JP5249001B2 - Physical quantity sensor and control device for physical quantity sensor - Google Patents

Description

  The present invention relates to a physical quantity sensor that detects acceleration, angular velocity, and the like, and a control device for the physical quantity sensor, and more particularly to a physical quantity sensor and a physical quantity that apply a diagnostic displacement to a sensor element and perform sensor self-diagnosis based on the displacement The present invention relates to a sensor control device.

  Conventionally, in a physical quantity sensor such as an acceleration sensor or an angular velocity sensor, an external force is applied in the predetermined direction to a sensor element that produces a displacement in a predetermined direction according to the physical quantity, and the displacement amount is appropriate. 2. Description of the Related Art A physical quantity sensor having an active diagnostic function for performing self-diagnosis by detecting whether or not is known.

  Conventionally, when active diagnosis is started, a control signal is input from a host system, and active diagnosis is executed based on this control signal. Here, as a control signal for active diagnosis, a level signal that can take two states of H and L is used, and when this level signal is in an H state, an active diagnosis is executed (for example, patents). Reference 1).

  However, when this physical quantity sensor is applied to a vehicle, the upper control device often has a plurality of control objects such as a hydraulic controller in addition to the physical quantity sensor, and the control signal transmitted to the physical quantity sensor High reliability is required. In particular, when it is arranged in the engine room of a vehicle, it is necessary to consider pumps such as an engine and a fuel pump, external noise sources such as solenoid valves, and various mechanical vibrations transmitted from the vehicle. For example, the control signal may change due to noise or mechanical vibration, or the transmission destination of the control signal may be selected by mistake.

  In the device described in Patent Literature 1, when a control signal for active diagnosis is input to the physical quantity sensor, the active diagnosis is activated and displacement occurs in the sensor element. As a result, the physical quantity detector of the physical quantity sensor recognizes that a physical quantity has been applied. Therefore, if a control signal for active diagnosis is erroneously input to these physical quantity sensors, an occupant protection device such as an airbag or an ESC (side slip prevention device) is erroneously detected by erroneously detecting a physical quantity that is not actually applied. Since the operation is based on the detected physical quantity, the system or the like malfunctions.

  Therefore, a technique for preventing the active diagnosis from being erroneously executed is important, and various techniques have been studied in recent years.

  As a measure to prevent malfunction of active diagnosis, when a level signal instructing active diagnosis is input from a higher-level control system that controls the sensor, the clock signal is maintained while the level signal maintains a predetermined state by the clock signal. It is known that the active diagnosis process is started only when the level signal continues a predetermined state for a predetermined number of clocks or more (for example, see Patent Document 2).

JP 2002-040047 A JP 2007-178420 A

  Conventionally, physical quantity sensors such as acceleration sensors and angular velocity sensors have many opportunities to be used as in-vehicle sensors. The ambient temperature of the physical quantity sensor when mounted on the vehicle varies greatly depending on the installation position of the physical quantity sensor, the vehicle status, the outside air temperature, and the like. Further, mechanical vibrations generated by the vehicle such as road surface vibrations and engine noise generated during traveling are also transmitted to the physical quantity sensor through the vehicle body. Further, in the engine room of the vehicle, there are a lot of external noises from various electronic devices and actuators for vehicle control, which is a severe environment for the physical quantity sensor. Therefore, when using a physical quantity sensor for vehicle mounting, a high-performance self-diagnosis is required to perform reliable physical quantity detection.

  Since an in-vehicle physical quantity sensor needs to perform reliable physical quantity detection and self-diagnosis even in a severe environment as described above, improvement in functionality by diversifying active diagnostic contents can be a great advantage.

  For example, by taking a method of changing a diagnostic part by a command, it becomes possible to specify a faulty part. Further, by taking a method of changing the amount of change for diagnosis by a command, it is possible to acquire sensor characteristics such as sensitivity and offset of the physical quantity sensor. When a plurality of physical quantity sensors are combined and a diagnosis is performed with a single control circuit, the sensors can be individually diagnosed by taking a method of designating a diagnosis target by a command. In addition, if a configuration is used in which various internal signals can be observed by commands, failure diagnosis for each functional block of the circuit can be performed.

  In order to realize this highly functional diagnosis, it is necessary for the control form of active diagnosis from the host system to support not only trigger control by a level signal or the like but also command control. By doing so, it is possible to realize a high-performance self-diagnosis capable of performing the diagnosis contents according to the usage status of the physical quantity sensor as necessary.

  However, in the method described in Patent Document 2, the functionality can be easily improved by diversifying the input pattern of the level signal for controlling the active diagnosis from the viewpoint of improving the performance of the self-diagnosis, but from the viewpoint of productivity, There is a possibility that the scale of the circuit for determining the input time of the level signal increases with diversification, leading to a significant decrease in productivity.

  An object of the present invention is to provide a physical quantity sensor that achieves both high reliability and high functionality of active diagnostic control without significantly reducing productivity.

(1) In order to achieve the above object, the present invention has a movable part that is displaced according to a physical quantity, a physical quantity detection means that detects a physical quantity according to the displacement of the movable part, and the movable part. Diagnostic means having an active diagnostic function for diagnosing a failure of the physical quantity detection means by causing a diagnostic displacement, a transmission means for digitally transmitting the physical quantity detected by the physical quantity detection means via a communication path, and via the communication path Te a physical quantity sensor having a receiving unit, an external system receives a command command and predetermined information for controlling the physical quantity sensor, the diagnostic means, based on the instruction command received by said receiving means a first determining means for determining whether to execute the diagnosis, second determining means for determining whether or not to perform a diagnosis based on at least one or more of the predetermined information It is obtained by so and a diagnosis execution means for executing the diagnosis based on the output of the first judging means and the second judging means.
With this configuration, it is possible to achieve both high reliability and high functionality of active diagnostic control without significantly reducing productivity.

( 2 ) In the above (1), preferably, the predetermined information corresponds to a predetermined voltage level signal, a predetermined pulse signal, a command command signal for permitting or prohibiting a predetermined diagnosis, and a speed of the physical quantity sensor itself. Information, information corresponding to the acceleration of the physical quantity sensor itself, information corresponding to the angular velocity of the physical quantity sensor itself, or information corresponding to an elapsed time from when the physical quantity sensor is turned on.

( 3 ) In the above (1), preferably, the diagnosis execution means includes a switching means that switches according to outputs of the first determination means and the second determination means.

( 4 ) In the above (1), preferably, monitoring means for monitoring a predetermined drive frequency and displacement amount of the movable part, a physical quantity detected by the physical quantity detection means, and an output of the monitoring means are added to the transmission contents. Monitoring information adding means.

( 5 ) In the above (1), preferably, the transmission means adds a processing result for performing signal processing in accordance with the communication command, and a processing result addition for adding the output of the processing means to the output of the monitoring information adding means Means.

( 6 ) In the above ( 5 ), preferably, the processing result adding means adds the processing result of the communication command received by the receiving means retroactively to the transmission content.

( 7 ) In the above ( 5 ), preferably, diagnostic flag addition means for adding the physical quantity detected by the physical quantity detection means and the progress of the active diagnosis to the transmission content is provided.

( 8 ) In the above (1), preferably, an error detection means for detecting an error with respect to the output of the monitoring information adding means, and the error detection information output by the error detecting means as an output of the monitoring information adding means And an error detection information adding means to be added.

( 9 ) In the above ( 8 ), preferably, the monitoring means monitors the drive frequency of the movable part, and outputs a signal indicating an abnormal state when the drive frequency deviates from a predetermined range; Monitoring the displacement instruction amount for displacing the movable part, and monitoring the displacement amount of the movable part, the instruction amount monitoring means for outputting a signal indicating an abnormal state when the displacement instruction amount deviates from a predetermined range; In addition, at least one of displacement monitoring means for outputting a signal indicating an abnormal state when the amount of displacement deviates from a predetermined range is provided.

(1 0 ) In the above ( 8 ), preferably, the monitoring means includes servo control means for suppressing self-vibration of the movable part caused by vibration in the driving direction of the movable part leaking in the detection direction, Self-vibration monitoring means for monitoring the output of the servo control means and outputting a signal indicating an abnormal state when the output of the servo control means departs from a predetermined range.

(1 1 ) In the above (1), preferably, the diagnosis means performs a failure diagnosis of the RAM, outputs a signal indicating an abnormal state of the RAM, and performs a failure diagnosis on the EPROM. And at least one of EPROM monitoring means for outputting a signal representing the abnormal state.

(1 2 ) In the above (1), preferably, the processing means includes a diagnosis target specifying means for specifying a diagnosis target and an observation signal specifying means for selecting an observation target from the internal signals of the physical quantity sensor. It is a thing.

(1 3 ) In order to achieve the above object, the present invention has a movable part that is displaced according to a physical quantity, and a physical quantity detection means that detects a physical quantity according to the displacement of the movable part, and the movable part A diagnostic means having an active diagnostic function for diagnosing a failure of the physical quantity detection means by causing a diagnostic displacement in the transmission means, a transmission means for digitally transmitting the physical quantity detected by the physical quantity detection means via a communication path, and the communication path A command command for the external system to control the physical quantity sensor and a receiving means for receiving predetermined information via the external system, the diagnostic means based on the command command received by the receiving means First determination means for determining whether or not to perform diagnosis, and second determination for determining whether or not to perform diagnosis based on at least one or more of the predetermined information Performing a stage, with respect to the physical quantity sensor and a diagnosis execution means for executing the diagnosis based on the output of the first determination means and the second judging means, an instruction command and diagnostics for controlling the physical quantity sensor A control device for a physical quantity sensor that outputs predetermined information for the purpose, comprising: a first control device that outputs the command command; and a second control device that outputs the predetermined information.
With this configuration, it is possible to achieve both high reliability and high functionality of active diagnostic control without significantly reducing productivity.

(1 4 ) In the above (1 3 ), preferably, the second control device diagnoses a failure of the first control device.

  According to the present invention, it is possible to achieve both high reliability and high functionality of active diagnostic control without significantly reducing the productivity of the physical quantity sensor.

Hereinafter, the configuration and operation of the physical quantity sensor according to the first embodiment of the present invention will be described with reference to FIGS. 1 and 2.
FIG. 1 is a block diagram showing a configuration of a physical quantity sensor according to the first embodiment of the present invention. FIG. 2 is a flowchart showing an active diagnosis permission operation in the physical quantity sensor according to the first embodiment of the present invention.

  The physical quantity sensor according to the present embodiment includes an angular velocity detection circuit 100 including a movable unit 1 that generates displacement according to an angular velocity, a transmission circuit 101 that transmits angular velocity information detected by the angular velocity detection circuit 100 to a higher system, and a The reception circuit 102 receives a communication command, and the active diagnosis circuit 200 performs active diagnosis based on the communication command received by the reception circuit 102. Here, the host system is, for example, an ECU (Electronic Control Unit) that controls engine control and traction control.

  The movable part 1 of the angular velocity detection circuit 100 is displaced according to the angular velocity from the outside. A movable electrode 2 a is fixed to the movable part 1. The fixed electrode 2b is disposed to face the movable electrode 2a. The detection electrode 2 is configured by the movable electrode 2a and the fixed electrode 2b. The CV converter 3 converts the capacitance change of the detection electrode 2 into a voltage signal. The AD converter 4 converts the voltage signal output from the CV converter 3 into a digital signal.

  The synchronous detection circuit 5, the integrator 6, and the modulation circuit 7 constitute a self-vibration servo control circuit. The self-vibration servo control circuit detects the displacement of the movable part 1 from the digital signal output from the AD converter 4 and performs control such that this displacement becomes zero. The synchronous detection circuit 11, the integrator 12, and the modulation circuit 13 constitute a Coriolis servo control circuit.

  The adder 8 adds the outputs of the self-vibration servo control circuit and the Coriolis servo control circuit to generate a servo signal. The DA converter 9 reconverts the servo signal output from the adder 8 into a servo voltage. The servo voltage output from the DA converter 9 is applied to the movable part 1 via the servo electrode 10 including the fixed electrode 10b and the movable electrode 10a. The servo electrode 10 includes a fixed electrode 10b and a variable electrode 10a that is disposed to face the fixed electrode 10b and is fixed to the movable portion 1.

  In order to detect the angular velocity, the movable part 1 is driven to vibrate at a predetermined frequency and a predetermined amplitude in a direction perpendicular to the detection axis (Y axis in the figure) (drive axis direction: X axis direction in the figure). When the angular velocity is applied to the movable part 1, the movable part 1 receives an external force in the detection axis direction due to the Coriolis force. Therefore, the movable portion 1 is elastically supported so as to be displaceable in two axial directions of the detection shaft and the drive shaft. The detection electrode 2 and the servo electrode 10 are arranged in parallel to the detection axis direction.

  The synchronous detection circuit 5 of the self-vibration servo control circuit synchronously detects the digital signal output from the AD converter 4 using a detection signal (hereinafter referred to as Φ1) having the same phase Φ1 as the driving vibration of the movable unit 1. The integrator 6 integrates the output of the synchronous detection circuit 5. The modulation circuit 7 performs frequency modulation on the output of the integrator 6 by a modulation signal (Φ3) having a phase Φ3 that is delayed by 90 ° with respect to the driving vibration of the movable unit 1.

  The synchronous detection circuit 11 of the Coriolis servo control circuit synchronously detects the digital signal output from the AD converter 4 by a detection signal (Φ2) having a phase Φ2 delayed by 90 ° with respect to the drive vibration of the movable unit 1. The integrator 12 integrates the output of the synchronous detection circuit 11. The modulation circuit 13 performs frequency modulation on the output of the integrator 12 using a modulation signal (hereinafter referred to as Φ4) having the same phase Φ4 as that of the driving vibration of the movable unit 1.

  Next, the active diagnosis circuit 200 includes a first determination circuit 201, a second determination circuit 202, and an active diagnosis execution circuit 203. The first determination circuit 201 determines whether or not the communication command from the host system received by the reception circuit 102 is a command related to control of the physical quantity sensor. The second determination circuit 202 determines whether or not the communication command is a command that permits or prohibits active diagnosis. The active diagnosis execution circuit 203 inputs a displacement for diagnosis to the angular velocity detection circuit 100 based on the outputs of the first determination circuit and the second determination circuit. The angular velocity detection circuit 100 includes adders 204 and 205, and adds the diagnostic displacement to the outputs of the integrators 6 and 12 of the angular velocity detection circuit 100, respectively.

  Next, the operation of the physical quantity sensor of this embodiment will be described.

  In the angular velocity detection circuit 100, the movable portion 1 is displaced by the Coriolis force generated when the angular velocity is applied to the movable portion 1 that is driven and oscillated. The capacitance of the detection electrode 2 changes according to the displacement of the movable part 1. The self-vibration servo control circuit and the Coriolis servo control circuit perform servo control by generating a servo voltage for canceling the change in capacitance and applying the servo voltage to the movable portion 1 by the servo electrode 10.

  The synchronous detection circuit 5 of the self-vibration servo control circuit performs synchronous detection on the digital signal output from the AD converter 4 using Φ1, and detects displacement (error displacement) of the movable part 1 due to self-vibration. The integrator 6 integrates the error displacement to obtain a self-vibration servo amount that cancels the error displacement. Next, the modulation circuit 7 performs frequency modulation using the modulation signal Φ3 and generates a self-vibration servo signal to be applied to the movable portion 1.

  The synchronous detection circuit 11 of the Coriolis servo control circuit performs synchronous detection on the digital signal output from the AD converter 4 using Φ2, and detects the displacement (Coriolis displacement) of the movable part 1 due to the Coriolis force. The integrator 12 calculates a Coriolis servo amount that cancels the Coriolis displacement by integrating the Coriolis displacement. Next, the modulation circuit 13 performs frequency modulation using the modulation signal Φ4 and generates a Coriolis servo signal to be applied to the movable unit 1.

  When the self-vibration servo control and the Coriolis servo control are performed, the physical quantity sensor can transmit the angular velocity information to the host system by inputting the Coriolis servo amount to the transmission circuit 101.

  Next, the first determination circuit 201 and the second determination circuit 202 of the active diagnosis circuit 200 determine whether or not to perform active diagnosis on the communication command received by the reception circuit 102. When the outputs of the first determination circuit and the second determination circuit are outputs indicating that active diagnosis is permitted, the active diagnosis execution circuit 203 outputs a displacement amount for diagnosis to the angular velocity detection circuit 100. Next, the displacement amount for diagnosis is added to the outputs of the integrators 6 and 12 using the adders 204 and 205, and is applied to the movable part 1 through the AD converter 9 and the servo electrode 10 together with the Coriolis servo amount.

  Thereby, a displacement obtained by multiplying the displacement due to the Coriolis force by the displacement for diagnosis is generated in the movable portion 1. This diagnostic displacement is detected by the synchronous detection circuit 11 as an increase in the Coriolis displacement. Next, the servo displacement for making the increment of the Coriolis displacement, which is a displacement for diagnosis, zero, the displacement for diagnosis is output as the increment of the Coriolis servo amount by the integrator 12, and the AD converter 9, servo A servo force is applied to the movable part 1 through the electrode 10.

  The transmission circuit 101 transmits the Coriolis displacement or the Coriolis servo amount reflecting the displacement for diagnosis to the host system, and the host system monitors whether the increase in the Coriolis displacement or the Coriolis servo amount is a predetermined amount. Realizes active diagnosis of physical quantity sensors.

  Next, the contents of processing until the active diagnosis is permitted by the first determination circuit 201 and the second determination circuit 202 will be described with reference to FIG.

  When a communication command (first communication command) is input from the host system to the second determination circuit 202 via the receiving circuit 102 in step S100, the second determination circuit 202 stores in the second determination circuit 202 in advance in step S105. It is determined whether or not the first communication command is a command related to the control of the physical quantity sensor in comparison with the communication command group.

  If the first communication command is a physical quantity sensor control command, in step S110, the second determination circuit 202 determines whether or not the first communication command is an active diagnostic control command.

  Next, when the first communication command is an active diagnosis control command, in step S115, the second determination circuit 202 determines whether or not the first communication command is a command for permitting or prohibiting active diagnosis. judge.

  Next, when the first communication command is a command for permitting active diagnosis, in step S120, the second determination circuit 202 sets the output to the active diagnosis permission mode. On the other hand, when the first communication command is a command for prohibiting the active diagnosis, in step S125, the second determination circuit 202 holds the output in the state of the active diagnosis prohibition mode.

  Next, when a communication command (second communication command) is input from the host system to the first determination circuit 201 via the reception circuit 102 in step S125, the first determination circuit 201 determines that the second communication command is received in step S130. It is determined whether or not the command is related to the control of the physical quantity sensor. Next, in step S135, it is determined whether or not the command is for active diagnosis control.

  Next, in step S140, the active diagnosis execution circuit 203 determines whether or not the output of the second determination circuit 202 is in the active diagnosis permission mode.

  When the second communication command is a command for active diagnosis control and the output of the second determination circuit 202 is in the active diagnosis permission mode, in step S145, the active diagnosis execution circuit 203 performs active diagnosis.

  If it is determined in step S110 that the first communication command is not an activity diagnosis command, or if it is determined in step S135 that the second communication command is not an active diagnosis command, normal operation is continued in step S150. .

  For example, a first communication command (a command for permitting or prohibiting active diagnosis) is input to the receiving circuit 102 at a certain timing, and a second communication command (for diagnosis to the movable part) is input to the receiving circuit 102 at a subsequent timing. A case where an active diagnostic command for giving a displacement amount is input will be described. When the first reception command is input at a certain timing, the second determination circuit 202 sets the output to the active diagnosis permission mode and outputs it to the active diagnosis execution circuit 203 by the processing of steps S100 to S120. When the second communication command is input at a later timing, the first determination circuit 201 outputs an output that gives a displacement amount for diagnosis to the movable part to the active diagnosis execution circuit 203 by the processing of steps S130 to S135. . In step S140, it is determined whether or not the output of the second determination circuit 202 at this time is in the active diagnosis permission mode. At this time, as described above, the second determination circuit is determined by the first communication command. Since the output of 202 is in the active diagnosis permission mode, the active diagnosis execution circuit 203 uses the active diagnosis command (active diagnosis command for giving a displacement amount for diagnosis to the movable part) output from the first determination circuit 201. Accordingly, an active diagnosis is performed by outputting a displacement amount for diagnosis to each speed detection circuit 100 to the movable part.

  According to the present embodiment described above, first, since the first determination circuit 201 and the second determination circuit 202 permit the active diagnosis based on the contents of the first communication command and the second communication command, noise interference It is possible to prohibit the active diagnosis when a communication command is changed due to, for example, or when a communication command is erroneously transmitted due to a host system failure.

  Secondly, the second determination circuit 202 permits the active diagnosis based on the contents of the first communication command and the second communication command, thereby improving the operation reliability of the active diagnosis without changing the number of external terminals. It becomes possible to greatly improve.

  Third, by controlling the active diagnosis based on the contents of the communication command, it is possible to easily make multiple items of the contents of the active diagnosis, so the active diagnosis of the host system according to the situation without adding a circuit It is possible to change the contents. For example, it is possible to perform diagnosis for each individual circuit such as a drive control circuit that controls drive vibration of the movable unit 1 and an angular velocity detection circuit. Further, it is possible to perform a sensitivity diagnosis of the movable part 1 by changing the amount of displacement for diagnosis using a communication command, and it is possible to predict a failure using the sensitivity change of the movable part 1.

  Fourth, since active diagnosis can be controlled with high reliability based on the contents of communication commands, individual active diagnosis control when there are a plurality of active diagnosis control targets can be easily realized. .

Next, the configuration and operation of the physical quantity sensor according to the second embodiment of the present invention will be described with reference to FIGS.
FIG. 3 is a block diagram showing a configuration of a physical quantity sensor according to the second embodiment of the present invention. 3, the same reference numerals as those in FIG. 1 denote the same parts. FIG. 4 is a flowchart showing an active diagnosis permission operation in the physical quantity sensor according to the second embodiment of the present invention.

  In the physical quantity sensor of the present embodiment, the active diagnostic circuit 200A uses two levels of H level and L level for permitting active diagnosis from a higher system instead of the second determination circuit 202 of the active diagnostic circuit 200 in FIG. A terminal for inputting a possible permission signal (DIAG signal) and a second determination circuit 206 for determining whether or not to perform active diagnosis from the level of the DIAG signal are provided.

  The command signal CMD and the DIAG signal are both output from a host system such as an ECU (Electronic Control Unit) that controls engine control and traction control.

  The operations of the angular velocity detection circuit 100, the transmission circuit 101, and the reception circuit 102 in FIG. 3 are the same as those shown in FIG.

  Next, the operation of the active diagnostic circuit 200A in the present embodiment will be described.

  Next, when a communication command (second communication command) is input from the host system to the first determination circuit 201 via the reception circuit 102 in step S125, the first determination circuit 201 determines that the second communication command is received in step S130. It is determined whether or not the command is related to the control of the physical quantity sensor. Next, in step S135, it is determined whether or not the command is for active diagnosis control.

  Next, in step S160, the second determination circuit 202 determines the level of the DIAG signal. If the DIAG signal is in the H level, the second determination circuit 206 sets the output to the active diagnosis permission mode in step S120. In step S145, the active diagnosis execution circuit 203 performs active diagnosis.

  On the other hand, if the DIAG signal is at the L level, in step S165, the second determination circuit 206 sets the output to the active diagnosis inhibition mode. In step S150, the normal operation is continued.

  In the present embodiment, an example in which a level signal is used for the DIAG signal is described. However, a pulse signal having a predetermined frequency may be used for the DIAG signal. When a pulse signal is used as the DIAG signal, the second determination circuit 206 determines whether the pulse signal has a predetermined frequency. When the DIAG signal has a predetermined frequency, the output of the second determination circuit 206 is set to the active diagnosis permission mode. On the other hand, when the DIAG signal does not have a predetermined frequency, the output of the second determination circuit 206 is set to the active diagnosis inhibition mode.

  According to the present embodiment described above, first, based on the content of the communication command and the signal level of the DIAG signal, the first determination circuit 201 and the second determination circuit 206 permit the active diagnosis to be performed. It is possible to suppress erroneous diagnosis even when a communication command changes due to noise interference or the like, or when a communication command is erroneously transmitted due to a host system failure.

  Secondly, when a pulse signal is used for the DIAG signal, the second determination circuit 206 prohibits active diagnosis even when the DIAG signal path is disconnected by making a determination regarding active diagnosis permission based on the frequency of the DIAG signal. It is possible to realize a highly reliable active diagnosis.

  Third, by controlling the active diagnosis based on the contents of the communication command, it is possible to easily make multiple items of the contents of the active diagnosis, so the active diagnosis of the host system according to the situation without adding a circuit It is possible to change the contents. For example, it is possible to perform diagnosis for each individual circuit such as a drive control circuit that controls drive vibration of the movable unit 1 and an angular velocity detection circuit. Further, it is possible to perform a sensitivity diagnosis of the movable part 1 by changing the amount of displacement for diagnosis using a communication command, and it is possible to predict a failure using the sensitivity change of the movable part 1.

  Fourth, since active diagnosis can be controlled with high reliability based on the contents of communication commands, individual active diagnosis control when there are a plurality of active diagnosis control targets can be easily realized. .

Next, the configuration and operation of the physical quantity sensor according to the third embodiment of the present invention will be described with reference to FIG.
FIG. 5 is a block diagram showing a configuration of a physical quantity sensor according to the third embodiment of the present invention. In FIG. 5, the same reference numerals as those in FIGS. 1 and 3 denote the same parts.

  In the physical quantity sensor of this embodiment, the active diagnostic circuit 200B determines whether or not to perform the active diagnosis according to the speed of the physical quantity sensor itself instead of the second determination circuit 206 in the active diagnostic circuit 200A of the embodiment of FIG. A second determination circuit 206b is provided. The speed signal detected by the speed sensor 207a that detects the speed of the physical quantity sensor itself is input to the second determination circuit 206b.

  The operations of the angular velocity detection circuit 100, the transmission circuit 101, and the reception circuit 102 in FIG. 5 are the same as those shown in FIG.

  Next, the operation of the active diagnostic circuit 200B of this embodiment will be described.

  The speed sensor 207a detects the speed of the physical quantity sensor itself. If the speed of the physical quantity sensor itself is zero, the second determination circuit 206b sets the output to the active diagnosis permission mode. On the other hand, if the speed of the physical quantity sensor itself is not zero, the output is set to the active diagnosis inhibition mode.

  Accordingly, when a communication command is input from the host system to the first determination circuit 201 via the reception circuit 102, the first determination circuit 201 first compares the communication command group stored in the first determination circuit 201 in advance. Thus, it is determined whether or not the communication command is a command related to control of the physical quantity sensor. Next, it is determined whether or not the command is for active diagnosis control. Next, when the communication command is a command for active diagnosis control, if the output of the second determination circuit 206b is in the active diagnosis permission mode, the active diagnosis execution circuit 203 executes active diagnosis.

  In the present embodiment, the second determination circuit 206b may input a vehicle speed pulse signal corresponding to the vehicle speed from a vehicle speed sensor mounted on the vehicle.

  According to the present embodiment described above, first, by performing an active diagnosis only when the speed generated in the physical quantity sensor is zero, only when a moving body such as a vehicle or an aircraft equipped with the physical quantity sensor is stopped. Since the active diagnosis is performed, it is possible to prohibit the active diagnosis from being performed when the moving body is moving.

  Second, by controlling the active diagnosis based on the contents of the communication command, it is possible to easily make multiple items of the contents of the active diagnosis. Therefore, the active diagnosis of the host system according to the situation without adding a circuit It is possible to change the contents. For example, it is possible to perform diagnosis for each individual circuit such as a drive control circuit that controls drive vibration of the movable unit 1 and an angular velocity detection circuit. Further, it is possible to perform a sensitivity diagnosis of the movable part 1 by changing the amount of displacement for diagnosis using a communication command, and it is possible to predict a failure using the sensitivity change of the movable part 1.

  Third, since active diagnosis can be controlled with high reliability based on the contents of communication commands, individual active diagnosis control when there are a plurality of active diagnosis control targets can be easily realized. .

Next, the configuration and operation of the physical quantity sensor according to the fourth embodiment of the present invention will be described with reference to FIG.
FIG. 6 is a block diagram showing a configuration of a physical quantity sensor according to the fourth embodiment of the present invention. In FIG. 6, the same reference numerals as those in FIGS. 1 and 3 indicate the same parts.

  In the physical quantity sensor of the present embodiment, the active diagnostic circuit 200C determines whether or not to perform the active diagnosis according to the acceleration of the physical quantity sensor itself, instead of the second determination circuit 206 in the active diagnostic circuit 200A of the embodiment of FIG. A second determination circuit 206c is provided. The acceleration signal detected by the acceleration sensor 207c that detects the acceleration generated in the physical quantity sensor is input to the second determination circuit 206c.

  The operations of the angular velocity detection circuit 100, the transmission circuit 101, and the reception circuit 102 in FIG. 6 are the same as those shown in FIG.

  Next, the operation of the active diagnostic circuit 200C of this embodiment will be described.

  The acceleration sensor 207c detects the acceleration of the physical quantity sensor itself. If the acceleration of the physical quantity sensor itself is zero, the second determination circuit 206c sets the output to the active diagnosis permission mode. On the other hand, if the acceleration of the physical quantity sensor itself is not zero, the second determination circuit 206c sets the output to the active diagnosis inhibition mode.

  Accordingly, when a communication command is input from the host system to the first determination circuit 201 via the reception circuit 102, the first determination circuit 201 first compares the communication command group stored in the first determination circuit 201 in advance. Thus, it is determined whether or not the communication command is a command related to control of the physical quantity sensor. Next, it is determined whether or not the command is for active diagnosis control. Next, when the communication command is a command for active diagnosis control and the output of the second determination circuit 206c is in the active diagnosis permission mode, the active diagnosis execution circuit 203 executes active diagnosis.

  In the present embodiment, the acceleration sensor 207c may use an acceleration sensor constituting the physical quantity sensor when the physical quantity sensor is constituted by a plurality of angular velocity sensors and acceleration sensors. In that case, the acceleration sensor targeted for active diagnosis should not be used as the acceleration sensor 207c.

  According to the present embodiment described above, first, by performing active diagnosis only when the acceleration generated in the physical quantity sensor is zero, when no acceleration is generated in a moving body such as a vehicle or an aircraft equipped with the physical quantity sensor. Since only the active diagnosis is performed, the displacement for diagnosis can be applied to the movable part 1 more accurately, and the active diagnosis with high accuracy can be realized.

  Second, by utilizing the output of the speed sensor 207a in the third embodiment, it is possible to detect that the physical quantity sensor is tilted when the speed is zero and the acceleration is not zero. It is possible to perform active diagnosis with high accuracy by correcting the amount.

  Third, when the acceleration sensor in the physical quantity sensor is used as the acceleration sensor 207c, active diagnosis control is performed using the host system and the acceleration sensor 207c. Therefore, active diagnosis is performed only when both are normal, and high reliability is achieved. Active diagnosis can be realized.

  Fourth, by controlling the active diagnosis based on the content of the communication command, it is possible to easily make multiple items of the active diagnosis content, so the active diagnosis of the host system according to the situation without adding a circuit It is possible to change the contents. For example, it is possible to perform diagnosis for each individual circuit such as a drive control circuit that controls drive vibration of the movable unit 1 and an angular velocity detection circuit. Further, it is possible to perform sensitivity diagnosis of the movable part 1 by changing the amount of displacement for diagnosis using a communication command, and it is possible to predict failure using the sensitivity change of the movable part 1.

  Fifth, since active diagnosis can be controlled with high reliability based on the contents of the communication command, individual active diagnosis control when there are a plurality of active diagnosis control targets can be easily realized. .

Next, the configuration and operation of the physical quantity sensor according to the fifth embodiment of the present invention will be described with reference to FIG.
FIG. 7 is a block diagram showing a configuration of a physical quantity sensor according to the fifth embodiment of the present invention. In FIG. 7, the same reference numerals as those in FIGS. 1 and 3 denote the same parts.

  In the physical quantity sensor of the present embodiment, the active diagnostic circuit 200D determines whether or not to perform the active diagnosis according to the angular velocity of the physical quantity sensor itself, instead of the second determination circuit 206 in the active diagnostic circuit 200A of the embodiment of FIG. The second determination circuit 206d is provided. An angular velocity signal detected by an acceleration sensor 207d that detects an angular velocity generated in the physical quantity sensor is input to the second determination circuit 206d.

  The operations of the angular velocity detection circuit 100, the transmission circuit 101, and the reception circuit 102 in FIG. 7 are the same as those shown in FIG.

  Next, the operation of the active diagnostic circuit 200D in the present embodiment will be described.

  The angular velocity sensor 207d detects the angular velocity of the physical quantity sensor itself. If the angular velocity of the physical quantity sensor itself is zero, the output of the second determination circuit 206d is set to the active diagnosis permission mode. On the other hand, if the acceleration of the physical quantity sensor itself is not zero, the output of the second determination circuit 206d is set to the active diagnosis inhibition mode.

  Accordingly, when a communication command is input from the host system to the first determination circuit 201 via the reception circuit 102, the first determination circuit 201 first compares the communication command group stored in the first determination circuit 201 in advance. Thus, it is determined whether or not the communication command is a command related to control of the physical quantity sensor. Next, it is determined whether or not the command is for active diagnosis control. Next, when the communication command is a command for active diagnosis control and the output of the second determination circuit 206d is in the active diagnosis permission mode, the active diagnosis execution circuit 203 executes active diagnosis.

  In the present embodiment, the angular velocity sensor 207d may use an angular velocity sensor constituting the physical quantity sensor when the physical quantity sensor is constituted by a plurality of angular velocity sensors and acceleration sensors. In that case, the angular velocity sensor to be subjected to active diagnosis should not be used as the angular velocity sensor 207d.

  According to the present embodiment described above, first, by performing an active diagnosis only when the angular velocity generated in the physical quantity sensor is zero, when the angular velocity is not generated in a moving body such as a vehicle or an aircraft equipped with the physical quantity sensor. Since only the active diagnosis is performed, the displacement for diagnosis can be applied to the movable part 1 more accurately, and the active diagnosis with high accuracy can be realized.

  Second, when the angular velocity sensor in the physical quantity sensor is used as the angular velocity sensor 207d, the active diagnosis control is performed using the host system and the angular velocity sensor 207d. Therefore, the active diagnosis is performed only when both are normal, and the high reliability. Active diagnosis can be realized.

  Third, by controlling the active diagnosis based on the contents of the communication command, it is possible to easily make multiple items of the contents of the active diagnosis, so the active diagnosis of the host system according to the situation without adding a circuit It is possible to change the contents. For example, it is possible to perform diagnosis for each individual circuit such as a drive control circuit that controls drive vibration of the movable unit 1 and an angular velocity detection circuit. Further, it is possible to perform sensitivity diagnosis of the movable part 1 by changing the amount of displacement for diagnosis using a communication command, and it is possible to predict failure using the sensitivity change of the movable part 1.

  Fourth, since active diagnosis can be controlled with high reliability based on the contents of communication commands, individual active diagnosis control when there are a plurality of active diagnosis control targets can be easily realized. .

Next, the configuration and operation of the physical quantity sensor according to the sixth embodiment of the present invention will be described with reference to FIG.
FIG. 8 is a block diagram showing a configuration of a physical quantity sensor according to the sixth embodiment of the present invention. In FIG. 8, the same reference numerals as those in FIGS. 1 and 3 denote the same parts.

  In the physical quantity sensor of this embodiment, the active diagnosis circuit 200E performs active diagnosis according to the elapsed time from when the physical quantity sensor is turned on, instead of the second determination circuit 206 in the active diagnosis circuit 200A of the embodiment of FIG. Is provided with a second determination circuit 206e for determining whether or not to implement the above. The elapsed time from when the power is supplied to the physical quantity sensor measured by the time measuring device 207e is input to the second determination circuit 206e.

  The operations of the angular velocity detection circuit 100, the transmission circuit 101, and the reception circuit 102 in FIG. 8 are the same as those shown in FIG.

  Next, the operation of the active diagnostic circuit 200E in the present embodiment will be described.

  The time measuring device 207e measures the elapsed time from when the physical quantity sensor is turned on, and sets the output of the second determination circuit 206e to the active diagnosis permission mode if the elapsed time is within a predetermined time. On the other hand, if the elapsed time is longer than the predetermined time, the output of the second determination circuit 206e is set to the active diagnosis inhibition mode.

  Accordingly, when a communication command is input from the host system to the first determination circuit 201 via the reception circuit 102, the first determination circuit 201 first compares the communication command group stored in the first determination circuit 201 in advance. Thus, it is determined whether or not the communication command is a command related to control of the physical quantity sensor. Next, it is determined whether or not the command is for active diagnosis control. Next, when the communication command is a command for active diagnosis control, if the output of the second determination circuit 206e is in the active diagnosis permission mode, the active diagnosis execution circuit 203 performs active diagnosis.

  According to the present embodiment described above, first, in the case of an in-vehicle physical quantity sensor, the power-on switch and the engine ignition switch of the vehicle are normally used together, so that a predetermined elapsed time is limited from the time of engine ignition. By setting the time sufficiently short for the elapsed time to start and long enough to carry out active diagnosis, it is possible to prevent erroneous diagnosis while driving and to realize more reliable active diagnosis Is possible.

  Second, by controlling the active diagnosis based on the contents of the communication command, it is possible to easily make multiple items of the contents of the active diagnosis. Therefore, the active diagnosis of the host system according to the situation without adding a circuit It is possible to change the contents. For example, it is possible to perform diagnosis for each individual circuit such as a drive control circuit that controls drive vibration of the movable unit 1 and an angular velocity detection circuit. Further, it is possible to perform a sensitivity diagnosis of the movable part 1 by changing the amount of displacement for diagnosis using a communication command, and it is possible to predict a failure using the sensitivity change of the movable part 1.

  Third, since active diagnosis can be controlled with high reliability based on the contents of communication commands, individual active diagnosis control when there are a plurality of active diagnosis control targets can be easily realized. .

Next, the configuration and operation of the physical quantity sensor according to the seventh embodiment of the present invention will be described with reference to FIG.
FIG. 9 is a block diagram showing a configuration of a physical quantity sensor according to the seventh embodiment of the present invention. In FIG. 9, the same reference numerals as those in FIGS. 1 and 3 denote the same parts.

  In the physical quantity sensor of this embodiment, the active diagnosis circuit 200F diagnoses the active diagnosis circuit 200F according to the output of the second determination circuit 202 with respect to the active diagnosis circuit 200A in the second example shown in FIG. The difference is that a switching means 211 for switching whether or not to input a displacement amount to the angular velocity detection circuit 100 and a storage means 212 for temporarily storing the displacement amount for diagnosis are provided.

  The operations of the angular velocity detection circuit 100, transmission circuit 101, and reception circuit 102 in FIG. 9 are the same as those shown in FIG. The operations of the first determination circuit 201 and the second determination circuit 202 are the same as those shown in FIG.

  Next, the operation of the active diagnostic circuit 200F in the present embodiment will be described.

  In the active diagnosis circuit 200F, when a communication command is input from the host system to the first determination circuit 201 via the reception circuit 102, the first determination circuit 201 and the second determination circuit 202 are activated based on the content of the communication command and the DIAG signal. It is determined whether or not diagnosis is to be performed. If the determination result is a result that permits active diagnosis, a communication command is input to the active diagnosis execution circuit 203F.

  Next, when a communication command is input to the active diagnosis execution circuit 203F, the switching means 211 applies a displacement amount for diagnosis to the movable portion 1, so that the displacement for diagnosis stored in the storage means 212 by switching the switch. The amount is input to the subsequent angular velocity detection circuit 100. When no communication command is input to the active diagnosis execution circuit 203, the switching unit 211 inputs zero to the angular velocity detection circuit 100.

  According to the present embodiment described above, first, by changing the amount of diagnostic displacement temporarily stored in the storage means 212 using a communication command or the like, the movable portion 1 during active diagnosis is changed. It becomes possible to change the amount of displacement. For this reason, it is possible to detect a change in sensitivity of the movable part 1, and it is possible to realize a higher-performance active diagnosis.

  Secondly, by switching the storage means 212 only when the switching means 211 is provided and active diagnosis is permitted, the displacement amount for diagnosis stored in the storage means 212 is erroneously changed by a communication command or the like. Even so, the switch inputs zero to the angular velocity detection circuit 100. Therefore, there is no influence on the Coriolis displacement and the Coriolis servo amount, and a more reliable active diagnosis can be realized.

  Third, based on the content of the communication command and the signal level of the DIAG signal, the first determination circuit 201 and the second determination circuit 206 allow the active diagnosis to be performed, thereby changing the communication command due to noise interference or the like It is possible to suppress erroneous diagnosis even when a communication command is erroneously transmitted due to a system failure.

  Fourth, when a pulse signal is used for the DIAG signal, the second determination circuit 206 prohibits the active diagnosis even when the DIAG signal path is disconnected by making a determination regarding the active diagnosis permission based on the frequency of the DIAG signal. It is possible to realize a highly reliable active diagnosis.

  Fifth, since active diagnosis is controlled based on the contents of the communication command, it is possible to easily make multiple items of the contents of active diagnosis. Therefore, the active diagnosis of the host system according to the situation without adding a circuit It is possible to change the contents. For example, it is possible to perform diagnosis for each individual circuit such as a drive control circuit that controls drive vibration of the movable unit 1 and an angular velocity detection circuit. Further, it is possible to perform a sensitivity diagnosis of the movable part 1 by changing the amount of displacement for diagnosis using a communication command, and it is possible to predict a failure using the sensitivity change of the movable part 1.

  Sixth, since active diagnosis can be controlled with high reliability based on the contents of the communication command, individual active diagnosis control when there are a plurality of active diagnosis control targets can be easily realized. .

Next, the configuration and operation of the physical quantity sensor according to the eighth embodiment of the present invention will be described with reference to FIGS.
FIG. 10 is a block diagram showing a configuration of a physical quantity sensor according to the eighth embodiment of the present invention. In FIG. 10, the same reference numerals as those in FIGS. 1, 3, and 9 denote the same parts. FIG. 11 is a configuration diagram of a communication frame of the transmission circuit in the physical quantity sensor according to the eighth embodiment of the present invention.

  The basic configuration of the physical quantity sensor of this embodiment is the same as that shown in FIG.

  Furthermore, in the physical quantity sensor of the present embodiment, the transmission circuit 101A includes a monitoring information addition circuit 301. The monitoring information addition circuit 301 adds the angular velocity information detected by the angular velocity detection circuit 100 and the monitoring result output by the monitoring circuit 300 to the transmission content. The monitoring circuit 300 monitors a predetermined displacement frequency and displacement amount of the movable part 1.

  The operations of the angular velocity detection circuit 100 and the reception circuit 102 in FIG. 10 are the same as those shown in FIG. The operation of the active diagnostic circuit 200F performs the same operation as that shown in FIG.

  Next, the operation of the transmission circuit 101A in this embodiment will be described.

  The monitoring circuit 300 monitors the control amount of the movable part 1 such as the drive amplitude and the displacement of the movable part 1, and inputs the monitoring result to the monitoring information adding circuit 301 provided in the transmission circuit 101A. Further, the Coriolis servo amount is input to the monitoring information adding circuit 301 while the angular velocity detection circuit 100 is performing servo control.

  Next, the monitoring information adding circuit 301 stores the Coriolis servo amount (physical amount information) and the input monitoring result (monitoring information) in a predetermined frame as shown in FIG.

  According to the present embodiment described above, first, the angular velocity information detected by the angular velocity detection circuit 100 and the monitoring results of the movable unit 1 and the angular velocity detection circuit 100 are stored in a predetermined frame and transmitted to the host system. Thus, the host system can detect a failure of the physical quantity sensor in real time, and can realize highly reliable angular velocity detection by the physical quantity sensor.

  Secondly, the angular velocity information detected by the angular velocity detection circuit 100 and the monitoring results of the movable part 1 and the angular velocity detection circuit 100 are stored in a predetermined frame and transmitted to the host system, thereby reducing the number of external terminals of the physical quantity sensor. Without change, it becomes possible to transmit the monitoring information of the physical quantity sensor to the host system, and it is possible to realize highly reliable angular velocity detection by the physical quantity sensor at a minimum cost.

  Thirdly, the angular velocity information detected by the angular velocity detection circuit 100 and the monitoring results of the movable part 1 and the angular velocity detection circuit 100 are stored in a predetermined frame and transmitted to the host system, so that the physical quantity sensor is before and after a failure occurs. Therefore, the host system can discriminate the angular velocity information, and it is possible to realize highly accurate angular velocity detection.

  Further, in this embodiment, the same effect as that of the seventh embodiment shown in FIG. 8 can be obtained.

Next, the configuration and operation of the physical quantity sensor according to the ninth embodiment of the present invention will be described with reference to FIGS.
FIG. 12 is a block diagram showing a configuration of a physical quantity sensor according to the ninth embodiment of the present invention. In FIG. 12, the same reference numerals as those in FIGS. 1, 3, and 9 denote the same parts. FIG. 13 is a configuration diagram of a communication frame of the transmission circuit in the physical quantity sensor according to the ninth embodiment of the present invention.

  The basic configuration of the physical quantity sensor of this embodiment is the same as that shown in FIG.

  Furthermore, in the physical quantity sensor of this embodiment, the transmission circuit 101B includes a monitoring information addition circuit 301, a processing result addition circuit 303 that adds the signal processing result by the processing circuit 302 and the angular velocity detected by the angular velocity detection circuit 100 to the transmission content. It has.

  The monitoring information addition circuit 301 adds the angular velocity information detected by the angular velocity detection circuit 100 and the monitoring result output by the monitoring circuit 300 to the transmission content. The monitoring circuit 300 monitors a predetermined displacement frequency and displacement amount of the movable part 1.

  The processing circuit 302 performs signal processing according to the communication command received by the receiving circuit 102. For example, the final value of the angular velocity and the angular velocity value immediately before the final value are stored at a predetermined address in the RAM inside the angular velocity detection circuit 100. Therefore, when the communication command received by the processing circuit 302 is a communication command for reading the angular velocity value immediately before the final value, the angular velocity value immediately before the final value is read from a predetermined address in the RAM. The result is output to the processing result adding circuit 303 as a signal processing result. The processing result addition circuit 303 adds the signal processing result by the processing circuit 302 and the angular velocity detected by the angular velocity detection circuit 100 to the transmission content.

  The operations of the angular velocity detection circuit 100 and the reception circuit 102 in FIG. 12 are the same as those shown in FIG. The operation of the active diagnostic circuit 200F performs the same operation as that shown in FIG.

  Next, the operation of the transmission circuit 101B in this embodiment will be described.

  The processing circuit 302 performs signal processing according to the communication command received by the receiving circuit 102. The output of the processing circuit 302 and the angular velocity information detected by the angular velocity detection circuit 100 are input to the processing result adding circuit 303. The processing result adding circuit 303 stores the Coriolis servo amount (physical quantity information), the input monitoring result (monitoring information), and the signal processing result by the processing circuit 302 in a predetermined frame as shown in FIG. Transmit to.

  According to the embodiment described above, first, the physical quantity sensor is obtained by storing the angular velocity information detected by the angular velocity detection circuit 100 and the signal processing result corresponding to the command in a predetermined frame and transmitting them to the host system. The signal processing result corresponding to the command can be transmitted to the host system without changing the number of external terminals.

  Further, in this embodiment, the same effect as that of the seventh embodiment shown in FIG. 8 can be obtained.

Next, the configuration and operation of the physical quantity sensor according to the tenth embodiment of the present invention will be described with reference to FIGS.
FIG. 14 is a block diagram showing a configuration of a physical quantity sensor according to the tenth embodiment of the present invention. In FIG. 14, the same reference numerals as those in FIGS. 1, 3, and 9 denote the same parts. FIG. 15 is a configuration diagram of a communication frame of a transmission circuit in the physical quantity sensor according to the tenth embodiment of the present invention.

  The basic configuration of the physical quantity sensor of this embodiment is the same as that shown in FIG.

  Furthermore, in the physical quantity sensor according to the present embodiment, the transmission circuit 101C includes an error detection signal generation circuit 304 that generates an error detection signal for transmission contents, and an error detection signal in addition to the configuration of the transmission circuit 101B illustrated in FIG. An error detection information adding circuit 305 for adding to the transmission contents is provided.

  Note that the operations of the angular velocity detection circuit 100 and the reception circuit 102 in FIG. 14 are the same as those shown in FIG. The operation of the active diagnostic circuit 200F performs the same operation as that shown in FIG.

  Next, the operation of the transmission circuit 101C in this embodiment will be described.

  In the transmission circuit 101C, the error detection information generation circuit 304 generates error detection information for the transmission contents and inputs the error detection information to the error detection information addition circuit 305. Next, the error detection information adding circuit 305 generates error detection information as shown in FIG. 15 together with the Coriolis servo amount (physical quantity information), the input monitoring result (monitoring information), and the signal processing result by the processing circuit 302. It is stored in a predetermined frame and transmitted to the host system.

  According to the embodiment described above, first, when the angular velocity information transmitted to the host system changes due to the influence of noise or the like by generating error detection information for the transmission content, the host system However, it is possible to detect fraud in angular velocity information, and it is possible to realize highly accurate angular velocity detection.

  Even if the transmission contents always contain diagnosis results and signal processing results according to commands, by generating error detection information for each transmission content, the information transmitted to the host system can be When changed under the influence, it becomes possible for the host system to detect the fraud of the transmission contents, and to realize highly reliable transmission of information.

  Further, in this embodiment, the same effect as that of the seventh embodiment shown in FIG. 8 can be obtained.

Next, the configuration and operation of the physical quantity sensor according to the eleventh embodiment of the present invention will be described with reference to FIGS.
FIG. 16 is a block diagram showing a configuration of a physical quantity sensor according to the eleventh embodiment of the present invention. In FIG. 16, the same reference numerals as those in FIGS. 1, 3, and 9 denote the same parts. FIG. 17 is a configuration diagram of a communication frame of the transmission circuit in the physical quantity sensor according to the eleventh embodiment of the present invention.

  The basic configuration of the physical quantity sensor of this embodiment is the same as that shown in FIG.

  Further, in the physical quantity sensor according to the present embodiment, the transmission circuit 101D receives the signal processing result output by the processing circuit 302 instead of the processing result addition circuit 303 in the configuration of the transmission circuit 101C illustrated in FIG. A processing result delay adding circuit 303 </ b> D that adds the transmission contents after being delayed by the number of times is provided.

  The operations of the angular velocity detection circuit 100 and the reception circuit 102 in FIG. 16 are the same as those shown in FIG. The operation of the active diagnostic circuit 200F performs the same operation as that shown in FIG.

  Next, the operation of the transmission circuit 101D in this embodiment will be described.

  The processing circuit 302 performs signal processing according to the command received by the receiving circuit 102. The processing result addition circuit 306 receives the output of the processing circuit 302 and the angular velocity information detected by the angular velocity detection circuit 100. The processing result adding circuit 306 stores the input angular velocity information and the signal processing result corresponding to the command received a predetermined number of times before reception in a predetermined frame as shown by DOUT in FIG. To do. As a result, as shown in FIG. 17, the signal processing result for the communication command is transmitted to the host system with a delay of a predetermined command reception count.

  If the delay processing as described above is not performed, the communication frame is as shown by DOUT ′ in FIG. Depending on the processing contents executed by the processing circuit 302, it may take a predetermined time until a processing result is obtained. That is, there is a predetermined time delay from the start of processing according to the processing command until the actual processing result is obtained. Therefore, as shown by DOUT ′ in FIG. 17, when trying to output the signal processing result in response to the processing command CMD1, a waiting time as shown in the figure is required.

  On the other hand, according to the present embodiment described above, first, the signal processing result corresponding to the communication command is delayed by a predetermined number of times of command reception and transmitted to the host system, so that the signal processing result from the time of command reception. It is possible to shorten the waiting time until the data is transmitted to the host system, and to perform high-speed transmission.

  Furthermore, in this embodiment, the same effect as that of the ninth embodiment shown in FIG. 10 can be obtained.

Next, the configuration and operation of the physical quantity sensor according to the twelfth embodiment of the present invention will be described with reference to FIGS.
FIG. 18 is a block diagram showing a configuration of a physical quantity sensor according to the twelfth embodiment of the present invention. In FIG. 18, the same reference numerals as those in FIGS. 1, 3, and 9 denote the same parts. FIG. 19 is a configuration diagram of a communication frame of the transmission circuit in the physical quantity sensor according to the twelfth embodiment of the present invention.

  The basic configuration of the physical quantity sensor of this embodiment is the same as that shown in FIG.

  Furthermore, in the physical quantity sensor according to the present embodiment, the transmission circuit 101E includes a diagnosis status addition circuit 307 that adds information indicating completion of active diagnosis to the transmission content in the transmission circuit 101 illustrated in FIG.

  The operations of the angular velocity detection circuit 100 and the reception circuit 102 in FIG. 18 are the same as those shown in FIG. The operation of the active diagnostic circuit 200F performs the same operation as that shown in FIG.

  Next, the operation of the transmission circuit 101E in this embodiment will be described.

  The diagnosis status addition circuit 307 receives the output of the second determination circuit 206. The diagnosis status addition circuit 307 adds information indicating that the active diagnosis is completed to the transmission contents when the output of the second determination circuit 206 is switched from the active diagnosis permission mode to the active diagnosis prohibition mode.

  Note that the information indicating that the active diagnosis has been completed may be added anywhere in the transmission content as long as it is transmitted to the host system at the same timing as the physical quantity information. Specifically, it may be added to the lower bits of the communication physical quantity information, or may be added to the monitoring result in the embodiment of FIG.

  According to the present embodiment described above, first, when the active diagnosis is completed, the signal indicating the completion of the active diagnosis is added to the transmission content, so that the angular velocity information transmitted to the host system is under active diagnosis. Therefore, it is possible to realize active diagnosis with higher accuracy.

  Further, in this embodiment, the same effect as that of the seventh embodiment shown in FIG. 8 can be obtained.

Next, the configuration and operation of the physical quantity sensor according to the thirteenth embodiment of the present invention will be described with reference to FIG.
FIG. 20 is a block diagram showing a configuration of a physical quantity sensor according to the thirteenth embodiment of the present invention. 20, the same reference numerals as those in FIGS. 1, 3, and 10 denote the same parts.

  The physical quantity sensor of this embodiment includes a drive control circuit 103, a transmission circuit 101A, a reception circuit 102, an active diagnostic circuit 200F, and a monitoring circuit 300A. The drive control circuit 103 includes a movable unit 1 that performs drive vibration for detecting angular velocity. In order to detect the angular velocity, the drive control circuit 103 moves the movable unit 1 at a predetermined frequency and a predetermined amplitude in a direction perpendicular to the detection axis (Y axis in the figure) (drive axis direction: X axis direction in the figure). Drive vibration with.

  The transmission circuit 101A transmits angular velocity information detected by the physical quantity sensor to the host system. The receiving circuit 102 receives a communication command from a host system such as an ECU. The active diagnosis circuit 200 performs active diagnosis based on the communication command received by the receiving circuit 102. The monitoring circuit 300A monitors the state of the physical quantity sensor.

  The movable portion 1 of the drive control circuit 103 is displaced according to the angular velocity from the outside. The movable part 1 is provided with a drive monitor electrode 14 composed of a movable electrode fixed in parallel to the drive axis direction of the movable part 1 and a fixed electrode disposed opposite to the movable electrode. . The movable unit 1 includes a movable electrode fixed in parallel to the drive axis direction of the movable unit 1 and a fixed electrode disposed opposite to the movable electrode and applied with a drive voltage. An electrode 22 is provided.

  The CV converter 14 converts the capacitance change of the drive monitor electrode 14 into a voltage signal. The AD converter 15 converts the voltage signal output from the CV converter 14 into a digital signal.

  The synchronous detection circuit 17, the integrator 18 and the oscillator (OSC) 19 constitute a frequency control circuit (AFC). The frequency control circuit (AFC) detects the displacement of the movable part 1 from the digital signal and performs control to maintain the displacement frequency at a predetermined frequency. The synchronous detection circuit 23 and the integrator 2419 constitute an amplitude control circuit (AGC). The amplitude control circuit (AGC) performs control so that the displacement amplitude is maintained at a predetermined amplitude.

  The modulator 20 generates a drive signal based on the outputs of the frequency control circuit (AFC) and the amplitude control circuit (AGC). The DA converter 21 reconverts the drive signal output from the modulator 20 into a drive voltage and applies it to the drive electrode 22.

  Here, the synchronous detection circuit 17 of the frequency control circuit (AFC) synchronously detects the digital signal output from the AD converter 16 using the detection signal (Φ5) having the same phase Φ5 as the drive vibration of the movable unit 1. The integrator 18 integrates the output of the synchronous detection circuit 17. An oscillator (OSC) 19 generates a frequency according to the output of the integrator 18.

  The synchronous detection circuit 23 of the amplitude control circuit (AGC) synchronously detects the digital signal output from the AD converter 16 by a detection signal (Φ6) having a phase Φ6 delayed by 90 ° with respect to the drive vibration of the movable unit 1. To do. The integrator 24 integrates the output of the synchronous detection circuit 23.

  Next, the active diagnosis circuit 200F includes a first determination circuit 201, a second determination circuit 202, and an active diagnosis execution circuit 203, as in FIG. The diagnostic displacement output from the active diagnosis execution circuit 203 is added to the outputs from the integrators 18 and 24 by the adders 213 and 214.

  The monitoring circuit 300A includes a frequency monitoring unit 308, an instruction amount monitoring unit 309, and a displacement monitoring unit 310. The frequency monitoring unit 308 monitors the driving frequency of the movable unit 1 and outputs a signal indicating an abnormal state of the driving frequency when the driving frequency deviates from a predetermined range. The instruction amount monitoring unit 309 monitors the drive amplitude instruction amount of the movable unit 1 and outputs a signal indicating an abnormal state of the drive amplitude instruction amount when the drive amplitude instruction amount deviates from a predetermined range. The displacement monitoring unit 310 monitors the driving displacement of the movable unit 1 and outputs a signal indicating an abnormal state of the driving displacement when the driving displacement deviates from a predetermined range.

  Next, the operation of the physical quantity sensor in the present embodiment will be described.

  The angular velocity detection circuit 103 changes the capacitance of the drive monitor electrode 14 in accordance with the driving displacement of the movable portion 1 when the movable portion 1 is displaced by a driving force that generates driving vibration for detecting the angular velocity in the movable portion 1. Then, a drive voltage for maintaining the drive frequency and the drive amplitude in a predetermined range is generated. The drive voltage is applied to the movable part 1 by the drive electrode 22 to perform servo control.

  In the frequency control circuit (AFC), the digital signal output from the AD converter 16 is synchronously detected by the synchronous detection circuit 17 using the detection signal Φ5, and the drive frequency of the movable part 1 due to drive vibration is detected. The integrator 18 integrates the drive frequency to obtain a drive frequency adjustment amount that cancels the fluctuation of the drive frequency. The OSC 19 outputs a frequency signal corresponding to the output of the integrator 18 and generates a pulse signal having the same frequency as the drive frequency.

  In the amplitude control circuit (AGC), the digital signal output from the AD converter 16 is synchronously detected by the synchronous detection circuit 23 using Φ6, and the drive displacement of the movable part 1 due to the drive vibration is detected. The integrator 24 integrates the drive displacement to obtain a drive amplitude adjustment amount that cancels the drive amplitude fluctuation.

  The modulator 20 generates a drive signal by modulating the pulse signal generated by the frequency control circuit (AFC) and the amplitude control circuit (AGC) and the drive amplitude adjustment amount.

  Next, in the active diagnosis circuit 200F, the first determination circuit 201 and the second determination circuit 202 determine whether to perform active diagnosis using the communication command received by the reception circuit 102. When the outputs of the first determination circuit and the second determination circuit are outputs indicating that the active diagnosis is permitted, the active diagnosis execution circuit 203 outputs a displacement amount for diagnosis to the drive control circuit 103.

  The diagnostic displacement input to the drive control circuit 103 is added to the output of the integrator 18 using the adder 215, converted into a pulse signal using the OSC 19, and applied to the movable unit 1. This diagnostic displacement is detected by the synchronous detection circuit 17 as a change in the drive frequency. Further, the displacement for diagnosis is output by the integrator 18 as a change amount of the drive frequency adjustment amount for making the displacement for diagnosis zero.

  When the displacement amount for diagnosis is added to the output of the integrator 24 using the adder 216, the change is detected by the synchronous detection circuit 23 as a change in the drive displacement. The diagnostic displacement is output by the integrator 24 as a change amount of the drive amplitude adjustment amount for making the diagnostic displacement zero.

  Next, in the monitoring unit 300A, the frequency monitoring circuit 308 monitors whether or not the output of the integrator 18 is within a predetermined range. If the output of the integrator 18 is not within the predetermined range, the frequency of the driving frequency is monitored. A signal indicating abnormality is output to the transmission circuit 101. The instruction amount monitoring circuit 309 monitors whether the output of the integrator 24 is within a predetermined range, and indicates an abnormality in the drive amplitude instruction amount when the output of the integrator 24 is not within the predetermined range. The signal is output to the transmission circuit 101. Further, the displacement monitoring circuit 310 monitors whether or not the output of the synchronous detection circuit 23 is within a predetermined range, and when the output of the synchronous detection circuit 23 is not within the predetermined range, a signal indicating an abnormality in drive displacement. Is output to the transmission circuit 101.

  According to the embodiment described above, first, by monitoring the drive frequency using the frequency monitoring circuit 308, it is possible to detect an abnormality in the drive frequency control of the movable unit 1 in real time.

  Secondly, by monitoring the drive amplitude instruction amount using the instruction amount monitoring circuit 309, it is possible to detect an abnormality in the drive amplitude control of the movable portion 1 in real time.

  Third, by monitoring the drive displacement using the displacement monitoring circuit 310, it is possible to detect an abnormality in the drive vibration of the movable part 1 in real time.

  Fourth, it is possible to detect a change in sensitivity of the movable part 1 with respect to the drive amplitude instruction amount of the movable part 1 by adding the displacement amount for diagnosis to the output of the integrator 24 using the active diagnosis execution circuit 203. Thus, higher-performance active diagnosis can be realized.

Next, the configuration and operation of the physical quantity sensor according to the fourteenth embodiment of the present invention will be described with reference to FIG.
FIG. 21 is a block diagram showing a configuration of a physical quantity sensor according to the fourteenth embodiment of the present invention. In FIG. 21, the same reference numerals as those in FIGS. 1, 3, and 10 denote the same parts.

  The basic configuration of the physical quantity sensor of this embodiment is the same as that shown in FIG.

  Furthermore, in the physical quantity sensor of this embodiment, the monitoring circuit 300B monitors the self-vibration servo amount with respect to the monitoring circuit 300 shown in FIG. 10, and when the self-vibration servo amount deviates from a predetermined range, A self-vibration monitoring circuit 311 that outputs a signal indicating an abnormal state is additionally provided.

  The operations of the angular velocity detection circuit 100 and the reception circuit 102 in FIG. 21 are the same as those shown in FIG. The operation of the active diagnostic circuit 200F performs the same operation as that shown in FIG. The transmission circuit 101F performs the same operation as that shown in FIG.

  Next, the operation of the physical quantity sensor in the present embodiment will be described.

  The self-vibration monitoring circuit 311 of the monitoring circuit 300B monitors whether or not the output of the integrator 6 is within a predetermined range while the angular velocity detection circuit 100 is performing servo control. When the signal is not within the predetermined range, a signal indicating abnormality of self-vibration is output to the transmission circuit 101.

  According to the embodiment described above, first, by monitoring the self-vibration servo amount using the self-vibration monitoring circuit 311, it is possible to detect the abnormality of the self-vibration servo control of the movable part 1 in real time. It becomes.

  Secondly, by adding the displacement amount for diagnosis to the output of the integrator 6 using the active diagnosis execution circuit 203 and the adder 204, it becomes possible to detect a change in sensitivity of the movable part 1, and to achieve higher performance. Active diagnosis can be realized.

  Further, in this embodiment, the same effect as that of the eighth embodiment shown in FIG. 10 can be obtained.

Next, the configuration and operation of the physical quantity sensor according to the fifteenth embodiment of the present invention will be described with reference to FIGS.
FIG. 22 is a block diagram showing a configuration of a physical quantity sensor according to the fifteenth embodiment of the present invention. In FIG. 22, the same reference numerals as those in FIGS. 1, 3, and 10 denote the same parts. 23 and 24 are flowcharts showing the processing contents of the storage device monitoring method in the physical quantity sensor according to the fifteenth embodiment of the invention.

  The basic configuration of the physical quantity sensor of this embodiment is the same as that shown in FIG.

  The physical quantity sensor of this embodiment includes a storage device 400 such as a random access memory (RAM) 401 and an erasable programmable read only memory (EPROM) 402 used in the physical quantity sensor.

  Furthermore, in the physical quantity sensor of this embodiment, the monitoring circuit 300C provides a signal indicating an abnormal state of the storage device 400 to the monitoring circuit 300 illustrated in FIG. 10 when the storage device 400 can no longer satisfy a predetermined function. A storage device monitoring circuit 312 for outputting is additionally provided.

  The operations of the angular velocity detection circuit 100 and the reception circuit 102 in FIG. 22 are the same as those shown in FIG. The operation of the active diagnostic circuit 200F performs the same operation as that shown in FIG. The transmission circuit 101F performs the same operation as that shown in FIG.

  Next, the operation of the physical quantity sensor in the present embodiment will be described.

  The storage device monitoring circuit 312 monitors whether the storage device 400 such as the RAM 401 and the EPROM 402 is in a state where it can perform a predetermined function, and detects an abnormality of the corresponding storage device when a malfunction occurs in each storage device. The signal to be output is output to the transmission circuit 101.

  First, a RAM monitoring method will be described with reference to FIG.

  In step S200 of FIG. 23, the storage device monitoring circuit 312 determines whether or not the DIAG signal is H. In step S210, the storage device monitoring circuit 312 determines whether or not the DIAG signal stored in the RAM 401 is not zero. When the DIAG signal is L and the DIAG signal stored in the RAM 401 is 0, in step S270, 0 is substituted for the DIAG signal in the RAM 401, 0 is substituted for the address, and 0 is substituted for the total value SUM. To finish the process.

  If the DIAG signal is H and the DIAG signal stored in the RAM 401 is not 0, in step S220, the storage device monitoring circuit 312 stores the value of the DIAG signal stored in the RAM 401 (at the predetermined address (address) of the RAM 401). RAMDIAG), that is, 1 is stored. A predetermined RAM address (address) of the RAM is stored in the TEMP area (TEMP). Further, a value obtained by subtracting the value of the DIAG signal (RAMDIAG) stored in the RAM 401 from the value of the TEMP area (TEMP) is stored in the TEMP area (TEMP). Next, the absolute value (abs (TEMP)) of the value of the TEMP area is stored in the TEMP area (TEMP). Further, a value obtained by adding 1 to the value (TEMP) of the TEMP area is stored in the TEMP area (TEMP). Finally, a value obtained by adding the TEMP area (TEMP) to the SUM area value (SUM) is stored in the SUM area (SUM).

  Next, in step S230, the storage device monitoring circuit 312 adds 1 to the address value.

  Next, in step S240, the storage device monitoring circuit 312 stores the inverse value of the value of the DIAG signal (RAMDIAG) stored in the RAM 401, that is, 0, at a predetermined address (address) of the RAM 401. A predetermined RAM address (address) of the RAM is stored in the TEMP area (TEMP). Further, a value obtained by subtracting the inverse value of the value of the DIAG signal (RAMDIAG) stored in the RAM 401 from the value of the TEMP area (TEMP) is stored in the TEMP area (TEMP). Next, the absolute value (abs (TEMP)) of the value of the TEMP area is stored in the TEMP area (TEMP). Further, a value obtained by adding 1 to the value (TEMP) of the TEMP area is stored in the TEMP area (TEMP). Finally, a value obtained by adding the TEMP area (TEMP) to the SUM area value (SUM) is stored in the SUM area (SUM).

  Next, in step S250, the storage device monitoring circuit 312 adds 1 to the address value.

  Next, in step S260, the storage device monitoring circuit 312 determines whether or not the address value has become larger than the number of effective addresses N. If the number of effective addresses is less than or equal to N, the processing of steps S220 to S250 is performed. continue. When the value of the address becomes larger than the effective address number N, the process is terminated.

  In this way, in this embodiment, the RAM 401 is monitored by performing write / read operations using fixed values for all addresses in the RAM 401 and diagnosing bit fixing at each address.

  Next, an EPROM monitoring method will be described with reference to FIG.

  In step S300 of FIG. 24, the storage device monitoring circuit 312 determines whether the address is 0 or not. If it is not 0, the process proceeds to step S350, and if it is 0, the process proceeds to step S310.

  If the address is 0, in step S310, the storage device monitoring circuit 312 determines whether or not the CRC code for error detection is 0. If it is not 0, the process proceeds to step S330, and if it is 0, the process proceeds to step S320.

  If the CRC code is 0, the storage device monitoring circuit 312 resets the error flag in step S320. If the CRC code is not 0, the storage device monitoring circuit 312 sets the error flag in step S330.

  Next, in step S340, the storage device monitoring circuit 312 stores 0 in the CRC code for error detection.

  In step S350, the storage device monitoring circuit 312 reads data at a predetermined address in the EPROM 402, and executes a CRC operation in step S360.

  Next, in step S370, the storage device monitoring circuit 312 adds 1 to the address value.

  Next, in step S380, the storage device monitoring circuit 312 determines whether or not the address value is larger than the number of effective addresses N. If the number of effective addresses is N or less, the processing of steps S300 to S370 is performed. continue. When the value of the address becomes larger than the effective address number N, the process is terminated.

  In this way, in this embodiment, a CRC code for error detection is stored in advance at a predetermined address in the EPROM 402. If all addresses are normal, the CRC calculation result is zero, and the CRC calculation result is When the memory device monitoring circuit 312 does not become zero, the storage device monitoring circuit 312 outputs an abnormality of the EPROM 402 to monitor the EPROM 402.

  The error detection means used for monitoring the EPROM 402 may take an error detection method using a parity code, a hash function, and a checksum in addition to the CRC.

  According to the physical quantity sensor of the present embodiment described above, first, by monitoring the RAM 401 using the storage device monitoring circuit 312, it is possible to detect an abnormality in the RAM 401, and highly reliable physical quantity detection and active Diagnosis can be realized.

  Second, by monitoring the EPROM 402 using the storage device monitoring circuit 312, it is possible to detect an abnormality in the EPROM 402, and to realize a highly reliable physical quantity detection and active diagnosis.

  Further, in this embodiment, the same effect as that of the eighth embodiment shown in FIG. 10 can be obtained.

Next, the configuration and operation of a physical quantity sensor and a physical quantity sensor control device according to a sixteenth embodiment of the present invention will be described with reference to FIG.
FIG. 25 is a block diagram showing a configuration of a physical quantity sensor and a physical quantity sensor control device according to the sixteenth embodiment of the present invention. 25, the same reference numerals as those in FIG. 2 denote the same parts.

  The basic configuration of the physical quantity sensor of this embodiment is the same as that shown in FIG.

  The physical quantity sensor control device of the present embodiment includes a first control device 104 that outputs a communication command for performing control of the physical quantity sensor to the first determination circuit 201 with respect to the physical quantity sensor illustrated in FIG. A failure diagnosis of the control device 104 is performed, and a second control device 105 that outputs a DIAG signal to the second determination device 206 based on the diagnosis result is added. The first control device 104 is, for example, an ECU (Electronic Control Unit) that controls engine control and traction control. The second control device 105 is a control unit for failure diagnosis of the first control device 104.

  The operations of the angular velocity detection circuit 100, the transmission circuit 101, and the reception circuit 102 in FIG. 25 are the same as those shown in FIG. The operation of the active diagnostic circuit 200F performs the same operation as that shown in FIG.

  Here, the operation of the physical quantity sensor and the physical quantity sensor control device in the present embodiment will be described.

  The first control device 104 outputs a communication command for performing an active diagnosis of the physical quantity sensor to the receiving circuit 102. Next, when a communication command is input to the first determination circuit 201 via the reception circuit 102, the first determination circuit 201 compares the communication command group stored in the first determination circuit 201 in advance with the communication command. Is a command related to the control of the physical quantity sensor. Next, it is determined whether or not the command is for active diagnosis control.

  Next, the second control device 105 determines whether or not an abnormality has occurred in the first control device 104. If the first control device 104 is normal, an H level DIAG signal is output to the second determination circuit 206. To do. On the other hand, if the first control device 104 determines that there is an abnormality, it outputs an L level DIAG signal to the second determination circuit.

  Next, the second determination circuit 206 confirms the level of the DIAG signal. If the DIAG signal is in the H level, the output of the second determination circuit 206 is set to the active diagnosis permission mode. On the other hand, if the DIAG signal is at L level, the output of the second determination circuit 206 is set to the active diagnosis inhibition mode. Next, when the communication command is a command for active diagnosis control and the output of the second determination circuit 206 is in the active diagnosis permission mode, the active diagnosis execution circuit 203 executes active diagnosis.

  According to the physical quantity sensor and the physical quantity sensor control device of the present embodiment described above, first, the second control device 105 performs failure diagnosis of the first control device 104 and outputs a DIAG signal to the second determination circuit 206. Therefore, when the first control device 104 outputs a communication command for executing the active diagnosis to the first determination circuit 201, it is possible to prevent malfunction of the active diagnosis and realize a highly reliable active diagnosis. It becomes possible to do.

  Further, in this embodiment, the same effect as that of the second embodiment shown in FIG. 2 can be obtained.

Next, the configuration and operation of the physical quantity sensor according to the seventeenth embodiment of the present invention will be described with reference to FIGS.
FIG. 26 is a block diagram showing a configuration of a physical quantity sensor according to the seventeenth embodiment of the present invention. In FIG. 26, the same reference numerals as those in FIG. 9 denote the same parts. FIG. 27 is an explanatory diagram of an active diagnosis result of the acceleration sensor in the physical quantity sensor according to the seventeenth embodiment of the present invention.

  In this embodiment, instead of the angular velocity detection circuit 100, an acceleration detection circuit 106 including a movable portion 27 for detecting acceleration is used as the physical quantity sensor.

  The acceleration detection circuit 106 includes a movable portion 27, a detection electrode 28, a CV converter 29, an AD converter 30, an integrator 31, a DA converter 25, and a diagnostic electrode 26.

  The movable portion 27 is supported so as to be displaceable in a predetermined axis direction (acceleration detection axis direction) in order to detect acceleration. The detection electrode 28 changes its capacity according to the displacement of the movable portion 27. The detection electrode 28 includes a variable electrode 28a fixed in the acceleration detection axis direction of the movable portion 27, and a fixed electrode 28b disposed to face the variable electrode 28a. The CV converter 29 converts the capacitance change of the detection electrode 28 into a voltage signal. The AD converter 30 converts the voltage signal output from the CV converter 29 into a digital signal. The integrator 31 integrates the digital signal. The correction calculator 32 performs a correction calculation on the signal corresponding to the displacement of the movable part 27 output from the integrator 31. The DA converter 25 converts the diagnostic displacement input from the active diagnostic circuit 200F into a voltage signal. The diagnostic electrode 26 applies the voltage signal generated by the DA converter 25 to the movable portion 27. The diagnostic electrode 26 includes a variable electrode 26a fixed in the acceleration detection axis direction of the movable portion 27, and a fixed electrode 26b arranged to face the variable electrode 26a.

  The operations of the transmission circuit 101, the reception circuit 102, and the active diagnostic circuit 200F in FIG. 26 are the same as those shown in FIG.

  Next, the operation of the physical quantity sensor in the present embodiment will be described.

  When the diagnostic displacement amount is input to the acceleration detection circuit 106 by the active diagnostic circuit 200, the input diagnostic displacement amount is applied to the movable portion 27 by the DA converter 25 and the diagnostic electrode 26, and the movable portion according to the diagnostic displacement amount. 27 is displaced. The detection electrode 28 converts the displacement of the movable portion 27 into a voltage signal and inputs the voltage signal to the correction calculator 32 via the CV converter 29, the AD converter 30, and the integrator 31. The correction calculator 32 performs a predetermined correction calculation and outputs it to the transmission circuit 101 as acceleration information.

  Next, an active diagnosis result of the acceleration sensor in the physical quantity sensor according to the present embodiment will be described with reference to FIG.

  FIG. 27 is a graph showing the output (vertical axis) of the integrator 31 in accordance with the displacement for diagnosis by changing the amount of displacement for diagnosis stored in the storage means 212 by the communication command and performing active diagnosis. It is expressed as The horizontal axis of the graph is a value obtained by converting the amount of displacement for diagnosis into acceleration.

  From the active diagnosis result shown in FIG. 22, the offset of the acceleration sensor, the sensitivity to the acceleration, and the linearity of the acceleration sensor can be acquired. The offset of the acceleration sensor is obtained as the output of the integrator 31 when the acceleration is 0 G, as shown in the figure. The sensitivity to acceleration is obtained as the slope of the straight line shown. As shown in the figure, the linearity of the acceleration sensor is, for example, minimum with respect to the output of the integrator 31 with respect to accelerations of four points of accelerations −1.0G, −0.5G, + 0.5G, and + 1.0G. A straight line approximation is performed by the square method, and a deviation from the approximated straight line is obtained.

  Therefore, it is possible to acquire an offset correction value, a sensitivity correction value, and a linearity correction value by performing active diagnosis. By using this correction value during the correction calculation, it is possible to improve the acceleration detection accuracy of the acceleration sensor in the present embodiment.

  According to the physical quantity sensor of the present embodiment described above, first, by performing active diagnosis by changing the displacement amount for diagnosis using a communication command, the offset of the physical quantity sensor, the detection sensitivity, and the physical quantity are detected. Thus, it is possible to obtain a highly accurate physical quantity detection.

  Second, active diagnosis is performed by changing a diagnostic displacement amount using a communication command, thereby obtaining a change in offset of the physical quantity sensor, a change in detection sensitivity due to a change with time, etc., and a change in linearity when detecting the physical quantity. Therefore, by changing the correction value used in the correction calculation by the correction calculator 32, it is possible to continuously realize high-precision physical quantity detection.

  Further, in this embodiment, the same effect as that of the seventh embodiment shown in FIG. 9 can be obtained.

Next, the configuration and operation of the physical quantity sensor according to the eighteenth embodiment of the present invention will be described with reference to FIG.
FIG. 28 is a block diagram showing a configuration of a physical quantity sensor according to the eighteenth embodiment of the present invention. In FIG. 28, the same reference numerals as those in FIGS. 1, 9, 20, and 26 denote the same parts.

  The physical quantity sensor of this embodiment includes an angular velocity detection circuit 100, a drive control circuit 103, an acceleration detection circuit 106, a transmission circuit 101, a reception circuit 102, an active diagnosis circuit 200, a diagnosis target selection circuit 213, and an observation signal. And a processing circuit 302 constituted by a selection circuit 216.

  The operations of the angular velocity detection circuit 100, the transmission circuit 101, the reception circuit 102, and the active diagnosis circuit 200 are the same as those shown in FIG. The operation of the drive control circuit 103 is the same as that shown in FIG. The operation of the acceleration detection circuit 106 is the same as that shown in FIG.

  Here, the diagnosis target selection circuit 213 switches the switching means 214 that switches a circuit that transmits the displacement amount for diagnosis output from the active diagnosis circuit 200, and stores that specifies the connection destination of the switching means 214 based on the stored information. Means 215.

  In addition, the observation signal selection circuit 216 includes a switching unit 214 that switches a circuit that transmits to the transmission circuit 101, and a storage unit 215 that specifies a connection destination of the switching unit 214 based on the stored information.

  Next, the operation of the physical quantity sensor in the present embodiment will be described.

  The diagnosis target selection circuit 213 stores predetermined information in the storage unit 215 by a communication command, and the switching unit 214 selects a connection destination circuit based on the information stored in the storage unit 215. Next, the displacement amount for diagnosis output by the active diagnosis circuit 200 is input to a circuit connected by the switching means 214.

  The observation signal selection circuit 216 stores predetermined information in the storage unit 218 by a communication command, and the switching unit 217 selects an observation signal based on the information stored in the storage unit 218. Next, the observation signal connected by the switching unit 217 is input to the transmission circuit 101 via the switching unit 217.

  According to the physical quantity sensor in the present embodiment described above, first, by using the diagnosis target selection circuit 213, it is possible to individually select a diagnosis target using a communication command, and the sensor is configured by a plurality of sensors. Individual control of active diagnosis is possible for multi-sensors and the like.

  Second, by using the diagnosis target selection circuit 213, it is possible to individually select the diagnosis target using a communication command, and active diagnosis can be performed for each individual functional block. Possible high-performance active diagnosis can be realized.

  Third, since the observation signal can be selected using the communication command by using the observation signal selection circuit 216, diagnosis for each functional block constituting the physical quantity sensor is possible, and high performance is achieved. Active diagnosis can be realized.

Further, in this embodiment, the same effects as those of the eleventh embodiment shown in FIG. 16, the thirteenth embodiment shown in FIG. 20, and the seventeenth embodiment shown in FIG. 26 are obtained.

It is a block diagram which shows the structure of the physical quantity sensor by the 1st Embodiment of this invention. It is a flowchart which shows the active diagnosis permission operation | movement in the physical quantity sensor by the 1st Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 2nd Embodiment of this invention. It is a flowchart which shows the active diagnosis permission operation | movement in the physical quantity sensor by the 2nd Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 3rd Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 4th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 5th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 6th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 7th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 8th Embodiment of this invention. It is a block diagram of the communication frame of the transmission circuit in the physical quantity sensor by the 8th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 9th Embodiment of this invention. It is a block diagram of the communication frame of the transmission circuit in the physical quantity sensor by the 9th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 10th Embodiment of this invention. It is a block diagram of the communication frame of the transmission circuit in the physical quantity sensor by the 10th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 11th Embodiment of this invention. It is a block diagram of the communication frame of the transmission circuit in the physical quantity sensor by the 11th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 12th Embodiment of this invention. It is a block diagram of the communication frame of the transmission circuit in the physical quantity sensor by the 12th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 13th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 14th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by 15th Embodiment of this invention. It is a flowchart which shows the processing content of the monitoring method of the storage device in the physical quantity sensor by 15th Embodiment of this invention. It is a flowchart which shows the processing content of the monitoring method of the storage device in the physical quantity sensor by 15th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor and physical quantity sensor control apparatus by 16th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 17th Embodiment of this invention. It is explanatory drawing of the active diagnostic result of the acceleration sensor in the physical quantity sensor by 17th Embodiment of this invention. It is a block diagram which shows the structure of the physical quantity sensor by the 17th Embodiment of this invention.

Explanation of symbols

1, 27, movable parts 2, 10, 14, 22, 26, 28, electrodes 3, 15, 29, CV converters 4, 16, 30, AD converters 5, 11, 17, 23, synchronous detector 6, 12, 18, 24, 31 ... integrators 7, 13, 20 ... modulators 8, 204, 205 ... adders 9, 21, 25 ... DA converter 19 ... oscillator 32 ... arithmetic unit 100 ... angular velocity detection circuit 101 ... transmission Circuit 102 ... Reception circuit 103 ... Drive control circuit 104, 105 ... Control device 106 ... Acceleration detection circuit 200 ... Active diagnosis circuit 201, 202, 206, 206b, 206c, 206d, 206e ... Determination circuit 203 ... Active diagnosis execution circuit 207a ... Speed sensor 207c ... acceleration sensor 207d ... angular velocity sensor 207e ... time measuring devices 211, 214, 217 ... switches 212, 215, 218, 400 ...憶 device 213, 216 ... selector 300 ... monitor circuit 301 ... monitoring information adding circuit 302 ... signal processing circuit 303 ... processing result adding circuit 304 ... error detecting signal generating circuit 401 ... RAM
402 ... EPROM

Claims (14)

A physical quantity detecting unit that has a movable part that is displaced according to a physical quantity, and detects a physical quantity according to the displacement of the movable part;
A diagnostic means having an active diagnostic function for diagnosing a failure of the physical quantity detecting means by causing a diagnostic displacement in the movable part ;
Transmission means for digitally transmitting the physical quantity detected by the physical quantity detection means via a communication path;
A receiving means for receiving a command command and predetermined information for the external system to control the physical quantity sensor via the communication path;
A physical quantity sensor having
The diagnostic means comprises
A first determining means for determining whether to execute a diagnosis based on the instruction command received by the receiving means,
A second determination means for determining whether to execute a diagnosis based on at least one or more of the predetermined information,
A physical quantity sensor comprising: a diagnosis execution unit that executes a diagnosis based on outputs of the first determination unit and the second determination unit. The physical quantity sensor according to claim 1,
The predetermined information includes a predetermined voltage level signal, a predetermined pulse signal, a command command signal that permits or prohibits a predetermined diagnosis, information according to the speed of the physical quantity sensor itself, and information according to the acceleration of the physical quantity sensor itself. The physical quantity sensor is any one of information corresponding to an angular velocity of the physical quantity sensor itself and information corresponding to an elapsed time since power-on of the physical quantity sensor. The physical quantity sensor according to claim 1,
The physical quantity sensor, wherein the diagnosis execution means includes a switching means that switches according to outputs of the first determination means and the second determination means. The physical quantity sensor according to claim 1, further comprising:
Monitoring means for monitoring a predetermined drive frequency and displacement of the movable part;
A physical quantity sensor comprising: monitoring information adding means for adding the physical quantity detected by the physical quantity detecting means and the output of the monitoring means to transmission contents. The physical quantity sensor according to claim 1,
The transmission means includes
Processing means for performing signal processing in response to the communication command;
A physical quantity sensor comprising: processing result adding means for adding the output of the processing means to the output of the monitoring information adding means. The physical quantity sensor according to claim 5 ,
The processing result adding means adds a processing result of a communication command received by the receiving means retroactively to a transmission content. The physical quantity sensor according to claim 5 ,
A physical quantity sensor comprising diagnostic flag addition means for adding the physical quantity detected by the physical quantity detection means and the progress of active diagnosis to transmission contents. The physical quantity sensor according to claim 1,
Error detection means for performing error detection on the output of the monitoring information adding means;
A physical quantity sensor comprising: error detection information adding means for adding error detection information output by the error detecting means to output of the monitoring information adding means. The physical quantity sensor according to claim 8 ,
The monitoring means includes
Frequency monitoring means for monitoring the drive frequency of the movable part and outputting a signal indicating an abnormal state when the drive frequency deviates from a predetermined range;
An instruction amount monitoring means for monitoring a displacement instruction amount for displacing the movable part, and outputting a signal indicating an abnormal state when the displacement instruction amount deviates from a predetermined range;
A physical quantity sensor comprising: a displacement monitoring unit that monitors a displacement amount of the movable part and outputs a signal indicating an abnormal state when the displacement amount deviates from a predetermined range. The physical quantity sensor according to claim 8 ,
The monitoring means includes
Servo control means for suppressing self-vibration of the movable part caused by vibration in the driving direction of the movable part leaking in the detection direction;
A physical quantity sensor comprising: a self-vibration monitoring unit that monitors the output of the servo control unit and outputs a signal indicating an abnormal state when the output of the servo control unit deviates from a predetermined range. The physical quantity sensor according to claim 1,
The diagnostic means performs RAM fault diagnosis and outputs a signal indicating an abnormal state of the RAM, and EPROM monitoring means performs fault diagnosis on the EPROM and outputs a signal indicating the abnormal state of the EPROM. A physical quantity sensor comprising at least one of the following. The physical quantity sensor according to claim 1,
The processing means includes
A diagnostic target specifying means for specifying a diagnostic target;
A physical quantity sensor comprising observation signal designating means for selecting an observation target from internal signals of the physical quantity sensor. It has a movable part that is displaced according to a physical quantity, and a physical quantity detection unit that detects a physical quantity according to the displacement of the movable part, and a diagnosis displacement of the movable part is caused to diagnose a failure of the physical quantity detection unit A diagnostic means having an active diagnostic function; a transmission means for digitally transmitting the physical quantity detected by the physical quantity detection means via a communication path; and a command command for an external system to control the physical quantity sensor via the communication path; Receiving means for receiving predetermined information; and a first determination means for determining whether or not the diagnosis means performs diagnosis based on the command command received by the reception means. Second determination means for determining whether or not to perform diagnosis based on at least one or more of the predetermined information, the first determination means, and the second determination means The physical quantity sensor and a diagnosis execution means for executing the diagnosis based on the force, a control unit of a physical quantity sensor for outputting a predetermined information to implement the directive command and diagnostics for controlling the physical quantity sensor And
A first control device for outputting the command command;
A physical quantity sensor control device comprising: a second control device that outputs the predetermined information. The control device for a physical quantity sensor according to claim 13 ,
The physical quantity sensor control device, wherein the second control device diagnoses a failure of the first control device.

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