JP5205889B2 - Electrode substrate and microbe / particle measuring device using the same - Google Patents

Description

  The present invention relates to an electrode substrate capable of handling and measuring microorganisms and fine particles using an electrode.

  In recent years, there is a particularly high need for rapid, simple, and highly sensitive quantitative measurement of microorganisms that cause food poisoning, infections, and the like and can cause some harm to the human body. This is because it is possible to prevent and prevent these by conducting microbiological tests on the spot, such as in a clinic that does not have a food production process or microbiological testing facility. In addition, in so-called biosensors, the number of fine particles in a sample when quantitatively measuring a biochemical substance in the sample using polystyrene or other artificial fine particles labeled with a substance that specifically binds to a specific substance such as an antibody. Alternatively, it is necessary to quantitatively measure the binding state. Thus, nowadays, there is a high demand for quickly, simply and quantitatively measuring fine particles contained in a liquid.

  Conventionally, the culture method is the most commonly used method for testing microorganisms. The culture method is a method of quantifying the number of microorganisms by smearing a microorganism sample on a medium, culturing the microorganism under growth conditions, and counting the number of colonies on the formed medium. However, since it usually takes 1 to 2 days for colony formation and several weeks depending on the microorganism species, there is a problem that rapid inspection cannot be performed. Further, since concentration, dilution, smearing on the medium, and the like are necessary, an operation by a specialist is necessary, and a simple test cannot be performed, or there is a decrease in accuracy due to operational variations.

  There is a DEPIM method combining dielectrophoresis and impedance measurement as a rapid, simple, and highly sensitive method for measuring the number of microorganisms (for example, Patent Document 1).

  The DEPIM method is a method of quantitatively measuring the number of microorganisms in a solution to be inspected by collecting microorganisms on a microelectrode by dielectrophoretic force and simultaneously measuring the impedance change of the microelectrode. Since the dielectrophoretic force acting on microorganisms must be sufficiently large and microorganisms must be reliably collected in the electrode gap, the electrode that detects the response of such a minute substance has a very fine pattern. Is exposed on the substrate. Therefore, in order to prevent damage during electrode handling and damage to the electrode pattern, a device for protecting the electrode is required.

Examples of providing a cover that covers the electrode pattern include biosensors disclosed in Patent Document 2 and Patent Document 3. In these, a cover is provided via a spacer above the electrode pattern formed on the electrode substrate, and a minute space is formed on the electrode. The introduction of a small amount of the test solution into the space and the reaction in the space are monitored by electrodes. One entrance is provided in the space.
JP 2003-334059 A JP 2004-4017 A Japanese Patent Laid-Open No. 10-311817

In the conventional configuration, the exposure of the electrode is protected by the cover, so that it is possible to avoid damage to the electrode pattern and adhesion of dirt due to contact of the finger or dust with the electrode part during electrode operation or measurement. However, in the conventional configuration, when a cover is provided on the electrode in order to avoid contact with the electrode, the test solution must be introduced through a very small gap between the electrode substrate and the cover. The supply amount was limited to a very small amount. In addition, since the discharge function and circulation function of the solution to be inspected after the electrode reaction are lacking, there is a problem that the new solution does not always reach the vicinity of the electrode and the measurement efficiency is lowered. Furthermore, since an adhesive is used to bond these spacers and covers, if the adhesive component dissolves into the solution to be inspected, it may become a contaminant.

  The present invention has been made in order to solve the above-mentioned conventional problems, and prevents finger contact with the electrode pattern portion and adhesion of oils and dusts, and constantly supplies a stable solution to be inspected to the electrode. An object is to provide an electrode substrate, a measuring apparatus, and a method for manufacturing the electrode substrate.

An electrode substrate according to the present invention includes a substrate, an electrode having conductivity and provided on the substrate,
A terminal for transmitting a signal from lead the electrode to the electrode, anda cover provided in the direction opposite from said substrate of said electrode, part or all of the electrode and the cover with a gap The gap is connected to the outside by at least two or more openings, the opening is disposed at a position sandwiching the gap, and the direction in which the openings are opposed is horizontal to the substrate,
The distance between the electrode and the cover is 1 mm or more and 5 mm or less, and the solution to be inspected flows into the gap from the opening, whereby the solution to be inspected is continuously supplied to the vicinity of the electrode, thereby the cover Thus, the electrode can be prevented from being damaged or soiled from being adhered to the electrode, and the solution to be inspected can enter and leave the gap through the two or more openings, so that the solution to be inspected can be sufficiently supplied to the vicinity of the electrode.

The electrode substrate according to the second invention is fixed to the cover when the cover has a concave portion that is equal to or slightly larger than the thickness of the substrate and the substrate is sandwiched between the concave portions. The cover can be removed. In addition, the electrode substrate can be easily handled by adjusting the size of the cover so that it can be easily held. Furthermore, since no adhesive is used, the possibility that the adhesive component dissolves into the solution to be inspected and becomes a contaminant can be suppressed.

In the electrode substrate according to a third invention, the cover and the electrode substrate are molded from the same substrate,
Since the cover is a part of the substrate, the process of molding only the cover and the process of attaching the cover to the electrode substrate can be omitted, and the work process can be simplified and the material cost can be reduced.

According to the electrode substrate and the microorganism / particle measurement apparatus and measurement method using the electrode substrate according to the present invention, the electrode cover is configured to cover the electrode via the gap, Contact can be prevented, and adhesion of oils and dusts to the electrode, damage to the electrode, and disturbance of the response value associated therewith can be prevented. In addition, since the solution to be inspected is circulated in the gap through the two or more openings, a new solution to be inspected can be continuously supplied to the vicinity of the electrode, and a decrease in measurement sensitivity can be suppressed. Furthermore, the circulation action of the test solution in the stirring means and the gap corrects the concentration difference between the test solution in the vicinity of the electrode where the reaction proceeds and the bulk, and the concentration of the entire test solution is kept uniform. Measurement is possible.

  Here, the definition of microorganisms / fine particles in the present invention will be described. Microorganisms / microparticles referred to in the present invention are classified as polystyrene, particles with some coating on them, metal particles such as carbon nanotubes and gold colloids, bacteria, fungi, actinomycetes, rickettsia, mycoplasma, and viruses. These are microorganisms and microparticles in a broad sense including microorganisms, small protozoa and protozoa, larvae of organisms, animal and plant cells, sperm, blood cells, nucleic acids, proteins, and the like.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

(Embodiment 1)
1, 2, and 3 are a front view, a cross-sectional view, and a perspective view of an electrode substrate according to Embodiment 1 of the present invention. FIG. 1 is a front view of a cross section of the electrode substrate 1 taken along the line AA ′ of FIG. FIG. 2 is a cross-sectional view of the electrode substrate 1 in the BB ′ cross section of FIG. 3. FIG. 3 is a perspective view of the electrode substrate 1.

The electrode substrate 1 includes a substrate 2, an electrode 3 provided on the substrate 2, a terminal 4 electrically connected to the electrode 3, and a cover 5 provided above the electrode 3. A gap is formed between the cover 5 and the electrode 3 by a spacer 19, and a gap 6 and openings 7 and 8 connected to the outside through the gap 6 are provided.

  Since the electrode 3 is protected by the cover 5, a finger does not directly touch the electrode 3 when operating the electrode substrate 1. In addition, when the electrode 3 of the electrode substrate 1 is immersed in a flowing test solution, the test solution flows from the opening 7 and flows out to the opening 8 or flows from the opening 8 to the opening 7. Thus, the gap 6 and the openings 7 and 8 serve as a passage for the solution to be inspected, and it becomes possible to continuously supply microorganisms and particles to the vicinity of the electrode 3 and suppress a decrease in electrode sensitivity.

  Next, the measurement apparatus 23 using the electrode substrate 1 according to Embodiment 1 of the present invention and the operation thereof will be described.

  FIG. 4 is a diagram showing the configuration of the measuring apparatus 23 of the present invention. In FIG. 4, 10 is a solution holding unit for holding a solution to be inspected 11 containing an object to be measured, 24 is a connection unit for obtaining conduction from a terminal 4 of the electrode substrate 1 and fixing the electrode substrate 1, and 1 is a fine pattern. Is an electrode substrate including the electrode 3, 12 is a voltage application unit, 13 is a measurement unit that measures an electrode reaction, and 14 is a control calculation unit that controls the entire measurement apparatus and calculates a measured response.

  The electrode substrate 1 is first inserted into the connection part 24, and the electrode 3, the voltage application part 12, and the measurement part 13 are electrically connected via the terminal 4 and fixed simultaneously.

  The electrode substrate 1 is immersed in a solution holding unit 10 holding a solution to be inspected 11 containing microorganisms. The solution holding unit 10 can be provided with stirring means 15 such as a magnetic stirrer. By stirring the solution 11 to be inspected in the solution holding unit 10, the concentration of the measurement object in the solution 11 to be inspected can be made uniform, and many measurement objects can be led to the vicinity of the electrodes. Therefore, more efficient measurement can be performed, and measurement time can be shortened and measurement sensitivity can be prevented from being lowered.

  The stirring method can be selected, and includes a stirring method using a magnetic stirrer, a stirring method using a bar-like stirring device, and a stirring method by rotating the solution holding unit 10 itself. The stirring speed is set to a speed at which particles and microorganisms in the solution to be inspected are sufficiently refluxed.

  The voltage application unit 12 applies a predetermined voltage to the electrodes, and the measurement unit 13 measures the electrode reaction of the measurement target in the solution under test 11, and the measured value passes to the control calculation unit 14. Moreover, the control calculation part 14 controls the voltage application part 12, and applies a specific voltage to an electrode. Further, the control calculation unit 14 receives the data measured by the measurement unit 13 and calculates the concentration of the measurement target contained in the solution to be inspected. The calculation results are sequentially stored in a memory or displayed on the display unit 16 such as an LCD.

  Next, the dimensions of the electrode substrate 1 will be described. The distance between the electrode 3 and the cover 5 is preferably 1 mm or more and 5 mm or less. If it is 1 mm or less, the contact of the solution to be inspected with the electrode 3 is hindered and the electrode sensitivity is lowered. However, if it is 1 mm or more and 5 mm or less, a flow of the solution to be inspected is formed in the vicinity of the electrode 3, and therefore However, a new test object can be constantly supplied to the electrode 3, and a decrease in electrode sensitivity can be suppressed.

  On the other hand, the solution holding part 10 used in the present invention is a cylindrical cell having a diameter of 20 mm, and the electrode is inserted in the water surface. When an electrode cover having a distance of more than 5 mm between the electrode 3 and the cover 5 is attached, the cover covers the upper part of the stirring means 15 located at the cell bottom. The agitation function is hindered by the cover 5, and the supply efficiency to the new electrode 3 to be inspected is lowered, leading to a decrease in electrode sensitivity.

  The area of the cover 5 is desirably equal to or larger than the area of the electrode 3. In such a configuration, contact of dust with the electrode 3 can be avoided, and adhesion of dirt to the surface of the electrode 3 and damage to the electrode 3 can be prevented. Therefore, storage of the sensor is facilitated, and the measurement environment is not limited.

  Next, the material and production method of the electrode substrate 1 will be described. The electrode substrate 1 shown in the embodiment of the present invention is manufactured through a process of patterning the electrode 3 and the terminal 4 on the substrate 2 and a process of fixing the cover 5 on the electrode 3. As long as the desired pattern can be formed with the selected material, the process of patterning the electrode 3 and the terminal 4 is the most appropriate processing method in consideration of productivity and cost, such as photolithography, laser processing, screen printing, and inkjet printing. Selectable.

  In the step of fixing the cover 5 on the electrode 3, the electrode 3 and the cover 5 may be fixed via a spacer 19 as shown in FIG. 1. The fixing method is preferably a method that does not use an adhesive, and is selected from heat fusion, ultrasonic bonding, optical bonding using a UV lamp, screwing type, and the like.

  As the substrate 2 in the present invention, a resin substrate is used, but any insulating material can be used, and does not hinder the use of a substrate material such as glass or ceramic. In addition, any material can be used for the electrode 3 as long as it is a conductive material, and a conductive paste containing metal particles such as Au, Ag, and Al, carbon, and the like can also be selected.

(Embodiment 2)
FIG. 5 is a sectional view of electrode substrate 1 according to the second embodiment of the present invention. Although the electrode substrate has the same structure as that of the first embodiment, the cover 5 has a recess 22 that is equal to the thickness of the substrate 2 or slightly larger than the substrate thickness, and the substrate 2 is sandwiched between the recesses 22. Is fixed to the cover 5. Accordingly, the substrate 2 can be removed from the groove 22, and the size of the cover is not limited. Therefore, even when the substrate 2 is small, it can be easily held by a finger, and the electrode handling is improved. Furthermore, since no adhesive is used, the possibility that the adhesive component dissolves into the solution to be inspected and becomes a contaminant can be suppressed.

  The tolerance of the thickness of the recess 22 is arbitrary as long as the substrate 2 is fixed to the cover 5, but the thickness of the substrate 2 +0 mm to the thickness of the substrate 2 +0.2 mm is preferable. As the material of the substrate 2 and the cover 5, a resin material that can be bent and stretched is suitable. When the material is used, it is not bound by the tolerance and can be inserted even when the thickness of the recess 22 is smaller than the thickness of the substrate 2. The depth of the recess 22 is arbitrary as long as the substrate 2 is fixed to the cover 5, but is preferably 1 mm or more and 5 mm or less from the viewpoint of fixing reliability.

  The electrode operation, operation, and measuring apparatus using the electrode substrate 1 according to the second embodiment of the present invention are the same as those of the electrode substrate 1 according to the first embodiment.

(Embodiment 3)
FIG. 6 is a schematic view of an electrode substrate 1 according to Embodiment 3 of the present invention.

  FIG. 6A is a development view of FIG. 6C. FIG. 6B is a cross-sectional view of the electrode substrate with cover 1 in the A-A ′ cross section of FIG. 6C. FIG. 6C is a cross-sectional view of the electrode substrate 1 in the B-B ′ cross section of FIG. 6D. FIG. 6D is a perspective view of the electrode substrate 1.

  Unlike the first embodiment, the cover 5 is integrated with the substrate 2, and only the difference will be described below.

  As shown in FIG. 6A, the substrate 2 of the electrode substrate 1 according to the present embodiment includes an electrode placement portion 25 where the electrodes 3 and the terminals 4 are patterned, a margin portion 26 formed as necessary, and a cover 5. The cover part 27 which becomes. The electrode arrangement portion 25 and the margin portion 26 and the margin portion 26 and the cover portion 27 are bent at a predetermined angle, respectively, and the electrode arrangement portion 25 and the cover portion 27 face each other.

  Referring to FIG. 6C, a gap 6 is formed between the cover 5 and the electrode 3 by the thickness of the margin part 26, and the openings 7 and 8 are formed in three directions excluding the margin part 26 of the cover 5 in a top view. , 9 are formed. With this configuration, the cover 5 which is the cover portion 27 is positioned above the electrode 3, the electrode 3 is protected by the cover 5, and the electrode 3 of the electrode substrate 1 with cover is immersed in a flowing test solution. At this time, a flow in the direction in which the solution to be inspected flows into and out of the gap 6 from the openings 7, 8, 9 occurs.

  With these structures, the electrode 3 is not touched by a finger during the electrode operation, and the solution to be inspected can be continuously supplied to the vicinity of the electrode. In addition, since the electrode and the cover can be manufactured on the same substrate and only the bending process is required for manufacturing the cover, it is possible to simplify the work process and reduce the substrate material cost. Furthermore, since no adhesive is used at the time of production, the outflow of contaminants to the solution to be inspected can be minimized, and the measurement value is stabilized.

  The method of manufacturing the electrode substrate 1 includes a step of patterning the electrodes 3 and the terminals 4 on the substrate 2, a step of placing two fold lines 18 between the electrode placement portion 25 of the substrate 2 and the gap portion 26 and the cover portion 27, The cover 5 is manufactured through a process of bending so that the cover 5 is disposed above the electrode 3.

  The material of the substrate 2 used in Embodiment 3 is a resin material that can be bent by applying an external force such as pressure or heat after the electrodes are formed on the substrate. A resin material having a good workability and a thickness of 500 mm or less is suitable.

  In FIG. 6, the length of the margin part 26 between the two folding lines 18, the electrode arrangement part 25, the margin part 26, and the bending angles α and β of the margin part 26 and the cover part 27 are the same as those of the electrode 3. The distance between the electrode 3 between the cover 5 and the cover 5 is selected to be 1 mm or more. The length of the margin part is preferably 1 mm or more and 10 mm or less.

  The bending angles α and β are each 0 ° to 180 °, preferably 90 °. The cover 27 preferably has a surface area that is at least equal to or greater than the surface area of the electrode 3 from the viewpoint of avoiding finger contact with the electrode 3.

  As another example of this embodiment, an electrode substrate 1 in which the margin part 26 is omitted is shown in FIG. FIG. 7A is a development view of FIG. 7B. The substrate 2 includes an electrode arrangement portion 25 on which the electrodes 3 and the terminals 4 are patterned, and a cover portion 27 that becomes the cover 5. One fold line 18 is formed between the electrode placement portion 25 and the cover portion 27 and is bent at an angle of 30 °. The cover portion 27 covers the electrode 3 and forms the gap 6. The bending angle is selected from 90 ° or less.

  The electrode operation, operation, and measuring apparatus using the electrode substrate 1 according to the third embodiment of the present invention are the same as those of the electrode substrate 1 according to the first embodiment. FIG. 8 shows a flow of the manufacturing method and a diagram showing the manufactured product.

Further, as shown in FIG. 8, the region between the terminals 4 is folded back as the margin part 26 and the cover part 27 to produce the cover 5, thereby maximizing the number of cover-equipped electrode substrates 1 that can be taken from one substrate material sheet. can do. As a result, even when using an expensive resin substrate,
Significant reductions in material costs are expected.

(Embodiment 4)
9 and 10 are schematic views of an electrode substrate according to Embodiment 4 of the present invention. 9A and 9B are a perspective view and a sectional view of the electrode substrate 1 in which the cover 5 has a mesh-shaped opening 20, respectively, and FIGS. 10A and 10B are slopes of the electrode substrate 1 in which the cover 5 has an opening 21, respectively. It is a figure and sectional drawing.

Although the electrode substrate has the same structure as that of the first embodiment, the cover 5 is configured by a mesh structure 20 having a diameter of 10 mm or more under the condition that the distance between the electrode 3 and the cover 5 is 1 mm to 5 mm, or It has at least one opening 21 having a diameter of 5 mm or less. The opening of 10 mm is larger than the diameter of microorganisms / fine particles in the solution to be inspected, and the opening of 5 mm indicates that when the electrode substrate 1 having a distance of 1 mm between the electrode 3 and the cover 5 is operated by hand, And the upper limit of the size that does not contact the electrode pattern surface.

  Note that the shape of the opening is not limited to a circle. Any polygon that can form an opening may be used.

  Thus, the cover 5 can supply not only the flow in the horizontal direction with respect to the electrode via the openings 7 and 8 in the horizontal direction with respect to the electrode, but also supply of the test solution in the vertical direction with respect to the electrode. More effective supply of the solution to be inspected to the vicinity and an increase in sensitivity can be expected.

  When the electrode is operated, the cover 5, the gap 6, and the openings 7 to 9, 20, and 21 can prevent the finger from touching the electrode 3 and can continuously supply the solution to be inspected to the vicinity of the electrode.

The mesh material of 10 mm or more is difficult for biomolecules and particles to adhere to it, and the cover having an opening of 5 mm or less is a resin material with good workability.

  The electrode operation, operation and measurement apparatus using the electrode substrate 1 according to the fourth embodiment of the present invention are the same as those of the electrode substrate 1 in the first embodiment.

  Next, using the electrode substrate 1 shown in the third embodiment and the measurement apparatus 23 shown in the first embodiment, the results of monitoring the electrochemical response of bacteria in the solution to be inspected by the DEPIM method (Patent Document 1) are shown. Show.

  As shown in FIG. 4, the electrode substrate 1 is immersed in the solution 11 to be inspected, and an AC voltage having a specific frequency and voltage is applied from the voltage application unit 12 to the electrode 3 while stirring with a stirrer as the stirring means 15. .

  FIG. 11 is a partial perspective view showing an example of the electrode 3. In FIG. 11, 2 is a substrate, and 17a and 17b are electrodes formed on the substrate 2 to form a pair of poles. By applying an alternating voltage between the electrodes 17a and 17b, an unequal electric field is induced between the electrodes 17a and 17b, and the microorganisms are dielectrophoresed and collected in a gap between the electrodes 17a and 17b. At the same time, the response of the microorganisms collected in the gap between 17a and 17b was measured in the measurement unit. The measurement result was passed to the calculation unit 14, and the impedance between the electrodes 17a and 17b was calculated, and the concentration of microorganisms contained in the test solution was calculated from the impedance.

  As the test solution, 5 mL of the E. coli suspension prepared to 4.1 × 10 6 (cfu / mL) was used.

  An electrode substrate with a cover having a distance between the electrode and the cover of 0.5 mm, 1 mm, 2 mm, and 5 mm was produced, and the electrode sensitivity with respect to each distance was plotted. In order to obtain the same sensitivity as that of the electrode substrate without the cover, the relationship between the distance between the electrode and the cover and the electrode sensitivity was verified. The dimensions of the cover were 10.9 mm wide and 8 mm long, and the size of the electrode substrate was 10.9 mm wide and 24 mm long.

  FIG. 12 shows that the sensitivity of measurement using the electrode substrate without cover is defined as control (100%) in order to compare the sensitivity of the electrode substrate with cover and the electrode substrate with cover. Was plotted.

  When the distance between the electrode and the cover was 1 mm or less, it was 50 to 60% of the cover no-electrode sensitivity. However, when the distance between the electrode and the cover was set to 1 mm or more, it was 80% when there was no cover. Sensitivity could be obtained. Therefore, it has been clarified that the electrode substrate 1 of the present invention in which the distance between the electrode and the cover is 1 mm or more sufficiently supplies the solution to be inspected to the electrode 3 and suppresses the decrease in sensitivity.

  The electrode substrate according to the present invention suppresses adhesion of fats and oils and dust and electrode damage during electrode operation, and can supply a solution to be inspected to the electrode portion, thereby obtaining a stable response. Therefore, it is useful as an electrode substrate or the like capable of manipulating and measuring microorganisms and fine particles using electrodes.

Front view of electrode substrate according to Embodiment 1 of the present invention Sectional drawing of the electrode substrate by Embodiment 1 of this invention The slope view of the electrode substrate by Embodiment 1 of this invention Configuration diagram of an apparatus according to Embodiment 1 of the present invention Sectional drawing of the electrode substrate by Embodiment 2 of this invention Front view, sectional view, and perspective view of an electrode substrate according to Embodiment 3 of the present invention Front view and sectional view of electrode substrate according to Embodiment 3 of the present invention The figure which shows the float and production of the manufacturing method of the electrode substrate by Embodiment 3 of this invention Slope view and sectional view of electrode substrate according to Embodiment 4 of the present invention Slope view and sectional view of electrode substrate according to Embodiment 4 of the present invention Configuration diagram of electrode portion according to Embodiment 1 of the present invention The figure which shows the sensitivity of the electrode with a cover with respect to the electrode without a cover by the Example of this invention

DESCRIPTION OF SYMBOLS 1 Electrode board | substrate 2 Board | substrate 3 Electrode 4 Terminal 5 Cover 6 Cavity 7, 8, 9 Opening 10 Solution holding | maintenance part 11 Test solution 12 Voltage application part 13 Measurement part 14 Control calculating part 15 Stirring means 16 Display part 17a, 17b Electrode structure 18 Folding line 19 Spacer 20 Opening of mesh cover 21 Opening 22 Recess (groove)
23 Measuring Device 24 Connection Portion 25 Electrode Arrangement Portion 26 Surrogate Portion 27 Cover Portion

Claims (3)

At least with the substrate,
An electrode having conductivity and provided on the substrate;
A terminal connected to the electrode and transmitting a signal from the electrode;
A cover provided in a direction facing the substrate of the electrode ;
Have
The cover covers part or all of the electrode through a gap;
The gap is connected to the outside through at least two openings;
The opening is disposed at a position sandwiching the gap ,
A direction in which the opening faces is horizontal to the substrate;
The distance between the electrode and the cover is 1 mm or more and 5 mm or less,
The solution to be inspected flows out of the opening into the gap to continuously supply the solution to be inspected to the vicinity of the electrode;
An electrode substrate for measuring a reaction in the solution to be inspected using the electrode. 2. The solution to be inspected using the electrode according to claim 1, wherein the cover has a concave portion that is equal to or slightly larger than the thickness of the substrate and sandwiches the electrode substrate in the cover. Electrode substrate that measures the reaction inside. The reaction in the solution to be inspected using the electrode according to claim 1, wherein the cover and the electrode substrate are molded from the same substrate, and the cover and the electrode substrate are integrated. Measuring electrode substrate.

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