JP5266490B2 - High density oxidation of materials - Google Patents
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- JP5266490B2 JP5266490B2 JP2007243997A JP2007243997A JP5266490B2 JP 5266490 B2 JP5266490 B2 JP 5266490B2 JP 2007243997 A JP2007243997 A JP 2007243997A JP 2007243997 A JP2007243997 A JP 2007243997A JP 5266490 B2 JP5266490 B2 JP 5266490B2
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Description
本発明は、材料の酸化法及びデバイス作製法に係り、特に固体材料、液体材料、溶液材料乃至は液体中に分散させた材料などの被酸化材料に、波長１９０ｎｍ以下の光を照射することにより、従来困難とされてきた高品質の酸化物を低温域の条件下で形成することが可能な材料の高密度酸化法に関する。 The present invention relates to a material oxidation method and a device manufacturing method, and in particular, by irradiating a material to be oxidized such as a solid material, a liquid material, a solution material, or a material dispersed in a liquid with light having a wavelength of 190 nm or less. relates to a high-density oxidation of the material capable of forming a high quality oxide which has been considered difficult conventionally under conditions of low temperature range.
近年、種々のエレクトロニクス、オプトエレクトロニクス、フォトニクスなどの分野において、高品質の酸化物は必要不可欠である。現在、高品質の酸化物を作製する場合は、被酸化物を雰囲気を高温状態として高温条件下において形成することが多い。 In recent years, high quality oxides are indispensable in various fields such as electronics, optoelectronics and photonics. At present, when a high-quality oxide is manufactured, the oxide is often formed under a high temperature condition with an atmosphere at a high temperature.
しかしながら、上述したように酸化物を作製するためには、高温条件下で形成するため、酸化物を用いるデバイスの大きさや重さ、性能や形成位置などを制限していた。従って、従来のよりも低温域で高品質の酸化物を形成する手法の確立が望まれていた。 However, as described above, in order to produce an oxide, since it is formed under a high temperature condition, the size, weight, performance, formation position, and the like of a device using the oxide are limited. Accordingly, it has been desired to establish a method for forming a high-quality oxide at a lower temperature than in the prior art.
そこで、本発明は上記問題点に鑑みてなされたものであって、高品質の酸化物を従来よりも低温域の条件下で位置選択的乃至は空間選択的に形成できる材料の高密度酸化法を提供することを目的とする。 Accordingly, the present invention has been made in view of the above problems, and a high-density oxidation method for a material capable of forming a high-quality oxide in a position-selective or space-selective manner under conditions of a lower temperature than in the past. The purpose is to provide.
本発明のその他の目的や新規の特徴は後述の実施の形態において明らかにする。 Other objects and novel features of the present invention will be clarified in embodiments described later.
上記目的を達成するため、請求項１記載の材料の高密度酸化法は、所望のマスクを被覆した被酸化物であるアルミニウム薄膜に対して溶融除去が行われるエネルギー密度以下のエネルギー密度のＦ2 レーザを照射し、前記アルミニウム薄膜における前記マスクで被覆されていない被照射部分のみが前記レーザにより酸化アルミニウム層に改質されることを特徴としている。 In order to achieve the above object, the high-density oxidation method for a material according to claim 1 is an F 2 having an energy density equal to or lower than an energy density at which melting removal is performed on an aluminum thin film that is an oxide covered with a desired mask. Only the irradiated portion of the aluminum thin film that is not covered with the mask is modified into an aluminum oxide layer by the laser.
本発明によれば、高品質の酸化物を従来よりも低温域の条件下で位置選択的乃至は空間選択的に形成することにより、酸化物を基礎とした高機能デバイスの作製法を確立でき、エレクトロニクス、オプトエレクトロニクス及びフォトニクス分野でのデバイス作製の基盤技術として利用可能であるなど多機能マイクロ/ ナノデバイス作製のための必要不可欠な技術となる。また本発明は、これら分野にとどまらず、今後マイクロ・ナノマシーニング技術を利用して発展するデバイス作製の分野に多大に利用可能である。 According to the present invention, it is possible to establish a method for manufacturing a high-performance device based on an oxide by forming a high-quality oxide in a position-selective manner or a space-selective manner under a temperature range lower than that in the past. It can be used as a basic technology for device fabrication in the electronics, optoelectronics, and photonics fields. The present invention is not limited to these fields, and can be used greatly in the field of device fabrication, which will be developed using micro / nano machining technology in the future.
以下、本発明に係る材料の高密度酸化法及びデバイスを実施するための最良の形態について、添付する図面を参照しながら詳細に説明する。図１（ａ）〜（ｃ）は本発明に係る第１形態の材料の高密度酸化法を説明するための概略説明図であり、図２（ａ）〜（ｃ）は本発明に係る第２形態の材料の高密度酸化法を説明するための概略説明図であり、図３（ａ）、（ｂ）は本発明に係る材料の高密度酸化法の他の実施例を説明するための概略説明図であり、図４は本発明に係る材料の高密度酸化法によって形成された酸化アルミニウム薄膜の実験結果を示す写真である。 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the best mode for carrying out a high-density oxidation method and device according to the present invention will be described in detail with reference to the accompanying drawings. FIGS. 1A to 1C are schematic explanatory views for explaining the high-density oxidation method of the material of the first form according to the present invention, and FIGS. It is a schematic explanatory drawing for demonstrating the high-density oxidation method of the material of 2 forms, FIG. 3 (a), (b) is for demonstrating the other Example of the high-density oxidation method of the material which concerns on this invention. FIG. 4 is a schematic explanatory view, and FIG. 4 is a photograph showing experimental results of an aluminum oxide thin film formed by a high-density oxidation method of a material according to the present invention.
まず、図１を参照しながら、本発明に係る第１形態の材料の高密度酸化法について説明する。第１形態の材料の高密度酸化法は、波長１９０ｎｍ以下の光を、例えばアルミニウム、チタン、鉄、スズ、亜鉛からなる金属薄膜、セラミクス、半導体、生体材料、高分子材料などで構成される被酸化固体材料１に照射する場合の実験概略構成であり、図１（ａ）に示すように、所望のマスク２を被覆した被酸化固体材料１の表面に波長１９０ｎｍ以下の光３を照射する。そして、光３が露光された部分のみが高品質の酸化物４に改質される。 First, the high-density oxidation method of the material according to the first embodiment of the present invention will be described with reference to FIG. The high-density oxidation method of the material of the first form is a method in which light having a wavelength of 190 nm or less is irradiated with a metal thin film made of, for example, aluminum, titanium, iron, tin, or zinc, a ceramic, a semiconductor, a biomaterial, or a polymer material. This is a schematic configuration of an experiment when irradiating the oxidized solid material 1, and as shown in FIG. 1A, the surface of the oxidized solid material 1 covered with a desired mask 2 is irradiated with light 3 having a wavelength of 190 nm or less. Only the portion exposed to the light 3 is modified to a high quality oxide 4.
また、１９０ｎｍ以下の光３を出射するレーザ出力装置（不図示）の出力が使用環境や機器劣化などの要因により出力が通常よりも弱い場合は、図１（ｂ）に示すように光３を集光する集光レンズ５で所定出力になるまで集光しながら出力調整を行った状態でマスク２を被覆した被酸化固体材料１の表面に光３を照射する。そして、光３が露光された部分のみが高品質の酸化物４に改質される。 If the output of a laser output device (not shown) that emits light 3 of 190 nm or less is weaker than usual due to factors such as the use environment and equipment deterioration, the light 3 is emitted as shown in FIG. Light 3 is irradiated onto the surface of the solid material 1 to be oxidized, which is covered with the mask 2, in a state where output adjustment is performed while condensing until a predetermined output is obtained by the condenser lens 5. Only the portion exposed to the light 3 is modified to a high quality oxide 4.
さらに、マスク２を被覆せずに被酸化固体材料１の所望の箇所に酸化物４を形成する場合は、図１（ｃ）に示すように、被酸化固体材料１の表面に光３が集光レンズ５を介して集光照射する。そして、光３が集光照射された部分のみが高品質の酸化物４に改質される。 Furthermore, when the oxide 4 is formed at a desired location of the oxidizable solid material 1 without covering the mask 2, the light 3 is collected on the surface of the oxidizable solid material 1 as shown in FIG. Condensed and irradiated through the optical lens 5. Only the portion irradiated with the light 3 is reformed into a high quality oxide 4.
次に、図２を参照しながら、本発明に係る第２形態の材料の高密度酸化法について説明する。第２形態の材料の高密度酸化法は、波長１９０ｎｍ以下の光を、例えば被酸化物を含有する液体材料、被酸化物が溶解した溶液材料乃至は液体中に被酸化物を分散させたコロイド状材料などの被酸化液体材料６に照射する場合の実験概略構成であり、図２（ａ）に示すように容器７に入れた被酸化液体材料６に波長１９０ｎｍ以下の光３を照射する。そして、光３が照射された部分の被酸化物のみが高品質の酸化物４に改質される。 Next, the high-density oxidation method of the material according to the second embodiment of the present invention will be described with reference to FIG. The high-density oxidation method of the material of the second form is a colloid in which light having a wavelength of 190 nm or less is applied, for example, a liquid material containing an oxide, a solution material in which the oxide is dissolved, or a liquid in which the oxide is dispersed. This is a schematic configuration of an experiment in the case of irradiating the oxidizable liquid material 6 such as a sheet-like material, and irradiates the oxidizable liquid material 6 placed in the container 7 with light 3 having a wavelength of 190 nm or less as shown in FIG. Only the portion of the oxide irradiated with the light 3 is modified to a high quality oxide 4.
また、１９０ｎｍ以下の光３を出射するレーザ出力装置（不図示）の出力が使用環境や機器劣化などの要因により出力が通常よりも弱い場合は、図２（ｂ）に示すように光３を集光する集光レンズ５で所定出力になるまで集光しながら出力調整を行った状態で、被酸化液体材料６に光３を照射する。そして、光３が照射された部分の被酸化物のみが高品質の酸化物４に改質される。 When the output of a laser output device (not shown) that emits light 3 of 190 nm or less is weaker than usual due to factors such as the use environment or equipment deterioration, the light 3 is emitted as shown in FIG. The liquid 3 to be oxidized is irradiated with the light 3 in a state where the output adjustment is performed while condensing until the predetermined output is obtained by the condensing lens 5 that collects the light. Only the portion of the oxide irradiated with the light 3 is modified to a high quality oxide 4.
さらに、被酸化液体材料６の所望の箇所（例えば被酸化液体材料６の表面）に酸化物４を形成する場合は、図２（ｃ）に示すように、被酸化液体材料６の表面に光３が集光レンズ５を介して集光照射する。そして、光３が集光照射された部分のみが高品質の酸化物４に改質される。 Further, when the oxide 4 is formed at a desired location of the oxidizable liquid material 6 (for example, the surface of the oxidizable liquid material 6), light is applied to the surface of the oxidizable liquid material 6 as shown in FIG. 3 condenses and irradiates through a condensing lens 5. Only the portion irradiated with the light 3 is reformed into a high quality oxide 4.
なお、上記第２形態における図２（ｃ）の構成の場合、被酸化液体材料６若しくはレーザ出力装置を精密に三次元的に微動可能な構成とすることで、結果的にレーザ３が精密に三次元的に走査されるため、酸化物４を位置選択的乃至は空間選択的に形成することが可能となる。 In the case of the configuration of FIG. 2C in the second embodiment, the liquid 3 to be oxidized or the laser output device can be finely moved three-dimensionally, so that the laser 3 can be precisely adjusted. Since the scanning is performed three-dimensionally, the oxide 4 can be formed in a position selective manner or a space selective manner.
このように、上述した第１形態の材料の高密度酸化法では、波長１９０ｎｍ以下の光３を被酸化固体材料１に照射することにより、被酸化固体材料１の表面を位置選択的に高品質の酸化物に改質することができる。従って、従来のような高温条件下で酸化させる必要がなく、酸化物４を容易に形成することができる。 As described above, in the above-described high-density oxidation method of the material of the first form, the surface of the solid material 1 to be oxidized is selectively high-quality by irradiating the solid material 1 with light 3 having a wavelength of 190 nm or less. The oxide can be modified. Therefore, it is not necessary to oxidize under high temperature conditions as in the prior art, and the oxide 4 can be easily formed.
また、第２形態の材料の高密度酸化法では、波長１９０ｎｍ以下の光３を被酸化液体材料６に照射することにより、被酸化液体材料１の表面乃至は内部に高品質の酸化物に改質することができる。従って、第１形態の酸化法と同様に、従来のような高温条件下で酸化させる必要がなく、酸化物４を位置選択的乃至は空間選択的に容易に形成することができる。 Further, in the high-density oxidation method of the material of the second form, the liquid 3 to be oxidized is irradiated with light 3 having a wavelength of 190 nm or less, so that the surface or the inside of the liquid material 1 to be oxidized is changed to a high quality oxide. Can be quality. Therefore, as in the oxidation method of the first embodiment, it is not necessary to oxidize under high temperature conditions as in the prior art, and the oxide 4 can be easily formed in a position selective manner or a space selective manner.
ところで、上述した第１形態の材料の高密度酸化法では、被酸化固体材料１の表面側（図中上方向）から光３を照射した構成で説明したが、これに限定されることはなく、例えば図３（ａ）に示すように１９０ｎｍ以下の光３を透過可能な透過性基体８に被酸化固体材料１を形成し、裏面側（図中下方向）から光３を照射する構成でもよい。 By the way, in the high-density oxidation method of the material of the first form described above, the structure in which the light 3 is irradiated from the surface side (upward direction in the figure) of the solid material 1 to be oxidized has been described, but the present invention is not limited to this. For example, as shown in FIG. 3A, the oxidizable solid material 1 is formed on a transparent substrate 8 capable of transmitting light 3 having a wavelength of 190 nm or less, and the light 3 is irradiated from the back side (downward in the figure). Good.
また、図３（ｂ）に示すように、既存の薄膜乃至は薄膜形成法により基体９上に被酸化固体材料１を薄膜状に形成し、この被酸化固体材料１全体に波長１９０ｎｍ以下の光３を照射させて全て酸化物４に改質する。そして、再度既存の薄膜乃至は薄膜形成法を用いて形成した酸化物４の表面に被酸化固体材料１を薄膜状に形成して光３を照射して酸化物４に改質し、酸化物４を積層させていくことで、所望の厚さの酸化物４を容易に形成することができる。 Further, as shown in FIG. 3B, the oxidizable solid material 1 is formed in a thin film on the substrate 9 by an existing thin film or thin film formation method, and light having a wavelength of 190 nm or less is formed on the oxidizable solid material 1 as a whole. 3 is irradiated to reform all oxides 4. Then, the oxidizable solid material 1 is formed in the form of a thin film on the surface of the oxide 4 formed by using the existing thin film or thin film formation method again, and irradiated with light 3 to be modified to the oxide 4. By stacking 4, the oxide 4 having a desired thickness can be easily formed.
以下、上述した材料の高密度酸化法について、実施例に基づき説明する。なお、下記の各実施例は、本発明を限定する性質のものではなく、前・後記の趣旨に徴して設計変更することは何れも本発明の技術的範囲に含まれるものである。 Hereinafter, the high-density oxidation method of the material described above will be described based on examples. It should be noted that each of the following embodiments is not of a nature that limits the present invention, and any design changes that fall within the spirit of the preceding and following descriptions are within the technical scope of the present invention.
〔実施例〕
上述した第１形態における材料の高密度酸化法の実験概略構成において、光３として波長１５７ｎｍのＦ2 レーザを用いた。レーザ照射部分でのエネルギー密度は、約５０ｍＪ／ｃｍ2 ／ｐｕｌｓｅ一定とした。また、パルス繰り返し周波数は１０Ｈｚ一定とした。被酸化固体材料１はシリカガラス基板上に真空蒸着によって形成されたアルミニウム薄膜（膜厚約１０ｎｍ）を用い、実験は大気中で行った。
〔Example〕
In the experimental schematic configuration of the high density oxidation method of the material in the first embodiment described above, an F 2 laser having a wavelength of 157 nm was used as the light 3. The energy density in the laser irradiation part was fixed to about 50 mJ / cm 2 / pulse. The pulse repetition frequency was constant at 10 Hz. As the solid material 1 to be oxidized, an aluminum thin film (film thickness of about 10 nm) formed by vacuum deposition on a silica glass substrate was used, and the experiment was performed in the air.
上記条件において、光３であるＦ2 レーザが照射された領域は、透明性を有する酸化アルミニウム（Ａｌ2 Ｏ3 ）層に改質された。そして、この改質された層の化学組成及び結合状態は、Ｘ線光電子分光により分析した結果、形成された酸化物４である酸化アルミニウム層が、酸或いはアルカリに対して耐性があることがわかった。 Under the above conditions, the region irradiated with the F 2 laser as the light 3 was modified to an aluminum oxide (Al 2 O 3 ) layer having transparency. The chemical composition and bonding state of the modified layer were analyzed by X-ray photoelectron spectroscopy. As a result, it was found that the aluminum oxide layer, which was the oxide 4 formed, was resistant to acid or alkali. It was.
従って、アルミニウム薄膜を位置選択的に改質した後、酸或いはアルカリで化学エッチングすることにより、図４に示すように基板上の任意の位置に透明性酸化アルミニウム膜を選択的に形成することができた。 Therefore, after selectively modifying the aluminum thin film, a transparent aluminum oxide film can be selectively formed at an arbitrary position on the substrate as shown in FIG. 4 by chemical etching with acid or alkali. did it.
本発明の材料の高密度酸化法によって作製されるデバイスは、被酸化固体材料１若しくは被酸化液体材料６に、波長１９０ｎｍ以下の光を照射することにより、従来困難とされてきた高品質の酸化物を従来よりも低温域の条件下において位置選択的乃至は空間選択的に形成することが可能となる。この結果、エレクトロニクス、オプトエレクトロニクス或いはフォトニクス分野でのデバイス作製に適用可能になるなど、その用途は 電気、電子のみならずあらゆる分野で有用である。 The device manufactured by the high-density oxidation method of the material according to the present invention irradiates the oxidizable solid material 1 or the oxidizable liquid material 6 with light having a wavelength of 190 nm or less. An object can be formed in a position-selective manner or a space-selective manner under conditions of a lower temperature range than in the past. As a result, it can be applied to device fabrication in the electronics, optoelectronics, or photonics fields, and its use is useful not only in electrical and electronic fields but also in all fields.
以上、本願発明における最良の形態について説明したが、この形態による記述及び図面により本発明が限定されることはない。すなわち、この形態に基づいて当業者等によりなされる他の形態、実施例及び運用技術等はすべて本発明の範疇に含まれることは勿論である。 As mentioned above, although the best form in this invention was demonstrated, this invention is not limited with the description and drawing by this form. That is, it is a matter of course that all other forms, examples, operation techniques, and the like made by those skilled in the art based on this form are included in the scope of the present invention.
１ 被酸化固体材料
２ マスク
３ 光
４ 酸化物
５ 集光レンズ
６ 被酸化液体材料
７ 容器
８ 透過性基体
９ 基体
DESCRIPTION OF SYMBOLS 1 Oxidized solid material 2 Mask 3 Light 4 Oxide 5 Condensing lens 6 Oxidized liquid material 7 Container 8 Transparent base 9 Base
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