JP5256541B2 - Fluid heating device - Google Patents

Description

    The present invention relates to a fluid heating apparatus used for heating various heated fluids to a desired temperature, and more specifically, an outer tube having an inlet and an outlet for heated fluid, and a fixed installation on the outer tube. The present invention relates to a fluid heating apparatus comprising an inner pipe that defines a flow path of a fluid to be heated, and a lamp heater that is housed and installed in the inner pipe and that heats the fluid to be heated that passes through the flow path.

    For example, in the semiconductor manufacturing field, a fluid heating apparatus that uses a lamp heater as a heating means to adjust the temperature of a chemical solution is used for temperature control of the chemical solution (temperature-controlled fluid) in various manufacturing processes.

  Moreover, as one aspect of the fluid heating device described above, an outer tube whose both ends are closed, an inner tube that is installed in the outer tube to define a flow path for a chemical solution, and a lamp that is inserted and installed in the inner tube A fluid heating apparatus including a heater is provided (see, for example, Patent Document 1).

  The fluid heating apparatus A shown in FIGS. 13 and 14 is a specific example of the above-described configuration, and is configured by accommodating and installing a heating unit Au inside the casing Ac. The heating unit Au is closed at both ends. An outer tube B having a cylindrical shape and cylindrical inner tubes C, C... Installed through the end wall of the outer tube B are provided.

  A halogen lamp heater D as a heating means is inserted and installed in each of the inner tubes C, C... Described above, and the halogen lamp heater D has both ends of a heat-resistant glass heater tube Da enclosing a filament. Is sealed with the end bases Db and Db.

  A flow path Bg of a chemical solution (temperature-controlled fluid) L is defined inside the outer tube B by the inner tube C in which the halogen lamp heater D is inserted and installed. An inlet provided in the outer tube B The chemical liquid (temperature-controlled fluid) L supplied from Bi is heated by absorbing infrared rays radiated from the halogen lamp heater D when passing through the flow path Bg, and the outlet Bo provided in the outer tube B. Go through the exhaust.

Incidentally, the above-described fluid heating device A uses four halogen lamp heaters D having a rating of 3 kW so that the heating capacity is 12 kW, and the above-described fluid heating device A includes individual halogen lamp heaters D. Has a total length of about 450 mm, and therefore, the external dimension in the longitudinal direction including the casing Ac is set to about 500 mm.
Japanese Patent Laid-Open No. 5-231712

    By the way, the halogen lamp heater D employed in the fluid heating apparatus A having the above-described structure has a problem such as causing an early disconnection of the filament due to its structure, and thus it is difficult to place the lamp vertically along the vertical direction. Therefore, it must be laid horizontally in the horizontal direction as shown in FIG.

  For this reason, in the conventional fluid heating apparatus A, it is influenced by the overall length of the horizontally placed halogen lamp heater D, and the dimension in the longitudinal direction of the external shape becomes large, and a large set space is required when installing it at a desired location. There was a problem.

  Furthermore, in the conventional fluid heating apparatus A, since the halogen lamp heater D needs to be pulled out along the longitudinal direction during maintenance work, it is necessary to secure a longer maintenance space in addition to the wide set space described above. It was necessary to prepare an extremely large installation space for operation.

  In view of the above circumstances, an object of the present invention is to provide a fluid heating apparatus that can achieve as much space saving as possible for installation spaces such as a set space and a maintenance space.

To achieve the above object, a fluid heating device according to claim 1, together with both end portions are closed, elongated external shape in the vertical direction is provided Rukoto every vertically and along the longitudinal axis in the vertical direction the exhibits, has an inlet of the heated fluid to lower, and an outer tube having an outlet for the heated fluid to the upper, intersects the direction of the longitudinal axis of the outer tube, fixedly mounted through the outer tube And an inner tube that defines a flow path of the fluid to be heated with the outer tube, and a lamp heater that is housed and installed in the inner tube.

  The fluid heating device according to claim 2 is the fluid heating device according to claim 1, wherein the plurality of inner tubes are installed on the same plane that develops along the direction of the longitudinal axis of the outer tube. It is characterized by that.

  A fluid heating device according to a third aspect of the invention is characterized in that, in the fluid heating device according to the second aspect of the invention, the outer tube has a rectangular tube shape with both ends closed.

  Further, the fluid heating device according to the invention of claim 4 is the fluid heating device according to claim 1, wherein the plurality of inner tubes are installed in such a position that adjacent inner tubes are not parallel to each other. It is a feature.

  A fluid heating apparatus according to a fifth aspect of the present invention is the fluid heating apparatus according to the fourth aspect, characterized in that the outer tube has a cylindrical shape with both ends closed.

According to the fluid heating apparatus relating to the first aspect of the invention, the outer tube is installed vertically so as to exhibit a vertically long external shape, and the inner tube containing the lamp heater is disposed substantially horizontally. By adopting a lamp heater with a shorter overall length than before and increasing the number of lamp heaters with a smaller output due to its shorter overall length, while maintaining the heating capacity equivalent to that of a conventional fluid heating device, It is possible to achieve as much space saving as possible for the installation space related to operation such as maintenance space.

  In addition, the inner tube that houses and installs the lamp heater is disposed substantially horizontally so as to intersect with the longitudinal axis direction of the outer tube, so that it is heated from the lower inlet to the upper outlet of the outer tube. Since the fluid flows intersecting with the inner pipe accommodating and installing the lamp heater, the heating efficiency to the fluid to be heated by the lamp heater is good.

  According to the fluid heating device relating to the invention of claim 2, the plurality of inner pipes accommodating and installing the lamp heater are installed on the same plane developed along the direction of the longitudinal axis of the outer pipe. The heated fluid that rises from the lower inlet to the upper outlet of the tube will smoothly flow through the flow path inside the outer tube, so that the heating efficiency of the heated fluid by the lamp heater is good. It becomes.

  According to the fluid heating apparatus relating to the invention of claim 3, by making the outer tube into a rectangular tube shape whose both ends are closed, a plurality of inner tubes accommodating and installing the lamp heater are parallel to the side wall of the outer tube. By disposing on the flat surface, the distance between the side wall of the outer tube and the inner tube in the flow path can be made equal over the entire area of each inner tube, and thus the fluid to be heated by the lamp heater Heating efficiency to is good.

  According to the fluid heating device relating to the invention of claim 4, the plurality of inner pipes accommodating and installing the lamp heaters are installed in such a manner that adjacent inner pipes are not parallel to each other. It is possible to mitigate overheating of the tubes due to heat interference, so that a long life of the lamp heater can be expected.

  According to the fluid heating device relating to the invention of claim 5, by making the outer tube into a cylindrical shape with both end portions closed, a plurality of inner tubes in which the lamp heaters are accommodated are connected to each other. When installed in a non-parallel position mode, the flow path of the outer pipe with respect to each inner pipe becomes uniform, and unevenness in the heating efficiency of each inner pipe is suppressed, so that the fluid to be heated by the lamp heater is Heating efficiency to is good.

Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments.
1 to 3 show an example in which the fluid heating apparatus according to the present invention is applied to a fluid heating apparatus for arbitrarily adjusting the temperature of a chemical solution (temperature-controlled fluid) used in various processes of semiconductor manufacturing. Show.

  The fluid heating apparatus 10 according to the first embodiment includes a vertically long casing 10A having a square box shape and a heating unit 10U accommodated and installed in the casing 10A.

  The heating unit 10U includes an outer tube 11 closed at both ends, and cylindrical inner tubes 12, 12... Installed through the outer tube 11, and an inner tube 12 made of transparent heat-resistant glass. , 12... Are inserted and installed as halogen lamp heaters 13, 13.

The outer tube 11 in the heating unit 10U has a rectangular tube shape in which both upper and lower ends are closed, and extends along the longitudinal direction of the outer tube 11 through the longitudinal axis (intersection of diagonal lines in the cross section). It is installed vertically in the casing 10 </ b> A in a posture in which the axis) is aligned in the vertical direction. Here, the size of the outer tube 11 in this embodiment, 470 (H) mm × 250 (W) mm × 250 (D) mm der is, the outer tube 11 with the exhibit a vertically elongated outer shape in the vertical direction Yes.

  Further, a chemical solution supply pipe (inlet) 11 i is provided at the lower part of the outer tube 11, and a chemical solution discharge pipe (outlet) 11 o is provided at the upper part of the outer tube 11. The supply pipe 11i and the discharge pipe 11o extend through the front surface of the casing 10A.

  The inner pipes 12, 12... In the heating unit 10U have a cylindrical shape with open ends, and extend in a substantially horizontal direction in a manner that intersects the longitudinal axis direction (vertical direction) of the outer pipe 11 described above. The outer pipe 11 is fixedly installed (welded), and a chemical liquid flow path 11g is defined in the outer pipe 11 by a space with the inner pipes 12, 12,.

  Here, in the heating unit 10U, a total of ten inner pipes 12, 12,... Are provided, and these ten inner pipes 12, 12,. Yes.

  2 (a) and 2 (b), the inner pipes 12, 12... In the right column have individual axis lines aa (see FIG. 3) arranged in parallel to the direction of the longitudinal axis (vertical direction) of the outer pipe 11. And installed in such a manner that it is positioned on the same plane that develops along the direction of the longitudinal axis (vertical direction).

  Similarly, the inner pipes 12, 12... In the left column in FIGS. 2 (a) and 2 (b) show the individual axes bb (see FIG. 3) in the direction of the longitudinal axis (vertical direction) of the outer pipe 11. Are arranged in parallel with each other, and are arranged on the same plane that develops along the direction of the longitudinal axis (vertical direction).

  In addition, the axis aa of the inner tubes 12, 12... In the right row and the axis bb of the inner tubes 12, 12. Are parallel to the side wall, and the inner pipes 12, 12,... In the right row and the inner pipes 12, 12,... In the left row are laid out in a staggered manner when viewed from the front.

  In addition, the distance between pitches in the individual inner pipes 12, 12..., Specifically, the interval (dimension) between the peripheral walls of the adjacent inner pipes 12 is determined in consideration of the welding operation of the inner pipe 12 with respect to the outer pipe 11. The fluid heating device (see FIGS. 13 and 14) is set.

  The halogen lamp heater 13 inserted and installed in the inner pipes 12, 12... Has two heater pipes 13 a and 13 a in which filaments are enclosed, and both ends of the heater pipes 13 a and 13 a are connected to the end. It is supported by the part bases 13b and 13b, and each filament is connected to the back end part base 13b to form a single end, and two wires are led out from the front end part base 13b. .

  Here, although the total length of the halogen lamp heater 13 is as short as about 300 mm and its rated output is as small as 1.2 kW, the halogen lamp heater 13 is inserted and installed in the ten inner tubes 12, 12. By using a total of ten halogen lamp heaters 13, 13,..., The heating capacity of the fluid heating device 10 is set to 12 kW.

  That is, in the fluid heating apparatus 10 of the present embodiment, in order to obtain a heating capacity equivalent to that of the current fluid heating apparatus (see FIGS. 13 and 14) having a heating capacity of 12 kW, the rated output of the halogen lamp heater 13 is small, In other words, the light receiving area is made the same as that of the current fluid heating device by increasing the number of the halogen lamp heaters 13 due to the short total length of the halogen lamp heater 13.

  In the fluid heating device 10 described above, when the chemical solution supplied from the supply pipe 11i provided in the lower portion of the outer tube 11 in the heating unit 10U passes through the flow path 11g in the outer tube 11, each inner tube 12, The infrared rays emitted from the halogen lamp heaters 13, 13... Inserted in 12... Are absorbed and heated, and are discharged through a discharge pipe 11 o provided in the upper part of the outer tube 11.

  According to the fluid heating device 10 configured as described above, the outer tube 11 is installed vertically, and the inner tubes 12, 12... In addition, the halogen lamp heater 13 having a short overall length is adopted, and the installation number of halogen lamp heaters 13 having a small output due to the short overall length is increased, so that the heating capacity equivalent to that of the conventional fluid heating apparatus is maintained, and the set space and It is possible to achieve as much space saving as possible for the installation space related to operation, such as a maintenance space.

  Further, according to the fluid heating device 10 having the above-described configuration, the inner tubes 12, 12... Containing the halogen lamp heater 13 are disposed substantially horizontally so as to intersect the direction of the longitudinal axis of the outer tube 11. The chemical solution rising from the lower supply pipe 11i of the outer pipe 11 toward the upper discharge pipe 11o flows across the inner pipes 12, 12,. The heating efficiency to the chemical solution by 13 is good.

  Furthermore, according to the fluid heating apparatus 10 having the above-described configuration, the outer tube 11 is formed in a rectangular tube shape with both ends closed, thereby allowing a plurality of inner tubes 12, 12,. By disposing on a plane parallel to the side wall of the outer tube 13, the distance between the side wall of the outer tube 11 and the inner tube 12 in the flow path 11 g is the same distance over the entire area of each inner tube 12, 12. Therefore, the heating efficiency of the chemical solution by the halogen lamp heater 13 is good.

  4 and 5 show a second embodiment of a fluid heating apparatus according to the present invention. This fluid heating apparatus 20 is a vertically long casing 20A having a square box shape, and accommodated in the casing 20A. And a heating unit 20U.

The outer tube 21 of the heating unit 20U has a rectangular tube shape in which both upper and lower ends are closed, and the size of the outer tube 21 in this embodiment is 470 (H) mm × 250 (W) mm × 230. (D) mm der is, the outer tube 21 has and has a vertically elongated outer shape in the vertical direction.

  Further, the inner tubes 22, 22... Of the heating unit 20U have a cylindrical shape with one end closed, and extend in a substantially horizontal direction so as to intersect with the direction of the longitudinal axis (vertical direction) in the outer tube 21, The end portion on the open side is fixedly installed (welded) through the front wall of the outer tube 21.

  The halogen lamp heater 23 inserted and installed in the inner tubes 22, 22... Has one heater tube 23a enclosing a filament bent in a hairpin shape and both ends are supported by one end base 23b. Thus, two wires are led out from the end base 23b.

  Here, the halogen lamp heater 23 has a rating of 1.2 kW similar to the halogen lamp heater 13 of the first embodiment, but the end base 23b is provided only at one end of the heater tube 23a. The overall length is shorter than the halogen lamp heater 13 in the example.

  The fluid heating device 20 described above is the same as the fluid heating device 10 because there is no difference from the fluid heating device 10 of the first embodiment except for the configuration of the inner tube 22 and the halogen lamp heater 23. Detailed description will be omitted by adding the reference numerals in the 20's to which 10 is added to the reference numerals in FIGS.

  According to the fluid heating device 20 having the above-described configuration, in the same manner as the fluid heating device 10 in the first embodiment, the heating capacity equivalent to that of the conventional fluid heating device is maintained, and operation such as a set space and a maintenance space is performed. As a result, it is possible to achieve as much space saving as possible for the installation space related to the above, and to improve the heating efficiency of the chemical solution by the halogen lamp heater.

  Further, according to the fluid heating apparatus 20 having the above-described configuration, since the overall length of the halogen lamp heater 23 is short, the overall length of the inner tubes 22, 22... Into which the halogen lamp heater 23 is inserted is also short. Based on the structure of 23, the inner tubes 22, 22... Only penetrate the front wall of the outer tube 21, and do not protrude from the rear wall of the outer tube 21, so that the heating unit 20U can be further reduced in size and extended. Further, the installation space of the fluid heating device 20 can be further reduced.

  Further, according to the fluid heating device 20 having the above configuration, only one end portion of the inner pipes 22, 22... Is fixedly installed (welded) through the outer pipe 21. 22, 22... Are few, so that the manufacturing of the heating unit 20 </ b> U can be simplified, and the cost for manufacturing the fluid heating device 20 can be reduced.

  6 and 7 show a third embodiment of a fluid heating apparatus according to the present invention. This fluid heating apparatus 30 is a vertically long casing 30A having a square box shape, and accommodated in the casing 30A. And a heating unit 30U.

The outer tube 31 of the heating unit 30U has a rectangular tube shape in which both upper and lower ends are closed, and the size of the outer tube 31 in this embodiment is 485 (H) mm × 160 (W) mm × 360. (D) mm der is, the outer tube 31 has and has a vertically elongated outer shape in the vertical direction. The

  The inner pipes 32, 32... Of the heating unit 30U have a cylindrical shape with both ends opened, extend in a substantially horizontal direction in a manner that intersects the direction of the longitudinal axis (vertical direction) in the outer pipe 31, and both ends thereof The portion is fixedly installed (welded) through the outer tube 31.

  The heating unit 10U is provided with a total of six inner pipes 32, 32..., And these six inner pipes 32, 32... Are provided with individual axes aa, bb, cc, dd, ee, and ff are arranged in parallel in the direction of the longitudinal axis (up and down direction) in the outer tube 31 and developed along the direction of the longitudinal axis (up and down direction). Are installed in such a manner that they are positioned on the same plane, and are also installed in a manner that is parallel to the side wall of the outer tube 31.

  The halogen lamp heater 33 inserted and installed in the inner pipes 32, 32... Described above has the same structure as the halogen lamp heater 13 used in the first embodiment, but its overall length is slightly longer and the rated output is 2 kW. The heating capacity of the fluid heating device 30 is set to 12 kW by using a total of six halogen lamp heaters 33, 33.

  The fluid heating device 30 described above is basically the same as the fluid heating device 10 of the first embodiment except for the shape of the outer tube 31 and the arrangement of the inner tube 32 and the halogen lamp heater 33. Detailed description will be omitted by attaching the reference numerals in the 30s, which is obtained by adding 20 to the reference numerals in FIGS.

  According to the fluid heating device 30 having the above-described configuration, in the same manner as the fluid heating device 10 in the first embodiment, the heating capacity equivalent to that of the conventional fluid heating device is maintained, and the set space and the maintenance space are operated. As a result, it is possible to achieve as much space saving as possible for the installation space related to the above, and to improve the heating efficiency of the chemical solution by the halogen lamp heater.

  In particular, in the fluid heating device 20 described above, the plurality of halogen lamp heaters 33, 33,... Are laid out in a vertical row, so that the outer shape in the width direction of the outer tube 31 becomes significantly slim, and thus the heating unit 30U. Thus, the installation space in the fluid heating device 30 can be greatly reduced.

  Instead of the halogen lamp heater 33 described above, the halogen lamp heater used in the second embodiment, that is, a halogen lamp heater in which both ends of one heater tube bent in a hairpin shape are supported by one end base. In addition to the inner tube 32 described above, the inner tube used in the second embodiment, that is, the inner tube is fixedly installed with one end closed and the open end passing through the outer tube. It is possible to employ a pipe, and by adopting the above-described configuration, it is possible to further reduce the size of the heating unit 30U and further reduce the installation space of the fluid heating device 30.

  FIGS. 8 and 9 show a fourth embodiment of the fluid heating apparatus according to the present invention. This fluid heating apparatus 40 includes a vertically long casing 40A having a square box shape and accommodated in the casing 40A. The outer tube 41 of the heating unit 40U has a rectangular tube shape in which both upper and lower ends are closed.

  Further, the inner pipes 42, 42... Of the heating unit 40U have a short cylindrical shape with one end closed, and extend in a substantially horizontal direction in a manner that intersects the direction of the longitudinal axis (vertical direction) of the outer pipe 41. The open side end portion is fixedly installed (welded) through the front wall of the outer tube 41.

  Here, the heating unit 40U includes a total of twelve inner pipes 42, 42 ..., and these twelve inner pipes 42, 42 ... are laid out in two rows of six. .

  The halogen lamp heater 43 inserted and installed in the inner tubes 42, 42... Is a bean bulb type lamp heater having a heater tube (bulb) 43a enclosing a filament therein and an end base 43b. Although the total length is extremely short and the rated output is as small as 1.0 kW, the heating capacity of the fluid heating device 40 is set to 12 kW by using a total of 12 halogen lamp heaters 43, 43.

  The fluid heating device 40 described above is basically the same as the fluid heating device 10 of the first embodiment except for the shape and arrangement of the inner tube 42 and the structure of the halogen lamp heater 43. Detailed description will be omitted by adding the reference numerals in the 40's in which 30 is added to the reference numerals in FIGS.

  According to the fluid heating device 40 having the above-described configuration, in the same manner as the fluid heating device 10 in the first embodiment, the heating capacity equivalent to that of the conventional fluid heating device is maintained, and the set space and the maintenance space are operated. As a result, it is possible to achieve as much space saving as possible for the installation space related to the above, and to improve the heating efficiency of the chemical solution by the halogen lamp heater.

  Further, according to the fluid heating device 40 having the above-described configuration, the entire lengths of the inner tubes 42, 42... And the halogen lamp heater 43 are short, and the inner tubes 42, 42. Since only one of the end portions is fixed to the outer tube 21 by being penetrated, the installation space can be further reduced, and the manufacturing cost of the fluid heating device 40 can be reduced.

  10 to 12 show a fifth embodiment of a fluid heating apparatus according to the present invention. This fluid heating apparatus 50 is a vertically long casing 50A having a square box shape, and accommodated in the casing 50A. And a heating unit 50U.

  The heating unit 50U includes an outer tube 51 closed at both ends, and cylindrical inner tubes 52, 52,... That are installed through the outer tube 51, and an inner tube 52 made of transparent heat-resistant glass. , 52... Are inserted and installed as halogen lamp heaters 53, 53.

The outer tube 51 in the heating unit 50U has a cylindrical shape in which both upper and lower ends are closed, and its longitudinal axis (an axis extending along the longitudinal direction of the outer tube 51 through the center of a circle in the cross section). ) In a vertical orientation within the casing 50A in a posture along the vertical direction. Here, the size of the outer tube 51 in this embodiment, Ri 470 (H) mm × 200 ( φ) mm Der, the outer tube 51 with the exhibits a vertically elongated outer shape in the vertical direction.

  Further, a chemical solution supply pipe (inlet) 51i is provided at the lower portion of the outer tube 51, and a chemical solution discharge pipe (outlet) 51o is provided at the upper portion of the outer tube 51. The supply pipe 51i and the discharge pipe 51o extend through the front surface of the casing 50A.

  The inner pipes 52, 52... In the heating unit 50U have a cylindrical shape with open ends, and extend in a substantially horizontal direction in a manner that intersects the longitudinal direction (vertical direction) of the outer pipe 51 described above. The outer pipe 51 is fixedly installed (welded) through the outer pipe 51, and a chemical liquid flow path 51 g is defined in the outer pipe 51 by a space with the inner pipes 52, 52.

  In addition, the heating unit 10U includes a total of four inner pipes 52, 52..., And these four inner pipes 52, 52... Have individual axes aa, bb shown in FIG. , Cc, and dd are installed in such a position that the axes of the inner pipes 52 adjacent to each other in the vertical direction are not parallel to each other.

  Here, the axes aa, bb, cc, dd in the four inner pipes 52, 52... Are installed at positions rotated by 22.5.degree. In plan view. A 90 ° crossing angle is set between the axis aa of the uppermost inner tube 52 and the axis dd of the lowermost inner tube 52.

  In addition, the axes aa, bb, cc, dd in the four inner pipes 52, 52... Are within a range of 45 ° left and right (total 90 °) in the front view of the outer pipe 51. Are set so that the halogen lamp heaters 53, 53... Inserted in the inner pipes 52, 52... Can be taken out in front of the heating unit 50U (fluid heating device 50).

  The halogen lamp heater 53 inserted and installed in the inner pipes 52, 52... Described above has the same structure as the halogen lamp heater 13 used in the first embodiment and has a rated output of 1.2 kW. Are used, the heating capacity of the fluid heating device 50 is 4.8 kW, but by setting the gap between the inner tubes 52 as narrow as possible, the outer tubes It is possible to install ten inner pipes 52, 52... In the 51, and the heating capacity of the fluid heating device 50 can be set to 12 kW by the above configuration.

  In the fluid heating device 50 described above, when the chemical solution supplied from the supply pipe 51i provided in the lower portion of the outer tube 51 in the heating unit 50U passes through the flow path 51g in the outer tube 51, each inner tube 52, The infrared rays emitted from the halogen lamp heaters 53, 53, which are inserted and installed in 52 ... are absorbed and heated, and are discharged through a discharge pipe 51o provided in the upper part of the outer tube 51.

  According to the fluid heating device 50 configured as described above, the outer tube 51 is installed vertically, and the inner tubes 52, 52,. In addition, by adopting a halogen lamp heater 53 with a short overall length, it is possible to save as much space as possible for installation space, such as set space and maintenance space, while maintaining the same heating capacity as the conventional fluid heating device. Can be achieved.

  Further, according to the fluid heating device 50 having the above configuration, the inner tubes 52, 52... Containing the halogen lamp heater 53 are disposed substantially horizontally so as to intersect the direction of the longitudinal axis of the outer tube 51. The chemical solution rising from the lower supply pipe 51i of the outer pipe 51 toward the upper discharge pipe 51o flows across the inner pipes 52, 52... The heating efficiency to the chemical | medical solution by 53 becomes a favorable thing.

  Further, according to the fluid heating device 50 having the above-described configuration, the plurality of inner pipes 52, 52... Containing the halogen lamp heater 53 are installed in such a manner that the adjacent inner pipes 52 are not parallel to each other. As a result, it is possible to mitigate overheating of the adjacent inner tubes 52 due to heat interference, and thus the long life of the halogen lamp heater 53 and the maintenance interval in the fluid heating device 50 can be greatly extended.

  Further, according to the fluid heating device 50 having the above-described configuration, the outer tube 51 is formed in a cylindrical shape with both ends closed, so that the plurality of inner tubes 52, 52. When the inner pipes 52 to be installed are installed in a position mode in which the inner pipes 52 are not parallel to each other, the flow paths 51g of the outer pipes 51 with respect to the respective inner pipes 52 become uniform, and thus the heating efficiency varies for each inner pipe 52. Is suppressed, and the heating efficiency of the chemical solution by the halogen lamp heater 53 is improved.

  In the fluid heating apparatus 50 having the above-described configuration, the halogen lamp heater used in the second embodiment instead of the halogen lamp heater 53, that is, both ends of one heater tube bent in a hairpin shape are connected to one end. In addition to the halogen lamp heater supported by the base, the inner pipe used in the second embodiment is replaced with the inner pipe 52 described above, that is, one end is closed and the open end is the outer pipe. It is also possible to adopt an inner pipe that is fixedly installed by penetrating it, and by adopting the above-described configuration, the heating unit 50U can be further reduced in size, and further, the installation space in the fluid heating device 50 can be further reduced. Space can be achieved.

  In each of the above-described embodiments, an example in which the present invention is applied to the field of manufacturing semiconductor devices has been described. However, the present invention can be applied to various industrial fields that require precise temperature control. Needless to say, the fluid heating device can be effectively applied.

1 is an overall perspective view showing a first embodiment of a fluid heating apparatus according to the present invention. (a), (b) and (c) are the top view, front view, and side view of a heating unit in the fluid heating apparatus shown in FIG. (a) And (b) is the sectional view on the aa line in FIG. 2, and the sectional view on the bb line. (a), (b) and (c) are the top view, front view, and side view of the heating unit in 2nd Example of the fluid heating apparatus concerning this invention. (a) And (b) is the sectional view on the aa line in FIG. 4, and the sectional view on the bb line. (a), (b) and (c) are the top view of the heating unit in the 3rd Example of the fluid heating apparatus concerning this invention, a front view, and a side view. (a) And (b) is the sectional view on the aa line in FIG. 6, and the sectional view on the bb line. (a), (b) and (c) are the top view, front view, and side view of the heating unit in the 4th Example of the fluid heating apparatus concerning this invention. (a) And (b) is the sectional view on the aa line in FIG. 8, and the sectional view on the bb line. The whole perspective view which shows 5th Example of the fluid heating apparatus concerning this invention. (a), (b) and (c) are the top view of the heating unit in the fluid heating apparatus shown in FIG. 10, a front view, and a side view. (a) And (b) is the sectional view on the aa line in FIG. 11, and the sectional view on the bb line. The whole perspective view which showed the conventional fluid heating apparatus notionally. FIG. 14 is a cross-sectional side view of the fluid heating apparatus shown in FIG. 13.

Explanation of symbols

10, 20, 30, 40, 50 ... fluid heating device,
10A, 20A, 30A, 40A, 50A ... casing,
10U, 20U, 30U, 40U, 50U ... heating unit,
11, 21, 31, 41, 51 ... outer tube,
11i, 21i, 31i, 41i, 51i ... supply pipe (inlet),
11o, 21o, 31o, 41o, 51o ... discharge pipe (outlet),
11g, 21g, 31g, 41g, 51g ... flow path,
12, 22, 32, 42, 52 ... inner tube,
13, 23, 33, 43, 53 ... halogen lamp heater (lamp heater),
13a, 23a, 33a, 43a, 53a ... heater tube,
13b, 23b, 33b, 43b, 53b ... end base,
L: Chemical solution (temperature-controlled fluid).

Claims (5)

With both ends are closed, it presents a vertically elongated outer shape in the vertical direction Rukoto provided vertically so along the longitudinal axis in the vertical direction, has an inlet of the heated fluid to the lower and upper An outer tube having an outlet for the fluid to be heated;
An inner pipe that intersects with the direction of the longitudinal axis of the outer pipe and is fixedly installed through the outer pipe, and that defines a flow path of the fluid to be heated with the outer pipe;
A lamp heater housed and installed in the inner tube;
A fluid heating device comprising:     The fluid heating apparatus according to claim 1, wherein the plurality of inner pipes are installed on the same plane that develops along the direction of the longitudinal axis of the outer pipe.     The fluid heating apparatus according to claim 2, wherein the outer tube has a rectangular tube shape in which both end portions are closed.     The fluid heating apparatus according to claim 1, wherein the plurality of inner pipes are installed in a position where adjacent inner pipes are not parallel to each other.     The fluid heating device according to claim 4, wherein the outer tube has a cylindrical shape with both ends closed.

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