JP5216443B2 - Humidity measuring device - Google Patents

Description

  The present invention relates to a humidity measuring apparatus that uses a humidity sensor installed in a measurement environment atmosphere.

  Conventionally, humidity sensors include a resistance change type in which the resistance value of the humidity sensitive element changes in accordance with a change in humidity and a capacitance change type humidity sensor in which the capacity of the humidity sensitive element changes in accordance with a change in humidity. .

  When any of these types of humidity sensors is installed at the measurement site, it is directly exposed to the atmosphere of the measurement environment to measure the humidity. For this reason, the atmosphere of the measurement environment (for example, gases such as chemicals and solvents, high-humidity environments, etc.) ), The moisture sensitive element deteriorates. This deterioration of the humidity sensitive element is referred to as the deterioration of the performance of the humidity sensor in this specification. When the performance of the humidity sensor deteriorates, the measurement accuracy decreases and the reliability is lost.

  The deteriorated performance of the humidity sensor can be recovered by heating the humidity sensitive element as disclosed in Patent Document 1, for example. Hereinafter, the process for recovering the deteriorated performance of the humidity sensor due to heating is referred to as heat cleaning. By periodically performing this heat cleaning, it is possible to extend the useful life of the humidity sensor. In Patent Document 1, the moisture sensitive element is heated by a timer circuit for 4 to 5 minutes every 150 hours at 800 ° C., for example.

  When heat cleaning is performed, the moisture sensitive element is stressed by heat received during the heat cleaning, and when this stress accumulates, the life of the humidity sensor is shortened. The stress received by the humidity sensitive element depends on the atmosphere of the measurement environment in which the humidity sensor is installed, but in normal cases, the atmosphere of the measurement environment cannot be grasped in advance. For this reason, it is impossible to individually adjust the humidity sensor heating cleaning conditions (heating cycle, heating time, heating temperature, etc.) at the time of manufacture in the factory. Therefore, conventionally, all the humidity sensors are set to a uniform heating cleaning condition at the time of manufacturing in a factory or on site.

Japanese Patent Laid-Open No. 5-172776

  However, if all humidity sensors are shipped under the uniform heating cleaning conditions, the heating cycle and heating time are too long or too short for the humidity sensor installed in the measurement environment. Repeated heating hurts the moisture sensitive element and shortened its life, and conversely, the deteriorated performance could not be sufficiently recovered, and there was a problem that the measurement value continued to be used in a shifted state.

  The present invention has been made in order to solve such a problem, and an object of the present invention is to provide a humidity measuring device that can automatically update the heating cleaning condition of the humidity sensor to a more appropriate condition. It is to provide.

In order to achieve such an object, the first invention (the invention according to claim 1) includes first and second humidity sensors installed in the same measurement environment atmosphere, and the first and second humidity. The first and second heaters attached to the sensor and the first and second heaters are energized to periodically heat the first and second humidity sensors at different timings without overlapping the heating time. After either one of the heater driving means and the first and second humidity sensors are heated, the humidity sensor on the side heated this time is a measurement sensor, and the humidity sensor on the side not heated this time is a non-measurement sensor The heating condition changing means for changing the next heating condition of the non-measuring sensor and the difference between the actual measured value of humidity from the non-measuring sensor and the actual measured value of humidity from the measuring sensor are used as a shift amount. Next time of sensor Means for storing a table that defines the relationship between the waiting time until heating and the heating time, and the heating condition changing means is configured so that, after either one of the first and second humidity sensors is heated, The difference between the actual measured value of humidity and the actual measured value of humidity at the same timing from the non-measuring sensor is obtained, and the waiting time and the heating time until the next heating according to the shift amount are calculated from the above table using this difference as the shift amount. It is characterized in that the read-out waiting time until the next heating and the heating time are changed as the next heating condition of the non-measuring sensor.

In the first aspect of the present invention , the actual measured value of the humidity after the end of heating from the currently heated side humidity sensor means that after the energization of the heater for heating the currently heated side humidity sensor is stopped, The measured value of humidity at the time when the influence of heating is eliminated. In this case, the point in time when the influence of heating is eliminated may be determined by the temperature difference between the humidity sensor on the side heated this time and the humidity sensor on the side not heated, or a predetermined time after the heating is finished. You may make it judge at the time of having passed.

In the first aspect, the first humidity sensor is heated (heat cleaned), the humidity actually measured values after the end of heating cleaning from the first humidity sensor (the actual value of the humidity from the measuring sensor) second The condition of the next heating cleaning of the second humidity sensor (non-measurement sensor) (next time ) according to the difference from the actual humidity measurement value ( measurement value of humidity from the non-measurement sensor) at the same timing from the other humidity sensor (Waiting time until heating and heating time) are changed. In this case, the difference between the actual measured value of humidity after the completion of the heat cleaning from the first humidity sensor and the actual measured value of humidity at the same timing from the second humidity sensor is the same as that of the first humidity sensor by the heat cleaning. Since recovery of the deteriorated performance is achieved, the degree of deterioration of the second humidity sensor is represented. Therefore, the condition for the next heat cleaning of the second humidity sensor is changed according to the degree of deterioration of the second humidity sensor. The change of the heating cleaning condition of the second humidity sensor is performed after the first humidity sensor is heated and cleaned.

In the first invention , when the second humidity sensor is heated (heat cleaning), the measured humidity value after the heat cleaning from the second humidity sensor (the measured humidity value from the measurement sensor) and the second humidity sensor are changed. The condition for the next heating cleaning of the first humidity sensor (non-measurement sensor) according to the difference from the actual humidity measurement value ( measurement value of humidity from the non-measurement sensor) at the same timing from the first humidity sensor ( The waiting time until the next heating and the heating time) are changed. In this case, the difference between the actual measured value of humidity after completion of the heat cleaning from the second humidity sensor and the actual measured value of humidity at the same timing from the first humidity sensor is the same as that of the second humidity sensor. Since recovery of the deteriorated performance is achieved, the degree of deterioration of the first humidity sensor is represented. Therefore, the conditions for the next heat cleaning of the first humidity sensor are changed according to the degree of deterioration of the first humidity sensor. The change of the heating cleaning condition of the first humidity sensor is repeated after the second humidity sensor is heated and cleaned.

In the first invention, for example, when an organic solvent is contained in the measurement environment atmosphere and this is known to be a cause of deterioration of the humidity sensor, the organic solvent can be removed by heating in a relatively short time. If the interval is shortened and the number of times of heating is increased, the cause of deterioration can be effectively removed, and the resilience against deterioration can be enhanced. In such a case, if the waiting time until the next heating is shortened, as a result, the heating interval is shortened and the number of times of heating is increased.

In the first invention, when the measurement environment atmosphere contains a highly adhesive substance, the surface of the moisture sensitive element is likely to be attached, and it is known that this is the cause of deterioration of the humidity sensor. The longer the heating time, the more effectively the cause of deterioration can be removed and the resilience against deterioration can be enhanced. In such a case, if the next heating time is lengthened, the resilience against deterioration can be enhanced.

According to a second invention (invention according to claim 2), in one of the first invention, after any one of the first and second humidity sensors is heated, the humidity after completion of heating from the heated humidity sensor In response to the difference between the actual measured value and the measured humidity value at the same time from the unheated humidity sensor, an alarm is issued when the difference exceeds a predetermined value. Is.
As described above, the difference between the measured value of humidity after the end of heating from the first humidity sensor and the measured value of humidity at the same timing from the second humidity sensor indicates the degree of deterioration of the second humidity sensor. The difference between the measured value of humidity after the end of heating from the second humidity sensor and the measured value of humidity at the same timing from the first humidity sensor represents the degree of deterioration of the first humidity sensor. Therefore, in the second invention , an alarm is issued when the degree of degradation exceeds a predetermined value.

According to a third invention (invention according to claim 3), in the first invention, an alarm is issued when the change of the heating condition reaches a limit.
In the first invention, after any one of the first and second humidity sensors is heated, the measured value of the humidity after the heating from the currently heated humidity sensor and the non-heated humidity sensor are heated. The next heating condition of the humidity sensor on the side that has not been heated is changed according to the difference from the actual measured value of humidity at the same timing. When the change of the heating condition reaches the limit, an alarm is issued.
For example, an upper limit value is set for the heating time, and an alarm is issued when it becomes necessary to set the next heating time to the upper limit value or more.

According to a fourth invention (invention according to claim 4), in the first invention , the first and second heaters are energized alternately and periodically without overlapping heating periods by energizing the first and second heaters. It is intended to be heated.
In the first invention , the first and second heaters are energized to periodically heat the first and second humidity sensors at different timings without overlapping the heating time. In this case, it is sufficient that the heating time does not overlap, and the second humidity sensor may be heated twice during one heating cycle of the first humidity sensor.
In contrast to the first invention, in the fourth invention , the first humidity sensor and the second humidity sensor are alternately heated. That is, the second humidity sensor is heated once during one heating cycle of the first humidity sensor. Thereby, the frequency | count of heating of the 1st humidity sensor and the 2nd humidity sensor becomes the same, and a lifetime is reached at the substantially same time.

According to the present invention, after either one of the first and second humidity sensors is heated, the measured value of the humidity after heating from the currently heated humidity sensor (measurement sensor) is not heated. depending on the difference between the actual measurement value of humidity at the same timing from the humidity sensor side (non-measurement sensor), until the next heating conditions (for the next heating of the humidity sensor has not been heated side (non-measurement sensor) By changing the waiting time and heating time) , the heating cleaning conditions are automatically updated appropriately so that the shift of the output value of the humidity sensor installed in the measurement environment atmosphere is within the allowable range. can go.

  Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing a main part of an embodiment of a humidity measuring apparatus according to the present invention.

  In the same figure, 1 is a capacitance change type first humidity sensor installed in the atmosphere of the measurement environment, 2 is a capacity change type second humidity sensor installed in the atmosphere of the same measurement environment as the first humidity sensor 1. 3 is a first heater for heating cleaning attached to the first humidity sensor 1, 4 is a second heater for heating cleaning attached to the second humidity sensor 2, and 5 is a humidity sensor. An input conversion circuit, 6 is a temperature sensor input conversion circuit, 7 is a heater drive circuit, 8 is a microcomputer, 9 is a display unit, SW1 is a remaining life check switch, SW2 is a calibration start instruction switch, and the first humidity sensor The first and second humidity sensors 2 have the same characteristics.

  In this embodiment, the humidity sensor input conversion circuit 5, the temperature sensor input conversion circuit 6, the heater drive circuit 7, the microcomputer 8, the display unit 9 and the like are accommodated in the case of the humidity measuring device 100. FIG. 2 shows an external view of the humidity measuring apparatus 100.

  In FIG. 2, the humidity sensor 1 and the heater 3 are accommodated in the first sensor unit 100-1, and the humidity sensor 2 and the heater 4 are accommodated in the second sensor unit 100-2. 2A shows a state in which the first sensor unit 100-1 and the second sensor unit 100-2 are set in the case of the humidity measuring device 100, and FIG. 2B shows the first sensor unit 100-. The state which pulled apart the 1st and 2nd sensor part 100-2 from the case of the humidity measuring apparatus 100 is shown. Usually, as shown in FIG.2 (b), the 1st sensor part 100-1 and the 2nd sensor part 100-2 are separated from a case, and are installed in a measurement environment.

  In the humidity measuring apparatus 100, the humidity sensor input conversion circuit 5 converts a capacitance change signal corresponding to the measured humidity from the first humidity sensor 1 into a voltage signal, and converts the voltage signal from the first humidity sensor 1. The measured humidity value HR1 is given to the microcomputer 8. Further, the humidity sensor input conversion circuit 5 converts a capacitance change signal corresponding to the measured humidity from the second humidity sensor 2 into a voltage signal, and converts the voltage signal into an actual measured value HR2 of humidity from the second humidity sensor 2. To the microcomputer 8 as follows.

  The heater drive circuit 7 energizes the first heater 3 and the second heater 4 in response to an instruction from the microcomputer 8. The first heater 3 and the second heater 4 also serve as a temperature sensor. That is, the first heater 3 and the second heater 4 can function as temperature sensors when heating is not performed. Therefore, the first heater 3 serves as both a heating unit that heats the first humidity sensor 1 and a measurement unit that measures the temperature of the first humidity sensor 1. Similarly, the second heater 4 serves as a heating unit that heats the second humidity sensor 2 and a measurement unit that measures the temperature of the second humidity sensor 2. A signal indicating the temperature of the humidity sensor 1 from the first heater 3 and a signal indicating the temperature of the humidity sensor 2 from the second heater 4 are sent to the temperature sensor input conversion circuit 6. The heaters 3 and 4 need not be heaters that also serve as temperature sensors, but may be dedicated to the heaters and provided with a separate temperature sensor.

  The temperature sensor input conversion circuit 6 converts a signal corresponding to the measured temperature from the first heater 3 into a voltage signal, and gives the voltage signal to the microcomputer 8 as the measured value TR1 of the temperature of the first humidity sensor 1. . The temperature sensor input conversion circuit 6 converts a signal corresponding to the measured temperature from the second heater 4 into a voltage signal, and uses the voltage signal as an actual measured value TR2 of the temperature of the second humidity sensor 2. Give to.

  The microcomputer 8 includes a CPU 8-1, a ROM 8-2, a RAM 8-3, a nonvolatile memory 8-4, and the CPU 8-1 while accessing the RAM 8-3 and the nonvolatile memory 8-4. It operates according to a program stored in the ROM 8-2.

[Humidity measurement processing: first example (basic example)]
Hereinafter, a first example (basic example) of humidity measurement processing performed by the CPU 8-1 according to the program stored in the ROM 8-2 will be described using the time chart shown in FIG. 3.

  The CPU 8-1 sets the heating cycle T to 8 hours, the heating time t to 1 hour, shifts the heating cycle T from each other by a half cycle, and while performing the heat cleaning of the first humidity sensor 1 and the second humidity sensor 2, The humidity is continuously measured as follows.

  First, the CPU 8-1 heats and cleans the first humidity sensor 1 (FIG. 3A: points t0 to t1). After the heat cleaning of the first humidity sensor 1 is completed, the first humidity sensor 1 that has been heat cleaned this time is a measurement sensor, and the second humidity sensor 2 that has not been heat cleaned is a non-measurement sensor. The humidity measurement value HR1 from the humidity sensor (measurement sensor) 1 is used as the humidity measurement value HR.

  Next, the CPU 8-1 heats and cleans the second humidity sensor 2 (FIG. 3B: points t2 to t3). Then, after the heat cleaning of the second humidity sensor 2 is completed, the second humidity sensor 2 that has been heat cleaned this time is used as a measurement sensor, and the first humidity sensor 1 that has not been heat cleaned is used as a non-measurement sensor. The humidity measurement value HR is switched from the humidity measurement value HR1 from the first humidity sensor (non-measurement sensor) 1 to the humidity measurement value HR2 from the second humidity sensor (measurement sensor) 2.

  Next, the CPU 8-1 heats and cleans the first humidity sensor 1 (FIG. 3A: points t4 to t5). After the heat cleaning of the first humidity sensor 1 is completed, the first humidity sensor 1 that has been heat cleaned this time is used as a measurement sensor, and the second humidity sensor 2 that has not been heat cleaned is used as a non-measurement sensor. The humidity measurement value HR is switched from the humidity measurement value HR2 from the second humidity sensor (non-measurement sensor) 2 to the humidity measurement value HR1 from the first humidity sensor (measurement sensor) 1.

  In the same manner, the measured value HR1 of the humidity from the first humidity sensor 1 is measured until the second humidity sensor 2 is heated and cleaned after the heating cleaning of the first humidity sensor 1 is completed. The measured humidity value HR2 from the second humidity sensor 2 is used as a measured value HR until the first humidity sensor 1 is heated and cleaned after the second humidity sensor 2 is heated and cleaned. Repeat the action of using.

  In this way, in the first example of the humidity measurement process, the measured humidity value HR1 from the humidity sensor 1 and the measured humidity values HR1 and HR2 from the humidity sensors 1 and 2 during the heat cleaning are avoided. The humidity measurement value HR2 from the humidity sensor 2 is alternately used to perform continuous measurement of the humidity with high reliability.

  The humidity sensors 1 and 2 deteriorate with the passage of time after the end of the heat cleaning. Then, when the next heat cleaning is performed, the deteriorated performance is recovered, and it deteriorates with time. In the first example of the humidity measurement process, the time (measurement time) in which the actual measured value of humidity is used as the measured value is the time after both the first humidity sensor 1 and the second humidity sensor 2 have finished the heat cleaning ( To be precise, it is a time from a “stable time” + a “time after a transition time” described later.

  In this case, the heating cycle T and the heating time t of the first humidity sensor 1 and the second humidity sensor 2 are the same, and the heating cycle T of the first humidity sensor 1 is shifted by a half cycle. The measurement time TM1 and the measurement time TM2 of the second humidity sensor 2 are substantially equal. Thereby, in any case of the 1st humidity sensor 1 and the 2nd humidity sensor 2, the section with a small deterioration degree is made into measurement time, and it can raise measurement accuracy, without shortening heating cycle T.

[Stable time]
In the first example of the humidity measurement process, each time the humidity sensors 1 and 2 are heated, the humidity sensor on the side heated this time is used as a measurement sensor, and the humidity sensor on the side not heated is used as a non-measurement sensor. The measured value is switched from the measured humidity value from the non-measuring sensor to the measured humidity value from the measuring sensor.

  In this case, after the heating of the measurement sensor is finished, when the difference between the temperature of the measurement sensor and the temperature of the non-measurement sensor becomes a predetermined value or less, the actual measurement of the humidity from the measurement sensor is performed from the actual measurement value of the humidity from the non-measurement sensor Start switching to the value.

  In this way, after the heating cleaning of the measurement sensor is finished, when the influence of the heating is lost (after the stabilization time has elapsed), the actual measurement of the humidity from the measurement sensor is performed from the actual measurement value of the humidity from the non-measurement sensor. Switching to the value will be performed.

  Note that the measured value of humidity from the non-measuring sensor is not when the difference between the temperature of the measuring sensor and the temperature of the non-measuring sensor falls below the predetermined value, but when a predetermined time has elapsed after the heating of the measuring sensor is completed. The switching from the measurement sensor to the actual measurement value of humidity may be started. In this way, it is not necessary to measure the temperature of the humidity sensors 1 and 2. Thereby, it is not necessary to use a heater serving as a temperature sensor as the heaters 3 and 4. In addition, a dedicated temperature sensor can be eliminated.

[Transition period]
Further, in the first example of the humidity measurement process, when switching from the measured value of humidity from the non-measurement sensor to the measured value of humidity from the measurement sensor, the measured value of humidity from the non-measurement sensor and the measurement sensor are used. A smoothing process is performed in which the difference between the measured value and the measured humidity value is gradually reduced over time.

  When switching from the measured value of humidity from the non-measuring sensor to the measured value of humidity from the measuring sensor, the actual measured value of humidity from the non-measuring sensor used up to that point and Since there may be a difference from the measured value of humidity from the measurement sensor, the continuity of the measured value is lost when switching immediately.

  Therefore, if smoothing processing is performed in which the difference between the actual measured value of humidity from the non-measuring sensor and the actual measured value of humidity from the measuring sensor is gradually reduced over time, that is, a transition period is provided so that no measurement is performed. If the difference between the actual measured value of humidity from the sensor and the actual measured value of humidity from the measurement sensor is gradually reduced, the occurrence of these problems can be prevented.

[Change of heating conditions]
Further, in the first example of the humidity measurement process, the degree of deterioration of the humidity sensors 1 and 2 is determined, and the next heating condition of the humidity sensors 1 and 2 is changed according to the degree of deterioration.

[Example 1 of changing heating conditions]
For example, at the start of operation, the actual measured value of the humidity from the humidity sensor 1 during the first heat cleaning (when heated by a heater at a high temperature of 150 to 180 ° C., the influence of the atmosphere in the surrounding environment is reduced and the humidity is almost zero. percent becomes stores the output value) HR1 of the humidity sensor at that time as an initial value HR1 _0. Thereafter, after heating the cleaning, the difference between the actual measurement value (value of approximately when humidity 0%) HR1 and the initial value HR1 ₀ humidity from the humidity sensor 1 in that the heating clean, determines the degree of deterioration of the humidity sensor 1 To do.

  If the degree of deterioration is large according to the degree of deterioration of the humidity sensor 1, the heating cycle for the humidity sensor 1 is shortened, the heating time is lengthened, or the heating temperature is increased. Similarly, if the degree of deterioration is large according to the degree of deterioration of the humidity sensor 2, the heating cycle for the humidity sensor 2 is shortened, the heating time is lengthened, or the heating temperature is increased.

[Example 2 of changing heating conditions]
For example, every time the humidity sensors 1 and 2 are heated, the measured value of the humidity after heating from the currently heated humidity sensor (measured value after the stabilization time has elapsed) and the non-heated humidity sensor The next heating condition of the humidity sensor on the non-heated side is changed according to the difference from the measured value of humidity at the same timing.

  In this case, the difference between the measured value HR1 of the humidity after completion of the heating cleaning from the humidity sensor 1 (measured value after the stabilization time has elapsed) HR1 and the measured value HR2 of the humidity at the same timing from the humidity sensor 2 is Therefore, the degree of deterioration of the humidity sensor 2 is represented. If the degree of deterioration of the humidity sensor 2 is large, the waiting time until the next heating of the humidity sensor 2 is shortened, the next heating time is lengthened, or the next heating temperature is increased. The heating cleaning condition of the humidity sensor 2 is changed after the humidity sensor 1 is heated and cleaned.

  Further, the difference between the measured value HR2 of the humidity after the heating cleaning from the humidity sensor 2 (measured value after the lapse of the stable time) HR2 and the measured value HR1 of the humidity at the same timing from the humidity sensor 1 is caused by the heating cleaning. Since the recovery of the deteriorated performance of the humidity sensor 2 is attempted, the degree of deterioration of the humidity sensor 1 is represented. If the degree of deterioration of the humidity sensor 1 is large, the waiting time until the next heating of the humidity sensor 1 is shortened, the next heating time is lengthened, or the next heating temperature is increased. The heating cleaning condition of the humidity sensor 1 is changed after the humidity sensor 2 is heated and cleaned.

  When changing the heating cleaning conditions, the next heating cycle, the waiting time until the next heating, the next heating time, the next heating temperature, etc. are changed as described above, but these are changed individually. Alternatively, it may be changed in combination.

  For example, if the measurement environment atmosphere contains an organic solvent and this is known to be the cause of the deterioration of the humidity sensor, the organic solvent can be removed by heating in a relatively short time, so the heating interval should be shortened. If the number of times of heating is increased, the cause of deterioration can be effectively removed, and the resilience against deterioration can be enhanced. In this case, if the waiting time until the next heating is shortened, as a result, the heating interval is shortened, the number of times of heating is increased, and the recovery power against deterioration is increased.

  In addition, if the measurement environment atmosphere contains a highly adherent substance, and the surface of the moisture sensitive element is likely to be attached, this is known to cause the deterioration of the humidity sensor, one heating time If the length is longer, the cause of deterioration can be effectively removed, and the resilience against deterioration can be enhanced. In this case, the resilience against deterioration is increased by extending the next heating time.

  In the first example of the humidity measurement process, each time the humidity sensors 1 and 2 are heated, the measured value of the humidity after the heating from the heated humidity sensor (actual value after the lapse of the stable time) is reached. In response to the difference between the measured value and the measured humidity value at the same timing from the non-heated humidity sensor, an alarm is issued when the difference exceeds a predetermined value.

  That is, the difference between the measured value HR1 of the humidity after the heat cleaning from the humidity sensor 1 (measured value after the stable time has elapsed) HR1 and the measured value HR2 of the humidity at the same timing from the humidity sensor 2 is The degree of deterioration is expressed, and the difference between the actual measured value HR2 of the humidity after completion of the heat cleaning from the humidity sensor 2 and the actual measured value HR1 of the humidity at the same timing from the humidity sensor 1 represents the degree of deterioration of the humidity sensor. The degree of deterioration is monitored, and an alarm is issued when the degree of deterioration exceeds a predetermined value.

  In the first example of the humidity measurement process, an alarm is issued when the change in the heating cleaning condition reaches a limit. For example, an upper limit value is set for the heating time, and an alarm is issued when it becomes necessary to set the next heating time to the upper limit value or more. In addition, a lower limit value is set for the heating cycle, and an alarm is issued when the next heating cycle needs to be lower than the lower limit value.

  In the first example of the humidity measurement process, the heating cycle T of the first humidity sensor 1 and the second humidity sensor 2 is the same and the heating cycle T is shifted by a half cycle. The amount of deviation may not be a half cycle. In this case, the measurement time TM1 of the first humidity sensor 1 and the measurement time TM2 of the second humidity sensor 2 are not equal, and the actual humidity measurement value from the non-measurement sensor is switched to the actual humidity measurement value from the measurement sensor. Although the degree of deterioration of the humidity sensor 1 and the humidity sensor 2 when the operation is performed is different, some deviation is allowed as an allowable range.

  Further, although the measurement accuracy is lowered, as shown in FIG. 4, the measured value HR2 of the humidity from the second humidity sensor 2 is used as the measured value HR only during the heat cleaning of the first humidity sensor 1. May be. In this case, the degree of deterioration in the measurement time TM1 of the first humidity sensor 1 is large, but the degree of deterioration in the measurement time TM2 of the second humidity sensor 2 is small, and the measured value HR2 of the humidity from the second humidity sensor 2 is small. The measurement accuracy when using as the measurement value HR is high.

[Humidity measurement processing: second example (example)]
Next, a second example (actual example) of the humidity measurement process performed by the CPU 8-1 according to the program stored in the ROM 8-2 will be described using the time chart shown in FIG. 5A shows the energization state of the first heater 3, FIG. 5B shows the energization state of the second heater 4, and FIG. 5C shows the temperature of the first humidity sensor 1. The actual measured value TR1 (solid line) and the actual measured value TR2 (dotted line) of the temperature of the second humidity sensor 2 are shown, and FIG. 5 (d) shows the measured actual value HR1 (solid line) of the humidity from the first humidity sensor 1. 2 shows an actual measurement value HR2 (dotted line) of humidity from the humidity sensor 2 and a measurement value HR (thick line) of humidity to be used.

[Heating cleaning]
The CPU 8-1 sends a command to the heater drive circuit 7, energizes the first heater 3, and heats the first humidity sensor 1 (FIG. 5A: points t 1 to t 2). Thereby, the heating cleaning of the 1st humidity sensor 1 is performed by making heating time into t. During this heat cleaning, the measured value TR1 of the temperature of the first humidity sensor 1 rises, and the measured value HR1 of the humidity from the first humidity sensor 1 decreases. In this case, the CPU 8-1 selects the measured humidity value HR2 from the second humidity sensor 2 as the measured humidity value HR to be used.

[Measurement value switching process]
When the heat cleaning of the first humidity sensor 1 is completed, the CPU 8-1 sets the humidity sensor 1 on the side heated this time as a measurement sensor and the humidity sensor 2 on the side not heated as a non-measurement sensor. The process of switching the actual measurement value for switching the measurement value HR from the actual measurement value HR2 of the humidity from the non-measurement sensor 2 to the actual measurement value HR1 of the humidity from the measurement sensor 1 is started.

(Monitoring temperature difference)
In this case, the CPU 8-1 monitors the difference ΔT between the measured temperature value TR1 of the first humidity sensor 1 and the measured temperature value TR2 of the second humidity sensor 2, and the difference ΔT is a predetermined value ΔTth (for example, , ΔTth = 0.3) or less (FIG. 5C: t2 to t3 points (stable time)).

  When ΔT ≦ ΔTth, the CPU 8-1 determines that the influence of the heating of the first humidity sensor 1 has been eliminated, and the measurement value HR of the humidity to be used is determined from the actual measurement value HR2 of the humidity from the non-measurement sensor 2. To the actual measured value HR1 of the humidity from

  Here, the measurement sensor 1 is after the completion of the heat cleaning, and the non-measurement sensor 2 has passed a considerable time since the end of the previous heat cleaning. That is, the measurement sensor 1 is in a state immediately after the process for recovering the degraded performance is performed, and the non-measurement sensor 2 is in a state in which the performance degradation is in progress.

  In this case, the difference ΔH (ΔH = ΔH) between the actual measured value HR2 of the humidity from the non-measurement sensor 2 that has been used as the measured value and the actual measured value HR1 of the humidity from the measurement sensor 1 to be used as the current measured value HR. Since | HR2-HR1 |) is large, the continuity of the measured value HR is impaired if the switching is performed immediately.

[Smoothing process]
Therefore, when the CPU 8-1 switches from the measured humidity value HR2 from the non-measurement sensor 2 to the measured humidity value HR1 from the measurement sensor 1, the measured humidity value HR2 from the non-measurement sensor 2 and the measurement sensor 1 Smoothing processing is performed in which the difference from the measured humidity value HR1 is gradually reduced over time (FIG. 5 (d): points t3 to t4 (transition period)).

In this example, the CPU 8-1 performs the smoothing process as follows. The measured humidity value HR2 from the non-measuring sensor 2 at the point t3 (starting point of the transition period) is set to HR2i, and the measured humidity value HR1 from the measuring sensor 1 at the same point is set to HR1i. Further, after the point t3, the measured value HR1 of the humidity from the measurement sensor 1 is sampled at a predetermined cycle, and the sampling value at the nth cycle is set to HR1 _n . Then, the smoothing coefficient (moving average weight value) is set to k (k <1), and the measured value HR _n of the nth period humidity during smoothing is calculated using the following arithmetic expressions (1) and (2). To do.
_{HR n = (1-k)} · HR n-1 + k · HR1 n-1 ···· (1)
However, when n = 0, HR ₀ = HR2i (2)

When the difference ΔHR (ΔHR = | HR _n −HR1 _n |) between HR _n and HR1 _n becomes equal to or smaller than the predetermined value ΔHRth, the smoothing process is terminated, and the measured humidity value HR2 from the non-measurement sensor 2 is used. The switching from the measurement sensor 1 to the measured humidity value HR1 is completed. Note that the predetermined value ΔHRth at this time is called a smoothing end determination value, and for example, ΔHRth = 0.5 is used. For example, k = (1/2) 8 = 0.003906 is used as the smoothing coefficient k.

[Heating cleaning]
Then, the CPU 8-1 waits for a predetermined waiting time TW to elapse (FIG. 5 (d): t4 to t5, FIG. 6: YES in step S101), sends a command to the heater drive circuit 7, and receives the second The heater 4 is energized to heat the second humidity sensor (non-measurement sensor) 2 (FIG. 5 (b): points t5 to t6, FIG. 6: steps S102 and S103).

  Thereby, the heating cleaning of the humidity sensor 2 is performed with the heating time as t. During this heat cleaning, the actual measurement value TR2 of the humidity sensor 2 increases, and the actual measurement value HR2 of the humidity from the humidity sensor 2 decreases. In this case, the CPU 8-1 selects the measured humidity value HR1 from the first humidity sensor (measurement sensor) 1 as the measured humidity value HR to be used.

[Measurement value switching process]
When the heat cleaning of the humidity sensor 2 is completed (FIG. 6: YES in step S103), the CPU 8-1 measures the humidity sensor 2 on the side heated this time as a measurement sensor and the humidity sensor 1 on the side not heated as a non-measurement sensor. Then, the measurement value switching process for switching the measured humidity value HR to be used from the measured humidity value HR1 from the non-measurement sensor 1 to the measured humidity value HR2 from the measurement sensor 2 is started.

(Monitoring temperature difference)
In this case, the CPU 8-1 monitors the difference ΔT (ΔT = | ΔTR2−ΔTR1 |) between the actual measurement value TR2 of the humidity sensor 2 and the actual measurement value TR1 of the humidity sensor 1, and this difference ΔT is a predetermined value. Wait until ΔTth (for example, ΔTth = 0.3) or less (FIG. 5C: t6 to t7 (stable time), FIG. 6: Steps S104 and S105).

[Smoothing process]
When ΔT ≦ ΔTth is satisfied (FIG. 6: YES in step 105), the CPU 8-1 determines that the influence of heating of the humidity sensor 2 has disappeared, and in the same manner as described above, the measured value HR1 of the humidity from the non-measurement sensor 1 is determined. And smoothing processing for gradually reducing the difference between the measured value HR2 of humidity from the measurement sensor 2 over time (FIG. 5 (d): points t7 to t8 (transition period), FIG. 6: step S106) .

In this example, the CPU 8-1 performs the smoothing process as follows. The measured humidity value HR1 from the non-measurement sensor 1 at the point t7 (starting point of the transition period) is set to HR1i, and the measured humidity value HR2 from the measurement sensor 2 at the same point is set to HR2i. Further, after the point t7, the measured value HR2 of the humidity from the measurement sensor 2 is sampled at a predetermined cycle, and the sampling value at the nth cycle is set to HR2 _n . Then, the smoothing coefficient (moving average weight value) is set to k (k <1), and the measured value HR _n of the nth period humidity during smoothing is calculated using the following arithmetic expressions (3) and (4). To do.
_{HR n = (1-k)} · HR n-1 + k · HR2 n-1 ···· (3)
However, when n = 0, HR ₀ = HR1i (4)

When the difference ΔHR between HR _n and HR2 _n becomes equal to or smaller than the predetermined value ΔHRth, the smoothing process is terminated, and the measured humidity value HR1 from the non-measurement sensor 1 is changed to the measured humidity value HR2 from the measurement sensor 2. Is completed (FIG. 6: step S107). Then, after elapse of a predetermined waiting time TW (FIG. 5 (d): t8 to t9, FIG. 6: YES in step S101), the processing operation in step S102 and subsequent steps is repeated.

[Change of heating cleaning conditions]
In the humidity measurement process described above, the CPU 8-1 starts at the start point of the transition period (smoothing process) (FIG. 5: points t3 and t7 (points after the stabilization time has elapsed)) after the end of the heat cleaning. Based on the difference ΔH between the actual measurement value of humidity from the non-measurement sensor used as the measurement value and the actual measurement value of humidity from the measurement sensor to be used as the current measurement value, the next heating cleaning of the non-measurement sensor is performed. Change the conditions.

  For example, in the transition period start point t3, the actual measured value HR2 from the non-measurement sensor 2 that has been used as a measured value and the actual measured value of humidity from the measured sensor 1 that is to be used as the current measured value. Based on the difference ΔH (ΔH = | HR2−HR1 |) with HR1, the non-measurement sensor 2 according to the table TB1 (see FIG. 7) showing the relationship between “shift amount”, “waiting time”, and “heating time”. The waiting time TW until the next heating cleaning and the next heating time t are changed. In the change of the heating cleaning condition, if ΔH is 15 <ΔH, an alarm is issued.

  If only the table TB1 shown in FIG. 7 is followed, “step No.” may flutter or the shift amount may not be maintained below a certain level. In order to correct such a problem, a table TB2 showing the relationship between “shift level” and “shift amount” shown in FIG. 8, “step No.”, “waiting time” and “heating time” shown in FIG. It is also conceivable to use in combination with the table TB3 indicating the relationship with “”.

  In this case, first, a shift level corresponding to the value of ΔH is obtained from the table TB2. Based on this shift level, “step No.” in the table TB3 is determined. For example, when “Step No.” in the table TB3 is “1” and the shift level in the table TB2 is “1”, the “Step No.” in the table TB3 is “2”. As a result, the waiting time TW is changed from “240 [hr]” to “120 [hr]”. With this change, it is sufficient that ΔH falls within the shift level “0”, but if not, “step No.” in the table TB3 is further increased. Similarly, “step No.” in the table TB3 is changed so that the shift level in the table TB2 falls within “0”. If “Step No.” in the table TB3 is “11”, an alarm is issued.

[Prediction of remaining life of humidity sensor]
In the humidity measuring apparatus 100, when the remaining life confirmation switch SW1 is turned on, the CPU 8-1 predicts the remaining life of the humidity sensors 1 and 2. In this case, the CPU 8-1 sets the current heating cycle to Tn, the current heating time to tn, and calculates the required life prediction including the current heating cycle Tn and the current heating time tn in advance. Substituting into the equation, the remaining life Trest of the humidity sensors 1 and 2 is predicted. That is, from the required information including the current heating cycle Tn and the current heating time tn, it is predicted how long the life will be exhausted if the pace is kept as it is.

[Method 1]
As a first method, the CPU 8-1 receives the current heating cycle Tn, the current heating time tn, the standard heating cycle Ts, and the standard heating time ts until the end of the useful life of the humidity sensors 1 and 2. Substituting the total heating time tssum and the actual heating time integrated value tsum of the humidity sensors 1 and 2 up to the present time into the formula (A) for predicting the lifetime, the remaining lifetime Trest of the humidity sensors 1 and 2 is calculated. Predict. Then, the predicted remaining life Trest of the humidity sensors 1 and 2 is displayed on the display unit 9.
Trest = (tssum−tsum) Tn / tn (A)

  The standard heating cycle Ts and the standard heating time ts are determined as standard values for the heating cycle T and the heating time t, and the humidity sensors 1 and 2 when the standard heating cycle Ts and the standard heating time ts are continued. Is the total of the heating times of the humidity sensors 1 and 2 that are received before the end of the service life Ttlu (the service life total heating time) is defined as tssum.

  FIG. 10 shows the relationship between the usage time and the accumulated heating time. When the standard heating cycle Ts and the standard heating time ts are continued during the use period, the relationship between the use time and the integrated heating time becomes a linear characteristic I as shown in FIG. From this characteristic I (life straight line of Ts, ts), the total durable heating time tssum after the end of the durable period Ttlu is determined.

  In this first method, as the basic data for predicting the remaining life, the total durable heating time tssum after the end of the durable period Ttlu when the standard heating cycle Ts and the standard heating time ts are continued is stored in the nonvolatile memory 8. -4. Then, when the remaining life confirmation switch SW1 is turned on (when the actual use time Tu shown in FIG. 10 has elapsed), the total durable heating time tssum stored in the memory 8-4 is read, and this read durable The total heating time tssum, the current heating cycle Tn, the current heating time tn, and the integrated value tsum of the actual heating time up to the present are substituted into the above equation (A) to obtain the remaining life Trest.

  The above equation (A) is assumed to continue the current heating period Tn and the current heating time tn during the period of Trest, as shown as characteristic II (life prediction line of Tn, tn) in FIG. An equation of tssum-tsum = (Trest / Tn) · tn is established and obtained by modifying this equation.

  In this first method, even if the actual use time Tu, the service life Ttlu, the standard heating cycle Ts, and the standard heating time ts are unknown, the current heating cycle Tn, the current heating time tn, the total service heating time tssum, The remaining life Trest can be obtained from the integrated value tsum of the actual heating time up to now.

[Method 2]
In the above formula (A), the total durable heating time tssum can be expressed as tssum = (Ttlu / Ts) · ts = ts · Ttlu / Ts. That is, the above equation (A) can be modified as the following equation (B) by replacing tssum with ts · Ttlu / Ts.
Trest = (ts · Ttlu / Ts−tsum) Tn / tn (B)

  In the second method, this formula (B) is used, and the standard heating cycle Ts, the standard heating time ts, the standard heating cycle Ts, and the standard heating time ts are continued as basic data for predicting the remaining life. Is stored in the nonvolatile memory 8-4. When the remaining life confirmation switch SW1 is turned on (when the actual use time Tu shown in FIG. 10 has elapsed), the standard heating cycle Ts, the standard heating time ts, and the service life stored in the memory 8-4 are stored. Ttlu is read out, and the read standard heating cycle Ts, standard heating time ts, service life Ttlu and current heating cycle Tn, current heating time tn, and integrated value tsum of actual heating time up to the present are expressed by the above equation (B). And the remaining lifetime Trest is obtained.

  In this second method, even if the total durable heating time tssum and the actual use time Tu are unknown, the current heating cycle Tn, the current heating time tn, the standard heating cycle Ts, the standard heating time ts, the useful life time Ttlu, The remaining life Trest can be obtained from the integrated value tsum of the actual heating time up to now.

〔Calibration〕
In the humidity measuring apparatus 100, when the calibration start instruction switch SW2 is turned on, that is, when a calibration start command is received, the CPU 8-1 starts calibration of the humidity sensors 1 and 2. This calibration start command may be given online from the host device.

[Calibration of humidity sensor 1]
When receiving the calibration start command, the CPU 8-1 energizes the heater (heating element) 3 to heat the humidity sensor 1. During the heating of the humidity sensor 1, it is confirmed that the temperature of the humidity sensor 1 has reached a saturation state based on the measured value TR1 of the temperature of the humidity sensor 1, and the measured value HR1 of the humidity from the humidity sensor 1 at this time is confirmed. Is stored in the non-volatile memory 8-4 as a low humidity reference value. The humidity corresponding to this low humidity reference value is preferably approximately 0% humidity and not necessarily 0% humidity, but it is important that the humidity be close to that. Thereafter, the CPU 8-1 refers to the low humidity reference value stored in the nonvolatile memory 8-4, and performs an offset adjustment process on the actual measured value HR1 of the humidity from the humidity sensor 1.

[Calibration of humidity sensor 2]
When receiving the calibration start command, the CPU 8-1 energizes the heater (heating element) 4 to heat the humidity sensor 2. During the heating of the humidity sensor 2, it is confirmed that the temperature of the humidity sensor 2 has reached a saturation state based on the measured value TR2 of the humidity sensor 2, and the measured humidity value HR2 from the humidity sensor 2 at this time is confirmed. Is stored in the non-volatile memory 8-4 as a low humidity reference value. The humidity corresponding to this low humidity reference value is preferably approximately 0% humidity and not necessarily 0% humidity, but it is important that the humidity be close to that. Thereafter, the CPU 8-1 refers to the low humidity reference value stored in the non-volatile memory 8-4, and performs an offset adjustment process on the measured humidity value HR2 from the humidity sensor 2.

  This calibration may be performed, for example, when the humidity sensor 1 or 2 fails on the user side and is replaced with a new humidity sensor 1 or 2. In this case, it is not necessary for the user to have equipment that can realize a standard environment and a standard humidity sensor, and it is not necessary to use a humidity sensor that uses a trimmed humidity sensitive element. The humidity sensors 1 and 2 can be easily and inexpensively replaced.

  In this calibration, the fact that the temperature of the humidity sensors 1 and 2 has reached the saturation state is determined from the changes ΔTR1 and ΔTR2 of the measured values TR1 and TR2 of the temperature of the humidity sensors 1 and 2. For example, ΔTR1 and ΔTR2 are obtained in a predetermined cycle, and when ΔTR1 and ΔTR2 reach a predetermined value or less, it is determined that the temperature of the humidity sensors 1 and 2 has reached a saturated state.

  Further, since the temperature fluctuates due to the control of the heaters 3 and 4, after the temperature of the humidity sensors 1 and 2 reaches the saturation state, for example, after waiting for 1 minute, the actually measured value HR1 of the lowest humidity within the 1 minute. You may make it memorize | store HR2 as a low temperature reference value of each humidity sensor.

  Further, the changes ΔTR1 and ΔTR2 in the actual measured values TR1 and TR2 of the temperature of the humidity sensors 1 and 2 may not be used. May be stored as the low humidity reference value of each humidity sensor, and the actual measured values HR1 and HR2 of the humidity from the humidity sensors 1 and 2 at that time may be stored.

  In addition, when a cooling element is attached to the humidity sensors 1 and 2 and a calibration start command is received, the humidity sensors 1 and 2 are cooled by energizing the cooling elements and the humidity sensors 1 and 2 are being cooled. Then, it is confirmed that the temperature of the humidity sensors 1 and 2 has reached the saturation state, and the measured values HR1 and HR2 of the humidity from the humidity sensors 1 and 2 at this time are used as the high humidity reference value of each humidity sensor, and the nonvolatile memory Store in 8-4. The humidity corresponding to these high-humidity reference values is preferably about 100% humidity and not necessarily 100% humidity, but it is important that the humidity is close to that. Thereafter, the offset adjustment processing is performed on the actual measured values HR1 and HR2 of the humidity from the humidity sensors 1 and 2 with reference to the high humidity reference value of each humidity sensor stored in the nonvolatile memory 8-4. It may be.

  When the heaters 3 and 4 are thermoelectric cooling elements (Peltier elements) and a calibration start command is received, the thermoelectric cooling elements 3 and 4 are energized in the forward direction to heat the humidity sensors 1 and 2. During the heating of the humidity sensors 1 and 2, it is confirmed that the temperature of the humidity sensors 1 and 2 has reached a saturated state, and the measured humidity values HR1 and HR2 from the humidity sensors 1 and 2 at this time are obtained from the respective humidity sensors. The low humidity reference value is stored in the non-volatile memory 8-4. Next, the thermoelectric cooling elements 3 and 4 are energized in the reverse direction to cool the humidity sensors 1 and 2, and the humidity sensors 1 and 4 are cooled. 2 during cooling, it is confirmed that the temperature of the humidity sensors 1 and 2 has reached the saturation state, and the measured humidity values HR1 and HR2 from the humidity sensors 1 and 2 at this time are used as the high humidity reference values of the respective humidity sensors. Store in nonvolatile memory 8-4 Thereafter, referring to the low humidity reference value of each humidity sensor and the high humidity reference value of each humidity sensor stored in the nonvolatile memory 8-4, the actual measured value HR1 of the humidity from the humidity sensors 1, 2 is referred to. , HR2 may be subjected to span adjustment processing. In this example, the humidity sensors 1 and 2 are heated first, but the humidity sensors 1 and 2 may be cooled first. Further, as described above, the humidity corresponding to the low humidity reference value is desirably approximately 0% humidity, while the humidity corresponding to the high humidity reference value is desirably approximately 100% humidity. .

[Temperature smoothing]
In the above description, when the measured value of humidity to be used is switched from the measured value of humidity from the non-measurement sensor to the measured value of humidity from the measurement sensor, the measured value of humidity from the non-measurement sensor and the measured value of humidity from the measurement sensor Although the smoothing process in which the difference from the value is gradually reduced over time is performed, this smoothing process can also be applied to the temperature.

  In FIG. 11, an example of the functional block of the principal part of the humidity measuring device 100 is shown. The humidity measuring apparatus 100 includes a heater driving unit 101, an actual measurement value switching unit 102, a heating condition changing unit 103, a first alarm unit 104, a second alarm unit 105, a remaining life prediction unit 106, and an offset. Adjustment processing means 107.

  The heater driving means 101 energizes the first heater 3 and the second heater 4 to alternately and periodically perform the first humidity sensor 1 and the second humidity sensor 2 without overlapping heating periods. Heat. In this example, the humidity sensor 1 and the second humidity sensor 2 are heated by setting the heating cycle to T, the heating time to t, and shifting the heating cycle T from each other by a half cycle.

  Each time the first humidity sensor 1 and the second humidity sensor 2 are heated, the measured value switching means 102 measures the humidity sensor on the side that has been heated this time, and does not measure the humidity sensor on the side that has not been heated. As the sensor, the process of switching the actual measurement value for switching the measurement value of the humidity to be used from the actual measurement value of the humidity from the non-measurement sensor to the actual measurement value of the humidity from the measurement sensor is started. In this case, the difference ΔT between the measured value of the temperature of the measurement sensor and the measured value of the temperature of the non-measurement sensor is monitored, and the smoothing process is started when ΔT becomes equal to or less than ΔTth. Then, as described above, when the difference ΔHR becomes equal to or smaller than the predetermined value ΔHRth, the smoothing process is terminated, and the switching from the measured humidity value from the non-measurement sensor to the measured humidity value from the measurement sensor is completed.

  The heating condition changing means 103 is an actual value (stable humidity) after the end of heating from the humidity sensor on the heating side this time after either one of the first humidity sensor 1 and the second humidity sensor 2 is heated. The next heating condition (heating cycle) of the non-heated humidity sensor according to the difference ΔH between the measured value after the passage of time) and the actually measured humidity value at the same timing from the non-heated humidity sensor , Heating time, heating temperature, etc.).

  The first alarm means 104 is configured to measure an actual measured value of humidity (stable after the heating from the heated humidity sensor after one of the first humidity sensor 1 and the second humidity sensor 2 is heated). When the difference ΔH exceeds a predetermined value in accordance with the difference ΔH between the measured value after the passage of time) and the measured value of humidity at the same timing from the non-heated humidity sensor. Raise an alarm. The second alarm unit 104 issues an alarm when the heating condition change by the heating condition changing unit 103 reaches a limit.

  The remaining life prediction means 106 includes basic data storage means 106A, heating time integrated value calculation means 106B, and remaining life prediction means 106C. The basic data storage means 106A stores the total durable heating time tssum as basic data. When the remaining life confirmation switch SW1 is turned on, the heating time integrated value calculating means 106B calculates the integrated value tsum of the heating time up to now. The remaining life prediction means 106C is stored in the basic data storage means 106A, the current heating cycle Tn, the current heating time tn, the heating time integrated value tsum from the heating time integrated value calculating means 106B, and the current data. The remaining lifetime Trest of the humidity sensors 1 and 2 is predicted from the total durable heating time tssum. For the prediction of the remaining life Trest, the above-described equation (A) is used.

  When the calibration start instruction switch SW2 is turned on, the offset adjustment processing unit 107 sends a command to the heater driving unit 10 and energizes the heaters 3 and 4 to heat the humidity sensors 1 and 2. During the heating of the humidity sensors 1 and 2, the measured value of the humidity from the humidity sensors 1 and 2 whose temperature is saturated is stored in the reference value storage means 107A as the low humidity reference value of each humidity sensor. Then, with reference to the low humidity reference value of each humidity sensor stored in the reference value storage means 107A, the offset adjustment processing is performed on the actual measurement values HR1 and HR2 of the humidity in the actual measurement value switching means 102.

It is a block block diagram which shows one Embodiment of the humidity measuring apparatus which concerns on this invention. It is a figure which shows the external appearance of this humidity measuring device. It is a time chart for demonstrating the 1st example (basic example) of the humidity measurement process which CPU in this humidity measuring device performs. It is a time chart at the time of using the measured value of the humidity from a 2nd humidity sensor as a measured value only during the heating cleaning of a 1st humidity sensor in the 1st example of this humidity measurement process. It is a time chart for demonstrating the 2nd example (example) of the humidity measurement process which CPU in this humidity measuring device performs. It is a flowchart for demonstrating the 2nd example of this humidity measurement process. It is a figure which illustrates table TB1 which shows the relationship between "shift amount", "waiting time", and "heating time." It is a figure which illustrates table TB2 which shows the relationship between "shift level" and "shift amount". It is a figure which illustrates table TB3 which shows the relationship between "step NO.", "Waiting time", and "heating time." It is a figure which shows the relationship between the usage time of a humidity sensor, and integration heating time. It is a figure which shows an example of the functional block of the principal part of a humidity measuring device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... 1st humidity sensor, 2 ... 2nd humidity sensor, 3 ... 1st heater, 4 ... 2nd heater, 5 ... Humidity sensor input conversion circuit, 6 ... Temperature sensor input conversion circuit, 7 ... Heater Drive circuit, 8 ... microcomputer, 8-1 ... CPU, 8-2 ... ROM, 8-3 ... RAM, 8-4 ... nonvolatile memory, 9 ... display unit, SW1 ... remaining life check switch, SW2 ... calibration Start instruction switch, 100 ... humidity measuring device, 100-1 ... first sensor unit, 100-2 ... second sensor unit, 101 ... heater driving means, 102 ... measured value switching means, 103 ... heating condition changing means 104 ... first warning means, 105 ... second warning means, 106 ... remaining life prediction means, 106A ... basic data storage means, 106B ... heating time integrated value calculation means, 106C ... remaining life prediction means, 107 ... Offset adjustment processing unit, 107A ... reference value storage means.

Claims (4)

A first and a second humidity sensor installed in the same measurement environment atmosphere;
First and second heaters attached to the first and second humidity sensors;
Heater driving means for energizing the first and second heaters to periodically heat the first and second humidity sensors at different timings without overlapping heating times;
After either one of the first and second humidity sensors is heated, the humidity sensor on the side heated this time is a measurement sensor, the humidity sensor on the side not heated this time is a non-measurement sensor, A heating condition changing means for changing the next heating condition;
The difference between the measured value of humidity from the non-measurement sensor and the measured value of humidity from the measurement sensor is used as a shift amount, and the relationship between the shift amount and the waiting time until the next heating of the non-measurement sensor and the heating time Means for storing a table that defines
The heating condition changing means includes
After either one of the first and second humidity sensors is heated, the difference between the measured value of humidity from the measurement sensor and the measured value of humidity at the same timing from the non-measurement sensor is obtained. Using the difference as a shift amount, the waiting time and heating time until the next heating corresponding to the shift amount are read from the table, and the read waiting time and heating time until the next heating are used as the next heating condition of the non-measurement sensor. change
A humidity measuring device characterized by that . In the humidity measuring device according to claim 1,
After either one of the first and second humidity sensors is heated, the measured value of the humidity after the heating from the heated humidity sensor and the same timing from the non-heated humidity sensor are the same. A humidity measuring device comprising alarm means for issuing an alarm when the difference exceeds a predetermined value in accordance with a difference from an actual measured value of humidity . In the humidity measuring device according to claim 1 ,
A humidity measuring device comprising alarm means for issuing an alarm when the heating condition change by the heating condition changing means reaches a limit . In the humidity measuring device according to claim 1 ,
The heater driving means includes
A humidity measuring apparatus, wherein the first and second heaters are energized to heat the first and second humidity sensors alternately and periodically without overlapping heating periods .

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