JP5224759B2 - Test formula creation support system, test formula creation support method, and test formula creation support program - Google Patents

Description

  The present invention relates to a system that supports the creation of an inspection formula for inspecting the operation status and the like of various apparatuses such as a semiconductor manufacturing apparatus.

  2. Description of the Related Art Conventionally, a system for monitoring the operating status of an industrial device or the like (whether it is operating normally) is known. For example, in the field of semiconductor manufacturing equipment, a semiconductor manufacturing equipment and a server for monitoring the semiconductor manufacturing equipment (hereinafter referred to as “monitoring server”) are connected via a network, and IO devices and analog devices for controlling the semiconductor manufacturing equipment are used. Data (parameter values), data on the device controller (parameter values), etc. are collected in real time by the monitoring server. Then, in the monitoring server, the operation status of the semiconductor manufacturing apparatus is inspected based on the collected parameter values and the like.

  When inspecting the operating status of a semiconductor manufacturing apparatus, an arithmetic expression for inspection (hereinafter referred to as “inspection expression”) for performing arithmetic operations such as four arithmetic operations including various parameters (variables), logical operations, and comparison operations in advance. Is created. And the quality of an operating condition is determined by substituting the parameter value collected by the monitoring server for the inspection type | formula. The inspection formula is generally created by a personal computer called a client connected to the monitoring server.

  For example, if the difference between the preset “chemical solution temperature setting value” and the “chemical solution temperature” collected (acquired) from the semiconductor manufacturing apparatus is 5 degrees or more, an inspection formula that determines that the device is not operating normally Will be described. The inspection formula for performing the above determination is expressed as “chemical solution temperature−chemical solution temperature set value <5”. Here, when the value of the chemical liquid temperature is “52” and the value of the chemical liquid temperature setting value is “50”, when these values are substituted into the inspection formula, “50−52 <5” is obtained, and the result of the inspection formula is Become "true". Thereby, it is determined that the semiconductor manufacturing apparatus is operating normally. On the other hand, when the value of the chemical liquid temperature is “56” and the value of the chemical liquid temperature set value is “50”, when these values are substituted into the inspection formula, “56−52 <5” is obtained, and the result of the inspection formula is “ False. Thereby, it is determined that the semiconductor manufacturing apparatus is not operating normally. As described above, the operation status of the semiconductor manufacturing apparatus is inspected based on the inspection formula.

As will be described later, in each embodiment of the present invention, the above check expression is tree-structured. However, Japanese Patent Laid-Open No. 2003-6172 recognizes an arithmetic expression related to a predetermined calculation of machining software as a tree structure. A technique for creating a new processing software by dividing a tree is disclosed.
JP 2003-6172 A

  Incidentally, some of the above-described inspection formulas include many parameters and many operations. For this reason, the check expression becomes complicated, and it may be difficult to determine the validity of the check expression at the stage of preparing the check expression. Even if such a complicated inspection formula is applied to the inspection of the device, whether or not the abnormality of the device is correctly detected by the inspection formula depends on whether the parameter value used in the inspection formula is actually abnormal. It cannot be confirmed until a correct value is reached. For this reason, when a check equation includes a large number of parameters and a large number of operations, it is extremely difficult to create a check equation that can correctly detect an abnormality in the apparatus.

  Therefore, the present invention creates an inspection formula so that a user can easily determine the validity of the inspection formula when a test formula used for inspection of various devices such as semiconductor manufacturing equipment is created. The purpose is to realize a supporting system.

According to a first aspect of the present invention, there is provided a method for creating a check expression that can include a constant, a variable, an operator, and a parenthesis that indicates a priority of an operation as a constituent element and is an expression for checking a state of a predetermined device. An inspection formula creation support system for supporting,
Variable value acquisition means for acquiring values of variables that can be included in the inspection formula from the predetermined device;
A variable value holding unit for holding the value acquired by the variable value acquiring means as a variable value;
An inspection expression input means for accepting an input of a new inspection expression which is an inspection expression given from the outside;
Variable value extracting means for extracting the value of the variable included in the new check expression from the variable value holding unit;
A parent-child relationship acquisition means for acquiring a parent-child relationship between the nodes based on the parenthesis symbol and a priority of operation by the operator among the components included in the new check expression as a node. When,
Node value acquisition means for acquiring a result obtained by substituting the variable value extracted by the variable value extraction means into the new check expression as a node value for each node based on a parent-child relationship between the nodes;
Node value display means for displaying the node value for each node is provided.

According to a second invention, in the first invention,
The parent-child relationship acquisition means is based on the new check expression, in a binary tree format in which an operator of the constituent elements included in the new check expression is a parent node and the left and right constituent elements of the operator are child nodes. A parent-child relationship between the nodes is acquired by generating a tree structure.

According to a third invention, in the first or second invention,
The node value display means displays the node value for each node in a graph.

According to a fourth invention, in the third invention,
The graph displayed by the node value display means is characterized in that the node values for each node are plotted in time series.

According to a fifth invention, in any one of the first to fourth inventions,
The node value display means includes node value display switching means for switching display / non-display of the node value for each node.

According to a sixth invention, in any one of the first to fifth inventions,
The variable value acquisition means acquires the value of a variable included in the check expression in real time.

According to a seventh invention, in any one of the first to sixth inventions,
The predetermined apparatus is a semiconductor manufacturing apparatus.

According to an eighth invention, in any one of the first to seventh inventions,
The server includes at least the variable value acquisition unit, the variable value holding unit, and the variable value extraction unit, and a client including at least the check expression input unit and the node value display unit.

According to a ninth aspect of the present invention, there is provided the creation of a check expression that is an expression that can include a constant, a variable, an operator, and a parenthesis symbol indicating the priority of an operation as a constituent element and that is an expression for checking a state of a predetermined device. An inspection formula creation support method for supporting,
A variable value acquisition step of acquiring a value of a variable that can be included in the inspection formula from the predetermined device;
A variable value storing step of storing the value acquired in the variable value acquiring step as a variable value in a predetermined variable value holding unit;
An inspection expression input step for accepting input of a new inspection expression which is an inspection expression given from the outside;
A variable value extracting step of extracting the value of the variable included in the new check expression from the variable value holding unit;
A parent-child relationship acquisition step of acquiring a parent-child relationship between the nodes based on the parenthesis symbol and a priority of an operation by the operator, with a component other than the parenthesis symbol among the components included in the new check expression When,
A node value acquisition step of acquiring a result obtained by substituting the variable value extracted in the variable value extraction step as the node value for each node based on a parent-child relationship between the nodes;
And a node value display step for displaying the node value for each of the nodes.

A tenth invention is the ninth invention,
In the parent-child relationship acquisition step, based on the new check expression, a binary tree format in which an operator among the constituent elements included in the new check expression is a parent node and left and right constituent elements of the operator are child nodes. A parent-child relationship between the nodes is acquired by generating a tree structure.

In an eleventh aspect based on the ninth or tenth aspect,
In the node value display step, the node value for each node is displayed in a graph.

According to a twelfth aspect of the present invention, there is provided the creation of a check expression that is an expression that can include a constant, a variable, an operator, and a parenthesis symbol indicating the priority of an operation as a constituent element and that is an expression for checking a state of a predetermined device. A test formula creation support program to support,
A variable value acquisition step of acquiring a value of a variable that can be included in the inspection formula from the predetermined device;
A variable value storing step of storing the value acquired in the variable value acquiring step as a variable value in a predetermined variable value holding unit;
An inspection expression input step for accepting input of a new inspection expression which is an inspection expression given from the outside;
A variable value extracting step of extracting the value of the variable included in the new check expression from the variable value holding unit;
A parent-child relationship acquisition step of acquiring a parent-child relationship between the nodes based on the parenthesis symbol and a priority of an operation by the operator, with a component other than the parenthesis symbol among the components included in the new check expression When,
A node value acquisition step of acquiring a result obtained by substituting the variable value extracted in the variable value extraction step as the node value for each node based on a parent-child relationship between the nodes;
A node value display step for displaying the node value for each node;
Is executed by a computer.

In a thirteenth aspect based on the twelfth aspect,
In the parent-child relationship acquisition step, based on the new check expression, a binary tree format in which an operator among the constituent elements included in the new check expression is a parent node and left and right constituent elements of the operator are child nodes. A parent-child relationship between the nodes is acquired by generating a tree structure.

In a fourteenth aspect based on the twelfth or thirteenth aspect,
In the node value display step, the node value for each node is displayed in a graph.

  According to the first aspect, the value of the variable that can be included in the check expression is acquired by the variable value acquisition unit, and the value is stored in the variable value holding unit as the variable value. In addition, a value for a variable included in a check expression (new check expression) input from the outside is extracted from the variable value holding unit. Further, the parent-child relationship acquisition means acquires the parent-child relationship between nodes (constants, variables, operators) for the new check expression. And the result obtained by substituting the variable value extracted from the said variable value holding | maintenance part for a new test | inspection type | formula is acquired as a node value for every node. Further, the node value for each node is displayed by the node value display means. For this reason, the user can confirm the result of applying past data to the inspection formula when the inspection formula is newly created. Thereby, the user can easily determine the validity of the inspection formula. In addition, the result of applying past data to the check expression is displayed for each node of the check expression. For this reason, the user can easily determine which part of the inspection formula has an error.

  According to the second aspect, similar to the first aspect, the user can easily determine the validity of the newly created check expression, and easily determine which part of the check expression has an error. Can be judged.

  According to the third aspect, the result of applying past data to the inspection formula is displayed as a graph. Therefore, the user can visually determine the validity of the inspection formula. Thereby, the inspection formula creation work by the user becomes more efficient.

  According to the fourth aspect, the result of applying past data to the inspection formula is displayed as a time-series graph. For this reason, the user can easily confirm the result of applying the data when the device has become abnormal in the past to the inspection formula.

  According to the fifth aspect, the user can switch the display / non-display of the result of applying the past data to the inspection formula for each node as necessary. For this reason, the visibility of the result is improved, and the inspection formula creation work by the user becomes more efficient.

  According to the sixth aspect, the value of the variable included in the inspection formula is acquired in real time from the device to be inspected, and the value of the variable is stored in the variable value holding unit. For this reason, the validity of the newly created inspection formula can be determined based on the state of the inspection target apparatus at each past time point.

  According to the seventh aspect, it becomes easy to judge the validity of the inspection formula created for inspecting the state of the semiconductor manufacturing apparatus.

  According to the eighth aspect of the invention, the inspection formula creation support system includes the server and the client. For this reason, processing can be distributed to the server and the client. In addition, since the check expression input means and node value display means are provided in the client, the user must input the newly created check expression and determine the validity of the check expression on the client (client PC). Can do. Furthermore, if a configuration is provided with a plurality of clients when there are a plurality of users, each user can input an inspection formula and determine the validity of the inspection formula at each client.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

<1. First Embodiment>
<1.1 Overall Configuration and Hardware Configuration of Inspection Formula Creation Support System>
FIG. 1 is a schematic configuration diagram of the entire inspection formula creation support system according to the first embodiment of the present invention. This inspection formula creation support system is configured by a computer called a monitoring server 2 and one or a plurality of computers called clients 3. The inspection formula creation support system according to the present embodiment supports creation of an inspection formula for inspecting the operating status (whether or not the semiconductor manufacturing apparatus 4 is operating normally). Therefore, the semiconductor manufacturing apparatus 4 itself is not a component of the inspection formula creation support system, but the semiconductor manufacturing apparatus 4 and the monitoring server 2 are connected by a network such as Ethernet (registered trademark of Fuji Xerox Co., Ltd.) or reduced wiring. ing.

  The monitoring server 2 analyzes the test formula (new test formula) created by the client 3 and makes the user judge the validity of the test formula using a graph (hereinafter referred to as “graph creation data”). Is generated. In addition, the monitoring server 2 inspects the operation status of the semiconductor manufacturing apparatus 4 using an existing inspection formula (the inspection formula that is to be applied to the inspection of the semiconductor manufacturing apparatus 4 after a new creation). The client 3 accepts an input of a new test formula (new test formula) by the user, and displays a graph for allowing the user to determine the validity of the test formula.

  FIG. 2 is a block diagram showing a hardware configuration of the monitoring server 2 in the present embodiment. The monitoring server 2 is realized using a personal computer (PC), and includes a main body 50, an auxiliary storage device 60, a display device 61 such as a CRT, and input devices such as a keyboard 62 and a mouse 63. The personal computer main body 50 includes a CPU 500, a memory 510 such as a RAM and a ROM, a network interface unit 520, a disk interface unit 530, a display control unit 540, and an input interface unit 550. An auxiliary storage device 60 is connected to the disk interface unit 530, a display device 61 is connected to the display control unit 540, and an input device is connected to the input interface unit 550. Further, in order to perform data communication with the outside, the network interface unit 520 is connected to Ethernet (registered trademark of Fuji Xerox Co., Ltd.), reduced wiring, or the like. The protocol used for data communication with the outside is not particularly limited.

  The auxiliary storage device 60 stores a program 600 (hereinafter referred to as an “inspection formula creation support program”) for supporting creation of an inspection formula. When the operation of the monitoring server 2 starts, the test formula creation support program 600 is read into the memory 510 via the disk interface unit 530. Then, the CPU 500 executes an inspection formula creation support program. The inspection formula creation support program 600 is provided by being stored in a computer-readable recording medium such as a CD-ROM. That is, the user purchases a CD-ROM as a recording medium of the inspection formula creation support program 600, loads it on a CD-ROM drive (not shown), reads the inspection formula creation support program 600 from the CD-ROM. Install in the auxiliary storage device 60. Alternatively, the inspection formula creation support program 600 sent via the network may be received and installed in the auxiliary storage device 60.

  The hardware configuration of the client 3 is the same as the hardware configuration of the monitoring server 2 shown in FIG. However, since the monitoring server 2 needs to respond to processing requests from a large number of clients 3 and to perform processing for inspecting the operation status of the semiconductor manufacturing apparatus 4, the monitoring server 2 has a higher processing capacity than the client 3. Is needed.

<1.2 Functional configuration of the inspection formula creation support system>
FIG. 3 is a functional block diagram of the inspection formula creation support system in the present embodiment. The monitoring server 2 includes a first communication control unit 21, a parameter monitoring unit 22, a parameter history management unit 23, a parameter history database 24, a second communication control unit 25, and an inspection formula analysis unit 26. The client 3 includes a communication control unit 31, an inspection type input unit 32, and a parameter graph display unit 33. The semiconductor manufacturing apparatus 4 includes a communication control unit 41. Hereinafter, the operation of each component in the monitoring server 2, the client 3, and the semiconductor manufacturing apparatus 4 will be described.

<1.2.1 Operations of Monitoring Server Components>
The first communication control unit 21 functions for data communication between the monitoring server 2 and the semiconductor manufacturing apparatus 4. Specifically, the first communication control unit 21 receives the current parameter value PA sent from the communication control unit 41 of the semiconductor manufacturing apparatus 4, and sends the current parameter value PA to the parameter monitoring unit 22 and the parameter history management unit 23. give. The current parameter value PA is a value collected from the semiconductor manufacturing apparatus 4 in real time for parameters used in the inspection formula. Further, there are generally a plurality of parameter values collected from the semiconductor manufacturing apparatus 4, and the values of the plurality of parameters are collectively referred to as “current parameter value PA”.

  The parameter monitoring unit 22 executes an existing check expression using the current parameter value PA given from the first communication control unit 21. If the operating status of the semiconductor manufacturing apparatus (hereinafter also simply referred to as “apparatus”) 4 is abnormal, the parameter monitoring unit 22 gives an abnormality notification (alarm) AL to the second communication control unit 25. Note that “execute an inspection formula” means that a new parameter is created by substituting the current parameter value PA collected from the device 4 for the parameters included in the existing inspection formula at the stage of inspecting the device 4. In the stage of determining the validity of the check formula, the past parameter value PB described later is substituted for the parameter included in the check formula. The parameter monitoring unit 22 determines the operating status of the apparatus 4 based on the authenticity of the inspection formula after the current parameter value PA is substituted into the existing inspection formula. Specifically, if the inspection formula is “true”, it is determined that “the operation status of the device is normal”, and if the inspection formula is “false”, “the operation status of the device is abnormal. It is judged. In addition, the new creation of the test formula K is performed by the client 3. If the newly created test formula K is applied to the test of the apparatus 4, the test formula K is used as the second communication control unit 25. Is sent from the client 3 to the parameter monitoring unit 22 via.

  The parameter history management unit 23 receives the current parameter value PA given from the first communication control unit 21 and stores the current parameter value PA in the parameter history database 24. Further, the parameter history management unit 23 reads the parameter value stored in the parameter history database 24 as the past parameter value PB, and gives the past parameter value PB to the inspection formula analysis unit 26. The parameter history database 24 stores parameter values collected from the semiconductor manufacturing apparatus 4. When a plurality of parameters are included in the inspection formula, past values for the plurality of parameters are collectively referred to as “past parameter value PB”.

  The second communication control unit 25 functions for data communication between the monitoring server 2 and the client 3. Specifically, the second communication control unit 25 receives the newly created test formula K from the communication control unit 31 of the client 3 and gives the test formula K to the test formula analysis unit 26. Further, if the newly created inspection formula K is applied to the inspection of the device 4, the second communication control unit 25 gives the inspection formula K to the parameter monitoring unit 22. In addition, the second communication control unit 25 receives the graph creation data GD given from the inspection formula analysis unit 26 and transmits the graph creation data GD to the communication control unit 31 of the client 3. Further, the second communication control unit 25 receives the abnormality notification AL given from the parameter monitoring unit 22 and transmits the abnormality notification AL to the communication control unit 31 of the client 3.

  The test formula analysis unit 26 receives the test formula K given from the second communication control unit 25 and the past parameter value PB given from the parameter history management unit 23, and generates graph creation data GD. Then, the inspection formula analysis unit 26 gives the graph creation data GD to the second communication control unit 25.

  In the present embodiment, a variable value acquisition unit is realized by the first communication control unit 21, a variable value holding unit is realized by the parameter history database 24, and a variable value extraction unit is realized by the parameter history management unit 23. Yes. In addition, a parent-child relationship acquisition unit and a node value acquisition unit are realized by the inspection formula analysis unit 26.

<1.2.2 Client Component Operation>
The communication control unit 31 functions for data communication between the monitoring server 2 and the client 3. Specifically, the communication control unit 31 receives a test formula (new test formula) K given from the test formula input unit 32 and transmits the test formula K to the second communication control unit 25 of the monitoring server 2. Further, the communication control unit 31 receives the graph creation data GD sent from the second communication control unit 25 of the monitoring server 2 and gives the graph creation data GD to the parameter graph display unit 33. Furthermore, the communication control unit 31 receives the abnormality notification AL sent from the second communication control unit 25 of the monitoring server 2 and causes a predetermined display (not shown) to display that the operation status of the device 4 is abnormal. .

  The inspection formula input unit 32 accepts input of a new inspection formula by the user. Then, the inspection formula input unit 32 gives the communication control unit 31 the inspection formula (new inspection formula) K input by the user. The parameter graph display unit 33 receives the graph creation data GD given from the communication control unit 31, and displays a graph based on the graph creation data GD on the display.

  In the present embodiment, a check expression input unit is realized by the check expression input unit 32, and a node value display unit is realized by the parameter graph display unit 33.

<1.2.3 Operations of Components of Semiconductor Manufacturing Apparatus>
The communication control unit 41 uses the values of various parameters (for example, data of IO devices and analog devices, data on the device controller) acquired in real time in the semiconductor manufacturing apparatus 4 as the current parameter value PA. 1 is transmitted to the communication control unit 21.

<1.3 Device inspection process>
Next, a process (hereinafter referred to as “apparatus inspection process”) for inspecting the operation status of the semiconductor manufacturing apparatus 4 performed by the monitoring server 2 will be described. FIG. 4 is a flowchart showing the procedure of the apparatus inspection process. After starting the operation of the monitoring server 2, in step S110, the first communication control unit 21 receives the current parameter value PA sent from the communication control unit 41 of the semiconductor manufacturing apparatus 4. In step S120, the current parameter value PA is transmitted from the first communication control unit 21 to the parameter monitoring unit 22. In step S130, the parameter monitoring unit 22 executes an inspection formula using the current parameter value PA.

  In step S140, the execution result of the inspection formula is determined. As a result of the determination, if the operation status of the apparatus 4 is abnormal, the process proceeds to step S150, and if not abnormal, the process proceeds to step S160. In step S <b> 150, abnormality notification is performed from the parameter monitoring unit 22 to the communication control unit 31 of the client 3 via the second communication control unit 25.

  In step S160, the current parameter value PA is transmitted from the first communication control unit 21 to the parameter history management unit 23. In step S170, the parameter history management unit 23 stores the current parameter value PA in the parameter history database 24.

  The above steps are repeated during the operation of the monitoring server 2. In the present embodiment, the processing after step S160 is executed after step S140 or step S150, but the processing from step S110 to step S150 and the processing from step S160 to step S170 are parallel. It may be configured to be executed. In this embodiment, the variable value acquisition step is realized by step S110, and the variable value storage step is realized by step S170.

<1.4 Inspection formula creation support processing>
Next, the procedure of the inspection formula creation support process in this embodiment will be described. FIG. 5 is a flowchart showing a schematic procedure of the test formula creation support process. In step S <b> 20, an inspection type input acceptance process is performed in the client 3. In the check-type input acceptance process, a new check-type K is input by the user, and the check-type K is transmitted from the client 3 to the monitoring server 2. In step S <b> 30, graph generation data generation processing is performed in the monitoring server 2. In the graph generation data generation process, a past value (past parameter value PB) for a parameter included in the check formula K is acquired, and the check formula K is executed using the past parameter value PB. Graph creation data GD is generated to show the validity of the graph and allow the user to judge. In step S40, a result display process is performed in the client 3. In the result display process, a graph of the result of executing the inspection formula K using the past parameter value PB is displayed. Hereinafter, detailed procedures of the check-type input acceptance process, the graph creation data generation process, and the result display process will be described.

<1.4.1 Inspection type input acceptance processing>
FIG. 6 is a flowchart showing the procedure of the inspection type input acceptance process. In step S210, the inspection formula K is input by the user. The inspection formula K is input using, for example, a dialog 70 shown in FIG. 7 (hereinafter referred to as “inspection formula input dialog”). The inspection formula input dialog 70 includes a text box 71 (hereinafter referred to as “inspection formula input text box”) 71 for the user to input the inspection formula K, and an inspection formula input to the inspection formula input text box 71. A button for saving K (hereinafter referred to as “save button”) 72, a button for instructing execution of the check equation K using the past parameter value PB (hereinafter referred to as “calculation button”) 73, , An area (hereinafter referred to as “calculation result display area”) 74 for displaying the execution result (calculation result) of the check expression K is included.

  The user can use various parameter names (hereinafter referred to as “parameter names”), constants, operators (operation symbols), parenthesis symbols for determining the priority of operations, and the like in the check expression K. FIG. 8 is a diagram illustrating an example of operators used in the check expression K. As shown in FIG. 8, operators and the like used in the check expression K include operators (operation symbols) for performing four arithmetic operations, logical operations, and comparison operations, and the above parenthesis symbols.

  In step S220, the test formula K is transmitted from the test formula input unit 32 to the communication control unit 31. Specifically, when the calculation button 73 of the test formula input dialog 70 is pressed by the user, the test formula K input to the test formula input dialog 70 as the test formula input unit 32 is transmitted to the communication control unit 31. Is done. Thereafter, in step S230, the inspection formula K is transmitted from the communication control unit 31 to the second communication control unit 25 of the monitoring server 2. When the above steps are completed, the process proceeds to the process on the monitoring server 2 side (step S30 in FIG. 5), and the client 3 enters a state of waiting for transmission of the graph creation data GD from the monitoring server 2.

  In the present embodiment, the inspection type input step is realized by step S210.

<1.4.2 Graph generation data generation process>
FIG. 9 is a flowchart showing a procedure of graph creation data generation processing. In step S310, the second communication control unit 25 receives the test formula K sent from the communication control unit 31 of the client 3. In step S320, the test formula K is transmitted from the second communication control unit 25 to the test formula analysis unit 26.

In step S330, the check expression analysis unit 26 forms a tree structure of the check expression K. This tree structuring will be described in detail below. Here, it is assumed that the following equation (1) is given as the check equation K. A, B, C, and D are parameter names.
((A + B) * (C + D)) / 4 <20 (1)

  First, parameter names, constants, and operators constituting the check expression K are decomposed into nodes as shown in FIG. In FIG. 10, circles (circles) indicate nodes. In other words, parameter names, constants, and operators are nodes, but parentheses indicating priority are not nodes.

  As shown in FIG. 10, after the check expression K is decomposed into nodes, tree structuring is performed for each of the three nodes while considering the priority of the operation by the operator and the priority of the operation by the bracket symbol. For example, paying attention to the “A + B” portion of the above equation (1), there are three nodes as shown in FIG. By tree structuring, the operator of these three nodes is a parent node, and the left item and the right item are child nodes. As a result, the three nodes shown in FIG. 11A have a tree structure as shown in FIG. In this way, a tree structure in a binary tree format is generated for every three nodes. By performing the tree structuring for each of the three nodes as described above on the entire check expression K, the check expression K shown in the above expression (1) is formed into a tree structure as shown in FIG. . When tree structuring is performed for every three nodes, parameter names and constants do not become parent nodes. An operator can be a parent node or a child node.

  After completion of the tree structure of the check equation K, in step S340, the check equation analyzer 26 acquires the past parameter value PB. Specifically, the parameter history management unit 23 acquires the past parameter value PB for the parameter included in the inspection formula K from the parameter history database 24. Then, the past parameter value PB is transmitted from the parameter history management unit 23 to the inspection formula analysis unit 26. As to what period past parameter value PB is acquired by the inspection formula analysis unit 26, the past parameter value PB for all periods stored in the parameter history database 24 may be acquired. Only the past parameter value PB for a predetermined period (for example, the latest three months) may be acquired.

  After the acquisition of the past parameter value PB, in step S350, the calculation result (calculation result) is calculated for the operator node among the nodes after the tree structure of the check expression K. This will be described with reference to FIG. In FIG. 13, nodes N1 to N11 are assigned to the respective nodes, nodes for which calculation results are calculated are indicated by solid circles (circles), and nodes for which calculation results are not calculated are dotted circles ( (Circled). For the parameter name nodes N1 to N4, the past parameter value PB acquired in step S340 may be substituted, so that the calculation result is not calculated. In addition, for the constant nodes N8 and N10, the constant may be used as it is as a numerical value, so that the calculation result is not calculated. For the operator nodes N5 to N7, N9, and N11, the calculation result as the parent node is calculated using the value (past parameter value PB, constant) of each child node or the calculation result. For example, for the node N5, the sum of the past parameter value for the parameter “A” and the past parameter value for the parameter “B” is calculated as the calculation result. For example, for the node N7, the product of the operation result of the node N5 and the operation result of the node N6 is calculated as the operation result. Further, for example, for the node N11, a comparison result between the calculation result of the node N9 and the constant “20” is calculated as the calculation result.

  After the calculation results for the nodes after tree structuring are calculated as described above, in step S360, the test formula analysis unit 26 generates the graph creation data GD. Specifically, the inspection formula analysis unit 26 collects the past parameter value PB acquired in step S340 and the calculation result calculated in step S350 as the graph creation data GD. As will be described later, the client 3 creates a time-series graph using the graph creation data GD.

  In step S370, the above-described graph creation data GD is transmitted from the inspection formula analysis unit 26 to the second communication control unit 25. Thereafter, in step S380, the graph creation data GD is transmitted from the second communication control unit 25 to the communication control unit 31 of the client 3. When the above steps are completed, the process proceeds to the process on the client 3 side (step S40 in FIG. 5).

  In this embodiment, the parent-child relationship acquisition step is realized by step S330, the variable value extraction step is realized by step S340, and the node value acquisition step is realized by step S350.

<1.4.3 Result Display Processing>
FIG. 14 is a flowchart showing the procedure of the result display process. In step S410, the communication control unit 31 receives the graph creation data GD transmitted from the second communication control unit 25 of the monitoring server 2. In step S420, the graph creation data GD is transmitted from the communication control unit 31 to the parameter graph display unit 33.

  In step S430, the parameter graph display unit 33 displays the execution result of the inspection formula as a graph. Specifically, in the inspection formula input dialog 70, a graph as shown in FIG. 15 is displayed in the calculation result display area 74 as the parameter graph display unit 33. FIG. 15 shows a state when the user gives an instruction to display a graph for the calculation result “A + B”. As to what period of graph display is performed, graph display of the entire period from the oldest point in time when the past parameter value PB is stored in the parameter history database 24 to the present time may be performed. A graph display for a given period (for example, the last three months) may be performed.

  FIG. 16 is a diagram for describing a screen displayed in the calculation result display area 74 in step S430. In step S430, first, a screen as shown in FIG. 16A is displayed in the calculation result display area 74. FIG. Specifically, in the area indicated by reference numeral 743 in FIG. 16A, the name of the parameter (parameter name) for which the value (past parameter value PB) is acquired in step S340 and the calculation result is calculated in step S350. The calculated arithmetic expression is displayed in a list format. In addition, a “+” mark is displayed on the left side of the parameter name or the arithmetic expression, that is, in the area indicated by reference numeral 742 in FIG. Here, for example, when a “+” mark indicated by reference numeral 741 is clicked by the user, as shown in FIG. 16B, an arithmetic expression (“A + B”) corresponding to the clicked “+” mark. A time-series graph showing the calculation results is displayed. When the user clicks the “-” mark indicated by reference numeral 744 in the state shown in FIG. 16B, the calculation result display area 74 returns to the state shown in FIG. In the present embodiment, node value display switching means is realized by these “+” and “−” marks. The user can also display a plurality of graphs in the calculation result display area 74 by clicking a plurality of “+” marks.

  When the above steps are finished, the result display process is finished. When this result display process ends, the entire inspection formula creation support process (FIG. 5) ends. Note that the user can repeatedly execute the above-described inspection formula creation support process any number of times.

  In the present embodiment, the node value display step is realized by step S430.

<1.5 Effect>
As described above, according to the present embodiment, the test formula K input to the test formula input unit 32 of the client 3 is sent to the monitoring server 2. Then, in the monitoring server 2, the inspection formula K is executed using the parameter value PB at each past time point, and graph creation data GD for displaying the execution result in a graph is generated. The graph creation data GD is sent from the monitoring server 2 to the client 3, and the parameter graph display unit 33 of the client 3 displays the execution result of the check expression as a graph. For this reason, the user can confirm the result when the newly created inspection formula K is applied in a pseudo manner to the inspection of the device 4 at each past time point by a graph. For example, since the result of substituting the parameter value when the apparatus 4 has become abnormal in the past into the newly created inspection formula K is displayed in a graph, the user can correctly detect the abnormality by the newly created inspection formula K. It can be confirmed. Thereby, the user can easily determine the validity of the newly created inspection formula K.

Here, a specific example will be described. For example, it is assumed that a description as shown in the following equation (3) is erroneously made when the user tries to create the check equation K shown in the following equation (2). A, B, C, and D are parameter names.
((A−B)> = 100) && ((C * D) <= 20) (2)
((A−B)> = 100) && ((C−D) <= 20) (3)
For such errors, the expression itself does not have a syntactical error, so the user is often unaware of the error. Here, if the value of each parameter at a certain time is “A = 200, B = 50, C = 120, D = 110”, the execution result of the above equation (2) is “false”. On the other hand, the execution result of the above equation (3) is “true”. That is, it is determined that the apparatus 4 is operating normally despite the abnormal operating status. However, according to the present embodiment, the result of substituting the value of each parameter when an abnormality has occurred in the past into the check equation K is displayed as a graph. For this reason, the user can recognize that the abnormality of the apparatus 4 at the certain time is not detected in the newly created inspection formula K.

  In addition, the result of the graph is displayed for each node when the check expression K is tree-structured. For this reason, the user can relatively easily determine which part of the check equation K has an error. In the above example, the calculation result on the right side of “&&” is “true” even though it should be “false”, so the user can recognize that there is an error in this part.

  As described above, since the user can determine the validity of the newly created inspection formula K based on the past data, it is easier for the user to create the inspection formula K than before. Therefore, the burden on the user for creating the inspection formula K is reduced, and the work efficiency can be improved. Further, the monitoring of the semiconductor manufacturing apparatus 4 is suppressed from being performed using the erroneous inspection formula K. For this reason, errors relating to the determination of the operating status of the device 4 are reduced.

<2. Second Embodiment>
Next, a second embodiment of the present invention will be described. Note that the schematic configuration and hardware configuration of the entire inspection formula creation support system in the present embodiment are the same as those in the first embodiment, and a description thereof will be omitted.

<2.1 Functional configuration of test formula creation support system>
FIG. 17 is a functional block diagram of the inspection formula creation support system in the present embodiment. The monitoring server 2 includes a first communication control unit 21, a parameter monitoring unit 22, a parameter history management unit 23, a parameter history database 24, and a second communication control unit 25. The client 3 includes a communication control unit 31, an inspection formula input unit 32, a parameter graph display unit 33, and an inspection formula analysis unit 34. The semiconductor manufacturing apparatus 4 includes a communication control unit 41. As described above, in this embodiment, the client 3 is provided with the inspection type analysis unit provided in the monitoring server 2 in the first embodiment. Hereinafter, the operation of each component in the monitoring server 2, the client 3, and the semiconductor manufacturing apparatus 4 will be described.

<2.1.1 Operations of monitoring server components>
Since the first communication control unit 21, the parameter monitoring unit 22, and the parameter history database 24 are the same as those in the first embodiment, description thereof will be omitted. The parameter history management unit 23 receives the current parameter value PA given from the first communication control unit 21 and stores the current parameter value PA in the parameter history database 24. Further, the parameter history management unit 23 reads the parameter value stored in the parameter history database 24 as the past parameter value PB, and gives the past parameter value PB to the second communication control unit 25.

  The second communication control unit 25 functions for data communication between the monitoring server 2 and the client 3. Specifically, the second communication control unit 25 receives the newly created check formula K and the transmission request signal S of the past parameter value PB from the communication control unit 31 of the client 3. Further, the second communication control unit 25 receives the test formula K newly created and applied to the test of the device 4 from the communication control unit 31 of the client 3, and sends the test formula K to the parameter monitoring unit 22. give. Further, the second communication control unit 25 receives the past parameter value PB given from the parameter history management unit 23 and transmits the past parameter value PB to the communication control unit 31 of the client 3. Furthermore, the second communication control unit 25 receives the abnormality notification AL given from the parameter monitoring unit 22 and transmits the abnormality notification AL to the communication control unit 31 of the client 3.

  In the present embodiment, a variable value acquisition unit is realized by the first communication control unit 21, a variable value holding unit is realized by the parameter history database 24, and a variable value extraction unit is realized by the parameter history management unit 23. Yes.

<2.1.2 Operations of client components>
The communication control unit 31 functions for data communication between the monitoring server 2 and the client 3. Specifically, the communication control unit 31 transmits the transmission request signal S of the past parameter value PB and the test formula K given from the test formula analysis unit 34 to the second communication control unit 25 of the monitoring server 2. In addition, the communication control unit 31 receives the past parameter value PB sent from the second communication control unit 25 of the monitoring server 2 and gives the past parameter value PB to the inspection formula analysis unit 34. Furthermore, the communication control unit 31 receives the abnormality notification AL sent from the second communication control unit 25 of the monitoring server 2 and causes a predetermined display (not shown) to display that the operation status of the device 4 is abnormal. .

  The inspection formula input unit 32 receives an input of a new inspection formula K by the user. Then, the test formula input unit 32 gives the test formula K input by the user to the test formula analysis unit 34. The parameter graph display unit 33 receives the graph creation data GD given from the inspection formula analysis unit 34 and displays a graph based on the graph creation data GD on the display.

  The test formula analysis unit 34 receives the test formula K given from the test formula input unit 32 and the past parameter value PB given from the communication control unit 31, and generates graph creation data GD. Then, the inspection formula analysis unit 26 provides the graph creation data GD to the parameter graph display unit 33.

  In the present embodiment, a check expression input unit is realized by the check expression input unit 32, and a node value display unit is realized by the parameter graph display unit 33. In addition, a parent-child relationship acquisition unit and a node value acquisition unit are realized by the inspection formula analysis unit 34.

<2.1.3 Operations of Components of Semiconductor Manufacturing Equipment>
The communication control unit 41 uses the values of various parameters (for example, data of IO devices and analog devices, data on the device controller) acquired in real time in the semiconductor manufacturing apparatus 4 as the current parameter value PA. 1 is transmitted to the communication control unit 21.

<2.2 Inspection formula creation support processing>
Next, the procedure of the inspection formula creation support process in this embodiment will be described. Since the procedure of the apparatus inspection process is the same as that in the first embodiment, the description thereof is omitted.

  FIG. 18 is a flowchart showing a schematic procedure of the inspection formula creation support process in the present embodiment. In step S50, the client 3 performs an inspection type input acceptance process. In the test formula input acceptance process, a new test formula K is input by the user, and a transmission request for the past parameter value PB based on the test formula K is made to the monitoring server 2. In step S60, a past parameter value acquisition process is performed in the monitoring server 2. In the past parameter value acquisition process, a past value (past parameter value PB) for a parameter included in the inspection formula K is acquired, and the past parameter value PB is transmitted from the monitoring server 2 to the client 3. In step S <b> 70, graph creation / result display processing is performed in the client 3. In the graph creation / result display processing, the graph creation data GD is generated by executing the inspection formula K using the past parameter value PB, and the graph display based on the graph creation data GD is performed. Hereinafter, detailed procedures of the inspection formula input acceptance process, the past parameter value acquisition process, and the graph creation / result display process will be described.

<2.2.1 Inspection type input acceptance processing>
FIG. 19 is a flowchart showing the procedure of the inspection type input acceptance process. In step S510, the inspection formula K is input by the user as in the first embodiment. In step S520, the test formula K is transmitted from the test formula input unit 32 to the test formula analysis unit 34. In step S530, the check expression analysis unit 34 performs a tree structure of the check expression K. Note that a specific method for tree structuring is the same as that in the first embodiment, and a description thereof will be omitted. In step S540, a transmission request for the past parameter value PB to the monitoring server 2 is made. Specifically, the communication control unit 31 receives the test formula K from the test formula analysis unit 34. Then, the communication control unit 31 transmits the inspection formula K and the transmission request signal S for the past parameter value PB to the second communication control unit 25 of the monitoring server 2. When the above steps are completed, the process proceeds to the process on the monitoring server 2 side (step S60 in FIG. 18), and the client 3 enters a state of waiting for transmission of the past parameter value PB from the monitoring server 2. In the present embodiment, an inspection formula input step is realized by step S510, and a parent-child relationship acquisition step is realized by step S530.

<2.2.2 Past parameter value acquisition processing>
FIG. 20 is a flowchart illustrating a procedure of past parameter value acquisition processing. In step S610, the second communication control unit 25 receives the inspection formula K and the transmission request signal S of the past parameter value PB sent from the communication control unit 31 of the client 3. In step S620, the second communication control unit 25 acquires the past parameter value PB. Specifically, the second communication control unit 25 acquires the past parameter value PB from the parameter history database 24 via the parameter history management unit 23 based on the inspection formula K sent from the communication control unit 31 of the client 3. To do. In step S630, the past parameter value PB is transmitted from the second communication control unit 25 to the communication control unit 31 of the client 3. When the above steps are completed, the process proceeds to the process on the client 3 side (step S70 in FIG. 18). In the present embodiment, the variable value extraction step is realized by step S620.

<2.2.3 Graph creation and result display processing>
FIG. 21 is a flowchart illustrating a procedure of graph creation / result display processing. In step S710, the communication control unit 31 receives the past parameter value PB transmitted from the second communication control unit 25 of the monitoring server 2. In step S720, the past parameter value PB is transmitted from the communication control unit 31 to the inspection formula analysis unit 34. In step S730, calculation results (calculation results) are calculated for the operator nodes among the nodes after the tree structure of the check expression K. A specific method for calculating the calculation result is the same as that in the first embodiment, and a description thereof will be omitted.

  In step S740, the test formula analysis unit 34 generates graph creation data GD. In step S750, the graph creation data GD is transmitted from the inspection formula analysis unit 34 to the parameter graph display unit 33. In step S760, the parameter graph display unit 33 displays the execution result of the inspection formula K as a graph. The specific method for displaying the graph is the same as that in the first embodiment, and a description thereof will be omitted.

  When the above steps are completed, the graph creation / result display process ends. When this graph creation / result display processing is completed, the entire inspection formula creation support processing (FIG. 18) is completed. In the present embodiment, the node value acquisition step is realized by step S730, and the node value display step is realized by step S760.

<2.3 Effects>
Also in the present embodiment, as in the first embodiment, the user can determine the validity of the newly created inspection formula K based on past data. This makes it easier for the user to create the inspection formula K than in the past. As a result, the burden on the user for creating the inspection formula K is reduced, and work efficiency can be improved. In addition, monitoring of the semiconductor manufacturing apparatus 4 using the erroneous inspection formula K is suppressed, and errors related to the determination of the operation status of the apparatus 4 are reduced.

  Moreover, in this embodiment, the burden of the monitoring server 2 can be reduced by providing an inspection type | mold analysis part in the client 3 side. Furthermore, in the present embodiment, since the past parameter value PB is transmitted from the monitoring server 2 to the client 3 instead of the graph creation data GD, the data transfer amount is reduced compared to the first embodiment, and the network Can reduce the load.

<3. Other>
In each of the above embodiments, the processing is distributed between the monitoring server 2 and the client 3, but the present invention is not limited to this. For example, in FIG. 3, the inspection formula input unit 32 and the parameter graph display unit 33 may be provided in the monitoring server 2, and the inspection formula creation support system may be realized by the monitoring server 2 alone.

  Moreover, in each said embodiment, although the execution result of the test | inspection formula K is displayed as a graph, this invention is not limited to this. For example, the execution result of the inspection formula K may be displayed as a simple numerical value.

  Furthermore, in each said embodiment, although the example which applied the test formula preparation assistance system to creation of the test formula for the test | inspection of the semiconductor manufacturing apparatus 4 was given and demonstrated, this invention is not limited to this. This test formula creation support system can also be applied to the creation of test formulas for testing equipment other than semiconductor manufacturing equipment.

It is a schematic structure figure of the whole inspection type creation support system concerning a 1st embodiment of the present invention. In the said embodiment, it is a block diagram which shows the hardware constitutions of a monitoring server. It is a functional block diagram of the test type | formula creation assistance system in the said embodiment. 5 is a flowchart illustrating a procedure of apparatus inspection processing in the embodiment. In the said embodiment, it is a flowchart which shows the schematic procedure of a test | inspection formula creation assistance process. In the said embodiment, it is a flowchart which shows the procedure of a test | inspection type input reception process. In the said embodiment, it is a figure which shows a test | inspection type | formula input dialog. In the said embodiment, it is a figure which shows an example of the operator etc. which are used by a check type | formula. In the said embodiment, it is a flowchart which shows the procedure of the data production | generation process for graph creation. In the said embodiment, it is a figure for demonstrating the tree structure of a check type | formula. In the said embodiment, it is a figure for demonstrating the tree structure of a check type | formula. In the said embodiment, it is a figure for demonstrating the tree structure of a check type | formula. In the said embodiment, it is a figure for demonstrating calculation of the calculation result about the node of an operator of the nodes after tree structure of a check type | formula. In the said embodiment, it is a flowchart which shows the procedure of a result display process. In the said embodiment, it is a figure which shows an example of the test formula input dialog after execution of a test formula. In the said embodiment, it is a figure for demonstrating the screen displayed on a calculation result display area after execution of a check type | formula. It is a functional block diagram of the test type | formula creation assistance system in the 2nd Embodiment of this invention. In the said embodiment, it is a flowchart which shows the schematic procedure of a test | inspection formula creation assistance process. In the said embodiment, it is a flowchart which shows the procedure of a test | inspection type input reception process. In the said embodiment, it is a flowchart which shows the procedure of the past parameter value acquisition process. 5 is a flowchart illustrating a procedure of graph creation / result display processing in the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 ... Monitoring server 3 ... Client 4 ... Semiconductor manufacturing apparatus 21 ... 1st communication control part 22 ... Parameter monitoring part 23 ... Parameter history management part 24 ... Parameter history database 25 ... 2nd communication control part 26, 34 ... Inspection type analysis part DESCRIPTION OF SYMBOLS 31 ... (Client's) communication control part 32 ... Inspection type input part 33 ... Parameter graph display part 70 ... Inspection type input dialog 71 ... Text box for inspection type input 74 ... Calculation result display area

Claims (14)

Support for creating a check expression that supports the creation of a check expression that can include constants, variables, operators, and parentheses that indicate the priority of operations as a component and that is used to check the state of a given device A system,
Variable value acquisition means for acquiring values of variables that can be included in the inspection formula from the predetermined device;
A variable value holding unit for holding the value acquired by the variable value acquiring means as a variable value;
An inspection expression input means for accepting an input of a new inspection expression which is an inspection expression given from the outside;
Variable value extracting means for extracting the value of the variable included in the new check expression from the variable value holding unit;
A parent-child relationship acquisition means for acquiring a parent-child relationship between the nodes based on the parenthesis symbol and a priority of operation by the operator among the components included in the new check expression as a node. When,
Node value acquisition means for acquiring a result obtained by substituting the variable value extracted by the variable value extraction means into the new check expression as a node value for each node based on a parent-child relationship between the nodes;
And a node value display means for displaying the node value for each of the nodes.   The parent-child relationship acquisition means is based on the new check expression, in a binary tree format in which an operator of the constituent elements included in the new check expression is a parent node and the left and right constituent elements of the operator are child nodes. The inspection formula creation support system according to claim 1, wherein a parent-child relationship between the nodes is acquired by generating a tree structure.   3. The inspection formula creation support system according to claim 1, wherein the node value display means displays the node value for each node in a graph.   4. The inspection formula creation support system according to claim 3, wherein the graph displayed by the node value display means is a graph in which the node values for each node are plotted in time series.   The inspection according to any one of claims 1 to 4, wherein the node value display means includes node value display switching means for switching display / non-display of the node value for each of the nodes. Formula creation support system.   6. The inspection formula creation support system according to claim 1, wherein the variable value acquisition unit acquires values of variables included in the verification formula in real time.   The inspection formula creation support system according to claim 1, wherein the predetermined apparatus is a semiconductor manufacturing apparatus.   It is constituted by a server including at least the variable value acquisition unit, the variable value holding unit, and the variable value extraction unit, and a client including at least the check expression input unit and the node value display unit. The inspection formula creation support system according to any one of claims 1 to 7. Support for creating a check expression that supports the creation of a check expression that can include constants, variables, operators, and parentheses that indicate the priority of operations as a component and that is used to check the state of a given device A method,
A variable value acquisition step of acquiring a value of a variable that can be included in the inspection formula from the predetermined device;
A variable value storing step of storing the value acquired in the variable value acquiring step as a variable value in a predetermined variable value holding unit;
An inspection expression input step for accepting input of a new inspection expression which is an inspection expression given from the outside;
A variable value extracting step of extracting the value of the variable included in the new check expression from the variable value holding unit;
A parent-child relationship acquisition step of acquiring a parent-child relationship between the nodes based on the parenthesis symbol and a priority of an operation by the operator, with a component other than the parenthesis symbol among the components included in the new check expression When,
A node value acquisition step of acquiring a result obtained by substituting the variable value extracted in the variable value extraction step as the node value for each node based on a parent-child relationship between the nodes;
And a node value display step for displaying the node value for each of the nodes.   In the parent-child relationship acquisition step, based on the new check expression, a binary tree format in which an operator among the constituent elements included in the new check expression is a parent node and left and right constituent elements of the operator are child nodes. The check expression creation support method according to claim 9, wherein a parent-child relationship between the nodes is acquired by generating a tree structure.   11. The inspection formula creation support method according to claim 9 or 10, wherein, in the node value display step, the node value for each of the nodes is displayed in a graph. Support for creating a check expression that supports the creation of a check expression that can include constants, variables, operators, and parentheses that indicate the priority of operations as a component and that is used to check the state of a given device A program,
A variable value acquisition step of acquiring a value of a variable that can be included in the inspection formula from the predetermined device;
A variable value storing step of storing the value acquired in the variable value acquiring step as a variable value in a predetermined variable value holding unit;
An inspection expression input step for accepting input of a new inspection expression which is an inspection expression given from the outside;
A variable value extracting step of extracting the value of the variable included in the new check expression from the variable value holding unit;
A parent-child relationship acquisition step of acquiring a parent-child relationship between the nodes based on the parenthesis symbol and a priority of an operation by the operator, with a component other than the parenthesis symbol among the components included in the new check expression When,
A node value acquisition step of acquiring a result obtained by substituting the variable value extracted in the variable value extraction step as the node value for each node based on a parent-child relationship between the nodes;
A node value display step for displaying the node value for each node;
An inspection formula creation support program, characterized in that a computer is executed.   In the parent-child relationship acquisition step, based on the new check expression, a binary tree format in which an operator among the constituent elements included in the new check expression is a parent node and left and right constituent elements of the operator are child nodes. 13. The inspection formula creation support program according to claim 12, wherein a parent-child relationship between the nodes is acquired by generating a tree structure.   14. The inspection formula creation support program according to claim 12 or 13, wherein in the node value display step, the node value for each node is displayed in a graph.

Images