JP5210907B2 - Manufacturing method of electrical contacts - Google Patents

Manufacturing method of electrical contacts Download PDF

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JP5210907B2
JP5210907B2 JP2009022467A JP2009022467A JP5210907B2 JP 5210907 B2 JP5210907 B2 JP 5210907B2 JP 2009022467 A JP2009022467 A JP 2009022467A JP 2009022467 A JP2009022467 A JP 2009022467A JP 5210907 B2 JP5210907 B2 JP 5210907B2
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plating
plating film
noble metal
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真一 長野
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Alps Alpine Co Ltd
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Alps Electric Co Ltd
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Description

本発明は、スイッチ、コネクタ等の表面に貴金属めっき膜がめっきされた電気接点の製造方法に関する。   The present invention relates to a method for manufacturing an electrical contact in which a noble metal plating film is plated on the surface of a switch, a connector or the like.

従来から電気接点の表面には化学的に安定したAuを用いていた。例えば電気接点は、銅から成る母材金属の表面にNiめっきを介してAuめっきを施した積層構造で形成されていた。そしてNiめっきを必要とするのは、Auと母材金属間での拡散現象を抑制するためであった。   Conventionally, chemically stable Au has been used on the surface of the electrical contact. For example, the electrical contact is formed of a laminated structure in which the surface of a base metal made of copper is plated with Au via Ni plating. The reason why Ni plating is required is to suppress the diffusion phenomenon between Au and the base metal.

特開2005−19335号公報JP-A-2005-19335 特開2007−217798号公報JP 2007-217798 A

ところで、前記Niめっきのめっき厚を厚く形成すれば母材拡散防止の効果を高めることができるが、製造費の無駄を招き、また後加工性を悪くしクラックが生じやすくなる等の問題が生じた。   By the way, if the plating thickness of the Ni plating is increased, the effect of preventing the base material diffusion can be enhanced. However, problems such as waste of manufacturing cost and worsening of post-workability and easy occurrence of cracks occur. It was.

その一方で、前記Niめっきのめっき厚を薄く形成すれば、製造費を安くでき、また後加工性の向上を図ることができるが、Niめっきに生じるピンホールのために腐食しやすいといった問題が生じた。   On the other hand, if the plating thickness of the Ni plating is reduced, the manufacturing cost can be reduced and the post-workability can be improved, but there is a problem that it is easily corroded due to the pinhole generated in the Ni plating. occured.

上記した特許文献には、上記した従来課題の認識はなく、当然にそれを解決する手段は示されていない。   The above-mentioned patent documents do not recognize the above-described conventional problems, and naturally, means for solving them is not shown.

そこで本発明は上記従来の課題を解決するためのものであり、特に、NiあるいはNi合金の下地めっき膜に形成されたピンホール内に貴金属めっき膜を析出させて適切に封孔することができる電気接点の製造方法を提供することを目的としている。   Accordingly, the present invention is for solving the above-described conventional problems, and in particular, a noble metal plating film can be deposited in a pinhole formed in a base plating film of Ni or a Ni alloy and appropriately sealed. It aims at providing the manufacturing method of an electrical contact.

本発明における電気接点の製造方法は、以下の工程を有することを特徴とするものである。
(a) 母材金属上に電解めっき法にてNiあるいはNi合金の下地めっき膜をめっき形成する工程、
(b) 前記下地めっき膜の表面に、白金族あるいは白金族合金からなる貴金属めっき膜を電解めっき法にてめっき形成し、このとき、電流密度を高くして初期めっきをした後、電流密度を低くして残りをめっきする工程。
The method of manufacturing an electrical contact in the present invention is characterized by having the following steps.
(A) a step of plating a base plating film of Ni or Ni alloy by electrolytic plating on a base metal;
(B) A noble metal plating film made of a platinum group or a platinum group alloy is formed by electroplating on the surface of the base plating film. At this time, the current density is increased and the initial plating is performed. The process of lowering and plating the rest.

上記のように貴金属めっき膜をめっき形成するとき、最初、電流密度を高く設定することで、微結晶化できる。このため、NiあるいはNi合金からなる下地めっき膜を薄く形成したことで生じたピンホール内に、微結晶の貴金属めっき膜を析出させることができ効果的に封孔することが出来る。ピンホールはめっきの活性点であり、優先的にピンホール内に析出するので、最初のわずかな時間だけ、例えば、通常よりも電流密度を高めて貴金属めっき膜をめっき形成すればよい。また、貴金属をめっき形成するときは通常、めっき槽中に光沢剤が含まれているが、前記光沢剤は電流密度が高いとめっき膜中に多く含まれる。しかしながら、光沢剤が貴金属めっき膜表面に多く析出すると、接触性能や、貴金属めっき膜表面に更にめっきを施した際の密着性を低下させる。このため、貴金属めっき膜をめっき形成するとき、最初から最後まで高い電流密度とせず、初期めっきを高い電流密度でめっきした後は、電流密度を低くして残りをめっきすることで、貴金属めっき膜の表面に析出する光沢剤量を少なくでき、接触性能や密着性を向上させることが可能になる。   When the noble metal plating film is formed by plating as described above, it can be microcrystallized by first setting a high current density. For this reason, a microcrystalline noble metal plating film can be deposited in the pinhole generated by thinly forming the base plating film made of Ni or Ni alloy, and can be effectively sealed. Since the pinhole is an active point of plating and is preferentially deposited in the pinhole, the noble metal plating film may be formed by plating for a short initial time, for example, with a higher current density than usual. Further, when a noble metal is formed by plating, a brightening agent is usually contained in the plating tank. However, if the current density is high, a large amount of the brightening agent is contained in the plating film. However, when a large amount of brightener is deposited on the surface of the noble metal plating film, the contact performance and the adhesion when further plating is performed on the surface of the noble metal plating film are deteriorated. For this reason, when plating a noble metal plating film, the current density is not high from the beginning to the end. It is possible to reduce the amount of the brightener deposited on the surface of the film and improve the contact performance and adhesion.

本発明では、前記(b)工程では、白金族あるいは白金族合金により前記貴金属めっき膜をめっき形成することが好ましい。これにより、母材拡散をより効果的に抑制することが出来る。   In the present invention, in the step (b), the noble metal plating film is preferably formed by plating with a platinum group or a platinum group alloy. Thereby, base material diffusion can be more effectively suppressed.

また本発明では、白金族あるいは白金族合金からなる前記貴金属めっき膜をめっき形成した後、前記貴金属めっき膜の表面に、AuめっきあるいはAgめっきを施すことが出来る。本発明では白金族あるいは白金族合金からなる貴金属めっき膜を接点表面にできるし、あるいは上記のように、さらにAuめっきあるいはAgめっきを施すときでもAuめっき及びAgめっきを従来に比べて、薄く形成することが出来る。   In the present invention, after plating the noble metal plating film made of platinum group or platinum group alloy, Au plating or Ag plating can be applied to the surface of the noble metal plating film. In the present invention, a noble metal plating film made of a platinum group or a platinum group alloy can be formed on the contact surface, or as described above, even when Au plating or Ag plating is further performed, Au plating and Ag plating are formed thinner than conventional ones. I can do it.

本発明の電気接点の製造方法によれば、NiあるいはNi合金の下地めっき膜に形成されたピンホール内に貴金属めっき膜を析出させて適切に封孔することができる。   According to the method for producing an electrical contact of the present invention, a noble metal plating film can be deposited in a pinhole formed in a base plating film of Ni or Ni alloy and appropriately sealed.

本実施形態の電気接点の製造工程を示す断面図、Sectional drawing which shows the manufacturing process of the electrical contact of this embodiment, 電気接点の形成領域を備える母材基板(フープ材)の部分平面図、Partial plan view of a base material substrate (hoop material) having a region for forming electrical contacts, めっき槽内の陽極の配置を示す概略図、Schematic showing the arrangement of the anode in the plating tank, マスク板を配置しためっき槽内の配置を示す概略図、Schematic showing the arrangement in the plating tank where the mask plate is arranged, 図4におけるマスク板の平面図、FIG. 4 is a plan view of the mask plate in FIG. めっき槽内の陽極の配置を示す概略図。Schematic which shows arrangement | positioning of the anode in a plating tank.

図1は、本実施形態の電気接点の製造方法を示す工程図であり、各図は製造工程中における断面図、である。   FIG. 1 is a process diagram showing a method of manufacturing an electrical contact according to the present embodiment, and each figure is a cross-sectional view during the manufacturing process.

図1(a)に示す工程では、母材金属1の表面1aに、NiあるいはNi合金の下地めっき膜2を電解めっき法にてめっき形成する。母材金属1はCuや黄銅等である。また下地めっき膜2を構成するNi合金としてはNiCo等である。   In the step shown in FIG. 1A, a base plating film 2 made of Ni or Ni alloy is formed on the surface 1a of the base metal 1 by electroplating. The base metal 1 is Cu, brass or the like. The Ni alloy constituting the base plating film 2 is NiCo or the like.

図1(a)の工程では、下地めっき膜2のめっき厚H1を0.02〜1μm程度に薄く形成する。このとき、下地めっき膜2には多数のピンホール2aが形成される。ピンホール2aの孔径は、数nm〜1μm程度である。また、下地めっき膜2の結晶粒の粒子径は数十nm〜数百nm程度である。   In the step of FIG. 1A, the plating thickness H1 of the base plating film 2 is formed as thin as about 0.02 to 1 μm. At this time, a large number of pinholes 2 a are formed in the base plating film 2. The hole diameter of the pinhole 2a is about several nm to 1 μm. The particle diameter of the crystal grains of the base plating film 2 is about several tens nm to several hundreds nm.

次に、図1(b)に示す工程では、貴金属めっき膜3を電解めっき法にて下地めっき膜2の表面にめっき形成する。貴金属めっき膜3を、Au、Ag、Pt,Pd、Rh、Ir、Ru、Osのいずれか1種あるいは2種以上からなる合金、又は前記貴金属と貴金属以外の元素とを含む合金(無機物化合物)で形成する。このとき、例えば、最初の電流密度を通常の電流密度よりも高い状態に設定し、結晶粒が微細な初期めっき膜3aをめっき形成する。図1(b)では結晶粒が微細であり、下地めっき膜2のピンホール2a内に優先的に析出していることを模式図的に示した。前記初期めっき膜3aの結晶粒の粒子径は、0.1nm〜数十nm程度である。また、初期めっき膜3aのめっき厚は、0.0001〜0.1μm程度である。   Next, in the step shown in FIG. 1B, the noble metal plating film 3 is formed on the surface of the base plating film 2 by electrolytic plating. The noble metal plating film 3 is made of one or more of Au, Ag, Pt, Pd, Rh, Ir, Ru, and Os, or an alloy (inorganic compound) containing the noble metal and an element other than the noble metal. Form with. At this time, for example, the initial current density is set to be higher than the normal current density, and the initial plating film 3a having fine crystal grains is formed by plating. FIG. 1B schematically shows that the crystal grains are fine and preferentially precipitate in the pinholes 2 a of the base plating film 2. The crystal grain size of the initial plating film 3a is about 0.1 nm to several tens of nm. The plating thickness of the initial plating film 3a is about 0.0001 to 0.1 μm.

前記初期めっき膜3aは、最初のわずかな時間(数秒程度)だけ電流密度を高めた状態でめっき形成される。図1(b)のように下地めっき膜2に形成されたピンホール2aは貴金属めっき膜3をめっき形成するときの活性点であり、電流密度を高めたことで微細な結晶粒が優先的にピンホール2a内に析出する。   The initial plating film 3a is formed by plating in a state where the current density is increased for the first short time (about several seconds). The pinhole 2a formed in the base plating film 2 as shown in FIG. 1B is an active point when the noble metal plating film 3 is formed by plating, and fine crystal grains are preferentially given by increasing the current density. Precipitates in the pinhole 2a.

次に、図1(c)の工程では、前記初期めっき膜3aをめっき形成した後、電流密度を例えば通常の電流密度に戻し(初期めっき膜3a形成時の電流密度より低下させ)、残りのめっき膜3bを電解めっき法にてめっき形成する。図1の実施形態では、初期めっき膜3aと残りのめっき膜3bとで貴金属めっき膜3が構成される。   Next, in the step of FIG. 1C, after the initial plating film 3a is formed by plating, the current density is returned to, for example, a normal current density (lower than the current density at the time of forming the initial plating film 3a), and the rest The plating film 3b is formed by electroplating. In the embodiment of FIG. 1, the noble metal plating film 3 is constituted by the initial plating film 3a and the remaining plating film 3b.

残りのめっき膜3bは、電流密度を小さくしてめっきするために結晶粒の粒子径が初期めっき膜3aより大きくなる。前記残りのめっき膜3bの結晶粒の粒子径は、数十nm〜数百nm程度である。残りのめっき膜bのめっき厚は必要なめっき厚だけ任意に形成できる。一例を挙げると、残りのめっき膜3bのめっき厚は、0.05μm程度である。   The remaining plating film 3b has a crystal grain size larger than that of the initial plating film 3a in order to perform plating with a reduced current density. The particle diameter of the crystal grains of the remaining plating film 3b is about several tens nm to several hundreds nm. The remaining plating film b can be arbitrarily formed by a necessary plating thickness. As an example, the plating thickness of the remaining plating film 3b is about 0.05 μm.

このように貴金属めっき膜3をめっき形成するとき、最初、微結晶の初期めっき膜3aをピンホール2a内に優先的に析出させることで、貴金属めっき膜3にて適切に下地めっき膜2に形成されたピンホール2aを封孔することが出来る。   Thus, when the noble metal plating film 3 is formed by plating, first, the microcrystalline initial plating film 3a is preferentially deposited in the pinhole 2a, so that the noble metal plating film 3 is appropriately formed on the base plating film 2. The pinhole 2a thus formed can be sealed.

ところで、貴金属めっき膜3を最初から最後まで通常より高い電流密度でめっき形成するのは以下の理由により好ましくない。   By the way, it is not preferable to form the noble metal plating film 3 with a higher current density than usual from the beginning to the end for the following reason.

貴金属めっき膜3を電解めっき法にてめっき形成するとき、通常、めっき槽内には光沢剤が含まれている。光沢剤は電流密度を高めるほどめっき膜中に含有されやすくなる。また光沢剤量が増えることで、結晶粒の粒子径を小さくできる。すなわち貴金属めっき膜3の初期めっき膜3aをめっき形成する際、電流密度を高く設定することで、初期めっき膜3aに含まれる光沢剤量は多くなり且つ結晶粒の粒子径が小さくなる。よって、貴金属めっき膜3を最初から最後まで高い電流密度でめっき形成すると、貴金属めっき膜3の表面に多量の光沢剤が析出することになる。   When the noble metal plating film 3 is formed by electroplating, a brightening agent is usually contained in the plating tank. The brighter is more easily contained in the plating film as the current density is increased. Moreover, the particle diameter of crystal grains can be reduced by increasing the amount of brightener. That is, when the initial plating film 3a of the noble metal plating film 3 is formed by plating, by setting the current density high, the amount of brightener contained in the initial plating film 3a increases and the particle diameter of the crystal grains decreases. Therefore, when the noble metal plating film 3 is formed by plating at a high current density from the beginning to the end, a large amount of brightener is deposited on the surface of the noble metal plating film 3.

しかしながら光沢剤が表面に多量析出すると接点としての接触性能を低下させる。あるいは図1(c)に示すように、貴金属めっき膜3の表面に更に最表面めっき膜4を施すとき、貴金属めっき膜3と最表面めっき膜4との間の密着性が低下する問題が生じる。   However, when a large amount of brightener is deposited on the surface, the contact performance as a contact is lowered. Alternatively, as shown in FIG. 1C, when the outermost plating film 4 is further applied to the surface of the noble metal plating film 3, there is a problem that the adhesion between the noble metal plating film 3 and the outermost plating film 4 is lowered. .

このため、最初のわずかな時間だけ高い電流密度に設定して初期めっき膜3aをめっき形成した後、電流密度を低くして残りのめっき膜3bをめっき形成する。これにより、貴金属めっき膜3の表面に析出する光沢剤量を少なくでき、接触性能及び密着性を効果的に向上させることが可能になる。   For this reason, the initial plating film 3a is formed by plating at a high current density for the first short time, and then the remaining plating film 3b is formed by lowering the current density. Thereby, the amount of brightener deposited on the surface of the noble metal plating film 3 can be reduced, and the contact performance and adhesion can be effectively improved.

ここで、貴金属めっき膜3をめっき形成するときの材質、電流密度及びめっき時間を例示する。以下のめっき液はいずれも日進化成株式会社のめっき液である。   Here, the material, current density, and plating time when the noble metal plating film 3 is formed by plating are illustrated. All of the following plating solutions are plating solutions of Nihon Kasei Co., Ltd.

(1) めっき液に商品名T−10の純パラジウムめっき液を用い、最初の1〜10秒間、電流密度を1.0/dmとして初期めっき膜3aをめっき形成し、その後、電流密度を0.5A/dmとして残りのめっき膜3bをめっき形成する。
(2) めっき液に商品名PCP−1のパラジウムコバルトめっき液を用い、最初の1〜10秒間、電流密度を3.0/dmとして初期めっき膜3aをめっき形成し、その後、電流密度を1.0A/dmとして残りのめっき膜3bをめっき形成する。
(3) めっき液に商品名TP−2の純ロジウムめっき液を用い、最初の1〜5秒間、電流密度を10.0/dmとして初期めっき膜3aをめっき形成し、その後、電流密度を3.0A/dmとして残りのめっき膜3bをめっき形成する。
(4) めっき液には商品名Ru−6の純ルテニウムめっき液を用い、最初の1〜10秒間、電流密度を6.0/dmとして初期めっき膜3aをめっき形成し、その後、電流密度を2.0A/dmとして残りのめっき膜3bをめっき形成する。
(1) Using a pure palladium plating solution having a trade name of T-10 as the plating solution, the initial plating film 3a is formed by plating at a current density of 1.0 A / dm 2 for the first 1 to 10 seconds. The remaining plating film 3b is formed by plating at 0.5 A / dm 2 .
(2) The initial plating film 3a is formed by plating using a palladium cobalt plating solution having a trade name of PCP-1 as the plating solution, with the current density set to 3.0 A / dm 2 for the first 1 to 10 seconds, and then the current density. The remaining plating film 3b is formed by plating at 1.0 A / dm 2 .
(3) Using the pure rhodium plating solution of trade name TP-2 as the plating solution, the initial plating film 3a is formed by plating at a current density of 10.0 A / dm 2 for the first 1 to 5 seconds, and then the current density The remaining plating film 3b is formed by plating at 3.0 A / dm 2 .
(4) A pure ruthenium plating solution having a trade name of Ru-6 is used as the plating solution, and the initial plating film 3a is formed by plating at a current density of 6.0 A / dm 2 for the first 1 to 10 seconds. the remaining plated film 3b is plated as a density 2.0A / dm 2.

上記のいずれによっても、貴金属めっき膜3にて、下地めっき膜2に形成されたピンホール2aを適切に封孔することが出来るとともに、接触性能及び密着性を向上させることが可能である。   In any of the above, the pinhole 2a formed in the base plating film 2 can be appropriately sealed with the noble metal plating film 3, and the contact performance and adhesion can be improved.

図1(c)に示すように、ピンホール2aの内部が貴金属めっき膜3にて完全に埋められている形態が好ましいが、ピンホール2a内が貴金属めっき膜3にて完全に埋まらず多少空隙があっても、ピンホール2a上を貴金属めっき膜3にて塞いでいる(封孔している)形態も本実施形態の一つである。   As shown in FIG. 1 (c), the pinhole 2a is preferably completely filled with the noble metal plating film 3, but the pinhole 2a is not completely filled with the noble metal plating film 3, but has a slight gap. Even if there is, a form in which the pinhole 2a is closed (sealed) with the noble metal plating film 3 is one of the embodiments.

図1(c)では、貴金属めっき膜3の表面に、更に最表面めっき膜4をめっき形成しているが、かかる場合、白金族あるいは白金族合金からなる貴金属めっき膜3をめっき形成した後、AuあるいはAgにて最表面めっき膜4をめっき形成することが出来る。   In FIG. 1C, the outermost plating film 4 is further formed on the surface of the noble metal plating film 3. In such a case, after the noble metal plating film 3 made of a platinum group or a platinum group alloy is formed by plating, The outermost plating film 4 can be formed by plating with Au or Ag.

ここで白金族合金にはPd−Co,Pd−P,Pd−Ni等を例示できる。またこのような白金族合金を用いることで初期めっき膜3aの結晶粒をより微細化できる効果もある。   Here, examples of the platinum group alloy include Pd—Co, Pd—P, and Pd—Ni. Further, by using such a platinum group alloy, there is an effect that the crystal grains of the initial plating film 3a can be further refined.

本実施形態では、白金族あるいは白金族合金からなる貴金属めっき膜3の表面を接点表面にすることも出来るため、AuめっきやAgめっきを最表面に施すことが必要でなく、あるいは図1(c)のように最表面めっき膜4として施すとしても、AuやAgからなる前記最表面めっき膜4を従来に比べて薄く形成することが出来る。   In this embodiment, since the surface of the noble metal plating film 3 made of platinum group or platinum group alloy can be used as the contact surface, it is not necessary to apply Au plating or Ag plating to the outermost surface, or FIG. ), The outermost plating film 4 made of Au or Ag can be formed thinner than in the prior art.

以上のように本実施形態では、NiあるいはNi合金からなる下地めっき膜2を電解めっき法にて薄くめっき形成しピンホール2aが形成されても、前記ピンホール2aを貴金属めっき膜3の微細な結晶粒にて封孔でき、薄型化とともに、耐食性、後加工性、接触性能及び半田付け性に優れた電気接点を製造することが出来る。   As described above, in the present embodiment, even if the base plating film 2 made of Ni or Ni alloy is thinly formed by electrolytic plating and the pinhole 2a is formed, the pinhole 2a is formed as a fine noble metal plating film 3. It can be sealed with crystal grains, and an electrical contact excellent in corrosion resistance, post-processability, contact performance, and solderability can be manufactured along with thinning.

本実施形態では、貴金属めっき膜3を電解めっき法にてめっき形成するとき、例えばめっきの最初から最後まで徐々に電流密度が低くなるように設定してもよいし、あるいは3回以上、段階的に、電流密度を変化させることも出来る。   In this embodiment, when the noble metal plating film 3 is formed by electroplating, for example, the current density may be set to gradually decrease from the beginning to the end of the plating, or stepwise three or more times. In addition, the current density can be changed.

電流密度を変化させる方法は特に限定されない。例えば連続的に電流密度を変化させるには以下の方法がある。   The method for changing the current density is not particularly limited. For example, there are the following methods for continuously changing the current density.

まず図2に示すように、電気接点を電解めっきする形成面を有する母材基板(フープ材)35を用意する。母材基板35の表面にレジスト層36を塗布し、前記レジスト層36に各電気接点の形成領域36aに抜きパターンを形成する。図2に示す斜線部分が残されるレジスト層36の領域である。図2では電気接点の形成領域36aを多数配置している。   First, as shown in FIG. 2, a base material substrate (hoop material) 35 having a formation surface for electrolytic plating of electrical contacts is prepared. A resist layer 36 is applied to the surface of the base material substrate 35, and a punching pattern is formed on the resist layer 36 in each electrical contact formation region 36 a. The hatched portion shown in FIG. 2 is the region of the resist layer 36 that remains. In FIG. 2, a large number of electrical contact formation regions 36a are arranged.

そして図3に示すように、前記母材基板をめっき槽51内に配置する。母材基板35は図3の矢印方向に移動可能に支持されている。   And as shown in FIG. 3, the said base material board | substrate is arrange | positioned in the plating tank 51. FIG. The base material substrate 35 is supported so as to be movable in the direction of the arrow in FIG.

図3に示すようにめっき槽51内に配置される陽極53,53は固定側であり、前記陽極53,53は前記母材基板35の移動方向に対して傾斜して配置されている。   As shown in FIG. 3, the anodes 53, 53 arranged in the plating tank 51 are on the fixed side, and the anodes 53, 53 are arranged to be inclined with respect to the moving direction of the base material substrate 35.

図3の実施形態では、めっき槽51の左側の入口からめっき浴に入れられ、右側の出口から排出される。   In the embodiment of FIG. 3, the plating bath 51 is put into the plating bath from the left inlet and discharged from the right outlet.

陽極53には整流器(図示せず)が接続されて電流が制御される。図3に示すように、陽極53を配置することにより、母材基板35を矢印方向へ移動させると、母材基板35に設けられた各形成領域36aと陽極53との間の距離が徐々に大きくなり、各形成領域36aに作用する電流密度を、前記母材基板35の移動に伴って略直線的に減少させることが出来る。   A rectifier (not shown) is connected to the anode 53 to control the current. As shown in FIG. 3, when the base material substrate 35 is moved in the direction of the arrow by disposing the anode 53, the distance between each formation region 36a provided on the base material substrate 35 and the anode 53 gradually increases. The current density acting on each formation region 36a can be reduced substantially linearly with the movement of the base material substrate 35.

なお、図3では、2つの陽極53,53を備え、前記陽極53,53の間に陰極である母材基板35を介在させているが、これにより母材基板35の両面に電気接点をめっき形成できる。当然、陽極53を一つとし、母材基板35の片面にのみ電気接点をめっき形成することもできる。   In FIG. 3, two anodes 53, 53 are provided, and a base material substrate 35 serving as a cathode is interposed between the anodes 53, 53. With this, electrical contacts are plated on both surfaces of the base material substrate 35. Can be formed. Of course, it is also possible to have only one anode 53 and to form an electrical contact on only one surface of the base substrate 35 by plating.

また、多段階で電流密度を変化させるには例えば次の方法にて行うことが出来る。
図4に示すように、陰極である母材基板35と陽極53との間に複数の開孔55を有するマスク板54を配置する。なお、陽極53は母材基板35に対して平行に配置する。前記マスク板54は、例えば、図5の平面図に示されるように、開孔径の異なる複数の開孔55が母材基板35の移動方向に沿って並んで設けられている。
Further, for example, the following method can be used to change the current density in multiple stages.
As shown in FIG. 4, a mask plate 54 having a plurality of openings 55 is disposed between a base material substrate 35 that is a cathode and an anode 53. The anode 53 is arranged in parallel with the base material substrate 35. For example, as shown in the plan view of FIG. 5, the mask plate 54 is provided with a plurality of apertures 55 having different aperture diameters along the moving direction of the base material substrate 35.

例えば、図5に示されるように、各開孔55の開孔径が母材基板35の移動方向における入口側から出口側に向かって順次小さくなるように形成されたマスク板54を用い、前記母材基板35を図4の矢印方向に移動させると、母材基板35表面に形成された電気接点の各形成領域36aに対する電流密度を前記母材基板35の移動に伴って段階的に小さくできる。   For example, as shown in FIG. 5, a mask plate 54 formed so that the aperture diameter of each aperture 55 decreases sequentially from the entrance side to the exit side in the movement direction of the base material substrate 35 is used. When the material substrate 35 is moved in the direction of the arrow in FIG. 4, the current density with respect to each formation region 36 a of the electrical contacts formed on the surface of the base material substrate 35 can be reduced stepwise as the base material substrate 35 moves.

また図6に示す実施形態では、陽極53は母材基板35の移動方向に沿って複数に分割された分割陽極53a〜53fにされている。分割陽極53a〜53fは、それぞれ整流器56a〜56fに接続されて電流が制御され、各分割陽極53a〜53fにおいて、個別に電流密度を調整可能となっている。   In the embodiment shown in FIG. 6, the anode 53 is divided into divided anodes 53 a to 53 f that are divided into a plurality along the moving direction of the base material substrate 35. The divided anodes 53a to 53f are connected to rectifiers 56a to 56f, respectively, to control the current, and the current density can be individually adjusted in each of the divided anodes 53a to 53f.

図6に示すように陰極側である母材基板35を矢印方向に移動させると、各接点電極の形成領域36aに対向する分割陽極53a〜53fが次々と変わる。このため、母材基板35の移動に伴って、各形成領域36aに作用する電流密度を多段階で変化させることができる。   As shown in FIG. 6, when the base substrate 35 on the cathode side is moved in the direction of the arrow, the divided anodes 53a to 53f facing the contact electrode formation regions 36a change one after another. For this reason, as the base material substrate 35 moves, the current density acting on each formation region 36a can be changed in multiple stages.

1 母材金属
2 下地めっき膜
2a ピンホール
3 貴金属めっき膜
3a 初期めっき膜
3b 残りのめっき膜
4 最表面めっき膜
35 母材基板
51 めっき槽
53 陽極
53a〜53b 分割陽極
54 マスク板
55 開孔
56a〜56f 整流器
DESCRIPTION OF SYMBOLS 1 Base metal 2 Base plating film 2a Pinhole 3 Noble metal plating film 3a Initial plating film 3b Remaining plating film 4 Outermost surface plating film 35 Base material board | substrate 51 Plating tank 53 Anode 53a-53b Divided anode 54 Mask board 55 Opening 56a ~ 56f Rectifier

Claims (2)

以下の工程を有することを特徴とする電気接点の製造方法。
(a) 母材金属上に電解めっき法にてNiあるいはNi合金の下地めっき膜をめっき形成する工程、
(b) 前記下地めっき膜の表面に、白金族あるいは白金族合金からなる貴金属めっき膜を電解めっき法にてめっき形成し、このとき、電流密度を高くして初期めっきをした後、電流密度を低くして残りをめっきする工程。
The manufacturing method of the electrical contact characterized by having the following processes.
(A) a step of plating a base plating film of Ni or Ni alloy by electrolytic plating on a base metal;
(B) A noble metal plating film made of a platinum group or a platinum group alloy is formed by electroplating on the surface of the base plating film. At this time, the current density is increased and the initial plating is performed. The process of lowering and plating the rest.
白金族あるいは白金族合金からなる前記貴金属めっき膜をめっき形成した後、前記貴金属めっき膜の表面に、AuめっきあるいはAgめっきを施す請求項記載の電気接点の製造方法。 After plating the noble metal plating film consisting of a platinum group or platinum group alloys, the surface of the precious metal plating film, the manufacturing method of the electrical contacts according to claim 1, wherein applying Au plating or Ag plating.
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