JP5234323B2 - Angular velocity sensor element - Google Patents

Description

  The present invention relates to an angular velocity sensor element that detects an angular velocity of an object.

  Conventionally, angular velocity sensor elements have been used in technologies that autonomously control the attitude of ships, aircraft, rockets, etc. Recently, they have been used in small electronic devices such as car navigation systems, digital cameras, video cameras, and mobile phones. Has come to be installed. Accordingly, further downsizing and low profile (thinning) of the angular velocity sensor element are required.

  In order to meet the demand for further miniaturization and reduction in height, a technique for forming a thin angular velocity sensor element by processing a thin plate (wafer) made of silicon or quartz by etching or the like has been proposed (Patent Document 1). reference).

  In such an angular velocity sensor element, the absolute value of the resonance frequency of the drive vibration system and the resonance frequency of the detection vibration system, and the difference between the resonance frequency of the drive vibration system and the resonance frequency of the detection vibration system, the sensitivity and response as a sensor. It greatly affects sex.

Therefore, in the thin plate processing process, the resist pattern accuracy and the etching processing accuracy are strictly controlled. Further, in order to finely adjust the resonance frequency, so-called laser trimming is performed in which the members constituting the vibration system are irradiated with powerful laser light, and a part of these members is evaporated to adjust the mass.
Japanese Patent No. 3999377

  However, even if the resonance frequency is adjusted to an optimum value by laser trimming, the resonance frequency changes depending on the operating temperature of the angular velocity sensor, so that there is a problem that the sensitivity and responsiveness of the angular velocity sensor are lowered.

  Therefore, the present invention has been made in view of the above circumstances, and an object of the present invention is to provide an angular velocity sensor element that can adjust the vibration frequency of the vibrating arm and can improve sensitivity and responsiveness. is there.

  In order to achieve the above object, an angular velocity sensor element according to the present invention includes at least one vibrating arm, a pair of support portions that fix both ends of the vibrating arm, and an expandable / contractible portion that connects the pair of support portions. And a support member.

  In such a configuration, the distance between the pair of support portions is adjusted according to the expansion and contraction of the expansion and contraction portions, and thereby the tension of the vibrating arms stretched between the pair of support portions is adjusted. As a result, the resonance frequency of the vibrating arm is adjusted.

  The stretchable portion is configured to be stretchable by changing the bent state. For example, the expansion / contraction part is contracted by bending the expansion / contraction part, and the expansion / contraction part is extended by bringing the expansion / contraction part close to a straight line.

  The support member has a plurality of stretchable parts arranged along the extending direction of the vibrating arm. In such a configuration, even when a plurality of drive arms are stretched between the support portions, the tensions of the plurality of vibrating arms stretched between the support portions are uniformly adjusted.

  Furthermore, in order to achieve the above object, the angular velocity sensor element of the present invention includes at least one drive arm, a pair of support portions that fix both ends of the drive arm, and an extendable / contractible connection that connects the pair of support portions. It has at least one unit structure having a support member provided with a telescopic part, and a vibration detection means for detecting vibration of a vibration system including the drive arm and the support member.

  Alternatively, each speed sensor element of the present invention includes at least one drive arm, a first support member that fixes both ends of the drive arm, and a part different from the part where the drive arm is fixed in the first support member. At least one unit structure having a pair of detection arms provided on the second support member and a second support member for fixing both ends of the pair of detection arms, and the first support member and / or the second support member. Comprises a pair of support parts for fixing both ends of the drive arm and / or the detection arm, and an extendable / contractible part for connecting the pair of support parts.

  According to the present invention, since the vibration frequency of the vibrating arm can be adjusted, an angular velocity sensor element with improved sensitivity and responsiveness can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted. Further, positional relationships such as up, down, left and right are based on the positional relationships shown in the drawings unless otherwise specified. Furthermore, the dimensional ratios in the drawings are not limited to the illustrated ratios. Further, the following embodiments are exemplifications for explaining the present invention, and are not intended to limit the present invention only to the embodiments. Furthermore, the present invention can be variously modified without departing from the gist thereof.

<First Embodiment>
FIG. 1 is a plan view showing a configuration of a vibration system unit 10 of the angular velocity sensor element 1 according to the first embodiment.
As shown in FIG. 1, the vibration system unit 10 of the angular velocity sensor element 1 according to this embodiment includes a support frame (support member) 2 and at least one drive arm (vibration arm) 3 stretched in the support frame 2. And have. In the present embodiment, a plurality of drive arms 3 are stretched in the support frame 2 substantially in parallel. Thus, the support frame 2 fixes both ends of the plurality of drive arms 3 so as to be a doubly supported beam. Each drive arm 3 is configured to be capable of driving vibration in a direction orthogonal to the extending direction.

  The support frame 2 includes two support portions 2a and 2a that support a plurality of drive arms 3, and an extendable and contractible portion 2b that is connected to the two support portions 2a and 2a. The support portion 2 a is formed in a beam shape that connects one end portions of the plurality of drive arms 3. The expansion / contraction part 2b is a beam shape extending in parallel with the extending direction of the drive arm 3, and can be expanded and contracted in the arrow direction in the figure. As shown in FIG. 1, two stretchable parts 2b, 2b are arranged between the support parts 2a, 2a, and a rectangular support frame 2 is defined by the support parts 2a, 2a and the stretchable parts 2b, 2b. ing.

  Further, the support frame 2 is held between two detection arms (vibrating arms) 4. Each detection arm 4 is stretched in a direction orthogonal to the extending direction of the drive arm 3, and both ends of each detection arm 4 are fixed to support members (detection arm support members) 5. As described above, the support frame 2 is supported by the detection arm 4 in a state in which the support frame 2 can swing, and thereby, one vibration system 11 including the support frame 2 and the drive arm 3 is configured.

  The support member 5 has, for example, a U-shape including two side portions and a bottom portion surrounding the three sides of the support frame 2. Among these, the two side portions of the support member 5 are respectively provided with two support portions 5a and 5a for fixing both ends of the detection arm 4 so that the detection arm 4 is a doubly supported beam, and two support portions 5a and 5a. It has the elastic part 5b which can be extended and connected. Further, the bottom portion of the support member 5 is connected to the fixed portion 7 via the connection portion 6. The vibration system unit 10 includes a support frame 2, a drive arm 3, a detection arm 4, a support member 5, and a connection portion 6.

  The vibration system unit 10 of the angular velocity sensor element 1 is integrally formed and is made of, for example, silicon. The angular velocity sensor element 1 can be formed in a lump by, for example, removing a portion of the silicon substrate other than the portion to be left as the vibration system unit 10 by physical or chemical etching or the like. The angular velocity sensor element 1 formed in this way meets the demand for a low profile.

  In the vibration system unit 10, a pair of piezoelectric elements are arranged on the surfaces of the drive arms 3 and the detection arms 4. FIG. 2 is an enlarged view of the drive arm 3 in part A of FIG. 3A and 3B are enlarged views of the detection arm 4 in a portion B of FIG. 1, in which FIG. 3A is a front view and FIG.

  As shown in FIG. 2, two piezoelectric elements 30a and 30b whose longitudinal direction is parallel to the extending direction of the driving arm 3 are formed on the surface of each driving arm 3. The two piezoelectric elements 30 a and 30 b are formed side by side in the width direction of the drive arm 3. Each piezoelectric element 30a, 30b can be expanded and contracted in the extending direction by a voltage applied to each piezoelectric element 30a, 30b. For example, by extending the piezoelectric element 30a and contracting the piezoelectric element 30b, the driving arm 3 is bent in the direction of the arrow D1 in the figure.

  As shown in FIG. 3, on the surface of each detection arm 4, four piezoelectric elements 40 a to 40 d having a longitudinal direction in a direction parallel to the extending direction of the detection arm 4 are formed. Among these, the pair of piezoelectric elements 40 a and 40 b are formed side by side in the width direction at a predetermined position of the detection arm 4. The other set of piezoelectric elements 40c and 40d is formed side by side in the width direction of the detection arm 4 at a position on the detection arm 4 that is different from the piezoelectric elements 40a and 40b. The two sets of piezoelectric elements are for detecting deformation when the detection arm 4 is deformed, and it is preferable that the detection arm 24 is disposed at a position where the detection arm 24 is most distorted. From the piezoelectric elements 40a to 40d, detection signals corresponding to the degree of expansion / contraction are output.

  Each of the piezoelectric elements 30a, 30b, 40a to 40d formed on the drive arm 3 and the detection arm 4 is composed of a laminated body of a lower electrode, a piezoelectric film, and an upper electrode. The lower electrode and the upper electrode are made of, for example, a Pt (100) alignment film. The piezoelectric body is formed including, for example, lead zirconate titanate (PZT).

  As described above, in the present embodiment, the stretchable portion 2b is configured to be stretchable in the extending direction. The expansion / contraction of the expansion / contraction part 2b can be comprised using the piezoelectric element mentioned above. 4A and 4B are enlarged views of the stretchable portion 2b in the portion C of FIG. 1, where FIG. 4A is a view before stretching and FIG. 4B is a diagram after stretched.

  As shown in FIG. 4A, the stretchable portion 2b is formed in a bent state in advance, and the direction parallel to the extending direction of the stretchable portion 2b is defined as the longitudinal direction on the bent portion of the stretchable portion 2b. Two piezoelectric elements 20a and 20b are formed, and these two piezoelectric elements 20a and 20b are formed side by side in the width direction of the beam of the expandable portion 2b. Each piezoelectric element 20a, 20b can be expanded and contracted in the extending direction by a voltage applied to each piezoelectric element 20a, 20b.

  By applying a voltage to such piezoelectric elements 20a and 20b and extending the piezoelectric element 20b and contracting the piezoelectric element 20a as shown in FIG. 4B, the expansion / contraction part 2b is changed from a bent state to a straight line. As a result, the length of the stretchable part 2b extends from L1 to L2. Therefore, the expansion / contraction part 2b is extended by L2-L1. Based on such a principle, an example of the stretchable part 2b that can be stretched in the extending direction is configured.

  The distance between the pair of support portions 2a, 2a is adjusted by extending / contracting the extension / contraction part 2b, whereby the tension of each drive arm 3 is adjusted. As a result, the resonance frequency of the drive arm 3 is adjusted. The stretchable part 5b has the same configuration as the stretchable part 2b. Therefore, the resonance frequency of the detection arm 4 is adjusted in the same manner by expanding and contracting the expansion / contraction part 5b.

  Next, the operation of the angular velocity sensor element 2 will be described with reference to FIGS. 6 is an enlarged view of a portion B in FIG. 5, in which (A) is a front view and (B) is a cross-sectional view.

  As shown in FIG. 5, when a rotational angular velocity about the rotation axis R1 is applied with each drive arm 3 performing drive vibration in the direction indicated by the arrow V, the direction of the drive vibration and the rotation axis R1 are orthogonal to each other. Coriolis force f <b> 1 in the direction to be applied acts on each drive arm 3. The Coriolis force f1 acting on each drive arm 3 is synthesized, and the Coriolis force F1 acts on the vibration system 11 including the support frame 2 and the drive arm 3 as a whole. When the vibration system 11 receives the Coriolis force F1, the vibration system 11 vibrates in the same direction as the Coriolis force F1, and the detection arm 4 is deformed along with the vibration of the vibration system 11.

  At this time, as shown in FIG. 6, the piezoelectric elements 40a and 40d located on the diagonal are in an extended state, and the other piezoelectric elements 40b and 40c are in a contracted state. Since signals corresponding to the deformation are output from the piezoelectric elements 40a to 40d, the displacement and amplitude of the vibration of the vibration system 11 are detected by applying predetermined arithmetic processing to each signal, and finally the rotational angular velocity. Is detected.

The effect of the angular velocity sensor element 1 according to the first embodiment will be described.
In this embodiment, the tension of the vibrating arms such as the drive arm 3 and the detection arm 4 can be adjusted by controlling the expansion and contraction of the expansion and contraction parts 2b and 5b, and as a result, the resonance frequency of the vibration arm can be adjusted. For example, the resonance frequency of the vibrating arm can be dynamically adjusted by controlling the voltage to the piezoelectric elements 20a and 20b while monitoring the oscillation frequency of the vibrating arm. For this reason, even when there is a change in temperature or the like, the resonance frequency of the vibrating arm can be maintained at a constant value. Even if the resonance frequency of the vibrating arm deviates from the set value due to manufacturing variations, the resonance frequency of the vibrating arm is adjusted to the set value without using expensive maintenance and laser trimming that requires much time. You can also. Furthermore, by changing the difference between the resonance frequency of the driving arm 3 and the resonance frequency of the detection arm 4 according to the application of the angular velocity sensor element 1, it is possible to achieve the sensitivity and time constant according to this application. As described above, the adjustment to the optimum resonance frequency is possible, so that the sensitivity and responsiveness of the angular velocity sensor element can be improved.

  Furthermore, in this embodiment, the drive vibration system is configured by the drive arm 3, and the detection vibration system is configured by the vibration system 11 including the drive arm 3 and the support frame 2, and shares a mass (weight) necessary for vibration. doing. Since the vibration system 11 that has received the Coriolis force F1 vibrates directly in the direction in which the Coriolis force F1 acts, it is not necessary to transmit complicated vibrations between the drive vibration system and the detection vibration system. . As a result, a base for transmitting vibration between the drive vibration system and the detection vibration system becomes unnecessary, and stable vibration characteristics that are not affected by the support conditions of the base can be exhibited.

  In the present embodiment, the Coriolis force f1 acting on each drive arm 3 is combined, and a large Coriolis force F1 acts on the vibration system 11 including the support frame 2 and the drive arm 3. Therefore, the Coriolis force F1 acting on the vibration system 11 can be increased by increasing the number of drive arms 3. Further, by arranging the driving arms 3 substantially in parallel, it becomes possible to closely arrange all the driving arms 3 and avoid the generation of extra space. As a result, it is possible to realize the angular velocity sensor element 1 with a small size and high sensitivity. Moreover, the utilization efficiency of material can also be improved.

  In the present embodiment, the drive arm 3 has a doubly-supported beam shape, so that the amplitude is limited compared to a cantilever-shaped drive arm. As a result, there is an advantage that it is not easily broken because it does not shake greatly even when subjected to an impact.

Second Embodiment
The angular velocity sensor element 1a according to the second embodiment is the same as that of the first embodiment except that the structure of the stretchable part is different from that of the first embodiment. FIG. 7 is a plan view showing the configuration of the angular velocity sensor element 1a according to the second embodiment.

  As shown in FIG. 7, in the second embodiment, an expansion / contraction part 2 c is added in addition to the expansion / contraction part 2 b of the first embodiment. The two stretchable parts 2b and 2c are bent in opposite directions to each other, and the stretchable part 2d is constituted by the two stretchable parts 2b and 2c.

  Similarly, with respect to the support member 5 that fixes both ends of the detection arm 4, an expansion / contraction part 5 c is added in addition to the expansion / contraction part 5 b of the first embodiment. The two stretchable parts 5b and 5c are bent in opposite directions, and the stretchable part 5d is constituted by the two stretchable parts 5b and 5c.

  FIGS. 8A and 8B are enlarged views of the stretchable portion 2b in the portion C of FIG. 7, where FIG. 8A is a diagram before stretching and FIG. 8B is a diagram after stretching.

  As shown in FIG. 8A, two piezoelectric elements 20c having a longitudinal direction in the direction parallel to the extending direction of the stretchable part 2c are formed on the bent part of the stretchable part 2c arranged in parallel with the stretchable part 2b. , 20d, and these two piezoelectric elements 20c, 20d are formed side by side in the width direction of the beam of the stretchable portion 2c. The piezoelectric elements 20c and 20d can be expanded and contracted in the extending direction by a voltage applied to the piezoelectric elements 20c and 20d. As described in the first embodiment, the piezoelectric elements 20a and 20b are also formed on the stretchable part 2b.

  By applying a voltage to such piezoelectric elements 20a to 20d and extending the inner piezoelectric elements 20b and 20c and contracting the outer piezoelectric elements 20a and 20c as shown in FIG. 20d changes from a bent state to a state close to a straight line, and as a result, the length of the stretchable portion 2d extends from L1 to L2. Therefore, the expansion / contraction part 2b is extended by L2-L1. Based on such a principle, an example of the expansion / contraction part 2d that can expand and contract in the extending direction is configured.

  The distance between the pair of support portions 2a and 2a is adjusted by expanding and contracting the extendable portion 2d, whereby the tension of each drive arm 3 is adjusted. As a result, the resonance frequency of the drive arm 3 is adjusted. The stretchable part 5d also has the same configuration as the stretchable part 2d. Therefore, the resonance frequency of the detection arm 4 is adjusted in the same manner by expanding and contracting the expansion / contraction part 5d.

  According to the angular velocity sensor element 1a according to the present embodiment, the tensile force of the driving arm 3 can be increased by configuring one telescopic portion 2d using the two telescopic beams (the telescopic portions 2b and 2c) as described above. Since it can be increased, the tension adjustment range of the drive arm 3 can be expanded.

<Third Embodiment>
The angular velocity sensor element 1b according to the third embodiment is the same as that of the first embodiment except that the number of stretchable parts is different from that of the second embodiment. FIG. 9 is a plan view showing the configuration of the angular velocity sensor element 1b according to the third embodiment.

  In this embodiment, in addition to the two stretchable parts 2d that define the support frame 2, an additional stretchable part 2d is formed. Specifically, in the center portion of the support frame 2, one stretchable portion 2 d extending in parallel with the drive arm 3 is disposed. Both ends of the stretchable part 2d are fixed to the support parts 2a and 2a.

  In this way, three or more stretchable parts 2d may be provided. Thereby, since the several drive arm 3 can be pulled uniformly and strongly, the tension | tensile_strength adjustment range of the drive arm 3 can be expanded, and the tension variation of the drive arm 3 can be suppressed.

<Fourth embodiment>
FIG. 10 is a plan view showing a configuration of an angular velocity sensor element 1c according to the fourth embodiment.
As shown in FIG. 10, in the fourth embodiment, the first embodiment is provided except that a connecting member 8 that connects and integrates the plurality of driving arms 3 is provided in a direction crossing the plurality of driving arms 3. It has the same configuration as the form.

  As a result, the phases and amplitudes of the drive vibrations of the plurality of drive arms 3 can be aligned, and there is a timing for receiving the maximum Coriolis force. Therefore, the Coriolis forces received by the plurality of drive arms 3 are efficiently synthesized, A force larger than the Coriolis force acting on the drive arm acts on the entire vibration system 11.

  In other words, in this embodiment, one drive vibration system including a plurality of drive arms 3 is configured, not an assembly of individual drive vibration systems. The detection vibration system is configured by the vibration system 11 including the support frame 2, the drive arm 3, and the connecting member 8. For this reason, even when there is a deviation in the drive control of the individual drive arms 3, stable vibration characteristics can be exhibited.

<Fifth Embodiment>
FIG. 11 is a plan view showing a configuration of an angular velocity sensor element 1d according to the fifth embodiment.
As shown in FIG. 11, in the fifth embodiment, a weight 8 a is provided in a connecting member 8 that connects and integrates a plurality of driving arms 3 in a direction crossing the plurality of driving arms 3. A configuration similar to that of the fourth embodiment is provided.

  As shown in FIG. 11, the connecting member 8 is provided with a weight 8 a protruding in a direction orthogonal to the extending direction of the connecting member 8 in the region between the two drive arms 3. 11 shows an example in which the weight 8a is integrally formed with the connecting member 8, but the weight 8a may be another member formed on the connecting member 8.

  In this embodiment, one drive vibration system is comprised by the several drive arm 3, the connection member 8, and the weight 8a. Further, the support frame 2, the drive arm 3, the connecting member 8, and the weight 8a constitute a vibration system 11 serving as a detection vibration system. Thus, the weight 8a relates to the weight of both the drive vibration system and the detection vibration system. Therefore, the resonance frequency of both the drive vibration system and the detection vibration system can be adjusted by adjusting the weight of the weight 8a.

<Sixth Embodiment>
FIG. 12 is a plan view showing a configuration of an angular velocity sensor element 1e according to the sixth embodiment. This angular velocity sensor element 1e has the same configuration as the angular velocity sensor element 1 according to the first embodiment, except that the shape of the support frame 2 is different from that of the first embodiment.

  As shown in FIG. 12, in the angular velocity sensor element 1e, the support frame 2a is not rectangular but has a shape close to a rhombus or hexagon. And the piezoelectric element is formed in the bending part of each upper and lower center part of this support frame 2, and an expansion-contraction part is comprised by the upper and lower sides of the support frame 2. As shown in FIG. Also with such an angular velocity sensor element 1m, the same operational effects as in the first embodiment can be obtained.

<Seventh embodiment>
FIG. 13 is a plan view showing a configuration of an angular velocity sensor element 1f according to the seventh embodiment.
As shown in FIG. 13, the angular velocity sensor element 1 f according to the present embodiment includes two vibration system units 10 a and 10 b that are provided rotationally symmetrically about the fixed portion 7. As the configuration of each vibration system unit 10a, 10b, the vibration system unit according to the second embodiment is illustrated.

  Specifically, the two vibration system units 10a and 10b are arranged symmetrically with respect to a virtual line passing through the fixed portion 7, and the vibration system units 10a and 10b are indicated by arrows Va and Vb. The drive is controlled so that the mutual drive vibrations are in opposite directions.

The operation of the angular velocity sensor element 1f according to this embodiment will be described.
When a rotational angular velocity about the rotation axis R1 is applied in a state where each vibration system unit 10a, 10b is driving and vibrating in the directions indicated by arrows Va, Vb, the vibration system 11 of each vibration system unit 10a, 10b. Receive Coriolis forces in the directions indicated by arrows F1a and F1b, respectively. The vibration of the vibration system 11 of each vibration system unit 10a, 10b based on this Coriolis force is detected by the principle described above.

  In the above operation, in the present embodiment, the two vibration system units 10a and 10b arranged opposite to each other centering on the fixed portion 7 are arranged and controlled so that the driving vibration is reversed. The drive vibration is canceled between the vibration system units 10a and 10b, and as a result, there is no vibration component acting on the entire angular velocity sensor element 1f.

  As described above, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present invention. The angular velocity sensor element 1 only needs to include at least one vibration system unit 10, and may include, for example, four vibration system units 10. Moreover, you may abbreviate | omit the expansion-contraction part 2b or the expansion-contraction part 5b. Furthermore, although the example using a piezoelectric element as an expansion-contraction part was demonstrated, for example, thermal expansion by a heater etc. may be utilized or a giant magnetostrictive material may be utilized. Furthermore, for example, the contents of the embodiments may be appropriately combined. Moreover, there is no limitation in the dimension and material of each member.

  The angular velocity sensor element of the present invention can be mounted on any device and equipment that need to detect angular velocity, for example, for camera shake detection of a video camera, motion detection in a virtual reality device, direction detection in a car navigation system, etc. Can be used.

It is a top view which shows the structure of the angular velocity sensor element 1 which concerns on 1st Embodiment. It is an enlarged view of the A section of FIG. It is an enlarged view of the B section of Drawing 1, (A) is a front view and (B) is a sectional view. It is an enlarged view of the C section of Drawing 1, (A) is a top view before extension, and (B) is a top view after extension. It is a top view which shows operation | movement of the angular velocity sensor element 1 which concerns on 1st Embodiment. It is an enlarged view of the B section of Drawing 4, (A) is a front view and (B) is a sectional view. It is a top view which shows the structure of the angular velocity sensor element 1a which concerns on 2nd Embodiment. It is an enlarged view of the C section of Drawing 7, (A) is a top view before extension, and (B) is a top view after extension. It is a top view which shows the structure of the angular velocity sensor element 1b which concerns on 3rd Embodiment. It is a top view which shows the structure of the angular velocity sensor element 1c which concerns on 4th Embodiment. It is a top view which shows the structure of the angular velocity sensor element 1d which concerns on 5th Embodiment. It is a top view which shows the structure of the angular velocity sensor element 1e which concerns on 6th Embodiment. It is a top view which shows the structure of the angular velocity sensor element 1f which concerns on 7th Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1-1f ... Angular velocity sensor element, 2 ... Support frame, 2a ... Support part, 2b, 2c, 2d ... Expansion / contraction part, 3 ... Drive arm, 4 ... Detection arm, 5 ... Support member, 5a ... Support part, 5b ... Expansion / contraction 6, connecting portion, 7, fixing portion, 8, connecting member, 8 a, weight, 10, vibration system unit, 11, vibration system, 20 a to 20 d, piezoelectric elements, 30 a, 30 b, piezoelectric elements, 40 a to 40 d Piezoelectric element, R1 ... rotating shaft, V ... drive vibration, F1 ... Coriolis force.

Claims (4)

At least one vibrating arm;
A support member comprising a pair of support parts for fixing both ends of the at least one vibrating arm, and a plurality of extendable extension parts connecting the pair of support parts;
And have a,
The plurality of stretchable parts are configured to be stretchable by changing a bent state, and are disposed at the same position in a direction orthogonal to the extending direction of the at least one vibrating arm. ,
Angular velocity sensor element. The number of telescopic unit is for disposed along the extending direction of the at least one vibrating arm,
The angular velocity sensor element according to claim 1. The at least one resonating arm includes a driving arm and a pair of detection arms provided at different sites from the driving arm,
The support member includes a first support member that fixes both ends of the drive arm, and a second support member that fixes both ends of the pair of detection arms,
The stretchable part is
The first support member and / or the second support member are provided .
The angular velocity sensor element according to claim 1 or 2 . Having at least one unit structure having the at least one vibrating arm and the support member;
The angular velocity sensor element of any one of Claims 1-3.

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