JP5244943B2 - Optical modulator module - Google Patents

Description

  The present invention relates to an optical modulator module having a low driving voltage and capable of high-speed modulation.

An optical waveguide and a traveling wave electrode are provided on a substrate having a so-called electro-optic effect (hereinafter, the lithium niobate substrate is abbreviated as an LN substrate) such as lithium niobate (LiNbO ₃ ) whose refractive index is changed by applying an electric field. The formed traveling-wave electrode type lithium niobate optical modulator (hereinafter abbreviated as LN optical modulator) is a 1.55 μm band 2.5 Gbit / s, 10 Gbit / s large capacity optical transmission system because of its excellent transmission characteristics. Has been applied. Recently, application to an ultra large capacity optical transmission system of 40 Gbit / s is also being studied, and it is expected as a key device.

  This LN optical modulator includes a type using a z-cut LN substrate and a type using an x-cut LN substrate (or a y-cut LN substrate). Here, as a conventional technique, a z-cut LN optical modulator having a z-cut LN substrate and two ground conductors and using a coplanar waveguide (CPW) traveling wave electrode that is advantageous for propagation in the fundamental mode will be described.

  When an optical modulator is actually used in an optical transmission system, it will be discussed here as an optical modulator module because it is in the form of a module in which electrical terminations are mounted in a package (or housing). Note that the following discussion also holds true for x-cut LN substrates and y-cut LN substrates.

As an example of the optical modulator module, the z-cut LN optical modulator module disclosed in Patent Document 1 is taken up, and a schematic top view thereof is shown in FIG. The LN optical modulator 50 is disposed inside a package 7 that is a rectangular housing. Reference numeral 1 denotes a z-cut LN substrate (actually, a SiO ₂ buffer layer and a Si conductive layer are formed thereon, but are omitted here). Reference numeral 2 denotes an optical waveguide formed by thermally diffusing Ti at a temperature of 1050 ° C. for about 10 hours after depositing Ti on the z-cut LN substrate 1, and constitutes a Mach-Zehnder interference system (or Mach-Zehnder optical waveguide). The CPW traveling wave electrode includes a central conductor 3a and ground conductors 3b and 3c. Reference numeral 4 denotes a driver which is an external circuit, 5 denotes a signal source, and 6 denotes a capacitor which cuts a DC component. The DQPSK type LN optical modulator module uses a plurality of Mach-Zehnder optical waveguides in a nested manner.

In addition to the LN optical modulator 50, the package 7 also includes an electrical termination 8. Here, the bias terminals provided on the package 7 9, 10 bias resistor of the resistance value _{R B,} 11 and 12 high-frequency capacitor, 13 terminating resistor of the resistance value _{R L,} 14 the low frequency capacitance _{C 14} Capacitor. FIG. 9 shows an equivalent circuit diagram of the z-cut LN optical modulator module shown in FIG. Reference numeral 15 denotes a bias power supply that outputs a bias voltage _Vb , and is usually composed of an operational amplifier. In general, these electric components are mounted on a dielectric substrate such as an alumina substrate or aluminum nitride.

  16 is a distributed constant expression of the CPW traveling wave electrode of the chip of the z-cut LN optical modulator, 17 is an inductance, 18 is a resistance due to Au of the electrode material, 19 is a capacitance, and 20 is a conductance. ing.

  Next, the operation of the LN optical modulator module configured as described above will be described. In order to operate this LN optical modulator module, a high-frequency electric signal is applied from the driver 4 between the center conductor 3a and the ground conductors 3b and 3c, and a bias voltage is applied from the electrical terminal 8.

FIG. 10 shows the voltage-light output characteristics of the LN optical modulator module. Here, _Vb is a bias voltage (DC bias voltage in this case) at that time. As shown in FIG. 10, normally, the bias voltage _Vb is set at the midpoint between the peak and bottom of the light output characteristic. Appropriate application of the bias _Vb is extremely important in order to effectively extract the characteristics of the LN optical modulator module.

Here, the problem of this prior art is considered. The capacitance of the low frequency capacitor 14 is about 1 μF. In order to determine the bias _Vb , an electric signal having a frequency of about 10 KHz or less is generally used. In this case, the impedance of the low frequency capacitor 14 is expressed as 1 / (ωC ₁₄ ) and becomes 15.9Ω when the capacitance C ₁₄ of the low frequency capacitor ₁₄ is used. Note that ω is an angular frequency and is given as 2πf with respect to the frequency f.

The voltage at the electrical connection point A in FIG. 9 can be approximated to the bias voltage applied to the chip of the z-cut LN optical modulator module. The voltage V ₁ applied to the bias resistor 10 and the voltage at the electrical connection point A (that is, the voltage V ₂ applied to the low frequency capacitor 14) are as follows:
V ₁ + V ₂ = V _b (1)
There is a relationship.

When more than half of the bias voltage output from the bias power supply 15 is applied to the chip of the z-cut LN optical modulator (V ₁ <V ₂ ), the resistance value R _B of the bias resistor 10 is equal to that of the low frequency capacitor 14. Less than half of the impedance 15.9Ω is desirable. Therefore, a small value of 5 to 7Ω is selected as the value of the bias resistor 10.

  Here, the bias resistor 10 plays two important roles. One is a protective resistor for protecting the bias power supply 15 when the low frequency capacitor 14 is broken and short-circuited, and the other is to prevent oscillation of the operational amplifier used in the bias power supply 15. Is the role. That is, in general, an operational amplifier tends to oscillate due to a capacitive load. Therefore, the bias resistor 10 also serves as a damping resistor for suppressing the oscillation of the operational amplifier by the low frequency capacitor 14. This problem of oscillation of the operational amplifier is a serious problem in using the LN optical modulator.

However, the value R _B of the bias resistor 10 is small and 5～7Omu, the effect as a protective bias supply 15 when the low-frequency capacitor 14 is broken are also an effect of suppressing the oscillation of the operational amplifier in the bias power supply 15 small.

JP 2003-295139 A

  As described above, in the conventional technology, the value of the bias resistor electrically connected to the bias power supply was small, so it was used for protection when the low frequency capacitor was broken, and for the bias power supply, which is a very important problem in practice. There has been a problem that it is not possible to exert a sufficient effect on the oscillation suppression of the operational amplifier. If any one of these problems occurs, it becomes impossible to apply a bias voltage to the LN optical modulator, and it becomes impossible to exhibit the function as a modulator. Therefore, it has been desired to realize an excellent technique capable of protecting the bias power source and suppressing the oscillation, which solves these problems.

  The present invention has been made in view of such circumstances, and an object thereof is to provide an optical modulator module capable of protecting a bias power supply and suppressing oscillation.

In order to solve the above problems, an optical modulator module according to claim 1 of the present invention includes a substrate having an electro-optic effect, an optical waveguide for guiding light formed on the substrate, and one of the substrates. An optical modulator formed of an electrode made of a central conductor and a ground conductor for applying a high-frequency electrical signal for modulating the phase of the light, and connected to the electrode of the optical modulator, An optical modulator module comprising: an electrical termination that terminates a high-frequency electrical signal that has passed through an electrode; and a housing that internally arranges the optical modulator and the electrical termination, wherein the electrical termination is a termination resistor And a capacitor, and the termination resistance is constituted by a sheet resistance, and a bias voltage is applied with an electrode pad provided as a part extending in a direction along the surface of the sheet resistance. Special It is set to.

An optical modulator module according to claim 2 of the present invention is formed on a substrate having an electro-optic effect, an optical waveguide for guiding light formed on the substrate, and one surface side of the substrate. An optical modulator comprising an electrode composed of a central conductor and a ground conductor for applying a high-frequency electrical signal for modulating the phase of the light; and a high-frequency electrical device connected to the electrode of the optical modulator and passing through the electrode An optical modulator module having an electrical termination for terminating a signal, and a housing in which the optical modulator and the electrical termination are disposed , wherein the electrical termination includes a termination resistor and a capacitor. cage, the termination resistor is composed of a sheet resistance before Symbol bias voltage from an electrical connection point provided on the surface of the sheet resistance is characterized in that it is applied.

According to a third aspect of the present invention, in the optical modulator module according to the first or second aspect , the bias voltage is applied via a bias resistor.

An optical modulator module according to a fourth aspect of the present invention is the optical modulator module according to any one of the first to third aspects, wherein the capacitors are a high-frequency capacitor and a low-frequency capacitor. It is characterized by that.

An optical modulator module according to a fifth aspect of the present invention is the optical modulator module according to any one of the first to fourth aspects, wherein the substrate is a semiconductor substrate.

  According to the present invention, the equivalent bias resistance as viewed from the bias power source can be increased, so that the effect of protecting the bias power source when the capacitor is broken and the oscillation of the operational amplifier used in the bias power source can be reduced. The effect of suppressing can be demonstrated.

1 is a schematic top view of an LN optical modulator module according to a first embodiment of the present invention. 1 is an equivalent circuit diagram of an optical modulator module according to a first embodiment of the present invention. Schematic top view of an LN optical modulator module according to the second embodiment of the present invention Equivalent circuit diagram of an optical modulator module according to the second embodiment of the present invention 1 is a perspective view of a termination resistor of an optical modulator module according to a first embodiment of the present invention. The perspective view of the termination resistance of the optical modulator module which concerns on the 2nd Embodiment of this invention The perspective view of the other termination resistance of the optical modulator module which concerns on the 2nd Embodiment of this invention Schematic top view of an optical modulator module according to the prior art Equivalent circuit diagram of optical modulator module according to prior art The figure explaining operation | movement of the optical modulator module which concerns on a prior art

  Hereinafter, embodiments of the present invention will be described. However, since the same reference numerals as those of the conventional embodiments shown in FIGS. 8 and 9 correspond to the same function units, the description of the function units having the same numbers is omitted here. To do.

[First Embodiment]
FIG. 1 shows a schematic top view of the LN optical modulator module according to the first embodiment of the present invention. Here, 21 is an electrical termination that plays an important role in the present invention. A detailed equivalent circuit of the LN optical modulator module of FIG. 1 is shown in FIG. In this embodiment, the termination resistor 13 having the resistance value R _L shown in FIG. 9 is divided into termination resistors 22 and 23 having resistance values R _L1 and R _L2 , respectively. Further, the bias resistor 10 from the bias power supply 15 is electrically connected to the electrical connection point B between the termination resistors 22 and 23. In this embodiment, the bias voltage applied to the z-cut LN optical modulator module is determined by the voltage at the electrical connection point B.

As can be seen from FIG. 2, the resistance for the low-frequency capacitor 14 is added with the divided termination resistor 23 having a resistance value R _L2 in addition to the bias resistor 10 having the resistance value R _B shown in FIG. It will be. Therefore, as a protective resistance of the bias power supply 15 when the low-frequency capacitor 14 is broken and short-circuited, the resistance value R _{L2 of the} termination resistor 23 in addition to the small resistance value R _B of 5 to 7Ω of the bias resistor 10 is used. Are added to _give R _B + R _L2 .

In general, the terminating resistance of the CPW traveling wave electrode composed of the center conductor 3a and the ground conductors 3b and 3c is about 50Ω, so that the resistance value _RL2 of the terminating resistor 23 can be selected from several tens of Ω of 50Ω or less. Become. As a result, the protective resistance R _B + R _L2 of the bias power supply 15 can be selected from about 10 to 60Ω. These values are sufficient as protective resistors for the bias power supply 15.

On the other hand, the operational amplifier which is one of the components constituting the bias power supply 15 is described as being easily oscillated because it has a large capacitance such as the low frequency capacitor 14 because it appears as a capacitive load. With respect to this problem as well, since the damping resistance increases as R _B + R _L2 by adding the termination resistance 23, it is possible to effectively suppress oscillation. It can also be interpreted that the addition of the terminating resistor 23 having a real value R _L2 can improve the effect of the phase shift on the operational amplifier.

Incidentally, it is possible to omit the bias resistor R _B in the case where R _L2 is sufficiently large value. In this example, the terminal resistors 22 and 23 are divided into two (multiple). Needless to say, the terminal resistors may be divided into three or more. Here, the magnitude relationship between the resistance value R _L2 of the termination resistor 23 and the resistance value R _B of the bias resistor 10 will be described. The point of the present invention is to increase the value of the combined resistance when the low frequency capacitor 14 is viewed from the bias power source 15. That is, the sum of _R L2 + _{R B} the resistance _{R B} of the resistance value _{R L2} and the bias resistor 10 of termination resistor 23 is important. Therefore, the resistance value R _L2 of the termination resistor 23 may be larger, smaller, or equal to the resistance value R _B of the bias resistor 10. The above applies to all embodiments of the present invention.

  FIG. 5 shows a specific example of the termination resistor in this embodiment. This termination resistor is a sheet resistor. An electrode pad 29 is formed across the central portion, and has a role of substantially dividing the terminal resistance into 22 and 23. Reference numeral 30 denotes a wire for supplying a bias voltage from the electrical connection point B.

[Second Embodiment]
A schematic top view of the LN optical modulator module according to the second embodiment of the present invention is shown in FIG. 3, and an equivalent circuit diagram is shown in FIG. Here, 24 is the electrical termination of the second embodiment.

In the first embodiment of the present invention, the termination resistor is described as being divided into two termination resistors 22 and 23 having resistance values R _L1 and R _L2 , respectively. The terminal resistors may be completely divided as in the first embodiment, but may be configured not to be divided actually. That is, these may be integrated like the termination resistor 13 shown in FIGS.

  In the second embodiment, as shown in FIGS. 3 and 4, the electrical connection point B from the bias power supply 15 is actually or directly connected to a predetermined position of the terminal resistor 25 which is integrally formed. Connect them electrically. By configuring in this way, it has substantially the same effect as the first embodiment.

  FIG. 6 shows a specific example of the termination resistor in this embodiment. This termination resistor is a sheet resistor. 31 is an electrode pad, and 30 is a wire for supplying a bias voltage from the electrical connection point B. Since the current flowing through the termination resistor 25 increases in the direction perpendicular to the current flowing through the termination resistor 25, the electrode pad 31 is provided in a region where the current is small.

  FIG. 7 shows another example of the termination resistor in this embodiment. This termination resistor is also composed of a sheet resistor as in FIG. 32 is an electrode pad, and 30 is a wire for supplying a bias voltage from the electrical connection point B. In this example, the electrode pad 32 is provided so that the disturbance given to the current flowing through the termination resistor 25 is reduced.

[Various embodiments]
In the above description, the CPW electrode has been described as an example of the traveling wave electrode. However, it goes without saying that various traveling wave electrodes such as an asymmetric coplanar strip (ACPS) and a symmetric coplanar strip (CPS), or a lumped constant electrode may be used. . Of course, the present invention is also effective for a structure in which Mach-Zehnder type optical waveguides such as DQPSK type optical modulators are combined in a nested manner, a single electrode, a dual electrode, or the like. In addition to the Mach-Zehnder type optical waveguide, it goes without saying that other optical waveguides such as directional couplers and straight lines may be used as the optical waveguide.

  Further, in the above embodiment, the substrate has the x-cut, y-cut or z-cut plane orientation, that is, the crystal x-axis, y-axis or z-axis in the direction perpendicular to the substrate surface (cut plane). In addition, the plane orientation in each of the embodiments described above may be used as the main plane orientation, and other plane orientations may be mixed as the sub-plane orientation. The present invention can also be applied when the substrate is a semiconductor.

  As described above, the optical modulator module according to the present invention is useful as an optical modulator module that is inexpensive and has a high yield.

1: z-cut LN substrate (substrate, LN substrate)
2: Optical waveguide 3a: Center conductor 3b, 3c: Ground conductor 4: Driver 5: Signal source 6: Capacitor 7: Package 8, 21, 24: Electrical termination 9: Terminal for bias 10: Bias resistor 11, 12: High frequency Capacitors 13, 22, 23, 25: Terminating resistors 14: Low frequency capacitors 15: Bias power supply 16: Representing distributed constants of CPW traveling wave electrodes 17: Inductance 18: Resistors 19: Capacitance 20: Conductances 29, 31, 32: Electrode pad 30: Wire 50: LN optical modulator A, B: Electrical connection point

Claims (5)

A substrate having an electro-optic effect, an optical waveguide for guiding light formed on the substrate, and a high-frequency electric signal formed on one surface side of the substrate and modulating the phase of the light An optical modulator comprising an electrode comprising a central conductor and a ground conductor of
An electrical termination connected to the electrode of the light modulator and terminating a high frequency electrical signal passing through the electrode;
An optical modulator module having a housing in which the optical modulator and the electrical termination are disposed;
The electrical termination includes a termination resistor and a capacitor,
The termination resistor is composed of a sheet resistance,
An optical modulator module, wherein a bias voltage is applied with an electrode pad provided as a part extending in a direction along the surface of the sheet resistance as an electrical connection point . A substrate having an electro-optic effect, an optical waveguide for guiding light formed on the substrate, and a high-frequency electric signal formed on one surface side of the substrate and modulating the phase of the light An optical modulator comprising an electrode comprising a central conductor and a ground conductor of
An electrical termination connected to the electrode of the light modulator and terminating a high frequency electrical signal passing through the electrode;
An optical modulator module having a housing in which the optical modulator and the electrical termination are disposed;
The electrical termination includes a termination resistor and a capacitor,
The termination resistor is composed of a sheet resistance ,
The optical modulator module that characterized in that the bias voltage is applied from the electrical connection point provided on the surface of the front Symbol sheet resistance. The bias voltage, the optical modulator module according to claim 1 or claim 2, characterized in that it is applied through a bias resistor. The capacitor optical modulator module according to any one of claims 1 to 3, characterized in that a high frequency capacitor and the low-frequency capacitor. The optical modulator module according to any one of claims 1 to 4 , wherein the substrate is a semiconductor substrate.

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