JP5240813B2 - Method for creating metal surface microstructure - Google Patents
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本発明は、超親水表面、超撥水表面、反射防止膜、電子デバイス、電池材料、センサー材料、光学デバイス、構造材料などの機能が期待できる金属表面微細構造の作成方法に関する。 The present invention relates to a method for producing a metal surface microstructure that can be expected to have functions such as a superhydrophilic surface, a superhydrophobic surface, an antireflection film, an electronic device, a battery material, a sensor material, an optical device, and a structural material.
従来、ナノ構造を有する材料はあらゆる分野での応用に富み、多くの研究開発がなされている。これまでに報告されていない物質の金属酸化物のナノ構造を制御することで、これまで超親水特性のためには紫外線照射が必要だったTiO2膜を紫外線照射を行うことなく超親水特性を示すことができれば、その用途も大きく広がると期待される。また、他の金属酸化物として酸化アルミニウムのナノシート膜を作成することができればその膜の強度も大きく向上する。
産業界への実用のためには、安価な材料で、簡易かつ安価な方法で、短時間で作製するには、金属表面そのものを容易に微細構造制御することが最も必要な技術であると考えられる。
本発明者は、微細構造を作成したガラス表面を用いて、当該ガラス表面に、シラン化合物をコーティングすることにより、超撥水性のガラス表面を作り出すことに成功し、すでに、特許出願をしている(特許文献1参照)。
また、ガラス組成が、100%二酸化珪素(SiO2)ではないガラス基板を、pH7以上のアルカリ水溶液に浸漬し、60〜250℃の温度で、0.5〜48時間保持し、その後ガラス基板を取り出して洗浄乾燥させることを特徴とするガラス表面微細構造の作成方法についても既に特許出願をしている(特許文献2参照)。
For practical use in industry, it is considered that the most necessary technology is to easily control the microstructure of the metal surface itself in order to produce it in a short time with a simple and inexpensive method using an inexpensive material. It is done.
The present inventor succeeded in creating a super-water-repellent glass surface by coating a silane compound on the glass surface using a finely structured glass surface, and has already filed a patent application. (See Patent Document 1).
In addition, a glass substrate whose glass composition is not 100% silicon dioxide (SiO 2 ) is immersed in an alkaline aqueous solution having a pH of 7 or more, and held at a temperature of 60 to 250 ° C. for 0.5 to 48 hours. A patent application has already been filed for a method for producing a glass surface microstructure characterized by taking out and washing and drying (see Patent Document 2).
本発明は、金属基板表面に金属表面微細構造の作成する方法を提供する。 The present invention provides a method for creating a metal surface microstructure on a metal substrate surface.
すなわち、本発明は、Mg,Al,Ca,Sc,Ti,V,Co,Mn,Fe,Co, Ni,Cu,Zn,Ga,Sr,Y,Zr, Nb,Mo,Ag,In,Sn,Sb,Ba, La, Hf,Ta, W, Bi, Ceから選ばれる金属基板を、純水もしくはpH7以上のアルカリ水溶液に浸漬し、50〜250℃の温度で、0.05〜96時間保持し、その後金属基板を取り出して洗浄乾燥させることを特徴とする金属表面微細構造の作成方法である。
また本発明は、金属基板として、金属若しくは基板の表面を金属コートした基板とすることができる。
さらに本発明は、金属基板として、Ti,Zn,Al,Mn,Mg,Niであるか若しくはTi,Zn,Al,Mn,Mg,Niをコートした基板を用いることが好ましい。
また本発明は、純水であるイオン交換水の他アルカリ水溶液に用いられるアルカリ剤が、アルカリとしてLiOH,NaOH,KOH、MnOOH、NH4OH、尿素からなる群れより選ばれる1種を用いることができる。
さらに本発明は、アルカリ水溶液がpH9〜11のNaOHであり、アルカリ水溶液の温度が95〜200℃であり、浸漬時間が1〜24時間とすることが好ましい。
That is, the present invention is Mg, Al, Ca, Sc, Ti, V, Co, Mn, Fe, Co, Ni, Cu, Zn, Ga, Sr, Y, Zr, Nb, Mo, Ag, In, Sn, A metal substrate selected from Sb, Ba, La, Hf, Ta, W, Bi, and Ce is immersed in pure water or an alkaline aqueous solution having a pH of 7 or higher and maintained at a temperature of 50 to 250 ° C. for 0.05 to 96 hours. Thereafter, the metal substrate is taken out and washed and dried.
Moreover, this invention can be made into the board | substrate which coated the metal or the surface of the board | substrate as a metal substrate.
Furthermore, in the present invention, it is preferable to use a substrate made of Ti, Zn, Al, Mn, Mg, Ni or coated with Ti, Zn, Al, Mn, Mg, Ni as the metal substrate.
In the present invention, the alkali agent used in the alkaline aqueous solution in addition to ion-exchanged water, which is pure water, uses one kind selected from the group consisting of LiOH, NaOH, KOH, MnOOH, NH 4 OH, and urea as an alkali. it can.
Further, in the present invention, it is preferable that the alkaline aqueous solution is NaOH having a pH of 9 to 11, the temperature of the alkaline aqueous solution is 95 to 200 ° C., and the immersion time is 1 to 24 hours.
本発明の金属表面微細構造の作成方法は、特別な装置を必要とせず、安価に容易に行える画期的な金属表面微細構造の作成方法である。 The method for creating a metal surface microstructure of the present invention is an epoch-making method for creating a metal surface microstructure that can be easily performed at low cost without requiring a special apparatus.
本発明で用いる各種金属基板としては、通常の金属基板のほか、あらかじめ他の基板(ガラスなど)に金属をスパッタや無電解メッキ、メッキ等、様々な方法を用いてコートしておけば、それを処理することによって、あらゆる基材の表面を各種ナノ構造材料で覆うことができる。 As various metal substrates used in the present invention, in addition to ordinary metal substrates, other substrates (such as glass) may be coated in advance using various methods such as sputtering, electroless plating, plating, etc. The surface of any substrate can be covered with various nanostructured materials.
本発明においては、本発明が適用できる金属は、水もしくはアルカリで腐食する金属なら何でも良いが、代表的には、Mg,Al,Ca,Sc,Ti,V,Co,Mn,Fe,Co, Ni,Cu,Zn,Ga,Sr,Y,Zr, Nb,Mo,Ag,In,Sn,Sb,Ba, La, Hf,Ta, W, Bi, Ceから選ばれる金属を挙げることができる。とくに身近な金属としては、Ti,Zn,Al,Mn,Mg,Ni,Snを挙げることができる。 In the present invention, the metal to which the present invention can be applied is any metal that corrodes with water or alkali, but typically, Mg, Al, Ca, Sc, Ti, V, Co, Mn, Fe, Co, Examples include metals selected from Ni, Cu, Zn, Ga, Sr, Y, Zr, Nb, Mo, Ag, In, Sn, Sb, Ba, La, Hf, Ta, W, Bi, and Ce. Particularly familiar metals include Ti, Zn, Al, Mn, Mg, Ni, and Sn.
また、作製されたナノ構造材料を熱処理することにより、形態を変化させることなく、金属水和物や金属水酸化物を金属酸化物とすることができる。これにより、熱処理の前後で、電子、電池、センサー、光学、構造材料として異なる機能を有したり、デバイスの特性の向上を行うことができる。例としては、熱処理によって酸化アルミニウムナノシート膜とすることで、高強度材料とすることができ、アナターゼTiO2ナノシート膜を作成することで、紫外線を必要としない超親水TiO2膜を作成することができる。
得られたナノ構造体を基材として、また、さらにこの上に機能性材料を作製することにより、新たなデバイス(電子、電池、センサー、光学、構造材料)或いは超親水、超撥水表面、反射防止膜としての機能の発現、特性の向上も可能となる。
In addition, by heat-treating the manufactured nanostructured material, a metal hydrate or metal hydroxide can be converted into a metal oxide without changing the form. Thereby, before and after the heat treatment, it can have different functions as an electron, a battery, a sensor, optics, and a structural material, and can improve device characteristics. As an example, a high-strength material can be obtained by forming an aluminum oxide nanosheet film by heat treatment, and a superhydrophilic TiO2 film that does not require ultraviolet light can be formed by forming an anatase TiO2 nanosheet film.
By using the obtained nanostructure as a base material and further producing a functional material thereon, a new device (electronic, battery, sensor, optical, structural material) or superhydrophilic, superhydrophobic surface, The function as an antireflection film can be expressed and the characteristics can be improved.
本発明で造られるナノ構造材料は、電子材料、電池材料、センサー材料、光学材料、構造材料から超撥水や超親水などの界面現象など、多種多様なデバイスの高機能化において、用いることができる。
産業界への実用のためには、その安価かつ簡易な作製プロセスが必要とされる。また、ナノ材料をパウダーとして作製するプロセスが多いが、電子、電池、センサー、などの高機能化を考慮すると、凝集の抑制や結晶配向性の付与、基板から直立したナノロッドやナノシートなどの形態、基板との密着性などから、各種基材(基板など)に直接ナノ構造材料が作製されることが望ましいので、本発明の金属表面微細構造の作成方法は、応用範囲が広い。
The nanostructured material produced in the present invention can be used for enhancing the functionality of a wide variety of devices such as electronic materials, battery materials, sensor materials, optical materials, structural materials, and interfacial phenomena such as superhydrophobic and superhydrophilic. it can.
For practical use in the industry, an inexpensive and simple manufacturing process is required. In addition, there are many processes for producing nanomaterials as powder, but considering higher functionality such as electrons, batteries, sensors, etc., suppression of aggregation and provision of crystal orientation, forms such as nanorods and nanosheets standing upright from the substrate, Since it is desirable that the nanostructured material is directly produced on various base materials (substrate and the like) from the viewpoint of adhesion to the substrate, etc., the metal surface microstructure production method of the present invention has a wide range of applications.
本発明の製造方法においては、アルカリとしてLiOH,NaOH,KOH、MnOOH、NH4OH、尿素からなる群れより選ばれる1種或いは数種を用いることができる。
さらに、本発明の製造方法においては、純水もしくはアルカリ水溶液がpH9〜11のNaOHであり、アルカリ水溶液の温度が95〜200℃であり、浸漬時間が1〜24時間とすることが望ましい。
本発明について実施例を用いてさらに詳しく説明するが、本発明はこれら実施例に限定されるものではない。
In the production method of the present invention, one kind or several kinds selected from the group consisting of LiOH, NaOH, KOH, MnOOH, NH 4 OH, and urea can be used as the alkali.
Furthermore, in the production method of the present invention, it is desirable that the pure water or the alkaline aqueous solution is NaOH having a pH of 9 to 11, the temperature of the alkaline aqueous solution is 95 to 200 ° C., and the immersion time is 1 to 24 hours.
The present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.
Ti板を尿素に溶解させた水溶液に入れ、100°Cにて4日間静置したサンプルのSEM像を図1(a)に示す。直立したナノシートによって構成された膜であることが分かる。尿素の代わりにアンモニア水を加えた場合も同様の形態を作製することができる。得られた材料はチタン酸アンモニウムであると考えられ、これを400°Cで30分空気中で熱処理すると図1(b)に示されるように、形態を維持したままTiO2のアナターゼ型の結晶となった。また、これを600°Cで30分空気中で熱処理すると図1(c)に示されるように、形態を維持したままTiO2のアナターゼ型の結晶となった。図1(d)に示すように作成されたアナターゼTiO2ナノシート膜は、紫外線照射を行うことなく超親水特性を示した。 FIG. 1 (a) shows an SEM image of a sample in which a Ti plate is placed in an aqueous solution dissolved in urea and allowed to stand at 100 ° C. for 4 days. It can be seen that the film is composed of upright nanosheets. A similar form can be produced when ammonia water is added instead of urea. The obtained material is considered to be ammonium titanate, and when this was heat-treated at 400 ° C for 30 minutes in air, as shown in Fig. 1 (b), anatase-type crystals of TiO2 were maintained while maintaining the form. became. Further, when this was heat-treated at 600 ° C. for 30 minutes in the air, as shown in FIG. 1 (c), an anatase-type crystal of TiO 2 was maintained while maintaining the form. The anatase TiO2 nanosheet film prepared as shown in FIG. 1 (d) exhibited superhydrophilic properties without being irradiated with ultraviolet rays.
Ti板をイオン交換水に入れ、200°Cにて4日間静置したサンプルのSEM像を図2に示す。表面に八面体型のアナターゼ結晶が生成し、pHが中性であるイオン交換水を用いた場合もナノの凹凸構造を有していることが分かる。 Fig. 2 shows an SEM image of a sample that was placed in ion-exchanged water and allowed to stand at 200 ° C for 4 days. It can be seen that an octahedral anatase crystal is formed on the surface, and even when ion-exchanged water having a neutral pH is used, it has a nano uneven structure.
Ti板を尿素を溶解させた水溶液に入れ、90°Cにて24時間静置したサンプルのSEM像を図3(a)に示す。ナノシートからなる膜が、水が沸騰する温度以下においても作製されていることが分かる。
Ti板を5MのNaOH水溶液に入れ、90°Cにて24時間静置したサンプルのSEM像を図3(b)示す。ナノワイヤーが直立した膜がこちらも水が沸騰する温度以下においても作製されていることが分かる。これらから、安価かつ簡易なプロセスでナノ構造の作製が可能であることが分かる。
FIG. 3 (a) shows an SEM image of a sample in which a Ti plate was placed in an aqueous solution in which urea was dissolved and allowed to stand at 90 ° C. for 24 hours. It turns out that the film | membrane which consists of nanosheets is produced also below the temperature which water boils.
FIG. 3 (b) shows an SEM image of a sample in which a Ti plate was placed in a 5M NaOH aqueous solution and allowed to stand at 90 ° C. for 24 hours. It can be seen that the nanowire upright film is also produced below the temperature at which water boils. From these, it can be seen that nanostructures can be produced by an inexpensive and simple process.
石英ガラスにTiを30nmスパッタした後、5MのNaOH水溶液に入れ、90°Cにて90分間静置したサンプルのSEM像を図4(a)に示す。ナノワイヤー構造が石英ガラス基板上に生成していることが分かり、図4(b)から透明な膜を作製できたことが分かる。 FIG. 4 (a) shows an SEM image of a sample that was sputtered with 30 nm of Ti on quartz glass, placed in a 5M NaOH aqueous solution, and allowed to stand at 90 ° C. for 90 minutes. It can be seen that the nanowire structure is formed on the quartz glass substrate, and it can be seen from FIG. 4 (b) that a transparent film has been produced.
図5(a)にはMn板をイオン交換水に入れ、100°Cにて10時間静置したサンプルのSEM写真を示す。ナノロッドが直立した膜ができていることが分かる。 FIG. 5 (a) shows an SEM photograph of a sample in which an Mn plate is placed in ion exchange water and allowed to stand at 100 ° C. for 10 hours. It can be seen that the nanorods are upright.
Mg板をイオン交換水に入れ、90°Cにて30分静置したサンプルのSEM写真を図6に示す。低温かつ短時間でナノシートが直立した膜ができていることが分かる。 FIG. 6 shows an SEM photograph of a sample in which an Mg plate is placed in ion exchange water and allowed to stand at 90 ° C. for 30 minutes. It can be seen that a film in which the nanosheets are upright is formed at a low temperature in a short time.
図7(a)にはガラス基板にAlを140nmスパッタした後、イオン交換水に入れ、90°Cにて60分間静置したサンプルのSEM像を示す。ナノシート構造がガラス基板上に生成していることが分かり、図7(b)から透明な膜を作製できたことが分かる。図7(c)にはガラス基板にAlを70nmスパッタした後、イオン交換水に入れ、90°Cにて90分間静置した後1000°Cにて10分間熱処理したサンプルのSEM像を示す。熱処理により酸化アルミニウムとなった後もナノシート構造を維持していることが分かる。 FIG. 7 (a) shows an SEM image of a sample obtained by sputtering Al on a glass substrate for 140 nm, placing in ion exchange water, and allowing to stand at 90 ° C. for 60 minutes. It can be seen that the nanosheet structure is formed on the glass substrate, and it can be seen from FIG. 7 (b) that a transparent film has been produced. FIG. 7 (c) shows an SEM image of a sample obtained by sputtering Al on a glass substrate to 70 nm, placing in ion-exchanged water, allowing to stand at 90 ° C. for 90 minutes, and then heat-treating at 1000 ° C. for 10 minutes. It can be seen that the nanosheet structure is maintained even after aluminum oxide is formed by heat treatment.
図8には、Ni板を5MのNaOH水溶液に入れ、60°Cにて20時間静置したサンプルのSEM像を図8に示す。ナノシート構造が60°Cの低温からもできていることが分かる。 FIG. 8 shows an SEM image of a sample in which a Ni plate is placed in a 5M NaOH aqueous solution and allowed to stand at 60 ° C. for 20 hours. It can be seen that the nanosheet structure is made even at a low temperature of 60 ° C.
Zn板を5MのNaOH水溶液に入れ、100°Cにて20時間静置したサンプルのSEM像を図9に示す。ナノシートの凹凸構造ができていることが分かる。 FIG. 9 shows an SEM image of a sample in which a Zn plate was placed in a 5M NaOH aqueous solution and allowed to stand at 100 ° C. for 20 hours. It can be seen that the uneven structure of the nanosheet is formed.
本発明により得られる金属表面微細構造は、ナノ構造体を基材として、また、さらにこの上に機能性材料を作製することにより、紫外線照射を行わない超親水や新たなデバイス(電子、電池、センサー、光学、構造材料)としての機能の発現も可能であり、産業上極めて利用可能性が高いものである。 The metal surface microstructure obtained by the present invention can be obtained by using a nanostructure as a base material, and further producing a functional material thereon, so that a superhydrophilic material or a new device (electronic, battery, It is possible to develop functions as a sensor, optics, and structural material), and it is extremely useful in industry.
Claims (4)
純水を用いる場合は、金属基板はMg,Ti,Mnから選ばれる金属基板であり、Mgの場合は温度が90℃、浸漬時間が0.5時間であり、Tiの場合は温度が200℃、浸漬時間が96時間であり、Mnの場合は、温度が100℃、浸漬時間が10時間であり、
アルカリ水溶液を用いる場合は、アルカリ水溶液は5MのNaOH水溶液であり、温度が60〜200℃、浸漬時間が1〜24時間である、金属表面微細構造の作成方法。 A metal substrate selected from Mg, Ti, Mn, Ni, and Zn is immersed in neutral pure water or an alkaline aqueous solution having a pH of 7 or more, held at a temperature of 50 to 250 ° C. for 0.05 to 96 hours, and thereafter It is a method for creating a metal surface microstructure characterized by taking out a metal substrate and washing and drying,
When pure water is used, the metal substrate is a metal substrate selected from Mg, Ti, and Mn. In the case of Mg, the temperature is 90 ° C., the immersion time is 0.5 hours, and in the case of Ti, the temperature is 200 ° C. In the case of Mn, the temperature is 100 ° C., the immersion time is 10 hours,
In the case of using an alkaline aqueous solution, the alkaline aqueous solution is a 5 M NaOH aqueous solution, the temperature is 60 to 200 ° C., and the immersion time is 1 to 24 hours.
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