JP5217421B2 - Seal member hermetic test apparatus and seal member hermetic test method - Google Patents

Seal member hermetic test apparatus and seal member hermetic test method Download PDF

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JP5217421B2
JP5217421B2 JP2007334241A JP2007334241A JP5217421B2 JP 5217421 B2 JP5217421 B2 JP 5217421B2 JP 2007334241 A JP2007334241 A JP 2007334241A JP 2007334241 A JP2007334241 A JP 2007334241A JP 5217421 B2 JP5217421 B2 JP 5217421B2
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gas
seal member
liquid
flow path
mounting jig
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JP2009156684A (en
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勇一 坪井
哲夫 浜口
貞郁 高橋
吉展 牧野
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Toyota Motor Corp
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Description

本発明は、シール部材の気密試験装置及び気密試験方法に関する。   The present invention relates to an airtight test apparatus and an airtight test method for a seal member.

例えば自動車等の車両に搭載される燃料電池システムには、燃料ガスの供給源として高圧ガスタンクが用いられる。高圧ガスタンクは、タンク本体の長手方向の開口端部に口金部を有し、その口金部にバルブなどが接続されて使用される。高圧ガスタンクの口金部とバルブとの接続部には、Oリングが装着され、気密性を確保している。   For example, in a fuel cell system mounted on a vehicle such as an automobile, a high-pressure gas tank is used as a fuel gas supply source. The high-pressure gas tank has a base at the opening end in the longitudinal direction of the tank body, and is used with a valve or the like connected to the base. An O-ring is attached to the connection portion between the base of the high-pressure gas tank and the valve to ensure airtightness.

上述のような高圧ガスタンクなどに用いられるOリングは、非常に高い気密性が要求されるため、装着前に気密性の試験(気密試験)が行われる。この気密試験は、例えば漏れたガスを液体内で捕集し、メスシリンダに回収して、一定時間毎に目視によりメスシリンダの液面の目盛を読むことにより行われていた(特許文献1参照)。   Since the O-ring used in the high-pressure gas tank as described above is required to have very high airtightness, an airtightness test (airtightness test) is performed before mounting. This airtight test is performed, for example, by collecting leaked gas in a liquid, collecting it in a graduated cylinder, and reading the scale of the liquid level of the graduated cylinder visually at regular intervals (see Patent Document 1). ).

特開2005−181141号公報JP-A-2005-181141

しかしながら、上述の気密試験では、一定時間当たりの総ガス漏れ量は正確に測ることができるが、時系列的なガス漏れ量は正確に測れない。Oリングは、一定時間の総ガス漏れ量が同じであっても、最初に多く漏れて直ぐに漏れが止まる場合や、微量に長時間漏れ続ける場合、途中から漏れ始める場合など、ガス漏れの時系列的な特性が異なる場合がある。ガス漏れの時系列的な特性が異なると、その対策も異なってくる。このため、上述の気密試験は、Oリングの気密試験として十分でなく、時系列的なガス漏れ量を正確に測定することが求められている。   However, in the above-described airtight test, the total gas leakage amount per fixed time can be accurately measured, but the time-series gas leakage amount cannot be accurately measured. O-rings have the same amount of gas leakage for a certain period of time, such as when a large amount of gas leaks at the beginning and immediately stops leaking, when it continues to leak for a very long time, or when it starts to leak from the middle, etc. Characteristics may vary. When the time-series characteristics of gas leaks are different, the countermeasures are also different. For this reason, the above-mentioned airtight test is not sufficient as an O-ring airtight test, and it is required to accurately measure a time-series gas leakage amount.

本発明は、かかる事情に鑑みてなされたものであり、Oリングなどのシール部材の時系列的なガス漏れ量を正確に測定し、高精度のシール部材の気密試験を実現することをその目的としている。   The present invention has been made in view of such circumstances, and an object of the present invention is to accurately measure a time-series gas leakage amount of a sealing member such as an O-ring and realize a highly accurate sealing test of the sealing member. It is said.

前記目的を達成するための本発明は、シール部材の気密試験装置であって、対向する壁面の間にシール部材を装着可能なシール部材装着治具と、前記シール部材装着治具を収容する恒温槽と、前記シール部材装着治具のシール部材の一次側にガスを供給するガス供給装置と、前記シール部材装着治具のシール部材の二次側から漏れたガスが流れるガス流路と、前記ガス流路を通じてガスが供給され、その供給されたガスの量に応じて内部の液体を送出可能な液体貯留部と、前記液体貯留部から送出された液体が流れる液体流路と、前記液体流路を通じて液体が供給され、その供給された液体の重さを連続的に計測可能な量りと、前記量りにより計測された液体の重さから、前記シール部材における時系列的なガス漏れ量を算出する演算装置と、を有することを特徴とする。 In order to achieve the above object, the present invention provides a sealing member airtightness testing apparatus, a sealing member mounting jig capable of mounting a sealing member between opposing wall surfaces, and a constant temperature housing the sealing member mounting jig. A tank, a gas supply device for supplying gas to a primary side of the seal member of the seal member mounting jig, a gas flow path through which gas leaked from the secondary side of the seal member of the seal member mounting jig, Gas is supplied through a gas flow path, and a liquid storage part capable of delivering an internal liquid according to the amount of the supplied gas, a liquid flow path through which the liquid sent from the liquid storage part flows, and the liquid flow Liquid is supplied through the channel, and the amount of gas leaked from the seal member is calculated from the weight that allows continuous measurement of the weight of the supplied liquid and the weight of the liquid measured by the weight. With arithmetic unit Characterized in that it has a.

本発明によれば、シール部材の時系列的なガス漏れ量を正確に測定することができ、高精度の気密試験を実現できる。   According to the present invention, the time-series gas leakage amount of the seal member can be accurately measured, and a highly accurate airtight test can be realized.

上記シール部材の気密試験装置において、前記シール部材装着治具は、円柱状部と、当該円柱状部が嵌入される穴を有する筒状部とを有し、前記筒状部の穴に嵌入された円柱状部の外周面と筒状部の内周面との間に前記シール部材を装着するようにしてもよい。   In the seal member airtightness testing apparatus, the seal member mounting jig includes a cylindrical part and a cylindrical part having a hole into which the cylindrical part is inserted, and is inserted into the hole of the cylindrical part. The sealing member may be mounted between the outer peripheral surface of the cylindrical portion and the inner peripheral surface of the cylindrical portion.

前記筒状部には、前記ガス供給装置からのガスを前記シール部材の一次側に流入させるためのガス流入路と、前記シール部材の二次側から漏れたガスを前記ガス流路に流出させるためのガス流出路が形成されていてもよい。   In the cylindrical portion, a gas inflow passage for allowing the gas from the gas supply device to flow into the primary side of the seal member, and a gas leaked from the secondary side of the seal member are allowed to flow out into the gas passage. A gas outflow path may be formed.

前記ガス流路は、前記液体貯留部の上部に接続され、前記液体流路は、前記液体貯留部の内部に挿入されており、前記ガス流路から前記液体貯留部に流入したガスの圧力によって液体貯留部内の液体が前記液体流路に送出されるようにしてもよい。   The gas flow path is connected to an upper portion of the liquid storage section, the liquid flow path is inserted into the liquid storage section, and the pressure of the gas flowing into the liquid storage section from the gas flow path You may make it the liquid in a liquid storage part send out to the said liquid flow path.

別の観点による本発明は、シール部材の気密試験方法であって、シール部材装着治具の対向する壁面の間にシール部材を装着する工程と、恒温槽に収容された前記シール部材装着治具のシール部材の一次側にガスを供給する工程と、前記シール部材装着治具のシール部材の二次側から漏れたガスをガス流路を通じて液体貯留部に供給する工程と、前記液体貯留部に供給されたガスの量に応じて液体貯留部の液体を液体流路を通じて量りに供給する工程と、前記供給された液体の重さを量りで連続的に計測する工程と、前記量りにより計測された液体の重さから、前記シール部材における時系列的なガス漏れ量を算出する工程と、を有することを特徴とする。 According to another aspect of the present invention, there is provided a sealing member hermetic test method, the step of mounting a sealing member between opposing wall surfaces of the sealing member mounting jig, and the sealing member mounting jig housed in a thermostatic bath. Supplying the gas to the primary side of the sealing member, supplying the gas leaked from the secondary side of the sealing member of the sealing member mounting jig to the liquid storage part through the gas flow path, and supplying the liquid storage part A step of supplying the liquid in the liquid storage portion to the scale through the liquid flow path according to the amount of the supplied gas, a step of continuously measuring the weight of the supplied liquid by the scale, and the measurement. And calculating a time-series gas leakage amount in the seal member from the weight of the liquid.

本発明によれば、シール部材の時系列的なガス漏れ量を正確に測定することができるので、高精度の気密試験を実現できる。   According to the present invention, the time-series gas leakage amount of the seal member can be accurately measured, so that a highly accurate airtight test can be realized.

前記シール部材の気密試験方法において、前記ガス流路を通じて前記液体貯留部に流入したガスの圧力によって液体貯留容器内の液体が前記液体流路に送出されるようにしてもよい。   In the hermeticity test method for the seal member, the liquid in the liquid storage container may be sent to the liquid flow path by the pressure of the gas flowing into the liquid storage section through the gas flow path.

本発明によれば、シール部材の時系列的なガス漏れ量を正確に測定することができるので、高精度の気密試験を実現できる。これにより、シール部材の信頼性を向上できる。   According to the present invention, the time-series gas leakage amount of the seal member can be accurately measured, so that a highly accurate airtight test can be realized. Thereby, the reliability of a sealing member can be improved.

以下、図面を参照して、本発明の好ましい実施の形態について説明する。図1は、本実施の形態に係る気密試験装置1の構成を示す模式図である。本実施の形態では、シール部材としてのOリングの気密試験を行う気密試験装置を例にとって説明する。   Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing a configuration of an air tightness test apparatus 1 according to the present embodiment. In the present embodiment, an airtight test apparatus that performs an airtight test of an O-ring as a seal member will be described as an example.

気密試験装置1は、例えば高圧ガス供給装置10と、Oリング装着治具11を収容する恒温槽12と、液体貯留部としての液体貯留容器13と、電子量り14及び演算装置15を有している。   The hermetic test apparatus 1 includes, for example, a high-pressure gas supply apparatus 10, a thermostatic chamber 12 that houses an O-ring mounting jig 11, a liquid storage container 13 as a liquid storage unit, an electronic weighing unit 14, and a calculation device 15. Yes.

高圧ガス供給装置10は、高圧ガス供給路20によって恒温槽12内のOリング装着治具11に連通しており、Oリング装着治具11に対し高圧の例えばヘリウムガスを供給できる。   The high-pressure gas supply device 10 communicates with the O-ring mounting jig 11 in the thermostatic chamber 12 through the high-pressure gas supply path 20 and can supply high-pressure helium gas, for example, to the O-ring mounting jig 11.

恒温槽12は、内部温度を調整する機能を有し、槽内を一定の温度に維持することができる。   The thermostatic bath 12 has a function of adjusting the internal temperature, and can maintain the inside of the bath at a constant temperature.

恒温槽12内のOリング装着治具11は、例えば図2に示すように円柱状部30と、その円柱状部30が嵌入する穴31を有する筒状部32を有している。   For example, as shown in FIG. 2, the O-ring mounting jig 11 in the thermostat 12 includes a cylindrical portion 30 and a cylindrical portion 32 having a hole 31 into which the cylindrical portion 30 is fitted.

例えば筒状部32の穴31は、底側の小口径部31aと、入口側の大口径部31bを有し、その間に段部31cが形成されている。円柱状部30は、この穴31の形状に適合するように、先端側の小径部30aと、後方側の大径部30bを有している。円柱状部30が穴31に挿入された際には、円柱状部30の大径部30bが穴31の大口径部31bに隙間なく嵌入され、この部分からのガス漏れが防止されている。また、円柱状部30の小径部30aの外周面と穴31の小口径部31aの内周面との間には、わずかな隙間ができている。   For example, the hole 31 of the cylindrical portion 32 has a small-diameter portion 31a on the bottom side and a large-diameter portion 31b on the inlet side, and a step portion 31c is formed therebetween. The columnar portion 30 has a small-diameter portion 30a on the distal end side and a large-diameter portion 30b on the rear side so as to conform to the shape of the hole 31. When the columnar part 30 is inserted into the hole 31, the large diameter part 30b of the columnar part 30 is fitted into the large diameter part 31b of the hole 31 without any gap, and gas leakage from this part is prevented. Further, a slight gap is formed between the outer peripheral surface of the small diameter portion 30 a of the columnar portion 30 and the inner peripheral surface of the small diameter portion 31 a of the hole 31.

円柱状部30の小径部30a側の外周面には、例えば周方向に沿った環状の溝30cが形成されており、この溝30cにOリング40を嵌めることができる。溝30cにOリング40が嵌められた状態で、円柱状部30を筒状部32の穴31に嵌め込むことによって、対向する円柱状部30の外周面と筒状部32の内周面との間にOリング40を装着できる。   An annular groove 30c is formed, for example, along the circumferential direction on the outer peripheral surface of the cylindrical portion 30 on the small diameter portion 30a side, and the O-ring 40 can be fitted into the groove 30c. With the O-ring 40 fitted in the groove 30c, the cylindrical portion 30 is fitted into the hole 31 of the cylindrical portion 32, whereby the outer peripheral surface of the opposing cylindrical portion 30 and the inner peripheral surface of the cylindrical portion 32 are The O-ring 40 can be mounted between the two.

また、例えば円柱状部30の小径部30aの長さは、穴31の小口径部31aより短く形成されており、円柱状部30が穴31に嵌め込まれた際に、円柱状部30の先端面と穴31の底面との間に空間Pができる。筒状部32には、外部から当該空間Pに通じるガス流入路32aが形成されている。ガス流入路32aには、高圧ガス供給装置10に通じる高圧ガス供給路20が接続されている。これにより、高圧ガス供給装置10から空間Pに高圧ガスを供給し、筒状部32と円柱状部30との間のOリング40の一次側(図2の左側)に高圧のガスを供給できる。   Further, for example, the length of the small-diameter portion 30 a of the cylindrical portion 30 is shorter than the small-diameter portion 31 a of the hole 31, and when the cylindrical portion 30 is fitted into the hole 31, the tip of the cylindrical portion 30 is formed. A space P is formed between the surface and the bottom surface of the hole 31. The tubular portion 32 is formed with a gas inflow passage 32a that communicates with the space P from the outside. A high-pressure gas supply path 20 leading to the high-pressure gas supply apparatus 10 is connected to the gas inflow path 32a. Thereby, the high pressure gas can be supplied from the high pressure gas supply device 10 to the space P, and the high pressure gas can be supplied to the primary side (left side in FIG. 2) of the O-ring 40 between the cylindrical portion 32 and the cylindrical portion 30. .

筒状部32には、穴31の小口径部31aから筒状部32の外側面に通じるガス流出路32bが形成されている。ガス流出路32bには、恒温槽12の外部の液体貯留容器13に通じるガス流路50が接続されている。これにより、筒状部32と円柱状部30との間のOリング40の二次側(図2の右側)に漏れたガスをガス流路50に流出することができる。   The tubular portion 32 is formed with a gas outflow passage 32 b that leads from the small-diameter portion 31 a of the hole 31 to the outer surface of the tubular portion 32. A gas flow path 50 communicating with the liquid storage container 13 outside the thermostat 12 is connected to the gas outflow path 32b. Thereby, the gas leaked to the secondary side (right side in FIG. 2) of the O-ring 40 between the cylindrical portion 32 and the cylindrical portion 30 can flow out to the gas flow path 50.

図1に示すように液体貯留容器13は、密閉構造を有し、内部に水Hが貯留されている。ガス流路50は、液体貯留容器13の上部に接続されている。液体貯留容器13の内部には、液体流路60が挿入されている。これにより、ガス流路50から液体貯留容器13に漏れたガスが供給されると、そのガスの圧力により水Hの液面が押され当該水Hが液体流路60に送出される。したがって、液体貯留容器13では、ガス流路50から流入したガスの量に応じた量の水Hが液体流路60に送出される。   As shown in FIG. 1, the liquid storage container 13 has a sealed structure, and water H is stored therein. The gas flow path 50 is connected to the upper part of the liquid storage container 13. A liquid channel 60 is inserted into the liquid storage container 13. Thereby, when the gas leaked from the gas flow path 50 to the liquid storage container 13 is supplied, the liquid level of the water H is pushed by the pressure of the gas, and the water H is sent to the liquid flow path 60. Therefore, in the liquid storage container 13, an amount of water H corresponding to the amount of gas flowing in from the gas channel 50 is sent to the liquid channel 60.

液体流路60は、電子量り14の上方まで通じており、電子量り14上の量り容器70に水Hを供給できる。電子量り14は、量り容器70内に供給された水Hの重さを連続的に自動計測できる。電子量り14は、水Hの重さの連続的な計測結果を演算装置15に出力できる。   The liquid flow path 60 leads to above the electron weighing unit 14, and can supply water H to the weighing container 70 on the electron weighing unit 14. The electronic scale 14 can continuously and automatically measure the weight of the water H supplied into the weighing container 70. The electronic scale 14 can output a continuous measurement result of the weight of the water H to the arithmetic device 15.

演算装置15は、例えば水Hの重さの連続的な計測結果から、上記Oリング40における時系列的なガス漏れ量を算出し、それをグラフ化できる。なお、演算装置15は、例えばディスプレイを備えたパーソナルコンピュータである。   The arithmetic unit 15 can calculate a time-series gas leakage amount in the O-ring 40 from a continuous measurement result of the weight of the water H, for example, and graph it. Note that the arithmetic device 15 is a personal computer provided with a display, for example.

次に、以上のように構成された気密試験装置1で行われるOリング40の気密試験方法について説明する。   Next, an airtight test method for the O-ring 40 performed by the airtight test apparatus 1 configured as described above will be described.

先ず、被試験体であるOリング40が、図2に示したようにOリング装着治具11の円柱状部30の外周面と筒状部32の内周面との間に装着される。このとき、Oリング装着治具11が収容されている恒温槽12は、例えば−60℃に維持されている。次に、高圧ガス供給装置10から例えば70MPa程度の高圧のヘリウムガスがOリング装着治具11に供給される。このとき、ガスは、Oリング装着治具11内の空間Pに流入し、さらにOリング40の一次側(空間P側)に供給される。例えばOリング40に対し所定時間高圧ガスが供給され、所定時間Oリング40の気密試験が行われる。   First, an O-ring 40 that is a device under test is mounted between the outer peripheral surface of the columnar portion 30 and the inner peripheral surface of the cylindrical portion 32 of the O-ring mounting jig 11 as shown in FIG. At this time, the thermostat 12 in which the O-ring mounting jig 11 is accommodated is maintained at, for example, −60 ° C. Next, a high pressure helium gas of about 70 MPa, for example, is supplied from the high pressure gas supply device 10 to the O-ring mounting jig 11. At this time, the gas flows into the space P in the O-ring mounting jig 11 and is further supplied to the primary side (space P side) of the O-ring 40. For example, a high pressure gas is supplied to the O-ring 40 for a predetermined time, and an airtight test of the O-ring 40 is performed for a predetermined time.

例えばOリング40の二次側に漏れたガスは、ガス流路50を通じて液体貯留容器13に流れる。液体貯留容器13では、その漏れたガスの圧力により水Hが押され、その押された分の水Hが液体流路60に送出される。液体流路60に送出された水Hは、電子量り14の量り容器70に供給される。電子量り14では、水Hの重さが連続的に計測される。この水Hの重さの連続的な計測結果は、演算装置15に出力される。   For example, the gas leaked to the secondary side of the O-ring 40 flows to the liquid storage container 13 through the gas flow path 50. In the liquid storage container 13, the water H is pushed by the pressure of the leaked gas, and the pushed water H is sent to the liquid channel 60. The water H sent to the liquid flow path 60 is supplied to the weighing container 70 of the electronic weighing unit 14. In the electronic weighing unit 14, the weight of the water H is continuously measured. A continuous measurement result of the weight of the water H is output to the arithmetic unit 15.

演算装置15では、水Hの重さの連続的な測定結果から、Oリング40における時系列的なガス漏れ量が算出され、グラフ化される。なお、このガス漏れ量の算出は、液体貯留容器13における漏れガスの流入量と、それに応じた水Hの送出量との関係を予め把握することにより、容易に行うことができる。   In the arithmetic unit 15, a time-series gas leakage amount in the O-ring 40 is calculated from a continuous measurement result of the weight of the water H, and is graphed. The calculation of the gas leakage amount can be easily performed by grasping in advance the relationship between the leakage gas inflow amount in the liquid storage container 13 and the water H delivery amount corresponding thereto.

以上の実施の形態によれば、Oリング40から漏れたガスの量を水Hの量に変換し、その水Hの量さを連続的に測定し、その水Hの量さから時系列的な漏れガス量を算出している。このため、Oリング40の時系列的なガス漏れ量を正確に測定することができ、この結果、高精度の気密試験を行うことができる。   According to the above embodiment, the amount of gas leaked from the O-ring 40 is converted into the amount of water H, the amount of water H is continuously measured, and the amount of water H is time-series. The amount of leaking gas is calculated. For this reason, the time-series gas leakage amount of the O-ring 40 can be accurately measured, and as a result, a highly accurate airtight test can be performed.

Oリング装着治具11は、円柱状部30と、円柱状部30が嵌入される穴31を有する筒状部32とを有し、円柱状部30の外周面と筒状部32の内周面との間にOリング40を装着するようにしたので、Oリング40の装着を簡単かつ適正に行うことができる。   The O-ring mounting jig 11 has a columnar portion 30 and a cylindrical portion 32 having a hole 31 into which the columnar portion 30 is inserted, and the outer peripheral surface of the columnar portion 30 and the inner periphery of the cylindrical portion 32. Since the O-ring 40 is attached to the surface, the O-ring 40 can be attached easily and appropriately.

また、筒状部32には、高圧ガス供給装置10からのガスをOリング40の一次側に流入させるガス流入路32aと、Oリング40の二次側から漏れたガスをガス流路50に流出させるガス流出路32bが形成されているので、Oリング40に対するガスの供給と漏れガスの排出を適正に行うことができる。   Further, in the cylindrical portion 32, a gas inflow path 32 a for allowing the gas from the high pressure gas supply device 10 to flow into the primary side of the O-ring 40, and a gas leaked from the secondary side of the O-ring 40 into the gas flow path 50. Since the gas outflow passage 32b for the outflow is formed, it is possible to appropriately supply the gas to the O-ring 40 and discharge the leaked gas.

さらに、ガス流路50が液体貯留容器13の上部に接続され、液体流路60が液体貯留容器13の内部に挿入されており、ガス流路50から液体貯留容器13に流入したガスの圧力によって液体貯留容器13内の水Hが液体流路60に送出されるようにしたので、Oリング40から漏れたガス量の水量への変換を簡単かつ適正に行うことができる。   Further, the gas flow path 50 is connected to the upper part of the liquid storage container 13, and the liquid flow path 60 is inserted into the liquid storage container 13, and the pressure of the gas flowing into the liquid storage container 13 from the gas flow path 50 is Since the water H in the liquid storage container 13 is sent to the liquid flow path 60, the gas amount leaked from the O-ring 40 can be easily and appropriately converted to the water amount.

以上、添付図面を参照しながら本発明の好適な実施の形態について説明したが、本発明はかかる例に限定されない。当業者であれば、特許請求の範囲に記載された思想の範疇内において、各種の変更例または修正例に相到し得ることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be made within the scope of the ideas described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

例えば以上の実施の形態では、シール部材がOリングであったが、本発明は、他のシール部材の気密試験にも適用できる。   For example, in the above embodiment, the seal member is an O-ring, but the present invention can also be applied to an airtight test of other seal members.

気密試験装置の構成の概略を示す模式図である。It is a schematic diagram which shows the outline of a structure of an airtight test apparatus. Oリング装着治具の構成の概略を示す縦断面の説明図である。It is explanatory drawing of the longitudinal cross-section which shows the outline of a structure of an O-ring mounting jig.

符号の説明Explanation of symbols

1 気密試験装置
10 高圧ガス供給装置
11 Oリング装着治具
12 恒温槽
13 液体貯留容器
14 電子量り
15 演算装置
50 ガス流路
60 液体流路
DESCRIPTION OF SYMBOLS 1 Airtight test apparatus 10 High-pressure gas supply apparatus 11 O-ring mounting jig 12 Constant temperature bath 13 Liquid storage container 14 Electronic scale 15 Arithmetic apparatus 50 Gas flow path 60 Liquid flow path

Claims (6)

シール部材の気密試験装置であって、
対向する壁面の間にシール部材を装着可能なシール部材装着治具と、
前記シール部材装着治具を収容する恒温槽と
前記シール部材装着治具のシール部材の一次側にガスを供給するガス供給装置と、
前記シール部材装着治具のシール部材の二次側から漏れたガスが流れるガス流路と、
前記ガス流路を通じてガスが供給され、その供給されたガスの量に応じて内部の液体を送出可能な液体貯留部と、
前記液体貯留部から送出された液体が流れる液体流路と、
前記液体流路を通じて液体が供給され、その供給された液体の重さを連続的に計測可能な量りと、
前記量りにより計測された液体の重さから、前記シール部材における時系列的なガス漏れ量を算出する演算装置と、を有することを特徴とする、シール部材の気密試験装置。
An airtight test device for a seal member,
A sealing member mounting jig capable of mounting a sealing member between opposing wall surfaces;
A thermostatic chamber for accommodating the sealing member mounting jig ;
A gas supply device for supplying gas to the primary side of the seal member of the seal member mounting jig;
A gas flow path through which gas leaked from the secondary side of the seal member of the seal member mounting jig,
A gas reservoir through which the gas is supplied, and a liquid reservoir capable of delivering an internal liquid according to the amount of the supplied gas;
A liquid flow path through which the liquid delivered from the liquid reservoir flows;
A liquid is supplied through the liquid channel, and a weight capable of continuously measuring the weight of the supplied liquid;
An airtight test apparatus for a seal member, comprising: an arithmetic unit that calculates a time-series gas leakage amount in the seal member from the weight of the liquid measured by the measurement.
前記シール部材装着治具は、円柱状部と、当該円柱状部が嵌入される穴を有する筒状部とを有し、前記筒状部の穴に嵌入された円柱状部の外周面と筒状部の内周面との間に前記シール部材を装着することを特徴とする、請求項1に記載のシール部材の気密試験装置。   The sealing member mounting jig includes a cylindrical portion and a cylindrical portion having a hole into which the cylindrical portion is inserted, and an outer peripheral surface of the cylindrical portion and a cylinder inserted into the hole of the cylindrical portion. The seal member hermeticity testing apparatus according to claim 1, wherein the seal member is mounted between the inner peripheral surface of the shaped portion. 前記筒状部には、前記ガス供給装置からのガスを前記シール部材の一次側に流入させるためのガス流入路と、前記シール部材の二次側から漏れたガスを前記ガス流路に流出させるためのガス流出路が形成されていることを特徴とする、請求項2に記載のシール部材の気密試験装置。   In the cylindrical portion, a gas inflow passage for allowing the gas from the gas supply device to flow into the primary side of the seal member, and a gas leaked from the secondary side of the seal member are allowed to flow out into the gas passage. A gas outflow passage for the seal member according to claim 2, wherein a gas outflow passage is formed. 前記ガス流路は、前記液体貯留部の上部に接続され、前記液体流路は、前記液体貯留部の内部に挿入されており、前記ガス流路から前記液体貯留部に流入したガスの圧力によって液体貯留部内の液体が前記液体流路に送出されることを特徴とする、請求項1〜3のいずれかに記載のシール部材の気密試験装置。   The gas flow path is connected to an upper portion of the liquid storage section, the liquid flow path is inserted into the liquid storage section, and the pressure of the gas flowing into the liquid storage section from the gas flow path The airtight test apparatus for a seal member according to any one of claims 1 to 3, wherein the liquid in the liquid reservoir is delivered to the liquid flow path. シール部材の気密試験方法であって、
シール部材装着治具の対向する壁面の間にシール部材を装着する工程と、
恒温槽に収容された前記シール部材装着治具のシール部材の一次側にガスを供給する工程と、
前記シール部材装着治具のシール部材の二次側から漏れたガスをガス流路を通じて液体貯留部に供給する工程と、
前記液体貯留部に供給されたガスの量に応じて液体貯留部の液体を液体流路を通じて量りに供給する工程と、
前記供給された液体の重さを量りで連続的に計測する工程と、
前記量りにより計測された液体の重さから、前記シール部材における時系列的なガス漏れ量を算出する工程と、を有することを特徴とする、シール部材の気密試験方法。
An airtight test method for a seal member,
Mounting a seal member between opposing wall surfaces of the seal member mounting jig;
Supplying gas to the primary side of the seal member of the seal member mounting jig housed in a thermostat ;
Supplying gas leaked from the secondary side of the seal member of the seal member mounting jig to the liquid storage part through the gas flow path;
A step of supplying the liquid in the liquid storage portion to the amount through the liquid flow path according to the amount of gas supplied to the liquid storage portion;
Measuring the weight of the supplied liquid continuously by weighing;
And a step of calculating a time-series gas leakage amount in the seal member from the weight of the liquid measured by the measurement.
前記ガス流路を通じて前記液体貯留部に流入したガスの圧力によって液体貯留容器内の液体が前記液体流路に送出されることを特徴とする、請求項5に記載のシール部材の気密試験方法。   6. The seal member airtightness test method according to claim 5, wherein the liquid in the liquid storage container is delivered to the liquid flow path by the pressure of the gas flowing into the liquid storage section through the gas flow path.
JP2007334241A 2007-12-26 2007-12-26 Seal member hermetic test apparatus and seal member hermetic test method Expired - Fee Related JP5217421B2 (en)

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