JP5235328B2 - Ophthalmic apparatus and method for controlling ophthalmic apparatus - Google Patents

Description

  The present invention relates to a deformable mirror system constituting an adaptive optical system used in an astronomical telescope, a fundus oculi observation device, and the like.

  Currently, various optical devices are used as ophthalmic devices. Among them, as an optical device for observing the eye, various devices such as an anterior ophthalmoscope, a fundus camera, a confocal laser scanning ophthalmoscope (SLO), and an optical coherence tomography (OCT) Is used.

  The eyeball to be observed consists of a cornea, aqueous humor, crystalline lens, vitreous body, and retina, and can also be viewed as a four-ply lens. However, because the refractive index of the cornea and the crystalline lens is not uniform, the eyeball originally has aberration, and the aberration may interfere with observation of the eyeball.

  In ophthalmic optical instruments, adaptive optics technology is used. The adaptive optics technique is a technique for correcting the disturbance of the wavefront in order to correct, for example, the aberration of the eyeball. Specifically, in the adaptive optics technology, first, the wavefront inclination is detected by a wavefront sensor using the Shack-Hartmann method. Next, a voltage is applied so as to cancel the inclination of the wavefront to change the shape of the reflecting surface of the deformable mirror system, thereby correcting the inclination of the wavefront and correcting the aberration of the eye.

As an example in which the above-described adaptive optics technique is used for fundus observation, there is Patent Document 1, and here, a fundus observation apparatus using a compensation optical system is configured. Specifically, the optical characteristics of the eye to be examined are measured, and the shape of the reflecting surface of the deformable mirror system is adjusted based on the measurement data. Further, a voltage change template for driving the deformable mirror system is prepared, and the response speed of the deformable mirror system is improved.
Japanese Patent Laying-Open No. 2005-221579 (FIGS. 1 and 13)

  By the way, in recent fundus oculi observation devices, it is required to further increase the resolution of an observation image. For this purpose, it is an issue to improve the conventional deformable mirror system and further increase the degree of freedom for correcting the wavefront.

  Accordingly, an object of the present invention is to increase the degree of freedom of wavefront correction of a deformable mirror system used in adaptive optics technology.

  Another object of the present invention is to increase the resolution of the fundus oculi observation device by using the deformable mirror system in the fundus oculi observation device.

In order to achieve the above object, the ophthalmic apparatus of the present invention
A compensation optical system comprising: a wavefront measuring unit that measures a wavefront of light from an eye to be inspected with light from a light source; and a variable shape unit that includes a reflecting member that reflects light from the eye to be examined; An ophthalmologic apparatus that acquires an image of the fundus of the subject eye based on light reflected by a member,
The variable shape means comprises:
A support having the reflecting member disposed on the first surface;
A first electrode disposed substantially circumferentially with respect to the center of the reflecting member on the first surface;
A first drive electrode that is substantially point-symmetric with respect to the reflective member and is insulated from the first electrode via a spacer;
A driving force is applied to the support from the first surface side via the first drive electrode based on the measurement result of the wavefront measuring means, and the shape of the reflecting member is changed together with the support. Driving means,
A driving force is applied to the support based on the measurement result of the wavefront measuring means from a second surface side opposite to the first surface of the support, and the shape of the reflecting member is changed together with the support. Second driving means for changing,
It is characterized by having.

In order to achieve the above object, a method for controlling an ophthalmic apparatus according to the present invention includes:
A wavefront measuring unit that measures a wavefront of light from an eye to be inspected with light from a light source; a reflecting member that reflects light from the eye to be examined; and a support in which the reflecting member is disposed on a first surface. A control method for an ophthalmologic apparatus that has an adaptive optics system comprising a deformable means, and acquires an image of the fundus of the eye to be examined based on light reflected by the reflecting member,
A first drive electrode having a substantially point symmetric shape with respect to the reflecting member , wherein the first electrode and the spacer are arranged substantially circumferentially with respect to the center of the reflecting member on the first surface. Applying a driving force based on the measurement result of the wavefront measuring means to the support body on which the reflecting member is disposed on the first surface from the first surface side through the first driving electrode insulated through the first driving electrode ; Changing the shape of the reflecting member together with the support;
A driving force is applied to the support based on the measurement result of the wavefront measuring means from a second surface side opposite to the first surface of the support, and the shape of the reflecting member is changed together with the support. Changing the process;
It is characterized by having.

  According to the deformable mirror system of the present invention, since the driving means is provided on both the front and back of the support on which the reflecting surface is arranged, the upward movement, the downward movement, and the deformation of the reflecting surface are independent. Therefore, it is easy to control, and the degree of freedom for correcting the wavefront can be increased.

  According to the fundus oculi observation device of the present invention, since the deformable mirror system has a high degree of freedom of wavefront correction, an effect of easily obtaining an observation image with high resolution can be obtained.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

[First Embodiment] (Electrostatic)
<Structure of deformable mirror system>
First, the structure of the deformable mirror system 500 of this embodiment will be described with reference to FIG. FIG. 1A is a top view of the deformable mirror system 500, and FIG. 1B is a cross-sectional view taken along line AA ′ in FIG. In FIG. 1 (b), the dimensions in the vertical direction are exaggerated for easy understanding.

  In general, the deformable mirror system 500 of the present embodiment has a structure in which a lower electrode substrate 523, a middle electrode substrate 522, and an upper electrode substrate 521 are sequentially stacked via spacers 525 and 524. Further, the upper electrode substrate 521, the middle electrode substrate 522, and the lower electrode substrate 523 are electrically insulated from each other.

  Here, the thicknesses of the upper electrode substrate 521, the spacer 524, the middle electrode substrate 522, the spacer 525, and the lower electrode substrate 523 are 200 μm, 20 μm, 1 μm, 20 μm, and 200 μm, respectively. Here, the thicknesses of the spacer 524, the middle electrode substrate 522, and the spacer 525 are important values that determine the amount of deformation when the mirror 501 is driven.

  The upper electrode substrate 521 has upper drive electrodes 531a and 531b to be surface drive electrodes. The middle electrode substrate 522 is a planar support body having a front surface serving as a first surface and a back surface serving as a second surface, and is deformable. Further, the intermediate electrode substrate 522 includes a middle drive electrode 532a serving as a front electrode, a middle drive electrode 532b serving as a back electrode, and a mirror 501 serving as a reflection surface. The lower electrode substrate 523 includes lower drive electrodes 533a and 533b that serve as back surface drive electrodes. Further, the upper electrode substrate 521 has a circular opening 504, and the mirror 501 is exposed. The size of the mirror 501 is 10 mm in diameter. Further, the surface (upper surface) of the lower electrode substrate 523 is electrically insulated by the insulating film 526. Here, the middle electrode substrate 522 has a middle drive electrode 532a disposed on the front surface and a middle drive electrode 532b disposed on the rear surface (lower surface).

  Here, the upper drive electrodes 531a and 531b are opposed to the middle drive electrode 532a on the first surface side (front surface side) of the middle electrode substrate 522, and the middle drive electrode 532b is opposed to the second surface side (back surface side). The lower drive electrodes 533a and 533b are characterized in that they are arranged.

  The middle drive electrodes 532 a and 532 b are electrically grounded via the ground 504 and the electric wiring 505. The upper drive electrodes 531a and 531b are connected to an upper voltage application unit 502 serving as a surface voltage application unit via an electric wiring 505. Thus, an arbitrary voltage can be applied from the upper voltage application unit 502 between the middle drive electrode 532a and the upper drive electrodes 531a and 531b to generate a driving force that changes the shape of the mirror 501. The lower drive electrodes 533a and 533b are connected to a lower voltage application unit 503 serving as a back surface voltage application unit via an electric wiring 505. Thus, a driving force for changing the shape of the mirror 501 can be generated by applying an arbitrary voltage between the middle driving electrode 532b and the lower driving electrodes 533a and 533b from the lower voltage application unit 503. Here, the electric wiring 505 is described as being directly taken out from the upper drive electrodes 531a and 531b, but may be formed on the upper electrode substrate 521.

  Here, the upper electrode substrate 521 and the spacer 525 are made of glass, the spacer 524 and the lower electrode substrate 523 are made of silicon, and the middle electrode substrate 522 and the insulating film 526 are made of silicon dioxide. The mirror 501 is made of, for example, Al which is a highly reflective metal. The electrical wiring 505 is made of a low electrical resistance metal such as Au or Al.

  Here, the middle drive electrode 532 a, the upper drive electrodes 531 a and 531 b, and the upper voltage application unit 502 apply a driving force to the middle electrode substrate 522 from the surface side of the middle electrode substrate 522, and the mirror 501 together with the middle electrode substrate 522. The surface driving means for changing the shape of is formed. Further, the middle drive electrode 532b, the lower drive electrodes 533a and 533b, and the lower voltage application unit 503 apply a driving force to the middle electrode substrate 522 from the back surface side of the middle electrode substrate 522 to form the shape of the mirror 501 together with the middle electrode substrate 522. Back surface driving means to be changed is configured.

  Next, the upper drive electrodes 531a and 531b will be described in detail with reference to FIGS. FIG.1 (c) is the figure which looked at the B-B 'cross section in FIG.1 (b) from the lower side.

  The upper drive electrode is formed in a circular shape so as to go around the opening 506, and includes an outer side 531a and an inner side 531b. Here, the upper drive electrodes 531a and 531b are formed in a circular shape, but the upper drive electrodes 531a and 531b may be more or less than this, and the 531a is not necessarily closed. Each of 531a and 531b is electrically independent, and is wired by an electrical wiring 505 (not shown) so that different potentials can be applied.

  Next, the middle drive electrode 532a will be described in detail with reference to FIGS. 1B and 1D. FIG.1 (d) is the figure which looked at the B-B 'cross section in FIG.1 (b) from the upper side.

  The middle drive electrode 532 a is formed in a circular shape so as to go around the mirror 501. The middle drive electrode 532a is electrically grounded via an electric wiring 505 and a ground 504 (not shown).

  Next, the middle drive electrode 532b will be described in detail with reference to FIGS. 1B and 1E. FIG.1 (e) is the figure which looked at the C-C 'cross section in FIG.1 (b) from the lower side.

  The middle drive electrode 532 b is formed in a circular shape on the back side of the mirror 501. Further, the middle drive electrode 532 b is electrically grounded via the electric wiring 505 and the earth 504.

  Next, the lower drive electrodes 533a and 533b will be described in detail with reference to FIGS. FIG. 1F is a view of the C-C ′ cross section in FIG.

  The lower drive electrode includes a fan-shaped 533a and a circular 533b. Here, 533a is formed in triplicate in a fan shape and has four of them. The central angle of 533a is 85 degrees. Further, 533b is formed on the lower electrode substrate 523 with a point substantially below the center of the mirror 501 as the center. 533b is formed in a circular shape about the center. Each of 533a and 533b is electrically independent, and is wired by an electrical wiring 505 so that different potentials can be applied. Here, the electric wiring 505 is described as being directly taken out from the lower drive electrodes 533a and 533b, but may be formed on the lower electrode substrate 523. Design values such as the central angle and the number of layers of 533a are set according to desired specifications. Here, the lower drive electrode 533a has a fan shape. However, the lower drive electrode 533a needs to be designed in accordance with a desired shape of the mirror 501, and a hexagonal shape or a rectangular shape can also be used.

<Operation of the deformable mirror system>
Next, the operation of the deformable mirror system 500 configured as described above will be described with reference to FIG. 2A shows all the components, but in FIGS. 2B and 2C, the electrical wiring 505 and the voltage applying means 502 and 503 are omitted for the sake of simplicity. .

  In the deformable mirror system 500, the potential of the middle drive electrode 532a is set to 0 V, and a positive or negative potential is applied to the upper drive electrodes 531a and 531b. Then, electrostatic attraction acts between the middle drive electrode 532a and the upper drive electrodes 531a and 531b, the middle drive electrode 532a is attracted to the upper drive electrodes 531a and 531b, and as shown in FIG. Moves upward.

  Further, the potential of the middle drive electrode 532b is set to 0V, and a positive or negative potential is applied to the lower drive electrodes 533a and 533b. Then, electrostatic attraction acts between the middle drive electrode 532b and the lower drive electrodes 533a, 533b, and the middle drive electrode 532b is attracted to the lower drive electrodes 533a, 533b, and as shown in FIG. Moves downward.

  Further, by devising the voltage applied to the upper drive electrodes 531a and 531b and the lower drive electrodes 533a and 533b, the shape of the mirror 501 can be deformed as shown in FIG.

  As described above, in the present embodiment, driving means using the electrostatic force between the electrodes is provided on both the upper side and the lower side of the middle electrode substrate 522 on which the mirror 501 is disposed. Therefore, the mirror 501 can be moved up and down by the electrostatic force between the electrodes as shown in FIGS. 2 (a) and 2 (b), and as shown in FIG. 2 (c), The shape of the mirror 501 can be changed. That is, it becomes easy to independently control the upward movement, the downward movement, and the deformation of the mirror 501, and the degree of freedom for correcting the wavefront can be increased. Here, the potential applied to the upper drive electrodes 531a and 531b and the lower drive electrodes 533a and 533b is within ± 200V.

  Further, in the present embodiment, the deformable mirror system 500 can be realized with a simple configuration by utilizing driving by electrostatic force.

  In the present embodiment, the middle electrode substrate 522 is insulated from the upper drive electrodes 531a and 531b and the lower drive electrodes 533a and 533b via spacers 524 and 525. For this reason, the dimension between electrodes can be kept constant with a simple configuration.

  In the present embodiment, the spacers 524 and 525 are preferably made of glass. According to this, since glass can be processed with high accuracy, the dimension between the electrodes can be defined with high accuracy. Further, since anodic bonding can be used for glass, the deformable mirror system 500 can be realized with simple manufacturing means.

  In the present embodiment, the middle electrode substrate 522 is preferably made of silicon or a silicon compound. As a result, the middle electrode substrate 522 can be easily thinned, and the deformable mirror system 500 with large deformation can be realized.

[Second Embodiment] (Piezoelectric)
<Structure of deformable mirror system>
First, the structure of the deformable mirror system 500 of this embodiment will be described with reference to FIG. 3A is a top view of the deformable mirror system 500, and FIG. 3B is a cross-sectional view taken along line AA ′ in FIG. 3A. In FIG. 3 (b), the vertical dimension is exaggerated for easy understanding.

  In general, the deformable mirror system 500 of this embodiment has a structure in which a lower electrode substrate 523, a spacer 525, an intermediate electrode substrate 522, and a spacer 524 are laminated in order. Further, the middle electrode substrate 522 and the lower electrode substrate 523 are electrically insulated.

  Here, the thicknesses of the spacer 524, the middle electrode substrate 522, the spacer 525, and the lower electrode substrate 523 are 200 μm, 1 μm, 20 μm, and 200 μm, respectively. Here, the thicknesses of the intermediate electrode substrate 522 and the spacer 525 are important values that determine the rigidity of the mirror 501 and the amount of deformation during driving.

  The middle electrode substrate 522 is a planar support body having a front surface serving as a first surface and a back surface serving as a second surface, and is deformable. The intermediate electrode substrate 522 includes a piezoelectric element 541 that serves as a piezoelectric body, a middle drive electrode 532b that serves as a back electrode, and a mirror 501 that serves as a reflecting surface. The lower electrode substrate 523 includes lower drive electrodes 533a and 533b that serve as back surface drive electrodes. The mirror 501 has a diameter of 10 mm. The surface (upper surface) of the lower electrode substrate 523 is electrically insulated by an insulating film 526. Here, in the middle electrode substrate 522, the middle drive electrode 532b is disposed on the back surface (lower surface).

  Here, the piezoelectric element 541 is disposed on the surface of the middle electrode substrate 522, and the lower drive electrodes 533a and 533b are disposed on the first surface side (front surface side) of the middle electrode substrate 522 so as to face the middle drive electrode 532b. It is characterized in that it is. The piezoelectric element 541 is formed so as to go around the mirror 501.

  The middle drive electrode 532 b is electrically grounded via the ground 504 and the electric wiring 505. The piezoelectric element 541 is connected to a piezoelectric voltage application unit 542 serving as a piezoelectric voltage application unit via an electric wiring 505. Thereby, an arbitrary voltage can be applied from the piezoelectric voltage application unit 542 to the piezoelectric element 541 to generate a driving force that changes the shape of the mirror 501. The lower drive electrodes 533a and 533b are connected to a lower voltage application unit 503 serving as a back surface voltage application unit via an electric wiring 505. Thus, a driving force for changing the shape of the mirror 501 can be generated by applying an arbitrary voltage between the middle driving electrode 532b and the lower driving electrodes 533a and 533b from the lower voltage application unit 503. Here, the electric wiring 505 is described as being directly taken out from the piezoelectric element 541, but may be formed on the intermediate electrode substrate 522.

  Here, the spacer 525 is made of glass, the spacer 524 and the lower electrode substrate 523 are made of silicon, and the middle electrode substrate 522 and the insulating film 526 are made of silicon dioxide. The mirror 501 is made of, for example, Al which is a highly reflective metal. The electrical wiring 505 is made of a low electrical resistance metal such as Au or Al. The piezoelectric element 541 is made of PZT (lead zirconate titanate) or ZnO (zinc oxide), and forms a monomorph structure here. In addition, the electric wiring 505 and the piezoelectric voltage application unit 542 are connected so that a potential difference is generated in the thickness direction of the piezoelectric element 541. If there is a potential difference, the polarization process is performed so that the piezoelectric element 541 expands and contracts in the radial direction. It is characterized by being arranged.

  Here, the piezoelectric element 541 and the piezoelectric voltage application unit 542 provide surface driving means for applying a driving force to the intermediate electrode substrate 522 from the surface side of the intermediate electrode substrate 522 to change the shape of the mirror 501 together with the intermediate electrode substrate 522. Configure. Further, the middle drive electrode 532b, the lower drive electrodes 533a and 533b, and the lower voltage application unit 503 apply a driving force to the middle electrode substrate 522 from the back surface side of the middle electrode substrate 522 to form the shape of the mirror 501 together with the middle electrode substrate 522. Back surface driving means to be changed is configured.

<Operation of the deformable mirror system>
Next, the operation of the deformable mirror system 500 having the above configuration will be described with reference to FIG. FIG. 3B shows all the components, but in FIG. 3C, the electrical wiring 505, the voltage applying means 503 and 542, etc. are omitted for the sake of simplicity.

  In the deformable mirror system 500, when a potential difference is applied to the front and back surfaces of the piezoelectric element 541 using the piezoelectric voltage application unit 542, the piezoelectric element 541 contracts in the radial direction, and the mirror 501 is formed as shown in FIG. Move upward.

  As described above, in this embodiment, driving means using the piezoelectric element 541 is provided on the upper side of the middle electrode substrate 522 on which the mirror 501 is disposed, and driving means using the electrostatic force between the electrodes is provided on the lower side. Provided. Therefore, the mirror 501 can be moved in the vertical direction by expansion and contraction of the piezoelectric element 541, and the shape of the mirror 501 can be deformed by the electrostatic force of the lower drive electrodes 533a, 533b and the middle drive electrode 532b. That is, it becomes easy to independently control the upward movement, the downward movement, and the deformation of the mirror 501, and the degree of freedom for correcting the wavefront can be increased.

  In the present embodiment, since the piezoelectric element 541 is used, driving with a low voltage is possible, and the deformable mirror system 500 having a simple configuration can be realized.

  Further, in the present embodiment, the middle electrode substrate 522 and the lower drive electrodes 533a and 533b are insulated via the spacer 525. For this reason, the dimension between electrodes can be kept constant with a simple configuration.

  In the present embodiment, the spacer 525 is preferably made of glass. According to this, since glass can be processed with high accuracy, the dimension between the electrodes can be defined with high accuracy. Further, since anodic bonding can be used for glass, the deformable mirror system 500 can be realized with simple manufacturing means.

  In the present embodiment, the middle electrode substrate 522 is preferably made of silicon or a silicon compound. As a result, the middle electrode substrate 522 can be easily thinned, and the deformable mirror system 500 with large deformation can be realized.

[Third embodiment] (fundus observation device)
Next, the fundus oculi observation device 601 of this embodiment will be described with reference to FIG. FIG. 4 shows a conceptual diagram of the fundus oculi observation device 601.

  The fundus oculi observation device 601 has a compensation optical system 612, and the compensation optical system 612 has the deformable mirror system 500 described in either the first or second embodiment. Here, the fundus oculi observation device 601 shows a commonly used optical system for fundus observation. Specifically, the fundus oculi observation device 601 is used for an anterior ocular segment photographing machine, a fundus camera, a confocal laser scanning ophthalmoscope, an optical coherence tomographic imaging device, and the like.

  In the fundus oculi observation device 601, incident light 613 (solid line) emitted from the light source 602 is reflected by the split mirror 607 and enters the eyeball 603 to be observed. Then, the reflected light 614 (broken line) from the eyeball 603 reflects the deformable mirror system 500 and enters the optical sensor 606 to obtain an observation image. Here, the directions of the arrows of the incident light 613 and the reflected light 614 indicate the traveling directions of the respective lights. Specifically, the optical sensor 606 uses a photodiode or an array of photodiodes.

  Next, the configuration of the adaptive optical system 612 in the fundus oculi observation device 601 will be described. The compensation optical system 612 mainly includes a deformable mirror system 500 that corrects the phase of the wavefront and a wavefront sensor 605 that measures the phase of the wavefront. Further, a split mirror 608 for guiding the reflected light 614 to the wavefront sensor 605 and a controller 604 for controlling the deformable mirror system 500 according to the phase obtained by the wavefront sensor 605 are provided.

  Next, the operation of the fundus oculi observation device 601 including the adaptive optical system 612 will be described. Incident light 613 emitted from the light source 602 is reflected by the split mirror 607 and reaches the eyeball 603. However, the wavefront 610 of the reflected light 614 from the eyeball 603 is not in phase with the wavefront 610 due to variations in the refractive index of the eyeball. The reflected light 614 is reflected by the deformable mirror system 500, and then a part of the reflected light 614 is incident on the wavefront sensor 604 by the split mirror 608, and the phase of the wavefront of the reflected light 614 is measured. The controller 604 controls the deformable mirror system 500 so that the phase of the wave front of the reflected light 614 is aligned from the measured phase. As a result, the reflected light 614 having the corrected wavefront 611 enters the optical sensor 606 through the lens (or lens group) 609, and an observation image with high resolution is obtained. In addition, since the deformable mirror system 500 of the present invention has a high degree of freedom in correcting the wavefront, an observation image with high resolution can be easily obtained.

It is a top view of the deformable mirror system of the first embodiment of the present invention. It is A-A 'sectional drawing in Fig.1 (a). It is the figure which looked at the B-B 'cross section in FIG.1 (b) from the lower side. It is the figure which looked at the B-B 'cross section in FIG.1 (b) from the upper side. It is the figure which looked at the C-C 'cross section in FIG.1 (b) from the lower side. It is the figure which looked at the C-C 'cross section in FIG.1 (b) from the upper side. It is a figure explaining operation | movement of the deformable mirror system of the 1st Embodiment of this invention. It is a figure explaining operation | movement of the deformable mirror system of the 1st Embodiment of this invention. It is a figure explaining operation | movement of the deformable mirror system of the 1st Embodiment of this invention. It is a top view of the deformable mirror system of the second embodiment of the present invention. It is A-A 'sectional drawing in Fig.3 (a). It is a figure explaining operation | movement of the deformable mirror system of the 2nd Embodiment of this invention. It is a conceptual diagram of the fundus oculi observation device of the 3rd embodiment of the present invention.

Explanation of symbols

500 Deformable Mirror System 501 Mirror 502 Upper Voltage Application Unit 503 Lower Voltage Application Unit 504 Ground 505 Electrical Wiring 506 Opening 521 Upper Electrode Substrate 522 Middle Electrode Substrate 523 Lower Electrode Substrate 524, 525 Spacer 526 Insulating Film 531a, 531b Upper Drive Electrode 532a , 532b Middle drive electrode 533a, 533b Lower drive electrode 541 Piezoelectric element 542 Piezoelectric voltage application unit 601 Fundus observation device 602 Light source 603 Eyeball 604 Controller 605 Wavefront sensor 606 Optical sensor 607, 608 Split mirror 609 Lens (or lens group)
610, 611 Wavefront 612 Compensating optical system 613 Incident light 614 Reflected light

Claims (7)

A compensation optical system comprising: a wavefront measuring unit that measures a wavefront of light from an eye to be inspected with light from a light source; and a variable shape unit that includes a reflecting member that reflects light from the eye to be examined; An ophthalmologic apparatus that acquires an image of the fundus of the subject eye based on light reflected by a member,
The variable shape means comprises:
A support having the reflecting member disposed on the first surface;
A first electrode disposed substantially circumferentially with respect to the center of the reflecting member on the first surface;
A first drive electrode that is substantially point-symmetric with respect to the reflective member and is insulated from the first electrode via a spacer;
A driving force is applied to the support from the first surface side via the first drive electrode based on the measurement result of the wavefront measuring means, and the shape of the reflecting member is changed together with the support. Driving means,
A driving force is applied to the support based on the measurement result of the wavefront measuring means from a second surface side opposite to the first surface of the support, and the shape of the reflecting member is changed together with the support. Second driving means for changing;
An ophthalmologic apparatus comprising: A second electrode disposed on the second surface;
A second drive electrode insulated from the second electrode through a spacer,
2. The ophthalmologic according to claim 1, wherein the second driving unit deforms the shape of the reflecting member together with the support body in a direction opposite to a direction deformed by the first driving unit. apparatus. The second electrode is substantially circular;
The second drive electrode is composed of a plurality of electrodes, is opposed to the second electrode on the second surface side, and is substantially fan-shaped at a position that is substantially concentric with respect to the center of the reflecting member. Arranged,
The second driving means includes second voltage applying means for generating a driving force by applying a voltage between the second electrode and the second driving electrode. The ophthalmic apparatus according to 2. The first drive electrode is composed of a plurality of electrodes, and is disposed at a position facing the first electrode on the first surface side and substantially concentric with respect to the center of the reflecting member,
The first driving means includes first voltage applying means for generating a driving force by applying a voltage between the first electrode and the first driving electrode. The ophthalmic apparatus according to 1 . Said support is a generally planar, ophthalmic apparatus according to any one of claims 1 to 4, characterized in that a compound of silicon or silicon. A reflection / transmission member that reflects light from the light source and transmits light from the subject's eye that has received the reflected light;
An optical system for at least one of an optical system for confocal laser scanning and an optical system for optical coherence tomography, including light receiving means for receiving light transmitted by the reflective / transmissive member and reflected by the reflective member And having
The wavefront measuring means measures the wavefront of the light transmitted through the reflective / transmissive member;
The fundus image of the eye is, ophthalmologic apparatus according to any one of claims 1 to 5, characterized in that is obtained based on the light receiving result of the light receiving means. A wavefront measuring unit that measures a wavefront of light from an eye to be inspected with light from a light source; a reflecting member that reflects light from the eye to be examined; and a support in which the reflecting member is disposed on a first surface. A control method for an ophthalmologic apparatus that has an adaptive optics system comprising a deformable means, and acquires an image of the fundus of the eye to be examined based on light reflected by the reflecting member,
A first drive electrode having a substantially point symmetric shape with respect to the reflecting member , wherein the first electrode and the spacer are arranged substantially circumferentially with respect to the center of the reflecting member on the first surface. Based on the measurement result of the wavefront measuring means from the first surface side via the first drive electrode insulated through the drive surface, the driving force is applied to the support body, and the shape of the reflecting member together with the support body Changing the process;
A driving force is applied to the support based on the measurement result of the wavefront measuring means from a second surface side opposite to the first surface of the support, and the shape of the reflecting member is changed together with the support. Changing the process;
A method for controlling an ophthalmic apparatus, comprising:

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