JP5204686B2 - Array direction detection apparatus, array direction detection method, and array direction detection program - Google Patents

Description

  The present invention detects an arrangement direction from a point group that is a point sequence in which points are arranged in a predetermined arrangement direction on a plane and that overlaps each other in a direction perpendicular to the arrangement direction. Regarding technology.

  Conventionally, as one method for obtaining the inclination of an image of an object, there is a method in which a mark (so-called alignment mark) is provided on the object, and the inclination of the image is obtained from the inclination of the alignment mark alignment in the image. Are known.

  Further, in Patent Document 1, the image is scanned a plurality of times along the scanning direction while changing the position in the direction perpendicular to the scanning direction, and a print start point sequence (for example, a set of pixels that first appear in each scanning) (for example, A method is disclosed in which a pixel on the upper side of a rectangular print area is obtained, and the inclination of the image is obtained from the inclination of the print start point sequence.

  In Patent Document 2, unit elements that are cells are arranged in a vertical direction and a horizontal direction on an image, and the center of gravity of each unit element is obtained by pattern matching processing. A set (that is, a set of unit elements arranged in the horizontal direction, hereinafter referred to as “unit element sequence”) is extracted, and an image of the image is obtained from the slope of a straight line passing through the centroids of a plurality of unit elements included in the unit element sequence. A method for determining the slope is disclosed. Note that when the centroid is regarded as a point, a plurality of centroids of a unit element string are generated using Hough transform, which is one of methods for extracting a plurality of points arranged on one straight line from a large number of points. However, in the Hough transform, a voting process is performed on a straight line that faces in any direction to obtain an appropriate straight line, so that the processing time becomes long.

JP 7-89063 A JP-A-2005-313215

  By the way, in the method of obtaining the inclination of the image by providing the alignment mark on the object, it is necessary to add the alignment mark to the object, and it is also necessary to extract the alignment mark from the image. It will increase.

  In the method of Patent Document 1, as described above, it is possible to obtain the inclination of an image in which a rectangular print area is set. However, when the outline of the print area is not rectangular (for example, it includes a curve or unevenness). In some cases, it is difficult to accurately determine the inclination of the image.

  In the method of Patent Literature 2, when the inclination of the image is slightly increased, the barycentric positions of a plurality of unit elements included in one unit element column and a plurality of units included in other unit element columns adjacent to the unit element column The barycentric position of the elements is close in the vertical direction, and it becomes difficult to distinguish between two adjacent unit element strings, and the inclination of the image cannot be obtained with high accuracy. Similarly, when the distance between adjacent unit element strings is small, the unit elements included in the two adjacent unit element strings are extracted together, and the inclination of the image cannot be obtained with high accuracy. End up.

  The present invention has been made in view of the above problems, and an object of the present invention is to easily and highly accurately detect the arrangement direction of a plurality of points in a point sequence included in a point group.

  The invention according to claim 1 is a point group that is a point sequence in which points are arranged in a predetermined arrangement direction on a plane, and a plurality of point sequences that overlap each other in a direction perpendicular to the arrangement direction. An arrangement direction detecting device for detecting the arrangement direction from one of the provisional width directions perpendicular to the provisional arrangement direction that is at least part of the point cloud and has been found to be approximately parallel to the arrangement direction A region that includes a portion on the side, is long in the provisional arrangement direction, and has a length that is three times or more the known maximum value of the distance between two points adjacent in the arrangement direction in the plurality of point sequences An provisional width direction of a convex hull formed by connecting an image pickup unit that picks up a target point group existing inside and a point located on the outermost side of the target point group by a straight line based on an output from the image pickup unit A partial convex hull that is the one side portion of An array direction in which a convex hull generating unit to be generated and a longest line segment among a plurality of line segments included in the partial convex hull are specified as a direction indicating line segment and a direction of the direction indicating line segment is acquired as the array direction An acquisition unit.

  The invention according to claim 2 is a point group consisting of a plurality of point sequences each of which is a point sequence in which points are arranged in a predetermined arrangement direction on a plane and which overlaps each other in a direction perpendicular to the arrangement direction. An arrangement direction detecting device for detecting the arrangement direction from one of the provisional width directions perpendicular to the provisional arrangement direction that is at least part of the point cloud and has been found to be approximately parallel to the arrangement direction The provisional width of the convex hull formed by connecting an image capturing unit that captures a target point group including a site on the side and a point located on the outermost side of the target point group based on an output from the image capturing unit with a straight line A convex hull generating unit that generates a partial convex hull that is the one side portion of the direction, and a line segment that has the smallest angle with the provisional arrangement direction among a plurality of line segments included in the partial convex hull Specified as a minute and said direction indicating line segment And a arrangement direction acquisition unit that acquires, as the arrangement direction countercurrent.

  Invention of Claim 3 is the arrangement | positioning direction detection apparatus of Claim 1 or 2, Comprising: The said arrangement | positioning direction acquired from the said direction instruction | indication line segment is the arrangement | positioning direction determined temporarily, The said imaging part, By the convex hull generation unit and the arrangement direction acquisition unit, another direction instruction line segment is specified on the other side of the provisional width direction of the point group similarly to the direction instruction line segment, and the arrangement direction acquisition unit However, the final arrangement direction is acquired using the direction of the direction indicating line segment and the direction of the other direction indicating line segment.

  A fourth aspect of the present invention is the arrangement direction detecting device according to any one of the first to third aspects, wherein in the point group, each point and at least one other point are perpendicular to the arrangement direction. Line up in the width direction.

  The invention according to claim 5 is a point group consisting of a plurality of point sequences each of which is a point sequence in which points are arranged in a predetermined arrangement direction on a plane and which overlaps each other in a direction perpendicular to the arrangement direction. The arrangement direction detection method for detecting the arrangement direction from: a) a provisional width direction perpendicular to the provisional arrangement direction that is at least part of the point cloud and has been found to be approximately parallel to the arrangement direction And is longer than the known maximum value of the distance between two points adjacent to each other in the arrangement direction in the plurality of point sequences. A step of imaging a target point group existing in a certain area; and b) a convex hull formed by connecting a point located on the outermost side of the target point group with a straight line based on an imaging result in the step a) The one side portion in the provisional width direction A step of generating a partial convex hull, and c) specifying a longest line segment as a direction indicating line segment among a plurality of line segments included in the partial convex hull, and setting a direction of the direction indicating line segment as the arrangement direction Acquiring.

  The invention according to claim 6 is a point group that is a point sequence in which points are arranged in a predetermined arrangement direction on a plane, and a plurality of point sequences that overlap each other in a direction perpendicular to the arrangement direction. The arrangement direction detection method for detecting the arrangement direction from: a) a provisional width direction perpendicular to the provisional arrangement direction that is at least part of the point cloud and has been found to be approximately parallel to the arrangement direction And b) a convex hull formed by connecting a point located on the outermost side of the target point group with a straight line based on an imaging result in the step a) Generating a partial convex hull that is the one side portion of the provisional width direction, and c) a line segment having a smallest angle with the provisional arrangement direction among a plurality of line segments included in the partial convex hull. Identified as direction indicator line segment The direction indication line and a step of acquiring, as the arrangement direction.

The invention according to claim 7 is a point group that is a point sequence in which points are arranged in a predetermined arrangement direction on a plane, and a plurality of point sequences that overlap each other in a direction perpendicular to the arrangement direction. An arrangement direction detection program for detecting the arrangement direction from a computer, wherein the execution of the arrangement direction detection program by the computer is a) at least part of the point group and approximately parallel to the arrangement direction Two portions including one side in the provisional width direction perpendicular to the provisional arrangement direction that is known to be long in the provisional arrangement direction and having a length adjacent to the arrangement direction in the plurality of point sequences. a step of receiving an image result of the target point group present in more than three times that in the area of known maximum value of the distance between the points, b) said pair based on the imaging result in the a) step A step of generating a partial convex hull that is a portion on the one side in the provisional width direction of a convex hull formed by connecting a point located on the outermost side of the point group with a straight line; and c) included in the partial convex hull A longest line segment is specified as a direction indicating line segment, and the direction of the direction indicating line segment is acquired as the arrangement direction.

The invention according to claim 8 is a point group consisting of a plurality of point sequences each of which is a point sequence in which points are arranged in a predetermined arrangement direction on a plane and which overlaps each other in a direction perpendicular to the arrangement direction. An arrangement direction detection program for detecting the arrangement direction from a computer, wherein the execution of the arrangement direction detection program by the computer is a) at least part of the point group and approximately parallel to the arrangement direction A step of receiving an imaging result of a target point group including a part on one side in the provisional width direction perpendicular to the provisional arrangement direction, and b) based on the imaging result in the step a) of the target point group A step of generating a partial convex hull that is a portion on the one side in the provisional width direction of a convex hull formed by connecting points located on the outermost side with straight lines; and c) included in the partial convex hull. Identify the smallest segment as the direction indication line segment angle formed between the provisional arrangement direction of the number of line segments, the direction of the direction indication line to execute a step of acquiring, as the arrangement direction.

  In the present invention, the arrangement direction of a plurality of points in a point sequence included in a point group can be detected easily and with high accuracy.

It is a figure which shows the arrangement | sequence direction detection apparatus which concerns on 1st Embodiment. It is a figure which shows the image of a point cloud. It is a figure which shows the structure of a calculating part. It is a block diagram which shows the function of a calculating part. It is a figure which shows the flow of a detection of an array direction. It is a figure which shows the image of a point cloud. It is a figure which shows the image of a point cloud. It is a figure which shows the image of a point cloud. It is a figure which shows the image of the some chip | tip on a silicon substrate. It is a figure which shows the flow of a detection of the arrangement direction by the arrangement direction detection apparatus which concerns on 2nd Embodiment.

  FIG. 1 is a diagram showing a configuration of an arrangement direction detection apparatus 1 according to the first embodiment of the present invention. The arrangement direction detection apparatus 1 detects an arrangement direction of a plurality of points 811 in the point sequence 81 from a point group 8 composed of a plurality of point sequences 81 in the image 80 of the object 9 whose part is shown in FIG. It is. In FIG. 2, each point sequence 81 is surrounded by a two-dot chain line for easy understanding of the drawing. In the point group 8, each of the plurality of point sequences 81 has a predetermined arrangement direction on the xy plane in FIG. 2 (the y direction in FIG. 2, and the x direction and the y direction are fixed with respect to the point group 8. A plurality of points 811 are arranged in a straight line, and the plurality of point sequences 81 overlap each other in the width direction (that is, the x direction) perpendicular to the arrangement direction. In other words, in the point group 8, a plurality of parallel point sequences 81 extending in parallel to the y direction in FIG. 2 are arranged in the x direction.

  The arrangement direction detection apparatus 1 shown in FIG. 1 receives a predetermined part by receiving a holding unit 13 that holds an object 9 on a glass surface, an imaging unit 11 that images the object 9, and an image acquired by the imaging unit 11. A calculation unit 12 that performs calculation is provided. The imaging unit 11 is arranged below the object 9 held by the holding unit 13 with the printed surface facing downward ((−Z) side), and acquires an image of the printed surface of the object 9. To do.

  The imaging unit 11 includes a line sensor 111 that images a linear region extending in the X direction in FIG. 1 on the object 9, a light irradiation unit 112 that irradiates light to the imaging region of the line sensor 111 on the object 9, and And a sensor moving mechanism 113 for moving the line sensor 111 and the light irradiation unit 112 in the Y direction perpendicular to the X direction. In the present embodiment, the line sensor 111 includes a plurality of CCD (Charge Coupled Device) elements arranged linearly, and the linear imaging region of the line sensor 111 covers the entire width of the object 9 in the X direction.

  Here, the X direction and the Y direction in FIG. 1 are known coordinate axes fixed to the arrangement direction detecting device 1, and the XY plane and the xy plane in FIG. 2 are parallel. The x direction and the y direction in FIG. 2 are unknown coordinate axes that are known to be approximately parallel to the X direction and the Y direction, respectively. In the arrangement direction detection apparatus 1, the y direction with respect to the known Y direction is By obtaining the inclination, the arrangement direction of the plurality of points 811 in the point sequence 81 is detected. In the following description, the Y direction approximately parallel to the y direction (that is, the detection target of the arrangement direction detection device 1) that is the arrangement direction of the plurality of points 811 is referred to as “provisional arrangement direction”, and the X direction perpendicular to the Y direction. Is called “provisional width direction”.

  FIG. 3 is a diagram illustrating a configuration of the calculation unit 12. The arithmetic unit 12 is configured by connecting a CPU 101, a RAM 102, a ROM 103, a fixed disk 104, a display 105, an input unit 106, and the like, as in a normal computer, and the arithmetic unit 12 is included in the fixed disk 104. The arrangement direction detection program 1041 executed by is stored. FIG. 4 is a block diagram illustrating functions realized when the CPU 101 of the calculation unit 12 executes calculation processing according to the arrangement direction detection program 1041. The convex hull generation unit 121 and the arrangement direction acquisition unit 122 in FIG. Corresponds to a function realized by the CPU 101 or the like. These functions may be realized by a plurality of computers.

  FIG. 5 is a diagram showing a flow of detecting the arrangement direction of the plurality of points 811 by the arrangement direction detection apparatus 1. In the arrangement direction detection apparatus 1 shown in FIG. 1, first, the line sensor 111 and the light irradiation unit 112 of the imaging unit 11 are scanned in the Y direction, whereby the object 9 is imaged and an image 80 (see FIG. 2) is obtained. It is sent to the calculation unit 12 (step S11).

  In the present embodiment, the entire point group 8 in the image 80 shown in FIG. 2 is the target point group used for detecting the arrangement direction. In each of the plurality of point sequences 81 of the point group 8, a plurality of points 811 are arranged at an unequal pitch, and the distance between two points 811 adjacent to each other in the y direction that is the arrangement direction in the plurality of point sequences 81. The maximum value (hereinafter referred to as “maximum distance between points”) is known. The point group 8 that is the target point group exists in a rectangular region 801 (indicated by a two-dot chain line in FIG. 2) that is long in the Y direction that is the provisional arrangement direction. The length of the region 801 in the Y direction is at least three times the maximum distance between points. In FIG. 2, for convenience of illustration, the pitch in the x direction of the plurality of point sequences 81 is drawn larger than the actual pitch, but in reality, the distance between adjacent point sequences 81 is greater than the maximum point-to-point distance. Is also quite small.

  Subsequently, a plurality of points positioned on the outermost side of the point group 8 based on the image 80 that is an output from the imaging unit 11 (see FIG. 1) by the convex hull generating unit 121 (see FIG. 4) of the calculation unit 12. A convex hull 82 formed by connecting 811 with a straight line as shown in FIG. 6 is generated (step S12). Specifically, the image 80 is binarized and a plurality of points 811 are extracted (that is, each point 811 is isolated from the surrounding part and cut out), and the position of the center of gravity of each point 811 is obtained. The convex hull 82 is obtained from the center of gravity of each of the plurality of points 811 by a known method such as the Graham method. Note that the extraction of the plurality of points 811 from the image 80 may be performed by pattern matching or the like.

  Next, the arrangement direction acquisition unit 122 (see FIG. 4) extracts from the convex hull 82 a partial convex hull 821a that is a portion of the convex hull 82 in the provisional width direction (that is, the (−X) side). (Step S13). In FIG. 6, the partial convex hull 821a is surrounded by a two-dot chain line for easy understanding of the drawing. The longest line segment among the plurality of line segments 825 included in the partial convex hull 821a is specified as the direction indicating line segment 825a, and the direction of the direction indicating line segment 825a with respect to the Y direction which is the provisional arrangement direction (for example, , The angle formed by the Y direction and the direction indicating line segment 825a) is acquired as a provisionally determined arrangement direction of the plurality of points 811 in each point sequence 81 (hereinafter referred to as “temporary arrangement direction”) (step S14). ).

  Further, the arrangement direction acquisition unit 122 extracts another partial convex hull 821b that is the other side (that is, (+ X) side) portion of the convex hull 82 in the provisional width direction from the convex hull 82 (step S15). Similarly to the above-described direction indicating line segment 825a, the longest line segment among the plurality of line segments 825 included in the partial convex hull 821b is specified as the direction indicating line segment 825b. Then, the direction of the direction indicating line segment 825b with respect to the Y direction (for example, the angle formed between the Y direction and the direction indicating line segment 825b) is set as another temporary arrangement direction of the plurality of points 811 in each point sequence 81. Obtained (step S16).

  Thereafter, an average value of the temporary arrangement direction acquired from the direction indicating line segment 825a and the temporary arrangement direction acquired from the direction indicating line segment 825b is acquired as a final arrangement direction (step S17). Thereby, it is possible to obtain the arrangement direction with high accuracy while suppressing the influence of the reading error or the like that may occur when the point group 8 is read from the image 80.

  In the arrangement direction acquisition unit 122, the average value does not necessarily have to be the final arrangement direction, and two temporary arrangement directions that are the direction of the direction indicating line segment 825a and the direction of the direction indicating line segment 825b are used. If so, the final array direction may be obtained by various other methods. For example, when the convex hull 82 is generated, dirt or the like on the object 9 is mistakenly recognized as the point 811, so that the angle formed by the direction of one direction indicating line segment and the provisional arrangement direction (Y direction) is If it is clearly larger than the angle formed by the direction of the direction indicating line segment and the provisional array direction, the direction of the direction indicating line segment having the smaller angle formed by the Y direction is acquired as the final array direction. May be.

  The arrangement direction detection device 1 is used, for example, when reading encryption information from a point group 8 indicating encryption information printed on an object 9 that is a print medium. In the point group 8 illustrated in FIG. 2, each point sequence 81 indicates “0” or “1”, and the eight point sequences 81 indicate encryption information including an 8-digit bit sequence. The point group 8 is printed on a blank area on the object 9 (that is, an area around an area where a normal image is printed) or the like. In the point group 8, when the value indicated by one point sequence 81 is “0”, the number of points 811 included in the unit distance in the y direction that is the arrangement direction in the point sequence 81 (hereinafter, “unit”). When the value indicated by the dot sequence 81 is “1”, the number of unit dots is larger than the dot threshold. Is done.

  When the cryptographic information is read from the object 9, as described above, the arrangement direction detection apparatus 1 acquires the image 80 of the object 9, and generates the convex hull 82 of the point cloud 8 that is the target point cloud. Extraction of the partial convex hull 821a from the convex hull 82 (that is, generation of the partial convex hull 821a), acquisition of the temporary array direction based on the partial convex hull 821a, extraction of the partial convex hull 821b from the convex hull 82 (that is, partial convex Generation of the hull 821b), acquisition of the temporary arrangement direction based on the partial convex hull 821b, and acquisition of the final arrangement direction based on the two temporary arrangement directions (steps S11 to S17).

  Subsequently, the point group 8 is rotated by an angle formed by the y direction and the Y direction so that the y direction that is the arrangement direction in the point group 8 matches the Y direction that is the provisional arrangement direction (specifically, The coordinates in the XY coordinate system of each point 811 of the point group 8 are converted). Then, the number of unit dots of each of the plurality of point rows 81 is counted along the Y direction, and the value (“0” or “1”) indicated by each point row 81 is obtained by comparing the number of unit dots with the dot threshold value. As a result, the encryption information is read from the object 9. The rotation of the point group 8, the counting of the number of unit dots in each point sequence 81, and the acquisition of the value indicated by each point sequence 81 may be performed by the arrangement direction detection device 1 or performed by another device. Also good. Further, the number of unit dots of each point array 81 is counted along the arrangement direction in which the angle formed with the reference Y direction (provisional arrangement direction) is known without rotation of the point group 8. Also good.

  As described above, the arrangement direction detecting device 1 has a substantially rectangular shape that is long in the provisional arrangement direction and has a length that is at least three times the maximum point-to-point distance, as in a region 801 shown in FIG. A point group 8 that is a target point group existing in the region is imaged, and a convex hull 82 is generated from the image of the point group 8. As described above, when the outline of the point group 8 is approximately along the outline of the region 801, one point sequence 81 among the plurality of line segments 825 included in the convex hull 82 of the point group 8. A line segment that passes through a plurality of points 811 included in one point sequence 81 (that is, a line segment that faces the arrangement direction) rather than a line segment that connects the point 811 included in the point sequence and the point 811 included in another point sequence 81 Will surely be longer. Therefore, the longest line segment among the plurality of line segments included in the (−X) side partial convex hull 821a and the (+ X) side partial convex hull 821b of the convex hull 82 is defined as the direction indicating line segments 825a and 825b. By identifying and obtaining the final arrangement direction using the directions of the direction indicating line segments 825a and 825b, the arrangement direction of the plurality of points 811 in the point sequence 81 included in the point group 8 can be detected with high accuracy. can do. In addition, by using the convex hull 82 surrounding the point group 8, the arrangement direction can be easily detected without considering a very large number of directions as in the Hough transform.

  In the arrangement direction detection device 1, the entire point group 8 does not necessarily have to be the target point group used for forming the convex hull 82, and a part of the point group 8 may be the target point group. In other words, the target point group may be at least a part of the point group 8. When a part of the point group 8 is the target point group, as shown in FIG. 7, the point group 8 is long in the provisional arrangement direction, and its length is three times or more of the maximum point-to-point distance. The target point group 8a existing in the substantially rectangular area 801a is imaged by the imaging unit 11 (see FIG. 1). In this way, the convex hull 82a of the target point group 8a (that is, the point located on the outermost side of the target point group 8a is a straight line in a state where the contour of the target point group 8a is approximately along the contour of the region. By acquiring the arrangement direction using the directions of the direction indicating line segments 825a and 825b specified by the partial convex hulls 821a and 821b of the convex hull formed by The arrangement direction of the plurality of points 811 in the point sequence 81 (see FIG. 2) included in the group 8 can be detected easily and with high accuracy.

  In the arrangement direction detecting device 1, it is not always necessary to obtain the arrangement direction using both directions of the direction indicating line segments 825a and 825b specified by the partial convex hulls 821a and 821b. The direction of the direction indicating line segment 825a may be acquired as the final arrangement direction without specifying the minute 825b. In other words, steps S15 to S17 in FIG. 5 are omitted, and the temporary arrangement direction obtained in step S14 is the final arrangement direction. In this case, in the imaging unit 11 (see FIG. 1), as shown in FIG. 8, a target point group 8b including a part on the (−X) side that is a part of the point group 8 and is one side in the provisional width direction. Is imaged. Then, a partial convex hull 821a that is a (−X) side portion of the convex hull 82b of the target point group 8b is generated, and the direction of the direction indicating line segment 825a specified by the partial convex hull 821a is the final arrangement direction. Get as. Thereby, the arrangement direction of the plurality of points 811 in the point sequence 81 (see FIG. 2) included in the point group 8 can be detected easily and with high accuracy. Note that the arrangement direction detection apparatus 1 may be used to detect the arrangement direction of the point sequence arranged in the x direction in FIG.

  The arrangement direction detecting device 1 may also be used for detecting the arrangement direction of the chips 91 in the images 80a of the plurality of chips 91 on the object 9a that is the silicon substrate shown in FIG. On the object 9a, a plurality of chips 91 are arranged at equal pitches in the x and y directions of the xy coordinate system fixed to the object 9a. A plurality of points 811 arranged in the y direction, which is the direction, will be described as a point sequence 81, and a plurality of point sequences 81 arranged in the x direction, which is the width direction perpendicular to the arrangement direction, will be regarded as a point group 8. In the point group 8, each point 811 and at least another point 811 are arranged in the width direction. Further, the Y direction of the XY coordinate system fixed to the image 80a is referred to as a known provisional arrangement direction, and the X direction perpendicular to the Y direction is referred to as a provisional width direction.

  In the arrangement direction detecting device 1, first, similarly to the above, a part of (at least) part of the point group 8 on one side and the other side ((−X) side and (+ X) side) in the provisional width direction is determined. A target point group 8c existing in a region that is long in the provisional arrangement direction and whose length is three times or more the maximum distance between points (in this case, equal to the pitch of the points 811 in the y direction) is imaged. The image is taken by the unit 11 (see FIG. 1). In FIG. 9, for the convenience of illustration, only a part of the target point group 8c is drawn. Subsequently, based on the output from the imaging unit 11, a partial convex hull that is a portion on one side in the provisional width direction of the convex hull 82c formed by connecting the points located on the outermost side of the target point group 8c with a straight line. 821a and another partial convex hull (not shown) which is the other side portion are generated by the convex hull generating unit 121 (see FIG. 4).

  Then, by the arrangement direction acquisition unit 122 (see FIG. 4), the longest line segment among the plurality of line segments 825 included in each of the two partial convex hulls is converted into a direction indicating line segment 825a and another direction indicating line segment ( The final arrangement direction is obtained using the direction of the direction indicating line segment 825a and the direction of the other direction indicating line segment. Also in this case, similarly to the above, the arrangement direction of the plurality of points 811 in the point sequence 81 included in the point group 8 can be detected easily and with high accuracy.

  Next, an arrangement direction detection apparatus according to the second embodiment of the present invention will be described. The arrangement direction detection apparatus according to the second embodiment has the same configuration as the arrangement direction detection apparatus 1 shown in FIG. 1, and in the following description, the arrangement direction detection apparatus according to the second embodiment Each component is assigned the same reference numeral as the corresponding component of the arrangement direction detecting device 1 shown in FIGS. In the arrangement direction detection apparatus according to the second embodiment, an arrangement direction detection program different from the arrangement direction detection program 1041 shown in FIG. 3 is stored in the fixed disk 104 of the arithmetic unit 12, but in the following description, Similar to the first embodiment, reference numeral 1041 is attached.

  FIG. 10 is a diagram illustrating a flow of arrangement direction detection by the arrangement direction detection apparatus according to the second embodiment. In the arrangement direction detecting device, the object 9 is imaged by the imaging unit 11 (see FIG. 1) and the image 80 shown in FIG. 2 is sent to the computing unit 12 as in step S11 (see FIG. 5) described above. (Step S21). The object 9 has been subjected to coarse posture adjustment (so-called pre-alignment) before imaging by the imaging unit 11, and the y direction that is the arrangement direction of the points 811 is approximately parallel to the Y direction that is the provisional arrangement direction. It has become.

  Subsequently, when the calculation unit 12 performs calculation processing according to the arrangement direction detection program 1041 (see FIG. 3), the convex hull generation unit 121 (see FIG. 4) changes the point group 8 that is the target point group from FIG. The convex hull 82 shown is generated, and the partial convex hull 821a, which is the (−X) side portion of the convex hull 82, is extracted by the arrangement direction acquisition unit 122 (see FIG. 4) (steps S22 and S23).

  In the present embodiment, as described above, since pre-alignment with respect to the object 9 is performed, the direction of a straight line connecting a plurality of points 811 on one point sequence 81 is a point on one point sequence 81. It is closer to the Y direction than the direction of the straight line connecting 811 and the point 811 on the other point sequence 81. Therefore, by the arrangement direction acquisition unit 122, the line segment having the smallest angle with the provisional arrangement direction (that is, the Y direction in FIG. 6) among the plurality of line segments 825 included in the partial convex hull 821a is the direction indication line segment 825a. The direction of the direction indicating line segment 825a with respect to the Y direction which is the provisional arrangement direction (for example, the angle formed between the Y direction and the direction indicating line segment 825a) is defined by a plurality of points 811 in each point sequence 81. Obtained as a temporary arrangement direction (step S24).

  Further, the partial convex hull 821b that is the (+ X) side portion of the convex hull 82 is extracted (step S25), and the line having the smallest angle with the provisional arrangement direction among the plurality of line segments 825 included in the partial convex hull 821b is extracted. The minute is specified as the direction indicating line segment 825b, and the direction of the direction indicating line segment 825b with respect to the temporary array direction is acquired as another temporary array direction of the plurality of points 811 in each point sequence 81 (step S26). ). Thereafter, as in the first embodiment, the final arrangement direction is acquired using the temporary arrangement direction acquired from the direction indicating line segment 825a and the temporary arrangement direction acquired from the direction indicating line segment 825b. (Step S27).

  In the arrangement direction detection apparatus according to the second embodiment, as in the first embodiment, the arrangement direction of the plurality of points 811 in the point sequence 81 included in the point group 8 can be detected easily and with high accuracy. Can do. In the arrangement direction detection device, it is only necessary that at least a part of the point group 8 is a target point group imaged by the imaging unit 11, and only one of the partial convex hulls 821a and 821b is generated, and the part The direction of the direction indicating line segment specified by the convex hull may be acquired as the final arrangement direction. Further, as in the first embodiment, as shown in FIG. 9, it is used for detecting the arrangement direction of a point group 8 having a plurality of points 811 arranged at equal pitches in the x and y directions. Also good.

  The arrangement direction detection program according to the first embodiment and the arrangement direction detection program according to the second embodiment are stored in the fixed disk 104 of the arithmetic unit 12 of one arrangement direction detection device, and both arrangements are performed. One of the direction detection programs may be selectively used to detect the arrangement direction.

  As mentioned above, although embodiment of this invention has been described, this invention is not limited to the said embodiment, A various change is possible.

  In the arrangement direction detection device, if an image of the target point group in the point group 8 (may be an image of the entire point group 8) is acquired by the imaging unit 11, the entire target object 9 is not necessarily acquired. An image need not be acquired. Further, in the imaging unit 11, for example, a two-dimensional CCD camera may be provided instead of the line sensor 111.

  Further, in the arrangement direction detection device, in order to improve the detection accuracy of the arrangement direction, the above-described detection of the arrangement direction may be repeatedly performed on one object. The arrangement direction detecting device obtains the arrangement directions of various point groups in addition to detecting the arrangement direction of the point group corresponding to the center of gravity of the plurality of chips on the silicon substrate or the point group indicating the encryption information as described above. May be used when.

DESCRIPTION OF SYMBOLS 1 Array direction detection apparatus 8 Point group 8a-8c Target point group 11 Imaging part 81 Point sequence 82,82a-82c Convex hull 121 Convex hull generation part 122 Arrangement direction acquisition part 801, 801a Area 811 Point 821a, 821b Partial convex hull 825 Line segment 825a, 825b Direction indication line segment 1041 Array direction detection program S11-S17, S21-S27 Step

Claims (8)

An array direction for detecting the array direction from a group of points each consisting of a plurality of point arrays overlapping each other in a direction perpendicular to the array direction on the plane. A detection device,
Including at least a portion of the point cloud and a portion on one side of the provisional width direction perpendicular to the provisional arrangement direction that has been found to be approximately parallel to the arrangement direction, and long in the provisional arrangement direction, An imaging unit for imaging a target point group existing in a region whose length is three times or more of a known maximum value of a distance between two points adjacent in the arrangement direction in the plurality of point sequences;
Based on the output from the imaging unit, a partial convex hull that is a portion on the one side in the provisional width direction of a convex hull formed by connecting points located on the outermost side of the target point group with a straight line is generated. A convex hull generator,
An array direction acquisition unit that identifies the longest line segment among the plurality of line segments included in the partial convex hull as a direction indicating line segment, and acquires the direction of the direction indicating line segment as the array direction;
An arrangement direction detecting device comprising: An array direction for detecting the array direction from a group of points each consisting of a plurality of point arrays overlapping each other in a direction perpendicular to the array direction on the plane. A detection device,
An imaging unit that images a target point group that includes at least a part of the point group and includes a portion on one side in the provisional width direction perpendicular to the provisional arrangement direction that has been found to be approximately parallel to the arrangement direction;
Based on the output from the imaging unit, a partial convex hull that is a portion on the one side in the provisional width direction of a convex hull formed by connecting points located on the outermost side of the target point group with a straight line is generated. A convex hull generator,
An array direction in which a line segment having the smallest angle with the provisional array direction is specified as a direction indicating line segment among a plurality of line segments included in the partial convex hull, and the direction indicating the direction indicating line segment is acquired as the array direction An acquisition unit;
An arrangement direction detecting device comprising: The arrangement direction detecting device according to claim 1 or 2,
The arrangement direction acquired from the direction indicating line segment is an arrangement direction temporarily determined;
By the imaging unit, the convex hull generating unit, and the arrangement direction acquiring unit, another direction indicating line segment is specified on the other side of the provisional width direction of the point group similarly to the direction indicating line segment,
The arrangement direction detection device, wherein the arrangement direction acquisition unit acquires the final arrangement direction using the direction of the direction indication line segment and the direction of the other direction indication line segment. The arrangement direction detecting device according to any one of claims 1 to 3,
In the point group, each point and at least one other point are arranged in a width direction perpendicular to the arrangement direction. An array direction for detecting the array direction from a group of points each consisting of a plurality of point arrays overlapping each other in a direction perpendicular to the array direction on the plane. A detection method,
a) including at least a part of the point group and a portion on one side of the provisional width direction perpendicular to the provisional arrangement direction that has been found to be approximately parallel to the arrangement direction; and in the provisional arrangement direction Imaging a target point group that is long and has a length that is three times or more of a known maximum value of a distance between two adjacent points in the arrangement direction in the plurality of point sequences;
b) A partial convex hull that is a portion on the one side in the provisional width direction of a convex hull formed by connecting points located on the outermost side of the target point group with straight lines based on the imaging result in the step a) Generating
c) identifying the longest line segment among a plurality of line segments included in the partial convex hull as a direction indicating line segment, and obtaining the direction of the direction indicating line segment as the arrangement direction;
An array direction detection method comprising: An array direction for detecting the array direction from a group of points each consisting of a plurality of point arrays overlapping each other in a direction perpendicular to the array direction on the plane. A detection method,
a) imaging a target point group that includes at least a part of the point group and includes a portion on one side in the provisional width direction perpendicular to the provisional arrangement direction that has been found to be approximately parallel to the arrangement direction; ,
b) A partial convex hull that is a portion on the one side in the provisional width direction of a convex hull formed by connecting points located on the outermost side of the target point group with straight lines based on the imaging result in the step a) Generating
c) A line segment having the smallest angle with the provisional arrangement direction is specified as a direction indicating line segment among a plurality of line segments included in the partial convex hull, and the direction of the direction indicating line segment is acquired as the arrangement direction. Process,
An array direction detection method comprising: An array direction for detecting the array direction from a group of points each consisting of a plurality of point arrays overlapping each other in a direction perpendicular to the array direction on the plane. A computer program for executing the arrangement direction detection program is a detection program,
a) including at least a part of the point group and a portion on one side of the provisional width direction perpendicular to the provisional arrangement direction that has been found to be approximately parallel to the arrangement direction; and in the provisional arrangement direction The step of receiving an imaging result of a target point group that is long and has a length that is not less than three times the known maximum value of the distance between two points adjacent in the arrangement direction in the plurality of point sequences. When,
b) A partial convex hull that is a portion on the one side in the provisional width direction of a convex hull formed by connecting points located on the outermost side of the target point group with straight lines based on the imaging result in the step a) Generating
c) identifying the longest line segment among a plurality of line segments included in the partial convex hull as a direction indicating line segment, and obtaining the direction of the direction indicating line segment as the arrangement direction;
An array direction detection program characterized in that An array direction for detecting the array direction from a group of points each consisting of a plurality of point arrays overlapping each other in a direction perpendicular to the array direction on the plane. A computer program for executing the arrangement direction detection program is a detection program,
a) Accepting an imaging result of a target point group that includes at least a part of the point group and includes a part on one side in the provisional width direction perpendicular to the provisional arrangement direction that has been found to be approximately parallel to the arrangement direction. Process,
b) A partial convex hull that is a portion on the one side in the provisional width direction of a convex hull formed by connecting points located on the outermost side of the target point group with straight lines based on the imaging result in the step a) Generating
c) A line segment having the smallest angle with the provisional arrangement direction is specified as a direction indicating line segment among a plurality of line segments included in the partial convex hull, and the direction of the direction indicating line segment is acquired as the arrangement direction. Process,
An array direction detection program characterized in that

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