JP5189469B2 - Eddy current inspection probe and eddy current inspection device - Google Patents

Description

  The present invention relates to an eddy current flaw detection probe and an eddy current inspection device, and more particularly to a suitable eddy current flaw detection probe and eddy current inspection device for inspecting a curved surface of a narrow portion.

  In the eddy current flaw detection test, an alternating current is applied to the coil to generate an alternating magnetic field, and the test object is irradiated with the generated alternating magnetic field, and changes in cracks and materials (conductivity, permeability) on the surface of the object to be inspected. This is a non-destructive inspection method in which the change in magnetic field distribution caused by the above is evaluated by the difference in signal from the normal part recorded separately. Since it can be measured without contact, it can be applied to inspection of narrow spaces and complex curved surfaces.However, if the distance between the coil and the object to be inspected changes, noise called lift-off noise is generated and the signal to be detected, for example, It may be difficult to distinguish the signal from the crack. For this reason, it is desirable to maintain close contact or a constant distance between the coil and the object to be inspected.

  In an inspection in a narrow portion, a sensor feeding device that inserts a sensor into a narrow portion by installing a sensor at the tip of a plate that can be inserted into the narrow portion is known (for example, see Patent Document 1).

  In addition, an eddy current flaw detection probe having a coil fixed to a flexible substrate is used for an eddy current flaw detection test of a metal structure having a curved surface, and a pressing means for a curved surface portion using an elastic body is used. In addition, an eddy current flaw detection probe that reduces lift-off noise is known (see, for example, Patent Document 2).

JP-A-6-207927 JP 2006-194661 A

  However, in the sensor feeding device described in Patent Document 1, the sensor installed at the tip of the plate can give a sufficient pressing force to the flat surface, but a sufficient pressing force to the curved surface and the flat surface of the narrow portion. It is difficult to apply pressure, and lift-off noise due to unevenness on the inspection surface is generated, which may prevent accurate flaw detection.

  Further, in the eddy current flaw detection probe described in Patent Document 2, the probe is brought into close contact with the inspection surface by the pressing force from the probe insertion direction. It is difficult to give a proper pressing force. Furthermore, since the probe is fed by the movement of the arm connected to the elastic body, there is a problem that inspection with a wide flaw detection area cannot be performed.

  An object of the present invention is to provide an eddy current flaw detection probe and an eddy current inspection apparatus that can closely contact and follow a narrow and complicated curved inspection surface and can inspect a wide area.

(1) In order to achieve the above object, the present invention is an eddy current flaw detection probe having a plurality of coils fixed to a flexible substrate, which is scanned in close contact with the surface of an object to be inspected. In order to send the flexible substrate in a direction different from the scanning direction of the conductive substrate, the flexible substrate is provided with a belt that is stretched in a V shape by a rotating roller and is formed by laminating a plurality of layers of polyimide films. It is attached to the outer periphery of the belt, and comprises pressing means for simultaneously pressing the belt against the curved surface and flat surface of the object to be inspected from the inner peripheral side to the outer peripheral side of the belt .
With this configuration, it is possible to closely contact and follow the narrow and complicated curved inspection surface, and to inspect a wide area.

( 2 ) In the above (1), preferably, the feeding means is bonded to the flexible substrate to which a plurality of coils are fixed, and is arranged in a direction different from the scanning direction, and the belt can be moved. And a plurality of rotating rollers that contact the belt and guide the feeding direction, and a main body that holds the rotating shafts of these rollers.

( 3 ) In the above (1), preferably, the feeding means includes position holding means for holding the belt in a fixed position, and the position holding means includes a plurality of holes provided in the belt feeding direction. The rotating roller provided with projections that fit into the plurality of holes on the contact surface with the belt, and a main body that guides the feeding direction of the probe adhered to the belt.

( 4 ) In order to achieve the above object, the present invention provides an eddy current flaw detection probe having a plurality of coils fixed to a flexible substrate, and the eddy current flaw detection probe in close contact with the surface of an object to be inspected. An eddy current inspection apparatus having scanning means for scanning and a display unit for displaying a flaw detection signal from a detection coil among the coils, wherein the eddy current flaw detection probe is different from a scanning direction of the flexible substrate. In order to feed the flexible substrate in the direction, a belt is formed which is stretched in a V shape by a rotating roller and is formed by laminating a plurality of polyimide films, and the flexible substrate is attached to the outer periphery of the belt. The belt comprises pressing means for simultaneously pressing the belt against the curved surface and the flat surface of the object to be inspected from the inner circumference side toward the outer circumference side .
With this configuration, it is possible to closely contact and follow the narrow and complicated curved inspection surface, and to inspect a wide area.

  According to the present invention, it is possible to closely contact and follow a narrow and complicated inspection surface, and to inspect a wide area.

Hereinafter, the configuration and operation of an eddy current flaw detection probe and an eddy current inspection apparatus according to an embodiment of the present invention will be described with reference to FIGS.
First, the configuration of the eddy current flaw detection probe according to the present embodiment will be described with reference to FIGS. 1 and 2.
FIG. 1 is a front view showing a configuration of an eddy current flaw detection probe according to an embodiment of the present invention. FIG. 2 is an exploded perspective view showing the configuration of the eddy current flaw detection probe according to the embodiment of the present invention. 1 and 2, the same reference numerals indicate the same parts.

  As shown in FIG. 1, the eddy current flaw detection probe 1 includes a flexible substrate 3 that faces the surface of an inspection object 2. Here, as shown in FIG. 2, a plurality of coils 4 are fixed to the flexible substrate 3. As shown in FIG. 1, the eddy current flaw detection probe 1 includes an elastic body 5 that closely contacts a coil 4 fixed to a flexible substrate 3 to the inspected object 2 side, and a belt 6 that is bonded to the elastic body 5. And a pressing means 7 for pressing the coil 4 toward the object 2 to be inspected. Further, the eddy current flaw detection probe 1 includes a feeding means 13 for feeding the belt 6 by the rotating roller 9 and the rotating roller 10. As shown in FIG. 2, a motor 8 is connected to the rotating roller 10.

  For example, the flexible substrate 3 is formed by laminating a plurality of polyimide films. The flexible substrate 3 includes a printed wiring, and the coil 4 and an external measurement device connected to the eddy current flaw detection probe 1 are electrically connected.

  As the coil 4, a coil wound with a copper wire is bonded to the flexible substrate 3, or a coil that can be used as a coil by applying a printed wiring of the flexible substrate 3 in a spiral shape.

  The elastic body 5 is formed on a rectangular parallelepiped with a polyurethane rubber sponge, for example, and accommodates the coil 4 on the side facing the flexible substrate 3.

  Next, the configuration of the feeding means 13 will be described.

  The belt 6 uses, for example, a flexible substrate formed by laminating a plurality of layers of polyimide films, a plastic chain, a caterpillar, and the like, and is engaged with rotating rollers 9, 10, 11, and 12. The belt 6 is stretched in a V shape by a rotating roller 11 and has a shape that can be easily inserted into a narrow portion. The rotating roller 10 is mechanically connected to a power source such as the motor 8 shown in FIG. 2, and the rotating roller 9 or 10 is rotated by this power source to feed the belt 6. As shown in FIG. 2, holes 15 are provided in the belt 6 at regular intervals in the belt feeding direction 14. A protrusion 16 for meshing with a hole 15 provided in the belt 6 is provided on a contact surface between the rotary rollers 9 and 10 and the belt 6, and guides the belt 6 in the belt feeding direction 14, Misalignment caused by dragging of the belt 6 is prevented by power transmission of the motor 8 and scanning of the eddy current flaw detection probe 1. The material used for the rotating rollers 9 and 10 is, for example, a plastic material such as an acrylic resin material, a peak material, a polycarbonate, or a high-molecular polyethylene material that does not affect the magnetic field distribution generated from the coil 4 (no conductivity or magnetism). desirable.

  The motor 8 shown in FIG. 2 is for feeding the belt 6 by rotating the rotary roller 10, and even when a stepping motor that can accurately control the feed amount of the belt 6 or a binding force applied to the belt 6 is strong, A DC motor having a large starting torque capable of feeding the belt 6 is used. Although not shown, if a gear box is installed and a motor is connected via this gear box, the torque and speed of the belt feed can be adjusted.

  The rotating roller 11 is installed for the purpose of guiding the belt 6 in the belt feeding direction 14. Further, this portion is in the vicinity of the tip when the eddy current flaw detection probe 1 is inserted into the narrow portion, and also plays a role of pressing the coil 4. The rotating roller 11 may be provided with a protrusion 16 for meshing with the hole 15 of the belt 6, as with the rotating rollers 9 and 10, but the protrusion 16 may locally increase the pressure on the coil 4. Therefore, the coil 4 may be deformed. Therefore, the rotation roller 11 does not have to be provided with the protrusion 16. The material used for the rotating roller 11 is an acrylic resin that does not affect the distribution of the magnetic field generated from the coil 4 (there is no conductivity and magnetism) because the distance from the coil 4 may be close in the actual inspection measurement. It is made of plastic materials such as wood, peak material, polycarbonate, and polymer polyethylene material.

  Next, the configuration of the belt slack adjusting means will be described.

  The rotating roller 12 is installed to automatically adjust the tension of the belt 6. Unlike the rotating rollers 9, 10, and 11, the position of the rotating shaft of the rotating roller 12 is movable. A support shaft 17 is provided in a direction orthogonal to the rotation axis of the rotating roller 12, and a spring 18 is inserted into the support shaft 17. The stop plate 20 is provided with a through hole 19 having a diameter larger than the shaft diameter of the support shaft 17 and smaller than the diameter of the spring 18. The support shaft 17 into which the spring 18 is inserted passes through the through hole 19 of the stop plate 20.

  As shown in FIG. 2, the rotating shafts of the stop plate 20 and the roller 12 are inserted into a holding hole 22 and a support hole 23 provided in a main body 21 made of two plates, and sandwiched from both sides, so that the eddy current flaw detection probe 1 To keep the position. At that time, the support hole 23 that supports the rotation shaft of the rotation roller 12 is a long hole parallel to the support shaft 17 supported by the stop plate 20 so that the position of the rotation shaft of the rotation roller 12 can be moved.

  The belt 6 is hung on the opposite side of the rotating roller 12 from the support shaft 17 and has a function of keeping the belt 6 tight by utilizing the repulsive force of the spring 18. The tension of the belt 6 changes depending on the degree to which the belt 6 is pressed by the pressing means 7. That is, as shown in FIG. 1, when the angle of the narrow portion is large, the tension of the belt 6 by the pressing means 7 becomes strong, and when the angle of the V-shaped narrow portion as described later in FIG. 5 is small, The tension of the belt 6 by the pressing means 7 is weakened. Since the tension of the belt 6 changes depending on the angle of the narrow portion as described above, the tension is automatically adjusted even when the tension of the belt 6 is weakened by providing the belt looseness adjusting means. As a result, the engagement of the projections 16 of the 10 and the holes 15 provided in the belt 6 is maintained, and the power from the motor 8 can be transmitted to the belt 6. On the contrary, since the tension is automatically adjusted when the tension of the belt 6 becomes strong, the engagement between the protrusion 16 of the rotating rollers 9 and 10 and the hole 15 provided in the belt 6 is maintained. Can be transmitted to the belt 6.

  Next, the configuration of the pressing means 7 will be described.

  The belt 6 bonded to the elastic body 5 is pressed by the movable block 24. A spring 26 is inserted between the fixed block 25 installed inside the eddy current flaw detection probe 1 and the movable block 24. The positions of both ends of the spring 26 are fixed by holes 27 provided in the movable block 24 and the fixed block 25. A force is applied to the movable block 24 toward the outside of the eddy current flaw detection probe 1 by the spring 26 or the damper 150, and the coil 4 is pressed against the surface of the inspection object 2 via the belt 6.

  The movable block 24 is made of, for example, a plastic material such as an acrylic resin material, a peak material, a polycarbonate, or a polymer polyethylene material that does not affect the distribution of the magnetic field generated from the coil 4 (has no conductivity and magnetism). On the side surface of the movable block 24, a protrusion 28 is provided to enable the coil 4 to be pushed from the inspection object 2 side and to move by the repulsive force of the spring 26 and to be supported by the main body 21. The protrusion 28 can be inserted into a long hole 29 provided in the main body 21 shown in FIG. 2, and serves as a guide for the moving range of the movable block 24. By making the longitudinal direction of the long hole 29 the same as the pressing direction, the repulsive force by the spring 26 can be efficiently used as the pressing force to the coil 4.

  The fixed block 25 is made of, for example, a plastic material such as an acrylic resin material, a peak material, a polycarbonate, or a polymer polyethylene material that does not affect the distribution of the magnetic field generated from the coil 4 (has no electrical conductivity or magnetism). The fixing block 25 is fixed to the main body 21 by a method such as bonding or screwing (not shown), and serves to receive the repulsive force of the spring 26. If the shape of the fixed block is parallel to the pressing surface and the longitudinal direction of the long hole 29 is the same as the pressing direction, the repulsive force by the spring 26 can be efficiently used as the pressing force to the coil 4.

  The main body 21 that fixes or supports the components constituting the eddy current flaw detection probe 1 of the present embodiment does not affect the magnetic field distribution generated from the coil 4 (no conductivity and magnetism), an acrylic resin material, a peak material, and a polycarbonate It is composed of two sheets of plastic material such as polymer polyethylene material. The main body 21 has a sharp point at the tip according to the surface shape of the narrow part, has a holding hole or a support hole into which each part can be inserted, and is fixed by sandwiching the part with the two plates 21. Or support. The rotating shafts of the rotating rollers 9, 10, 11 are respectively inserted into the holding holes 30, 31, 32 shown in FIG. 2, the rotating shaft of the rotating roller 12 is inserted into the support hole 23, and the stopper plate 20 is held. The projection 28 inserted into the hole 22 and provided on the movable block 24 is inserted into the elongated hole 29 and is held or supported. The fixing block 25 is fixed to the main body 21 by bonding or screwing (not shown).

Next, the state when the coil of the eddy current flaw detection probe according to the present embodiment is sent will be described with reference to FIG.
FIG. 3 is a front view showing a state when the coil of the eddy current flaw detection probe according to the embodiment of the present invention is sent. 1 and 2 indicate the same parts.

  The belt 6 is hooked on rotating rollers 9, 10, 11, and 12, and the rotating roller 10 is mechanically connected to a power source such as a motor 8, and the rotating roller 10 is rotated by the power source to the elastic body 5. The bonded belt 6 is fed, and the plurality of coils 4 fixed to the flexible substrate 3 attached to the elastic body 5 move along the belt feeding direction 14.

  In the eddy current flaw detection probe 1 of the present embodiment, the movement of the position of the coil 4 for wide area flaw detection in the curved surface inspection of the narrow portion can be executed by the belt feeding means 13 while being inserted into the narrow portion.

Next, with reference to FIG. 4 and FIG. 5, a state at the time of narrow surface curved surface inspection using the eddy current flaw detection probe according to the present embodiment will be described.
4 and 5 are front views showing a state in which a narrow curved surface is inspected using the eddy current flaw detection probe according to the embodiment of the present invention. 1 and 2 indicate the same parts.

  FIG. 4 shows a pre-stage where the eddy current flaw detection probe 1 of the present embodiment is inserted into the inspection object 2 having a narrow shape and the coil 4 is completely brought into close contact, and FIG. The state which pushed in to the innermost part of the to-be-inspected object 2 which has a narrow shape is shown.

  In FIG. 4, the eddy current flaw detection probe 1 according to the present embodiment is pushed toward the insertion direction 50 from the narrow entrance at the top of the drawing. The protrusion 28 of the movable block 24 supported by the long hole 29 and applied with the force toward the outside of the eddy current flaw detection probe 1 by the repulsive force of the spring 26 is in a state where the coil 4 is not pushed into the inspection object 2. The long hole 29 provided in the main body 21 is located closest to the inspection object 2. As a result, the movable block 24 is positioned closest to the inspection object 2 side of the eddy current flaw detection probe 1, and the belt 6 is positioned closer to the inspection object 2 side.

  When the protrusions 28 of all the movable blocks 24 are located closest to the inspection object 2 side of the eddy current flaw detection probe 1 in the long holes 29, the eddy current flaw detection probe 1 of the present embodiment is in the state having the widest width. . When the width of the eddy current flaw detection probe 1 is increased, it is necessary to increase the length of the belt 6 between the movable block 24 and the rotating rollers 9, 10, 11.

  Therefore, the length of the belt 6 between the rotating roller 12 and the rotating rollers 9 and 1 is used. When the width of the eddy current flaw detection probe 1 is increased, the length of the belt 6 is increased between the movable block 24 and each of the rotating rollers 9, 10, 11. The length of the belt 6 in between is shortened. Since the position of the rotating shaft of the rotating roller 12 is movable according to the support hole 23 that supports the rotating shaft of the rotating roller 12, the position where the belt 6 is caught by the rotating roller 12 changes, and the rotating roller 12 and the rotating rollers 9, 10 are changed. It is possible to shorten the length of the belt 6 between the two.

  Further, the rotation roller 12 is provided by a stop plate 20 provided with a support shaft 17 in a direction orthogonal to the rotation axis of the rotation roller 12, a spring 18 inserted into the support shaft 17, and a through hole 19 through which the support shaft passes. The position of the belt 6 is always kept using the repulsive force of the spring 18.

  In the case shown in FIG. 4, the length of the belt 6 between each of the rotating roller 12 and the rotating rollers 9 and 10 is shortened, so that the position of the rotating roller 12 is close to the rotating rollers 9 and 10 and the eddy current flaw detection probe. 1 and the spring 18 contracts.

  In FIG. 5, the eddy current flaw detection probe 1 of the present embodiment is pushed in from the narrow entrance at the top of the drawing in the insertion direction 50. The protrusion 28 of the movable block 24 supported by the long hole 29 and applied with a force toward the outside of the eddy current flaw detection probe 1 by the repulsive force of the spring 26 is in a state where the coil 4 is pushed into the object 2 to be inspected. The long hole 29 provided in the main body 21 is located on the center side of the main body 21. Accordingly, the movable block 24 is positioned inside the eddy current flaw detection probe 1.

  When the protrusions 28 of all the movable blocks 24 are located closest to the center of the main body 21 in the elongated hole 29, the eddy current flaw detection probe 1 of the present embodiment is in a state where the width becomes narrow. When the width of the eddy current flaw detection probe 1 becomes narrow, it is necessary to shorten the length of the belt 6 between the movable block 24 and each of the rotating rollers 9, 10, 11.

  Therefore, the length of the belt 6 between the rotating roller 12 and the rotating rollers 9 and 10 is adjusted. When the width of the eddy current flaw detection probe 1 is reduced, the length of the belt 6 is shortened between the movable block 24 and each of the rotary rollers 9, 10, and 11, so that each of the rotary roller 12 and the rotary rollers 9 and 10 is provided. The length of the belt 6 in between is increased. Since the position of the rotating shaft of the rotating roller 12 is movable according to the support hole 23 that supports the rotating shaft of the rotating roller 12, the position where the belt 6 is caught by the rotating roller 12 changes, and the rotating roller 12 and the rotating rollers 9, 10 are changed. It is possible to increase the length of the belt 6 between the two.

  Further, the rotary roller 12 is provided by a stop plate 20 provided with a support shaft 17 in a direction orthogonal to the rotation axis of the rotary roller 12, inserting a spring 18 into the support shaft 17, and provided with a through hole 19 through which the support shaft 17 passes. The position of the belt 6 is always kept using the repulsive force of the spring 18.

  In the case shown in FIG. 5, since the length of the belt 6 between the rotating roller 12 and the rotating rollers 9 and 10 becomes longer, the position of the rotating roller 12 is far from the rotating rollers 9 and 10. 1 and the spring 18 extends. The spring 18 may be replaced with a damper 150 using air pressure or hydraulic pressure as shown in FIG. At this time, in order to supply air pressure and hydraulic pressure to each damper, the tube 151 is used to connect to a pump (not shown) installed outside the probe 1. The tube 151 is provided with a hole 152 or the like so as not to interfere with the functions of the other pressing means 7 and the feeding means 13, and is pulled out of the probe 1.

  With the configuration and operation described above, the belt 6 is able to function as the belt feeding means 13 without being caught on the rotating rollers 9, 10, and 11.

  When the moving range of the movable block 24 is widened or the width of the main body 21 of the eddy current flaw detection probe 1 is further narrowed, the rotating block 11 side and the rotating roller 11 of the movable block 24 are physically connected to each other. There is a high possibility of causing serious interference. Therefore, the problem can be solved by making the tip 33 of the movable block 24 into a thin leaf spring shape. The leaf spring 33 produces a pressing effect on the belt 6 due to the elasticity of the movable block 24.

  When the leaf spring 33 is provided on the movable block 24, the belt 6 may be damaged at the tip of the leaf spring 33. In order to solve this problem, the belt 6 can be prevented from being damaged by devising the shape of the tip 34 of the leaf spring 33.

Next, the configuration of the movable block 24 used in the pressing means 7 of the eddy current flaw detection probe according to the present embodiment will be described with reference to FIG.
FIG. 7 is a front view showing the configuration of the movable block used for the pressing means of the eddy current flaw detection probe according to the embodiment of the present invention. 1 and 2 indicate the same parts.

  FIG. 7 shows an example of the movable block 24 in which the shape of the tip 34 of the leaf spring 33 is changed.

  FIG. 7A is an enlarged view of the movable block 24 shown in FIG. The tip of the leaf spring 33 sown at the end of the movable block 24 is pointed. The tip of the leaf spring 33 may scratch the belt 6 when the coil 4 is pressed.

  Here, for example, when a material formed by laminating a plurality of polyimide films as the material of the belt 6 is used, its rigidity is not so high, but when a plastic chain or a caterpillar is used, May damage the belt. In that case, it is set as the shape of the leaf | plate spring shown in FIG.7 (B) or FIG.7 (C).

  The tips of the leaf springs of the movable blocks 24B and 24C shown in FIGS. 7B and 7C have a curved surface, and the belt 6 has high lubricity, so the possibility of damage to the belt is reduced. In particular, the tip 34C of the leaf spring of the movable block 24C is elastic to the tip and saves space, so that it is possible to reduce physical interference with the rotating roller 11 and the other movable block 24B.

  On the other hand, the leaf spring having the structure shown in FIG. 7A can have a longer effective length in contact with the belt than the leaf springs shown in FIGS. 7B and 7C. Accordingly, the pressing force acting on the belt 6 can be increased.

Next, the configuration of the eddy current flaw detection apparatus using the eddy current flaw detection probe according to the present embodiment will be described with reference to FIG.
FIG. 7 is a perspective view showing a configuration of an eddy current flaw detection apparatus using an eddy current flaw detection probe according to an embodiment of the present invention. 1 and 2 indicate the same parts.

  The eddy current flaw detector 100 of this embodiment controls the scanner device 101 that scans the surface of the inspection object 2 with the eddy current probe, and the motor 8 in the scanner device 101 and the feeding means 13 described in FIG. 1 and FIG. And a display device 103 for displaying the flaw detection result.

  The scanner device 101 includes a pair of frame bodies 105A and 105B provided with a fixture 104 that is fixed to the surface of the inspection object 2 with a suction cup or a magnet, and guide rails 106 installed across the frame bodies 105A and 105B. A screw rod 107 pivotally supported between the frame bodies 105A and 105B and installed in parallel with the guide rail 106, a motor 108 for rotationally driving the screw rod 107, and a scanner head guided by the guide rail 106 and screwed into the screw rod 107. 109 and an eddy current flaw detection probe 1 supported by a scanner head 109 via a pressing spring 110.

  The control device 102 sets a computer 111 as means for setting flaw detection conditions for the plurality of coils 4 of the eddy current flaw detection probe 1, a transmission circuit 112 that generates a voltage according to a command from the computer 111, and a voltage of the transmission circuit 112. The phase shifter 114 inputs the flaw detection signal from the detection coil of each coil 4 with reference to the voltage of the transmission circuit 112, and the signal from the phase shifter 114. Are provided with an A / D converter 115 for A / D converting the signal and a memory 116 for sequentially storing signals from the A / D converter 115 as electronic data.

  The display device 103 displays the electronic data stored in the memory 116 based on a command from the computer 111.

  The eddy current flaw detector 100 having the above-described configuration rotates the screw rod 107 by driving the motor 108 according to a command from the computer 111 after completing the flaw detection of each coil 4. As the screw rod 107 rotates, the scanner head 109 moves along the guide rail 106 on the surface of the device under test 2. When the coil 4 is moved to a position different from the next flaw detection, that is, the moving direction (scanning direction) of the scanner device 101, the control device 102 controls the motor 8 in the feeding means of the eddy current flaw detection probe 1 of the present invention. The belt 6 is fed in the belt feeding direction 14 using the motor as a power source.

As described above, according to the present embodiment, a wide range of flaws can be detected even on an inspection surface in which a curved surface and a flat surface of a narrow portion are mixed, and the coil can closely contact and follow the inspection surface, so that accurate flaw detection can be performed.

It is a front view which shows the structure of the eddy current test probe by one Embodiment of this invention. It is a disassembled perspective view which shows the structure of the eddy current test probe by one Embodiment of this invention. It is a front view which shows a state when the coil of the eddy current test probe by one Embodiment of this invention is sent. It is a front view which shows the state at the time of a narrow part curved surface test | inspection using the eddy current test probe by one Embodiment of this invention. It is a front view which shows the state at the time of a narrow part curved surface test | inspection using the eddy current test probe by one Embodiment of this invention. It is a front view which shows the structure of the press source used for a press means using the eddy current test probe by one Embodiment of this invention. It is a front view which shows the structure of the movable block used for the press means of the eddy current test probe by one Embodiment of this invention. It is a perspective view which shows the structure of the eddy current flaw detector using the eddy current flaw probe by one Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Eddy current test probe 2 ... Test object 3 ... Flexible board 4 ... Coil 5 ... Elastic body 6 ... Belt 7 ... Pressing means 8 ... Motor 9, 10, 11, 12 ... Rotating roller 13 ... Feeding means 14 ... Belt feed direction 15 ... hole 16 ... projection 17 ... support shaft 18 ... spring 19 ... through hole 20 ... stop plate 21 ... main body 22 ... holding hole 23 ... support hole 24 ... movable blocks 24A, 24B, 24C ... movable block 25 ... fixed Block 26 ... Spring 27 ... Hole 28 ... Protrusion 29 ... Slots 30, 31, 32 ... Holding hole 33 ... Plate spring 50 ... Pushing direction 100 ... Eddy current flaw detector 101 ... Scanner device 102 ... Control device 103 ... Display device 104 ... Fixing tools 105A, 105B ... frame 106 ... guide rail 107 ... screw rod 108 ... motor 109 ... scanner head 110 ... pressing spring 111 ... computer 112 ... transmitting circuit 11 ... exciting circuit 114 ... phaser 115 ... A / D converter 116 ... memory 150 ... damper 151 ... tube 152 ... hole

Claims (4)

An eddy current flaw detection probe having a plurality of coils fixedly attached to a flexible substrate, scanned in close contact with the surface of an object to be inspected,
In order to send the flexible substrate in a direction different from the scanning direction of the flexible substrate , the belt is stretched in a V shape by a rotating roller and formed by laminating a plurality of polyimide films.
The flexible substrate is attached to the outer periphery of the belt,
An eddy current flaw detection probe comprising pressing means for simultaneously pressing the belt against a curved surface and a flat surface of an object to be inspected from an inner peripheral side to an outer peripheral side of the belt . The eddy current flaw detection probe according to claim 1,
The feeding means is
A belt that is bonded to the flexible substrate to which a plurality of coils are fixed and disposed in a direction different from the scanning direction;
A motor that enables movement of the belt;
A plurality of rotating rollers that transmit power from the motor and simultaneously contact the belt and guide the feed direction;
An eddy current flaw detection probe comprising a main body for holding the rotation shafts of these rollers. The eddy current flaw detection probe according to claim 1,
The feeding means includes position holding means for holding the belt in a fixed position;
The position holding means includes a plurality of holes provided in the belt feeding direction, a rotating roller provided with projections that fit into the plurality of holes on a contact surface with the belt, and a probe bonded to the belt. An eddy current flaw detection probe comprising a main body for guiding a feeding direction. An eddy current flaw detection probe having a plurality of coils fixed to a flexible substrate, scanning means for scanning the eddy current flaw detection probe in close contact with the surface of the object to be inspected, and a flaw detection signal from a detection coil among the coils An eddy current inspection apparatus having a display unit for displaying
The eddy current flaw detection probe is
In order to send the flexible substrate in a direction different from the scanning direction of the flexible substrate , the belt is stretched in a V shape by a rotating roller and formed by laminating a plurality of polyimide films.
The flexible substrate is attached to the outer periphery of the belt,
An eddy current inspection apparatus comprising: a pressing unit that simultaneously presses the belt against a curved surface and a flat surface of an object to be inspected from an inner peripheral side to an outer peripheral side of the belt .

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