresponding to the vibration unit. Each of the first vibration device 961 and the second vibration device 965 is configured to perform a vibration operation on the deflecting unit 941 at a fixed position in the laser radar device 900. In this way, the rotationally driven portion of the rotation deflection mechanism 940 can be reduced in size and weight, so that it is easy to increase the accuracy and speed of the rotational drive, and the motor 950 can be easily reduced in size. Furthermore, since the first vibration device 961 and the second vibration device 965 are configured to perform a vibration operation at a fixed position in the device, the vibration device and the deflection device are compared with the configuration in which the vibration device and the deflection device rotate integrally. It becomes easier to perform power supply and signal transmission.

  Further, there are a shaft member 942 driven by a motor 950 (driving means), and a flange portion 943 (integral rocking portion) whose outer edge portion is formed in a substantially circular shape and can rock with respect to the shaft member. A first vibration device 961 and a second vibration device 965 (outer edge vibration means) are provided to rotate integrally and vibrate the outer edge portion of the flange portion 943 at a fixed position in the device. In this way, it is possible to suitably realize a configuration in which the vibration unit is arranged at a fixed position in the apparatus and the deflection unit is vibrated. Further, since the outer edge portion of the flange portion 943 is vibrated, it can be vibrated with a smaller load as compared with the configuration in which the vicinity of the center portion is vibrated, and the device can be easily reduced in size and cost. .

In Reference Example 9 , the first vibration device (first vibration means) that vibrates the outer edge portion of the integral rocking portion at the first position in the device and the outer edge portion of the integral rocking portion at the second position are vibrated. A second vibration device (second vibration means) is provided. According to this configuration, the swing of the flange portion 943 is not a swing about only a specific axis, and the degree of freedom of swing can be increased. Accordingly, the deflecting portion 941 that rotates integrally with the flange portion 943 can be brought into an appropriate swinging state according to the rotational position, and as a result, scanning in the direction of the central axis 942a (vertical direction) is performed over the entire periphery of the apparatus. It will be possible to perform well.

  Further, when the deflection unit 941 is at a predetermined rotation position, the second vibration device 965 (second vibration means) performs a vibration operation, and when the deflection unit 941 is at a position other than the predetermined rotation position, at least the first vibration device. Control is performed so that 961 (first vibration means) performs a vibration operation. According to this configuration, the first vibration unit 961 performs the vibration operation for the rotation range that requires the vibration operation by the first vibration device 961, and the second rotation unit requires the vibration operation for the rotation range that requires the vibration operation. It is possible to perform a vibration operation using the two vibration measures 965, and appropriate vibration control according to the rotation position of the deflection unit 941 can be performed.

[ Reference Example 10 ]
Next, Reference Example 10 will be described. FIG. 29 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 10 . FIG. 30 is a plan view schematically showing a rotation deflection mechanism in the laser radar apparatus of FIG. FIG. 31A is an explanatory diagram schematically showing the configuration of the guide path, and FIG. 31B is an explanatory diagram showing an example of a guide path different from FIG. In Reference Example 10 , the configuration of the rotation deflecting unit is different from Reference Examples 6 to 9, and other than that is the same as Reference Examples 6 to 9 . Therefore, different parts will be described with emphasis, and similar parts will be denoted by the same reference numerals as in Reference Examples 6 to 9, and detailed description thereof will be omitted.

As shown in FIG. 29, the laser radar apparatus 1000 of Example 10 also, for some uses the same parts as in Reference Example 1. That is, the case 3, the light guide 4, the laser light transmitting plate 5, the laser diode 10, the lens 60, the photodiode 20, the filter 64, the condensing lens 62, the rotation angle position sensor 52, and the like are the same as those in the reference example 1 . A configuration is used. Therefore, the same reference numerals as in Reference Example 1 for the part constituting the same configuration as in Reference Example 1. The motor 1050 differs from the shaft portion 42 of the reference example 1 in the configuration of the shaft portion 1042, and is substantially the same as the reference example 1 except for the shaft portion. The control circuit 70 has the same device configuration as that of the reference example 1 (that is, a microcomputer equipped with a CPU), and only the control target and the control method are different from those of the reference example 1 .

In Reference Example 10 , the direction of the central axis 1042a of the rotation deflection mechanism 1040 is the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction is Z Axial direction. In FIG. 29, the emission direction of the laser light from the laser diode 10 is the X-axis direction. In FIG. 29, the central axis 1042a is conceptually shown by a one-dot chain line.

Also in the laser radar apparatus 1000 of Reference Example 10 , when the laser light L1 is generated from the laser diode 10 (laser light generating means), the reflected light (see reference numeral L2 etc.) of the laser light L1 reflected by the detection object is used as the photodiode. 20 (light detection means) is used for detection. The laser light L1 emitted from the laser diode 10 in the X-axis direction is reflected substantially at right angles by the mirror 1030, and enters the vicinity of the center of the deflection unit 1041 provided in the rotation deflection mechanism 1040.

The rotation deflection mechanism 1040 used in the laser radar apparatus 1000 of Reference Example 10 includes a deflection unit 1041 formed of a mirror, a shaft member 1042 driven by a motor 1050, and the deflection unit 1041 in a form protruding from the deflection unit 1041. A coupled portion 1043 configured integrally and a coupling mechanism 1043 that couples the coupled portion 1043 and the shaft member 1042 are provided.

  The deflecting unit 1041 is configured to be rotatable about the central axis 1042a, deflects the laser light L1 reflected by the mirror 1030 toward the space, and reflects the reflected light from the detection object to the photodiode 20. It is configured to deflect toward. Further, the deflection unit 1041 is configured to be rotationally driven by a motor 1050. The motor 1050 and the control circuit 70 function as “driving means”.

The coupling mechanism 1044 includes a convex portion 1042b formed in a form protruding sideways in the shaft member 1042, and a bearing 1043a that rotatably supports the convex portion 1042b. The coupled portion 1043 is connected to the shaft member 1042. These are connected so as to be rotatable. The connection mechanism 1044 corresponds to an example of a “support mechanism” that supports the deflection unit 1041 so as to be tiltable.

  Further, the deflection unit 1041 supported to be tiltable by the coupling mechanism 1044 includes a reflection surface 1041a inclined with respect to the center axis 1042a, and according to the tilt of the deflection unit 1041, the center axis 1042a and the reflection surface 1041a are arranged. The angle to make changes. The coupling mechanism 1044 has a configuration in which a pivot shaft (that is, the center of the convex portion 1042b) serving as the pivot center of the coupled portion 1043 is orthogonal to the central shaft 1042a, and the motor 1050 drives the shaft member 1042 to rotate. Accordingly, the coupling mechanism 1044 rotates, so that the position of the pivot shaft changes so as to rotate around the central axis 1042a.

  A pair of integrally rotating portions 1045 and 1046 that rotate integrally with the deflecting portion 1041 are attached below the deflecting portion 1041. These integral rotating portions 1045 and 1046 are configured to extend toward the side away from the central axis 1042a with the deflecting portion 1041 side as the base end side, and fixing members 1045a and 1046a fixed to the deflecting portion 1041 respectively. Rotating members 1045b and 1046b that are rotatably attached to the ends of the fixing members 1045a and 1046a.

  Further, as shown in FIGS. 29 and 30, an annular guide path 1047 is provided at a predetermined position in the case 3 so as to surround the periphery of the integrally rotating portions 1045 and 1046. The guide path 1047 is configured as a groove portion that guides the distal end side of the integral rotation portions 1045 and 1046, and in the course of rotation of the integral rotation portions 1045 and 1046 by the motor 1050, the integral rotation portion 1045. The rotation path of the tip side part is determined so that the position of the part of the tip side of 1046 changes in the direction of the central axis 1042a (vertical direction). More specifically, as shown in FIGS. 29 to 31A, the rotating members 1045b and 1046b provided at the respective distal ends of the integral rotating portions 1045 and 1046 are fitted in the grooves of the guide path 1047, respectively. In other words, it is configured to be guided by the guide path 1047. The rotating members 1045b and 1046b are both configured in a roller shape, and are configured to roll while being supported by the inner wall surface 1047a of the guide path 1047 when guided by the guide path 1047.

  As shown in FIG. 31A, the guide path 1047 is configured such that the position in the direction of the central axis 1042a (that is, the position in the vertical direction) changes continuously. Specifically, a first bending portion 1047b that curves so as to protrude toward one side (upper side) of the central axis 1042a direction (vertical direction) and a first curve that curves so as to protrude toward the other side (lower side). 2 bending portions 1047c, and the first bending portion 1047b and the second bending portion 1047c are alternately arranged in a wave shape (for example, a sine wave shape). Accordingly, the path is configured so as to gradually move downward from the apex portion of the first bending portion 1047b to the apex portion of the second bending portion 1047c, and conversely, from the apex portion of the second bending portion 1047c, The path changes gradually toward the upper position until reaching the apex of the curved portion 1047b. The integral rotating portions 1045 and 1046 are fitted in the guide paths 1047 at positions on both sides of the central shaft 1042a, and therefore the central shaft 1042a with respect to a position where the integral rotating portion 1045 is displaced upward. The path is configured to displace the integrated rotating portion 1046 downward at the same position as the upward displacement at the opposite side of the position, and conversely with respect to the position to displace the integrated rotating portion 1045 downward. The path is configured to displace the integral rotating portion 1046 upward at the same position as the downward displacement at a position opposite to the center shaft 1042a.

In the reference example 10 , the integral rotating parts 1045 and 1046 and the guide path 1047 correspond to an example of “direction changing means”. When the deflecting part 1041 is rotationally driven by the motor 1050, the integral rotating parts 1045 and 1046 correspond to the rotational path. As a result, the positions of the tip portions of the integral rotation portions 1045 and 1046 change in the direction of the central axis 1042a, so that the integral rotation portions 1045 and 1046 and the deflection unit 1041 swing, and the relative position of the deflection unit 1041 with respect to the laser light L1. Is changing. The direction of the laser beam from the deflection unit 1041 is changed with respect to the direction of the central axis 1042a (ie, the vertical direction) by relatively changing the incident direction of the laser beam L1 with respect to the deflection unit 1041 in this way. . The control circuit 70 corresponds to an example of “control means”.

  In the laser radar device 100 configured as described above, the deflection unit 1041 is in a state indicated by a solid line in FIG. 29 at the rotation position where the vertical positions of the rotation members 1045b and 1046b are substantially the same. The light travels to the space along the path indicated by the solid line, and the reflected light from the detection object is taken into the deflecting unit 1041 in the region between the reference characters L2. On the other hand, when the deflecting unit 1041 is controlled to another rotational position and the deflecting unit 1041 is changed to the position indicated by the broken line, the laser beam travels to the space along the path indicated by L1 ′. Reflected light in the area between them is taken into the deflecting unit 1041.

  In the above example, the configuration using the sinusoidal guide path 1047 as illustrated in FIG. 31A is illustrated, but the configuration as illustrated in FIG. 31B is employed instead of the guide path 1047. May be. In the example of FIG. 31B, a linear portion 1047d is provided between the first bending portion 1047b and the second bending portion 1047c, and the position in the direction of the central axis 1042a (that is, the position in the vertical direction) is continuous in this example as well. The path of the guide path 1047 is configured to change to

  Moreover, it is good also as a structure like FIG. 32 instead of the structure of FIG. FIG. 32 differs from FIG. 29 in the configuration of the rotation deflection mechanism 1140. Specifically, instead of the configuration of the integral rotation portions 1045 and 1046, the integral rotation portions 1048a and 1048b are used. FIG. 29 is different from FIG. 29 in that the width is adjusted to the size of the tip of each of the integrally rotating portions 1048a and 1048b. The rest of the configuration is the same as in FIG.

  In the configuration of FIG. 32, the rotating member as shown in FIG. 29 is not used at the distal ends of the integral rotating portions 1048a and 1048b, and the distal ends of the integrated rotating portions 1048a and 1048b configured in an arm shape are connected to the guide path 1049. It fits directly into the groove. Although the groove width of the guide path 1049 is different from that of the guide path 1047, the shape is the same as that of the guide path 1047 (see FIG. 31A), and the position in the direction of the central axis 1042a (that is, the position in the vertical direction) is continuous. The path is configured in a sine wave shape so as to change.

  In the example of FIG. 32 configured as described above, the integral rotation units 1048a and 1048b rotate in response to the deflection unit 1041 in the rotation deflection mechanism 1140 being driven to rotate by the motor 1050, and the integral rotation units 1048a and 1048a, The tip portion of 1048b slides along the inner wall surface of the guide path 1049. Since the position of the distal end portion in the direction of the central axis 1042a (vertical direction) changes according to the path of the guide path 1049, the deflecting portion 1041 configured integrally therewith is displaced according to the position change of the distal end portion. Will be.

According to the configuration of Reference Example 10 , the same effects as those of the above Reference Example can be obtained, and three-dimensional detection can be performed satisfactorily. In Reference Example 10 , when the deflection unit 1041 is rotationally driven by the motor 1050, the position of a part of the integral rotation unit changes in the direction of the central axis 1042a (vertical direction) according to the rotation path. As a result, the integral rotation unit and the deflection unit 1041 swing, and the relative position of the deflection unit 1041 with respect to the laser beam L1 changes. In this way, it is not necessary to provide a special actuator or the like for swinging the deflecting unit 1041, and the driving force of the motor 1050 that rotationally drives the deflecting unit 1041 can be used for swinging the deflecting unit 1041. It is easy to reduce the cost and weight of the device.

  Further, the tip end side of the integral rotation part is guided by an annular guide path arranged so as to surround the periphery of the integral rotation part, and the position of the guide path in the central axis direction changes at least partially. The route is configured as follows. In this way, a configuration in which the deflecting unit 1041 is swung according to the rotational drive of the deflecting unit 1041 can be suitably realized. In particular, the configuration in which the guide path is arranged so as not to obstruct the rotational drive of the deflecting unit 1041 can be realized in a compact manner, and the leading end side of the integral rotating part is guided by the annular guide path. It will be possible to guide smoothly while supporting stably.

  In the example of FIG. 29, the guide path 1047 is configured to guide the rotating members 1045b and 1046b that are rotatably attached to the integral rotating portions 1045 and 1046. The rotating members 1045b and 1046b When guided by 1047, it is configured to roll while being supported by the inner wall surface 1047 a of the guide path 1047. In this way, the integrally rotating portions 1045 and 1046 move smoothly along the guide path 1047, and as a result, the rotation drive and vibration of the deflecting portion 1041 are performed more smoothly.

  The guide path includes a first bending portion that curves so as to protrude toward one side in the central axis direction, and a second bending portion that curves so as to protrude toward the other side in the central axis direction. These first bending portions and second bending portions are alternately arranged. In this way, with the rotational drive of the deflecting unit 1041, the tip side of the integral rotating unit can be smoothly changed in the direction of the central axis.

[ Reference Example 11 ]
FIG. 33 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 11 . FIG. 34 is an explanatory diagram illustrating a part of FIG. 33 omitted. FIG. 35 is an explanatory diagram schematically illustrating a rotation deflection mechanism used in the laser radar apparatus of FIG.

As shown in FIG. 33, the laser radar device 1200 of Reference Example 11 also uses parts similar to those of Reference Example 1 for a part thereof. That is, the case 3, the light guide 4, the laser light transmitting plate 5, the laser diode 10, the lens 60, the photodiode 20, the filter 64, the condenser lens 62, the rotation angle position sensor 52, the shaft 42, the motor 50, etc. The same configuration as in Reference Example 1 is used. Therefore, for the parts constituting the same configuration as in Reference Example 1 are denoted by the reference example 1 the same reference numerals, and detailed description thereof will be omitted. The control circuit 70 has the same device configuration as that of the reference example 1 (that is, a microcomputer equipped with a CPU), and only the control target and the control method are different from those of the reference example 1 .

In Reference Example 11 , the direction of the central axis 42a of the rotation deflection mechanism 1240 is the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction is Z Axial direction. In the example of FIG. 33, the emission direction of the laser light from the laser diode 10 is the X-axis direction. In FIGS. 33 to 35, the central axis 42a is conceptually shown by a one-dot chain line.

Also in the laser radar apparatus 1200 of Reference Example 11 , when the laser light L1 is generated from the laser diode 10 (laser light generating means), the reflected light (see reference numeral L2) of the laser light L1 reflected by the detection object is used as the photodiode 20. It is configured to detect by (light detection means). The laser light L1 emitted from the laser diode 10 in the X-axis direction is reflected at a substantially right angle by the mirror 1230, and enters the vicinity of the center of the deflecting unit 1241.

The rotation deflection mechanism 1240 includes a deflection unit 1241 configured to be rotatable about a central axis 42a. The deflection unit 1241 deflects the laser light L1 toward the space and reflects it from a detection object. The light is deflected toward the photodiode 20. Further, the deflection unit 1241 of the rotation deflection mechanism 1240 is configured to be rotationally driven by the motor 50 about the central axis 42a. In Reference Example 11 , the motor 50 and the control circuit 70 function as “driving means”.

  As shown in FIGS. 34 and 35, the deflecting unit 1241 includes a plurality of reflective layers 1241a to 1241e arranged in a stacked state at the incident position of the laser light L1 reflected by the mirror 1230. In the plurality of reflective layers 1241a to 1241e, the lowermost reflective layer 1241a is configured by a mirror, and the reflective layers 1241b to 1241e other than the lowermost layer are configured by a half mirror. The laser beam L1 reflected by the mirror 1230 is reflected and transmitted by the reflection layers 1241b to 1241e other than the lowermost layer, and is reflected by the lowermost reflection layer 1241a. Further, as shown in FIG. 35, each of the reflection layers 1241a to 1241e is configured such that the reflection direction of the laser light L1 is different.

In addition, a laser light selection device 1202 that selects any one of the plurality of reflected laser beams La to Le reflected by the plurality of reflecting layers 1241b to 1241e is provided. The laser light selection device 1202 includes a light shielding unit 1210 and a linear actuator 1218 that linearly drives the light shielding unit 1210. By driving the light shielding unit 1210 by the linear actuator 1218, the reflected laser light La˜ The reflected laser beam used for detection is selectively switched so that one of Le is guided to the space side and the other is blocked. In Reference Example 11 , the laser light selection device 1202 corresponds to an example of “laser light selection means”.

  The light-shielding unit 1210 includes a pair of annular light-shielding portions 1211 and 1212 that are annularly arranged around the deflecting portion 1241, and the pair of annular light-shielding portions 1211 and 1212 are disposed at a distance in the direction of the central axis 42a. And connected by a connecting member 1214. In addition, a slit 1213 that allows any one of the reflected laser beams La to Le to pass between the annular light shielding portions 1211 and 1212 is formed over almost the entire periphery of the deflection unit 1241.

  The linear actuator 1218 corresponds to an example of “displacement means”, and is configured to integrally displace the pair of annular light shielding portions 1211 and 1212 according to a command from the control circuit 70. The laser light selection device 1202 moves the light shielding unit 1210 by driving the linear actuator 1218 to change the position of the slit 1213. When the position of the slit 1213 is switched in this way, the selection of the reflected laser beam used for detection (that is, the reflected laser beam toward the space) is switched, and the direction of the laser beam toward the space from the deflecting unit 1241 is consequently the central axis. The direction of 42a will change. In the example of FIG. 33, the reflected laser beam La from the reflective layer 1241a is selected, and the reflected light from the detection object is reflected by the deflecting unit 1241 in the region between the reference numerals L2. It will be. Further, when the reflected laser beam Le from the reflective layer 1241e is selected by displacing the light shielding unit 1210, the laser beam travels to the space along the path L1 ′. Reflected light from the region is taken into the deflecting unit 1241.

According to the configuration of the reference example 11 , the deflection unit that deflects the laser light toward the space and deflects the reflected light from the detection target toward the light detection unit is rotatable about a predetermined central axis. Therefore, the detection over the periphery of the device is possible. The deflecting unit includes a plurality of reflective layers arranged in a stacked state at the laser light incident position from the laser light generating unit, and at least the reflective layer other than the lowest layer reflects and transmits the laser light. The reflection direction of the laser beam by each reflection layer is different, respectively. Then, one of the plurality of reflected laser beams reflected by the plurality of reflecting layers is guided to the space side, and the selection of the reflected laser beam used for detection is switched so as to block the other, whereby the deflecting unit changes the space to the space. The direction of the laser beam that goes is changed with respect to the direction of the central axis. In this way, since the direction of the laser beam can be changed not only in the plane direction orthogonal to the central axis but also in the direction of the central axis, detection can be performed three-dimensionally.

  In addition, at least the lowermost layer of the plurality of reflective layers is constituted by a half mirror. In this way, it is possible to easily and satisfactorily realize a configuration that can reflect and transmit the laser light from the laser light generating means in each reflection layer.

  In addition, a pair of annular light shielding portions arranged annularly around the deflection means are provided at a distance in the direction of the central axis, and a slit through which the reflected laser light passes is formed between both annular light shielding portions. The pair of annular light shielding portions are integrally displaced by the displacement means, and the displacement operation is controlled by the control means. In this way, it is possible to suitably realize a configuration in which selection of the reflected laser beam used for detection is switched so that one of the plurality of reflected laser beams is guided to the space side and the other is blocked. In particular, the switching of the laser light can be satisfactorily switched regardless of the rotation position of the deflecting means, which is extremely advantageous in performing detection over the periphery of the apparatus.

[Other Embodiments]
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention.

  In the above embodiment, the light collecting means for collecting the reflected light toward the light detecting means is provided on the optical path of the reflected light from the rotation deflecting means to the light detecting means. The light means may be omitted and the detection may be performed by a relatively large light detection means.

  In the above embodiment, the light selection means for transmitting the reflected light and removing the light other than the reflected light is provided on the optical path of the reflected light from the rotation deflecting means to the light detecting means. Such light selection means can be omitted.

In the fifth embodiment, the “actuator” is configured by four piezo actuators that change the position of the specific portion of the deflecting unit, but may be a plurality other than four.

  The laser laser apparatus of any of the above embodiments is extremely useful when used as an area sensor or safety sensor in a factory.

FIG. 1 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 1 . FIG. 2 is an explanatory diagram schematically illustrating a displacement mechanism for displacing the oscillating mirror. FIG. 3 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 2 . FIG. 4 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 3 . FIG. 5 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 4 . FIG. 6 is a cross-sectional view schematically illustrating the laser radar device according to the first embodiment of the invention. FIG. 7 is an explanatory diagram conceptually illustrating a swing mechanism, an actuator, and the like used in the laser radar apparatus of FIG. FIG. 8 is an explanatory view for conceptually explaining a mirror to which a piezo actuator is attached from the back side (opposite side of the reflecting surface), and FIG. 8 (b) is a conceptual view of the mirror to which the piezo actuator is attached. It is a perspective view shown in FIG. FIG. 9 is a flowchart illustrating a detection process in the laser radar apparatus of FIG. FIG. 10 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 5 . FIG. 11A is an explanatory diagram conceptually showing a mirror unit and a displacement mechanism used in the laser radar apparatus of FIG. 10 from the side, and FIG. 11B conceptually shows the mirror unit from below. It is explanatory drawing. FIG. 12 is a flowchart illustrating a detection process in the laser radar apparatus of FIG. FIG. 13 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 6 . FIG. 14A is an explanatory diagram for explaining a main part of the tilting means used in the laser radar apparatus of FIG. 13, and FIG. 14B describes a part of the tilting means different from FIG. 14A. It is explanatory drawing. FIG. 15A is an explanatory diagram conceptually illustrating a tilting mechanism, a rotation deflection mechanism, and the like used in the laser radar device of FIG. 13, and FIG. 15B conceptually illustrates the configuration of the shaft portion. FIG. 16 is a schematic cross-sectional view taken along line AA in FIG. FIG. 16 is a flowchart illustrating the flow of detection processing in the laser radar apparatus of FIG. FIG. 17 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 7 . 18A is an explanatory diagram for explaining a main part of the tilting means used in the laser radar device of FIG. 17, and FIG. 18B is an explanatory diagram showing a tilt state different from FIG. 18A. is there. FIG. 19A is a diagram showing another example 1 different from FIG. 15A in terms of the configuration for supplying power to the vibration means, and FIG. 19B is a diagram showing another example 2. . FIG. 20 is a cross-sectional view schematically illustrating a laser radar apparatus according to Reference Example 8 . FIG. 21 is a partial cross-sectional schematic diagram illustrating a rotation deflection mechanism in the laser radar apparatus of FIG. FIG. 22 is a view of the deflection unit and the holding base of the rotation deflection mechanism of FIG. 21 as viewed from above. FIG. 23 is a partial cross-sectional schematic view illustrating another example 1 of the rotation deflection mechanism. FIG. 24 is a partial cross-sectional schematic view illustrating another example 2 of the rotation deflection mechanism. FIG. 25 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 9 . FIG. 26 is a partial cross-sectional schematic diagram for explaining a rotation deflection mechanism in the laser radar apparatus of FIG. 25, and FIG. (B) is a figure which shows the state which inclined the reflective surface of the deflection | deviation part by the 2nd angle different from a 1st angle. 27A and 27B are explanatory views for explaining a coupling mechanism that couples the shaft member and the flange portion. FIG. 27A is a diagram of the coupling mechanism as viewed from the front, and FIG. FIG. FIG. 28 is a view of the deflection portion, the flange portion, and the like of the turning deflection mechanism of FIG. 26 as viewed from above, and FIG. 28 (a) is a view showing a case where the deflection portion is at one turning position. (B) is a figure which shows the case where a deflection | deviation part exists in the rotation position different from (a). FIG. 29 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 10 . FIG. 30 is a plan view schematically showing a rotation deflection mechanism in the laser radar apparatus of FIG. FIG. 31A is an explanatory diagram schematically showing the configuration of the guide path, and FIG. 31B is an explanatory diagram showing an example of a guide path different from FIG. FIG. 32 is a cross-sectional view schematically illustrating another example of the laser radar device according to Reference Example 10 . FIG. 33 is a cross-sectional view schematically illustrating a laser radar device according to Reference Example 11 . FIG. 34 is an explanatory diagram illustrating a part of FIG. 33 omitted. FIG. 35 is an explanatory diagram schematically illustrating a rotation deflection mechanism used in the laser radar apparatus of FIG.

1,100,200,300,400,500,600,700,800,900,1000,1100,1200 ... Laser radar device 10 ... Laser diode (laser light generating means)
20 ... Photodiode (light detection means)
31 ... Oscillating mirror (laser beam deflecting means, direction changing means)
40, 240, 340, 640, 740, 840, 940, 1040, 1140, 1240 ... rotation deflection mechanism (rotation deflection means)
41, 241, 641, 841, 941, 1041, 1241 ... deflection unit (deflection means)
50, 850, 950, 1050, 1250 ... motor (driving means)
62 ... Condensing lens (condensing means)
64. Filter (light selection means)
70 ... Control circuit (control means, swing control means, displacement control means, tilt control means)
110 ... Outgoing direction changing section (outgoing direction changing means, direction changing means)
210, 310 ... Actuator (tilting means)
341 ... second deflection section (deflection means, second deflection means)
343 ... First deflection section (deflection means, first deflection means)
430 ... Laser beam deflecting section (laser beam deflecting means, direction deflecting means)
431 ... Mirror (deflection member)
432a, 432b, 432c, 432d ... Piezo actuator (actuator)
435 ... Oscillation mechanism 531 ... Mirror unit 533 ... Rotation mechanism (displacement mechanism)
642 ... Shaft (tilting mechanism)
643 ... Support frame (tilting mechanism)
680 ... Cam mechanism (vibration means)
681 ... Cam 682 ... Motor (cam mechanism drive means, vibration means)
686 ... Power supply line 687 ... Commercial power supply (external power supply)
688 ... Battery 689 ... Solar cell 690 ... Light source 742 ... Extension part (regulation means)
744 ... Guide part (regulating means)
801a: Piezo element (stretching means)
811a ... Size variable part (extension / contraction means)
811b ... Air amount adjusting unit (gas amount adjusting means)
821 ... Transmission member 822 ... Reciprocating mechanism 823 ... Motor (reciprocating mechanism driving means)
842 ... Cylindrical shaft member 844 ... Holding base 942 ... Shaft member 961 ... Outer edge vibration device (outer edge vibration means, first vibration means)
965 ... Outer edge vibration device (outer edge vibration means, second vibration means)
943 ... Flange (integral swing part)
1042b ... convex portion (support mechanism)
1043a ... Bearing (support mechanism)
1047 ... guide way (guide means)
1045a, 1046a ... Fixing member 1045b, 1046b ... Rotating member 1047b ... First bending portion 1047c ... Second bending portion 1202 ... Laser light selection device 1211,1212 ... Ring light shielding portion 1213 ... Slit 1218 ... Linear actuator (displacement means)
1241a to 1241e ... reflective layer La to Le ... reflected laser light

Claims (4)

Laser light generating means for generating laser light;
Light detection means for detecting reflected light of the laser light reflected by a detection object when the laser light is generated from the laser light generation means;
One or a plurality of deflecting means configured to be rotatable about a predetermined central axis is provided, the laser light is deflected toward the space by the deflecting means, and the reflected light is directed to the light detecting means. Rotating deflection means for deflecting
Drive means for rotationally driving the turning deflection means;
Direction changing means for changing the direction of the laser light from the deflecting means with respect to the direction of the central axis by relatively changing the incident direction of the laser light with respect to the deflecting means;
Control means for controlling the direction changing means;
It is the composition provided with
The direction changing means comprises a laser light deflecting means configured to deflect the laser light from the laser light generating means toward the rotation deflecting means, and configured to be swingable.
The control means comprises a swing control means for controlling the swing of the laser beam deflecting means,
The laser beam deflecting means is
A deflecting member for deflecting the laser beam;
A swing mechanism for swingably supporting the deflection member;
An actuator for driving the deflection member supported by the swing mechanism;
With
The swing control means is configured to control a driving state of the deflection member by the actuator.
The actuator comprises one or more piezoelectric actuators that change the position of a specific part of the deflection member,
The swing control means is configured to control the orientation of the deflection member with respect to the laser light by controlling the piezoelectric actuator,
The swing mechanism comprises a ball joint that connects the deflection member and a holding portion that holds the deflection member with a spherical pair structure,
The deflecting means is a mirror having a surface that is inclined with respect to the central axis and reflects the laser light;
The laser beam when the direction of the central axis is the Y-axis direction, the predetermined direction orthogonal to the Y-axis direction is the X-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction is the Z-axis direction. The laser light from the generation unit enters the deflection member from one side in the X-axis direction, and is deflected by the deflection member toward the deflection unit disposed on one side in the Y-axis direction with respect to the deflection member. It is supposed to
When the rotation position of the deflection means does not fall within a predetermined rotation range, the swing control means rotates the deflection member about the first axis and travels from the deflection member to the deflection means. When the direction of the laser beam is changed along the XY plane and the rotation position of the deflection means is within a predetermined rotation range, the deflection member is rotated about the second axis to move from the deflection member. The swing control of the laser beam deflection unit is changed based on the rotation position of the deflection unit so that the direction of the laser beam toward the deflection unit is changed along a plane intersecting the XY plane. Yes,
The predetermined rotation range is a range in which an angle formed between a virtual straight line parallel to the X-axis direction and a virtual plane parallel to the laser light reflecting surface of the deflecting unit is equal to or less than a predetermined threshold. There is a laser radar device. 2. The laser radar device according to claim 1 , wherein a deflection area for deflecting the reflected light in the deflection means is configured to be larger than a deflection area for deflecting the laser light in the laser light deflection means. The condensing means for condensing the reflected light toward the light detecting means is provided on an optical path of the reflected light from the rotating deflection means to the light detecting means. The laser radar device according to claim 1 or 2 . A light selection unit that transmits the reflected light and removes light other than the reflected light is provided on an optical path of the reflected light from the rotation deflecting unit to the light detecting unit. The laser radar device according to any one of claims 1 to 3 .

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