JP5217638B2 - Sliding member and manufacturing method thereof, camera body, interchangeable lens for camera - Google Patents

Sliding member and manufacturing method thereof, camera body, interchangeable lens for camera Download PDF

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JP5217638B2
JP5217638B2 JP2008142305A JP2008142305A JP5217638B2 JP 5217638 B2 JP5217638 B2 JP 5217638B2 JP 2008142305 A JP2008142305 A JP 2008142305A JP 2008142305 A JP2008142305 A JP 2008142305A JP 5217638 B2 JP5217638 B2 JP 5217638B2
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film
coating
sliding member
coating film
layer
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JP2009287099A (en
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優介 瀧
雅之 金室
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Nikon Corp
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この発明は、他の部材の被接面に当接して摺動する摺接部を有する摺動部材と、その製造方法、及びカメラボディ、カメラ用交換レンズに関する。 The present invention relates to a sliding member having a sliding contact portion that slides in contact with a contact surface of another member, a manufacturing method thereof , a camera body, and an interchangeable lens for a camera .

従来より、被接面に当接して繰り返し摺動されるような摺動部材において、摺接部の表面に被覆膜を形成したものが多数存在する。このような部材としては、例えば、バヨネットと称されるカメラボディのレンズ取付金具やカメラ用交換レンズのボディ取付金具が挙げられる。バヨネットは、基材が真鍮からなり、その表面に金属クロムからなる被覆膜が形成されている。   2. Description of the Related Art Conventionally, there are many sliding members in which a coating film is formed on the surface of a sliding contact portion in such a sliding member that repeatedly slides in contact with a contact surface. Examples of such a member include a camera body lens mounting bracket called a bayonet and a camera mounting lens body mounting bracket. The bayonet has a base material made of brass, and a coating film made of metallic chromium is formed on the surface thereof.

バヨネットにおいて、金属クロムが選択される理由は、反射率が高くて光沢が美しい金属であり、比較的硬質であり、レアメタルではないため安価であることなどによる。金属クロムの代わりに、例えば、硬質ではあっても反射率の低い素材を用いるとすれば、所望の外観品質が確保できない。反射率が高いものの軟質な金属を用いるとすれば、僅かな回数のレンズ交換で傷が生じて外観品質が低下し易く、更に、摩耗によりレンズが固定できなくなることも起こる。   The reason why metal chrome is selected in the bayonet is that it is a metal with high reflectivity and beautiful luster, is relatively hard, is not a rare metal, and is inexpensive. For example, if a material that is hard but has low reflectivity is used instead of metallic chromium, desired appearance quality cannot be ensured. If a soft metal with a high reflectance is used, scratches are easily caused by exchanging the lens a few times, the appearance quality is liable to deteriorate, and the lens cannot be fixed due to wear.

ところが、金属クロムからなる被覆膜を形成するために六価クロム電解メッキ法が利用されているが、六価クロムはRoHS指令にもリストされているなど、環境汚染防止の観点から廃止が望まれている。   However, the hexavalent chromium electroplating method is used to form a coating film made of metallic chromium, but hexavalent chromium is also listed in the RoHS directive and is expected to be abolished from the viewpoint of preventing environmental pollution. It is rare.

そのため、下記特許文献1では、六価クロムを使用せず、ニッケル系鍍金層、三価クロム層をこの順で積層することで、六価クロム層に匹敵する程度の硬度や耐摩耗性を実現している。
特開2006−225686号公報
Therefore, in Patent Document 1 below, hexavalent chromium is not used, and a nickel-based plating layer and a trivalent chromium layer are laminated in this order to achieve hardness and wear resistance comparable to the hexavalent chromium layer. doing.
JP 2006-225686A

しかしながら、六価クロム層を用いた従来のバヨネットでも、一般ユーザが常識的な回数内でレンズ交換を繰り返すことによって、摩耗したり、傷が生じるなどの損傷を発生することもあり、硬度や耐久性の更なる向上が求められていた。   However, even conventional bayonets that use a hexavalent chromium layer may cause damage such as wear and scratches when the general user repeats lens replacement within a common number of times. There was a need for further improvement of sex.

そこで、この発明は、摺接部の耐摩耗性を向上し易い摺動部材を提供することを課題とし、そのような摺動部材を製造し易い製造方法を提供することを他の課題とし、そのような摺動部材をレンズ取付金具として備えたカメラボディを提供することをさらに他の課題とし、そのような摺動部材をボディ取付金具として備えたカメラ用交換レンズを提供することをさらに他の課題とする。 Accordingly, the present invention is an object to provide a easy sliding member to improve the wear resistance of the sliding contact portion, and the other object is to provide a easy manufacturing method to manufacture such a sliding member It is still another object to provide a camera body provided with such a sliding member as a lens mounting bracket, and further provide an interchangeable lens for a camera provided with such a sliding member as a body mounting bracket. Let other issues .

上記課題を解決するこの発明の摺動部材の第1の態様は、他の部材に当接して摺動する摺接部を備え、該摺接部の表面に、相対的に硬度の高い被覆層と硬度の低い被覆層が界面を有して交互に積層された被覆膜が形成された摺動部材において、前記被覆膜は、CrN(4.5≧X≧2.1)の組成を有する前記被覆層が、隣接する各被覆層のXの値が異なるように積層されたものであり、前記被覆膜は、前記各被覆層を単独で前記被覆膜の膜厚に形成した場合に比べ、摩耗速度が小さいものであることを特徴とする。 A first aspect of the sliding member of the present invention that solves the above-described problem includes a sliding contact portion that slides in contact with another member, and a coating layer having a relatively high hardness on the surface of the sliding contact portion. and the sliding member and a low hardness coat layer coating film which are alternately stacked with a surface is formed, the coating film, Cr X N (4.5 ≧ X ≧ 2.1) the coating layer, which value of X in each adjacent cover layer are stacked differently, the coating film has a film thickness of the coating layer using the respective coating layers alone to have a composition of Compared with the case where it forms in, it is characterized by a low wear rate.

また、この発明の摺動部材の第2の態様は、他の部材に当接して摺動する摺接部を備え、該摺接部の表面に、相対的に硬度の高い被覆層と硬度の低い被覆層が界面を有して交互に積層された被覆膜が形成された摺動部材において、前記被覆膜は、CrN(4.5≧X≧2.1)の組成を有する前記被覆層が、隣接する各被覆層のXの値が異なるように積層されたものであり、前記被覆膜は、前記各被覆層を単独で前記被覆膜の膜厚に形成した場合に比べ、硬度が高いものであることを特徴とする。 Further, the second aspect of the sliding member of the present invention comprises a sliding contact portion that slides in contact with another member, and has a relatively hard coating layer and a hardness on the surface of the sliding contact portion. In the sliding member in which the coating film formed by alternately laminating the low coating layer with the interface is formed, the coating film has a composition of Cr X N ( 4.5 ≧ X ≧ 2.1 ). the coating layer having registered, which value of X in each adjacent cover layer are stacked differently, the coating film was formed above the thickness of the coating film of each coating layer alone Compared to the case, the hardness is high.

更に、この発明の被覆膜の製造方法は、窒素原子又は窒素イオンの供給雰囲気下で、クロムをターゲットとして気相成膜法により成膜することで前記被覆層を積層して上記の摺動部材を製造する方法であり、前記ターゲットを共通に用い、前記被覆層毎に前記窒素原子又は窒素イオンの供給雰囲気を変化させることで、前記各被覆層のクロムと窒素との比を調整することを特徴とする。
また、この発明のカメラボディは、上記の摺動部材を備えていることを特徴とする。
更に、この発明のカメラ用交換レンズは、上記の摺動部材を備えていることを特徴とする。
Furthermore, the manufacturing method of the coating film according to the present invention includes the above-described sliding by laminating the coating layer by vapor deposition using chromium as a target in a supply atmosphere of nitrogen atoms or nitrogen ions. A method of manufacturing a member, wherein the ratio of chromium and nitrogen in each coating layer is adjusted by changing the supply atmosphere of nitrogen atoms or nitrogen ions for each coating layer using the target in common. It is characterized by.
A camera body according to the present invention includes the above-described sliding member.
Furthermore, an interchangeable lens for a camera according to the present invention includes the above-described sliding member.

この発明の摺動部材によれば、他の部材に当接して摺動する摺接部の表面に、相対的に硬度の高い被覆層と硬度の低い被覆層が界面を有して交互に積層された被覆膜が形成されており、この被覆膜は、Cr N(4.5≧X≧2.1)の組成を有する被覆層が、隣接する各被覆層のXの値が異なるように積層されたものであり、各被覆層を単独で被覆膜の膜厚に形成した場合に比べ、摩耗速度が小さく、或いは、硬度が高いので、各被覆層では得られない耐摩耗性を実現することができ、被覆膜の耐摩耗性を向上させることが可能である。 According to the sliding member of the present invention, the surface of the sliding contact portion which slides in contact with the other member, alternating with relatively high hardness coat layer and the low coating hardness is a surface A laminated coating film is formed, and the coating film has a composition of Cr X N (4.5 ≧ X ≧ 2.1), and the value of X of each adjacent coating layer is It is laminated differently, and the wear rate is low or the hardness is high compared to the case where each coating layer is formed to the thickness of the coating film alone. The wear resistance of the coating film can be improved.

また、この発明の摺動部材の製造方法によれば、被覆膜を構成する複数の被覆層を所定の気相成膜法により成膜して積層するので、各被覆層をメッキ等に比べて薄く形成することが容易であり、各被覆層毎にクロムと窒素との比を異ならせることが容易である。その結果、被覆層の積層状態の選択の自由度を大きくでき、上述のような摺動部材を容易に製造し易い。
また、この発明のカメラボディによれば、上述した効果を奏する摺動部材をレンズ取付金具として備えたカメラボディを提供することができる。
更に、この発明のカメラ用交換レンズによれば、上述した効果を奏する摺動部材をボディ取付金具として備えたカメラ用交換レンズを提供することができる。
Also, according to the manufacturing method of the sliding member of the present invention, since the plurality of coating layers constituting the coating film are formed and laminated by a predetermined vapor deposition method, each coating layer is compared with plating or the like. It is easy to form a thin film, and it is easy to change the ratio of chromium and nitrogen for each coating layer. As a result, the degree of freedom in selecting the laminated state of the coating layer can be increased, and the sliding member as described above can be easily manufactured.
Further, according to the camera body of the present invention, it is possible to provide a camera body provided with a sliding member having the above-described effects as a lens mounting bracket.
Furthermore, according to the interchangeable lens for a camera of the present invention, it is possible to provide an interchangeable lens for a camera provided with a sliding member that exhibits the above-described effects as a body mounting bracket.

以下、この発明の実施の形態について、図1乃至図3を用いて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

まず、この発明において、摺接部及び被接部とは、互いに当接して摺動する部位であり、摺動する表面の形状は何ら限定されない。これらの摺接部及び被接部は、例えば、嵌合部、係合部、係止部、螺合部等のように互いに当接して一時的に摺動するような部位であってもよく、当接した状態で連続的に摺動されるような部位であってもよい。また、この発明において、摺動部材とは、そのような摺接部を備えた部材である。   First, in this invention, the slidable contact portion and the contacted portion are portions that come into contact with each other and slide, and the shape of the sliding surface is not limited at all. These sliding contact portions and contacted portions may be portions that abut against each other and temporarily slide, such as fitting portions, engaging portions, locking portions, screwing portions, and the like. Further, it may be a part that is continuously slid in a contacted state. Moreover, in this invention, a sliding member is a member provided with such a sliding contact part.

この実施の形態では、摺動部材として、図1及び図2(a)(b)に示すようなカメラボディ11のレンズ取付金具である雌バヨネット21と、カメラ用交換レンズ12のボディ取付金具である雄バヨネット22との例を用いて説明する。   In this embodiment, as a sliding member, a female bayonet 21 that is a lens mounting bracket of the camera body 11 and a body mounting bracket of the camera interchangeable lens 12 as shown in FIGS. This will be described using an example with a certain male bayonet 22.

この実施の形態のカメラボディ11及びカメラ用交換レンズ12は、着脱可能に構成され、カメラ用交換レンズ12の雄バヨネット22には爪部23が突出して設けられ、カメラボディ11の雌バヨネット21には爪部23が挿入される挿入部24と、爪部23が係止される係止部25とが設けられている。爪部23及び係止部25の一方又は双方には、弾性部材等を利用した係止機構が設けられているが、詳細な図示及び説明は省略されている。   The camera body 11 and the camera interchangeable lens 12 of this embodiment are configured to be detachable, and a male bayonet 22 of the camera interchangeable lens 12 is provided with a claw portion 23 projecting from the female bayonet 21 of the camera body 11. An insertion portion 24 into which the claw portion 23 is inserted and a locking portion 25 to which the claw portion 23 is locked are provided. Although one or both of the claw part 23 and the locking part 25 are provided with a locking mechanism using an elastic member or the like, detailed illustration and description are omitted.

カメラボディ11にカメラ用交換レンズ12を装着するには、雄バヨネット22の爪部23を雌バヨネット21の挿入部24に挿入して、雄バヨネット22の当接面26を雌バヨネット21の受け面27に当接させ、カメラボディ11に対してカメラ用交換レンズ12を回転させる。このとき、当接面26と受け面27とは互いに当接した状態で摺動する。その後、更に回転させて、雄バヨネット22の爪部23を雌バヨネット21の係止部25に係止させることで装着が完了する。このとき、爪部23の表面と係止部25の表面とは互いに当接した状態で摺動する。また、カメラボディ11からカメラ用交換レンズ12を離脱させるときは、これらを逆の順序で行う。そのため、このようなカメラボディ11の雌バヨネット21及びカメラ用交換レンズ12の雄バヨネット22は、カメラ用交換レンズ12を交換する度に、互いに当接した状態で摺動される。   In order to attach the camera interchangeable lens 12 to the camera body 11, the claw portion 23 of the male bayonet 22 is inserted into the insertion portion 24 of the female bayonet 21, and the contact surface 26 of the male bayonet 22 is received by the female bayonet 21. The camera interchangeable lens 12 is rotated with respect to the camera body 11. At this time, the contact surface 26 and the receiving surface 27 slide while being in contact with each other. Thereafter, the mounting is completed by further rotating and engaging the claw portion 23 of the male bayonet 22 with the engaging portion 25 of the female bayonet 21. At this time, the surface of the claw portion 23 and the surface of the locking portion 25 slide in contact with each other. Further, when the camera interchangeable lens 12 is detached from the camera body 11, these are performed in the reverse order. Therefore, the female bayonet 21 of the camera body 11 and the male bayonet 22 of the camera interchangeable lens 12 are slid in contact with each other each time the camera interchangeable lens 12 is replaced.

これらの雌バヨネット21及び雄バヨネット22では、図3に示すように、各バヨネット21、22の形状を有する基材30の表面に、所定の被覆膜40が形成されている。   In these female bayonet 21 and male bayonet 22, as shown in FIG. 3, a predetermined coating film 40 is formed on the surface of the base material 30 having the shape of each bayonet 21, 22.

基材30は、金属、樹脂、セラミックス等、摺動部材として必要な性質を有し、被覆膜40を十分な付着力で成膜可能な材料からなるものを適宜選択して使用できるが、通常、雌バヨネット21及び雄バヨネット22の場合、基材30は真鍮等の金属からなる。   The base material 30 has a property necessary as a sliding member, such as metal, resin, ceramics, etc., and can be appropriately selected and used from a material that can form the coating film 40 with sufficient adhesion force. Usually, in the case of the female bayonet 21 and the male bayonet 22, the base material 30 is made of a metal such as brass.

被覆膜40は、基材30の表面に十分な付着力で成膜された膜であり、複数の被覆層41、42・・・が積層された多層膜からなる。この被覆膜40では、隣接する被覆層41、42・・・間に界面が形成されていることが必要である。被覆層41、42・・・間の界面は、隣接する被覆層41、42・・・間の構造が不連続となる境界である。そのため、明確ではないが、後述する実施例から、被覆膜40の摩耗速度の低下や、被覆膜40の硬度の向上に寄与していることが推測できる。   The coating film 40 is a film formed on the surface of the base material 30 with a sufficient adhesive force, and is a multilayer film in which a plurality of coating layers 41, 42. In this coating film 40, it is necessary that an interface is formed between adjacent coating layers 41, 42. The interface between the coating layers 41, 42... Is a boundary where the structure between the adjacent coating layers 41, 42. Therefore, although not clear, it can be estimated from the examples described later that it contributes to a decrease in the wear rate of the coating film 40 and an improvement in the hardness of the coating film 40.

また、被覆層41、42・・・は、CrN(4.5≧X≧2.1)、好ましくは、Cr N(4.5≧X≧3.2)の組成を有している。そのため、クロムと窒素との比を調整することで所望の硬度に調整し易い。また、被覆層41、42・・・を構成する金属窒化物(クロム窒化物)が完全な金属結晶と完全な窒素化合物結晶の中間の構造をとり得るので、所望の硬度を維持しつつ金属の性質や外観を維持することができて、従来のクロムメッキ等と置換し易い。なお上記のクロム/窒素比は原子数比による。 Further, the coating layers 41, 42... Have a composition of Cr X N ( 4.5 ≧ X ≧ 2.1), preferably Cr X N (4.5 ≧ X ≧ 3.2 ). Yes. Therefore, it is easy to adjust to a desired hardness by adjusting the ratio of chromium and nitrogen. Further, since the metal nitride (chromium nitride) constituting the coating layers 41, 42,... Can take an intermediate structure between a complete metal crystal and a complete nitrogen compound crystal, the metal layer can be maintained while maintaining a desired hardness. It can maintain its properties and appearance and can be easily replaced with conventional chrome plating. The chromium / nitrogen ratio is based on the atomic ratio.

そして、被覆層41、42・・・のうち、隣接する各被覆層が、同一金属クロムの窒化物であって、クロムと窒素との比が異なる層からなる。同一金属の窒化物であれば、隣接する被覆層41、42・・・間の接合強度を確保することが容易となるOf the coating layers 41 and 42 ..., each coating layer adjacent to a nitride of the same metal chromium, ing from the ratio of chromium and nitrogen are different layers. If a nitride of the same metal, it is easy to secure the bonding strength between the adjacent coating layers 41, 42,.

また、複数の被覆層41、42・・・のうち、互いに隣接しない被覆層41、42・・・は同一材料により形成することも好ましい。積層数に対して使用する材料の種類を少なく抑え易いからである。また、隣接する層でなければ、各層間に界面を形成できるからである。   Moreover, it is also preferable that the coating layers 41, 42,... That are not adjacent to each other among the plurality of coating layers 41, 42,. It is because it is easy to suppress the kind of material used with respect to the number of laminations. Moreover, if it is not an adjacent layer, an interface can be formed between each layer.

各被覆層41、42・・・の厚さは、特に限定されないが、各被覆層41、42・・・の厚さを薄くすることで、被覆膜40の耐摩耗性や硬度を向上し易くできる場合には、各被覆層41、42・・・の厚さを、明確な界面を形成できる範囲で、薄く形成することも好ましく、例えば500nm以下としてもよい。   Although the thickness of each coating layer 41, 42 ... is not specifically limited, the wear resistance and hardness of the coating film 40 are improved by reducing the thickness of each coating layer 41, 42 .... If it can be easily performed, the thickness of each of the coating layers 41, 42... Is preferably thin as long as a clear interface can be formed, for example, 500 nm or less.

被覆層41、42・・・の積層数は、少なくとも3層以上で、摺動時に被覆膜40の十分な膜強度が確保できる範囲内で多く形成することができる。積層数を多くすると界面を多く形成できる。   The number of the coating layers 41, 42... Is at least 3 or more, and can be formed in a large amount within a range in which sufficient film strength of the coating film 40 can be secured during sliding. If the number of layers is increased, more interfaces can be formed.

このような被覆膜40において、耐摩耗性を向上するための一つの態様としては、界面を複数設けて複数の被覆層41、42・・・を積層することで、各被覆層41、42・・・をそれぞれ単独で被覆膜40の膜厚に形成した場合の摩耗速度より被覆膜40の摩耗速度を小さくする。摩耗速度は、例えばボールオンディスク法等の適宜な方法により、共通の条件で測定される値である。   In such a coating film 40, as one aspect for improving the wear resistance, a plurality of coating layers 41, 42,... The wear rate of the coating film 40 is made smaller than the wear rate when each is formed to the thickness of the coating film 40 alone. The wear rate is a value measured under common conditions by an appropriate method such as a ball-on-disk method.

ここでは、被覆膜40を構成するどの被覆層41、42・・・を単層で被覆膜40の膜厚に形成したとしても、到達できない程度に低い値にしている。このようなことが生じる理由は明確ではないが、次のような推測も可能である。即ち、極薄膜を界面を有して積層すると、膜厚方向に対して剪断力が働いた際、界面に沿って薄い層状に少しずつ膜が摩耗して行くようになる。薄い層状に膜が摩耗或いは剥離して行くことによって、一度に膜厚方向に深くえぐられることがなくなる。その結果として、同一膜厚で比較した場合に、単層膜よりも界面を有して積層された多層膜のほうが摩耗速度が遅くなると推測できる。   Here, even if any of the coating layers 41, 42,... Constituting the coating film 40 is formed as a single layer with the film thickness of the coating film 40, the value is set to a value that cannot be reached. The reason why this occurs is not clear, but the following estimation is also possible. That is, when an ultrathin film is laminated with an interface, when a shearing force is applied in the film thickness direction, the film gradually wears into a thin layer along the interface. When the film is worn or peeled into a thin layer, it is not deeply swept in the film thickness direction at once. As a result, when compared with the same film thickness, it can be estimated that the wear rate of the multilayer film laminated with an interface is slower than that of the single layer film.

また、被覆膜40の耐摩耗性を向上するための他の一つの態様としては、界面を複数設けて複数の被覆層41、42・・・を積層することで、各被覆層41、42・・・をそれぞれ単独で被覆膜40の膜厚に形成した場合の硬度よりも被覆膜40の硬度を高くする。硬度は、例えばナノインデンテーション法等の薄膜の硬度を測定するのに適した方法により、共通の条件で測定される値である。   Further, as another aspect for improving the wear resistance of the coating film 40, a plurality of coating layers 41, 42,... The hardness of the coating film 40 is made higher than the hardness in the case where each of the. The hardness is a value measured under common conditions by a method suitable for measuring the hardness of a thin film, such as a nanoindentation method.

ここでは、被覆膜40を構成するどの被覆層41、42・・・を単層で被覆膜40の膜厚に形成したとしても、到達できない程度の高い硬度にすることにより、被覆膜40の耐摩耗性を向上させている。   Here, even if any of the coating layers 41, 42,... Constituting the coating film 40 is formed as a single layer with a film thickness of the coating film 40, the coating film is made to have a high hardness that cannot be reached. 40 wear resistance is improved.

このような被覆膜40の耐摩耗性を向上するための2つの態様においては、例えば、材料、窒素濃度、膜厚、積層数等を調整して被覆層41、42・・・を積層することで、被覆膜40の摩耗速度や硬度をそのような特定範囲を実現する。   In the two modes for improving the wear resistance of the coating film 40, for example, the coating layers 41, 42,... Are stacked by adjusting the material, the nitrogen concentration, the film thickness, the number of stacked layers, and the like. Thus, the wear rate and hardness of the coating film 40 are realized in such a specific range.

また、これらの被覆膜40の耐摩耗性を向上するための2つの態様は少なくとも一方を具備すればよいが、好ましくは両方を具備することが好適である。   Moreover, the two aspects for improving the wear resistance of these coating films 40 may be provided with at least one, but preferably both are provided.

更に、これらの被覆膜40の耐摩耗性を向上するための2つの態様は、異なる硬度の材料からなる被覆層41、42・・・を、硬度の高い層と硬度の低い層とが交互に配置されるように積層することで、明確ではないが、例えば被覆層41、42・・・毎に摩耗され易くできるなどのために、前記のような態様を具備し易くできる場合もある。   Furthermore, two modes for improving the wear resistance of these coating films 40 are as follows: coating layers 41, 42,... Made of materials having different hardnesses are alternately formed between layers having high hardness and layers having low hardness. Although it is not clear by laminating so as to be disposed in, for example, the coating layers 41, 42...

以上のような被覆膜40を備えた雌バヨネット21及び雄バヨネット22によれば、互いに当接して摺動する当接面26及び受け面27の一方又は双方の表面や、爪部23及び係止部25の一方又は双方の表面に、好ましくは全表面に、複数の被覆層41、42・・・が界面を有して積層された被覆膜40が形成されており、各被覆層41、42・・・を単独で被覆膜40の膜厚に形成した場合に比べて、被覆膜40の摩耗速度が小さいか、被覆膜40の硬度が高いので、各被覆層41、42・・・単独では得られない摩耗速度や硬度を実現することができる。その結果、各被覆層41、42・・・単独では得られない耐摩耗性を実現することが可能であり、被覆膜40の耐摩耗性を向上させることができる。   According to the female bayonet 21 and the male bayonet 22 provided with the coating film 40 as described above, one or both surfaces of the abutment surface 26 and the receiving surface 27 that abut against each other and slide, the claw portion 23 and the engagement surface. A coating film 40 in which a plurality of coating layers 41, 42... Are laminated with an interface is formed on one surface or both surfaces of the stop portion 25, preferably on the entire surface. 42..., 42... Alone are formed in the thickness of the coating film 40, so that the wear rate of the coating film 40 is low or the hardness of the coating film 40 is high. ... Abrasion rate and hardness that cannot be obtained alone can be realized. As a result, it is possible to achieve wear resistance that cannot be obtained by each of the coating layers 41, 42... Alone, and improve the wear resistance of the coating film 40.

次に、このような雌バヨネット21及び雄バヨネット22を製造する方法について説明する。ここでは、予め各バヨネット21、22の形状に形成されている基材30の表面に、被覆膜40を設けることにより雌バヨネット21や雄バヨネット22を製造する。   Next, a method for manufacturing such a female bayonet 21 and a male bayonet 22 will be described. Here, the female bayonet 21 and the male bayonet 22 are manufactured by providing the coating film 40 on the surface of the base material 30 formed in the shape of each bayonet 21 and 22 in advance.

被覆膜40を基材30表面に作製するには、少なくとも被覆膜40の耐摩耗性を向上するための条件を具備することが可能な方法であれば、各種の成膜法を用いて作製することができる。   In order to produce the coating film 40 on the surface of the base material 30, various film forming methods can be used as long as the method can satisfy at least the conditions for improving the wear resistance of the coating film 40. Can be produced.

好ましくは、真空蒸着、イオンプレーティング、アークイオンプレーティング、フィルタードアークイオンプレーティング、フィルタードカソーディックバキュームアーク、スパッタリング、プラズマCVD、分子線エピタキシー等の気相成膜法や、これらの気相成膜法の特徴を複数備えた成膜法により、各被覆層41、42・・・を成膜して積層するのが好適である。気相成膜法により積層すれば、成膜条件を調整することでメッキ等に比べて各被覆層41、42・・・を格段に薄肉に形成することが容易であるため、積層状態の選択の自由度を大きくできて好適である。   Preferably, vapor deposition methods such as vacuum deposition, ion plating, arc ion plating, filtered arc ion plating, filtered cathodic vacuum arc, sputtering, plasma CVD, molecular beam epitaxy, and these gas phases It is preferable to deposit and coat each of the coating layers 41, 42... By a film forming method having a plurality of characteristics of the film forming method. If the layers are deposited by the vapor deposition method, it is easy to form the coating layers 41, 42,... Much thinner than the plating by adjusting the deposition conditions. It is preferable that the degree of freedom can be increased.

特に、被覆層41、42・・・の複数層又は全部が、同一金属の窒化物であって金属と窒素との比が異なるものからなる場合には、同一の金属ターゲットを共通に用い、被覆層41、42・・・毎に窒素原子又は窒素イオンの供給雰囲気を変化させることで、各被覆層41、42・・・の金属と窒素との比を調整し、気相成膜法による成膜を行うことが好適である。   In particular, when a plurality of layers or all of the coating layers 41, 42... Are made of the same metal nitride and have a different ratio of metal to nitrogen, the same metal target is used in common. By changing the supply atmosphere of nitrogen atoms or nitrogen ions for each of the layers 41, 42,..., The ratio of the metal and nitrogen of each coating layer 41, 42,. It is preferred to perform the membrane.

ここで、窒素原子又は窒素イオンの供給雰囲気とは、例えば、プラズマを発生させる気相成膜法の場合には、窒素ガスを供給することにより、また、プラズマを発生させない気相成膜法の場合には、成膜室内にアンモニア等を供することにより形成できる。このような窒素原子又は窒素イオンの供給雰囲気では、ターゲットからはじき出された金属粒子が飛行中に窒化されて、基材30の表面に金属窒化物として堆積させることができる。   Here, the supply atmosphere of nitrogen atoms or nitrogen ions is, for example, in the case of a vapor deposition method that generates plasma, by supplying a nitrogen gas or in a vapor deposition method that does not generate plasma. In some cases, it can be formed by supplying ammonia or the like into the film formation chamber. In such a supply atmosphere of nitrogen atoms or nitrogen ions, the metal particles ejected from the target are nitrided during flight and can be deposited on the surface of the substrate 30 as metal nitride.

そして、このような窒素原子又は窒素イオンの供給雰囲気では、窒素成分の供給量を調整すれば、基材30に堆積される金属窒化物の金属と窒素との比を容易に調整することが可能であり、各被覆層41、42・・・毎に金属と窒素との比を異ならせることが容易である。   In such a supply atmosphere of nitrogen atoms or nitrogen ions, if the supply amount of the nitrogen component is adjusted, the ratio of metal to nitrogen of the metal nitride deposited on the substrate 30 can be easily adjusted. It is easy to vary the ratio of metal to nitrogen for each coating layer 41, 42.

しかも、金属のターゲットが共通であるため、各被覆層41、42・・・を窒素成分の供給量を調整を繰り返して順次積層することで、被覆膜40を容易に作製することできる。 Moreover, since the metal target is common, each coating layer 41 ... by sequentially laminating Repeat adjusting the supply amount of the nitrogen component, it is possible to easily produce a coating film 40.

以下、実施例について説明する。
[フィルタードカソーディックバキュームアーク(以下、FCVA)法による成膜]
Examples will be described below.
[Film formation by the filtered cathodic vacuum arc (hereinafter referred to as FCVA) method]

ここでは、成膜装置として、成膜チャンバとFCVAソースとからなる装置を用い、FCVAソース内のカソードにCrターゲットを取付けた。FCVAソース内で真空アーク放電を発生させてCrターゲットをプラズマ化し、電磁フィルタによって高純度のCrイオン流を成膜チャンバ内へ導き入れた。同時に、成膜チャンバ内に導入する窒素ガス流量を調整することで、Cr/N原子比率を調整した。所定時間経過後にプラズマを停止し、残留ガスを排気後に成膜チャンバ内をベントして大気圧に戻し、成膜チャンバから取出して、窒化クロム膜で被覆された試料を作製した。   Here, an apparatus comprising a film forming chamber and an FCVA source was used as the film forming apparatus, and a Cr target was attached to the cathode in the FCVA source. A vacuum arc discharge was generated in the FCVA source to convert the Cr target into a plasma, and a high-purity Cr ion stream was introduced into the deposition chamber by an electromagnetic filter. At the same time, the Cr / N atomic ratio was adjusted by adjusting the flow rate of nitrogen gas introduced into the film forming chamber. After a predetermined time, the plasma was stopped, the residual gas was evacuated, the inside of the film formation chamber was vented to return to atmospheric pressure, and the sample was taken out from the film formation chamber to prepare a sample covered with a chromium nitride film.

試料として真鍮の平板を用意し、有機溶剤、アルカリ、純水中で順次洗浄した後、上記の成膜方法により成膜時の窒素流量を異ならせて、単層の窒化クロム膜を4種類(A〜D)作製した。各窒化クロム膜の膜厚はそれぞれ2μmであった。得られた窒化クロム膜の化学組成、硬度、摩耗速度を測定した。   Prepare a brass plate as a sample, wash it sequentially in an organic solvent, alkali, and pure water, and then change the nitrogen flow rate during film formation by the above film formation method to obtain four types of single-layer chromium nitride films ( AD) It produced. Each chromium nitride film had a thickness of 2 μm. The chemical composition, hardness, and wear rate of the obtained chromium nitride film were measured.

化学組成はラザフォード後方散乱(RBS)法により測定し、硬度はナノインデンテーション法により測定し、摩耗速度はボールオンディスク法により測定した。結果を表1に示す。   The chemical composition was measured by the Rutherford backscattering (RBS) method, the hardness was measured by the nanoindentation method, and the wear rate was measured by the ball-on-disk method. The results are shown in Table 1.

表1の結果から明らかように、Cr/N比が減少するに従い、即ち、窒化率が増加するに従い、硬度が増加して摩耗速度は減少している。つまり、窒化が促進されれば耐摩耗性が向上することが確認できた。
[実施例1]
As apparent from the results in Table 1, as the Cr / N ratio decreases, that is, as the nitriding rate increases, the hardness increases and the wear rate decreases. That is, it was confirmed that if nitriding is promoted, the wear resistance is improved.
[Example 1]

真鍮の平板の表面に、上述のFCVA法と同様にして、上述の窒化クロム膜A及びBと同等の化学組成を有する窒化クロム膜からなる被覆層を、それぞれ10nmづつ交互に積層し、合計膜厚が2μmとなるようにして、窒化クロム多層膜からなる被覆膜を作製した。   In the same manner as the FCVA method described above, coating layers made of chromium nitride films having the same chemical composition as the above-described chromium nitride films A and B are alternately laminated on the surface of the brass flat plate by 10 nm, respectively. A coating film made of a chromium nitride multilayer film was prepared so as to have a thickness of 2 μm.

得られた被覆膜の硬度、摩耗速度、膜厚方向の平均化学組成を測定した。結果を表1に示す。
[比較例1]
The hardness, wear rate, and average chemical composition in the film thickness direction of the obtained coating film were measured. The results are shown in Table 1.
[Comparative Example 1]

真鍮の平板の表面に、従来の六価クロムメッキ法によって、2μmの膜厚でクロムメッキ膜を作製した。得られたクロムメッキ膜の硬度及び摩耗速度を測定し、結果を表1に示した。

Figure 0005217638
A chromium plating film having a thickness of 2 μm was formed on the surface of a brass flat plate by a conventional hexavalent chromium plating method. The hardness and wear rate of the obtained chromium plating film were measured, and the results are shown in Table 1.
Figure 0005217638

表1の結果から明らかなように、実施例1の硬度は、窒化クロム膜A及びBと同等の化学組成の窒化クロム膜からなる被覆層を積層したものであるにも拘わらず、窒化クロム膜Aの単層膜と窒化クロム膜Bの単層膜とのそれぞれの硬度よりも若干高い硬度を示している。また、実施例1の摩耗速度は、窒化クロム膜Aの単層膜と窒化クロム膜Bの単層膜とのそれぞれの摩耗速度よりも遙かに低い値になり、最も窒化率が高くて硬度が高い窒化クロム膜Dの単層膜と比べても1/2と低い値となっている。   As is clear from the results in Table 1, the hardness of Example 1 is that the chromium nitride film is formed by laminating a coating layer made of a chromium nitride film having a chemical composition equivalent to that of the chromium nitride films A and B. The hardness is slightly higher than the hardness of each of the single-layer film of A and the single-layer film of chromium nitride film B. Further, the wear rate of Example 1 is much lower than the wear rates of the single layer film of the chromium nitride film A and the single layer film of the chromium nitride film B, and the hardness is the highest and the hardness is the highest. Compared with a single layer film of a high chromium nitride film D, the value is ½.

そのため、複数の被覆層を積層することによって、摩耗速度が著しく低くて硬質の被覆膜が得られることが分かった。   Therefore, it was found that by laminating a plurality of coating layers, a hard coating film can be obtained with a remarkably low wear rate.

比較例1のクロムメッキ膜は、硬度が表1中で最も低く、摩耗速度は最も高かった。実施例1と比較例1とを比較すると、実施例1は比較例1の摩耗速度の1/8倍になっており、複数の被覆層を積層することによって、従来のクロムメッキ膜に比べて摩耗に対する耐久性を顕著に向上できることが分かった。   The chromium plating film of Comparative Example 1 had the lowest hardness in Table 1 and the highest wear rate. When Example 1 and Comparative Example 1 are compared, Example 1 is 1/8 times the wear rate of Comparative Example 1, and by stacking a plurality of coating layers, it is compared with a conventional chromium plating film. It was found that the durability against wear can be remarkably improved.

このように実施例1において、摩耗速度を大幅に下げることができた理由としては、明確ではないが、次のような推測も可能である。即ち、極薄膜を界面を有して積層すると、膜厚方向に対して剪断力が働いた際、界面に沿って薄い層状に少しずつ膜が摩耗して行くようになる。薄い層状に膜が摩耗或いは剥離して行くことによって、一度に膜厚方向に深くえぐられることがなくなる。その結果として、同一膜厚で比較した場合に、単層膜よりも界面を有して積層された多層膜のほうが摩耗速度が遅くなると推測できる。特に、実施例1のように硬度の異なる被覆層を交互に積層する場合にはそのような作用がより強く得られると推測できる。
[実施例2]
Thus, in Example 1, although it is not clear as a reason which was able to reduce a wear rate significantly, the following estimation is also possible. That is, when an ultrathin film is laminated with an interface, when a shearing force is applied in the film thickness direction, the film gradually wears into a thin layer along the interface. When the film is worn or peeled into a thin layer, it is not deeply swept in the film thickness direction at once. As a result, when compared with the same film thickness, it can be estimated that the wear rate of the multilayer film laminated with an interface is slower than that of the single layer film. In particular, when the coating layers having different hardnesses are alternately laminated as in Example 1, it can be estimated that such an effect can be obtained more strongly.
[Example 2]

所定の形状を有する真鍮製の雌バヨネット基材及び雄バヨネット基材に対して、実施例1と同様にして、窒化クロム多層膜からなる被覆膜を成膜して、雌バヨネット及び雄バヨネットを作製し、得られた雌バヨネット及び雄バヨネットをそれぞれカメラボディ及びカメラ用交換レンズに取付けた。   A coating film made of a chromium nitride multilayer film was formed on the female bayonet base material and male bayonet base material made of brass having a predetermined shape in the same manner as in Example 1, and the female bayonet and male bayonet were formed. The produced and obtained bayonet and male bayonet were attached to a camera body and an interchangeable lens for a camera, respectively.

カメラ用交換レンズをカメラボディに、連続して1000回着脱を繰り返し、傷付き程度及び膜剥離程度を目視により観察した。結果を表2に示す。

Figure 0005217638
[比較例2] The camera interchangeable lens was repeatedly attached to and detached from the camera body 1000 times, and the degree of scratching and film peeling was visually observed. The results are shown in Table 2.
Figure 0005217638
[Comparative Example 2]

実施例2と同一形状の真鍮製雌バヨネット基材及び雄バヨネット基材に対して、比較例1と同様にして、クロムメッキ膜を成膜し、雌バヨネット及び雄バヨネットを作製し、実施例2と同様に、カメラ用交換レンズをカメラボディに連続して1000回着脱を繰り返し、傷付き程度及び膜剥離程度を目視により観察した。結果を表3に示す。

Figure 0005217638
A chrome-plated film was formed on the brass female bayonet base material and male bayonet base material having the same shape as in Example 2 in the same manner as in Comparative Example 1 to produce female bayonet and male bayonet. In the same manner as described above, the camera interchangeable lens was continuously attached to and detached from the camera body 1000 times, and the degree of scratching and the degree of film peeling were visually observed. The results are shown in Table 3.
Figure 0005217638

表2及び3から明らかなように、着脱試験の結果、従来のクロムメッキ膜と比較して、窒化クロム多層膜からなる被覆膜を用いると、バヨネットの耐久性が飛躍的に向上することが確認できた。
[実施例3]
As is apparent from Tables 2 and 3, as a result of the attachment / detachment test, the durability of the bayonet can be drastically improved when a coating film made of a chromium nitride multilayer film is used as compared with a conventional chromium plating film. It could be confirmed.
[Example 3]

実施例1と同様に真鍮の平板からなる基材を用意し、有機溶媒、アルカリ、純水中で順番に超音波洗浄を行った。マグネトロンスパッタ装置を用い、カソードにCrターゲットを取付け、超音波洗浄後の基材をホルダーに取付けて、マグネトロンスパッタ装置の成膜チャンバ内に設置した。成膜チャンバ内を1×10−4Paのオーダーの圧力まで真空排気した。成膜チャンバ内にArガスを導入し、パルスDC電源を用いてホルダーへ電圧を印加してArプラズマを発生させ、Arプラズマのイオンボンバードにより、基材の表面を洗浄した。所定時間経過後にプラズマを停止し、成膜チャンバ内に残留しているArガスを排気した。   The base material which consists of a flat plate of brass was prepared similarly to Example 1, and ultrasonic cleaning was performed in order in the organic solvent, the alkali, and the pure water. A magnetron sputtering apparatus was used, a Cr target was attached to the cathode, a substrate after ultrasonic cleaning was attached to a holder, and the magnetron sputtering apparatus was installed in a film forming chamber of the magnetron sputtering apparatus. The film formation chamber was evacuated to a pressure on the order of 1 × 10 −4 Pa. Ar gas was introduced into the deposition chamber, a voltage was applied to the holder using a pulsed DC power source to generate Ar plasma, and the surface of the substrate was cleaned by Ar plasma ion bombardment. The plasma was stopped after a predetermined time, and the Ar gas remaining in the film formation chamber was exhausted.

次に、窒化クロム膜を成膜した。ここでは、成膜チャンバ内にArガス及び窒素ガスを導入し、パルスDC電源を用いてCrターゲットへ電圧を印加してプラズマを発生させ、Crターゲットのスパッタを開始した。ターゲットからはじき出されたCr粒子は、プラズマ中を飛行して基材の表面に堆積するまでの間に窒化され、バヨネット基材表面には窒化クロム膜が形成された。   Next, a chromium nitride film was formed. Here, Ar gas and nitrogen gas were introduced into the film forming chamber, a voltage was applied to the Cr target using a pulsed DC power source to generate plasma, and sputtering of the Cr target was started. The Cr particles ejected from the target were nitrided while flying in the plasma and deposited on the surface of the base material, and a chromium nitride film was formed on the surface of the bayonet base material.

その際、成膜チャンバ内に導入する窒素ガス流量を調整することで、実施例1と同様にCr/N比の異なる窒化クロム膜を交互に積層した。所定時間経過後にプラズマを停止し、残留ガスを排気後に成膜チャンバ内をベントして大気圧に戻し、成膜チャンバから取出して、窒化クロム膜で被覆された試料を作製した。   At that time, by adjusting the flow rate of nitrogen gas introduced into the film forming chamber, chromium nitride films having different Cr / N ratios were alternately stacked as in the first embodiment. After a predetermined time, the plasma was stopped, the residual gas was evacuated, the inside of the film formation chamber was vented to return to atmospheric pressure, and the sample was taken out from the film formation chamber to prepare a sample covered with a chromium nitride film.

得られた皮膜の硬度及び磨耗速度を測定したところ、交互に積層されているそれぞれの窒化クロム膜を単独で成膜した場合に比べて、硬度が増加し、磨耗速度が減少していることが確認された。   When the hardness and wear rate of the obtained film were measured, it was found that the hardness increased and the wear rate decreased compared to the case where each of the alternately laminated chromium nitride films was formed alone. confirmed.

以上の実験結果から、スパッタ法により窒化クロム膜を成膜した場合においても、FCVA法で成膜した場合と同様に、Cr/N比の異なる膜を交互に積層することによって、硬度及び磨耗速度の双方が向上するという本発明の効果が得られることが確認された。
以下の付記1〜4については、特許請求の範囲に記載した発明の実施形態に必ずしも対応するものではない。
(付記1)
被覆膜40を構成する各被覆層41、42・・・は、金属、樹脂、セラミックス等、隣接する基材30の表面又は被覆層41、42・・・に十分な付着力で成膜可能であって、隣接する被覆層41、42・・・との間に界面を形成可能な材料からなるものを適宜選択して使用できる。
(付記2)
複数の被覆層41、42・・・の一部又は全部がそれぞれ金属からなると、光沢を得やすく、所望の硬度の調整が容易であるなどの理由で好ましい。
(付記3)
また、被覆層41、42・・・がCr、Fe、Ni、Al、Mg等の金属の窒化物からなるものも好適である。金属と窒素との比を調整することで所望の硬度に調整し易いからである。より具体的には、Cr、Ni、Alの場合には金属/窒素比を1よりも大きくし、Feの場合には金属/窒素比を4よりも大きくし、Mgの場合には金属/窒素比を1.5よりも大きくすることが好ましい。この範囲であれば、被覆層41、42・・・を構成する金属窒化物が完全な金属結晶と完全な窒素化合物結晶の中間の構造をとり得るので、所望の硬度を維持しつつ金属の性質や外観を維持することができて、従来のクロムメッキ等と置換し易いからである。なお上記の金属/窒素比は原子数比による。
(付記4)
特に、被覆層41、42・・・のうち複数の層が、より好ましくは、全ての層が同一金属の窒化物であって、金属と窒素との比が異なる層からなるのが好適である。同一金属の窒化物であれば、隣接する被覆層41、42・・・間の接合強度を確保することが容易だからである。
From the above experimental results, even when the chromium nitride film is formed by the sputtering method, the hardness and the wear rate are obtained by alternately laminating films having different Cr / N ratios as in the case of forming the film by the FCVA method. It was confirmed that the effect of the present invention that both of the above are improved can be obtained.
The following supplementary notes 1 to 4 do not necessarily correspond to the embodiments of the invention described in the claims.
(Appendix 1)
Each of the coating layers 41, 42,... Constituting the coating film 40 can be formed with sufficient adhesive force on the surface of the adjacent substrate 30 or the coating layers 41, 42,. In this case, a material made of a material capable of forming an interface with the adjacent coating layers 41, 42.
(Appendix 2)
It is preferable that a part or all of the plurality of coating layers 41, 42,... Are made of metal because it is easy to obtain gloss and adjustment of desired hardness is easy.
(Appendix 3)
Further, it is also preferable that the coating layers 41, 42... Are made of a metal nitride such as Cr, Fe, Ni, Al, Mg. This is because the desired hardness can be easily adjusted by adjusting the ratio of metal to nitrogen. More specifically, in the case of Cr, Ni, and Al, the metal / nitrogen ratio is larger than 1, in the case of Fe, the metal / nitrogen ratio is larger than 4, and in the case of Mg, the metal / nitrogen ratio is increased. The ratio is preferably greater than 1.5. In this range, the metal nitride constituting the coating layers 41, 42,... Can take an intermediate structure between a complete metal crystal and a complete nitrogen compound crystal, so that the properties of the metal can be maintained while maintaining a desired hardness. This is because the appearance can be maintained and it can be easily replaced with conventional chrome plating or the like. The above metal / nitrogen ratio depends on the atomic ratio.
(Appendix 4)
In particular, it is preferable that a plurality of layers of the covering layers 41, 42..., More preferably, all the layers are made of a nitride of the same metal and have a different ratio of metal to nitrogen. . This is because it is easy to ensure the bonding strength between the adjacent coating layers 41, 42.

この発明の実施の形態のバヨネットを備えたカメラの概略側面図である。It is a schematic side view of the camera provided with the bayonet of embodiment of this invention. 同実施の形態のバヨネットの正面図であり(a)はカメラボディの雌バヨネットを示し、(b)はカメラ用交換レンズの雄バヨネットを示す。It is a front view of the bayonet of the embodiment, (a) shows the female bayonet of the camera body, (b) shows the male bayonet of the interchangeable lens for cameras. 同実施の形態のバヨネットの表面の拡大部分断面図である。It is an expanded partial sectional view of the surface of the bayonet of the embodiment.

符号の説明Explanation of symbols

11 カメラボディ
12 カメラ用交換レンズ
21 雌バヨネット
22 雄バヨネット
30 基材
40 被覆膜
41、42・・・ 被覆層
DESCRIPTION OF SYMBOLS 11 Camera body 12 Interchangeable lens for cameras 21 Female bayonet 22 Male bayonet 30 Base material 40 Coating film 41, 42 ... Coating layer

Claims (8)

他の部材に当接して摺動する摺接部を備え、該摺接部の表面に、相対的に硬度の高い被覆層と硬度の低い被覆層が界面を有して交互に積層された被覆膜が形成された摺動部材において、
前記被覆膜は、CrN(4.5≧X≧2.1)の組成を有する前記被覆層が、隣接する各被覆層のXの値が異なるように積層されたものであり
前記被覆膜は、前記各被覆層を単独で前記被覆膜の膜厚に形成した場合に比べ、摩耗速度が小さいものであることを特徴とする摺動部材。
Includes a sliding contact portion for sliding contact with the other member, the surface of the sliding contact portion, and a relatively high hardness coating layer and the lower coating layer hardness are alternately stacked with a surface In the sliding member on which the coating film is formed,
The coating film is for the covering layer to have a composition of Cr X N (4.5 ≧ X ≧ 2.1) were stacked so that the value of X in each adjacent cover layer is different,
The sliding film is characterized in that the wear rate is lower than that in the case where each of the coating layers is formed alone with the thickness of the coating film.
他の部材に当接して摺動する摺接部を備え、該摺接部の表面に、相対的に硬度の高い被覆層と硬度の低い被覆層が界面を有して交互に積層された被覆膜が形成された摺動部材において、
前記被覆膜は、CrN(4.5≧X≧2.1)の組成を有する前記被覆層が、隣接する各被覆層のXの値が異なるように積層されたものであり
前記被覆膜は、前記各被覆層を単独で前記被覆膜の膜厚に形成した場合に比べ、硬度が高いものであることを特徴とする摺動部材。
Includes a sliding contact portion for sliding contact with the other member, the surface of the sliding contact portion, and a relatively high hardness coating layer and the lower coating layer hardness are alternately stacked with a surface In the sliding member on which the coating film is formed,
The coating film is for the covering layer to have a composition of Cr X N (4.5 ≧ X ≧ 2.1) were stacked so that the value of X in each adjacent cover layer is different,
The sliding film is characterized in that the coating film has a higher hardness than the case where each of the coating layers is formed alone with the thickness of the coating film.
前記被覆膜は、Cr N(4.5≧X≧3.2)の組成を有する前記被覆層が、隣接する各被覆層のXの値が異なるように積層されたものであることを特徴とする請求項1又は2に記載の摺動部材。 The coating film is formed by laminating the coating layers having a composition of Cr X N (4.5 ≧ X ≧ 3.2) so that X values of adjacent coating layers are different. The sliding member according to claim 1 or 2, characterized by the above. カメラボディのレンズ取付金具であることを特徴とする請求項1乃至のいずれか一つに記載の摺動部材。 The sliding member according to any one of claims 1 to 3, characterized in that a lens mounting bracket of the camera body. カメラ用交換レンズのボディ取付金具であることを特徴とする請求項1乃至のいずれか一つに記載の摺動部材。 The sliding member according to any one of claims 1 to 3 , wherein the sliding member is a body mounting bracket of an interchangeable lens for a camera . 窒素原子又は窒素イオンの供給雰囲気下で、クロムをターゲットとして気相成膜法により成膜することで前記被覆層を積層して請求項1乃至5のいずれか一つに記載の摺動部材を製造する方法であり、
前記ターゲットを共通に用い、前記被覆層毎に前記窒素原子又は窒素イオンの供給雰囲気を変化させることで、前記各被覆層のクロムと窒素との比を調整することを特徴とする摺動部材の製造方法
The sliding member according to any one of claims 1 to 5, wherein the coating layer is stacked by forming a film by a vapor deposition method using chromium as a target in a supply atmosphere of nitrogen atoms or nitrogen ions. A method of manufacturing,
A sliding member characterized in that the ratio of chromium and nitrogen in each coating layer is adjusted by changing the supply atmosphere of nitrogen atoms or nitrogen ions for each coating layer using the target in common. Manufacturing method .
請求項4に記載の摺動部材を備えていることを特徴とするカメラボディA camera body comprising the sliding member according to claim 4 . 請求項5に記載の摺動部材を備えていることを特徴とするカメラ用交換レンズ An interchangeable lens for a camera, comprising the sliding member according to claim 5 .
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