JP5216727B2 - 薄膜評価法 - Google Patents
薄膜評価法 Download PDFInfo
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- JP5216727B2 JP5216727B2 JP2009206287A JP2009206287A JP5216727B2 JP 5216727 B2 JP5216727 B2 JP 5216727B2 JP 2009206287 A JP2009206287 A JP 2009206287A JP 2009206287 A JP2009206287 A JP 2009206287A JP 5216727 B2 JP5216727 B2 JP 5216727B2
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- superconducting resonator
- evaluation method
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- 239000010409 thin film Substances 0.000 title claims description 74
- 238000011156 evaluation Methods 0.000 title claims description 36
- 230000035699 permeability Effects 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 13
- 239000000696 magnetic material Substances 0.000 claims description 10
- 239000002887 superconductor Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000010955 niobium Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical group [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 15
- 238000005259 measurement Methods 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 239000003989 dielectric material Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000002547 anomalous effect Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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- Measurement Of Resistance Or Impedance (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Filters And Equalizers (AREA)
Description
図1は、第1の実施の形態における薄膜評価法の実施に用いる評価装置の構成を示すブロック図である。同図に示す評価装置1は、超伝導共振器10と伝送線路20を形成した誘電体基板30、ネットワークアナライザ40、および評価部50を備える。本実施の形態における薄膜評価法は、被測定物である薄膜の成膜前後において超伝導共振器10の共振周波数とQ値を求め、共振周波数のずれとQ値の変化に基づいて誘電率、透磁率、および抵抗率を評価するものである。被測定物である薄膜は、超伝導共振器10の上に形成する。
次に、第2の実施の形態における薄膜評価法について説明する。
10,10A,10B,10C…超伝導共振器
11…インダクタンス部
12…キャパシタンス部
20…伝送線路
30…誘電体基板
31…SMAコネクタ
40…ネットワークアナライザ
50…評価部
Claims (6)
- 超伝導共振器と当該超伝導共振器と容量的に結合する伝送線路とを形成した誘電体基板を用いて薄膜の誘電率、透磁率、抵抗率を評価する薄膜評価法であって、
前記超伝導共振器の周波数依存性を測定して当該超伝導共振器の共振周波数及びQ値を求めるステップと、
前記超伝導共振器の上に被測定物である薄膜を形成するステップと、
薄膜形成後に前記超伝導共振器の周波数依存性を測定して当該超伝導共振器の共振周波数及びQ値を求めるステップと、
薄膜形成前後における共振周波数のずれ量とQ値の変化量から前記薄膜の誘電率、透磁率、抵抗率を算出するステップと、
を有することを特徴とする薄膜評価法。 - 前記超伝導共振器は、ミアンダラインで形成されたインダクタンス部とインターディジタルキャパシターで形成されたキャパシタンス部を有することを特徴とする請求項1記載の薄膜評価法。
- 前記薄膜を形成するステップは、前記薄膜が誘電体の場合には、前記キャパシタンス部に薄膜を形成し、前記薄膜が磁性体の場合には、前記インダクタンス部に薄膜を形成することを特徴とする請求項2記載の薄膜評価法。
- 前記誘電体基板はサファイアであることを特徴とする請求項1乃至3のいずれかに記載の薄膜評価法。
- 前記超伝導共振器の超伝導材料は、ニオブ、アルミニウム、あるいは高温超伝導体であることを特徴とする請求項1乃至4のいずれかに記載の薄膜評価法。
- 前記伝送線路に対して共振周波数が互いに異なる複数の超伝導共振器を配置したことを特徴とする請求項1乃至5のいずれかに記載の薄膜評価法。
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JP5216727B2 true JP5216727B2 (ja) | 2013-06-19 |
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RU2552106C1 (ru) * | 2014-04-29 | 2015-06-10 | Федеральное государственное казенное военное образовательное учреждение высшего профессионального образования "Военный учебно-научный центр Военно-воздушных сил "Военно-воздушная академия имени профессора Н.Е. Жуковского и Ю.А. Гагарина" (г. Воронеж) Министерства обороны Российской Федерации | Свч-способ определения диэлектрической проницаемости и толщины покрытий на металле |
US11004896B1 (en) | 2019-11-06 | 2021-05-11 | International Business Machines Corporation | System and method for non-invasive large-scale qubit device characterization technique |
WO2022085441A1 (ja) * | 2020-10-23 | 2022-04-28 | 国立大学法人東北大学 | 透磁率及び誘電率を測定する測定装置及び測定方法 |
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US5328893A (en) * | 1991-06-24 | 1994-07-12 | Superconductor Technologies, Inc. | Superconducting devices having a variable conductivity device for introducing energy loss |
JP3522971B2 (ja) * | 1995-05-25 | 2004-04-26 | 株式会社東芝 | 高周波デバイス |
JP3136357B2 (ja) * | 1999-03-02 | 2001-02-19 | 株式会社移動体通信先端技術研究所 | 共振器の共振周波数調整方法 |
JP2002064312A (ja) * | 2000-08-23 | 2002-02-28 | Japan Science & Technology Corp | 電磁波素子 |
JP4530907B2 (ja) * | 2005-04-25 | 2010-08-25 | 京セラ株式会社 | 誘電体薄膜の誘電特性測定方法 |
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