JP5195750B2 - Light source device - Google Patents

Light source device Download PDF

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JP5195750B2
JP5195750B2 JP2009511905A JP2009511905A JP5195750B2 JP 5195750 B2 JP5195750 B2 JP 5195750B2 JP 2009511905 A JP2009511905 A JP 2009511905A JP 2009511905 A JP2009511905 A JP 2009511905A JP 5195750 B2 JP5195750 B2 JP 5195750B2
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cooling
lead wire
arc tube
wire sealing
tube
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JPWO2008133304A1 (en
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弘 川田
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GS Yuasa International Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

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  • Discharge Lamps And Accessories Thereof (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Coating Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Description

本発明は、発光管と、その発光管の周囲を取り囲む状態に配置されて前記発光管を冷却する冷却用部材とが備えられた光源装置に関する。   The present invention relates to a light source device including an arc tube and a cooling member that is disposed in a state of surrounding the arc tube and cools the arc tube.

かかる光源装置は、例えば紫外線ランプ等の発光管から出射した光を、各種の処理対象物に照射して、樹脂の硬化等の所定の処理を行うための装置である。
このような光源装置は発光動作時に発光管が高温となるため、発光管の過度の温度上昇を抑制するべく冷却する手段が備えられている。
この冷却手段の構成としては、例えば、下記特許文献１にも記載のように、発光管の周囲を取り囲む状態に水冷ジャケット等の冷却用部材を配置することが考えられている。
下記特許文献１の水冷ジャケットは、発光管から出射した光を透過させるために石英製の二重管にて構成され、その二重管の内管と外管との間の空間に冷却水を流す構成としている。
特開２００４−３９５１１号公報 Such a light source device is a device for irradiating various processing objects with light emitted from an arc tube such as an ultraviolet lamp to perform a predetermined process such as resin curing.
Such a light source device is provided with a means for cooling to suppress an excessive temperature rise of the arc tube because the arc tube becomes hot during the light emission operation.
As a configuration of this cooling means, for example, as described in Patent Document 1 below, it is considered to arrange a cooling member such as a water cooling jacket in a state surrounding the periphery of the arc tube.
The water cooling jacket of the following Patent Document 1 is composed of a double tube made of quartz to transmit light emitted from the arc tube, and cooling water is supplied to the space between the inner tube and the outer tube of the double tube. It is configured to flow.
JP 2004-39511 A

しかしながら、上記従来構成では、発光管自体は冷却用部材の冷却作用によって過度の温度上昇を防止できるものの、発光管における電極用リード線の封止箇所の温度上昇に対する抑制効果は十分なものではなかった。特に近年のランプ出力の増大によって、電極用リード線の封止箇所の温度上昇で発光管が損傷し、発光管の寿命を短くしてしまう懸念もあった。
この電極の封止箇所を適切に冷却するには、専用の冷却手段を備えれば良いのであるが、十分な冷却効果を持たせようとすると、それだけ装置コストの上昇を招いてしまうことになる。
本発明は、かかる実情に鑑みてなされたものであって、その目的は、装置コストの上昇を可及的に抑制しながら、発光管全体を効果的に冷却する点にある。However, in the above conventional configuration, although the arc tube itself can prevent an excessive temperature rise by the cooling action of the cooling member, the effect of suppressing the temperature rise of the sealed portion of the electrode lead wire in the arc tube is not sufficient. It was. In particular, due to an increase in lamp output in recent years, there has been a concern that the arc tube may be damaged due to a rise in the temperature of the sealed portion of the electrode lead wire, thereby shortening the lifetime of the arc tube.
In order to properly cool the sealing portion of this electrode, it is sufficient to provide a dedicated cooling means. However, if a sufficient cooling effect is provided, the cost of the apparatus will be increased accordingly. .
The present invention has been made in view of such circumstances, and an object thereof is to effectively cool the entire arc tube while suppressing an increase in apparatus cost as much as possible.

本出願の第１の発明は、発光管と、その発光管の周囲を取り囲む状態に配置されて前記発光管を冷却する冷却用部材とが備えられた光源装置において、前記発光管に、電極用リード線を封止状態で取付けるリード線封止取付部が備えられ、前記リード線封止取付部を冷却対象とする冷却風の通風経路が形成され、その通風経路における前記リード線封止取付部の少なくとも上流側に前記冷却用部材の配置箇所が位置し、且つ、前記リード線封止取付部よりも前記通風経路の上流側に前記発光管の他の部分が位置しないように配置されて、前記冷却用部材に形成された貫通孔からなる通風孔により冷却された状態の冷却風が前記リード線封止取付部の存在位置を通過するように構成されており、かつ前記冷却風は、前記発光管に対しては、前記発光管における前記リード線封止取付部のみを冷却対象とするように通風経路が形成されている。 According to a first aspect of the present application, there is provided a light source device including an arc tube and a cooling member that is disposed so as to surround the arc tube and that cools the arc tube. A lead wire sealing attachment portion for attaching the lead wire in a sealed state is provided, and a cooling air ventilation path is formed for cooling the lead wire sealing attachment portion, and the lead wire sealing attachment portion in the ventilation path is formed. The cooling member is disposed at least on the upstream side, and the other part of the arc tube is not positioned on the upstream side of the ventilation path with respect to the lead wire sealing mounting portion. The cooling air in a state of being cooled by a ventilation hole formed of a through hole formed in the cooling member is configured to pass through an existing position of the lead wire sealing mounting portion , and the cooling air is For arc tube Ventilation path so that only the lead wire sealing mounting portion of the light pipe to be cooled is formed.

すなわち、発光管の電極用リード線の封止箇所である前記リード線封止取付部を冷却風の通風経路中に位置させることにより当該箇所を冷却する。
この前記リード線封止取付部を冷却する冷却風は、発光管についてみると、発光管の他の部分（前記リード線封止取付部以外の部分）が前記リード線封止取付部よりも通風経路上流側に存在することはなく、高温となる光出射領域の近傍を通過して冷却風の冷却効果が低下してしまうのを回避できる。
但し、単に前記リード線封止取付部を冷却風の通風経路に位置させるだけでは、必ずしも十分な冷却効果は得られない。又、逆に十分な冷却効果を確保するためにその冷却風の温度を下げる手段を別途備える構成とすると装置コストの上昇を招いてしまう。 That is, the said lead wire sealing attachment part which is a sealing location of the electrode lead wire of an arc_tube | light_emitting_tube is located in the ventilation path | route of cooling air, and the said location is cooled.
As for the cooling air for cooling the lead wire sealing attachment portion, when viewed from the arc tube, the other portion of the arc tube (the portion other than the lead wire seal attachment portion) is ventilated more than the lead wire seal attachment portion. It does not exist on the upstream side of the path, and it can be avoided that the cooling effect of the cooling air is lowered by passing through the vicinity of the light emitting region that becomes high temperature.
However, it is not always possible to obtain a sufficient cooling effect simply by positioning the lead wire sealing attachment portion in the cooling air flow path. On the other hand, in order to secure a sufficient cooling effect, if a configuration for separately providing means for lowering the temperature of the cooling air is provided, the cost of the apparatus will increase.

そこで、前記リード線封止取付部を冷却する冷却風の通風経路における前記リード線封止取付部の上流側に、発光管を冷却する冷却用部材の配置箇所が位置するように構成する。
すなわち、発光管を冷却する冷却用部材であっても、例えばその冷却用部材が水冷等の液冷方式であれば液冷用冷媒の配管部分や、あるいは、発光管に対して冷却作用する部分の端縁付近等では、発光管の高温部分からも離れており、冷却風に対して冷却効果を有している。
従って、発光管を冷却するために備えられている冷却用部材を利用して、前記リード線封止取付部の冷却のための冷却風を冷却して、前記リード線封止取付部に対する冷却効果を増大させている。
具体的には、前記冷却用部材に形成された貫通孔からなる通風孔を利用するものである。 Therefore, the cooling member for cooling the arc tube is arranged on the upstream side of the lead wire sealing attachment portion in the cooling air flow path for cooling the lead wire sealing attachment portion.
That is, even if it is a cooling member that cools the arc tube, for example, if the cooling member is a liquid cooling system such as water cooling, a piping portion of a liquid cooling refrigerant or a portion that cools the arc tube In the vicinity of the edge of the arc tube, it is separated from the high temperature portion of the arc tube, and has a cooling effect on the cooling air.
Therefore, the cooling effect provided for cooling the lead wire seal mounting portion by cooling the cooling air provided for cooling the arc tube to cool the cooling air for cooling the lead wire seal mounting portion. Is increasing.
Specifically, the ventilation hole which consists of a through-hole formed in the said member for cooling is utilized.

又、上記構成に加えて、前記冷却風は、前記発光管に対しては、前記発光管における前記リード線封止取付部のみを冷却対象とするように通風経路が形成されている。
すなわち、発光管の他の部分（前記リード線封止取付部以外の部分）が前記リード線封止取付部よりも通風経路上流側に存在しないようにする構成としては、例えば、発光管の各部の中で前記リード線封止取付部が最も通風経路上流側に位置するように配置して、冷却風が前記リード線封止取付部のみならず発光管における発光領域の冷却をも行わせる構成とすることが可能である。しかし、好ましくは、冷却風による冷却対象を前記リード線封止取付部に限定することで、冷却負荷を軽減できる。 Further, in addition to the above configuration, the cooling air, the relative light-emitting tube, ventilation path so that only the lead wire sealing attachment portion in the arc tube to be cooled is formed.
That is, as a configuration in which other parts of the arc tube (parts other than the lead wire sealing attachment part) do not exist on the upstream side of the ventilation path with respect to the lead wire sealing attachment part, for example, each part of the arc tube The lead wire sealing attachment portion is arranged so as to be located at the most upstream side of the ventilation path, and the cooling air cools not only the lead wire sealing attachment portion but also the light emitting region in the arc tube. Is possible. However, preferably, the cooling load can be reduced by limiting the object to be cooled by the cooling air to the lead wire sealing mounting portion.

又、本出願の第２の発明は、上記第１の発明の構成に加えて、前記発光管は、長手方向の両端部に一対で前記リード線封止取付部が備えられた直管形状に形成され、前記冷却用部材は、前記発光管の周囲を取り囲む状態に配置された水冷ジャケットにて構成され、前記水冷ジャケットにおける前記リード線封止取付部付近の部材に、前記冷却風の通風経路を構成する通風孔が形成されている。
すなわち、水冷ジャケットを構成する部材に冷却風の通風経路となる通風孔を形成して、その通風孔を通過する冷却風によってリード線封止取付部を冷却させる。 According to a second invention of the present application, in addition to the configuration of the first invention, the arc tube has a straight tube shape in which a pair of the lead wire sealing attachment portions are provided at both ends in the longitudinal direction. The cooling member is formed by a water cooling jacket disposed so as to surround the arc tube, and the cooling air ventilation path is formed in a member near the lead wire seal mounting portion in the water cooling jacket. The ventilation hole which comprises is formed.
That is, a ventilation hole serving as a ventilation path for cooling air is formed in a member constituting the water cooling jacket, and the lead wire sealing attachment portion is cooled by the cooling air passing through the ventilation hole.

上記第１の発明によれば、発光管を冷却するために備えられている冷却用部材を利用して、前記リード線封止取付部の冷却のための冷却風を冷却して、前記リード線封止取付部に対する冷却効果を増大させているので、装置コストの上昇を可及的に抑制しながら、発光管全体を効果的に冷却することができる。
又、冷却風による冷却対象を前記リード線封止取付部に限定することで、冷却負荷を軽減でき、装置コストの上昇をより抑制することができる。
又、上記第２の発明によれば、水冷ジャケットを構成する部材に通風孔を形成するだけの簡素な構成で、リード線封止取付部を的確に冷却できる。 According to the first invention, the cooling wire provided for cooling the arc tube is used to cool the cooling air for cooling the lead wire sealing mounting portion, and the lead wire is cooled. Since the cooling effect on the sealing attachment portion is increased, the entire arc tube can be effectively cooled while suppressing an increase in apparatus cost as much as possible.
Further, by limiting the cooling target of cold却風the lead wire sealing attachment portion, can reduce the cooling load, it is possible to further suppress an increase in apparatus cost.
In addition, according to the second aspect , the lead wire sealing attachment portion can be accurately cooled with a simple configuration in which the ventilation hole is formed in the member constituting the water cooling jacket.

本発明の実施の形態にかかる光源装置の部分断面図The fragmentary sectional view of the light source device concerning an embodiment of the invention 本発明の実施の形態にかかる光源装置の要部部分断面図The principal part fragmentary sectional view of the light source device concerning embodiment of this invention

符号の説明Explanation of symbols

１ 発光管
ＣＭ 冷却用部材
ＲＨ リード線封止取付部1 Arc tube CM Cooling member RH Lead wire seal mounting part

以下、本発明の光源装置の実施の形態を図面に基づいて説明する。
本実施の形態の光源装置ＵＬは、図１の部分断面図に示すように、発光管１と、発光管１を冷却する冷却用部材ＣＭである水冷ジャケット２とを主要部として構成されている。
尚、図１では、図面を見易くするために、発光管１以外の部分について断面視で示すと共に、細部においては適宜に断面であることを示す斜線の図示を省略している。Hereinafter, embodiments of a light source device of the present invention will be described with reference to the drawings.
As shown in the partial cross-sectional view of FIG. 1, the light source device UL according to the present embodiment is configured with the arc tube 1 and a water cooling jacket 2 that is a cooling member CM that cools the arc tube 1 as main parts. .
In FIG. 1, in order to make the drawing easier to see, portions other than the arc tube 1 are shown in a sectional view, and in the details, the hatched lines indicating the cross section are appropriately omitted.

本実施の形態の発光管１は紫外線ランプであり、全体として棒状の直管形状に形成され、それの長手方向の両端部において、発光管１内部の放電用電極３に接続される電極用リード線３ａが封止されて、外部電極として取り出されている。
電極用リード線３ａの封止箇所は口金４にて保護され、発光管１の長手方向の両端部に一対で備えられる口金４の存在箇所が、電極用リード線３ａを封止状態で取付けるリード線封止取付部ＲＨとなっている。The arc tube 1 of the present embodiment is an ultraviolet lamp, and is formed into a rod-like straight tube shape as a whole, and electrode leads connected to the discharge electrode 3 inside the arc tube 1 at both longitudinal ends thereof. The wire 3a is sealed and taken out as an external electrode.
The sealed portion of the electrode lead wire 3a is protected by the base 4, and the location where the pair of bases 4 provided at both ends in the longitudinal direction of the arc tube 1 is attached to the electrode lead wire 3a in a sealed state. It is a wire seal mounting part RH.

水冷ジャケット２は、円筒状の内管２１と、同じく円筒状で内管２１より大径の外管２２と、それらを保持するための部材とによって構成され、発光管１の周囲を取り囲む状態に配置されている。
内管２１と外管２２とはいずれも石英製であり、それらが同軸状に配置されて、内管２１と外管２２との間の空間が冷却水の通路となっている。
内管２１は、外管２２よりも若干長尺に形成されており、同軸状に配置された内管２１及び外管２２の長手方向両端部をシール用リング２３にて挟持して、内管２１と外管２２との間の間隔を一定に保持している。The water-cooling jacket 2 includes a cylindrical inner tube 21, an outer tube 22 that is also cylindrical and larger in diameter than the inner tube 21, and a member for holding them, and surrounds the periphery of the arc tube 1. Has been placed.
Both the inner tube 21 and the outer tube 22 are made of quartz, and are arranged coaxially, and a space between the inner tube 21 and the outer tube 22 serves as a cooling water passage.
The inner tube 21 is formed slightly longer than the outer tube 22, and both end portions in the longitudinal direction of the inner tube 21 and the outer tube 22 arranged coaxially are sandwiched between seal rings 23, and the inner tube The distance between 21 and the outer tube 22 is kept constant.

シール用リング２３には冷却水を導入又は排出するための給排水孔２３ａが備えられており、図１では、右側のシール用リング２３の給排水孔２３ａに給水ホース２４を接続して給水側とし、又、左側のシール用リング２３の給排水孔２３ａに排水ホース２５を接続して排水側としている。
一対のシール用リング２３は、夫々、リング状の保持部材２６にて保持されて位置決めされ、外管２２とシール用リング２３との間、並びに、内管２１とシール用リング２３及び保持部材２６との間がＯリングにてシールされている。
給水ホース２４から給水された冷却水は、シール用リング２３の内面側と内管２１の外面とで形成される空間を経て、内管２１と外管２２との間の空間に流れ込み、更に、反対側（排水側）のシール用リング２３の内面と内管２１の外面とで形成される空間を経て排水ホース２５へと排出される。The seal ring 23 is provided with a water supply / drain hole 23a for introducing or discharging cooling water. Further, a drainage hose 25 is connected to the water supply / drainage hole 23a of the left seal ring 23 to provide a drainage side.
The pair of sealing rings 23 are respectively held and positioned by ring-shaped holding members 26, between the outer tube 22 and the sealing ring 23, and between the inner tube 21, the sealing ring 23, and the holding member 26. Is sealed with an O-ring.
The cooling water supplied from the water supply hose 24 flows into the space between the inner tube 21 and the outer tube 22 through a space formed by the inner surface side of the sealing ring 23 and the outer surface of the inner tube 21, It is discharged to the drainage hose 25 through a space formed by the inner surface of the seal ring 23 on the opposite side (drainage side) and the outer surface of the inner tube 21.

発光管１は、長手方向両端部の口金４に外嵌する略円板状のホルダ１１によって支持されており、ホルダ１１は、内管２１の長手方向の端縁に接し、且つ、保持部材２６に内嵌する状態で位置決めされている。
これによって、発光管１は、内管２１内において内管２１と略同軸状に配置され、且つ、発光管１の口金４（すなわち、リード線封止取付部ＲＨ）が保持部材２６の存在位置まで入り込む配置状態となっている。The arc tube 1 is supported by a substantially disc-shaped holder 11 that is fitted around the bases 4 at both ends in the longitudinal direction. The holder 11 is in contact with the edge of the inner tube 21 in the longitudinal direction, and the holding member 26. It is positioned in a state of being fitted inside.
As a result, the arc tube 1 is disposed substantially coaxially with the inner tube 21 in the inner tube 21, and the cap 4 (that is, the lead wire sealing attachment portion RH) of the arc tube 1 is located at the position where the holding member 26 is present. It is in the arrangement state to enter.

本発明の光源装置ＵＬは、上記構成にて発光管１を冷却すると共に、発光管１のリード線封止取付部ＲＨ（口金４の存在箇所）を冷却する手段をも備えており、そのリード線封止取付部ＲＨの冷却のために、発光管１を冷却するための装置構成の一部を利用している。
以下、水冷ジャケット２の長手方向端部付近を拡大して部分断面図として示す図２に基づいて説明する。
図２は、図１における右側端部（給水側の端部）を示すものであるが、反対側の左側端部（排水側の端部）の構成も全く同様の構成で対称に構成されている。
尚、この図２においても、図１と同様に、発光管１以外の部分について断面視で示すと共に、細部においては適宜に断面であることを示す斜線の図示を省略している。The light source device UL of the present invention includes means for cooling the arc tube 1 with the above-described configuration and cooling the lead wire sealing attachment portion RH (location where the cap 4 is present) of the arc tube 1. A part of the device configuration for cooling the arc tube 1 is used for cooling the wire seal mounting portion RH.
In the following, description will be given based on FIG.
FIG. 2 shows the right side end (end on the water supply side) in FIG. 1, but the configuration of the left side end on the opposite side (end on the drain side) is also configured symmetrically in exactly the same way. Yes.
In FIG. 2, as in FIG. 1, portions other than the arc tube 1 are shown in cross-sectional view, and in the details, hatched lines indicating that the cross section is appropriate are omitted.

リード線封止取付部ＲＨの冷却は、リード線封止取付部ＲＨを冷却対象とする冷却風の通風経路を形成することにより行う。
より具体的には、図２に示すように、リング状の保持部材２６の一端部に、側面２６ｂから内面２６ａに貫通する多数の細孔２６ｃを形成し、その多数の細孔２６ｃの存在位置の反対側の端部に内面２６ａから側面２６ｂへ貫通する貫通孔２６ｄを形成して、細孔２６ｃ及び貫通孔２６ｄからなる通風孔で冷却風の通風経路を構成している。
この通風孔（細孔２６ｃ及び貫通孔２６ｄ）とリード線封止取付部ＲＨとの位置関係は、図２に示すように、発光管１の長手方向と直交する面上で並ぶ位置関係となり、水冷ジャケット２におけるリード線封止取付部ＲＨに最も近い部材（保持部材２６）に前記通風孔を形成している。
貫通孔２６ｄには、吸気ポンプあるいはクリーンルームの吸気配管等の吸気手段からのホース１２が接続されている。
保持部材２６の一側は、ホース１２から吸気されたときに、細孔２６ｃから貫通孔２６ｄへ至る通風経路が効率良く形成されるように、整風板１３を備えて保持部材２６の内面２６ａ側の空間を閉塞している。The lead wire sealing attachment portion RH is cooled by forming a ventilation path for cooling air with the lead wire sealing attachment portion RH as a cooling target.
More specifically, as shown in FIG. 2, a large number of pores 26 c that penetrate from the side surface 26 b to the inner surface 26 a are formed at one end of the ring-shaped holding member 26, and the positions where the numerous pores 26 c exist. A through hole 26d penetrating from the inner surface 26a to the side surface 26b is formed at the opposite end, and a ventilation path for cooling air is formed by the ventilation holes including the pore 26c and the through hole 26d.
As shown in FIG. 2, the positional relationship between the ventilation holes (the small holes 26c and the through holes 26d) and the lead wire sealing mounting portion RH is a positional relationship aligned on a plane orthogonal to the longitudinal direction of the arc tube 1, The ventilation holes are formed in a member (holding member 26) closest to the lead wire sealing attachment portion RH in the water cooling jacket 2.
A hose 12 from an intake means such as an intake pump or an intake pipe of a clean room is connected to the through hole 26d.
One side of the holding member 26 includes the air conditioning plate 13 so that when the air is sucked from the hose 12, the ventilation path from the hole 26 c to the through hole 26 d is formed efficiently, the holding member 26 has an inner surface 26 a side. Is blocking the space.

シール用リング２３及び保持部材２６は、何れも熱伝導の良好な金属にて形成されて互いに接しており、給水ホース２４からの冷却水の供給によって冷却されて比較的低温となっている。
このため、ホース１２から吸気されると、保持部材２６の細孔２６ｃへ吸い込まれた空気は細孔２６ｃを通過中に細孔２６ｃの壁面との相互作用により冷却され、口金４の存在箇所（リード線封止取付部ＲＨ）を通過して貫通孔２６ｄへ至り排出される。The seal ring 23 and the holding member 26 are both made of metal having good heat conduction and are in contact with each other, and are cooled by the supply of cooling water from the water supply hose 24 and have a relatively low temperature.
For this reason, when the air is sucked from the hose 12, the air sucked into the pores 26c of the holding member 26 is cooled by the interaction with the wall surface of the pores 26c while passing through the pores 26c. The lead wire sealing attachment portion RH) is passed through the through hole 26d and discharged.

このように形成される通風経路において、リード線封止取付部ＲＨの上流側に冷却用部材ＣＭ（より具体的には、冷却用部材ＣＭである水冷ジャケット２の一部を構成して、内管２１及び外管２２の長手方向端部を保持する保持部材２６）の配置箇所が位置し、且つ、リード線封止取付部ＲＨよりも通風経路の上流側に発光管１の他の部分が位置しないように配置されることで、保持部材２６の細孔２６ｃを通過して冷却された状態の冷却風がリード線封止取付部ＲＨの存在位置を通過して、効率良くリード線封止取付部ＲＨを冷却する。
この冷却風は発光管１のうちのリード線封止取付部ＲＨのみを冷却対象とするように通風経路が形成されており、局所的な空間での通風であるので、上記吸気手段の吸気能力としてはそれほど高能力を要求されない。In the ventilation path formed in this way, a cooling member CM (more specifically, a part of the water cooling jacket 2 that is the cooling member CM is formed on the upstream side of the lead wire sealing mounting portion RH, The location of the holding member 26) that holds the longitudinal ends of the tube 21 and the outer tube 22 is located, and the other part of the arc tube 1 is located upstream of the lead wire sealing mounting portion RH on the upstream side of the ventilation path. By being arranged so as not to be positioned, the cooling air that has been cooled by passing through the pores 26c of the holding member 26 passes through the position where the lead wire sealing mounting portion RH is present, and the lead wire is efficiently sealed. The mounting portion RH is cooled.
The cooling air is formed in a ventilation path so that only the lead wire sealing mounting portion RH of the arc tube 1 is cooled, and is a ventilation in a local space. As such, it is not required to have high capacity.

更に、リード線封止取付部ＲＨに冷却風を供給するについては、リード線封止取付部ＲＨに冷却風を吹き付けて冷却する構成も考えられるが、このような構成では、光を照射する対象物等から飛散して浮遊する微小な塵埃を周囲の空間にまき散らしてしまうことになる。これは、光源装置ＵＬがクリーンルーム等の塵埃の飛散が特に問題となる環境下では、極力避ける必要がある。
そこで、上述のように、リード線封止取付部ＲＨを冷却する冷却風を、前記吸気手段による吸気によって形成することとして、上記の微小な塵埃も含めて吸引してしまうことで、光源装置ＵＬの周囲空間への微小な塵埃の飛散を防止している。Furthermore, with respect to supplying cooling air to the lead wire sealing attachment portion RH, a configuration in which cooling air is blown to the lead wire sealing attachment portion RH to cool it is also conceivable. The minute dust that scatters and floats from objects will be scattered in the surrounding space. This needs to be avoided as much as possible in an environment where dust scattering is particularly problematic in the light source device UL.
Therefore, as described above, the cooling air for cooling the lead wire sealing attachment portion RH is formed by the intake air by the intake means, and the light source device UL is sucked by including the fine dust. Prevents the scattering of minute dust into the surrounding space.

〔別実施形態〕
以下、本発明の別実施形態を列記する。
（１）上記実施の形態では、リード線封止取付部ＲＨを冷却する冷却風は発光管１のうちのリード線封止取付部ＲＨのみを冷却対象とするように通風経路が形成されている場合を例示しているが、その冷却風の通風経路において、リード線封止取付部ＲＨの下流側に発光管１の光（紫外線）出射領域を位置させて、その部分も併せて冷却対象とするようにしても良い。
（２）上記実施の形態では、冷却対象であるリード線封止取付部ＲＨの通風経路上流側に冷却用部材ＣＭの配置箇所を位置させるについて、保持部材２６の細孔２６ｃを通風経路として構成する場合を例示しているが、例えば、保持部材２６内の通風経路を螺旋状に形成する等して、冷却用部材ＣＭ内でより長い通風経路を形成して、冷却風に対する冷却効果をより向上させるようにしても良い。
（３）上記実施の形態では、発光管１として紫外線ランプを例示しているが、紫外線以外の各種の波長の発光管１についても本発明を適用できる。[Another embodiment]
Hereinafter, other embodiments of the present invention will be listed.
(1) In the above embodiment, the ventilation path is formed so that the cooling air that cools the lead wire sealing attachment portion RH only cools the lead wire sealing attachment portion RH of the arc tube 1. Although the case is illustrated, in the ventilation path of the cooling air, the light (ultraviolet) emission region of the arc tube 1 is positioned on the downstream side of the lead wire sealing attachment portion RH, and the portion is also to be cooled. You may make it do.
(2) In the above-described embodiment, the arrangement position of the cooling member CM is positioned on the upstream side of the ventilation path of the lead wire sealing mounting portion RH that is the object of cooling, and the pore 26c of the holding member 26 is configured as the ventilation path. However, for example, a longer ventilation path is formed in the cooling member CM by, for example, forming the ventilation path in the holding member 26 in a spiral shape, thereby further improving the cooling effect on the cooling air. You may make it improve.
(3) Although the ultraviolet lamp is illustrated as the arc tube 1 in the above embodiment, the present invention can also be applied to the arc tube 1 having various wavelengths other than ultraviolet rays.

本出願は、２００７年４月２５日出願の日本特許出願（特願２００７−１１５４１６）に基づくものであり、その内容はここに参照として取り込まれる。   This application is based on a Japanese patent application (Japanese Patent Application No. 2007-115416) filed on Apr. 25, 2007, the contents of which are incorporated herein by reference.

Claims (2)

発光管と、その発光管の周囲を取り囲む状態に配置されて前記発光管を冷却する冷却用部材とが備えられた光源装置であって、
前記発光管に、電極用リード線を封止状態で取付けるリード線封止取付部が備えられ、
前記リード線封止取付部を冷却対象とする冷却風の通風経路が形成され、
その通風経路における前記リード線封止取付部の少なくとも上流側に前記冷却用部材の配置箇所が位置し、且つ、前記リード線封止取付部よりも前記通風経路の上流側に前記発光管の他の部分が位置しないように配置されて、前記冷却用部材に形成された貫通孔からなる通風孔により冷却された状態の冷却風が前記リード線封止取付部の存在位置を通過するように構成されており、かつ前記冷却風は、前記発光管に対しては、前記発光管における前記リード線封止取付部のみを冷却対象とするように通風経路が形成されている光源装置。A light source device provided with an arc tube and a cooling member arranged to surround the arc tube and cooling the arc tube;
The arc tube is provided with a lead wire sealing attachment portion for attaching an electrode lead wire in a sealed state,
A ventilation path of cooling air is formed with the lead wire sealing mounting portion as a cooling target,
The cooling member is disposed at least upstream of the lead wire sealing attachment portion in the ventilation path, and the arc tube is located upstream of the lead wire sealing attachment portion in the ventilation path. The cooling air in a state of being cooled by a ventilation hole made of a through hole formed in the cooling member is passed through the position where the lead wire sealing mounting portion is present. A light source device in which a ventilation path is formed with respect to the arc tube so that only the lead wire sealing mounting portion of the arc tube is cooled . 前記発光管は、長手方向の両端部に一対で前記リード線封止取付部が備えられた直管形状に形成され、The arc tube is formed in a straight tube shape with a pair of the lead wire sealing attachment portions at both ends in the longitudinal direction,
前記冷却用部材は、前記発光管の周囲を取り囲む状態に配置された水冷ジャケットにて構成され、  The cooling member is composed of a water cooling jacket disposed in a state surrounding the arc tube,
前記水冷ジャケットにおける前記リード線封止取付部付近の部材に、前記冷却風の通風経路を構成する通風孔が形成されている請求項１記載の光源装置。  The light source device according to claim 1, wherein a ventilation hole that forms a ventilation path of the cooling air is formed in a member in the vicinity of the lead wire sealing attachment portion in the water cooling jacket.
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