JP5257099B2 - Sensor for temperature measurement - Google Patents
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- JP5257099B2 JP5257099B2 JP2009014982A JP2009014982A JP5257099B2 JP 5257099 B2 JP5257099 B2 JP 5257099B2 JP 2009014982 A JP2009014982 A JP 2009014982A JP 2009014982 A JP2009014982 A JP 2009014982A JP 5257099 B2 JP5257099 B2 JP 5257099B2
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- 238000009529 body temperature measurement Methods 0.000 title claims description 17
- 229920003002 synthetic resin Polymers 0.000 claims description 63
- 239000000057 synthetic resin Substances 0.000 claims description 63
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 38
- 238000005259 measurement Methods 0.000 claims description 16
- 230000007797 corrosion Effects 0.000 claims description 12
- 238000005260 corrosion Methods 0.000 claims description 12
- 229920001721 polyimide Polymers 0.000 claims description 10
- 239000009719 polyimide resin Substances 0.000 claims description 10
- 230000008018 melting Effects 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 6
- 229920001169 thermoplastic Polymers 0.000 claims description 6
- 229920001187 thermosetting polymer Polymers 0.000 claims description 6
- 239000004416 thermosoftening plastic Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 230000004044 response Effects 0.000 description 9
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000004043 responsiveness Effects 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004693 Polybenzimidazole Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229920002480 polybenzimidazole Polymers 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Description
本発明は温度測定用センサに係り、例えば、半導体ウエハを製造する装置の薬品温度を測定する温度測定用センサの改良に関する。 The present invention relates to a temperature measurement sensor, for example, an improvement of a temperature measurement sensor for measuring a chemical temperature of an apparatus for manufacturing a semiconductor wafer.
温度測定用センサ１としては、詳細な図示はしないが、先端を密閉した金属シースの内部先端に測温部（温度センサ）を収納するとともに、その金属シースをふっ素樹脂製チューブで被せたふっ素樹脂でコーティング処理した構成が知られている。 The temperature measuring sensor 1 is not shown in detail, but a temperature measuring part (temperature sensor) is housed in the inner tip of a metal sheath with a sealed tip, and the metal sheath is covered with a fluororesin tube. The structure coated with is known.
このような温度測定用センサ１は、例えば図５に示すように、薬液３を溜めた容器５内に挿入し、薬液３の温度に応じた電気信号を出力してその温度を測定するようになっている。なお、図５中の符号７は容器５の蓋体、符号９は温度測定用センサ１の蓋体７への接続具である。 For example, as shown in FIG. 5, such a temperature measurement sensor 1 is inserted into a container 5 in which a chemical solution 3 is stored, and an electric signal corresponding to the temperature of the chemical solution 3 is output to measure the temperature. It has become. In FIG. 5, reference numeral 7 denotes a lid of the container 5, and reference numeral 9 denotes a connection tool to the lid 7 of the temperature measuring sensor 1.
ところが、そのような温度測定用センサ１は、耐腐食性が良好ではあるが、金属シースを有するために折り曲げにくいとか、温度変化に対する応答性が悪いといった難点があった。 However, such a temperature measuring sensor 1 has good corrosion resistance, but has a drawback that it is difficult to bend because it has a metal sheath, or has poor response to temperature changes.
そこで、図６に示すように、測温部１１のリード線１３にケーブル１５の芯線１７を接続し、リード線１３と芯線１７を絶縁チューブ１９で被覆するとともに、測温部１１およびケーブル１５全体をふっ素樹脂チューブ２１内に収納した構成が提案されている。 Therefore, as shown in FIG. 6, the core wire 17 of the cable 15 is connected to the lead wire 13 of the temperature measuring unit 11, the lead wire 13 and the core wire 17 are covered with an insulating tube 19, and the temperature measuring unit 11 and the entire cable 15 are covered. The structure which accommodated in the fluororesin tube 21 is proposed.
実開昭６３−７２５３４号公報（特許文献１）の線状温度センサは、図６の構成に該当するものである。 The linear temperature sensor disclosed in Japanese Utility Model Laid-Open No. 63-72534 (Patent Document 1) corresponds to the configuration shown in FIG.
すなわち、この特許文献１は、熱溶着可能で熱収縮性のある合成樹脂製チューブ内に熱電対を構成する一対の金属細線が複数対収容され、夫々の対の温接点がそのチューブ内において直線的に間隔を保持して狭持されるとともに、そのチューブの先端が熱封着されてなり、小容器内の液体平均温度等を同時に測定できるようにしたものである。 That is, in Patent Document 1, a plurality of pairs of metal thin wires constituting a thermocouple are accommodated in a heat-shrinkable and heat-shrinkable synthetic resin tube, and each pair of hot junctions is linear in the tube. In addition, the tube is held at a certain distance, and the tip of the tube is heat sealed so that the average liquid temperature in the small container can be measured simultaneously.
また、図７に示すように、測温部１１のリード線１３にケーブル１５の芯線１７を接続し、リード線１３および芯線１７を含めて測温部１１およびケーブル１５全体外周に、溶融したふっ素樹脂によって円柱状の外被覆部２３を形成した構成も提案されている。 Further, as shown in FIG. 7, the core wire 17 of the cable 15 is connected to the lead wire 13 of the temperature measuring unit 11, and the molten fluorine including the lead wire 13 and the core wire 17 is melted on the entire outer periphery of the temperature measuring unit 11 and the cable 15. A configuration in which a cylindrical outer covering portion 23 is formed of resin has also been proposed.
特許第３６１３０８９号公報（特許文献２）の温度測定用センサは、図７の構成に該当する。 The temperature measuring sensor of Japanese Patent No. 3613089 (Patent Document 2) corresponds to the configuration of FIG.
この特許文献２は、耐蝕性および熱可塑性を有するとともに弾性変形が可能な合成樹脂製のチューブの先端部の内部に、後方に向かってリード線が接続された測温素子を実質的に介在物なしに直接に挿入し、そのチューブの先端部を外部から加熱して部分的に溶融させることにより、そのチューブの先端部内に測温素子を直接に融着して固定するとともに、そのチューブの先端部を閉じて測温素子を含む測温部を構成し、その測温部を目的の測温位置に位置させるようにしたものである。
しかしながら、上述した図６（特許文献１）の構成では、先端を溶着封止したふっ素樹脂チューブ２１に測温部１１を入れた構造となっているが、測温部１１と樹脂チューブ２１の間に空気層が介在することから、温度変化に対する応答性が悪いという問題がある。 However, in the configuration of FIG. 6 (Patent Document 1) described above, the temperature measuring unit 11 is inserted into the fluororesin tube 21 whose tip is welded and sealed, but between the temperature measuring unit 11 and the resin tube 21. Since the air layer is interposed between the two, there is a problem that the responsiveness to the temperature change is poor.
他方、上述した図７（特許文献２）の構成では、測温部１１、リード線１３および芯線１７がふっ素樹脂の外被覆部２３で溶着封止されるから、内部に空気層がなくて応答性の低下を抑えることが可能であるが、高温の被測定物を測定する際、ふっ素樹脂からなる外被覆部２３の熱膨張と内部のリード線１３の熱膨張率の違いに起因し、温度測定用センサ１を低温から高温の温度雰囲気中に放置すると、リード線１３が断線し易くなる問題点がある。 On the other hand, in the configuration of FIG. 7 (Patent Document 2) described above, since the temperature measuring unit 11, the lead wire 13 and the core wire 17 are welded and sealed with the outer covering portion 23 of fluororesin, there is no air layer inside and the response However, when measuring a high-temperature object to be measured, due to the difference between the thermal expansion of the outer covering portion 23 made of a fluororesin and the thermal expansion coefficient of the internal lead wire 13, the temperature If the measurement sensor 1 is left in a low to high temperature atmosphere, there is a problem that the lead wire 13 is easily broken.
しかも、一般にふっ素樹脂は帯電し易く、外部に帯電した静電気が内部のリード線１３および芯線１７との間で放電すると、外被覆部２３にピンホールが生じてリード線１３および芯線１７等が腐食する心配もある。 Moreover, in general, the fluororesin is easily charged, and when externally charged static electricity is discharged between the internal lead wire 13 and the core wire 17, a pinhole is generated in the outer covering portion 23, and the lead wire 13 and the core wire 17 are corroded. There is also a worry to do.
本発明はそのような課題を解決するためになされたもので、断線や腐食が生じ難く、測定温度の応答性も良好で、構成の簡単な温度測定用センサの提供を目的とする。 The present invention has been made to solve such a problem, and an object of the present invention is to provide a temperature measuring sensor that is not easily broken or corroded, has good measurement temperature responsiveness, and has a simple configuration.
そのような課題を解決するために本発明の請求項１に係る温度測定用センサは、伝導熱に応じたレベルの測定信号に変換する測温素子とこれから測定信号を出力するリード線とを有する測温部と、この測温部のリード線に接続され測定信号を外部へ出力するケーブルと、その測温部が挿入されこの測温部、およびリード線とケーブルとの接続部を少なくとも被覆する耐電圧性の合成樹脂製チューブと、耐蝕性および耐熱性合成樹脂からなり、その測温部にあってリード線の導出方向とは反対の先端側からそれら合成樹脂製チューブ全体およびケーブルの端部を被覆するようこれらに溶着された外被覆部とを具備し、その合成樹脂製チューブは、その外被覆部より溶融温度が少なくとも１．２倍以上の熱可塑性の耐熱性合成樹脂、又は熱硬化性の耐熱性合成樹脂から成型されて構成されている。 In order to solve such a problem, a temperature measurement sensor according to claim 1 of the present invention includes a temperature measuring element that converts a measurement signal of a level corresponding to conduction heat, and a lead wire that outputs the measurement signal therefrom. A temperature measuring unit, a cable that is connected to the lead wire of the temperature measuring unit and outputs a measurement signal to the outside, and the temperature measuring unit is inserted to cover at least the temperature measuring unit and a connecting portion between the lead wire and the cable. It consists of a synthetic resin tube with voltage resistance and a synthetic resin with corrosion resistance and heat resistance. The entire synthetic resin tube and the end of the cable from the tip side opposite to the lead-out direction in the temperature measuring section. The synthetic resin tube is a thermoplastic heat-resistant synthetic resin whose melting temperature is at least 1.2 times or more than that of the outer coating portion, or thermosetting. sex Is constructed are molded from heat-resistant synthetic resin.
本発明の請求項２に係る温度測定用センサは、上記合成樹脂製チューブが、そのケーブルの端部にも挿入されてこれを被覆する構成を有している。 The temperature measuring sensor according to claim 2 of the present invention has a configuration in which the synthetic resin tube is inserted into the end portion of the cable to cover it.
本発明の請求項３に係る温度測定用センサは、上記外被覆部がふっ素樹脂からなり、上記合成樹脂製チューブがポリイミド樹脂からなる構成も可能である。 The temperature measuring sensor according to claim 3 of the present invention may be configured such that the outer covering portion is made of a fluororesin and the synthetic resin tube is made of a polyimide resin.
本発明の請求項４に係る温度測定用センサは、上記外被覆部が、溶融された耐蝕性および耐熱性合成樹脂により、それら合成樹脂製チューブ全体およびケーブルに付着されて柱状に成型されてなる構成も可能である。 The temperature measuring sensor according to claim 4 of the present invention is such that the outer covering portion is attached to the entire synthetic resin tube and cable and molded into a columnar shape by molten corrosion-resistant and heat-resistant synthetic resin. Configuration is also possible.
本発明の請求項１に係る温度測定用センサでは、上記測温部やこのリード線等が耐電圧性の合成樹脂製チューブに挿入され、その測温部にあってリード線の導出方向とは反対の先端側から外被覆部が、合成樹脂製チューブ全体およびケーブルの端部を被覆するようこれらに溶着され、その合成樹脂製チューブが、その外被覆部より溶融温度が少なくとも１．２倍以上の熱可塑性の耐熱性合成樹脂、又は熱硬化性の耐熱性合成樹脂から成型されているので、合成樹脂製チューブを薄くしても耐電圧性および熱伝導を確保することが可能であるうえ、上記測温部およびこのリード線とケーブルの接続部が合成樹脂製チューブとの間で相対的に変位可能となり、耐食性および測定温度応答性が良好で、リード線等の断線やピンホールの発生も防止可能である。 In the temperature measurement sensor according to claim 1 of the present invention, the temperature measuring section, the lead wire, and the like are inserted into a voltage-resistant synthetic resin tube, and in the temperature measuring section, what is the lead-out direction? The outer covering portion is welded to the synthetic resin tube and the end portion of the cable from the opposite tip side, and the synthetic resin tube has a melting temperature at least 1.2 times higher than that of the outer covering portion. Since it is molded from the thermoplastic heat-resistant synthetic resin or thermosetting heat-resistant synthetic resin, it is possible to ensure voltage resistance and heat conduction even if the synthetic resin tube is thinned. The temperature measuring part and the lead wire and cable connection part can be relatively displaced between the synthetic resin tube, corrosion resistance and measurement temperature responsiveness are good, and lead wire breakage and pinholes are also generated. Prevention possible It is.
本発明の請求項２に係る温度測定用センサでは、上記合成樹脂製チューブがそのケーブルの端部にも挿入されてこれを被覆するから、機械的強度がより良好になる。 In the temperature measuring sensor according to claim 2 of the present invention, the synthetic resin tube is also inserted into the end portion of the cable to cover it, so that the mechanical strength becomes better.
本発明の請求項３に係る温度測定用センサは、上外被覆部がふっ素樹脂からなり、その合成樹脂製チューブがポリイミド樹脂からなるから、特に、断線や腐食の防止が確実で、測定温度の応答性も一層良好になる。 In the temperature measuring sensor according to claim 3 of the present invention, the upper and outer coating parts are made of fluororesin, and the synthetic resin tube is made of polyimide resin. The response is further improved.
本発明の請求項４に係る温度測定用センサでは、上記外被覆部が、溶融された耐蝕性および耐熱性合成樹脂により、それら合成樹脂製チューブ全体およびケーブルに付着されて柱状に成型されてなるから、構造および製造が簡単になる。 In the temperature measurement sensor according to the fourth aspect of the present invention, the outer covering portion is attached to the whole synthetic resin tube and the cable and molded into a column shape by the molten corrosion resistance and heat resistance synthetic resin. This simplifies the structure and manufacture.
以下、本発明の実施の形態を図面を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１および図２は本発明に係る温度測定用センサ２５の実施の一形態を示す縦断面図および要部正面図である。 FIG. 1 and FIG. 2 are a longitudinal sectional view and a main part front view showing an embodiment of a temperature measuring sensor 25 according to the present invention.
図１において、測温部２７は、伝導熱に応じたレベルの測定信号に変換する測温素子（内部に隠れて見えない。）と、これから測定信号を出力するリード線２９とを有する公知のものであり、細長い柱状にモールド成形されてなり、一方の端面部から２本のリード線２９が突出している。測温素子は、熱電対、測温抵抗体その他従来公知の温度センサである。 In FIG. 1, a temperature measuring unit 27 is a known device having a temperature measuring element (not visible in the interior) that converts it into a measurement signal of a level corresponding to conduction heat, and a lead wire 29 that outputs the measurement signal therefrom. The two lead wires 29 protrude from one end surface portion. The temperature measuring element is a thermocouple, a resistance temperature detector, or other conventionally known temperature sensor.
リード線２９には従来公知のケーブル３１の２本の芯線３３が、例えば銀ロウ付けされており、一方のリード線２９およびこれに接続された芯線３３が絶縁チューブ３５に挿通されて絶縁被覆されており、測温部２７からケーブル３１を介して測定信号が外部へ出力されるようになっている。 The lead wire 29 has two core wires 33 of a conventionally known cable 31 brazed with, for example, silver, and one lead wire 29 and the core wire 33 connected to the lead wire 29 are inserted into an insulating tube 35 and insulated. The measurement signal is output to the outside from the temperature measuring unit 27 via the cable 31.
測温部２７、リード線２９、ケーブル３１のリード線２９側の端部は、耐電圧性の良好な合成樹脂、例えばポリイミド樹脂から予め細長い筒型に成形された合成樹脂製チューブ３７内に挿入され、測温部２７からケーブル３１の外周が合成樹脂製チューブ３７内壁に当接している。 The temperature measuring portion 27, the lead wire 29, and the end portion of the cable 31 on the lead wire 29 side are inserted into a synthetic resin tube 37 formed into a long and narrow cylindrical shape in advance from a synthetic resin having good voltage resistance, for example, a polyimide resin. The outer periphery of the cable 31 from the temperature measuring unit 27 is in contact with the inner wall of the synthetic resin tube 37.
すなわち、合成樹脂製チューブ３７は、測温部２７全体、リード線２９並びにケーブル３１のリード線２９全体、およびケーブル３１のリード線２９側の端部が挿入可能な内径を有し、それらを被覆している。 That is, the synthetic resin tube 37 has an inner diameter into which the entire temperature measuring section 27, the lead wire 29 and the entire lead wire 29 of the cable 31, and the end of the cable 31 on the lead wire 29 side can be inserted, and covers them. doing.
合成樹脂製チューブ３７およびケーブル３１のリード線２９側の端部は、耐蝕性および耐熱性合成樹脂、例えばふっ素樹脂からなる外被覆部３９によって被覆、溶着されている。 The ends of the synthetic resin tube 37 and the cable 31 on the lead wire 29 side are covered and welded with an outer covering portion 39 made of a corrosion-resistant and heat-resistant synthetic resin, for example, a fluorine resin.
すなわち、外被覆部３９は、測温部２７にあってリード線２９の導出方向とは反対の先端側からそれら合成樹脂製チューブ３７全体およびケーブル３１の端部を、被覆、溶着している。 That is, the outer covering portion 39 covers and welds the entire synthetic resin tube 37 and the end portion of the cable 31 from the distal end side opposite to the lead-out direction of the lead wire 29 in the temperature measuring portion 27.
外被覆部３９は、例えば、溶融されたふっ素樹脂中に合成樹脂製チューブ３７全体およびケーブル３１ごと浸けることにより、それら合成樹脂製チューブ３７全体およびケーブル３１に溶融ふっ素樹脂を付着させ、図示しない成形型によって円柱状に成型されて形成されている。 The outer covering portion 39 is formed by, for example, immersing the entire synthetic resin tube 37 and the cable 31 in the molten fluororesin so that the molten fluorine resin adheres to the entire synthetic resin tube 37 and the cable 31 and is not shown in the drawing. It is formed into a cylindrical shape by a mold.
そして、合成樹脂製チューブ３７は、外被覆部３９より溶融温度が少なくとも１．２倍以上、好ましくは１．３倍以上の熱可塑性の耐熱性合成樹脂、又は熱硬化性の耐熱性合成樹脂、例えばポリイミド樹脂から形成されている。 The synthetic resin tube 37 is a thermoplastic heat-resistant synthetic resin having a melting temperature at least 1.2 times or more, preferably 1.3 times or more than that of the outer covering portion 39, or a thermosetting heat-resistant synthetic resin, For example, it is formed from a polyimide resin.
そのため、ポリイミド樹脂は、１２ｋＶ／０．００６ｍｍ程度の耐電圧性を有するとともに耐熱性も良好であるから、ポリイミド樹脂から合成樹脂製チューブ３７が形成されれば、これを薄く形成しても、耐電圧性および熱応答性を良好に維持可能であるうえ、測温部２７等に当接するのみで溶着されないから、合成樹脂製チューブ３７に対する測温部２７やリード線２９等のスライド変位も確保される。 Therefore, since the polyimide resin has a voltage resistance of about 12 kV / 0.006 mm and also has good heat resistance, if the synthetic resin tube 37 is formed from the polyimide resin, The voltage and thermal responsiveness can be maintained satisfactorily, and since only the abutment is brought into contact with the temperature measuring unit 27 and not welded, the slide displacement of the temperature measuring unit 27 and the lead wire 29 with respect to the synthetic resin tube 37 is also ensured. The
このような温度測定用センサ２５は、上述した図５に示すように、薬液３を溜めた容器５内に挿入し、薬液３の温度に応じた電気信号をケーブル３１を介して出力し、薬液３の温度を測定する。 As shown in FIG. 5 described above, such a temperature measuring sensor 25 is inserted into the container 5 in which the chemical liquid 3 is stored, and outputs an electrical signal corresponding to the temperature of the chemical liquid 3 via the cable 31. Measure the temperature of 3.
このように構成された本発明の温度測定用センサ２５は、伝導熱に応じたレベルの測定信号に変換する測温素子とこれから測定信号を出力するリード線２９とを有する測温部２７と、この測温部２７のリード線２９に接続され測定信号を外部へ出力するケーブル３１と、その測温部２７が挿入されこれら測温部２７からケーブル３１端部までを被覆する耐電圧性の合成樹脂製チューブ３７と、耐蝕性および耐熱性合成樹脂（ふっ素樹脂）の外被覆部３９からなり、その測温部２７にあってリード線２９の導出方向とは反対の先端側からそれら合成樹脂製チューブ３７全体およびケーブル３１の端部を被覆するようこれらに溶着された外被覆部３９とを具備し、その合成樹脂製チューブ３７は、その外被覆部３９より溶融温度が少なくとも１．２倍以上の熱可塑性の耐熱性合成樹脂、又は熱硬化性の耐熱性合成樹脂（ポリイミド樹脂）から成型されている。 The temperature measuring sensor 25 of the present invention configured as described above includes a temperature measuring unit 27 having a temperature measuring element that converts a measurement signal to a level corresponding to conduction heat, and a lead wire 29 that outputs the measurement signal therefrom, A cable 31 that is connected to the lead wire 29 of the temperature measuring unit 27 and outputs a measurement signal to the outside, and a voltage-resistant composite that covers the region from the temperature measuring unit 27 to the end of the cable 31 when the temperature measuring unit 27 is inserted. It consists of a resin tube 37 and an outer coating portion 39 of a corrosion-resistant and heat-resistant synthetic resin (fluororesin), and is made of these synthetic resins from the distal end side opposite to the lead-out direction of the lead wire 29 in the temperature measuring portion 27. The outer cover portion 39 welded to the entire tube 37 and the end portion of the cable 31 is provided. The synthetic resin tube 37 has a melting temperature of at least 1. Times more thermoplastic heat-resistant synthetic resin, or is molded from a thermosetting heat-resistant synthetic resin (polyimide resin).
そのため、合成樹脂製チューブ３７は、これを薄く形成しても、耐電圧性および熱応答性も良好であるうえ、測温部２７に対するスライド変位が確保されるから、リード線２９の断線も生じ難いし、外被覆部３９に帯電した静電気がリード線２９および芯線３３等との間で放電し難く、外被覆部２３にピンホールが生じ難くてリード線２９および芯線３３等が腐食する心配もない。 Therefore, even if the synthetic resin tube 37 is formed thin, the withstand voltage and the thermal response are good, and the slide displacement with respect to the temperature measuring unit 27 is ensured. It is difficult to discharge static electricity between the lead wire 29 and the core wire 33 and the like, and the lead wire 29 and the core wire 33 and the like are likely to be corroded. Absent.
すなわち、熱応答性に影響を与え易い外被覆部３９の厚みを変更せずに、測温部２７との間に薄い合成樹脂製チューブ３７を介在させるだけで、良好な耐電圧性および熱応答性の確保が可能である。 That is, it is possible to obtain good voltage resistance and thermal response only by interposing a thin synthetic resin tube 37 between the temperature measuring unit 27 without changing the thickness of the outer covering portion 39 that easily affects the thermal response. It is possible to ensure the sex.
しかも、上記外被覆部３９が、溶融された耐蝕性および耐熱性合成樹脂により、それら合成樹脂製チューブ３７全体およびケーブル３１に付着されて柱状に成型されてなるから、製造も簡単である。 In addition, the outer covering portion 39 is attached to the entire synthetic resin tube 37 and the cable 31 and molded into a columnar shape by the molten corrosion-resistant and heat-resistant synthetic resin, so that the manufacture is also simple.
図３は、従来の特許文献１、２の構造および本発明の温度測定用センサ２５について、各々ほぼ同一寸法に構成し、室温から沸騰水に浸漬させた時のセンサの指示値の応答を比較したときの応答比較特性である。 FIG. 3 shows a comparison of the responses of the indicated values of the conventional patent documents 1 and 2 and the temperature measuring sensor 25 of the present invention, which are configured to have substantially the same dimensions and immersed in boiling water from room temperature. This is a response comparison characteristic.
これによれば、特許文献１の構造よりは、本発明の温度測定用センサ２５の方が応答時間が早く、応答性も良好であり、特許文献２とほぼ同じ特性を示していることが分かる。 According to this, it can be seen that the temperature measurement sensor 25 of the present invention has a faster response time and better response than the structure of Patent Document 1, and exhibits substantially the same characteristics as Patent Document 2. .
また、図４は、従来の特許文献２の構造および本発明の温度測定用センサ２５について、断線しやすさを確認したものであり、室温→２６０℃→室温の温度サイクルを繰返したとき、断線した時の温度変化の繰返し回数を示したものである。 FIG. 4 shows the structure of the conventional patent document 2 and the temperature measuring sensor 25 of the present invention, which confirms the ease of disconnection. When the temperature cycle of room temperature → 260 ° C. → room temperature is repeated, the disconnection occurs. It shows the number of times the temperature change is repeated.
これによれば、本発明センサの温度測定用センサ２５は、特許文献２の構成よりは、昇温降下に対して著しく断線し難いことが分かる。 According to this, it can be seen that the temperature measurement sensor 25 of the sensor of the present invention is significantly less likely to break with respect to the temperature rise and fall than the configuration of Patent Document 2.
ところで、上述した本発明の温度測定用センサ２５では、その測温部２７が挿入されこれら測温部２７からケーブル３１端部までを合成樹脂製チューブ３７で被覆したが、測温部２７およびリード線２９とケーブル３１の芯線３３との接続部を少なくとも被覆すれば、本発明の目的達成が可能である。 In the temperature measuring sensor 25 of the present invention described above, the temperature measuring unit 27 is inserted and the temperature measuring unit 27 to the end of the cable 31 are covered with the synthetic resin tube 37. However, the temperature measuring unit 27 and the lead The object of the present invention can be achieved by covering at least the connecting portion between the wire 29 and the core wire 33 of the cable 31.
また、合成樹脂製チューブ３７は、耐電圧性が良好な合成樹脂であって、外被覆部３９より溶融温度が少なくとも１．２倍以上の熱可塑性合成樹脂、又は硬化後は溶け難い熱硬化性合成樹脂が好適する。具体的には、上述したポリイミド樹脂（ＰＩ）の他、例えばポリベンゾイミダゾール樹脂（ＰＢＩ）等が好ましいであろう。 The synthetic resin tube 37 is a synthetic resin having a good voltage resistance, and is a thermoplastic synthetic resin having a melting temperature at least 1.2 times higher than that of the outer covering portion 39, or a thermosetting property that hardly melts after curing. Synthetic resins are preferred. Specifically, for example, polybenzimidazole resin (PBI) may be preferable in addition to the above-described polyimide resin (PI).
さらに、外被覆部３９もふっ素樹脂に限らず、耐蝕性および耐熱性合成樹脂であれば良い。 Further, the outer covering portion 39 is not limited to the fluororesin, but may be any corrosion-resistant and heat-resistant synthetic resin.
１、２５ 温度測定用センサ
３ 薬液
５ 容器
７ 蓋体
９ 接続具
１１、２７ 測温部（温度センサ）
１３、２９ リード線
１５、３１ ケーブル
１７、３３ 芯線
１９、３５ 絶縁チューブ
２１ ふっ素樹脂チューブ
３７ 合成樹脂製チューブ
２３、３９ 外被覆部
DESCRIPTION OF SYMBOLS 1, 25 Sensor for temperature measurement 3 Chemical solution 5 Container 7 Lid body 9 Connector 11, 27 Temperature measuring part (temperature sensor)
13, 29 Lead wire 15, 31 Cable 17, 33 Core wire 19, 35 Insulating tube 21 Fluororesin tube 37 Synthetic resin tube 23, 39 Outer sheath
Claims (4)
この測温部の前記リード線に接続され前記測定信号を外部へ出力するケーブルと、
前記測温部が挿入されこの測温部、および前記リード線と前記ケーブルとの接続部を少なくとも被覆する耐電圧性の合成樹脂製チューブと、
耐蝕性および耐熱性合成樹脂からなり、前記測温部にあって前記リード線の導出方向とは反対の先端側から前記合成樹脂製チューブ全体および前記ケーブルの端部を被覆するようこれらに溶着された外被覆部と、
を具備し、
前記合成樹脂製チューブは、前記外被覆部より溶融温度が少なくとも１．２倍以上の熱可塑性の耐熱性合成樹脂、又は熱硬化性の耐熱性合成樹脂から成型されてなることを特徴とする温度測定用センサ。 A temperature measuring unit having a temperature measuring element for converting to a measurement signal of a level corresponding to the conduction heat and a lead wire for outputting the measurement signal therefrom,
A cable connected to the lead wire of the temperature measuring unit and outputting the measurement signal to the outside;
The temperature measuring unit is inserted, the temperature measuring unit, and a voltage-resistant synthetic resin tube covering at least the connecting portion between the lead wire and the cable,
Made of corrosion-resistant and heat-resistant synthetic resin, welded to cover the entire synthetic resin tube and the end of the cable from the tip side opposite to the lead-out direction of the lead wire in the temperature measuring section. An outer covering,
Comprising
The synthetic resin tube is formed from a thermoplastic heat-resistant synthetic resin having a melting temperature of at least 1.2 times or more than that of the outer coating portion, or a thermosetting heat-resistant synthetic resin. Sensor for measurement.
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